Vertical heat treatment apparatus

Abstract

The present invention provides a vertical heat treatment apparatus, comprising a vertical furnace, a temporary-storage cooling part, and a sectioned feeding and discharging structure, wherein the sectioned feeding and discharging structure is provided with a first-section conveying device and a second-section conveying device, the first-section conveying device being located below the vertical furnace and being configured to convey a vertical boat into or out of the vertical furnace, and the second-section conveying device being configured to drive the vertical boat to transfer between the temporary-storage cooling part and the first-section conveying device. The sectioned feeding and discharging structure is arranged in the vertical heat treatment apparatus, thereby avoiding the problem of an excessively long stroke of feeding and discharging directly performed by a single conveying device, resulting in a relatively short conveying stroke of each section of the conveying device such that operations can be completed within a relatively short time, thus lowering requirements for strength, reducing deformation, and facilitating an increase in the utilization rate of the space of the apparatus.

Description

Vertical heat treatment equipment TECHNICAL FIELD

[0001] The present application belongs to the field of solar photovoltaic cell production equipment, more specifically, it relates to a vertical heat treatment equipment. BACKGROUND

[0002] With the increasing demand for renewable energy worldwide, the solar photovoltaic industry has developed rapidly. Among them, the vertical furnace body equipment can realize specific film coating, diffusion, oxidation and thin film deposition processes on silicon wafers.

[0003] In the existing vertical furnace body, a single transmission device is usually used to directly drive the vertical boat for transmission and hoisting. For example, in patent document CN114203611 A, a quartz boat taking and placing device is used to drive the quartz boat to transfer between the buffer rack, the reaction chamber and the boat turning device. Specifically, the quartz boat taking and placing device includes a moving rail assembly, a mechanical hand and a clamping assembly. The clamping assembly is connected with the mechanical hand, and the mechanical hand is installed on the moving rail assembly. The moving rail assembly is used to drive the mechanical hand to move back and forth along the moving rail assembly to realize the transfer of the quartz boat between the buffer rack, the reaction chamber and the boat turning device. The clamping assembly is used to clamp the quartz boat. This way, the transmission stroke is long, which causes the device to deform for a long time of bearing operation, and the long stroke also requires a high space for the equipment, which brings great inconvenience to the operation and maintenance of the workers. SUMMARY

[0004] The purpose of the present application is to provide a vertical heat treatment equipment, which realizes segmented feeding and discharging, and the transmission stroke of each segment of the transmission device is shorter, so that the work can be completed in a shorter time, the requirement for strength is reduced, the deformation is reduced, and the utilization rate of the equipment space is improved.

[0005] To achieve the above purpose, the technical solution adopted by the present application is:

[0006] A vertical heat treatment equipment is provided, characterized in that it comprises a vertical furnace body, a temporary storage and cooling part, and a segmented feeding and discharging structure; wherein the segmented feeding and discharging structure has a first segment transmission device and a second segment transmission device.

[0007] The first segment transmission device is located below the vertical furnace body and is used to send the vertical boat into or out of the vertical furnace body.

[0008] The second segment transmission device is used to drive the vertical boat to transfer between the temporary storage and cooling part and the first segment transmission device.

[0009] Further, the first segment transmission device comprises:

[0010] A first horizontal guide rail is arranged below the vertical furnace body, and one end of the first horizontal guide rail is located in the boat transfer area between the first conveying device and the second conveying device;

[0011] A first support member is slidingly arranged on the first horizontal guide rail and used for supporting the vertical boat;

[0012] A first driving member is used for driving the first support member to move on the first horizontal guide rail;

[0013] A jacking moving member is connected to the first horizontal guide rail and used for driving the first horizontal guide rail and the first support member to move in the vertical direction so as to send the vertical boat into or out of the vertical furnace body.

[0014] Further, the second conveying device comprises:

[0015] A first lifting guide rail is arranged on one side of the vertical furnace body, and one end of the first lifting guide rail is located in the boat transfer area between the second conveying device and the first conveying device;

[0016] A first mechanical hand structure is slidingly arranged on the first lifting guide rail, and the first mechanical hand structure has a first hanging and picking member and a horizontal moving member, the first hanging and picking member is arranged on the horizontal moving member and used for hanging and picking the vertical boat, and the horizontal moving member is used for driving the first hanging and picking member to move in the horizontal direction so as to send the vertical boat into or out of the temporary cooling part;

[0017] A second driving member is used for driving the first mechanical hand structure to move on the first lifting guide rail.

