Spin inductor

Abstract

This spin inductor comprises a first magnetic core, and a first inductor wiring line that is wound around the first magnetic core with a first direction being used as the axial direction thereof. The first inductor wiring line includes a first spin inductor wiring line, a second spin inductor wiring line, and a first connection wiring line. The first spin inductor wiring line and the second spin inductor wiring line are located at positions between which the first magnetic core is sandwiched in a second direction that is orthogonal to the first direction. The first connection wiring line connects the first spin inductor wiring line and the second spin inductor wiring line to each other. The first spin inductor wiring line comprises a first wiring layer and a first ferromagnetic layer that is in contact with the first wiring layer. The second spin inductor wiring line comprises a second wiring layer and a second ferromagnetic layer that is in contact with the second wiring layer.

Description

Spin inductor

[0001] The present disclosure relates to spin inductors.

[0002] Inductors, along with resistors and capacitors, are major electronic components used in a variety of electronic devices. A coil is one example of an inductor. There is a trade-off between the size of a coil and the magnitude of its inductance, and it is difficult to achieve large inductance with a small coil.

[0003] In recent years, attention has been focused on new types of inductors that do not use coils. New types of inductors that do not use coils are sometimes called emergent inductors. For example, Patent Document 1, Non-Patent Document 1, and Non-Patent Document 2 disclose new inductors that utilize spin vibrations (hereinafter referred to as spin inductors). Spin inductors have attracted attention because the smaller the element size, the stronger the inductance strength, making it possible to achieve both miniaturization and large inductance.

[0004] International Publication No. 2022 / 181069

[0005] Yuta Yamane, Shunsuke Fukami, and Junichi Ieda, Physical Review Letters 128,147201 (202).Yasufumi Araki and Jun'ichi Ieda, Journal of the Physical Society of Japan 92, 074705 (2023).

[0006] Spin inductors have a smaller inductance than coils, but also have a high resistance, making it difficult to achieve a high quality factor (Q).

[0007] The present disclosure has been made in view of the above circumstances, and aims to provide a spin inductor that can exhibit large inductance and achieve a high Q value.

[0008] To solve the above problems, the present disclosure provides the following means.

[0009] A spin inductor according to a first aspect includes a first structure. The first structure includes a first magnetic core and a first inductor wiring wound around the first magnetic core with a first direction as its axial direction. The first inductor wiring includes a first spin inductor wiring, a second spin inductor wiring, and a first connection wiring. The first spin inductor wiring and the second spin inductor wiring are positioned to sandwich the first magnetic core in a second direction orthogonal to the first direction. The first connection wiring connects the first spin inductor wiring and the second spin inductor wiring. The first spin inductor wiring includes a first wiring layer and a first ferromagnetic layer in contact with the first wiring layer. The second spin inductor wiring includes a second wiring layer and a second ferromagnetic layer in contact with the second wiring layer.

[0010] 1 is a perspective view of a spin inductor according to a first embodiment. FIG. 2 is a plan view of a spin inductor according to the first embodiment. FIG. 3 is a cross-sectional view of a first cross section of a spin inductor according to the first embodiment. FIG. 4 is a cross-sectional view of a second cross section of a spin inductor according to the first embodiment. FIG. 5 is a schematic view for explaining the function of a spin inductor according to the first embodiment. FIG. 6 is a schematic view for explaining the function of a spin inductor according to the first embodiment. FIG. 7 is a plan view of a spin inductor according to a third embodiment. FIG. 8 is a cross-sectional view of a first cross section of a spin inductor according to a fourth embodiment. FIG. 9 is a cross-sectional view of a second cross section of a spin inductor according to the fourth embodiment. FIG. 10 is a schematic view for explaining the function of a spin inductor according to the fourth embodiment. FIG. 11 is a cross-sectional view of a first cross section of a spin inductor according to a fifth embodiment. FIG. 12 is a schematic view for explaining the function of a spin inductor according to the fifth embodiment. FIG. 13 is a plan view of a spin inductor according to a sixth embodiment. FIG. 14 is a cross-sectional view of a spin inductor according to the sixth embodiment. FIG. 15 is a cross-sectional view of a spin inductor according to the sixth embodiment. FIG. 16 is a plan view of a spin inductor according to a seventh embodiment. FIG. 17 is a cross-sectional view of a spin inductor according to the seventh embodiment. FIG. 18 shows an example of use of the spin inductor according to the present embodiment.

[0011] The present embodiment will be described in detail below with reference to the accompanying drawings. The drawings used in the following description may show characteristic portions enlarged for ease of understanding, and the dimensional ratios of each component may differ from the actual ones. The materials, dimensions, etc. exemplified in the following description are merely examples, and the present disclosure is not limited thereto. Appropriate modifications can be made within the scope of the present disclosure.

[0012] First, the directions will be defined. One direction of the plane in which each layer extends is defined as the X direction, and the direction perpendicular to the X direction is defined as the Y direction. For example, the Y direction is the axial direction of the first magnetic core 10. The Y direction is an example of a first direction. The X direction is an example of a third direction. For example, the direction in which current flows in the first spin inductor wiring 21 is defined as the +X direction, and the opposite direction is defined as the −X direction. When it is not necessary to specify whether the X direction is positive or negative, it is simply defined as the X direction. The same applies to the other directions.

[0013] The direction perpendicular to the X and Y directions is defined as the Z direction. The Z direction is an example of the second direction. For example, the +Z direction is the direction from the first spin inductor wiring 21 to the second spin inductor wiring 22. In this specification, the +Z direction may be expressed as "up" and the -Z direction as "down," but these expressions are used for convenience and do not define the direction of gravity.

[0014] In this specification, "extending in the X direction" means, for example, that the dimension in the X direction is larger than the smallest dimension among the dimensions in the X direction, Y direction, and Z direction. The same applies to extending in other directions.

[0015] First Embodiment Fig. 1 is a perspective view of a spin inductor 1 according to a first embodiment. Fig. 2 is a plan view of the spin inductor 1 according to the first embodiment.

[0016] The spin inductor 1 cuts off the high-frequency components of the current and passes the constant components of the current. The current flows between the first end e1 and the second end e2. The spin inductor 1 is disposed in a location where it is desired to cut off the high-frequency current. The high-frequency current is cut off by the spin inductor 1, but direct current flows through the spin inductor 1. For direct current, the spin inductor 1 acts as a resistor.

[0017] The spin inductor 1 includes a first magnetic core 10 and a first inductor wiring 20. The spin inductor 1 is made up of a first structure including the first magnetic core 10 and the first inductor wiring 20.

[0018] The first magnetic core 10 extends in the Y direction, with the Y direction being the axial direction. The length of the first magnetic core 10 in the Y direction is longer than the lengths of the first magnetic core 10 in the X and Z directions.

[0019] The first magnetic core 10 includes a magnetic material, such as iron, nickel, cobalt, or ferrite.

