Magnetic shielding structure and motion stage

Abstract

Provided in the present application are a magnetic shielding structure and a motion stage. The magnetic shielding structure comprises a first magnetic shielding assembly and a second magnetic shielding assembly, wherein the first magnetic shielding assembly comprises a first upper magnetic shielding member and a second upper magnetic shielding member, and the second magnetic shielding assembly comprises a first lower magnetic shielding member, a fixing member and a second lower magnetic shielding member arranged in sequence from top to bottom; a connecting base of an electric motor rotor passes through the first magnetic shielding assembly and is connected to a micro-motion frame, the fixing member is connected to an electric motor stator, and the second lower magnetic shielding member is connected to the fixing member; and the first upper magnetic shielding member and the second lower magnetic shielding member form a closed structure, and / or the first upper magnetic shielding member and the first lower magnetic shielding member form a closed structure, the electric motor rotor and the electric motor stator being located in the closed structure; the deformation of the first magnetic shielding assembly and the second magnetic shielding assembly does not affect the installation accuracy and repeatable installation accuracy of the electric motor rotor and the electric motor stator, while ensuring that the residual magnetism of a wafer surface is controlled at the level of several nanoteslas.

Description

A magnetic shielding structure and motion platform

[0001] This application claims priority to the patent application filed on May 7, 2024, with application number 202410551010.8 and entitled "A Magnetic Shielding Structure and Motion Platform" with the China National Intellectual Property Administration. Technical Field

[0002] This application relates to the field of integrated circuit equipment manufacturing technology, specifically to a magnetic shielding structure and motion platform. Background Technology

[0003] With the rapid development of the semiconductor industry, the manufacturing process of integrated circuits is becoming increasingly sophisticated, placing higher demands on electron beam lithography and wafer inspection technologies. In the manufacturing process of high-end semiconductor equipment (such as electron beam equipment), the motion stage is a key component, and its performance directly affects the quality of the final product and production efficiency.

[0004] In the design and manufacturing of electron beam equipment, the magnetic shielding structure is a crucial component. It is essential to ensure that the remanent magnetization on the wafer surface is controlled within the nanotesla (nT) level. This is because if the remanent magnetization on the wafer surface exceeds a certain limit, it will directly affect the precise control of the electron beam and the processing quality. Traditional magnetic shielding structures typically suffer from several problems, such as precision loss due to magnetic shielding deformation, high processing costs, and insufficient shielding effectiveness.

[0005] In order to effectively control and reduce the residual magnetism on the wafer surface and improve the performance of electron beam equipment, this application provides a magnetic shielding structure and motion platform.

[0006] Application content

[0007] In view of the problems of precision loss, high processing cost, and insufficient shielding effect caused by magnetic shielding deformation in existing magnetic shielding structures, this application provides a magnetic shielding structure and motion platform. This magnetic shielding structure, by setting a first magnetic shielding component and a second magnetic shielding component, allows the motor mover's connecting seat to sequentially pass through the first and second upper magnetic shielding components of the first magnetic shielding component and connect to the micro-motion frame. A fixing component passes through the first lower magnetic shielding component of the second magnetic shielding component and connects to the motor stator. Thus, deformation of the first and second magnetic shielding components will not affect the installation accuracy and repeatability of the micro-motion motor. The first upper magnetic shielding component and the second lower magnetic shielding component form a closed structure, and / or the first upper magnetic shielding component and the first lower magnetic shielding component form a closed structure, with the motor mover and motor stator located within the closed structure. This increases the shielding effect of the first and second magnetic shielding components, ensuring that the residual magnetism on the wafer surface can be controlled at the nanotesla (nT) level.

[0008] One embodiment of this application provides a magnetic shielding structure, comprising:

[0009] The first magnetic shielding assembly includes a first upper magnetic shielding component and a second upper magnetic shielding component. There is a gap between the first upper magnetic shielding component and the second upper magnetic shielding component. The connecting seat of the motor mover of the micro motor passes through the first upper magnetic shielding component and the second upper magnetic shielding component in sequence and is connected to the micro frame.

[0010] The second magnetic shielding assembly includes a first lower magnetic shield and a second lower magnetic shield, as well as a fixing member disposed between the first lower magnetic shield and the second lower magnetic shield. The stator of the micro motor passes through the first lower magnetic shield and is connected to the fixing member, or the fixing member passes through the first lower magnetic shield and is connected to the stator of the micro motor. The second lower magnetic shield is connected to the fixing member. The fixing member is made of a non-magnetic metal material.

[0011] Wherein, the first upper magnetic shield and the second lower magnetic shield form a closed structure, and / or the first upper magnetic shield and the first lower magnetic shield form a closed structure, and the motor mover and the motor stator are located within the closed structure.

[0012] In one embodiment, the outer edges of the first upper magnetic shield and the second lower magnetic shield are located outside the outer edge of the first lower magnetic shield;

[0013] The first lower magnetic shielding component includes a first lower magnetic shielding plate and a first lower folded edge that is vertically arranged around the outer periphery of the first lower magnetic shielding plate.

[0014] In one embodiment, the first upper magnetic shielding component includes a first upper magnetic shielding plate and a first upper folded edge that is vertically disposed around the outer periphery of the first upper magnetic shielding plate;

[0015] The second lower magnetic shielding component includes a second lower magnetic shielding plate;

[0016] The first upper folded edge is connected to the fixing member, and there is a gap between the first upper folded edge and the second lower magnetic shielding plate, and the first lower folded edge abuts against the first upper magnetic shielding plate; or, the first upper folded edge abuts against the second lower magnetic shielding plate, the first lower folded edge abuts against the first upper magnetic shielding plate, or there is a gap between the two.

