Stator module and substrate transport apparatus comprising same

Abstract

The present invention relates to a stator module and a substrate transport apparatus comprising same, more specifically to a stator module using magnetic levitation in vacuum to transport substrates and a substrate transport apparatus comprising same. Provided is a stator module generating electromagnetic field in a vacuum space (S1) inside a vacuum chamber (10) for magnetic levitation, the stator module comprising: a cover part (100) one side of which is exposed to the vacuum space (S1); a base part (200) disposed on the other side of the cover part (100), the edges attached thereto; a coil plate (300) provided between the cover part (100) and base part (200); and a circuit (400), under the base part (200), electrically connected to the coil plate (300).

Description

Stator module and substrate transport device including the same

[0001] The present invention relates to a stator module and a substrate transport device including the same, and more particularly, to a stator module for transporting a substrate using magnetic levitation in a vacuum environment and a substrate transport device including the same.

[0002] In general, a substrate processing system includes a load lock module that introduces a substrate and switches the pressure between the outside and the inside of the substrate processing system, a substrate return device that returns the substrate introduced through the load lock module, and a substrate processing device that is installed adjacent to the substrate return device and processes the introduced substrate.

[0003] At this time, the substrate transport device can transfer the substrate to be processed to the substrate processing device under a vacuum pressure atmosphere, or transfer the processed substrate from the substrate processing device to the load lock module.

[0004] Meanwhile, conventional substrate transport devices use a transport robot having a multi-joint arm for transporting substrates and a rotary motor for driving the transport robot. However, in this case, there is a problem in that the transport robot's rotation and expansion operations are limited and various particles may be generated due to friction.

[0005] In addition, recently, a substrate transport device utilizing a planar motor driven by magnetic levitation has been proposed, but there is a problem in that the stator cannot be placed within a high-vacuum transport space, and if the stator is placed outside the transport space, the electromagnetic force for driving the transport unit including the permanent magnet is not sufficiently transmitted, making it impossible to implement and control magnetic levitation.

[0006] In addition, in this case, when the configuration including the PCB board and circuit inside the stator is exposed to the vacuum space, particles are generated, making it difficult to manage particles in the vacuum space. In addition, even when a separate cover is applied to prevent the configuration including the PCB board and circuit from being exposed to the vacuum space, there is a problem in that the pressure difference due to exposure to the high vacuum space causes uneven flatness, making it difficult to maintain the gap with the return unit for magnetic levitation.

[0007] In addition, there is a problem in that the rigidity of the chamber is reduced due to an installation hole formed through the chamber to install a stator for driving a return unit including a permanent magnet.

[0008] In particular, when a high vacuum is formed inside the chamber with reduced rigidity due to the formation of a plurality of installation holes for installing the stator, there is a problem in that the deformation of the chamber becomes severe and the magnetic levitation gap and flatness are deformed, thereby lowering the control precision of the return unit.

[0009] The purpose of the present invention is to provide a stator module capable of transporting a substrate using magnetic levitation in a vacuum environment and a substrate transport device including the same, in order to solve the above-described problems.

[0010] The present invention has been created to achieve the above-described object of the present invention, and the present invention discloses a stator module that generates an electromagnetic field for magnetic levitation in a vacuum chamber (10) forming a vacuum space (S1) therein, the stator module including: a cover part (100) of which one surface is exposed to the vacuum space (S1); a base part (200) disposed on the other surface of the cover part (100) and having an edge coupled to the cover part (100); a coil plate (300) provided between the cover part (100) and the base part (200); and a circuit part (400) installed under the base part (200) and electrically connected to the coil plate (300).

[0011] The above coil plate (300) and the circuit portion (400) can be prevented from being exposed to the vacuum space (S1) through the cover portion (100).

[0012] The above cover part (100) can be joined along the edge of the base part (200) through at least one of welding, bonding using an adhesive, and pressing.

[0013] The above cover part (100) may include an upper surface cover part (110) that covers the upper surface of the coil plate (300), and a side cover part (120) that extends from the upper surface cover part (110) and covers at least a portion of the side surface of the base part (200).

[0014] The above coil plate (300) can be bonded by having its lower surface adhered to the upper surface of the base portion (200).

[0015] The above base part (200) can have a refrigerant passage formed through which refrigerant supplied from the outside moves for temperature control.

[0016] The above base portion (200) may have a through hole (201) formed therein for a connection line to pass through for connection between the outside or the circuit portion (400) and the coil plate (300).

[0017] In addition, the present invention discloses a substrate transport device including a vacuum chamber (10) forming a vacuum space (S1) therein; a substrate transport unit (20) that is installed in the vacuum space (S1) to be movable by magnetic levitation to transport a substrate (1); and a stator module (30) that is installed in the vacuum chamber (10) to generate an electromagnetic field for magnetic levitation of the substrate transport unit (20).

