Laser component and method for producing a laser component

Abstract

The invention relates to a laser component comprising: a surface-emitting laser having at least one horizontal resonator and at least one laser-light emission surface which is substantially parallel to the horizontal resonator; and an optical element which is arranged downstream of the at least one laser-light emission surface in the emission direction of the surface-emitting laser. The optical element is integrally 3D-printed onto an upper face of the surface-emitting laser and is designed to direct laser light emitted from the at least one laser-light emission surface in such a way that it leaves the laser component substantially at an angle of 90° with respect to the at least one laser-light emission surface.

Description

[0001] LASER COMPONENT AND METHOD FOR MANUFACTURING A LASER COMPONENT

[0002] This application claims priority from German patent application No. 10 2024 101 908 . 5 of January 23, 2024, the disclosure of which is hereby incorporated by reference into this application.

[0003] The present invention relates to a laser component and a method for producing a laser component.

[0004] BACKGROUND

[0005] Horizontal cavity surface-emitting lasers (HCSELs) have emerged as an alternative to edge-emitting lasers or vertical cavity surface-emitting lasers (VCSELs). Surface-emitting lasers with a horizontal cavity are particularly notable for their ability to achieve high optical power with an extremely compact component.

[0006] Such semiconductor lasers, like VCSELs, can be manufactured entirely in a wafer assembly and at wafer level. In contrast to VCSELs, however, light amplification occurs parallel to an active zone and thus perpendicular to a growth direction, as is the case with conventional edge-emitting lasers. In order to create a surface-emitting laser, deflection mirrors in the form of angled facets are integrated, which deflect laser light amplified parallel to the active zone towards the top side of the laser. The etched facets are preferably formed at a 45° to the propagation direction of the laser light.

[0007] However, when manufacturing surface-emitting lasers with a horizontal resonator, it was found that the etching angle of the oblique facets, or small deviations from a desired etching angle, have a major influence on the beam angle of the laser light emitted by the laser. One of the reasons for this is that when laser light is coupled out of the laser into air, a relatively large jump in the refractive index can occur, which can amplify even a small deviation from a desired etching angle, leading to a relatively large deviation from the desired beam angle of the laser light emitted by the laser. A deviation of the actual beam angle of the laser light emitted by the laser compared to a desired beam angle is also referred to as beam tilt.

[0008] For example, a deviation from a desired etching angle of ±1 ° in combination with a refractive index jump of 3 . 5 can lead to a deviation from a desired beam angle of the laser light emitted by the laser of ±7 °.

[0009] There is therefore a need to counteract at least one of the problems described above and to provide an improved laser component. Furthermore, there is a need to provide a method for producing such a laser component.

[0010] SUMMARY OF THE INVENTION

[0011] This need is met by the subject matter of the independent patent claims. Further developments and embodiments of the proposed principle are specified in the subclaims.

[0012] To solve the problem, the inventors propose printing an optical element for beam correction of the emitted laser light directly onto the top side or a laser light emission surface of a surface-emitting laser with a horizontal resonator using a 3D printing process. This allows the optical element to be applied with very good accuracy directly onto or in front of the laser light emission surface of the surface-emitting laser, and the 3D printing process allows for almost unlimited degrees of freedom with regard to the shape and design of the optical element. For example, it is possible to arrange a lens with an adapted shape on each surface-emitting laser with a horizontal resonator in order to compensate for the beam tilt of each laser as best as possible.Up to now, only glass lenses have been used for similar applications. However, these lenses have to be placed manually and are only of limited use due to placement tolerances, and are hardly suitable for small lasers. However, the specific beam tilt of each laser can be compensated for relatively easily using an appropriately designed optical element that is applied to the laser using 3D printing, for example in a wafer composite. This corrects the major disadvantage of the beam tilt in an HCSEL. In addition, simpler and cheaper etching processes can possibly be used to produce the angled facets, since even a deviation from a desired etching angle of greater than ±1° can be corrected using an adapted optical element.

[0013] According to a first aspect, a laser component is specified. During operation, the laser component generates electromagnetic radiation, in particular laser light. The laser component is configured to generate electromagnetic radiation with a wavelength that lies, for example, in the wavelength range between infrared radiation and UV radiation. In particular, the electromagnetic radiation can lie in the wavelength range of infrared radiation and / or UV radiation.

[0014] According to at least one embodiment of the laser component, the laser component comprises a surface-emitting laser with at least one horizontal resonator and at least one laser light emission surface arranged substantially parallel to the horizontal resonator. The surface-emitting laser can, in particular, be a surface-emitting laser with a horizontal resonator (HCSEL).

[0015] The surface-emitting laser comprises, for example, a semiconductor body, reflective outer surfaces which form at least one resonator and redirect a laser light generated in the semiconductor body, and electrical connection points for contacting the surface-emitting laser. The surface-emitting laser comprises at least one laser light emission surface. During operation, the laser light generated by the laser emerges from the at least one laser light emission surface. The at least one laser light emission surface can, for example, be formed on an upper side of the surface-emitting laser which runs essentially parallel to the horizontal resonator.