[0020] The first inductor wiring 20 has its axial direction in the Y direction and is wound around the first magnetic core 10. When a current is passed along the first inductor wiring 20, the spin inductor 1 functions as an inductor.

[0021] The first inductor wiring 20 has a first spin inductor wiring 21, a second spin inductor wiring 22, a first connection wiring 23, and a second connection wiring 24. The first inductor wiring 20 may have a plurality of units U, each of which is made up of the first spin inductor wiring 21, the second spin inductor wiring 22, and the first connection wiring 23. Each of the plurality of units U is connected by the second connection wiring 24. For example, the first unit U1 and the second unit U2 are connected by the second connection wiring 24. Each of the first unit U1 and the second unit U2 is one of the plurality of units U.

[0022] The first spin inductor wiring 21 is located below the first magnetic core 10. The second spin inductor wiring 22 is located above the first magnetic core 10. The first spin inductor wiring 21 and the second spin inductor wiring 22 are located on either side of the first magnetic core 10 in the Z direction. When viewed from the Z direction, the position where the first spin inductor wiring 21 and the first magnetic core 10 overlap may be different from the position where the second spin inductor wiring 22 and the first magnetic core 10 overlap.

[0023] The first spin inductor wiring 21 extends in the X direction. For example, the length of the first spin inductor wiring 21 in the X direction is longer than the length of the first spin inductor wiring 21 in the Y direction. For example, the first spin inductor wiring 21 is perpendicular to the first magnetic core 10 when viewed from the Z direction.

[0024] The second spin inductor wiring 22 extends in the A direction. For example, the length of the second spin inductor wiring 22 in the A direction is longer than the lengths of the second spin inductor wiring 22 in other directions. The A direction is inclined with respect to the X direction and the Y direction in the XY plane.

[0025] The current flowing in the first spin inductor wire 21 flows, for example, in the +X direction. The current flowing in the second spin inductor wire 22 flows, for example, in the +A direction. The +A direction has a +Y direction component and a −X direction component. In the X direction, the direction of the current flowing in the first spin inductor wire 21 (for example, the +X direction) is opposite to the direction of the current flowing in the second spin inductor wire 22 (for example, the −X direction).

[0026] The first connection wiring 23 connects the first spin inductor wiring 21 and the second spin inductor wiring 22. The first connection wiring 23 connects, for example, the first spin inductor wiring 21 and the second spin inductor wiring 22 in the same unit U. The first connection wiring 23 extends, for example, in the Z direction. The first connection wiring 23 may be made of any material as long as it is conductive.

[0027] The second connection wiring 24 connects the first spin inductor wiring 21 and the second spin inductor wiring 22. The second connection wiring 24 connects, for example, the first spin inductor wiring 21 and the second spin inductor wiring 22 between different units U. For example, the second spin inductor wiring 22 of the first unit U1 and the first spin inductor wiring 21 of the second unit U2 are connected by the second connection wiring 24. The second connection wiring 24 extends, for example, in the Z direction. Any material may be used for the second connection wiring 24 as long as it is conductive.

[0028] For example, the current flows from the first end e1 to the second end e2 within the spin inductor 1. The current may also flow from the second end e2 to the first end e1 within the spin inductor 1. Even in this case, the direction of the current flowing through the first spin inductor wire 21 (for example, the −X direction) is opposite to the direction of the current flowing through the second spin inductor wire 22 (for example, the +X direction) in the X direction.

[0029] 3 and 4 are cross-sectional views of the spin inductor 1 according to the first embodiment.

[0030] Fig. 3 is a cross-sectional view of the first cross section of the spin inductor 1 taken along line A-A in Fig. 2. In Fig. 3, the second spin inductor wiring 22 on the left side of the paper is the second spin inductor wiring 22 of the first unit U1, and extends in the +X direction toward the front of the paper. In Fig. 3, the second spin inductor wiring 22 on the right side of the paper is the second spin inductor wiring 22 of the second unit U2, and extends in the -X direction toward the back of the paper.

[0031] 4 is a cross-sectional view of the second cross section of the spin inductor 1 taken along line B-B in FIG. 2. In FIG. 4, the first spin inductor wiring 21 on the left side of the paper is the first spin inductor wiring 21 of the second unit U2, and extends in the +X direction toward the back of the paper. In FIG. 4, the first spin inductor wiring 21 on the right side of the paper is the first spin inductor wiring 21 of the first unit U1, and extends in the -X direction toward the front of the paper.

[0032] As shown in Figures 3 and 4, the first magnetic core 10 and the first inductor wiring 20 are surrounded by an insulator 90. The first magnetic core 10 and the first inductor wiring 20 are insulated from each other by the insulator 90. The insulator 90 is an interlayer insulating film that provides insulation between wires in a multilayer wiring structure and between elements. The insulator 90 is made of, for example, silicon oxide (SiO ｘ ), silicon nitride (SiN ｘ ), silicon carbide (SiC), chromium nitride (CrN), silicon carbonitride (SiCN), silicon oxynitride (SiON), aluminum oxide (Al ２ O ３ ), zirconium oxide (ZrO ｘ ), magnesium oxide (MgO), aluminum nitride (AlN), etc.

[0033] The first spin inductor wiring 21 includes a first wiring layer 211 and a first ferromagnetic layer 212. The first ferromagnetic layer 212 is, for example, stacked on the first wiring layer 211. Furthermore, for example, the first ferromagnetic layer 212 may be in contact with the lower surface of the first wiring layer 211.

[0034] The first wiring layer 211 includes any one of a metal, an alloy, an intermetallic compound, a metal boride, a metal carbide, a metal silicide, and a metal phosphide, which have a function of generating a spin current by the spin Hall effect when a current flows. The first wiring layer 211 is sometimes called a spin orbit torque wiring.

[0035] The first wiring layer 211 contains, for example, a non-magnetic heavy metal as a main component. Heavy metal means a metal having a specific gravity equal to or greater than that of yttrium (Y). Non-magnetic heavy metal is, for example, a non-magnetic metal with a large atomic number equal to or greater than 39 that has d electrons or f electrons in its outermost shell. The first wiring layer 211 is made of, for example, Hf, Ta, or W. A stronger spin-orbit interaction occurs in non-magnetic heavy metals than in other metals. The spin-Hall effect occurs due to the spin-orbit interaction. When spins tend to be unevenly distributed in the first wiring layer 211 due to the spin-Hall effect, a spin current J Ｓ is more likely to occur.

[0036] The first wiring layer 211 may also contain a magnetic metal. The magnetic metal is a ferromagnetic metal or an antiferromagnetic metal. A trace amount of magnetic metal contained in a non-magnetic material acts as a scattering factor for spins. A trace amount is, for example, 3% or less of the total molar ratio of the elements constituting the wiring layer. When spins are scattered by the magnetic metal, the spin-orbit interaction is enhanced, and the efficiency of generating a spin current relative to an electric current increases.

