Integrated vacuum system

Abstract

Disclosed in the present invention is an integrated vacuum system, comprising a case body, and a first vacuum pump and a second vacuum pump which are arranged in the case body, wherein the top of the second vacuum pump is connected to the bottom of the first vacuum pump by means of a mounting plate, a crossbeam is provided on either side of the case body, and two sides of the first vacuum pump are respectively connected to the crossbeams by means of support legs; a connection port is formed in the mounting plate, and an air inlet at the top of the second vacuum pump is communicated with an air outlet at the bottom of the first vacuum pump by means of the connection port. The present invention improves the convenience of mounting and debugging, and also improves the vacuum effect.

Description

Integrated vacuum system TECHNICAL FIELD

[0001] The present application relates to a vacuum pump system, in particular to an integrated vacuum system. BACKGROUND

[0002] In many vacuum application fields, only one vacuum pump cannot completely realize the actual process requirements. The most cost-effective limit vacuum or pumping capacity that can be achieved by different types of vacuum pumps is completely different. Different types of vacuum pumps also have different adaptability to different process media. In addition, different vacuum processes also need to be equipped with various auxiliary systems to ensure that the vacuum pump or vacuum pump group can operate stably and reliably.

[0003] Among them, like in the prior art, the patent number is: 202210470415.X, the patent name is: a highly integrated vacuum integrated system, which has the following disadvantages:

[0004] 1. The fixed mode at the bottom is adopted, and at the same time, during installation and disassembly, it is limited by the box. During installation and disassembly, each vacuum pump is installed or disassembled, which is very inconvenient. At the same time, during installation of the vacuum pump, it is also limited by the box, and the installation is not convenient;

[0005] 2. Two vacuum pumps adopt Roots vacuum pump and dry vacuum pump. The vacuum effect of these two types of vacuum pumps is not very good. For occasions that require higher vacuum degree, it is difficult to meet;

[0006] 3. Dust or working impurities are easy to accumulate at the connection of the two vacuum pumps, resulting in high maintenance rate and short service life of the vacuum pump;

[0007] 4. The outlet and inlet positions of the two vacuum pumps need to be adjusted or aligned, and the connection is achieved by using a pipeline, which increases the space occupation, resulting in large equipment volume and large space occupation. SUMMARY

[0008] The purpose of the present application is to provide an integrated vacuum system. By using the structure, the disassembly and assembly convenience of the vacuum pump is improved, the service life is prolonged, and the vacuum efficiency and vacuum effect are also improved.

[0009] To achieve the above purpose, the technical scheme adopted by the present application is: an integrated vacuum system, comprising a box, a first vacuum pump and a second vacuum pump arranged in the box, the top of the second vacuum pump is connected with the bottom of the first vacuum pump through a mounting plate, two sides of the box are respectively provided with a cross beam, and two sides of the first vacuum pump are respectively connected with the cross beam through support feet;

[0010] The mounting plate is provided with a connecting port, and an air inlet at the top of the second vacuum pump is connected to an air outlet at the bottom of the first vacuum pump through the connecting port.

[0011] In the technical scheme, at least one support leg extending outward is arranged on each side of the first vacuum pump, and each support leg is arranged directly above the corresponding cross beam;

[0012] An elastic buffer component is arranged between the support leg and the cross beam, and the support leg is connected to the corresponding cross beam through the elastic buffer component via a bolt;

[0013] The first vacuum pump and the second vacuum pump are arranged between the two cross beams.

[0014] In the technical scheme, at least one nitrogen purging inlet and at least one nitrogen purging outlet are arranged on the outer wall of the mounting plate and are connected to the connecting port;

[0015] A purging mechanism is arranged in the box, and the purging mechanism comprises a purging plate, and the purging plate is provided with a purging channel and a backflow channel, and the purging channel and the backflow channel are connected to a nitrogen source and a backflow source, respectively;

[0016] The nitrogen purging inlet is connected to the purging channel through a pipeline, and the nitrogen purging outlet is connected to the backflow channel through a pipeline;

[0017] The nitrogen source sends nitrogen into the connecting port through the purging channel, and the nitrogen is backflowed into the backflow source from the nitrogen purging outlet and the backflow channel.

[0018] In the technical scheme, the box comprises a support and an outer cover arranged outside the support;

[0019] The support comprises two groups of vertical frames arranged at intervals and two cross beams arranged at intervals, the cross beams are arranged between the two groups of vertical frames, the two ends of one cross beam are connected to one side of the two groups of vertical frames, respectively, and the two ends of the other cross beam are connected to the other side of the two groups of vertical frames, respectively, the first vacuum pump and the second vacuum pump are arranged between the two groups of vertical frames and the two cross beams, the outer cover is arranged outside the first vacuum pump, the second vacuum pump and the support, the distance between the two vertical frames is greater than the length of the first vacuum pump and the second vacuum pump, and the distance between the two cross beams is greater than the width of the second vacuum pump;

[0020] Each cross beam is provided with a bottom plate below, and the two ends of the bottom plate are connected to the two vertical frames, respectively;

[0021] At least one vertical plate is arranged on each bottom plate, and the two ends of the vertical plate are connected to the bottom plate and the cross beam perpendicularly.

[0022] And / or, the second vacuum pump is further provided with at least one bottom support plate below, both ends of the bottom support plate are connected with the two side bottom plates respectively, the bottom of the second vacuum pump is close to or abuts on the bottom support plate,

[0023] In the technical scheme, the first vacuum pump is a double-stage Roots vacuum pump, the first vacuum pump comprises a first Roots pump body with a first Roots pump body cavity, two first connecting shafts rotatingly installed in the first Roots pump body cavity and parallel to each other, and a first driving component driving the two first connecting shafts to rotate simultaneously, two first Roots rotor components meshing with each other are arranged in the first Roots pump body cavity, and each first Roots rotor component is installed on one first connecting shaft.

[0024] A first partition plate is arranged in the first Roots pump body cavity, and the first partition plate divides the first Roots pump body cavity into two independent first-stage Roots pump body cavities and second-stage Roots pump body cavities.

[0025] The first Roots rotor component comprises first-stage Roots rotor components and second-stage Roots rotor components arranged at intervals, the two first-stage Roots rotor components mesh with each other in the first-stage Roots pump body cavities, and the two second-stage Roots rotor components mesh with each other in the second-stage Roots pump body cavities.

[0026] And / or, the first Roots pump body is provided with a first air inlet, a first air outlet and a first connecting air channel, the first air inlet is connected with the top outer wall of the first Roots pump body and communicates with the first-stage Roots pump body cavities, the first connecting air channel connects the bottom of the first-stage Roots pump body cavities and the top of the second-stage Roots pump body cavities, the first air outlet connects the bottom of the second-stage Roots pump body cavities and the bottom outer wall of the first Roots pump body, and the bottom of the first air outlet is connected with the top of the connecting port.

[0027] And / or, when the first-stage Roots rotor components rotate, the fluid entering the first air inlet is sent into the second-stage Roots pump body cavities through the first connecting air channel; and when the second-stage Roots rotor components rotate, the fluid sent into the second-stage Roots pump body cavities through the first connecting air channel is sent into the connecting port.

[0028] In the technical scheme, the second vacuum pump is a hybrid vacuum pump, the hybrid vacuum pump comprises a second pump body, a second driving component and at least two second connecting shafts parallel to each other, the second pump body is provided with a second Roots pump body cavity and a second screw pump body cavity which are independent of each other, the plurality of second connecting shafts are rotatingly installed in the second pump body, and the second driving component drives the plurality of second connecting shafts to rotate simultaneously.