[0016] The surface-emitting laser comprises at least one active zone, which comprises the at least one horizontal resonator. For example, in the region of the active zone, an active layer of the surface-emitting laser borders two reflective layers that are part of the at least one resonator.

[0017] According to at least one embodiment of the laser component, the laser component comprises an optical element which is arranged downstream of the at least one laser light emission surface in the emission direction of the surface-emitting laser. Accordingly, the optical element follows the at least one laser light emission surface, in particular in the emission direction of the surface-emitting laser.

[0018] This makes it possible for all or at least a large part of the laser light leaving the surface-emitting laser to pass through the optical element and be optically influenced by it.

[0019] The optical element is, for example, an optical element for beam shaping or alignment by means of optical refraction. For example, the optical element is designed to align a laser light emitted from the at least one laser light emission surface in such a way that it leaves the optical element substantially at an angle of 90° relative to the at least one laser light emission surface. In particular, the optical element can be designed to align a laser light leaving the at least one laser light emission surface at an angle other than 90° relative to the at least one laser light emission surface in such a way that it leaves the optical element substantially at an angle of 90° relative to the at least one laser light emission surface. In addition, the optical element can be a lens for collimating and / or focusing the laser light.Alternatively or additionally, it is possible that the optical element is a diffractive optical element (also DOE), in which the beam shaping is based on the principle of optical diffraction in order to homogenize the laser light emitted by the surface-emitting laser along at least one direction.

[0020] The optical element is formed from a material that is transparent to the laser light, such as glass, a semiconductor material, and / or a plastic material. The optical element can also be formed from a ceramic, for example, or comprise a ceramic material, such as ZrO or SiN. In particular, the optical element is formed from a 3D-printable material, such as cured methacrylate.

[0021] The optical element is 3D printed onto the upper surface of the surface-emitting laser. The bond between the upper surface and the optical element is, in particular, free of additives. This means that the connection is formed only by the material of the joining partners, which are connected to one another by the bond. The joining partners are therefore directly connected to one another without any additional bonding material such as an adhesive or welding filler.

[0022] Because the optical element is 3D printed in a material-to-material manner onto the upper side of the surface-emitting laser, it is possible to arrange the optical element with very high positional accuracy relative to the at least one laser light emission surface. In addition, the 3D printing process means that the degrees of freedom with regard to the shape and design of the optical element are almost unlimited. In addition, due to the production by means of 3D printing, the optical element has a characteristic structure, namely a ribbed structure applied or cured from individual layers. The optical element can accordingly have a ribbed structure, in particular on its side surfaces. According to at least one embodiment of the laser component, the optical element is designed to direct laser light emitted by the surface-emitting laser along at least one direction, in particular along a fast axis (fast axis).fast axis) of the laser light. For example, the optical element may be configured to collimate laser light emitted by the surface-emitting laser along the fast axis and the slow axis of the laser light, or the optical element may be configured to collimate laser light emitted by the surface-emitting laser along the fast axis or the slow axis.

[0023] According to at least one embodiment of the laser component, the optical element is designed to homogenize laser light emitted by the surface-emitting laser along at least one direction, in particular along a slow axis of the laser light. For example, the optical element can be designed to homogenize laser light emitted by the surface-emitting laser along the fast axis and the slow axis of the laser light, or the optical element can be designed to homogenize laser light emitted by the surface-emitting laser along the fast axis or the slow axis.

[0024] The term "homogenization" can be understood in particular to mean that the laser light is emitted homogeneously, i.e., essentially evenly distributed, over a defined area along the direction in which the laser light is to be homogenized. This can be particularly desirable if the laser light from several "individual" light cones of several adjacent laser light emission surfaces or adjacent laser channels of a laser are to jointly illuminate a defined area homogeneously. Accordingly, homogenization can prevent areas between the light cones from being illuminated only slightly or not at all.According to at least one embodiment of the laser component, the optical element is designed to collimate a laser light emitted by the surface-emitting laser along a first direction, in particular along a fast axis of the laser light, and to homogenize it along a second direction, in particular along a slow axis of the laser light.

[0025] According to at least one embodiment, the optical element comprises a plurality of microlenses. The microlenses can also be 3D-printed. The microlenses can serve, in particular, to achieve homogenization of the laser light emitted by the surface-emitting laser along at least one direction, in particular along a slow axis of the laser light. In particular, the optical element can comprise an array of a plurality of microlenses.

