Cutting apparatus and method for manufacturing cut article

Abstract

Provided is a cutting apparatus that is capable of discharging mill ends more reliably.　This cutting apparatus comprises: a machining table movable along a linear movement direction; a cutting mechanism that cuts an object to be cut that has been placed on the machining table; a receiving member which is disposed below the machining table and which can receive, at an inclined portion inclined along the movement direction, mill ends generated as a result of the object to be cut being cut by the cutting mechanism; a movable nozzle which can move in the movement direction in association with the movement of the machining table and which sprays a fluid onto the inclined portion; and a position-adjusting mechanism that can adjust the vertical position of the movable nozzle in association with the movement of the movable nozzle in the movement direction.

Description

Cutting device and method for manufacturing cut products

[0001] The present invention relates to a cutting device and a method for manufacturing a cut product.

[0002] Patent Document 1 discloses a cutting device that includes a support base that supports a chuck table that holds a workpiece, a cutting feed means that reciprocates the support base, a cutting means that cuts the workpiece, a water case that receives cutting chips, and a two-fluid jet nozzle that is fixed to the support base and jets fluids. In the cutting device described in Patent Document 1, the cutting chips in the water case can be washed away and removed by fluid jetted from the two-fluid jet nozzle that moves integrally with the support base.

[0003] Japanese Patent Application Laid-Open No. 2006-218551

[0004] In a device such as that described in Patent Document 1, the bottom of the water case is expected to be sloped to facilitate the discharge of scraps that have fallen into the water case. When the bottom of the water case is sloped in this way, the distance between the two-fluid spray nozzle and the bottom of the water case changes as the support base moves. This can result in the fluid not being effectively sprayed onto the scraps, potentially preventing them from being washed away.

[0005] The present invention has been made in consideration of the above-mentioned circumstances, and the problem it aims to solve is to provide a cutting device and a method for manufacturing cut products that can more reliably discharge scrap material.

[0006] The problem that the present invention aims to solve is as described above, and in order to solve this problem, the cutting device of the present invention comprises a processing table that can move along a linear movement direction, a cutting mechanism that cuts an object to be cut that is placed on the processing table, a receiving member that is placed below the processing table and that can receive scrap material generated when the object to be cut is cut by the cutting mechanism at an inclined portion that is inclined along the movement direction, a movable nozzle that can move in the movement direction as the processing table moves and that sprays a fluid onto the inclined portion, and a position adjustment mechanism that can adjust the up and down position of the movable nozzle as the movable nozzle moves in the movement direction.

[0007] In addition, the method for manufacturing cut products of the present invention is a method for manufacturing cut products using the cutting device, and includes the steps of placing the object to be cut on the processing table, and cutting the object to be cut by moving the cutting mechanism and the processing table relative to each other.

[0008] According to the present invention, scraps can be more reliably discharged.

[0009] 1 is a schematic plan view showing the overall configuration of a cutting device according to an embodiment; a plan view showing the configuration of a cutting module; an S1-S1 cross-sectional view; a plan view showing a lower part of the cutting module; an S2-S2 cross-sectional view; a perspective view showing a removal mechanism fixed to a cover member; (a) a front view showing the removal mechanism; (b) a left side view showing the removal mechanism; and (c) a left side view showing the removal mechanism moving rearward.

[0010] In the following description, the directions indicated by arrows U, D, L, R, F, and Ba in the drawings are defined as the upward, downward, leftward, rightward, forward, and backward directions, respectively. The rotation direction around the vertical rotation axis is defined as the θ direction.

[0011] <Configuration of Cutting Apparatus 100 According to First Embodiment> First, a configuration of the cutting apparatus 100 according to the first embodiment will be described. In this embodiment, for example, the configuration of the cutting apparatus 100 will be described in the case where a sealed substrate W, which is a substrate on which a semiconductor chip is fixed and sealed with resin, is used as an object to be cut by the cutting apparatus 100.

[0012] Examples of the sealed substrate W include a BGA (Ball Grid Array) package substrate, a CSP (Chip Size Package) package substrate, and an LED (Light Emitting Diode) package substrate. Furthermore, the object to be cut may not only be the sealed substrate W, but also a sealed lead frame formed by sealing a lead frame with a semiconductor chip fixed thereto with resin. Furthermore, the object to be cut may also be a wiring board on which no electronic element or electronic component is fixed and on which single or multiple layers of wiring are provided.