[0018] The above coil plate (300) and the circuit portion (400) can be placed in an atmospheric pressure space (S2) outside the vacuum space (S1).

[0019] The above vacuum chamber (10) may include an installation hole (11) formed through a wall surface so that the stator module (30) can be installed.

[0020] The above vacuum chamber (10) is formed in a plurality of installation holes (11) to form a grid structure, and the above stator module (30) can be provided in a plurality of such that it is installed corresponding to each of the plurality of installation holes (11).

[0021] The above base part (200) can be installed by covering the installation hole (11) and being supported on the inside of the vacuum chamber (10).

[0022] The above circuit part (400) can be arranged to pass through the installation hole (11) and be coupled to the bottom surface of the base part (200).

[0023] It may additionally include a fastening member (40) that penetrates the vacuum chamber (10) and is coupled to the base portion (200).

[0024] A sealing member (50) provided between the base portion (200) and the inner surface of the vacuum chamber (10) may be additionally included.

[0025] A rigid reinforcement member (500) may be additionally included to reinforce the rigidity of the vacuum chamber (10) by being coupled between a plurality of installation holes (11) on the outer surface of the vacuum chamber (10).

[0026] The above-mentioned rigid reinforcement part (500) may include a base frame (520) spaced apart from the outer surface of the vacuum chamber (10) and arranged parallel to the outer surface of the vacuum chamber (10), and a plurality of reinforcement frame parts (510) having one end joined to the base frame (520) and the other end joined to the wall surface (14).

[0027] The above reinforcing frame part (510) can be joined to the intersection of the grid structure among the wall surfaces (14).

[0028] The above reinforcing frame part (510) may include a reinforcing rod (511) having an insertion groove formed therein, and a first fastening member (513) that is inserted into the insertion groove and penetrates the reinforcing rod (511) to be coupled to the wall surface (14).

[0029] The stator module according to the present invention and the substrate transport device including the same have the advantage of being able to transport a substrate by magnetic levitation using a plane motor in a high vacuum space.

[0030] In particular, the stator module according to the present invention and the substrate transport device including the same have the advantage of easy particle management by minimizing particle generation by preventing exposure of the coil plate and circuit portion to the vacuum space.

[0031] In addition, the stator module according to the present invention and the substrate transport device including the same have the advantage of preventing the coil plate and the circuit from being exposed to the vacuum space through the cover portion that covers the coil plate and the circuit portion, while preventing deformation of the cover portion even when there is a pressure difference between the vacuum space and the external atmospheric pressure space, thereby maintaining the flatness and the magnetic levitation gap between the coil plate and the circuit portion constant.

[0032] Accordingly, the stator module according to the present invention and the substrate transport device including the same have the advantage of being able to precisely control the operation of the substrate transport unit as the magnetic levitation gap between the substrate transport unit and the stator module is maintained constant.

[0033] In addition, the substrate transport device according to the present invention has an advantage in that it can prevent deformation of the vacuum chamber while implementing a high vacuum in the vacuum space inside the vacuum chamber by providing a rigid reinforcement part to reinforce the rigidity of the vacuum chamber, which has relatively low rigidity due to the formation of a plurality of installation holes for installing the stator module.

[0034] In addition, the substrate transport device according to the present invention has the advantage of preventing deformation of the vacuum chamber, maintaining a constant magnetic levitation gap and flatness between the stator module and the transport unit installed in the vacuum chamber, and improving and maintaining driving precision accordingly.

[0035] Fig. 1 is a cross-sectional view showing a substrate transport device according to the present invention.

[0036] Fig. 2 is a perspective view showing a portion of a vacuum chamber from which a stator module has been removed among the substrate transport devices according to Fig. 1.

[0037] Fig. 3 is an enlarged cross-sectional view showing the installation of a stator module among the substrate transport devices according to Fig. 1.

[0038] Figure 4 is an exploded perspective view showing a stator module according to the present invention.

[0039] Fig. 5 is an exploded perspective view showing the bottom side of the stator module according to Fig. 4.

[0040] Figure 6 is a cross-sectional view in the ZX direction showing the installation of a rigid reinforcement part in a substrate transport device according to the present invention.

[0041] Fig. 7 is a cross-sectional view in the ZY direction showing the installation of a rigid reinforcement part in the substrate return device according to Fig. 6.

[0042] Fig. 8 is an XY-directional cross-sectional view showing the installation state at the intersection of the rigid reinforcement part among the substrate return devices according to Fig. 6.

