Pneumatic system for industrial automation and method for operating a pneumatic system

Abstract

The invention relates to a pneumatic system (1) for industrial automation, comprising: a position controller device (2), at least one pressure controller device (3) and at least one pneumatic actuator (4), wherein the position controller device (2) is designed to control the position of the pneumatic actuator (4) and, within the scope of the position control, to output a target pressure signal to the pressure controller device (3), and wherein the pressure controller device (3) is designed to control pressure on the basis of the target pressure signal and, within the scope of the pressure control, to actuate the pneumatic actuator (4); a wafer support (21) for supporting a wafer (11) and a positioning structure (22) which can be displaced relative to the wafer support by the pneumatic actuator (4) in order to position the wafer relative to the wafer support (21), in particular to lift the wafer (11) that is placed on the wafer support (21) up off the wafer support and / or to lower the wafer (11) onto the wafer support (21). Furthermore, the invention also relates to a method for operating a pneumatic system.

Description

[0001] April 14, 2025 Festo SE & Co. KG, Ruiter Straße 82, 73734 Esslingen Pneumatic System for Industrial Automation and Method for Operating a Pneumatic System The invention relates to a pneumatic system for industrial automation and a method for operating a pneumatic system. Pneumatic systems for industrial automation are now used in many areas. Pneumatic actuators of the pneumatic system can also be used, for example, to drive a positioning structure for positioning a wafer within a processing area. The object of the present invention is to provide an improved pneumatic system.The foregoing problem is solved by a pneumatic system for industrial automation, comprising: a position controller device, at least one pressure controller device, and at least one pneumatic actuator, wherein the position controller device is configured to perform position control of the pneumatic actuator and, within the scope of position control, to output a setpoint pressure signal to the pressure controller device, and wherein the pressure controller device is configured to perform pressure control based on the setpoint pressure signal and, within the scope of pressure control, to actuate the pneumatic actuator, a wafer support for supporting a wafer, a P 35528 / PCT … 14.April 2025 Positioning structure that can be moved relative to the wafer support by the pneumatic actuator to position a wafer relative to the wafer support, in particular to lift a wafer resting on the wafer support from the wafer support and / or to lower a wafer onto the wafer support. Advantageously, the pressure control is subordinate to the position control. The position control can, for example, proceed as follows: The position controller receives a target position signal, then determines the corresponding target pressure signal and outputs this to the pressure controller. The target pressure signal corresponding to the target position signal is determined, for example, from a table of values ​​stored in a memory of the position controller. The pressure regulator then regulates the pressure to the target pressure corresponding to the target pressure signal and makes this pressure available to the pneumatic actuator.The current pressure used for control, i.e., the pressure resulting from the actuation of the pneumatic actuator, is detected by pressure sensors and provided to the pressure regulator as a current pressure signal. The position signal corresponding to the position of the pneumatic actuator is provided to the position controller as the current position value. Because two different devices—namely the position controller and the pressure controller—are used for control, a more flexible system arrangement is possible. Furthermore, the system can be assembled, upgraded, and / or maintained more flexibly. In particular, the position controller and the pressure controller can each be replaced individually without having to replace the other device. In the pressure controller...

[0002] P 35528 / PCT … April 14, 2025 The device preferably uses a proportional valve, in particular a piezoelectric proportional valve, which enables the required control accuracy. The wafer support is arranged within the processing area and serves to align the wafer during processing. For example, it can be provided that the wafer rests on the wafer support during processing and that the wafer is locked in place by means of an electromagnetic field. This prevents the wafer from being moved on the wafer support during processing, which would lead to faulty processing of the wafer, especially during photolithography.The wafer is positioned relative to the wafer support by means of the positioning structure, which is exemplified by at least one piston rod, which can also be referred to as a positioning piston rod, of the pneumatic actuator, which in this context can be called a positioning actuator. It is also conceivable that several pneumatic actuators, in particular at least three pneumatic actuators, are used as positioning actuators and that the positioning structure is formed by the multiple positioning piston rods of the positioning actuators. It is also possible that the positioning structure is designed separately and can only be set in motion by at least one pneumatic actuator. Advantageous embodiments of the invention are the subject of the dependent claims. Preferably, the at least one pneumatic actuator is a single-acting or double-acting pneumatic cylinder.Preferably, the pneumatic system further comprises a slide valve, wherein the slide valve is a