[0013] 1 is a processing device that cuts a sealed substrate W, which is an object to be cut, into a plurality of cut pieces (products P). The cutting device 100 includes, as components, a substrate supply module A, a cutting module B, and a storage module C. Each component is detachable and replaceable with respect to the other components.

[0014] <Substrate Supply Module A> The substrate supply module A is mainly provided with a substrate supply mechanism 1 and a control unit CTL.

[0015] The sealed substrate W, which is the object to be cut, is carried out from the substrate supply mechanism 1 and transferred by a transfer mechanism (not shown) to the cutting module B. The sealed substrate W transferred to the cutting module B is placed on a cutting table 15, which will be described later.

[0016] The control unit CTL controls the operation of each unit of the cutting apparatus 100. The control unit CTL controls each unit of the cutting apparatus 100, thereby enabling the loading of the sealed substrate W, cutting of the sealed substrate W, inspection of the product P, unloading of the product P, etc. The control unit CTL can also be provided in a module other than the substrate supply module A. The control unit CTL can also be divided into multiple units. For example, a control unit CTL can be provided in each module, and the control units CTL can be linked together to control each unit.

[0017] <Cutting Module B> The cutting module B shown in FIG. 1 is mainly provided with a moving mechanism 13, a cutting table 15, a rotating mechanism 17, and a spindle unit 23.

[0018] In this embodiment, a twin-cut table type cutting device 100 having two cutting tables 15 is illustrated. The cutting tables 15 can be moved in the front-rear direction by a movement mechanism 13, and can be rotated in the θ direction by a rotation mechanism 17.

[0019] In addition, this embodiment illustrates a cutting device 100 having a twin spindle configuration having two spindle units 23. The two spindle units 23 are movable in the left-right direction and the up-down direction independently of each other.

[0020] In the cutting module B, the sealed substrate W can be cut into individual pieces by moving the cutting table 15 and the two spindle units 23 relatively while the sealed substrate W is held on the cutting table 15. A blade 23a is attached to the spindle units 23. The blade 23a cuts the sealed substrate W held on the cutting table 15 by rotating in a plane including the front-to-back and up-to-down directions. At this time, the sealed substrate W can also be cut while cutting water is sprayed toward the blade 23a from a cutting nozzle 23b (see FIG. 3), which will be described later.

[0021] <Storage Module C> The storage module C is mainly provided with an inspection table 2 and a tray 3 .

[0022] An assembly of a plurality of products P obtained by cutting the sealed substrate W into individual pieces is placed on the inspection table 2. The plurality of products P are inspected by an inspection camera (not shown) and sorted into non-defective products and defective products. The selected non-defective products are stored in a tray 3. The selected defective products are stored in a separately prepared tray (not shown) and are excluded from the products P. Note that it is not necessarily necessary to inspect the products P in the storage module C.

[0023] <Details of Cutting Module B> Next, the specific configuration of the cutting module B will be described using Figures 2 to 7. Note that Figure 4 illustrates only the lower part of the cutting module B, with the components (such as the second receiving member 14, cutting table 15, rear cover member 18, front cover member 19, and upper cover member 20, which will be described later) provided at the upper part of the cutting module B being omitted as appropriate. Furthermore, since the device configurations of the left and right cutting tables 15 are generally the same, the device configuration of the left cutting table 15 will mainly be described in detail below.

[0024] The cutting module B mainly comprises a first receiving member 11, a storage section 12, a moving mechanism 13, a second receiving member 14, a cutting table 15, a rotation mechanism 17, a rear cover member 18, a front cover member 19, an upper cover member 20, a cleaning nozzle 22 and a spindle section 23.

[0025] The first receiving member 11 shown in Figures 2 to 5 is a member that receives scraps E generated when cutting the sealed substrate W. The first receiving member 11 is one embodiment of the receiving member of the present application. The first receiving member 11 is formed in a box shape that is open upward and backward. The first receiving member 11 can receive scraps E that have fallen from the cutting table 15 (described later), the second receiving member 14, etc. The first receiving member 11 mainly includes a protrusion 11a, an opening 11b, an inclined groove 11c, and a side portion 11d.

