Low temperature valve module

Abstract

A low temperature valve module is provided. According to an embodiment of the present invention, a low temperature valve module comprises: a valve unit; a driving unit configured to control opening and closing of the valve unit; a heat insulating unit disposed between the valve unit and the driving unit; and a stem extending from the driving unit to the valve unit through the heat insulating unit, wherein the heat insulating unit includes: a core shaft extending in the same direction as the stem; a heat insulating housing configured to accommodate the core shaft; and a heat insulating plate extending from the core shaft in a direction different from the stem.

Description

Low-temperature valve module

[0001] The present invention relates to a low-temperature valve module.

[0002] Valve systems using cryogenic fluids play a crucial role in various industries. In particular, in semiconductor manufacturing, valve reliability and performance are crucial, as cryogenic fluids are used to cool wafers or control chemical reactions. Because semiconductor manufacturing processes require a high degree of precision and stability, the performance of cryogenic fluid valve systems directly impacts process efficiency and quality.

[0003] Valve systems that handle low-temperature fluids present several unique challenges.

[0004] First, the extremely low temperatures of cryogenic fluids can cause severe thermal shock to the metal components of the valve. This thermal shock can reduce the ductility of the metal and lead to brittle cracks, significantly reducing the durability of the valve. In particular, if the valve actuator is directly exposed to this low-temperature environment, it can malfunction or be damaged.

[0005] Second, low-temperature fluids can degrade the performance of lubricants and sealing materials within valve systems. Many lubricants and sealing materials can harden or break down at extremely low temperatures, which can lead to valve leakage or malfunction.

[0006] Third, valve systems using low-temperature fluids must minimize heat transfer, prevent heat loss, and maintain system efficiency. To achieve this, valve systems must have excellent insulation performance, preventing external heat from transferring to the interior. Conventional technologies have utilized various insulation materials and designed complex insulation structures to improve insulation performance.

[0007] However, these existing insulation methods have several limitations. Using thick insulation to enhance insulation performance increases the size and weight of the valve system, making installation and maintenance difficult. Furthermore, complex insulation structures increase manufacturing costs and can reduce system reliability.

[0008] Various technical solutions are being attempted to solve these problems, and Korean Patent No. 10-2509774 is one example.

[0009] The problem to be solved by the present invention is to provide a low-temperature valve module that prevents cold air from a low-temperature fluid flowing through a valve from causing damage to some components of a driving unit.

[0010] Another problem to be solved by the present invention is to provide a low-temperature valve module that blocks heat transfer from the valve to the driving unit.

[0011] The tasks of the invention are not limited to the technical tasks mentioned above, and other technical tasks not mentioned will be clearly understood by those skilled in the art from the description below.

[0012] According to one embodiment of the present invention for solving the above problem, a low-temperature valve module includes a valve part, a driving part for controlling opening and closing of the valve part, an insulating part arranged between the valve part and the driving part, and a stem extending from the driving part through the insulating part to the valve part, wherein the insulating part includes a core shaft extending in the same direction as the stem, an insulating housing for accommodating the core shaft, and an insulating plate extending from the core shaft in a direction different from the stem.

[0013] Additionally, the core shaft includes a body portion including upper and lower columns having different widths, and the insulating plate can extend from the body portion.

[0014] Additionally, the insulating plate may include a first insulating plate extending from the upper column, a second insulating plate extending from a boundary between the upper column and the lower column, and a third insulating plate extending from the lower column.

[0015] Additionally, the extension length of the first insulation plate may be greater than the extension length of the second insulation plate.

[0016] Additionally, the insulating housing includes a storage portion that divides the internal space, and the storage portion may include a side wall and a bottom portion.

[0017] Additionally, the side wall may include an upper wall portion, a lower wall portion having a relatively thinner thickness than the upper wall portion, and a sloped portion having a thickness that gradually decreases as it extends from the upper wall portion to the lower wall portion.

[0018] Additionally, the inclined portion may face the first insulating plate.

[0019] Additionally, it may include a protruding guide protruding from the lower wall toward the core axis.

[0020] Additionally, it may include a protrusion formed protruding from the bottom toward the driving unit.