[0017] There is a gap between the first upper fold and the first lower fold.

[0018] In one embodiment, the first upper magnetic shielding component includes a first upper magnetic shielding plate;

[0019] The second lower magnetic shielding component includes a second lower magnetic shielding plate and a second lower flange that is vertically arranged around the outer periphery of the second lower magnetic shielding plate;

[0020] The second lower folded edge is connected to the first upper magnetic shielding plate, and the first lower folded edge abuts against the first upper magnetic shielding plate or there is a gap between the two;

[0021] There is a gap between the first lower fold and the second lower fold.

[0022] In one embodiment, the second upper magnetic shielding component includes a second upper magnetic shielding plate; or, the second upper magnetic shielding component includes a second upper magnetic shielding plate and a second upper flange vertically disposed around the outer periphery of the second upper magnetic shielding plate.

[0023] In one embodiment, the first magnetic shielding assembly further includes at least one third upper magnetic shielding component. The connecting seat of the motor mover passes through the first upper magnetic shielding component, the second upper magnetic shielding component, and the third upper magnetic shielding component in sequence and is connected to the micro-motion frame. There is a gap between the third upper magnetic shielding component and the second upper magnetic shielding component.

[0024] In one embodiment, the third upper magnetic shielding component includes a third upper magnetic shielding plate;

[0025] Alternatively, the third upper magnetic shielding component may include a third upper magnetic shielding plate and a third upper flange that is vertically arranged around the outer periphery of the third upper magnetic shielding plate.

[0026] In one implementation, the height of the third upper folded edge is between 5mm and 20mm.

[0027] In one embodiment, a barrier layer is filled between the first upper magnetic shield, the second upper magnetic shield, and the third upper magnetic shield, and the barrier layer is made of a non-magnetic metal material.

[0028] In one embodiment, the first upper magnetic shield and the second upper magnetic shield are provided with a first boss.

[0029] In one embodiment, the thicknesses of the first upper magnetic shield, the second upper magnetic shield, the third upper magnetic shield, the first lower magnetic shield, and the second lower magnetic shield are all between 2 mm and 4 mm.

[0030] In one embodiment, the distance between the first upper magnetic shield and the second upper magnetic shield, and the distance between the second upper magnetic shield and the third upper magnetic shield are between 2mm and 3mm.

[0031] In one embodiment, the first upper magnetic shield, the second upper magnetic shield, and the third upper magnetic shield are all provided with a first through hole, and the connecting seat of the motor mover passes through the first through hole in sequence to connect with the micro-motion frame.

[0032] The first lower magnetic shield is provided with a second through hole, through which the motor stator is connected to the fixing member; or, the fixing member is connected to the motor stator through the second through hole.

[0033] In one implementation, a plurality of motor actuators are arranged circumferentially around the side of the first upper magnetic shield away from the second upper magnetic shield;

[0034] A plurality of motor stators are arranged circumferentially around the side of the first lower magnetic shield away from the fixing member;

[0035] The motor mover corresponds one-to-one with the motor stator.

[0036] Another embodiment of this application provides a motion platform, including the magnetic shielding structure described in any of the above claims, a micro motor, a micro frame, and a micro base plate. The connecting seat of the motor mover of the micro motor passes through the first upper magnetic shield and the second upper magnetic shield in the magnetic shielding structure and is connected to the micro frame. The motor stator of the micro motor passes through the first lower magnetic shield in the magnetic shielding structure and is connected to a fixing member. Alternatively, the fixing member has a second protrusion on the side near the first lower magnetic shield in the magnetic shielding structure, and the second protrusion passes through the first lower magnetic shield and is connected to the motor stator of the micro motor. The thickness of the second protrusion is greater than the thickness of the first lower magnetic shield. The fixing member has a third protrusion on the side near the second lower magnetic shield, and the fixing member is connected to the micro base plate through the third protrusion. The thickness of the third protrusion is greater than the thickness of the second lower magnetic shield.

[0037] As described above, the magnetic shielding structure and motion platform of this application have the following beneficial effects:

[0038] The magnetic shielding structure of this application comprises a first magnetic shielding component and a second magnetic shielding component. The connecting seat of the motor mover passes sequentially through the first upper magnetic shielding component and the second upper magnetic shielding component of the first magnetic shielding component to connect with the micro-motion frame. The motor stator passes through the first lower magnetic shielding component of the second magnetic shielding component to connect with the fixing component, or the fixing component passes through the first lower magnetic shielding component to connect with the motor stator. Since the motor mover is directly connected to the micro-motion frame and the motor stator is directly connected to the fixing component, the deformation of the first and second magnetic shielding components will not affect the installation accuracy and repeatability of the micro-motion motor. The installation accuracy is such that the thickness, shape, and deformation caused by processing of the first and second magnetic shielding components will not affect the vertical assembly error, because neither the first nor the second magnetic shielding components participate in the vertical dimensional chain. The first upper magnetic shielding component and the second lower magnetic shielding component form a closed structure, and / or the first upper magnetic shielding component and the first lower magnetic shielding component form a closed structure. The motor mover and the motor stator are located within the closed structure. The closed structure can increase the shielding effect, so that the residual magnetism on the wafer surface is controlled at the level of 1 to 2 nT, and the simulation optimal value is less than 1 nT. Attached Figure Description

