End block and end-block housing insert

Abstract

According to various embodiments, an end block (100) can comprise: a housing (102) which comprises a receiving space; a rotary bearing (104) which is arranged in the receiving space and provides an axis of rotation (111) along which the receiving space is exposed on a first side of the housing (102); a mounting base rotatably mounted in the receiving space by means of the rotary bearing (104); an electrical sliding contact (108) which is arranged in the receiving space and is designed to physically contact a surface portion facing away from the first side.

Description

[0001] Description

[0002] End block and end block housing insert

[0003] Various embodiments relate to an end block and an end block housing insert.

[0004] In general, a substrate can be treated (processed) in a vacuum, e.g., coated, so that the chemical and / or physical properties of the substrate can be modified. Various coating processes can be used to coat a substrate, of which cathodic sputtering (also known as sputter deposition) is an established representative of physical vapor deposition (PVD).

[0005] For sputtering, a plasma-forming gas can be ionized using a cathode (also known as a magnetron cathode), whereby the resulting plasma can be used to atomize a material to be deposited (target material). The atomized target material can then be applied to a substrate, where it can be deposited and form a layer. For example, sputtering can be used to deposit one or more layers on a substrate. A so-called end block is often used to hold and supply a tubular cathode.

[0006] Examples of typical endblock requirements include: small footprint, long service life, the ability to deliver as many media as possible, including cooling water, electrical power, and mechanical power, to the target, and low cost. Meeting these requirements is subject to limitations, so compromises are usually made.

[0007] In various embodiments, it was recognized that more flexibility can be provided through design in meeting these requirements. It was clearly recognized that the transmission of electrical power within the terminal block often requires a large amount of space.

[0008] According to various embodiments, an end block and an end block housing insert are provided that reduce this space requirement. This clearly overcomes the misconception that the electrical power should only be coupled into the rotatably mounted mounting base close to the target via the inner or outer wall of the mounting base. In contrast, the end block and the end block housing insert allow the electrical power to be coupled on the opposite side of the mounting base, which utilizes previously unused installation space and thus reduces the space requirement.

[0009] This architecture of the end block also reduces the assembly effort, as the end block housing insert can be pre-assembled as a coherent assembly and installed into the end block including the grinding wheel.

[0010] This also facilitates maintenance, as the assembly can be replaced quickly and easily. In this regard, reference is made to the end block as a whole, although it should be understood that the end block housing insert can also be provided as a separate assembly, and the description for the end block applies analogously.

[0011] Various examples are described below which relate to what is described herein and what is shown in the figures.

[0012] Example 1 is an end block housing insert, comprising: a cover having one or more than one sealing surface (e.g. facing a first side); an electrical sliding contact penetrated by a through-opening; a fluid line connected to the cover, for example monolithically or detachably, and extending from the cover through the through-opening away from the cover (and / or along a rotation axis), e.g. along a direction (also referred to as reference direction), which is, for example, parallel to the rotation axis and / or directed towards the first side). Example 2 is an end block, comprising: a housing having a receiving space; a pivot bearing arranged in the receiving space and providing a rotation axis along which the receiving space on a first side (e.g.front side) of the housing is exposed; a mounting base which is rotatably mounted in the receiving space by means of the pivot bearing; preferably a housing insert which is configured to be introduced into the receiving space (e.g. by means of a movement towards the side), wherein the housing insert optionally has an end block housing insert (e.g. according to example 1) and / or an electrical sliding contact, wherein the housing insert (e.g. the sliding contact) is configured to electrically and / or physically contact a surface section of the mounting base facing or facing away from the first side.

[0013] Example 3 is configured according to example 1 or 2, further comprising: a fluid line which extends along the rotational axis into a cavity of the mounting base, preferably through the cavity of the mounting base, and / or through the sliding contact (e.g. a through-opening thereof), wherein preferably a region in which the sliding contact is arranged is fluidly coupled to the fluid line and / or a fluid channel of the cover.

[0014] Example 4 is configured according to Example 3 (e.g., the end block housing insert), further comprising: a fluid connection and one or more fluid channels that fluidically couple the fluid connection to the fluid line and / or open into the receiving space. This improves fluid exchange, e.g., the exchange of a cooling fluid.

[0015] Example 5 is configured according to any one of Examples 1 to 4, wherein the surface portion and / or the sliding contact extend along a closed path around the rotation axis and / or have a surface of revolution (e.g., annular). This improves the contact.

[0016] Example 6 is configured according to one of Examples 1 to 5, further comprising: a (e.g., spring-elastic) holding device configured to provide a force (e.g., the restoring force), for example, along the rotation axis and / or the direction, preferably by means of which the sliding contact is pressed against the surface portion, wherein the holding device is optionally supported on the cover. This improves the mounting of the sliding contact.

[0017] Example 7 is configured according to any one of Examples 1 to 6, wherein the sliding contact is annular. This improves electrical contact.

[0018] Example 8 is configured according to any one of Examples 1 to 7 (e.g., the end block housing insert), further comprising: a cover for closing an opening of the housing (also referred to as an end block cover), which exposes the receiving space on a second side of the housing opposite the side, wherein the surface portion preferably faces the cover and / or the opening and / or is arranged between the pivot bearing and the cover. This facilitates assembly.