[0018] Further, the first conveying device comprises:

[0019] A second mechanical hand structure has a first level conveying member and a second level conveying member arranged vertically, the boat conveying path of the first level conveying member in the vertical direction at least partially overlaps the boat conveying path of the second level conveying member, and the first level conveying member and the second level conveying member cooperate to segmentally convey the vertical boat in the vertical direction so as to send the vertical boat into or out of the vertical furnace body;

[0020] A moving platform is connected to the second level conveying member and used for driving the second level conveying member to move in the horizontal direction so as to transfer the vertical boat between the second level conveying member and the second conveying device.

[0021] Further, the first level conveying member comprises:

[0022] A second lifting guide rail is arranged below the vertical furnace body and on one side of the second level conveying member;

[0023] a lifting support frame slidingly arranged on the second lifting rail;

[0024] a second horizontal rail arranged on the lifting support frame;

[0025] a second support member slidingly arranged on the second horizontal rail for supporting a vertical boat;

[0026] a third driving member for driving the lifting support frame to move on the second lifting rail to send a vertical boat into or out of the vertical furnace body;

[0027] a fourth driving member for driving the second support member to move on the second horizontal rail to receive or transfer a vertical boat on the second stage transfer member.

[0028] Further, the second stage transfer member comprises:

[0029] a third lifting rail arranged below the vertical furnace body and vertically lower than the second lifting rail;

[0030] a second hanging member slidingly arranged on the third lifting rail for hanging a vertical boat;

[0031] a fifth driving member for driving the second hanging member to move on the third lifting rail.

[0032] Further, the second stage transfer device comprises an in-boat transfer channel and an out-boat transfer channel arranged side by side and opposite to each other, and part of the transfer paths of the in-boat transfer channel and the out-boat transfer channel correspond to the temporary cooling part;

[0033] the moving platform is arranged between the in-boat transfer channel and the out-boat transfer channel for driving the second stage transfer member to move horizontally to transfer a vertical boat between the second stage transfer member, the in-boat transfer channel and the out-boat transfer channel.

[0034] Further, the vertical furnace body comprises an outer furnace body, an inner furnace body and a lower furnace door which jointly form a heating chamber, and a boat support frame for hanging a plurality of vertical boats is arranged in the heating chamber.

[0035] Further, the vertical furnace body further comprises a rotating chuck and a sixth driving member arranged on the lower furnace door respectively, and the sixth driving member is connected to the rotating chuck for driving the vertical furnace body to rotate as a whole so that part of the hanging positions on the boat support frame correspond to the first stage transfer device.

[0036] Further, the segmented feeding and discharging structure conveys two vertical boats at a time.

[0037] Compared with the prior art, the vertical heat treatment equipment provided by the application has the beneficial effect that the segmented feeding and discharging structure is arranged in the vertical heat treatment equipment, the problem of too long stroke caused by directly feeding and discharging by a single conveying device is avoided, the stroke of each segment of the conveying device is short, the work can be completed in a short time, the requirement for strength is reduced, deformation is reduced, and the utilization rate of the equipment space is improved. BRIEF DESCRIPTION OF DRAWINGS

[0038] In order to more clearly illustrate the technical solutions in the embodiments of the application, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the application, and other drawings can be obtained by those skilled in the art without creative labor.

[0039] Fig. 1 is a front view of the vertical heat treatment equipment provided by the embodiment one of the application;

[0040] Fig. 2 is a top view of the vertical heat treatment equipment provided by the embodiment one of the application;

[0041] Fig. 3 is a left view of the vertical heat treatment equipment provided by the embodiment one of the application;

[0042] Fig. 4 is a sectional view of the vertical furnace body provided by the embodiment one of the application;

[0043] Fig. 5 is a top view of the vertical heat treatment equipment provided by the embodiment two of the application;

[0044] Fig. 6 is a sectional view of A-A in Fig. 5;

[0045] Fig. 7 is a top view of the belt conveying mechanism and the temporary storage cooling part provided by the embodiment two of the application;