[0039] Figure 1 shows a schematic diagram of a magnetic shielding structure according to Embodiment 1 of this application;

[0040] Figure 2 shows a schematic diagram of another magnetic shielding structure according to Embodiment 1 of this application;

[0041] Figure 3 shows a schematic diagram of another magnetic shielding structure according to Embodiment 1 of this application;

[0042] Figure 4 shows a schematic diagram of a magnetic shielding structure according to Embodiment 2 of this application;

[0043] Figure 5 shows a schematic diagram of another magnetic shielding structure according to Embodiment 2 of this application;

[0044] Figure 6 shows an exploded structural diagram of the magnetic shielding structure of Embodiment 3 of this application;

[0045] Figure 7 shows an exploded view of the first magnetic shielding component in the magnetic shielding structure of Embodiment 3 of this application;

[0046] Figure 8 shows a schematic diagram of the structure of the first magnetic shielding component in the magnetic shielding structure of Embodiment 3 of this application;

[0047] Figure 9 shows a schematic diagram of the structure of the first upper magnetic shielding component in the first magnetic shielding assembly of Embodiment 3 of this application;

[0048] Figure 10 shows a schematic diagram of the structure of the second upper magnetic shielding component in the first magnetic shielding assembly of Embodiment 3 of this application;

[0049] Figure 11 shows a schematic diagram of the structure of the third upper magnetic shielding component in the first magnetic shielding assembly of Embodiment 3 of this application;

[0050] Figure 12 shows an exploded view of the second magnetic shielding component in the magnetic shielding structure of Embodiment 3 of this application;

[0051] Figure 13 shows a schematic diagram of the structure of the second magnetic shielding component in the magnetic shielding structure of Embodiment 3 of this application;

[0052] Figure 14 shows a schematic diagram of the structure of the first lower magnetic shielding component in the second magnetic shielding assembly of Embodiment 3 of this application;

[0053] Figure 15 shows a schematic diagram of the structure of the second lower magnetic shielding component in the second magnetic shielding assembly of Embodiment 3 of this application;

[0054] Figure 16 shows a simulation diagram of the residual magnetism on the surface of a wafer along the Bx direction in the magnetic shielding structure of Embodiment 3 of this application;

[0055] Figure 17 shows a simulation diagram of the residual magnetism on the surface of a wafer along the By direction in the magnetic shielding structure of Embodiment 3 of this application;

[0056] Figure 18 shows an exploded structural diagram of the motion platform of Embodiment 4 of this application.

[0057] Component labeling: 100, First magnetic shielding assembly; 110, First upper magnetic shielding component; 111, First upper magnetic shielding plate; 112, First upper folded edge; 120, Second upper magnetic shielding component; 130, Third upper magnetic shielding component; 131, Third upper magnetic shielding plate; 132, Third upper folded edge; 200, Second magnetic shielding assembly; 210, First lower magnetic shielding component; 211, First lower magnetic shielding plate; 212, First lower folded edge; 220, Fixing component; 230, Second lower magnetic shielding component; 231, Second lower magnetic shielding plate; 232, Second lower folded edge; 300, Micro motor; 310, Motor mover; 320, Motor stator; 330, Connecting seat; 400, Micro frame; 500, Micro base plate. Detailed Implementation

[0058] The following specific examples illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. This application can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this application.

[0059] Please refer to Figures 1 to 18. It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this application. Therefore, the illustrations only show the components related to this application and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0060] Example 1

[0061] This embodiment provides a magnetic shielding structure, as shown in Figures 1 to 3. The magnetic shielding structure includes a first magnetic shielding component 100 and a second magnetic shielding component 200.

[0062] As shown in Figures 1 to 3, from bottom to top, the first magnetic shielding assembly 100 includes a first upper magnetic shielding member 110 and a second upper magnetic shielding member 120 arranged sequentially, with a gap between them. As shown in the figures, from top to bottom, the second magnetic shielding assembly 200 includes a first lower magnetic shielding member 210, a fixing member 220, and a second lower magnetic shielding member 230 arranged sequentially. The connecting seat 330 of the motor mover 310 of the micro-motor 300 passes through the first upper magnetic shielding member 110 and the second upper magnetic shielding member 120 sequentially from bottom to top and connects to the micro-motor frame 400. The first magnetic shielding assembly 100 does not participate in the vertical dimension; when the first magnetic shielding assembly 100 deforms, it will not affect the assembly or the Z-axis dimensional chain. The stator 320 of the micro motor 300 passes through the first lower magnetic shield 210 and is connected to the fixing member 220, or the fixing member 220 passes through the first lower magnetic shield 210 and is connected to the stator 320 of the micro motor 300; the second lower magnetic shield 230 is connected to the fixing member 220, and the second magnetic shield assembly 200 does not participate in the vertical dimension. When the second magnetic shield assembly 200 deforms, it will not affect the Z-axis dimension chain. The motion platform mainly includes a micro-motion frame 400, a micro-motion motor 300 with a motor mover 310 and a motor stator 320. Horizontally, the main mechanical interfaces of the motion platform are on the surface of the horizontal frame of the micro-motion frame 400 near the motor mover 310 (i.e., the lower surface of the horizontal frame of the micro-motion frame 400, labeled A in Figure 1, hereinafter referred to as surface A), and on the horizontal surface of the motor mover 310 near the micro-motion frame 400 (i.e., the upper surface of the horizontal surface of the motor mover 310, labeled B in Figure 1, hereinafter referred to as surface B). The vertical dimension (or Z-axis dimensional chain) of the motion platform... This mainly includes the vertical thickness of the micro-motion frame 400 (labeled a in Figure 1), the vertical distance between surface A and surface B (labeled b in Figure 1), and the vertical thickness of the motor mover 310 (labeled c in Figure 1). Since the first upper magnetic shield 110 and the second upper magnetic shield 120 do not contact surfaces A and B, and the connecting seat 330 of the motor mover 310 also does not contact surfaces A and B (the connecting seat 330 only passes through but does not contact), the first magnetic shield assembly 100 does not participate in the vertical dimension. When the first magnetic shield assembly 100 deforms, it will not affect the assembly and the Z-axis dimensional chain. In addition to the vertical dimension of the motion platform not being affected by the first magnetic shield assembly 100, since the connecting seat 330 of the motor mover 310 does not contact the first upper magnetic shield 110 and the second upper magnetic shield 120, other dimensions of the motion platform (such as horizontal dimensions) will also not be affected by the first magnetic shield assembly 100. As for the second magnetic shielding component 200, since the second magnetic shielding component 200 does not affect the vertical distance between surface A and surface B, the second magnetic shielding component 200 will not affect the vertical dimension of the motion platform.Due to the aforementioned connection relationship between the first magnetic shielding component 100 and the second magnetic shielding component 200 and the micro motor 300, deformation of the first magnetic shielding component 100 and / or the second magnetic shielding component 200 will not affect the installation accuracy and repeatability of the micro motor 300.

