Method for managing carbon nanotube pellicle membrane, device for managing carbon nanotube pellicle membrane, and pellicle case

Abstract

Disclosed is a method for managing a CNT pellicle membrane, wherein at the time when using a CNT pellicle membrane, individual information of the CNT pellicle membrane is acquired from an individual information storage means in which the individual information of the CNT pellicle membrane is recorded, storage information of the CNT pellicle membrane is acquired from a storage information storage means in which the storage information of the CNT pellicle membrane is recorded, and a cleaning processing condition of the CNT pellicle membrane is specified from the acquired individual information and storage information of the CNT pellicle membrane.

Description

Carbon nanotube film pellicle management method, carbon nanotube film pellicle management device, and pellicle case

[0001] The present disclosure relates to a method for managing a carbon nanotube film pellicle, a management device for a carbon nanotube film pellicle, and a pellicle case.

[0002] The manufacturing process of semiconductor devices includes a lithography process in which a pattern is formed on a semiconductor wafer by irradiating light onto the wafer. In the lithography process, for example, a pattern formed on a rectangular photomask substrate is irradiated with light (also called "exposure light"), and the exposure light that passes through the photomask substrate is imaged on the wafer, exposing the resist material on the wafer. This transfers the desired pattern onto the wafer.

[0003] In lithography processes, pellicles are used to prevent foreign matter from adhering to a pattern formed on a photomask substrate. The pellicle is attached to the photomask substrate to surround the pattern formed on the photomask substrate. Typically, a pellicle comprises a pellicle frame and a pellicle film. The pellicle frame is positioned so as to surround the outside of the pattern area formed on the photomask substrate. The pellicle film is stretched over the pellicle frame.

[0004] In recent years, pellicles having carbon nanotube films (hereinafter also referred to as "CNT films") have been studied as pellicle films. CNT films tend to adsorb gases from the surrounding environment (e.g., the atmosphere). It has been found that when gases are adsorbed onto the CNT film, the properties of the CNT film (e.g., the transmittance of EUV light) change from the properties immediately after the CNT film is manufactured. If the properties of the CNT film change significantly from the properties immediately after the CNT film is manufactured, the CNT film may affect the pattern formed on the semiconductor wafer.

[0005] Patent Document 1 discloses a case for housing a pellicle (hereinafter also referred to as a "pellicle case"). The pellicle case has a tray and a lid that covers the tray. The pellicle case has a sealed structure. The sealed structure seals the gap between the periphery of the lid and the tray when the lid that covers the tray is bent under its own weight. Engineering plastic, reinforced plastic, or metal are disclosed as materials for the lid and the tray.

[0006] Meanwhile, Non-Patent Document 1 discloses a technique for carrying out a cleaning process depending on the state of a CNT film pellicle before use. This document describes that hydrocarbons and catalyst particles adsorbed to a CNT film pellicle can be removed by heating at 2000 K or less, that a rapid increase in transmittance at a timing when the number of exposures is low can be suppressed, that gas adsorption to the pellicle affects performance, and that adjusting the conditions of the cleaning process, such as the heating conditions, affects the transmittance of the CNT film.

[0007] Patent Document 1: Japanese Patent Application Laid-Open No. 2011-79545

[0008] Non-patent document 1: M. van de Kerkhofa, A. Klein, B. Seoane, P. Vermeulen, E. Gallagher, MY Timmermans, I. Pollentier & J. Bekaert: "EUV pellicle scanner integration for N2 nodes and beyond", Optical and EUV Nanolithography XXXVI, edited by Anna Lio, Proc. of SPIE, Vol. 12494, 124940D, May 8, 2023 (https: / / www.spiedigitallibrary.org / conference-proceedings-of-spie)

[0009] It has become clear that the properties of CNT film pellicles change when they adsorb gases present in the surrounding environment. As a result, it has become clear that it is necessary to adjust the conditions and duration of use, or to change the conditions of the cleaning process mentioned in Non-Patent Document 1, depending on the condition of the CNT film pellicle before use.