[0043] The stator module according to the present invention and the substrate transport device including the same are described in detail with reference to the attached drawings.

[0044] A substrate transport device according to the present invention, as illustrated in FIG. 1, includes a vacuum chamber (10) forming a vacuum space (S1) therein; a substrate transport unit (20) that is installed in the vacuum space (S1) so as to be movable by magnetic levitation to transport a substrate (1); and a stator module (30) that is installed in the vacuum chamber (10) and generates an electromagnetic field for magnetic levitation of the substrate transport unit (20).

[0045] In addition, the substrate transport device according to the present invention may additionally include a fastening member (40) that penetrates the vacuum chamber (10) and is coupled to the base portion (200).

[0046] In addition, the substrate transport device according to the present invention may additionally include a sealing member (50) provided between the base portion (200) and the inner surface of the vacuum chamber (10).

[0047] In addition, the substrate transport device according to the present invention may additionally include a rigid reinforcement member (500) that is coupled between a plurality of installation holes (11) on the outer surface of the vacuum chamber (10) to reinforce the rigidity of the vacuum chamber (10).

[0048] Here, the substrate (1) to be processed and returned according to the present invention may include a semiconductor substrate, a substrate used in a display device such as an LED or LCD, a solar cell substrate, a glass substrate, etc., and any type of target substrate disclosed in the past may be applied.

[0049] The above vacuum chamber (10) is configured to form a vacuum space (S1) inside, and various configurations are possible.

[0050] For example, the vacuum chamber (10) may include a lower chamber (13) with an open upper portion, as shown in FIGS. 1 and 2, and an upper chamber (12) that is coupled to the open lower chamber (13) to form a sealed vacuum space (S1) inside together with the lower chamber (13).

[0051] At this time, the vacuum chamber (10) is equipped with a stator module (30) described later, which can generate an electromagnetic field within the vacuum space (S1), thereby inducing magnetic levitation.

[0052] For example, the vacuum chamber (10) is configured to perform return of a substrate (1) within a vacuum space (S1), and the substrate (1) can be returned by moving by magnetic levitation through an electromagnetic force generated by a stator module (30) while the substrate return unit (20) supports the substrate (1).

[0053] Meanwhile, as another example, the vacuum chamber (10) is a configuration in which substrate processing is performed, and it is also obvious that a stator module (30) can be installed.

[0054] In addition, the vacuum chamber (10) may have an installation hole (11) formed through the wall surface so that a stator module (30) can be installed.

[0055] That is, the vacuum chamber (10) can have an installation hole (11) formed so that a stator module (30) is installed at a preset position to generate electromagnetic force within the vacuum space (S1) and form a movement path of the substrate transport unit (20). Of course, the installation hole (11) can be formed on a specific surface of the hexahedral vacuum chamber (10), on multiple surfaces, or on all six surfaces, as needed.

[0056] For example, the vacuum chamber (10) may have a plurality of installation holes (11) formed in the lower chamber (13) so that a stator module (30) may be installed on the bottom surface. At this time, a plurality of installation holes (11) may be formed to form a grid structure, and a plurality of stator modules (30) may be provided so as to be installed corresponding to each installation hole (11).

[0057] At this time, the above installation hole (11) and the stator module (30) can be installed in a one-to-one correspondence, and as another example, multiple stator modules (30) can be placed in one installation hole (11) in a one-to-many correspondence.

[0058] The above lower chamber (13) can have various configurations as an open upper portion, and for example, it can have a configuration that forms a square shape on a plane.

[0059] At this time, the lower chamber (13) may have a gate formed on the side for introducing and removing the substrate (1), and each gate may be provided with a door to form a sealed vacuum space (S1) when combined with the upper chamber (12).

[0060] The above upper chamber (12) may be configured to be coupled to an open lower chamber (13) to form a sealed vacuum space (S1) inside together with the lower chamber (13).

[0061] Meanwhile, the vacuum chamber (10) may have relatively low rigidity and high possibility of deformation due to the formation of a large number of installation holes (11), and in particular, deformation may occur as the internal vacuum space (S1) is induced into a high vacuum atmosphere.

[0062] To prevent this, the above rigid reinforcement member (500) is a configuration that reinforces rigidity by being coupled to the outer surface of the vacuum chamber (10), and various configurations can be applied. For example, the above rigid reinforcement member (500) can be coupled to the outer surface of the lower chamber (13) to reinforce rigidity of the lower chamber (13).

[0063] To this end, the above-mentioned rigid reinforcement member (500) is configured to reinforce the rigidity of the vacuum chamber (10) by being coupled between a plurality of installation holes (11) on the outer surface of the vacuum chamber (10), and various configurations are possible.

