Furnace tube sealing structure and furnace tube

Abstract

Disclosed in the present invention are a furnace tube sealing structure and a furnace tube. An upper furnace cover is sealedly mounted at the upper end of an outer furnace tube and an inner furnace tube; a lower furnace door is sealedly mounted at the lower end of the outer furnace tube; a magnetic fluid sealing assembly is sealedly connected to a center hole of the lower furnace door; one end of a transmission shaft of the magnetic fluid sealing assembly is located inside a closed cavity formed by sealing of the furnace tube, and the other end of the transmission shaft is located outside the closed cavity; and a transmission component, which is located in the closed cavity and drives a carrier to rotate, of a rotating apparatus is connected to the transmission shaft of the magnetic fluid sealing assembly. According to the present invention, the carrier inside the furnace tube can be driven to rotate by means of the rotating apparatus, and the furnace tube is sealed by means of the magnetic fluid sealing assembly, so that a rotating power source of the rotating apparatus can be externally mounted and transmitted by means of the magnetic fluid sealing assembly, and meanwhile, the vacuum environment within the furnace tube can be guaranteed.

Description

Furnace tube sealing structure and furnace tube TECHNICAL FIELD

[0001] The present application relates to the technical field of solar energy, in particular to a furnace tube sealing structure and a furnace tube. BACKGROUND

[0002] The current diffusion of the photovoltaic industry, oxidation, annealing, doping, PECVD, LPCVD and other processes produce two types of vertical furnace and horizontal furnace. The structure of the two types needs to load the silicon wafer in a specific carrier and transmit it into the reaction cavity for process. Through the specific reaction gas, the specific film coating, diffusion, oxidation and thin film deposition process of the silicon wafer are realized. In the existing two-layer furnace tube design, the bottom and the top wall are used to seal the two ends of the double-layer furnace tube to form a straight-through cavity. The wafer to be processed is placed in the straight-through cavity, and the heating layer on the double-layer furnace tube is used to heat the straight-through cavity or the furnace body is set as an inner and outer furnace body, and the inner furnace cavity is in a closed form.

[0003] As in the prior art, the bearing structure of the carrier in the furnace tube is fixed and cannot be adjusted in position and angle. If a rotating device needs to be set in the sealed chamber of the furnace tube to adjust the position of the carrier, since the temperature in the furnace is high, the power source of the rotating device cannot be directly set in the furnace tube, so the transmission part needs to penetrate the sealed space of the furnace tube. How to ensure rotation while completing vacuum sealing is a problem to be solved. SUMMARY

[0004] The present application proposes a furnace tube sealing structure and a furnace tube to solve the technical problem of sealing the sealed space of the transmission device in the furnace tube in the prior art.

[0005] The technical scheme adopted by the present application is:

[0006] The present application proposes a furnace tube sealing structure, which comprises an outer furnace tube, an inner furnace tube, an upper furnace cover, a lower furnace door and a rotating device. The inner furnace tube is installed in the outer furnace tube. The sealing structure is that the upper furnace cover is sealingly installed at the upper end of the outer furnace tube and the inner furnace tube, the lower furnace door is sealingly installed at the lower end of the outer furnace tube, a magnetic fluid sealing assembly is sealingly connected at the center hole of the lower furnace door, one end of the transmission shaft of the magnetic fluid sealing assembly is located in the sealed chamber formed by the furnace tube sealing, the other end is located outside the sealed chamber, and the transmission part of the rotating device located in the sealed chamber drives the carrier to rotate and is connected with the transmission shaft of the magnetic fluid sealing assembly.

[0007] Further, an outer sealing flange is arranged on the outer wall of the upper end of the outer furnace tube, and an inner sealing flange is arranged on the inner wall of the inner furnace tube; the upper furnace cover covers the upper end faces of the outer furnace tube and the inner furnace tube, and the outer edge thereof is sealingly connected with the outer sealing flange, and the inner edge thereof is connected with the inner sealing flange; and the outer edge of the lower furnace door is sealingly connected with the lower end of the outer furnace tube.

[0008] The application further provides a furnace tube comprising the furnace tube sealing structure, wherein the lower end of the inner furnace tube is closed, and a distance is kept between the closed end and the lower furnace door; and the magnetic fluid sealing assembly is sealingly arranged on the lower side of the lower furnace door and covers the central hole of the lower furnace door.

[0009] Further, at least one inner ring permanent magnet is arranged in the inner ring part of the magnetic fluid sealing assembly, two inner pole shoes of the inner ring permanent magnet surround the inner wall surface of the transmission shaft, and an inner annular groove corresponding to the inner pole shoes is arranged on the inner wall surface of the transmission shaft, and magnetic fluid is arranged in the inner annular groove; at least one outer ring permanent magnet is arranged in the outer ring part of the magnetic fluid sealing assembly, two outer pole shoes of the outer ring permanent magnet surround the outer wall surface of the transmission shaft, and an outer annular groove corresponding to the outer pole shoes is arranged on the outer wall surface of the transmission shaft, and magnetic fluid is arranged in the outer annular groove.

[0010] The application further provides a furnace tube comprising the furnace tube sealing structure, wherein the lower end of the inner furnace tube is closed, and a distance is kept between the closed end and the lower furnace door; and the magnetic fluid sealing assembly is sealingly arranged on the lower side of the lower furnace door and covers the central hole of the lower furnace door.

[0011] Further, the rotating device comprises a boat holder base provided in the sealed chamber of the furnace tube and provided with a plurality of carrier placing positions, and the boat holder base is connected with the transmission shaft of the magnetic fluid sealing assembly; and a rotating power source is arranged outside the sealed chamber and connected with the transmission shaft to drive the boat holder base to rotate.

[0012] The rotating power source and the transmission shaft are connected through gear transmission or belt wheel transmission.

[0013] In the first embodiment, the boat holder base comprises:

[0014] A rotating base is arranged at the bottom of the sealed chamber.

[0015] A hanging plate is arranged on the rotating base, and the hanging plate is provided with a plurality of carrier placing positions for hanging the carriers.

[0016] In the first embodiment, the boat support base comprises:

[0017] a rotating base having a plurality of said carrier placement sites for the carrier boat to pass through or be placed on;

[0018] a plurality of pairs of carriers, each pair of carriers being located at the two side edges of one carrier placement site and being foldably arranged on the rotating base;

[0019] when the carriers are switched to the folded state, the carrier can pass through the carrier placement site corresponding to the carriers from the bottom upwards; when the carriers are switched to the unfolded state, the carrier can be placed on the carriers.

[0020] Further, the upper furnace cover and the lower furnace door are outwardly convex to form a spherical protrusion at the outer end away from the sealed chamber.

[0021] Compared with the prior art, the present application has the following advantages:

[0022] 1. The carrier in the furnace pipe is placed on the boat support base that can rotate, so that the carrier can be adjusted in position and angle in the furnace, and when the reaction gas is introduced into the sealed chamber or the temperature difference is large, the gas field and the thermal field inside the sealed chamber are uniform, and the overall process yield is improved. At the same time, the bottom is sealed by a magnetic fluid sealing assembly, which can make the driving parts of the boat support base external, while ensuring that the sealed chamber through which the reaction gas passes remains sealed.

[0023] 2. The lower furnace door and the upper furnace cover are designed to be outwardly convex drum surfaces, which have better pressure bearing capacity and are less likely to deform.