[0026] According to at least one embodiment, the surface-emitting laser has at least two horizontal resonators arranged next to one another and a laser light emission surface each assigned to one of the horizontal resonators. The number two is to be understood as an example, and the surface-emitting laser can also have three, four or more horizontal resonators arranged next to one another and a laser light emission surface each assigned to the resonators. Such a surface-emitting laser can in particular be referred to as a multi-channel laser. Such a surface-emitting laser can be designed to emit laser light of different wavelengths, or can be designed to emit laser light of substantially the same wavelength.

[0027] According to at least one embodiment, the optical element is assigned to the at least two laser light emission surfaces. The optical element can be dimensioned such that it extends over the at least two laser light emission surfaces and is arranged downstream of them in the beam path. Accordingly, the optical element can be configured to jointly align and optionally collimate and / or homogenize the laser light emitted by the at least two laser light emission surfaces.

[0028] According to at least one embodiment, an optical element is assigned to each of the at least two laser light emission surfaces. Accordingly, an optical element is arranged downstream of each laser light emission surface in the beam path, which optical element aligns the laser light emitted by the laser light emission surface and optionally collimates and / or homogenizes it.

[0029] For example, the optical element can be assigned to all existing laser light emission surfaces, or it can be assigned to only a subset of all existing laser light emission surfaces, or it can be assigned to only one laser light emission surface. Furthermore, it is also possible for a first optical element to be assigned to a subset of all existing laser light emission surfaces, and a second optical element to be assigned to a further subset or only one laser light emission surface.

[0030] According to at least one embodiment, the optical element is connected to the top side of the surface-emitting laser via at least one 3D-printed bridge. The bridge is made of the same 3D-printed material as the optical element. Such a bridge can be particularly advantageous if it is not desired to print the material of the optical element directly onto the at least one laser light emission surface. The bridge can, for example, be in the form of a ring around the at least one laser facet or in the form of one or more supports adjacent to the at least one laser light emission surface. The at least one 3D-printed bridge can be produced at the same time, using the same method and using the same material as the rest of the optical element.

[0031] According to at least one embodiment, a gap is formed at least in some regions between the at least one laser light emission surface and the optical element. The gap is filled, for example, with air or another medium. The gap can, for example, be designed to be so small that organic substances cannot or can only hardly get into the space between the laser light emission surface and the optical element. In particular, the gap can be designed such that the regions of the optical element are spaced no more than 10 pm from the at least one laser light emission surface. This can, for example, ensure that organic substances cannot or can only hardly get into the space between the laser light emission surface and the optical element.

[0032] According to at least one embodiment, the optical element has at least one underside facing the laser light emission surface, the underside being tilted relative to the laser light emission surface. As a result, in combination with corresponding refractive index jumps between the at least one laser light emission surface, a medium between the at least one laser light emission surface and the optical element, and the optical element, beam shaping or alignment can be achieved by means of optical refraction of the laser light emitted by the at least one laser light emission surface. In particular, the tilting can lead to laser light emitted from the at least one laser light emission surface being aligned such that it leaves the optical element substantially at an angle of 90° relative to the at least one laser light emission surface.

[0033] According to at least one embodiment, the optical element comprises a material with a refractive index that differs from the refractive index of the material of the surface-emitting laser or the material of the horizontal resonator. In addition, a medium between the optical element and the at least one laser light emission surface can have a refractive index that is smaller than the refractive index of the material of the optical element and the material of the surface-emitting laser or the material of the horizontal resonator.

[0034] According to at least one embodiment, the surface-emitting laser has at least one reflective surface that adjoins the at least one horizontal resonator and is designed to direct a laser light generated in the at least one horizontal resonator in the direction of the at least one laser light emission surface. The at least one reflective surface can be formed, for example, by an etched and, in particular, coated side surface of the surface-emitting laser.

[0035] According to at least one embodiment, the at least one reflective surface is tilted such that a laser light generated in the at least one horizontal resonator and directed by means of the at least one reflective surface in the direction of the at least one laser light emission surface leaves the at least one laser light emission surface at an angle other than 90° with respect to the at least one laser light emission surface. This can result in particular from the at least one reflective surface deviating from a desired tilt due to manufacturing tolerances, so that a laser light directed by means of the at least one reflective surface in the direction of the at least one laser light emission surface does not leave the at least one laser light emission surface at an angle of 90° with respect to the at least one laser light emission surface, but rather at an angle other than 90°.

[0036] According to at least one embodiment, the surface-emitting laser comprises a gallium nitride (GaN) or gallium arsenide (GaAs) substrate or consists largely of GaN or GaAs. In particular, the surface-emitting laser can comprise an indium aluminum gallium arsenide (InAlGaAs) substrate or an indium gallium nitride (InGaN) substrate. However, it is also possible for the surface-emitting laser to comprise or consist of other semiconductor materials, for example silicon. Other possible materials for at least one substrate of the surface-emitting laser can be sapphire, aluminum nitride or gallium arsenide.

[0037] According to at least one embodiment of the laser component, the laser component comprises a carrier or a carrier substrate. The remaining components of the laser component, in particular the surface-emitting laser, are mounted on the carrier. The carrier substrate can serve both for electrical control, mechanical mounting, and / or as a heat sink for the laser component.

