sensor

Abstract

[Problem] To increase a ratio of an effective area on a surface of a substrate on which a comb coil is formed. [Solution] Provided is a sensor used for detection of an electromagnetic induction pen by an electromagnetic induction method, the sensor comprising: a comb coil Cx that has a linear base part Cxa extending in the x direction and a plurality of comb tooth parts Cxb each extending in the y direction and having one end connected to the base part Cxa; a pad group Px1 that comprises a plurality of pads provided respectively corresponding to the plurality of comb tooth parts Cxb; and a plurality of routing lines Rx that connect each of the plurality of pads to the other end of the corresponding comb tooth part Cxb. The pad group Px1 is disposed in an effective area EA of the sensor 1.

Description

Sensor

[0001] The present invention relates to a sensor, and more particularly to a sensor used for detecting a pen by an electromagnetic induction method (EMR method).

[0002] Position detection devices that detect the position of a pen using an electromagnetic induction method (EMR method) are known. Patent Document 1 discloses an example of this type of position detection device. As described in the document, this type of position detection device is configured with an EMR sensor including multiple loop coils and a sensor controller, which is an integrated circuit that detects the position of the pen using the EMR sensor. The sensor controller serves to detect the position of the pen on the touch surface by passing an alternating current through one of the loop coils to emit an alternating magnetic field from the touch surface, and then receiving, via each loop coil, the alternating magnetic field emitted from the pen's resonant circuit that has entered the emitted alternating magnetic field.

[0003] Each of the multiple loop coils that make up the EMR sensor is broken at one point, resulting in two open ends that form the two ends of the loop coil. The EMR sensor has a pad group that includes multiple pads corresponding to the ends of each loop coil, and is connected to a sensor controller via this pad group. Each pad is connected to the end of the corresponding loop coil by a routing line provided within the EMR sensor. In the EMR sensor of Patent Document 1, the pad group is arranged within the effective area of ​​the EMR sensor.

[0004] Furthermore, foldable displays have appeared in recent years. Examples of foldable displays are disclosed in Patent Documents 2 to 4. A foldable display is configured to be foldable along a folding line located in the center of a single large display screen.

[0005] International Publication No. 2019 / 171511 US Patent Application Publication No. 2022-0294886 US Patent Application Publication No. 2023-0071229 US Patent Application Publication No. 2021-0208709

[0006] In recent years, position detection devices have emerged that use comb coils (coils with multiple comb teeth protruding from a single linear base) instead of multiple loop coils to form EMR sensors. Although comb coils require time-sharing, N comb teeth can be used to form N-1 receiver coils, which makes it possible to reduce the wiring area for the receiver coils compared to using N-1 U-shaped receiver coils.

[0007] Due to its shape, the comb coil has an end connected to a pad on the opposite side from the end connected to the base of each comb tooth. As a result, in the past, each routing line of the comb coil was drawn out from each end of the effective area toward the outside of the effective area, and the pads were arranged outside the effective area. However, this configuration required space outside the effective area to arrange the routing lines and the pads, which correspondingly reduced the proportion of the effective area on the surface of the substrate on which the comb coil is formed, and therefore improvement was required.

[0008] Therefore, one object of the present invention is to provide a sensor that can increase the proportion of the effective area of ​​the surface of the substrate on which the interdigital coil is formed.

[0009] Furthermore, when an EMR sensor is mounted on the above-mentioned foldable display, the EMR sensor must also be configured to be foldable. To achieve this, the inventors of the present application are considering arranging multiple slits along the folding line in a staggered matrix (a type of matrix in which each column is offset by half a pitch from the columns on either side). By doing so, the force attempting to bend the EMR sensor is dispersed in the normal direction of the substrate due to local torsional deformation, making it possible to bend the EMR sensor as a whole.

[0010] When using a staggered matrix arrangement such as the one described above, it is impossible to provide straight wiring that crosses the bending lines. However, by using a waveform that avoids the slits, it is possible to provide wiring that crosses the bending lines, and each wiring that constitutes the base or comb teeth of the comb coil can actually be formed in a waveform shape. However, when arranging the pads of the comb coil within the active area to increase the ratio of the active area to the area of ​​the substrate, the routing lines are densely arranged and cannot be formed in a waveform shape. As a result, there is a problem that, at least for comb coils whose bases are arranged perpendicular to the bending lines, it is impossible to arrange the pads within the active area.

[0011] Therefore, another object of the present invention is to provide a sensor in which a group of pads of a comb coil, the base of which is arranged in a direction perpendicular to the bending line, can be arranged within the effective area.

[0012] A sensor according to a first aspect of the present invention is a sensor used for detecting an electromagnetic induction pen using an electromagnetic induction method, and includes: a first comb coil having a linear first base extending in a first direction, and a plurality of first comb tooth portions each extending in a second direction intersecting the first direction and each having one end connected to the first base; a first pad group consisting of a plurality of first pads corresponding to each of the plurality of first comb tooth portions; and a plurality of first routing lines connecting each of the plurality of first pads to the other end of the corresponding first comb tooth portion, wherein the first pad group is arranged within the effective area of ​​the sensor.

[0013] A sensor according to a second aspect of the present invention is the sensor according to the first aspect of the present invention, wherein the sensor is configured to be bendable by a bending line extending along the second direction, the first comb coil further having a plurality of third comb tooth portions each extending in a second direction intersecting the first direction and each having one end connected to the first base, and further including a third pad group consisting of a plurality of third pads provided corresponding to each of the plurality of third comb tooth portions, and a plurality of third routing lines connecting each of the plurality of third pads to the other end of the corresponding third comb tooth portion, the third pad group being arranged within the active area, the plurality of first comb tooth portions, the first pad group, and the plurality of first routing lines being arranged on one side of the bending line, and the plurality of third comb tooth portions, the third pad group, and the plurality of third routing lines being arranged on the other side of the bending line.

[0014] A sensor according to a third aspect of the present invention is the sensor according to the first aspect of the present invention, wherein the sensor is configured to be bendable along a bending line extending along the second direction, the first base portion, the plurality of first comb-teeth portions, the first pad group, and the plurality of first routing lines are arranged on one side of the bending line, and the first comb coil includes a linear third base portion extending in the first direction and a plurality of third comb-teeth each extending in the second direction and having one end connected to the first base. a third pad group consisting of a plurality of third pads provided corresponding to each of the plurality of third comb tooth portions, and a plurality of third routing lines connecting each of the plurality of third pads to the other end of the corresponding third comb tooth portion, wherein the third pad group is arranged within the effective area, the plurality of third comb tooth portions, the third pad group, and the plurality of third routing lines are arranged on the other side of the bending line, and the first base and the third base are not connected.