[0046] Fig. 8 is a sectional view of the first segment of the conveying device provided by the embodiment two of the application;

[0047] Fig. 9 is a sectional view of the vertical furnace body provided by the embodiment two of the application;

[0048] In the drawings, the main marks are as follows:

[0049] 1, vertical furnace body; 2, temporary storage cooling part; 3, first segment of the conveying device; 4, second segment of the conveying device; 5, vertical boat; 6, insert piece mechanism;

[0050] 11, outer furnace body; 12, inner furnace body; 13, lower furnace door; 14, rotating chuck; 15, seventh driving part;

[0051] 31, first horizontal guide rail; 32, first support member;

[0052] 41, first lifting guide rail; 42, first robot structure;

[0053] 421, first hooking member; 4211, first hook; 422, horizontal moving member;

[0054] 35, first stage transmission member; 36, second stage transmission member;

[0055] 351, second lifting guide rail; 352, lifting support frame; 353, second horizontal guide rail; 354, second support member; 3541, hanging frame; 3542, hook;

[0056] 361, third lifting guide rail; 362, second hooking member; 3621, second hook;

[0057] 47, in-boat transmission channel; 48, out-boat transmission channel;

[0058] 471, belt transmission mechanism;

[0059] 51, second boat support frame. DETAILED DESCRIPTION

[0060] In order to make the technical problems to be solved by the present application, technical solutions and beneficial effects more clear and explicit, the present application will be further described in detail below in combination with the drawings and examples. It should be understood that the specific examples described herein are only used to explain the present application and do not limit the present application.

[0061] With the increasing demand for renewable energy worldwide, the solar photovoltaic industry has developed rapidly. The current diffusion, oxidation, annealing, doping, PECVD, LPCVD and other processes in the photovoltaic industry are usually produced by using vertical furnace equipment. The silicon wafer is loaded into a specific carrier (for example, a vertical boat) and transmitted into the reaction cavity for process. At this time, the specific reaction gas is introduced to realize the specific film plating, diffusion, oxidation and thin film deposition process of the silicon wafer. In the existing vertical furnace equipment, a single transmission device is usually used to directly drive the vertical boat for transmission and hoisting. This way has a long transmission stroke, which causes the device to deform for a long time of bearing operation, and the long stroke also has a high requirement for the space of the equipment, which brings great inconvenience to the operation and maintenance of the workers.

[0062] To solve the above problems, the present application provides a novel vertical heat treatment equipment, which realizes segmented feeding and discharging, the transmission stroke of each transmission device is shorter, which can complete the operation in a shorter time, reduces the requirement for strength and reduces deformation, and is also beneficial to improve the utilization rate of equipment space. Example one:

[0063] Please refer to FIG. 1 to FIG. 4, the vertical heat treatment equipment provided by the embodiment mainly comprises a vertical furnace body 1, a temporary storage cooling part 2 and a segmented feeding and discharging structure. The segmented feeding and discharging structure is used to transfer the vertical boat 5 between the vertical furnace body 1 and the temporary storage cooling part 2. In addition, the vertical heat treatment equipment also comprises electrical elements such as pumps and the like.

[0064] As shown in FIG. 3, a plurality of vertical furnace bodies 1 are arranged at the upper left part of the whole machine, and the temporary storage cooling part 2 is arranged at the rightmost side of the whole machine. The temporary storage cooling part 2 has a plurality of boat storage positions.

[0065] It should be understood that the number of vertical furnace bodies 1 and the number of boat storage positions in the temporary storage cooling part 2 can be flexibly set according to actual needs. As an example, there are 3 vertical furnace bodies 1 in the vertical heat treatment equipment, and there are 24 boat storage positions in the temporary storage cooling part 2, which are divided into two rows.

[0066] It should also be understood that the segmented feeding and discharging structure corresponds to the vertical furnace body 1 one by one. Hereinafter, one vertical furnace body 1 and one corresponding segmented feeding and discharging structure will be taken as an example for detailed description.

[0067] As shown in FIG. 2 and FIG. 3, the segmented feeding and discharging structure has a first segment transmission device 3 and a second segment transmission device 4. The first segment transmission device 3 is located below the vertical furnace body 1 and is used to send the vertical boat 5 into or out of the vertical furnace body 1; the second segment transmission device 4 is used to drive the vertical boat 5 to transfer between the temporary storage cooling part 2 and the first segment transmission device 3.

