Electroplating device for square substrate

Abstract

Provided in the present invention is an electroplating device for a square substrate. The electroplating device comprises an electroplating chamber, wherein the electroplating chamber comprises an anode chamber, the anode chamber comprising a central anode region and a peripheral anode region. The central anode region corresponds to an incircle region of the square substrate, and comprises one or more anode regions; and the peripheral anode region corresponds to a region between an incircle and a circumcircle of the square substrate, and is divided into a plurality of sector-shaped anode regions in a circumferential direction. Each anode region is provided with an anode, an anode electrolyte inlet and an anode electrolyte outlet. As the square substrate rotates, electrodes in regions covered by corners of the square substrate can be independently controlled to be activated, and electrodes in uncovered regions are deactivated, thereby avoiding a slightly thick coating on an edge portion of the square substrate, and ensuring the electroplating uniformity of the square substrate.

Description

Electroplating equipment for square substrates Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing equipment, in particular to an electroplating device for a square substrate. Background Art

[0002] With the gradual popularization of fan-out advanced packaging technology and changes in substrate materials, the application of square substrates is increasing. The current electroplating of square substrates mainly adopts vertical electroplating, but the square substrates using vertical electroplating cannot achieve the same effect as circular substrates, such as poor surface flatness and more obvious COP (Crystal Originated Particles) defects. In addition, during the vertical electroplating process, the substrate and the fixture are switched between different plating tanks together, and the problem of electrolyte cross-contamination cannot be avoided, which will also affect the stability of the electrolyte and the plating layer. Therefore, applying horizontal electroplating to square substrate electroplating will help improve the product performance of square substrate electroplating.

[0003] However, existing horizontal electroplating equipment is designed based on circular substrates, and the electrodes are designed to be circular or annular, and the circular substrate is rotated to complete the electroplating. The circular or annular electrodes match the shape of the circular substrate, and the circular substrate can cover all electrode areas, so the control of the electrodes is relatively convenient. For square substrates, their shape does not match the circular or annular electrodes, and the substrate cannot cover all electrode areas. During the rotation of the square substrate, its corners will sweep across the electrode area, and only part of the electrode area will be covered by the substrate at the same time. If the electrodes remain fully open, the edge of the substrate will cut the electric field, which will cause uneven electroplating and make the coating thicker at the edge of the substrate. Summary of the Invention

[0004] The object of the present invention is to provide an electroplating device for a square substrate, which is used to solve the problem of uneven electroplating caused by the mismatch between the square substrate and the existing horizontal electroplating equipment.

[0005] To achieve the above-mentioned and other related purposes, the present invention provides an electroplating device for a square substrate, comprising an electroplating chamber, wherein the electroplating chamber comprises:

[0006] an anode cavity, the anode cavity comprising a central anode region and a peripheral anode region, the central anode region corresponding to the inscribed circle region of the square substrate, the central anode region comprising one or more anode regions, the peripheral anode region corresponding to the region between the inscribed circle and the circumscribed circle of the square substrate, the peripheral anode region being divided into a plurality of sector-shaped anode regions along the circumferential direction, each anode region being provided with an anode, an anolyte inlet, and an anolyte outlet, and every two adjacent anode regions being separated by a vertically arranged partition wall;

[0007] A membrane frame is fixed to the top of the anode cavity, the membrane frame has a base with a mesh frame, the top of the base extends upward to form a side wall, the base and the side wall form a cathode cavity, the base is configured to divide the cathode cavity into a plurality of cathode areas corresponding to the anode areas, a plurality of branch pipes are provided in the base, and each branch pipe is provided with a plurality of injection holes to supply cathode electrolyte to the plurality of cathode areas.

[0008] Furthermore, the peripheral anode region includes a plurality of annular anode sub-regions, and each anode sub-region is equally divided into N sector-annular anode regions.

[0009] Furthermore, the peripheral anode region is equally divided into N sector-shaped anode regions along the circumferential direction, where N is a multiple of 4.

[0010] Furthermore, the anolyte inlet is arranged at the bottom of the anode chamber, and the anolyte outlet is arranged on the partition wall and has a height lower than that of the partition wall.

[0011] Furthermore, each anode region of the central anode region is provided with a plurality of evenly distributed anode electrolyte inlets and anode electrolyte outlets.

[0012] Furthermore, each anode region of the peripheral anode region is provided with only one anode electrolyte inlet and one anode electrolyte outlet, which are respectively arranged at the diagonal corners of the anode region.

