Plasma device

Abstract

A plasma device is disclosed. The plasma device of the present invention may comprise a magnetic field generation unit, which forms magnetic flux that passes through the inside of a housing in which plasma is formed, wherein at least a part of the magnetic flux does not make contact with an anode unit. The plasma device may comprise: a housing extending upward from a lower end to an upper end, and having a hollow portion formed therein; a first cathode unit including a first body connected to the upper end of the housing, and a withdrawal hole, as a hole formed in the first body, communicating with the hollow portion of the housing; a second cathode unit including a second body connected to the lower end of the housing; an anode unit positioned in the hollow portion of the housing, and positioned between the first cathode unit and the second cathode unit; and a magnetic field generation unit forming magnetic flux in the hollow portion of the housing.

Description

plasma device

[0001] The present invention relates to a plasma device.

[0002] In plasma devices that generate plasma, the distribution of magnetic flux can affect plasma generation. For example, when a cathode is positioned at both ends and an anode is positioned between them, it is necessary to prevent the magnetic flux generated internally from connecting to the anode, thereby inhibiting electron movement.

[0003] (Patent Document 1) US 10,361,065 B1

[0004] The present invention aims to solve the above-mentioned problems and other problems.

[0005] Another object of the present invention is to provide a plasma device in which a portion of the magnetic flux formed inside passes through a hollow portion formed in the anode portion without meeting the anode portion.

[0006] According to one aspect of the present invention to achieve the above or other purposes, a plasma device may be provided, comprising: a housing extending upward from a bottom to an upper end and forming a hollow portion therein; a first cathode portion including a first body connected to the upper end of the housing and a hole formed in the first body and communicating with the hollow portion of the housing; a second cathode portion including a second body connected to the lower end of the housing; an anode portion located in the hollow portion of the housing and located between the first cathode portion and the second cathode portion; and a magnetic field generating portion forming a magnetic flux in the hollow portion of the housing.

[0007] A portion of the magnetic flux formed in the hollow portion of the housing may pass through the interior of the anode portion but may not meet the anode portion.

[0008] The electric potential of the above positive electrode portion may be higher than the electric potential of the first negative electrode portion and the electric potential of the second negative electrode portion.

[0009] The above magnetic field generating unit may include a middle magnet adjacent to the anode unit.

[0010] The inner surface of the middle magnet may face the anode, and the outer surface of the middle magnet may face the housing.

[0011] The above middle magnet is located on the outside of the housing, and the inner surface of the above middle magnet can face the housing.

[0012] The magnetic field generating unit may further include at least one of a first magnet adjacent to the first cathode portion and a second magnet adjacent to the second cathode portion.

[0013] The first magnet may be positioned above the middle magnet, and the second magnet may be positioned below the middle magnet.

[0014] The first magnet, the second magnet, and the middle magnet may be located outside the housing.

[0015] The first magnet may extend upward from the top of the middle magnet, and the second magnet may extend downward from the bottom of the middle magnet.

[0016] The first magnet, the second magnet, and the middle magnet are positioned inside the housing, and the lower surface of the first magnet may face the upper surface of the middle magnet, and the upper surface of the second magnet may face the lower surface of the middle magnet.

[0017] The first cathode portion may further include a first neck protruding downward from the first body, and the first body may form a first shoulder surface that forms a step with the first neck and faces the middle magnet.

[0018] The above first magnet may be positioned on the first shoulder surface and may face the middle magnet.

[0019] The second cathode portion may further include a second neck protruding upward from the second body, and the second body may form a second shoulder surface that forms a step with the second neck and faces the middle magnet.

[0020] The second magnet may be positioned on the second shoulder surface and face the middle magnet.

[0021] The first magnet may be positioned above the middle magnet, and the second magnet may be positioned below the middle magnet.

[0022] The lower surface of the first magnet may face the upper surface of the middle magnet, and the upper surface of the second magnet may face the lower surface of the second body.

[0023] The first cathode portion further includes a first neck protruding downward from the first body, and the first magnet forms a ring shape and surrounds the first neck, but can face the middle magnet.