[0029] Two screw rotor components are arranged in the second screw pump cavity and each screw rotor component is arranged on a second connecting shaft;

[0030] At least one second Roots rotor assembly is arranged in the second Roots pump cavity, and the second Roots rotor assembly includes two second Roots rotor components which are arranged on the second connecting shafts;

[0031] The second pump body is provided with a second inlet, a second outlet and a second connecting channel, the second inlet is connected to the top of the second Roots pump cavity and the top of the second inlet is connected to the bottom of the connecting port, the second connecting channel is connected to the second Roots pump cavity and the second screw pump cavity, and the second outlet is connected to the second screw pump cavity and the outer wall of the first pump body;

[0032] When the second Roots rotor assembly rotates, the fluid in the connecting port is sent to the second inlet and the second connecting channel, and when the screw rotor component rotates, the fluid in the second connecting channel is sent to the second screw pump cavity and discharged from the second outlet.

[0033] In the above technical solution, the second Roots pump cavity includes a first second Roots pump cavity and a second second Roots pump cavity, and the second Roots rotor assembly includes two groups of second Roots rotor assemblies which are arranged in the first second Roots pump cavity and the second second Roots pump cavity, respectively;

[0034] The second inlet is connected to the top of the first second Roots pump cavity, and the second pump body is provided with a middle connecting channel which is connected to the bottom of the first second Roots pump cavity and the top of the second second Roots pump cavity.

[0035] In the above technical solution, the second connecting shaft includes two second connecting shafts, and the middle of the second connecting shafts is connected to the second pump body;

[0036] Two second Roots rotor components are arranged on the second connecting shaft, and the second Roots rotor components are arranged at intervals;

[0037] The end of the second connecting shaft which is away from the second Roots pump cavity is spaced apart from the second screw pump cavity, one end of the screw rotor component is arranged on the end surface of the second screw pump cavity which is close to the second Roots pump cavity, and the other end of the screw rotor component is spaced apart from the other end of the second screw pump cavity.

[0038] The second connecting shaft is three, and the three second connecting shafts include a middle connecting shaft, a first side connecting shaft and a second side connecting shaft which are respectively arranged in parallel on both sides of the middle connecting shaft.

[0039] The two screw rotor components are respectively installed on the middle connecting shaft and the first side connecting shaft.

[0040] The second Roots rotor assembly includes a first-level second Roots rotor assembly and a second-level second Roots rotor assembly, the first-level second Roots rotor assembly is arranged in the first-level second Roots pump cavity, the second-level second Roots rotor assembly is arranged in the second-level second Roots pump cavity, the first-level second Roots rotor assembly includes two first-level second Roots rotor components, and the second-level second Roots rotor assembly includes two second-level second Roots rotor components.

[0041] The two first-level second Roots rotor components are respectively installed on the middle connecting shaft and the first side connecting shaft.

[0042] The two second-level second Roots rotor components are respectively installed on the middle connecting shaft and the second side connecting shaft.

[0043] In the technical scheme, the outer wall of the second pump body is provided with a notch in communication with the second connecting air channel, and the second pump body is provided with a sealing component for sealing the notch.

[0044] The second connecting air channel at the notch is detachably provided with a fluid treatment component.

[0045] Compared with the prior art, the application has the following advantages:

[0046] 1. In the application, two vacuum pumps are connected through a mounting plate, and a connecting hole is arranged on the mounting plate to connect the gas outlets and inlets of the two vacuum pumps, so that the positions of the gas outlets and inlets of the two vacuum pumps do not need to be adjusted, the distance between the two vacuum pumps can be reduced, the entire vacuum system is more flattened, the volume of the vacuum system is reduced, and the space occupation is reduced.

[0047] 2. In the application, the first vacuum pump is directly connected to the cross beam of the box through the support feet, so that the second vacuum pump is in a suspended structure, the convenience of installation is improved, the two vacuum pumps can be assembled outside the box, and finally, the two vacuum pumps can be directly hoisted into the box and connected to the cross beam, thereby improving the convenience of installation.

[0048] 3. In the application, elastic buffering components are arranged between the support feet and the cross beam, so that the vibration during the operation of the vacuum pump can be buffered and absorbed, the vibration of the box itself is reduced as much as possible, and rigid collision on the installation position of the vacuum system is prevented.

[0049] 4. The blowing mechanism is arranged in the application, the connection port of the mounting plate is blown through the blowing mechanism, dust and other sundries accumulated in the connection port and part of dust and other sundries accumulated in the second vacuum pump are blown away, the service life of the vacuum pump is prolonged, the maintenance rate is reduced, and the stability of the vacuum pump is ensured;

[0050] 5. The first vacuum pump adopts a double-stage Roots vacuum pump in the application, the vacuum pumping effect is stronger, and therefore the vacuum pumping effect and vacuum degree of the vacuum system are improved;

[0051] 6. The second vacuum pump adopts a hybrid vacuum pump in the application, the hybrid vacuum pump comprises a Roots pump and a screw pump, and the same driving component is used to drive the Roots pump and the screw pump to work at the same time, so that the setting of the driving component is reduced, energy consumption is saved, cost is reduced, the vacuum pumping effect and vacuum degree are further improved, and the like;

[0052] 7. The hybrid vacuum pump can adopt a double-shaft structure or a three-shaft structure, and no matter the double-shaft structure or the three-shaft structure, the same driving component can be used to drive them at the same time, so that the vacuum pumping effect is effectively ensured. BRIEF DESCRIPTION OF DRAWINGS

[0053] Fig. 1 is a structural schematic diagram of an integrated vacuum system in an embodiment of the application;

[0054] Fig. 2 is a structural schematic diagram of a bottom part of the integrated vacuum system in the embodiment of the application;

[0055] Fig. 3 is a structural schematic diagram of a half-section of the integrated vacuum system in the embodiment of the application;

[0056] Fig. 4 is a structural schematic diagram of a half-section of a blowing plate in the embodiment of the application;

[0057] Fig. 5 is a structural schematic diagram of a local section of a connection port of a mounting plate in the embodiment of the application;

[0058] Fig. 6 is a structural schematic diagram of a section of a first vacuum pump in the embodiment of the application (a first Roots rotor component is not shown);

[0059] Fig. 7 is a structural schematic diagram of a first Roots rotor component and a first connecting shaft in the embodiment of the application;

[0060] Fig. 8 is a structural schematic diagram of an end surface section of a first-stage first Roots pump body in the embodiment of the application;

[0061] Fig. 9 is a structural schematic diagram of an end surface section of a second-stage first Roots pump body in the embodiment of the application;

[0062] Fig. 10 is a structural schematic diagram of a section of the second-stage first Roots pump body in another view in the embodiment of the application;

[0063] Fig. 11 is a schematic diagram of the structure of a second vacuum pump in one embodiment of the present application (using two third connecting shaft structures) ;

[0064] Fig. 12 is a schematic diagram of the sectional structure of Fig. 11;

[0065] Fig. 13 is a partial enlarged view of the connection between the second connecting shaft and the screw rotor component in Fig. 11;

[0066] Fig. 14 is a schematic diagram of the structure of gas flow in a second vacuum pump in one embodiment of the present application (using two second connecting shaft structures, double-rotary pump cavity structure) ;

[0067] Fig. 15 is a schematic diagram of the mounting structure of the second rotary rotor component and the second connecting shaft in one embodiment of the present application (using two second connecting shaft structures) ;

[0068] Fig. 16 is a schematic diagram of the structure of gas flow in a second vacuum pump in another embodiment of the present application (using two second connecting shaft structures, single-rotary pump cavity structure) ;

[0069] Fig. 17 is a schematic diagram of the structure of a second vacuum pump in another embodiment of the present application (using three third connecting shaft structures) ;

[0070] Fig. 18 is a top view of Fig. 17;

[0071] Fig. 19 is a schematic diagram of the sectional structure of A-A in Fig. 17;

[0072] Fig. 20 is a schematic diagram of the sectional structure of F-F in Fig. 18;

[0073] Fig. 21 is a schematic diagram of the sectional structure of B-B in Fig. 17;

[0074] Fig. 22 is a schematic diagram of the sectional structure of C-C in Fig. 17;

[0075] Fig. 23 is a schematic diagram of the sectional structure of D-D in Fig. 17;

[0076] Fig. 24 is a schematic diagram of the sectional structure of E-E in Fig. 17;

[0077] Fig. 25 is a partial enlarged view of the sectional structure of the second connecting gas passage of the second vacuum pump in the present application.