[0021] Additionally, the insulating housing may include a supply line for injecting air into the internal space and a discharge line for exhausting air from the internal space.

[0022] According to embodiments of the present invention, it is possible to prevent cold air from a low-temperature fluid from damaging some components of a driving unit.

[0023] Additionally, a low-temperature valve module with improved insulation performance can be provided.

[0024] Additionally, a low-temperature valve module that is easy to install and has improved heat resistance can be provided.

[0025] The effects according to the present invention are not limited to those exemplified above, and more diverse effects are included in this specification.

[0026] Figure 1 is a schematic diagram of a low-temperature valve module according to one embodiment of the present invention.

[0027] Figure 2 is a partial schematic diagram of a low-temperature valve module according to one embodiment of the present invention.

[0028] Figure 3 is a cross-sectional view taken along line Ⅰ-Ⅰ' of Figure 2.

[0029] Figure 4 is a schematic diagram of a low-temperature valve module according to one embodiment of the present invention.

[0030] Figure 5 is a partial perspective view of a low-temperature valve module according to one embodiment of the present invention.

[0031] Figure 6 is a cross-sectional view taken along line Ⅱ-Ⅱ' of Figure 5.

[0032] Figure 7 is a partial perspective view of a low-temperature valve module according to another embodiment of the present invention.

[0033] A low-temperature valve module according to one embodiment of the present invention includes a valve portion, a driving portion that controls opening and closing of the valve portion, an insulating portion arranged between the valve portion and the driving portion, and a stem that extends from the driving portion through the insulating portion to the valve portion, wherein the insulating portion includes a core shaft that extends in the same direction as the stem, an insulating housing that accommodates the core shaft, and an insulating plate that extends from the core shaft in a direction different from the stem.

[0034] The advantages and features of the present invention, and the methods for achieving them, will become clearer with reference to the embodiments described in detail below together with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various different forms. These embodiments are provided solely to ensure that the disclosure of the present invention is complete and to fully inform those skilled in the art of the scope of the invention, and the present invention is defined solely by the scope of the claims.

[0035] When an element or layer is referred to as being "on" or "on" another element or layer, this includes not only directly on the other element or layer, but also with other intervening elements or layers. Conversely, when an element is referred to as being "directly on" or "directly on", this means that there are no intervening elements or layers.

[0036] Spatially relative terms such as "below," "beneath," "lower," "above," "on," "on," and "upper" can be used to easily describe the relationship between one configuration or component and another, as depicted in the drawings. Spatially relative terms should be understood to include different orientations of the components during use or operation in addition to the orientations depicted in the drawings. For example, if a configuration depicted in the drawings were flipped, a configuration described as being "below" another configuration could end up being "above" the other configuration. Additionally, a configuration described as being located "to the left" of another configuration relative to the drawings could end up being located "to the right" of the other configuration depending on the viewpoint. Thus, the exemplary term "below" can include both below and above directions. Configurations can also be oriented in other directions, in which case spatially relative terms can be interpreted accordingly.

[0037] Although the terms first, second, etc. are used to describe various components, these components are not limited by these terms. These terms are only used to distinguish one component from another. Therefore, it goes without saying that the first component mentioned below may also be the second component within the technical spirit of the present invention. The singular expression includes the plural expression unless the context clearly indicates otherwise. In addition, terms such as "comprises" or "has" are intended to specify the presence of a feature, number, step, operation, component, part, or combination thereof described in the specification, but do not exclude in advance the possibility of the presence or addition of one or more other features, numbers, steps, operations, components, parts, or combinations thereof.

[0038] The same drawing reference numerals are used for identical or similar parts throughout the specification.

[0039] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0040] Figure 1 is a schematic diagram of a low-temperature valve module according to one embodiment of the present invention. It should be noted in advance that the low-temperature valve module may be described as a low-temperature valve assembly.

[0041] Referring to FIG. 1, a valve assembly (1000) according to one embodiment includes a driving unit (300), a valve unit (200), and an insulation unit (100).

[0042] The driving unit (300) is a component that controls the opening and closing of the valve unit (200), and can provide the driving force required for opening and closing.