[0003] P 35528 / PCT … April 14, 2025, comprising a valve element and an opening for the passage of a wafer that can be closed by the valve element, and wherein the pneumatic actuator serves to actuate the slide valve. If the pneumatic system is designed, for example, as a wafer processing cell with a processing chamber, the slide valve can be used to close a processing chamber opening of a processing chamber. The processing chamber, in which a pressure below atmospheric pressure, in particular a vacuum, prevails, can have a substantially rectangular basic shape and extend in a vertical direction, which can also be referred to as the y-direction, in a transverse direction perpendicular to the vertical direction, which can also be referred to as the x-direction, and in a horizontal direction, which can also be referred to as the z-direction and is oriented perpendicular to the vertical direction as well as perpendicular to the transverse direction.A set comprising the vertical, transverse, and horizontal directions can also be referred to as spatial directions. The processing space can also have other basic shapes. A slide valve is defined as a device that has a closing element (hereinafter also called a valve member) and an opening that can be closed by the closing element. The slide valve can have a valve housing in which an opening is formed in a first valve housing wall and a further opening in a second valve housing wall for the passage of a wafer. The opening in the first valve housing wall can be closed by a valve member that is movable relative to the valve housing. The opening and the further opening are preferably designed to correspond, so that the extent of the further opening is in the respective...

[0004] P 35528 / PCT … April 14, 2025. The vertical and transverse dimensions of the opening correspond to the vertical and transverse dimensions. The respective dimensions are selected such that the wafer can pass through the opening and the subsequent opening. Additionally, the subsequent opening is aligned with the opening so that a wafer can be transported from and / or into the processing chamber. In a deactivated position, the opening in the first valve body wall of the slide valve is not closed by the valve element, while in an activated position, the opening in the first valve body wall of the slide valve is closed by the valve element. Accordingly, in this context, the deactivated position can also be described as the closed position of the valve element and the activated position as the open position of the valve element.The valve housing of the slide valve can also consist of only the first valve housing wall with an opening formed therein, which can be closed by the valve element movable relative to the valve housing. The valve element can preferably be movably guided by means of a guide unit formed on the valve housing. For the tightest possible closure of the opening, the valve element can have a circumferential, in particular rubber-elastic, sealing element on its side facing the opening. In an advantageous embodiment of the invention, the pressure regulator device is arranged separately from the position regulator device. This separate arrangement improves the flexibility of the pneumatic system. For example, the pressure regulator device can be arranged within an area where the use of electronics is to be minimized, and the position regulator device...

[0005] P 35528 / PCT … April 14, 2025, is arranged in an area different from this area, in which no special requirements are placed on the use of electronics. Such a design is particularly advantageous in the area of ​​wafer processing, since, within a processing area and especially in the vicinity of the wafer to be processed, there should be as little electronics as possible whose electric and / or electromagnetic fields could negatively influence the processing. Preferably, the pressure regulator device has a pressure regulator device outer housing, and the position regulator device has a position regulator device outer housing separate from the pressure regulator device outer housing.This has the advantage that the position controller and the pressure controller can be designed as separate modules, with all components required for the operation of the position controller and the pressure controller preferably being arranged in their respective outer housings. Preferably, an actual pressure signal, resulting from the pneumatic actuation of the actuator, is supplied to the pressure controller and not to the position controller. Accordingly, pressure control preferably takes place exclusively in the pressure controller. This allows the pressure control to be tailored to the hardware used in the pressure controller, eliminating the need for pressure control to be implemented on the position controller that would have to be adapted to different pressure controllers.Consequently, the pressure regulator device can simply be replaced or exchanged for another pressure regulator device with different hardware, without requiring any adjustment of the position regulator device.