[0078] Wherein: 1, box; 10, beam; 11, support foot; 12, elastic buffer component; 13, positioning component; 14, cover; 15, stand; 16, control panel; 17, switch; 18, bottom plate; 19, vertical plate; 101, bottom support plate; 2, mounting plate; 21, connecting port; 22, nitrogen purging inlet; 23, nitrogen purging outlet; 24, purging plate; 25, purging channel; 26, backflow channel; 27, pipeline; 3, first vacuum pump; 31, first Roots pump cavity; 310, first-stage first Roots pump cavity; 311, second-stage first Roots pump cavity; 32, first Roots pump body; 321, first-stage first Roots pump body; 322, second-stage first Roots pump body; 33, first connecting shaft; 34, first Roots rotor component; 340, first-stage first Roots rotor component; 341, second-stage first Roots rotor component; 35, first partition plate; 36, first air inlet; 37, first air outlet; 38, first connecting air passage; 381, first-stage first connecting air passage; 382, second-stage first connecting air passage; 6, second vacuum pump; 61, second pump body; 62, second driving component; 63, second connecting shaft; 64, second Roots pump cavity; 65, second screw pump cavity; 66, screw rotor component; 67, second Roots rotor component; 68, middle connecting air passage; 69, second partition plate; 610, second Roots pump body; 611, second screw pump body; 612, connecting component; 621, second motor assembly; 622, gear; 631, middle connecting shaft; 632, first side connecting shaft; 633, second side connecting shaft; 641, first-stage second Roots pump cavity; 642, second-stage second Roots pump cavity; 671, first-stage second Roots rotor component; 672, second-stage second Roots rotor component; 681, first-stage middle connecting air passage; 682, second-stage middle connecting air passage; 6101, first-stage second Roots pump body; 6102, second-stage second Roots pump body; 81, second air inlet; 82, second air outlet; 83, second connecting air passage; 831, left second connecting air passage; 832, right second connecting air passage; 833, Roots connecting channel; 834, screw connecting channel; 9, sealing component; 91, frame; 92, sealing cover; 93, connecting cavity; 94, through slot. DETAILED DESCRIPTION

[0079] The application will be further described below in conjunction with the drawings and embodiments:

[0080] Embodiment one: referring to Figs. 1-25, an integrated vacuum system includes a box 1, a first vacuum pump 3 and a second vacuum pump 6 arranged in the box 1, the top of the second vacuum pump 6 is connected to the bottom of the first vacuum pump 3 via a mounting plate 2, both sides of the box 1 are respectively provided with a beam 10, both sides of the first vacuum pump 3 are respectively connected to the beam 10 via support feet 11;

[0081] The mounting plate 2 is provided with a connecting port 21, and the gas inlet at the top of the second vacuum pump 6 is connected to the gas outlet at the bottom of the first vacuum pump 3 through the connecting port 21.

[0082] In the embodiment, the gas pumped out by the first vacuum pump is sent into the connecting port of the mounting plate, and then is sent into the second vacuum pump through the connecting port of the mounting plate, and is vacuumed again by the second vacuum pump. The vacuum effect is better after two times of vacuuming. Alternatively, the negative pressure generated during the operation of the second vacuum pump is transmitted into the first vacuum pump through the connecting port, and the negative pressure generated by the first vacuum pump is combined, so that the negative pressure at the gas inlet of the first vacuum pump is larger, and the vacuum effect is better. In this way, the first vacuum pump and the second vacuum pump are directly connected through the mounting plate, the connecting port is formed on the mounting plate, and the two ends of the connecting port are connected to the gas outlet of the first vacuum pump and the gas inlet of the second vacuum pump, respectively. Therefore, the gas channel connection of the two vacuum pumps can be realized regardless of the positions of the gas outlet of the first vacuum pump and the gas inlet of the second vacuum pump. In this way, the entire vacuum system can be more flattened, the size of the vacuum system can be smaller, and the space occupation can be effectively reduced. Meanwhile, the two vacuum pumps are connected through the support feet on the side of the first vacuum pump and the cross beams of the box body. In this way, the second vacuum pump is a suspended structure, and the bottom of the second vacuum pump is not directly supported on the bottom of the box body. Therefore, the positions and the levelness of the two vacuum pumps can be conveniently adjusted.

[0083] Referring to FIG. 3, at least one support foot 11 extending outward is arranged on each side of the first vacuum pump 3, and each support foot 11 is arranged directly above the corresponding cross beam 10. In the embodiment, two support feet 11 extending outward are arranged on the front side and the rear side of the first vacuum pump 3, respectively, and two cross beams 10 are arranged on the front side and the rear side of the first vacuum pump 3 and the second vacuum pump 6, respectively.

[0084] Referring to FIG. 3, an elastic buffer component 12 is arranged between the support foot 11 and the cross beam 10, and the support foot 11 is connected to the corresponding cross beam 10 through the elastic buffer component 12 by means of a bolt.

[0085] The first vacuum pump 3 and the second vacuum pump 6 are arranged between the two cross beams 10.

[0086] In the embodiment, the elastic buffer component is made of rubber, which has a buffering effect. In this way, when the two vacuum pumps vibrate during operation, the vibration force can be buffered by the elastic buffer component, so that the vibration force is not transmitted to the box body as much as possible, and the vibration of the box body is prevented as much as possible, and the vibration of the box body and the installation position of the box body is prevented.

[0087] Further, the beam 10 is provided with a positioning component 13 matching the number of the corresponding elastic buffer component 12, the middle part of the positioning component 13 is provided with a positioning groove penetrating the top and bottom of the positioning component 13, the elastic buffer component is placed in the positioning groove, and the top of the elastic buffer component is arranged above the top of the positioning groove, the elastic buffer component is limited by the positioning groove, the bottom of the positioning groove is provided with a screw hole, the supporting leg is provided with a through hole, and the elastic buffer component is also provided with a penetrating hole, the bottom of the bolt penetrates the through hole, the penetrating hole and the screw hole, and is screwed, so that the supporting leg and the beam are connected, and the elastic buffer component is limited, the diameter of the through hole on the supporting leg is slightly larger than the diameter of the bolt, but is smaller than the diameter of the screw head of the bolt. At the same time, when the elastic buffer component is used for a long time, the elastic buffer component is pressed down, and after descending to a certain position, the bottom of the supporting leg abuts against the positioning component, and is supported by the positioning component, so as to play a mechanical supporting and positioning role.

[0088] Referring to FIGS. 1-3, the box body 1 comprises a support and an outer cover 14 mounted outside the support;

[0089] The support comprises two groups of stands 15 arranged at intervals and two beams 10 arranged at intervals, the beam 10 is arranged between the two groups of stands 15, the two ends of one beam 10 are respectively connected with the front sides of the two groups of stands 15, and the two ends of the other beam 10 are respectively connected with the back sides of the two groups of stands 15; the first vacuum pump 3 and the second vacuum pump 6 are arranged between the two groups of stands 15 and the two beams 10, the outer cover 14 is arranged outside the first vacuum pump 3, the second vacuum pump 6 and the support, the distance between the two stands 15 is greater than the length of the first vacuum pump 3 and the second vacuum pump 6, and the distance between the two beams 10 is greater than the width of the second vacuum pump 6.

