Conveyance support device and conveyance support system

Abstract

Provided is a conveyance support device to be used in a substrate processing system for processing substrates, said conveyance support device comprising two rails, two support members, and two arms. Each of the support members moves along the rails and supports a container that accommodates a substrate. Each of the arms extends and retracts in a direction along the lateral surface of a load port to which the container is to be attached, thereby supporting the raising and lowering of the rails and the support members.

Description

Transport support device and transport support system

[0001] Various aspects and embodiments of the present disclosure relate to a transportation assistance device and a transportation assistance system.

[0002] Japanese Patent Laid-Open No. 2006-103499 discloses a load port device that, when a container for accommodating semiconductor wafers is placed outside a substrate processing apparatus so as to face an opening of the substrate processing apparatus, opens a lid of the container and opens the opening, thereby enabling the semiconductor wafers to be inserted into and removed from the container from inside the substrate processing apparatus, the load port device being capable of attaching and detaching the lid to and from the container and holding the lid, and comprising: a door that opens and closes the opening from inside the substrate processing apparatus; a door drive device that causes the door to open and close the opening; and an elastic body that is arranged on a surface of the door opposite to the surface that comes into contact with the lid when the door holds the lid, and that corrects the inclination of the surface of the door that comes into contact with the lid relative to the opening surface on which the lid is attached, when the lid held by the door by the door drive device receives a reaction force from the semiconductor wafers stored in the container when the lid is attached to the container.

[0003] JP 2015-50417 A

[0004] The present disclosure provides a transport support device and a transport support system that can reduce the burden on an operator when attaching a container that stores substrates to a load port.

[0005] According to one aspect of the present disclosure, there is provided a transport support device for use in a substrate processing system for processing substrates, the transport support device including two rails, two support members, and two arms. Each support member moves along the rail and supports a container for accommodating substrates. Each arm extends and retracts in a direction along a side of a load port to which the container is attached, thereby supporting the lifting and lowering of the rails and the support members.

[0006] According to various aspects and embodiments of the present disclosure, it is possible to reduce the burden on an operator when attaching a container that stores substrates to a load port.

[0007] FIG. 1 is a system configuration diagram showing an example of a substrate processing system. FIG. 2 is a perspective view showing an example of an LP. FIG. 3 is a perspective view showing an example of the structure of a jig in the first embodiment. FIG. 4 is a perspective view showing an example of a jig attached to the LP. FIG. 5 is a diagram showing an example of a process of attaching a container to the LP. FIG. 6 is a diagram showing an example of a process of attaching a container to the LP. FIG. 7 is a diagram showing an example of a process of attaching a container to the LP. FIG. 8 is a diagram showing an example of a process of attaching a container to the LP. FIG. 9 is a diagram showing an example of a process of attaching a container to the LP. FIG. 10 is a diagram showing an example of a process of attaching a container to the LP. FIG. 11 is a diagram showing an example of a process of attaching a container to the LP. FIG. 12 is a perspective view showing an example of the structure of a jig in the second embodiment. FIG. 13 is a perspective view showing an example of the structure of a jig unit in the third embodiment. FIG. 14 is a perspective view showing an example of the structure of a jig unit in the third embodiment. FIG. 15 is a diagram showing an example of a support plate when viewed from above. FIG. 16 is a diagram for explaining an example of a method of attaching the jig unit. Fig. 17 is a diagram showing an example of the shape of a screw hole in a connecting member. Fig. 18 is a diagram showing another example of a process for attaching a container to an LP. Fig. 19 is a diagram showing another example of a process for attaching a container to an LP. Fig. 20 is a diagram showing another example of a process for attaching a container to an LP.

[0008] Hereinafter, embodiments of a transportation support device and a transportation support system will be described in detail with reference to the drawings. Note that the transportation support device and the transportation support system disclosed below are not limited to the following embodiments.

[0009] The substrate processing system includes a processing module for processing a substrate, a vacuum transfer module for transferring a substrate to the processing module under a vacuum environment, and a load lock module for switching between an atmospheric environment and a vacuum environment. The substrate processing system also includes an atmospheric transfer module for transferring a substrate between the load lock module under an atmospheric environment, and a load port for attaching a container containing a substrate to the atmospheric transfer module. The substrate processing system also requires space to accommodate electrical wiring, gas piping, etc.

[0010] Furthermore, various arrangements of modules have been devised to reduce the size of the substrate processing system. In such cases, the stage on which the container for accommodating the substrates is placed may be located at a high position in the load port. When the stage on which the container for accommodating the substrates is placed is located at a high position, the burden on the worker when attaching the container to the stage increases.

[0011] Therefore, the present disclosure provides a technique that can reduce the burden on an operator when attaching a container that stores substrates to a load port.