[0024] 3. The lower furnace door is provided with a plurality of small furnace doors, which can be opened individually when loading and unloading the carrier, thereby avoiding the loss of heat in the furnace affecting the processing efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0026] Fig. 1 is a front view of the through furnace pipe in the embodiment of the present application;

[0027] Fig. 2 is an A-A sectional view of the through furnace pipe in the embodiment of the present application;

[0028] Fig. 3 is a front view of the non-through furnace pipe in the embodiment of the present application;

[0029] Fig. 4 is an A-A sectional view of the non-through furnace pipe in the embodiment of the present application;

[0030] Fig. 5 is a second perspective view of the through furnace tube according to the embodiment of the present application;

[0031] Fig. 6 is a front view of the second embodiment of the through furnace tube according to the present application;

[0032] Fig. 7 is a cross-sectional view of the second embodiment of the through furnace tube according to the present application;

[0033] Fig. 8 is a top view of the second embodiment of the through furnace tube according to the present application;

[0034] Fig. 9 is a first perspective view of the second embodiment of the through furnace tube according to the present application;

[0035] Fig. 10 is a second perspective view of the second embodiment of the through furnace tube according to the present application;

[0036] Fig. 11 is a perspective view of the lower furnace door according to the embodiment of the present application;

[0037] Fig. 12 is a structural view of the lower furnace door and the driving structure according to the embodiment of the present application;

[0038] Fig. 13 is a perspective view of the driving structure cooperating with the furnace cover according to the embodiment of the present application;

[0039] Fig. 14 is a structural view of the driving structure cooperating with the furnace cover according to the embodiment of the present application;

[0040] Fig. 15 is a structural view of the driving structure cooperating with the furnace tube according to the embodiment of the present application;

[0041] Fig. 16 is a front view of the first embodiment of the boat support base according to the present application;

[0042] Fig. 17 is a structural view of the second embodiment of the boat support base according to the present application;

[0043] Fig. 18 is a perspective view of the second embodiment of the boat support base according to the present application;

[0044] Fig. 19 is a front view of the heating source and the heat dissipating device cooperating with the furnace tube according to the embodiment of the present application;

[0045] Fig. 20 is a C-direction view of Fig. 19;

[0046] 1. furnace tube;

[0047] 11. outer furnace tube; 111. support flange; 112. outer sealing flange; 12. inner furnace tube; 121. inner sealing flange; 122. annular step; 123. annular heat insulation pad; 13. closed chamber;

[0048] 2. upper furnace cover;

[0049] 21, reinforcing rib; 22, lower layer plate; 23, inner layer plate; 24, outer layer plate;

[0050] 3, lower furnace door;

[0051] 31, furnace mouth; 311, first protrusion; 312, annular cavity;

[0052] 32, furnace cover; 321, second protrusion; 322, mounting plate; 323, first guide column; 324, weight-reducing hole;

[0053] 33, driving structure; 331, rotary driving device; 332, coupling; 333, rotating shaft; 334, rotating plate; 335, push-pull driving device; 336, mounting area; 337, second guide column; 338, first electrical interface; 339, second electrical interface; 340, connecting plate; 341, first partition plate; 342, second partition plate; 343, third partition plate; 344, first containing space; 345, second containing space;

[0054] 41, connector; 42, hanging seat; 81, top support; 82, bottom support;

[0055] 5, boat holder base; 50, carrier; 59, transmission shaft; 591, gear;

[0056] 51, rotating base; 52, fixing ring; 53, hanging plate; 54, hook hole;

[0057] 501, carrier placement position; 55, carrier; 551, carrier fixed part; 552, carrier movable part; 553, rotating shaft;

[0058] 6, magnetic fluid sealing assembly;

[0059] 61, outer ring part; 62, inner ring part; 63, rotating power source; 64, housing; 65, sealing ring;

[0060] 71, external heating source; 72, internal heating source; 73, heat dissipation device; 74, water cooling interface. DETAILED DESCRIPTION

[0061] In order to make the technical problems to be solved by the present application, technical solutions and beneficial effects more clearly, the present application will be further described in detail below in combination with the drawings and examples. It should be understood that the specific examples described herein are only used to explain the present application, and are not used to limit the present application.

[0062] The principles and structures of the present application will be described in detail below in combination with the drawings and examples.

[0063] The existing vertical furnace generally has inner and outer double-layer furnace pipes, and the bearing structure of the carrier in the furnace pipe is fixed and cannot be adjusted in position and angle. If a rotating device needs to be arranged in the sealed chamber of the furnace pipe to adjust the position of the carrier, since the temperature in the furnace is generally as high as 500 DEG C or higher, the ordinary motor cannot work normally, and since the power source of the rotating device cannot be directly arranged in the furnace pipe, the transmission part of the rotating device needs to penetrate the sealed space of the furnace pipe, and therefore it is an urgent problem to be solved to ensure the rotation and at the same time complete the vacuum sealing.

[0064] To this end, as shown in FIGS. 1 to 4, the present application provides a furnace pipe sealing structure, which comprises an outer furnace pipe 11, an inner furnace pipe 12, an upper furnace cover 2, a lower furnace door 3 and a rotating device; the inner and outer furnace pipes are in the shape of a circular pipe, wherein the upper and lower ends of the outer furnace pipe 11 are open, and the inner furnace pipe 12 is arranged inside; after the inner furnace pipe 12 is arranged, a containing space is formed between the outer wall of the inner furnace pipe 12 and the inner wall of the outer furnace pipe; the specific sealing structure is that the upper furnace cover 2 and the lower furnace door 3 are respectively arranged at the upper end and the lower end of the outer furnace pipe 11 and the inner furnace pipe 12, wherein the upper furnace cover is sealingly arranged at the upper end of the outer furnace pipe and the inner furnace pipe, so as to seal the upper end of the containing space between the outer furnace pipe and the inner furnace pipe; the lower furnace door is sealingly arranged at the lower end of the outer furnace pipe, the outer edge of the lower furnace door is sealingly arranged at the lower end of the outer furnace pipe, and the central part of the lower furnace door is provided with a central hole, the outer side of the central hole is provided with a magnetic fluid sealing assembly, one end of the transmission shaft of the magnetic fluid sealing assembly is located in the sealed chamber formed by the furnace pipe sealing, and the other end is located outside the sealed chamber; the transmission part of the rotating device located in the sealed chamber drives the carrier to rotate, and one end of the transmission shaft of the magnetic fluid sealing assembly is connected with the transmission part of the rotating device, so that the lower end of the sealed chamber is sealed, and at the same time the transmission part of the rotating device can pass through the magnetic fluid sealing assembly to transmit energy.

[0065] The magnetic fluid sealing assembly is used to sealingly rotate the transmission shaft of the magnetic fluid, and the sealing effect is good; the magnetic fluid sealing can form a uniform magnetic field between the high-speed rotating transmission shaft and the static shell, effectively seal the fluid between the transmission shaft and the shell, avoid leakage, and ensure the safety and reliability of the equipment operation.

[0066] At the same time, since the magnetic fluid sealing does not have a dynamic part of the traditional mechanical sealing, wear and tear and the pollutants such as dust and impurities generated by wear and tear do not occur. The energy consumption caused by friction and wear can be reduced, the operation cost of the equipment can be reduced, and the operation efficiency of the equipment can be improved.

[0067] Moreover, the corrosion resistance is good, and no electrochemical reaction between the metal materials occurs, so the magnetic fluid sealing assembly can operate in an acid, alkali, salt and other harsh environment, and the sealing property of the magnetic fluid sealing assembly is not affected when high-temperature chemical reactions are carried out in the furnace body.