[0013] Furthermore, a concentric first annular flow channel and a second annular flow channel are provided at the bottom of the anode cavity. The first annular flow channel is connected to the anode electrolyte inlet of the multiple fan-shaped anode areas. The first annular flow channel is provided with an anode electrolyte inlet, and the inlet is connected to the anode electrolyte inlet pipeline. The second annular flow channel is connected to the anode electrolyte outlet of the multiple fan-shaped anode areas. The second annular flow channel is provided with an anode electrolyte outlet, and the outlet is connected to the anode electrolyte outlet pipeline.

[0014] Furthermore, the anolyte inlet is connected to the anode liquid storage tank via a liquid inlet pipeline, and the anolyte outlet is connected to the anode liquid storage tank via a liquid discharge pipeline.

[0015] Furthermore, it also includes a drainage pipeline connected between the anolyte inlet of the central anode area and the anode storage tank.

[0016] Furthermore, the membrane frame is fixed on the top of the anode chamber, and the bottom of the membrane frame is supported by the partition wall.

[0017] Furthermore, it also includes a sealing member provided between the membrane frame and the partition wall, wherein the sealing member is a mesh frame and is consistent with the layout of the partition wall.

[0018] Furthermore, it also includes a sealing ring arranged between the edge of the membrane frame and the top of the anode cavity, and the sealing ring is provided with a plurality of through holes, some of which are used to pass through the liquid inlet pipe of the cathode electrolyte, and the other part of the through holes are used to pass through the fixing parts to fix the membrane frame and the anode cavity, and the two types of through holes are distributed alternately.

[0019] Furthermore, the sealing ring is provided with two annular ribs, which are respectively arranged on both sides of the through hole to isolate the fixing member from the electrolyte.

[0020] Furthermore, the base is provided with a plurality of first partitions and second partitions, wherein the first partitions are distributed circumferentially and the second partitions are distributed radially, and the first partitions and the second partitions are used to divide the cathode cavity into a plurality of cathode regions corresponding one to one with the anode regions.

[0021] Furthermore, one end of each branch pipe is connected to the side wall of the membrane frame, and a cathode electrolyte inlet is provided on the bottom wall of each branch pipe close to the side wall, and the cathode electrolyte inlet is connected to the cathode electrolyte inlet pipe.

[0022] Furthermore, a plurality of first branch pipes among the plurality of branch pipes are communicated with a central channel passing through the center of the membrane frame to supply cathode electrolyte to the central channel.

[0023] Furthermore, a diffusion plate is provided on the top of the membrane frame, and a large number of small holes are provided on the diffusion plate; wherein the cathode electrolyte is supplied to the diffusion plate through the central channel and supplied to the square substrate through the small holes on the diffusion plate.

[0024] Furthermore, the cathode cavity includes a central cathode region and a peripheral cathode region, which correspond to the central anode region and the peripheral anode region respectively.

[0025] Furthermore, the opening directions of the multiple injection holes are inclined relative to the vertical direction; each branch tube is provided with an injection hole on the same side of the portion located in the central cathode area, and each branch tube is provided with injection holes on both sides of the portion located in the peripheral cathode area, and the opening directions of the injection holes on both sides are symmetrical about the vertical direction.

[0026] Furthermore, a notch is formed at the bottom of the base located at the central cathode area.

[0027] Furthermore, the bottom of the base is conical or inclined.

[0028] Furthermore, when the bottom of the base is conical, the multiple branch pipes are parallel to the bottom of the base.

[0029] As described above, the present invention provides an electroplating device for a square substrate, which has the following beneficial effects: the anode cavity is divided into a plurality of anode areas along the circumferential direction, each anode area accommodates an anode, and as the square substrate rotates, the electrodes in the areas covered by the corners of the square substrate can be independently controlled to open, and the electrodes in the uncovered areas can be closed, thereby avoiding thicker coatings on the edge portions of the square substrate and ensuring uniformity of electroplating on the square substrate.

[0030] Summary of the Figures

[0031] The features and properties of the present invention are further described by the following examples and accompanying drawings.