[0012] First Embodiment [Configuration of Substrate Processing System 1] Fig. 1 is a system configuration diagram showing an example of a substrate processing system 1. For convenience, Fig. 1 illustrates internal components of some of the devices.

[0013] The substrate processing system 1 includes a VTM (Vacuum Transfer Module) 11, a plurality of PMs (Process Modules) 12, a plurality of LLMs (Load Lock Modules) 13, and an EFEM (Equipment Front End Module) .

[0014] A plurality of PMs 12 are connected to the sidewall of the VTM 11 via gate valves G1. In the example of Fig. 1, six PMs 12 are connected to the VTM 11, but the number of PMs 12 connected to the VTM 11 may be more or less than six.

[0015] Each PM 12 performs processing such as etching and film formation on a substrate W to be processed. A plurality of LLMs 13 are connected to the other side wall of the VTM 11 via gate valves G2. In the example of Fig. 1, two LLMs 13 are connected to the VTM 11, but the number of LLMs 13 connected to the VTM 11 may be one or more than two.

[0016] A transfer robot 110 is disposed in the VTM 11. The transfer robot 110 transfers substrates W between the PM 12 and another PM 12 and between the PM 12 and the LLM 13. The interior of the VTM 11 is maintained at a predetermined pressure atmosphere that is lower than atmospheric pressure.

[0017] One sidewall of each LLM 13 is connected to the VTM 11 via a gate valve G2, and the other sidewall is connected to the EFEM 14 via a gate valve G3. When a substrate W is loaded from the EFEM 14 into the LLM 13 via the gate valve G3, the gate valve G3 is closed and the pressure inside the LLM 13 is reduced to a predetermined pressure. Then, the gate valve G2 is opened and the substrate W in the LLM 13 is loaded into the VTM 11 by the transport robot 110.

[0018] Furthermore, with the pressure inside the LLM 13 being lower than atmospheric pressure, the transfer robot 110 loads the substrate W from the VTM 11 into the LLM 13 via the gate valve G2, and the gate valve G2 is closed. The pressure inside the LLM 13 is then increased to approximately the same pressure as inside the EFEM 14. The gate valve G3 is then opened, and the substrate W inside the LLM 13 is unloaded into the EFEM 14.

[0019] 2, a plurality of LPs (Load Ports) 15, an equipment housing section 16, and an equipment housing section 17 are provided on the side wall of the EFEM 14 opposite to the side wall on which the gate valve G3 is provided. A container 30 such as a FOUP (Front Opening Unified Pod) capable of housing a plurality of substrates W can be attached to each LP 15. In the example of FIG. 2, the container 30 is attached to one of the plurality of LPs 15. The equipment housing section 16 and the equipment housing section 17 house electrical wiring, gas piping, etc.

[0020] The EFEM 14 may be provided with an aligner module or the like that changes the orientation of the substrate W. A container 30 that can store consumable parts such as an edge ring may be attached to any of the multiple LPs 15. In the example of Fig. 1, five LPs 15 are provided on the side wall of the EFEM 14, but the number of LPs 15 provided on the side wall of the EFEM 14 may be more or less than five.

[0021] A jig 20 is attached to the LP 15. The LP 15 and the jig 20 are an example of a transport support system, and the jig 20 is an example of a transport support device. In the example of Fig. 2, when the container 30 is attached or removed, the jig 20 is installed on the LP 15, and after the attachment or removal of the container 30 is completed, the jig 20 is removed from the LP 15. As another example, the jig 20 may be attached to all of the LPs 15 in advance.

[0022] The EFEM 14 is maintained at atmospheric pressure. A transfer robot 140 is provided within the EFEM 14. The transfer robot 140 moves within the EFEM 14 along guide rails 141 provided within the EFEM 14, and transfers substrates W between the LLM 13 and the container 30 attached to the LP 15. An FFU (Fan Filter Unit) or the like is provided above the EFEM 14, and dry air or the like from which particles and the like have been removed is supplied into the EFEM 14 from above, forming a downflow within the EFEM 14. In this embodiment, the EFEM 14 is maintained at atmospheric pressure. However, in another embodiment, the pressure within the EFEM 14 may be controlled to be positive. This makes it possible to prevent particles and the like from entering the EFEM 14 from the outside.

[0023] The control unit 10 has a memory, a processor, and an input / output interface. Data such as recipes, programs, etc. are stored in the memory. The memory is, for example, a random access memory (RAM), a read-only memory (ROM), a hard disk drive (HDD), or a solid state drive (SSD). The processor executes a program read from the memory to control each component of the substrate processing system 1 via the input / output interface based on data such as recipes stored in the memory. The processor is, for example, a central processing unit (CPU) or a digital signal processor (DSP).

