Contactor and testing device

Abstract

Provided is a contactor for energizing a plurality of vertical light-emitting elements that are disposed on a substrate so as to be spaced apart from each other, each vertical light-emitting element having an upper electrode on a front surface side and a lower electrode on a rear surface side, wherein the contactor comprises: a plurality of connecting portions which can be brought into contact with the plurality of lower electrodes, respectively; a probe contact which is brought into contact with a contact probe from the outside; and a connecting portion which is connected to the plurality of connectiong portions and the probe contact, and which can energize the plurality of vertical light-emitting elements and the contact probe via the plurality of connecting portions and the probe contact.

Description

Contactors and Test Equipment

[0001] The present invention relates to a contactor and a test device.

[0002] Patent Document 1 states, "In one example of a vertical structure ( FIG. 4A ), the LED epitaxial structure 42 comprises at least one first electrode 421 and at least one second electrode 422, and the polarities of the at least one first electrode 421 and the at least one second electrode 422 are opposite." (0018) Patent Document 2 states, "The vertical micro LED chip 10 is bonded to the chip bonding portion 121 with the n-side electrode 14 facing the chip bonding portion 121, and the n-side electrode 14 and the bottom electrode 120 are electrically connected to each other, and each p-side electrode 17 of the vertical micro LED chip 10 and the top electrode branch portion 142 of the top electrode 140 are electrically connected to each other." (0060) Patent Document 3 states, "When the micro LED device 400 is a vertical LED device, the passivation layer 148 covers and complements the quantum well structure 416." (0057) [Prior art documents] [Patent documents] [Patent document 1] JP 2014-207446 A [Patent document 2] JP 2022-049620 A [Patent document 3] JP 2018-010309 A General disclosure

[0003] In a first aspect of the present invention, there is provided a contactor for energizing a plurality of vertical light-emitting elements spaced apart from one another on a substrate, each having an upper electrode on a front surface side and a lower electrode on a rear surface side, the contactor including a plurality of contact portions capable of contacting the plurality of lower electrodes, respectively, a probe contact point to which a contact probe is brought into contact from an external device, and a connection portion connected to the plurality of contact portions and the probe contact point, and capable of energizing the plurality of vertical light-emitting elements and the contact probe through the plurality of contact portions and the probe contact point.

[0004] In the above contactor, each of the multiple contact portions may extend from the connection portion extending in one direction in a direction intersecting the one direction, and may be capable of contacting a side surface of the corresponding lower electrode when the contactor is moved in the one direction.

[0005] In any of the above contactors, each of the plurality of vertical light-emitting elements may have a body portion located between the upper electrode and the lower electrode, and a width of the lower electrode may be equal to or less than a width of the body portion. In any of the above contactors, each of the plurality of contact portions may have a thickness less than a thickness of the lower electrode at least at an end portion facing the side surface so as to be able to contact the side surface.

[0006] In any of the contactors described above, each of the plurality of contact portions may have a wedge-shaped cross section tapering toward the end in an imaginary plane that includes the one direction and the up-down direction.

[0007] In any of the contactors described above, each of the plurality of contact portions may have a reinforcing portion that is thicker than the lower electrode in a portion extending in the intersecting direction.

[0008] In any of the above contactors, the plurality of contact portions and the connecting portion may be comb-shaped as a whole when viewed from above.

[0009] In any of the above contactors, the plurality of contact portions and the connection portion may be shaped as a whole in a lattice pattern when viewed from above.

[0010] In any of the above contactors, the connecting portion may have a plate-like outer shape. In any of the above contactors, the plate-like connecting portion may have a plurality of openings that can accommodate the plurality of vertical light-emitting elements when the contactor is moved in a vertical direction toward the plurality of vertical light-emitting elements on the substrate. In any of the above contactors, edges of the plurality of openings may form the plurality of contact portions.

[0011] In any of the above contactors, each of the multiple contact portions may extend from the connection portion extending in one direction in a direction intersecting the one direction, and may be capable of contacting a side surface of the corresponding lower electrode when the contactor is moved in an up-down direction toward the multiple vertical light-emitting elements on the substrate.

[0012] In any of the above contactors, each of the plurality of vertical light-emitting elements may have a body portion located between the upper electrode and the lower electrode, and a width of the lower electrode may be equal to or less than a width of the body portion. In any of the above contactors, each of the plurality of contact portions may have elasticity and be biased toward the side surface by a restoring force, thereby coming into contact with the side surface.

[0013] In any of the above contactors, each of the plurality of vertical light-emitting elements may have a body portion located between the upper electrode and the lower electrode, and a width of the lower electrode may be equal to or less than a width of the body portion. In any of the above contactors, each of the plurality of contact portions may have a thermal expansion property and expand toward the side surface when heated, thereby making contact with the side surface.

[0014] In any of the above contactors, the connection portion may have a thickness greater than a thickness of the lower electrode.

[0015] Any of the above contactors may further comprise one or more supports that are gripped when the contactor is moved.

[0016] In any of the above contactors, at least one of the one or more support portions may be located at one end of the connection portion, and the probe contact may be located at the other end of the connection portion, and the at least one support portion and the probe contact may be gripped together when the contactor is moved.

[0017] In any of the above contactors, the height of the surface of the probe contact that is brought into contact with the contact probe may be approximately equal to the height of the upper electrode when the multiple contact portions are in contact with the multiple lower electrodes, respectively.

[0018] In a second aspect of the present invention, there is provided a test apparatus for conducting a conduction test on the vertical light emitting elements, the test apparatus including: a plurality of upper electrode probes capable of contacting the plurality of upper electrodes, respectively; any one of the contactors described above; the contact probe; and a test unit for passing current through the vertical light emitting elements via the plurality of upper electrode probes, the contactor, and the contact probe to test the conduction state of the vertical light emitting elements.

[0019] In a third aspect of the present invention, there is provided a contactor for energizing a plurality of vertical light-emitting elements spaced apart from one another on a substrate, each having an upper electrode on its front side and a lower electrode on its back side, the contactor comprising: a plurality of upper electrode probes capable of contacting the plurality of upper electrodes, respectively; a plurality of contact portions capable of contacting the plurality of lower electrodes, respectively; and a connection portion connected to the plurality of contact portions and capable of energizing the plurality of upper electrode probes and the plurality of vertical light-emitting elements via the plurality of contact portions.

[0020] In a fourth aspect of the present invention, there is provided a test apparatus for conducting a conduction test on the plurality of vertical light emitting elements, the test apparatus comprising: the contactor described above; and a test unit for conducting a current to the plurality of vertical light emitting elements via the contactor to test the conduction state of the plurality of vertical light emitting elements.