[0010] The problem to be solved by one embodiment of the present disclosure is to provide a CNT film pellicle management method and management device that can identify appropriate cleaning treatment conditions according to the individual information and storage information of the CNT film pellicle. The problem to be solved by another embodiment of the present disclosure is to provide a pellicle case that can detect and store information for identifying cleaning treatment conditions while storing a CNT film pellicle.

[0011] Means for solving the above problems include the following embodiments. <1> A method for managing a carbon nanotube film pellicle, in which, when using a carbon nanotube film pellicle, individual information of the carbon nanotube film pellicle is obtained from an individual information storage means in which individual information of the carbon nanotube film pellicle is recorded, and storage information of the carbon nanotube film pellicle is obtained from a storage information storage means in which storage information of the carbon nanotube film pellicle is recorded, and cleaning treatment conditions for the carbon nanotube film pellicle are specified from the obtained individual information and storage information of the carbon nanotube film pellicle. <2> The method for managing a carbon nanotube film pellicle according to <1>, in which the individual information includes information about the film thickness of the carbon nanotube film pellicle. <3> The method for managing a carbon nanotube film pellicle according to <1>, in which the storage information includes information about the storage period after manufacture and information about the storage environment. <4> The method for managing a carbon nanotube film pellicle according to <3>, in which the information about the storage environment includes information about the concentration in the storage environment of a substance that is hydrogenated in an exposure tool when the carbon nanotube film pellicle is used. <5> The method for managing carbon nanotube membrane pellicles according to <3>, wherein the information about the storage environment includes information about the concentration in the storage environment of a repellent substance whose presence in an exposure machine is to be avoided when the carbon nanotube membrane pellicle is used. <6> The method for managing carbon nanotube membrane pellicles according to <5>, wherein the information about the repellent substance is used to determine whether the carbon nanotube membrane pellicle can be used. <7> The method for managing carbon nanotube membrane pellicles according to <3>, wherein the storage information further includes information about the storage period after cleaning treatment of the carbon nanotube membrane pellicle and information about usage status, and wherein the individual information and the storage information are used to determine whether the carbon nanotube membrane pellicle can be used.<8> A management device for carbon nanotube film pellicles, comprising: a pellicle information storage device having an individual information storage means for storing individual information of a carbon nanotube film pellicle and a storage information storage means for storing storage information of the carbon nanotube film pellicle; an information acquisition means for acquiring the individual information and storage information of a specific carbon nanotube film pellicle from the pellicle information storage device; and a processing condition identification means for identifying cleaning processing conditions for the carbon nanotube film pellicle from the acquired individual information and storage information. <9> A pellicle case comprising: a housing; a storage space for storing carbon nanotube film pellicles within the housing; a fixture for fixing the carbon nanotube film pellicle within the storage space; an individual information display unit for displaying individual information of the carbon nanotube film pellicle; and a detector for detecting and storing information regarding the storage environment of the carbon nanotube film pellicle. <10> The pellicle case according to <9>, wherein the information regarding the storage environment includes information regarding the concentration in the storage environment of a substance that hydrogenates in an exposure tool when the carbon nanotube film pellicle is used. <11> A pellicle case according to <9>, which contains information about the concentration in the storage environment of a repellent substance whose presence in an exposure machine is to be avoided when using a carbon nanotube film pellicle.

[0012] According to one embodiment of the present disclosure, there is provided a CNT film pellicle management method and management device that can identify appropriate cleaning process conditions according to the individual information and storage information of the CNT film pellicle. According to another embodiment of the present disclosure, there is provided a pellicle case that can detect and store information for identifying cleaning process conditions while storing a CNT film pellicle.