[0006] P 35528 / PCT … April 14, 2025 More preferably, the pneumatic system comprises a plurality of pressure regulator devices and a plurality of pneumatic actuators, wherein the position regulator device is configured to perform a respective position control for each pneumatic actuator and, within the scope of the respective position control, to output a respective setpoint pressure signal to a respective pressure regulator device, and wherein each pressure regulator device is configured to perform a respective pressure control based on the respective setpoint pressure signal and, within the scope of the respective pressure control, to actuate a respective pneumatic actuator. These may be a plurality of identical actuators or a combination of different actuators. Likewise, the plurality of pressure regulator devices may be a plurality of identical pressure regulator devices or a combination of different pressure regulator devices.It is particularly advantageous that pressure control is performed exclusively in the respective pressure regulator device, and that the position regulator device performs only position control. "Identical" in this context means that the actuator and / or pressure regulator device can be of the same type, although they may exhibit manufacturing-related variations. In the case of a combination of different actuators and / or pressure regulator devices, examples include different types of actuators and / or pressure regulator devices, or any combination of identical and different types of actuators and / or pressure regulator devices. Advantageously, the position regulator device has a separate outer housing, and each pressure regulator device has its own separate outer housing.When using multiple pressure regulator devices, each can be adjusted accordingly.

[0007] P 35528 / PCT … April 14, 2025 in a separate pressure regulator device outer housing, which can be arranged separately from the position controller device outer housing and separately from the other pressure regulator device outer housings. For example, it is possible to position the pressure regulator device associated with a pneumatic actuator as close as possible to it in order to keep the length of a pressure line that pneumatically connects the pressure regulator device to the associated pneumatic actuator as short as possible. Preferably, each pressure regulator device is designed as a plate-shaped valve module. The valve module comprises all components necessary for the operation of the pressure regulator device, in particular one or more valve assemblies, preferably a power supply or a connection for a power supply and / or a controller.In such an embodiment, the outer housing of the pressure regulator device is designed in a plate-like shape, which can facilitate the arrangement of the pressure regulator devices within the pneumatic system. For example, the valve module can be arranged on the outer surface of the associated pneumatic actuator. "Plate-like" in the context of the application refers to a substantially cuboid shape whose extent along one of the spatial directions—i.e., along the vertical, transverse, or horizontal directions—is greater than its extent along the remaining spatial directions. Preferably, the pressure regulator device has an inlet for connection to a pressure fluid source to supply the pressure regulator device with pressure fluid, and an outlet that can be connected to a consumer, in particular a pneumatic actuator.The device has a signal connection, especially to the position controller.

[0008] P 35528 / PCT … April 14, 2025 Pressure regulator device via an interface to which, for example, a signal line can be connected. This can preferably be a point-to-point connection. The communication system underlying the signal connection can preferably be a communication system from the group OPC UA (Open Platform Communication Unified Architecture), OPC UA over TSN (Time-sensitive Networking), bus communication system, IO Link, whereby a power supply can also be enabled via the signal connection. Furthermore, preferably the valve modules are arranged in a series in one direction and / or are part of a valve island.For example, the plate-shaped valve modules can be arranged such that they each abut each other with the outer surface that has the greatest extent along a spatial direction, with the arrangement direction then being oriented perpendicular to this spatial direction. Advantageously, the position controller device is implemented as a higher-level controller, in particular a PLC, on which a position controller program is expediently executed to provide the target pressure signal. Such higher-level controllers are already used in pneumatic systems and are thus well-established, so that for use as a position controller device, only the position controller program needs to be implemented. Preferably, the position controller device does not include any components required for a pressure controller, in particular no valve assembly.The position controller device can have one or more signal inputs, via which a target position signal and / or actual position value can be received, as well as one or more signal outputs to be used with one or more pressure controllers.