[0024] 3 is a perspective view showing an example of the structure of the jig 20 in the first embodiment. The jig 20 includes an arm 21, a rail 22, a support member 23, a connecting member 24, a gas spring 25, and a support plate 27.

[0025] 3 includes two arms 21, two rails 22, two support members 23, and two support plates 27. Each support member 23 moves along the rail 22 and supports a container 30. The two support members 23 are connected by a connecting member 24.

[0026] 4, for example, each support plate 27 is disposed along a side wall of the LP 15. Guide grooves 270 and 271 are formed in the support plate 27 to regulate the movement direction of the link of the arm 21. The guide grooves 270 and 271 are examples of guide portions.

[0027] Each arm 21 has a link 210 and a link 211, and the link 210 and the link 211 move along the guide groove 270 and the guide groove 271, thereby expanding and contracting in a direction along the side surface of the LP 15 (in the vertical direction in the example of FIGS. 3 and 4 ). Each arm 21 supports the lifting and lowering of the rail 22 and the support member 23 by expanding and contracting in a direction along the side surface of the LP 15. A gas spring 25 is provided on each arm 21 and configured to support the movement of the arm 21 when raising the rail 22 and the support member 23. The gas spring 25 is an example of a biasing unit. Note that, in addition to the gas spring 25, a spring or the like that does not use gas may be used as long as it has the function of biasing to support the movement of the arm 21 when raising the rail 22 and the support member 23.

[0028] The support member 23 is provided with a hinge 230 and a plate portion 232 that rotates via the hinge 230, and a positioning pin 231 is provided on the plate portion 232. The positioning pin 231 is an example of an alignment portion. The hinge 230 is, for example, a spring hinge. The positioning pin 231 engages with a recess formed on the bottom surface of the container 30 that is placed on the support member 23, and regulates the position of the container 30 on the plate portion 232. This makes it possible to prevent the container 30 from shifting position on the support member 23. Note that the alignment portion provided on the plate portion 232 may have a shape other than a pin shape, as long as it is a shape that can engage with a structure formed on the bottom surface of the container 30.

[0029] Each arm 21 can be raised until the surface of the plate portion 232 on which the positioning pin 231 is provided is positioned higher than the upper surface of the stage 150 of the LP 15 on which the container 30 is placed. The upper surface of the stage 150 is provided with a positioning pin 151 that engages with a recess in the lower surface of the container 30.

[0030] A screw hole 272 and an engagement portion 273 are provided at the bottom of the support plate 27. The engagement portion 273 engages with a stopper 145 provided on the LP15, as shown in FIG. 4 , for example. By inserting a screw into the screw hole 272 with the engagement portion 273 and the stopper 145 engaged, the support plate 27 can be fixed to the LP15. This makes it possible to easily fix the jig 20 to the LP15.

[0031] [Procedure for Mounting Container 30] First, as shown in Fig. 5, for example, the worker pulls out the connecting member 24 in a direction away from the LP 15, thereby moving the support member 23 together with the connecting member 24 along the rail 22. As a result, the support member 23 is pulled out in a direction away from the LP 15. In the state shown in Fig. 5, the surface of the plate portion 232 on which the positioning pin 231 is provided faces upward.

[0032] Next, the worker pushes down the connecting member 24, thereby lowering the rail 22 and the support member 23 together with the connecting member 24. At this time, the links of each arm 21 move along the guide grooves 270 and 271, and each arm 21 contracts. As a result, the rail 22 and the support member 23 lower together with the connecting member 24. Then, the worker places the container 30 on the plate portion 232 of the support member 23, as shown in FIG. 6 , for example.

[0033] When placing the container 30 on the plate portion 232, the worker engages a positioning pin 231 provided on the plate portion 232 with a recess 31 formed on the edge portion of the lower surface of the container 30, as shown in Fig. 7, for example. This regulates the position of the container 30 on the plate portion 232. In addition to the recess 31 that engages with the positioning pin 231, the lower surface of the container 30 is also provided with a recess 32 that engages with a positioning pin 151 (see Fig. 4) provided on the upper surface of the stage 150.

[0034] Next, the worker lifts the connecting member 24, thereby raising the rail 22 and the support member 23 on which the container 30 is placed, together with the connecting member 24, as shown in FIG. 8 . At this time, the links of each arm 21 move along the guide grooves 270 and 271, and each arm 21 extends. In addition, when the arms 21 extend, a biasing force is applied by the gas spring 25. This allows the worker to easily raise the support member 23 on which the container 30 is placed. The worker raises the connecting member 24 until the surface of the plate portion 232 on which the positioning pin 231 is provided is higher than the upper surface of the stage 150.