[0037] The first wiring layer 211 may include a topological insulator. A topological insulator is a material whose interior is an insulator or a highly resistive material, but whose surface exhibits a spin-polarized metallic state. A topological insulator generates an internal magnetic field due to spin-orbit interaction. A topological insulator can exhibit a new topological phase due to the effect of spin-orbit interaction, even in the absence of an external magnetic field. A topological insulator can generate pure spin current with high efficiency due to the strong spin-orbit interaction and the breaking of inversion symmetry at the edges. Furthermore, a topological insulator allows current to flow only on its surface, achieving high current density with a small amount of current.

[0038] Topological insulators include, for example, Sn, SnTe, and Bi. １．５ Sb ０．５ Te １．７ Se １．３ , TlBiSe ２ , Bi ２ Te ３ , Bi １－ｘ Sb ｘ , (Bi １－ｘ Sb ｘ ) ２ Te ３ , pyrochlore materials (e.g., (Nd,Pr) ２ Ir ２ O ７ ) Topological insulators are capable of generating spin currents with high efficiency.

[0039] The first ferromagnetic layer 212 is a ferromagnetic material, such as a metal selected from the group consisting of Cr, Mn, Co, Fe, and Ni, an alloy containing one or more of these metals, or an alloy containing one or more of these metals and at least one of B, C, and N.

[0040] Examples of the ferromagnetic material include Co—Fe, Co—Fe—B, Ni—Fe, Co—Ho alloy, Sm—Fe alloy, Fe—Pt alloy, Co—Pt alloy, and CoCrPt alloy. ０ The CoFe alloy of this type has a large saturation magnetization and a strong magnetic anisotropy, and when used for the first ferromagnetic layer 212, the resonant frequency of the spin inductor 1 becomes high.

[0041] The first ferromagnetic layer 212 may also be a magnetic insulator. When the first ferromagnetic layer 212 is a magnetic insulator, it is particularly preferable that the first wiring layer 211 is a topological insulator. In this case, current flows only through the junction surface between the magnetic insulator and the topological insulator, thereby suppressing current loss in the spin inductor 1 and energy loss due to heat generation, etc.

[0042] The first ferromagnetic layer 212 may also be a ferrimagnetic insulator or an antiferromagnetic insulator. When the first ferromagnetic layer 212 is an antiferromagnetic insulator, it is particularly preferable that the first wiring layer 211 be a topological insulator. In this case, current flows only through the junction between the antiferromagnetic insulator and the topological insulator, thereby suppressing current loss in the spin inductor 1 and energy loss due to heat generation, etc. Furthermore, when the first ferromagnetic layer 212 is an antiferromagnetic insulator, the resonant frequency of the first ferromagnetic layer 212 increases. In this case, the spin inductor 1 does not resonate even in the high-frequency range of 10 GHz or higher. Therefore, a spin inductor 1 in which the first ferromagnetic layer 212 is an antiferromagnetic insulator can exhibit stable inductance over a wide frequency band.

[0043] The antiferromagnetic insulator is, for example, NiO, MnO, Cr ２ O ３ , oxides containing magnetic elements such as ferrite and garnet, sulfides containing magnetic elements such as MnS, FeCl ２ These include chlorides containing magnetic elements such as:

[0044] The first ferromagnetic layer 212 has a magnetization M1. The magnetization M1 is oriented in the +Z direction, for example, in the initial state. The initial state refers to a state in which no current flows through the spin inductor 1 and no external magnetic field is applied. In other words, the initial state is a state in which no external force acts on the magnetization M1.

[0045] From the viewpoint of maintaining the precession of the magnetization M1, it is preferable that the magnetization M1 has a component oriented in the X-direction or Z-direction in the initial state, and it is more preferable that the magnetization M1 be oriented in the X-direction or Z-direction. When the magnetization M1 is oriented in the Y-direction, the magnetization M1 is more likely to undergo magnetization reversal than when the magnetization M1 is oriented in other directions. When magnetization reversal occurs, the precession of the magnetization M1 is no longer maintained. Since the spin inductor 1 exhibits its inductor function by utilizing energy conversion between a magnetic moment and a current, if the precession of the magnetization stops, the inductor function is not fully exhibited. Note that even when the magnetization M1 is oriented in the Y-direction, the precession of the magnetization M1 can be maintained by adjusting the current density of the current flowing through the first wiring layer 211, the coercive force of the magnetization M1, etc.

[0046] The second spin inductor wire 22 includes a second wiring layer 221 and a second ferromagnetic layer 222. The second ferromagnetic layer 222 is, for example, stacked on the second wiring layer 221. The stacking order of the first ferromagnetic layer 212 with respect to the first wiring layer 211 is the same as the stacking order of the second ferromagnetic layer 222 with respect to the second wiring layer 221. For example, when the first ferromagnetic layer 212 is above the first wiring layer 211, the second ferromagnetic layer 222 is above the second wiring layer 221, and when the first ferromagnetic layer 212 is below the first wiring layer 211, the second ferromagnetic layer 222 is below the second wiring layer 221.

[0047] The second wiring layer 221 includes any of a metal, alloy, intermetallic compound, metal boride, metal carbide, metal silicide, and metal phosphide, which have the function of generating a spin current by the spin Hall effect when a current flows. The second wiring layer 221 is sometimes called a spin orbit torque wiring. The second wiring layer 221 can be made of the same material as that used for the first wiring layer 211. The second wiring layer 221 may be made of the same material as that used for the first wiring layer 211, or may be made of a different material.

[0048] The second ferromagnetic layer 222 is a ferromagnetic material. The second ferromagnetic layer 222 can be made of the same material as the first ferromagnetic layer 212. The second ferromagnetic layer 222 may be made of the same material as the first ferromagnetic layer 212, or may be made of a different material.

[0049] The second ferromagnetic layer 222 has a magnetization M2. In the initial state, the magnetization M2 is oriented in the opposite direction to the magnetization M1. In the examples shown in FIGS. 3 and 4, the magnetization M1 is oriented in the +Z direction, and therefore the magnetization M2 is oriented in the −Z direction. The orientation directions of the magnetization M1 and the magnetization M2 are not limited to this example, as long as they are oriented in opposite directions to each other. From the viewpoint of maintaining the precession of the magnetization M2, it is preferable that the magnetization M2 has a component oriented in the X direction or the Z direction in the initial state, and it is more preferable that the magnetization M2 be oriented in the X direction or the Z direction.

[0050] Next, a method for manufacturing the spin inductor 1 according to this embodiment will be described.

[0051] The spin inductor 1 can be fabricated by repeatedly depositing and processing each layer. For depositing each layer, for example, sputtering, chemical vapor deposition (CVD), electron beam evaporation (EB evaporation), atomic laser deposition, etc. can be used. For processing each layer, for example, photolithography, etc. can be used.

[0052] For example, first, the first spin inductor wiring 21 is formed on the insulator 90. The first spin inductor wiring 21 can be fabricated by depositing the first wiring layer 211 and the first ferromagnetic layer 212 in this order, and then removing unnecessary portions.

