Sealing device and vacuum apparatus

Abstract

Embodiments of the present invention provide a sealing device and a vacuum apparatus. A vacuum cavity and an opening are formed in a vacuum chamber; a movable end of a horizontal moving mechanism is connected to a sealing plate; a lifting / lowering end of a vertical moving mechanism is connected to a fixed end of the horizontal moving mechanism, and a connecting end of the vertical moving mechanism is connected to the horizontal moving mechanism; and a driving end of a driving mechanism is connected to the lifting / lowering end of the vertical moving mechanism, and the driving end is configured to drive the vertical moving mechanism to move away from or close to the opening in a vertical direction. When the movable end of the horizontal moving mechanism is located at a first position and a third position, the sealing plate is in a first state of being away from the opening in the vertical direction and in the horizontal direction; when the movable end of the horizontal moving mechanism is located at a second position and the third position, the sealing plate is in a second state of being away from the opening in the horizontal direction and close to the opening in the vertical direction; and when the movable end of the horizontal moving mechanism is located at the second position and a fourth position, the sealing plate is in a third state of abutting against and sealing the opening.

Description

Sealing device and vacuum equipment

[0001] This disclosure claims priority from application number 202410188745.9 filed with the China Patent Office on February 20, 2024; the entire contents of which are incorporated herein by reference. Technical Field

[0002] The present disclosure relates to the technical field of the semiconductor industry, and in particular to a sealing device and vacuum equipment. Background Art

[0003] Vacuum transmission sealing devices (hereinafter referred to as sealing devices) are widely used in coating equipment, optoelectronic industry and other cluster vacuum systems. Due to the characteristics of fast opening and closing, high repeated operation life and high airtightness, the sealing devices play a key role in isolating and connecting various vacuum chambers.

[0004] Summary of the Invention

[0005] In a first aspect, an embodiment of the present disclosure provides a sealing device, wherein the sealing device is configured to seal a vacuum chamber, wherein the vacuum chamber is formed with a vacuum cavity and an opening communicating with the vacuum cavity;

[0006] The sealing device includes:

[0007] a sealing plate configured to seal the opening;

[0008] a horizontal moving mechanism, wherein a movable end of the horizontal moving mechanism is connected to the sealing plate, and a fixed end of the horizontal moving mechanism extends away from the vacuum chamber;

[0009] A vertical moving mechanism, wherein a lifting end of the vertical moving mechanism is connected to a fixed end of the horizontal moving mechanism, and a connecting end of the vertical moving mechanism extends toward the opening and is connected to the horizontal moving mechanism;

[0010] a driving mechanism, wherein a driving end of the driving mechanism is connected to the lifting end of the vertical moving mechanism, and the driving end is configured to drive the vertical moving mechanism to move in a direction away from or toward the opening in a vertical direction, so that the movable end of the horizontal moving mechanism has a first position and a second position in the vertical direction, and has a third position and a fourth position in the horizontal direction;

[0011] When the movable end of the horizontal moving mechanism is located at the first position in the vertical direction and the third position in the horizontal direction, the sealing plate has a first state in which it is away from the opening in the vertical direction and in the horizontal direction; when the movable end of the horizontal moving mechanism is located at the second position in the vertical direction and the third position in the horizontal direction, the sealing plate has a second state in which it is away from the opening in the horizontal direction and close to the opening in the vertical direction; when the movable end of the horizontal moving mechanism is located at the second position in the vertical direction and the fourth position in the horizontal direction, the sealing plate has a third state in which it is abutted and sealed against the opening.

[0012] As a second aspect, an embodiment of the present disclosure further provides a vacuum device, comprising a sealing device according to any technical solution of the first aspect, wherein the vacuum device further comprises a vacuum chamber, wherein the vacuum chamber is formed with a vacuum cavity and an opening communicating with the vacuum cavity;

[0013] The sealing device is configured to seal the opening. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] The accompanying drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions are configured to explain the present disclosure and do not constitute an improper limitation of the present invention. In the accompanying drawings:

[0015] FIG1 is a structural cross-sectional view 1 of a sealing device provided by one embodiment of the present disclosure;

[0016] FIG2 is a second structural cross-sectional view of a sealing device provided by an embodiment of the present disclosure;

[0017] 3 is a cross-sectional view of a sealing plate in a first state in a sealing device provided by an embodiment of the present disclosure;

[0018] FIG4 is a cross-sectional view of a sealing plate in a second state in a sealing device provided by an embodiment of the present disclosure;

[0019] 5 is a cross-sectional view of a sealing plate in a third state in a sealing device provided by an embodiment of the present disclosure;

[0020] FIG6 is a partial structural schematic diagram 1 in FIG2 ;

[0021] FIG7 is a second schematic diagram of a portion of the structure in FIG2 .

[0022] Explanation of the reference numerals: 100-vacuum chamber; 200-sealing plate; 300-horizontal moving mechanism; 400-vertical moving mechanism; 500-driving mechanism; 600-guide frame; 700-shock-absorbing pad; 110-opening; 310-support assembly; 311-cam; 311a-first rotating shaft; 312-fixed seat; 312a-groove; 313-movable frame; 313a-first connecting plate; 313b-second connecting plate; 313c-third connecting plate; 313d-movable through hole; 313e-support rod; 320-fulcrum assembly; 321-first rotating wheel; 321a-second rotating shaft. 410 - fixed base plate; 411 - second rotating wheel; 411a - third rotating shaft; 420 - elastic component; 430 - bellows component; 610 - first guide hole; 620 - second guide hole; 710 - first shock-absorbing pad; 720 - second shock-absorbing pad. DETAILED DESCRIPTION

[0023] In order to enable those skilled in the art to better understand the technical solutions of the present disclosure, the technical solutions in the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. Based on the embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of the present disclosure.

[0024] It should be noted that many specific details are set forth in the following description to facilitate a full understanding of the present invention. However, the present invention can also be implemented in other ways different from those described herein. Therefore, the scope of protection of the present invention is not limited to the specific embodiments disclosed below.