[0009] P 35528 / PCT … April 14, 2025 Devices are to be connected via signal technology, in particular to transmit a target pressure signal. The respective signal connection can be established via a signal line or wirelessly. Preferably, the pneumatic system comprises the wafer. The previously defined task is also solved by a method for operating a pneumatic system. The method comprises the steps: Performing, by means of the position control device, the position control of the pneumatic actuator; outputting, within the scope of position control, a target pressure signal to the pressure control device; performing, with the pressure control device, pressure control based on the target pressure signal; and actuating, within the scope of pressure control, the pneumatic actuator. Preferably, the method further comprises the steps of: moving the valve element into an open position in which the opening is open, and moving the wafer through the opening.The invention is explained in more detail below with reference to the accompanying drawing, in which Figure 1 shows a schematic representation of a pneumatic system with a wafer support, Figure 2 a schematic representation of a pneumatic system designed as a wafer processing cell, and Figure 3 a block diagram of a pneumatic system for industrial automation. P 35528 / PCT … April 14, 2025. Figure 1 shows a pneumatic system 1 that, purely by way of example, comprises a position controller device 2 in a position controller device outer housing, a plurality of pressure controller devices 3, each designed by way of example as a plate-shaped valve module, each in separate pressure controller device outer housings, a plurality of pneumatic actuators 4, and a wafer support 21 for supporting a wafer 11.The wafer 11 is positioned relative to the wafer support 21 by means of a positioning structure 22, which in the illustrated embodiment is formed by three positioning piston rods 23 of the plurality of pneumatic actuators 4, which can also be referred to as positioning actuators 24. By way of example, the wafer 11 is lowered onto or lifted from the wafer support 21 by the positioning structure 22. By way of example, the plurality of pressure regulator devices 3 are part of a valve manifold 27, which is connected to the position regulator device 2 via a signal line 26. Proportional valves, in particular piezoelectric proportional valves, which exhibit the required control quality, are preferably used in the pressure regulator devices 3 (not shown). Each pressure regulator device 3 is pneumatically connected to one of the majority of pneumatic actuators 4 via a pressure line 28.The valve manifold 27 has an input (not shown) through which it can be connected to a pressure fluid source (not shown) to supply the valve manifold 27, and thus the majority of pressure regulator devices 3, with pressure fluid. The respective pressure line 28 is connected to an output of the respective pressure regulator device 3. For power supply, the valve manifold 27 has a power connection through which the majority of pressure regulator devices 3 can be supplied with power. A common controller for the individual pressure regulator devices 3 can be located in the valve manifold 27. Alternatively, the controller can be implemented separately from the valve manifold 27 and connected to it via a signal interface (not shown).The communication system underlying the signal connection can preferably be a communication system from the group OPC UA (Open Platform Communication Unified Architecture), OPC UA over TSN (Time-sensitive Networking), bus communication system, or IO Link, whereby a power supply can also be provided via the signal connection. The position of the respective positioning actuator 24 is expediently detected by means of a position sensor 25, and the corresponding position signal is made available to the position controller device 2 as the actual position value, for which purpose the position sensors 25 are each connected to the position controller device 2 via a signal line 26.Figure 2 shows a pneumatic system 1 configured as a wafer processing cell, comprising a position controller 2 in a position controller housing, a plurality of pressure controllers 3 (each implemented as a plate-shaped valve module) in separate pressure controller housings, a plurality of pneumatic actuators 4, a spool valve 5, and a processing chamber 6. In the illustrated embodiment, the plurality of pressure controllers 3 are arranged separately from the position controller 2. The pneumatic system 1 shown in Figure 1 P 35528 / PCT … April 14, 2025 is integrated into the pneumatic system 1 of Figure 2, which is configured as a wafer processing cell. A plurality of pressure controllers 3 and a plurality of pneumatic actuators 4 are shown for illustrative purposes only. It is also possible that only one pressure regulator device 3 and / or only one pneumatic actuator 4 is present.By way of example, the majority of pressure regulator devices 3 and the majority of pneumatic actuators 4 serve