[0068] It should be understood that the second segment transmission device 4 cooperates with the first segment transmission device 3 to realize the segmented transmission of the vertical boat 5. Hereinafter, the position at which the second segment transmission device 4 and the first segment transmission device 3 cooperate to transfer the vertical boat 5 will be referred to as the boat transfer area.

[0069] As shown in FIG. 3, the first segment transmission device 3 at least comprises a first horizontal guide rail 31, a first support component 32, a first driving component and a jacking moving component.

[0070] The first horizontal guide rail 31 is located below the vertical furnace body 1, and one end of the first horizontal guide rail 31 is located in the boat transfer area; the first support component 32 is slidingly arranged on the first horizontal guide rail 31 and is used to support the vertical boat 5; the first driving component is used to drive the first support component 32 to move on the first horizontal guide rail 31; and the jacking moving component is connected to the first horizontal guide rail 31 and is used to drive the first horizontal guide rail 31 and the first support component 32 to move along the vertical direction to send the vertical boat 5 into or out of the vertical furnace body 1.

[0071] The first driving part in the first transmission device 3 can be driven by a motor or a cylinder, and can drive the first supporting part 32 to move left and right along the first horizontal guide rail 31.

[0072] The jacking moving part in the first transmission device 3 can be driven by a motor or a cylinder, and can drive the first horizontal guide rail 31 and the first supporting part 32 thereon to move up and down along the vertical direction.

[0073] The first supporting part 32 in the first transmission device 3 can be a supporting frame, which can reduce the weight while ensuring sufficient bearing capacity, and the number of the first supporting part 32 is preferably two.

[0074] As shown in FIG. 3, the second transmission device 4 comprises at least a first lifting guide rail 41, a first mechanical hand structure 42, and a second driving part.

[0075] The first lifting guide rail 41 is located on one side of the vertical furnace body 1, one end of the first lifting guide rail 41 is located in the boat transfer area; the first mechanical hand structure 42 is slidingly arranged on the first lifting guide rail 41; and the second driving part is used to drive the first mechanical hand structure 42 to move on the first lifting guide rail 41.

[0076] The second driving part in the second transmission device 4 can be driven by a motor or a cylinder, and can drive the first mechanical hand structure 42 to move up and down along the first lifting guide rail 41.

[0077] The first mechanical hand structure 42 in the second transmission device 4 comprises a first hanging and taking part 421 and a horizontal moving part 422, the first hanging and taking part 421 is arranged on the horizontal moving part 422 and is used to hang and take the vertical boat 5, and the horizontal moving part 422 is used to drive the first hanging and taking part 421 to move along the horizontal direction to send the vertical boat 5 into or out of the temporary cooling part 2.

[0078] The number of the first hanging and taking part 421 in the first mechanical hand structure 42 is two, and the two first hanging and taking parts 421 are symmetrically arranged on both sides of the horizontal moving part 422, so that two vertical boats 5 are conveyed at a time. The horizontal moving part 422 can be a belt transmission structure, and the first hanging and taking part 421 has a first hook 4211 that can be opened and closed, so as to support or separate from the vertical boat 5. It can be understood that, if the first mechanical hand structure 42 conveys two vertical boats 5 at a time, two first transmission devices 3 are arranged, and the two first transmission devices 3 are arranged side by side and work synchronously.

[0079] In the embodiment, the cross-sectional profile of the vertical boat 5 can be square or rectangular. When the cross-sectional profile of the vertical boat 5 is rectangular and the placing direction of the vertical boat 5 in the temporary storage cooling part 2 is inconsistent with the placing direction of the vertical boat 5 in the vertical furnace body 1, the segmented feeding and discharging structure further comprises a boat rotating device for rotating the vertical boat 5 by 90 degrees. After the vertical boat 5 is rotated by the boat rotating device, the vertical boat 5 is conveyed to the second segment transmission device 4 or placed in the temporary storage cooling part 2, so as to ensure that the vertical boat 5 is smoothly put into the vertical furnace body 1 or the temporary storage cooling part 2.

[0080] As shown in FIG. 4, the vertical furnace body 1 comprises an outer furnace body 11, an inner furnace body 12 and a lower furnace door 13 which jointly form a heating chamber.