[0024] According to at least one of the embodiments of the present invention, a plasma device can be provided in which a portion of the magnetic flux formed inside passes through a hollow portion formed in the anode portion without meeting the anode portion.

[0025] Fig. 1 (a) is a plan view showing a plasma device, and Fig. 1 (b) is a front view of the plasma device.

[0026] Fig. 2 is a cross-sectional view of the plasma device shown in (a) of Fig. 1 taken along line A1-A2.

[0027] Fig. 3 is a cross-sectional view of the plasma device shown in (b) of Fig. 1 taken along line B1-B2.

[0028] Figure 4 is a drawing showing a magnetic field generating unit according to one embodiment of the present invention.

[0029] Fig. 5 is a cross-sectional perspective view of a portion of the middle magnet illustrated in Fig. 4.

[0030] Figure 6 is a drawing showing a middle magnet arranged on the outside of the housing illustrated in Figure 2.

[0031] Fig. 7 is a drawing showing a middle magnet arranged inside the housing illustrated in Fig. 2.

[0032] Figure 8 is a cross-sectional perspective view of the first cathode portion.

[0033] Figure 9 is a cross-sectional perspective view of the second cathode portion.

[0034] Figure 10 is a drawing showing a sub-magnet.

[0035] FIG. 11 is a drawing showing the first cathode portion illustrated in FIG. 8, the second cathode portion illustrated in FIG. 9, the sub magnet illustrated in FIG. 10, and the middle magnet illustrated in FIG. 5 positioned in the housing illustrated in FIG. 2.

[0036] Fig. 12 is a drawing showing a magnetic field generating unit arranged on the outside of the housing illustrated in Fig. 2.

[0037] Hereinafter, embodiments disclosed in this specification will be described in detail with reference to the attached drawings. Regardless of the drawing numbers, identical or similar components will be given the same reference numbers and redundant descriptions thereof will be omitted. The suffixes "module" and "part" used for components in the following description are assigned or used interchangeably only for the convenience of writing the specification, and do not in themselves have distinct meanings or roles. In addition, when describing the embodiments disclosed in this specification, if it is determined that a specific description of a related known technology may obscure the gist of the embodiments disclosed in this specification, a detailed description thereof will be omitted. In addition, the attached drawings are only intended to facilitate easy understanding of the embodiments disclosed in this specification, and the technical ideas disclosed in this specification are not limited by the attached drawings, and should be understood to include all modifications, equivalents, and substitutes included in the spirit and technical scope of the present invention.

[0038] Terms that include ordinal numbers, such as first, second, etc., may be used to describe various components, but the components are not limited by these terms. These terms are used solely to distinguish one component from another.

[0039] When a component is referred to as being "connected" or "connected" to another component, it should be understood that it may be directly connected or connected to that other component, but that there may be other components intervening. Conversely, when a component is referred to as being "directly connected" or "connected" to another component, it should be understood that there are no other components intervening.

[0040] Singular expressions include plural expressions unless the context clearly indicates otherwise.

[0041] In this application, terms such as “include” or “have” are intended to specify the presence of a feature, number, step, operation, component, part or combination thereof described in the specification, but should be understood not to exclude in advance the possibility of the presence or addition of one or more other features, numbers, steps, operations, components, parts or combinations thereof.

[0042] For convenience of explanation, the sizes of components in the drawings may be exaggerated or reduced. For example, the sizes and thicknesses of each component shown in the drawings are arbitrarily indicated for convenience of explanation, and thus the present invention is not necessarily limited to what is shown.

[0043] In some embodiments, where implementations are otherwise feasible, specific process sequences may be performed in a different order than described. For example, two processes described in succession may be performed substantially simultaneously, or in a reverse order from the described order.

[0044] In the following examples, when it is said that a film, region, component, etc. are connected, it includes not only cases where the films, regions, and components are directly connected, but also cases where other films, regions, and components are interposed between the films, regions, and components and thus indirectly connected. For example, when it is said in this specification that a film, region, component, etc. are electrically connected, it includes not only cases where the films, regions, and components are directly electrically connected, but also cases where other films, regions, and components are interposed between them and thus indirectly electrically connected.