to actuate the spool valve 5 and to actuate a positioning structure 22. It is also possible that the pressure regulator devices 3 (or a single pressure regulator device 3) and / or the pneumatic actuators 4 (or a single pneumatic actuator 4) serve only to actuate the spool valve 5 or only to actuate the positioning structure 22. In particular, it is not necessary that both the spool valve 5 and the positioning structure 22, as well as the respective associated pressure regulator devices 3 and / or pneumatic actuators 4, are present.The processing chamber 6, in which, for example, a pressure below atmospheric pressure prevails, has an essentially rectangular shape and extends in a vertical direction (which can also be called the y-direction), in a transverse direction perpendicular to the vertical direction (which can also be called the x-direction), and in a horizontal direction (which can also be called the z-direction) and is oriented perpendicular to both the vertical and transverse directions. The processing chamber 6 has a processing chamber opening 7, which can be closed by means of the slide valve 5 in order to seal the processing chamber 6 from the environment. The slide valve 5 has a valve body 8 in which an opening 9 and a further opening 10 for the passage of the wafer 11 are formed, and a valve element 12 movable relative to the valve body 8 P 35528 / PCT … 14 April 2025.The opening 9 is formed in a first valve housing wall 13, and the further opening 10 is formed in a second valve housing wall 14, wherein the first valve housing wall 13 and the second valve housing wall 14 are spaced apart from each other in the transverse direction. The opening 9 has, by way of example, a substantially rectangular cross-section, the extent in the vertical and transverse directions being selected to allow passage of the wafer 11. The further opening 10 is designed to correspond with the opening 9 such that the extent of the further opening 10 corresponds in the vertical, transverse, and width directions to the extent of the opening 9 in these directions.Additionally, the further opening 10 is aligned with the opening 9, so that the wafer 11 can pass through the further opening 10 and the opening 9 even if the wafer's extent is greater than the transverse distance between the first valve housing wall 13 and the second valve housing wall 14. The slide valve 5 abuts the processing chamber 6 with the first valve housing wall 13 such that the opening 9 overlaps the processing chamber opening 7, at least partially, to allow the wafer 11 to pass through. The opening 9 and / or the further opening 10 may also have a cross-section that deviates from a substantially rectangular one. Furthermore, it is possible that the valve housing 8 only has the first valve housing wall 13, in which the opening 9 is formed and which can be closed by the valve element 12.The valve element 12 is arranged, by way of example, between the first valve housing wall 13 and the second valve housing wall 14 of the valve housing 8. The opening 9 can be closed by the valve element 12. To ensure the tightest possible closure of the opening 9, the valve element 12 has a circumferential, in particular rubber-elastic, sealing element 15 on its side facing the opening 9. In the activated position of the slide valve 5 shown, the opening 9 is closed to allow the passage of the wafer 11 through the valve element 12. In this context, a deactivated position is understood to be a position of the slide valve 5 in which the opening 9 is not closed by the valve element 12 to allow the passage of the wafer 11.In the illustrated embodiment, two of the several pneumatic actuators 4, which can also be referred to as the first valve actuator 16 and the second valve actuator 17, serve to actuate the slide valve 5. To enable a first displacement of the valve element 12 along the vertical direction, the valve element 12 is coupled to a first piston rod 18 of the first valve actuator 16, which is designed as a pneumatic cylinder. A second displacement of the valve element 12 along the transverse direction is enabled by the second valve actuator 17, which, via a second piston rod 19 that moves along the transverse direction, can cause a tilting movement of the first valve actuator 16 about a bearing 20 on which the first valve actuator 16 is rotatably mounted. The second valve actuator 17 additionally provides the pressure force required to close the opening 9, which acts on the sealing element 15.The wafer support 21 is arranged in the processing chamber 6, on which the wafer 11 can be placed for processing. The positioning of the wafer 11 relative to the wafer support 21 is effected by means of the positioning structure 22, which in the illustrated embodiment is formed by three positioning piston rods 23 of the three positioning actuators 24. By way of example, the wafer 11 is lowered onto or lifted from the wafer support 21 by the positioning structure 22. The position controller 2 is implemented by way of example as a higher-level