Transport device and method for controlling transport device

Abstract

A transport device (1) comprises: a batch-type transport robot (20) that is capable of collectively loading and unloading a plurality of substrates to and from a cassette placed on a load port (10); a single-wafer-type transport robot (30) that is capable of loading and unloading a substrate individually, or only one sheet, to and from the cassette; and a travel shaft (40) that extends from a position at which the batch-type transport robot (20) can load and unload the plurality of substrates to and from the cassette to a position at which the single-wafer-type transport robot (30) can load and unload the substrate to and from the cassette, the travel shaft (40) being shared by the batch-type transport robot (20) and the single-wafer-type transport robot (30).

Description

TRANSPORT DEVICE AND TRANSPORT DEVICE CONTROL METHOD

[0001] The present invention relates to a transport device and a method for controlling the transport device.

[0002] 2. Description of the Related Art Conventionally, a batch-type transfer device has been known which includes a plurality of chuck sections, each of which chucks a substrate, thereby transferring a plurality of substrates at once.

[0003] For example, Patent Document 1 discloses a transport robot that includes a plurality of chuck units that chuck each of a plurality of substrates housed in a cassette, and transports a plurality of substrates at once.

[0004] On the other hand, there are substrate processing apparatuses that process substrates one by one. To transport substrates to such substrate processing apparatuses, a single-wafer transport apparatus that transports substrates one by one is known.

[0005] For example, Patent Document 2 discloses a transport device that includes a single-wafer transport robot that has two chuck sections, each of which chucks only one substrate, and is equipped with arms that move each chuck section independently.

[0006] The transfer device described in Patent Document 2 includes five chuck units, each of which chucks a substrate, and further includes a batch-type transfer robot that transfers five substrates at a time. The batch-type transfer robot removes five substrates from a cassette, transports them to a port for receiving and transferring the substrates, and places five more substrates on the port. In contrast, the single-wafer transfer robot chucks the five substrates placed on the port one by one and transports them to a substrate processing apparatus.

[0007] JP 2005-347315 A JP 2017-224658 A

[0008] In a transfer device, it is desirable not only to simultaneously remove multiple substrates from a cassette using the same load port, but also to remove substrates one by one from the cassette. However, as is clear from the configuration of the transfer device described in Patent Document 2, providing a batch-type transfer robot and a single-wafer-type transfer robot in the transfer device increases the size of the transfer device. As a result, the installation space becomes large.

[0009] The present invention has been made to solve the above-mentioned problems, and aims to provide a transport device and a control method for the transport device that can transport substrates using a robot that transports multiple substrates at once and a robot that transports substrates individually, and that is small and space-saving.

[0010] In order to achieve the above object, a transport device according to a first aspect of the present invention is characterized by comprising: a first robot capable of collectively loading and unloading a plurality of substrates from a cassette placed on a load port; a second robot capable of loading and unloading the substrates individually or one by one from the cassette; and a travel path shared by the first robot and the second robot, which extends to a position where the first robot can load and unload the plurality of substrates from the cassette and to a position where the second robot can load and unload the substrate from the cassette.

[0011] The travel path may be a travel axis that allows the first robot and the second robot to travel along an axis extending in one direction.

[0012] The transport device further includes a first sensor that measures the position of each of the first robot and the second robot in the extension direction of the travel path, and a controller that controls the travel of each of the first robot and the second robot, wherein when either the first robot or the second robot is traveling on the travel path, the controller may calculate a distance between the first robot and the second robot based on the positions of the first robot and the second robot measured by the first sensor, and stop the travel of either the first robot or the second robot when the calculated distance is less than a first threshold value.

[0013] The first sensor includes: a linear scale extending along the travel path; a first detector provided on the first robot for detecting the position of the linear scale in the extension direction; and a second detector provided on the second robot for detecting the position of the linear scale in the extension direction, and the first detector and the second detector may share the same linear scale for detecting position.