[0021] The above summary of the invention does not list all of the features of the present invention, and subcombinations of these features may also be inventions.

[0022] 1 is a front view showing an example of a test apparatus 10 for performing a current test on a plurality of vertical light emitting elements 30 according to a main example of the first embodiment; FIG. 2 is a plan view showing an example of a contactor 100 according to a main example of the first embodiment; FIG. 3 is a flowchart illustrating an example of a contact method using the contactor 100 according to a main example of the first embodiment; FIG. 4 is a flowchart illustrating an example of a contact method using the contactor 100 according to a main example of the first embodiment; FIG. 5 is a plan view showing an example of a contactor 300 according to a second modified example of the first embodiment; FIG. 6 is a plan view showing an example of a contactor 400 according to a third modified example of the first embodiment; FIG. 7 is a plan view showing an example of a contactor 500 according to a fourth modified example of the first embodiment; FIG. 8 is a plan view showing an example of a contactor 600 according to a fifth modified example of the first embodiment; and FIG. 9 is a plan view showing an example of a contactor 700 according to a main example of the second embodiment. 1 is a partially enlarged front view showing an example of a contactor 700 according to a main example of the second embodiment, where an example of a contactor 700 is used to describe an example of a contact method. 2 is a partially enlarged front view showing an example of a contactor 800 according to a modified example of the second embodiment, where an example of a contactor 800 is used to describe an example of a contact method. 3 is a partially enlarged front view showing an example of a contactor 900 according to a main example of the third embodiment, where an example of a contactor 900 is used to describe an example of a contact method. 4 is a plan view showing an example of a contactor 900 according to a main example of the third embodiment, where an example of a contactor 1000 is used to describe an example of a contact method. 5 is a front view showing an example of a test apparatus 15 for performing a current test on a plurality of vertical light emitting elements 30 according to a fourth embodiment.

[0023] The present invention will be described below through embodiments of the invention, but the following embodiments do not limit the scope of the invention as claimed. Furthermore, not all of the combinations of features described in the embodiments are necessarily essential to the solution of the invention.

[0024] Fig. 1 is a front view showing an example of a test apparatus 10 for conducting a current test on a plurality of vertical light emitting elements 30 according to a main example of the first embodiment. Fig. 1 shows an X-axis, a Y-axis, and a Z-axis that are orthogonal to each other. The right direction as viewed from the paper surface is the positive X-axis direction, the upward direction as viewed from the paper surface is the positive Z-axis direction, and the direction into the paper surface is the positive Y-axis direction. In the following figures, the X-, Y-, and Z-axes corresponding to the X-, Y-, and Z-axes in Fig. 1 are shown.

[0025] The test apparatus 10 according to this embodiment performs an electrical test on a plurality of vertical light emitting elements 30 arranged at a distance from one another on a substrate 20. In other words, the test apparatus 10 performs an electrical test on a plurality of vertical light emitting elements 30 that are not electrically connected to one another on the substrate 20. The test apparatus 10 includes a test unit 11, a chuck 13, a probe card 40, and a contactor 100. In this embodiment, the contactor 100 is separate from the probe card 40 and is provided on the prober side.

[0026] The vertical light emitting element 30 is a type of light emitting element in which a semiconductor layer is formed on a conductive substrate, for example, a silicon substrate, with one electrode provided on the back surface of the substrate and the other electrode provided on the front surface of the semiconductor layer. One of the two electrodes is a positive electrode (anode) provided on the p-type semiconductor layer side of the semiconductor layer, and the other of the two electrodes is a negative electrode (cathode) provided on the n-type semiconductor layer side of the semiconductor layer. Light emitted from the light emitting layer in the semiconductor layer may be extracted from the semiconductor layer side, or may be extracted from the substrate side if the substrate is transparent to light.

[0027] In this embodiment, the vertical light emitting element 30 has an upper electrode 31 on the front surface side, a lower electrode 32 on the back surface side, and a main body portion 33 located between the upper electrode 31 and the lower electrode 32. As shown in FIG. 1 , in the vertical light emitting element 30, the upper electrode 31, the main body portion 33, and the lower electrode 32 are located in this order from the positive side of the Z axis. The width of the upper electrode 31 and the width of the lower electrode 32 are equal to or smaller than the width of the main body portion 33. In this embodiment, the width of the upper electrode 31 and the width of the lower electrode 32 are smaller than the width of the main body portion 33.

[0028] The vertical light emitting element 30 is a micro LED having a dimension of 100 μm or less. The micro LED has a dimension of, for example, about 10 μm. Therefore, the width of the upper electrode 31 and the lower electrode 32 of the vertical light emitting element 30 is, for example, about 10 μm or less. Furthermore, the thickness of the upper electrode 31 and the lower electrode 32 is about several μm.

[0029] During the manufacturing process, a plurality of vertical light emitting elements 30 are mounted on a substrate 20, for example, a sapphire substrate. The substrate 20 may be, for example, a disk with a diameter of 4 inches. For example, 6 to 10 million vertical light emitting elements 30 having the above-mentioned dimensions are mounted on a substrate 20 of such size. The pitch of the vertical light emitting elements 30, i.e., the distance between two adjacent vertical light emitting elements 30, is roughly proportional to the dimensions of the vertical light emitting elements 30, and is, for example, about 10 to 15 μm when the vertical light emitting element 30 has a surface area of ​​about 5 μm × 10 μm. Note that, for the sake of clarity, only a few vertical light emitting elements 30 are shown in each drawing of the present application.

[0030] The vertical light emitting element 30 may be a mini LED having a size of more than 100 μm and not more than 200 μm, an LED having a size of more than 200 μm, or another light emitting element such as an LD, instead of a micro LED. The dimensions of the contactor 100, the probe card 40, etc. may vary depending on the dimensions of the vertical light emitting element 30.

[0031] The testing unit 11 applies electricity to the plurality of vertical light-emitting elements 30 via the probe card 40 and the contactor 100, and tests the electrical continuity of the plurality of vertical light-emitting elements 30. The chuck 13 attracts and holds the substrate 20, on which the plurality of vertical light-emitting elements 30 are arranged, by using a holding function such as a vacuum chuck or an electrostatic chuck. The substrate 20 is placed on the attracting and holding surface of the chuck 13 by a conveying means (not shown). The chuck 13 may have a substantially circular outer shape in a plan view from the Z-axis direction, similar to the substrate 20.