[0025] Vacuum transmission seals (hereinafter referred to as seals) are widely used in coating equipment, the optoelectronics industry, and other cluster vacuum systems. Due to their rapid opening and closing, high repetitive operating life, and high airtightness, they play a key role in isolating and connecting vacuum chambers. Seals are vacuum system components used to separate and connect vacuum chambers within vacuum equipment in high-vacuum, high-purity environments. They are an essential component of semiconductor production equipment and an indispensable key element in the semiconductor manufacturing process.

[0026] In related technologies, the sealing device usually includes a driving assembly and a sealing plate connected to the lifting end of the driving assembly. The driving assembly usually includes a cylinder. In specific implementation, the cylinder is used to drive the sealing plate to stick to the side wall of the vacuum chamber of the vacuum equipment and move up and down along the opening of the vacuum chamber to achieve sealing or opening of the vacuum chamber.

[0027] However, as the sealing plate moves up and down along the opening of the vacuum chamber, friction will occur between the surface of the sealing plate and the side wall of the vacuum chamber. Due to the friction, fine particles will be generated. During the movement of the sealing plate, the fine particles will enter the vacuum chamber through the opening of the vacuum chamber, causing contamination of the vacuum chamber and affecting the film forming quality of the wafers in the vacuum chamber.

[0028] Therefore, the embodiments of the present disclosure provide a sealing device and a vacuum device to solve the technical problem in the related art that friction will occur between the surface of the sealing plate and the outer wall of the vacuum chamber during the process of the sealing plate moving up and down along the opening of the vacuum chamber. Due to the friction, fine particles will be generated. The fine particles will enter the vacuum chamber through the opening of the vacuum chamber during the movement of the sealing plate, causing contamination of the vacuum chamber and affecting the film formation quality of the wafers in the vacuum chamber.

[0029] Figure 1 is a structural cross-sectional view 1 of a sealing device provided by an embodiment of the present disclosure; Figure 2 is a structural cross-sectional view 2 of a sealing device provided by an embodiment of the present disclosure; Figure 3 is a cross-sectional view of a sealing plate in a first state in a sealing device provided by an embodiment of the present disclosure; Figure 4 is a cross-sectional view of a sealing plate in a second state in a sealing device provided by an embodiment of the present disclosure; Figure 5 is a cross-sectional view of a sealing plate in a third state in a sealing device provided by an embodiment of the present disclosure.

[0030] 1 and 2 , an embodiment of the present disclosure provides a sealing device configured to seal a vacuum chamber 100 , wherein the vacuum chamber 100 is formed with a vacuum cavity and an opening 110 communicating with the vacuum cavity;

[0031] The sealing device includes:

[0032] a sealing plate 200 , the sealing plate 200 being configured to seal the opening 110 ;

[0033] A horizontal moving mechanism 300 , wherein a movable end of the horizontal moving mechanism 300 is connected to the sealing plate 200 , and a fixed end of the horizontal moving mechanism 300 extends away from the vacuum chamber 100 ;

[0034] The vertical moving mechanism 400 has a lifting end connected to the fixed end of the horizontal moving mechanism 300. The connecting end of the vertical moving mechanism 400 extends toward the opening 110 and is connected to the horizontal moving mechanism 300. In other words, both ends of the horizontal moving mechanism 300 are connected to the vertical moving mechanism 400, making the connection between the horizontal moving mechanism 300 and the vertical moving mechanism 400 more stable. In addition, this also ensures that the horizontal moving mechanism 300 can move stably during the movement of the vertical moving mechanism 400.

[0035] The driving mechanism 500 has a driving end connected to the lifting end of the vertical moving mechanism 400. The driving end of the driving mechanism 500 is configured to drive the vertical moving mechanism 400 to move in a vertical direction away from or close to the opening 110, so that the movable end of the horizontal moving mechanism 300 has a first position and a second position in the vertical direction, and a third position and a fourth position in the horizontal direction. That is to say, when the vertical moving mechanism 400 moves in the vertical direction, it can drive the horizontal moving mechanism 300 to move in the vertical direction, and can also drive the horizontal moving mechanism 300 to move in the horizontal direction.

[0036] It should be noted that the vertical direction may refer to the y direction in FIG. 3 to FIG. 5 , and the horizontal direction may refer to the x direction in FIG. 3 to FIG. 5 .

[0037] Exemplarily, when the movable end of the horizontal moving mechanism 300 is located at the first position in the vertical direction and the third position in the horizontal direction, the sealing plate 200 has a first state away from the opening 110 in the vertical direction and the horizontal direction (see FIG. 3 ).

[0038] When the movable end of the horizontal moving mechanism 300 is located in the second position in the vertical direction and in the third position in the horizontal direction, the sealing plate 200 has a second state in which it is horizontally away from the opening 110 and vertically close to the opening 110 (see FIG. 4 ). It is understood that the switching of the sealing plate 200 between the first state and the second state can be achieved by moving the horizontal moving mechanism 300 in the vertical direction. For example, the vertical moving mechanism 400 can drive the horizontal moving mechanism 300 to move upward in the y-direction, thereby switching the sealing plate 200 from the first state to the second state.

[0039] When the movable end of the horizontal moving mechanism 300 is located in the second position in the vertical direction and in the fourth position in the horizontal direction, the sealing plate 200 is in the third state in which it abuts and seals against the opening 110 (see FIG5 ). It is understood that the switching of the sealing plate 200 between the second and third states can be achieved by moving the horizontal moving mechanism 300 horizontally. For example, the vertical moving mechanism 400 can drive the horizontal moving mechanism 300 to move leftward along the x-direction, thereby switching the sealing plate 200 from the second state to the third state.

[0040] As shown in Figure 3, it should be noted that the vacuum chamber 100 includes a transfer chamber and a reaction chamber. Both the transfer chamber and the reaction chamber are provided with openings 110, and the opening 110 of the transfer chamber and the opening 110 of the reaction chamber are arranged relative to each other, so as to facilitate the transfer of the wafer to the reaction chamber via the transfer chamber and perform a vacuum reaction in the reaction chamber.

