Light source device and rotating body

Abstract

Provided are a light source device using a rotating body that is low-cost, lightweight and has a long life, and the rotating body.　A light source device according to one embodiment of the present invention comprises a rotating body that holds a plasma raw material. The light source device irradiates the plasma raw material on the rotating body with an energy beam to generate plasma, and extracts radiation from the plasma. The rotating body comprises: a support body which is composed of a first material having corrosion resistance to the plasma raw material, and rotates around a rotation axis; and a part to be irradiated, which is composed of a second material having higher corrosion resistance to the plasma raw material than that of the first material, and which is provided on a portion of the support body so as to overlap the irradiation position of the energy beam while the support body is rotating.

Description

Light source device and rotating body

[0001] The present invention relates to a light source device that generates radiation such as extreme ultraviolet light, and a rotating body used in the light source device.

[0002] Conventionally, light source devices have been developed that excite plasma raw materials such as tin to generate plasma, which serves as a light source. Radiation such as extreme ultraviolet (EUV) can be obtained from the plasma generated in this manner. Known methods for generating plasma include the LPP (Laser Produced Plasma) method, in which the plasma raw material is excited with an energy beam such as a laser, and the DPP (Discharge Produced Plasma) method, in which the plasma raw material is excited using a discharge. Another known method is the LDP (Laser Assisted Discharge Produced Plasma) method, in which a discharge is assisted by laser irradiation.

[0003] For example, a known LPP light source device generates plasma by ejecting a liquid plasma raw material in the form of droplets and irradiating the droplets with a laser beam. In contrast, in recent years, a method has been developed in which the liquid plasma raw material is supplied onto a rotating body, and the rotating body is rotated to supply the plasma raw material to an irradiation area of ​​the energy beam (Patent Documents 1 and 2). This method does not require droplet generation, and therefore makes it possible to obtain high-intensity radiation with a relatively simple configuration.

[0004] JP 2014-216286 A JP 2021-504763 A

[0005] It is thought that the rotor that supplies the plasma raw material to the energy beam irradiation area will react with the plasma raw material, which has been heated to a high temperature by the energy beam irradiation, and be corroded. For this reason, even materials that are generally considered to be corrosion-resistant to plasma raw materials may be corroded by the energy beam irradiation, shortening the rotor's lifespan.

[0006] Furthermore, heavy element materials such as tungsten are considered to have relatively high corrosion resistance against plasma raw materials. However, because such materials have high density, the rotor is expected to become heavy. In this case, it may become difficult to replace the rotor or to control its rotation. Furthermore, the use of rare heavy element materials may increase the cost of the rotor itself.

[0007] In view of the above circumstances, an object of the present invention is to provide a light source device and a rotating body that use a rotating body that is long-life, low-cost, and lightweight.

[0008] In order to achieve the above-mentioned object, a light source device according to one embodiment of the present invention is a light source device that includes a rotating body that holds plasma raw material, irradiates the plasma raw material on the rotating body with an energy beam to generate plasma, and extracts radiation from the plasma, wherein the rotating body has a support that is made of a first material that is corrosion-resistant to the plasma raw material and rotates around a rotation axis, and an irradiated portion that is made of a second material that is more corrosion-resistant to the plasma raw material than the first material and is provided on a part of the support so as to overlap with the irradiation position of the energy beam while the support is rotating.

[0009] In this light source device, a rotor that is irradiated with an energy beam is provided with a support and an irradiated portion. The support is made of a first material that is corrosion-resistant to the plasma raw material, and the irradiated portion is made of a second material that is more corrosion-resistant than the first material. The irradiated portion is provided on a part of the support so as to overlap with the irradiation position of the energy beam while the support is rotating. In this way, by locally arranging a material that is more corrosion-resistant than other parts only in the part that is irradiated with the energy beam, it is possible to realize a rotor that is low-cost, lightweight, and has a long lifespan.

[0010] The rotating body may be a rotating plate having a rotation surface extending around the rotation axis and holding the plasma raw material on the rotation surface. In this case, the irradiated portion may form the rotation surface together with the support or independently. Furthermore, the energy beam may be irradiated toward the rotation surface formed by the irradiated portion.

[0011] The irradiated portion may be arranged in a ring shape on the rotation plane with the rotation axis as the center.

[0012] The support may be a plate-like member having a first surface that forms the rotation surface, and in this case, the irradiated portion may be an irradiated member embedded in the support from the first surface side.

[0013] The support body may have an embedding hole formed in the first surface into which the irradiated member is embedded. In this case, the irradiated member may have a cross-sectional structure in which, in a cross section taken along the rotation axis, both an inner end point and an outer end point that form a boundary between the first surface and the embedding hole are continuously connected.

[0014] The rotating body may be a rotating vessel having an inner circumferential surface surrounding a rotation axis and holding the plasma raw material on the inner circumferential surface. In this case, the irradiated portion may form the inner circumferential surface together with the support or independently. Furthermore, the energy beam may be irradiated toward the inner circumferential surface formed by the irradiated portion.

[0015] The support may have a bottom plate portion orthogonal to the rotation axis and a protruding wall protruding from an upper surface of the bottom plate portion so as to surround the rotation axis. In this case, the irradiated portion may be an irradiated member attached to the inside of the protruding wall to form the inner circumferential surface.

[0016] The first material may be any one of molybdenum, titanium, stainless steel, aluminum, TZM (an alloy of titanium, zirconium, and molybdenum), stainless steel coated with titanium nitride, aluminum coated with titanium nitride, stainless steel coated with TZM, or aluminum coated with TZM.

[0017] The second material may be any one of tungsten, WL (lanthanum-containing tungsten), rhenium, tungsten-rhenium alloy, iridium, platinum, tungsten carbide, DLC (Diamond Like Carbon), and diamond.

[0018] The irradiated portion may be formed by coating the support body with the second material.

[0019] A rotating body according to one aspect of the present invention is used in a light source device that irradiates a plasma raw material with an energy beam to generate plasma and extracts radiation from the plasma. The rotating body holds the plasma raw material and is irradiated with the energy beam, and includes a support and an irradiated portion. The support is made of a first material that is corrosion-resistant to the plasma raw material and rotates around a rotation axis. The irradiated portion is made of a second material that is more corrosion-resistant to the plasma raw material than the first material and is provided on a part of the support so as to overlap with the position of irradiation of the energy beam during rotation of the support.