[0068] The specific embodiment of the sealing of the upper end of the furnace pipe is as follows:

[0069] The structure of the upper furnace cover 2 and the sealing connection are as follows:

[0070] The outer end of the upper furnace cover 2 away from the sealed chamber 13 is outwardly convex to form a spherical protrusion. Since the sealed chamber 13 needs to be vacuumized, the outwardly convex spherical protrusion of the outer end of the upper furnace cover can withstand greater pressure and prevent the internal vacuumization from being deformed by being sucked in.

[0071] The inside of the upper furnace cover 2 is also provided with a lower layer plate 22, an outer layer plate 24 and an inner layer plate 23 which cooperate with the inner side of the outer end to form a cavity. The lower layer plate 22, the outer layer plate 24 and the inner layer plate 23 are annular and form an annular cavity on the inner side of the outer end of the upper furnace cover 2. A plurality of reinforcing ribs 21 are arranged in the annular cavity, specifically between the upper and lower inner walls of the cavity. The reinforcing ribs 21 are plate-shaped and have a plurality of through holes on the plate surface. The reinforcing ribs 21 are annularly and spacedly arranged in the annular cavity.

[0072] Preferably, the lower layer plate 22, the outer layer plate 24 and the inner layer plate 23 are hollow layer plates. The inside of the hollow layer plates can be used as a water cooling channel or a water cooling component such as a water cooling pipe is installed therein, so as to avoid the heat from the upper furnace cover affecting the processing.

[0073] As shown in FIGS. 2 and 4, the sealing mode of the top of the furnace pipe is as follows:

[0074] The outer wall of the upper end of the outer furnace pipe 11 is provided with an outer sealing flange 112 (the outer sealing flange is located above the support flange), and the inner wall of the inner furnace pipe 12 is provided with an inner sealing flange 121 (the inner sealing flange can also be used as a connecting piece, that is, it is used for sealing connection of the upper furnace cover and also used for hanging connection); the upper furnace cover 2 covers the upper end surface of the outer furnace pipe and the inner furnace pipe, and the center of the upper furnace cover 2 is provided with a center hole, that is, the whole is annular. The outer edge of the upper furnace cover 2 is buckled to the upper end surface of the outer furnace pipe 11 and is sealingly connected with the outer sealing flange 112 of the outer furnace pipe 11, and the inner edge is buckled to the upper end of the inner furnace pipe 12 and is sealingly connected with the inner sealing flange 121 of the inner furnace pipe 12.

[0075] The sealing connection mode of the inner and outer sealing flanges and the upper furnace cover is a conventional sealing means in the prior art, for example, screws, gaskets, sealing rings and the like are also needed, and those skilled in the art can completely reproduce it, and no repeated description is made in the present application.

[0076] As shown in FIG. 1, 2, the application also proposes a through furnace tube which is penetrated at both upper and lower ends of the inner furnace tube, comprising the furnace tube sealing structure, the upper and lower ends of the inner furnace tube 12 are opened, the inner side of the inner furnace tube 12 is provided with an inner heating source 72, the upper end opening is provided with a connecting piece for hoisting connection, the lower end opening is provided with a support table, the support table can be installed with a support base, so that the inner furnace tube 12 can be hoisted downward from the top of the outer furnace tube 11 and installed into the outer furnace tube 11, or inserted upward from the bottom of the outer furnace tube 11 and installed into the outer furnace tube 11; and the inner side of the inner furnace tube 12 is provided with an inner heating source 72, the outer side of the outer furnace tube 11 is provided with an outer heating source 71, the inner and outer heating sources can heat the closed chamber 13 of the furnace tube 1 through the tube wall of the inner and outer furnace tubes; the rotating device is provided with a plurality of carrier placing positions corresponding to the closed chamber, the rotating device drives the carrier on the carrier placing position to adjust the position and angle in the closed chamber when rotating, so that the silicon wafer on the carrier is heated uniformly.

[0077] The application sets the through inner furnace tube, the top end opening of the inner furnace tube is provided with a connecting piece, and the lower end opening is provided with a support table which can be installed with a support base, so that the installation of the inner furnace tube can be completed by hoisting from the top or inserting from the bottom of the vertical furnace, which is more convenient, and the carrier in the furnace tube is placed on the rotating device which can rotate, so that the carrier can adjust the position and angle in the furnace, the gas field and heat field in the closed chamber are uniform when the reaction gas is introduced or the temperature difference is raised, and the overall process yield is improved.

[0078] In a specific embodiment, as shown in FIG. 2, the inner wall of the upper end of the inner furnace tube 12 is provided with a support flange (which can be a subsequent inner sealing flange 121), the support flange is a connecting piece, and the inner furnace tube can adopt various hoisting fixing modes, of which two are exemplified as follows;

[0079] The first embodiment, as shown in FIG. 1 to 4, directly installs the connector 41 for hanging on the support flange (i.e. the inner sealing flange 121) through the screw connection mode, the connector 41 can be directly connected with the hoisting equipment, and the support part of the upper end of the inner heating source 72 is also provided with a screw hole, the connecting foot of the connector 41 is screwed with a nut to make the inner sealing flange 121 hung on the connecting foot of the connector 14, and the connecting foot is also screwed with the support of the upper end of the inner heating source 72, so as to ensure that the whole inner furnace tube 12 is stably hung;

[0080] The second embodiment, as shown in Figs. 6 to 10, the outer furnace tube 11 is provided with a support flange 111 near the upper end face of the outer wall, which is used to install the top support 81, the crossbeam of the top support 81 is suspended above the inner furnace tube 12, and the crossbeam is connected with the support flange (i.e. the inner sealing flange 121) of the inner furnace tube 12 through the hanging seat 42, so that the upper end of the inner furnace tube 12 is directly connected with the top support 81 of the furnace tube 1 through the hanging seat 42, i.e. the inner furnace tube 12 is hung by the flange of the furnace tube 1 itself.

[0081] Specifically, the outer furnace tube 11 is also provided with a support flange 111 near the lower end face of the outer wall, which is used to install the bottom support 82, the bottom support 82 can be used to assist in fixing the peripheral components of the furnace tube, such as water cooling pipes, etc., and can also play a role in supporting the entire furnace tube.

[0082] In specific embodiments, the support platform of the lower end of the inner furnace tube 12 also has various setting modes, and two specific embodiments are taken as examples here;

[0083] The first embodiment, as shown in Fig. 2, the inner wall of the lower end of the inner furnace tube 12 is protruded with a ring-shaped step 122, and the lower side of the ring-shaped step 122 can be used as a support platform to install or connect a support base to enable the bottom of the inner furnace tube to be stably placed.

[0084] The second embodiment, a support flange (not shown in the figure) is installed on the inner wall of the inner furnace tube 12 near the lower end, and the support flange is used to connect the support base to enable the bottom of the inner furnace tube to be supported.

[0085] In further embodiments of the above two embodiments, as shown in Fig. 2, the ring-shaped step or the support flange can be installed with a ring-shaped heat insulation pad 123, which can be used as a support base, and the lower end of the ring-shaped heat insulation pad 123 exceeds the lower end of the inner furnace tube 12, which can play a role in both support and heat insulation.

[0086] Specifically, the ring-shaped heat insulation pad 123 is connected and fixed with the ring-shaped step or the support flange of the inner furnace tube 12 in a sealed connection mode, i.e. the connection between the ring-shaped heat insulation pad 123 and the inner furnace tube is in a sealed state.