[0063] In this design, the first upper magnetic shield 110 and the second lower magnetic shield 230 form a closed structure, and / or the first upper magnetic shield 110 and the first lower magnetic shield 210 form a closed structure, with the motor mover 310 and the motor stator 320 located within the closed structure. This closed structure can correspondingly form a closed space. Since the motor mover 310 and the motor stator 320 are located within the closed space, most of the magnetic field lines generated by the micro-motor 300 are confined within this space. If such a closed space is not formed (i.e., a large gap exists), the magnetic field lines generated by the micro-motor 300 will escape through the gap and reach the upper wafer, resulting in increased remanence at the wafer. The first magnetic shielding component 100 and the second magnetic shielding component 200 are generally made of magnetically conductive materials with low saturation permeability, typically permalloy. This closed structure increases the shielding effect of the first magnetic shielding component 100 and the second magnetic shielding component 200, controlling the remanence on the wafer surface to the nanotesla (nT) level.

[0064] In an optional embodiment, the fastener 220 is made of a non-magnetic metal material. Using a non-magnetic metal material, the fastener 220, in addition to fixing the motor stator 320 to the first lower magnetic shield 210 and the second lower magnetic shield 230, also serves to cool and dissipate heat from the motor stator 320. It is understood that the fastener 220 includes a plate-shaped main body.

[0065] As shown in Figures 1 to 3, the outer edges of the first upper magnetic shield 110 and the second lower magnetic shield 230 are both located outside the outer edge of the first lower magnetic shield 210. In other words, the outer edge of the first lower magnetic shield 210 is located inside the outer edge of the first upper magnetic shield 110, and the outer edge of the first lower magnetic shield 210 is located inside the outer edge of the second lower magnetic shield 230. The first lower magnetic shield 210 includes a first lower magnetic shield plate 211 and a first lower flange 212 vertically arranged around the outer periphery of the first lower magnetic shield plate 211.

[0066] In an optional embodiment, the first upper magnetic shield 110 and the second lower magnetic shield 230 form a closed structure, and the first upper magnetic shield 110 and the first lower magnetic shield 210 form a closed structure. As shown in FIG1, the first upper magnetic shield 110 includes a first upper magnetic shield plate 111 and a first upper flange 112 vertically arranged around the outer periphery of the first upper magnetic shield plate 111; the second lower magnetic shield 230 includes a second lower magnetic shield plate 231; the first upper flange 112 abuts against the second lower magnetic shield plate 231, and the first lower flange 212 abuts against the first upper magnetic shield plate 111; there is a gap between the first upper flange 112 and the first lower flange 212.

[0067] In an optional embodiment, the first upper magnetic shielding member 110 and the first lower magnetic shielding member 210 form a closed structure. As shown in FIG2, the first upper flange 112 is connected to the fixing member 220, and there is a gap between the first upper flange 112 and the second lower magnetic shielding plate 231, while the first lower flange 212 abuts against the first upper magnetic shielding plate 111. The distance between the first upper flange 112 and the second lower magnetic shielding plate 231 is sufficient to allow the first upper flange 112 to be connected to the fixing member 220.

[0068] In an optional embodiment, the first upper magnetic shield 110 and the second lower magnetic shield 230 form a closed structure. As shown in FIG3, the first upper folded edge 112 abuts against the second lower magnetic shield 231, and there is a gap between the first lower folded edge 212 and the first upper magnetic shield 111.

[0069] In an optional embodiment, as shown in Figures 1 to 3, the second upper magnetic shielding component 120 includes a second upper magnetic shielding plate. Alternatively, the second upper magnetic shielding component 120 may include a second upper magnetic shielding plate and a second upper flange perpendicularly disposed around the outer periphery of the second upper magnetic shielding plate.