[0041] It should be further explained that the process of the sealing plate 200 sealing the opening 110 goes through three state changes and two strokes, namely, the first stroke is an upward stroke, in which the sealing plate 200 changes the opening 110 from a fully open state to a loosened state; the second stroke is a horizontal movement stroke, in which the sealing plate 200 changes the opening 110 from a loosened state to a closed state.

[0042] For example, the sealing plate 200 may be disposed at the opening 110 of the transfer chamber, or may be disposed at the opening 110 of the reaction chamber, which is not specifically limited herein.

[0043] For another example, the sealing device may further include a connecting mechanism, wherein the connecting mechanism has a first connecting portion and a second connecting portion, the first connecting portion is provided with a first opening that is mutually compatible with the transmission chamber, the second connecting portion is provided with a second opening that is mutually compatible with the reaction chamber, the first connecting portion is fixed to the outer wall of the transmission chamber, the second connecting portion is fixed to the outer wall of the reaction chamber, and the sealing plate 200 is provided between the first connecting portion and the second connecting portion, so as to achieve sealed isolation of the relative first opening and second opening through a sealing plate 200, thereby achieving sealed isolation of the transmission chamber and the reaction chamber, thereby simplifying the structural setting of the sealing device.

[0044] For another example, the driving mechanism 500 may be a cylinder, a lifting module, or the like.

[0045] Exemplarily, when the sealing plate 200 is in the first state, the sealing plate 200 is away from the opening 110 in both the vertical and horizontal directions, and the movable end of the horizontal moving mechanism 300 is located at the first position in the vertical direction and the third position in the horizontal direction. After the wafer is transferred from the transfer chamber to the reaction chamber, the driving end of the driving mechanism 500 drives the vertical moving mechanism 400 to move in the vertical direction toward the opening 110, so that the movable end of the horizontal moving mechanism 300 moves in the vertical direction from the first position to the second position, thereby changing the sealing plate 200 from the first state to the second state.

[0046] It should be noted that when the movable end of the horizontal moving mechanism 300 moves from the first position to the second position in the vertical direction, it is only moved in the vertical direction. The movable end of the horizontal moving mechanism 300 is located at the third position in the horizontal direction. The second state of the sealing plate 200 is that the sealing plate 200 and the opening 110 are arranged relative to each other, and the sealing plate 200 is away from the opening 110 in the horizontal direction.

[0047] The driving end of the driving mechanism 500 drives the vertical moving mechanism 400 to continue to move in the vertical direction toward the opening 110. At this time, the movable end of the horizontal moving mechanism 300 only moves in the horizontal direction, that is, the movable end of the horizontal moving mechanism 300 moves from the third position to the fourth position in the horizontal direction (the horizontal moving mechanism 300 is in the second position in the vertical direction), thereby changing the sealing plate 200 from the second state to the third state.

[0048] From the above description, it can be seen that this solution achieves the following technical effects:

[0049] On the one hand, the embodiment of the present disclosure provides a sealing device. In the embodiment of the present disclosure, the sealing plate 200 is connected to the movable end of the horizontal moving mechanism 300, the fixed end of the horizontal moving mechanism 300 is connected to the lifting end of the vertical moving mechanism 400, and the lifting end of the vertical moving mechanism 400 is connected to the driving end of the driving mechanism 500. In this way, the driving end of the driving mechanism 500 can drive the vertical moving mechanism 400 to move in the vertical direction away from or close to the opening 110, so that the movable end of the horizontal moving mechanism 300 has a first position and a second position in the vertical direction, and a third position and a fourth position in the horizontal direction. When the movable end of the horizontal moving mechanism 300 is located in the first position in the vertical direction and in the third position in the horizontal direction, the sealing plate 200 has a vertical and horizontal position away from or close to the opening 110. In the first state of leaving the opening 110, the opening 110 of the vacuum chamber 100 is in a fully open state; when the movable end of the horizontal moving mechanism 300 is located in the second position in the vertical direction and in the third position in the horizontal direction, the sealing plate 200 has a second state in which it is away from the opening 110 in the horizontal direction and close to the opening 110 in the vertical direction, that is, it is arranged opposite to the opening 110, so that the opening 110 of the vacuum chamber 100 is in a loose state; when the movable end of the horizontal moving mechanism 300 is located in the second position in the vertical direction and in the fourth position in the horizontal direction, the sealing plate 200 has a third state in which it is abutted and sealed against the opening 110, that is, the opening 110 of the reaction chamber or the opening 110 of the transfer chamber is in a sealed state, thereby avoiding gas exchange between the reaction chamber and the transfer chamber, thereby ensuring the reaction quality of the wafer.

[0050] In addition, the embodiment of the present disclosure sets the sealing plate 200 to three states and two strokes, so that the sealing process of the sealing plate 200 can be achieved through two processes: the rising stroke and the horizontal movement stroke, thereby achieving stable vertical rise and slow horizontal closure of the sealing plate 200. This not only avoids the generation of fine particles due to friction, reduces the generation of particle contamination, improves the wafer reaction quality, but also improves the overall stability of the sealing device. The configuration of the embodiment of the present disclosure provides a sealing device that can reduce the generation of particle contamination, improve the wafer reaction quality, and improve the overall stability of the device.

[0051] In one implementation, the horizontal movement mechanism 300 may include a support assembly 310 and a fulcrum assembly 320 .

[0052] Exemplarily, one end of the support assembly 310 is connected to the lifting end of the vertical moving mechanism 400, the other end of the support assembly 310 is connected to the sealing plate 200, and the fulcrum assembly 320 is hinged to one side of the support assembly 310 and forms a lever structure with the support assembly 310.

[0053] In the horizontal movement stroke of the sealing plate 200, such as the second stroke, the driving end of the driving mechanism 500 is configured to drive the vertical moving mechanism 400 to move in the vertical direction away from or close to the opening 110, so as to pry one end of the support assembly 310 to move in the vertical direction, so that the other end of the support assembly 310 rotates around the fulcrum assembly 320 between the third position and the fourth position.

