Ultra-robust three-axis rotation rate sensor having dual rotors and coupled z detection

Abstract

The invention relates to a micromechanical rotation rate sensor comprising: a sensor structure having drive structures and detection structures; a sensor substrate; a first partial oscillator having a first detection mass and a second detection mass; a second partial oscillator having a third detection mass and a fourth detection mass; and a coupling structure, characterised in that the coupling structure provides a mechanical coupling between the first partial oscillator and the second partial oscillator, wherein an in-phase oscillation of the first partial oscillator and the second partial oscillator is suppressed by the mechanical coupling.

Description

[0001] Description

[0002] title

[0003] Ultra-robust Rotation rate sensor with and z-detection

[0004] Disclosure of the invention

[0005] State of the art

[0006] The invention relates to a micromechanical gyroscope sensor comprising a sensor structure having drive structures and detection structures, a sensor substrate, and a first sub-oscillator having a first detection mass and a second detection mass, and a second sub-oscillator having a third detection mass and a fourth detection mass, according to the preamble of claim 1. Such micromechanical gyroscope sensors, which often exhibit different frequencies of the vibration modes of the two sub-oscillators due to manufacturing tolerances, are generally known and, for example, from US patent 11719539B2. The gyroscope sensor disclosed in US patent 11719539B2 consists of two rotors for measuring the x- and y-rotation rates and four masses for measuring the z-rotation rate. Two of these four masses are mechanically directly coupled.Due to the quarter-symmetry of the design, the sensor would theoretically be robust against linear and rotational accelerations. However, manufacturing tolerances and local process variations can break the sensor's symmetry, causing the two individual z-detection modes to differ in their properties. In one z-detection mode, only the two leftmost masses oscillate at a resonant frequency f. L In the other z-detection mode, only the right two oscillate.

[0007] masses at a resonance frequency f R Each of the two z-detection modes can be excited by rotational acceleration around the z-axis, thereby generating a differential capacitance signal that can interfere with the measurement signal during sensor operation. For example, at rotational accelerations with a frequency of f L or f RThe corresponding z-detection mode is resonantly excited and can thereby generate very high capacitance signals. This can either lead to a direct false signal or overload the front end in the ASIC.

[0008] Disclosure of the invention

[0009] Against this background, the task is to provide a micromechanical rotation rate sensor that is robust and insensitive to rotational accelerations with respect to the measuring rotational axis, especially with respect to the Z-axis, even in the presence of local process fluctuations.

[0010] The micromechanical angular rate sensor according to the invention, comprising a sensor structure with drive structures and detection structures, a sensor substrate, and a first sub-oscillator having a first detection mass and a second detection mass, and a second sub-oscillator having a third detection mass and a fourth detection mass, has the advantage over the prior art that it has a coupling structure by which the two sub-oscillators are coupled to each other in such a way that in-phase oscillations are suppressed. This coupling creates an oscillating system consisting of the coupling structure, the first sub-oscillator, and the second sub-oscillator, which exhibits at least one symmetric and at least one antisymmetric oscillation mode. At least one symmetric mode can be excited by the Coriolis force and thus represents the detection mode.At least one antisymmetric mode can be excited by rotational acceleration and, due to the coupling, operates at a higher frequency. The rotation rate sensor according to the invention is therefore robust against external rotational accelerations at the detection frequency around the measuring axis of rotation, in particular the Z-axis, and the type of coupling enables a compact design of the rotation rate sensor according to the invention.

[0011] Advantageous embodiments and further developments of the invention can be found in the dependent claims and the description with reference to the drawings. In an advantageous embodiment of the micromechanical gyroscope according to the invention, it has a coupling structure comprising at least one deflection structure and preferably two deflection structures.

[0012] In an advantageous embodiment of the micromechanical gyroscope according to the invention, it has a coupling structure by which the partial oscillators of the micromechanical gyroscope can oscillate in antiphase - that is, with a relative phase difference of 180° - and a movement in phase is suppressed.