[0013] 1 is an overview of a system in a CNT film pellicle management method according to an embodiment; FIG. 2 is a block diagram of a CNT film pellicle management device according to an embodiment; FIG. 3 is a first example of a pellicle case according to an embodiment; FIG. 4 is a second example of a pellicle case according to an embodiment; FIG. 5 is a flowchart showing an overview of a CNT film pellicle management method according to an embodiment;

[0014] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. Note that the drawings referred to below are merely schematic diagrams, and the sizes and positional and dimensional relationships of the components or parts shown in the drawings do not necessarily reflect the actual state of the product. Furthermore, reference numerals commonly used in multiple drawings indicate the same configuration or part unless otherwise specified in the following description.

[0015] In the method for managing carbon nanotube membrane pellicles (hereinafter "CNT membrane pellicles") disclosed herein, when a CNT is used, individual information of the CNT membrane pellicle is obtained from an individual information storage means in which individual information of the CNT membrane pellicle is recorded, and storage information of the CNT membrane pellicle is obtained from a storage information storage means in which storage information of the CNT membrane pellicle is recorded. Then, from the individual information and storage information of the CNT membrane pellicle obtained, cleaning treatment conditions for the CNT membrane pellicle are identified.

[0016] The individual information includes individual identification information and individual attribute information. The individual identification information includes, for example, the product number and lot number of the CNT film pellicle, the serial number of the pellicle case (described below) in which the CNT film pellicle is housed, and the product number and serial number of the detector (described below) attached to the pellicle case. The individual attribute information includes, for example, the brand name of the CNT film pellicle, film thickness, type and thickness of the protective film, the breathability of the pellicle frame, whether or not the pellicle contains an adhesive, the type of adhesive, physical property information of the pellicle case, and information on packaging materials including outgassing. This individual information is stored in the individual information storage means (described below) at the time of manufacturing or shipping the CNT film pellicle.

[0017] The storage information includes storage period information, storage environment information, and usage information. The storage period information includes the storage period after manufacturing of the CNT film pellicle, the storage period of the CNT film pellicle in the pellicle case, and, if a cleaning process is performed, the storage period before and after the cleaning process. The storage environment information includes information on the storage temperature and atmospheric pressure, information on the airtightness of the pellicle case, concentration information in the storage environment of substances that hydrogenate in the exposure tool when the CNT film pellicle is used (e.g., hydrogen gases such as hydrogen and water vapor, and hydrocarbon gases), and concentration information in the storage environment of repellent substances whose presence in the exposure tool is to be avoided (e.g., sulfur, phosphorus, fluorine, chlorine, nitrogen, etc.). The information on repellent substances determines whether the CNT film pellicle can be used. Examples of repellent substances include elements such as Zn, In, Pb, Sn, S, P, Si, F, Cl, Na, Ca, N, Mg, and Mn. Among these, S (SO ｘ ), P(PO ｘ ), F(F ２ ), Cl(Cl ２ ) and N(NH ３ and NO ｘ ) are likely to enter the pellicle case, so they must be recorded as storage environment information.

[0018] The usage information included in the storage information includes information regarding the storage period after the cleaning process of the CNT film pellicle, and information regarding the usage status (for example, the exposure time of EUV light, the EUV output, the atmosphere inside the exposure tool, and the rate and number of times of differential pressure). This usage information is used to determine whether the CNT film pellicle can be used (specifically, the remaining usable time and whether replacement is necessary).

[0019] From the individual information and storage information described above, the usable time, lifespan, and need for replacement of the CNT film pellicle are determined, and if it is determined that it can be used, the conditions for the cleaning process (for example, heating time, heating temperature, and heating atmosphere such as oxygen concentration, degree of vacuum, and amount of water vapor) are specified.

[0020] 1 shows an overview of a system for managing a CNT film pellicle according to this embodiment. In this system, a client terminal on the manufacturer 100 side and a client terminal on the user 200 side are connected to a server 300 via a network. A CNT film pellicle management device 400 is built inside the server 300.

[0021] As shown in FIG. 2, the management device 400 includes a pellicle information storage device 430 having an individual information storage means 432 that stores individual information of a CNT film pellicle and a storage information storage means 434 that stores storage information of the CNT film pellicle, an information acquisition means 410 that acquires the individual information and storage information of a specific CNT film pellicle from the pellicle information storage device 430, and a processing condition identification means 420 that identifies cleaning processing conditions for the CNT film pellicle from the acquired individual information and storage information.