[0020] As described above, according to the present invention, it is possible to realize a rotating body that is long-life, low-cost, and lightweight. Note that the effects described here are not necessarily limited to those described herein, and may be any of the effects described in this disclosure.

[0021] FIG. 1 is a schematic diagram showing an example of the configuration of a light source device equipped with a rotating body according to a first embodiment; FIG. 2 is a schematic diagram showing an example of the planar configuration of a rotating body; FIG. 3 is a schematic diagram showing an example of the cross-sectional configuration of a rotating body; FIG. 4 is a schematic diagram showing an example of the cross-sectional configuration of a rotating body; FIG. 5 is a schematic diagram showing an example of the cross-sectional configuration of a rotating body; FIG. 6 is a schematic diagram showing an example of the cross-sectional configuration of a rotating body according to a second embodiment; FIG. 7 is a schematic diagram showing an example of the planar configuration of a rotating body according to the second embodiment; FIG. 8 is a schematic diagram showing an example of the cross-sectional configuration of a rotating body according to a third embodiment; FIG. 9 is a schematic diagram showing an example of the planar configuration of a rotating body according to the third embodiment.

[0022] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0023] [Basic Configuration of Light Source Device] Figure 1 is a schematic diagram showing an example of the configuration of a light source device equipped with a rotating body according to the first embodiment. The light source device 100 is a laser-produced plasma (LPP) type light source device. That is, the light source device 100 irradiates a plasma raw material 101 with an energy beam EB, thereby exciting the plasma raw material 101 to generate plasma P, and extracts radiation R emitted from the plasma P to use as a light source. The radiation R is EUV (Extreme Ultraviolet) light, X-rays, or other electromagnetic waves.

[0024] The plasma raw material 101 is a molten metal or alloy, such as liquid-phase tin (Sn), lithium (Li), gadolinium (Gd), terbium (Tb), gallium (Ga), bismuth (Bi), indium (In), or an alloy containing at least one of these materials. When EUV light is emitted as the radiation R, for example, molten Sn or Li is used as the plasma raw material 101. When X-rays are emitted as the radiation R, for example, molten Ga, a Ga alloy, In, or a Sn compound is used as the plasma raw material 101.

[0025] FIG. 1 is a diagram showing a schematic cross section of the light source device 100 taken along the horizontal direction at a predetermined height from the installation surface, as viewed from vertically above. In FIG. 1 , cross sections not necessary for explaining the cross-sectional configuration are omitted to facilitate understanding of the configuration and operation of the light source device 100. Hereinafter, the X direction may be referred to as the front-to-back direction of the horizontal direction (the positive side of the X axis is the front side, and the negative side is the rear side), the Y direction as the left-to-right direction of the horizontal direction (the positive side of the Y axis is the left side, and the negative side is the right side), and the Z direction as the vertical direction (the positive side of the Z axis is the upper side, and the negative side is the lower side). Of course, the application of the present technology is not limited to the orientation in which the light source device 100 is used.

[0026] 1, the light source device 100 includes a vacuum chamber 10, a plasma generation mechanism 11, a debris reduction mechanism 12, a beam source 13, and a control unit 14. A utilization device 15 that utilizes radiation R is also connected to the light source device 100.

[0027] The vacuum chamber 10 is a chamber that houses the plasma generation mechanism 11 and the debris reduction mechanism 12, and is evacuated by a predetermined exhaust mechanism (not shown). The vacuum chamber 10 has an entrance hole 10a and an exit hole 10b.

[0028] In this embodiment, the incidence axis IA of the energy beam EB is set so as to pass through the incidence hole 10a. The incidence hole 10a is provided with an incidence window 16 that transmits the energy beam EB. As shown in FIG. 1 , a beam source 13 is installed outside the vacuum chamber 10 to emit the energy beam EB to the inside of the vacuum chamber 10 along the incidence axis IA. An electron beam or laser light can be used as the energy beam EB.

[0029] In this embodiment, the emission axis EA of the radiation R is set so as to pass through the emission hole 10b. As shown in Fig. 1, the utilization device 15 is connected to the vacuum chamber 10 via the emission hole 10b. The radiation R generated from the plasma P is supplied to the utilization device 15 through the emission hole 10b.

[0030] The plasma generation mechanism 11 is a mechanism for generating plasma P in the vacuum chamber 10 and emitting radiation R (X-rays or EUV light). As shown in FIG. 1 , the plasma generation mechanism 11 includes a light source cover 20, a raw material container 21, a rotating body 30, and a film thickness adjustment mechanism 22.

[0031] Light source cover 20 is a cover that covers rotor 30 and prevents scattering of plasma raw material 101. Light source cover 20 has an entrance hole 20a and an exit hole 20b. Entrance hole 20a is a hole through which energy beam EB incident along entrance axis IA passes, and exit hole 20b is a hole through which radiation R radiated centered on exit axis EA passes.

[0032] The raw material container 21 stores the plasma raw material 101 in a liquid state. A raw material supply device (not shown) that supplies and circulates the plasma raw material 101 is connected to the raw material container 21. The raw material container 21 is placed vertically below the rotor 30 so that at least a portion of the rotor 30 is immersed in the plasma raw material 101 in a liquid state.

[0033] Rotating body 30 holds plasma raw material 101 and rotates about rotation axis RA to supply plasma raw material 101 to irradiation position I of energy beam EB. Rotating body 30 is placed in vacuum chamber 10 so that irradiation position I of energy beam EB is located at the intersection of entrance axis IA and exit axis EA. Rotation axis RA is typically set parallel to the horizontal plane, but may also be set at an angle relative to the horizontal plane.

[0034] The rotating body 30 is connected to a shaft member 25 that rotates about a rotation axis RA. The shaft member 25 passes through a through-hole 20c provided in the light source cover 20 and a through-hole 10c provided in the vacuum chamber 10, and is connected to a drive motor 26 provided outside the vacuum chamber 10. The drive motor 26 rotates the shaft member 25, thereby rotating the rotating body 30. Note that a mechanical seal or the like is provided between the through-hole 10c of the vacuum chamber 10 and the shaft member 25 to prevent leakage.

[0035] As described above, the rotor 30 is immersed in the plasma raw material 101 in the raw material container 21, so when the rotor 30 rotates, the plasma raw material 101 is lifted up while adhering to the rotor 30. The plasma raw material 101 that has been adhering to the rotor 30 and transported to irradiation position I is irradiated with the energy beam EB emitted from the beam source 13. This excites the plasma raw material 101 at irradiation position I, generating high-temperature plasma P, and radiation R is emitted from the plasma P.