[0014] The transport device may further include at least one second sensor provided on at least one of the first robot and the second robot, the second sensor detecting that the first robot and the second robot have come closer than a second threshold value, and the controller may stop the travel of either the first robot or the second robot when either the first robot or the second robot is traveling on the travel path and the at least one second sensor detects that the first robot and the second robot have come closer than the second threshold value.

[0015] The second threshold may be equal to or less than the first threshold.

[0016] The controller may, when the first robot is positioned at a first point on the travel path, cause the second robot to travel within a first section of the travel path away from the first point, and may, when the second robot is positioned at a second point on the travel path that is different from the first point, cause the first robot to travel within a second section of the travel path away from the second point.

[0017] The first threshold may be equal to or less than a value of the distance from the first point to the first section and a value of the distance from the second point to the second section.

[0018] The conveying device may further include a linear motor having a stator provided on the running path, a first movable element supporting the first robot and movable relative to the stator, and a second movable element supporting the second robot and movable relative to the stator.

[0019] A control method for a transport device according to a second aspect of the present invention is a control method for a transport device comprising: a first robot capable of collectively loading and unloading a plurality of substrates from a cassette placed on a load port; a second robot capable of loading and unloading the substrates individually or one by one from the cassette; and a travel path shared by the first robot and the second robot, extending to a position where the first robot can load and unload the plurality of substrates from the cassette and to a position where the second robot can load and unload the substrate from the cassette, characterized in that the control method comprises the steps of: stopping the first robot at a first point on the travel path, and then running the second robot within a first section of the travel path away from the first point; and stopping the second robot at a second point on the travel path, different from the first point, and then running the first robot within a second section of the travel path away from the second point.

[0020] According to the configuration of the present invention, the travel path extends to a position where the first robot can load and unload multiple substrates from the cassette and to a position where the second robot can load and unload substrates from the cassette, and is shared by the first and second robots. As a result, substrates can be transported from the load port using the first and second robots. Furthermore, because the first and second robots do not have separate travel paths, the transport device is small and space-saving, even though it is equipped with the first and second robots.

[0021] It is a sectional view of the conveying device according to the embodiment of the present invention when cut on a horizontal plane. It is a perspective view of the conveying device according to the embodiment. It is a perspective view of a traveling axis provided in the conveying device according to the embodiment. It is a hardware configuration diagram of a controller provided in the conveying device according to the embodiment.

[0022] A conveying device and a method for controlling a conveying device according to an embodiment of the present invention will be described in detail below with reference to the drawings. In the drawings, identical or equivalent parts are designated by the same reference numerals. In the Cartesian coordinate system XYZ shown in the drawings, the direction in which the travel axis of the conveying device extends is the X-axis, the vertical direction is the Z-axis, and the direction perpendicular to the X-axis and Z-axis is the Y-axis. This coordinate system will be referenced as appropriate in the following description.

[0023] The transfer device according to the embodiment is a transfer device in which a batch-type transfer robot and a single-wafer-type transfer robot share a single travel axis in order to save space. The following describes the configuration of the transfer device according to the embodiment, taking as an example a transfer device that removes and transfers wafers from a FOUP, which is a type of cassette. First, the overall configuration of the transfer device will be described with reference to FIGS. 1 and 2 .

[0024] Fig. 1 is a cross-sectional view of a conveying device 1 according to an embodiment when cut along a horizontal plane. Fig. 2 is a perspective view of the conveying device 1. For ease of understanding, Fig. 2 shows the conveying device 1 in a state where the interior of the device can be seen, with the front cover of the device, the load port on the front of the device, and the cover on the left side omitted.

[0025] As shown in FIG. 1, the transfer device 1 includes a plurality of load ports 10, a batch transfer robot 20 that removes wafers from a FOUP (not shown) placed on the load port 10 and transfers them, and a single wafer transfer robot 30.

[0026] The load port 10 has a platform with a horizontal upper surface. A FOUP for accommodating wafers can be placed on this platform. Meanwhile, the outer periphery of the transfer device 1 is surrounded by a front panel 11, a right side panel 12, a rear panel 13, and a left side panel 14. A clean chamber is formed within the interior space by circulating dust-free air. Four loading / unloading ports (not shown) are formed in the front panel 11, aligned in the left-right direction. A load port 10 is provided at each of these loading / unloading ports. By placing a FOUP on the load port 10, the load port 10 supplies the wafers to be loaded to the loading / unloading port, or provides a storage location for wafers unloaded from the loading / unloading port.