[0026] 3 to 5 are portions formed so as to bulge upward on the bottom surface of the first receiving member 11. A pair of protrusions 11a are formed on the left and right sides to correspond to the cutting table 15. The protrusions 11a are formed so as to extend in the front-rear direction.

[0027] 4 and 5 is a portion formed to penetrate vertically through the bottom surface of the first receiving member 11. The opening 11b is formed on the upper surface of the protruding portion 11a. The opening 11b is formed to extend in the front-rear direction across both the front and rear ends of the protruding portion 11a.

[0028] The inclined grooves 11c shown in Figures 3 to 5 are portions of the bottom surface of the first receiving member 11 that are formed so as to slope downward toward the rear. The inclined grooves 11c are one embodiment of the inclined portion of the present application. The inclined grooves 11c are formed on both the left and right sides of the protruding portion 11a. Specifically, the inclined grooves 11c are formed in a total of three locations: between the left and right protruding portions 11a, and between the left and right protruding portions 11a and side portions 11d (described later). The inclined grooves 11c are formed to extend along the front-rear direction. The upper surface of the inclined grooves 11c is formed so as to slope downward toward the rear.

[0029] The side portion 11d is a portion that forms the side surface of the first receiving member 11. The side portion 11d is formed so as to surround the protrusion 11a, the opening portion 11b, and the inclined groove portion 11c from both the left and right sides and the front. The side portion 11d is formed so as to have an appropriate width in the vertical direction.

[0030] The storage section 12 is a section that collects scrap material E discharged from the first receiving member 11. The storage section 12 is formed in a box shape that is open at the top. The storage section 12 is arranged at the rear end of the first receiving member 11. For convenience, in this embodiment, in FIG. 3 and the like, the storage section 12 and the first receiving member 11 are illustrated as being integrally formed, but it is also possible to form the first receiving member 11 and the storage section 12 as separate members and configure the storage section 12 so that it can be attached to and detached from the first receiving member 11.

[0031] 3 to 6 is used to move the cutting table 15 back and forth. The moving mechanism 13 mainly includes a moving member 13a, a connecting portion 13b, a nut 13c, a screw shaft 13d, and a cover member 13e.

[0032] The moving member 13a supports the cutting table 15 and is movable back and forth. The moving member 13a is formed, for example, in a cylindrical shape. The moving member 13a is disposed above the protruding portion 11a.

[0033] The connecting portion 13b shown in Figures 3 to 5 is a portion that connects the moving member 13a and the nut 13c. The connecting portion 13b is formed in a longitudinal shape (e.g., a cylindrical shape) that extends vertically. The connecting portion 13b is disposed so as to extend from below to above the first receiving member 11 through the opening 11b. The upper end of the connecting portion 13b is fixed to the moving member 13a.

[0034] The nut 13c and the screw shaft 13d constitute a ball screw mechanism. The screw shaft 13d is disposed below the opening 11b. The screw shaft 13d is disposed with its longitudinal direction facing horizontally (front-to-back). The screw shaft 13d can be rotated by a driving force from a driving source (not shown) such as a motor. The nut 13c is fitted onto the screw shaft 13d. A large number of balls (not shown) are interposed between the nut 13c and the screw shaft 13d. The lower end of the connecting portion 13b is fixed to the upper part of the nut 13c. The nut 13c is prevented from rotating around the screw shaft 13d.

[0035] The cover member 13e shown in Figure 6 covers the moving member 13a from the side. The cover member 13e is formed by combining multiple plate-shaped members. Specifically, the cover member 13e is configured to surround the moving member 13a from the front, back, left, and right using a pair of plate-shaped members at the front and back and a pair of plate-shaped members at the left and right. The cover member 13e is fixed to the moving member 13a by an appropriate method. Note that the cover member 13e is not shown in figures other than Figure 6.

[0036] In the moving mechanism 13, when the screw shaft 13d rotates, the nut 13c fitted to the screw shaft 13d moves linearly in a direction (either forward or backward) corresponding to the rotation direction of the screw shaft 13d. When the nut 13c moves, the moving member 13a connected to the nut 13c via the connecting portion 13b also moves linearly together with the nut 13c.