[0032] FIG1 is a schematic diagram showing a conventional horizontal electroplating apparatus for electroplating a square substrate;

[0033] FIG2 is a cross-sectional view of an electroplating apparatus according to an embodiment of the present invention;

[0034] FIG3 is a cross-sectional view of an electroplating apparatus according to an embodiment of the present invention;

[0035] FIG4 is a cross-sectional view of an anode chamber in an electroplating apparatus according to an embodiment of the present invention;

[0036] 5A, 5B and 5C are schematic diagrams showing the division of anode regions in an electroplating apparatus according to an embodiment of the present invention;

[0037] FIG6 is a schematic diagram showing an anode chamber in an electroplating apparatus according to an embodiment of the present invention;

[0038] FIG7A is a schematic diagram showing the bottom of the anode chamber in an electroplating apparatus according to an embodiment of the present invention;

[0039] FIG7B is a schematic cross-sectional view of an annular flow channel in an electroplating apparatus according to an embodiment of the present invention;

[0040] FIG8 is a schematic diagram showing the circulation of the anolyte in an electroplating apparatus according to an embodiment of the present invention;

[0041] FIG9 is a partial cross-sectional view of an electroplating apparatus according to an embodiment of the present invention;

[0042] FIG10 is a schematic diagram showing a sealing member of an electroplating device according to an embodiment of the present invention;

[0043] FIG11A is a schematic diagram showing a sealing ring of an electroplating device according to an embodiment of the present invention;

[0044] FIG11B is a cross-sectional view of a sealing ring of an electroplating device according to an embodiment of the present invention;

[0045] FIG12 is a schematic diagram showing a film frame of an electroplating device according to an embodiment of the present invention;

[0046] FIG13 is a schematic diagram showing the bottom of a film frame of an electroplating device according to an embodiment of the present invention;

[0047] FIG14 is a cross-sectional view of an electroplating apparatus according to another embodiment of the present invention;

[0048] FIG. 15 is a cross-sectional view of an electroplating apparatus according to another embodiment of the present invention.

[0049] Preferred embodiments of the present invention

[0050] The following describes the embodiments of the present invention through specific examples. Those skilled in the art will readily understand the other advantages and benefits of the present invention from the disclosure herein. The present invention may also be implemented or applied through various other specific embodiments, and the details in this specification may be modified or altered based on different viewpoints and applications without departing from the spirit of the present invention.

[0051] It should be noted that the illustrations provided in this embodiment are merely schematic illustrations of the basic concept of the present invention. Although the illustrations only show components relevant to the present invention and are not drawn according to the number, shape, and size of components in actual implementation, the form, quantity, and proportion of each component in actual implementation may be varied arbitrarily, and the component layout may be more complex. Furthermore, parts with the same reference numerals in multiple figures represent identical or equivalent parts or components.

[0052] Figure 1 is a schematic diagram of an existing horizontal electroplating device electroplating a square substrate. As shown in Figure 1, when the substrate is rotated during the electroplating process, the four corners of the substrate will sweep over the electrode area, and only part of the electrodes are covered by the substrate at the same time. If all electrodes are turned on, the current will be concentrated in the four corners of the substrate, resulting in a thicker coating in the corner area and poor uniformity of electroplating on the entire surface. The present application proposes an electroplating device to solve the problem of poor uniformity of square substrates in horizontal electroplating.

[0053] As shown in Figures 2 and 3, this embodiment proposes an electroplating device for a square substrate, including an electroplating chamber for accommodating an electrolyte. The interior of the electroplating chamber is divided into an anode chamber 11 and a cathode chamber 12. The anode chamber 11 and the cathode chamber 12 are separated by an ion membrane 14 fixed on a membrane frame 13.

[0054] Ion membrane 14 is a cationic membrane used for copper, nickel, and tin electroplating. Alternatively, ion membrane 14 may be a proton exchange membrane or a conventional ion membrane covered with a fabric structure suitable for alloy electroplating. Ion membrane 14 is mounted on the bottom of membrane frame 13. Membrane frame 13 is a rigid perforated or mesh frame.

[0055] Referring to the cross-sectional view of the anode chamber 11 shown in FIG4 , the anode chamber 11 is divided into multiple anode regions 111, with each two adjacent anode regions 111 separated by a vertically arranged partition wall 112. It will be understood that the vertical arrangement herein includes a substantially vertical arrangement. The partition wall 112 can be made of a non-conductive and chemically resistant plastic. The partition wall 112 separates the electric field and limits the flow of the anolyte. As shown in FIG2 , each anode region 111 houses an anode, which can be connected to an independently controlled power supply channel 118. Each power supply channel 118 is connected to a power supply, which can be a DC power supply or a pulse power supply. Specifically, the power supply channel 118 of a single anode can be connected to a single power supply, or the power supply channels 118 of multiple anodes can be connected to a single power supply, with a switch connected between each power supply channel 118 and the power supply. The anode is made of a soluble material, such as copper, nickel, or tin. Alternatively, the anode can be made of an inert material.