[0032] The probe card 40 has a contact probe 41 and a plurality of upper electrode probes 43. The probe card 40 may also be referred to as a probe substrate. The probe card 40 is provided with a plurality of electrical wirings and is electrically connected to the testing unit 11 via external electrical wirings. The probe card 40 may be moved two-dimensionally within the XY plane by a moving means (not shown), or may be raised and lowered in the Z-axis direction.

[0033] The contact probe 41 and the plurality of upper electrode probes 43 are provided on one main surface of the probe card 40 and protrude from the one main surface of the probe card 40. The contact probe 41 can come into contact with probe contacts 120 (described later) of the contactor 100 when the probe card 40 faces the contactor 100 placed on the surface of the substrate 20 on the chuck 13.

[0034] The plurality of upper electrode probes 43 can contact the upper electrodes 31 of the plurality of vertical light emitting elements 30, respectively, in a state in which the probe card 40 faces the plurality of vertical light emitting elements 30 arranged on the substrate 20 on the chuck 13. As an example, the probe card 40 is provided with approximately 64 to 256 upper electrode probes 43 in order to simultaneously measure approximately 64 to 256 vertical light emitting elements 30 at a time. Note that, in each drawing of the present application, only a few upper electrode probes 43 are shown for the sake of simplicity, simply for the purpose of clarifying the description.

[0035] The contactor 100 energizes the plurality of vertical light emitting elements 30. The contactor 100 of this embodiment includes a plurality of contact portions 110, probe contacts 120, a connecting portion 130, and a supporting portion 140.

[0036] The plurality of contact portions 110 can be in contact with the plurality of lower electrodes 32 of the plurality of vertical light emitting elements 30, respectively. More specifically, the plurality of contact portions 110 can be in contact with the side surfaces of the plurality of lower electrodes 32 of the plurality of vertical light emitting elements 30 arranged on the substrate 20, respectively. Each of the plurality of contact portions 110 has a thickness less than the thickness of the corresponding lower electrode 32 at least at an end portion facing the side surface so as to be in contact with the side surface of the corresponding lower electrode 32. In this embodiment, the thickness of each contact portion 110 and the thickness of the connection portion 130 are both less than the thickness of the lower electrode 32.

[0037] The probe contact 120 is brought into contact with the contact probe 41 of the probe card 40. One or more probe contacts 120 may be provided on the contactor 100. The height of the surface of the probe contact 120 that is brought into contact with the contact probe 41 may be approximately equal to the height of the upper electrode 31 in a state in which the multiple contact portions 110 are in contact with the multiple lower electrodes 32, respectively. In this case, the vertical lengths of the multiple upper electrode probes 43 extending downward from the probe card 40 and the contact probe 41 may be approximately equal.

[0038] The connection portion 130 is connected to the plurality of contact portions 110 and the probe contacts 120. When the probe contacts 120 are in contact with the contact probes 41, the connection portion 130 can conduct electricity to the plurality of vertical light emitting elements 30 and the contact probes 41 via the plurality of contact portions 110 and the probe contacts 120. When the plurality of vertical light emitting elements 30 are in contact with the upper electrodes 31 via the upper electrode probes 43, respectively, the connection portion 130 can also conduct electricity to the plurality of upper electrode probes 43 via the plurality of vertical light emitting elements 30.

[0039] The support portion 140 is gripped when the contactor 100 is moved. One or more support portions 140 may be provided on the contactor 100. Of the one or more support portions 140, at least one support portion 140 is located at one end of the connection portion 130, and the probe contact 120 is located at the other end of the connection portion 130. In FIG. 1 , the support portion 140 is located at one end of the connection portion 130 on the negative side of the X-axis, and the probe contact 120 is located at the other end of the connection portion 130 on the positive side of the X-axis. As shown in FIG. 1 , both the support portion 140 and the probe contact 120 are formed to be located in an area on the substrate 20 where the vertical light emitting element 30 cannot be mounted, i.e., near the edge of the substrate 20, when the multiple contact portions 110 are in contact with the multiple lower electrodes 32. When the contactor 100 is moved, at least one support portion 140 and the probe contact 120 may be gripped together.

[0040] The contactor 100 having the above-described configuration has dimensions comparable to those of the vertical light-emitting element 30, such as a micro LED. Therefore, it may be manufactured using the same semiconductor process as the vertical light-emitting element 30, or may be manufactured using a 3D printer. Because these manufacturing methods and manufacturing devices are highly accurate, the contactor 100 can reliably contact the very thin bottom electrodes 32 of all vertical light-emitting elements 30 (e.g., 256 vertical light-emitting elements 30) to be simultaneously subjected to electrical testing in the testing device 10. Meanwhile, one or more support portions 140 are formed near the edges of the contactor 100 together with the probe contacts 120 to be gripped when the contactor 100 is moved by a transport means (not shown), thereby preventing twisting during transport. Note that, as will be described in several examples below, portions of the contactor 100 other than the contact portion 110 may be formed relatively thick to improve strength.

[0041] The test apparatus 10 of this embodiment may include, as additional components on the prober side, a mechanism for loading the substrate 20 onto the chuck 13, a camera for checking the contact state between the upper electrode probe 43 and the upper electrode 31, and the like. Although the contactor 100 of this embodiment is described as an independent component in the test apparatus 10, it may alternatively be formed integrally with the chuck 13, for example. The contactor 100 of this embodiment is applicable to devices other than the test apparatus 10, and may be used, for example, in a probing system equipped with a positioner that can manually move a needle that contacts an electrode.

[0042] 2 is a plan view showing an example of the contactor 100 according to the main example of the first embodiment. In FIG. 2, components other than the contactor 100 are indicated by dashed lines.

[0043] 2 exemplarily shows three mutually independent contactors 100. In this specification, the multiple mutually independent contactors 100 used in the test apparatus 10, as in this embodiment, may be simply referred to as contactors 100.

[0044] In the contactor 100 of this embodiment, the plurality of contact portions 110 and the connection portions 130 are generally comb-shaped in a top view. Specifically, in each contactor 100, the plurality of contact portions 110 extend from the connection portion 130 extending in one direction in a direction intersecting the one direction, and can contact the side surface of the corresponding lower electrode 32 when the contactor 100 is moved in the one direction. More specifically, the connection portion 130 extends in the X-axis direction, and each contact portion 110 extends from the connection portion 130 toward the negative side in the Y-axis direction. The plurality of contact portions 110 are positioned spaced apart from each other in the X-axis direction at the same pitch as the pitch of the plurality of vertical light emitting elements 30 on the substrate 20 in the X-axis direction.

