Thin-film-type high-precision sensor

Abstract

Disclosed in the present application is a thin-film-type high-precision sensor, comprising a base plate, a tube socket, an annular support and a diaphragm, wherein a support recess is provided on the side of the annular support facing the base plate, and a support through hole is provided on the side of the annular support away from the base plate; the annular support is fixedly connected to an edge of the base plate; the tube socket is provided with an induction device, the tube socket is assembled in the support recess, the side surface of the tube socket provided with the induction device faces the support through hole, and the induction device extends into the support through hole; the base plate is provided with a circular through hole, a plurality of connecting lines are provided on the side surface of the tube socket facing away from the induction device, and all the connecting lines pass through the circular through hole and extend outwards; and the diaphragm covers the side surface of the annular support provided with the support through hole. By means of forming a T-shaped oil chamber and configuring the diaphragm as a flexible diaphragm, the high-precision sensor effectively reduces the volume of oil in the oil chamber to enhance the anti-expansion ability, thereby improving the reliability of the sensor.

Description

A thin film high-precision sensor

[0001] This application claims priority to the Chinese patent application filed with the China Patent Office on December 27, 2023, with application number 202311821470.X, and invention name “A thin film type high-precision sensor”, the entire contents of which are incorporated by reference into this application. Technical Field

[0002] The present application relates to the field of sensor technology, and in particular to a thin-film high-precision sensor. Background Art

[0003] To transmit deformation, the sensor has an oil chamber between the diaphragm and the sensing element. This oil chamber transmits the diaphragm deformation to the sensing element, allowing the sensing element to sense the deformation and generate a sensing signal. However, due to the irrational overall structural design of the sensor in the prior art, the oil injected into the oil chamber expands in volume due to its coefficient of expansion when heated, thus deforming the diaphragm. This leads to inaccurate sensing signals obtained by the sensor and even causes the sensor to fail and become inoperable, affecting its reliability during use. Therefore, the sensor structure in the prior art suffers from poor structural reliability. Summary of the Invention

[0004] The present application provides a thin-film high-precision sensor, which aims to solve the problem of poor structural reliability of sensor structures in the prior art.

[0005] The present application discloses a thin film type high precision sensor, comprising a base plate, a tube seat, an annular support and a diaphragm;

[0006] The annular support is provided with a support groove on the side facing the bottom plate, and a support through hole on the side away from the bottom plate; the annular support is fixedly connected to the edge of the bottom plate;

[0007] The tube base is provided with a sensing device, the tube base is assembled in the support groove, and a side surface of the tube base provided with the sensing device faces the support through hole, and the sensing device extends into the support through hole;

[0008] A circular through hole is provided on the bottom plate, and a plurality of connecting wires are provided on a side of the tube base facing away from the induction device, and the connecting wires all pass through the circular through hole and extend outward;

[0009] The diaphragm is covered on one side of the annular support where the support through hole is provided. The edge of the diaphragm is fixedly connected to the edge of the top surface of the annular support, and a gap is formed between the diaphragm and the top surface of the annular support. The gap and the support through hole are combined to form a T-shaped oil chamber, and oil is injected into the T-shaped oil chamber.

[0010] The thin film type high precision sensor, wherein the top edge of the annular support protrudes upward to form a boss, the lower side surface of the diaphragm is fixedly connected to the upper end surface of the boss, and the lower end surface of the pressure ring is fixedly connected to the edge of the diaphragm.

[0011] In the thin film type high precision sensor, the top edge of the annular support is raised upward to form an annular protrusion, and the outer edge of the diaphragm is bent downward and fixedly connected to the top surface and side surface of the annular protrusion.

[0012] In the thin film type high precision sensor, the bottom edge of the diaphragm extends downward to form a connecting ring, and the inner side wall of the connecting ring is fixedly connected to the top edge and outer side wall of the annular support.

[0013] In the thin film high-precision sensor, the ratio of the diameter to the thickness of the circular area covered by the diaphragm on the gap is 20-150.

[0014] In the thin film type high-precision sensor, the diameter of the circular area covered by the diaphragm on the gap is 3-30 mm.

[0015] In the thin film type high precision sensor, an inclined surface is provided at the connection between the edge of the diaphragm and the annular support, and the cross section of the gap is a trapezoidal gap corresponding to the inclined surface.

[0016] In the thin film type high-precision sensor, the diaphragm is a flexible metal diaphragm.