[0035] Next, the operator pushes the connecting member 24 in a direction approaching the LP 15, thereby moving the support member 23 carrying the container 30 along the rail 22 together with the connecting member 24. As a result, the support member 23 carrying the container 30 is pushed in a direction approaching the LP 15, as shown in Fig. 9 , for example.

[0036] Next, the worker presses down the connecting member 24. As a result, the container 30 is placed on the stage 150 so that the recessed portion 32 on the bottom surface of the container 30 engages with the positioning pin 151 on the top surface of the stage 150, as shown in Fig. 10 , for example. When viewed from above, the support member 23 is disposed outside the region R of the stage 150, as shown in Fig. 10 , for example. Therefore, even when the support member 23 is lowered, the container 30 can be placed on the stage 150 without interference between the plate portion 232 of the support member 23 and the stage 150.

[0037] After the container 30 is placed on the stage 150, the operator lowers the connecting member 24 to lower the support member 23 until the tip of the positioning pin 231 is positioned lower than the upper surface of the stage 150. At this time, the plate portion 232 may be deformed so that the surface of the plate portion 232 on which the positioning pin 231 is provided is oriented along the side wall of the LP15, as shown in FIG.

[0038] When removing the container 30 from the LP 15, the worker simply performs the reverse procedure of that used when attaching the container 30 to the LP 15. For example, the worker lifts the connecting member 24 to place the container 30 on the plate portion 232 of the support member 23. At this time, the positioning pin 231 provided on the plate portion 232 engages with the recess 31 provided on the underside of the container 30, and the container 30 and the stage 150 are separated.

[0039] Next, the worker pulls out the connecting member 24 in a direction away from the LP 15, thereby moving the support member 23 carrying the container 30 along the rail 22 together with the connecting member 24. Then, the worker pushes down the connecting member 24, thereby lowering the rail 22 and the support member 23 together with the connecting member 24. At this time, the links of each arm 21 move along the guide grooves 270 and 271, and each arm 21 contracts. This causes the support member 23 carrying the container 30 to descend. This allows the worker to easily remove the container 30 from the support member 23.

[0040] The first embodiment has been described above. As described above, this embodiment is a transport support device (jig 20) used in a substrate processing system (substrate processing system 1) that processes substrates (substrates W), and includes two rails (rails 22), two support members (support members 23), and two arms (arms 21). Each support member moves along the rail and supports a container (container 30) that contains a substrate. Each arm extends and retracts in a direction along the side of the load port (LP15) to which the container is attached, thereby supporting the elevation and lowering of the rails and support members. This reduces the burden on the worker when attaching a container that contains substrates to the load port.

[0041] The transport support device in the above-described embodiment further includes a connecting member (connecting member 24) that connects the two support members, allowing the operator to easily raise and lower the two support members while adjusting their heights.

[0042] The transportation support device in the above-described embodiment may further include a biasing unit (gas spring 25) configured to support the movement of the arm when raising the rail and support member, and the biasing unit may be a gas spring. This reduces the burden on the operator when raising the rail and support member.

[0043] The transport support device in the above-described embodiment further includes guide portions (guide grooves 270 and 271) configured to regulate the movement of the arm, thereby enabling the arm to move in a desired manner.

[0044] In the above-described embodiment, the support member is provided with a positioning portion (positioning pin 231) configured to engage with a structure on the underside of the container, and the positioning portion may be a positioning pin that engages with a recess (recess 31) formed in the edge portion of the underside of the container. This makes it possible to prevent the container from shifting position on the support member.

[0045] In the above embodiment, the support member is provided with a hinge (hinge 230) and a plate portion (plate portion 232) that rotates by the hinge, and the alignment portion is provided on the plate portion, which makes it possible to easily store the alignment portion.

[0046] Furthermore, the transport support system (LP15, jig 20) in the above-described embodiment includes a load port to which a container containing substrates is attached, and a transport support device that supports the attachment of the container to the load port. The transport support device includes two rails, two support members, and two arms. Each support member moves along the rail and supports the container containing the substrate. Each arm extends and retracts in a direction along the side of the load port to which the container is attached, thereby supporting the elevation and lowering of the rails and support members. This reduces the burden on the worker when attaching a container containing substrates to the load port.

[0047] Second Embodiment Fig. 12 is a perspective view showing an example of the structure of the jig 20 in a second embodiment. The following description will focus on differences from the jig 20 in the first embodiment. In the jig 20 in this embodiment, two guide rails 274 are provided on the support plate 27 instead of the guide grooves 270 and 271. The two guide rails 274 are provided on the support plate 27 so as to extend in the up-down direction.

[0048] In this embodiment, the rail 22 moves up and down along the two guide rails 274. The arm 21 supports the rail 22. The gas spring 25 supports the extension movement of the arm 21. By moving the rail 22 up and down along the two guide rails 274, the rail 22 can move up and down more smoothly.