[0090] In the embodiment, the distance between the two side stands is greater than the length of the first vacuum pump and the second vacuum pump, and the width between the two beams is greater than the width of the second vacuum pump. Thus, after the first vacuum pump and the second vacuum pump are pre-assembled outside the box, they are directly lowered from above the stand by hoisting, and are positioned between the two beams and the two side stands. The support feet of the two sides are opposite to the beams. When the support feet are placed on the beams (each support foot is placed on the corresponding elastic buffer component), the support feet and the beams are connected by bolts. Thus, the first vacuum pump, the second vacuum pump, and the stand can be quickly installed and disassembled, and are not limited by the size of the box, thereby improving the quick installation, disassembly, and maintenance of the first vacuum pump and the second vacuum pump. After the first vacuum pump, the second vacuum pump, and other components are installed, the outer cover is installed outside the stand, which is convenient and fast. Further, the control panel 16 and the switch 17 are electrically connected to the first vacuum pump 3 and the second vacuum pump 6 on the outer cover 14, and are used to control the operation of the vacuum system.

[0091] Referring to FIGS. 2 and 3, a bottom plate 18 is arranged below each beam 10, and the two ends of the bottom plate 18 are connected to the two side stands 15, respectively.

[0092] At least one vertical plate 19 is arranged on each bottom plate 18, and the two ends of the vertical plate 19 are connected to the bottom plate 18 and the beam 10 perpendicularly.

[0093] The bottom plate and the vertical plate can increase the strength of the entire stand and the support strength of the beam, and effectively prevent the deformation of the beam.

[0094] Referring to FIG. 2, at least one bottom support plate 101 is arranged below the second vacuum pump 3, and the two ends of the bottom support plate 101 are connected to the two bottom plates 18, respectively. The bottom of the second vacuum pump 3 is close to or abuts on the bottom support plate 101.

[0095] In the embodiment, the bottom support plate can be arranged or not arranged. Preferably, due to the arrangement of the elastic buffer component, the bottom support plate has a spacing between the bottom of the second vacuum pump in the embodiment. A second elastic support component is arranged between the bottom support plate and the second vacuum pump. The two ends of the second elastic support component are in contact with the top surface of the bottom support plate and the bottom of the second vacuum pump, respectively. The beam mainly supports the first vacuum pump, and the bottom support plate can assist in supporting the second vacuum pump, thereby ensuring the installation firmness and support strength of the two vacuum pumps and the box.

[0096] Further, referring to Figs. 4 and 5, at least one nitrogen purging inlet 22 and at least one nitrogen purging outlet 23 are arranged on the outer wall of the mounting plate 2 and are connected to the connecting port 21.

[0097] The box is provided with a purging mechanism, which comprises a purging plate 24, the purging plate 24 is provided with a purging channel 25 and a backflow channel 26, the purging channel 25 and the backflow channel 26 are respectively connected to a nitrogen source and a backflow source;

[0098] The nitrogen purging inlet 22 is connected to the purging channel 25 through a pipeline 27, and the nitrogen purging outlet 23 is connected to the backflow channel 26 through a pipeline 27.

[0099] The nitrogen source sends nitrogen into the connecting port through the purging channel, and the nitrogen is backflowed into the backflow source through the nitrogen purging outlet and the backflow channel.

[0100] In this embodiment, the nitrogen purging inlet, the nitrogen purging outlet and the connecting port are connected, the nitrogen source sends nitrogen into the connecting port, the nitrogen can purify the dust and other impurities in the connecting port during the vacuumizing process, and then the nitrogen is blown out through the nitrogen purging outlet, at the same time, since the connecting port is connected to the first vacuum pump and the second vacuum pump, the dust and other impurities in the first vacuum pump and the second vacuum pump can also be blown away, thereby prolonging the service life of the two vacuum pumps and ensuring the stability of the vacuum pump during operation (since the gap between the rotor components in the vacuum pump is small, and the gap between the rotor components and the inner wall of the vacuum pump is also small, if there are too many dust or impurities, the rotor components and the pump shell of the vacuum pump will be damaged, thereby causing poor operation stability and short service life, etc.).

[0101] Further, by arranging the purging plate, the purging channel and the backflow channel are arranged in the purging plate, the number of the nitrogen purging inlet and the nitrogen purging outlet is more than one, and generally multiple are arranged, therefore, a corresponding number of hole positions are arranged on the purging plate and are connected to the corresponding purging channel and backflow channel through pipelines, so as to realize synchronous nitrogen purging and synchronous backflow. The nitrogen source is used for providing nitrogen, and the backflow source can be a negative pressure mechanism, when the nitrogen source blows nitrogen into the connecting port for cleaning, the backflow source can synchronously suck away the nitrogen and dust and other impurities through negative pressure, thereby improving the cleaning efficiency and quality. The cleaning is performed when the vacuum pump is not working. In this way, the machine does not need to be disassembled for cleaning.

[0102] Further, the first vacuum pump and the second vacuum pump are provided with cooling cavities for cooling, and the purge channels and the backflow channels on the purge plate are also cooled through pipelines and the cooling cavities, so as to accelerate the cooling of the first vacuum pump and the second vacuum pump. Preferably, an electromagnetic valve is arranged on each pipeline to control the connection of the corresponding pipeline.

[0103] Referring to FIGS. 6-10, the first vacuum pump 3 is a double-stage Roots vacuum pump, which comprises a first Roots pump body 32 with a first Roots pump cavity 31, two first connecting shafts 33 rotatably arranged in the first Roots pump cavity 31 and parallel to each other, and a first driving component (not shown in the figure) for driving the two first connecting shafts 33 to rotate simultaneously. Two first Roots rotor components 34 are arranged in the first Roots pump cavity 31 and mesh with each other, and each first Roots rotor component 34 is arranged on a first connecting shaft 33.

[0104] The first Roots pump cavity 31 is provided with a first partition plate 35, which divides the first Roots pump cavity 31 into two independent first-stage Roots pump cavities 310 and second-stage Roots pump cavities 311.

[0105] The first Roots rotor components 34 comprise first-stage Roots rotor components 340 and second-stage Roots rotor components 341 arranged at intervals, the two first-stage Roots rotor components 340 mesh with each other in the first-stage Roots pump cavities 310, and the two second-stage Roots rotor components 341 mesh with each other in the second-stage Roots pump cavities 311.

[0106] The first Roots pump body 32 is provided with a first gas inlet 36, a first gas outlet 37, and a first connecting gas channel 38. The first gas inlet 36 is connected to the top outer wall of the first Roots pump body 32 and the first-stage Roots pump cavities 310, the first connecting gas channel 38 is connected to the bottom of the first-stage Roots pump cavities 310 and the top of the second-stage Roots pump cavities 311, the first gas outlet 37 is connected to the bottom of the second-stage Roots pump cavities 311 and the bottom outer wall of the first Roots pump body 32, and the bottom of the first gas inlet 36 is connected to the top of the connecting port 21.

[0107] When the first-stage Roots rotor components 340 rotate, the fluid entering the first-stage Roots pump cavities 310 through the first gas inlet 36 is sent into the second-stage Roots pump cavities 311 through the first connecting gas channel 38. When the second-stage Roots rotor components 341 rotate, the fluid entering the second-stage Roots pump cavities 311 through the first connecting gas channel 38 is sent into the connecting port 21.