[0056] As shown in FIG5A , the anode cavity 11 is divided into a central anode region 11a and a peripheral anode region 11b. The central anode region 11a is circular, and its size is the inscribed circle of the square substrate. The more common shapes of square substrates are square or rectangular, and the central anode region 11a is the inscribed circle of the square or rectangle. A central anode is set in the central anode region 11a, and the central anode fills the central anode region 11a. As shown in FIG5B , the central anode region 11a can also be divided into multiple anode regions 111, for example, it can be divided into a circular or elliptical anode region 111 and one or more concentric annular anode regions 111, each anode region 111 accommodating an annular anode; as shown in FIG5C , the central anode region 11a can also be divided into multiple sector-shaped anode regions 111, each anode region 111 accommodating a sector-shaped anode. The peripheral anode region 11b surrounds the central anode region 11a, and the outer circumference size of the peripheral anode region 11b is the circumscribed circle of the square substrate. As shown in FIG5A , the peripheral anode region 11 b can be equally divided into N sector-ring anode regions 111 in the circumferential direction, where N is a multiple of 4. As shown in FIG5B , the peripheral anode region 11 b can also be divided into multiple annular anode sub-regions in the radial direction, and each annular anode sub-region can be further equally divided into N sector-ring anode regions 111.

[0057] In some embodiments, referring to the schematic diagram of the anode cavity 11 shown in FIG6 , the central anode area 11a is composed of a concentric elliptical anode region 111 and an annular anode region 111, and the peripheral anode area 11b is composed of two concentric annular anode sub-areas. Among them, each annular anode sub-area of ​​the peripheral anode area is equally divided into 24 sector-ring anode areas 111. The more the number of sector-ring anode areas 111, the more accurately the coating thickness at the edge of the substrate can be controlled. In this embodiment, the peripheral anode area is divided into 48 sector-ring anode areas 111, and each anode area 111 accommodates a small anode, which is connected to an independently controlled power supply channel 118. As the square substrate rotates, the anode in the area covered by the corner of the square substrate can be independently controlled to turn on, and the anode in the uncovered area can be turned off, so as to avoid the coating being too thick at the edge of the square substrate and ensure the uniformity of the electroplating of the square substrate.

[0058] 4 and 6 , each anode region 111 has an independent anolyte inlet 113 disposed at the bottom of the anode chamber 11. The anolyte inlet 113 is connected to the anolyte inlet pipeline to provide anolyte to the anode region 111. Simultaneously, each anode region 111 has an independent anolyte outlet 114 to discharge the electrolyte, decomposition products, and particles in the anode region 111. The anolyte outlet 114 is disposed on the partition wall 112 of the anode region 111, and the height of the anolyte outlet 114 is lower than the height of the partition wall 112.

[0059] Specifically, in the central anode area, a plurality of anode electrolyte inlets 113 and a plurality of anode electrolyte outlets 114 may be provided in each annular anode area 111 to uniformly distribute the flow of the anode electrolyte. In the peripheral anode area, an anode area 111 of each of the N sector rings is provided with an anode electrolyte inlet 113 and an anode electrolyte outlet 114, which are respectively arranged at diagonal positions of the sector rings. Figure 7A shows a schematic diagram of the bottom of the anode chamber 11 in an embodiment of the present invention. In order to simplify the inlet and outlet pipes of the anode electrolyte in the peripheral anode area, a concentric first annular flow channel 1151 and a second annular flow channel 1152 are provided at the bottom of the anode chamber 11. Figure 7B is a schematic cross-sectional view of the first annular flow channel 1151 in the vertical direction. Referring to Figures 7A and 7B , first annular flow channel 1151 is connected to the anolyte inlet 113 of N sector-shaped annular anode regions 111. A anolyte inlet 116 is provided on first annular flow channel 1151, and inlet 116 is connected to the anolyte inlet pipeline. Similarly, second annular flow channel 1152 is connected to the anolyte outlet 114 of N sector-shaped annular anode regions 111. A anolyte outlet 117 is provided on second annular flow channel 1152, and outlet 117 is connected to the anolyte discharge pipeline. The number of anolyte inlets 116 or outlets 117 is less than N. The anolyte flows in the first annular flow channel 1151 through the liquid inlet 116, and then enters the anode area 111 from the anolyte inlet 113 of each sector-annular anode area 111; similarly, when discharging, the anolyte flows into the second annular flow channel 1152 through the anolyte outlet 114 of each sector-annular anode area 111, and then is discharged from the liquid outlet 117.