[0049] The guide rail 274 may be a linear guide having a rail and a carriage that moves along the rail. In this case, the rail 22 is attached to the carriage.

[0050] (Third Embodiment) In the first and second embodiments, each jig 20 has two support plates 27. In contrast, the present embodiment differs from the first and second embodiments in that the support plate 27 between two adjacent jigs 20 is shared by the two adjacent jigs 20. The following description will focus on the differences from the first and second embodiments.

[0051] 13 and 14 are perspective views showing an example of the structure of the jig unit 2 in the third embodiment. The jig unit 2 has a jig 20a and a jig 20b. The jig 20a is an example of a first transport support device, and the jig 20b is an example of a second transport support device.

[0052] Jig 20a includes arms 21a1 and 21a2, rails 22a1 and 22a2, and support members 23a1 and 23a2. Support member 23a1 moves along rail 22a1, and support member 23a2 moves along rail 22a2. Support members 23a1 and 23a2 are connected by connecting member 24a. Arms 21a1 and 21a2 are an example of a first arm, rails 22a1 and 22a2 are an example of a first slide rail, and support members 23a1 and 23a2 are an example of a first support member.

[0053] Support plate 27a is provided with two guide rails 274a1 extending in the vertical direction, and rail 22a1 moves up and down along guide rails 274a1. Arm 21a1 expands and contracts in the vertical direction to support the movement of rail 22a1 and support member 23a1. Gas spring 25a1 is provided on arm 21a1 to support the movement of arm 21a1 when lifting rail 22a1 and support member 23a1.

[0054] The bottom of the support plate 27a is provided with a screw hole 272a and an engagement portion 273a1. The engagement portion 273a1 engages with a stopper 145 provided on the LP 15. With the engagement portion 273a1 and the stopper 145 engaged, inserting a screw into the screw hole 272a makes it possible to easily fix the support plate 27a to the LP 15.

[0055] Support plate 27b is disposed between adjacent jigs 20a and 20b. Two guide rails 274a2 are provided on one surface of support plate 27b so as to extend in the vertical direction, and rail 22a2 moves up and down along guide rails 274a2. Arm 21a2 expands and contracts in the vertical direction to support the movement of rail 22a2 and support member 23a2. Gas spring 25a2 is provided on arm 21a2 and supports the movement of arm 21a2 when lifting rail 22a2 and support member 23a2. Guide rails 274a2 are an example of a first guide rail.

[0056] The bottom of support plate 27b is provided with screw hole 272b, engagement portion 273a2, and engagement portion 273b1. Engagement portion 273a2 and engagement portion 273b1 engage with stopper 145 provided on LP 15. With engagement portion 273a2 and stopper 145 engaged and engagement portion 273b1 and stopper 145 engaged, support plate 27b can be easily fixed to LP 15 by inserting a screw into screw hole 272a.

[0057] Jig 20b includes arms 21b1 and 21b2, rails 22b1 and 22b2, and support members 23b1 and 23b2. Support member 23b1 moves along rail 22b1, and support member 23b2 moves along rail 22b2. Support members 23b1 and 23b2 are connected by connecting member 24b. Arms 21b1 and 21b2 are an example of a second arm, rails 22b1 and 22b2 are an example of a second slide rail, and support members 23b1 and 23b2 are an example of a second support member.

[0058] On the back surface of support plate 27ba opposite to the surface on which guide rails 274a2 and the like are arranged, two guide rails 274b1 are provided extending in the vertical direction, and rail 22b1 moves up and down along guide rails 274b1. Arm 21b1 expands and contracts in the vertical direction to support the movement of rail 22b1 and support member 23b1. Gas spring 25b1 is provided on arm 21b1 and supports the movement of arm 21b1 when lifting rail 22b1 and support member 23b1. Guide rails 274b1 are an example of a second guide rail.

[0059] Support plate 27c is provided with two guide rails 274b2 extending in the vertical direction, and rail 22b2 moves up and down along guide rails 274b2. Arm 21b2 expands and contracts in the vertical direction to support the movement of rail 22b2 and support member 23b2. Gas spring 25b2 is provided on arm 21b2 to support the movement of arm 21b2 when lifting rail 22b2 and support member 23b2.

[0060] A screw hole 272c and an engagement portion 273b2 are provided at the bottom of the support plate 27v. The engagement portion 273b2 engages with a stopper 145 provided on the LP 15. With the engagement portion 273b2 and the stopper 145 engaged, inserting a screw into the screw hole 272c makes it possible to easily fix the support plate 27v to the LP 15.