[0036] Thus, light source device 100 is a light source device that includes a rotor 30 that holds plasma raw material 101, irradiates plasma raw material 101 on rotor 30 with energy beam EB to generate plasma P, and extracts radiation R from plasma P. The specific configuration of rotor 30 will be described in detail later.

[0037] Film thickness adjustment mechanism 22 adjusts the film thickness of plasma raw material 101 at irradiation position I. In the example shown in Figure 1, film thickness adjustment mechanism 22 is provided as a mechanism that is arranged with a predetermined gap between them, sandwiching rotor 30, and adjusts the film thickness of plasma raw material 101 by scraping off any plasma raw material 101 that has not flowed into the gap. Film thickness adjustment mechanism 22 is also provided upstream of irradiation position I in the rotation direction of rotor 30, and determines the film thickness of plasma raw material 101 at irradiation position I.

[0038] The debris reduction mechanism 12 is a mechanism for capturing debris such as fine particles of the plasma raw material 101 emitted from the plasma P, and is disposed inside the vacuum chamber 10 opposite the emission hole 20b of the light source cover 20. The debris reduction mechanism 12 may be a rotary foil trap that rotates multiple foils to capture debris. Alternatively, a fixed foil trap may be used that captures debris using fixed foils.

[0039] The control unit 14 controls the operation of each component of the light source device 100. For example, the control unit 14 controls the operation of the beam source 13 and the drive motor 26. In Fig. 1, the control unit 14 is illustrated schematically as a functional block, but the position where the control unit 14 is configured may be designed arbitrarily. In addition, the light source device 100 may be provided with a sensor that measures the state of the radiation R, a focusing mirror that focuses the radiation R, and the like, as appropriate.

[0040] [Rotating Body] The following describes the basic configuration of the rotating body 30. As shown in FIG.

[0041] The support 31 is a structural member that supports the irradiated member 35, and is connected to the shaft member 25. Therefore, the support 31 rotates about the rotation axis RA as the shaft member 25 rotates. The support 31 can also be said to be a member that constitutes the main body of the rotating body 30.

[0042] The support 31 is made of a first material that is corrosion-resistant to the plasma raw material 101. Here, corrosion-resistance to the plasma raw material 101 means resistance to mechanical erosion and chemical corrosion caused by the plasma raw material 101 in a liquid state, which is a molten metal.

[0043] For example, the surfaces of components that come into contact with plasma raw material 101, which is molten metal in a liquid state, are subject to erosion and corrosion caused by the plasma raw material 101. The amount of this wear (amount of surface scraping) varies depending on the material of the component that comes into contact with plasma raw material 101. It is also thought that the higher the temperature of plasma raw material 101 or the longer the component is in contact with plasma raw material 101, the greater the amount of wear.

[0044] The first material constituting the support 31 is, for example, a material that, when immersed in the liquid plasma raw material 101, experiences less wear due to erosion or the like within the expected service life than a predetermined level.

[0045] The irradiated member 35 is provided on a part of the support 31 so as to overlap with the irradiation position I of the energy beam EB during rotation of the support 31. In other words, the irradiated member 35 is a member that is partially provided on the rotating body 30 so as to overlap with the irradiation position I of the energy beam EB. In this embodiment, the irradiated member 35 corresponds to the irradiated portion.

[0046] Fig. 2 is a schematic diagram showing an example of the planar configuration of the rotating body 30. Fig. 2 schematically shows the planar configuration of the main surface (a rotation surface 40 described later) of the rotating body 30 that is irradiated with the energy beam EB, as viewed from the direction of the rotation axis RA.

[0047] 2 , when the rotating body 30 rotates around the rotation axis RA, the portion irradiated with the energy beam EB traces a circular locus (hereinafter referred to as irradiation locus 5) centered on the rotation axis RA. This irradiation locus 5 becomes a portion that overlaps with the irradiation position I of the energy beam EB during the rotation of the rotating body 30. The irradiated member 35 is disposed so as to overlap at least with the irradiation locus 5.

[0048] Irradiated member 35 is made of a second material that is more resistant to corrosion by plasma raw material 101 than the first material. In other words, the second material that makes up irradiated member 35 is more resistant to erosion and the like caused by plasma raw material 101 than the first material that makes up support 31. For example, the second material is a material that is worn down by plasma raw material 101 less than the first material when used under the same conditions.

[0049] The second material constituting the irradiated member 35 is, for example, a material that is less worn than the first material at the irradiation position I of the energy beam EB. This makes it possible to sufficiently suppress the amount of wear at the irradiation position I of the energy beam EB, thereby enabling the life of the rotating body 30 to be extended.

[0050] Specific examples of the first material and the second material are listed below, but the first material and the second material are not limited to the examples listed here.

[0051] The first material constituting the support 31 is any one of molybdenum (Mo), titanium (Ti), stainless steel, aluminum (Al), TZM (an alloy of titanium (Ti), zirconium (Zr), and molybdenum (Mo)), stainless steel coated with titanium nitride (TiN), aluminum coated with titanium nitride, stainless steel coated with TZM, and aluminum coated with TZM.

[0052] For example, metal materials such as molybdenum, titanium, stainless steel, and aluminum are less expensive and lighter than materials made of heavy elements such as tungsten, which are used as the second material described below. This reduces the cost of the rotor 30 and also reduces the overall weight of the rotor 30. Titanium nitride and TZM also have high corrosion resistance against tin in high-temperature environments. Therefore, by using a titanium nitride coating or TZM coating, it is possible to improve the corrosion resistance of low-cost, highly workable metal materials such as stainless steel and aluminum.

[0053] The second material constituting the irradiated member 35 is any one of tungsten (W), WL (tungsten containing lanthanum (La)), rhenium (Re), tungsten-rhenium alloy, iridium (Ir), platinum (Pt), tungsten carbide (WC), DLC (Diamond Like Carbon), and diamond.

[0054] For example, tungsten, rhenium, tungsten-rhenium alloy, iridium, platinum, and tungsten carbide have a higher specific gravity (density) than the metal materials listed as the first material. Therefore, they have high resistance to erosion caused by tin, and the amount of wear can be sufficiently suppressed. Furthermore, WL has the same corrosion resistance as simple tungsten and is highly workable, so the irradiated member 35 can be easily molded. DLC and diamond are very light yet stable and hard materials compared to metal materials, so they have sufficiently high resistance to erosion caused by tin. DLC and diamond may also be used by forming a film on a predetermined substrate material.