[0015] According to the first aspect of the present invention, there is no need to provide space outside the effective area for arranging the first pad group, so it is possible to increase the proportion of the effective area on the surface of the substrate on which the comb coil is formed.

[0016] According to the second or third aspect of the present invention, a first pad group for connecting a plurality of first comb teeth that are arranged on one side of the bending line among the plurality of comb teeth that constitute the first comb coil are arranged on one side of the bending line, and a third pad group for connecting a plurality of third comb teeth that are arranged on the other side of the bending line among the plurality of comb teeth that constitute the first comb coil are arranged on the other side of the bending line, thereby eliminating the need to extend routing wires beyond the bending line, and thus making it possible to arrange the pad group of a comb coil whose base is oriented perpendicular to the bending line within the effective area.

[0017] 1A is a plan view of a sensor 1 according to an embodiment of the present invention, and FIG. 1B is a cross-sectional view of the sensor 1 taken along line A-A in FIG. 1A. It is a diagram showing only the configuration of the sensor 1 that appears on one surface of the substrate BD. It is a diagram showing only the configuration of the sensor 1 that appears on the other surface of the substrate BD. 1A is a diagram showing a structure provided on the substrate BD to enable bending of the sensor 1, and FIG. 1B is an enlarged view of an area A1 shown in FIG. 1A. It is a diagram showing the configuration of the comb coil Cx and pad group Px2 that constitute a sensor 1 according to the background art of the present invention. It is a diagram showing the configuration of the comb coil Cx and pad group Px2 that constitute a sensor 1 according to a first modified embodiment of the present invention. It is a diagram showing the configuration of the comb coil Cx and pad group Px2 that constitute a sensor 1 according to a second modified embodiment of the present invention. It is a diagram showing the configuration of the comb coil Cx and pad group Px2 that constitute a sensor 1 according to a third modified embodiment of the present invention. It is a diagram showing the configuration of the comb coil Cx and pad group Px2 that constitute a sensor 1 according to a fourth modified embodiment of the present invention. FIG. 10 is a diagram showing the configuration of an interdigital coil Cx and a pad group Px2 that constitute a sensor 1 according to a fifth modification of an embodiment of the present invention. FIG. 11 is a diagram showing the configuration of an interdigital coil Cy and a pad group Py that constitute a sensor 1 according to the background art of the present invention. FIG. 12 is a diagram again showing the configuration of an interdigital coil Cy and a pad group Py that constitute a sensor 1 according to an embodiment of the present invention. FIG. 13 is a diagram showing the configuration of an interdigital coil Cy and a pad group Py that constitute a sensor 1 according to a sixth modification of an embodiment of the present invention. FIG. 14 is a diagram showing the configuration of an interdigital coil Cy and a pad group Py that constitute a sensor 1 according to a seventh modification of an embodiment of the present invention. FIG. 15 is a diagram showing the configuration of an interdigital coil Cy and a pad group Py that constitute a sensor 1 according to an eighth modification of an embodiment of the present invention. FIG. 16 is a diagram showing the configuration of an interdigital coil Cy and a pad group Py that constitute a sensor 1 according to a ninth modification of an embodiment of the present invention. FIG. 17 is a diagram showing the configuration of an interdigital coil Cy and a pad group Py that constitute a sensor 1 according to a tenth modification of an embodiment of the present invention. FIG. 18 is a diagram showing the configuration of an interdigital coil Cx and a pad group Px that constitute a sensor 1 according to an eleventh modification of an embodiment of the present invention.12A is a diagram showing a state of a current flowing in the comb coil Cx according to the embodiment of the present invention to generate an alternating magnetic field at the position of the bending line BA, and (b) and (c) are respectively a diagram showing a state of a current flowing in the comb coil Cx according to an eleventh modification of the embodiment of the present invention to generate an alternating magnetic field near the bending line BA. FIG. 13 is a diagram showing a configuration of the comb coil Cx and pad group Px constituting the sensor 1 according to a twelfth modification of the embodiment of the present invention. FIG. 14 is a diagram showing a configuration of the comb coil Cx and pad group Px constituting the sensor 1 according to a fourteenth modification of the embodiment of the present invention. FIG. 15 is a diagram showing a current path of an AC current supplied by the sensor controller to the comb coil Cx according to the fourteenth modification of the embodiment of the present invention when the sensor controller is configured to select two adjacent comb tooth portions Cxb sandwiching two comb tooth portions Cxb when transmitting an alternating magnetic field. FIG. 16 is a diagram showing a configuration of the comb coil Cx and pad group Px constituting the sensor 1 according to a fifteenth modification of the embodiment of the present invention. A figure showing the current path of the alternating current that the sensor controller supplies to the comb coil Cx according to the 15th variant of an embodiment of the present invention when the sensor controller is configured to select two adjacent comb tooth portions Cxb on either side of two comb tooth portions Cxb when transmitting an alternating magnetic field.

[0018] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0019] FIG. 1(a) is a plan view of a sensor 1 according to an embodiment of the present invention, and FIG. 1(b) is a cross-sectional view of the sensor 1 taken along line A-A in FIG. 1(a). The sensor 1 is an EMR sensor used to detect the position of an electromagnetic induction pen using the EMR method, and is disposed inside the panel surface of a position detection device. The position detection device is a foldable electronic device equipped with a foldable display, and is typically a smartphone or tablet terminal. A sensor controller is also disposed within the position detection device, which uses the sensor 1 to detect the position of the electromagnetic induction pen on the panel surface.

[0020] 1(a) and 1(b), the sensor 1 includes a substrate BD, comb coils Cx and Cy, a plurality of routing lines Rx and Ry, pad groups Px1, Px2, and Py, an anisotropic conductive film (ACF) 10, and flexible printed circuit boards 11 and 12. Hereinafter, the two pad groups Px1 and Px2 of the comb coil Cx may be collectively referred to as the "pad group Px." In the following description, the positions and orientations of the components will be explained using the x-axis, y-axis, and z-axis shown in FIGS. 1(a) and 1(b).

[0021] As shown in FIG. 1B, the substrate BD is a two-layer substrate configured so that wiring can be formed on both sides. The various wiring formed on the substrate BD is formed on either one surface (the surface on the positive side in the z direction) or the other surface (the surface on the negative side in the z direction) of the substrate BD. In FIG. 1A, the wiring formed on one surface of the substrate BD is indicated by dashed lines, and the wiring formed on the other surface of the substrate BD is indicated by solid lines. Each of the pad groups Px and Py is provided to penetrate the substrate BD and is connected to a corresponding routing line Rx or Ry on either one surface or the other surface of the substrate BD. Furthermore, the pad groups Px and Py are each connected to wiring within flexible printed circuit boards 11 and 12 via an anisotropic conductive film 10 on the upper surface of one surface of the substrate BD. Note that each pad constituting the pad groups Px and Py may be electrically connectable to another electronic substrate, and may be, for example, a connector.