[0087] In specific embodiments, as shown in Fig. 2, the central holes are provided in the middle of the upper furnace cover 2 and the lower furnace door 3, the central hole of the upper furnace cover can penetrate the upper end of the inner furnace tube 12 or the hanging part (such as a connector and a hanging seat) connected with the upper end of the inner furnace tube 12; and the central hole of the lower furnace door 3 can penetrate the lower end of the inner furnace tube 12.

[0088] Specifically, as shown in Fig. 2, the structure and sealed connection of the upper furnace cover 2 are as follows:

[0089] The outer end of the upper furnace cover 2 away from the sealed chamber 13 is outwardly convex to form a spherical convex. Since the sealed chamber 13 needs to be vacuumized, the outer end of the upper furnace cover is set to be a spherical convex upwardly convex to withstand greater pressure and prevent the internal vacuumization from being deformed by being sucked.

[0090] The inside of the upper furnace cover 2 is further provided with a lower layer plate 22, an outer layer plate 24 and an inner layer plate 23 cooperating with the inner side of the outer end to form a cavity. The lower layer plate 22, the outer layer plate 24 and the inner layer plate 23 are annular and form an annular cavity on the inner side of the outer end of the upper furnace cover 2. A plurality of reinforcing ribs 21 are arranged in the annular cavity, specifically between the upper and lower inner walls of the cavity. The reinforcing ribs 21 are plate-shaped and have a plurality of through holes on the plate surface. The reinforcing ribs 21 are annularly and spacedly arranged in the annular cavity.

[0091] Preferably, the lower layer plate 22, the outer layer plate 24 and the inner layer plate 23 are hollow layer plates. The inside of the hollow layer plates can be used as a water cooling channel or a water cooling component such as a water cooling pipe is installed therein to avoid heat dissipation from the upper furnace cover affecting the processing.

[0092] As shown in FIG. 2, the sealing mode of the top of the furnace pipe is specifically implemented as follows:

[0093] The outer wall of the upper end of the outer furnace pipe 11 is provided with an outer sealing flange 112 (the outer sealing flange is located above the support flange), and the inner wall of the inner furnace pipe 12 is provided with an inner sealing flange 121 (the inner sealing flange can also be used as a connecting piece, that is, it is used for sealing and connecting the upper furnace cover and also used for hanging connection); the upper furnace cover 2 covers the upper end faces of the outer furnace pipe and the inner furnace pipe, and a central hole is arranged in the middle of the upper furnace cover 2, that is, the whole is annular. The outer edge of the upper furnace cover 2 buckles the upper end face of the outer furnace pipe 11 and is sealingly connected with the outer sealing flange 112 of the outer furnace pipe 11, and the inner edge buckles the upper end of the inner furnace pipe 12 and is sealingly connected with the inner sealing flange 121 of the inner furnace pipe 12.

[0094] It should be noted that the inner sealing flange is also used as a support flange, that is, the inner sealing flange is a connecting piece. The part of the inner sealing flange close to the inner furnace pipe wall is sealingly connected with the upper furnace cover, and the part of the inner sealing flange close to the center of the inner furnace pipe can pass through the connecting pin of the connector or the connecting pin of the hoisting seat.

[0095] The sealing connection mode of the inner and outer sealing flanges and the upper furnace cover is a conventional sealing means in the prior art, for example, screws, gaskets, sealing rings and the like are also needed, and those skilled in the art can completely reproduce it, and no repeated description is made in the present application.

[0096] As shown in FIGS. 2 and 16, in a specific embodiment, a magnetic fluid sealing assembly is sealingly connected at the central hole of the lower furnace door for rotary sealing of the rotating device.

[0097] Further, the rotating sealing rotating device specifically comprises: a boat support base and a rotating power source. The boat support base is arranged in the closed chamber of the furnace tube and is provided with a plurality of carrier placing positions. The inner edge of the bottom of the boat support base is protruded downward by a circle and is connected with the transmission shaft of the magnetic fluid sealing assembly, so that the boat support base is rotated when the rotating shaft is rotated. The rotating power source is directly connected with the lower end of the transmission shaft of the magnetic fluid sealing assembly outside the closed chamber of the furnace tube. The power source is provided outside the furnace tube, so that the normal operation of the rotating power source is avoided from being affected by the high temperature in the furnace. That is, because the temperature in the furnace tube is about 500 or above, the motor as the rotating power source cannot work normally at the temperature. The rotating power source is arranged outside, so that the normal operation of the rotating device is ensured.

[0098] By arranging the rotatable boat support base 5, the position and angle of the carrier can be adjusted. When the reaction gas is introduced into the closed chamber or the temperature difference is large, the gas field and the heat field in the closed chamber are uniform, and the overall process yield is improved.

[0099] Specifically, as shown in FIG. 2, the magnetic fluid sealing assembly 6 is arranged at the bottom of the furnace tube 1. The magnetic fluid sealing assembly 6 specifically comprises an annular outer ring part 61, an inner ring part 62 and a transmission shaft 59. The top surface of the outer ring part 61 is sealingly connected with the edge of the center hole of the lower furnace door 3. The first sealing ring 611 can be seen in the figure. The top surface of the inner ring part 62 is sealingly connected with the lower end surface of the annular heat insulation pad 123 of the inner furnace tube 12. The second sealing ring 621 can be seen in the figure. The gap between the inner ring part 62 and the outer ring part 61 of the magnetic fluid sealing assembly 6 is an annular rotating sealing space. The transmission shaft 59 penetrates the rotating sealing space of the magnetic fluid sealing assembly 6.

[0100] The inner side of the boat support base 5 surrounds the inner furnace tube 12 and is provided with a plurality of carrier placing positions 501. The rotating base 51 at the bottom is annular and penetrates the center hole of the lower furnace door. The lower part of the rotating base 51 is connected with the annular transmission shaft 59. The upper end of the transmission shaft 59 is connected with the bottom of the rotating base 51 and penetrates the rotating sealing space of the magnetic fluid sealing assembly 6. The lower end of the transmission shaft 59 is located outside the furnace tube and is provided with a gear or a belt wheel which is rotationally connected with the rotating power source. Thus, the rotating power source drives the whole boat support base 5 to rotate around the inner furnace tube 12 through the transmission shaft 59.

[0101] The gap between the inner wall surface of the transmission shaft 59 and the outer wall surface of the inner ring part 62 of the magnetic fluid sealing assembly is provided with magnetic fluid (not shown in the figure). Specifically, a plurality of annular grooves can be arranged on the inner wall surface of the transmission shaft 59 or a plurality of annular grooves can be arranged on the outer wall surface of the inner ring part of the magnetic fluid sealing assembly to place the magnetic fluid, so as to form a plurality of sealing rings in the gap between the inner wall surface of the transmission shaft 59 and the outer wall surface of the inner ring part 62 of the magnetic fluid sealing assembly 6.

[0102] The outer wall surface of the rotating shaft and the inner wall surface of the outer ring part of the magnetic fluid sealing assembly are also provided with magnetic fluid in the same way. The inner part of the outer ring part 61 and the inner ring part 62 is provided with a permanent magnet, and the magnetic pole serves as the inner wall of the rotating sealing space, so that the magnetic fluid can surround the transmission shaft 59, so that the magnetic fluid forms a plurality of sealing rings in the gap between the outer wall surface of the transmission shaft and the inner wall surface of the outer ring part of the magnetic fluid sealing assembly.