[0013] In an advantageous embodiment of the micromechanical rotation rate sensor according to the invention, it comprises a system of coupling structure, first partial oscillator and second partial oscillator, which has at least one symmetrical vibration mode and at least one antisymmetrical vibration mode, wherein the symmetrical vibration mode can be excited by the Coriolis force arising as a result of the rotation about the measuring axis of rotation in the rotating reference system and represents the detection mode, and the antisymmetrical mode can be excited by rotational accelerations about the measuring axis of rotation.

[0014] In an advantageous embodiment of the micromechanical angular rate sensor according to the invention, it comprises a system of coupling structure, first partial oscillator and second partial oscillator, which has an antisymmetric vibration mode whose resonance frequency is above or below the detection frequency and / or drive frequency and / or operating frequency and / or working frequency of the micromechanical angular rate sensor according to the invention.

[0015] In an advantageous embodiment of the micromechanical rotation rate sensor according to the invention, the first and the second partial oscillators are connected to each other via at least one deflection element, preferably via at least two deflection elements.

[0016] In an advantageous embodiment of the micromechanical gyroscope according to the invention, it has at least one deflection element, or preferably at least two deflection elements, which is / are arranged at the upper and / or lower edge of the sensor structure and has one or more suspension points. In an advantageous embodiment of the micromechanical gyroscope according to the invention, it has a coupling structure which has at least one deflection element, or preferably at least two deflection elements, and a deflection arm, and in particular at least one rocker arm.

[0017] In an advantageous embodiment of the micromechanical gyroscope according to the invention, it has a coupling structure which has at least one deflection element or preferably at least two deflection elements and a deflection arm and in particular has at least one rocker arm, wherein the coupling structure provides a coupling of the partial oscillators in antiphase.

[0018] In an advantageous embodiment of the micromechanical gyroscope according to the invention, it has a deflection arm which has two legs arranged at right angles to each other.

[0019] In an advantageous embodiment of the micromechanical gyroscope according to the invention, it has a deflection structure or several deflection structures, which have substructures that are connected to each other via connecting structures and are in particular designed as simple or multiple U-loops and / or as simple beams.

[0020] In an advantageous embodiment of the micromechanical rotation rate sensor according to the invention, a coupling structure forms exactly one detection mode with respect to a measuring rotation axis, in particular a z-detection mode with respect to the z-axis as the rotation axis, which is retained even in the case of asymmetries of the geometry, for example as a result of manufacturing variations.

[0021] In an advantageous embodiment of the micromechanical angular rate sensor according to the invention, it has a coupling structure through which a double antiphase coupling of the first and the second partial oscillator is present.

[0022] In an advantageous embodiment of the micromechanical angular rate sensor according to the invention, it has a coupling structure through which a simple antiphase coupling of the first and the second partial oscillator is present.

[0023] In an advantageous embodiment of the micromechanical angular rate sensor according to the invention, it has a coupling structure with a deflection arm, wherein the deflection arm has a substrate connection, wherein the substrate connection has a spring structure arranged parallel to a first leg of the deflection arm and / or has a spring structure arranged parallel to a second leg of the deflection arm, arranged substantially perpendicular to the first leg, and / or has a spring structure arranged at an angle of 0° to 90° to the first leg of the deflection arm.

[0024] In an advantageous embodiment of the micromechanical rotation rate sensor according to the invention, it has, in addition to one or more sensor structures for measuring a first rotation rate about a first rotation axis, in particular a z-axis, one or more second sensor structures for measuring a second rotation rate about a second rotation axis, in particular an x-axis, and / or one or more third sensor structures for measuring a third rotation rate about a third rotation axis, in particular a y-axis, wherein the second and the third rotation axes are orthogonal to each other and orthogonal to the first rotation axis.

[0025] In an advantageous embodiment of the micromechanical angular rate sensor according to the invention, it has second and third sensor structures, which are arranged as a double-rotor structure. During a detection movement for an angular rate around the x- or y-axis, the double-rotor structure deflects in the z-direction. The direct mechanical coupling of the two rotors allows the formation of a single detection mode or detection frequency for measuring the x- and y-angular rates, respectively. Even with asymmetries due to manufacturing tolerances and local manufacturing variations across the sensor structure, the x- and y-detection modes are retained.