[0061] 15 is a diagram showing an example of support plate 27b as viewed from above. For example, as shown in FIG. 15, two guide rails 274a2 are provided on one surface of support plate 27b, and rail 22a2 moves up and down along guide rail 274a2. Support member 23a2 moves laterally along rail 22a2, and connecting member 24a is connected to support member 23a2.

[0062] On the other hand, two guide rails 274b1 are provided on the back surface of the support plate 27b opposite to the surface on which the guide rails 274a2 and the like are arranged, as shown in Fig. 15, for example, and the rails 22b1 move up and down along the guide rails 274b1. The support member 23b1 moves laterally along the rails 22b1, and the connecting member 24b is connected to the support member 23b1.

[0063] In this way, the support plate 27b disposed between the two adjacent jigs 20a and 20b is shared by the jigs 20a and 20b. This allows the jigs 20a and 20b to be disposed on the two adjacent LPs 15 even when the gap between the adjacent LPs 15 is narrow. This allows the gap between the adjacent LPs 15 to be narrowed, thereby reducing the installation area of ​​the substrate processing system 1.

[0064] When attaching jigs 20a and 20b, first, arm 21a1, rail 22a1, gas spring 25a1, guide rail 274a1, etc. are attached to support plate 27a. Then, arm 21a2, arm 21b1, rail 22a2, rail 22b1, gas spring 25a2, gas spring 25b1, guide rail 274a2, guide rail 274b1, etc. are attached to support plate 27b. Then, arm 21b2, rail 22b2, gas spring 25b2, guide rail 274b2, etc. are attached to support plate 27c.

[0065] Then, support plates 27a, 27b, and 27c are attached to the sides of LP 15. Then, as shown in Fig. 16, for example, support members 23a1 and 23a2 connected by connecting member 24a are inserted into rails 22a1 and 22a2. Also, support members 23b1 and 23b2 connected by connecting member 24b are inserted into rails 22b1 and 22b2.

[0066] 17, for example, connecting member 24a has elongated threaded holes 240 formed therein that extend in the longitudinal direction of connecting member 24a, and support member 23a2 is fixed to connecting member 24a by screws inserted into threaded holes 240. This allows the position of the screws inserted into threaded holes 240 to be adjusted, thereby absorbing any installation error of support plates 27a and 27b. Note that support member 23a1 is also fixed to connecting member 24a by screws inserted into threaded holes formed in connecting member 24a, but the threaded holes for fixing support member 23a1 to connecting member 24a do not have to be elongated. The same applies to the relationship between connecting member 24b, support member 23b1, and support member 23b2.

[0067] The third embodiment has been described above. According to this embodiment, even if the gap between adjacent LPs 15 is narrow, the jigs 20a and 20b can be disposed on the two adjacent LPs 15. This makes it possible to narrow the gap between the adjacent LPs 15 and reduce the installation area of ​​the substrate processing system 1.

[0068] [Others] The technology disclosed in the present application is not limited to the above-described embodiment, and various modifications are possible within the scope of the gist thereof.

[0069] For example, the arm 21 in the above-described embodiment has two links, and the arms 21 extend and retract as the links move along the guide grooves 270 and 271, but the disclosed technology is not limited to this. As another example, an arm 21 having a structure such as that shown in Fig. 18 may be used. The arm 21 illustrated in Fig. 18 raises and lowers the rail 22 and the support member 23 as one end of one fixed link rotates around the other link.

[0070] In the example of Figure 18, for example, the worker pulls out the connecting member 24 in a direction away from the LP 15, thereby pulling out the support member 23 along the rail 22 (a-1, a-2). Then, the worker places the container 30 on the plate portion 232 of the support member 23 (a-3). Then, the worker lifts the connecting member 24, thereby raising the rail 22 and the support member 23 with the container 30 placed thereon (a-4, a-5). At this time, the biasing force of the gas spring 25 is applied, allowing the worker to easily raise the support member 23 with the container 30 placed thereon.

[0071] Next, the worker operates the lifting mechanism 26 provided on the support member 23 to raise the container 30 vertically until the bottom surface of the container 30 is higher than the top surface of the stage 150 (a-6).The worker then pushes the connecting member 24 in a direction approaching the LP 15, thereby moving the connecting member 24 and the support member 23 carrying the container 30 along the rails 22 (a-7).The worker then operates the lifting mechanism 26 to lower the container 30 vertically and place the container 30 on the stage 150 (a-8).

[0072] 18 , when the container 30 is raised or lowered by the arm 21, one fixed link rotates around one end of the other fixed link, which may cause the position of the container 30 to change in the horizontal direction. Therefore, when the container 30 is placed on the stage 150 by the operation of the arm 21 alone, the positions of the recess 31 on the underside of the container 30 and the positioning pin 231 of the plate portion 232 may become misaligned. Therefore, in the example of FIG. 18 , the container 30 is raised or lowered in the vertical direction using the lifting mechanism 26 provided on the support member 23.