[0019] Example 9 is configured according to one of Examples 1 to 8, wherein the cover has a positive-locking contour configured to form a positive connection with the holding device, wherein the fluid line is preferably connected (e.g., monolithically or detachably) to the cover. This facilitates assembly.

[0020] Example 10 is configured according to example 9 or 9, wherein the cover has a sealing surface facing the surface portion and / or the fluid line; and / or wherein the form-fitting contour is provided by a recess in the cover into which the holding device is received. This simplifies assembly.

[0021] Example 11 is configured according to any one of Examples 9 to 10, wherein the cover is penetrated by one or more than one channel, for example, for exchanging fluid with the receiving space and / or with the fluid line. This improves fluid exchange, e.g., the exchange of a cooling liquid. Example 12 is configured according to any one of Examples 1 to 11, wherein the surface portion and / or the sliding contact are arranged between the rotary bearing and the first side or a second side of the housing opposite the first side. This facilitates assembly.

[0022] Example 13 is configured according to any one of Examples 1 to 12, further comprising an electrical connection terminal and an electrical line that electrically couples the electrical connection terminal to the sliding contact. This facilitates assembly.

[0023] Example 14 is configured according to any one of Examples 1 to 13, wherein the surface portion is an end face of the mounting base facing away from the first side. This facilitates assembly and improves electrical contact.

[0024] Example 15 is configured according to any one of Examples 1 to 14, wherein the surface portion is transverse to the rotation axis. This facilitates assembly.

[0025] Example 16 is configured according to any one of Examples 1 to 15, wherein the mounting base is tubular. This facilitates assembly.

[0026] Example 17 is configured according to any one of Examples 1 to 16, wherein the mounting base further comprises a first end portion facing the first side, which has one or more than one positive-locking contour. This facilitates the assembly of the target coupling.

[0027] Example 18 is configured according to any one of Examples 1 to 17, further comprising a target coupling configured to couple a tubular target to the mounting base and arranged on the first side. This facilitates the mounting of the target.

[0028] Example 19 is configured according to any one of Examples 1 to 18, further comprising one or more than one seal for sealing a gap between the housing and the mounting base, wherein a first seal is disposed between the pivot bearing and the sliding contact; and / or wherein a second seal is disposed between the pivot bearing and the first side, and / or wherein preferably the pivot bearing is disposed between the first seal and the second seal. This facilitates assembly.

[0029] Example 20 is a vacuum assembly comprising: a vacuum chamber; Example 21 is configured according to any one of Examples 1 to 20 disposed within the vacuum chamber.

[0030] Example 22 is a vacuum assembly according to Example 21, further comprising: a drive device configured to transmit torque to the mounting base.

[0031] Example 23 is a vacuum assembly according to Example 21 or 22, further comprising: a target coupled to the mounting base.

[0032] Example 24 is a vacuum assembly according to any one of Examples 21 to 23, further comprising: a magnet system held by the end block (e.g., within the target).

[0033] Example 25 is a method of operating any of Examples 1 to 24 (e.g., the end block according to any one of Examples 1 to 20), the method comprising: setting the mounting base in a rotary motion, preferably when the mounting base and / or the sliding contact are exposed to a liquid; coupling electrical power into the mounting base by means of the sliding contact when the mounting base is set in the rotary motion and / or when the end block is exposed to a vacuum.

[0034] Example 26 the method of Example 25, further comprising: passing the liquid through a fluid conduit which extends into the mounting base and / or to which the sliding contact is exposed.

[0035] Example 27 is the method according to Example 25 or 26, further comprising: forming a vacuum to which the end block is subjected. Example 28 is an end block housing insert (e.g., the end block housing insert of any one of Examples 1 to 27), comprising: a cover, which preferably has one or more sealing surfaces; an electrical sliding contact penetrated by a through-opening; a fluid line connected to the cover, preferably monolithically, and extending from the cover through the through-opening away from the cover; wherein the sliding contact is movably mounted relative to the cover such that a restoring force counteracts movement of the sliding contact towards the cover and / or a movement of the sliding contact away from the cover is limited. This facilitates assembly.

[0036] Example 29 is any one of Examples 1 to 28, further comprising a movement limiter (also referred to as a stop) configured to limit a movement (e.g., due to expansion and / or due to the contact force) of the sliding contact, e.g., a movement toward or away from the first side (or the cover); wherein the movement limiter is preferably connected to the fluid line (e.g., monolithically or positively). This facilitates assembly.

[0037] Example 30 is any one of examples 1 to 29, wherein, transverse to the axis of rotation, an extent (e.g., outer diameter) of the sliding contact is greater than an extent of a cavity of the mounting base (e.g., inner diameter of the mounting base).

[0038] Example 31 is one of Examples 1 to 30, wherein the mounting base has a second end portion opposite the first end portion and / or facing away from the first side, which second end portion has the surface portion, e.g., arranged on the end face. This facilitates assembly.

[0039] Example 32 is one of Examples 1 to 31, wherein the sliding contact provides a current path that leads from the surface portion (e.g., past the pivot bearing) to the first side. This improves the exchange of electrical power.