[0070] Example 2

[0071] This embodiment also provides a magnetic shielding structure, which also includes a first magnetic shielding component 100 and a second magnetic shielding component 200. The first magnetic shielding component 100 includes a first upper magnetic shielding member 110 and a second upper magnetic shielding member 120 arranged sequentially, and the second magnetic shielding component 200 includes a first lower magnetic shielding member 210, a fixing member 220, and a second lower magnetic shielding member 230 arranged sequentially. The difference from Embodiment 1 is that:

[0072] The first upper magnetic shielding component 110 includes a first upper magnetic shielding plate 111; the second lower magnetic shielding component 230 includes a second lower magnetic shielding plate 231 and a second lower folded edge 232 vertically arranged around the outer periphery of the second lower magnetic shielding plate 231; there is a gap between the first lower folded edge 212 and the second lower folded edge 232.

[0073] In an optional embodiment, the first upper magnetic shield 110 and the second lower magnetic shield 230 form a closed structure, and the first upper magnetic shield 110 and the first lower magnetic shield 210 form a closed structure. As shown in FIG4, the second lower folded edge 232 is connected to the first upper magnetic shield 111, and the first lower folded edge 212 abuts against the first upper magnetic shield 111.

[0074] In an optional embodiment, the first upper magnetic shield 110 and the second lower magnetic shield 230 form a closed structure. As shown in FIG5, the second lower folded edge 232 is connected to the first upper magnetic shield 111, and there is a gap between the first lower folded edge 212 and the first upper magnetic shield 111.

[0075] Example 3

[0076] This embodiment also provides a magnetic shielding structure, which also includes a first magnetic shielding component 100 and a second magnetic shielding component 200. The first magnetic shielding component 100 includes a first upper magnetic shielding member 110 and a second upper magnetic shielding member 120 arranged sequentially, and the second magnetic shielding component 200 includes a first lower magnetic shielding member 210, a fixing member 220, and a second lower magnetic shielding member 230 arranged sequentially. The difference from Embodiment 1 or Embodiment 2 is that:

[0077] As shown in Figures 6 to 8 and Figure 11, the first magnetic shielding assembly 100 further includes at least one third upper magnetic shielding component 130, which is located above the second upper magnetic shielding component 120 and has a gap with the second upper magnetic shielding component 120; the connecting seat 330 of the motor mover 310 passes through the first upper magnetic shielding component 110, the second upper magnetic shielding component 120, and the third upper magnetic shielding component 130 in sequence and is connected to the micro-motion frame 400.

[0078] In an optional embodiment, as shown in FIG11, the third upper magnetic shielding member 130 includes a third upper magnetic shielding plate 131 and a third upper flange 132 vertically disposed around the outer periphery of the third upper magnetic shielding plate 131. Optionally, the third upper magnetic shielding member 130 may also include only the third upper magnetic shielding plate 131.

[0079] In an optional embodiment, the first upper magnetic shield 110, the second upper magnetic shield 120, and the third upper magnetic shield 130 are all provided with first through holes, and the connecting seat 330 of the motor mover 310 passes through the first through holes and connects to the micro-motion frame 400 in sequence. Specifically, the first upper magnetic shielding plate 111, the second upper magnetic shielding plate, and the third upper magnetic shielding plate 131 are all provided with first through holes. The connecting seat 330 of the motor mover 310 passes through the first through holes of the first upper magnetic shielding plate 111, the second upper magnetic shielding plate, and the third upper magnetic shielding plate 131 in sequence and is connected to the micro-motion frame 400 by screws. Since the motor mover 310, the connecting seat 330, and the micro-motion frame 400 do not directly contact the first upper magnetic shielding plate 111, the second upper magnetic shielding plate, and the third upper magnetic shielding plate 131, the first upper magnetic shielding plate 111, the second upper magnetic shielding plate, and the third upper magnetic shielding plate 131 do not participate in the dimensional chain in each direction. They only have first through holes, which can ensure the installation accuracy and repeatability of the motor mover 310. The diameter of the first through hole on the first upper magnetic shielding plate 111, the second upper magnetic shielding plate, and the third upper magnetic shielding plate 131 is 3mm to 5mm larger than the size of the connecting seat 330 of the motor mover 310, ensuring that there is sufficient travel between the motor mover 310 and the motor stator 320, and that no interference occurs when the motor mover 310 and the motor stator 320 need to complete the coupling travel (i.e., when X, Y, Z, Rx, Ry, and Rz are all at the travel limit position).

[0080] To achieve the gaps between the first upper magnetic shielding component 110 and the second upper magnetic shielding component 120, and between the second upper magnetic shielding component 120 and the third upper magnetic shielding component 130, various methods can be employed. One method involves filling the spaces between the first upper magnetic shielding plate 111 in the first upper magnetic shielding component 110, the second upper magnetic shielding plate in the second upper magnetic shielding component 120, and the third upper magnetic shielding plate 131 in the third upper magnetic shielding component 130 with a barrier layer. By fixing these structures together, all components in the first magnetic shielding assembly 100 do not participate in the dimensional chain and are only responsible for blocking magnetic field leakage, thus achieving a very good magnetic shielding effect. The barrier layer is made of a non-magnetic metal material, such as aluminum alloy or titanium alloy. Another method could be: a first protrusion is provided on the side of the first upper magnetic shielding plate 111 in the first upper magnetic shielding member 110 near the second upper magnetic shielding plate, and a first protrusion is provided on the side of the second upper magnetic shielding plate in the second upper magnetic shielding member 120 near the third upper magnetic shielding plate 131. It is understood that as long as the gaps between the first upper magnetic shielding member 110 and the second upper magnetic shielding member 120, and between the second upper magnetic shielding member 120 and the third upper magnetic shielding member 130, can be achieved, they should all be within the scope of protection of this application.