[0022] 2 is a diagram showing only the configuration of the sensor 1 that appears on one surface of the substrate BD. As shown in the figure, the comb coil Cx has a shape in which a plurality of linear comb tooth portions Cxb each extending in the y direction protrude from a linear base portion Cxa extending in the x direction. Note that while the figure shows 14 comb tooth portions Cxb, the actual comb coil Cx has many more. The plurality of routing lines Rx correspond one-to-one to the plurality of comb tooth portions Cxb, and one end of each comb tooth portion Cxb (the end opposite to the end connected to the base portion Cxa) is connected to one of the pad groups Px1 and Px2 via the corresponding routing line Rx.

[0023] 3 shows only the configuration of the sensor 1 that appears on the other surface of the substrate BD. As shown in the figure, the comb coil Cy has a shape in which a plurality of linear comb tooth portions Cyb each extending in the x direction protrude from a linear base portion Cya extending in the y direction. The plurality of routing lines Ry correspond one-to-one to the plurality of comb tooth portions Cyb, and one end of each comb tooth portion Cyb (the end opposite to the end connected to the base portion Cya) is connected to the pad group Py via the corresponding routing line Ry.

[0024] 1A, each of the pad groups Px1, Px2, and Py has a configuration in which a plurality of pads are arranged side by side in the y direction. The pad groups Px1 and Py are arranged side by side in the y direction in a region between two adjacent comb-tooth portions Cxb in a region on the positive side of the x-direction of a bending line BA (described later) on the surface of the substrate BD, and the pad group Px2 is arranged in a region between two adjacent comb-tooth portions Cxb in a region on the negative side of the x-direction of the bending line BA. The pad groups Px1 and Py are connected to the sensor controller via a flexible printed circuit board 11, and the pad group Px2 is connected to the sensor controller via a flexible printed circuit board 12.

[0025] To briefly explain how the sensor controller detects the position of the electromagnetic induction pen, the sensor controller detects the position of the electromagnetic induction pen on the touch surface by transmitting an alternating magnetic field from the comb coil Cx and receiving the alternating magnetic field transmitted from the resonant circuit of the electromagnetic induction pen that has entered the transmitted alternating magnetic field with the comb coil Cy. More specifically, the sensor controller first selects two adjacent comb teeth Cxb, sandwiching a predetermined number of comb teeth Cxb (zero or more), and supplies an AC current to one of the selected comb teeth Cxb and an inverted current to the other comb teeth Cxb. This generates an AC current from one comb tooth Cxb through the base Cxa to the other comb tooth Cxb, resulting in an AC magnetic field on the panel surface. The sensor controller then stops supplying the AC current and the inverted current and starts receiving the AC current generated in each comb tooth Cyb. The AC current received in this manner is generated by the AC magnetic field emitted from the resonant circuit of the electromagnetic induction pen, and its reception strength reflects the distance from the electromagnetic induction pen to each comb tooth Cyb. The sensor controller repeatedly executes the above process while shifting the two selected comb tooth Cxb, thereby acquiring the reception strength of the AC current for each position arranged in a matrix on the panel surface. The sensor controller is then configured to use the results to derive a two-dimensional distribution of the reception strength on the panel surface, and derive its peak position as the position of the electromagnetic induction pen. It is also possible to configure the sensor controller so that the comb coil Cy emits an AC magnetic field and the comb coil Cx receives the AC magnetic field emitted from the resonant circuit of the electromagnetic induction pen.

[0026] The area EA shown in Figure 1(a) indicates the effective area in which the position of the electromagnetic induction pen can be determined by the sensor controller as described above. As shown in Figure 1(a), the pad groups Px1, Px2, and Py are all arranged inside this effective area EA. Therefore, with the sensor 1, it is not necessary to provide space for arranging the pad groups Px and Py outside the effective area EA, making it possible to increase the proportion of the effective area EA on the surface of the substrate BD.

[0027] 2 and 3, the configuration of the pad groups Px1, Px2, Py and the routing lines Rx, Ry will be described in more detail below. Referring first to FIG. 2, one or more routing lines Rx corresponding to one or more comb tooth portions Cxb located on the positive side of the bending line BA in the x-direction are all connected to the pad group Px1 located on the positive side of the bending line BA in the x-direction, and one or more routing lines Rx corresponding to one or more comb tooth portions Cxb located on the negative side of the bending line BA in the x-direction are all connected to the pad group Px2 located on the negative side of the bending line BA in the x-direction. Thus, in the sensor 1 according to this embodiment, no routing lines Rx extend beyond the bending line BA.

[0028] Each routing line Rx is connected to either the side surface on the positive side in the x-direction or the side surface on the negative side in the x-direction of the corresponding pad, but which side it is connected to varies depending on the routing line Rx. Specifically, one or more routing lines Rx corresponding to one or more comb tooth portions Cxb located on the positive side in the x-direction as viewed from the pad group Px1 are each connected to the corresponding pad from the positive side in the x-direction. On the other hand, one or more routing lines Rx corresponding to one or more comb tooth portions Cxb located on the negative side in the x-direction as viewed from the pad group Px1 are each connected to the corresponding pad from the negative side in the x-direction. The same is true for the pad group Px2.

[0029] 3, all routing lines Ry provided in the sensor 1 are connected to corresponding pads in the pad group Py from the positive side in the x direction. More specifically, the pads to which each routing line Ry is connected are connected to pads that are relatively more positive in the y direction among the multiple pads constituting the pad group Py, with one or more routing lines Ry corresponding to one or more comb-tooth portions Cyb located on the positive side in the y direction as viewed from the pad group Py. Also, one or more routing lines Ry corresponding to one or more comb-tooth portions Cyb located on the negative side in the y direction as viewed from the pad group Py are connected to pads that are relatively more negative in the y direction among the multiple pads constituting the pad group Py.

[0030] Next, the bending line BA will be described. As shown in Fig. 1(a), the bending line BA is a straight line extending in the y direction and provided at the center of the panel surface in the x direction, and the sensor 1 is configured to be bendable along this bending line BA. Fig. 4(a) is a diagram showing a structure provided on the substrate BD to achieve this bending. This figure also shows a portion of one of the multiple comb-tooth portions Cyb.

[0031] As shown in FIG. 4A, the substrate BD has a structure in which a plurality of slits SL are repeatedly arranged at a constant pitch along the bending line BA. Each slit SL is a physical cut provided along the y direction, and each slit SL has a length L in the y direction. While FIG. 4A shows an example in which the width of the slit SL is 0 (i.e., the slit SL is normally closed), the slits SL may be configured with a width greater than 0. The slits SL are arranged in a staggered matrix with a column-to-column pitch (pitch in the x direction) of PIx and a row-to-row pitch (pitch in the y direction) of PIy, and the position of each column in the y direction is offset from the position of an adjacent column in the y direction by PIy / 2, half the pitch PIy.