[0022] The server 300 shown in FIG. 1 has, as its hardware configuration, a CPU (Central Processing Unit) 310, a RAM (Random Access Memory) 320, a ROM (Read Only Memory), and / or an external storage device 330, as shown in FIG. 2. Each component is connected to each other so as to be able to communicate with each other via a bus 350. The pellicle information storage device 430, which includes the individual information storage means 432 and the storage information storage means 434, is configured as part of the ROM / external storage device 330. The information acquisition means 410 and the processing condition identification means 420 are realized by the CPU 310 temporarily expanding a part of the processing program stored in the ROM / external storage device 330 into the RAM 320 and executing it. The information acquisition means 410, the processing condition identification means 420, and the pellicle information storage device 430 configure part of the management device 400.

[0023] As shown in Figure 1, manufacturer 100 ships CNT film pellicle 20 housed in pellicle case 10 to user 200. At that time, manufacturer 100 inputs individual information and storage information related to the CNT film pellicle 20 into a terminal on the manufacturer's 100 side. The input individual information and storage information are stored in individual information storage means 432 and storage information storage means 434, respectively, of management device 400 in server 300 via a network. When using the CNT film pellicle 20, user 200 removes it from pellicle case 10 and places it in cleaning processor 50 to perform the cleaning process. As shown schematically as a first example in Figure 3, this pellicle case 10 comprises a housing 11, a storage space 12 for storing a CNT film pellicle 20 within the housing 11, a fixture 13 for fixing the CNT film pellicle 20 within the storage space 12, an individual information display unit 40 for displaying individual information about the CNT film pellicle 20, and a detector 30 for detecting and storing information about the storage environment of the CNT film pellicle.

[0024] The CNT film pellicle 20 may have a structure in which the CNT film 21 and the pellicle frame 22 are fixed by van der Waals forces without an adhesive layer, or may have a structure in which the CNT film 21 is fixed to the pellicle frame 22 with an adhesive or the like. The individual information display unit 40 displays individual information about the CNT film pellicle 20 housed in the pellicle case 10 in a predetermined format (e.g., a two-dimensional barcode). The detector 30 is a device that detects information about the storage environment of the CNT film pellicle 20, specifically, information about the concentration of substances that hydrogenate in the exposure tool when the CNT film pellicle 20 is in use, and / or information about the concentration of repellent substances whose presence in the exposure tool is avoided when the CNT film pellicle 20 is in use, in the storage environment. The detector 30 can be configured, for example, as a gas detection device that can store and display the concentration of detected gases.

[0025] The storage space 12, which is the internal space of the housing 11, is connected to the external environment via an air passage 14 to prevent damage to the CNT film pellicle 20 due to a pressure difference with the external environment. A filter 15 is installed in the air passage 14 to prevent the intrusion of foreign matter such as dust from the external environment.

[0026] In the first example shown in Fig. 3, the detector 30 is installed inside the storage space 12, but this is not limiting. That is, in the second example shown in Fig. 4, a detector housing space 16 for housing the detector 30 is provided on the side of the ventilation path 14 that is closer to the external environment than the installation position of the filter 15. Furthermore, when the storage space 12 is in communication with the external environment, the detector 30 may be provided outside the housing 11, as in the third example shown in Fig. 5.

[0027] 1, at the time of shipping the CNT film pellicle 20, the manufacturer 100 attaches individual information about the CNT film pellicle 20 as an individual information display section 40 to the surface of the pellicle case 10. This individual information is stored in the individual information storage means 432 (see FIG. 2) shown in Table 1, and is configured as a data table such as that shown in Table 1 below.

[0028]

[0029] In this embodiment, EUV in Table 1 above is an abbreviation for extreme ultraviolet, and refers to ultraviolet light that is irradiated onto a substrate through a CNT film pellicle in an exposure tool during semiconductor lithography, and has a wavelength of 1 nm or more and 30 nm or less, preferably 5 nm or more and 13.5 nm or less.