[0027] The batch-type transfer robot 20 is disposed in the clean room. As shown in FIG. 2, the batch-type transfer robot 20 has chuck units 21, each of which chucks a wafer, the number of which is equal to the maximum number of wafers that can be accommodated in the FOUP. As a result, the batch-type transfer robot 20 can chuck all of the wafers accommodated in the FOUP at once. In other words, the batch-type transfer robot 20 can chuck all of the wafers accommodated in the FOUP.

[0028] The batch-type transfer robot 20 also has a drive unit (e.g., a motor) (not shown) that moves these chuck units back and forth and raises and lowers them all at once. The drive unit (not shown) of the batch-type transfer robot 20 moves the multiple chuck units into and out of the FOUP placed on the load port 10, and lifts up wafers accommodated in the FOUP using the multiple chuck units. The batch-type transfer robot 20 is a specific example of a first robot as defined in the claims.

[0029] In contrast, the single-wafer transfer robot 30, as shown in Fig. 2, has two chuck units 31, each of which chucks only one wafer. Each chuck unit 31 can move back and forth and left and right by a separate arm 32. Each arm 32 also has a drive unit (not shown) that raises and lowers the arms 32 together. With this configuration, the single-wafer transfer robot 30 takes in and out wafers stored in a FOUP one by one.

[0030] The single-wafer transfer robot 30 also has a drive unit (not shown) that rotates the two arms 32. Meanwhile, an aligner 33 that aligns the notch of a wafer and an inversion unit 34 that inverts the wafer are provided in the rear area of ​​the clean room of the transfer device 1. The single-wafer transfer robot 30 rotates the two arms 32 to supply a wafer to the aligner 33 or the inversion unit 34, or to remove a wafer from the aligner 33 or the inversion unit 34. The single-wafer transfer robot 30 is a specific example of a second robot as defined in the claims.

[0031] By including the batch-type transfer robot 20, the transfer device 1 can simultaneously remove multiple wafers housed in a FOUP at the load port 10 and transfer the wafers to another FOUP. Furthermore, by including the single-wafer transfer robot 30, the transfer device 1 can simultaneously remove wafers housed in a FOUP at the load port 10, perform processes such as notch alignment and front-to-back flipping on the wafers, and store the wafers one by one in another FOUP.

[0032] However, the above-described multiple load ports 10 are arranged in the left-right direction in front of the transfer device 1. Furthermore, the aligner 33 and the reversing unit 34 are arranged in the left-right direction in the rear area of ​​the clean room of the transfer device 1. For this reason, the batch-type transfer robot 20 and the single-wafer transfer robot 30 need to travel in the left-right direction. Therefore, it is conceivable to provide a travel axis extending in the left-right direction on each of the batch-type transfer robot 20 and the single-wafer transfer robot 30. However, in this case, the two travel axes would be lined up in the front-rear direction, and the space required to install these travel axes would become large.

[0033] Therefore, in the transfer device 1, the batch transfer robot 20 and the single wafer transfer robot 30 share one traveling axis 40. Next, the configuration of the traveling axis 40 provided in the transfer device 1 will be described with reference to FIG.

[0034] Fig. 3 is a perspective view of the traveling shaft 40 provided in the transfer device 1. Note that Fig. 3 shows the state in which the traveling shaft 40 is attached to the transfer device 1, and therefore also shows the base portions 25 and 35 that support the batch-type transfer robot 20 and the single-wafer-type transfer robot 30.

[0035] The traveling axis 40 is a component called a "traveling axis" because it allows the batch-type transfer robot 20 and the single-wafer-type transfer robot 30 to travel along an axis extending in one direction, specifically along the X-axis shown in FIG. 3 , and is also called a rail. The traveling axis 40 is a specific example of the traveling path referred to in the claims. Explaining its structure in detail, the traveling axis 40 is formed in the shape of a beam extending in the left-right direction, as shown in FIG. 3 . The traveling axis 40 is equipped with linear guides 41 and 42 and a linear motor 43.