[0040] Example 33 is one of Examples 1 to 32, wherein an extension of the through-opening of the sliding contact (e.g., transverse to the rotation axis and / or inner diameter of the sliding contact) is smaller than an extension of the mounting base (e.g., transverse to the rotation axis), e.g., its outer diameter. This improves the exchange of electrical power.

[0041] Example 34 is any one of Examples 1 to 33, wherein the sliding contact is arranged at a distance from the cover that is smaller than an extent (e.g., diameter) of the through-opening (e.g., 50% or 25% of the extent of the through-opening). This improves the exchange of electrical power. For example, the through-opening may extend through the sliding contact along a direction (also referred to as the reference direction), the extent being transverse to the reference direction.

[0042] Example 35 is any one of Examples 1 to 34, wherein the sliding contact is arranged at a distance from the cover that is smaller than an extension of the sliding contact along the rotational axis or at least the direction. This improves the exchange of electrical power.

[0043] Example 36 is any one of Examples 1 to 35, wherein the sliding contact is movably mounted relative to the cover such that a restoring force counteracts movement of the sliding contact toward the cover and / or a movement of the sliding contact away from the cover is limited (e.g., by means of a stop). This improves the exchange of electrical power.

[0044] Example 37 is any one of Examples 1 to 36, wherein the cover has one or more fluid channels into which the fluid line opens. This improves the exchange of cooling fluid.

[0045] Example 38 is any one of Examples 1 to 37, further comprising a stop protruding from the fluid conduit and configured to limit movement of the sliding contact away from the cover. This facilitates assembly. Example 39 is any one of Examples 1 to 38, wherein the fluid conduit is tubular and / or a body of revolution with respect to the rotation axis; and / or wherein the mounting base is tubular and / or a body of revolution with respect to the rotation axis.

[0046] Example 40 is one of Examples 1 to 39, wherein an extension of the sliding contact (eg transverse to the axis of rotation), eg an outer diameter thereof, is larger than an extension of the cavity of the mounting base parallel thereto.

[0047] Example 41 is any one of Examples 1 to 40, wherein the sliding contact has a recess (e.g. in the form of a fold) for receiving the mounting base and / or into which the mounting base engages.

[0048] Example 42 is any one of Examples 1 to 41, wherein the mounting base provides a shaft.

[0049] Example 43 is any one of Examples 1 to 42, further configured according to any one of the appended claims (e.g., 1 to 10).

[0050] Example 44 is subject matter of any of the appended claims, further configured according to any one of Examples 1 to 43.

[0051] It shows

[0052] Figure 1 A shows the end block in various schematic views according to various embodiments;

[0053] Figure 1B and Figure 2A each show an end block housing insert in the assembled state according to various embodiments in different schematic views;

[0054] Figure 2B shows a vacuum arrangement in a schematic cross-sectional view according to various embodiments; and

[0055] Figure 3 shows a method according to various embodiments in a schematic flow diagram; and

[0056] Figures 4A to 4C each show an end block housing insert in the assembled state according to various embodiments in a schematic side view or cross-sectional view.

[0057] In the following detailed description, reference is made to the accompanying drawings, which form a part hereof, and in which is shown by way of illustration specific embodiments in which the invention may be practiced. In this regard, directional terminology such as "top," "bottom," "front," "back," "fore," "rear," etc., is used with reference to the orientation of the described figure(s). Since components of embodiments can be positioned in a number of different orientations, the directional terminology is for purposes of illustration and is in no way limiting. It is to be understood that other embodiments may be utilized and structural or logical changes may be made without departing from the scope of the present invention.It is understood that the features of the various exemplary embodiments described herein may be combined with one another unless specifically stated otherwise. The following detailed description is therefore not to be construed in a limiting sense, and the scope of the present invention is defined by the appended claims.

[0058] Throughout this description, the terms "connected," "attached," and "coupled" are used to describe both a direct and an indirect connection (e.g., resistive and / or electrically conductive, e.g., an electrically conductive connection), a direct or indirect connection, and a direct or indirect coupling. In the figures, identical or similar elements are provided with identical reference numerals where appropriate.

[0059] According to various embodiments, the term "coupled" or "coupling" can be understood in the sense of a (e.g., mechanical, hydrostatic, thermal, and / or electrical), e.g., direct or indirect, connection and / or interaction. For example, several elements can be coupled to one another along an interaction chain, along which the interaction can be exchanged, e.g., a fluid (then also referred to as fluidically coupled). For example, two coupled elements can exchange an interaction with one another, e.g., a mechanical, hydrostatic, thermal, and / or electrical interaction. A coupling of several vacuum components (e.g., valves, pumps, chambers, etc.) to one another can include fluidically coupling them. According to various embodiments, "coupled" can be understood in the sense of a mechanical (e.g., physical) coupling, e.g.,by means of direct physical contact. A clutch can be configured to transmit a mechanical interaction (e.g., force, torque, etc.).

[0060] According to various embodiments, a bearing device can be configured for supporting (e.g., guided positioning and / or holding) one or more than one component. For example, the bearing device can have one or more than one bearing for supporting (e.g., guided positioning and / or holding) the component, for example per component. Each bearing of the loading device can be configured to provide the component with one or more than one degree of freedom (e.g., translational degree of freedom or rotational degree of freedom), according to which the component can be moved. Examples of a bearing include: radial bearings, axial bearings, radial axial bearings, linear bearings (also referred to as linear guides). For example, exactly one translational degree of freedom can be provided to the component per linear bearing.