[0108] In the example of the illustrated direction, the first Roots pump body 32 includes a split structure of a first-stage first Roots pump body 321 and a second-stage first Roots pump body 322. The first-stage first Roots pump body cavity 310 is arranged in the first-stage first Roots pump body 321, and the right end thereof is in communication with the right end surface of the first-stage first Roots pump body 321. The second-stage first Roots pump body cavity 311 is arranged in the second-stage first Roots pump body 322, and the left end thereof is in communication with the left end surface of the second-stage first Roots pump body 322. The first partition plate 35 is arranged between the first-stage first Roots pump body 321 and the second-stage first Roots pump body 322. The top of the first gas inlet 36 is in communication with the top surface of the first-stage first Roots pump body 321, and the bottom of the first gas inlet 36 is in communication with the top left side of the first-stage first Roots pump body cavity 310. The first connecting gas channel 38 includes a first-stage first connecting gas channel 381 and a second-stage first connecting gas channel 382. One end of the first-stage first connecting gas channel 381 is in communication with the bottom of the first-stage first Roots pump body cavity 310, and the other end thereof is in communication with the right end surface of the first-stage first Roots pump body 321. The second-stage first connecting gas channel 382 is arranged in the second-stage first Roots pump body 322 outside the second-stage first Roots pump body cavity 311. One end of the second-stage first connecting gas channel 382 is in communication with the left end surface of the second-stage first Roots pump body 322 and faces and is in communication with the right end of the first-stage first connecting gas channel 381. The other end of the second-stage first connecting gas channel 382 is in communication with the top of the second-stage first Roots pump body cavity 311. The top of the first gas outlet 37 is in communication with the bottom right side of the second-stage first Roots pump body cavity 311, and the bottom of the first gas outlet 37 is in communication with the bottom surface of the second-stage first Roots pump body 322.

[0109] When the first vacuum pump is working, the two first connecting shafts rotate, one of the first connecting shafts rotates clockwise, and the other first connecting shaft rotates counterclockwise, which drives the first Roots rotor components arranged thereon to rotate in engagement. When rotating, the two first-stage first Roots rotor components send the gas in the first-stage first Roots pump body cavity above the first-stage first Roots rotor components to the below of the first-stage first Roots rotor components, and then to the second-stage first Roots pump body cavity above the second-stage first Roots rotor components in sequence through the first-stage first connecting gas channel and the second-stage first connecting gas channel. In this process, since the second-stage first Roots rotor components also rotate simultaneously, the gas above the second-stage first Roots rotor components is sent to the second-stage first Roots pump body cavity below the second-stage first Roots rotor components, and then is sent out through the first gas outlet and into the second vacuum pump through the connecting port.

[0110] Referring to Figs. 11-25, the second vacuum pump 6 is a hybrid vacuum pump, which comprises a second pump body 61, a second driving component 62 and at least two second connecting shafts 63 parallel to each other, the second pump body 61 is provided with a second Roots pump cavity 64 and a second screw pump cavity 65 independent of each other, the second connecting shafts 63 are rotatably installed in the second pump body 61, and the second driving component 62 drives the second connecting shafts 63 to rotate simultaneously; wherein the second driving component 62 is a combination of a second motor assembly 621 and a gear 622, and for example in the direction shown, the left end of each second connecting shaft 63 is provided with a gear 622, the gears on the second connecting shafts are engaged with each other, and the second motor assembly is connected with one of the gears, so that when the gear is driven to rotate, the second connecting shafts are driven to rotate synchronously through the gear.

[0111] The second screw pump cavity 65 is provided with two screw rotor components 66 engaged with each other, and each screw rotor component 66 is installed on one second connecting shaft 63;

[0112] The second Roots pump cavity 64 is provided with at least one second Roots rotor assembly, and the second Roots rotor assembly comprises two second Roots rotor components 67 engaged with each other, and each second Roots rotor component 67 is installed on one second connecting shaft 63;

[0113] The second pump body 61 is provided with a second inlet 81, a second outlet 82 and a second connecting air channel 83, the second inlet 82 communicates the second Roots pump cavity 64 with the top outer wall of the second pump body 61, and the top of the second inlet 81 communicates with the bottom of the connecting port 21; the second connecting air channel 83 communicates the second Roots pump cavity 64 with the second screw pump cavity 65, and the second outlet 82 communicates the second screw pump cavity 65 with the outer wall of the second pump body 61;

[0114] When the second Roots rotor assembly rotates, the fluid sent by the connecting port 21 to the second inlet 81 is sent to the second connecting air channel 83, and when the screw rotor component 66 rotates, the fluid sent by the second connecting air channel 83 to the second screw pump cavity 65 is discharged from the second outlet 82.

[0115] In the application, the screw rotor part and the second Roots rotor part are installed on the same connecting shaft driven by the second driving part, the hybrid pump is a hybrid pump combined by a Roots vacuum pump and a screw vacuum pump, the same second driving part is used to drive the Roots pump and the screw pump to work at the same time, and the gas pumped out from the first vacuum pump passes through the Roots pump and then the screw pump and is finally discharged.

[0116] In other words, in the application, the screw pump is at the end of the gas flow, in the process, the pitch of the screw rotor part gradually decreases from left to right when the screw pump rotates, and the two screw rotor parts generate negative pressure on the left side during rotation, which gives the left-end Roots vacuum pump, i.e., the left-end second Roots pump body cavity negative pressure, increases the negative pressure of the second Roots pump body cavity, and at the same time, the two second Roots rotor parts give the second gas inlet greater negative pressure, which is transmitted to the first vacuum pump through the connecting port to further increase the negative pressure of the first vacuum pump, so that the application is equivalent to three vacuum pumps working together to form a vacuum system, and the vacuum effect is good.

[0117] In the present application, the second pump body 61 comprises a second Roots pump body 610 and a second screw pump body 611 connected together, the second Roots pump body cavity 64 is arranged in the second Roots pump body 610, the second screw pump body cavity 65 is arranged in the second screw pump body 611, the second air inlet 81 is arranged on the second Roots pump body 610, the top of the second air inlet 81 is communicated with the top surface of the second Roots pump body 610, and the bottom is communicated with the top of the second Roots pump body cavity 64. One end of the second air outlet 82 is communicated with the right end of the second screw pump body cavity 65, and the other end of the second air outlet 82 is communicated with the outer wall of the second screw pump body 611. The second connecting air channel 83 comprises a left second connecting air channel 831 and a right second connecting air channel 832, the left second connecting air channel 831 is arranged on the second Roots pump body 610, the left end of the left second connecting air channel 831 is communicated with the second Roots pump body cavity 64, the right end of the left second connecting air channel 831 is communicated with the right end surface of the second Roots pump body 610, and the right end of the left second connecting air channel 831 is communicated with the left end of the right second connecting air channel 832. The right second connecting air channel 832 is arranged on the second screw pump body 611, one end of the right second connecting air channel 832 is communicated with the left end of the second screw pump body cavity 65, the left end of the right second connecting air channel 832 is communicated with the left end surface of the second screw pump body 611, and the left end of the right second connecting air channel is communicated with the right end of the left second connecting air channel. In the present application, when the second vacuum pump works, the second Roots rotor assembly rotates, the gas in the second air inlet is sent into the second Roots pump body cavity below the second Roots rotor assembly, then enters the second screw pump body cavity through the left second connecting air channel and the right second connecting air channel, and after the rotation of the screw rotor component, the gas is discharged from the second air outlet. Or the negative pressure when the screw rotor component rotates is transmitted to the second Roots pump body cavity through the second connecting air channel, and then the negative pressure is transmitted to the second air inlet when the second Roots rotor assembly rotates, and the negative pressure is transmitted to the first vacuum pump through the connecting port. Therefore, the vacuum system can realize efficient and high-quality vacuumizing.

[0118] In one embodiment, the second Roots rotor assembly is a group, so that the Roots pump is a single-stage Roots pump, and the flow path of the gas is shown in FIG. 16. In this embodiment, the vacuum system is equivalent to four vacuum pumps, the first vacuum pump is a double-stage Roots vacuum pump, which is equivalent to two independent vacuum pumps, and the second vacuum pump comprises a single-stage Roots pump and a screw pump, so that the vacuum system is equivalent to four vacuum pumps, and the vacuum effect is strong.