[0081] In an optional embodiment, the larger the range of the gap dimensions between the first upper magnetic shielding component 110 and the second upper magnetic shielding component 120, and between the second upper magnetic shielding component 120 and the third upper magnetic shielding component 130, the better the effect. Considering the limitation of the height dimension of the first magnetic shielding assembly 100 in the Z direction, the distance between the first upper magnetic shielding component 110 and the second upper magnetic shielding component 120, and between the second upper magnetic shielding component 120 and the third upper magnetic shielding component 130, is designed to be between 2mm and 3mm, which yields the best results. Specifically, the distance between the first upper magnetic shielding plate 111 and the second upper magnetic shielding plate, and between the second upper magnetic shielding plate and the third upper magnetic shielding plate 131, is between 2mm and 3mm. For example, the distance between the first upper magnetic shielding plate 111 and the second upper magnetic shielding plate, and the distance between the second upper magnetic shielding plate and the third upper magnetic shielding plate 131, can be 2mm, 2.2mm, 2.4mm, 2.6mm, 2.8mm, 3mm, etc.

[0082] In an optional embodiment, the thicknesses of the first upper magnetic shielding member 110, the second upper magnetic shielding member 120, the third upper magnetic shielding member 130, the first lower magnetic shielding member 210, and the second lower magnetic shielding member 230 are all between 2mm and 4mm, resulting in the best performance. Specifically, the thicknesses of the first upper magnetic shielding plate 111, the second upper magnetic shielding plate, the third upper magnetic shielding plate 131, the first lower magnetic shielding plate 211, and the second lower magnetic shielding plate 231 are all between 2mm and 4mm. For example, the thicknesses of the first upper magnetic shielding plate 111, the second upper magnetic shielding plate, the third upper magnetic shielding plate 131, the first lower magnetic shielding plate 211, and the second lower magnetic shielding plate 231 can be 2mm, 3mm, 4mm, etc.

[0083] In an optional embodiment, the height of the third upper edge 132 is between 5mm and 20mm, at which point the benefit is highest. When the height of the third upper edge 132 is zero, that is, when the third upper magnetic shielding 130 does not include the third upper edge 132, tests show that the remanence of the wafer surface increases by 2nT to 3nT. Optionally, the height of the third upper edge 132 can be, for example, 5mm, 7mm, 9mm, 11mm, 13mm, 15mm, 17mm, 19mm, 20mm, etc.

[0084] In an optional embodiment, the first lower magnetic shield 210 is provided with a second through hole. Specifically, the first lower magnetic shield plate 211 of the first lower magnetic shield 210 is provided with a second through hole, through which the motor stator 320 passes and is connected to the fixing member 220; or, the fixing member 220 passes through the second through hole and is connected to the motor stator 320 by screws. Since the first lower magnetic shield plate 211 and the motor stator 320 are not in direct contact, the deformation of the first lower magnetic shield plate 211 will not affect the installation accuracy of the motor stator 320, and the deformation of the first lower magnetic shield plate 211 will not affect the Z-axis dimensional chain. The second lower magnetic shield 230 is directly connected to the fixing member 220. Since the first lower magnetic shield 210 and the second lower magnetic shield 230 do not directly contact the motor stator 320, the motor stator 320 is not affected by the deformation of the first lower magnetic shield 210 and the second lower magnetic shield 230. The first lower magnetic shield 210 and the second lower magnetic shield 230 do not participate in the Z-axis dimensional chain, thus ensuring the Z-axis height dimension of the entire second magnetic shield assembly 200. In addition, the high machining accuracy of the fastener 220 ensures the installation accuracy and repeatability of the motor stator 320.

[0085] In an optional embodiment, a plurality of motor movers 310 are arranged circumferentially around the side of the first upper magnetic shield 110 away from the second upper magnetic shield 120; a plurality of motor stators 320 are arranged circumferentially around the side of the first lower magnetic shield 210 away from the fixing member 220; the motor movers 310 and motor stators 320 correspond one-to-one. Specifically, a plurality of motor movers 310 are arranged circumferentially around the side of the first upper magnetic shield 111 away from the second upper magnetic shield; a plurality of motor stators 320 are arranged circumferentially around the side of the first lower magnetic shield 211 away from the fixing member 220; the motor movers 310 and motor stators 320 correspond one-to-one.

[0086] To further illustrate the connection between the motor mover 310 and the first magnetic shielding component 100 in the micro motor 300 and the connection between the motor stator 320 and the second magnetic shielding component 200 in the micro motor 300 in this embodiment, the first magnetic shielding component 100 and the second magnetic shielding component 200 are described as having a hexagonal ring structure. It is understood that the shapes of the first magnetic shielding component 100 and the second magnetic shielding component 200 in this embodiment can be designed according to actual needs, and are therefore not limited to the hexagonal ring structure exemplified in this embodiment.