[0037] 2 and 3 is a member that receives scraps E generated when cutting the sealed substrate W. The second receiving member 14 is formed in a box shape that is open upward and backward. The second receiving member 14 is fixed to the upper part of the moving member 13a. The second receiving member 14 can receive scraps E that fall from the cutting table 15.

[0038] The cutting table 15 is a portion on which the sealed substrate W, which is the object to be cut, is placed. The cutting table 15 is one embodiment of the processing table of the present application. The cutting table 15 is placed above the first receiving member 11 and the second receiving member 14. The cutting table 15 is supported by the moving member 13a via a rotation mechanism 17, which will be described later.

[0039] The rotation mechanism 17 is for rotating the cutting table 15 in the θ direction. The rotation mechanism 17 is interposed between the moving member 13a and the cutting table 15. The rotation mechanism 17 can rotate the cutting table 15 by a driving force from a driving source (not shown) such as a motor.

[0040] The rear cover member 18 shown in Figures 3 and 5 covers the opening 11b from above behind the movable member 13a. The rear cover member 18 is disposed above the protrusion 11a. The rear cover member 18 is bellows-shaped and configured to be expandable and contractible in the front-to-rear direction. The front portion of the rear cover member 18 is connected to the movable member 13a. This allows the rear cover member 18 to expand and contract in the front-to-rear direction in accordance with the movement of the movable member 13a in the front-to-rear direction.

[0041] The front cover member 19 shown in Figures 2, 3, and 5 covers the opening 11b from above in front of the movable member 13a. The front cover member 19 is disposed above the protrusion 11a. The front cover member 19 is bellows-shaped and configured to be able to expand and contract in the front-to-rear direction. The rear of the front cover member 19 is connected to the movable member 13a. This allows the front cover member 19 to expand and contract in the front-to-rear direction in accordance with the movement of the movable member 13a in the front-to-rear direction.

[0042] The upper cover member 20 covers the rear cover member 18 from above. The upper cover member 20 mainly includes a plurality of plate-shaped members 20a and connecting portions 20b.

[0043] The multiple plate-like members 20a are formed in the shape of rectangular plates. The multiple plate-like members 20a are arranged in a line in the front-to-rear direction above the upper cover member 20. The multiple plate-like members 20a are arranged so that at least a portion of the plate-like members 20a overlaps in the up-down direction with the plate-like members 20a adjacent to them in the front-to-rear direction. The adjacent plate-like members 20a are connected to each other so that they can move relative to each other. The multiple plate-like members 20a are arranged so as to span both the front and rear ends of the rear cover member 18. The rear end of the plate-like member 20a arranged at the rearmost position is arranged so as to overlap with the storage section 12 in the up-down direction.

[0044] The connecting portion 20b connects the plate-like members 20a and the second receiving member 14. The connecting portion 20b is fixed to the bottom surface of the rear end portion of the second receiving member 14. The connecting portion 20b is connected to the plate-like member 20a that is arranged at the forefront. This allows the multiple plate-like members 20a to expand and contract in the front-to-rear direction as the second receiving member 14 (moving member 13a) moves in the front-to-rear direction.

[0045] The cleaning nozzle 22 shown in Figures 2 to 4 sprays cleaning water into the inclined groove 11c. The cleaning nozzle 22 is positioned above the front of the inclined groove 11c, facing rearward. The cleaning nozzle 22 can spray cleaning water from its front (rear) end. The cleaning water sprayed from the cleaning nozzle 22 can wash away scraps E from the inclined groove 11c and wash away dirt such as cutting chips.

[0046] 2 and 3 is for cutting the sealed substrate W, which is the cutting target. The spindle unit 23 is one embodiment of the cutting mechanism of the present application. A blade 23a that rotates in a plane including the front-rear and up-down directions is attached to the spindle unit 23. A cutting nozzle 23b is provided near the spindle unit 23 to supply cutting water when cutting the sealed substrate W. The cutting nozzle 23b can move integrally with the spindle unit 23.

[0047] 2 and 3 is for discharging the scrap material E from the first receiving member 11 (inclined groove portion 11c) into the storage portion 12. The removal mechanisms 26 are provided on both the left and right sides of the moving member 13a.