[0119] In another embodiment, referring to Figs. 11-15, the second Roots pump body cavity 64 comprises a first-stage second Roots pump body cavity 641 and a second-stage second Roots pump body cavity 642, which are independent of each other, and the second Roots rotor assembly is two sets, which are respectively installed in the first-stage second Roots pump body cavity 641 and the second-stage second Roots pump body cavity 642.

[0120] The second inlet port 81 is in communication with the top of the first-stage second Roots pump body cavity 641, and the second pump body 61 is provided with a middle connecting air passage 68, which is in communication with the bottom of the first-stage second Roots pump body cavity 641 and the top of the second-stage second Roots pump body cavity 642.

[0121] The second vacuum pump adopts a two-stage Roots pump, which has two structures. In one embodiment, the first structure is that, referring to Figs. 11-15, the second connecting shaft 63 is two, and the middle portions of the two second connecting shafts 63 are in rotational connection with the second pump body 61.

[0122] Each of the second connecting shafts 63 is provided with two second Roots rotor components 67, which are arranged at intervals.

[0123] In this embodiment, the Roots vacuum pump is a two-stage Roots vacuum pump, which has a structure similar to that of the first vacuum pump. In this embodiment, the second Roots pump body 610 comprises a first-stage second Roots pump body 6101 and a second-stage second Roots pump body 6102, the first-stage second Roots pump body cavity 641 is arranged in the first-stage second Roots pump body 6101, the right end of which is in communication with the right end face of the first-stage second Roots pump body 641, the second-stage second Roots pump body cavity 6102 is arranged in the second-stage second Roots pump body 6102, the left end of which is in communication with the left end face of the second-stage second Roots pump body 6102, and the second partition plate 69 is arranged between the first-stage second Roots pump body 6101 and the second-stage second Roots pump body 6102, the top of the second inlet port 81 is in communication with the top face of the first-stage second Roots pump body 6101, and the bottom of the second inlet port 81 is in communication with the top left side of the first-stage second Roots pump body cavity 641. In this structure, the assembly and adjustment of the two-stage Roots pump are facilitated.

[0124] The middle connecting gas passage 68 comprises a first middle connecting gas passage 681 and a second middle connecting gas passage 682. One end of the first middle connecting gas passage 681 is communicated with the bottom of the first second Roots pump cavity 641, and the other end of the first middle connecting gas passage 681 is communicated with the right end surface of the first second Roots pump body 6101. The second middle connecting gas passage 682 is arranged around the outside of the second second Roots pump body 6102, one end of the second middle connecting gas passage 682 is communicated with the left end surface of the second second Roots pump cavity 642, and the other end of the second middle connecting gas passage 682 is communicated with the top of the second second Roots pump cavity 642. The left end of the second connecting gas passage 83 is communicated with the right side of the bottom of the second second Roots pump cavity 642, and the right end of the second connecting gas passage 83 is communicated with the left end of the second screw pump cavity 65.

[0125] During operation, the second Roots rotor assembly in the first second Roots pump cavity sends the gas from the second gas inlet to the middle connecting gas passage, and then to the top of the second second Roots pump cavity, and then the gas is sent from the second connecting gas passage to the second screw pump cavity by the second Roots rotor assembly in the second second Roots pump cavity, and then the gas is sent to the second gas outlet by the screw rotor assembly.

[0126] Meanwhile, in this embodiment, the middle of the connecting shaft is rotatably connected to the left end of the first second Roots pump body and the right end of the second second Roots pump body through bearings, two second Roots rotor assemblies and one screw rotor assembly are respectively arranged on the upper surface of each connecting shaft, the second driving mechanism comprises a second motor assembly and two gears, the two gears are respectively connected to the left end of the two connecting shafts, the two gears are engaged, and the second motor assembly is connected to one of the gears. When the two connecting shafts are simultaneously driven to rotate by the second motor assembly, the gas can be drawn from the second gas inlet into the first second Roots pump cavity, and then sent to the second second Roots pump cavity through the middle connecting gas passage, and then sent to the second screw pump cavity, and finally discharged from the second gas outlet. In this embodiment, the vacuum system is equivalent to five connected vacuum pumps, the first vacuum pump is a double-stage Roots vacuum pump, which is equivalent to two vacuum pumps, and the hybrid pump comprises a double-stage Roots vacuum pump and a screw vacuum pump, i.e. the second vacuum pump is equivalent to three vacuum pumps. Therefore, the vacuum pumping effect of the entire vacuum system is good, and the vacuum pumping quality is good.

[0127] In this embodiment, the double-stage Roots vacuum pump comprises a first second Roots pump body and a second Roots pump body in a split structure, which facilitates the installation and debugging of the internal second Roots rotor assembly.

[0128] Meanwhile, the second connecting shaft end part away from the second Roots pump cavity and the second screw pump cavity have a spacing, one end of the screw rotor part is arranged close to the end face of the second screw pump cavity on the side of the second Roots pump cavity, and the other end of the screw rotor part and the other end of the second screw pump cavity have a spacing. That is, the right end of the connecting shaft and the right end of the screw rotor part and the right end of the second screw pump cavity are not in contact, the right end of the connecting shaft is a suspended structure, and the right end of the screw rotor part is also a suspended structure, that is, the screw rotor part is a cantilever screw rotor part. In this structure, it is convenient to debug and adjust the spacing between the two screw rotor parts during assembly, so as to ensure the meshing between the two, wherein the two screw rotor parts do not contact each other, but only have a micro gap therebetween, and do not rub each other, thereby ensuring the vacuum quality.

[0129] The second vacuum pump adopts a double-stage Roots pump, and there are two structures. In another embodiment, the second structure is as follows: referring to FIGS. 17-25, the second connecting shaft 63 is three, and the three second connecting shafts 63 include a middle connecting shaft 631, a first side connecting shaft 632 and a second side connecting shaft 633 which are respectively arranged in parallel on both sides of the middle connecting shaft 631;

[0130] The two screw rotor parts 66 are respectively arranged on the middle connecting shaft 631 and the first side connecting shaft 632;

[0131] The second Roots rotor assembly includes a first-stage second Roots rotor assembly and a second-stage second Roots rotor assembly, the first-stage second Roots rotor assembly is arranged in the first-stage second Roots pump cavity 641, and the second-stage second Roots rotor assembly is arranged in the second-stage second Roots pump cavity 642. The first-stage second Roots rotor assembly includes two first-stage second Roots rotor parts 671, and the second-stage second Roots rotor assembly includes two second-stage second Roots rotor parts 672.

[0132] The two first-stage second Roots rotor parts 671 are respectively arranged on the middle connecting shaft 631 and the first side connecting shaft 632;

[0133] The two second-stage second Roots rotor parts 672 are respectively arranged on the middle connecting shaft 631 and the second side connecting shaft 633.

[0134] In the embodiment, the second pump body 61 includes a second Roots pump body 610, a second screw pump body 611, and two sets of connecting components 612. A first-stage second Roots pump cavity 641 and a second-stage second Roots pump cavity 642 are arranged in the second Roots pump body 610. The left end of the first-stage second Roots pump cavity 641 is in communication with the left end face of the second Roots pump body 610, and the right end of the second-stage second Roots pump cavity 642 is in communication with the right end face of the second Roots pump body 610. The two sets of connecting components 612 are arranged at the two ends of the second Roots pump body 610, respectively sealing the ends of the first-stage second Roots pump cavity 641 and the second-stage second Roots pump cavity 642, and also serving as rotational supports for the second shafts. The intermediate shafts pass through the first-stage second Roots pump cavity and the second-stage second Roots pump cavity, and the connecting components have holes for mounting the second shafts, so that the shafts pass through the second Roots pump body and the second screw pump body. The three second shafts are arranged on the same plane, and the left end of each second shaft is provided with a gear. The three gears are in meshing engagement, and the second motor assembly is connected with one of the gears. In this way, when the intermediate shafts rotate, the first side shaft and the second side shaft rotate in the same direction, and the intermediate shafts rotate in the opposite direction.