[0038] Furthermore, a method for producing a laser component is specified. In particular, a laser component described here can be produced by means of the method. This means that all features disclosed for the laser component are also disclosed for the method, and vice versa.

[0039] According to at least one embodiment of the method, a surface-emitting laser is first provided with at least one horizontal resonator and at least one laser light emission surface which is arranged substantially parallel to the horizontal resonator.

[0040] According to at least one embodiment of the method, an optical element is provided on a top side of the surface-emitting laser. The optical element is 3D-printed on the top side of the surface-emitting laser, downstream of the at least one laser light emission surface in the radiation direction of the surface-emitting laser, such that it is integrally bonded to the top side of the surface-emitting laser.

[0041] The optical element is 3D-printed onto the top side or is designed to align a laser light emitted from the at least one laser light emission surface in such a way that it leaves the optical element substantially at an angle of 90° relative to the at least one laser light emission surface.

[0042] The procedure includes the following steps:

[0043] Providing at least one surface emitting laser having at least one horizontal resonator and at least one laser light emission surface arranged substantially parallel to the horizontal resonator; and

[0044] 3D printing an optical element onto a top side of the surface-emitting laser such that it is arranged downstream of the at least one laser light emission surface in the emission direction of the surface-emitting laser and is integrally connected to the top side of the surface-emitting laser; wherein the optical element is designed to align a laser light emitted from the at least one laser light emission surface such that it leaves the optical element substantially at an angle of 90° relative to the at least one laser light emission surface.

[0045] According to at least one embodiment, the step of 3D printing the optical element is carried out as a function of a first radiation angle of a laser light generated in the at least one horizontal resonator and emitted from the at least one laser light emission surface relative to the upper side, such that a laser light emitted from the optical element leaves the optical element substantially at an angle of 90° relative to the at least one laser light emission surface.In particular, the step of 3D printing the optical element is carried out in an individually adapted manner as a function of a first radiation angle of a laser light generated in the at least one horizontal resonator and emitted from the at least one laser light emission surface relative to the upper side, so that a laser light emitted from the at least one laser light emission surface is aligned by means of the adapted optical element and leaves the optical element substantially at an angle of 90° relative to the at least one laser light emission surface.

[0046] According to at least one embodiment, the method further comprises detecting a first radiation angle of a laser light generated in the at least one horizontal resonator and emitted from the at least one laser light emission surface relative to the laser light emission surface, in particular before the step of 3D printing the optical element. The step of detecting the first radiation angle can comprise:

[0047] Operating the surface emitting laser such that it emits laser light from the at least one laser light emission surface ; and determining the first emission angle on the basis of two far - field measurements of the emitted laser light , wherein the two far - field measurements are carried out at different distances from the at least one laser light emission surface .

[0048] Based on the determined first beam angle, the optical element can then be individually printed onto the top side of the surface-emitting laser.

[0049] According to at least one embodiment, the step of providing a surface-emitting laser comprises providing a plurality of adjacently arranged surface-emitting lasers on a carrier. The step of 3D printing an optical element can in this case comprise 3D printing a respective optical element onto the top side of the plurality of adjacently arranged surface-emitting lasers, or 3D printing a common optical element onto the top sides of the plurality of adjacently arranged surface-emitting lasers.

[0050] According to at least one embodiment, the step of 3D printing the optical elements is carried out in each case as a function of a detected first radiation angle of a laser light emitted from the respective laser light emission surface relative to the laser light emission surface, such that a laser light emitted from the optical elements leaves the optical elements in each case substantially at an angle of 90° relative to the at least one laser light emission surface. The optical elements can accordingly be printed in an individually adapted manner onto the upper sides of the surface-emitting lasers, such that a laser light emitted from the optical elements leaves the optical elements in each case substantially at an angle of 90° relative to the at least one laser light emission surface.Alternatively, and in the case of a common optical element, it is also possible for the optical element to have regions by means of which a laser light emitted from the laser light emission surfaces is respectively aligned, so that a laser light emitted from the common optical element leaves the optical element substantially at an angle of 90° relative to the at least one laser light emission surface. According to at least one embodiment, the method further comprises:.

[0051] Detecting a second radiation angle of a laser light emitted from the optical elements relative to the respective laser light emission surface, in particular after the step of 3D printing the optical elements; and

[0052] Determining a deviation of the detected second emission angle from a perpendicular to the respective laser light emission surface. In particular, the method can comprise a verification step by which it can be verified whether the optical elements were printed in such a way that alignment of the laser light emitted from the laser light emission surfaces was successful and accordingly lies within a permissible emission corridor.