[0043] In one embodiment, the driving unit (300) may include an actuator. That is, the driving unit (300) may control the flow of fluid flowing through the valve unit (200) based on an external signal. That is, in one embodiment, the driving unit (300) may be an electric actuator including an electric motor.

[0044] In one embodiment, the driving unit (300) may include a stem (400) extending to the valve unit (200) to transmit the driving force generated from the driving unit (300) to the valve unit (200). The stem (400) may have a bar shape extending in one direction. In one embodiment, the driving unit (300) may open or close the valve unit (200) by rotating the stem (400) about the center of the stem (400).

[0045] The valve unit (200) is a component that controls the flow of fluid, and serves to pass or block the fluid. In one embodiment, the valve unit (200) may include a ball valve. However, the type of the valve unit (200) of the present invention is not limited thereto. The valve unit (200) may include a component that controls the flow of fluid in a broad sense, and may include, for example, a gate valve, a globe valve, a butterfly valve, a check valve, etc.

[0046] An insulating part (100) may be placed between the driving part (300) and the valve part (200). The insulating part (100) serves to prevent heat generated from the valve part (200) from being transmitted to the driving part (300).

[0047] In particular, in some embodiments of the present invention, the low-temperature valve module may be a low-temperature valve assembly, in which case the insulation part (100) can prevent cold air generated from the low-temperature fluid flowing in the valve part (200) from being transmitted to the driving part (300) and causing damage to the driving part (300).

[0048] In one embodiment, the drive unit (300) may be an electrical control device, and in this case, may include a circuit board. The circuit board is vulnerable to moisture, and when an insulating member is configured as described herein, moisture can be prevented from condensing on the circuit board, etc. In addition, the drive unit (300) may include a flexible component for sealing a joint (such as an O-ring), but these materials may be brittle at low temperatures and may be broken. In other words, low temperatures damage components of the drive unit (300) that are vulnerable to cold. Therefore, when an insulating member (100) is arranged between the valve unit (200) and the drive unit (300), such damage can be prevented.

[0049] In one embodiment, the insulation member (100) may include a core shaft (110) and an insulation housing (160). Hereinafter, the core shaft (110) will be described in more detail with reference to FIGS. 2 and 3.

[0050] Figure 2 is a partial schematic diagram of a low-temperature valve module according to one embodiment of the present invention.

[0051] Figure 3 is a cross-sectional view taken along line Ⅰ-Ⅰ' of Figure 2.

[0052] Referring to FIGS. 2 and 3, the core shaft (110) may include an upper connecting portion (140), a body portion (120), and an insulating plate (130).

[0053] The core shaft (110) may be formed to extend in the same direction as the stem (400) extending in the axial direction. That is, the stem (400) may penetrate the core shaft (110) from top to bottom. In one embodiment, the core shaft (110) includes a through hole into which the stem (400) is inserted, and the stem (400) may be inserted into the through hole.

[0054] In an embodiment in which the stem (400) rotates, the core shaft (110) can rotate around the same axis of rotation as the stem (400). In the embodiments of FIGS. 2 and 3, the extension direction of the axis of rotation can be the same as the extension direction of the stem (400). That is, the stem (400) and the core shaft (110) can be coupled to each other and rotate around the same axis.

[0055] In another embodiment, the stem (400) may be coupled so that the core shaft (110) rotates within the core shaft (110), but the core shaft (110) does not rotate. That is, the stem (400) may be coupled so as to be rotatable with the core shaft (110) within the core shaft (110).

[0056] In one embodiment, the core shaft (110) may be formed of a metal material. The metal material may include, for example, one or more selected from stainless steel, nickel alloy, aluminum alloy, copper alloy, titanium alloy, and low-temperature steel. However, these are only examples of metal materials, and the material of the core shaft (110) is not limited thereto. Any material with sufficient durability and physical properties to form the core shaft (110) may be used as the material of the core shaft (100).

[0057] The upper connecting portion (140) may be configured to be coupled to the driving portion (300) in the insulating portion (100). That is, the upper connecting portion (140) may be screw-coupled to a part of the driving portion (300), coupled through a separate coupling, or fitted. That is, the types of couplings herein are merely examples, and the types of couplings are not limited thereto.