[0032] A group of slits SL provided in the substrate BD serves to bend the substrate BD by locally twisting and deforming when a bending force is applied to the substrate BD at the bending line BA. Figure 4( a) shows an example in which the x-direction width of the installation area of ​​the slits SL is small in the center in the y direction and becomes larger closer to both ends in the y direction. This is a configuration for excluding slits SL that do not substantially contribute to deformation and maximizing the installation area for wiring and via conductors. If it is not necessary to maximize the installation area for wiring and via conductors, the x-direction width of the installation area of ​​the slits SL may be a constant value throughout the entire y direction.

[0033] FIG. 4( b) is an enlarged view of region A1 shown in FIG. 4( a). Because the slit SL is a portion where a physical tear has occurred in the substrate BD, wiring cannot be extended beyond the slit SL. Therefore, in the sensor 1, wiring cannot be provided that passes in a straight line through the area where the slit SL is provided in the x direction. However, by using a waveform shape as shown in FIG. 4( b), it is possible to provide wiring that passes through the area where the slit SL is provided in the x direction. In the sensor 1, the wiring that needs to be extended to pass through the area where the slit SL is provided in the x direction is the base Cxa of the comb coil Cx and the multiple comb teeth Cyb that make up the comb coil Cy. By using a waveform shape as shown in FIG. 4( b), these are extended beyond the area where the slit SL is provided.

[0034] Here, if the pad group Px were provided in one location, some of the routing lines Rx would also need to extend beyond the area where the slit SL is provided. However, as described above, if the pad group of the comb coil Cx is arranged within the effective area EA in order to increase the ratio of the effective area EA to the area of ​​the substrate BD, the routing lines Rx would need to be densely arranged, and it would be difficult to form such densely arranged routing lines Rx into a waveform shape. Therefore, in the sensor 1, a pad group Px1 is provided on one side of the bending line BA, and a pad group Px2 is provided on the other side. The multiple comb teeth Cxb located on one side of the bending line BA are connected to the pad group Px1, and the multiple comb teeth Cxb located on the other side of the bending line BA are connected to the pad group Px2. This eliminates the need to extend the routing lines Rx beyond the area where the slit SL is provided, making it possible to arrange the pad groups Px1 and Px2 of the comb coil Cx within the effective area EA in the sensor 1.

[0035] As described above, with the sensor 1 according to this embodiment, it is not necessary to provide a space for arranging the pad groups Px and Py outside the effective area EA, so it is possible to increase the proportion of the effective area EA on the surface of the substrate BD on which the comb coils Cx and Cy are formed. In other words, it is possible to reduce the area of ​​the substrate BD.

[0036] Furthermore, in the sensor 1 according to this embodiment, the pad group Px1 for connecting those of the plurality of comb teeth Cxb constituting the comb coil Cx that are located on one side of the bending line BA is arranged on one side of the bending line BA, and the pad group Px2 for connecting those of the plurality of comb teeth Cxb constituting the comb coil Cx that are located on the other side of the bending line BA is arranged on the other side of the bending line BA, so that it is not necessary to extend the routing line Rx beyond the bending line BA. Therefore, according to the sensor 1 according to this embodiment, it is possible to arrange the pad groups Px1 and Px2 of the comb coil Cx whose base portions Cxa are oriented perpendicular to the bending line BA within the effective area EA.

[0037] Next, various modifications of the sensor 1 according to this embodiment will be described with reference to the drawings.

[0038] FIG. 5 is a diagram showing the configuration of the comb coil Cx and pad group Px2 that constitute the sensor 1 according to the background art of the present invention, and FIGS. 6 to 10 are diagrams showing the configurations of the comb coil Cx and pad group Px2 that constitute the sensor 1 according to first to fifth modified examples of this embodiment, respectively. These figures show only the portion of the comb coil Cx that is formed on the negative side of the bending line BA in the x direction as shown in FIG. 1( a). Below, we will explain modified examples of this portion, but the same applies to the portion that is formed on the positive side of the x direction. Furthermore, these figures show an example in which six comb teeth Cxb are arranged on the negative side of the bending line BA in the x direction, but an actual comb coil Cx will be configured with a greater number of comb teeth Cxb.

[0039] 5, in the sensor 1 according to the background art of the present invention, the pad group Px2 is placed outside the effective area EA (more specifically, outside the positive side in the y direction). With this configuration, a space must be provided outside the effective area EA to place the pad group Px2, which reduces the proportion of the effective area EA on the surface of the substrate BD. In other words, a substrate BD with a large area is required.

[0040] 5 also shows the direction of the alternating magnetic field generated when a current i is supplied to the comb tooth portion Cxb located on the negative side of the pad group Px2 in the x direction, and an opposite current i is supplied to the comb tooth portion Cxb located on the positive side of the pad group Px2 in the x direction. As shown in the figure, in this case, the directions of the alternating magnetic field B1 generated between the two comb tooth portions Cxb and the alternating magnetic field B2 generated near the routing line Rx are both directed toward the negative side of the z direction and are the same.

[0041] Next, referring to Figure 6, the configuration of the comb coil Cx according to the first modified example shown in the figure differs from the configuration of the comb coil Cx according to the present embodiment shown in Figure 2 in that all of the corresponding routing lines Rx are connected to each pad that makes up the pad group Px2 from the positive side in the x direction.

[0042] To explain in more detail, the routing line Rx (hereinafter referred to as the "routing line Rx+") corresponding to the multiple comb tooth portions Cxb located on the positive side of the x direction relative to the pad group Px2 is composed of a first partial wiring extending from the corresponding pad toward the positive side of the x direction, a second partial wiring extending from the end of the first partial wiring toward the positive side of the y direction, and a third partial wiring extending from the end of the second partial wiring toward the positive side of the x direction and connected to the corresponding comb tooth portion Cxb. On the other hand, the routing line Rx (hereinafter referred to as "routing line Rx-") corresponding to the multiple comb tooth portions Cxb located on the negative side of the x direction from the pad group Px2 is composed of a first partial wiring extending from the corresponding pad toward the positive side of the x direction, a second partial wiring extending from the end of the first partial wiring toward the negative side of the y direction, a third partial wiring extending from the end of the second partial wiring toward the negative side of the x direction, a fourth partial wiring extending from the end of the third partial wiring toward the positive side of the y direction, and a fifth partial wiring extending from the end of the fourth partial wiring toward the negative side of the x direction and connected to the corresponding comb tooth portion Cxb.