[0030] In this embodiment, as shown in Table 1 above, the characteristic items such as EUV transmittance, CNT brand, CNT film thickness, and others are stored in the individual information storage means 432. Each characteristic item is assigned a score x according to the conditions. ｉ and a coefficient a representing the weighting of each characteristic item ｉ is set.

[0031] The EUV transmittance (T) is an index relating to the transmittance of the CNT film to EUV light, and a higher value indicates better performance. The value of T is, for example, in the range of 63.0 to 99.9%. ４<t ３ <t ２ <t １ A value is set, and a score x is calculated for each range of T shown in Table 1. １ For CNT brands, the score x shown in Table 1 is determined for each brand of CNT film. ２ The CNT film thickness (M) is, for example, in the range of 2 to 150 nm. １ <m ２ <m ３ <m ４ A value is set as follows, and a score x is calculated for each range of M shown in Table 1. ３ is set forth.

[0032] The individual information storage means 432 may store characteristic items other than those shown in Table 1. When using the CNT film pellicle 20, as shown in FIG. 1, the user 200 inputs information from the individual information display section 40 of the CNT film pellicle 20 into the client terminal, and queries the server 300 for individual information via the network. The server 300 then displays a score x for all characteristic items shown in Table 1. ｉ and coefficient a ｉ are specified, and the sum of the products is calculated as an evaluation value A as shown in the following formula 1.

[0033]

[0034] As shown in Table 2 below, the storage information storage means 434 stores the storage period (P １ ), storage period after cleaning (P ２ ) and the interval period (E) since the last use of the pellicle, and the amount of gas adsorption (A １ ~A ３ ) is stored. Each characteristic item is assigned a score y ｉ and coefficient b representing the weighting of each characteristic item ｉ is set.

[0035]

[0036] Storage period (P １) is an index showing the period of time that the CNT film pellicle 20 has been stored in the pellicle case 10 since its manufacture, and the lower the value, the more suitable it is for use. １ The value of p is, for example, in the range of 1 to 600 days. １ １ <p １ ２ <p １ ３ <p １ ４ The values ​​are set as shown in Table 2. １ Score y for each range of values １ The storage period after cleaning (P ２ ) is an index showing the storage period after the CNT film pellicle 20 has been subjected to a cleaning treatment, and the lower the value, the more suitable it is for use. ２ The value of p is, for example, in the range of 1 to 600 days. ２ １ <p ２ ２ <p ２ ３ The values ​​are set as shown in Table 2. ２ Score y for each range of values ２ Incidentally, for an unused CNT film pellicle 20, y ２ = 0. The interval period (I) is an index showing the period of time that the CNT film pellicle 20 has been stored in a vacuum in the exposure machine since its last use, and the lower the value, the more suitable it is for use. The value of I is, for example, in the range of 24 to 240 hours. １ <i ２ <i ３ A value is set so that the score y ３ Incidentally, for an unused CNT film pellicle 20, y ３ =0.

[0037] The gas adsorption amounts of mass numbers 1, 2, 17 and 18 (A １ ) is an index that indicates that the lower the value, the more suitable it is for use. １ The value of is, for example, 1×10 －６ ~1 x 10 －３ mbar L / sec range１ １ <a １ ２ <a １ ３ <a １ ４ The values ​​are set as shown in Table 2. １ Score y for each range of values ４ The gas adsorption amount (A ２ ) is an index that indicates that the lower the value, the more suitable it is for use. ２ The value of is, for example, 1×10 －８ ~1 x 10 －５ mbar L / sec range ２ １ <a ２ ２ <a ２ ３ <a ２ ４ The values ​​are set as shown in Table 2. ２ Score y for each range of values ５ The gas adsorption amount (A ３ ) is an index that indicates that the lower the value, the more suitable it is for use. ３ The value of is, for example, 4×10 －１０ ~4 x 10 －７ mbar L / sec range １ １ <a ３ ２ <a ３ ３ <a ３ ４ The values ​​are set as shown in Table 2. ３ Score y for each range of values ６ These indicators A １ ~A ３ is a value detected and recorded by the detector 30 depending on the environment in which the pellicle case 10 is placed.