[0058] The body portion (120) may extend from the upper connection portion (140). In one embodiment, the body portion (120) may be formed integrally with the upper connection portion (140), but is not limited thereto and may be formed and assembled independently of each other.

[0059] When the body part (120) and the upper connection part (140) are formed integrally, both can be made of the same material.

[0060] In one embodiment, a step may be formed in the body portion (120). Specifically, the step may be formed as the diameter of each section differs.

[0061] In one embodiment, the body (120) may include an upper column (121) and a lower column (122). In one embodiment, the upper column (121) and the lower column (122) may have a cylindrical shape or a cylindrical shape. However, the diameters of the upper column (121) and the lower column (122) may be different from each other.

[0062] In one embodiment, the diameter of the upper column (121) may be relatively smaller than the diameter of the lower column (122). In another embodiment, the upper column (121) and the lower column (122) may have a polygonal column shape rather than a cylindrical shape. In this case, the width of the upper column (121) may be smaller than the width of the lower column (122).

[0063] In one embodiment, one or more insulating plates (130) may be formed to protrude from the body portion (120). In one embodiment, the protrusion direction of the insulating plates (130) may be different from the extension direction of the stem (400). FIG. 2 and the like illustrate a case where the protrusion direction of the insulating plates (130) is perpendicular to the extension direction of the stem (400).

[0064] The insulating plate (130) may be a plate-shaped structure. As the insulating plate (130) has a plate-shaped shape and extends, the upper and lower surfaces of the insulating plate (130) may be exposed. That is, at least a portion of the upper and lower surfaces of the insulating plate (130) may be exposed to the internal space of the storage unit (170) described later. In addition, one insulating plate (130) and another adjacent insulating plate (130) may be spaced apart from each other. Accordingly, air or fluid may move between the insulating plates (130).

[0065] Figure 4 is a schematic diagram of a low-temperature valve module according to one embodiment of the present invention.

[0066] Figure 4 illustrates the relative relationship between the insulation plate (130), the body (120), and the stem (400).

[0067] As the insulation plate (130) extends from the body portion (120), the upper or lower surface of the insulation plate (130) may be exposed to the space of the receiving portion (170). The shape of the exposed upper or lower surface of the insulation plate (130), i.e., the shape of the insulation plate (130) excluding the portion where the body portion (120) is located, may have a ring shape.

[0068] Referring again to FIGS. 2 and 3 , in one embodiment, the number of insulation plates (130) may be plural. In one embodiment, the extension lengths of the plurality of insulation plates (130) may be different. In one embodiment, some insulation plates (130) may extend from the upper column (121), and some insulation plates (130) may extend from the lower column (122). Additionally, some insulation plates (130) may extend from the boundary between the upper column (121) and the lower column (122). In this case, the upper surface of the insulation plate (130) may extend from the upper column (121), and the lower surface may extend from the lower column (122). Since the lower column (122) has a larger width, the area of ​​the exposed lower surface may be smaller than the area of ​​the exposed upper surface. (The second insulation plate (132) of FIGS. 2 and 3 has this form.)

[0069] In addition, the extension length of each insulation plate (130) may be different. That is, the distance from the central axis of the stem (400) to the end of each insulation plate (130) may be different for each insulation plate (130). (Referring to FIGS. 2 and 3, the extension lengths of the first insulation plate (131) and the third insulation plate (132) are different.)

[0070] As illustrated in FIG. 2, the insulation plate (130) may include a first insulation plate (131), a second insulation plate (132), a third insulation plate (133), and a fourth insulation plate (134). However, this is merely exemplary, and the number of insulation plates is not limited thereto.

[0071] The first insulation plate (131) may extend from the upper column (121). The extension length of the first insulation plate (131) may be the longest among the four insulation plates. Due to the width of the upper column (121) and the extension length of the first insulation plate (131), the exposed upper and lower surfaces of the first insulation plate (131) may be relatively wider than those of the other insulation plates.

[0072] However, due to the difference in width between the upper column (121) and the lower column (122), the distance between the end of the first insulation plate (131) and the central axis of the stem (400) may be the smallest among the four insulation plates.