[0064] For example, the above-mentioned rigid reinforcement part (500) may include a base frame (520) spaced apart from the outer surface of the vacuum chamber (10) and arranged parallel to the outer surface of the vacuum chamber (10), and a plurality of reinforcement frame parts (510) having one end joined to the base frame (520) and the other end joined to the wall surface (14).

[0065] The above reinforcing frame part (510) may be configured such that one end is connected to the base frame (520) and the other end is connected to the wall surface (14), thereby preventing deformation of the wall surface (14) and reinforcing the rigidity of the vacuum chamber (10) through the fixing force provided by the base frame (520).

[0066] To this end, the reinforcing frame part (510) can be joined to the intersection of the installation holes (11) formed to form a grid structure among the wall surfaces (14), and as another example, can be joined to the edge of the installation holes (11) that are square in plan among the wall surfaces (14).

[0067] That is, the reinforcing frame parts (510) may be installed in multiple numbers corresponding to multiple intersection points of the wall surface (14), and as another example, may be installed in multiple numbers corresponding to the edge of an installation hole (11) having a square shape on the plane of the wall surface (14).

[0068] Additionally, as another example, the rigidity can be reinforced by installing multiple ones corresponding to both the intersection and the edge.

[0069] In particular, since the reinforcing frame part (510) is joined to the edge forming the edge of the installation hole (11), deformation of the wall surface (14), which is relatively weak in rigidity and prone to deformation, can be effectively prevented.

[0070] For example, the reinforcing frame part (510) may include a reinforcing rod (511) having an insertion groove formed therein, as illustrated in FIG. 6, and a first fastening member (513) that is inserted into the insertion groove and penetrates the reinforcing rod (511) to be coupled to the wall surface (14).

[0071] In addition, the reinforcing frame part (510) may include a second fastening member (512) that penetrates a flange formed on the base frame (520) side of the reinforcing rod (511) and is connected to the base frame (520).

[0072] At this time, the reinforcing rod (511) is configured such that the end on the wall surface (14) side is closed and the base frame (520) side is open, and as shown in FIG. 7, an insertion groove is formed, and a plurality of first fastening members (513) are inserted through the insertion groove, and the closed end is connected to the wall surface (14) through the first fastening members (513) penetrating through the first fastening members, thereby allowing the reinforcing rod (511) to be connected to the vacuum chamber (10).

[0073] Meanwhile, the reinforcing rod (511) can be connected to the wall surface (14) and the base frame (520) using the first fastening member (513) and the second fastening member (512) as described above, respectively, but as another example, it can be connected to the wall surface (14) and the base frame (520) through welding, and welding can be additionally performed while connected through the first fastening member (513) and the second fastening member (512).

[0074] The above base frame (520) is configured to be spaced apart from the outer surface of the vacuum chamber (10) and arranged parallel to the outer surface of the vacuum chamber (10), and various configurations are possible.

[0075] That is, the base frame (520) is configured to be fixedly connected to the reinforcing frame part (510) to provide a fixing force for reinforcing the reinforcing frame part (510), and can be arranged parallel to the outer surface of the vacuum chamber (10).

[0076] For example, the base frame (520) can be installed to have a length in the horizontal direction, spaced apart from the bottom surface of the vacuum chamber (10), corresponding to a number of installation holes (11) formed on the bottom surface of the lower chamber (13).

[0077] In addition, the base frame (520) may be formed with an outer base frame corresponding to the edge of the vacuum chamber (10), and cross base frames that intersect each other across the outer base frame may be installed.

[0078] In this case, the base frame (520) is formed corresponding to the wall surface (14) so ​​as to overlap the wall surface (14) on a plane, and a reinforcing frame part (510) can be induced to be installed vertically between the base frame (520) and the wall surface (14).

[0079] Meanwhile, the aforementioned rigid reinforcement member (500) has been described based on the configuration provided on the bottom surface of the lower chamber (13) with reference to the attached drawing, but the upper chamber (12) or the side surface of the vacuum chamber (10) may also be provided with a plurality of stator modules (30) and installation holes (11), and may be additionally provided on the upper surface and side surface of the vacuum chamber (10).

[0080] For example, the substrate return device may additionally be equipped with an upper rigid reinforcement member (600) provided in the upper chamber (12).

[0081] At this time, the description of the aforementioned stiffness reinforcement part (500) can be applied to the upper stiffness reinforcement part (600), and for example, the upper stiffness reinforcement part (600) can be provided with an upper stiffness frame part (610) corresponding to the reinforcement frame part (510) and an upper base frame (620) corresponding to the base frame (520).