[0026] In an advantageous embodiment of the micromechanical angular rate sensor according to the invention, the sensor structure has a vibration mode through a mechanical coupling which can be excited by first Coriolis forces, wherein in particular the first Coriolis forces arise during a first rotation about a first axis of rotation oriented orthogonally to a principal extension plane of the micromechanical angular rate sensor according to the invention, in a co-rotating coordinate system of the first rotation.

[0027] In an advantageous embodiment of the micromechanical gyroscope according to the invention, the latter has a double-rotor structure, wherein, in particular, the double-rotor structure has a second vibration mode and a third vibration mode through the first mechanical coupling, wherein, in particular, the second vibration mode can be excited by second Coriolis forces and, in particular, the third vibration mode can be excited by third Coriolis forces, wherein, in particular, the second Coriolis forces arise during a second rotation about a second axis of rotation, in particular an X-axis, oriented orthogonally to a normal of a principal extension plane of the micromechanical gyroscope according to the invention, in a co-rotating coordinate system of the second rotation, wherein, in particular, the third Coriolis forces arise during a third rotation about aa third axis of rotation, in particular a Y-axis, oriented orthogonally to a normal of a principal extension plane of the micromechanical rotation rate sensor according to the invention and orthogonally to the second axis of rotation, is created in a co-rotating coordinate system of the third rotation.

[0028] In an advantageous embodiment of the micromechanical rotation rate sensor according to the invention, the micromechanical rotation rate sensor measures the second rotation rate about an X-axis and the third rotation rate about a Y-axis and has a double-rotor structure comprising a first rotor and a second rotor, wherein the double-rotor structure comprising the first rotor and the second rotor has a mechanical coupling between the first rotor and the second rotor.

[0029] In an advantageous embodiment of the micromechanical gyroscope according to the invention, the deflection structures are identical with respect to their masses and / or their dimensions and / or their lengths.

[0030] In an advantageous embodiment of the micromechanical rotation rate sensor according to the invention, at least one of the deflection structures is connected to the substrate by a phi spring arrangement.

[0031] Exemplary embodiments of the present invention are shown in the drawings and explained in more detail in the following description.

[0032] Brief description of the drawings

[0033] Figure 1a shows a schematic representation of a state-of-the-art micromechanical angular rate sensor. The sensor has four detection masses to measure the angular rate around the z-axis. The four detection masses are connected to the drive structure.

[0034] Figure 1b shows a schematic representation of a state-of-the-art micromechanical angular rate sensor. The drive movement is depicted, whereby the drive structures or four detection masses deflect in antiphase relative to each other.

[0035] Figure 1c schematically illustrates the two possible detection movements for a rotation rate around the z-axis in a state-of-the-art micromechanical rotation rate sensor. The two coupled detection masses (Oe on the left and right sides, respectively) deflect in antiphase and orthogonally to the drive movement. This results in two detection modes with frequencies f. L and f R out of.

[0036] Figure 1d schematically illustrates the two possible detection movements around the x-axis and the y-axis in a state-of-the-art micromechanical angular rate sensor, where a double-rotor structure deflects in the z-direction. The direct mechanical coupling of the two rotors allows for the formation of a single detection mode or detection frequency for measuring the x- and y-rotation rates, respectively. Even with asymmetries caused by manufacturing tolerances and local variations across the sensor structure, the x- and y-detection modes are retained.

[0037] Figure 2a schematically shows a micromechanical angular rate sensor according to the invention with double antiphase coupling of sub-oscillators for measuring the angular rate about the z-axis (also called z-sub-oscillators). The mechanical coupling of the z-sub-oscillators is shown. The coupling structure is implemented via so-called deflection structures, a deflection arm, and a rocker arm, such that the left z-sub-oscillator is coupled to the right z-sub-oscillator in antiphase. The connection of the deflection structures can be implemented via so-called U-loops.