[0073] The second insulation plate (132) may be formed to extend from the boundary between the upper column (121) and the lower column (122). A step may be formed at the boundary due to the difference in width between the upper column (121) and the lower column (122), and the second insulation plate (132) may be formed to extend from the boundary where this step is formed.

[0074] As a result, the upper surface of the second insulation plate (132) can extend from the upper pillar (121), and the lower surface can extend from the lower pillar (122). Accordingly, the area of ​​the upper surface of the second insulation plate (132) can be larger than the area of ​​the lower surface.

[0075] The distance from the central axis of the stem (400) to the end of the second insulation plate (132) may be greater than that of the first insulation plate (131).

[0076] The third insulation plate (133) may extend from the lower column (122). In one embodiment, the distance from the central axis of the stem (400) to the end of the third insulation plate (133) may be greater than that of the second insulation plate (132). That is, the distance from the central axis of the stem (400) to the end of the third insulation plate (133) may be the greatest among the four insulation plates.

[0077] The fourth insulation plate (134) may extend from the lower column (122). In one embodiment, the distance from the central axis of the stem (400) to the end of the fourth insulation plate (134) may be smaller than that of the third insulation plate (133). Accordingly, the area of ​​the exposed upper or lower surface of the fourth insulation plate (134) may be smaller than the area of ​​the exposed upper or lower surface of the third insulation plate (133).

[0078] In this way, when the extension length, the distance to the central axis, and the exposure area are formed differently, the cold air of the low-temperature fluid can be more efficiently dispersed. That is, when the distribution surface area is formed differently and air is circulated in the space inside the receiving unit (170) as described below, irregular resistance is provided to the air movement path, so that the up-and-down movement of the air becomes active, and accordingly, the cold air can be efficiently dispersed. As a result, the cold air can be prevented from reaching the driving unit (300). That is, irregular resistance can be provided to the air flow in the receiving unit (170) to induce turbulence or eddies. The created turbulence or eddies can efficiently disperse the cold air.

[0079] Next, with reference to FIGS. 5 and 6, another configuration of the present invention will be described.

[0080] Figure 5 is a partial perspective view of a low-temperature valve module according to one embodiment of the present invention.

[0081] Figure 6 is a cross-sectional view taken along line Ⅱ-Ⅱ' of Figure 5.

[0082] Referring to FIGS. 5 and 6, the insulating housing (160) may include a storage portion (170).

[0083] In one embodiment, the insulating housing (160) may be made of silicone, plastic, or rubber. However, this is merely exemplary and the configuration of the insulating housing (160) is not limited thereto.

[0084] In one embodiment, the insulating housing (160) may be formed of one or more materials selected from the group consisting of polyurethane, polycarbonate, polypropylene, polyethylene, and polyamide. However, this is merely exemplary and the material of the insulating housing (160) is not limited thereto.

[0085] The receiving portion (170) may include a space defined by the insulating housing (160). The core shaft (110) may be received in this space. In one embodiment, the receiving portion (170) may have at least a partially cylindrical shape. However, the present invention is not limited thereto, and the receiving portion (170) may have a shape corresponding to the core shaft (110) so as to receive the core shaft (110). The upper and lower portions of the receiving portion (170) may be partially open. In one embodiment, the receiving portion (170) may include an upper opening (171) and a lower opening (172). The upper opening (171) is coupled to the upper connecting portion (140) of the core shaft (110), and the lower portion of the core shaft (110) may be seated in the lower opening (172). When the upper opening (171) and the lower opening (172) are connected to the core shaft (110) in this way, the internal space of the storage portion (170) can be sealed. (Except for the supply line and exhaust line described later, air may not flow in or out.)

[0086] The space of the storage unit (170) can be partitioned by a side wall (180) and a bottom portion (190). In an embodiment where the storage unit (170) has a cylindrical shape, the side wall (180) can form a side surface of the cylinder, and the bottom portion (190) can form the bottom surface of the cylinder.