[0045] Fig. 1 (a) is a plan view showing a plasma device, and Fig. 1 (b) is a front view of the plasma device. Fig. 2 is a cross-sectional view of the plasma device shown in Fig. 1 (a) taken along line A1-A2. Fig. 3 is a cross-sectional view of the plasma device shown in Fig. 1 (b) taken along line B1-B2.

[0046] Referring to FIGS. 1 to 3, the plasma device (10) may include a housing (100). The housing (100) may form a hollow portion therein. The housing (100) may extend from a first end and connect to a second end. For example, the housing (100) may form a pipe shape.

[0047] For example, the first end of the housing (100) may be the upper edge of the housing (100). For example, the second end of the housing (100) may be the lower edge of the housing (100). The hollow portion formed in the housing (100) may be open at the first end and the second end.

[0048] The plasma device (10) may include an anode (200). The anode (200) may be located inside the housing (100). For example, the anode (200) may face the inner surface of the housing (100). The anode (200) may form a pipe shape. For example, the anode (200) may form a hollow portion. The hollow portion formed in the anode (200) may be located in the hollow portion formed in the housing (100).

[0049] The plasma device (10) may include a first cathode portion (300). The first cathode portion (300) may include a first body (310). The first body (310) may be located inside the housing (100). For example, the first body (310) may be connected or coupled to a first end of the housing (100).

[0050] The first body (310) may form an inner surface and an outer surface. The inner surface of the first body (310) may face the anode portion (200). The outer surface of the first body (310) may be located on the opposite side of the inner surface of the first body (310).

[0051] The first cathode portion (300) may include an extraction hole (330). The extraction hole (330) may be a hole formed in the first body (310). The extraction hole (330) may be connected to the outer surface and the inner surface of the first body (310). Through the extraction hole (330), the hollow portion formed in the housing (100) may be communicated with the outside. Ions formed inside the housing (100) may be extracted to the outside through the extraction hole (330).

[0052] The plasma device (10) may include a second cathode portion (400). The second cathode portion (400) may include a second body (410). The second body (410) may be located inside the housing (100). For example, the second body (410) may be connected or coupled to a second end of the housing (100).

[0053] The second body (410) can form an inner surface and an outer surface. The inner surface of the second body (410) can face the anode portion (200). The inner surface of the second body (410) and the inner surface of the first body (310) can face each other.

[0054] The second cathode portion (400) may include an inlet hole (430). The inlet hole (430) may be a hole formed in the second body (410). The inlet hole (430) may be connected to the inner and outer surfaces of the second body (410). Through the inlet hole (430), gas may be injected into the interior of the housing (100).

[0055] The electric potential of the anode part (200) may be higher than the electric potential of the first cathode part (300). An electric field may be formed from the anode part (200) toward the first cathode part (300). The electric potential of the anode part (200) may be higher than the electric potential of the second cathode part (400). An electric field may be formed from the anode part (200) toward the second cathode part (400).

[0056] Fig. 4 is a drawing showing a magnetic field generating unit according to one embodiment of the present invention. Fig. 5 is a cross-sectional perspective view of a portion of the middle magnet illustrated in Fig. 4.

[0057] Referring to FIG. 4, the plasma device (10, see FIG. 1) may include a magnetic field generating unit (500). For example, the magnetic field generating unit (500) may include a permanent magnet or an electromagnet.

[0058] The magnetic field generating unit (500) may include a middle magnet (530). The middle magnet (530) may form two ends. For example, the first middle magnet end (533) may be one end of the middle magnet (530). For example, the second middle magnet end (534) may be the other end of the middle magnet (530).

[0059] The middle magnet (530) may form a pipe shape. For example, the middle magnet (530) may include a middle magnet inner surface (531). The middle magnet inner surface (531) may face a hollow portion formed in the middle magnet (530). The middle magnet inner surface (531) may extend from the first middle magnet end (533) and connect to the second middle magnet end (534).