[0054] For example, since the support assembly 310 and the fulcrum assembly 320 are hinged to form a lever structure, when the driving end of the driving mechanism 500 drives the vertical moving mechanism 400 to move in the vertical direction, the vertical moving mechanism 400 can simultaneously drive the support assembly 310 to rotate around the fulcrum assembly 320, so that the other end of the support assembly 310 has a third position and a fourth position in the horizontal direction, thereby enabling the sealing plate 200 located at the other end of the support assembly 310 to be transformed from the second state to the third state.

[0055] In the embodiment of the present disclosure, a lever structure is formed by hingedly connecting the support component 310 and the fulcrum component 320. Driven by the vertical moving mechanism 400, the support component 310 can rotate around the fulcrum component 320, thereby enabling the sealing plate 200 to cover the opening 110 in a horizontal direction to avoid friction between the sealing plate 200 and the side wall of the opening 110, thereby reducing the generation of particle contamination.

[0056] 3 and 4 , in some examples, during the vertical movement stroke of the sealing plate 200, such as the first stroke, the vertical movement mechanism 400 can drive the support assembly 310 and the fulcrum assembly 320 to move synchronously in the vertical direction. For example, when the driving end of the driving mechanism 500 drives the vertical movement mechanism 400 to move in the vertical direction, the lifting end and the connecting end of the vertical movement mechanism 400 jointly drive the support assembly 310 and the fulcrum assembly 320 hinged on the support assembly 310 to move upward synchronously, causing the sealing plate 200 connected to one end of the support assembly 310 to move upward in the vertical direction until it reaches the second vertical position, i.e., the third horizontal position, that is, the sealing plate 200 is in the second state.

[0057] In some examples, the sealing device may also include a limiting structure. When the sealing plate 200 reaches the second state, the limiting structure can limit the movement of at least one of the support assembly 310 and the fulcrum assembly 320 in the vertical direction. Since the fulcrum assembly 320 is hinged to the support assembly 310, the entire horizontal moving mechanism 300 can be limited to continue moving in the vertical direction.

[0058] In this way, in the second stroke, when the vertical moving mechanism 400 continues to move in the vertical direction under the drive of the driving mechanism 500, the support assembly 310 is hinged to the fulcrum assembly 320, so that the support assembly 310 can rotate around the fulcrum assembly 320 under the drive of the vertical moving mechanism 400, so that the other end of the support assembly 310 has a third position and a fourth position along the horizontal direction, thereby enabling the sealing plate 200 located at the other end of the support assembly 310 to be transformed from the second state to the third state.

[0059] 1 , 3 , and 6 , in some examples, the support assembly 310 may include a cam assembly and a movable frame 313 .

[0060] The cam assembly is arranged at the lifting end of the vertical moving mechanism 400 , and the cam assembly is rotatably connected to one end of the movable frame 313 , and the other end of the movable frame 313 is connected to the sealing plate 200 , and the movable frame 313 is hinged to the fulcrum assembly 320 to form a lever structure.

[0061] In the embodiment of the present disclosure, the cam assembly provides power to one end of the movable frame 313 during the movement, so that the movable frame 313 rotates around the fulcrum assembly 320, thereby driving the sealing plate 200 located at the other end of the movable frame 313 to move in the horizontal direction, so that the sealing plate 200 covers the opening 110 in the horizontal direction, thereby avoiding friction between the sealing plate 200 and the side wall of the opening 110.

[0062] The arrangement of the cam assembly enables the vertical moving mechanism 400 to cooperate with the cam assembly to drive both ends of the movable frame 313 to move horizontally in the second stroke, thereby making the structure simpler and the operation process simple and reliable.

[0063] Exemplarily, the cam assembly may include a fixing seat 312 and a cam 311;

[0064] The fixing seat 312 is provided at the lifting end of the vertical moving mechanism 400, and the fixing seat 312 is provided with a groove 312a adapted to the cam 311;

[0065] The cam 311 is disposed in the groove 312 a , and one side of the cam 311 is rotatably disposed on one side of the movable frame 313 via one end of the first rotating shaft 311 a .

[0066] In the embodiment of the present disclosure, the cam 311 and the groove 312a cooperate with each other. When the driving end of the driving mechanism 500 drives the vertical moving mechanism 400 to move in the vertical direction, the cam 311 moves from the notch of the groove 312a to the bottom wall of the groove 312a, so that the movable frame 313 rotates around the fulcrum assembly 320, so that the other end of the movable frame 313 has a third position and a fourth position in the horizontal direction, that is, the sealing plate 200 is transformed from the second state to the third state, so that the sealing plate 200 can cover the opening 110 in the horizontal direction, thereby avoiding the generation of friction particles between the sealing plate 200 and the opening 110, and improving the wafer reaction quality.

[0067] In addition, since one side of the cam 311 is rotatably disposed on one side of the movable frame 313 through one end of the first rotating shaft 311a, in the first stroke, when the vertical moving mechanism 400 drives the movable frame 313 and the fixed base 312 to move upward, the cam 311 can move upward driven by the first rotating shaft.

[0068] Exemplarily, the groove 312 a is inclined from the bottom wall of the groove 312 a to the opening of the groove 312 a , wherein the opening of the groove 312 a is arranged in a horizontal direction toward the opening 110 .

[0069] In a specific implementation, in the initial position, when the cam 311 is located at the notch of the groove 312a, the sealing plate 200 has a first state, and as the vertical moving mechanism 400 rises, the cam 311 is still located at the notch of the groove 312a. After the sealing plate 200 changes from the first state to the second state, the position of the sealing plate 200 in the vertical direction remains unchanged, and the cam 311 moves from the notch of the groove 312a to the bottom wall of the groove 312a in the groove 312a. When the cam 311 moves to the bottom wall of the groove 312a, the sealing plate 200 has a third state.

[0070] The embodiment of the present disclosure sets the groove 312a to be inclined from the bottom wall of the groove 312a to the notch of the groove 312a, and the notch of the groove 312a is inclined in the horizontal direction toward the direction close to the opening 110. When the lifting end of the driving member drives the fixed base plate 410 to move in the vertical direction, the sealing plate 200 has a first stroke. During the movement of the first stroke, the cam 311 is always located at the notch of the groove 312a, and the sealing plate 200 only moves in the vertical direction, and the sealing plate 200 changes from the first state to the second state; as the vertical moving mechanism 400 rises, the cam 311 moves from the notch of the groove 312a to the bottom wall of the groove 312a, thereby being able to pry the support assembly 310 to rotate around the fulcrum assembly 320, so that the sealing plate 200 covers the opening 110 in the horizontal direction.