[0061] With regard to the layer-forming process, reference is made here as an example to sputtering. The term "sputtering" refers to the atomization of a material (also referred to as coating material or target material) using a plasma. The atomized components of the coating material (e.g., individual atoms and / or ions) are separated from one another and can, for example, be deposited elsewhere to form a layer. Sputtering can be carried out using a sputtering device, which can have one or more magnet systems (also referred to as a magnetron). The coating material can be provided by a sputtering target (also referred to as a target for short), which can, for example, be tubular (also referred to as a tubular target) or plate-shaped (also referred to as a plate target or planar target).To generate the plasma, a voltage (also called sputtering voltage) can be applied to the sputtering target (also referred to as the target for short), so that the sputtering target acts as a cathode. Even if the sputtering voltage is an alternating voltage, the term "cathode" is often retained.

[0062] For sputtering, the sputtering target can be arranged in a vacuum processing chamber (also referred to as a vacuum chamber for simplicity), so that sputtering can take place in a vacuum. For this purpose, the ambient conditions (the process parameters) within the vacuum processing chamber (e.g., process pressure, temperature, gas composition, etc.) can be set or regulated during sputtering. For example, a working gas can be provided within the vacuum processing chamber, which designates the plasma-forming gas or the plasma-forming gas mixture. The vacuum processing chamber can, for example, be designed to be airtight, dusttight, and / or vacuum-tight, so that a gas atmosphere with a predefined composition (also referred to as the working atmosphere) or a predefined pressure (also referred to as the working pressure or process pressure) can be provided within the vacuum processing chamber (e.g., according to a setpoint).The vacuum chamber may be configured to contain a vacuum (i.e. a pressure less than 0.3 bar) and / or a pressure in a range of approximately 1 mbar to approximately 10. 3 mbar (in other words fine vacuum) or less, e.g. a pressure in a range of approximately 10 3 mbar to approximately 10 7 mbar (in other words high vacuum) or less, e.g. a pressure of less than high vacuum, e.g. less than approximately 10 7mbar (in other words ultra-high vacuum). The lowest pressure achievable in the vacuum chamber is also referred to as residual vacuum. According to various embodiments, reference is made to physical vapor deposition (PVD) as an exemplary coating process, e.g. comprising a sputtering process, which is to be distinguished from chemical vapor deposition (CVD). In contrast to CVD, in PVD a solid material is first transferred into the gas phase (also referred to as gaseous phase or vapor) and a layer is formed by means of this gas phase. In PVD the gas phase of the target material can optionally be chemically reacted with a reactive gas to form a chemical compound, which is incorporated into the layer or forms it. During the chemical reaction of PVD, two or more materials are thus combined to form the chemical compound.In chemical vapor deposition, a gaseous starting compound (also called precursor or reactant) is split into at least two reaction products, of which at least one reaction product is incorporated into the layer. Optionally, one reaction product is removed from the coating process as excess (e.g., using a pump). Optionally, CVD can be performed using a plasma, in which the splitting of the precursor occurs.

[0063] A plasma can be formed using a so-called working gas (also referred to as a plasma-forming gas). According to various embodiments, the working gas can comprise a gaseous material that is inert, in other words that participates in few or no chemical reactions. A working gas can, for example, be or become defined by the target material used and can be or become adapted to this. For example, a working gas can comprise a gas or a gas mixture that does not react with the target material to form a solid or is even inert towards it. The working gas can, for example, comprise a noble gas (e.g., helium, neon, argon, krypton, xenon, radon) or several noble gases. The plasma can be formed from the working gas, which, for example, essentially causes the target material to be atomized.If a reactive gas is used, it may exhibit a higher chemical reactivity than the working gas, e.g., with respect to the target material. In other words, the atomized target material can react more quickly with the reactive gas (if present) (i.e., form more reaction product per unit time) than with the working gas (e.g., if it reacts chemically with the working gas at all). The reactive gas and the working gas can be supplied together or separately as a process gas (e.g., as a gas mixture), for example, using the gas supply device.

[0064] It should be understood that what is described herein for sputtering can apply analogously to any other coating process, e.g., physical vapor deposition. In general, physical vapor deposition (e.g., sputtering) involves transferring the chemical composition of the target or coating material into the layer to be formed.

[0065] To effectively atomize the target material (also known as sputtering), the target material can be rotated around the magnet system. For this purpose, the target material can be configured in a tubular shape, known as a tubular target, with the magnet system being arranged inside the tubular target, allowing the tubular target to be rotated around the magnet system. The tubular target can, for example, comprise a tube on which the target material can be attached as a layer on an outer surface of the tube, partially covering the outer surface of the tube. However, the tubular target can also be formed from the target material.

[0066] The tube target can be or become rotatably mounted at opposite end sections by means of so-called end blocks, whereby the end blocks can provide a supply of the tube target (e.g. with electrical power and cooling fluid).

[0067] More generally, reference is made herein to a storage device which may have one or more end blocks for storing a tubular target.