controller on which a position controller program is executed to provide a target pressure signal. The position controller 2 is configured to perform position control of the several pneumatic actuators 4.The position controller 2 receives or generates a position request in the form of a target position signal for each of the several pneumatic actuators 4, then determines the corresponding target pressure signal and outputs it to the respective pressure controller 3. For this purpose, the position controller 2 and the respective pressure controller 3 are connected via a signal connection. The communication system underlying this connection can preferably be a communication system from the OPC UA (Open Platform Communication Unified Architecture), OPC UA over TSN (Time-sensitive Networking), bus communication system, or IO-Link group. The target pressure signal corresponding to the target position signal is determined, for example, from a table of values ​​stored in a memory of the position controller 2.The respective pressure regulator 3 then regulates to the setpoint pressure corresponding to the target pressure signal and provides this pressure to the respective pneumatic actuator 4, in particular by pneumatically actuating the respective pneumatic actuator 4, i.e., expediently by pressurizing and / or depressurizing a respective pressure chamber of the respective pneumatic actuator 4. The actual pressure used for regulation, i.e., the pressure resulting from the actuation of the respective pneumatic actuator 4, is detected by means of pressure sensors (not shown in Figure 1) and provided to the respective pressure regulator 3 as an actual pressure signal. The position request serves, for example, to move the respective pneumatic actuator 4 from a first position to a second position.As an example, the respective pneumatic actuator 4 is to be moved from a first end position, which can also be referred to as the deactivated position, to a second end position, which can be referred to as the activated position, or vice versa. Using the slide valve 5 as an example, the movement corresponds to a movement from the position in which the opening 9 of the slide valve 5 is not closed by the valve element 12, to the position in which the opening 9 of the slide valve 5 is closed by the valve element 12, or vice versa. For the positioning actuators 24, the deactivated position corresponds to the position in which the positioning piston rods 23 are retracted to such an extent that the wafer 11 is placed on the wafer support 21 and the positioning piston rods 23 do not protrude vertically beyond the wafer support 21.In the activated position of the positioning actuators 24, the positioning piston rods 23 project towards the wafer support 21 to lift the wafer 11 from the wafer support 21. For a uniform lowering and lifting of the wafer 11 onto or from the wafer support 21, it is necessary that all positioning piston rods 23 move synchronously with each other. The position of each pneumatic actuator 4 is expediently detected by means of a position sensor 25 and the corresponding position signal is provided to the position controller device 2 as the actual position value, for which purpose the position sensors 25 are each connected to the position controller device 2 via a signal line 26.Accordingly, position control device 2 performs only position control and / or pressure control device 3 performs only pressure control. The actual pressure signal is supplied only to pressure control device 3 and not to position control device 2. For example, the majority of pressure control devices 3 are part of a valve manifold 27, which is connected to position control device 2 via a signal line 26. Each pressure control device 3 is pneumatically connected to one of the majority of pneumatic actuators 4 via a pressure line 28. Figure 3 shows a block diagram of a pneumatic system 1 for industrial automation. The depicted pneumatic system 1 comprises, for example, a position control device 2, a pressure control device 3, and a pneumatic actuator 4.Position controller 2 receives a target position signal XSoll, then determines the corresponding target pressure signal pSoll and outputs it to pressure controller 3. The target pressure signal pSoll, corresponding to the target position signal XSoll, is determined, for example, from a table of values ​​stored in the memory of position controller 2. Pressure controller 3 then regulates the pressure to the target pressure p corresponding to the target pressure signal pSoll and supplies this pressure to pneumatic actuator 4. The actual pressure used for regulation, i.e., the pressure resulting from the actuation of pneumatic actuator 4, is measured by pressure sensors (not shown) and supplied to pressure controller 3 as the actual pressure signal. The position signal corresponding to the position of the pneumatic actuator 4 is provided to the position controller device 2 as the actual position value x (P 35528 / PCT … April 14, 2025).P 35528 / PCT … 14. April 2025.