[0017] In the thin film high-precision sensor, the height of the gap is 1.2-3 times the thickness of the diaphragm.

[0018] In the thin film type high precision sensor, a sealing ring is provided between the tube seat and the bottom plate, and the inner diameter of the sealing ring is larger than the inner diameter of the circular through hole on the bottom plate.

[0019] The present application discloses a thin-film high-precision sensor, which includes a base plate, a tube seat, an annular support, and a diaphragm. The annular support is provided with a support groove on the side facing the base plate, and a support through-hole on the side away from the base plate. The annular support is fixedly connected to the edge of the base plate. A sensing device is provided on the tube seat, which is assembled in the support groove, and the side of the tube seat on which the sensing device is provided faces the support through-hole, and the sensing device extends into the support through-hole. A circular through-hole is provided on the base plate, and a plurality of connecting wires are provided on the side of the tube seat away from the sensing device, and the connecting wires all pass through the circular through-hole and extend outward. The diaphragm is covered and provided on the side of the annular support on which the support through-hole is provided. The above-mentioned high-precision sensor, by forming a T-shaped oil chamber and setting the diaphragm as a flexible diaphragm, effectively reduces the volume of oil in the oil chamber to increase the anti-expansion capability, thereby improving the reliability of the sensor. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the description of the embodiments. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0021] FIG1 is an exploded structural diagram of an embodiment of a thin-film high-precision sensor provided in an embodiment of the present application;

[0022] FIG2 is a cross-sectional structural diagram of an embodiment of a thin-film high-precision sensor provided in an embodiment of the present application;

[0023] FIG3 is an exploded structural diagram of another embodiment of a thin-film high-precision sensor provided in an embodiment of the present application;

[0024] FIG4 is a cross-sectional structural diagram of another embodiment of a thin-film high-precision sensor provided in an embodiment of the present application;

[0025] FIG5 is an exploded structural diagram of another embodiment of a thin-film high-precision sensor provided in an embodiment of the present application;

[0026] FIG6 is a cross-sectional structural diagram of another embodiment of a thin-film high-precision sensor provided in an embodiment of the present application;

[0027] FIG7 is a partial structural diagram of a thin-film high-precision sensor provided in an embodiment of the present application.

[0028] Figure numbers: 1, base plate; 2, pipe seat; 3, annular support; 4, diaphragm; 31, support through hole; 21, sensing device; 11, circular through hole; 22, connecting line; 5, T-shaped oil chamber; 321, boss; 322, pressure ring; 331, annular protrusion; 121, connecting ring; 12, inclined surface; 6, sealing ring; 7, oil. Implementation Method

[0029] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0030] It will be understood that when used in this specification and the appended claims, the terms "comprises" and "comprising" indicate the presence of described features, integers, steps, operations, elements and / or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components and / or combinations thereof.

[0031] It should also be understood that the terms used in this specification are only for the purpose of describing specific embodiments and are not intended to limit the present application. As used in this specification and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms unless the context clearly indicates otherwise.

[0032] It should be further understood that the terms "and" and "or" used in this specification and the appended claims refer to and include any and all possible combinations of one or more of the associated listed items.

[0033] The above are only specific embodiments of the present application, but the scope of protection of the present application is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or replacements within the technical scope disclosed in this application, and such modifications or replacements should be included in the scope of protection of this application. Therefore, the scope of protection of this application should be based on the scope of protection of the claims.

[0034] The present application discloses a thin film type high precision sensor, as shown in Figures 1 to 6, which includes a base plate 1, a tube base 2, an annular support 3 and a diaphragm 4; the annular support 3 is provided with a support groove on the side facing the base plate 1, and the annular support 3 is provided with a support through hole 31 on the side away from the base plate 1; the annular support 3 is fixedly connected to the edge of the base plate 1; the tube base 2 is provided with a sensing device 21, the tube base 2 is assembled in the support groove, and the side of the tube base 2 where the sensing device 21 is provided faces the support through hole 31, and the sensing device 21 extends into the support through hole 31; a circular through hole 11 is provided on the bottom plate 1, and a plurality of connecting lines 22 are provided on the side of the tube seat 2 facing away from the sensing device 21, and the connecting lines 22 all pass through the circular through hole 11 and extend outward; the diaphragm 4 is covered and arranged on the side surface of the annular support 3 where the support through hole 31 is provided, and the edge of the diaphragm 4 is fixedly connected to the top surface edge of the annular support 3, and a gap is formed between the diaphragm 4 and the top surface of the annular support 3, and the gap and the support through hole 31 are combined to form a T-shaped oil chamber 5, and oil is injected into the T-shaped oil chamber 5. The diaphragm 4 is a flexible diaphragm 4.