[0053] Next, an insulator 90 is formed so as to fill the first spin inductor wiring 21, thereby forming the first magnetic core 10. Next, the insulator 90 is formed so as to fill the first spin inductor wiring 21, and an opening extending in the Z direction is formed at a position overlapping the first spin inductor wiring 21 when viewed from the Z direction. The opening is filled with a conductor, thereby obtaining the first connection wiring 23 and the second connection wiring 24.

[0054] Next, the second spin inductor wiring 22 is formed so as to connect the first connection wiring 23 and the second connection wiring 24. The second spin inductor wiring 22 can be fabricated by depositing the second wiring layer 221 and the second ferromagnetic layer 222 in that order, and then removing unnecessary portions. By this procedure, the spin inductor 1 according to the first embodiment can be fabricated.

[0055] Next, a description will be given of the function of the spin inductor 1. Figures 5 and 6 are schematic diagrams for explaining the function of the spin inductor 1.

[0056] The spin inductor 1 functions as an inductor when a current flows along the first inductor wiring 20. The spin inductor 1 functions as an inductor due to a first effect caused by self-induction due to a current flowing through the first inductor wiring 20 wound in a coil shape, and a second effect caused by precession (vibration) of magnetization in the magnetic material.

[0057] The first effect is the same as the principle by which a general coil generates inductance. When a current flows through the first inductor wiring 20 arranged in a coil shape, a magnetic field in the -Y direction is generated within the first magnetic core 10. This magnetic field generates an induced voltage in a direction that opposes changes in the current. This effect generates inductance in the spin inductor 1.

[0058] The second effect occurs when a current flows in the plane of the first wiring layer 211 and the second wiring layer 221. The current flowing in the first wiring layer 211 and the second wiring layer 221 generates a spin current due to the spin Hall effect.

[0059] The spin Hall effect is a phenomenon in which, when an electric current is passed through it, a spin current is induced in a direction perpendicular to the direction of the current flow (for example, the Z direction) due to spin-orbit interaction. The spin Hall effect is similar to the standard Hall effect in that the direction of movement of moving charges (electrons) is bent. In the standard Hall effect, the direction of movement of charged particles moving in a magnetic field is bent by the Lorentz force. In contrast, in the spin Hall effect, the direction of spin movement is bent simply by the movement of electrons (the flow of electric current), even in the absence of a magnetic field.

[0060] 5, a current I1 flows in the +X direction in the first wiring layer 211. When the current I1 flows in the +X direction in the first wiring layer 211, for example, the spins Sp1 polarized in the -Y direction are bent in the +Z direction relative to the direction of travel, and the spins Sp2 polarized in the +Y direction are bent in the -Z direction relative to the direction of travel.

[0061] The spins Sp1 are accumulated at the interface between the first wiring layer 211 and the first ferromagnetic layer 212 and are injected into the first ferromagnetic layer 212 .

[0062] The magnetization M1 of the first ferromagnetic layer 212 precesses due to the spins Sp1 injected from the first wiring layer 211. The coercive force of the magnetization M1 and the magnitude of the current I1 flowing through the first wiring layer 211 are adjusted so that the magnetization M1 precesses without being reversed due to the injected spins Sp1.

[0063] 6, a current I2 flows in the +A direction in the second wiring layer 221. The current I2 flows from the first wiring layer 211 via the first connection wiring 23, and is the same as the current I1 except for the direction of current flow. The +A direction has a component in the -X direction. The flow direction (+X direction) of the X direction component of the current I1 flowing in the first wiring layer 211 is opposite to the flow direction (-X direction) of the X direction component of the current I2 flowing in the second wiring layer 221.

[0064] When a current flows in the +A direction of the second wiring layer 221, for example, the spins Sp1 polarized in the -Y direction are bent in the -Z direction relative to the direction of travel, and the spins Sp2 polarized in the +Y direction are bent in the +Z direction relative to the direction of travel. Because the currents I1 and I2 flow in different directions, the direction in which the spins Sp1 and Sp2 are bent is opposite to that of the first wiring layer 211.

[0065] The spins Sp2 are accumulated at the interface between the second wiring layer 221 and the second ferromagnetic layer 222 and are injected into the second ferromagnetic layer 222.

[0066] The magnetization M2 of the second ferromagnetic layer 222 precesses due to the spins Sp2 injected from the second wiring layer 221. The coercive force of the magnetization M2 and the magnitude of the current flowing through the second wiring layer 221 are adjusted so that the magnetization M2 precesses without being reversed due to the injected spins Sp2.

[0067] Energy conversion occurs between the magnetic moment and the current (second action) due to the precession of the magnetization M1 of the first ferromagnetic layer 212 and the magnetization M2 of the second ferromagnetic layer 222. When the first ferromagnetic layer 212 and the second ferromagnetic layer 222 are magnetic insulators, localized spins contained in the magnetic insulator precess, and energy conversion occurs between the spin waves propagating due to the vibration of the spins and the current (second action).

[0068] In the initial state, magnetization M2 is oriented in the opposite direction to magnetization M1. Spin Sp2 acting on magnetization M2 and spin Sp1 acting on magnetization M1 are polarized in opposite directions. Therefore, magnetization M1 and magnetization M2 precess in the same direction of rotation. By aligning the rotation directions of the precession of magnetization M1 and magnetization M2, it is possible to prevent the inductor functions generated in each part from weakening each other.

[0069] The spin inductor 1 according to the first embodiment functions as an inductor through the first and second effects. When only the first effect is used, there is a trade-off between the size of the coil and the size of the inductance, making it difficult to achieve a large inductance with a small coil. When only the second effect is used, it is difficult to obtain a large inductance, and it is difficult to achieve a high Q value. In contrast, the spin inductor 1 according to the first embodiment can achieve a large inductance even with a small element by utilizing both the first and second effects. As a result, the spin inductor 1 according to the first embodiment can achieve a high Q value. Small inductance elements are particularly desired in areas where it is difficult to incorporate large elements, such as space and cryogenic temperatures.

[0070] Here, because a resonance phenomenon occurs at the ferromagnetic resonance frequencies of the first ferromagnetic layer 212 and the second ferromagnetic layer 222, the spin inductor 1 does not fully function as an inductor due to the second action near these resonance frequencies. Therefore, it is preferable that the spin inductor 1 be used at a frequency sufficiently lower or sufficiently higher than the ferromagnetic resonance frequency of the spin inductor 1. This sufficiently low or sufficiently high frequency generally indicates a frequency that is deviated from the ferromagnetic resonance frequency by 5% or more, with the ferromagnetic resonance frequency as the reference. The spin inductor 1 can generate inductance even at frequencies exceeding 10 GHz or THz, for example. Furthermore, the inductance generated by the spin inductor 1 functions sufficiently even at 1 nH or less.