[0068] If the storage device has two end blocks, one of the end blocks (the so-called drive end block) can have a drive train coupled to a drive device (also referred to as a target drive) for rotating the tubular target; and the other of the end blocks (the so-called media end block) can have a fluid line for supplying and removing cooling fluid (e.g., a water-based mixture) that can be passed through the target. The two end blocks are mounted, for example, suspended from a chamber ceiling (i.e., a chamber lid).

[0069] However, it is also possible to use just one end block (also called a compact end block), which contains the drive train and the fluid line and thus provides the functions of a drive end block and a media end block together. The side of the tubular target opposite the compact end block can, for example, project freely (i.e., hang freely), which is referred to as a cantilever configuration. The compact end block can be mounted in the cantilever configuration on a side wall of the vacuum chamber, through which the rotational axis of the tubular target extends. The side of the tubular target opposite the compact end block can, however, also be supported by means of a bearing block (illustratively as a counter bearing), which is referred to as a bearing block configuration. The bearing block can also be provided by means of a passive end block, i.e., an end block which exchanges neither energy nor material with the tubular target, but only supports it.

[0070] In the case of a disk target that does not require rotation, the support device may comprise a rigid frame that holds the disk target. The disk target may, for example, comprise one or more disks (e.g., tiles), with multiple disks held side by side.

[0071] The storage device can generally (e.g. in the case of a tubular target and a plate target) have a carrier (also referred to as a magnet carrier) which is designed to hold the magnet system. The magnet carrier can, for example, be hollow (e.g. comprising a tube) and be fluidly coupled at its end to an end block which holds the magnet carrier (e.g. with its fluid line), so that the end block can exchange the cooling fluid with the end block. On the side opposite the end block, the tube can, for example, be closed at the end and have a lateral opening there through which the cooling fluid can pass. The magnet carrier can be round or polygonal, e.g. comprising a round tube or an angled tube. The magnet carrier and / or the magnet system can have a length (extension along the axis of rotation) in a range from approximately 1 m to approximately 6 m, e.g. in a range from approximately 2 m to approximately 5 m.

[0072] According to various embodiments, the vacuum chamber can be provided by means of a chamber housing in which one or more chambers can be provided. The chamber housing can, for example, be coupled to a pump arrangement, e.g. a vacuum pump arrangement, (e.g., in a gas-conducting manner) to provide a negative pressure or a vacuum (vacuum chamber housing) and can be designed so stably that it withstands the effects of air pressure in the pumped-out state. The pump arrangement (comprising at least one vacuum pump, e.g., a high-vacuum pump, e.g., a turbomolecular pump) can make it possible to pump out part of the gas from the interior of the processing chamber, e.g., from the processing space. Accordingly, one or more vacuum chambers can be provided in one chamber housing. In other words, the chamber housing can be designed as a vacuum chamber housing.a coating chamber can be set up as a vacuum chamber.

[0073] A drive device can be understood herein as a converter which is designed to convert electrical energy into mechanical energy. A drive device can, for example, have an electric motor (e.g. with electrical coils). A drive device can, for example, have a compressor and a reciprocating piston coupled thereto. A drive device can, for example, have one or more than one piezo element. For example, the drive device can be designed to output the mechanical energy by means of a torque or a rotational movement. According to various embodiments, the sealing of a gap can be understood as a first region (e.g. an atmospheric region, ie a region with atmospheric pressure) at or in the gap being or becoming sealed with respect to a second region (e.g. vacuum, ie with respect to the vacuum region).The first region and the second region can differ in their pressure, i.e. they have a pressure difference. By means of the sealing, a mass transfer between the first region and the second region can be disrupted or can be disturbed, e.g. at least partially suppressed. The vacuum region can be a region in which a vacuum is generated and / or can be generated. The vacuum region can, for example, have a plurality of vacuum sub-regions which are connected to one another by vacuum technology and can be sealed vacuum-tight from an exterior (e.g. an exterior of the vacuum chamber). For example, the vacuum region (or at least one vacuum sub-region) can be or can be defined at least partially by a chamber housing of the vacuum chamber, e.g. be delimited towards the outside.The vacuum chamber may, for example, comprise one or more chamber housings and / or may comprise at least one chamber housing with one or more housing compartments (so-called process compartments), wherein each chamber housing and / or each housing compartment may each define a vacuum sub-area.

[0074] Sealing a gap (e.g., against a vacuum or vacuum region) can be understood as reducing, limiting, or preventing mass transfer or mass exchange (e.g., gas exchange) through the gap by means of the sealing structure. For example, mass transfer into the vacuum can be reduced, limited, or prevented.

[0075] A form-fitting contour is understood here to be a contour that is designed to be connected, for example, in a form-fitting manner, to a corresponding form-fitting contour. Examples of form-fitting contours include: threads, eyelets, through holes, bayonet locks, grooves, springs, etc.

[0076] A stranded wire (also referred to as a stranded cable) is defined herein as an electrical cable comprising multiple filaments that are, for example, twisted and / or braided together. Each of the filaments can consist of a single wire, for example. The more filaments there are, the better the stranded wire can transmit an alternating current.

[0077] Fig.lA illustrates an end block 100 according to various embodiments (preferably according to Example 2) in a schematic side view or cross-sectional view, wherein the reference direction 101 and a direction 105 perpendicular thereto (also referred to as transverse direction 105), which spans a plane 105 (also referred to as reference plane 105) perpendicular to the reference direction 101, are shown.