[0038] Figure 2b shows a schematic representation of the z-detection mode of the micromechanical angular rate sensor according to the invention. The direct mechanical coupling results in precisely one z-detection mode, which is retained even in the presence of possible geometric asymmetries.

[0039] Figure 2c schematically shows the sections of three micromechanical angular rate sensors according to the invention in a quarter-model, each with a different substrate connection of a coupling structure. Various options for connecting to the deflection arm are shown. Three types can be distinguished: horizontal, vertical, and an arrangement with angles other than 0° and 90°. The left illustration shows a horizontal spring arrangement as part of the substrate connection. The middle illustration shows a vertical spring arrangement as part of the substrate connection. The right illustration shows a spring arrangement with angles other than 0° and 90°.

[0040] Figure 2d schematically shows alternative implementations for the design of the coupling structure. Various embodiments for the positions of the substrate connection and suspension to the deflection structures (rocker and deflection arm), as well as lengths (11, 12) and masses (m1, m2), are shown. The connections between the deflection structures can be made with simple U-loops, multiple U-loops, phi springs (circular loops), simple beams, or combinations thereof.

[0041] Figure 3 schematically shows alternative implementations for the design of the coupling structure of a micromechanical gyroscope according to the invention. A variant with a double U-spring connection (n=2) between the deflection structures is shown. Variants with n>2 are also possible. Here, the variant with n=2 U-loops is shown as an example.

[0042] Figure 4 schematically shows two embodiments of micromechanical angular rate sensors according to the invention, each with two variants of the outwardly directed substrate connection. On the left, a horizontal spring arrangement at the outer suspension point is shown. On the right, a vertical spring arrangement at the outer suspension point is shown. Essentially, the embodiments shown in Figure 2d can be mirrored outwards, relative to the sensor core. Figure 5 schematically shows embodiments of micromechanical angular rate sensors according to the invention with the substrate connection located within the deflection structures. On the left, an embodiment with substrate connection within a rocker arm and within a deflection arm is shown. On the right, examples of possible embodiments of the substrate connection to the deflection structures within the deflection structures are shown.

[0043] Figure 6 schematically shows embodiments of micromechanical angular rate sensors according to the invention with corner spring constructions as part of the substrate connection. The connection between an external suspension point and a deflection arm can be realized with a corner spring. On the left, a first variant of a corner spring construction as part of the substrate connection is shown. On the right, a second variant of a corner spring construction as part of the substrate connection is shown.

[0044] Figure 7 shows a schematic representation of an embodiment of a micromechanical angular rate sensor according to the invention with a corner spring assembly as part of the substrate connection. A variant of the corner spring assembly is shown as part of the substrate connection, in which the corner spring assembly is attached to the outer edge of a deflection arm.

[0045] Figure 8 shows a schematic representation of an embodiment of a micromechanical gyroscope according to the invention without a rocker arm. It features a single antiphase coupling and a phi spring arrangement.

[0046] Embodiments of the invention

[0047] In the various figures, identical parts are always marked with the same reference symbols and are therefore usually only named or mentioned once.

[0048] Figure 1a shows a schematic representation of a prior art micromechanical gyroscope. The sensor has four detection masses for measuring the gyroscope rate about the z-axis. The four detection masses are connected to the drive structure. The prior art micromechanical gyroscope has a first sub-oscillator 31 and a second sub-oscillator 32 for measuring the gyroscope rate about the z-axis (also called z-sub-oscillator), wherein the first sub-oscillator 31 has a first detection mass 41 and a second detection mass 42, and the second sub-oscillator 32 has a third detection mass 43 and a fourth detection mass 44. The prior art micromechanical gyroscope 100 also has a sensor structure 10 comprising drive structures 30 and detection structures 35, and a sensor substrate.Also shown is a double-rotor structure 80, comprising a first rotor 81 and a second rotor 82, for measuring the rotation rates around the x-axis and y-axis.

[0049] Figure 1b shows a schematic representation of a state-of-the-art micromechanical angular rate sensor. The drive movement is depicted, whereby the drive structures or four detection masses deflect in antiphase relative to each other.