[0043] 6 also shows the direction of the alternating magnetic field that occurs when a current i is supplied to the comb tooth portion Cxb located on the negative side of the pad group Px2 in the x direction, and an opposite current i is supplied to the comb tooth portion Cxb located on the positive side of the pad group Px2 in the x direction. In the following description, as shown in the figure, the area that is long in the y direction and centered on the pad group Px2 will be referred to as "area MA," and the area within the effective area EA that is located on the positive side of the pad group Px2 in the y direction within the wiring area of ​​the routing line Rx will be referred to as "area WA." Furthermore, the alternating magnetic field generated near the negative end of region MA in the y direction will be referred to as B3, the alternating magnetic field generated near the negative end of pad group Px2 in the y direction will be referred to as B4, the alternating magnetic field generated near the center of pad group Px2 in the y direction will be referred to as B5, the alternating magnetic field generated near the positive end of pad group Px2 in the y direction will be referred to as B6, and the alternating magnetic field generated near the positive end of region MA in the y direction will be referred to as B7.

[0044] In this modification, the alternating magnetic fields B3 and B5 are alternating magnetic fields directed to the negative side in the z direction, while the alternating magnetic fields B4, B6, and B7 are alternating magnetic fields directed to the positive side in the z direction. In addition, in the region WA according to this modification, the spacing W1 between the routing line Rx+ and the routing line Rx− is larger than the width W2 of each pad in the x direction.

[0045] 7, the configuration of the comb coil Cx according to the second modified example shown in FIG. 7 differs from the configuration of the comb coil Cx according to the first modified example shown in FIG. 6 in that the routing line Rx− is connected to each pad constituting the pad group Px2 from the negative side in the x-direction, and in that, within the region WA, the spacing between the routing line Rx+ and the routing line Rx− is the same as the spacing between the routing lines Rx+ and between the routing lines Rx−. As a result of these differences, in this modified example, the alternating magnetic field B3 is an alternating magnetic field directed toward the positive side of the z-direction, and the direction of the alternating magnetic field is uniform at least over the pad group Px2. Furthermore, the reduced distance between the routing line Rx+ and the routing line Rx− reduces the alternating magnetic field B5, and the strength of the alternating magnetic field generated by the routing line Rx in the region WA is smaller than in the first modified example.

[0046] 8, the configuration of the comb coil Cx according to the third modified example shown in the figure differs from the second modified example shown in FIG. 7 in that the routing line Rx+ is connected to each pad constituting the pad group Px2 from the negative side in the x-direction, and the routing line Rx- is connected from the positive side in the x-direction. To achieve this connection, the routing line Rx+ is extended so as to intersect with the routing line Rx- using a jumper wire J formed on the other surface of the substrate BD. The portion of the routing line Rx+ formed on one surface of the substrate BD and the jumper wire J are connected to each other by a via conductor V that penetrates the substrate BD.

[0047] As a result of adopting such a configuration, in this modification, the alternating magnetic fields B3 to B7 all become alternating magnetic fields directed to the negative side of the z direction, and therefore, according to this modification, it is possible to make the direction of the alternating magnetic field uniform within the region MA.

[0048] 9, the configuration of the comb coil Cx according to the fourth modified example shown in the figure differs from the third modified example shown in Fig. 8 in that the spacing W1 between the routing line Rx+ and the routing line Rx- is larger than the width W2 of each pad in the x direction, as in the first modified example. As a result, according to this modified example, it is possible to make the strength of the alternating magnetic field generated in the area WA larger than in the third modified example.

[0049] 10, the configuration of the comb coil Cx according to the fifth modified example shown in the figure differs from the fourth modified example shown in Fig. 9 in that, by using jumper wires J to interchange the positions of multiple routing lines Rx+, the comb tooth portions Cxb relatively on the positive side in the x direction of the pad group Px2 are connected to pads relatively on the positive side in the y direction. Even in this way, as in the fourth modified example, it is possible to increase the strength of the alternating magnetic field generated in the region WA compared to the third modified example shown in Fig. 8.

[0050] Next, Fig. 11 is a diagram showing the configuration of the comb coil Cy and pad group Py that constitute the sensor 1 according to the background art of the present invention, Fig. 12 is a diagram again showing the configuration of the comb coil Cy and pad group Py that constitute the sensor 1 according to this embodiment, and Figs. 13 to 17 are diagrams showing the configurations of the comb coil Cy and pad group Py that constitute the sensor 1 according to sixth to tenth modifications of this embodiment, respectively. These figures show an example in which the comb coil Cy has six comb tooth portions Cxb, but an actual comb coil Cy is configured with a greater number of comb tooth portions Cyb.

[0051] 11, in the sensor 1 according to the background art of the present invention, the pad group Py is placed outside the effective area EA (more specifically, outside the positive side in the x direction). In this example, a space must be provided outside the effective area EA to place the pad group Py, which reduces the proportion of the effective area EA on the surface of the substrate BD. In other words, a substrate BD with a large area is required.

[0052] 11 also shows an alternating magnetic field PB emitted from an electromagnetic induction pen located in the center of the sensor 1. If we consider the case where the direction of this alternating magnetic field PB is toward the negative side of the z direction as shown in the figure, a receiving current ir is generated in each comb tooth portion Cyb in the direction of the arrow shown in the figure.

[0053] Next, referring to FIG. 12, the routing lines Ry of the comb coil Cy according to this embodiment are connected to each pad in the pad group Py from the positive x-direction as described above, and extend in a straight line from there to the outside of the effective area EA. As a result, the routing lines Ry are parallel to each other, at least within the effective area EA. The hatched area FA in FIG. 12 is an area where it is difficult to receive the alternating magnetic field PB from the electromagnetic induction pen and generate a receiving current ir due to the routing of the routing lines Ry. This area FA will be mentioned again when describing FIGS. 15 to 17.

[0054] 12 also shows the alternating magnetic field PB emitted from the electromagnetic induction pen. As shown in the figure, when the electromagnetic induction pen is near the pad group Py, a receiving current ir in the opposite direction may be generated between the comb tooth portion Cyb adjacent to the pad group Py and the routing line Ry connected to that comb tooth portion Cyb. In this case, the receiving currents ir generated in each cancel each other out, causing the receiving current ir to attenuate and not be supplied to the sensor controller with its original amplitude.

[0055] 13, the configuration of the comb coil Cy according to the sixth modified example shown in the figure differs from the configuration of the comb coil Cy according to the present embodiment shown in Fig. 12 in that the spacing between the routing lines Ry extending within the effective area EA is narrowed. This makes it possible to space the comb tooth portions Cyb adjacent to the pad group Py and the routing lines Ry connected to those comb tooth portions Cyb further apart than in the present embodiment.