[0045] As in this embodiment, the plurality of independent contactors 100 used in the testing apparatus 10 can be moved as a unit by a transport means (not shown). The contactors 100 are moved in the direction indicated by the white arrow in FIG. 2, i.e., the positive direction of the X-axis, with each contact portion 110 positioned substantially in the same position as the corresponding lower electrode 32 in the Z-axis direction. This allows each contact portion 110 to come into contact with the side surface of the lower electrode 32 without colliding with the body portion 33 of the vertical light emitting element 30.

[0046] In the drawings of the present application, for the sake of clarity, the upper electrode probes 43 and the contact portions 110 are shown simultaneously contacting all of the vertical light emitting elements 30 arranged on the substrate 20. The contact portions 110 of the contactor 100 may individually contact one to several times the number of vertical light emitting elements 30 simultaneously contacted by the upper electrode probes 43 of the probe card 40. That is, the contact portions 110 may individually and simultaneously contact the lower electrodes 32 of, for example, 64 to 512 vertical light emitting elements 30. In other words, the contactor 100 does not necessarily need to individually and simultaneously contact all of the vertical light emitting elements 30 on the substrate 20. The contactor 100 may divide all of the vertical light emitting elements 30 on the substrate 20 into several groups and individually and simultaneously contact the vertical light emitting elements 30 in each group in order.

[0047] 3 and 4 are flowcharts illustrating an example of a contact method using the contactor 100 according to a main example of the first embodiment. The operation flow shown in Fig. 3 and 4 is started, for example, when a user inputs to the test device 10 to start a current test of the plurality of vertical light emitting elements 30 on the substrate 20 while the substrate 20 is placed on the chuck 13.

[0048] With the contact portions 110 of the contactor 100 positioned between the vertical light-emitting elements 30 in top view, the contactor 100 descends from the mounting surface side of the substrate 20, i.e., from the positive side of the Z axis, as indicated by the hollow downward arrows in Fig. 3 (step S101). As a result, each contact portion 110 enters a space of about 10 to 15 μm between two vertical light-emitting elements 30 adjacent in the X axis direction, for example, near the center of the two vertical light-emitting elements 30 in the X axis direction, and is at the same height as the lower electrode 32 in the Z axis direction. In step S101, the contactor 100 may be placed on the substrate 20.

[0049] The contactor 100 is moved toward the positive side in the X-axis direction, as indicated by the white rightward arrow in FIG. 3, so that each contact portion 110 comes into contact with the side surface of the corresponding lower electrode 32 (step S103). The amount of movement in the X-axis direction in this case is about half the pitch of the plurality of vertical light-emitting elements 30 arranged in the X-axis direction, for example, about 5.0 to 7.5 μm. By step S103, the contactor 100 and the plurality of vertical light-emitting elements 30 are brought into a state in which they can be electrically connected. Note that in steps S101 to S103, the contactor 100 is described as being moved relative to the substrate 20 and the chuck 13. However, instead, the chuck 13 may move relative to the contactor 100 together with the substrate 20.

[0050] In a state where the upper electrode probes 43 of the probe card 40 overlap the upper electrodes 31 of the vertical light-emitting elements 30 and the contact probes 41 overlap the probe contacts 120 of the contactor 100 in a top view, the probe card 40 descends from the mounting surface side of the substrate 20, i.e., from the positive side of the Z axis, as indicated by the hollow downward arrow in Fig. 4 (step S105). As a result, the upper electrode probes 43 contact the upper electrodes 31 and the contact probes 41 contact the probe contacts 120, and the upper electrode probes 43, the vertical light-emitting elements 30, the contactor 100, and the contact probes 41 become electrically conductive (step S107). In the state of step S107, the testing unit 11 of the testing apparatus 10 energizes the vertical light-emitting elements 30 via the upper electrode probes 43, the contactor 100, and the contact probes 41, thereby testing the electrical continuity of the vertical light-emitting elements 30.

[0051] 1 to 4, a contact method using the contactor 100 according to a main example of the first embodiment has been described. Until now, a method for electrically connecting a contactor to each of the upper electrode 31 and the lower electrode 32 of a plurality of vertical light emitting elements 30 arranged spaced apart from each other on a substrate 20 has not been known, and therefore it has not been possible to perform a current test on each vertical light emitting element 30.

[0052] In contrast, the contactor 100 of the present embodiment includes at least a plurality of contact portions 110 capable of contacting the plurality of lower electrodes 32, respectively, probe contacts 120 to which contact probes 41 are brought into contact from the outside, and connection portions 130 connected to the plurality of contact portions 110 and the probe contacts 120 and capable of conducting electricity with the plurality of vertical light emitting elements 30 and the contact probes 41 via the plurality of contact portions 110 and the probe contacts 120. By using the contactor 100 having such a configuration, it is possible to perform an electrical test on the plurality of vertical light emitting elements 30 arranged spaced apart from each other on the substrate 20.

[0053] 5 is a partially enlarged front view of an example of the contactor 200 according to a first modification of the first embodiment, illustrating an example of a contact method using the contactor 200. In FIG. 5, the movement direction of the contactor 200 is indicated by a hollow arrow, and a part of the contactor 200 and the vertical light emitting element 30 before movement are indicated by a dashed line.

[0054] The contactor 200 according to the first modified example differs from the contactor 100 according to the main embodiment in that it includes a contact portion 210 and a connection portion 230 instead of the contact portion 110 and the connection portion 130. Other configurations of the contactor 200 according to the first modified example are similar to the corresponding configurations of the contactor 100 according to the main embodiment, and therefore the same reference numerals as those corresponding configurations are used, and duplicated descriptions will be omitted. The same applies to multiple modified examples and other embodiments described below, and duplicated descriptions will be omitted.

[0055] In the contactor 200, each of the plurality of contact portions 210 has a wedge-shaped cross-sectional shape tapering toward an end facing a side surface of the corresponding lower electrode 32 in a virtual plane including the extending direction of the connecting portion 230 and the up-down direction. More specifically, as shown in Fig. 5, each of the plurality of contact portions 210 has a wedge-shaped cross-sectional shape tapering toward the positive side of the X-axis in the ZX plane. As shown in Fig. 5, when the contactor 200 is moved toward the positive side of the X-axis with the end of the contact portion 210 at substantially the same Z-axis position as the lower electrode 32, the end of the contact portion 210 having the wedge-shaped cross-sectional shape can more reliably contact the side surface of the lower electrode 32 without colliding with the body portion 33 of the vertical light emitting element 30.