[0087] In one embodiment, the side wall (180) may include an upper wall portion (180U), an inclined portion (180T), and a lower wall portion (180L). The upper wall portion (180U) may be relatively thicker than the lower wall portion (180L). Due to the difference in thickness between the two, the inclined portion (180T) may gradually become thicker from the lower wall portion (180L) toward the upper wall portion (180T).

[0088] In one embodiment, the inclined portion (180T) may face the end of the first insulation plate (131) and the end of the second insulation plate (132) described above. The inclined portion (180T) and the first insulation plate (131) and the second insulation plate (132) are spaced apart from each other, and due to the difference between the slope of the inclined portion (180T) and the extension length of the insulation plate, the distance between the inclined portion (180T) and the first insulation plate (131) may be substantially the same as the distance between the inclined portion (180T) and the second insulation plate (132).

[0089] In one embodiment, a sealing member (173) may be formed on the upper wall portion (180U). The sealing member (173) may contact the upper connecting portion (140) of the core shaft (110) to seal the joint. For this purpose, the sealing member (173) may be made of a material having at least partial elasticity.

[0090] When the core shaft (110) is stored in the receiving portion (170), an internal space can be formed in the receiving portion (170). That is, an internal space can be defined between the core shaft (110) and the receiving portion (170). When the core shaft (110) and the receiving portion (170) are connected, this internal space is a sealed space and is not connected to the outside without the supply line (162) and / or the discharge line (161, 162) described later.

[0091] In other words, the internal space may be a space created by a certain distance between the side wall of the storage section (170) and some components of the core shaft (110) (body section (120), insulation plate (130), etc.).

[0092] As described below, when air is injected into this space through the supply line, the air introduced into the space experiences irregular resistance due to the interaction of various components of the core shaft (110) and the insulating housing (160), which may result in the formation of turbulence or eddies within the space. The effects of turbulence or eddies are as described above.

[0093] In one embodiment, a protruding guide (181) may be formed on the side wall (180). The protruding guide (181) may be formed to extend along the extension direction of the side wall. In an embodiment in which the receiving portion (170) has a cylindrical shape, the protruding guide (181) may extend along the side surface of the cylinder and continue in a closed curve shape. In one embodiment, the protruding guide (181) may be plural. That is, a plurality of protruding guides (181) may be formed to protrude from the side wall toward the center in parallel with each other.

[0094] In another embodiment, the protruding guide (181) may extend in a spiral shape like a screw.

[0095] In one embodiment, a protruding guide (181) may be formed on the lower wall portion (180L) of the side wall (180). When the protruding guide (181) is formed in this manner, it may induce turbulence or eddies by providing resistance to the air flowing in the internal space of the storage portion (170). Turbulence or eddies may serve to effectively disperse cold air by activating the up-and-down movement of air.

[0096] In one embodiment, the insulating housing (160) may include a bottom portion (190) extending toward the center from the side walls (180). As previously described, a lower opening (172) may be formed in the center of the bottom portion (190).

[0097] In one embodiment, a protrusion (191) protruding upward from the bottom portion (190) may be formed. The protrusion (191) of the bottom portion (190), like the protrusion guide (181) above, can provide resistance to air flowing in the internal space formed when the receiving portion (170) and the core shaft (110) are coupled. The effect of this is to form turbulence or eddies in the internal space, like the protrusion guide (181) above. As a result, the efficiency of cold air dispersal can be improved.

[0098] In one embodiment, the storage housing (160) may include a supply port (161) and a supply line (162). In one embodiment, air may be injected through the supply port (161). The air injected through the supply port (161) may be supplied to the internal space of the storage unit (170) through the supply line (162). As described above, the air may partially and irregularly move within the storage unit (170), thereby dispersing cold air generated from the low-temperature fluid.

[0099] In other embodiments, a different fluid (liquid or gas) may be injected instead of air. In this case, like air, the fluid may circulate within the receiving portion (170) to disperse the cold air.

[0100] In one embodiment, the insulating housing (160) may include one or more outlets and exhaust lines. In one embodiment, the insulating housing (160) may include a first outlet (163) and a second outlet (164). In addition, the insulating housing (160) may include a first exhaust line (165) and a second exhaust line (166).

