Sheet contactor

Abstract

Provided is a sheet contactor capable of ensuring electrical contact between an electrode of a device to be measured and a contact chip disposed on a flexible substrate. This sheet contactor comprises a flexible substrate, a plurality of contact chips that are disposed on one surface side of the flexible substrate, a block that is disposed on the other surface side of the flexible substrate, and an elastic body that is interposed between the flexible substrate and the block. The block has a recess and / or a protrusion on a surface thereof which faces the elastic body.

Description

Sheet Contactor

[0001] The present invention relates to a seat contactor.

[0002] Generally, a sheet contactor has a structure in which a flexible substrate (e.g., FPC: Flexible Printed Circuit) on which contact tips are formed is attached to a block. Although the flexible substrate itself has some elasticity, it is only slight, so compared to probes with a large stroke such as pogo pins, it tends to be difficult to accommodate variations in the height of the pads of the device under test or the height variations between contact tips.

[0003] For this reason, Patent Document 1 below proposes interposing an elastic body between the flexible substrate and the block.

[0004] 8 to 10 show a sheet contactor 5 of a conventional structure in which an elastic body 30 is interposed between a block 10 and a flexible substrate 20, and contact tips 21 are formed on the main surface of the flexible substrate 20 at positions facing the electrodes (pads, bumps, etc.) of a device under test 50. In this sheet contactor 5, a plurality of contact tips 21 are formed on the main surface of the flexible substrate 20 in a number corresponding to the number of electrodes of the device under test 50. In the sheet contactor 5 of the conventional structure, it is assumed that when a load K is applied from behind the device under test 50 to press the device under test 50 against the contact tips 21 of the flexible substrate 20, the elasticity of the elastic body 30 will absorb variations in the height of the contact tips 21.

[0005] However, in reality, when the outermost of the multiple contact tips 21, more specifically the contact tip 21 located on the peripheral edge side of the elastic body 30, is pressed by the device under test 50, the flexibility of the flexible substrate 20 causes the central portion of the flexible substrate 20 to deform into a downward convex shape as shown in Fig. 10. This causes unstable contact between the central contact tip 21 and the pad of the device under test 50.

[0006] Patent No. 3559725

[0007] An example of an object of the present invention is to provide a sheet contactor that can ensure electrical contact between the electrodes of a device under test and contact tips disposed on a flexible substrate. Other objects of the present invention will become apparent from the description of this specification.

[0008] One aspect of the present invention is a sheet contactor comprising: a flexible substrate; a plurality of contact chips arranged on one side of the flexible substrate; a block arranged on the other side of the flexible substrate; and an elastic body interposed between the flexible substrate and the block, wherein the block has a recess and / or a protrusion on the surface facing the elastic body.

[0009] According to the above aspects of the present invention, it is possible to ensure electrical contact between the electrodes of the device under test and the contact tips arranged on the flexible substrate.

[0010] Any combination of the above components and conversion of the present invention between methods, systems, etc. are also valid aspects of the present invention.

[0011] FIG. 1 is a front cross-sectional view of a seat contactor 1 according to a first embodiment of the present invention. FIG. 2 is a plan view of the seat contactor 1. FIG. 3 is a front cross-sectional view showing the positional relationship between a device under test and the seat contactor 1 during measurement. FIG. 4 is a front cross-sectional view of a seat contactor 2 according to a second embodiment of the present invention. FIG. 5 is a plan view of the seat contactor 2. FIG. 6 is a front cross-sectional view of a seat contactor 3 according to a third embodiment of the present invention. FIG. 7 is a plan view of the seat contactor 3. FIG. 8 is a front cross-sectional view showing a state before a device under test is brought into contact with a conventional seat contactor 5. FIG. 9 is a plan view of a conventional seat contactor 5. FIG. 10 is a front cross-sectional view showing a state when a load is applied to the device under test and the device under test is brought into contact with the conventional seat contactor 5.

[0012] 1 to 3, a sheet contactor 1 according to a first embodiment of the present invention will be described. For convenience of explanation, the up and down directions are defined in Fig. 1. As shown in these figures, the sheet contactor 1 has an inelastic and rigid block 10, a flexible substrate 20 having a plurality of contact chips 21 arranged on its main surface, and an elastic body 30 arranged in a recess 11 formed in the block 10.

[0013] The block 10 is, for example, a molded body of hard insulating resin, and the peripheral portion 12 of the recess 11 is a flat surface that serves as a reference plane F. A protrusion 13 that is lower in height than the peripheral portion 12 is formed on the bottom surface of the recess 11. As shown in Figure 2, the protrusion 13 is located in the center of the bottom surface of the recess 11, and is arranged in an area facing the central group of the multiple contact tips 21 or an area that does not face the peripheral group.