[0056] Furthermore, in the contactor 200, each of the plurality of contact portions 210 has a reinforcing portion that is thicker than the lower electrode 32 in a portion extending in a direction intersecting the direction in which the connection portion 230 extends. More specifically, as shown in Fig. 5, in a portion extending in the Y-axis direction, each of the plurality of contact portions 210 has a reinforcing portion that is thicker than the lower electrode 32 overall, except for the end portions. For example, in the Z-axis direction, the thickness of each contact portion 210 may be approximately the same as the thickness of the vertical light emitting element 30.

[0057] In the contactor 200, the thickness of the connection portion 230 is thicker than the thickness of the lower electrode 32. More specifically, as shown in Fig. 5 , the connection portion 230 as a whole is thicker than the thickness of the lower electrode 32. For example, in the Z-axis direction, the thickness of the connection portion 230 may be approximately the same as the thickness of the vertical light-emitting element 30, or may be formed to have the same thickness as each contact portion 210.

[0058] The contactor 200 according to the first modification has the same effect as the contactor 100 according to the main embodiment. The contactor 200 according to the first modification can also improve its strength by increasing the thickness of the contact portion 210 or the connection portion 230 in the height direction, as long as it does not collide with the body portions 33 of the plurality of vertical light emitting elements 30. Similarly, in the plurality of modifications and other embodiments described below, the strength of each contactor can be improved by increasing the thickness of the contact portion or connection portion in the height direction, as long as it does not collide with the body portions 33 of the plurality of vertical light emitting elements 30, and redundant description will be omitted.

[0059] 6 is a plan view showing an example of a contactor 300 according to a second modified example of the first embodiment. The contactor 300 according to the second modified example differs from the contactor 100 according to the main example in that it includes a contact portion 310 instead of the contact portion 110.

[0060] In the contactor 300, the plurality of contact portions 310 and the connecting portions 130 are generally arranged in a lattice pattern when viewed from above. More specifically, as shown in Fig. 6, the contactor 300 has a configuration in which the plurality of contact portions 110 in the three contactors 100 shown in Fig. 2 are connected to each other in the Y-axis direction. The contactor 300 according to the second modification has the same effects as the contactor 100 according to the main embodiment. Furthermore, the contactor 300 according to the second modification can improve strength by forming the plurality of contact portions 310 and the connecting portions 130 in a lattice pattern as a whole.

[0061] 7 is a plan view showing an example of a contactor 400 according to a third modified example of the first embodiment. The contactor 400 according to the third modified example differs from the contactor 100 according to the main example in that the contactor 400 includes contact portions 410 and connection portions 430 instead of the contact portions 110 and connection portions 130, and further includes fewer probe contacts 120 and fewer support portions 140.

[0062] In the contactor 400, similar to the contactor 300, the plurality of contact portions 410 and the connection portions 430 are generally arranged in a lattice pattern in a top view. Specifically, as shown in FIG. 7 , the contactor 400 has a configuration in which both ends of the X-axis direction of the plurality of connection portions 130 in the contactor 300 shown in FIG. 6 are connected to each other in the Y-axis direction. More specifically, the connection portion 430 of the contactor 400 has a plurality of first portions 431 extending in a direction in which the contactor 400 moves to bring the contact portions 410 into contact with the side surfaces of the lower electrode 32, and a second portion 432 connecting both ends of the X-axis direction of the plurality of first portions 431 to each other in the Y-axis direction. In the second portions 432 located at both ends of the plurality of first portions 431 in the X-axis direction, one support portion 140 and one probe contact 120 are formed, which are common to the plurality of first portions 431. It should be noted that the numbers of support portions 140 and probe contacts 120 described herein are merely examples, and other numbers may be used.

[0063] The contactor 400 according to the third modification has the same effects as the contactor 100 according to the main embodiment. Furthermore, the contactor 400 according to the third modification has the plurality of contact portions 310 and the connection portions 130 arranged in a lattice pattern as a whole, thereby improving the strength.

[0064] 8 is a plan view showing an example of a contactor 500 according to a fourth modified example of the first embodiment. The contactor 500 according to the fourth modified example differs from the contactor 400 according to the third modified example in that it includes a contact portion 510 and a connection portion 530 instead of the contact portion 410 and the connection portion 430.

[0065] In the contactor 500, similar to the contactor 300, the plurality of contact portions 510 and the connecting portions 530 are lattice-shaped as a whole in a top view. Like the connecting portion 430, the connecting portion 530 has first portions 531 and second portions 532, but the number of first portions 531 is relatively small, so the contactor 500 can also be said to be ladder-shaped in a top view. The contactor 500 according to the fourth modification has the same effects as the contactor 100 according to the main embodiment. Furthermore, the contactor 500 according to the fourth modification can improve strength by forming the plurality of contact portions 510 and the connecting portions 530 in a lattice-shaped whole.

[0066] 9 is a plan view showing an example of a contactor 600 according to a fifth modified example of the first embodiment. The contactor 600 according to the fifth modified example differs from the contactor 400 according to the third modified example in that it includes a contact portion 610 and a connection portion 630 instead of the contact portion 410 and the connection portion 430.

[0067] In the contactor 600, similar to the contactor 300, the plurality of contact portions 610 and connection portions 630 are generally arranged in a lattice shape when viewed from above. However, while the contactor 300 has been described as being moved toward the positive side of the X-axis to bring the contact portions 310 into contact with the side surfaces of the lower electrode 32, the contactor 600 is moved toward the negative side of the Y-axis to bring the contact portions 610 into contact with the side surfaces of the lower electrode 32. Furthermore, while the contactor 300 and the like have the probe contacts 120 and the support portion 140 arranged at both ends in the same direction as the direction of movement of the contactor 300, the contactor 600 has the probe contacts 120 and the support portion 140 arranged at both ends in a direction perpendicular to the direction of movement of the contactor 600.

[0068] In the contactor 600, the connection portion 630 extends in the Y-axis direction, and each contact portion 610 extends from the connection portion 630 in the X-axis direction. The multiple contact portions 610 are spaced apart from each other in the Y-axis direction at the same pitch as the pitch of the multiple vertical light emitting elements 30 on the substrate 20 in the Y-axis direction. The contactor 600 according to the fifth modified example has the same effects as the contactor 100 according to the main embodiment. Furthermore, the contactor 600 according to the fifth modified example can improve strength by forming the multiple contact portions 610 and the connection portions 630 in a lattice shape as a whole.

[0069] 10 is a plan view showing an example of a contactor 700 according to a main example of the second embodiment. Unlike the contactor 100 according to the first embodiment, the contactor 700 according to the second embodiment has a disk-like outer shape in a top view similar to the substrate 20. The contactor 700 according to the second embodiment has an outer appearance in which portions corresponding to the plurality of vertical light emitting elements 30 arranged on the substrate 20 are hollowed out from a disk-like shape having a diameter approximately the same as that of the substrate 20, for example.