[0056] 14 , the configuration of the comb coil Cy according to the seventh modification shown in FIG. 14 differs from the configuration of the comb coil Cy according to the sixth modification shown in FIG. 13 in that one or more routing lines Ry (hereinafter referred to as “routing lines Ry+”) corresponding to one or more comb tooth portions Cyb located on the positive side of the y direction as viewed from the pad group Py are connected to pads that are relatively located on the negative side of the y direction among the multiple pads that make up the pad group Py, and one or more routing lines Ry (hereinafter referred to as “routing lines Ry−”) corresponding to one or more comb tooth portions Cyb located on the negative side of the y direction as viewed from the pad group Py are connected to pads that are relatively located on the positive side of the y direction among the multiple pads that make up the pad group Py. To achieve this connection, the routing line Ry− is extended so as to intersect with the routing line Ry+ using a jumper wire J formed on one surface of the substrate BD. The portion of the routing line Ry− formed on the other surface of the substrate BD and the jumper wire J are mutually connected by a via conductor V that penetrates the substrate BD.

[0057] As a result of adopting such a configuration, according to this modification, the cancellation of the reception current ir, which occurs in the present embodiment shown in Fig. 12 and the sixth modification shown in Fig. 13, does not occur in the first place, and therefore it is possible to reduce the attenuation of the reception current ir.

[0058] 15, the configuration of the comb coil Cy according to the eighth modified example shown in the figure differs from the configuration of the comb coil Cy according to the present embodiment shown in Fig. 12 in that, for some routing lines Ry, part or all of the portions extending in the y direction are formed on one surface of the substrate BD. The portions extending on one surface of the substrate BD are jumper wires J, which are connected to the portions of the routing lines Ry extending on the other surface of the substrate BD by via conductors V. With this configuration, the spacing between the portions of the routing lines Ry extending in the y direction can be made smaller than in the present embodiment shown in Fig. 12, and therefore it is possible to make the area FA smaller than in the present embodiment shown in Fig. 12.

[0059] 16, the configuration of the comb coil Cy according to the ninth modified example shown in the figure differs from the configuration of the comb coil Cy according to the present embodiment shown in Figure 12 in terms of the wiring of the routing lines Ry near the positive edge of the panel surface in the x direction. For the sake of explanation, hereinafter, the comb tooth portions Cyb shown in Figure 16 will be referred to as comb tooth portions Cyb1 to Cyb6 in order from the top of the figure. First, the portions of the routing lines Ry of comb tooth portions Cyb2 and Cyb5 that extend in the y direction are moved inward by one line and moved to one surface of the substrate BD using jumper wires J. Furthermore, the portions of the routing lines Ry of comb tooth portions Cyb1 and Cyb6 that extend in the y direction and that run parallel to the routing lines Ry of comb tooth portions Cyb2 and Cyb5 are moved inward by one line and moved to one surface of the substrate BD using jumper wires J. The space freed up by these movements is then used to extend the comb tooth portions Cyb3 and Cyb4 to the outermost periphery, and the routing lines Ry are extended from the ends of the corresponding comb tooth portions Cyb in the y direction so as to come as close to each other as possible.Furthermore, a curved jumper wire J is used from the end points to intersect with the routing lines Ry of the comb tooth portions Cyb1, Cyb2, Cyb5, and Cyb6, and then extended in the x direction to the corresponding pads.

[0060] By adopting such a configuration, according to this modification, it is possible to receive the alternating magnetic field PB from the electromagnetic induction pen and generate a receiving current ir up to the outermost periphery of the comb coil Cy in the region between the comb teeth Cyb3 and Cyb4, the region between the comb teeth Cyb1 and Cyb2, and the region between the comb teeth Cyb5 and Cyb6. Therefore, as shown in Figure 16, it is possible to make the region FA smaller than in the present embodiment shown in Figure 12.

[0061] 17, the configuration of the comb coil Cy according to the tenth modification shown in the figure differs from the configuration of the comb coil Cy according to the ninth modification shown in Fig. 16 in that the portion of the routing lines Ry of the comb tooth portions Cyb1 and Cyb6 that is moved inward by one line is limited to a small portion near the comb tooth portions Cyb3 and Cyb4, and the routing lines Ry of the comb tooth portions Cyb2 and Cyb5 are moved outward (returned to their original positions) by that amount. By doing so, the area in which the receiving current ir can be generated by receiving the alternating magnetic field PB from the electromagnetic induction pen is expanded to include the area between the comb tooth portions Cyb2 and Cyb3 and the area between the comb tooth portions Cyb4 and Cyb5, making it possible to further reduce the area FA.

[0062] 18, 20 to 22, and 24 are diagrams showing the configurations of the comb coil Cx and pad group Px that constitute the sensor 1 according to eleventh to fifteenth modifications of this embodiment, respectively. These figures show examples in which all routing lines Rx are connected to pads from the positive side in the x direction, but it goes without saying that some or all of the routing lines Rx may be connected to pads from the negative side in the x direction, as in this embodiment shown in FIG. The following description will be given without mentioning differences in the manner in which the routing lines Rx are connected to the pads.

[0063] 18, the configuration of the comb coil Cx according to the eleventh modified example shown in the figure differs from the configuration of the comb coil Cx according to the present embodiment shown in Figure 2 in that the base Cxa is divided into two bases Cxa1 and Cxa2 at the position of the bending line BA, thereby completely dividing the comb coil Cx into two parts on one side and the other side of the bending line BA. Note that this makes it impossible to generate an alternating magnetic field at the position of the bending line BA, but in order to minimize the effect of this, in this modified example, the positions of the comb tooth portions Cxb are adjusted overall so that the distance between two adjacent comb tooth portions Cxb on either side of the bending line BA is narrower than the distance between the other comb tooth portions Cxb.

[0064] FIG. 19( a) is a diagram showing the current flowing through the comb coil Cx according to the present embodiment shown in FIG. 2 to generate an alternating magnetic field at the bending line BA. FIGS. 19( b) and 19(c) are also diagrams showing the current flowing through the comb coil Cx according to this modified example to generate an alternating magnetic field near the bending line BA. First, referring to FIG. 19( a), when generating an alternating magnetic field at the bending line BA in the comb coil Cx according to this embodiment, current flows through the routing line Rx on one side of the bending line BA and the routing line Rx on the other side of the bending line BA. When current flows through the routing line Rx, a magnetic field is generated around it according to Ampere's law. However, because these two routing lines Rx are located apart, the magnetic fields generated by each line do not cancel each other out and remain. The generation of such a residual magnetic field destabilizes the operation of the sensor 1.

[0065] 19(b) and 19(c), in the comb coil Cx according to this modification, the two routing lines Rx corresponding to the two comb teeth Cyb that supply current when an alternating magnetic field is generated near the bending line BA run parallel to each other on the same side of the bending line BA, so that the magnetic fields generated around them cancel each other out. Therefore, no residual magnetic field is generated as in the case of FIG. 19(a), and the operation of the sensor 1 can be stabilized.