[0055] The first and second materials according to the present disclosure are not limited to the above examples. For example, metal materials such as tungsten and tungsten alloys may have relatively high density materials and relatively low density materials even if the constituent elements are the same. The rotating body 30 may be constructed using such metal materials. In this case, the support 31 may be constructed using a relatively low-density metal material as the first material, and the irradiated member 35 may be constructed using a relatively high-density metal material having the same constituent elements as the first material as the second material.

[0056] The first and second materials described here can be used, for example, when the plasma raw material 101 is tin. Furthermore, when a plasma raw material 101 other than tin (such as lithium, gadolinium, terbium, gallium, bismuth, or indium) is used, the first and second materials may be appropriately selected from the materials described above. In this case, for example, a material that does not react with the plasma raw material 101 or has sufficiently low reactivity in the temperature environment in which it is used is used.

[0057] As described above, in the light source device 100 according to this embodiment, a rotor 30 that is irradiated with the energy beam EB is provided with a support 31 and an irradiated member 35. The support 31 is made of a first material that is corrosion-resistant to the plasma raw material 101, and the irradiated member 35 is made of a second material that is more corrosion-resistant than the first material. The irradiated member 35 is provided on a portion of the support 31 so that it overlaps with the position irradiated with the energy beam EB while the support 31 is rotating. In this way, by locally arranging a material that is more corrosion-resistant than other portions only in the portion irradiated with the energy beam EB, it is possible to realize a rotor that is low-cost, lightweight, and has a long lifespan.

[0058] Generally, energy beams such as laser beams used in LPP light source devices have very high energy because they directly convert plasma raw materials such as tin into plasma. Therefore, even materials that are considered to be corrosion-resistant against liquid plasma raw materials may have their surface scraped away by erosion or other factors at the position irradiated by the energy beam. If the surface of the rotor is worn away in this way, for example, the irradiation position of the energy beam may recede, making it difficult to stably generate radiation, and the rotor must be replaced.

[0059] Furthermore, although the rate of wear varies depending on the material of the rotor, regardless of the material used, the amount of wear of the rotor will exceed an acceptable level over the long term, making it necessary to replace the rotor. Generally, heavy element metals such as tungsten are often used as materials with relatively high corrosion resistance against plasma raw materials. However, such heavy element metals are rare materials, which increases the cost of the rotor.

[0060] Furthermore, when a heavy element metal such as tungsten is used, the weight of the rotor itself becomes heavy. In this case, the controllability of the rotation may become poor. For example, it becomes difficult to quickly respond when you want to increase or decrease the speed of the rotor, such as when starting or stopping the rotation. Furthermore, if the rotor shakes, it becomes difficult to suppress the shaking.

[0061] Furthermore, if the rotating body is heavy, a motor with high torque is required, which increases the power required for rotation. Furthermore, if the rotation axis is oriented sideways, a mechanism to suppress rotational wobble is required to ensure stable rotation of the rotating body. This may result in increased running costs and manufacturing costs for the entire light source device. In addition, if the rotating body is heavy, it may be difficult to replace the rotating body, which may worsen maintenance.

[0062] In the light source device 100 according to this embodiment, an irradiated member 35 made of a material (second material) that has higher corrosion resistance to the plasma raw material 101 than the material (first material) that constitutes the support 31, which is the main body of the rotator 30, is provided in the portion of the rotator 30 that is irradiated with the energy beam EB. By arranging the irradiated member 35 in this manner, it is possible to suppress wear due to erosion and the like even in the portion that becomes hot due to exposure to the energy beam EB. As a result, it is possible to extend the life of the rotator 30.

[0063] Furthermore, the irradiated member 35 made of the second material is provided on a portion of the rotor 30, and the remaining portion of the rotor 30 is made up of the support 31 made of the first material. Therefore, it is possible to reduce the amount of the second material used compared to, for example, a case where the rotor 30 is made up of only the second material. Furthermore, since the support 31 does not need to be as corrosion-resistant to the plasma raw material 101 as the irradiated member 35, it is possible to select, for example, a common material that is widely available as the first material. This makes it possible to reduce the material cost of the rotor 30.

[0064] Furthermore, it is possible to select a lighter material as the first material constituting the support 31 compared to the heavy element metal or the like used as the second material, thereby making it possible to reduce the weight of the rotor 30. By making the rotor 30 lighter in this way, it becomes possible to quickly adjust the speed of the rotor 30 and easily suppress rotational wobble, thereby improving controllability.

[0065] Furthermore, if the rotating body 30 is light, there is no need to use a special motor with a large torque. Furthermore, it is possible to stabilize the rotation without adding a mechanism to suppress rotational shake. This makes it possible to reduce the running costs and manufacturing costs of the light source device. Furthermore, the light weight of the rotating body 30 makes it easier to replace the rotating body 30, improving maintainability.

[0066] Next, the shape of the rotor 30 according to this embodiment will be described in detail. In this embodiment, the rotor 30 is a rotating plate having a rotation surface 40 that extends around the rotation axis RA and holds the plasma raw material 101 on the rotation surface 40. Here, the rotation surface 40 is the surface that is irradiated with the energy beam EB. For example, in FIG. 1 , of the two main surfaces of the rotor 30, the main surface that is irradiated with the energy beam EB (the surface facing right in the figure) is the rotation surface 40. The main surface opposite the rotation surface 40 is referred to as the back surface 41.

[0067] Here, the surface of rotation 40 is a plane perpendicular to the rotation axis RA. The surface of rotation 40 may be a rotationally symmetric curved surface, such as a conical surface, with the rotation axis RA as its axis of symmetry. The surface of rotation 40 may also be a convex or concave surface. The surface of rotation 40 may also be configured as an annular surface centered on the rotation axis RA. The surface of rotation 40 may also be provided with recessed portions (concave portions), protruding portions (convex portions), or perforated portions (openings). The specific shape of the surface of rotation 40 is not limited to these. As described above, in this embodiment, a portion of the rotor 30 is immersed in the plasma raw material 101 stored in the source material container 21, causing the plasma raw material 101 to adhere to the surface of rotation 40. This holds the plasma raw material 101 on the surface of rotation 40.