[0050] Figure 1c schematically illustrates the two possible detection movements for a rotation rate around the z-axis in a state-of-the-art micromechanical rotation rate sensor. The two coupled detection masses (left and right sides) deflect in antiphase and orthogonally to the drive movement. This results in two detection modes with frequencies f. L and f R out of.

[0051] Figure 1d schematically illustrates the two possible detection movements around the x-axis and the y-axis in a prior art micromechanical angular rate sensor, whereby the double-rotor structure 80 (see Fig. 1a), comprising the first rotor 81 and the second rotor 82, deflects in the z-direction. The direct mechanical coupling of the two rotors allows for the formation of a single detection mode or detection frequency for measuring the x- and y-rotation rates, respectively. Even with asymmetries due to manufacturing tolerances and local variations across the sensor structure, the x- and y-detection modes are retained.

[0052] Figure 2a shows a schematic representation of a micromechanical angular rate sensor 100 according to the invention with double antiphase coupling of a first sub-oscillator 31 and a second sub-oscillator 32 for measuring the angular rate about the z-axis (also called z-sub-oscillator), wherein the first sub-oscillator 31 has a first detection mass 41 and a second detection mass 42, and the second sub-oscillator 32 has a third detection mass 43 and a fourth detection mass 44. The micromechanical angular rate sensor 100 according to the invention comprises a sensor structure 10, which includes drive structures 30 and detection structures 35, a sensor substrate, and a coupling structure 40.

[0053] Figure 2b schematically shows the z-detection mode of the micromechanical angular rate sensor 100 according to the invention. Due to the direct mechanical coupling, exactly one z-detection mode is formed, which is maintained even in the presence of possible geometric asymmetries. The coupling structure 40 is implemented via so-called deflection structures 50, a deflection arm 60, and a rocker 70, such that the first sub-oscillator 31 (left z-sub-oscillator) is coupled to the second sub-oscillator 32 (right z-sub-oscillator) in antiphase. The mechanical coupling of the sub-oscillators 31 and 32 is shown. The connection of the deflection structures 50 is realized via U-loops. The deflection arms 60 have a first leg 61 and a second leg 62, which is perpendicular to the first leg.

[0054] Figure 2c schematically shows the sections of three micromechanical angular rate sensors 100 according to the invention in a quarter-model and a substrate connection 21. Various options for connecting the substrate 21 to the deflection arm 60 are also shown. Three types of substrate connection 21 using spring arrangements can be distinguished: horizontal, vertical, and those with an angular orientation other than 0° and 90°. The left illustration shows a horizontal spring arrangement 22 as part of the substrate connection 21. The middle illustration shows a vertical spring arrangement 23 as part of the substrate connection 21. The right illustration shows a spring arrangement 24 with an angle other than 0° and 90° as part of the substrate connection 21.

[0055] Figure 2d schematically shows alternative realizations for the design of the coupling structure 40 of a micromechanical angular rate sensor 100 according to the invention. Various variants of the substrate connection 21 to the deflection structures 50 (rocker 70 and deflection arm 60), as well as lengths (11, 12) and masses (m1, m2) of first substructures 51 of the deflection structures 50, are shown. A connecting structure 53 is shown, through which a connection exists between the deflection structures 50. The connecting structure 53 has a simple U-loop. The deflection structures 50 comprise the first substructures 51, wherein the first substructures 51 differ from one another at least partially with respect to their masses and with respect to their dimensions, in particular with respect to their lengths.

[0056] Figure 3 schematically shows alternative implementations for the design of the coupling structure 40 of a micromechanical angular rate sensor 100 according to the invention. The coupling structure 40 has second substructures 52, wherein the second substructures 52 are connected by at least one connecting structure 53, the connecting structure 53 having a double U-spring connection. Variants with n>2 are also possible. Here, the variant with n=2 U-loops is shown by way of example.