[0066] 20, the configuration of the comb coil Cx according to the twelfth modified example shown in the figure differs from the configuration of the comb coil Cx according to the eleventh modified example shown in Fig. 18 in that two adjacent comb tooth portions Cxb on either side of the bending line BA are formed by the same single wiring. Due to this difference, in this modified example, the two base portions Cxa1 and Cxa2 shown in Fig. 18 are connected to each other to form one base portion Cxa, and the comb tooth portion Cxb extending along the bending line BA is connected to both of the pad groups Px1 and Px2.

[0067] 18, when a current as shown in FIG. 19C is supplied to the portion of the comb coil Cx located on one side of the bending line BA, noise may be generated in the portion of the comb coil Cx located on the other side of the bending line BA via the comb coil Cy. This is because the comb coil Cx is completely divided into a portion located on one side of the bending line BA and a portion located on the other side of the bending line BA. However, in this modification, these portions are connected to each other, so that such noise generation can be prevented.

[0068] 21, the sensor 1 according to the thirteenth modification shown in the figure is configured to be bent in three along two bending lines BA1 and BA2. The bending lines BA1 and BA2 each extend in the y direction and are arranged in order from the positive side in the x direction.

[0069] In accordance with the above-described bending configuration, the sensor 1 according to this modification includes pad groups Px for the comb coil Cx in the following regions: on the positive side of the bending line BA1 in the x-direction, between the bending lines BA1 and BA2, and on the negative side of the bending line BA2 in the x-direction. Hereinafter, as shown in FIG. 21 , the pad group Px located on the positive side of the bending line BA1 in the x-direction will be referred to as "pad group Px1," the pad group Px located between the bending lines BA1 and BA2 will be referred to as "pad group Px2," and the pad group Px located on the negative side of the bending line BA2 in the x-direction will be referred to as "pad group Px3." The comb teeth Cxb in each region are connected to the pad group Px in the same region.

[0070] The base Cxa extends through each region, and all the comb tooth portions Cxb are connected to this base Cxa. In this modification, the positions of the comb tooth portions Cxb are adjusted overall so that the distance between two adjacent comb tooth portions Cxb across the bending line BA1 and the distance between two adjacent comb tooth portions Cxb across the bending line BA2 are narrower than the distance between the other comb tooth portions Cxb.

[0071] According to this modification, even when the sensor 1 is folded in three, the comb coil Cx can be configured in the same way as when the sensor 1 is folded in two. Although not shown, even when the sensor 1 is folded in four or more, the comb coil Cx can be configured in the same way as in this modification. Unlike the eleventh modification shown in FIG. 18 , the portions formed in each region of the comb coil Cx are electrically connected by the base Cxa for the noise countermeasure described with reference to FIG. 20 . In this way, even by connecting only the base Cxa of each portion to each other, when an alternating magnetic field is generated near the bending line BA on one side of the bending line BA (the bending line BA1 or the bending line BA2; the same applies hereinafter in this modification), noise can be prevented from being generated in the portion of the comb coil Cx located on the other side of the bending line BA.

[0072] 22, the configuration of the comb coil Cx according to the fourteenth modification shown in the figure differs from the configuration of the comb coil Cx according to the twelfth modification shown in Fig. 20 in that, in addition to the comb tooth portion Cxb extending along the bending line BA, the comb tooth portion Cxb connected to both of the pad groups Px1 and Px2 is provided. For the sake of explanation, hereinafter, the comb tooth portions Cxb shown in Fig. 22 will be referred to as comb tooth portions Cxb1 to Cxb13 in order from the right side of the figure. The comb tooth portion Cxb extending along the bending line BA is comb tooth portion Cxb7, and comb tooth portions Cxb6 and Cxb8 adjacent to this comb tooth portion Cxb7 are each connected to both of the pad groups Px1 and Px2. To achieve connection to two pad groups, comb tooth portions Cxb6 and Cxb8 are each connected to two routing lines Rx, similar to comb tooth portion Cxb7. According to this configuration, routing lines Rx will be generated that cross the bending line BA, but since there are only three routing lines Rx that cross the bending line BA, it is possible to extend them so that they cross the bending line BA by forming them into the wave-shaped form described above.

[0073] 23 is a diagram showing the current path of the AC current supplied by the sensor controller to the comb coil Cx according to this modification when the sensor controller is configured to select two adjacent comb tooth portions Cxb sandwiching two comb tooth portions Cxb when transmitting an AC magnetic field. Note that the pad groups Px1 and Px2 are not shown in the figure. In this case, the sensor controller supplies AC current in each of the ten selection states Tx1 to Tx10 shown in the figure.

[0074] 23, according to this modification, in either selection state, an AC current can be supplied using only one pad group. Therefore, according to this modification, even when the sensor controller is configured to select two adjacent comb tooth portions Cxb on either side of the two comb tooth portions Cxb when transmitting an alternating magnetic field, it can be said that the generation of the residual magnetic field described with reference to FIG.

[0075] 24, the configuration of the comb coil Cx according to the fifteenth modification shown in the figure differs from the configuration of the comb coil Cx according to the fourteenth modification shown in Fig. 22 in that each of the comb tooth portions Cxb6 to Cxb8 is divided into two. Specifically, the comb tooth portion Cxb6 is divided into a comb tooth portion Cxb6a connected to the pad group Px1 and a comb tooth portion Cxb6b connected to the pad group Px2, the comb tooth portion Cxb7 is divided into a comb tooth portion Cxb7a connected to the pad group Px1 and a comb tooth portion Cxb7b connected to the pad group Px2, and the comb tooth portion Cxb8 is divided into a comb tooth portion Cxb8a connected to the pad group Px1 and a comb tooth portion Cxb8b connected to the pad group Px2. The distance between the comb teeth Cxb6a and Cxb6b, the distance between the comb teeth Cxb7a and Cxb7b, and the distance between the comb teeth Cxb8a and Cxb8b are set to values ​​smaller than the distance between the other two comb teeth Cxb.

[0076] 25 is a diagram showing the current path of the AC current supplied to the comb coil Cx according to this modification by the sensor controller when the sensor controller is configured to select two adjacent comb teeth Cxb sandwiching two comb teeth Cxb when transmitting an AC magnetic field. Note that in this figure, as in FIG. 23, the pad groups Px1 and Px2 are not shown.

[0077] 25 and 23, this modification also makes it possible to supply AC current using only one pad group in either selection state, as in the fourteenth modification shown in Fig. 22. Therefore, this modification can also be said to be able to prevent the generation of the residual magnetic field described with reference to Fig. 19(a) when the sensor controller is configured to select two adjacent comb tooth portions Cxb sandwiching two comb tooth portions Cxb when transmitting an alternating magnetic field.