[0036] Each of the linear guides 41, 42 extends linearly in the left-right direction. The linear guides 41, 42 are arranged at both vertical ends of the beam body of the traveling shaft 40, spaced apart in the vertical direction. Sliders 45, 46 are fitted to the linear guides 41, 42 so as to be slidable along the extension direction of the linear guides 41, 42. Furthermore, the sliders 45, 46 support the base unit 25 of the batch-type transfer robot 20 and the base unit 35 of the single-wafer transfer robot 30, respectively.

[0037] 3 omits the configuration of the batch transfer robot 20 above the base portion 25 and the configuration of the single-wafer transfer robot 30 above the base portion 35, but by providing such configurations, the linear guides 41 and 42 each slidably support the entire batch transfer robot 20 and the entire single-wafer transfer robot 30. A plurality of stators of a linear motor 43 are provided between the linear guides 41 and 42 to slide the batch transfer robot 20 and the single-wafer transfer robot 30 in the left-right direction.

[0038] Although not shown, the linear motor 43 is composed of multiple stators and first and second movers. Each of the multiple stators is formed of a permanent magnet. The multiple stators are arranged in the left-right direction on the beam body of the traveling axis 40. As a result, the north and south poles are alternately oriented toward the front side. Meanwhile, each of the first and second movers is composed of a core and a coil or a coil. The first and second movers are mounted on the sliders 45 and 46 described above.

[0039] In the linear motor 43, power is supplied separately to the coils of the first and second movers, causing the first and second movers to move separately in the arrangement direction of the multiple stators, or causing only the first or second mover to move. This causes the sliders 45 and 46 to slide separately, or only one of the sliders 45 and 46 to slide in the arrangement direction of the multiple stators. In other words, they slide in the extension direction of the traveling axis 40. As a result, when the linear motor 43 receives power supply, one or both of the batch-type transfer robot 20 and the single-wafer-type transfer robot 30 travel along the traveling axis 40.

[0040] In this way, the batch transfer robot 20 and the single wafer transfer robot 30 can travel along the same travel axis 40. The travel axis 40 extends to a position where both the batch transfer robot 20 and the single wafer transfer robot 30 can remove wafers from the FOUPs located on the load ports 10. In detail, as shown in FIG. 1 , the travel axis 40 passes through positions adjacent to the rear side of each of the load ports 10, so that both the batch transfer robot 20 and the single wafer transfer robot 30 can remove wafers from the FOUPs located on the load ports 10. Although the travel axis 40 extends through positions adjacent to the rear side of each of the load ports 10, both the batch transfer robot 20 and the single wafer transfer robot 30 share the same travel axis 40, which allows for a more compact and space-saving transfer apparatus 1.

[0041] However, if the batch transfer robot 20 and the single wafer transfer robot 30 travel along the same travel axis 40, there is a risk that the batch transfer robot 20 and the single wafer transfer robot 30 may come into contact with or collide with each other.

[0042] Therefore, the conveying device 1 includes a controller that controls the linear motor 43 based on the output of sensors such as a linear encoder and a proximity sensor. Next, the configuration of the conveying device 1 including the sensor and the controller will be described with reference to FIG.

[0043] Fig. 4 is a hardware configuration diagram of the controller 60 provided in the transfer device 1. For ease of understanding, Fig. 4 also illustrates various components such as sensors provided in the transfer device 1. Furthermore, driving units such as motors that drive the batch-type transfer robot 20 and the single-wafer-type transfer robot 30 are not illustrated.

[0044] As shown in Figure 4, the transport device 1 is equipped with position detectors 51, 52 that detect the positions of the batch transport robot 20 and the single-wafer transport robot 30, a proximity sensor 53 that detects when the batch transport robot 20 and the single-wafer transport robot 30 approach each other, and a controller 60 that controls the travel of the batch transport robot 20 and the single-wafer transport robot 30 based on the position detectors 51, 52 and the proximity sensor 53.