[0071] 7 is a plan view of a spin inductor 2 according to a second embodiment. In the spin inductor 2 according to the second embodiment, the same components as those in the spin inductor 1 according to the first embodiment are denoted by the same reference numerals, and the description thereof will be omitted.

[0072] The spin inductor 2 differs from the first inductor wiring 20 of the spin inductor 1 in the shape of the first inductor wiring 20A. The first inductor wiring 20A differs from the first inductor wiring 20 in that the first spin inductor wiring 21A is tilted with respect to the X direction. Other configurations of the first spin inductor wiring 21A are similar to those of the first inductor wiring 20.

[0073] The first spin inductor wiring 21A extends in direction B. For example, the length of the first spin inductor wiring 21A in direction B is longer than the lengths of the first spin inductor wiring 21A in other directions. The direction B is a direction tilted with respect to the X and Y directions in the XY plane and is different from the direction A.

[0074] The current flowing in the first spin inductor wire 21A flows, for example, in the −B direction. The −B direction has a +Y direction component and a +X direction component. In the X direction, the direction of the current flowing in the first spin inductor wire 21A (for example, the +X direction) is opposite to the direction of the current flowing in the second spin inductor wire 22 (for example, the −X direction).

[0075] The spin inductor 2 of the second embodiment differs from the spin inductor 1 of the first embodiment only in that the first spin inductor wiring 21A is tilted with respect to the X direction, and has the same effects as the spin inductor 1 of the first embodiment.

[0076] 8 is a plan view of a spin inductor 3 according to a third embodiment. In the spin inductor 3 according to the third embodiment, the same components as those in the spin inductor 1 according to the first embodiment are denoted by the same reference numerals, and the description thereof will be omitted.

[0077] The spin inductor 3 differs from the first inductor wiring 20 of the spin inductor 1 in the shape of the first inductor wiring 20B.

[0078] The first spin inductor wiring 21B has a different shape from the first spin inductor wiring 21 when viewed from the Z direction. The first spin inductor wiring 21B has a length L1 in the Y direction that is longer than a length L2 in the X direction. Current flows in the +X direction within the first spin inductor wiring 21B. The first spin inductor wiring 21B has a length L1 in the width direction perpendicular to the current flow direction that is longer than a length L2 in the flow direction. When the length L1 is longer than the length L2, the current density of the current flowing through the first spin inductor wiring 21B decreases.

[0079] Similarly, the shape of the second spin inductor wire 22B when viewed from the Z direction is different from that of the second spin inductor wire 22. The second spin inductor wire 22B has a length L3 in the width direction perpendicular to the current flow direction that is longer than a length L4 in the flow direction. When the length L3 is longer than the length L4, the current density of the current flowing through the second spin inductor wire 22B is reduced.

[0080] The spin inductor 3 according to the third embodiment has the same effects as the spin inductor 1 according to the first embodiment. Furthermore, the spin inductor 3 according to the third embodiment has a lower resistance than the spin inductor 1 according to the first embodiment. A spin inductor with a high resistance has difficulty achieving a high Q value. In contrast, the spin inductor 3 according to the third embodiment has a low resistance and can easily achieve a high Q value. Furthermore, when a direct current is applied, the spin inductor 3 functions as a resistor. A low resistance of the spin inductor 3 reduces current loss when a direct current is applied. Furthermore, a low current density of the current flowing through the first spin inductor wiring 21B and the second spin inductor wiring 22B reduces the torque acting on the magnetization of the first ferromagnetic layer and the second ferromagnetic layer, thereby preventing the magnetization from being reversed.

[0081] Here, the configuration in which the widthwise lengths L1 and L3 of both the first spin inductor wiring 21B and the second spin inductor wiring 22B are longer than the flowwise lengths L2 and L4 is illustrated, but only one of them may satisfy this relationship. The configuration of the second embodiment can also be applied to the third embodiment.

[0082] 9 and 10 are cross-sectional views of a spin inductor 4 according to a fourth embodiment. FIG. 9 is a cross-sectional view of a first cross section of the spin inductor 4 taken along line A-A in FIG. 2. FIG. 10 is a cross-sectional view of a second cross section of the spin inductor 4 taken along line B-B in FIG. 2. The planar shape of the spin inductor 4 is the same as the planar shape of the spin inductor 1 shown in FIG. 2. In the spin inductor 4 according to the fourth embodiment, the same components as those in the spin inductor 1 according to the first embodiment are denoted by the same reference numerals, and descriptions thereof will be omitted.

[0083] The spin inductor 4 differs from the second spin inductor wire 22 of the spin inductor 1 in the stacking order of the second spin inductor wire 22C.

[0084] The second spin inductor wiring 22C includes a second wiring layer 221 and a second ferromagnetic layer 222. The second wiring layer 221 is, for example, stacked on the second ferromagnetic layer 222. The stacking order of the first ferromagnetic layer 212 with respect to the first wiring layer 211 is opposite to the stacking order of the second ferromagnetic layer 222 with respect to the second wiring layer 221. For example, when the first ferromagnetic layer 212 is above the first wiring layer 211, the second ferromagnetic layer 222 is below the second wiring layer 221, and when the first ferromagnetic layer 212 is below the first wiring layer 211, the second ferromagnetic layer 222 is above the second wiring layer 221.

[0085] The second ferromagnetic layer 222 has a magnetization M2'. In the initial state, the magnetization M2' is oriented in the same direction as the magnetization M1. In the example shown in FIGS. 9 and 10, the magnetization M1 is oriented in the +Z direction, and therefore the magnetization M2' is oriented in the +Z direction. As long as the magnetization M1 and the magnetization M2' are oriented in the same direction, the orientation directions of each are not limited to this example. From the viewpoint of maintaining the precession of the magnetization M2', it is preferable that the magnetization M2' has a component oriented in the X direction or the Z direction in the initial state, and it is more preferable that the magnetization M2' be oriented in the X direction or the Z direction.

[0086] 11 is a schematic diagram for explaining the function of the spin inductor 4. The principle by which inductance occurs in the first spin inductor wiring 21 is the same as the principle shown in FIG.

[0087] 11, in the second spin inductor wiring 22C, a current I2 flows in the +A direction in the second wiring layer 221. When a current flows in the +A direction in the second wiring layer 221, for example, the spins Sp1 polarized in the -Y direction are bent in the -Z direction relative to the direction of travel, and the spins Sp2 polarized in the +Y direction are bent in the +Z direction relative to the direction of travel. Because the currents I1 and I2 flow in different directions, the directions in which the spins Sp1 and Sp2 are bent are reversed from those in the first wiring layer 211 shown in FIG.

[0088] The spins Sp1 are accumulated at the interface between the second wiring layer 221 and the second ferromagnetic layer 222 and are injected into the second ferromagnetic layer 222.