[0101] Air flowing in the internal space of the storage unit (170) can be discharged through the first discharge port (163) and the second discharge port (164). The first discharge port (163) can discharge air or fluid flowing in the internal space of the storage unit (170) through the first discharge line (165), and the second discharge port (164) can discharge air or fluid flowing in the internal space of the storage unit (170) through the second discharge line (166).

[0102] In one embodiment, the heights of the first discharge line (165) and the second discharge line (166) may be different from each other. For example, the heights of the portion connected to the internal space of the storage unit (170) may be different from each other. That is, the end of the first discharge line (165) may be formed at a relatively high position, and the end of the second discharge line (166) may be formed at a relatively low position.

[0103] In this way, when the heights of the discharge lines are formed differently, the air flow flowing inside the storage unit (170) may be affected, causing turbulence or eddies.

[0104] In one embodiment, a silencer may be formed on the first outlet (163) and / or the second outlet (164). Noise may be generated at the first outlet (163) or the second outlet (164) due to pressure formed in the internal space of the receiving portion (170), etc. Accordingly, a silencer (167) (see FIG. 1) for reducing noise may be installed on the first outlet (163) and / or the second outlet (164).

[0105] Figure 7 is a partial perspective view of a low-temperature valve module according to another embodiment of the present invention.

[0106] Referring to FIG. 7, the insulating housing (160) may include a first housing (160a) and a second housing (160b).

[0107] In one embodiment, the insulating housing (160) may be formed of a first housing (160a) and a second housing (160b) that can be assembled. That is, the insulating housing (160) may be implemented by combining the first housing (160a) and the second housing (160b). When the two are configured to be post-assembled as shown in FIG. 7, the installation of the insulating housing (160) may be facilitated. That is, the insulating housing (160) may be post-assembled in a low-temperature valve module in which the drive unit (300), the valve unit (200), and the core shaft (110) are combined. This may improve the convenience of installation.

[0108] While the present invention has been described above with reference to embodiments thereof, these are merely examples and are not intended to limit the present invention. Those skilled in the art will appreciate that various modifications and applications not exemplified above are possible without departing from the essential characteristics of the embodiments of the present invention. For example, each component specifically shown in the embodiments of the present invention can be modified and implemented. Furthermore, any differences related to such modifications and applications should be construed as being included within the scope of the present invention as defined in the appended claims.

Claims

1. Valve part; A driving unit that controls the opening and closing of the above valve unit: an insulating member arranged between the valve member and the driving member; and A stem extending from the driving unit through the insulation unit to the valve unit; The above insulation portion has a core axis extending in the same direction as the stem; an insulating housing for housing the core shaft; and A low-temperature valve module comprising an insulating plate extending from the core shaft in a direction different from the stem.

2. In paragraph 1, A low-temperature valve module, wherein the core shaft includes a body portion including upper and lower columns having different widths, and the insulation plate extends from the body portion.

3. In paragraph 2, A low-temperature valve module, wherein the insulation plate includes a first insulation plate extending from the upper column, a second insulation plate extending from the boundary between the upper column and the lower column, and a third insulation plate extending from the lower column.

4. In paragraph 3, A low-temperature valve module in which the extension length of the first insulation plate is greater than the extension length of the second insulation plate.

5. In paragraph 3, A low-temperature valve module wherein the above insulating housing includes a storage portion that divides the internal space, and the storage portion includes a side wall and a bottom portion.

6. In paragraph 5, A low-temperature valve module, wherein the side wall comprises an upper wall portion, a lower wall portion having a relatively thinner thickness than the upper wall portion, and a slope portion having a gradually decreasing thickness as it extends from the upper wall portion to the lower wall portion.

7. In paragraph 6, The above-mentioned slope is a low-temperature valve module facing the first insulation plate.

8. In paragraph 6, A low-temperature valve module including a protruding guide protruding from the lower wall toward the core axis.

9. In paragraph 6, A low-temperature valve module including a protrusion formed from the bottom portion toward the driving portion.

10. In paragraph 5, The above insulating housing is a low-temperature valve module including a supply line for injecting air into the internal space and a discharge line for exhausting air from the internal space.

Images