[0082] That is, the upper rigid reinforcement part (600) may include, as illustrated in FIG. 1, an upper base frame (620) spaced apart from the upper side of the upper chamber (12) and arranged parallel to the upper surface of the upper chamber (12), and an upper reinforcement frame part (610) vertically connected and installed between the upper base frame (620) and the upper surface of the upper chamber (12).

[0083] Accordingly, the upper vertical reinforcement part (620) can effectively prevent deformation of the upper chamber (12) due to high vacuum induction in the vacuum space (S1) by being fastened and joined to the upper chamber (12) through a fastening means.

[0084] The above substrate return unit (20) is configured to be installed so as to be able to move by magnetic levitation in a vacuum space (S1) and to return the substrate (1), and various configurations are possible.

[0085] At this time, the substrate return unit (20) can return the substrate (1) by moving in interaction with the electromagnetic force generated through the stator module (30) including the permanent magnet.

[0086] That is, the substrate return unit (20) is configured to move in a planar motor manner, and includes a permanent magnet inside, so that it can move by magnetic levitation according to the electromagnetic force generated through the stator module (30) described later.

[0087] For example, the substrate return unit (20) may include a permanent magnet unit for magnetic levitation by electromagnetic force according to a stator module (30), and a substrate support unit that is installed in conjunction with the permanent magnet unit and supports the substrate (1).

[0088] The above permanent magnet part is configured to induce magnetic levitation and movement by interacting with the electromagnetic force generated through the stator module (30), and various configurations are possible.

[0089] In particular, the permanent magnet section can be applied as a plurality of permanent magnets arranged to move by acting on an electromagnetic field in which a stator module (30) is formed, and at this time, various shapes and structures disclosed in the past can be applied to the permanent magnets.

[0090] That is, the above permanent magnet part can be applied with a specific arrangement of a plurality of permanent magnets, and for example, various types of Halbach Arrays disclosed in the past can be applied.

[0091] The above substrate support part is configured to be installed in conjunction with a permanent magnet part and support the substrate (1), and various configurations are possible.

[0092] For example, the substrate support part is installed in conjunction with a permanent magnet part that moves through a stator module (30) and can move integrally with the movement of the permanent magnet part, and can support the substrate (1) by contacting it.

[0093] The above stator module (30) may be configured to be installed in a vacuum chamber (10) and generate electromagnetic force for magnetic levitation of the substrate transport unit (20).

[0094] That is, the above stator module (30) can be installed in the aforementioned installation hole (11) to form a movement path of the substrate transport unit (20) within the vacuum space (S1), and can be provided in multiple numbers corresponding to multiple installation holes (11).

[0095] In addition, the above stator module (30) can be configured as a single module and installed in the installation hole (11), thereby allowing some of the multiple stator modules (30) to be independently controlled as needed, and independent control of each single module, which is the minimum unit, can be possible.

[0096] Hereinafter, the stator module according to the present invention will be described in detail with reference to the attached drawings.

[0097] The stator module according to the present invention, as illustrated in FIGS. 4 and 5, includes a cover portion (100) of which one surface is exposed to the vacuum space (S1); a base portion (200) disposed on the other surface of the cover portion (100) and having an edge coupled to the cover portion (100); a coil plate (300) provided between the cover portion (100) and the base portion (200); and a circuit portion (400) installed in a lower portion of the base portion (200) and electrically connected to the coil plate (300).

[0098] Meanwhile, the stator module described below may be a configuration provided in a substrate transport device for transporting a substrate (1), and as another example, may be applied to any configuration in a substrate processing system, such as a substrate processing device in which substrate processing is performed, or a load lock module.

[0099] That is, the above stator module is not limited to a single configuration of a substrate transfer device, and can be applied to any configuration that requires generating and controlling electromagnetic force as a planar motor.

[0100] The above cover part (100) may be configured to cover the coil plate (300) with one side exposed to the vacuum space (S1).

[0101] That is, the cover part (100) may be configured to cover the vacuum space (S1) side of the coil plate (300) in order to prevent the coil plate (300) from being exposed to the vacuum space (S1).

[0102] At this time, the cover part (100) can be fixed by being combined with the base part (200) that supports the coil plate (300) while covering the upper surface and side surface of the coil plate (300).

[0103] For example, the cover part (100) can be fixed by being joined by welding along the edge of the base part (200), as shown in FIG. 3, and the coil plate (300) can be positioned between the cover part (100) and the base part (200) to prevent exposure of the coil plate (300) to the vacuum space (S1).

[0104] In addition, the cover part (100) can prevent shape deformation due to the high vacuum state of the vacuum space (S1) by welding the edge to the edge of the base part (200), and accordingly, the magnetic levitation gap and flatness with respect to the substrate return part (20) described above can be maintained at a constant level, thereby improving the control precision for driving.