[0071] Exemplarily, a transition position is set between the notch of groove 312a and the bottom wall of groove 312a, the notch of groove 312a to the transition position is set in the vertical direction, the transition position to the bottom wall of groove 312a is set at an angle, and the bottom wall of groove 312a is set in the horizontal direction away from the outlet 110.

[0072] In a specific implementation, when the sealing plate 200 has a first state in which it is away from the opening 110 in the vertical direction and the horizontal direction, the cam 311 is located between the notch of the groove 312a and the transition position. As the driving mechanism 500 drives the vertical moving mechanism 400 to drive the horizontal moving mechanism 300 and the sealing plate 200 to move in the vertical direction (i.e., the first stroke), the cam 311 and the groove 312a are relatively stationary, so that the sealing plate 200 has a second state in which it is away from the opening 110 in the horizontal direction; as the sealing plate 200 continues to rise (i.e., the second stroke), the cam 311 and the groove 312a begin to produce relative displacement, and the cam 311 moves toward the bottom wall of the groove 312a until the cam 311 abuts against the bottom wall of the groove 312a. At this time, the sealing plate 200 has a third state in which it abuts against the sealing opening 110.

[0073] In the embodiment of the present disclosure, by setting the groove 312a to a transition position and setting the groove 312a notch to the transition position in the vertical direction, on the one hand, the cam 311 can be limited between the groove 312a notch and the transition position to ensure that the horizontal moving mechanism 300 remains stable in the process of driving the cam 311 to rise and fall; on the other hand, by setting the groove 312a notch to the transition position in the vertical direction, the horizontal moving mechanism 300 can always remain vertical in the process of driving the sealing plate 200 to move from the first state to the second state or from the second state to the first state, thereby avoiding friction between the sealing plate 200 and the surrounding side walls of the opening 110.

[0074] 6 , in some examples, the movable frame 313 may include a first connecting plate 313 a , a second connecting plate 313 b , a third connecting plate 313 c , and a support rod 313 e .

[0075] The second connecting plate 313b is a side connecting plate interconnected with the first connecting plate 313a. The first connecting plate 313a is provided with a movable through hole 313d. The driving end of the driving mechanism 500 passes through the movable through hole 313d and is fixed to the lifting end of the vertical moving mechanism 400. The driving end of the driving mechanism 500 is movably disposed in the movable through hole 313d.

[0076] The third connecting plate 313c is disposed at one end of the second connecting plate 313b facing away from the first connecting plate 313a, and the third connecting plate 313c extends in a direction facing away from the first connecting plate 313a. The fulcrum assembly 320 is hingedly connected to one end of the third connecting plate 313c facing away from the first connecting plate 313a.

[0077] One end of the support rod 313 e is fixed to the third connecting plate 313 c , and the other end of the support rod 313 e is connected to the sealing plate 200 .

[0078] It should be noted that the inner diameter of the movable through hole 313d is larger than the diameter of the lifting end of the vertical moving mechanism 400, so that the vertical moving mechanism 400 can drive the horizontal moving mechanism 300 to move in the vertical direction within the movable through hole 313d, and can provide a movable margin for the first connecting plate 313a to move in the horizontal direction.

[0079] In the embodiment of the present disclosure, the first connecting plate 313a, the second connecting plate 313b and the third connecting plate 313c are provided to further support the vertical moving mechanism 400, thereby improving the stability of the vertical moving mechanism 400 during movement in the vertical direction.

[0080] FIG6 is a schematic diagram of a partial structure of FIG2 ; FIG7 is a schematic diagram of a partial structure of FIG2 .

[0081] 6 and 7 , illustratively, the vertical movement mechanism 400 includes a fixed base plate 410 , an elastic member 420 , and a bellows member 430 .

[0082] The driving end of the driving mechanism 500 is connected to the fixed base plate 410;

[0083] One end of the bellows component 430 is fixed and sealed to the bottom wall of the vacuum chamber 100, and the other end of the bellows component 430 is against the third connecting plate 313c; the support rod 313e passes through the bellows component 430 and the third connecting plate 313c in sequence and is connected to the elastic component 420, and the end of the support rod 313e facing away from the sealing plate 200 is integrally arranged with the bellows component 430, and the other end of the elastic component 420 is fixed to the fixed bottom plate 410.

[0084] For example, one end of the support rod 313e passes through the bellows component 430 and the third connecting plate 313c in sequence and extends to the inner circle of the elastic component 420. A fastener is set between the elastic component 420 and the third connecting plate 313c. The fastener can be set as a bolt, that is, the support rod 313e is fixed to the third connecting plate 313c by the bolt. In addition, one end of the elastic component 420 is fixed to the bolt.

[0085] For another example, a sealing ring is provided on a surface of the sealing plate 200 facing the opening 110 to improve the sealing effect between the sealing plate 200 and the opening 110 .

[0086] For another example, the elastic component 420 can be made of a material such as a spring or rubber, as long as it can provide sufficient flexibility for the rotation of the self-locking structure. In a specific implementation, the elastic component 420 includes a spring and a fixing portion, one end of which is fixed to the fixed base plate 410, the other end of which is connected to one end of the spring, and the other end of the spring is connected to the support rod 313e, which extends into the inner ring of the spring.

[0087] In the embodiment of the present disclosure, due to the provision of the elastic component 420 and the bellows component 430, and the fact that the elastic component 420 and the bellows component 430 are always in a compressed state, when the driving end of the driving mechanism 500 is fixed or fails, the elastic component 420 and the bellows component 430 can rely on their own compression rebound force to press against between the fixed base plate 410 and the vacuum chamber 100, forming a self-locking state, thereby ensuring the reliability of the seal.