[0053] According to at least one embodiment, the method further comprises:

[0054] Separating laser components, each comprising at least one of the plurality of surface-emitting lasers arranged next to one another, each having a 3D-printed optical element thereon; and optionally sorting out laser components in which a detected second radiation angle does not lie within a defined target corridor, wherein the target corridor is defined in particular by a maximum deviation of the detected second radiation angle of less than 5°, or less than 2°, from a perpendicular to the respective laser light emission surface.

[0055] In particular, the method may comprise a sorting step by means of which laser components that do not lie within a permissible emission corridor can be sorted out.

[0056] According to at least one embodiment, the step of 3D printing comprises printing such that the optical element is designed to collimate a laser light emitted by the surface-emitting laser along at least one direction, in particular along a fast axis of the laser light.

[0057] According to at least one embodiment, the step of 3D printing comprises printing such that the optical element is designed to homogenize a laser light emitted by the surface-emitting laser along at least one direction, in particular along a slow axis of the laser light.

[0058] BRIEF DESCRIPTION OF THE DRAWINGS

[0059] Further aspects and embodiments according to the proposed principle will become apparent with reference to the various embodiments and examples which will be described in detail in conjunction with the accompanying drawings.

[0060] Fig. 1 shows the possible beam profile of a surface emitting laser with a horizontal resonator;

[0061] Fig. 2 shows a sectional view of a laser device according to some aspects of the proposed principle;

[0062] Fig. 3 shows a sectional view of another embodiment of a laser component according to some aspects of the proposed principle; and

[0063] Fig. 4 shows an isometric view of an embodiment of an optical element according to some aspects of the proposed principle.

[0064] DETAILED DESCRIPTION

[0065] The following embodiments and examples show various aspects and their combinations according to the proposed principle. The embodiments and examples are not always true to scale. Likewise, various elements can be shown enlarged or reduced in size to emphasize individual aspects. It goes without saying that the individual aspects and features of the embodiments and examples shown in the figures can be combined with one another without thereby impairing the inventive principle. Some aspects have a regular structure or shape. It should be noted that in practice slight deviations from the ideal shape can occur without, however, contradicting the inventive idea.

[0066] Furthermore, the individual figures, features, and aspects are not necessarily shown in the correct size, and the proportions between the individual elements may not always be correct. Some aspects and features are emphasized by being shown enlarged. However, terms such as "top", "above", "below", "below", "larger", "smaller", and the like are correctly represented with reference to the elements in the figures. This makes it possible to infer such relationships between the elements from the illustrations.

[0067] The schematic view of Figure 1 shows a surface-emitting laser 1 with a horizontal resonator 11, as well as the radiation characteristic of a laser light L generated by the laser 1 and emitted through its laser light emission surface 13.

[0068] The surface-emitting laser 1 comprises a semiconductor body 7 with an active zone 11. The semiconductor body 7 has a top side 71, a bottom side 72, and oblique etched side surfaces 73 connecting the top and bottom sides. A waveguide is formed in the semiconductor body 7 and contains the active zone 11 for generating laser radiation L. The active zone 11 defines a straight resonator axis R that runs parallel to a main direction of extension of the active zone 11. The resonator axis R extends as far as facets on the side surfaces 73 of the semiconductor body 7.

[0069] The waveguide or the active zone 11 is located between a first cladding layer 74 and a second cladding layer 75. The cladding layers 74, 75 have a lower refractive index than the waveguide or the active zone 11. This means that the laser radiation L is guided along the resonator axis R via total internal reflection. The cladding layers 74, 75 themselves are free of waveguide structures. The cladding layers 74, 75 are made, for example, of AlGaAs with an aluminum content of at least 20% and / or of at most 70%. The first cladding layer 74 is preferably n-doped and the second cladding layer 75 is preferably p-doped.

[0070] Electrical contact surfaces 51, 52 for external electrical contacting of the surface-emitting laser 1 are located on the top side 71 and the bottom side 72 of the semiconductor body 7. The contact surfaces 51, 52 are preferably metallic contact surfaces, which can be composed of one or more metal layers.

[0071] The facets on the side surfaces 73 of the semiconductor body 7 serve to guide the laser radiation L generated in the active zone 11 toward the first cladding layer 74 and through the first cladding layer 74. For this purpose, the facets are preferably tilted relative to the resonator axis R by an angle ß of, for example, 45°. Total reflection of the laser radiation L occurs at the facets, so that reflection surfaces 12 are formed on the side surfaces 73.

[0072] The facets or side surfaces 73 are preferably provided with a mirror or a reflective coating, so that they form the reflection surfaces 12. The top side 71 of the semiconductor body 7 is also provided with an anti-reflective coating 32 and with a reflection coating 31. At the anti-reflective coating 32, the laser radiation L is coupled out of the first cladding layer 21 via a laser light emission surface 13. At the reflection coating 31, the laser radiation L that has passed through the first cladding layer 74 is reflected back into the active zone 11. The waveguide along the resonator axis R forms in particular a resonator that is formed horizontally, i.e. essentially parallel to the main direction of extension of the active zone, between the side surfaces 73 or the reflection surfaces 12.Laser light generated in the active zone 11 can be amplified along the resonator, redirected toward the first cladding layer 74 via the reflection surfaces 12, and then emitted via the laser light emission surface 13 over the top of the laser 1. Accordingly, a surface-emitting laser 1 with a horizontal resonator 11 is obtained.