[0068] In this embodiment, the irradiated member 35 forms the surface of rotation 40 together with the support member 31. In this case, the energy beam EB is irradiated toward the surface of rotation 40 formed by the irradiated member 35. In this way, the portion of the surface of rotation 40 that is irradiated with the energy beam EB (the portion that overlaps with the irradiation position I) is formed by the irradiated member 35, and the remaining portion is formed by the support member 31. In this way, the irradiated member 35 is disposed only in a necessary portion of the surface of rotation 40, which makes it possible to reduce the amount of irradiated member 35 used, for example.

[0069] As shown in Fig. 1, the support 31 is a plate-like member having a first surface 31a and a second surface 31b. The first surface 31a forms the rotation surface 40 of the rotating body 30. The second surface 31b forms the back surface 41 of the rotating body 30. In this embodiment, the support 31 is a flat plate-like member, and the first surface 31a and the second surface 31b are both planes perpendicular to the rotation axis RA. As shown in Fig. 2, the planar shape of the support 31 is set to be circular.

[0070] 1 and 2. For example, the support 31 does not need to be a flat member, and a member in which at least one of the first surface 31a and the second surface 31b is a concave or convex surface may be used. Furthermore, the planar shape of the support 31 does not need to be circular, and any shape that is rotationally symmetric about the rotation axis RA, such as a regular polygon, may be used.

[0071] The support body 31 also has an embedding hole 32 formed on the first surface 31 a, into which the irradiated member 35 is embedded. The embedding hole 32 is, for example, a hole formed on the first surface 31 a so as not to penetrate the support body 31. The depth and planar shape of the embedding hole 32 are set in accordance with the thickness and planar shape of the irradiated member 35.

[0072] 1, the irradiated member 35 is embedded in the support 31 from the first surface 31a side. More specifically, the irradiated member 35 is inserted into an embedding hole 32 provided in the first surface 31a and fixed in this state to the support 31. In this way, the irradiated member 35 functions as part of the rotation surface 40 that holds the plasma raw material 101.

[0073] The method for fixing the irradiated member 35 to the support body 31 is not limited. For example, a through hole may be provided in the embedding hole 32, and the irradiated member 35 may be screwed from the second surface 31b (rear surface 41) side of the support body 31. Conversely, a through hole may be provided in the irradiated member 35, and the irradiated member 35 may be screwed to the support body 31 from the front surface side. In this case, the through hole provided in the irradiated member 35 is set at a position that does not overlap with the irradiation locus 5 of the energy beam EB. Alternatively, for example, the irradiated member 35 may be fitted to the embedding hole 32 by utilizing thermal expansion.

[0074] 2, the irradiated member 35 is arranged in an annular shape on the rotation plane 40 with the rotation axis RA as the center. Specifically, the irradiated member 35 forms an annular area on the rotation plane 40 that overlaps with the irradiation position I (irradiation locus 5) of the energy beam EB. This makes it possible to sufficiently reduce the amount of the irradiated member 35 used.

[0075] Hereinafter, a circle passing through the middle between the inner edge and the outer edge of the annular irradiated member 35 will be referred to as a central circle 36 of the irradiated member 35. The distance between the inner edge and the outer edge will be referred to as the width of the irradiated member 35.

[0076] For example, the larger the radius of the central circle 36, the further outward the irradiation position I of the energy beam EB can be set, and the longer the circumferential length of the irradiation locus 5. As a result, the area exposed to the heat generated by the plasma P at the irradiation position I becomes wider, which reduces the concentration of heat and improves the cooling efficiency. From this perspective, the radius of the central circle 36 of the irradiated member 35 is preferably set to 75% or more of the radius of the support 31, and more preferably set to 90% or more of the radius of the support 31.

[0077] The spot size (beam diameter) of the energy beam EB at the irradiation position I is set to approximately several tens of μm (e.g., 50 μm) in order to concentrate the energy. To reliably cover such a small spot, the width of the irradiated member 35 is preferably set to, for example, 10 times or more the spot size, e.g., 500 μm or more. Note that depending on the method for holding the irradiated member 35 on the support 31 and conditions such as handling during processing and assembly, it may be better for the irradiated member 35 to have a somewhat larger width. On the other hand, if the width of the irradiated member 35 is large, the weight and cost of the rotating body 30 may increase. From this perspective, the width of the irradiated member 35 is preferably set to, for example, 15 mm or less.

[0078] Furthermore, the irradiation position I of the energy beam EB is set, for example, on the central circle 36 of the irradiated member 35. In this case, the irradiation locus 5 is a circle that follows the central circle 36. This allows the heat generated from the plasma P to be efficiently dissipated throughout the irradiated member 35. Furthermore, the propagation of heat to the support 31 is suppressed, making it possible to suppress the occurrence of erosion or the like in the support 31. Note that the irradiation position I may be set to a position close to the outer edge (or inner edge) of the irradiated member 35.

[0079] In addition, the planar shape of the irradiated member 35 is not limited to a circular shape as long as it overlaps with the irradiation locus 5, and for example, an annular irradiated member 35 whose inner and outer edges are polygonal may be used.

[0080] 3A, 3B, and 3C are cross sections of the rotating body 30 cut along the rotation axis RA, and are schematic illustrations of examples of the cross-sectional shape of the irradiated member 35. In Figures 3A, 3B, and 3C, the left side of the figure is the inside of the rotating body 30 close to the rotation axis RA, and the right side is the outside of the rotating body 30. The upper side of the figure is the rotation surface 40, and the lower side is the back surface 41.

[0081] In the following, in a cross section taken along the rotation axis RA, the inner end point that forms the boundary between the first surface 31a of the support 31 and the embedding hole 32 is referred to as P1, and the outer end point is referred to as P2. In Figures 3A, 3B, and 3C, in the plane of rotation 40, the left corner that forms the inner edge of the embedding hole 32 is end point P1, and the right corner that forms the outer edge of the embedding hole 32 is end point P2. In addition, the surface of the irradiated member 35 that faces the energy beam EB (the surface that constitutes the plane of rotation 40) is referred to as the irradiation surface 37.

[0082] In this embodiment, the irradiated member 35 has a cross-sectional structure that is continuously connected to both the inner end point P1 and the outer end point P2. That is, the irradiated member 35 is configured so that, in the thickness direction of the rotating body 30 (the vertical direction in the drawing), the position of the inner edge of the irradiated surface 37 is the same as the inner edge (end point P1) of the embedding hole 32, and the position of the outer edge of the irradiated surface 37 is the same as the outer edge (end point P2) of the embedding hole 32.