[0070] The contactor 700 of this embodiment includes a plurality of contact portions 710, probe contacts 120, a connecting portion 730, and a plurality of support portions 140. The connecting portion 730 has a plate-like outer shape, and in this embodiment, has a disk-like outer shape.

[0071] As shown in FIG. 10 , the plate-shaped connecting portion 730 has a plurality of openings formed therein that can accommodate a plurality of vertical light-emitting elements 30 when the contactor 700 is moved vertically toward the plurality of vertical light-emitting elements 30 on the substrate 20, and the edges of each of the plurality of openings form a plurality of contact portions 710.

[0072] In the contactor 700 of this embodiment, the plurality of contact portions 710 and the connection portions 730 are generally arranged in a lattice shape when viewed from above. Specifically, in the contactor 700, each of the plurality of contact portions 710 extends from a connection portion 730 extending in one direction in a direction intersecting the one direction, and can contact a side surface of the corresponding lower electrode 32 when the contactor 700 is moved in the one direction. More specifically, the connection portion 730 extends in the Y-axis direction, and each contact portion 710 extends from the connection portion 730 in the X-axis direction. The plurality of contact portions 710 are positioned spaced apart from each other in the Y-axis direction at the same pitch as the pitch of the plurality of vertical light emitting elements 30 on the substrate 20 in the Y-axis direction.

[0073] 10, i.e., the negative direction of the Y-axis, with each contact portion 710 being at substantially the same position as the corresponding lower electrode 32 in the Z-axis direction. As a result, each contact portion 710 comes into contact with the side surface of the lower electrode 32 without colliding with the body portion 33 of the vertical light emitting element 30. In the contactor 700 of this embodiment, the contact portion 710 may come into contact with all of the plurality of vertical light emitting elements 30 arranged on the substrate 20 at the same time.

[0074] 11 is a partially enlarged front view of an example of a contactor 700 according to a main example of the second embodiment, illustrating an example of a contact method using the contactor 700. In FIG. 11, the movement direction of the contactor 700 is indicated by a hollow arrow, and a part of the contactor 700 and the vertical light emitting element 30 before movement are indicated by a dashed line.

[0075] The contactor 700 is placed on the substrate 20 like a drop lid from above the mounting surface of the vertical light emitting element 30 on the substrate 20, resulting in the state shown in Fig. 10. Thereafter, as shown in Fig. 11, the contactor 700 is moved in the negative direction of the Y axis, so that each contact portion 710 comes into contact with the side surface of the corresponding lower electrode 32. In this case, the amount of movement in the Y axis direction is about half the pitch of the multiple vertical light emitting elements 30 arranged in the Y axis direction, for example, about 5.0 to 7.5 µm. This allows the contactor 700 and the multiple vertical light emitting elements 30 to be electrically connected.

[0076] The contactor 700 according to the main example of the second embodiment has the same effects as the contactor 100 according to the first embodiment, etc. Furthermore, the contactor 700 according to the main example of the second embodiment can improve strength by forming the plurality of contact portions 710 and the connection portions 730 in a lattice shape as a whole, more specifically by forming them in a plate shape as a whole.

[0077] 12 is a partially enlarged front view of a contactor 800 according to a modification of the second embodiment, illustrating an example of a contact method using the contactor 800. In FIG. 12, the movement direction of the contactor 800 is indicated by a hollow arrow, and a part of the contactor 800 before movement and the vertical light emitting element 30 are indicated by a dashed line. The contactor 800 according to the modification differs from the contactor 700 according to the main embodiment in that it includes a contact portion 810 and a connection portion 830 instead of the contact portion 710 and the connection portion 730.

[0078] In the contactor 800, each of the plurality of contact portions 810 has a wedge-shaped cross-sectional shape tapering toward the end facing the side surface of the corresponding lower electrode 32 in an imaginary plane that includes the direction in which the connection portion 830 extends and the up-and-down direction. More specifically, as shown in Fig. 12, each of the plurality of contact portions 810 has a wedge-shaped cross-sectional shape tapering toward the positive side of the Y-axis in the ZY plane.

[0079] As shown in Figure 12, the contact portion 810 having a wedge-shaped cross-section can more reliably make contact with the side surface of the lower electrode 32 without colliding with the main body 33 of the vertical light-emitting element 30 when the contactor 800 is moved toward the positive side of the Y axis with the above-mentioned end at approximately the same Z axis position as the lower electrode 32.

[0080] Furthermore, in the contactor 800, each of the plurality of contact portions 810 has a reinforcing portion that is thicker than the lower electrode 32 in a portion extending in a direction intersecting the direction in which the connection portion 830 extends. More specifically, as shown in Fig. 12, each of the plurality of contact portions 810 has a reinforcing portion that is thicker than the lower electrode 32 in a portion extending in the X-axis direction, except for the end portions. For example, the thickness of each contact portion 810 in the Z-axis direction may be approximately half the thickness of the vertical light emitting element 30.

[0081] In the contactor 800, the thickness of the connection portion 830 is thicker than the thickness of the lower electrode 32. More specifically, as shown in Fig. 12, the connection portion 830 is thicker overall than the thickness of the lower electrode 32. For example, in the Z-axis direction, the thickness of the connection portion 830 may be approximately the same as half the thickness of the vertical light emitting element 30, or may be formed to have the same thickness as each contact portion 810. The contactor 800 according to the modified example has the same effects as the contactor 700 according to the main embodiment.

[0082] Fig. 13 is a partially enlarged front view of an example of a contactor 900 according to a main example of the third embodiment, illustrating an example of a contact method using the contactor 900. Fig. 14 is a plan view of an example of the contactor 900 according to a main example of the third embodiment.

[0083] 13, the movement direction of the contactor 900 is indicated by a white arrow, and a part of the contactor 900 before movement and the vertical light emitting element 30 are indicated by a broken line. In FIG. 14, the components other than the contactor 900 are indicated by a broken line.

[0084] The contactor 900 etc. according to the third embodiment differs from the contactor 100 etc. according to the first embodiment and the contactor 700 etc. according to the second embodiment in that it moves only in the Z-axis direction and does not move within the XY plane. The contactor 900 etc. according to the third embodiment also includes a contact portion 910 and a connection portion 930 instead of the contact portion 110 and the connection portion 130.