[0073] Viewed in cross-section, the entire semiconductor body 7 can be completely bordered and enclosed by the contact surfaces 51, 52 together with the optically active coatings 31, 32, 12. Furthermore, the semiconductor body 7 is surrounded by an encapsulation 8, which adjoins the side surfaces 73 of the semiconductor body 7. The laser 1 is further arranged on a carrier 6, which, for example, provides an electrical supply and / or control for the laser 1.

[0074] The side surfaces 73 or the reflective surfaces 12 are tilted in such a way that a laser light L generated in the horizontal resonator 11 is deflected in the direction of the top side 4 of the laser 1. In addition, the side surfaces 73 or the reflective surfaces 12 are preferably tilted in such a way that a laser light L generated in the horizontal resonator 11 and laser light L directed in the direction of the laser light emission surface 13 by means of the reflective surface 12 shown on the right in the figure leaves the laser light emission surface 13 at a first radiation angle og of 90 ° relative to the laser light emission surface 13. Due to manufacturing tolerances, in particular during production oretching of the side surfaces 73, however, it is difficult to achieve exactly the desired tilt ß of the side surfaces 73, so that the laser light does not leave the laser light emission surface 13 at an angle of 90 ° to the laser light emission surface 13, but rather at an angle other than 90 °. In particular, it was found that even small or very small deviations from a desired etching angle ß have a major influence on the emission angle og of the laser light L emitted by the laser 1. One of the reasons for this is that when laser light L is coupled out of the laser 1 in air, a relatively large jump in the refractive index can occur, which can also amplify a small deviation from a desired etching angle ß, which leads to a relatively large deviation from a desired emission angle «i of the laser light L emitted by the laser 1.For example, a deviation from a desired etching angle ß of ±1° in combination with a refractive index jump of 3 . 5 from semiconductor body 7 to air (3 . 5 vs. 1) can lead to a deviation of ±7° from a desired radiation angle og of the laser light L emitted by laser 1. This can make such a laser 1 unsuitable for many applications.

[0075] Figure 2 shows a sectional view of a laser component 100 according to some aspects of the proposed principle, by means of which the problems mentioned above can be overcome. The laser component 100 comprises, in addition to the surface-emitting laser 1 on the carrier 6, an optical element 2 which is printed onto the upper side 4 of the laser 1 by means of 3D printing and is individually adapted to the laser. The laser 1 is designed as described above and the optical element 2 is arranged downstream of the laser light emission surface 13 in the emission direction of the surface-emitting laser 1. It is therefore possible for all or at least a large part of the laser light L leaving the surface-emitting laser 1 to pass through the optical element 2 and be optically influenced by it.

[0076] The connection between the laser and the optical element 2 is free of further additives, such as an adhesive or a welding filler. In the case shown, the optical element 2 has 3D-printed webs 10 which fasten the optical element 2 to the top side 4 of the laser 1. Due to the webs 10, which in the case shown are designed, for example, in the form of an interrupted ring around the laser light emission surface 13, the laser light emission surface remains free of the material of the optical element 2 and a gap or free space 9 is created between the laser light emission surface 13 and the optical element 2.

[0077] The optical element 2 is an optical element for beam shaping or alignment by means of optical refraction. The optical element 2 is designed to align a laser light L emitted from the laser light emission surface 13 such that it leaves the optical element 2 substantially at a second emission angle θ2 of 90° relative to the laser light emission surface 13. In particular, the optical element 2 is designed such that it aligns a laser light L leaving the laser light emission surface 13 at a first emission angle θ1 not equal to 90° relative to the laser light emission surface 13 such that it leaves the optical element 2 substantially at a second emission angle θg of 90° relative to the laser light emission surface 13.

[0078] For this purpose, the optical element 2 has a bottom side 21 facing the laser light emission surface 13, which is tilted relative to the laser light emission surface 13. In combination with corresponding refractive index jumps between the laser light emission surface 13, a medium between the laser light emission surface 13 and the optical element 2, and the optical element 2, beam shaping or alignment can be achieved by optical refraction of the laser light emitted by the laser light emission surface 13.