[0087] In one embodiment, as shown in Figures 7 to 11, this embodiment uses six motor movers 310 to achieve six degrees of freedom of motion. The first upper magnetic shielding plate 111 in the first upper magnetic shielding component 110, the second upper magnetic shielding plate in the second upper magnetic shielding component 120, and the third upper magnetic shielding plate 131 in the third upper magnetic shielding component 130 are designed as a hexagonal ring structure. A motor mover 310 is set on each side. The connecting seat 330 of the motor mover 310 passes through the first upper magnetic shielding plate 111, the second upper magnetic shielding plate, and the third upper magnetic shielding plate 131 in sequence and is connected to the micro-motion frame 400. Similarly, as shown in Figures 12 to 15, in order to achieve six degrees of freedom of motion, six motor stators 320 are used. The first lower magnetic shielding plate 211 in the first lower magnetic shielding component 210, the fixing component 220, and the second lower magnetic shielding plate 231 in the second lower magnetic shielding component 230 are designed as a hexagonal ring structure. A motor stator 320 is set on each side of the first lower magnetic shielding plate 211 away from the fixing component 220. Each motor stator 320 is integrated with the corresponding motor mover 310.

[0088] In this embodiment, the remanence of the wafer surface was tested under the magnetic shielding structure. As shown in Figures 16 and 17, the maximum value of the remanence of the wafer surface was controlled between 1nT and 2nT.

[0089] Example 4

[0090] This embodiment provides a motion platform, as shown in Figure 18. The motion platform includes a magnetic shielding structure, a micro motor 300, a micro-motion frame 400, and a micro-motion base plate 500. The magnetic shielding structure can be the magnetic shielding structure provided in Embodiment 1, Embodiment 2, or Embodiment 3. The connecting seat 330 of the motor mover 310 of the micro motor 300 passes through the first upper magnetic shield 110 and the second upper magnetic shield 120 in the magnetic shielding structure and is connected to the micro-motion frame 400. The motor stator 320 of the micro motor 300 passes through the first lower magnetic shield 210 in the magnetic shielding structure and is connected to the fixing member 220. Alternatively, the fixing member 220 has a second boss on the side near the first lower magnetic shield 210. The second boss passes through the first lower magnetic shield 210 in the magnetic shielding structure and is connected to the motor stator 320 of the micro motor 300. The thickness of the second boss is greater than the thickness of the first lower magnetic shield 210. The fixing member 220 has a third boss on the side near the second lower magnetic shield 230. The fixing member 220 is connected to the micro-motion base plate 500 through the third boss. The thickness of the third boss is greater than the thickness of the second lower magnetic shield 230. Since the motor stator 320 passes through the first lower magnetic shield 210 and is connected to the fixing member 220, or the second boss passes through the first lower magnetic shield 210 and is connected to the motor stator 320; and the third boss passes through the second lower magnetic shield 231 and is connected to the micro-motion base plate 500, the dimensional deformation of the first lower magnetic shield 210 and the second lower magnetic shield 230 will not affect the Z-axis dimensional chain; moreover, the fixing member 220 has high machining accuracy, which can ensure the installation accuracy and repeatability accuracy of the motor stator 320.

[0091] The motion platform provided in this embodiment can be a multi-degree-of-freedom motion platform. By setting multiple motor movers 310 and motor stators 320, it provides thrust in the horizontal and vertical directions, thereby realizing multiple degrees of freedom of motion. For example, six motor movers 310 and six motor stators 320 can be set to realize a six-degree-of-freedom platform with high-precision positioning and high-precision installation of the motor movers 310 and motor stators 320 in a vacuum environment, where the remanence of the wafer surface is on the order of several nT.

[0092] The above embodiments are merely illustrative of the principles and effects of this application and are not intended to limit this application. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this application. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this application should still be covered by the claims of this application.

Claims

1. A magnetic shielding structure, characterized in that, include: The first magnetic shielding assembly (100) includes a first upper magnetic shielding component (110) and a second upper magnetic shielding component (120). There is a gap between the first upper magnetic shielding component (110) and the second upper magnetic shielding component (120). The connecting seat (330) of the motor mover (310) of the micro motor (300) passes through the first upper magnetic shielding component (110) and the second upper magnetic shielding component (120) in sequence and is connected to the micro frame (400). The second magnetic shielding assembly (200) includes a first lower magnetic shielding component (210) and a second lower magnetic shielding component (230), and a fixing component (220) disposed between the first lower magnetic shielding component (210) and the second lower magnetic shielding component (230); the motor stator (320) of the micro motor (300) passes through the first lower magnetic shielding component (210) and is connected to the fixing component (220), or the fixing component (220) passes through the first lower magnetic shielding component (210) and is connected to the motor stator (320) of the micro motor (300); the second lower magnetic shielding component (230) is connected to the fixing component (220); the fixing component (220) is made of a non-magnetic metal material; The first upper magnetic shield (110) and the second lower magnetic shield (230) form a closed structure, and / or the first upper magnetic shield (110) and the first lower magnetic shield (210) form a closed structure, and the motor mover (310) and the motor stator (320) are located within the closed structure.

2. The magnetic shielding structure according to claim 1, characterized in that, The outer edges of the first upper magnetic shield (110) and the second lower magnetic shield (230) are located outside the outer edge of the first lower magnetic shield (210); The first lower magnetic shielding component (210) includes a first lower magnetic shielding plate (211) and a first lower flange (212) that is vertically arranged around the outer periphery of the first lower magnetic shielding plate (211).