[0135] Taking counterclockwise rotation of the intermediate shafts as an example, the first side shaft and the second side shaft rotate clockwise. In the embodiment, the bottom of the intermediate connecting gas passage is in communication with the bottom of the first-stage second Roots pump cavity and the bottom of the second-stage second Roots pump cavity, and the second connecting gas passage is in communication with the top of the second-stage second Roots pump cavity and the left end of the second screw pump cavity. In this process, the two first-stage second Roots rotor components send the gas from the second gas inlet downward into the intermediate connecting gas passage, and then into the second-stage second Roots pump cavities below the two second-stage second Roots rotor components. Since three second shafts are used, the two second-stage second Roots rotor components send the gas upward into the space above the second-stage second Roots pump cavities, and then into the second screw pump cavity through the second connecting gas passage, and then the gas is discharged from the second gas outlet through the screw rotor component.

[0136] In the embodiment, the first-stage second Roots pump cavity and the second-stage second Roots pump cavity are arranged in the same second Roots pump body, so that the machining reference is uniform when the two Roots pump cavities are machined, and the machining precision is higher. In addition, only the intermediate shafts are provided with the two Roots rotor components and the screw rotor component, the first side shaft is provided with only one Roots rotor component and one screw rotor component, and the second side shaft is provided with only one Roots rotor component. Therefore, the debugging is more convenient when assembling and debugging, so as to ensure the assembly precision and quality, and further ensure the vacuum pumping effect and stability.

[0137] In the present application, the second vacuum pump adopts direct connection and combination of Roots vacuum pump and screw vacuum pump, and is driven by the same second driving mechanism, so that the Roots vacuum pump can be used to pressurize the screw vacuum pump first, improving the vacuumizing efficiency and effect. At the same time, the Roots pump in the second vacuum pump adopts a double-stage Roots vacuum pump, so that each stage will produce compression, and the heat will not be concentrated at the second gas outlet of the screw pump, which can effectively prevent the exhaust temperature from being too high to cause coking of the hydrocarbon mixture and blockage, ensure the smoothness of vacuumizing, and prevent the screw pump from being damaged, reduce the maintenance rate, and prolong the service life. At the same time, the double-stage Roots vacuum pump in the second vacuum pump can effectively prevent dust and other impurities from entering the screw pump, prevent the phenomenon of powder sticking and blocking, reduce the maintenance rate, and prolong the service life. Further, since the first vacuum pump also adopts a double-stage Roots vacuum pump, the dust and other impurities are further separated, and the connecting port is purged by the purging mechanism, so as to as far as possible to purge the dust, reduce the occurrence of blocking and other situations, reduce the maintenance rate, and prolong the service life.

[0138] At the same time, referring to Figures 17, 20, and 25, the second vacuum pump adopts a three-axis structure, the outer wall of the second pump body 61 is provided with a notch in communication with the second connecting air duct 83, and the second pump body 61 is provided with a sealing member 9 for sealing the notch; The second connecting air duct 83 at the notch is also detachably provided with a fluid treatment member (not shown in the figure).

[0139] In the present embodiment, the second connecting air duct 83 includes a Roots connecting channel 833 and a screw connecting channel 834, the bottom of the Roots connecting channel 833 is in communication with the top of the second-stage second Roots pump body cavity 642, the top of the Roots connecting channel 833 is in communication with the top of the second Roots pump body 610, and is arranged close to the second screw pump body 611. The bottom of the screw connecting channel 834 is in communication with the second screw pump body cavity 65, and the top of the screw connecting channel 824 is in communication with the top of the connecting member 612, so that the top of the Roots connecting channel 833 and the screw connecting channel 834 constitutes the notch.

[0140] The sealing component 9 comprises a frame 91 and a sealing cover 92. The frame 91 is a hollow structure with an open top. The top of the frame 91 is provided with a connecting cavity 93. The bottom surface of the frame 91 is provided with two through grooves 94, which are in communication with the connecting cavity 93. The two through grooves 94 are respectively arranged opposite to the top of the Roots connecting channel 833 and the top of the screw connecting channel 834. The two ends of the frame are respectively mounted on the top of the second Roots pump body and the connecting component, so that the two through grooves are respectively arranged on the top of the Roots connecting channel and the screw connecting channel. In this way, the gas sent out by the Roots connecting channel enters the connecting cavity through the corresponding through groove, and the top of the connecting cavity is sealed by the sealing cover. In this way, the gas sent out by the second Roots pump body cavity enters the connecting cavity through the Roots connecting channel and the corresponding through groove, and then enters the screw connecting channel through the other through groove, and then enters the second screw pump body cavity. In this way, the Roots connecting channel, the screw connecting channel and the connecting cavity constitute a complete second connecting gas channel. In this way, the operator can directly open the sealing cover and the frame, so that the Roots connecting channel and the screw connecting channel are exposed. The operator can observe the internal situation through the corresponding Roots connecting channel and screw connecting channel. The operator can perform a simple maintenance without disassembling the pump body, and then perform targeted disassembly and maintenance without disassembling the second pump body for maintenance, thereby improving the convenience of subsequent maintenance. In addition, during the assembly and debugging of the Roots pump, the operator can observe the internal situation through the Roots connecting channel and the screw connecting channel, and insert a caliper into the internal situation to observe the assembly gap, thereby facilitating the debugging.

[0141] Further, a filter screen can be arranged in the through groove to filter dust and other impurities in the Roots connecting channel and the screw connecting channel. At the same time, the filter screen can prevent impurities from entering the corresponding second Roots pump body cavity or screw pump body cavity through the through groove during assembly.

[0142] Further, a fluid treatment component (not shown in the figure) can be detachably installed in the second connecting air passage at the gap. The fluid treatment component can be directly placed in the connecting cavity to treat the fluid flowing through the second connecting air passage. The fluid treatment component can be a filter, a caustic pack, a cooler or a heater, etc. The filter can be used to filter dust and other impurities flowing through the second connecting air passage. The caustic pack is used to absorb water vapor to prevent the mixture of dust and water vapor from blocking the adjacent screw rotor component or the second screw pump body cavity. If the temperature of the second-stage second Roots pump body cavity entering the second screw pump body cavity is too high, a cooler can be provided to cool the gas to prevent the coking of the hydrocarbon mixture. If the temperature of the second-stage second Roots pump body cavity entering the second screw pump body cavity is too low, the gas entering the second screw pump body cavity is too cold, which can cause condensation, and the mixture of dust and condensate can block the second screw pump body cavity. Therefore, a heater can be used to heat the gas to prevent condensation. Of course, other conditions can be selected according to different construction environments, which has expandability, wider application range, can effectively ensure the vacuum pumping effect of the mixing pump, prolong the service life and reduce the maintenance rate.

[0143] In the description of the present application, it should be understood that the terms "upper", "lower", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise explicitly specified and limited.

[0144] In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection", "fixing" and the like should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, such as, the two are connected in a mechanical abutting or abutting manner through abutting, touching, etc., the two can also be directly hung or hung through an intermediate medium, or the two elements can be connected in an internal communication manner or a mutual action relationship. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

Claims

1. An integrated vacuum system, characterized by: The box, the first vacuum pump and the second vacuum pump, the top of the second vacuum pump is connected with the bottom of the first vacuum pump through a mounting plate, two sides of the box are respectively provided with a crossbeam, two sides of the first vacuum pump are respectively connected with the crossbeam through support feet; The mounting plate is provided with a connecting port, the air inlet of the top of the second vacuum pump is connected with the air outlet of the bottom of the first vacuum pump through the connecting port.