[0045] The position detectors 51 and 52 (also referred to as the first detector and the second detector) are components of a linear encoder (also referred to as the first sensor). Meanwhile, the linear scale 55 shown in FIG. 4 is also a component of the linear encoder. The position detectors 51 and 52 measure their own positions relative to the linear scale 55, thereby measuring their positions on the traveling axis 40.

[0046] Specifically, the position detector 51 is provided on the slider 45 shown in FIG. 3 that supports the batch-type transfer robot 20. The position detector 52 is provided on the slider 46 that supports the single-wafer transfer robot 30. The position detectors 51 and 52 face a linear scale 55 shown in FIG. 4. The linear scale 55, although not shown in the figure, is provided on the beam body of the traveling axis 40 and extends in the left-right direction. The position detectors 51 and 52 measure the positions in the extension direction of the linear scale 55, i.e., the positions relative to the left-right direction. As a result, the position detectors 51 and 52 measure the positions of the sliders 45 and 46 in the extension direction of the traveling axis 40. In this way, the position detectors 51 and 52 measure the positions of the batch-type transfer robot 20 and the single-wafer transfer robot 30 on the traveling axis 40. The position detectors 51 and 52 periodically measure these positions and transmit the measured position data to the controller 60 each time a measurement is performed.

[0047] On the other hand, as shown in FIG. 3 , the proximity sensor 53 is provided on the slider 45 supporting the batch-type transfer robot 20. It is located on the left side of the slider 45, i.e., the −X side. The slider 46 supporting the single-wafer transfer robot 30 is located on the −X side of the slider 45. The proximity sensor 53 outputs a proximity signal when one or both of the sliders 45, 46 slides, causing the slider 46 to approach the single-wafer transfer robot 30 by a distance greater than threshold A (referred to as a second threshold in the claims). In other words, the proximity sensor 53 outputs a proximity signal when one or both of the batch-type transfer robot 20 and the single-wafer transfer robot 30 travel along the travel axis 40, causing the batch-type transfer robot 20 and the single-wafer transfer robot 30 to approach each other by a distance greater than threshold A. The proximity sensor 53 is electrically connected to the controller 60 and outputs a proximity signal to the controller 60.

[0048] 4, the controller 60 includes a processor 61, a memory 62, and an interface 63. The processor 61, the memory 62, and the interface 63 are connected to each other via a bus 64.

[0049] The interface 63 enables the processor 61 and the memory 62 to communicate with drive units (not shown) of the batch transfer robot 20 and the single wafer transfer robot 30. The interface 63 also enables the processor 61 and the memory 62 to communicate with the position detectors 51 and 52, the proximity sensor 53, and the linear motor 43 described above.

[0050] The processor 61 and the memory 62 constitute a computer. The controller 60 performs various processes for controlling each part of the batch-type transfer robot 20 and the single-wafer-type transfer robot 30 by the processor 61 reading and executing various programs stored in the memory 62.

[0051] For example, the controller 60 performs various processes to prevent the batch-type transfer robot 20 and the single-wafer-type transfer robot 30 traveling on the same traveling axis 40 from coming into contact with or colliding with each other.

[0052] 1 , when the controller 60 causes the single-wafer transfer robot 30 to travel, the controller 60 determines whether the batch-type transfer robot 20 is stopped at a specific position P1 (referred to as a first point in the claims) at the right end of the travel axis 40, and if it determines that the batch-type transfer robot 20 is stopped, the controller 60 causes the single-wafer transfer robot 30 to travel within a section S1 (also referred to as a first section) a certain distance D1 to the left of the specific position P1 at the right end to prevent contact or collision with the batch-type transfer robot 20. On the other hand, if the controller 60 determines that the batch-type transfer robot 20 is not stopped at the specific position P1 at the right end of the travel axis 40, the controller 60 causes the single-wafer transfer robot 30 to wait without traveling. By performing this processing, the controller 60 prevents contact or collision with the batch-type transfer robot 20 on the same travel axis 40 as the single-wafer transfer robot 30.