[0060] For example, the middle magnet (530) may include a middle magnet outer surface (532). The middle magnet outer surface (532) may form the outer appearance of the middle magnet (530). The middle magnet outer surface (532) may extend from the first middle magnet end (533) and connect to the second middle magnet end (534).

[0061] The middle magnet (530) can form a magnetic flux. For example, the polarity of the first middle magnet end (533) can be different from the polarity of the second middle magnet end (534).

[0062] For example, the polarity of the first middle magnet end (533) may be a N pole, and the polarity of the second middle magnet end (534) may be a S pole. For example, the polarity of the first middle magnet end (533) may be a S pole, and the polarity of the second middle magnet end (534) may be a N pole.

[0063] For example, a magnetic flux may be formed in the hollow portion of the middle magnet (530). For example, the direction of the magnetic flux formed in the hollow portion of the middle magnet (530) may be the longitudinal direction of the middle magnet (530).

[0064] For example, the direction of the magnetic flux formed in the hollow portion of the middle magnet (530) may be parallel to the direction from the first middle magnet end (533) to the second middle magnet end (534).

[0065] The longitudinal direction of the middle magnet (530) may be the same as the longitudinal direction of the housing (100, see FIG. 1). For example, the longitudinal direction of the middle magnet (530) may be parallel to the direction from the first middle magnet end (533) to the second middle magnet end (534).

[0066] Figure 6 is a drawing showing a middle magnet arranged on the outside of the housing illustrated in Figure 2.

[0067] Referring to FIGS. 5 and 6, the middle magnet (530) may be placed on the outer surface of the housing (100). For example, the middle magnet inner surface (531) of the middle magnet (530) may face the outer surface of the housing (100).

[0068] Figure 7 is a drawing showing a middle magnet arranged inside the housing illustrated in Figure 2.

[0069] Referring to FIGS. 5 and 7, the middle magnet (530) can be accommodated in the housing (100). For example, the outer surface (532) of the middle magnet can face the inner surface of the housing (100).

[0070] The middle magnet (530) may be adjacent to the anode (200). For example, the inner surface (531) of the middle magnet may face the outer surface of the anode (200). For example, the middle magnet (530) may be located between the housing (100) and the anode (200).

[0071] The middle magnet (530) and the anode (200) can be electrically separated. For example, an insulator (not shown) can be placed between the middle magnet (530) and the anode (200).

[0072] The middle magnet (530) and the housing (100) can be electrically separated. For example, an insulator (not shown) can be placed between the middle magnet (530) and the housing (100).

[0073] Referring to FIGS. 5 to 7, the middle magnet (530) can form a magnetic flux inside the housing (100). For example, the direction of the magnetic flux formed inside the housing (100) by the middle magnet (530) can be the longitudinal direction of the housing (100).

[0074] For example, the magnetic flux located in the hollow portion of the anode (200) may not meet the anode (200). As a result, plasma can be effectively formed inside the housing (100).

[0075] Figure 8 is a cross-sectional perspective view of the first cathode portion.

[0076] Referring to FIG. 8, the first cathode portion (300) may include a first body (310). The first body (310) may form a drawing surface (311). The drawing surface (311) may face the exterior of the plasma device (10, see FIG. 1). The drawing surface (311) may, for example, form a shape of at least a portion of a cone.

[0077] The first body (310) can be coupled or connected to a housing (100, see FIG. 2). For example, the outer surface of the first body (310) can be coupled or connected to a housing (100, see FIG. 2).

[0078] The first body (310) can form a first shoulder surface (312). The first shoulder surface (312) can be located opposite the withdrawal surface (311). The first shoulder surface (312) can face the second cathode portion (400, see FIG. 2).

[0079] For example, the first shoulder face (312) may face the anode portion (200, see FIG. 2). For example, the first shoulder face (312) may face the upper face of the anode portion (200, see FIG. 2).

[0080] The first cathode portion (300) may include a first neck (320). The first neck (320) may protrude from the first body (310). For example, the first neck (320) may protrude from the first body (310) toward the second cathode portion (400, see FIG. 2).