[0035] An annular support 3 is provided with a support groove. When the tube base 2 is assembled within this groove, the top edge of the tube base 2 abuts against the bottom of the groove. The sensing device 21 provided on the tube base 2 extends into the support through-hole 31. The connecting wire 22 provided on the tube base 2 passes through the circular through-hole 11 provided on the base plate 1 and extends outward. The diaphragm 4 is provided to cover the top surface of the annular support 3. A narrow gap is formed between the diaphragm 4 and the top surface of the annular support 3. The gap is filled with oil. The gap and the support through-hole 31 form a T-shaped oil chamber 5. The diaphragm 4 is a flexible diaphragm 4. By setting up a T-shaped oil chamber 5, the volume of the oil in the oil chamber can be effectively reduced. The coefficient of thermal expansion of the oil is fixed, so the total volume of the original oil is reduced, and the expanded volume is also reduced accordingly. At the same time, the diaphragm 4 is also set to be a flexible diaphragm 4. The area corresponding to the diaphragm 4 and the gap is large, which can effectively share the expansion force generated by the expansion of the oil. Through this combined setting structure, the volume of the oil in the oil chamber can be effectively reduced to increase the anti-expansion ability, and the diaphragm 4 can be prevented from being deformed by heat due to oil expansion, thereby improving the reliability of the sensor during use. Setting the diaphragm 4 as a flexible diaphragm 4 can reduce the loss when external pressure is introduced, that is, it can increase the sensitivity of the sensor for sensing. The edges of the bottom plate 1 and the bottom plate 1 can be fixedly connected by welding or bonding.

[0036] In a specific embodiment, as shown in Figures 1 and 2, the top edge of the annular support 3 protrudes upward to form a boss 321, the lower side surface of the diaphragm 4 is fixedly connected to the upper end surface of the boss 321, and the lower end surface of the pressure ring 322 is fixedly connected to the edge of the diaphragm 4.

[0037] In a specific configuration, an upwardly protruding annular boss 321 can be provided on the top edge of the annular support 3, and the lower end face of the diaphragm 4 is fixedly connected to the upper end face of the boss 321. At the same time, in order to improve the tensile strength of the diaphragm 4, a pressure ring 322 can be provided on the upper end face of the diaphragm 4. The outer diameter of the pressure ring 322 is equal to the outer diameter of the annular boss 321, and the inner diameter of the pressure ring 322 is equal to the inner diameter of the annular boss 321. The lower end face of the pressure ring 322 is fixedly connected to the edge of the diaphragm 4, thereby significantly improving the stability of the diaphragm 4. The diaphragm 4 and the boss 321, as well as the boss 321 and the pressure ring 322, can be fixedly connected by welding or bonding.

[0038] In a specific embodiment, as shown in Figures 3 and 4, the top edge of the annular support 3 protrudes upward to form an annular protrusion 331, and the outer edge of the diaphragm 4 is bent downward and fixedly connected to the top and side surfaces of the annular protrusion 331.

[0039] In another specific configuration, an annular protrusion 331 can be provided on the top edge of the annular support 3, with the height of the annular protrusion 331 being equal to the height of the gap. The outer diameter of the annular protrusion 331 is smaller than the diameter of the outer wall of the annular support 3. The outer edge of the diaphragm 4 is bent downward, and the bent portion of the diaphragm 4 is fixedly connected to the top and side surfaces of the annular protrusion 331. This fixed connection method can effectively improve the stability of the diaphragm 4. The diaphragm 4 and the top and side surfaces of the annular protrusion 331 can be fixedly connected by welding or bonding.

[0040] In a specific embodiment, as shown in FIG5 and FIG6 , the bottom edge of the diaphragm 4 extends downward to form a connecting ring 121 , and the inner sidewall of the connecting ring 121 is fixedly connected to the top edge and outer sidewall of the annular support 3 .

[0041] In other structural designs, the bottom edge of the diaphragm 4 may be extended downward to form a connecting ring 121. The inner sidewall of the connecting ring 121 is fixedly connected to the top edge and outer sidewall of the annular support 3. This fixed connection method increases the fixed contact area, thereby further improving the stability of the fixing of the diaphragm 4. The inner sidewall of the connecting ring 121 and the annular support 3 can be fixedly connected by welding or bonding.