Claims

Claims 1. Pneumatic system (1) for industrial automation, comprising: a position controller (2), at least one pressure controller (3), at least one pneumatic actuator (4), wherein the position controller (2) is configured to perform position control of the pneumatic actuator (4) and, within the scope of position control, to output a setpoint pressure signal to the pressure controller (3), wherein the pressure controller (3) is configured to perform pressure control based on the setpoint pressure signal and, within the scope of pressure control, to actuate the pneumatic actuator (4), a wafer support (21) for supporting a wafer (11), and a positioning structure (22) which can be moved by the pneumatic actuator (4) relative to the wafer support in order to position the wafer (11) relative to the wafer support (21).

1. Pneumatic system according to a preceding claim, wherein the pressure regulator device (3) is arranged separately from the position regulator device (2).

2. Pneumatic system according to a preceding claim, wherein the pressure regulator device (3) has a pressure regulator device outer housing and the position regulator device (2) has a P 35528 / PCT … April 14, 2025, 4. Pressure regulator device outer housing has a separate position regulator device outer housing.

5. Pneumatic system according to one of the preceding claims, wherein an actual pressure signal resulting from the pneumatic actuation of the actuator (4) is supplied to the pressure regulator device (3) and is not supplied to the position regulator device (2). 6.Pneumatic system according to a preceding claim, comprising a plurality of pressure regulator devices (3) and a plurality of pneumatic actuators (4, 16, 17, 24), wherein the position regulator device (2) is configured to perform a respective position control for each pneumatic actuator (4, 16, 17, 24) and, within the scope of the respective position control, to output a respective setpoint pressure signal to a respective pressure regulator device (3), and wherein each pressure regulator device (3) is configured to perform a respective pressure control based on the respective setpoint pressure signal and, within the scope of the respective pressure control, to actuate a respective pneumatic actuator (4, 16, 17, 24). Pneumatic system according to claim 5, wherein the position controller device (2) has a position controller device outer housing and each pressure controller device (3) has a separate pressure controller device outer housing. 7.Pneumatic system according to any preceding claim, wherein each pressure regulator device (3) is configured as a plate-shaped valve module.

8. Pneumatic system according to claim 5 in combination with claim 7, wherein the valve modules are configured in a P 35528 / PCT … April 14, 2025. are arranged in a row and / or are part of a valve manifold (27).

9. Pneumatic system according to any preceding claim, wherein the position controller device (2) is designed as a higher-level control unit, in particular a PLC, on which a position controller program is expediently executed to provide the setpoint pressure signal.

10. Method for operating a pneumatic system according to any of the preceding claims, comprising the steps: performing, by means of the position controller device (2), the position control of the pneumatic actuator (4), output, within the scope of the position control, a setpoint pressure signal to the pressure controller device (3), performing, with the pressure controller device (3), pressure control based on the setpoint pressure signal, and actuating, within the scope of the pressure control, the pneumatic actuator (4). 11.The method of claim 10, further comprising the steps of: moving the valve element (12) into an open position in which the opening (9) is open, and moving the wafer (11) through the opening (9). P 35528 / PCT … April 14, 2025.

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