[0014] The flexible substrate 20 is made of a flexible sheet of polyimide or the like with a thickness of about 50 μm, on which a conductor pattern is formed to connect to the contact tip 21. The contact tip 21 is integrally formed on the main surface of the flexible substrate 20 at a position facing the electrode (pad, bump, etc.) of the device under test 50 shown in Fig. 3. The contact tip 21 is a conductor that has been given wear resistance.

[0015] The elastic body 30 is an elastic resin such as silicone, and may also be an adhesive or the like that maintains the required elasticity even after solidification. The elastic body 30 is filled and placed in the recess 11 so as to be flush with the peripheral portion 12, which serves as the reference plane F of the block 10. In other words, the reference plane F and the top surface of the elastic body 30 are flush with each other. Because the protrusion 13 is located in the center of the bottom surface of the recess 11, the thickness of the top surface 13a of the flat protrusion 13 of the elastic body 30 is thinner than the thickness of the other areas.

[0016] The block 10 and the elastic body 30 are disposed on the opposite side of the main surface of the flexible substrate 20 and are adhered to the flexible substrate 20. If the elastic body 30 is an adhesive, the elastic body 30 can be used to adhere to the flexible substrate 20.

[0017] 3 , when a device under test 50 is placed on the sheet contactor 1 and a load K for measurement is then applied, when the outermost of the multiple contact tips 21, more specifically, the contact tip 21 located on the peripheral edge of the elastic body 30, is pressed by the device under test 50, a force is generated in a downward direction of the center of the flexible substrate 20 due to the flexibility of the flexible substrate 20. However, due to the formation of the convex portion 13, the thickness of the elastic body 30 above the convex portion 13 is thinner than the thickness on the peripheral portion of the convex portion 13. As a result, the upward reaction force on the convex portion 13 of the elastic body 30 is greater than the upward reaction force on the peripheral portion of the convex portion 13. As a result, deformation of the flexible substrate 20 is prevented, and the contact tip 21 at the center can be stably and reliably contacted with the electrodes of the device under test 50 while accommodating variations in the height dimension of the contact tips 21.

[0018] According to this embodiment, the following effects can be achieved.

[0019] (1) The sheet contactor 1 has an elastic body 30 interposed between the block 10 and the surface of the flexible substrate 20 opposite the main surface on which the contact tips 21 are arranged. The block 10 has a convex portion 13 formed at the center of the bottom surface of a recess 11 in which the elastic body 30 is arranged. The elastic body 30 is structured so that the thickness of the region facing the central group of multiple contact tips 21 or the region not facing the peripheral group is thinner than the thickness of the other regions. In other words, when the elastic body 30 is compressed during measurement, the reaction force is set to be greater in the central portion of the contact tips 21 than in the peripheral portion. As a result, when a load is applied during measurement of the device under test 50, downward deformation of the central portion of the flexible substrate 20 is suppressed, absorbing variations in the height of the contact tips 21 and ensuring stable and reliable contact between the contact tips 21 in all regions and the electrodes of the device under test 50.

[0020] (2) By forming the recesses 11 in the block 10 in advance, it is convenient to fill the recesses 11 with molten resin and solidify it to form the elastic body 30. In particular, by using an adhesive that functions as the elastic body 30 when solidified, the block 10 and the flexible substrate 20 can be bonded together at the same time.

[0021] 4 and 5 show a sheet contactor 2 according to a second embodiment of the present invention. In the sheet contactor 2, a plurality of ridges 15 are formed on the bottom surface of a recess 11 formed in a non-elastic, rigid block 10. The ridges 15 are convex portions that are the same height as the peripheral portion 12 or that do not protrude beyond the peripheral portion 12. As shown in FIG. 5, in a plan view, each ridge 15 is positioned midway between adjacent contact tips 21. An elastic body 30 is filled and positioned in the recess 11 so as to be flush with the peripheral portion 12, which is the reference plane F of the block 10. The elastic body 30 has through holes 35 into which the ridges 15 are inserted. The remaining configuration, including the flexible substrate 20, is the same as that of the first embodiment.