[0083] This allows the irradiation surface 37 of the irradiated member 35 and the first surface 31a of the support 31 to be smoothly connected without any steps or other barriers between them. As a result, it becomes possible to easily control the film thickness of the plasma raw material 101, for example, on the plane of rotation 40 formed by the irradiation surface 37 and the first surface 31a.

[0084] 3A shows an example in which the irradiated member 35 is configured so that the irradiation surface 37 is a straight line in a cross section along the rotation axis RA. That is, the irradiated member 35 is embedded in the support 31 so as to be flush with the first surface 31a of the support 31. In this embodiment, since the first surface 31a is flat, the rotation surface 40 (first surface 31a and irradiation surface 37) is also flat. This makes it possible to precisely control the film thickness of the plasma raw material 101 by using, for example, the film thickness adjustment mechanism 22 shown in FIG. 1 .

[0085] 3B shows an example of an irradiated member 35 configured such that the irradiation surface 37 is a concave curve relative to the first surface 31a in a cross section taken along the rotation axis RA. In this case, the irradiation surface 37 is a concave curved surface. FIG. 3C shows an example of an irradiated member 35 configured such that the irradiation surface 37 is a convex curve relative to the first surface 31a in a cross section taken along the rotation axis RA. In this case, the irradiation surface 37 is a convex curved surface.

[0086] In this way, by configuring irradiation surface 37 as a curved surface, it is possible to adjust the irradiation angle of energy beam EB with respect to plasma raw material 101. For example, the irradiation intensity of energy beam EB increases the deeper the angle with respect to plasma raw material 101 (the angle closer to perpendicular to the surface of plasma raw material 101). Therefore, for example, in Figures 3B and 3C, by adjusting the irradiation angle to a deeper angle, it is possible to efficiently excite plasma raw material 101.

[0087] 3A, 3B, and 3C. For example, any cross-sectional structure in which the end points P1 and P2 are continuously connected is possible, and an irradiated member 35 in which the irradiation surface 37 has a cross section that combines straight lines and curves may be used. Furthermore, the cross-sectional structure of the irradiated member 35 does not necessarily have to be a structure in which the end points P1 and P2 are continuously connected, and may be a structure in which steps are formed on the inside and outside.

[0088] In the above embodiment, the case where the planar shape of the irradiated member 35 is annular has been described. The planar shape of the irradiated member 35 does not necessarily have to be annular; for example, an irradiated member 35 having a circular or polygonal planar shape may be embedded in the support body 31. In this case, compared to when the planar shape is annular, processing such as cutting out the center is not required, and the irradiated member 35 can be easily formed. Note that the irradiated member 35 does not necessarily have to be configured as a single unit, and may be configured, for example, by arranging multiple parts. Furthermore, the irradiated member 35 may be configured in a circular shape, and may be configured, for example, by arranging multiple parts spaced apart from each other.

[0089] In the above embodiment, the irradiated member 35 (irradiation surface 37) and the support 31 (first surface 31a) form the rotation surface 40 that holds the plasma raw material 101 on the rotating body 30. However, this is not limiting, and the irradiated member 35 may form the rotation surface 40 by itself. For example, the irradiated member 35 is provided so as to cover the entire first surface 31a of the support 31. In this case, the irradiated surface 37 of the irradiated member 35 functions as the rotation surface 40.

[0090] This suppresses wear due to erosion and the like across the entire rotating surface 40, thereby extending the life of the rotating body 30. Even with this configuration, the rotating body 30 is made up of the relatively lightweight support body 31 except for the irradiated member 35, so the weight of the rotating body 30 can be reduced.

[0091] Second Embodiment A rotating body according to a second embodiment of the present invention will be described. In the following description, the description of parts having the same configuration and function as the rotating body 30 described in the above embodiment will be omitted or simplified.

[0092] 4A and 4B are schematic diagrams showing an example of a cross-sectional configuration and a planar configuration of a rotating body according to the second embodiment. Fig. 4A is a cross-sectional view of the rotating body 50 taken along a rotation axis RA, with the upper side in the figure being the upper side in the vertical direction and the lower side in the figure being the lower side in the vertical direction. Fig. 4B is a plan view of the rotating body 50 as seen from above along the rotation axis RA.

[0093] As shown in Figure 4A, in this embodiment, the rotor 50 is configured as a rotating container. That is, the rotor 50 itself functions as a container for accommodating the plasma raw material 101. A shaft member 25 that rotates about a rotation axis RA is connected to the underside of the rotor 50. This causes the rotor 50 to rotate about the rotation axis RA. The rotation axis RA is typically set parallel to the vertical direction. However, the rotation axis RA may also be set at an angle relative to the vertical direction.

[0094] The rotor 50 has an inner peripheral surface 45 that surrounds the rotation axis RA, and holds the plasma raw material 101 on the inner peripheral surface 45. The inner peripheral surface 45 is, for example, a band-shaped curved surface that is centered on the rotation axis RA and extends toward the rotation axis RA. When the rotor 50 rotates, the liquid plasma raw material 101 contained in the rotor 50 moves toward the inner peripheral surface 45 due to centrifugal force and is distributed along the inner peripheral surface 45. In this way, the plasma raw material 101 is held on the inner peripheral surface 45. The inner peripheral surface 45 is also the surface of the rotor 50 that is irradiated with the energy beam EB.

[0095] In this embodiment, the rotating body 50 has a support 51 and an irradiated member 55. The support 51 is a structural member connected to the shaft member 25 and supports the irradiated member 55, and is made of a first material that is corrosion-resistant against the plasma raw material 101. The irradiated member 55 is a member that forms the portion of the rotating body 50 (inner circumferential surface 45) that overlaps with the irradiation position I of the energy beam EB, and is made of a second material that is more corrosion-resistant against the plasma raw material 101 than the first material. The first and second materials may be, for example, the same materials as those described in the above embodiments. In this embodiment, the irradiated member 55 corresponds to the irradiated portion.

[0096] As shown in Figure 4A, the support 51 has a bottom plate portion 52 and a protruding wall 53. The bottom plate portion 52 is a plate-shaped structural portion provided perpendicular to the rotation axis RA. The bottom plate portion 52 functions as the bottom plate of the rotor 50 configured as a rotary container. For example, when the rotor 50 is not rotating, the plasma raw material 101 is stored on the upper surface 52a of the bottom plate portion 52. The shaft member 25 is connected to the lower surface 52b of the bottom plate portion 52.