2. The integrated vacuum system of claim 1, wherein: Two sides of the first vacuum pump are respectively provided with at least one outwardly extending support foot, each support foot is arranged directly above the corresponding crossbeam; The support foot and the crossbeam are provided with elastic buffer components, the support foot is connected with the corresponding crossbeam through the elastic buffer components through bolts; And / or, the first vacuum pump and the second vacuum pump are arranged between the two crossbeams.

3. The integrated vacuum system of claim 1, wherein: The outer wall of the mounting plate is provided with at least one nitrogen purging inlet and at least one nitrogen purging outlet which are connected with the connecting port; The box is provided with a purging mechanism, the purging mechanism comprises a purging plate, the purging plate is provided with a purging channel and a backflow channel, the purging channel and the backflow channel are respectively connected with a nitrogen source and a backflow source; The nitrogen purging inlet is connected with the purging channel through a pipeline, the nitrogen purging outlet is connected with the backflow channel through a pipeline; And / or, the nitrogen source sends nitrogen into the connecting port through the purging channel, and backflows into the backflow source from the nitrogen purging outlet and the backflow channel.

4. The integrated vacuum system of claim 1, wherein: The box comprises a support and an outer cover mounted on the outside of the support; The support comprises two groups of vertical frames arranged at intervals and two crossbeams arranged at intervals, the crossbeams are arranged between the two groups of vertical frames, the two ends of one crossbeam are respectively connected with one side of the two groups of vertical frames, the two ends of the other crossbeam are respectively connected with the other side of the two groups of vertical frames; the first vacuum pump and the second vacuum pump are arranged between the two groups of vertical frames and the two crossbeams, the outer cover is arranged outside the first vacuum pump, the second vacuum pump and the support, the distance between the two vertical frames is greater than the length of the first vacuum pump and the second vacuum pump, and the distance between the two crossbeams is greater than the width of the second vacuum pump; And / or, each crossbeam is provided with a bottom plate below, the two ends of the bottom plate are respectively connected with the two vertical frames; And / or, each bottom plate is further provided with at least one vertical plate, the two ends of the vertical plate are respectively connected with the bottom plate and the crossbeam perpendicularly; And / or, the second vacuum pump is further provided with at least one bottom support plate below, the two ends of the bottom support plate are respectively connected with the two bottom plates, and the bottom of the second vacuum pump is close to or abuts on the bottom support plate.

5. The integrated vacuum system of claim 1, wherein: The first vacuum pump is a double-stage Roots vacuum pump, which comprises a first Roots pump body with a first Roots pump body cavity, two first connecting shafts installed in parallel in the first Roots pump body cavity, and a first driving component for driving the two first connecting shafts to rotate simultaneously, wherein the first Roots pump body cavity is provided with two first Roots rotor components which are in mesh with each other, and each first Roots rotor component is installed on a first connecting shaft; The first Roots pump body cavity is provided with a first partition plate, which divides the first Roots pump body cavity into two independent first-stage and second-stage Roots pump body cavities; The first Roots rotor components comprise first-stage and second-stage Roots rotor components which are arranged at intervals, wherein the two first-stage Roots rotor components are in mesh with each other in the first-stage Roots pump body cavity, and the two second-stage Roots rotor components are in mesh with each other in the second-stage Roots pump body cavity; The first Roots pump body is provided with a first gas inlet, a first gas outlet, and a first connecting gas channel, wherein the first gas inlet is connected to the top outer wall of the first-stage Roots pump body cavity and the first connecting gas channel is connected to the top of the second-stage Roots pump body cavity, the bottom of the first-stage Roots pump body cavity, and the bottom outer wall of the first Roots pump body, and the bottom of the first gas outlet is connected to the top of the connecting port; When the first-stage Roots rotor components rotate, the fluid entering the first gas inlet is sent into the second-stage Roots pump body cavity through the first connecting gas channel; and when the second-stage Roots rotor components rotate, the fluid sent into the second-stage Roots pump body cavity through the first connecting gas channel is sent into the connecting port.

6. The integrated vacuum system of claim 1, wherein: The second vacuum pump is a hybrid vacuum pump, which comprises a second pump body, a second driving component, and at least two second connecting shafts installed in parallel, wherein the second pump body is provided with a second Roots pump body cavity and a second screw pump body cavity which are independent of each other, the second connecting shafts are rotatably installed in the second pump body, and the second driving component drives the second connecting shafts to rotate simultaneously; The second screw pump body cavity is provided with two screw rotor components which are in mesh with each other, and each screw rotor component is installed on a second connecting shaft; The second Roots pump body cavity is provided with at least one second Roots rotor assembly, which comprises two second Roots rotor components which are in mesh with each other, and each second Roots rotor component is installed on a second connecting shaft; And / or, the second pump body is provided with a second air inlet, a second air outlet and a second connecting air channel, the second air inlet is communicated with the top outer wall of the second pump body and the top of the second air inlet is communicated with the bottom of the connecting port; the second connecting air channel is communicated with the second Roots pump body cavity and the second screw pump body cavity, and the second air outlet is communicated with the second screw pump body cavity and the outer wall of the second pump body; And / or, when the second Roots rotor assembly rotates, the fluid in the connecting port sent into the second air inlet is sent into the second connecting air channel, and when the screw rotor component rotates, the fluid in the second connecting air channel sent into the second screw pump body cavity is discharged from the second air outlet.

7. The integrated vacuum system of claim 6, wherein: The second Roots pump body cavity includes a first second Roots pump body cavity and a second second Roots pump body cavity which are independent of each other, and the second Roots rotor assembly includes two groups, and the two groups of second Roots rotor assemblies are respectively installed in the first second Roots pump body cavity and the second second Roots pump body cavity; The second air inlet is communicated with the top of the first second Roots pump body cavity, and the second pump body is provided with a middle connecting air channel which is communicated with the bottom of the first second Roots pump body cavity and the top of the second second Roots pump body cavity.

8. The integrated vacuum system of claim 7, wherein: The second connecting shaft includes three second connecting shafts, and the three second connecting shafts include a middle connecting shaft and a first side connecting shaft and a second side connecting shaft which are respectively arranged in parallel on both sides of the middle connecting shaft; Each second connecting shaft is provided with two second Roots rotor components which are arranged at intervals; And / or, the end of the second connecting shaft away from the second Roots pump body cavity has a spacing with the second screw pump body cavity, one end of the screw rotor component is arranged on the end face of the second screw pump body cavity close to the second Roots pump body cavity, and the other end of the screw rotor component has a spacing with the other end of the second screw pump body cavity.

9. The integrated vacuum system of claim 7, wherein: The second connecting shaft includes three second connecting shafts, and the three second connecting shafts include a middle connecting shaft and a first side connecting shaft and a second side connecting shaft which are respectively arranged in parallel on both sides of the middle connecting shaft; The two screw rotor components are respectively installed on the middle connecting shaft and the first side connecting shaft; The second Roots rotor assembly includes a first second Roots rotor assembly and a second second Roots rotor assembly, the first second Roots rotor assembly is arranged in the first second Roots pump body cavity, the second second Roots rotor assembly is arranged in the second second Roots pump body cavity, the first second Roots rotor assembly includes two first second Roots rotor components, and the second second Roots rotor assembly includes two second second Roots rotor components; The two first second Roots rotor components are respectively installed on the middle connecting shaft and the first side connecting shaft; The two second second Roots rotor components are respectively installed on the middle connecting shaft and the second side connecting shaft.

10. The integrated vacuum system of claim 6, wherein: The outer wall of the second pump body is provided with a notch which is communicated with the second connecting air channel, and the second pump body is provided with a sealing component which seals the notch; And / or, the fluid treatment component is detachably installed in the second connecting air channel at the notch.

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