[0079] Because the optical element 2 is 3D printed, it is possible to arrange the optical element 2 with very precise positioning relative to the laser light emission surface 13. In addition, the 3D printing process means that the degrees of freedom with regard to the shape and design of the optical element 2 are almost unlimited. Accordingly, the optical element 2 can be designed so as to be adapted to the first emission angle og in such a way that laser light L is emitted from the optical element 2 essentially only at a second emission angle θ2 of 90° relative to the laser light emission surface 13. For this purpose, the first emission angle θ2 can be detected, for example, at wafer level, and an optical element 2 adapted to the first emission angle θ2 can be printed onto the top side of the laser 1 in accordance with the first emission angle θ2.For example, it is possible to arrange a lens with an adapted shape on each surface-emitting laser with a horizontal resonator in order to compensate for a beam tilt of each laser as best as possible.

[0080] Figure 3 shows a sectional view of a further embodiment of a laser component 100 according to some aspects of the proposed principle. The laser component 100 likewise comprises a surface-emitting laser 1, as well as an optical element 2 which is printed onto an upper side 4 of the laser 1 by means of 3D printing. In addition to the embodiment shown in Figure 2, the optical element 2 has a lens shape on an upper side 22 opposite the underside 21 in order to not only align the laser light L emitted by the laser, but also to shape it. For example, the optical element 2 can thus also additionally be used to collimate the laser light emitted by the laser 1 along at least one axis of the laser light.

[0081] Figure 4 shows an isometric view of an optical element 2 with a plurality of microlenses according to some aspects of the proposed principle. Accordingly, the optical element 2 comprises a plurality of microlenses which are arranged next to one another and are designed to homogenize laser light from a plurality of laser channels of a laser 1 arranged next to one another along a common axis of the laser light, for example in order to also illuminate areas between the channels homogeneously. In addition, the optical element 2 can be designed to collimate the light along a different axis. In particular, the optical element shown in Figure 4 can be arranged, for example, on a surface-emitting laser 1 which has at least two horizontal resonators 11 arranged next to one another and each has a laser light emission surface 13 which is assigned to one of the horizontal resonators.Such a surface-emitting laser 1 can be referred to, in particular, as a multi-channel laser. The optical element 2 shown is assigned to the at least two laser light emission surfaces 13. The optical element 2 is dimensioned such that it extends over the at least two laser light emission surfaces 13 and is arranged downstream of them in the beam path.

[0082] LIST OF REFERENCE SYMBOLS

[0083] 1 surface-emitting laser

[0084] 11 active zone, resonator

[0085] 12 reflective surface

[0086] 13 Laser light emission surface

[0087] 2 optical element

[0088] 21 subpage

[0089] 22 Top

[0090] 31 Reflective coating

[0091] 32 Anti-reflective coating

[0092] 4 Top

[0093] 51 contact surface

[0094] 52 contact surface

[0095] 6 carriers

[0096] 7 semiconductor bodies

[0097] 71 Top

[0098] 72 bottom

[0099] 73 side surfaces

[0100] 74 Sheath layer

[0101] 75 cladding layer

[0102] 8 Encapsulation

[0103] 9 gap

[0104] 10 jetty

[0105] 100 laser components

[0106] Ol , «2 Beam angle ß angle

[0107] L Laser light

[0108] R Resonator axis

Claims

PATENT CLAIMS 1. A laser component (100) comprising a surface-emitting laser (1) with at least one horizontal resonator (11) and at least one laser light emission surface (13) arranged substantially parallel to the horizontal resonator (11); and an optical element (2) arranged downstream of the at least one laser light emission surface (13) in the emission direction of the surface-emitting laser (1); wherein the optical element (2) is 3D-printed in a material-to-material manner onto a top side (4) of the surface-emitting laser (1); wherein the optical element (2) is designed to align a laser light (L) emitted from the at least one laser light emission surface (13) such that it leaves the optical element (2) substantially at an angle of 90° relative to the at least one laser light emission surface (13);and wherein the optical element (2) has at least one underside (21) facing the laser light emission surface (12), wherein the underside (21) is tilted relative to the laser light emission surface (13); 2. Laser component according to claim 1, wherein the optical element (2) is further configured to collimate a laser light (L) emitted by the surface-emitting laser (1) along at least one first direction, in particular along a fast axis of the laser light; and / or wherein the optical element (2) is further configured to homogenize a laser light (L) emitted by the surface-emitting laser (1) along at least one second direction, in particular along a slow axis of the laser light.

3. Laser component according to one of the preceding claims, wherein the surface-emitting laser (1), in particular a multi-channel laser, has at least two horizontally arranged laser beams. zontal resonators (11) and each having a laser light emission surface (13) which is assigned to one of the horizontal resonators (11).

4. Laser component according to claim 3, wherein the optical element (2) is assigned to the at least two laser light emission surfaces (13); or wherein each of the at least two laser light emission surfaces (13) is assigned an optical element (2).

5. Laser component according to one of the preceding claims, wherein the optical element (2) has at least one 3D printed web (10) which is connected to the upper side (4), wherein the web (10) consists of the same 3D printed material as the optical element (2).

6. Laser component according to one of the preceding claims, wherein a gap (9) is formed between the at least one laser light emission surface (13) and the optical element (2).