[0078] An exemplary implementation of the housing 102 of the end block 100 (also referred to as end block housing 102) has two opposing openings 102a, 112a, each opening 102a, 112a opening into the receiving space 102a. In other words, the receiving space 102a is open (also referred to as exposed in this context) on the first side 100a and the second side 100b of the end block housing 102. Alternatively or additionally, the end block housing 102 has a housing base 102s and a (e.g., separate) bearing base 102s. The housing base 102s can, for example, be configured to be mounted on a chamber wall of a chamber housing. The bearing base 102s has the receiving space 102a.

[0079] The or another exemplary implementation of the end block housing 102 (e.g., the housing base 102s) has one or more than one connection terminal 112, each connection terminal being configured to exchange a medium associated with the connection terminal, at least with one or more than one line connected to the connection terminal. Examples of the medium include: electrical power, torque, liquid, gas. Fig. 1B illustrates the end block housing insert 180 in the assembled state 100a in an end block 100 according to various embodiments 150 (preferably according to Example 1 or Example 2) in a schematic side view or cross-sectional view, wherein the end block housing insert 180 is inserted into the receiving space. As described above, the end block housing insert 180 can also be provided individually, e.g., separately from the end block housing.

[0080] An exemplary implementation of the pivot bearing 104 comprises one or more than one rolling bearing by means of which the rotation axis 111 is provided.

[0081] An exemplary implementation of the mounting base 106 is tubular (preferably according to Example 15). Alternatively or additionally, the mounting base 106 has a cavity 106h (preferably according to Example 3Example 2) that is open, for example, on the first side 100a and / or on the second side 100b of the housing 102.

[0082] An exemplary implementation of the sliding contact 108 (preferably according to Example 7) comprises or consists of a sliding material. Examples of the sliding material include copper, graphite, and / or brass. Alternatively or additionally, the sliding contact 108 is configured to physically contact an annular surface portion 106f of the mounting base 106 (also referred to as sliding surface 106f).

[0083] With regard to the sliding surface 106f, reference is made herein to an exemplary implementation thereof, which faces the second side (also referred to as a back-contacting configuration), e.g., is arranged on the front side of the mounting base 106 (then also referred to as the front side surface) (also referred to as a front-contacting configuration). In this regard, it can be understood that the sliding surface 106f can be arranged on a different portion of the mounting base 106, for example, a portion of the mounting base 106 facing the first side 100a.

[0084] During operation (e.g., in the back-contacting configuration), the sliding surface 106f and / or during operation may be exposed, for example, to a cooling fluid (e.g., comprising or consisting of water). The cooling fluid may, for example, be supplied to the fluid line 108, which is preferably configured to supply the cooling fluid to the target (not shown).

[0085] An exemplary implementation of the fluid line 110 (preferably according to example 1) is penetrated by a cavity 110h along the rotation axis 111 and / or is fluidly coupled to the connection terminal 112, e.g., to a fluid connection of the connection terminal 112. Alternatively or additionally, the fluidly coupled coupling between the fluid line 110 and the connection terminal 112 is at least partially implemented by means of the receiving space 102a, e.g., guided through the receiving space 102a.

[0086] An exemplary implementation of the end block cover 114 (preferably according to Example 1 or Example 8) is positively connected to the fluid line 110. Alternatively or additionally, the fluid-conducting coupling between the fluid line 110 and the connection terminal 112 is implemented at least partially by means of the end block cover 114, e.g., passed through the end block cover 114. For this purpose, the end block cover 114 can have one or more channels (also referred to as fluid channels), by means of which the cooling fluid can be exchanged with the receiving space and / or with the fluid line during operation.

[0087] As shown, the sliding contact is located close to the cover and has a large outer diameter, which facilitates assembly and electrical contacting of the mounting base.

[0088] Fig. 2A illustrates the end block housing insert 180 in the assembled state 200a in an end block 100 according to various embodiments 200a (preferably according to Example 1 or Example 2) in a schematic side view or cross-sectional view. Shown is the optional target coupling 204 (preferably according to Example 18), which is connected to an end portion of the mounting base 106 facing the first side 100a. For this purpose, an exemplary implementation of the end portion of the mounting base 106 can have a positive-locking contour to which the target coupling 204 can be connected. For example, the positive-locking contour is provided by means of a threaded bore.

[0089] An exemplary implementation of the sliding contact 108 includes a ring-shaped sliding contact made of brass, one or more cables 1081, and a holding device consisting of a plurality of springs 108f, by means of which the sliding contact 108 is pressed against the sliding surface 106f. If the sliding surface faces the end block cover 114, the plurality of springs 108f can impart a force between the cover 114 and the sliding contact 108, by means of which the sliding contact 108 is pressed against the sliding surface 106f.

[0090] The sliding contact 108, which is ring-shaped and / or made of brass, is an exemplary implementation. It should be understood that the sliding contact 108 may also have a different chemical composition and / or geometry. For example, the sliding contact 108 may be a single piece, but this need not necessarily be the case. This applies analogously to the holding device consisting of multiple springs 108f.