[0057] Figure 4 schematically shows two embodiments of a micromechanical angular rate sensor 100 according to the invention, with the substrate connection 21 facing outwards, away from the sensor structure 10. On the left, a horizontal spring arrangement 25 is shown at the outer suspension point. On the right, a vertical spring arrangement 26 is shown at the outer suspension point. Essentially, the embodiments can be mirrored outwards, as shown in Figure 2d, with respect to the sensor core.

[0058] Figure 5 schematically shows embodiments of micromechanical angular rate sensors 100 according to the invention, with the substrate connection 21 located within the deflection structures 50. On the left, an embodiment with a substrate connection 21 within a rocker 70 and within a deflection arm 60 is shown. On the right, examples of possible embodiments of the substrate connection 21 to the deflection structures 50 within the deflection structures 50 are shown.

[0059] Figure 6 shows a schematic representation of embodiments of micromechanical angular rate sensors 100 according to the invention. The connection between an outer suspension point and a deflection arm 60 can be realized with a corner spring. Two variants of the substrate connection 21, each having a corner spring construction, are shown.

[0060] Figure 7 shows a schematic representation of an embodiment of a micromechanical angular rate sensor 100 according to the invention. A further substrate connection 21, comprising a corner spring construction, is shown, in which the corner spring construction is attached to the outer edge of a deflection arm 60.

[0061] Figure 8 shows a schematic representation of an embodiment of a micromechanical gyroscope 100 according to the invention without a rocker arm 70. It features a single antiphase coupling and a phi spring arrangement 27.

[0062] The invention is not limited to the embodiments described above, but can instead be used for a wide variety of applications in inertial sensor-based navigation, orientation, and stabilization of objects. A processing unit within the sensor can control the operation of the inertial sensor (e.g., power-saving mode, measuring ranges), validate sensor signals and check them for tolerances (e.g., for internal sensor monitoring), process signals (e.g., calculate position or orientation, filter data), and select communication protocols. Various AI-based algorithms, including self-learning ones, can be used in the processing unit for evaluating and processing data from inertial sensors, temperature sensors, and external data (e.g., GPS data, odometer data). Examples of applications can be found in:

[0063] - Automotive applications (e.g. ESP, Roll Over Sensing, Airbag, Road Noise Suppression, Anti-Theft Alarm System, Parking Bump Detection, Road Condition Monitoring).

[0064] - in two-wheeled applications such as motorcycles, bicycles, and scooters (e.g., in ESP / AirBag, tilt detection, balancing)

[0065] - in the case of three-wheeled vehicles such as tuk-tuks

[0066] - in the avionics field (e.g. in flight stabilization and flight control)

[0067] - in industrial robot applications (e.g., position control of excavator buckets, drilling, image stabilization, flight control, alignment of satellite antennas, fine motor skills in robot gripping) -- in applications for home and garden (e.g., navigation of lawnmowers, position monitoring of doors)

[0068] - in medical applications (e.g. fall detection, movement and posture tracking) - in sports and leisure applications (e.g. movement detection, posture detection (in golf clubs, tennis rackets or skis)

[0069] - in numerous consumer applications, e.g., in smartphones, tablets, wearables, hearables, drones, gaming toys, AR or VR

[0070] [1] In addition, numerous configurations, changes, modifications, deviations, variations and embodiments are possible, all of which fall within the scope of the invention.

Claims

1. Micromechanical angular rate sensor (100) comprising a sensor structure (10) having drive structures (30) and detection structures (35), a sensor substrate, and a first partial oscillator (31) having a first detection mass (41) and a second detection mass (42), and a second partial oscillator (32) having a third detection mass (43) and a fourth detection mass (44), and a coupling structure (40), characterized in that the coupling structure (40) provides a first mechanical coupling between the first partial oscillator (31) and the second partial oscillator (32), wherein the first mechanical coupling suppresses phase-in-phase oscillation of the first partial oscillator (31) and the second partial oscillator (32).

2. Micromechanical gyroscope (100) according to claim 1 , characterized in that the micromechanical gyroscope (100) measures a first gyroscope rate about at least one Z-axis.