[0048] Since the configurations of the removal mechanisms 26 provided on the left and right sides of the movable member 13a are symmetrical, the following description will focus on the removal mechanism 26 provided on the left side of the movable member 13a. For convenience, the removal mechanisms 26 are illustrated in a simplified form in figures other than Figures 6 and 7, and the configuration of the removal mechanisms 26 will be described below using Figures 6 and 7.

[0049] As shown in FIGS. 6 and 7, the removal mechanism 26 mainly includes a position adjustment mechanism 30 and a movable nozzle 40.

[0050] The position adjustment mechanism 30 supports the movable nozzle 40 and adjusts the vertical position of the movable nozzle 40. The position adjustment mechanism 30 mainly includes a shaft 31, a fixed portion 32, a lift block 33, a linear bush 34, a bracket 35, and a roller 36.

[0051] The shaft 31 is used to guide the lifting block 33 up and down. The shaft 31 is formed in a substantially cylindrical shape. The upper part of the shaft 31 is formed in a flat plate shape so that the fixing part 32 can be easily fixed. The shaft 31 is arranged with its axis facing up and down. Two shafts 31 are provided, lined up front and back. The two shafts 31 are arranged parallel to each other. Note that, for simplification, only one shaft 31 is shown in the figures other than Figures 6 and 7.

[0052] The fixing portion 32 is used to fix the shaft 31 to the cover member 13e. The fixing portion 32 is formed in a rod shape. The fixing portion 32 is arranged with its axis oriented in the left-right direction. Two fixing portions 32 are provided for one shaft 31. One end (left end) of the fixing portion 32 is fixed to the upper part of the shaft 31. The other end (right end) of the fixing portion 32 is fixed to the left side surface of the cover member 13e. In this way, the fixing portion 32 can fix the shaft 31 to the left side surface of the cover member 13e.

[0053] The lifting block 33 is for supporting the movable nozzle 40 so that it can be raised and lowered. The lifting block 33 is one embodiment of the lifting unit of the present application. The lifting block 33 is formed in an appropriate shape to which the bracket 35, the movable nozzle 40, etc. can be attached.

[0054] The linear bushing 34 shown in FIG. 7 is used to smoothly raise and lower the lifting block 33 along the shaft 31. The linear bushing 34 is formed in a substantially cylindrical shape. The linear bushing 34 is provided with balls or the like to reduce resistance with the shaft 31. The linear bushings 34 are fixed in two through holes (not shown) that pass through the lifting block 33 from top to bottom. A shaft 31 is inserted into each of the two linear bushings 34. This allows the lifting block 33 to rise and fall up and down along the shaft 31. Furthermore, inserting the two shafts 31 into the lifting block 33 prevents the lifting block 33 from rotating around the axis of the shaft 31.

[0055] The bracket 35 shown in Figures 6 and 7 is for supporting the roller 36. The bracket 35 is formed in a substantially rectangular plate shape. The bracket 35 is disposed with its longitudinal direction facing up and down. The upper part of the bracket 35 is fixed to the left side surface of the lifting block 33. As a result, the bracket 35 is disposed so as to extend downward from the lifting block 33.

[0056] The roller 36 is a portion that comes into contact with the inclined groove portion 11c of the first receiving member 11. The roller 36 is one embodiment of the contact portion of the present application. The roller 36 is formed in a substantially cylindrical shape. The roller 36 is disposed with its axis, which is the center of rotation, facing the left-right direction. The roller 36 is supported rotatably at the bottom of the bracket 35.

[0057] The movable nozzle 40 moves together with the movable member 13a and sprays wash water toward the inclined groove portion 11c. The movable nozzle 40 is configured as a two-fluid nozzle that can mix and spray two types of fluid (e.g., air and wash water). The movable nozzle 40 is fixed to the lifting block 33 via a connecting portion 41. The movable nozzle 40 is positioned with its tip facing rearward and downward. The movable nozzle 40 can spray fluid from its tip rearward and downward. The fluid sprayed from the movable nozzle 40 is supplied to the movable nozzle 40 via a flow path formed inside the connecting portion 41 and the lifting block 33, as well as a hose or the like (not shown).