[0088] In the embodiment of the present disclosure, one end of the bellows component 430, such as the bottom, is connected to the support rod 313e, and can be integrally formed, and the other end of the bellows component 430, such as the top, is sealedly connected to the side wall of the vacuum chamber 100 to ensure the sealing of the connection between the bellows component 430 and the vacuum chamber 100.

[0089] In some examples, the sealing device further includes a guide frame 600, which is disposed on at least one side of the horizontal moving mechanism 300, with one end of the guide frame 600 disposed on the bottom wall of the vacuum chamber 100 and the other end of the guide frame 600 extending toward the lifting end of the vertical moving mechanism 400; the guide frame 600 is provided with a first guide hole 610, which is disposed in the vertical direction;

[0090] The fulcrum assembly 320 includes a first rotating wheel 321 . The first rotating wheel 321 is disposed in the first guide hole 610 , and the first rotating wheel 321 is rotatably connected to the horizontal moving mechanism 300 via a second rotating shaft.

[0091] Exemplarily, two second connecting plates 313b are provided, and the two second connecting plates 313b are symmetrically arranged on both sides of the first connecting plate 313a, two third connecting plates 313c are provided, one of the third connecting plates 313c is provided on one side of one of the second connecting plates 313b, and the other third connecting plate 313c is provided on the side of the other second connecting plate 313b, and the first rotating wheel 321 is provided on the side of the third connecting plate 313c facing away from the second connecting plate 313b.

[0092] In the embodiment of the present disclosure, the guide frame 600 is provided with a first guide hole 610, and the fulcrum assembly 320 includes a first rotating wheel 321. Through the provision of the first rotating wheel 321, on the one hand, it can serve as a fulcrum so that the self-locking structure is hinged to the fulcrum; on the other hand, the first rotating wheel 321 can move in the first guide hole 610, so that the driving mechanism 500 drives the horizontal moving mechanism 300 to move more smoothly in the vertical direction, thereby improving the stability of the sealing device.

[0093] Exemplarily, the guide frame 600 is further provided with a second guide hole 620, which is provided below the first guide hole 610 and arranged in a vertical direction. The length of the second guide hole 620 is greater than the length of the first guide hole 610;

[0094] The end wall of the vertical moving mechanism 400 is provided with a second rotating wheel 411 . The second rotating wheel 411 is disposed in the second guide hole 620 and is rotatably connected to the end wall of the lifting end of the vertical moving mechanism 400 via a third rotating shaft 411 a .

[0095] Exemplarily, the second rotating wheel 411 is disposed on an end wall of the fixed base plate 410 .

[0096] Illustratively, in the embodiment of the present disclosure, when the driving end of the driving mechanism 500 drives the fixed base plate 410 to move toward the vacuum chamber 100, after the first rotating wheel 321 abuts against one end of the first guide hole 610, the second rotating wheel 411 can continue to move along the second guide hole 620 to overcome the elastic force of the elastic component 420.

[0097] [Corrected 19.09.2024 in accordance with Rule 91] It should be noted that, in this example, the wall of the first guide hole 610 can serve as a stopper. For example, during the first stroke, the fixed base plate 410 drives the movable frame 313 and the first rotating wheel 321 to move vertically. The first rotating wheel 321 moves along the first guide hole 610. When the first rotating wheel 321 abuts one end of the first guide hole 610, the movable frame 313 and the first rotating wheel 321 are unable to continue to move upward in the vertical direction. The first stroke ends, and the sealing plate 200 moves from the first vertical position to the second position.

[0098] [Corrected 19.09.2024 according to Rule 91] In this way, in the second stroke, when the fixed base plate 410 drives the fixed seat 312 to move upward, the movable frame 313 cannot continue to move upward, but swings in the horizontal direction under the drive of the cam 311, so that the sealing plate 200 moves from the third position in the horizontal direction to the fourth position, thereby sealing the opening 110.

[0099] The embodiment of the present disclosure provides a second guide hole 620 and a second guide wheel on the end wall of the fixed base plate 410, so that the driving end of the driving mechanism 500 moves in the second guide hole 620 through the second guide wheel while driving the fixed base plate 410 to move in the vertical direction through the vertical moving mechanism 400, thereby making the lifting end of the vertical moving mechanism 400 move more smoothly and improving the stability of the sealing device.

[0100] In some other examples, the sealing device further includes a shock-absorbing pad 700 , which is configured as a polyurethane member;

[0101] The shock absorbing pad 700 includes a first shock absorbing pad 710 and a second shock absorbing pad 720 . The first shock absorbing pad 710 is disposed at both ends of the first guide hole 610 , and the second shock absorbing pad 720 is disposed at both ends of the second guide hole 620 .

[0102] For example, the shock-absorbing pad 700 may also be made of materials such as silicone or rubber.

[0103] In the embodiment of the present disclosure, shock-absorbing pads 700 are provided at both ends of the first guide hole 610. When the first guide wheel moves to both ends of the first guide hole 610, the first guide wheel can be shock-absorbing and buffered. Shock-absorbing pads 700 are provided at both ends of the second guide hole 620. When the second guide wheel moves to both ends of the second guide hole 620, the second guide wheel can be shock-absorbing and buffered.

[0104] In a second aspect, an embodiment of the present disclosure further provides a vacuum device, comprising a sealing device according to any technical solution of the first aspect, wherein the vacuum device further comprises a vacuum chamber 100, wherein the vacuum chamber 100 is formed with a vacuum cavity and an opening 110 communicating with the vacuum cavity;

[0105] The sealing device is configured to seal the opening 110 .

[0106] In specific implementation, the operating principle of the sealing device is as follows:

[0107] During the process of the sealing plate 200 covering the opening 110, the driving end of the driving mechanism 500 drives the fixed base plate 410 to move in the vertical direction toward the vacuum chamber 100. Under the action of the lifting end, the elastic component 420, the bellows component 430, the fixed seat 312, the movable frame 313 and the sealing plate 200 all move in the vertical direction toward the vacuum chamber 100. At this time, the cam 311 is located between the notch of the groove 312a and the transition position. During the process of the fixed seat 312 moving toward the vacuum chamber 100 (i.e., the first stroke), the moving speeds of the cam 311 and the groove 312a are the same, i.e., the cam 311 and the groove 312a are relatively stationary. At this time, the sealing plate 200 only has an upward moving trajectory (i.e., the sealing plate 200 moves toward the vacuum chamber 100).