3. Micromechanical angular rate sensor (100) according to one of the preceding claims, characterized in that the micromechanical angular rate sensor (100) measures a second angular rate about an X-axis and a third angular rate about a Y-axis and that the micromechanical angular rate sensor (100) has a double-rotor structure (80) comprising a first rotor (81) and a second rotor (82).

4. Micromechanical gyroscope (100) according to one of the preceding claims, characterized in that the coupling structure (40) has one or more deflection structures (50), wherein the deflection structures (50) are in particular deflection arms (60) - preferably a first leg (61) and a two- ten, having deflection arms (60) arranged at right angles to the first leg (61), and having legs (62), are and / or in particular rockers (70), wherein the first partial oscillator (31) and the second partial oscillator (32) are coupled in antiphase by the coupling structure (40) and / or are coupled in single antiphase coupling and / or are coupled in double antiphase coupling and / or are coupled in such a way that they have at least one symmetric and at least one antisymmetric vibration mode.

5. Micromechanical gyroscope (100) according to claim 4, characterized in that the first partial oscillator (31) is connected to the second partial oscillator (32) via at least one of the deflection structures (50).

6. Micromechanical gyroscope (100) according to one of claims 4 or 5, characterized in that at least one of the deflection structures (50) is formed at the upper edge of the sensor structure (10) and / or at the lower edge of the sensor structure (10) and / or at least one of the deflection structures (50) has first substructures (51), wherein the first substructures (51) differ from each other or from the first leg (61) or from the second leg (62) at least partially with respect to their masses and / or with respect to their dimensions and / or with respect to their lengths.

7. Micromechanical angular rate sensor (100) according to one of claims 4 or 5, characterized in that the deflection structures (50) are identical with respect to their masses and / or their dimensions and / or their lengths.

8. Micromechanical gyroscope (100) according to one of claims 4 to 7, characterized in that at least one of the deflection structures (50) has second substructures (52), wherein the second substructures (52) are connected by at least one connecting structure (53).

9. Micromechanical gyroscope (100) according to claim 8, characterized in that at least one connecting structure (53) is in the form of a simple U-shaped loop and / or in the form of multiple U-shaped loops and / or in the form of one or more circular loops and / or in the form of a simple beam.

10. Micromechanical rotation rate sensor (100) according to one of claims 4 to 9, characterized in that the coupling structure (40) has at least one substrate connection (21) having at least one suspension point on the sensor substrate.

11. Micromechanical gyroscope (100) according to claim 10, characterized in that the at least one substrate connection (21) is provided as a connection between a deflection arm (60) and the sensor substrate and / or in particular as a connection between a rocker (70) and the sensor substrate and / or as a connection between at least one of the deflection structures (50) and the sensor substrate.

12. Micromechanical angular rate sensor (100) according to claim 11, characterized in that the at least one substrate connection (21) has at least one spring arrangement (22) formed substantially parallel to the first leg (61) and / or at least one spring arrangement (23) formed substantially parallel to the second leg (62) and / or at least one spring arrangement (24) formed at an angle between 0° and 90° to the first leg (61) or to the second leg (62).

13. Micromechanical angular rate sensor (100) according to claim 12, characterized in that at least one of the deflection structures (50) has third substructures (54), wherein the at least one substrate connection (21) is formed within the third substructures (54) or within the first leg (61) and / or within the second leg (62) and / or the at least one substrate connection (21) is located on a first side of the coupling structure (40) facing away from the sensor structure (10).

14. Micromechanical angular rate sensor (100) according to claim 11, characterized in that the at least one substrate connection (21) is located in a corner of the deflection arm (60) on the side of the deflection arm facing the sensor structure (10). (60) is formed and / or is formed in a corner of the deflection arm (60) on the side of the deflection arm (60) facing away from the sensor structure (10), wherein the at least one substrate connection (21) has at least one spring structure, in particular a meandering spring structure, wherein in particular the at least one spring structure has two spring legs arranged substantially at right angles to each other.

15. Micromechanical angular rate sensor (100) according to one of the preceding claims, characterized in that at least one deflection structure (50) is connected to the substrate by a phi spring arrangement (27).

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