[0105] The above cover part (100) may include an upper surface cover part (110) that covers the upper surface of the coil plate (300), and a side cover part (120) that extends from the upper surface cover part (110) and covers at least a portion of the side surface of the base part (200).

[0106] That is, the cover part (100) may include an upper cover part (110) having a rectangular planar shape corresponding to the coil plate (300), and a side cover part (120) that extends vertically from the upper cover part (110) to form a side surface, covers the side surface of the coil plate (300), and covers at least a portion of the side surface of the base part (200).

[0107] At this time, the cover part (100) can be joined by welding between the inner surface of the side cover part (120) and the outer surface of the base part (200), and the outer side based on the welding area can be a vacuum space (S1), and the inner side where the coil plate (300) is placed can be an atmospheric pressure space (S2) that is connected to the outside in an atmospheric pressure state through an installation hole (11).

[0108] Meanwhile, the cover part (100) can be joined to the base part (200) not only through welding as described above, but also, as another example, it is obvious that a method of joining through compression, adhesive bonding, or various joining means can be applied.

[0109] More specifically, the cover part (100) can be joined to the base part (200) using a vacuum adhesive such as Torsil, and the side cover part (120) is sealed and joined to the side of the base part (200), so that the coil plate (300) is covered and can be sealed and separated from the outside of the cover part (100) at the same time.

[0110] In addition, as another example, the cover part (100) can be joined to the base part (200) through compression such as thermal compression, and the side cover part (120) can be joined by sealing the side of the base part (200), so that the coil plate (300) is covered and can be sealed and separated from the outside of the cover part (100) at the same time.

[0111] Meanwhile, in this case, the cover part (100) may be provided with a separate sealing member (not shown) such as an O-ring between the side of the base part (200) to maintain separation between the coil plate (300) and the outer vacuum space (S1) of the cover part (100).

[0112] Meanwhile, the cover part (100) may include one of aluminum and stainless steel materials so that the electromagnetic field generated from the coil plate (300) can be transmitted to the permanent magnet part in the substrate transport part (20).

[0113] That is, the cover part (100) is located between the coil plate (300) of the stator module and the permanent magnet part in the substrate transport part (20), and may be made of a material that allows smooth electromagnetic action between the coil plate (300) and the permanent magnet part so that the magnetic levitation and driving of the substrate transport part (20) can be precisely controlled.

[0114] For example, the cover part (100) may be made of a metal material with a low permeability that allows easy passage of an electromagnetic field, and may be manufactured using, for example, aluminum or stainless steel including SUS.

[0115] In addition, the cover part (100) can be combined with the coil plate (300) to prevent shape deformation due to high vacuum formation in the vacuum space (S1), as well as to be combined with the base part (200) at the edge through welding or the like.

[0116] For example, the cover part (100) can be fixedly joined to the coil plate (300) using an adhesive or wax, and as another example, it is also obvious that it can be joined to the coil plate (300) through a separate fastening member.

[0117] The above base part (200) is placed on the side facing the cover part (100), and may have an edge that is connected to the cover part (100).

[0118] For example, the base part (200) may have a rigid structure to prevent deformation of the cover part (100) even in a high vacuum space (S1) when combined with the cover part (100).

[0119] In addition, the base portion (200) may have a planar shape corresponding to the upper cover portion (110) and the coil plate (300), and may have, for example, a square plate structure on a plane.

[0120] The above base part (200) can have a refrigerant path formed inside for the movement of refrigerant supplied from the outside, and thus, as the refrigerant circulates from the outside, the coil plate (300) and surrounding components, which are in a relatively high temperature state due to the heat generation of the coil plate (300), can be cooled.

[0121] In addition, the base part (200) may be formed with a through hole (201) for various connection lines to pass through for connection between the outside or circuit part (400) and the coil plate (300). For example, a power line for applying power to the coil plate (300), a control line for transmitting and receiving various control signals with the circuit part (400), and a piping line for supplying or removing refrigerant to the refrigerant path may be installed by passing through the through hole (201).

[0122] Meanwhile, the base part (200) can be installed by covering the installation hole (11) as shown in FIG. 3 and supported on the inside of the vacuum chamber (10), and more specifically, can have a planar shape larger than the installation hole (11) so as to be installed by supporting on the inside of the lower chamber (13) where the installation hole (11) is formed.

[0123] In this case, the base part (200) is provided with a sealing member (50) between the inner surface of the lower chamber (13), so that the side of the installation hole (11) based on the sealing member (50) is formed as an atmospheric pressure space (S2) in an atmospheric pressure state, and the side of the vacuum space (S1) based on the sealing member (50) can maintain a high vacuum state.