[0081] For example, the first neck (320) may extend from the first shoulder surface (312). For example, the first neck (320) may form a step with the first shoulder surface (312). For example, the inner periphery of the first shoulder surface (312) may be connected to the first neck (320), and the outer periphery of the first shoulder surface (312) may be connected to the housing (100, see FIG. 2).

[0082] The first cathode portion (300) may include a withdrawal hole (330). The withdrawal hole (330) may be a hole formed in the first body (310) and the first neck (320). The withdrawal hole (330) may be connected to a lower face of the first neck (320). The lower face of the first neck (320) may face the second cathode portion (400, see FIG. 2).

[0083] The extraction hole (330) may be connected to or communicated with a hollow portion formed in the housing (100). The extraction hole (330) may be connected to the extraction surface (311). Ions formed in the housing (100, see FIG. 2) may be extracted to the outside through the extraction hole (330).

[0084] Figure 9 is a cross-sectional perspective view of the second cathode portion.

[0085] Referring to FIG. 9, the second cathode portion (400) may include a second body (410). The second body (410) may be coupled or connected to a housing (100, see FIG. 2). For example, an outer surface of the second body (410) may be coupled or connected to a housing (100, see FIG. 2).

[0086] The second body (410) can form a second shoulder surface (412). The second shoulder surface (412) can face the first cathode portion (300, see FIG. 2). For example, the first shoulder surface (412) can face the anode portion (200, see FIG. 2). For example, the second shoulder surface (412) can face the lower face of the anode portion (200, see FIG. 2).

[0087] The second cathode portion (400) may include a second neck (420). The second neck (420) may protrude from the second body (410). For example, the second neck (420) may protrude from the second body (410) toward the first cathode portion (300, see FIG. 2).

[0088] For example, the second neck (420) may extend from the second shoulder surface (412). For example, the second neck (420) may form a step with the second shoulder surface (412). For example, the inner periphery of the second shoulder surface (412) may be connected to the second neck (420), and the outer periphery of the second shoulder surface (412) may be connected to the housing (100, see FIG. 2).

[0089] The second cathode portion (400) may include an inlet hole (430). The inlet hole (430) may be a hole formed in the second body (410) and the second neck (420). The inlet hole (430) may be connected to an upper face of the second neck (420). The upper face of the second neck (420) may face the first cathode portion (300, see FIG. 2).

[0090] The inlet hole (430) may be connected to or communicated with a hollow portion formed in the housing (100). For example, gas may be injected into the interior of the housing (100) through the inlet hole (430). The gas injected into the interior of the housing (100) may be converted into a plasma state.

[0091] Figure 10 is a drawing showing a sub-magnet.

[0092] Referring to FIG. 10, the magnetic field generating unit (500, see FIG. 4) may include sub-magnets (510, 520). The sub-magnets (510, 520) may be provided in multiple numbers. For example, the magnetic field generating unit (500, see FIG. 4) may include a first magnet (510) and a second magnet (520). The sub-magnets (510, 520) may include or mean at least one of the first magnet (510) and the second magnet (520).

[0093] The sub-magnets (510, 520) can be connected or coupled to the cathode portion (300, 400, see FIGS. 8 and 9). The cathode portion (300, 400, see FIGS. 8 and 9) can include or mean at least one of the first cathode portion (300, see FIG. 8) and the second cathode portion (400, see FIG. 9).

[0094] The sub-magnets (510, 520) can form a ring shape overall. The shape of the sub-magnets (510, 520) can correspond to the shape of the cathode portion (300, 400, see FIGS. 8 and 9), for example.

[0095] For example, the first magnet (510) may be coupled or connected to the first cathode portion (300, see FIG. 8). For example, the first magnet (510) may be positioned on the first shoulder surface (312, see FIG. 8). For example, the first magnet (510) may form a shape that surrounds the first neck (320, see FIG. 8).

[0096] For example, the second magnet (520) may be coupled or connected to the second cathode portion (400, see FIG. 9). For example, the second magnet (520) may be positioned on the second shoulder surface (412, see FIG. 9). For example, the second magnet (520) may form a shape that surrounds the second neck (420, see FIG. 9).