[0058] In the removal mechanism 26 configured as described above, the lifting block 33 descends due to its own weight along the shaft 31. Furthermore, the rollers 36 come into contact with the inclined groove portion 11c, thereby restricting the descent of the lifting block 33.

[0059] The removal mechanisms 26 are provided on both the left and right sides of the moving member 13a, and are arranged so as to correspond to the three inclined groove portions 11c, as shown in FIG.

[0060] <Discharge of Scraps E> Hereinafter, with reference to FIGS. 3 and 8, a description will be given of how the scraps E that have fallen into the inclined grooves 11c are discharged in the cutting device 100 configured as described above.

[0061] When cutting the sealed substrate W, the moving member 13a can be moved back and forth by rotating the screw shaft 13d of the moving mechanism 13, and as a result, the cutting table 15 can be moved in the front-to-back direction. By combining the movement of the cutting table 15 in the front-to-back direction by the moving mechanism 13, the rotation of the cutting table 15 in the θ direction by the rotating mechanism 17, and the movement of the spindle part 23 in the left-to-right and up-to-down directions, the sealed substrate W placed on the cutting table 15 can be cut into individual pieces by the blade 23a.

[0062] Scraps E, cutting chips, etc. generated by cutting the sealed substrate W may fall from the cutting table 15 into the inclined groove 11c of the first receiving member 11. In the cutting device 100, when cutting the sealed substrate W, cleaning water is sprayed continuously or intermittently from the cleaning nozzle 22. This cleaning water can wash away the scraps E, cutting chips, etc. that have fallen into the inclined groove 11c toward the storage section 12.

[0063] Furthermore, in this embodiment, the removal mechanism 26 can more reliably discharge scraps E and the like that have fallen into the inclined groove 11c into the storage section 12. Specifically, as shown in Fig. 3, a fluid is sprayed rearward and downward from a movable nozzle 40 of the removal mechanism 26 that is provided on the side of the moving member 13a. In this way, the fluid sprayed from the movable nozzle 40 in addition to the cleaning water sprayed from the cleaning nozzle 22 can more reliably wash away scraps E and the like that have fallen into the inclined groove 11c toward the storage section 12.

[0064] 8, when the movable member 13a moves rearward, the removal mechanism 26 also moves rearward together with the movable member 13a. At this time, the roller 36 in contact with the inclined groove 11c moves downward while rolling on the inclined groove 11c. As a result, the lifting block 33 moves downward so as to follow the inclined groove 11c.

[0065] Although not shown, when the moving member 13a moves forward, the rollers 36 rise while rolling on the inclined groove portion 11c, and the lifting block 33 rises to follow the inclined groove portion 11c.

[0066] In this way, the lifting block 33 moves up and down following the inclined groove 11c, making it possible to adjust the vertical position of the movable nozzle 40. In particular, in this embodiment, the vertical position of the movable nozzle 40 can be adjusted so that the distance between the movable nozzle 40 and the inclined groove 11c remains constant regardless of the movement of the movable member 13a. This makes it possible to maintain a roughly constant water pressure of the fluid sprayed into the inclined groove 11c, effectively washing away scraps E and the like that have fallen into the inclined groove 11c.

[0067] The first embodiment of the present invention has been described above, but the present invention is not limited to the above embodiment and can be modified as appropriate within the scope of the technical idea of ​​the invention described in the claims.

[0068] For example, the configuration (shape, arrangement, number, etc.) of each part of the cutting device 100 described in this embodiment is not particularly limited and can be changed as desired.

[0069] Furthermore, the configuration of the position adjustment mechanism 30 shown in this embodiment is just an example, and the present invention is not limited to this.

[0070] Specifically, in this embodiment, an example has been shown in which the lifting block 33 (movable nozzle 40) descends under its own weight, but the present invention is not limited to this. For example, it is also possible to configure the lifting block 33 to be pushed downward by a spring or the like. This makes it easier for the roller 36 to follow the inclined groove portion 11c.

[0071] In addition, in the present embodiment, the rollers 36 are brought into contact with the inclined grooves 11c to raise and lower the movable nozzle 40 along the inclined grooves 11c, but the present invention is not limited to this. For example, the rollers 36 may be brought into contact with a guide member such as a rail provided separately, instead of the inclined grooves 11c, to raise and lower the movable nozzle 40.