[0060] In the embodiment shown in Figures 6 and 7A, the two annular anode sub-regions comprising the peripheral anode region 11b are each provided with a first annular flow channel 1151 and a second annular flow channel 1152, respectively used for the inlet and outlet of the anolyte. In this embodiment, the first annular flow channel 1151 is provided with four anolyte inlets 116, and the second annular flow channel 1152 is provided with four outlets 117.

[0061] FIG8 is a schematic diagram of the circulation of the anode electrolyte in this embodiment. The anode liquid storage tank 190 is connected to the anode electrolyte inlet 113 through the liquid inlet line L1, and is connected to the anode electrolyte outlet 114 through the liquid discharge line L2, so that the electrolyte in the anode liquid storage tank circulates between the anode chamber 11 and the anode liquid storage tank 190. The liquid inlet line L1 includes a liquid inlet main pipe and a liquid inlet branch pipe. The liquid inlet main pipe is provided with a first valve 191, a pump 192, and a filter 193. One end of the liquid inlet main pipe is connected to the anode liquid storage tank 190, and the other end is connected to multiple liquid inlet branch pipes. Multiple liquid inlet branch pipes are each provided with a second valve 194, a flow meter 195, and a needle valve 196. Each liquid inlet branch pipe of the central anode region is directly connected to the anolyte inlet 113, and each liquid inlet branch pipe of the peripheral anode region is respectively connected to multiple anolyte inlets 116. The electrolyte flows through the first annular flow channel 1151 and then flows into the anolyte inlet 113 of each anode region 111. Among them, the first valve 191 is used to control the opening and closing of the entire liquid inlet pipeline, and the second valve 194 is used to control the opening and closing of each liquid inlet branch pipe.

[0062] Similarly, drainage line L2 includes a main drain pipe and branch drain pipes. The main drain pipe is equipped with a third valve 197 and a needle valve 196. One end of the main drain pipe is connected to the anode liquid storage tank 190, and the other end is connected to multiple branch drain pipes. Each branch drain pipe of the central anode zone is directly connected to the anolyte outlet 114, while each branch drain pipe of the peripheral anode zone is connected to multiple anolyte outlets 117.

[0063] In some embodiments, in order to improve the efficiency of draining the anode electrolyte, a drain line L3 may be connected between the anode electrolyte inlet 113 of the central anode region and the anode storage tank 190 to open the needle valve 196 on the drain line before replacing the electrolyte to drain the waste anode electrolyte.

[0064] Referring to Figures 2 and 9, the membrane frame 13 is fixed to the top of the anode chamber 11, and the bottom of the membrane frame 13 is supported by the partition wall 112. A porous plate 15 supporting the ion membrane 14 is also provided between the bottom of the membrane frame 13 and the ion membrane 14. The porous plate 15 is provided with a large number of small holes. As shown in Figure 10, a first sealing member 1301 is also provided between the ion membrane 14 and the partition wall 112 of the anode chamber 11 to isolate each anode region 111. A second sealing member 1302 is also provided between the ion membrane 14 and the porous plate 15. The first sealing member 1301 and the second sealing member 1302 are both mesh frames, consistent with the layout of the partition wall 112. The extrusion design of the two sealing members ensures the sealing between the anode regions 111.

[0065] A sealing ring 1303 is provided between the membrane frame 13 and the edge of the top of the anode chamber 11. As shown in Figures 11A and 11B, the sealing ring has 2N evenly distributed through-holes. N of these through-holes are used to pass through the cathode electrolyte inlet tube, and the other N through-holes are used to pass through fixings, such as screws, to secure the membrane frame 13 to the top of the anode chamber 11. These two types of through-holes are evenly and alternately distributed on the sealing ring. The sealing ring 1303 also has two annular first ribs 13031, located on either side of the 2N through-holes. These ribs are used to isolate the fixings from the electrolyte, prevent electrolyte contamination of the fixings, and ensure a tight seal between the membrane frame 13 and the anode chamber 11. A second rib 13032 is also provided on the edge of each through-hole in the sealing ring 1303 to ensure a tight seal between the cathode electrolyte inlet tube and the fixings.