[0097] FIG. 11 is a drawing showing the first cathode portion illustrated in FIG. 8, the second cathode portion illustrated in FIG. 9, the sub magnet illustrated in FIG. 10, and the middle magnet illustrated in FIG. 5 positioned in the housing illustrated in FIG. 2.

[0098] Referring to FIGS. 1 to 11, the magnetic field generating unit (500) may include sub-magnets (510, 520) and a middle magnet (530). For example, the middle magnet (530) may be located between the first magnet (510) and the second magnet (520).

[0099] The sub-magnets (510, 520) can form a magnetic flux. The direction of the magnetic flux formed by the sub-magnets (510, 520) may be in the longitudinal direction of the housing (100). For example, the polarities of the upper portion and the lower portion of the first magnet (510) may be different from each other. For example, the polarities of the upper portion and the lower portion of the second magnet (520) may be different from each other.

[0100] For example, the polarity of the lower portion of the first magnet (510) may be different from the polarity of the upper portion of the middle magnet (530). For example, the polarity of the lower portion of the middle magnet (530) may be different from the polarity of the upper portion of the middle magnet (530). For example, the polarity of the upper portion of the second magnet (520) may be different from the polarity of the lower portion of the middle magnet (530).

[0101] The magnetic flux formed by the sub magnets (510, 520) can be connected to the magnetic flux formed by the middle magnet (530). For example, the direction of the magnetic flux formed inside the housing (100) by the magnetic field generating unit (500) can be in the longitudinal direction of the housing (100).

[0102] For example, the magnetic flux located in the hollow portion of the housing (100) may not meet the anode portion (200). As a result, plasma can be effectively formed inside the housing (100).

[0103] Gas can be injected into the interior of the housing (100) through the injection hole (430). For another example, the gas can be injected into the interior of the housing (100) through an injection hole (not shown) formed in the housing (100). The injection hole (not shown) can be located, for example, between the second cathode portion (400) and the middle magnet (530). In this case, the injection hole (430) may not be formed in the second cathode portion (400).

[0104] The second magnet (520) may be adjacent to or coupled to the second cathode portion (400). For example, as illustrated in FIG. 11, the second magnet (520) may be located on the second shoulder surface (412).

[0105] For another example, the second magnet (520) may form a pillar shape. For example, the second magnet (520) may be adjacent to or coupled to the lower surface of the second body (410). For example, the upper surface of the second magnet (520) may face the lower surface of the second body (410).

[0106] For example, the polarity of the upper portion of the second magnet (520) may be different from the polarity of the lower portion of the middle magnet (530). For example, the polarity of the lower portion of the second magnet (520) may be different from the polarity of the upper portion of the second magnet (520).

[0107] Fig. 12 is a drawing showing a magnetic field generating unit arranged on the outside of the housing illustrated in Fig. 2.

[0108] Referring to FIGS. 1 to 12, the magnetic field generating unit (500) may be arranged on the outer surface of the housing (100). For example, the inner surface of the magnetic field generating unit (500) may face the outer surface of the housing (100). For example, the inner surface (531) of the middle magnet may face the outer surface of the housing (100). For example, the inner surface (531) of the middle magnet may face the positive electrode (200).

[0109] The sub magnets (510, 520) may be connected to the middle magnet (530). For example, the sub magnets (510, 520) may be formed integrally with the middle magnet (530). For example, the sub magnets (510, 520) may extend from the middle magnet (530).

[0110] For example, the first magnet (510) may extend upward from the upper edge of the middle magnet (530). For example, the second magnet (520) may extend downward from the lower edge of the middle magnet (530).

[0111] By forming the sub magnets (510, 520) and the middle magnet (530) integrally or being connected to each other, the plasma device (10) can be easily manufactured. For example, by forming the sub magnets (510, 520) and the middle magnet (530) integrally or being connected to each other, a portion of the magnetic flux formed by the magnetic field generating unit (500) may pass through the hollow portion formed in the anode unit (200) without encountering the anode unit (200).