3. The magnetic shielding structure according to claim 2, characterized in that, The first upper magnetic shielding component (110) includes a first upper magnetic shielding plate (111) and a first upper flange (112) vertically arranged around the outer periphery of the first upper magnetic shielding plate (111); The second lower magnetic shielding component (230) includes a second lower magnetic shielding plate (231); The first upper folded edge (112) is connected to the fixing member (220), and there is a gap between the first upper folded edge (112) and the second lower magnetic shielding plate (231), and the first lower folded edge (212) abuts against the first upper magnetic shielding plate (111); or, the first upper folded edge (112) abuts against the second lower magnetic shielding plate (231), the first lower folded edge (212) abuts against the first upper magnetic shielding plate (111), or there is a gap between the two; There is a gap between the first upper fold (112) and the first lower fold (212).

4. The magnetic shielding structure according to claim 2, characterized in that, The first upper magnetic shielding component (110) includes a first upper magnetic shielding plate (111); The second lower magnetic shielding component (230) includes a second lower magnetic shielding plate (231) and a second lower flange (232) vertically arranged around the outer periphery of the second lower magnetic shielding plate (231); The second lower folded edge (232) is connected to the first upper magnetic shielding plate (111), and the first lower folded edge (212) abuts against the first upper magnetic shielding plate (111) or there is a gap between the two; There is a gap between the first lower layer fold (212) and the second lower layer fold (232).

5. The magnetic shielding structure according to claim 1, characterized in that, The second upper magnetic shielding component (120) includes a second upper magnetic shielding plate; or, the second upper magnetic shielding component (120) includes a second upper magnetic shielding plate and a second upper flange that is vertically arranged around the outer periphery of the second upper magnetic shielding plate.

6. The magnetic shielding structure according to claim 1, characterized in that, The first magnetic shielding assembly (100) further includes at least one third upper magnetic shielding element (130). The connecting seat (330) of the motor mover (310) passes through the first upper magnetic shielding element (110), the second upper magnetic shielding element (120), and the third upper magnetic shielding element (130) in sequence and is connected to the micro-motion frame (400). There is a gap between the third upper magnetic shielding element (130) and the second upper magnetic shielding element (120).

7. The magnetic shielding structure according to claim 6, characterized in that, The third upper magnetic shielding component (130) includes a third upper magnetic shielding plate (131); Alternatively, the third upper magnetic shielding component (130) may include a third upper magnetic shielding plate (131) and a third upper flange (132) that is vertically arranged around the outer periphery of the third upper magnetic shielding plate (131).

8. The magnetic shielding structure according to claim 7, characterized in that, The height of the third upper fold (132) is between 5mm and 20mm.

9. The magnetic shielding structure according to claim 6, characterized in that, A barrier layer is filled between the first upper magnetic shield (110), the second upper magnetic shield (120), and the third upper magnetic shield (130), and the barrier layer is made of a non-magnetic metal material.

10. The magnetic shielding structure according to claim 6, characterized in that, The first upper magnetic shield (110) and the second upper magnetic shield (120) are provided with a first boss.

11. The magnetic shielding structure according to claim 6, characterized in that, The thicknesses of the first upper magnetic shield (110), the second upper magnetic shield (120), the third upper magnetic shield (130), the first lower magnetic shield (210), and the second lower magnetic shield (230) are all between 2 mm and 4 mm.

12. The magnetic shielding structure according to claim 6, characterized in that, The distance between the first upper magnetic shield (110) and the second upper magnetic shield (120), and the distance between the second upper magnetic shield (120) and the third upper magnetic shield (130) are between 2 mm and 3 mm.

13. The magnetic shielding structure according to claim 6, characterized in that, The first upper magnetic shield (110), the second upper magnetic shield (120), and the third upper magnetic shield (130) are all provided with a first through hole, and the connecting seat (330) of the motor mover (310) passes through the first through hole and is connected to the micro-motion frame (400). The first lower magnetic shield (210) is provided with a second through hole, through which the motor stator (320) passes and is connected to the fixing member (220); or, the fixing member (220) passes through the second through hole and is connected to the motor stator (320).

14. The magnetic shielding structure according to claim 1, characterized in that, A plurality of motor movers (310) are arranged circumferentially around the side of the first upper magnetic shield (110) away from the second upper magnetic shield (120); A plurality of motor stators (320) are arranged circumferentially around the side of the first lower magnetic shield (210) away from the fixing member (220); The motor mover (310) corresponds one-to-one with the motor stator (320).

15. A motion platform, characterized in that, The system includes the magnetic shielding structure, micro motor (300), micro frame (400), and micro base plate (500) as described in any one of claims 1 to 14. The connecting seat (330) of the motor mover (310) of the micro motor (300) passes sequentially through the first upper magnetic shielding member (110) and the second upper magnetic shielding member (120) in the magnetic shielding structure and is connected to the micro frame (400). The motor stator (320) of the micro motor (300) passes through the first lower magnetic shielding member (210) in the magnetic shielding structure and is connected to the fixing member (220), or the fixing member (220) is close to the... A second protrusion is provided on one side of the first lower magnetic shielding member (210) in the magnetic shielding structure. The second protrusion passes through the first lower magnetic shielding member (210) and is connected to the motor stator (320) of the micro motor (300). The thickness of the second protrusion is greater than the thickness of the first lower magnetic shielding member (210). A third protrusion is provided on the side of the fixing member (220) near the second lower magnetic shielding member (230). The fixing member (220) is connected to the micro-motion base plate (500) through the third protrusion. The thickness of the third protrusion is greater than the thickness of the second lower magnetic shielding member (230).

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