[0091] An exemplary implementation of the one or more cables 1081 (e.g., stranded cable) may electrically couple the sliding contact 108 to the end block cover 114, may have multiple filaments (e.g., in the form of a stranded wire), and / or may be made of copper. In this case, the end block cover 114 may provide part of the electrical coupling between the sliding contact 108 and the connection terminal 112 (e.g., its electrical connection).

[0092] An exemplary implementation of the contact force is aligned parallel to the rotation axis 111. This improves symmetry.

[0093] To simplify assembly, the fluid line 110 may include one or more projections as a movement limiter 206 extending away from the rotation axis 111. The movement limiter 206 may be provided, for example, by means of a bolt or screw inserted into the fluid line 110. The projection may be configured to limit a movement of the sliding contact 108 induced by the contact force.

[0094] An exemplary assembly of the sliding contact involves inserting the fluid line 110 into the sliding contact 108 (e.g., its through-opening) and bringing it into contact with the plurality of springs 108f, moving the sliding contact 108 past a threaded bore of the fluid line 110, for example, against the contact force toward the cover 114; and screwing a screw into the threaded bore, which blocks the return movement of the sliding contact 108 driven by the contact force. This can be understood as an exemplary implementation, and the description thereof applies analogously to another implementation of the movement limitation. This applies analogously to the sliding contact 108, which, for example, can also have a groove to allow movement past the movement limiter (for example, analogous to a bayonet lock).

[0095] In the assembled state, the end block 100 may further comprise one or more seals 202a, 202b, for example, two seals, between which the pivot bearing 104 is arranged. This prevents the pivot bearing 104 from being exposed to the cooling fluid and / or the vacuum, thus increasing its service life. Generally, a gap 102s may be formed between the mounting base and a surface defining the receiving space 102a, in which the one or more seals 202a, 202b are arranged.

[0096] Fig. 2B illustrates the vacuum arrangement 200b according to various embodiments (preferably according to Example 19) in a schematic side view or cross-sectional view. The end block 100 can be arranged within the vacuum chamber 802, by means of which a target 252 can be or can be mounted rotatably about the rotation axis 111. The target 252 can be or can be coupled, for example, to the target coupling 204.

[0097] Furthermore, a transport system 254 (e.g., comprising a plurality of rollers) may be arranged in the vacuum chamber 802, which is configured to transport a substrate within the vacuum chamber 802, e.g., through the vacuum chamber 802.

[0098] The drive device can, for example, be arranged outside the vacuum chamber 802 and be configured to generate a torque that can be transmitted to the target 252 by means of the mounting base. Alternatively or additionally, a magnet system can be arranged within the target 252, which is held by the fluid line, e.g., stationary relative to the vacuum chamber 802.

[0099] The target 252 can be held, for example, in a cantilever configuration or in a bearing block configuration, e.g. by means of a counter bearing 1001.

[0100] Fig. 3 illustrates a method 300 according to various embodiments (preferably according to Example 24) in a schematic flow diagram. The rotational movement 301 of the mounting base can be effected by means of the torque from the drive device. Alternatively or additionally, the rotational movement can be transmitted to the target (if present) via the mounting base.

[0101] Furthermore, cooling liquid can be introduced into the target, e.g. by means of the fluid line arranged within the mounting base, when the target is set in rotation and / or is exposed to a vacuum.

[0102] Fig.4A illustrates the end block housing insert 180 in the assembled state 400a in an end block 100 according to various embodiments 400a (preferably according to Example 1 or Example 2) in a schematic side view or cross-sectional view, wherein several geometric sizes are shown, including, for example, dimensions and distances, of which:

[0103] - "Da" is the outer diameter of the sliding contact;

[0104] - "Di" is the outer diameter of the sliding contact through-hole, also called the inner diameter of the sliding contact;

[0105] - "Aa" is the distance of the sliding contact from the cover along the reference direction 101;

[0106] - "Ar" is the distance of the sliding contact from the fluid line along the transverse direction 105 (i.e., transverse to the reference direction 101);

[0107] - "L" is the extension of the sliding contact along the reference direction 101;

[0108] - "D1" is the outer diameter of the fluid line along the transverse direction 105;

[0109] - "D2" is the distance of the walls between the fluid line and the mounting base along the transverse direction 105;

[0110] - "D3" is the inner diameter of the mounting base along the transverse direction 105; and

[0111] - "D4" is the outer diameter of the mounting base along the transverse direction 105.

[0112] What has been described for reference to the reference direction 101 can apply analogously to the rotation axis 111.

[0113] One or more of the following relations may be fulfilled to simplify assembly and / or facilitate electrical contact.

[0114] Da - Di > D4 - D3 and / or Da - Di > D2;

[0115] Da > D4 and / or Da > D3;

[0116] Da > Di > D1 and / or D4 > D3 > D1;

[0117] Aa < L and / or Aa < Di and / or Aa < Da and / or Aa < D4;

[0118] Ar < L and / or Ar < Di and / or Ar < Da and / or Ar < D4. Fig. 4B illustrates the end block housing insert 180 in the assembled state 400b in an end block 100 according to various embodiments 400a (preferably according to Example 1 or Example 2) in a schematic side view or cross-sectional view, according to which the grinding body 108 has a recess 404 (e.g., also provided as a chamfer or groove) into which the mounting base 108 engages; and / or in which the grinding body 108 protrudes from the mounting base 106 along the transverse direction 105.