[0081] The outer furnace body 11 is closed at the upper end and open at the lower end, the inner furnace body 12 is open at the upper end and closed at the lower end, and the lower furnace door 13 is detachably arranged at the lower end of the outer furnace body 11. The outer furnace body 11 and the inner furnace body 12 are provided with a heating source, which can be a heating wire, an infrared lamp tube or an electromagnetic induction heating device.

[0082] The heating chamber is provided with a first support frame for hanging a plurality of vertical boats 5, and the first support frame is sleeved outside the inner furnace body 12. The first support frame is annularly provided with a plurality of hanging positions, and each hanging position is connected to a clamping piece on a vertical boat 5 through clamping.

[0083] The vertical furnace body 1 further comprises a rotating chuck 14 and a sixth driving part. The rotating chuck 14 is arranged on the lower furnace door 13, and the sixth driving part is connected to the rotating chuck 14. The sixth driving part is used to drive the rotating chuck 14 to rotate, so that the vertical furnace body 1 as a whole rotates, thereby making part of the hanging positions on the first support frame correspond to the first segment transmission device 3. This facilitates the transfer of the vertical boat 5 between the vertical furnace body 1 and the first segment transmission device 3, and improves the conveying efficiency. The rotating chuck 14 can also be provided with a guide plate, which can make the rotating direction of the rotating chuck more stable and consistent.

[0084] In the vertical heat treatment equipment provided in the embodiment, the segmented feeding and discharging structure is arranged, which avoids the problem of too long stroke of direct feeding and discharging by a single transmission device. The transmission stroke of each segment transmission device is relatively short, so that the work can be completed in a short time, the requirement for strength is reduced, the deformation is reduced, and the utilization rate of equipment space is improved. Embodiment two:

[0085] Please refer to FIG. 5, the vertical heat treatment equipment provided in the embodiment mainly comprises a vertical furnace body 1, a temporary storage cooling part 2 and a segmented feeding and discharging structure. The segmented feeding and discharging structure is used to transfer the vertical boat 5 between the vertical furnace body 1 and the temporary storage cooling part 2. In addition, the vertical heat treatment equipment further comprises electrical elements such as a pump.

[0086] As shown in FIG. 6, a plurality of vertical furnace bodies 1 are arranged at the upper right part of the whole machine, and a temporary storage and cooling part 2 is arranged at the lower left part and / or the upper left part of the whole machine, and the temporary storage and cooling part 2 has a plurality of boat storage positions.

[0087] It should be understood that the number of vertical furnace bodies 1 and the number of boat storage positions in the temporary storage and cooling part 2 can be flexibly set according to actual needs. As an example, there are 2 vertical furnace bodies 1 in the vertical heat treatment equipment, and the number of boat storage positions in the temporary storage and cooling part 2 is a multiple of 6.

[0088] It should also be understood that although there are multiple vertical furnace bodies 1, a segmented feeding and discharging structure is shared.

[0089] As shown in FIGS. 6 and 7, the segmented feeding and discharging structure has a first segment transmission device 3 and a second segment transmission device 4. The first segment transmission device 3 is located below the vertical furnace body 1 and is used to send the vertical boat 5 into or out of the vertical furnace body 1; the second segment transmission device 4 is used to transfer the vertical boat 5 between the temporary storage and cooling part 2 and the first segment transmission device 3.

[0090] As shown in FIG. 8, the first segment transmission device 3 at least includes a second mechanical hand structure and a moving platform.

[0091] The second mechanical hand structure has a first level transmission component 35 and a second level transmission component 36 arranged vertically, the boat transmission path of the first level transmission component 35 at least partially overlaps the boat transmission path of the second level transmission component 36 in the vertical direction, and the first level transmission component 35 and the second level transmission component 36 cooperate to segmentally convey the vertical boat 5 in the vertical direction to send the vertical boat 5 into or out of the vertical furnace body 1.

[0092] The moving platform is connected to the second level transmission component 36 and is used to move the second level transmission component 36 in the horizontal direction to transfer the vertical boat 5 between the second level transmission component 36 and the second segment transmission device 4.

[0093] The embodiment decomposes the entire stroke of the first segment transmission device 3 into multiple short strokes, while making the entire space design more compact, thereby improving the conveying efficiency and improving the utilization of the equipment space.