[0072] The lifting block 33 can also be raised and lowered using the power of an appropriate drive source. For example, the lifting block 33 can be configured to be raised and lowered using the power of a motor, a cylinder, or the like. In this case, it is desirable to control the vertical position of the lifting block 33 in accordance with the front-rear position of the cutting table 15, thereby controlling the movable nozzle 40 to an appropriate height.

[0073] Furthermore, in this embodiment, the vertical position of the movable nozzle 40 is adjusted so that the distance between the movable nozzle 40 and the inclined groove 11c is constant, but the present invention is not limited to this. That is, the distance between the movable nozzle 40 and the inclined groove 11c does not necessarily have to be constant. For example, the vertical position of the movable nozzle 40 can be adjusted so that the distance between the movable nozzle 40 and the inclined groove 11c decreases as the movable nozzle 40 moves further rearward (toward the storage section 12). This allows the water pressure of the fluid sprayed against the scrap E to be stronger toward the downstream (rear) side of the inclined groove 11c where more scrap E is present, thereby more reliably discharging the scrap E.

[0074] In addition, in this embodiment, an example has been shown in which the roller 36 is brought into contact with the inclined groove portion 11 c, but the present invention is not limited to this, and any member can be brought into contact with the inclined groove portion 11 c. In this case, it is preferable to use a low-friction material that has relatively low friction with the inclined groove portion 11 c, from the viewpoint of suppressing damage to the member and suppressing resistance.

[0075] Furthermore, in this embodiment, an example has been shown in which the removal mechanism 26 is fixed to the cover member 13e, but the present invention is not limited to this, and the removal mechanism 26 may also be provided on another member that moves in conjunction with the movement of the cutting table 15. For example, the removal mechanism 26 may also be provided on the moving member 13a, the second receiving member 14, the connecting portion 13b, etc.

[0076] Furthermore, in this embodiment, an example has been shown in which two shafts 31 are used to guide the lifting block 33 up and down, but the present invention is not limited to this, and the number of shafts 31 can be changed as desired. Note that, when only one shaft 31 is used, it is desirable to provide a mechanism for preventing the lifting block 33 from rotating around the axis of the shaft 31. For example, it is possible to prevent the lifting block 33 from rotating by forming splines on the shaft 31 and the lifting block 33 (linear bushing 34).

[0077] <Note> The cutting device 100 according to a first aspect of the present disclosure comprises: a cutting table 15 (processing table) movable along a linear movement direction; a spindle unit 23 (cutting mechanism) that cuts a sealed substrate W (object to be cut) placed on the cutting table 15; a first receiving member 11 (receiving member) that is disposed below the cutting table 15 and is capable of receiving scraps E generated when the sealed substrate W is cut by the spindle unit 23, in an inclined groove 11 c (inclined portion) that is inclined along the movement direction; a movable nozzle 40 that is movable in the movement direction in conjunction with the movement of the cutting table 15 and sprays a fluid into the inclined groove 11 c; and a position adjustment mechanism 30 that is capable of adjusting the vertical position of the movable nozzle 40 in conjunction with the movement of the movable nozzle 40 in the movement direction. The cutting device 100 according to the first aspect of the present disclosure allows the scraps E to be discharged more reliably. That is, the fluid is sprayed by the removal mechanism 26, which moves together with the cutting table 15, to remove the scraps E that have fallen into the inclined grooves 11c. Furthermore, the vertical position of the movable nozzle 40 can be adjusted in accordance with the movement of the cutting table 15, so the water pressure of the fluid sprayed onto the inclined grooves 11c (the scraps E) can be adjusted. This allows scraps E that cannot be removed by the cleaning water from the cleaning nozzle 22 (scraps E that have accumulated or adhered to the inclined grooves 11c) to be more reliably removed from the inclined grooves 11c.