[0073] Furthermore, in the above-described embodiment, the arm 21 raises and lowers the rail 22, but the disclosed technology is not limited to this. As another example, as shown in Fig. 19, the arm 21 may be supported by a support member 29 that moves along the rail 22. In the example of Fig. 19, the support member 23 is an example of a first support member, and the support member 29 is an example of a second support member.

[0074] 19 , for example, the operator extends the arm 21 by operating the handle 28, thereby raising the support member 23 (b-1). At this time, a biasing force from the gas spring 25 may be applied in the direction in which the arm 21 extends. As a result, the container 30 is placed on the plate portion 232 of the support member 23 and is lifted from the stage 150 of the LP 15 (b-2). Then, the operator locks the handle 28.

[0075] Next, the worker pulls out the support member 29 in a direction away from the LP 15. As a result, the support member 29, which supports the support member 23 carrying the container 30 and the arm 21, is pulled out along the rail 22 (b-3). Then, the worker unlocks the handle 28 and operates the handle 28 to retract the arm 21 and lower the support member 23 (b-4). This allows the worker to easily remove the container 30 from the support member 23.

[0076] As described above, the jig 20 illustrated in FIG. 19 includes two first support members (support members 23), two arms (arms 21), two rails (rails 22), and two second support members (support members 29). Each first support member supports a container (container 30) that contains substrates. Each arm supports the elevation of the first support member by extending and retracting in a direction along the side of the load port (LP15) to which the container is attached. The two rails extend in a direction intersecting the extension and retraction direction of the arms. The two second support members support the arms and move along the rails. Even with this configuration, the burden on the worker when attaching a container that contains substrates to the load port can be reduced.

[0077] 20, for example, a configuration may be possible in which the link 212 of the arm 21 moves along the rails 40 and 41, causing the arm 21 to raise and lower the rail 22 and the support member 23.

[0078] In the example of FIG. 20 , for example, the worker pulls out the connecting member 24 in a direction away from the LP 15, thereby pulling out the support member 23 along the rail 22 (c-1, c-2). Then, the worker places the container 30 on the plate portion 232 of the support member 23 (c-3). Then, the worker lifts the connecting member 24, thereby raising the rail 22 and the support member 23 with the container 30 placed thereon (c-4). At this time, the link 212 of the arm 21 moves along the rails 40 and 41, thereby raising the support member 23 with the container 30 placed thereon. When the support member 23 is raised, the gas spring 25 applies a biasing force, allowing the worker to easily raise the support member 23 with the container 30 placed thereon.

[0079] Next, the worker pushes the connecting member 24 in a direction approaching the LP 15, thereby moving the connecting member 24 and the support member 23 carrying the container 30 along the rails 22 (c-5). Then, the worker lowers the connecting member 24, thereby lowering the rails 22 and the support member 23 together with the connecting member 24, and placing the container 30 on the stage 150 (c-5). Even with this configuration, the burden on the worker when attaching a container that stores substrates to the load port can be reduced.

[0080] In the above embodiment, the arm 21 is extended or retracted by the worker moving the connecting member 24 up or down, but the disclosed technology is not limited to this. As another example, the arm 21 may be extended or retracted using a ball screw and a motor that rotates the ball screw. This can further reduce the burden on the worker when raising or lowering the rail and support member.

[0081] Furthermore, the disclosed embodiments should be considered to be illustrative in all respects and not restrictive. Indeed, the above-described embodiments may be embodied in various forms. Furthermore, the above-described embodiments may be omitted, substituted, or modified in various forms without departing from the scope and spirit of the appended claims.

[0082] Furthermore, the following supplementary notes are disclosed regarding the above-described embodiment.