[0042] In a specific embodiment, the ratio of the diameter to the thickness of the circular area of ​​the diaphragm 4 covering the gap is 20-150. Specifically, the diameter of the circular area of ​​the diaphragm 4 covering the gap is 3-30 mm.

[0043] Furthermore, the ratio of the diameter to thickness of the circular area covering the gap can be set to 20-150. Relatively speaking, the thicker the diaphragm 4, the larger the diameter of the corresponding circular area where the diaphragm 4 is located; the thinner the diaphragm 4, the smaller the diameter of the corresponding circular area where the diaphragm 4 is located. Furthermore, the diameter of the circular area of ​​the diaphragm 4 can be set to 3-30 mm, and the thickness of the circular area of ​​the diaphragm 4 can be set to 0.03-0.6 mm. Furthermore, the spacing between the top surface of the diaphragm 4 and the top surface of the base plate 1 can be set to 1-10 mm.

[0044] In a specific embodiment, an inclined surface 12 is provided at the connection between the edge of the diaphragm 4 and the annular support 3 , and the cross section of the gap is a trapezoidal gap corresponding to the inclined surface 12 .

[0045] Furthermore, an inclined surface 12 can be provided on the edge of the diaphragm 4 facing the annular support 3. The specific configuration of the inclined surface 12 is shown in FIG7 . The resulting gap has a corresponding trapezoidal cross-section. This trapezoidal gap ensures that when the oil expands due to heat, the central circular area of ​​the diaphragm 4 elastically deforms upward as a whole, preventing significant local elastic deformation of the diaphragm 4 that could cause wear or deformation (inelastic deformation), thereby effectively improving the diaphragm 4's ability to resist expansion. Specifically, the angle between the inclined surface 12 and the horizontal plane is 8-35° to further enhance the diaphragm 4's ability to resist expansion.

[0046] In one specific embodiment, the diaphragm 4 is a metal diaphragm 4. The height of the gap is 1.2-3 times the thickness of the diaphragm 4. The diaphragm 4 can be a metal diaphragm 4, such as an aluminum diaphragm, copper diaphragm, or stainless steel diaphragm with good ductility. Furthermore, to allow the oil contained in the gap to transmit vibrations while minimizing the overall volume of the T-shaped oil chamber 5, the height of the gap can be set to 1.2-3 times the thickness of the diaphragm 4.

[0047] In one specific embodiment, a sealing ring 6 is further provided between the tube base 2 and the base plate 1. The inner diameter of the sealing ring 6 is larger than the inner diameter of the circular through hole 11 in the base plate 1. Furthermore, to improve the stability of the abutment between the tube base 2 and the bottom surface of the support groove, a sealing ring 6 can be provided between the tube base 2 and the base plate 1. The sealing ring 6 is annular and has an inner diameter larger than the inner diameter of the circular through hole 11 in the base plate 1. The specific arrangement of the sealing ring 6 is shown in Figures 2, 4, and 6.

[0048] The present application discloses a thin-film high-precision sensor, which includes a base plate, a tube seat, an annular support, and a diaphragm. The annular support is provided with a support groove on the side facing the base plate, and a support through-hole on the side away from the base plate. The annular support is fixedly connected to the edge of the base plate. A sensing device is provided on the tube seat, which is assembled in the support groove, and the side of the tube seat on which the sensing device is provided faces the support through-hole, and the sensing device extends into the support through-hole. A circular through-hole is provided on the base plate, and a plurality of connecting wires are provided on the side of the tube seat away from the sensing device, and the connecting wires all pass through the circular through-hole and extend outward. The diaphragm is covered and provided on the side of the annular support on which the support through-hole is provided. The above-mentioned high-precision sensor, by forming a T-shaped oil chamber and setting the diaphragm as a flexible diaphragm, effectively reduces the volume of oil in the oil chamber to increase the anti-expansion capability, thereby improving the reliability of the sensor.

[0049] The above description is merely a specific embodiment of the present application, but the scope of protection of the present application is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in the present application, and such modifications or substitutions should be included in the scope of protection of the present application. Therefore, the scope of protection of the present application should be based on the scope of protection of the claims.