[0066] 9 , the membrane frame 13 includes a base 131, which is horizontally arranged on the top of the anode chamber 11. The base 131 is a rigid perforated or mesh frame. The base 131 of the membrane frame 13 extends from the edge of the membrane frame 13 toward the center. The periphery of the base 131 extends upward to form a side wall 132. The base 131 and the side wall 132 constitute the cathode chamber 12. The base 131 is provided with a plurality of first separators 133 and second separators 134 for dividing the cathode chamber 12 into a plurality of cathode regions corresponding to the anode regions 111 one by one. The first separator 133 is circumferentially arranged on the base 131, and the second separator 134 is radially arranged on the base 131. The cathode chamber 12 is divided into a central cathode region and a peripheral cathode region, corresponding to the central anode region and the peripheral anode region, respectively. Similarly, the peripheral cathode region can be divided into a plurality of annular cathode sub-regions.

[0067] In the embodiment shown in FIG9 , three annular first partitions 133 divide the cathode cavity 12 into four concentric cathode sub-regions, which are named as the first cathode sub-region, the second cathode sub-region, the third cathode sub-region and the fourth cathode sub-region from the center to the outside, wherein the first cathode sub-region and the second cathode sub-region constitute the central cathode region, and the third cathode sub-region and the fourth cathode sub-region constitute the peripheral cathode region.

[0068] Referring to the schematic diagrams of the membrane frame 13 shown in Figures 12 and 13, the base 131 of the membrane frame 13 has multiple branch pipes 135 for supplying electrolyte to the cathode chamber 12. As shown in Figure 3, one end of each branch pipe 135 is fixedly connected to the side wall 132 of the membrane frame 13. A cathode electrolyte inlet 136 is provided on the bottom wall near the side wall 132, which communicates with the cathode electrolyte inlet pipe located at the bottom of the membrane frame 13. Each branch pipe 135 extends from the edge of the membrane frame 13 to the center of the membrane frame 13, so that the electrolyte in each branch pipe 135 flows from the edge of the membrane frame 13 to the center of the membrane frame 13. The membrane frame 13 has a central channel 139 running through the center of the membrane frame 13. The central channel 139 can be circular or elliptical in shape. The branch pipes 135 can be categorized into a first branch pipe 1351, a second branch pipe 1352, and a third branch pipe 1353 according to their length. As shown in Figures 9 and 12, one end of the first branch pipe 1351 is connected to the central channel 139 to supply the cathode electrolyte to the central channel 139. The first branch pipe 1351 passes through the first cathode sub-region, the second cathode sub-region, the third cathode sub-region, and the fourth cathode sub-region. The second branch pipe 1352 passes through the second cathode sub-region, the third cathode sub-region, and the fourth cathode sub-region. The third branch pipe 1353 passes through the third cathode sub-region and the fourth cathode sub-region.

[0069] The total number of branches 135 is N, so each annular cathode sub-region can be equally divided into N sector-ring cathode regions by multiple branches 135, corresponding to the anode region 111. In this embodiment, the total number of branches 135 is 24, of which there are 6 first branches 1351, 6 second branches 1352, and 12 third branches 1353. As shown in Figure 12, branches 135 of three lengths are evenly spaced to divide the cathode sub-region into equal parts to achieve uniform flow distribution. In some embodiments, in order to achieve uniform control of the electric field and uniform control of the cathode electrolyte flow, as shown in Figure 13, a notch 138 is provided at the bottom of the portion of the base 131 located in the central cathode region so that the cathode electrolyte in each cathode region of the central cathode region can circulate.

[0070] Referring to the schematic diagram of the bottom of the membrane frame 13 shown in Figure 13, each branch pipe 135 is provided with a plurality of injection holes 1354. The diameters of the plurality of injection holes 1354 can be the same or different. In some embodiments, the opening direction of each injection hole 1354 is inclined relative to the vertical direction to prevent the cathode electrolyte from being sprayed onto the same place and causing impact. The injection holes 1354 are opened on the same side of the portion of each branch pipe 135 located in the central cathode area. For example, the injection holes 1354 can be set on the relative left side of each branch pipe 135 and the connecting pipe, or on the relative right side of each branch pipe 135 and the connecting pipe. The injection holes 1354 are opened on both sides of the portion of each branch pipe 135 located in the peripheral cathode area, and the opening directions of the injection holes 1354 on both sides are symmetrical about the vertical direction. In the peripheral cathode area, since each branch pipe 135 is arranged on both sides of the cathode area, the injection holes 1354 are provided on both sides of the branch pipe 135 to uniformly control the flow field.