[0022] In the case of the second embodiment, through holes 35 corresponding to the midpoints between adjacent contact tips 21 are formed in the elastic body 30, which increases the independence of the operation of each contact tip 21 and reduces the effect of deformation of the flexible substrate 20 caused by contact tips 21 on the periphery. As a result, it is possible to absorb variations in the height of the contact tips 21 and ensure stable and reliable contact between the contact tips 21 in all regions and the electrodes of the device under test. Furthermore, by making the height of the tip surface of each protrusion 15 flush with the periphery 12 of the block 10, it is possible to improve the surface precision of the sheet contactor 2.

[0023] 6 and 7 show a sheet contactor 3 according to a third embodiment of the present invention. In the sheet contactor 3, recesses 17 are arranged in a non-elastic, rigid block 10 at positions corresponding to the individual contact chips 21 on a flexible substrate 20. As shown in Fig. 7, the recesses 17 are, for example, cylindrical, and their openings have an area that includes the area directly facing the bottom surface of the contact chip 21 and its surrounding area. An elastic body 30 is filled and arranged in each recess 17. The top surface of the elastic body 30 is flush with the peripheral portion 12, which serves as the reference plane F of the block 10. The remaining configuration, including the flexible substrate 20, is the same as that of the first embodiment described above.

[0024] In the case of this embodiment 3, recesses 17 into which elastic bodies 30 are respectively placed are arranged at positions corresponding to the individual contact tips 21, thereby increasing the independence of the operation of each contact tip 21 and reducing the influence of deformation of the flexible substrate 20 by the contact tips 21 on the periphery. As a result, it is possible to absorb variations in the height of the contact tips 21 while ensuring stable and reliable contact between the contact tips 21 in all regions and the electrodes of the device under test. Furthermore, the area of ​​the periphery 12, which serves as the reference surface F of the block 10, can be made sufficiently wide, making it possible to improve the surface precision of the sheet contactor 3.

[0025] Although the embodiments of the present invention have been described above with reference to the drawings, these are merely examples of the present invention, and various other configurations can also be adopted.

[0026] In the above-described first and second embodiments, a recess is formed in the block and an elastic body is disposed in the recess, but the recess may be omitted and the elastic body may be disposed on the uneven upper surface of the block and interposed between the upper surface of the block and the lower surface of the flexible substrate (the surface opposite the contact chip arrangement surface). For example, a structure in which the peripheral portion 12 surrounding the recess 11 of the block 10 in the first and second embodiments is removed is possible.

[0027] According to the present specification, there is provided a sheet contactor having the following aspects.

[0028] (Aspect 1) A sheet contactor comprising: a flexible substrate; a plurality of contact chips arranged on one side of the flexible substrate; a block arranged on the other side of the flexible substrate; and an elastic body interposed between the other side of the flexible substrate and the block, wherein the block has a recess and / or a protrusion on the surface facing the elastic body.

[0029] According to the above-mentioned aspect 1, the block has a concave or convex portion, or a concave and convex portion, on the surface facing the elastic body, so that the reaction force caused by compression of the elastic body during measurement can be appropriately adjusted, and stable and reliable contact can be made between each contact tip and the electrode of the device to be measured.

[0030] (Aspect 2) A sheet contactor, wherein the protrusion is disposed in a region facing a central group of the plurality of contact tips or in a region not facing a peripheral group.

[0031] According to the above-mentioned second aspect, the thickness of the region of the elastic body facing the central group of multiple contact tips or the region not facing the peripheral group of contact tips is thinner than the thickness of the other regions. In other words, when the elastic body is compressed during measurement, the reaction force is greater in the central region than in the peripheral region. As a result, when a load is applied during measurement of the device under test, downward deformation of the central region of the flexible substrate is suppressed, and it is possible to absorb variations in the height of the contact tips and ensure stable and reliable contact between the contact tips in all regions and the electrodes of the device under test.

[0032] (Aspect 3) A sheet contactor, wherein the block has the recess in which the elastic body is disposed, and the protrusion is located on the bottom surface of the recess and is disposed in an area facing a central group of the plurality of contact tips or an area not facing a peripheral group.

[0033] According to the above-mentioned aspect 3, the same effect as that of the above-mentioned aspect 2 can be obtained, and further, by forming a recess in the block in advance, it is convenient to fill the recess with molten resin and solidify it to form an elastic body. In particular, by using an adhesive that functions as an elastic body when solidified, it is possible to simultaneously bond the block and the flexible substrate.

[0034] (Aspect 4) A sheet contactor, wherein the thickness of the elastic body is thinner in a region facing the central group or in a region not facing the peripheral group than in other regions.