[0119] Fig. 4C illustrates the end block housing insert 180 in the assembled state 400b in an end block 100 according to various embodiments 400c (preferably according to Example 1 or Example 2) in a schematic side view or cross-sectional view, according to which the mounting base 106 has a projection that projects into the cavity of the mounting base 106 and against which the sliding body 108 rests (also referred to as an internally contacting configuration). The sliding body 108 can be electrically conductively coupled to the fluid line 110, e.g., by means of a stranded wire extending longitudinally in the direction 101 and / or by means of the spring-elastic holding device (not shown). As can be seen, the contact area is larger in the end-contacting configuration (preferably according to Example 15) compared to the internally contacting configuration according to embodiments 400c, which promotes the flow of current.Furthermore, the front-contacting configuration facilitates installation.

[0120] In the following, additional modifications are explained as exemplary implementations, which refer to those described above and shown in the figures.

[0121] To reduce the skin effect at high frequencies, a plurality of separate cables 1081 can be used to transmit electrical power to the sliding contact 108. The cables 1081 consist of stranded wires (e.g., as a braid). Alternatively or additionally, each of the cables can have a coating that improves the electrical conductivity of the cable, e.g., a coating of copper, silver, and / or aluminum. Alternatively or additionally, each of the cables 1081 (e.g., the stranded wire) can be hollow (also referred to as a waveguide), for example, by arranging the filaments around a hollow core or by using only a tube as the cable 1081. This further improves the power transmission.

[0122] For example, each cable 1081 can have one or more silver-plated copper wires (e.g., as a filament). The silver coating can be very thin, since a high-frequency electric current flows primarily at the surface and is thus transmitted via the silver coating. Particularly high-frequency electric current can be transmitted via a cable 1081 in the form of a waveguide (which lacks an inner conductor). The waveguide can, for example, be provided as a rectangular tube with silver on the inside.

[0123] For very powerful long- and medium-wave transmitters, large coils can be constructed with silver-plated copper tubes instead of thick silver-plated copper wires. However, due to the skin effect, the ohmic losses can be so high, despite abundant silver plating, that cooling these tubes with oil flowing through them is beneficial.

Claims

Patent claims 1. End block housing insert (180), comprising: • a cover (114) having a sealing surface (114d); • an electrical sliding contact (108) which is penetrated along one direction by a through opening (108o); • a fluid line (110) connected to the cover (114) and extending away from the cover (114) along the direction through the through-opening (108o); • wherein the sliding contact (108) is arranged along the direction at a distance from the cover (114) which is smaller than an extension of the through opening (108o).

2. End block housing insert (180) according to claim 1, wherein an extension of the sliding contact (108) transverse to the direction is greater than the distance of the sliding contact from the cover (114).

3. End block housing insert (180) according to claim 1 or 2, wherein the sliding contact (108) is movably mounted relative to the cover (114) such that a restoring force counteracts a movement of the sliding contact towards the cover (114) and / or a movement of the sliding contact (108) away from the cover (114) is limited.

4. The end block housing insert (180) of claim 3, further comprising a resilient retaining device configured to provide the restoring force and supported on the cover (114).

5. The end block housing insert (180) of any one of claims 3 to 4, further comprising a stop projecting from the fluid conduit and configured to limit movement of the sliding contact (108) away from the cover (114).

6. The end block housing insert (180) of any one of claims 1 to 5, wherein the stop is adjacent to and extends away from the fluid conduit.

7. End block housing insert (180) according to one of claims 1 to 6, wherein the sliding contact has a lower mechanical hardness than the cover and / or the fluid line.

8. End block housing insert (180) according to one of claims 1 to 7, wherein the sealing surface extends around a region of the cover adjacent to which the fluid line is adjacent.

9. End block housing insert (180) according to one of claims 1 to 8, wherein the cover and the fluid line are rigidly coupled together. 10 End block housing insert (180) according to one of claims 1 to 9, wherein the sliding contact has a surface of rotation facing away from the cover.

11. End block (100), comprising: • a housing (102) having a receiving space; • a rotary bearing (104) arranged in the receiving space and providing a rotation axis (111) along the direction, wherein the receiving space along the direction is exposed on a first side of the housing (102); • a mounting base (106) rotatably mounted in the receiving space by means of the pivot bearing (104); • the end block housing insert according to one of claims 1 to 10, the sliding contact of which is configured to electrically contact a surface section of the mounting base (106) facing away from the first side.

12. End block (100) according to claim 11, wherein the sliding contact (108) extends along a closed path around the axis of rotation (111) and / or has a surface of revolution.

13. End block (100) according to one of claims 11 or 12, wherein the sliding contact (108) is arranged between the rotary bearing (104) and a second side of the housing (102) opposite the first side.

14. End block (100) according to one of claims 11 to 13, wherein the surface portion is an end face of the mounting base.

15. The end block (100) according to any one of claims 11 to 14, further comprising a seal for sealing a gap between the housing (102) and the mounting base, the seal being arranged between the pivot bearing (104) and the sliding contact (108).

16. A vacuum arrangement comprising a vacuum chamber and the end block (100) according to any one of claims 11 to 15 arranged within the vacuum chamber.

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