[0112] The cathode portion (300, 400) may include or mean at least one of the first cathode portion (300) and the second cathode portion (400). For example, a portion of the magnetic flux formed by the magnetic field generating portion (500) may pass through the hollow portion formed in the anode portion (200) and meet the cathode portion (300, 400) without meeting the anode portion (200). As a result, plasma may be effectively formed inside the housing (100).

[0113] Any or all of the embodiments of the present invention described above are not mutually exclusive or distinct. Any or all of the embodiments of the present invention described above may have their respective components or functions combined or used together.

[0114] It will be apparent to those skilled in the art that the present invention may be embodied in other specific forms without departing from the spirit and essential characteristics thereof. The above detailed description should not be construed in any way as limiting but rather as illustrative. The scope of the present invention should be determined by a reasonable interpretation of the appended claims, and all modifications within the scope of equivalents of the present invention are intended to be included within the scope of the present invention.

Claims

1. A housing extending upward from the bottom to the top, forming a hollow space inside; A first cathode portion including a first body connected to the upper portion of the housing and a hole formed in the first body and communicating with the hollow portion of the housing; A second cathode portion including a second body connected to the lower portion of the housing; An anode portion located in the hollow portion of the housing and positioned between the first cathode portion and the second cathode portion; and Including a magnetic field generating unit that forms a magnetic flux in the hollow portion of the housing, Plasma device.

2. In paragraph 1, A portion of the magnetic flux formed in the hollow portion of the housing is Passing through the interior of the above anode but not meeting the above anode, Plasma device.

3. In paragraph 1, The electric potential of the above anode is Higher than the potential of the first cathode portion and the potential of the second cathode portion, Plasma device.

4. In paragraph 1, The above magnetic field generating unit is, Including a middle magnet adjacent to the above anode, Plasma device.

5. In paragraph 4, The inner surface of the above middle magnet faces the above anode, The outer surface of the above middle magnet faces the housing, Plasma device.

6. In paragraph 4, The above middle magnet is located on the outside of the housing, The inner surface of the above middle magnet faces the above housing, Plasma device.

7. In paragraph 4, The above magnetic field generating unit is, Further comprising at least one of a first magnet adjacent to the first cathode portion and a second magnet adjacent to the second cathode portion, Plasma device.

8. In paragraph 7, The above first magnet is located above the above middle magnet, The second magnet is located below the middle magnet. Plasma device.

9. In paragraph 8, The above first magnet, the above second magnet, and the above middle magnet, located outside the above housing, Plasma device.

10. In paragraph 9, The above first magnet extends upward from the top of the middle magnet, The second magnet extends downward from the bottom of the middle magnet. Plasma device.

11. In paragraph 8, The first magnet, the second magnet, and the middle magnet are located inside the housing, The lower surface of the above first magnet faces the upper surface of the above middle magnet, The upper surface of the second magnet faces the lower surface of the middle magnet. Plasma device.

12. In paragraph 11, The above first cathode portion, Further comprising a first neck protruding downward from the first body, The above first body, Forming a first neck and a step and forming a first shoulder surface facing the middle magnet, Plasma device.

13. In paragraph 12, The above first magnet is, Located on the first shoulder surface and facing the middle magnet, Plasma device.

14. In paragraph 13, The above second cathode portion, Further comprising a second neck protruding upward from the second body, The above second body, Forming a second neck and a step and forming a second shoulder surface facing the middle magnet, Plasma device.

15. In paragraph 14, The above second magnet is, Located on the second shoulder surface and facing the middle magnet, Plasma device.

16. In paragraph 7, The above first magnet is located above the above middle magnet, The second magnet is located below the middle magnet. Plasma device.

17. In paragraph 16, The lower surface of the above first magnet faces the upper surface of the above middle magnet, The upper surface of the second magnet faces the lower surface of the second body, Plasma device.

18. In paragraph 17, The above first cathode portion, Further comprising a first neck protruding downward from the first body, The above first magnet is, Forming a ring shape and wrapping the first neck, facing the middle magnet, Plasma device.

Images