[0108] When the first rotating wheel 321 abuts against one end of the first guide hole 610 facing the vacuum chamber 100 , the sealing plate 200 is driven by the movable frame 313 to move vertically from the first state to the second state.

[0109] The driving end of the driving mechanism 500 continues to drive the fixed base plate 410 to move in the vertical direction toward the vacuum chamber 100. Since the first rotating wheel 321 abuts against the end of the first guide hole 610 facing the vacuum chamber 100 when the sealing plate 200 is in the second state, the vertical positions of the bellows component 430, the sealing plate 200 and the movable frame 313 remain unchanged during the process of the fixed base plate 410 moving in the vertical direction toward the vacuum chamber 100 (i.e., the second stroke), the vertical positions of the bellows component 430, the sealing plate 200 and the movable frame 313 remain unchanged, and the vertical position of the cam 311 remains stationary. At the same time, the fixing seat 312 moves in the vertical direction toward the vacuum chamber 100, thereby causing the cam 311 to move along the groove 311. 2a, that is, the cam 311 moves from the notch of the groove 312a and the transition position toward the bottom wall of the groove 312a until the cam 311 abuts against the bottom wall of the groove 312a. Since the transition position of the groove 312a to the bottom wall of the groove 312a is inclined, the cam 311 drives the sealing plate 200 to rotate around the first rotating wheel 321 through the supporting assembly 310. When the second rotating wheel 411 moves to the second guide hole 620 toward one end of the vacuum chamber 100, the cam 311 moves to the bottom wall of the groove 312a, thereby realizing the horizontal movement of the sealing plate 200 and abutting and sealing against the opening 110, that is, the sealing plate 200 moves from the second state to the third state.

[0110] In the process of the opening 110 moving from a sealed state to a fully opened state, the driving end of the driving mechanism 500 drives the fixed base plate 410 to move away from the vacuum chamber 100 in the vertical direction. Under the combined action of the driving end of the driving mechanism 500 and the elastic force of the elastic component 420, the fixed base plate 410 drives the fixed seat 312 to move downward relative to the cam 311, that is, the cam 311 moves from the bottom wall of the groove 312a to the notch of the groove 312a in the groove 312a of the fixed seat 312 until it moves to between the transition position and the notch of the groove 312a. In the process of the movement of the cam 311, due to the inclined setting of the transition position from the bottom wall of the groove 312a to the groove 312a, the cam 311 drives the sealing plate 200 to rotate around the first rotating wheel 321 through the movable frame 313, thereby realizing the sealing plate 200 moving horizontally away from the opening 110, that is, the sealing plate 200 moves from the third state to the second state.

[0111] The driving end of the driving mechanism 500 continues to drive the fixed base plate 410 to move away from the vacuum chamber 100 in the vertical direction. Under the action of the lifting end, the bellows component 430, the sealing plate 200, the elastic component 420, the movable frame 313 and the fixed seat 312 are driven to move in the vertical direction through the fixed base plate 410 until the first rotating wheel 321 abuts against the end of the first guide hole 610 close to the second guide hole 620, and the second rotating wheel 411 abuts against the end of the second guide hole 620 away from the first guide hole 610. During the downward movement of the fixed base plate 410, the movement speeds of the cam 311 and the groove 312a are consistent, that is, the cam 311 and the groove 312a are relatively stationary, and the sealing plate 200 moves from the second state to the first state.

[0112] In the second aspect, the embodiment of the present disclosure further provides a vacuum device, which adopts the sealing device of any technical solution in the above-mentioned first aspect, and thus has all the beneficial effects of the sealing device of any technical solution in the first aspect, which will not be repeated here.

[0113] It is easy to understand that those skilled in the art can combine, split, reorganize, etc. the embodiments of the present disclosure based on the several embodiments provided in the present disclosure to obtain other embodiments, and these embodiments do not exceed the protection scope of the present disclosure.

[0114] The above specific implementation methods further explain in detail the purpose, technical solutions and beneficial effects of the embodiments of the present disclosure. It should be understood that the above are only specific implementation methods of the embodiments of the present disclosure and are not configured to limit the protection scope of the embodiments of the present disclosure. Any modifications, equivalent replacements, improvements, etc. made on the basis of the technical solutions of the embodiments of the present disclosure should be included in the protection scope of the embodiments of the present disclosure.

Claims

1. A sealing device configured to seal a vacuum chamber (100), wherein the vacuum chamber (100) is formed with a vacuum cavity and an opening (110) communicating with the vacuum cavity; The sealing device comprises: a sealing plate (200), the sealing plate (200) being configured to seal the opening (110); a horizontal moving mechanism (300), wherein a movable end of the horizontal moving mechanism (300) is connected to the sealing plate (200), and a fixed end of the horizontal moving mechanism (300) extends away from the vacuum chamber (100); a vertical moving mechanism (400), wherein a lifting end of the vertical moving mechanism (400) is connected to a fixed end of the horizontal moving mechanism (300), and a connecting end of the vertical moving mechanism (400) extends toward the opening (110) and is connected to the horizontal moving mechanism (300); a driving mechanism (500), wherein a driving end of the driving mechanism (500) is connected to a lifting end of the vertical moving mechanism (400), and the driving end is configured to drive the vertical moving mechanism (400) to move in a direction away from or close to the opening (110) in a vertical direction, so that the movable end of the horizontal moving mechanism (300) has a first position and a second position in the vertical direction, and has a third position and a fourth position in the horizontal direction; When the movable end of the horizontal moving mechanism (300) is located at the first position in the vertical direction and at the third position in the horizontal direction, the sealing plate (200) has a first state in which it is away from the opening (110) in the vertical direction and in the horizontal direction; when the movable end of the horizontal moving mechanism (300) is located at the second position in the vertical direction and at the third position in the horizontal direction, the sealing plate (200) has a second state in which it is away from the opening (110) in the horizontal direction and approaches the opening (110) in the vertical direction; when the movable end of the horizontal moving mechanism (300) is located at the second position in the vertical direction and at the fourth position in the horizontal direction, the sealing plate (200) has a third state in which it is abutted and sealed against the opening (110).