[0103] In a specific embodiment, at least one inner ring permanent magnet is arranged in the inner ring part of the magnetic fluid sealing assembly, and the two inner pole shoes of the inner ring permanent magnet surround the inner wall surface of the transmission shaft. The inner wall surface of the transmission shaft is provided with an inner annular groove corresponding to the inner pole shoes, and the inner annular groove is provided with magnetic fluid. After the magnetic field is generated, the magnetic fluid will form a plurality of inner sealing rings on the inner annular groove of the inner wall surface of the transmission shaft; at least one outer ring permanent magnet is arranged in the outer ring part of the magnetic fluid sealing assembly, and the two outer pole shoes of the outer ring permanent magnet surround the outer wall surface of the transmission shaft. The outer wall surface of the transmission shaft is provided with an outer annular groove corresponding to the outer pole shoes, and the outer annular groove is provided with magnetic fluid. After the magnetic field is generated, the magnetic fluid will form a plurality of outer sealing rings on the outer annular groove of the outer wall surface of the transmission shaft.

[0104] Specifically, the outer edge of the lower furnace door 3 is sealingly connected with the step at the bottom of the outer furnace pipe 11, and the inner edge of the lower furnace door 3 is sealingly connected with the outer ring part 61 of the magnetic fluid sealing assembly 6, that is, the annular heat insulation pad (support base) at the bottom of the inner furnace pipe, the inner edge of the lower furnace door, and the transmission shaft (in the form of an annular pipe, which can also be called a transmission pipe, which can be seen in the drawings) passing through the magnetic fluid sealing assembly are directly sealingly connected by the magnetic fluid sealing assembly, thereby sealing the lower end of the inner sealed chamber 13 of the furnace pipe 1.

[0105] In a specific embodiment, the transmission shaft 59 is provided with a gear 591 at the outer wall surface of the rotating sealing space of the magnetic fluid sealing assembly 6, and the rotating power source drives the inner boat support base in the form of external motor gear transmission.

[0106] In other embodiments, a belt pulley can also be provided on the outer wall surface of the rotating sealing space of the transmission shaft passing through the magnetic fluid sealing assembly, and the rotating power source drives the transmission shaft in the form of belt pulley transmission.

[0107] As shown in FIG. 3 and FIG. 4, the present application also proposes a furnace tube with the upper end of the inner furnace tube penetrating the lower end of the outer furnace tube, and the furnace tube sealing structure as described above, wherein the inner furnace tube 12 is coaxially arranged with the outer furnace tube 11. The lower end of the outer furnace tube 11 is an open end, and the lower furnace door 3 is arranged at the open end of the outer furnace tube 11. The upper end of the inner furnace tube 12 is an open end, and the lower end of the inner furnace tube 12 is a closed end, and the distance between the lower end of the inner furnace tube 12 and the lower furnace door 3 is maintained, and the magnetic fluid sealing assembly 6 is sealingly installed on the lower side of the lower furnace door and covers the central hole of the lower furnace door; at this time, the inner furnace tube 12, the outer furnace tube 11, the upper furnace cover 2 and the lower furnace door 3 jointly form a closed chamber with a concave cross section. The boat holder base 5 of the rotating device is arranged in the closed chamber for carrying the carrier, and can drive the carrier 50 to rotate in the closed chamber 13 to adjust the position and angle, and the rotating power source 63 of the rotating device is arranged on the support away from the containing cavity on the side of the lower furnace door 3; wherein the upper end of the transmission shaft 59 of the magnetic fluid sealing assembly 6 is located in the closed chamber of the furnace tube, and the lower end of the transmission shaft 59 of the magnetic fluid sealing assembly 6 is located outside the closed chamber, and the boat holder base of the rotating device located in the closed chamber is connected with the upper end of the transmission shaft, so that the transmission shaft can drive the boat holder base to rotate when the transmission shaft rotates, and the rotating power source of the rotating device is connected with the lower end of the transmission shaft, which can drive the transmission shaft 59 to rotate, so that the rotating power source of the rotating device is externally arranged outside the furnace tube.

[0108] In the embodiment, the upper end of the inner furnace tube 12 is higher than the upper end of the outer furnace tube 11, and the upper end of the inner furnace tube 12 is an open end. The upper end of the inner furnace tube 12 is provided with a connector 41 for hoisting, and the connector 41 can be connected with an external hoisting connector, which can provide force to the inner furnace tube to ensure that the inner furnace tube is suspended inside the outer furnace tube, and the hoisting connector is not limited to a pile arranged on the ceiling. The lower end of the inner furnace tube 12 is a closed end and is hemispherical. By arranging the lower end of the inner furnace tube 12 to be hemispherical, greater pressure can be withstood, and it is more suitable for the demand of vacuumizing the interior of the vertical furnace. The outer wall of the inner furnace tube 12 and the inner wall of the outer furnace tube 11 form a reaction chamber, which is part of the aforementioned closed chamber 13. When the carrier enters the interior of the vertical furnace tube, the carrier 50 is mainly placed in the reaction chamber.

[0109] In a specific embodiment, as shown in FIG. 4, the magnetic fluid sealing assembly 6 comprises a housing 64 with a vertical transmission shaft installation channel in the middle and a transmission shaft 59. The upper end of the housing 64 is provided with an annular sealing cover 65 which is sealingly connected with the lower side end surface of the lower furnace door 3, and the housing 64 and the sealing cover 65 are also sealingly connected, so that the central hole of the lower furnace door 3 is sealed by the magnetic fluid sealing assembly 6. The transmission shaft installation channel in the housing 64 corresponds to the central hole of the lower furnace door. Bearings (not shown in the figure) are arranged at positions close to the upper end and the lower end of the transmission shaft installation channel. The transmission shaft passes through the two bearings, so that the transmission shaft can rotate relative to the housing. A permanent magnet (not shown in the figure) is arranged in the middle of the transmission shaft installation channel. The outer wall of the permanent magnet is sealingly connected with the inner wall of the transmission shaft installation channel (not shown in the figure). The two magnetic poles of the permanent magnet are annularly arranged around the transmission shaft. The outer wall surface of the corresponding magnetic pole of the transmission shaft is provided with an annular groove (not shown in the figure) for placing magnetic fluid. After the magnetic field is formed, the magnetic fluid will be affected by the magnetic poles and gathered in the annular groove position on the outer wall surface of the transmission shaft to form multiple sealing rings, which can seal and separate the transmission shaft installation channel, so that the sealed cavity of the furnace tube is connected with the rotating transmission shaft while maintaining sealing and not losing pressure.

[0110] The above two furnace tubes also have the following common structure and specific embodiments:

[0111] As shown in FIG. 16, the first embodiment of the boat support base is:

[0112] The boat support base comprises a rotating base 51, a fixed ring 52 and hanging plates 53.

[0113] The rotating base 51 is disc-shaped. A plurality of hanging plates are vertically and spacedly arranged in a circle along the annular edge of the upper surface of the base. The fixed ring 52 is connected to the top of the hanging plates 53 to fix the top of the hanging plates 53, so that the hanging plates 53 are in a stable vertical state. The outer side surface of the hanging plates 53 is provided with a plurality of hanging and taking positions (i.e. carrier placing positions) spaced along the length direction for hanging carriers, i.e. the hanging plates 53 can hang a plurality of carriers 50 along the height direction. Specifically, the carriers 50 can be hung at different heights of the boat support base, so that the carriers can be hung in multiple layers along the height direction of the boat support base.