[0038] The storage information storage means 434 may record characteristic items other than those shown in Table 2. When using the CNT film pellicle 20, the user 200 inputs the information on the individual information display section 40 of the CNT film pellicle 20 and the indicator A indicated by the detector 30 into the client terminal as shown in FIG. １ ~A ３ When the numerical values ​​for the individual are input and the individual information is inquired to the server 300 via the network, the score y for all the characteristic items shown in Table 2 is ｉ and coefficient b ｉ are specified, and the sum of the products is calculated as the evaluation value B as shown in the following formula 2.

[0039]

[0040] The storage information storage means 434 further stores, as shown in Table 3 below, the concentration (R １ ~R ３ Each characteristic item is assigned a score z according to the conditions. ｉ and a coefficient c representing the weighting of each characteristic item ｉ is set.

[0041]

[0042] Each index R １ ~R ６ The lower the value, the more suitable it is for use. １ is SO ｘ It is an index that represents the concentration, and ranges from 10 ppb to 100 ppm. １ １ <r １ ２ <r １ ３ <r １ ４ The values ​​are set as shown in Table 3. １ Score z for each range of values １ The index R is set. ２ No ｘ It is an index that represents the concentration, and is in the range of 0.05 to 500 ppm. ２ １ <r ２ ２<r ２ ３ <r ２ ４ The values ​​are set as shown in Table 3. ２ Score z for each range of values ２ The index R is set. ３ is NH ３ It is an index that represents the concentration, and is in the range of 0.05 to 500 ppm. ３ １ <r ３ ２ <r ３ ３ <r ３ ４ The values ​​are set as shown in Table 3. ３ Score z for each range of values ３ The index R is set. ４ is Cl ２ It is an index that represents the concentration, and is in the range of 0.05 to 500 ppm. ４ １ <r ４ ２ <r ４ ３ <r ４ ４ The values ​​are set as shown in Table 3. ４ Score z for each range of values ４ The index R is set. ５ is F ２ It is an index that represents the concentration, and is in the range of 0.005 to 50 ppm. ５ １ <r ５ ２ <r ５ ３ <r ５ ４ The values ​​are set as shown in Table 3. ５ Score z for each range of values ５ The index R is set. ６ is an index that represents the concentration of phosphorus compounds, and r is in the range of 0.05 to 500 ppm. ６ １ <r ６ ２ <r ６ ３ <r ６ ４ The values ​​are set as shown in Table 3.６ Score z for each range of values ６ is set forth.

[0043] The storage information storage means 434 may record characteristic items related to repellent substances other than those shown in Table 3. When using the CNT film pellicle 20, the user 200 inputs the information on the individual information display section 40 of the CNT film pellicle 20 and the indicator R indicated by the detector 30 into the client terminal as shown in FIG. １ ~R ６ When the numerical values ​​for the individual are input and the individual information is inquired to the server 300 via the network, the score z for all the characteristic items shown in Table 3 is obtained. ｉ and coefficient c ｉ are specified, and the sum of the products is calculated as the evaluation value C as shown in the following formula 3.

[0044]

[0045] 1, when user 200 removes CNT film pellicle 20 from pellicle case 10 and performs cleaning processing in cleaning processor 50, evaluation values ​​A, B, and C are calculated as described above from the individual information and storage information obtained by querying server 300. Then, from these evaluation values ​​A, B, and C, the usability of CNT film pellicle 20 and the cleaning processing conditions are identified.

[0046] First, as shown in Table 4 below, if the evaluation value C is less than 10, the CNT film pellicle 20 is usable, while if it is 10 or more, the CNT film pellicle 20 is deemed unusable.