[0053] Similarly, when the controller 60 causes the batch-type transfer robot 20 to travel, it determines whether the single-wafer transfer robot 30 is stopped at a specific position P2 (referred to as a second point in the claims) on the left side, and if it determines that the single-wafer transfer robot 30 is stopped, it causes the batch-type transfer robot 20 to travel within a section S2 (also referred to as a second section) that is a certain distance D2 to the right from the specific position P2 on the left side. On the other hand, if the controller 60 determines that the single-wafer transfer robot 30 is not stopped at the specific position P2 on the left side of the travel axis 40, it causes the batch-type transfer robot 20 to wait without traveling. By performing this processing, the controller 60 prevents contact or collision between the batch-type transfer robot 20 and the single-wafer transfer robot 30 on the same travel axis 40 as the batch-type transfer robot 20.

[0054] Furthermore, the controller 60 controls the travel of the batch transfer robot 20 and the single wafer transfer robot 30 based on position data transmitted from position detectors 51 and 52 shown in FIG. 4, which are provided in the linear encoder.

[0055] Specifically, the controller 60 receives position data from the position detectors 51 and 52 each time the position detectors 51 and 52 measure the positions of the batch transfer robot 20 and the single-wafer transfer robot 30, respectively. Then, based on the position data of the position detector 51 and the position data of the position detector 52 received at the same time, the controller 60 calculates the distance from the position detector 51 to the position detector 52, or the distance from the slider 45 on which the position detector 51 is located to the slider 46 on which the position detector 52 is located. Various parameters are stored in the memory 62, and the controller 60 reads these parameters in advance. If the calculated distance is less than a threshold B (referred to as a first threshold in the claims) of the read parameters, the controller 60 stops the batch transfer robot 20 or the single-wafer transfer robot 30 while it is traveling. This prevents contact or collision between the batch transfer robot 20 and the single-wafer transfer robot 30.

[0056] A display device 70 capable of displaying various information is electrically connected to the controller 60. When the controller 60 stops the traveling, it causes the display device 70 to display a warning that the distance between the batch-type transfer robot 20 and the single-wafer transfer robot 30 is too close.

[0057] The controller 60 also controls the travel of the batch transfer robot 20 and the single wafer transfer robot 30 based on the output of the proximity sensor 53 shown in FIG.

[0058] In detail, as described above, the proximity sensor 53 outputs a proximity signal when the batch transfer robot 20 and the single-wafer transfer robot 30 approach each other to a distance less than a certain threshold A. When the controller 60 receives this proximity signal and the batch transfer robot 20 or the single-wafer transfer robot 30 is traveling, the controller 60 stops the traveling of the batch transfer robot 20 or the single-wafer transfer robot 30. In this way, the controller 60 prevents contact or collision between the batch transfer robot 20 and the single-wafer transfer robot 30.

[0059] It is desirable that threshold value A, which is the criterion for the proximity sensor 53 to output a proximity signal, be equal to or lower than threshold value B, which is the criterion for the controller 60 to stop the travel of the batch transfer robot 20 or the single-wafer transfer robot 30 based on the measurement results of the linear encoder position detectors 51 and 52. With such threshold values ​​A and B, in addition to controlling the travel of the batch transfer robot 20 and the single-wafer transfer robot 30 based on the measurement results of the linear encoder, the travel of the batch transfer robot 20 and the single-wafer transfer robot 30 is also controlled based on the output of the proximity sensor 53, so that contact and collision between the batch transfer robot 20 and the single-wafer transfer robot 30 can be more effectively prevented.

[0060] Furthermore, it is desirable that the threshold value B described above be equal to or less than the distance D1 that defines the section S1 along which the single-wafer transfer robot 30 travels, and equal to or less than the distance D2 that defines the section S2 along which the batch-type transfer robot 20 travels. With such a threshold value B, when the single-wafer transfer robot 30 travels in the section S1 and the batch-type transfer robot 20 travels in the section S2 without being controlled by the controller 60, contact or collision between the batch-type transfer robot 20 and the single-wafer transfer robot 30 due to their travel can be prevented.