[0097] The protruding wall 53 is an annular structural part that protrudes from the upper surface 52a of the bottom plate portion 52 so as to surround the rotation axis RA. The protruding wall 53 constitutes a side wall that is provided around the bottom plate of the rotary container. In this embodiment, the protruding wall 53 protrudes vertically upward from the upper surface 52a at the outer edge of the bottom plate portion 52. Therefore, the rotary body 50 is a flat-cylindrical (drum-shaped) rotary container.

[0098] The protruding wall 53 does not have to protrude vertically upward. For example, it may protrude in a direction away from the rotation axis RA (toward the outside of the rotating body 50) or in a direction toward the rotation axis RA (toward the inside of the rotating body 50). Furthermore, the protruding wall 53 may protrude from inside the outer edge of the bottom plate portion 52.

[0099] 4A and 4B, the irradiated member 55 is a cylindrical ring-shaped member that is attached to the inside of the protruding wall 53 to form the inner circumferential surface 45. For example, the outer diameter of the irradiated member 55 is set to be the same as or slightly smaller than the inner diameter of the protruding wall 53. The irradiated member 55 is inserted into the space surrounded by the protruding wall 53 and fixed in that state. The irradiated member 55 can be fixed using screws or a fitting that utilizes thermal expansion.

[0100] The shape of the irradiated member 55 does not need to be cylindrical, and may be processed appropriately to obtain a desired inner circumferential surface 45. For example, the irradiated member 55 may be formed so that the inner circumferential surface 45 is inclined toward the bottom plate portion 52 (so that it slopes inward). Conversely, the irradiated member 55 may be formed so that the inner circumferential surface 45 slopes outward.

[0101] In this embodiment, the inner surface of the irradiated member 55 directly becomes the inner circumferential surface 45. That is, the irradiated member 55 alone forms the inner circumferential surface 45. The energy beam EB is irradiated toward the inner circumferential surface 45 formed by the irradiated member 55 in this manner. By forming the inner circumferential surface 45 solely by the irradiated member 55, it is possible to sufficiently suppress wear on the inner circumferential surface 45 due to erosion and the like.

[0102] Furthermore, the irradiated member 55 does not necessarily have to form the inner circumferential surface 45 alone; for example, the irradiated member 55 may form the inner circumferential surface 45 together with the support body 51. For example, a configuration is possible in which the lower side of the inner circumferential surface 45 is formed by the protruding wall 53 of the support body 51, and the upper side of the inner circumferential surface 45 is formed by the irradiated member 55. Furthermore, for example, when the irradiated member 55 is provided so as to be embedded in the protruding wall 53, it is also possible to form only the central portion of the inner circumferential surface 45 by the irradiated member 55. In this way, when the inner circumferential surface 45 is formed by the irradiated member 55 and the support body 51, it is possible to reduce the amount of the irradiated member 55 used, thereby making it possible to reduce the weight and cost of the rotating body 50.

[0103] In this way, even in the rotating container type rotating body 50, by constructing the inner surface 45, which is irradiated with the energy beam EB, from an irradiated member 55 made of the second material, and constructing the other parts from a support body 51 made of the first material, it is possible to realize a rotating body 50 that is long-lasting, low-cost, and lightweight.

[0104] Furthermore, the rotating vessel-type rotating body 50 requires a high rotation speed in order to control the film thickness on the inner peripheral surface 45. In this regard, by reducing the weight of the rotating body 50, it becomes possible to achieve relatively high-speed rotation without using a special motor. Furthermore, if the rotating body is heavy, it is possible to use a heavy shaft member 25 to stabilize the rotation, but by applying the present technology to reduce the weight of the rotating body 50, it is possible to achieve a reduction in the weight of the shaft member 25, etc.

[0105] In the above embodiment, a configuration has been described in which a structural member (irradiated member) configured separately from the support body is provided in a portion of the rotating body that overlaps with the irradiation position I of the energy beam EB. However, the present invention is not limited to this, and the portion that overlaps with the irradiation position I of the energy beam EB may be coated.

[0106] 5A and 5B are schematic diagrams showing an example of the cross-sectional and planar configurations of a rotor according to the third embodiment. Fig. 5A is a cross-sectional view of a rotor 60 cut along the rotation axis RA, with the right side of the figure representing the front side of the rotor 60 and the left side of the figure representing the back side of the rotor 60. Fig. 5B is a plan view of the rotor 60 as seen from the front side along the rotation axis RA. The rotor 60 is a rotating plate that holds plasma raw material 101 on a rotation surface 40 extending from the center of the rotation axis RA, and includes a support 61 and a coating portion 65.

[0107] As shown in Figure 5A, the support 61 is a plate-shaped member made of a first material that is corrosion-resistant to the plasma raw material 101. The support 61 has a first surface 61a, which is the front side, and a second surface 61b, which is the back side. Here, the first surface 61a and the second surface 61b are configured as flat surfaces perpendicular to the rotation axis RA, but they may also be configured as curved surfaces such as conical surfaces. A coating portion 65 is provided on the first surface 61a. Furthermore, the shaft member 25 is connected to the second surface 61b.

[0108] Coating portion 65 is made of a second material that has higher corrosion resistance to plasma raw material 101 than the first material, and is formed by coating support 61 with the second material. In other words, coating portion 65 is a coating film made of the second material. In this embodiment, coating portion 65 corresponds to the irradiated portion.

[0109] The second material constituting the coating portion 65 is a material that has higher corrosion resistance to the plasma raw material 101 than the first material and that can be coated. For example, the coating portion 65 can be formed by depositing DLC, diamond, tungsten carbide, boron carbide (B4C), or silicon carbide. Other than these, the material of the coating portion 65 is not limited.

[0110] 5B , in the rotating body 60, a ring-shaped coating portion 65 is formed on the first surface 61 a of the support body 61, the coating portion 65 being centered on the rotation axis RA. Note that the coating portion 65 may be formed to cover the entire surface of the first surface 61 a. Alternatively, the shape and size of the coating portion 65 may be set to be the same as, for example, the planar shape of the irradiated member 35 in the rotating body 30 described in the first embodiment.

[0111] By providing coating portion 65 made of the second material in this way, the corrosion resistance of rotor 60 to plasma raw material 101 is improved in the portion of rotor 60 that overlaps with irradiation position I of energy beam EB, making it possible to suppress wear of rotor 60 due to erosion, etc. Furthermore, because coating portion 65 formed in a film form is very lightweight, rotor 60 can be made sufficiently lightweight.