[0114] In the above-mentioned through furnace tube which penetrates the upper and lower ends of the inner furnace tube, the transmission shaft 59 of the magnetic fluid sealing assembly is annular and connected in a circle along the inner edge of the rotating base 51, which can support the rotating base 51 and drive the rotating base 51 to rotate around the central axis. When the rotating base 51 rotates, the carriers 50 located on the outer side surface of the hanging plates 53 rotate around the central axis of the base center with the rotating base 51, so that the position and angle of the carriers can be changed during the processing.

[0115] The transmission shaft 59 of the magnetic fluid sealing assembly is in a columnar shape, and the center of the inner edge of the rotating base 51 extends downward directly to form a socket into which the transmission shaft 59 is inserted and fixed with the rotating base 51.

[0116] In a specific embodiment, the hook holes 54 are provided on the hanging position of the hanging plate 53 to hang the carriers, and the upper part of the hook hole 54 is wider and the lower part is narrower to facilitate the hooking of the carriers.

[0117] The carrier 50 is a vertical quartz boat, and a hook is arranged on the vertical quartz boat to be clamped into the hook hole downwardly. The hook of the vertical quartz boat is clamped into the hook hole to hang the vertical quartz boat in the hanging position.

[0118] Specifically, two hooks are arranged on the side surface of each vertical quartz boat in the height direction, and each two hook holes on the hanging plate correspond to one vertical quartz boat. In a specific embodiment, two vertical quartz boats can be hung on each hanging plate 53 in the height direction, so that the quartz boats can be arranged in two circles around the boat support base to realize various heating modes such as layered heating, local heating and overall heating for the multiple vertical quartz boats hung on the boat support base.

[0119] Specifically, the rotating base 51 can further be provided with a heat shield (not shown in the figure), and the heat shield is provided with multiple through holes for passing through the hanging plate. The heat shield is internally provided with a water cooling assembly (the specific water cooling source can be provided through the water cooling joint of the lower furnace cover), and the heat shield does not affect the rotation of the rotating base 51 and the hanging of the carriers, and can prevent the temperature of the rotating base from being too high to affect the stability.

[0120] As shown in FIGS. 17 and 18, the second embodiment of the boat support base is as follows:

[0121] The boat support base comprises a rotating base 51 and multiple pairs of bearing members 55. The rotating base 51 is provided with multiple carrier placement positions 501 for passing or placing the carriers. Each pair of bearing members 55 is arranged on the two side edges of one carrier placement position 501 and is foldably arranged on the rotating base 51. Meanwhile, each pair of bearing members 55 has a folded state and an unfolded state. If the carrier 50 is to be placed, each pair of bearing members 55 is switched to the folded state, so that the carrier 50 can pass through the carrier placement position 501 upwardly from the bottom. When the bottom of the carrier 50 moves above the horizontal plane of the carrier placement position 501, each pair of bearing members 55 is switched to the unfolded state, so that the carrier 50 is placed on the bearing members. Subsequently, if the carrier 50 is to be taken out, each pair of bearing members 55 is switched to the folded state, so that the carrier 50 can pass through the carrier placement position 501 downwardly to be taken out from the furnace door, thereby realizing the taking and placing of the carrier.

[0122] In each pair of the bearing members 55, each bearing member 55 comprises a bearing fixed part 551 fixedly arranged on the rotating base 51 and a bearing movable part 552 rotatably arranged on the bearing fixed part 551. In each bearing member 55, the bearing fixed part is provided with a rotating shaft 553, and the bearing movable part 552 comprises two opposite first bearing rods and a second bearing rod connected with the two first bearing rods, and the two bearing rods are sleeved on the two ends of the rotating shaft. It can be understood that the rotating base further comprises a driving member (not shown in the figure), which is used to drive the rotating shaft to rotate, and the driving member can be a motor. In addition, the rotating base further comprises a self-locking support structure, such as a motor self-locking (not shown in the figure), which is used to limit the rotation angle of the bearing movable part.

[0123] In the folded state of each pair of the bearing members 55, the bearing movable part 552 in each bearing member 55 is arranged away from the carrier placement position 501. In the unfolded state of each pair of the bearing members 55, the bearing movable part 552 in each bearing member 55 is arranged towards the carrier placement position and abuts against the carrier.

[0124] In the folded state of each pair of the bearing members 55, the bearing movable part 552 in each bearing member 55 is arranged away from the carrier placement position 501. In the unfolded state of each pair of the bearing members 55, the bearing movable part 552 in each bearing member 55 is arranged towards the carrier placement position and abuts against the carrier.

[0125] In the present embodiment, in any two adjacent pairs of the bearing members, one bearing fixed part belonging to one pair of the bearing members is connected with one bearing fixed part belonging to another pair of the bearing members. In actual application, in any two adjacent pairs of the bearing members, the two bearing fixed parts connected with each other can be integrally formed. Such design can reduce the number of parts and save the installation time.

[0126] In the present embodiment, the carrier placement position 501 is a notch arranged on the rotating base 51. The shape and size of the carrier placement position 501 are matched with the shape and size of the carrier boat, so that the carrier boat can smoothly pass through the carrier placement position. It can be understood that in other embodiments, the carrier placement position can be a through hole arranged on the rotating base.

[0127] As shown in FIG. 18, the carriers can be stacked in the height direction, i.e. multiple carriers can be placed on one carrier placement site, while to avoid the carriers from toppling over, a circle of vertical guardrails can be arranged along the outer edge of the rotating base. Since the inner edge of the rotating base is close to the outer wall of the inner furnace tube, the outer wall of the inner furnace tube and the guardrails can ensure that the stacked carriers will not topple over.

[0128] Specifically, the rotating base of this embodiment is also connected with the upper end of the transmission shaft of the magnetic fluid sealing assembly, and the specific connection form is consistent with the foregoing embodiment.

[0129] In specific embodiments, the outer heating source and the inner heating source are an integral whole, i.e. directly adopting the mode of electric heating wire directly wound on the inner and outer furnace tubes to directly heat the sealed cavity.

[0130] As shown in FIGS. 19 and 20, in preferred embodiments, the outer heating source 71 and the inner heating source 72 are both arranged in a ring shape and arranged along the height direction of the inner and outer furnace tubes. Specifically, the outer heating source and the inner heating source can be divided into multiple groups of independent heating sections along the height direction of the furnace tubes, and the boat holder base can also correspondingly be layered to hang and place the carriers, so as to achieve layered and corresponding heating and improve the overall heating efficiency.

[0131] Alternatively, the outer heating source and the inner heating source are divided into multiple groups of independent heating sections, and the multiple groups of heating sections are arranged in a ring shape around the inner furnace tube and the outer furnace tube.

[0132] The inner and outer heating sources can specifically adopt the modes of resistance wire heating furnace tube, infrared heating, electromagnetic induction heating, etc.

[0133] In further embodiments, heat dissipation devices 73 are arranged around the outer heating source and the inner heating source to quickly and stably adjust the temperature of the reaction furnace tube. The heat dissipation devices can be independent or integrated with the heating devices. The heat dissipation devices can be manually controlled or automatically controlled by collecting temperature signals, pressure signals, etc. Any mode that can achieve automatic control is included in the scope. The heat dissipation devices 73 can adopt air cooling structure or water cooling structure. However, it is not limited to the above structures, and any mechanism with heat exchange and heat dissipation functions is included in the scope.