[0061] As described above, in the transfer apparatus 1 according to the embodiment, the travel axis 40 is located at a position where the batch transfer robot 20 can load and unload multiple wafers from a FOUP, and the travel axis 40 allows the batch transfer robot 20 and the single wafer transfer robot 30 to travel along itself, and is adjacent to the load port 10 on which the FOUP is placed. Therefore, the batch transfer robot 20 and the single wafer transfer robot 30 can travel using the same travel axis 40 to a position adjacent to the load port 10. Since the batch transfer robot 20 and the single wafer transfer robot 30 do not have separate travel axes but share a single travel axis 40, the transfer apparatus 1 is compact. Space saving is also achieved.

[0062] Furthermore, in the transfer device 1, the controller 60 determines the distance between the batch transfer robot 20 and the single-wafer transfer robot 30 from the detection results of the position detectors 51, 52 of the linear encoder, and when the determined distance is less than threshold B, stops the travel of either the batch transfer robot 20 or the single-wafer transfer robot 30, whichever is currently traveling. Therefore, even though the batch transfer robot 20 and the single-wafer transfer robot 30 share the same travel axis 40, the batch transfer robot 20 and the single-wafer transfer robot 30 are unlikely to come into contact or collide with each other.

[0063] Furthermore, the batch transfer robot 20 is equipped with a proximity sensor 53 that detects the proximity of the single-wafer transfer robot 30. When the proximity sensor 53 detects that the single-wafer transfer robot 30 is approaching, the controller 60 stops the travel of either the batch transfer robot 20 or the single-wafer transfer robot 30, whichever is currently traveling. Therefore, even though the batch transfer robot 20 and the single-wafer transfer robot 30 share the same travel axis 40, the batch transfer robot 20 and the single-wafer transfer robot 30 are unlikely to come into contact or collide with each other.

[0064] The conveying device 1 and the control method for the conveying device 1 according to the embodiment of the present invention are not limited to the above.

[0065] In the embodiment, the traveling axis 40 has a beam shape, in other words, a long, thin, flat plate shape. However, the present invention is not limited to this. In the present invention, the traveling axis 40 only needs to allow the batch-type transfer robot 20 and the single-wafer-type transfer robot 30 to travel along itself and be adjacent to the FOUP, i.e., the load port 10 on which the cassettes are placed. Therefore, the shape of the traveling axis 40 is arbitrary as long as it satisfies this condition. For example, the traveling axis 40 may be a rectangular pillar or a cylindrical column.

[0066] In the embodiment, the transport device 1 includes a linear scale 55. However, the present invention is not limited to this. In the present invention, the transport device 1 may include a first sensor that measures the position of each of the batch-type transport robot 20 and the single-wafer-type transport robot 30 in the extension direction of the travel axis 40. Therefore, the presence or absence of the linear scale 55 is optional. For example, if the position detectors 51 and 52 of the linear encoder are magnetic heads and the linear scale 55 is a magnetic scale, the linear scale 55 may be omitted and substituted with multiple stators of the linear motor 43.

[0067] In the embodiment, the proximity sensor 53 is provided on the batch transfer robot 20. However, the present invention is not limited to this. In the present invention, the transfer device 1 may be provided with at least one sensor (referred to as a second sensor in the claims) that is provided on at least one of the batch transfer robot 20 and the single-wafer transfer robot 30 and detects when the batch transfer robot 20 and the single-wafer transfer robot 30 approach each other to a distance less than the threshold A. Therefore, the proximity sensor 53 may also be provided on the single-wafer transfer robot 30. Alternatively, the proximity sensor 53 may be provided on the single-wafer transfer robot 30 instead of the batch transfer robot 20.

[0068] The present invention allows various embodiments and modifications without departing from the broad spirit and scope of the present invention. Furthermore, the above-described embodiments are intended to illustrate the present invention and do not limit the scope of the present invention. In other words, the scope of the present invention is defined by the claims, not the embodiments. Various modifications made within the scope of the claims and within the scope of the meaning of the invention equivalent thereto are considered to be within the scope of the present invention.