[0124] To this end, the base portion (200) may have an insertion groove (202) formed on the bottom surface so that a sealing member (50) such as an O-ring may be inserted and installed. As another example, it is also obvious that the insertion groove may be formed on the inside of the vacuum chamber (10).

[0125] In addition, the base part (200) can be fixed by being fastened to the vacuum chamber (10) through a fastening member (40) in order to fix the position while being supported to cover the installation hole (11) of the vacuum chamber (10), more specifically, the lower chamber (13).

[0126] For example, as shown in FIG. 3, the base part (200) can be joined by a fastening member (40) that penetrates and joins the wall surface (14) of the vacuum chamber (10) located between neighboring installation holes (11) in a state where a plurality of installation holes (11) are formed, and thus the base part (200) and the vacuum chamber (10) are joined to each other through the fastening member (40), and the base part (200) can be fixed in position.

[0127] Meanwhile, the base portion (200) may be formed of a metal material at least on the outer surface that is combined with the cover portion (100) to facilitate welding or pressing with the cover portion (100), and may include, for example, a copper material.

[0128] In addition, as another example, when the base part (200) is bonded to the cover part (100) using a vacuum adhesive, at least the outer surface bonded to the cover part (100) may be made of not only the metal described above, but also a plastic of the engineering resin series.

[0129] The above coil plate (300) is a configuration provided between the cover portion (100) and the base portion (200), and may be a configuration that is controlled through the circuit portion (400) to form an electromagnetic field and drive the substrate transport portion (20) including a permanent magnet through the resulting electromagnetic force.

[0130] That is, the coil plate (300) is a configuration that provides electromagnetic force through electromagnetic action with a permanent magnet provided in the substrate return unit (20), and, for example, a PCB-shaped plate can be applied.

[0131] At this time, the coil plate (300) may have a planar shape corresponding to the cover portion (100) and base portion (200) described above, and may be formed into a rectangular planar shape, for example.

[0132] Meanwhile, the coil plate (300) can be covered with a cover part (100) that is welded to the base part (200) as described above to prevent exposure to the vacuum space (S1).

[0133] In addition, the coil plate (300) can be positioned simply by being inserted between the cover part (100) and the base part (200) without being joined, but the lower surface can be joined to the upper surface of the base part (200) to fix the position.

[0134] At this time, the coil plate (300) can be bonded to the upper surface of the base portion (200) by bonding it with a resin-based adhesive such as epoxy, and as another example, it can be bonded to the upper surface of the base portion (200) by welding.

[0135] The above circuit part (400) may be configured to be installed electrically connected to the coil plate (300) at the bottom of the base part (200).

[0136] At this time, the circuit unit (400) may be configured to apply power to the coil plate (300) and control the power applied to the coil plate (300) according to various control signals.

[0137] Meanwhile, the circuit part (400) can be electrically connected to the coil plate (300) located on the upper surface of the base part (200) through a through hole (201) formed in the base part (200) in a state where it is installed and combined with the lower surface of the base part (200).

[0138] Meanwhile, the circuit part (400) may be arranged to be coupled to the bottom surface of the base part (200) by penetrating the installation hole (11), and may be formed to have a flat surface smaller than the flat surface of the installation hole (11) and may be positioned on the inner surface forming the installation hole (11) of the vacuum chamber (10).

[0139] At this time, the circuit part (400) can be fixedly installed by being combined with the base part (200) located on the upper surface, and for example, as shown in FIG. 3, it can be fixed to the base part (200) through a circuit fastening part (401) that penetrates the circuit part (400) from the bottom.

[0140] In addition, the circuit section (400) may have a groove formed on the upper surface to form a space in which various connecting lines for electrical connection with the coil plate (300) can be gathered.

[0141] The coil plate (300) and the circuit portion (400) described above can be prevented from being exposed to the vacuum space (S1) through the cover portion (100), and more specifically, the cover portion (100) and the base portion (200) can be divided into a vacuum space (S1) and an atmospheric pressure space (S2) based on the welding portion through the welding joint, and the vacuum space (S1) and the atmospheric pressure space (S2) can be divided based on the sealing member (50) on the bottom surface of the base portion (200) in a state where a part of the side surface of the base portion (200) is exposed to the vacuum space (S1).

[0142] Accordingly, the coil plate (300) positioned between the cover portion (100) and the base portion (200) and the circuit portion (400) coupled to the bottom surface of the base portion (200) and positioned in the installation hole (11) are both prevented from being exposed to the vacuum space (S1) and can be positioned in the atmospheric pressure space (S2).