[0085] In the contactor 100 etc. according to the first embodiment and the contactor 700 etc. according to the second embodiment, the multiple contact portions 110 etc. have been described as extending from the connection portion 130 etc. extending in one direction in a direction intersecting the one direction, and when the contactor 100 etc. is moved in the one direction, they can come into contact with the side surfaces of the corresponding lower electrodes 32. Instead, in the contactor 900 according to the main example of the third embodiment, the multiple contact portions 910 each extend from the connection portion 930 extending in one direction in a direction intersecting the one direction, and when the contactor 900 is moved in the up-down direction toward the multiple vertical light emitting elements 30 on the substrate 20, they can come into contact with the side surfaces of the corresponding lower electrodes 32.

[0086] 13 and 14, the connection portion 930 extends at least in the X-axis direction, and each contact portion 910 extends from the connection portion 930 toward the negative side in the Z-axis direction. In the contactor 900, the connection portion 930 also extends in the Y-axis direction, and as shown in FIG. 14, the connection portion 930 has a lattice shape in top view.

[0087] The contact portions 910 are spaced apart from one another in the X-axis direction at the same pitch as the pitch of the vertical light emitting elements 30 on the substrate 20 in the X-axis direction. Each of the contact portions 910 has elasticity. As shown in Fig. 13, each contact portion 910 is bent so that an end portion facing a side surface of the corresponding lower electrode 32 protrudes toward the lower electrode 32.

[0088] 13 , when the contactor 900 is moved downward toward the vertical light emitting element 30 on the substrate 20, each contact portion 910 slides down on the side surface of the body portion 33 of the corresponding vertical light emitting element 30 while being pressed against the side surface of the body portion 33. In this case, a restoring force is generated in each contact portion 910, and thereby each contact portion 910 is urged toward the corresponding body portion 33.

[0089] As shown in FIG. 13, when the contactor 900 is moved further downward so that each contact portion 910 faces the corresponding lower electrode 32, each contact portion 910 that is biased toward the corresponding lower electrode 32 is displaced toward the side of the lower electrode 32 and makes firm contact with the side.

[0090] The contactor 900 according to the main example of the third embodiment has the same effects as the contactor 100 according to the first embodiment, etc. The contactor 900 according to the main example of the third embodiment also has an improved strength by forming the connection portion 930 in a lattice shape. The contactor 900 according to the main example of the third embodiment also has an improved strength by moving only in the Z-axis direction, which allows electrical conduction between the plurality of vertical light emitting elements 30 and the external contact probes 41.

[0091] FIG. 15 is a partially enlarged front view of a contactor 1000 according to a modification of the third embodiment, illustrating an example of a contact method using the contactor 1000. In FIG. 15, the movement direction of the contactor 1000 is indicated by a hollow arrow, and a portion of the contactor 1000 before movement and the vertical light emitting element 30 are indicated by a dashed line. The contactor 1000 according to the modification differs from the contactor 900 according to the main embodiment in that it includes a contact portion 1010 and a connection portion 1030 instead of the contact portion 910 and the connection portion 930. Furthermore, in the test apparatus 10 according to this modification, a vertical light emitting element 35 in which the widths of the upper electrode 36 and the lower electrode 37 are smaller than the width of the body portion 38 is used as the subject of a current test, instead of the vertical light emitting element 30 in which the widths of the upper electrode 31 and the lower electrode 32 are smaller than the width of the body portion 33.

[0092] The contact portion 1010 does not have elasticity, unlike the contact portion 910. Therefore, the above-mentioned restoring force does not act on the contact portion 1010, and the contact portion 1010 does not bias the corresponding lower electrode 32 toward its side surface.

[0093] 15 , when the diameter of the lower electrode 37 is approximately the same as the diameter of the body portion 38, the contact portion 1010 of the contactor 1000 slides down on the side surface of the body portion 38 and comes into contact with the side surface of the lower electrode 37. More specifically, when the contactor 1000 is moved downward toward the vertical light emitting element 30 on the substrate 20, the contact portion 1010 slides down on the side surface of the body portion 33 of the corresponding vertical light emitting element 30. When the contactor 1000 is further moved downward and each contact portion 1010 faces the corresponding lower electrode 32, each contact portion 1010 reliably comes into contact with the side surface of the corresponding lower electrode 32. The contactor 1000 according to the modified example has the same effect as the contactor 900 according to the main embodiment.

[0094] As another modification of the contactor 900 etc. according to the third embodiment, each of the plurality of contact portions 910 etc. may have a thermally expandable property. When heated, the plurality of contact portions 910 etc. having a thermally expandable property expand toward the side surface of the corresponding lower electrode 32 etc., thereby making contact with the side surface. A contactor according to such a modification also has the same effect as the contactor 900 etc. according to the main embodiment.

[0095] 16 is a front view showing an example of a test apparatus 15 for conducting a current test on a plurality of vertical light emitting elements 30 according to the fourth embodiment. The test apparatus 15 according to the fourth embodiment differs from the test apparatus 10 according to the first embodiment and the like in that, instead of the probe card 40 and the contactor 100, which are separate from each other, the test apparatus 15 includes a contactor 1100 in which these elements are integrated. Therefore, the test unit 11 of the test apparatus 15 applies current to the plurality of vertical light emitting elements 30 via the contactor 1100 to test the continuity of the plurality of vertical light emitting elements 30.

[0096] The contactor 1100 includes a plurality of upper electrode probes 1143 capable of contacting the plurality of upper electrodes 31, respectively, a plurality of contact portions 1110 capable of contacting the plurality of lower electrodes 32, respectively, and a connection portion 1130 connected to the plurality of contact portions 1110. The connection portion 1130 is capable of conducting electricity to the plurality of upper electrode probes 1143 and the plurality of vertical light emitting elements 30 via the plurality of contact portions 1110. As an example, the contactor 1100 according to this embodiment includes a probe card 1140 having the plurality of upper electrode probes 1143, and the connection portion 1130 is formed on the probe card 1140.

[0097] In the contactor 1100 according to this embodiment, the configuration of the plurality of contact portions 1110 may be the same as the configuration of the plurality of contact portions 910 in the contactor 900 according to the main example of the third embodiment described with reference to Fig. 13. In this case, each of the plurality of contact portions 1110 extends from the connection portion 1130 extending in one direction in a direction intersecting the one direction, and can come into contact with the side surfaces of the corresponding lower electrodes 32 when the contactor 1100 is moved in the up-down direction toward the plurality of vertical light emitting elements 30 on the substrate 20.

[0098] The contactor 1100 according to the fourth embodiment has the same effects as the contactor 100 according to the first embodiment, etc. The contactor 1100 according to the fourth embodiment also has the same effects as the contactor 900 according to the main example of the third embodiment.