[0047]

[0048] Next, from the evaluation values ​​A and B, the usability and, if usable, the number of substrates requiring dummy exposure are identified as cleaning process conditions, as shown in Table 5 below. That is, as the values ​​of both evaluation values ​​A and B increase, the cleaning process conditions for the CNT film pellicle 20 become stricter. If evaluation value A is 50 or greater, the CNT film pellicle 20 is determined to be unusable regardless of the value of evaluation value B, and if evaluation value B is 200 or greater, the CNT film pellicle 20 is determined to be unusable regardless of the value of evaluation value A. Note that, as shown in Table 5 below, conditions related to the heating temperature, heating atmosphere, heating time, exposure time, EUV light exposure time, EUV output, depressurization rate within the exposure tool, and number of insertions into the exposure tool may also be specified as cleaning process conditions.

[0049]

[0050] Furthermore, as shown in Table 6 below, from the evaluation values ​​A and B, whether or not the CNT film pellicle 20 can be used, and if so, the cleaning temperature and cleaning time are identified as cleaning process conditions. That is, as the evaluation values ​​A and B increase, the cleaning process conditions for the CNT film pellicle 20 become stricter. If the evaluation value A is 50 or greater, the CNT film pellicle 20 is determined to be unusable regardless of the value of evaluation value B, and if the evaluation value B is 200 or greater, the CNT film pellicle 20 is determined to be unusable regardless of the value of evaluation value A. Note that, in Table 6 below, the heating atmosphere, the cleaning process atmosphere, and the like may also be specified as cleaning process conditions.

[0051]

[0052] Next, an example of a method for managing a CNT film pellicle according to this embodiment will be described with reference to the flowchart of Fig. 6. The system diagram of Fig. 1 and the block diagram of Fig. 2 will also be referenced as appropriate. In the flowchart of Fig. 6, steps that are not directly executed by the management device 400 are shown in parentheses.

[0053] First, when a user 200 uses a CNT film pellicle 20, the user 200 inputs information from the individual information display section 40 of the CNT film pellicle 20 and storage environment information indicated by the detector 30 into a client terminal as shown in FIG. 1, and queries the server 300 for the individual information via the network.

[0054] Then, in the stage shown in S10, the information acquisition means 410 acquires all scores x related to the individual information of the CNT film pellicle 20 from the individual information storage means 432. ｉ and the corresponding coefficient a ｉ (See Table 1) is obtained.

[0055] Next, in the step shown in S20, the information acquisition means 410 acquires all scores y related to the storage information of the CNT film pellicle 20 from the storage information storage means 434. ｉ and z ｉ and the corresponding coefficients b ｉ and c ｉ (See Tables 2 and 3).

[0056] Next, in the step shown in S30, the processing condition specifying means 420 calculates the score z ｉ and coefficient c ｉ Then, the evaluation value C is calculated according to the above-mentioned formula 3.

[0057] Next, in the step shown in S40, the processing condition specifying means 420 determines whether the CNT film pellicle 20 is usable according to the criteria shown in Table 4 above.

[0058] If the processing condition specifying means 420 determines in step S40 that the CNT film pellicle 20 is usable, then in step S50, the processing condition specifying means 420 determines the score x ｉ and a ｉ Calculate the evaluation value A according to the above formula 1, and calculate the score y ｉ and b ｉ Then, the evaluation value B is calculated according to the above-mentioned formula 2.

[0059] Next, in the step shown in S60, the processing condition specifying means 420 determines whether the CNT film pellicle 20 is usable according to the criteria shown in Table 5 above.

[0060] If, at the step shown in S60, the processing condition specifying means 420 determines that the CNT film pellicle 20 is usable, then, at the step shown in S70, the processing condition specifying means 420 specifies cleaning processing conditions in accordance with the criteria shown in Table 5 and / or Table 6.

[0061] Next, in the step shown in S80, the user 200 shown in FIG. 1 receives the cleaning process conditions specified by the process condition specifying means 420 from the server 300 via the network at a terminal on the user 200 side, and performs the cleaning process of the CNT film pellicle 20 using the cleaning process machine 50 in accordance with the cleaning process conditions.