[0134] Specifically, the outer furnace tube 11 and the end surface positions of the upper furnace cover 2 and the lower furnace door 3 in FIG. 2 have water cooling joints 74 for supplying water to the heat dissipation devices arranged inside.

[0135] As shown in the drawings, the position of the bottom of the furnace tube in the bottom support is provided with a water sliding ring for supplying water to the water cooling pipeline (not shown in the drawings).

[0136] In specific embodiments, the inner and outer furnace tubes are quartz tubes or silicon nitride tubes. The furnace tube provided by the application adopts a through design, which can be hoisted from the top or supported from the bottom and inserted upward for installation, so that the installation mode of the inner furnace tube is diversified.

[0137] Specifically, as shown in FIGS. 11-15, the lower furnace door structure is embodied as follows:

[0138] In the first embodiment, the lower furnace door 3 is a whole, and a central hole is arranged in the middle part. When opened, the whole lower furnace door is directly opened.

[0139] The lower furnace door 3 is formed as a drum surface by protruding downward, i.e., a spherical protruding structure is arranged. Like the upper furnace cover, it can bear greater pressure.

[0140] In the second embodiment, a central hole is arranged in the middle part of the lower furnace door 3, and a plurality of small furnace doors, i.e., furnace openings 31, and furnace covers 32 corresponding to each small furnace door are arranged on the lower furnace door. The size and shape of the furnace opening 31 match those of the side of the carrier, and specifically, the shape of the furnace opening 31 can be consistent with that of the side of the carrier, and the size is slightly larger than that of the side of the carrier, so that the carrier can just pass through the furnace opening 31. The furnace cover 32 is connected with a driving structure 33, which is used to drive the furnace cover 32 to open or close relative to the furnace opening 31, so that the small furnace door can be opened individually, and the heat loss in the furnace tube is reduced.

[0141] In this embodiment, the lower furnace door 3 and the furnace cover 32 are preferably spherical protruding structures protruding downward, so that the lower furnace door and the furnace cover can bear greater pressure, which prevents the lower furnace door and the furnace cover from being sucked flat when the sealed space in the furnace tube is vacuumized, and the lower furnace door is damaged.

[0142] In order to make the furnace cover 32 better fit the corresponding furnace opening 31, improve the sealing performance, and reduce the heat loss in the furnace tube, a first protruding block 311 is arranged on the side of the furnace opening 31 facing the furnace cover 32, the first protruding block 311 forms an annular cavity 312 around the furnace opening 31 in the circumferential direction, and the furnace opening 31 is completely located in the annular cavity 312.

[0143] The furnace cover 32 matched with the furnace opening 31 is provided with a second protruding block 321 on the side facing the furnace opening 31, and the second protruding block 321 can be matched and inserted into the annular cavity 312. In order to further improve the sealing performance between the furnace cover 132 and the corresponding furnace opening 31, a high-temperature-resistant sealing strip can also be arranged around the second protruding block 321.

[0144] Specifically, the driving structure 33 includes a rotating driving device 331, a shaft coupling 332, a rotating shaft 333, a rotating plate 334, a push-pull driving device 335, and a connecting plate 340.

[0145] The rotating driving device 331 is preferably a rotating motor, and the push-pull driving device 335 is preferably a push-pull motor.

[0146] The lower furnace door 3 is provided with a rotating driving device 331 corresponding to each of the furnace openings 31. The rotating end of the rotating driving device 331 is connected to the rotating shaft 333 through the coupling 332. The end of the rotating shaft 333 is connected to a rotatable rotating plate 334, which is located in front of the furnace opening 31. The coupling 332 can firmly connect the rotating end of the rotating driving device 331 and the rotating shaft 333, so that they rotate together and transmit torque and motion. This ensures that the relative position between the rotating end of the rotating driving device 331 and the rotating shaft 333 remains unchanged during the transmission of motion and power, achieving reliable transmission. The coupling 332 can also compensate for the deviation between the rotating end of the rotating driving device 331 and the rotating shaft 333, ensuring the continuity and stability of the transmission. In addition, the coupling 332 can also absorb shocks and vibrations, reducing the wear and failure risk of the rotating end of the rotating driving device 331 and the rotating shaft 333, and improving the stability and reliability of the driving structure 33.

[0147] The rotating plate 334 is bolted in the middle with a push-pull driving device 335. The push-pull end of the push-pull driving device 335 penetrates the rotating plate 334 and is connected to the furnace cover 32.

[0148] Specifically, the driving structure 33 further comprises a first partition plate 341 and a second partition plate 342 arranged at one end of a connecting plate 340, and a third partition plate 343 arranged at the other end of the connecting plate 340; a first accommodating space 344 is formed between the first partition plate 341, the second partition plate 342 and the corresponding part of the connecting plate 340; a second accommodating space 345 is formed between the second partition plate 342, the third partition plate 343 and the corresponding part of the connecting plate 340; and a through hole (not shown, the same below) is arranged at the same position of the first partition plate 341, the second partition plate 342 and the third partition plate 343. The rotating driving device 331 is fixed on the side of the third partition plate 343 away from the second partition plate 342, and then the rotating end of the rotating driving device 331 is connected with the coupling 332 through the through hole of the third partition plate 343, and the coupling 332 is located in the second accommodating space 345; one end of the rotating shaft 333 is rotatably connected in the through hole of the first partition plate 341, and the other end of the rotating shaft 333 is connected with the coupling 332 through the through hole of the second partition plate 342, and the rotating plate 334 is sleeved on the rotating shaft 333 located in the first accommodating space 344. In this way, the first accommodating space 344 and the second accommodating space 345 can effectively isolate the space between the coupling 332 and the rotating shaft 333 sleeved with the rotating plate 334, can prevent accidental contact due to mechanical failure or improper operation, reduce the potential risk of injury, and protect the safety of workers and equipment; and the first accommodating space 344 and the second accommodating space 345 can reduce the mutual influence between the coupling 332 and the rotating shaft 333 sleeved with the rotating plate 334, prevent the vibration and force generated when the rotating driving device 331 works from being transmitted between the coupling 332 and the rotating shaft 333 sleeved with the rotating plate 334, and improve the stability of the entire driving structure 33.

[0149] The lower furnace door further comprises a control unit, the rotating driving device 331 is provided with a first electrical interface 338, the push-pull driving device 335 is provided with a second electrical interface 139, and the first electrical interface 338 and the second electrical interface 339 are both used for electrically connecting with the control unit for controlling the furnace door structure.

[0150] In this way, when the furnace cover 32 needs to be opened relative to the furnace port 31, the worker clicks start on the operation panel corresponding to the control unit, and when the control unit receives the opening signal sent by the operation panel, the push-pull driving device 335 is first started to control the furnace cover 32 to move away from the corresponding furnace port 31, and when the furnace cover 32 is not in contact with the corresponding furnace port 31, the control center closes the push-pull driving device 335, and at the same time, the rotating driving device 331 is started, at this time, the rotating driving device 331 controls the rotating plate 334 and the furnace cover 32 located on the rotating plate 334 to move to the outside away from the center of the furnace cover 32, so that the corresponding furnace port 31 is completely exposed, the control unit closes the rotating driving device 331, and then the worker places the carrier with the wafer to be processed into the furnace port 31 and then places it in the furnace tube 1, and then the process is performed, that is, the specific reaction gas is introduced into the furnace tube 1, so as to realize the specific film coating, diffusion, oxidation and thin film deposition process on the wafer to be processed.