[0112] Although the present embodiment has been described with reference to a rotating plate-type rotor 60, the type of rotor to which the coating unit 65 can be applied is not limited. For example, the coating unit 65 may be applied to the rotating vessel-type rotor described in the second embodiment. In this case, the coating unit 65 is provided so as to form the inner circumferential surface 45 that holds the plasma raw material 101. This allows the rotating vessel-type rotor to be sufficiently lightweight.

[0113] <Other Embodiments> The present invention is not limited to the above-described embodiment, and various other embodiments can be realized.

[0114] In the above embodiment, the present invention has been described as being applied to an LPP type light source device, but this is not limited to this, and the present invention may also be applied to light source devices of other types, such as DPP type or LDP type.

[0115] The rotating body may have a support that rotates around a rotation axis, and an irradiated member that is detachably attached to the support and is provided on a part of the support so as to overlap with the irradiation position of the energy beam while the support is rotating. By configuring the rotating body in this way, it becomes possible to replace only the irradiated member, which is the part of the rotating body that is subject to a large proportion of wear, and it is possible to reduce the cost of the rotating body.

[0116] In this case, when the amount of wear of the irradiated member exceeds a predetermined level due to, for example, erosion, the worn irradiated member is removed from the support and a new irradiated member is attached to the support, which makes it possible to significantly reduce the cost of replacement parts compared to, for example, replacing the entire rotating body.

[0117] When the irradiated member is configured as a member that can be attached to and detached from the support, the materials of the support and the irradiated member are not limited. For example, as in the above embodiment, the support may be configured using a first material that is corrosion-resistant to the plasma raw material, and the irradiated member may be configured using a second material that is more corrosion-resistant to the plasma raw material than the first material. In this case, the life of the irradiated member is extended, and maintenance costs can be reduced by reducing the replacement frequency.

[0118] The support and the irradiated member may both be made of the same material. For example, the metal material (tungsten, tungsten alloy, etc.) cited as an example of the second material in the above embodiment may be used to make both the support and the irradiated member. Even in this case, when maintaining the rotating body, only the irradiated member with the greatest wear needs to be replaced, which reduces costs compared to replacing the entire rotating body. Furthermore, by making the support using tungsten, tungsten alloy, etc., it is possible to extend the life of the support and improve the reliability of the entire rotating body.

[0119] Furthermore, both the support and the irradiated member may be made of the material given as an example of the first material in the above embodiment. In this case, it is possible to reduce the costs of both the support and the irradiated member. Furthermore, the support may be made of the second material, and the irradiated member may be made of the first material. In this case, it is possible to reduce the cost of the irradiated member, which is a replacement part, while extending the life of the support.

[0120] The method for detachably fixing the irradiated member and the support is not limited, and may be, for example, screw fastening, etc. Alternatively, any other attachment / detachment mechanism may be used.

[0121] It is also possible to combine at least two of the features of the present technology described above. That is, the various features described in each embodiment may be arbitrarily combined without distinguishing between the embodiments. Furthermore, the various effects described above are merely examples and are not intended to be limiting, and other effects may also be achieved.

[0122] 30, 50, 60... Rotating body 31, 51, 61... Support body 32... Embedding hole 35, 55... Irradiated member 40... Rotation surface 45... Inner peripheral surface 100... Light source device 101... Plasma raw material

Claims

1. A light source device that has a rotor that holds plasma raw material, irradiates the plasma raw material on the rotor with an energy beam to generate plasma, and extracts radiation from the plasma, wherein the rotor has a support that is made of a first material that is corrosion-resistant to the plasma raw material and rotates around its axis of rotation, and an irradiated part that is made of a second material that is more corrosion-resistant to the plasma raw material than the first material and is provided on a part of the support so as to overlap with the irradiation position of the energy beam while the support is rotating.

2. A light source device according to claim 1, wherein the rotating body is a rotating plate having a rotation surface extending around the rotation axis and holding the plasma raw material on the rotation surface, the irradiated portion forms the rotation surface together with the support or alone, and the energy beam is irradiated toward the rotation surface formed by the irradiated portion.

3. A light source device according to claim 2, wherein the irradiated portion is arranged in a ring shape on the rotation plane with the rotation axis as the center.

4. A light source device according to claim 2, wherein the support is a plate-like member having a first surface that forms the plane of rotation, and the irradiated portion is an irradiated member embedded in the support from the side of the first surface.

5. A light source device according to claim 4, wherein the support has an embedding hole formed in the first surface into which the irradiated member is embedded, and the irradiated member has a cross-sectional structure in which, in a cross section cut along the rotation axis, it is continuously connected to both an inner end point and an outer end point that form the boundary between the first surface and the embedding hole.

6. A light source device according to claim 1, wherein the rotating body is a rotating vessel having an inner circumferential surface surrounding the rotation axis and holding the plasma raw material on said inner circumferential surface, the irradiated portion forms said inner circumferential surface together with the support or independently, and the energy beam is irradiated towards said inner circumferential surface formed by the irradiated portion.

7. A light source device as claimed in claim 6, wherein the support has a bottom plate portion perpendicular to the rotation axis and a protruding wall protruding from the upper surface of the bottom plate portion so as to surround the rotation axis, and the irradiated portion is an irradiated member attached to the inside of the protruding wall to form the inner circumferential surface.

8. A light source device according to claim 1, wherein the first material is any one of molybdenum, titanium, stainless steel, aluminum, TZM (an alloy of titanium, zirconium, and molybdenum), stainless steel coated with titanium nitride, aluminum coated with titanium nitride, stainless steel coated with TZM, and aluminum coated with TZM.

9. A light source device according to claim 1, wherein the second material is any one of tungsten, WL (lanthanum-containing tungsten), rhenium, a tungsten-rhenium alloy, iridium, platinum, tungsten carbide, DLC (Diamond-Like Carbon), and diamond.

10. A light source device according to claim 1, wherein the irradiated portion is formed by coating the support with the second material.

11. A rotating body used in a light source device that irradiates a plasma raw material with an energy beam to generate plasma and extracts radiation from the plasma, the rotating body holding the plasma raw material and being irradiated with the energy beam, the rotating body having a support made of a first material that is corrosion-resistant to the plasma raw material and that rotates around its axis of rotation, and an irradiated part made of a second material that is more corrosion-resistant to the plasma raw material than the first material, the irradiated part being provided on part of the support so as to overlap with the irradiation position of the energy beam while the support is rotating.

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