[0062] When the cleaning process is completed, at the stage shown in S90, information related to the cleaning process is sent from the user's 200 terminal to the server 300 via the network, and upon receiving the information, the management device 400 updates the storage information in the storage information storage means 434, and the process then ends.

[0063] On the other hand, if it is determined in either the step shown in S40 or the step shown in S60 that the CNT film pellicle 20 is unusable, then in the step shown in S100, the CNT film pellicle 20 is discarded. Then, in the step shown in S110, it is determined whether or not to use another CNT film pellicle 20. If not, the process ends, but if to use another CNT film pellicle 20, the steps shown from S10 onwards are repeated for the other CNT film pellicle 20.

[0064] The present disclosure is applicable to a method for managing a carbon nanotube film pellicle, a device for managing a carbon nanotube film pellicle, and a pellicle case.

Claims

1. A method for managing a carbon nanotube membrane pellicle, in which, when using a carbon nanotube membrane pellicle, individual information of the carbon nanotube membrane pellicle is obtained from an individual information storage means in which individual information of the carbon nanotube membrane pellicle is recorded, and storage information of the carbon nanotube membrane pellicle is obtained from a storage information storage means in which storage information of the carbon nanotube membrane pellicle is recorded, and cleaning processing conditions for the carbon nanotube membrane pellicle are identified from the obtained individual information and storage information of the carbon nanotube membrane pellicle.

2. A method for managing a carbon nanotube film pellicle as described in claim 1, wherein the individual information includes information regarding the film thickness of the carbon nanotube film pellicle.

3. A method for managing a carbon nanotube film pellicle as described in claim 1, wherein the storage information includes information regarding the storage period after manufacture and information regarding the storage environment.

4. A method for managing a carbon nanotube film pellicle as described in claim 3, wherein the information regarding the storage environment includes information regarding the concentration in the storage environment of a substance that hydrogenates in an exposure tool when the carbon nanotube film pellicle is used.

5. A method for managing a carbon nanotube film pellicle as described in claim 3, wherein the information regarding the storage environment includes information regarding the concentration in the storage environment of a repellent substance whose presence in an exposure tool is to be avoided when the carbon nanotube film pellicle is used.

6. A method for managing a carbon nanotube film pellicle as described in claim 5, wherein the suitability for use of the carbon nanotube film pellicle is determined based on the information regarding the repellent substance.

7. A method for managing carbon nanotube membrane pellicle as described in claim 3, wherein the storage information further includes information regarding the storage period after the cleaning process of the carbon nanotube membrane pellicle and information regarding the usage status, and whether or not the carbon nanotube membrane pellicle can be used is determined from the individual information and the storage information.

8. A carbon nanotube membrane pellicle management device comprising: a pellicle information storage device having an individual information storage means for storing individual information of a carbon nanotube membrane pellicle and a storage information storage means for storing storage information of the carbon nanotube membrane pellicle; an information acquisition means for acquiring the individual information and storage information of a specific carbon nanotube membrane pellicle from the pellicle information storage device; and a processing condition identification means for identifying cleaning processing conditions for the carbon nanotube membrane pellicle from the acquired individual information and storage information.

9. A pellicle case comprising: a housing; a storage space for storing a carbon nanotube film pellicle within the housing; a fastener for fixing the carbon nanotube film pellicle within the storage space; an individual information display unit for displaying individual information of the carbon nanotube film pellicle; and a detector for detecting and storing information regarding the storage environment of the carbon nanotube film pellicle.

10. The pellicle case of claim 9, wherein the information regarding the storage environment includes information regarding the concentration in the storage environment of a substance that hydrogenates in an exposure tool when the carbon nanotube film pellicle is used.

11. The pellicle case according to claim 9, which contains information regarding the concentration in the storage environment of a repellent substance whose presence in an exposure tool is to be avoided when the carbon nanotube membrane pellicle is used.

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