7. Laser component according to one of the preceding claims, wherein the optical element (2) comprises a material with a refractive index that differs from the refractive index of the material of the at least one horizontal resonator (11); and wherein a medium between the optical element (2) and the at least one laser light emission surface (13) has a refractive index that is smaller than the refractive index of the material of the optical element (2) and the material of the at least one horizontal resonator (11).

8. Laser component according to one of the preceding claims, wherein the surface-emitting laser (1) has at least one reflecting surface (12) which adjoins the at least one horizontal resonator (11) and which is designed to direct a laser light (L) generated in the at least one horizontal resonator (11) in the direction of the at least one laser light emission surface (13); and wherein at least one reflecting surface (12) is tilted such that a wave generated in the at least one horizontal resonator (11) and by means of the at least one reflecting surface (12) in the direction of the at least one laser light emission surface (13) directed laser light (L) leaves the at least one laser light emission surface (13) at an angle of not equal to 90° relative to the at least one laser light emission surface (13).

9. A method for producing a laser component (100) comprising the steps: Providing at least one surface-emitting laser (1) with at least one horizontal resonator (11) and at least one laser light emission surface (13) arranged substantially parallel to the horizontal resonator (11); and 3D printing an optical element (2) onto a top side (4) of the surface-emitting laser (1) such that it is arranged downstream of the at least one laser light emission surface (13) in the emission direction of the surface-emitting laser (1) and is integrally connected to the top side (4) of the surface-emitting laser (1); wherein the optical element (2) is designed to align a laser light (L) emitted from the at least one laser light emission surface (13) such that it leaves the optical element (2) substantially at an angle of 90° relative to the at least one laser light emission surface (13);and wherein the optical element (2) has at least one underside (21) facing the laser light emission surface (12), wherein the underside (21) is tilted relative to the laser light emission surface (13); 10. The method according to claim 9, wherein the step of 3D printing the optical element (2) is carried out in dependence on a first radiation angle (oi) of a laser light (L) generated in the at least one horizontal resonator (11) and emitted from the at least one laser light emission surface (13) relative to the upper side (4), such that a laser light emitted from the optical element (2) leaves the optical element (2) substantially at an angle of 90° relative to the at least one laser light emission surface (13).

11. The method according to claim 9 or 10, further comprising detecting a first radiation angle (oi) of a laser light (L) generated in the at least one horizontal resonator (11) and emitted from the at least one laser light emission surface (13) with respect to the laser light emission surface (13), in particular before the step of 3D printing the optical element (2).

12. The method according to claim 11, wherein the step of detecting the first radiation angle (oi) comprises: Operating the surface-emitting laser (1) such that it emits laser light (L) from the at least one laser light emission surface (13); and Determining the first emission angle (oi) on the basis of two far-field measurements of the emitted laser light (L), wherein the two far-field measurements are carried out at different distances from the at least one laser light emission surface (13).

13. The method according to any one of claims 9 to 12, wherein the step of providing a surface-emitting laser (1) comprises providing a plurality of adjacently arranged surface-emitting lasers (1) on a carrier (6); and wherein the step of 3D printing an optical element (2) comprises 3D printing one optical element (2) each onto the top side (4) of the plurality of adjacently arranged surface-emitting lasers (1).

14. Method according to claim 13, wherein the step of 3D printing the optical elements (2) is carried out in each case as a function of a detected first radiation angle (og) of a laser light (L) emitted from the respective laser light emission surface (13) with respect to the laser light emission surface (13), such that a laser light (L) emitted from the optical elements (2) leaves the optical elements (2) in each case substantially at an angle of 90° with respect to the at least one laser light emission surface (13).

15. The method of claim 13 or 14, further comprising: Detecting a second radiation angle («2) of a laser light (L) emitted from the optical elements (2) relative to the respective laser light emission surface (13), in particular after the step of 3D printing the optical elements (2); and Determining a deviation of the detected second emission angle («2) from a perpendicular on the respective laser light emission surface (13).

16. The method according to any one of claims 13 to 15, further comprising: Separating laser components (100) each comprising at least one of the plurality of adjacently arranged surface-emitting lasers (1), each with a 3D-printed optical element (2) thereon; and optionally sorting out laser components (100) for which a detected second emission angle (og) does not lie within a defined target corridor, wherein the target corridor is defined in particular by a maximum deviation of the detected second emission angle («2) of less than 5°, or less than 2°, from a perpendicular on the respective laser light emission surface (13).

17. Method according to one of claims 9 to 16, wherein the optical element (2) is designed to detect a light emitted by the at least one surface-emitting laser (1). laser light (L) along at least one direction, in particular along a fast axis of the laser light; and / or wherein the optical element (2) is designed to collimate a laser light emitted by the at least one surface-emitting laser (1) To homogenize laser light (L) along at least one direction, in particular along a slow axis of the laser light.

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