[0083] (Supplementary Note 1) A transport support device used in a substrate processing system that processes substrates, comprising: two rails; two support members that move along the rails and support containers that accommodate substrates; and two arms that support raising and lowering of the rails and the support members by extending and retracting in a direction along the side of a load port to which the containers are attached. (Supplementary Note 2) The transport support device according to Supplementary Note 1, further comprising a connecting member that connects the two support members. (Supplementary Note 3) The transport support device according to Supplementary Note 1 or 2, further comprising an urging unit configured to support the movement of the arms when raising the rails and the support members. (Supplementary Note 4) The transport support device according to Supplementary Note 3, wherein the urging unit is a gas spring. (Supplementary Note 5) The transport support device according to any one of Supplements 1 to 4, further comprising a guide unit configured to regulate the movement of the arms. (Supplementary Note 6) A transport support device according to any one of Supplementary Notes 1 to 4, comprising two support plates, one on each of the two arms, and four guide rails, two on each of the support plates, extending in the vertical direction, the rails moving up and down in the vertical direction along the guide rails. (Supplementary Note 7) A transport support device according to any one of Supplementary Notes 1 to 6, wherein the support members are provided with alignment parts configured to engage with a structure on the underside of the container. (Supplementary Note 8) A transport support device according to Supplementary Note 7, wherein the alignment parts are positioning pins that engage with recesses formed in edge parts of the underside of the container. (Supplementary Note 9) A transport support device according to Supplementary Note 7 or 8, wherein the support members are provided with hinges and plate parts that rotate by the hinges, and the alignment parts are provided on the plate parts. (Supplementary Note 10) A transport support system comprising: a load port to which a container for accommodating substrates is attached; and a transport support device that supports the attachment of the container to the load port, wherein the transport support device has two rails, two support members that move along the rails and support the container, and two arms that extend and retract in a direction along the side of the load port to support the raising and lowering of the rails and the support members.(Appendix 11) A transport support device used in a substrate processing system for processing substrates, comprising: two first support members that support a container that contains substrates; two arms that extend and retract in a direction along the side of a load port to which the container is attached, thereby supporting the raising and lowering of the first support members; two rails that extend in a direction intersecting the direction in which the arms extend and retract; and two second support members that support the arms and move along the rails. (Supplementary Note 12) A transport support unit used in a substrate processing system for processing substrates, comprising: a first transport support device; a second transport support device; and a support plate disposed between the first transport support device and the second transport support device, wherein the first transport support device comprises: two first slide rails; two first support members each moving along the first slide rails and supporting a container for accommodating the substrate; two first arms each extending and contracting in a direction along a side of a load port to which the container is attached, thereby supporting the elevation of the first slide rails and the first support members; and a first guide rail provided on one surface of the support plate and extending in a vertical direction, wherein one of the first slide rails rises and falls along the first guide rail; and the second transport support device comprises: two second slide rails; and two second support members each moving along the second slide rails and supporting the container; a transport support unit comprising: two second arms each extending and contracting in a direction along the side of the load port to support the lifting and lowering of the second slide rail and the second support member; and a second guide rail provided on the back surface of the one surface of the support plate and extending in the vertical direction, wherein one of the second slide rails lifts and lowers up and down along the second guide rail.

[0084] G Gate valve W Substrate 1 Substrate processing system 10 Control unit 11 VTM 110 Transfer robot 12 PM 13 LLM 14 EFEM 140 Transfer robot 141 Guide rail 145 Stopper 15 LP 150 Stage 151 Positioning pin 16 Equipment housing section 17 Equipment housing section 2 Jig unit 20 Jig 21 Arm 210 Link 211 Link 212 Link 22 Rail 23 Support member 230 Hinge 231 Positioning pin 232 Plate section 24 Connecting member 25 Gas spring 26 Lifting mechanism 27 Support plate 270 Guide groove 271 Guide groove 272 Screw hole 273 Engagement section 274 Guide rail 28 Handle 29 Support member 30 Container 31 Recess 32 Recess 40 Rail 41 Rail

Claims

1. A transport support device used in a substrate processing system that processes substrates, comprising: two rails; two support members that move along the rails and support containers that house substrates; and two arms that extend and retract in a direction along the side of a load port to which the containers are attached, thereby supporting the raising and lowering of the rails and support members.

2. The transport support device according to claim 1, further comprising a connecting member for connecting the two support members.

3. The transport assistance device according to claim 1 or 2, further comprising a biasing portion configured to support the movement of the arm when lifting the rail and the support member.

4. A transport support device according to claim 3, wherein the biasing portion is a gas spring.

5. The transport support device according to claim 1, further comprising a guide portion configured to regulate the movement of the arm.

6. The transport assistance device of claim 1, wherein the support member is provided with a registration portion configured to engage with a structure on the underside of the container.

7. A transport support device according to claim 6, wherein the alignment portion is a positioning pin that engages with a recess formed in an edge portion of the lower surface of the container.

8. A transport support device according to claim 6 or 7, wherein the support member is provided with a hinge and a plate portion that rotates by the hinge, and the alignment portion is provided on the plate portion.

9. A transport support system comprising: a load port to which a container for accommodating substrates is attached; and a transport support device that supports the attachment of the container to the load port, wherein the transport support device has two rails, two support members that move along the rails and support the container, and two arms that extend and retract in a direction along the side of the load port to support the raising and lowering of the rails and support members.

10. A transport support device used in a substrate processing system for processing substrates, comprising: two first support members that support a container that contains substrates; two arms that support the raising and lowering of the first support members by extending and retracting in a direction along the side of the load port to which the container is attached; two rails that extend in a direction intersecting the direction in which the arms extend and retract; and two second support members that support the arms and move along the rails.

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