[0035] According to the above-mentioned Aspect 4, when the elastic body is compressed during measurement, the reaction force is greater in the central portion than in the peripheral portion. As a result, when a load is applied during measurement of the device under test, downward deformation of the central portion of the flexible substrate is suppressed, and it is possible to absorb variations in the height of the contact tips and ensure stable and reliable contact between the contact tips in all regions and the electrodes of the device under test.

[0036] (Aspect 5) A sheet contactor, wherein the protrusions are disposed at intermediate positions between the adjacent contact tips, and the elastic body has through holes into which the protrusions are inserted.

[0037] According to the fifth aspect described above, through holes corresponding to the midpoints between adjacent contact tips are formed in the elastic body, which increases the independence of the operation of each contact tip and reduces the impact of peripheral contact tips on the flexible substrate. As a result, it is possible to absorb variations in the height of the contact tips and ensure stable and reliable contact between the contact tips in all regions and the electrodes of the device under test. Furthermore, by making the height of each protrusion flush with the periphery of the block, it is possible to improve the surface precision of the sheet contactor.

[0038] (Aspect 6) A sheet contactor, wherein the block has the recess in which the elastic body is disposed, the protrusion is located on the bottom surface of the recess and is disposed at an intermediate position between adjacent contact tips, and the elastic body has a through hole into which the protrusion fits.

[0039] According to the above-mentioned aspect 6, the same effect as that of the above-mentioned aspect 5 can be obtained, and further, by forming a recess in the block in advance, it is convenient to fill the recess with molten resin and solidify it to form an elastic body. In particular, by using an adhesive that functions as an elastic body when solidified, it is possible to simultaneously bond the block and the flexible substrate.

[0040] (Aspect 7) A sheet contactor, wherein the recesses are disposed at positions corresponding to the individual contact tips, and the elastic bodies are disposed in the recesses.

[0041] According to the seventh aspect described above, recesses for receiving elastic bodies are arranged at positions corresponding to the individual contact tips, thereby increasing the independence of the operation of each contact tip and reducing the influence of peripheral contact tips on deformation of the flexible substrate. As a result, it is possible to absorb variations in the height of the contact tips while ensuring stable and reliable contact between the contact tips in all regions and the electrodes of the device under test. Furthermore, the peripheral area that serves as the reference surface F of the block is sufficiently wide, making it possible to improve the surface precision of the sheet contactor.

[0042] (Aspect 8) A sheet contactor, wherein when not performing measurement, the surface of the elastic body facing the flexible substrate is formed flush with the surface of the block facing the flexible substrate.

[0043] According to the above-mentioned aspect 8, the surface of the elastic body facing the flexible substrate is formed flush with the surface of the block facing the flexible substrate, so that the peripheral portion of the block can be used as a reference surface to improve the surface accuracy of the sheet contactor.

[0044] REFERENCE SIGNS LIST 1, 2, 3, 4, 5 Sheet contactor 10 Block 11, 17 Recess 12 Peripheral portion 13 Convex portion 15 Convex strip 20 Flexible substrate 21 Contact tip 30 Elastic body 35 Through hole 40 Device under test

Claims

1. A sheet contactor comprising: a flexible substrate; a plurality of contact chips arranged on one side of the flexible substrate; a block arranged on the other side of the flexible substrate; and an elastic body interposed between the flexible substrate and the block, wherein the block has a recess and / or a protrusion on the surface facing the elastic body.

2. The sheet contactor according to claim 1, wherein the protrusion is arranged in a region facing the central group of the plurality of contact tips or in a region not facing the peripheral group.

3. A sheet contactor as described in claim 1, wherein the block has a recess in which the elastic body is disposed, and the protrusion is located on the bottom surface of the recess and is disposed in an area facing the central group of the plurality of contact tips or an area not facing the peripheral group.

4. A sheet contactor according to claim 2 or 3, wherein the thickness of the elastic body is thinner in the region facing the central group or in the region not facing the peripheral group than in the other regions.

5. A sheet contactor according to claim 1, wherein the protrusions are disposed at intermediate positions between adjacent contact tips, and the elastic body has through holes into which the protrusions are inserted.

6. A sheet contactor according to claim 1, wherein the block has a recess in which the elastic body is disposed, the protrusion is located on the bottom surface of the recess and is disposed at an intermediate position between adjacent contact tips, and the elastic body has a through hole into which the protrusion fits.

7. The sheet contactor according to claim 1, wherein the recesses are disposed at positions corresponding to the individual contact tips, and the elastic body is disposed in the recesses.

8. A sheet contactor according to claim 3, 5, 6 or 7, wherein when not measuring, the surface of said elastic body facing said flexible substrate is formed flush with the surface of said block facing said flexible substrate.

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