[0143]

[0144] The above is only a description of some of the preferred embodiments that can be implemented by the present invention, and as is well known, the scope of the present invention should not be construed as being limited to the above embodiments, and the technical ideas of the present invention described above and the technical ideas that are fundamental to the present invention are all included in the scope of the present invention.

Claims

1. A stator module that generates an electromagnetic field for magnetic levitation within a vacuum chamber (10) that forms a vacuum space (S1) therein. A cover part (100) having one side exposed to the vacuum space (S1); A base part (200) which is placed on the side facing the cover part (100) and has an edge that is joined to the cover part (100); A coil plate (300) provided between the cover portion (100) and the base portion (200); A stator module characterized by including a circuit part (400) installed electrically connected to the coil plate (300) at the lower portion of the base part (200).

2. In claim 1, The above coil plate (300) and the above circuit part (400) are A stator module characterized in that exposure to the vacuum space (S1) is prevented through the cover portion (100).

3. In claim 1, The above cover part (100) is A stator module characterized in that it is joined by at least one of welding, adhesive bonding, and compression along the edge of the base portion (200).

4. In claim 1, The above cover part (100) is A stator module characterized by including an upper surface cover portion (110) covering the upper surface of the coil plate (300), and a side cover portion (120) extending from the upper surface cover portion (110) and covering at least a portion of the side surface of the base portion (200).

5. In claim 1, The above cover part (100) is A stator module characterized in that it includes one of aluminum and stainless steel materials so that the electromagnetic field generated from the coil plate (300) is transmitted toward the vacuum space (S1).

6. In claim 1, The above coil plate (300) is A stator module characterized in that the lower surface is bonded to the upper surface of the base portion (200).

7. In claim 1, The above base part (200) is A stator module characterized in that a refrigerant passage is formed through which refrigerant supplied from the outside moves for temperature control.

8. In claim 1, The above base part (200) is A stator module characterized in that a through hole (201) is formed for a connection line to pass through for connection between the external or the circuit part (400) and the coil plate (300).

9. A vacuum chamber (10) forming a vacuum space (S1) inside; A substrate transport unit (20) that is installed magnetically and movably in the above vacuum space (S1) to transport a substrate (1); A substrate transport device characterized by including a stator module (30) according to any one of claims 1 to 8, which is installed in the vacuum chamber (10) and generates an electromagnetic field for magnetic levitation of the substrate transport unit (20).

10. In claim 9, The above coil plate (300) and the above circuit part (400) are A substrate transport device characterized in that it is placed in an atmospheric pressure space (S2) outside the above vacuum space (S1).

11. In claim 9, The above vacuum chamber (10) is A substrate transport device characterized by including an installation hole (11) formed through a wall surface so that the above stator module (30) is installed.

12. In claim 11, The above vacuum chamber (10) is It includes a wall surface (14) in which a plurality of the above installation holes (11) are formed to form a grid structure, The above stator module (30) is A substrate transport device characterized in that a plurality of the above-mentioned installation holes (11) are provided so as to be installed corresponding to each other.

13. In claim 11, The above base part (200) is A substrate transport device characterized in that it is installed by covering the above installation hole (11) and being supported on the inside of the vacuum chamber (10).

14. In claim 11, The above circuit part (400) is A substrate transport device characterized in that it is arranged to be coupled to the lower surface of the base portion (200) by penetrating the above installation hole (11).

15. In claim 11, A substrate transport device characterized in that it additionally includes a fastening member (40) that penetrates the vacuum chamber (10) and is coupled to the base portion (200).

16. In claim 11, A substrate transport device characterized by further including a sealing member (50) provided between the base portion (200) and the inner surface of the vacuum chamber (10).

17. In claim 12, A substrate transport device characterized in that it further includes a rigid reinforcement member (500) that is coupled between a plurality of installation holes (11) on the outer surface of the vacuum chamber (10) to reinforce the rigidity of the vacuum chamber (10).

18. In claim 17, The above rigid reinforcement part (500) is A substrate transport device characterized by including a base frame (520) spaced apart from the outer surface of the vacuum chamber (10) and arranged parallel to the outer surface of the vacuum chamber (10), and a plurality of reinforcing frame parts (510) having one end joined to the base frame (520) and the other end joined to the wall surface (14).

19. In claim 18, The above reinforcing frame part (510) is A substrate transport device characterized in that it is coupled to the intersection of the grid structure among the above wall surfaces (14).

20. In claim 18, The above reinforcing frame part (510) is A substrate transport device characterized by including a reinforcing rod (511) having an insertion groove formed therein, and a first fastening member (513) inserted into the insertion groove and connected to the wall surface (14) by penetrating the reinforcing rod (511).

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