[0078] In the cutting device 100 of the second aspect according to the first aspect, the position adjustment mechanism 30 adjusts the vertical position of the movable nozzle 40 so that the distance between the movable nozzle 40 and the inclined groove portion 11c is constant. According to the cutting device 100 of the second aspect of the present disclosure, by keeping the distance between the movable nozzle 40 and the inclined groove portion 11c constant, the water pressure of the fluid sprayed into the inclined groove portion 11c can be kept roughly constant, and scraps E that have fallen into the inclined groove portion 11c can be effectively washed away.

[0079] The cutting device 100 of a third aspect according to the first or second aspect further includes a storage section 12 that is disposed on one side of the first receiving member 11 in the movement direction and is capable of storing the scrap material E, and the inclined groove section 11c is inclined downward toward the storage section 12. According to the cutting device 100 of the third aspect of the present disclosure, the discharge of the scrap material E can be promoted by the fluid flowing on the inclined groove section 11c toward the storage section 12.

[0080] In the cutting device 100 of a fourth aspect according to any one of the first to third aspects, the position adjustment mechanism 30 includes a lifting block 33 (lifting unit) that supports the movable nozzle 40 and is movable up and down, and a roller 36 (contact unit) that is provided on the lifting block 33 and comes into contact with the inclined groove 11 c. According to the cutting device 100 of the fourth aspect of the present disclosure, the vertical position of the movable nozzle 40 can be adjusted to follow the inclined groove 11 c with a simple configuration.

[0081] In the cutting device 100 of a fifth aspect according to the fourth aspect, the contact portion is constituted by a rotatable roller 36. According to the cutting device 100 of the fifth aspect of the present disclosure, the inclined groove portion 11c and the contact portion (roller 36) can be brought into smooth contact with each other, and breakage or damage to the inclined groove portion 11c and the contact portion (roller 36) can be suppressed.

[0082] The cutting device 100 of a sixth aspect according to the fourth or fifth aspect further includes a shaft 31 that vertically guides the lifting block 33. According to the cutting device 100 of the sixth aspect of the present disclosure, the lifting block 33 can be raised and lowered in a certain direction.

[0083] A method for manufacturing cut products according to a seventh aspect of the present disclosure is a method for manufacturing cut products using the cutting apparatus 100 according to any one of the first to sixth aspects, and includes the steps of placing the sealed substrate W on the cutting table 15, and cutting the sealed substrate W by relatively moving the spindle unit 23 and the cutting table 15. According to the method for manufacturing cut products according to the seventh aspect of the present disclosure, it is possible to more reliably discharge scraps E.

[0084] REFERENCE SIGNS LIST 11 First receiving member 11c Inclined groove portion 12 Storage portion 15 Cutting table 23 Spindle portion 30 Position adjustment mechanism 31 Shaft 33 Lifting block 36 Roller 40 Movable nozzle 100 Cutting device

Claims

1. A cutting device comprising: a processing table movable along a linear movement direction; a cutting mechanism for cutting an object placed on said processing table; a receiving member arranged below said processing table and capable of receiving scraps generated when said object is cut by said cutting mechanism at an inclined portion inclined along said movement direction; a movable nozzle movable in said movement direction in conjunction with the movement of said processing table and for spraying a fluid onto said inclined portion; and a position adjustment mechanism capable of adjusting the up and down position of said movable nozzle in conjunction with the movement of said movable nozzle in said movement direction.

2. The cutting device according to claim 1, wherein the position adjustment mechanism adjusts the vertical position of the movable nozzle so that the distance between the movable nozzle and the inclined portion is constant.

3. A cutting device as described in claim 1 or claim 2, further comprising a storage section arranged on one side of the receiving member in the movement direction and capable of storing the scrap material, and wherein the inclined section slopes downward as it approaches the storage section.

4. A cutting device as claimed in any one of claims 1 to 3, wherein the position adjustment mechanism comprises: a lifting section that supports the movable nozzle and can be raised and lowered; and a contact section that is provided on the lifting section and comes into contact with the inclined section.

5. The cutting device according to claim 4, wherein the contact portion is constituted by a rotatable roller.

6. The cutting device according to claim 4 or claim 5, further comprising a shaft for guiding the lifting section up and down.

7. A method for manufacturing a cut product using the cutting device according to any one of claims 1 to 6, comprising the steps of: placing the object to be cut on the processing table; and cutting the object by moving the cutting mechanism and the processing table relative to each other.

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