[0071] A diffuser plate 16 is also mounted on top of the membrane frame 13. As shown in Figure 2, the diffuser plate 16 is provided with numerous small holes. The bottom surface of the diffuser plate 16 is provided with multiple slots for mating with the first and second separators 133, 134 (see Figure 9) to isolate the electric field and limit the cathode electrolyte flow field. Some of these slots are concentric rings and mate with the first separator 133; others are radially arranged along the diffuser plate 16 and mate with the second separator 134. In the embodiment shown in Figure 2, the bottom surface of the diffuser plate 16 is provided with four annular slots and 24 radially arranged slots. The first and second separators 133, 134 on the membrane frame 13 are inserted into the corresponding slots of the diffuser plate 16, thereby supporting the diffuser plate 16 within the cathode chamber 12. The diffuser plate 16 and the membrane frame 13 are connected by fasteners, thereby securing the diffuser plate 16 within the cathode chamber 12.

[0072] In the actual process, the cathode electrolyte enters the cathode electrolyte inlet 136 on the bottom wall of the branch pipe 135 from the liquid inlet pipe, flows from the edge of the membrane frame 13 to the center of the membrane frame 13 through the branch pipe 135, flows into the central channel 139 of the membrane frame 13, and then reaches the diffuser plate 16 through the central channel 139, and then reaches the substrate through multiple small holes on the diffuser plate 16, and the substrate is subjected to the electroplating process.

[0073] The bottom of the base 131 of the membrane frame 13 can be designed in various shapes, with the height of the partition wall 112 in the anode chamber 11 coordinated with the bottom of the base 131 of the membrane frame 13. For example, as shown in Figures 2 and 3, the bottom of the base 131 can be generally conical. The branch pipe 135 can be parallel to the bottom of the base 131, i.e., the direction of the branch pipe 135 is diagonally downward from the edge to the center of the membrane frame 13. Alternatively, as shown in Figures 14 and 15, the bottom of the base 131 can be an inclined surface. The branch pipe 135 can be arranged horizontally within the base 131.

[0074] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the present invention. Anyone skilled in the art may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by one of ordinary skill in the art without departing from the spirit and technical principles disclosed herein are intended to be covered by the claims of the present invention.

Claims

1. An electroplating device for a square substrate, comprising an electroplating chamber, characterized in that, The electroplating chamber includes: An anode chamber, the anode chamber includes a central anode region and a peripheral anode region. The central anode region corresponds to the inscribed circle region of the square substrate. The central anode region includes one or more anode regions. The peripheral anode region corresponds to the region between the inscribed circle and the circumscribed circle of the square substrate. The peripheral anode region is circumferentially divided into a plurality of fan-shaped anode regions. Each anode region is provided with an anode, an anode electrolyte inlet, and an anode electrolyte outlet. Every two adjacent anode regions are separated by a vertically arranged partition wall. A membrane holder, the membrane holder is fixed on the top of the anode chamber. The membrane holder has a base with a mesh frame. The top of the base extends upward to form a side wall. The base and the side wall form a cathode chamber. The base is configured to divide the cathode chamber into a plurality of cathode regions corresponding to the anode regions. A plurality of branch pipes are provided in the base. Each branch pipe is provided with a plurality of spray holes to supply the cathode electrolyte to the plurality of cathode regions.

2. The electroplating apparatus according to claim 1, wherein The peripheral anode region includes a plurality of annular anode sub-regions, and each anode sub-region is equally divided into N fan-shaped anode regions.

3. The electroplating apparatus according to claim 1, wherein, The peripheral anode region is circumferentially equally divided into N fan-shaped anode regions, where N is a multiple of 4.

4. The electroplating apparatus according to claim 1, characterized in that, The anode electrolyte inlet is arranged at the bottom of the anode chamber, and the anode electrolyte outlet is arranged on the partition wall and the height is lower than the height of the partition wall.