[0089] The magnetization M2′ of the second ferromagnetic layer 222 precesses due to the spins Sp1 injected from the second wiring layer 221. The coercive force of the magnetization M2′ and the magnitude of the current flowing through the second wiring layer 221 are adjusted so that the magnetization M2′ precesses without being reversed due to the injected spins Sp1.

[0090] In the initial state, magnetization M2' is oriented in the same direction as magnetization M1. Spin Sp1 acting on magnetization M2' and spin Sp1 acting on magnetization M1 are polarized in the same direction. Therefore, spin Sp1 causes magnetization M1 and magnetization M2' to precess in the same direction of rotation. By aligning the rotation directions of the precession of magnetization M1 and magnetization M2', it is possible to prevent the inductor functions generated in each part from weakening each other.

[0091] The spin inductor 4 according to the fourth embodiment has the same effects as the spin inductor 1 according to the first embodiment.

[0092] Here, an example has been shown in which the first ferromagnetic layer 212 is above the first wiring layer 211 and the second ferromagnetic layer 222 is below the second wiring layer 221, but the first ferromagnetic layer 212 may be below the first wiring layer 211 and the second ferromagnetic layer 222 may be above the second wiring layer 221. The configurations of the second and third embodiments can also be applied to the fourth embodiment.

[0093] Fifth Embodiment Fig. 12 is a cross-sectional view of a spin inductor 5 according to a fifth embodiment. Fig. 5 is a cross-sectional view of a first cross section of the spin inductor 5 taken along line A-A in Fig. 2. The planar shape of the spin inductor 5 is the same as the planar shape of the spin inductor 1 shown in Fig. 2. In the spin inductor 5 according to the fifth embodiment, the same components as those in the spin inductor 1 according to the first embodiment are denoted by the same reference numerals, and descriptions thereof will be omitted.

[0094] The spin inductor 5 differs from the first spin inductor wire 21 and the second spin inductor wire 22 of the spin inductor 1 according to the first embodiment in the configurations of the first spin inductor wire 21D and the second spin inductor wire 22D.

[0095] The first spin inductor wiring 21D includes a first wiring layer 211, a first ferromagnetic layer 212, and a ferromagnetic layer 213. The ferromagnetic layer 213 is in contact with, for example, the surface of the first wiring layer 211 opposite to the first ferromagnetic layer 212. For example, when the first ferromagnetic layer 212 is in contact with the upper surface of the first wiring layer 211, the ferromagnetic layer 213 is in contact with the lower surface of the first wiring layer 211. Furthermore, for example, when the first ferromagnetic layer 212 is in contact with the lower surface of the first wiring layer 211, the ferromagnetic layer 213 is in contact with the upper surface of the first wiring layer 211.

[0096] The second spin inductor wiring 22D includes a second wiring layer 221, a second ferromagnetic layer 222, and a ferromagnetic layer 223. The ferromagnetic layer 223 is in contact with, for example, the surface of the second wiring layer 221 opposite to the second ferromagnetic layer 222. For example, when the second ferromagnetic layer 222 is in contact with the upper surface of the second wiring layer 221, the ferromagnetic layer 223 is in contact with the lower surface of the second wiring layer 221. Furthermore, for example, when the second ferromagnetic layer 222 is in contact with the lower surface of the second wiring layer 221, the ferromagnetic layer 223 is in contact with the upper surface of the second wiring layer 221.

[0097] The ferromagnetic layer 213 and the ferromagnetic layer 223 may be made of the same material as the first ferromagnetic layer 212 .

[0098] The ferromagnetic layer 213 has a magnetization M3. In the initial state, the magnetization M3 is oriented in the opposite direction to the magnetization M1. In the initial state, the magnetization M3 is oriented in the same direction as the magnetization M2. For example, the magnetization M3 is oriented in the −Z direction in the initial state. As long as the above relationship between the magnetization M3 and the magnetization M1 and the magnetization M2 is satisfied, the orientation direction is not limited to this example. From the viewpoint of maintaining the precession of the magnetization M3, it is preferable that the magnetization M3 has a component oriented in the X direction or the Z direction in the initial state, and it is more preferable that the magnetization M3 be oriented in the X direction or the Z direction.

[0099] The magnetization M3 may be antiferromagnetically coupled with the magnetization M1. In this case, the first wiring layer 211 preferably contains any element selected from the group consisting of Cr, Mo, and Re. When the first wiring layer 211 contains such an element, a large spin-orbit torque can be applied to the magnetizations M1 and M3 in a state where the magnetizations M1 and M3 are antiferromagnetically coupled.

[0100] The ferromagnetic layer 223 has a magnetization M4. In the initial state, the magnetization M4 is oriented in the opposite direction to the magnetization M2. In the initial state, the magnetization M4 is oriented in the same direction as the magnetization M1. For example, the magnetization M4 is oriented in the +Z direction in the initial state. As long as the above relationship between the magnetization M4 and the magnetization M1 and the magnetization M2 is satisfied, the orientation direction is not limited to this example. From the viewpoint of maintaining the precession of the magnetization M4, it is preferable that the magnetization M4 has a component oriented in the X direction or the Z direction in the initial state, and it is more preferable that the magnetization M4 be oriented in the X direction or the Z direction.

[0101] The magnetization M4 may be antiferromagnetically coupled with the magnetization M2. In this case, the second wiring layer 221 preferably contains any element selected from the group consisting of Cr, Mo, and Re.

[0102] 13 and 14 are schematic diagrams for explaining the function of the spin inductor 5. FIG.

[0103] The spin inductor 5 functions as an inductor due to the above-mentioned first and second effects.

[0104] 13 , a current I1 flows in the +X direction through the first wiring layer 211. The spins Sp1 are accumulated at the interface between the first wiring layer 211 and the first ferromagnetic layer 212 and are injected into the first ferromagnetic layer 212. The spins Sp2 are accumulated at the interface between the first wiring layer 211 and the ferromagnetic layer 213 and are injected into the ferromagnetic layer 213.

[0105] The magnetization M1 of the first ferromagnetic layer 212 precesses due to the spins Sp1 injected from the first wiring layer 211. The magnetization M3 of the ferromagnetic layer 213 precesses due to the spins Sp2 injected from the first wiring layer 211.

[0106] 14, a current I2 flows in the +A direction in the second wiring layer 221. The flow direction (+X direction) of the X-direction component of the current I1 flowing in the first wiring layer 211 is opposite to the flow direction (−X direction) of the X-direction component of the current I2 flowing in the second wiring layer 221.

[0107] The spins Sp1 are accumulated at the interface between the second wiring layer 221 and the ferromagnetic layer 223 and are injected into the ferromagnetic layer 223. The spins Sp2 are accumulated at the interface between the second wiring layer 221 and the second ferromagnetic layer 222 and are injected into the second ferromagnetic layer 222.

[0108] The magnetization M2 of the second ferromagnetic layer 222 precesses due to the spins Sp2 injected from the second wiring layer 221. The magnetization M4 of the ferromagnetic layer 223 precesses due to the spins Sp1 injected from the second wiring layer 221.