[0099] Although the present invention has been described above using embodiments, the technical scope of the present invention is not limited to the scope described in the above embodiments. It will be apparent to those skilled in the art that various modifications and improvements can be made to the above embodiments. It is clear from the claims that such modifications and improvements can also be included within the technical scope of the present invention.

[0100] It should be noted that the order of execution of each process, such as operations, procedures, steps, and stages, in the devices, systems, programs, and methods shown in the claims, specifications, and drawings is not specifically stated as "before," "prior to," etc., and that the processes can be performed in any order unless the output of a previous process is used in a subsequent process. Even if the operational flow in the claims, specifications, and drawings is described using "first," "next," etc. for convenience, this does not mean that the processes must be performed in this order.

[0101] REFERENCE SIGNS LIST 10 Testing apparatus 11 Testing section 13 Chuck 20 Substrate 30 Vertical light emitting element 31 Upper electrode 32 Lower electrode 33 Main body 40 Probe card 41 Contact probe 43 Upper electrode probe 100 Contactor 110 Contacting section 120 Probe contact 130 Connecting section 140 Support section 200 Contactor 210 Contacting section 230 Connecting section 300 Contactor 310 Contacting section 400 Contactor 410 Contacting section 430 Connecting section 431 First section 432 Second section 500 Contactor 510 Contacting section 530 Connecting section 531 First section 532 Second section 600 Contactor 610 Contacting section 630 Connecting section 700 Contactor 710 Contacting section 730 Connecting section 800 Contactor 810 Contact portion 830 Connection portion 900 Contactor 910 Contact portion 930 Connection portion 35 Vertical light emitting element 36 Upper electrode 37 Lower electrode 38 Main body 1000 Contactor 1010 Contact portion 1030 Connection portion 15 Testing device 1100 Contactor 1110 Contact portion 1130 Connection portion 1140 Probe card 1143 Upper electrode probe

Claims

1. A contactor for supplying electricity to a plurality of vertical light-emitting elements arranged spaced apart from one another on a substrate, each having an upper electrode on the front side and a lower electrode on the back side, comprising: a plurality of contact parts capable of contacting the plurality of lower electrodes, respectively; probe contacts to which a contact probe is brought into contact from the outside; and a connection part connected to the plurality of contact parts and the probe contacts, and capable of conducting electricity between the plurality of vertical light-emitting elements and the contact probe via the plurality of contact parts and the probe contacts.

2. The contactor according to claim 1, wherein each of the plurality of contact portions extends from the connection portion extending in one direction in a direction intersecting the one direction, and is capable of contacting a side surface of the corresponding lower electrode when the contactor is moved in the one direction.

3. The contactor according to claim 2, wherein each of the plurality of vertical light-emitting elements has a main body portion located between the upper electrode and the lower electrode, the width of the lower electrode is equal to or less than the width of the main body portion, and each of the plurality of contact portions has a thickness less than the thickness of the lower electrode at least at the end portion facing the side surface so as to be able to contact the side surface.

4. The contactor according to claim 3, wherein each of the plurality of contact portions has a wedge-shaped cross section tapering toward the end in an imaginary plane including the one direction and the up-down direction.

5. The contactor according to claim 2, wherein each of the plurality of contact portions has a reinforcing portion that is thicker than the thickness of the lower electrode in the portion extending in the intersecting direction.

6. The contactor according to claim 2, wherein the plurality of contact portions and the connecting portion are generally comb-shaped when viewed from above.

7. The contactor according to claim 2, wherein the plurality of contact portions and the connection portion are collectively arranged in a grid pattern when viewed from above.

8. The contactor according to claim 2, wherein the connecting portion has a plate-like outer shape, and the plate-like connecting portion is formed with a plurality of openings capable of accommodating the plurality of vertical light-emitting elements when the contactor is moved in the vertical direction toward the plurality of vertical light-emitting elements on the substrate, and edges of the plurality of openings form the plurality of contact portions.

9. The contactor according to claim 1, wherein each of the plurality of contact portions extends from the connection portion extending in one direction in a direction intersecting the one direction, and is capable of contacting a side surface of the corresponding lower electrode when the contactor is moved in an up-down direction toward the plurality of vertical light-emitting elements on the substrate.

10. The contactor according to claim 9, wherein each of the plurality of vertical light-emitting elements has a main body portion located between the upper electrode and the lower electrode, the width of the lower electrode being equal to or less than the width of the main body portion, and each of the plurality of contact portions has elasticity and is biased toward the side surface by the action of a restoring force, thereby coming into contact with the side surface.

11. The contactor according to claim 9, wherein each of the plurality of vertical light-emitting elements has a body portion located between the upper electrode and the lower electrode, the width of the lower electrode being equal to or less than the width of the body portion, and each of the plurality of contact portions has a thermal expansion property and expands toward the side surface when heated, thereby contacting the side surface.

12. The contactor according to any one of claims 1 to 11, wherein the thickness of the connection portion is greater than the thickness of the lower electrode.

13. A contactor as claimed in any one of claims 1 to 11, further comprising one or more supports that are gripped when the contactor is moved.

14. The contactor of claim 13, wherein at least one of the one or more supports is located at one end of the connection portion and the probe contact is located at the other end of the connection portion, and the at least one support and the probe contact are gripped together when the contactor is moved.

15. A contactor as claimed in any one of claims 1 to 11, wherein the height of the surface of the probe contact that is brought into contact with the contact probe is approximately equal to the height of the upper electrode when the multiple contact portions are in contact with the multiple lower electrodes, respectively.

16. A test device for conducting a current test on the plurality of vertical light-emitting elements, comprising: a plurality of upper electrode probes capable of coming into contact with the plurality of upper electrodes, respectively; a contactor according to any one of claims 1 to 11; the contact probes; and a test section for passing current through the plurality of vertical light-emitting elements via the plurality of upper electrode probes, the contactor, and the contact probes, and testing the electrical continuity of the plurality of vertical light-emitting elements.

17. A contactor for supplying electricity to a plurality of vertical light-emitting elements arranged spaced apart from one another on a substrate, each having an upper electrode on the front side and a lower electrode on the back side, comprising: a plurality of upper electrode probes capable of contacting the plurality of upper electrodes, respectively; a plurality of contact portions capable of contacting the plurality of lower electrodes, respectively; and connection portions connected to the plurality of contact portions and capable of supplying electricity to the plurality of upper electrode probes and the plurality of vertical light-emitting elements via the plurality of contact portions.

18. A test device for conducting a current test on the plurality of vertical light-emitting elements, comprising: the contactor according to claim 17; and a test unit for passing current through the plurality of vertical light-emitting elements via the contactor and testing the conduction state of the plurality of vertical light-emitting elements.

Images