[0078] Although the preferred embodiments of the present invention have been described above, the present invention is not limited to these embodiments, and it goes without saying that the present invention can be embodied in various forms without departing from the spirit of the present invention.

[0079] 1 Sensor 10 Anisotropic conductive film 11, 12 Flexible printed circuit board BA, BA1, BA2 Bending line BD Substrate Cx, Cy Comb coil Cxa, Cxa1, Cxa2, Cya Base Cxb, Cyb Comb tooth portion EA Effective area J Jumper wire Px, Px1, Px2, Py Pad group Rx, Ry Routing line SL Slit V Via conductor

Claims

1. A sensor used for detecting an electromagnetic induction pen using an electromagnetic induction method, comprising: a first comb coil having a linear first base extending in a first direction and a plurality of first comb-tooth portions each extending in a second direction intersecting the first direction and each having one end connected to the first base; a first pad group consisting of a plurality of first pads provided corresponding to each of the plurality of first comb-tooth portions; and a plurality of first routing lines connecting each of the plurality of first pads to the other end of the corresponding first comb-tooth portion, wherein the first pad group is arranged within the effective area of the sensor.

2. The sensor according to claim 1, wherein the first pad group is arranged in a region between two adjacent first comb tooth portions, and the plurality of first pads are arranged side by side along the second direction.

3. The sensor described in claim 2, wherein one or more of the first routing lines corresponding to one or more of the first comb tooth portions located on one side of the first pad group in the first direction are each connected to the corresponding first pad from one side of the first direction, and one or more of the first routing lines corresponding to one or more of the first comb tooth portions located on the other side of the first pad group in the first direction are each connected to the corresponding first pad from the other side of the first direction.

4. The sensor described in claim 2, wherein one or more of the first routing lines corresponding to one or more of the first comb tooth portions located on one side of the first pad group in the first direction are each connected to the corresponding first pad from the other side of the first direction, and one or more of the first routing lines corresponding to one or more of the first comb tooth portions located on the other side of the first pad group in the first direction are each connected to the corresponding first pad from one side of the first direction.

5. The sensor according to any one of claims 2 to 4, wherein the plurality of first routing lines are arranged at equal intervals in a section in which the entirety of the first routing lines extend in parallel.

6. The sensor described in claim 1, comprising: a second comb coil having a linear second base extending in the second direction and a plurality of second comb-tooth portions each extending in the first direction and each having one end connected to the second base; a second pad group consisting of a plurality of second pads provided corresponding to each of the plurality of second comb-tooth portions; and a plurality of second routing lines connecting each of the plurality of second pads to the other end of the corresponding second comb-tooth portion, wherein the second pad group is arranged within the effective area.

7. The sensor according to claim 6, wherein the second pad group is arranged in a region between two adjacent first comb tooth portions, and the plurality of second pads are arranged side by side along the second direction.

8. The sensor according to claim 7, wherein the plurality of second routing lines are connected to the corresponding pads from one side in the first direction.

9. The sensor described in claim 8, wherein one or more second routing lines corresponding to one or more second comb tooth portions located on one side of the second pad group in the second direction are each connected to one of the plurality of second pads located relatively on one side of the second direction, and one or more second routing lines corresponding to one or more second comb tooth portions located on the other side of the second pad group in the second direction are each connected to one of the plurality of second pads located relatively on the other side of the second direction.

10. The sensor described in claim 8, wherein one or more second routing lines corresponding to one or more second comb tooth portions located on one side in the second direction as viewed from the second pad group are each connected to one of the plurality of second pads located relatively on the other side in the second direction, and one or more second routing lines corresponding to one or more second comb tooth portions located on the other side in the second direction as viewed from the second pad group are each connected to one of the plurality of second pads located relatively on one side in the second direction.

11. The sensor according to claim 1, wherein the sensor is configured to be bendable by a bending line extending along the second direction, the first comb coil further having a plurality of third comb tooth portions each extending in the second direction and each having one end connected to the first base, a third pad group consisting of a plurality of third pads provided corresponding to each of the plurality of third comb tooth portions, and a plurality of third routing lines connecting each of the plurality of third pads to the other end of the corresponding third comb tooth portion, the third pad group being arranged within the effective area, the plurality of first comb tooth portions, the first pad group, and the plurality of first routing lines being arranged on one side of the bending line, and the plurality of third comb tooth portions, the third pad group, and the plurality of third routing lines being arranged on the other side of the bending line.

12. The sensor according to claim 11, wherein the first comb tooth portion of the plurality of first comb tooth portions that is closest to the bending line and the third comb tooth portion of the plurality of third comb tooth portions that is closest to the bending line are configured by the same single wiring.

13. The sensor according to claim 12, wherein the first comb tooth portion adjacent to the wiring and the third comb tooth portion adjacent to the wiring are each connected to both the first pad group and the third pad group.

14. The sensor described in claim 12, wherein the distance between the first comb tooth portion of the plurality of first comb tooth portions that is closest to the bending line and the third comb tooth portion of the plurality of third comb tooth portions that is closest to the bending line is smaller than the distance between the first comb tooth portion and the first comb tooth portion adjacent to the first comb tooth portion, and the distance between the third comb tooth portion and the third comb tooth portion adjacent to the third comb tooth portion.

15. The sensor described in claim 14, wherein the plurality of first comb-tooth portions includes one connected to the third pad group, and the first comb-tooth portion connected to the third pad group is positioned adjacent to the first comb-tooth portion of the plurality of first comb-tooth portions that is closest to the bending line.

16. The sensor is configured to be bendable by a bending line extending along the second direction, the first base, the plurality of first comb-tooth portions, the first pad group, and the plurality of first routing lines are arranged on one side of the bending line, the first comb coil further has a linear third base extending in the first direction and a plurality of third comb-tooth portions each extending in the second direction and each having one end connected to the first base, a third pad group consisting of a plurality of third pads provided corresponding to each of the plurality of third comb-tooth portions, and a plurality of third routing lines connecting each of the plurality of third pads to the other end of the corresponding third comb-tooth portion, the third pad group being arranged within the effective area, the plurality of third comb-tooth portions, the third pad group, and the plurality of third routing lines being arranged on the other side of the bending line, and the first base and the third base are not connected. The sensor of claim 1 .

17. The sensor described in claim 16, wherein the distance between the first comb tooth portion of the plurality of first comb tooth portions that is closest to the bending line and the third comb tooth portion of the plurality of third comb tooth portions that is closest to the bending line is smaller than the distance between adjacent first comb tooth portions and the distance between adjacent third comb tooth portions.

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