[0109] The precession of magnetization M1, magnetization M2, magnetization M3, and magnetization M4 causes energy conversion between the magnetic moment and current. Magnetization M1, magnetization M2, magnetization M3, and magnetization M4 each precess in the same rotation direction. By aligning the precession rotation directions, it is possible to prevent the inductor functions generated in each part from weakening each other.

[0110] The spin inductor 5 according to the fifth embodiment has the same effects as the spin inductor 1 according to the first embodiment. Furthermore, the spin inductor 5 utilizes spins generated from both the first wiring layer 211 and the second wiring layer 221, and therefore exhibits a larger inductance than when only spins generated from one surface are utilized. Furthermore, the configurations of the second and third embodiments can also be applied to the fifth embodiment.

[0111] 15 is a plan view of a spin inductor 6 according to a sixth embodiment. In the spin inductor 6 according to the sixth embodiment, the same components as those in the spin inductor 1 according to the first embodiment are denoted by the same reference numerals, and the description thereof will be omitted.

[0112] The spin inductor 6 includes a first structure S1 and a second structure S2. The first structure S1 and the second structure S2 are connected by a connection wiring 50. The second end e2 of the first structure S1 is connected to the first end e3 of the second structure S2. The second end e2 is the output end of the first structure S1, and the first end e3 is the input end of the second structure S2. In the second structure S2, a current flows from the first end e3 to the second end e4. The connection wiring 50 may be made of any material as long as it is conductive.

[0113] The first structure S1 includes a first magnetic core 10 and a first inductor wiring 20. The first structure S1 has the same structure as the spin inductor 1 according to the first embodiment.

[0114] The second structure S2 includes a second magnetic core 30 and a second inductor wiring 40.

[0115] The second magnetic core 30 extends in the Y direction, with the Y direction being its axial direction. The second magnetic core 30 includes a magnetic body. The second magnetic core 30 can be made of the same material as the first magnetic core 10.

[0116] The second inductor wiring 40 has an axial direction that is the Y direction and is wound around the second magnetic core 30. The second inductor wiring 40 has a third spin inductor wiring 41, a fourth spin inductor wiring 42, a third connecting wiring 43, and a fourth connecting wiring 44.

[0117] The third spin inductor wiring 41 is located below the second magnetic core 30. The fourth spin inductor wiring 42 is located above the second magnetic core 30. The third spin inductor wiring 41 and the fourth spin inductor wiring 42 are located on either side of the second magnetic core 30 in the Z direction. When viewed from the Z direction, the position where the third spin inductor wiring 41 and the second magnetic core 30 overlap may be different from the position where the fourth spin inductor wiring 42 and the second magnetic core 30 overlap.

[0118] The third spin inductor wire 41 has a shape similar to that of the first spin inductor wire 21, and the fourth spin inductor wire 42 has a shape similar to that of the second spin inductor wire 22. The third spin inductor wire 41 extends in the X direction. The fourth spin inductor wire 42 extends in the A direction. In the X direction, the direction of the current flowing through the third spin inductor wire 41 (for example, the +X direction) is opposite to the direction of the current flowing through the fourth spin inductor wire 42 (for example, the −X direction).

[0119] The third connection wiring 43 connects the third spin inductor wiring 41 and the fourth spin inductor wiring 42. The fourth connection wiring 44 connects the third spin inductor wiring 41 and the fourth spin inductor wiring 42. The third connection wiring 43 and the fourth connection wiring 44 may be made of any material as long as they are conductive.

[0120] Fig. 16 is a cross-sectional view of the spin inductor 6 taken along line CC in Fig. 15. The second magnetic core 30 and the second inductor wiring 40 are covered with an insulator 90.

[0121] For example, the height position in the Z direction of the second magnetic core 30 may be the same as the height position in the Z direction of the first magnetic core 10. Also, for example, the height position in the Z direction of the first spin inductor wiring 21 may be the same as the height position in the Z direction of the third spin inductor wiring 41. Also, for example, the height position in the Z direction of the second spin inductor wiring 22 may be the same as the height position in the Z direction of the fourth spin inductor wiring 42. When the height positions of the components of the first structure S1 and the second structure S2 are aligned, layers of the same height can be fabricated collectively, improving the manufacturing efficiency of the spin inductor 6.

[0122] The third spin inductor wiring 41 includes a third wiring layer 411 and a third ferromagnetic layer 412. The third ferromagnetic layer 412 is, for example, stacked on the third wiring layer 411. Furthermore, for example, the third ferromagnetic layer 412 may be in contact with the lower surface of the third wiring layer 411. The third wiring layer 411 has a configuration similar to that of the first wiring layer 211, and the third ferromagnetic layer 412 has a configuration similar to that of the first ferromagnetic layer 212.

[0123] The fourth spin inductor wire 42 includes a fourth wiring layer 421 and a fourth ferromagnetic layer 422. The fourth ferromagnetic layer 422 is, for example, stacked on the fourth wiring layer 421. Furthermore, for example, the fourth ferromagnetic layer 422 may be in contact with the lower surface of the fourth wiring layer 421. The fourth wiring layer 421 has a configuration similar to that of the second wiring layer 221, and the fourth ferromagnetic layer 422 has a configuration similar to that of the second ferromagnetic layer 222.

[0124] The third ferromagnetic layer 412 has a magnetization M5. The magnetization M5 is oriented in the +Z direction, for example, in the initial state. The magnetization M5 may be oriented in a direction other than the Z direction. The magnetization M5 is preferably oriented in the same direction as the magnetization M1.

[0125] The fourth ferromagnetic layer 422 has a magnetization M6. In the initial state, the magnetization M6 is oriented in the opposite direction to the magnetization M5. For example, the magnetization M6 is oriented in the −Z direction in the initial state. The magnetization M6 is not limited to this example as long as it is oriented in the opposite direction to the magnetization M5. It is preferable that the magnetization M6 is oriented in the same direction as the magnetization M2.

[0126] Based on the same principle as the spin inductor 1, inductance occurs in the second structure S2.

[0127] The spin inductor 6 according to the sixth embodiment has the same effects as the spin inductor 1 according to the first embodiment. In addition, the spin inductor 6 has a plurality of connected structures, each of which functions as an inductor, and therefore generates a larger inductance.

[0128] Although an example in which the first structure S1 and the second structure S2 are connected has been shown here, three or more similar structures may be connected. The configurations of the second, third, fourth, and fifth embodiments can also be applied to the sixth embodiment. The configurations of the second, third, fourth, and fifth embodiments may also be applied to the second structure S2.

[0129] 17 is a plan view of a spin inductor 7 according to a seventh embodiment. In the spin inductor 7 according to the seventh embodiment, the same components as those in the spin inductor 1 according to the first embodiment are denoted by the same reference numerals, and the description thereof will be omitted.