[0069] REFERENCE SIGNS LIST 1 Transport device 10 Load port 11 Front panel 12 Right side panel 13 Rear panel 14 Left side panel 20 Batch type transport robot (first robot) 21 Chuck section 25, 35 Base section 30 Single wafer type transport robot (second robot) 31 Chuck section 32 Arm 33 Aligner 34 Reversal unit 35 Base section 40 Travel axis 41, 42 Linear guide 43 Linear motor 45, 46 Slider 51, 52 Position detector (first detector, second detector) 53 Proximity sensor (second sensor) 55 Linear scale 60 Controller 61 Processor 62 Memory 63 Interface 64 Bus 70 Display device (warning device) D1, D2 Distance P1, P2 Specific position S1, S2 Section

Claims

1. A first robot capable of collectively loading and unloading a plurality of substrates from a cassette placed on a load port, a second robot capable of individually loading and unloading the substrates from the cassette or only one substrate at a time, a traveling path that extends to a position where the first robot can load and unload a plurality of the substrates from the cassette and a position where the second robot can load and unload the substrates from the cassette, and is shared by the first robot and the second robot, and a conveying device comprising the same.

2. The conveying device according to claim 1, wherein the traveling path is a traveling axis that causes the first robot and the second robot to travel along an axis extending in one direction.

3. The conveying device according to claim 1, further comprising a first sensor that measures positions of the first robot and the second robot in a direction in which the traveling path extends, and a controller that controls traveling of the first robot and the second robot, wherein when either the first robot or the second robot is traveling on the traveling path, the controller obtains a distance between the first robot and the second robot based on positions of the first robot and the second robot measured by the first sensor, and stops traveling of either the first robot or the second robot when the obtained distance is less than a first threshold value.

4. The conveying device according to claim 3, wherein the first sensor includes a linear scale extending along the traveling path, a first detector provided on the first robot and configured to detect a position of the linear scale in an extending direction thereof, and a second detector provided on the second robot and configured to detect a position of the linear scale in an extending direction thereof, and the first detector and the second detector share the same linear scale for position detection.

5. The conveyance device according to claim 3 or 4, further comprising at least one second sensor provided on at least one of the first robot and the second robot, the at least one second sensor detecting that the first robot and the second robot are closer than a second threshold value; and the controller stopping the travel of either the first robot or the second robot when either the first robot or the second robot is traveling on the travel path and the at least one second sensor detects that the first robot and the second robot are closer than the second threshold value.

6. The conveyance device according to claim 5, wherein the second threshold value is equal to or less than the first threshold value.

7. The conveyance device according to claim 3 or 4, wherein when the controller positions the first robot at a first point on the travel path, the controller causes the second robot to travel within a first section away from the first point on the travel path, and when the controller positions the second robot at a second point different from the first point on the travel path, the controller causes the first robot to travel within a second section away from the second point on the travel path.

8. The conveyance device according to claim 7, wherein the first threshold value is equal to or less than the value of the distance from the first point to the first section and the distance from the second point to the second section.

9. The conveyance device according to claim 1 or 3, further comprising a linear motor having a stator provided on the travel path, a first mover that supports the first robot and is movable relative to the stator, and a second mover that supports the second robot and is movable relative to the stator.

10. A first robot capable of collectively loading and unloading a plurality of substrates from a cassette placed on a load port, a second robot capable of individually loading and unloading the substrates from the cassette or only one substrate at a time, a travel path that extends to a position where the first robot can load and unload a plurality of the substrates from the cassette and a position where the second robot can load and unload the substrate from the cassette, and is shared by the first robot and the second robot, and a control method for a transfer device including: after stopping the first robot at a first point on the travel path, a step of causing the second robot to travel within a first section away from the first point on the travel path; after stopping the second robot at a second point on the travel path different from the first point, a step of causing the first robot to travel within a second section away from the second point on the travel path. A control method for a transfer device including the above steps.

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