[0094] As shown in FIG. 8, the number of first level transmission components 35 in the first segment transmission device 3 is two, and the number of second level transmission components 36 is one, and the two first level transmission components 35 are symmetrically arranged on both sides of the second level transmission component 36, realizing the transmission of two vertical boats 5 at a time.

[0095] The first stage transmission component 35 at least comprises a second lifting rail 351, a lifting support frame 352, a second horizontal rail 353, a second support component 354, a third driving component and a fourth driving component.

[0096] The second lifting rail 351 is arranged below the vertical furnace body 1 and at one side of the second stage transmission component 36; the lifting support frame 352 is slidingly arranged on the second lifting rail 351; the second horizontal rail 353 is arranged on the lifting support frame 352; the second support component 354 is slidingly arranged on the second horizontal rail 353 and used for supporting the vertical boat 5; the third driving component is used for driving the lifting support frame 352 to move on the second lifting rail 351 so as to send the vertical boat 5 into or out of the vertical furnace body 1; and the fourth driving component is used for driving the second support component 354 to move on the second horizontal rail 353 so as to receive the vertical boat 5 on the second stage transmission component 36 or transfer the vertical boat 5 to the second stage transmission component 36.

[0097] In the first stage transmission component 35, the third driving component can adopt a motor driving mode or a cylinder driving mode and can drive the lifting support frame 352 to move up and down along the second lifting rail 351.

[0098] In the first stage transmission component 35, the fourth driving component can adopt a motor driving mode or a cylinder driving mode and can drive the second support component 354 to move left and right along the second horizontal rail 353.

[0099] In the first stage transmission component 35, the second support component 354 has a bottom base and a hanging frame 3541 vertically arranged on the bottom base, and a plurality of hooks 3542 for hanging one vertical boat 5 are arranged on the hanging frame 3541.

[0100] As shown in FIG. 8, the second stage transmission component 36 at least comprises a third lifting rail 361, a second hooking component 362 and a fifth driving component.

[0101] The third lifting rail 361 is arranged below the vertical furnace body 1 and vertically lower than the second lifting rail 351; the second hooking component 362 is slidingly arranged on the third lifting rail 361 and used for hooking the vertical boat 5; and the fifth driving component is used for driving the second hooking component 362 to move on the third lifting rail 361.

[0102] In the second stage transmission component 36, the fifth driving component can adopt a linear motor assembly, and the second hooking component 362 is installed on a sliding block in the linear motor assembly.

[0103] The second hanging component 362 of the second stage transmission component 36 includes two second hooks 3621 arranged symmetrically. Taking one hook as an example, the side of the hook is provided with a clamping groove for cooperating with the clamping piece on the vertical boat 5, and the lower end of the hook is provided with a support extension for supporting the bottom of the vertical boat 5.

[0104] As shown in FIGS. 5 and 7, the second stage transmission device 4 includes an in-boat transmission channel 47 and an out-boat transmission channel 48 arranged side by side and opposite to each other, and part of the transmission paths of the in-boat transmission channel 47 and the out-boat transmission channel 48 correspond to the temporary storage and cooling part 2.

[0105] It should be understood that the in-boat transmission channel 47 and the out-boat transmission channel 48 are provided with a belt transmission mechanism 471 for conveying the vertical boat 5.

[0106] The vertical heat treatment equipment also includes a plug-in piece mechanism 6 arranged at the leftmost side of the whole machine, which can directly place the vertical boat 5 after the plug-in piece is completed on the belt transmission mechanism 471 in the in-boat transmission channel 47 and convey it to the designated position through the belt transmission mechanism 471.

[0107] It should also be understood that the moving platform in the first stage transmission device 3 is arranged between the in-boat transmission channel 47 and the out-boat transmission channel 48, which is used to drive the second stage transmission component 36 to move in the horizontal direction, so as to transfer the vertical boat 5 between the second stage transmission component 36, the in-boat transmission channel 47 and the out-boat transmission channel 48. The moving platform can drive the second stage transmission component 36 to move in the form of motor or air cylinder driving.