Claims

1. A thin-film type high-precision sensor, comprising a bottom plate, a tube base, an annular support and a diaphragm; One side of the annular support facing the bottom plate is provided with a support groove, and one side of the annular support away from the bottom plate is provided with a support through-hole; the annular support is fixedly connected to the edge of the bottom plate; The tube base is provided with a sensing device, the tube base is assembled in the support groove, and one side surface of the tube base provided with the sensing device faces the support through-hole, and the sensing device extends into the support through-hole; The bottom plate is provided with a circular through-hole, and a plurality of connecting wires are provided on one side surface of the tube base facing away from the sensing device, and the connecting wires all penetrate through the circular through-hole and extend outwards; The diaphragm is covered on one side surface of the annular support provided with the support through-hole, the edge of the diaphragm is fixedly connected to the top surface edge of the annular support, and a gap is formed between the diaphragm and the top surface of the annular support, and the gap and the support through-hole are combined into a T-shaped oil cavity, oil is injected into the T-shaped oil cavity, and the diaphragm is a flexible diaphragm.

2. The thin-film type high-precision sensor according to claim 1, wherein, The top surface edge of the annular support protrudes upwards to form a boss, the lower side surface of the diaphragm is fixedly connected to the upper end surface of the boss, and the lower end surface of the compression ring is fixedly connected to the edge of the diaphragm.

3. The thin-film type high-precision sensor according to claim 1, wherein, The top surface edge of the annular support protrudes upwards to form an annular protrusion, and the outer edge of the diaphragm is bent downwards and fixedly connected to the top surface and side surface of the annular protrusion.

4. The thin-film type high-precision sensor according to claim 1, wherein, The bottom edge of the diaphragm extends downwards to form a connecting ring, and the inner side wall of the connecting ring is fixedly connected to the top surface edge and the outer side wall of the annular support.

5. The thin-film type high-precision sensor according to claim 1, wherein, The ratio of the diameter to the thickness of the circular area where the diaphragm covers the gap is 20 - 150.

6. The thin-film type high-precision sensor according to claim 2, wherein, The ratio of the diameter to the thickness of the circular area where the diaphragm covers the gap is 20 - 150.

7. The thin-film type high-precision sensor according to claim 3, wherein, The ratio of the diameter to the thickness of the circular area where the diaphragm covers the gap is 20 - 150.

8. The thin-film type high-precision sensor according to claim 4, wherein, The ratio of the diameter to the thickness of the circular area where the diaphragm covers the gap is 20 - 150.

9. The thin-film type high-precision sensor according to claim 5, wherein, The diameter of the circular area where the diaphragm covers the gap is 3 - 30 mm.

10. The thin-film type high-precision sensor according to claim 6, wherein, The diameter of the circular area where the diaphragm covers the gap is 3 - 30 mm.

11. The thin-film type high-precision sensor according to claim 7, wherein, The diameter of the circular area where the diaphragm covers the gap is 3 - 30 mm.

12. The thin-film type high-precision sensor according to claim 8, wherein, The diameter of the circular area where the diaphragm covers the gap is 3 - 30 mm.

13. The thin-film type high-precision sensor according to claim 1, wherein, An inclined surface is provided at the connection between the edge of the diaphragm and the annular support, and the cross-section of the gap is a trapezoidal gap corresponding to the inclined surface.

14. The thin-film type high-precision sensor according to claim 2, wherein, An inclined surface is provided at the connection between the edge of the diaphragm and the annular support, and the cross-section of the gap is a trapezoidal gap corresponding to the inclined surface.

15. The thin-film type high-precision sensor according to claim 3, wherein, An inclined surface is provided at the connection between the edge of the diaphragm and the annular support, and the cross-section of the gap is a trapezoidal gap corresponding to the inclined surface.

16. The thin-film type high-precision sensor according to claim 4, wherein, An inclined surface is provided at the connection between the edge of the diaphragm and the annular support, and the cross-section of the gap is a trapezoidal gap corresponding to the inclined surface.

17. The thin-film type high-precision sensor according to claim 1, wherein, The diaphragm is a metal diaphragm.

18. The thin-film type high-precision sensor according to claim 5, wherein, The height of the gap is 1.2 - 3 times the thickness of the diaphragm.

19. The thin-film type high-precision sensor according to claim 6, wherein, The height of the gap is 1.2 - 3 times the thickness of the diaphragm.

20. The thin-film type high-precision sensor according to claim 1, wherein A sealing ring is also provided between the socket and the bottom plate, and the inner diameter of the sealing ring is larger than the inner diameter of the circular through hole on the bottom plate.

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