5. The electroplating device according to claim 1, characterized in that, Each anode region in the central anode region is provided with a plurality of uniformly distributed anode electrolyte inlets and anode electrolyte outlets.

6. The electroplating apparatus according to claim 1, wherein Each anode region in the peripheral anode region is only provided with one anode electrolyte inlet and one anode electrolyte outlet, which are respectively arranged at the diagonals of the anode region.

7. The electroplating device according to claim 6, wherein, A first annular flow channel and a second annular flow channel are further arranged at the bottom of the anode chamber. The first annular flow channel is communicated with the anode electrolyte inlets of a plurality of fan-shaped anode regions. An inlet for the anode electrolyte is arranged on the first annular flow channel, and the inlet is connected to the inlet pipeline of the anode electrolyte. The second annular flow channel is communicated with the anode electrolyte outlets of a plurality of fan-shaped anode regions. An outlet for the anode electrolyte is arranged on the second annular flow channel, and the outlet is connected to the outlet pipeline of the anode electrolyte.

8. The electroplating apparatus according to claim 1, wherein, The anode electrolyte inlet is connected to the anode storage tank through an inlet pipeline, and the anode electrolyte outlet is connected to the anode storage tank through a drain pipeline.

9. The electroplating apparatus according to claim 8, wherein, A drain pipeline is further included and is connected between the anode electrolyte inlet in the central anode region and the anode storage tank.

10. The electroplating device according to claim 1, characterized in that, The membrane holder is fixed on the top of the anode chamber, and the bottom of the membrane holder is supported by the partition wall.

11. The electroplating apparatus according to claim 10, characterized in that, A seal is further included and is arranged between the membrane holder and the partition wall. The seal is a mesh frame and has the same layout as the partition wall.

12. The electroplating device according to claim 1, characterized in that, A seal ring is further included and is arranged between the membrane holder and the edge of the top of the anode chamber. A plurality of through holes are arranged on the seal ring. Some of the through holes are used for passing through the inlet pipe of the cathode electrolyte, and the other part of the through holes are used for passing through fixing parts to fix the membrane holder and the anode chamber. The two types of through holes are alternately distributed.

13. The electroplating device according to claim 12, wherein, Two annular ribs are further arranged on the seal ring, and are respectively arranged on both sides of the through holes for isolating the fixing parts and the electrolyte.

14. The electroplating apparatus according to claim 1, wherein, The base is provided with a plurality of first partition plates and second partition plates. The first partition plates are distributed circumferentially, and the second partition plates are distributed radially. The first partition plates and the second partition plates are used to divide the cathode chamber into a plurality of cathode regions corresponding to the anode regions one by one.

15. The electroplating apparatus according to claim 1, characterized in that, One end of each branch pipe is connected to the side wall of the membrane holder. A cathode electrolyte inlet is formed in the bottom wall of each branch pipe close to the side wall, and the cathode electrolyte inlet is communicated with the liquid inlet pipe of the cathode electrolyte.

16. The electroplating apparatus according to claim 15, characterized in that, A plurality of first branch pipes among the plurality of branch pipes are communicated with a central channel passing through the center of the membrane holder to supply the cathode electrolyte to the central channel.

17. The electroplating apparatus according to claim 16, wherein A diffusion plate is further provided on the top of the membrane holder, and a large number of small holes are provided on the diffusion plate. Among them, the cathode electrolyte is supplied to the diffusion plate through the central channel and supplied to the square substrate through the small holes on the diffusion plate.

18. The electroplating device according to claim 1, characterized in that, The cathode chamber includes a central cathode region and a peripheral cathode region, corresponding to the central anode region and the peripheral anode region respectively.

19. The electroplating apparatus according to claim 18, characterized in that, The opening directions of the plurality of injection holes are inclined relative to the vertical direction. Injection holes are formed on the same side of the part of each branch pipe located in the central cathode region, and injection holes are formed on both sides of the part of each branch pipe located in the peripheral cathode region, and the opening directions of the injection holes on both sides are symmetric about the vertical direction.

20. The electroplating apparatus according to claim 18, wherein, A notch is further formed in the bottom of the base located at the bottom of the central cathode region.

21. The electroplating device according to claim 1, wherein The bottom of the base is conical or inclined.

22. The electroplating apparatus according to claim 21, wherein, When the bottom of the base is conical, the plurality of branch pipes are parallel to the bottom of the base.

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