2. A sealing device according to claim 1, wherein: The horizontal movement mechanism (300) includes a support assembly (310) and a fulcrum assembly (320); One end of the support assembly (310) is connected to the lifting end of the vertical moving mechanism (400), the other end of the support assembly (310) is connected to the sealing plate (200), and the fulcrum assembly (320) is hinged to one side of the support assembly (310) and forms a lever structure with the support assembly (310); The driving end of the driving mechanism (500) is configured to drive the vertical moving mechanism (400) to move in a vertical direction away from or toward the opening (110), so as to pry one end of the support assembly (310) to move in a vertical direction, and to cause the other end of the support assembly (310) to rotate around the fulcrum assembly (320) between a third position and a fourth position.

3. A sealing device according to claim 2, wherein: The support assembly (310) includes a cam assembly and a movable frame (313); The cam assembly is arranged at the lifting end of the vertical moving mechanism (400), the cam assembly is rotatably connected to one end of the movable frame (313), the other end of the movable frame (313) is connected to the sealing plate (200), and the movable frame (313) is hinged to the fulcrum assembly (320) to form the lever structure.

4. A sealing device according to claim 3, wherein: The cam assembly includes a fixing seat (312) and a cam (311); The fixing seat (312) is arranged at the lifting end of the vertical moving mechanism (400), and the fixing seat (312) is provided with a groove (312a) adapted to the cam (311); The cam (311) is arranged in the groove (312a), and one side of the cam (311) is rotatably arranged on one side of the movable frame (313) through one end of the first rotating shaft (311a).

5. A sealing device according to claim 4, wherein: The groove (312a) is inclined from the bottom wall of the groove (312a) to the notch of the groove (312a), wherein the notch of the groove (312a) is arranged in a horizontal direction toward the opening (110).

6. A sealing device according to claim 4, wherein: A transition position is provided between the notch of the groove (312a) and the bottom wall of the groove (312a); the notch of the groove (312a) to the transition position is provided in a vertical direction; the transition position to the bottom wall of the groove (312a) is provided at an angle; and the bottom wall of the groove (312a) is provided in a horizontal direction away from the opening (110).

7. A sealing device according to claim 3, wherein: The movable frame (313) comprises a first connecting plate (313a), a second connecting plate (313b), a third connecting plate (313c) and a supporting rod (313e); The second connecting plate (313b) is a side connecting plate interconnected with the first connecting plate (313a); the first connecting plate (313a) is provided with a movable through hole (313d); the driving end of the driving mechanism (500) passes through the movable through hole (313d) and is fixed to the lifting end of the vertical moving mechanism (400); the driving end of the driving mechanism (500) is movably arranged in the movable through hole (313d); The third connecting plate (313c) is arranged at one end of the second connecting plate (313b) facing away from the first connecting plate (313a), and the third connecting plate (313c) extends in a direction facing away from the first connecting plate (313a), and the fulcrum assembly (320) is hinged to one end of the third connecting plate (313c) facing away from the first connecting plate (313a); One end of the support rod (313e) is fixed to the third connecting plate (313c), and the other end of the support rod (313e) is connected to the sealing plate (200).

8. A sealing device according to claim 7, wherein: The vertical movement mechanism (400) includes a fixed base plate (410), an elastic component (420) and a bellows component (430); The driving end of the driving mechanism (500) is connected to the fixed base plate (410); One end of the bellows component (430) is fixed and sealed to the bottom wall of the vacuum chamber (100), and the other end of the bellows component (430) is against the third connecting plate (313c); the support rod (313e) passes through the bellows component (430) and the third connecting plate (313c) in sequence and is connected to the elastic component (420), and the end of the support rod (313e) facing away from the sealing plate (200) is integrally arranged with the bellows component (430), and the other end of the elastic component (420) is fixed to the fixed bottom plate (410).

9. A sealing device according to any one of claims 2 to 8, wherein: The sealing device further comprises a guide frame (600), wherein the guide frame (600) is arranged on at least one side of the horizontal moving mechanism (300), one end of the guide frame (600) is arranged on the bottom wall of the vacuum chamber (100), and the other end of the guide frame (600) extends toward the lifting end of the vertical moving mechanism (400); the guide frame (600) is provided with a first guide hole (610), and the first guide hole (610) is arranged along the vertical direction; The fulcrum assembly (320) includes a first rotating wheel (321), the first rotating wheel (321) is arranged in the first guide hole (610), and the first rotating wheel (321) is rotatably connected to the support assembly (310) via a second rotating shaft (321a).

10. A sealing device according to claim 9, wherein: The guide frame (600) is further provided with a second guide hole (620), the second guide hole (620) is provided below the first guide hole (610), and the second guide hole (620) is provided in a vertical direction, and the length of the second guide hole (620) is greater than the length of the first guide hole (610); The end wall of the vertical moving mechanism (400) is provided with a second rotating wheel (411), the second rotating wheel (411) is arranged in the second guide hole (620), and the second rotating wheel (411) is rotatably connected to the end wall of the lifting end of the vertical moving mechanism (400) via a third rotating shaft (411a).

11. A sealing device according to claim 10, wherein: The sealing device further comprises a shock-absorbing pad (700), wherein the shock-absorbing pad (700) is configured as a polyurethane member; The shock-absorbing pad (700) comprises a first shock-absorbing pad (710) and a second shock-absorbing pad (720), wherein the first shock-absorbing pad (710) is arranged at both ends of the first guide hole (610), and the second shock-absorbing pad (720) is arranged at both ends of the second guide hole (620).

12. A vacuum device comprising a sealing device according to any one of claims 1 to 11, the vacuum device further comprising a vacuum chamber (100), the vacuum chamber (100) being formed with a vacuum cavity and an opening (110) communicating with the vacuum cavity; The sealing device is configured to seal the opening (110).

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