[0151] When the furnace cover 32 needs to be closed relative to the furnace port 31, the worker clicks close on the operation panel corresponding to the control unit, and when the control unit receives the closing signal sent by the operation panel, the control unit first starts the rotating driving device 331 to control the rotating plate 334 and the furnace cover 32 located on the rotating plate 334 to move to the inside away from the center of the furnace cover 32 for resetting, and then the control center closes the rotating driving device 331, and at the same time, the push-pull driving device 335 is started to control the furnace cover 32 to move close to the corresponding furnace port 31, until the second protrusion 321 of the furnace cover 32 matches the insertion into the annular cavity 312 of the corresponding furnace port 31, so that the furnace cover 32 completely covers the corresponding furnace port 31, and then the control unit closes the push-pull driving device 335.

[0152] The side of the furnace cover 32 facing the rotating plate 334 is further provided with a rectangular mounting plate 322, the push-pull end of the push-pull driving device 335 is connected with the middle part of the mounting plate 322, and the mounting plate 322 is connected with the furnace cover 32 through the first guide column 323 around. The mounting plate 322 can share part of the weight and load between the furnace cover 32 and the push-pull driving device 335, enhance the stability and reliability of the overall structure; and the mounting plate 322 can also absorb the vibration and impact force generated when the furnace cover 32 rotates, so as to reduce the damage to the furnace cover 32 and the push-pull driving device 335, and prolong the service life thereof; and the mounting plate 322 can be connected with the furnace cover 32 through the first guide column 323, so that the relative position between the furnace cover 32 and the push-pull driving device 335 can be better adjusted, and the accuracy and stability of the rotation of the furnace cover 32 can be ensured.

[0153] And the mounting plate 322 is further provided with a plurality of lightening holes 324, which can reduce the weight of the mounting plate 322 and make the rotary driving device 331 and the push-pull driving device 335 better control the movement of the furnace cover 32.

[0154] Wherein, the middle part of the rotating plate 334 is provided with a rectangular mounting area 336, the middle part of the mounting area 336 is provided with the push-pull driving device 335, and the mounting area 336 is connected with the mounting plate 322 through the second guide column 337 around the mounting area 336.

[0155] The second guide column 337 in the embodiment is taken as an example of being mounted at the four corners of the mounting area 336.

[0156] The second guide column 337 can ensure the relative position between the mounting plate 322 and the furnace cover 32 to be accurately aligned, so that the second guide column 337 can guide the mounting plate 322 and the furnace cover 32 to move along the predetermined path during the rotation of the furnace cover 32, preventing it from deviating from the correct position or being offset, which helps to maintain the stability and accuracy of the rotation of the furnace cover 32.

[0157] The above only describes the preferred embodiments of the present application and is not used to limit the present application. For those skilled in the art, the present application can have various changes and variations. Any modification, equivalent replacement, improvement, etc. within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A furnace tube seal structure, characterized by, The furnace tube comprises an outer furnace tube, an inner furnace tube, an upper furnace cover, a lower furnace door and a rotating device; the inner furnace tube is installed in the outer furnace tube, the upper furnace cover is sealingly installed at the upper end of the outer furnace tube and the inner furnace tube; the sealing structure comprises that the lower furnace door is sealingly installed at the lower end of the outer furnace tube, a central hole of the lower furnace door is sealingly connected with a magnetic fluid sealing assembly, one end of a transmission shaft of the magnetic fluid sealing assembly is located in a sealed chamber formed by the furnace tube, and the other end of the transmission shaft is located outside the sealed chamber, and the rotating device is connected with the transmission shaft of the magnetic fluid sealing assembly in the sealed chamber.

2. The furnace tube seal structure of claim 1, wherein, An outer sealing flange is arranged on the outer wall of the upper end of the outer furnace tube, and an inner sealing flange is arranged on the inner wall of the inner furnace tube; the upper furnace cover covers the upper end faces of the outer furnace tube and the inner furnace tube, the outer edge of the upper furnace cover is sealingly connected with the outer sealing flange, and the inner edge of the upper furnace cover is connected with the inner sealing flange; and the outer edge of the lower furnace door is sealingly connected with the lower end of the outer furnace tube.

3. A furnace tube characterized by, The furnace tube sealing structure comprises that the lower end of the lower furnace tube is open and passes through the central hole of the lower furnace door; the magnetic fluid sealing assembly is annular, the middle part of the magnetic fluid sealing assembly is also provided with a corresponding central hole, and the magnetic fluid sealing assembly is divided into an inner ring part, an outer ring part and a transmission shaft in the form of a ring between the inner ring part and the outer ring part; the inner ring part of the magnetic fluid sealing assembly is sealingly connected with a supporting base at the bottom of the inner furnace tube, the outer ring part of the magnetic fluid sealing assembly is sealingly connected with the outside of the inner edge of the lower furnace door, and the inner ring part and the outer ring part are rotationally sealed with the transmission shaft.

4. The furnace tube of claim 3 wherein, The inner ring part of the magnetic fluid sealing assembly is provided with at least one inner ring permanent magnet, two inner pole shoes of the inner ring permanent magnet surround the inner wall surface of the transmission shaft, the inner wall surface of the transmission shaft is provided with an inner annular groove corresponding to the inner pole shoes, and magnetic fluid is arranged in the inner annular groove; the outer ring part of the magnetic fluid sealing assembly is provided with at least one outer ring permanent magnet, two outer pole shoes of the outer ring permanent magnet surround the outer wall surface of the transmission shaft, the outer wall surface of the transmission shaft is provided with an outer annular groove corresponding to the outer pole shoes, and magnetic fluid is arranged in the outer annular groove.

5. A furnace tube characterized by, The furnace tube sealing structure comprises that the lower end of the inner furnace tube close to the lower furnace door is a closed end, and a distance is kept between the closed end and the lower furnace door; and the magnetic fluid sealing assembly is sealingly installed on the lower side of the lower furnace door and covers the central hole of the lower furnace door.

6. The furnace tube of claim 3 or 5, wherein The rotating device comprises a boat holder base provided in the sealed chamber of the furnace tube and provided with a plurality of carrier placement positions, and the boat holder base is connected with the transmission shaft of the magnetic fluid sealing assembly; and a rotating power source connected with the transmission shaft outside the sealed chamber drives the boat holder base to rotate.

7. The furnace tube of claim 6 wherein, The rotating power source and the transmission shaft are connected through gear transmission or belt wheel transmission.

8. The furnace tube of claim 6 wherein, The boat holder base comprises: a rotating base located at the bottom of the sealed chamber; a hanging plate provided on the rotating base and provided with a plurality of carrier placement positions for hanging the carriers.

9. The furnace tube of claim 6, wherein the rotating base is provided with a plurality of carrier placement positions for the carriers to pass through or be placed in; and the hanging plate is provided with a plurality of carrier placement positions for hanging the carriers. A plurality of pairs of carriers, each pair of carriers is located at both side edges of one carrier placement position and is foldably arranged on the rotating base; When the carrier switches to the folded state, the carrier can pass through the carrier placement position corresponding to the carrier from the bottom to the top; when the carrier switches to the unfolded state, the carrier can be placed on the carrier.

10. The fire tube as claimed in claim 3 or 5, wherein The outer end of the upper furnace cover and the lower furnace door facing away from the outer end of the sealed chamber is outwardly convex to form a spherical convex.

Images