[0108] In order to better understand the second stage transmission device 4 provided by the present embodiment, further elaboration is made as follows:

[0109] The second stage transmission device 4 includes the in-boat transmission channel 47 and the out-boat transmission channel 48, and the inlet of the in-boat transmission channel 47 and the outlet of the out-boat transmission channel 48 are located at the same side of the whole machine. Although the conveying directions of the in-boat transmission channel 47 and the out-boat transmission channel 48 are opposite, the same structure of the belt transmission mechanism 471 is adopted to convey the vertical boat 5.

[0110] Taking the belt transmission mechanism 471 in the in-boat transmission channel 47 as an example, the belt transmission mechanism 471 includes a first conveying belt, a second conveying belt and a third conveying belt connected in sequence. The first conveying belt corresponds to the temporary storage and cooling part 2, and the second conveying belt and the third conveying belt correspond to one vertical furnace body 1 respectively. The start or stop of the first conveying belt, the second conveying belt and the third conveying belt can be controlled independently.

[0111] In actual application, the vertical boats 5 are transported in groups, and each group of the vertical boats 5 can be composed of 6 vertical boats 5. By synchronously starting the first conveying belt, the second conveying belt and the third conveying belt, a group of the vertical boats 5 is first conveyed to the third conveying belt, the third conveying belt is stopped, then a group of the vertical boats 5 is conveyed to the second conveying belt, and the second conveying belt and the first conveying belt are stopped. In the process of conveying 2 vertical boats 5 into the vertical furnace body 1 by the first conveying device 3 each time, if 2 vertical boats 5 have been taken away by the second conveying device 36 this time, the second conveying belt or the third conveying belt is controlled to move a preset distance, so that the second conveying device 36 can pick up the vertical boats 5 next time.

[0112] Of course, additional boat conveying devices can also be provided to transfer the vertical boats 5 stored in the temporary cooling part 2 to the boat-in conveying passage 47, and to transfer the vertical boats 5 in the boat-out conveying passage 48 to the temporary cooling part 2.

[0113] As shown in FIG. 9, the vertical furnace body 1 includes an outer furnace body 11, an inner furnace body 12 and a lower furnace door 13 which jointly form a heating chamber.

[0114] The outer furnace body 11 is closed at the upper end and open at the lower end, the inner furnace body 12 is open at the upper end and closed at the lower end, and the lower furnace door 13 is detachably arranged at the lower end of the outer furnace body 11. Heating sources are arranged on the outer furnace body 11 and the inner furnace body 12, which can be heating wires, infrared lamp tubes or electromagnetic induction heating sources.

[0115] The heating chamber is provided with a second boat support frame 51 for hanging a plurality of vertical boats 5, and the second boat support frame 51 is arranged outside the inner furnace body 12. The second boat support frame 51 is annularly provided with a plurality of hanging positions, and each hanging position is connected to a clamping piece on a vertical boat 5.

[0116] The vertical furnace body 1 further includes a seventh driving part 15 arranged on the lower furnace door 13 and connected to the second boat support frame 51. The seventh driving part 15 drives the second boat support frame 51 to rotate, so that the silicon wafers carried by the vertical boats 5 are uniformly heated. The seventh driving part 15 also adopts a magnetic fluid seal to ensure the sealing of the vertical furnace body 1 and drive the second boat support frame 51 and the vertical boats 5 thereon to rotate.

[0117] In the vertical heat treatment equipment provided in the embodiment, the segmented feeding and discharging structure is arranged, which avoids the problem of too long stroke of direct feeding and discharging by a single conveying device, so that the conveying stroke of each segment of the conveying device is shorter, the work can be completed in a shorter time, the requirement for strength is reduced, the deformation is reduced, and the utilization rate of the equipment space is improved.

[0118] The above merely describes preferred embodiments of the present application, and is not used to limit the present application, any modification, equivalent replacement and improvement within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims

1. A vertical heat treatment apparatus, characterized by, The vertical furnace body, the temporary storage cooling part and the segmented feeding and discharging structure; wherein the segmented feeding and discharging structure has a first segment transmission device and a second segment transmission device; The first segment transmission device is located below the vertical furnace body and is used for feeding or discharging the vertical boat into or out of the vertical furnace body; The second segment transmission device is used for transferring the vertical boat between the temporary storage cooling part and the first segment transmission device. The first segment transmission device comprises:

2. The vertical heat treatment apparatus according to claim 1, wherein A first horizontal guide rail located below the vertical furnace body, one end of the first horizontal guide rail being located in the boat transfer area between the first segment transmission device and the second segment transmission device; A first support component slidingly arranged on the first horizontal guide rail and used for supporting the vertical boat; A first driving component used for driving the first support component to move on the first horizontal guide rail; A jacking moving component connected to the first horizontal guide rail and used for driving the first horizontal guide rail and the first support component to move in the vertical direction to feed or discharge the vertical boat into or out of the vertical furnace body. The second segment transmission device comprises:

3. The vertical heat treatment apparatus according to claim 1 or 2, wherein A first lifting guide rail located on one side of the vertical furnace body, one end of the first lifting guide rail being located in the boat transfer area between the second segment transmission device and the first segment transmission device; A first mechanical hand structure slidingly arranged on the first lifting guide rail, the first mechanical hand structure having a first hanging component and a horizontal moving component, the first hanging component being arranged on the horizontal moving component and being used for hanging the vertical boat, the horizontal moving component being used for driving the first hanging component to move in the horizontal direction to feed or discharge the vertical boat into or out of the temporary storage cooling part; A second driving component used for driving the first mechanical hand structure to move on the first lifting guide rail. The first segment transmission device comprises:

4. The vertical heat treatment apparatus according to claim 1, wherein A second mechanical hand structure having a first level transmission component and a second level transmission component arranged vertically, the boat transmission path of the first level transmission component at least partially overlapping the boat transmission path of the second level transmission component in the vertical direction, and the first level transmission component and the second level transmission component cooperating to segmentally convey the vertical boat in the vertical direction to feed or discharge the vertical boat into or out of the vertical furnace body; A moving platform connected to the second level transmission component and used for driving the second level transmission component to move in the horizontal direction to transfer the vertical boat between the second level transmission component and the second segment transmission device. The first level transmission component comprises:

5. The vertical heat treatment apparatus according to claim 4, wherein A second lifting guide rail arranged below the vertical furnace body and located on one side of the second level transmission component; A lifting support frame slidingly arranged on the second lifting guide rail; A second horizontal guide rail arranged on the lifting support frame; A second support component slidingly arranged on the second horizontal guide rail and used for supporting the vertical boat; A third driving component used for driving the lifting support frame to move on the second lifting guide rail to feed or discharge the vertical boat into or out of the vertical furnace body; A fourth driving component used for driving the second support component to move on the second horizontal guide rail to receive the vertical boat on the second level transmission component or transfer the vertical boat to the second level transmission component. ​ 6. The vertical heat treatment apparatus according to claim 5, wherein The second stage conveying component comprises: A third lifting rail is arranged below the vertical furnace body and is lower than the second lifting rail in the vertical direction; A second hanging and taking component is slidingly arranged on the third lifting rail and is used for hanging and taking the vertical boat; A fifth driving component is used for driving the second hanging and taking component to move on the third lifting rail.

7. Vertical heat treatment apparatus according to any of claims 4-6, characterized in that The second stage conveying component comprises an in-boat conveying channel and an out-boat conveying channel arranged side by side and opposite to each other, and part of the conveying paths of the in-boat conveying channel and the out-boat conveying channel correspond to the temporary cooling part; The moving platform is arranged between the in-boat conveying channel and the out-boat conveying channel and is used for driving the second stage conveying component to move in the horizontal direction to transfer the vertical boat between the second stage conveying component, the in-boat conveying channel and the out-boat conveying channel.

8. The vertical heat treatment apparatus as claimed in claim 1, wherein The vertical furnace body comprises an outer furnace body, an inner furnace body and a lower furnace door which jointly form a heating chamber, and a boat support frame for hanging a plurality of vertical boats is arranged in the heating chamber.

9. The vertical heat treatment apparatus according to claim 8, wherein The vertical furnace body further comprises a rotating chuck and a sixth driving component arranged on the lower furnace door respectively, the sixth driving component is connected to the rotating chuck and is used for driving the whole vertical furnace body to rotate, so that part of the hanging positions on the boat support frame correspond to the first stage conveying device.

10. The vertical heat treatment apparatus as claimed in claim 1, characterized in that, The segmented feeding and discharging structure conveys two vertical boats at a time.

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