[0130] The spin inductor 7 includes a first structure S1 and a second structure S2. The configurations of the first structure S1 and the second structure S2 are the same as those of the spin inductor 6 according to the sixth embodiment, except for the Z-direction position of each layer constituting the second structure S2.

[0131] For example, the height position in the Z direction of the second magnetic core 30 is different from the height position in the Z direction of the first magnetic core 10. Furthermore, for example, the height position in the Z direction of the second spin inductor wiring 22 may be the same as the height position in the Z direction of the third spin inductor wiring 41. For example, the first spin inductor wiring 21 is located lower in the Z direction than the second spin inductor wiring 22 and the third spin inductor wiring 41. The fourth spin inductor wiring 42 is located higher in the Z direction than the second spin inductor wiring 22 and the third spin inductor wiring 41. The height position where the first inductor wiring 20 is wound and the height position where the second inductor wiring 40 is wound are different between the first structure S1 and the second structure S2.

[0132] The first structure S1 and the second structure S2 are connected by a connection wiring 51. The second end e2 of the first structure S1 is connected to the first end e3 of the second structure S2. The connection wiring 51 may be made of any material as long as it is conductive.

[0133] The first magnetic core 10 and the second magnetic core 30 are connected by a connecting magnetic core 60. The magnetic flux circulates along the first magnetic core 10, the second magnetic core 30, and the connecting magnetic core 60. The first magnetic core 10, the second magnetic core 30, and the connecting magnetic core 60 have a toroidal core structure.

[0134] The spin inductor 7 according to the seventh embodiment has the same effects as the spin inductor 1 according to the first embodiment. Furthermore, the spin inductor 7 has a toroidal core structure, which reduces magnetic flux leakage. As a result, the spin inductor can achieve a higher Q value.

[0135] Although an example in which the first structure S1 and the second structure S2 are connected has been shown here, three or more similar structures may be connected. The configurations of the second, third, fourth, and fifth embodiments can also be applied to the seventh embodiment. The configurations of the second, third, fourth, and fifth embodiments may also be applied to the second structure S2.

[0136] The first to seventh embodiments have been illustrated above, and specific configurations of spin inductors have been described. The spin inductor according to the present disclosure is not limited to these exemplary configurations, and various modifications are possible as long as the spirit of the invention is met. Furthermore, the spin inductor according to the present disclosure can be incorporated into a module for use, for example. Figure 19 shows an example of use of the spin inductor according to this embodiment.

[0137] In recent years, there has been a growing interest in integrating semiconductor circuits and devices with specific functions, such as memory, into a single chip. The technology for integrating semiconductor circuits and devices such as memory into a single chip is called "chiplet" or "heterointegration." Integrating these into a single chip reduces latency, power consumption, and costs. Even with these technologies, passive components must be separately placed around the chip for it to function. Therefore, even if the chip is highly integrated, passive components can become a challenge in miniaturizing the module. By incorporating passive components into chiplets and heterointegration, further miniaturization of modules is expected.

[0138] The chip C shown in FIG. 19 includes a semiconductor circuit LY1, a connection layer LY2, a wiring layer LY3, a memory layer LY4, a sensor layer LY5, an LCR (passive component) layer LY6, and an all-solid-state thin-film battery layer LY7, which are stacked in this order. Although each layer is bonded to form a single chip, spacing is provided in FIG. 19 for ease of understanding. The spin inductor according to the present disclosure is formed, for example, in the LCR layer LY6. The LCR layer LY6 may form not only passive components such as conventional electronic components, such as inductance, capacitance, and resistance, but also spin inductors and spin-tunable capacitances. The LCR layer LY6 is connected to other layers via contact vias, and the entire chip C is utilized as a single module. The spin inductor according to the present disclosure can be applied to devices that also include sensors and power sources, as shown in FIG. 19, and can autonomously collect information.

[0139] 1, 2, 3, 4, 5, 6, 7 Spin inductor 10 First magnetic core 20, 20A, 20B First inductor wiring 21, 21A, 21B, 21D First spin inductor wiring 22, 22B, 22C, 22D Second spin inductor wiring 23 First connection wiring 24 Second connection wiring 30 Second magnetic core 40 Second inductor wiring 41 Third spin inductor wiring 42 Fourth spin inductor wiring 43 Third connection wiring 44 Fourth connection wiring 50, 51 Connection wiring 60 Connection magnetic core 90 Insulator 211 First wiring layer 212 First ferromagnetic layer 213, 223 Ferromagnetic layer 221 Second wiring layer 222 Second ferromagnetic layer 411 Third wiring layer 412 Third ferromagnetic layer 421 Fourth wiring layer 422 Fourth ferromagnetic layer e1, e3 First end e2, e4 Second end M1, M2, M2', M3, M4, M5, M6 Magnetization S1 First structure S2 Second structure U Unit U1 First unit U2 Second unit

Claims

1. A spin inductor comprising a first structure, wherein the first structure comprises a first magnetic core and a first inductor wiring wound around the first magnetic core with a first direction as its axial direction, wherein the first inductor wiring comprises a first spin inductor wiring, a second spin inductor wiring, and a first connection wiring, wherein the first spin inductor wiring and the second spin inductor wiring are positioned to sandwich the first magnetic core in a second direction perpendicular to the first direction, wherein the first connection wiring connects the first spin inductor wiring and the second spin inductor wiring, wherein the first spin inductor wiring comprises a first wiring layer and a first ferromagnetic layer in contact with the first wiring layer, and wherein the second spin inductor wiring comprises a second wiring layer and a second ferromagnetic layer in contact with the second wiring layer.

2. The spin inductor according to claim 1, wherein the magnetization of the first ferromagnetic layer is oriented in the opposite direction to the magnetization of the second ferromagnetic layer when no external magnetic field is applied.

3. A spin inductor according to claim 1, wherein the magnetization of the first ferromagnetic layer is oriented in the same direction as the magnetization of the second ferromagnetic layer when no external magnetic field is applied.

4. The spin inductor according to claim 1, wherein the first inductor wiring has a plurality of units each consisting of a first spin inductor wiring, a second spin inductor wiring, and a first connection wiring, and each of the plurality of units is connected by a second connection wiring.

5. A spin inductor as described in claim 1, wherein the current flowing inside the first spin inductor wiring and the second spin inductor wiring has a component in a third direction perpendicular to the first direction and the second direction, and in the third direction, the direction of the current flowing through the first spin inductor wiring is opposite to the direction of the current flowing through the second spin inductor wiring.

6. The spin inductor according to claim 1, wherein the first spin inductor wiring or the second spin inductor wiring is perpendicular to the first magnetic core when viewed from the second direction.

7. A spin inductor according to claim 1, wherein the length of the first spin inductor wiring in a width direction perpendicular to the direction of current flow inside the first spin inductor wiring is longer than the length in the direction of current flow.

8. A spin inductor as described in claim 1, wherein the first wiring layer is configured to be able to inject spins into the first ferromagnetic layer, the magnetization of the first ferromagnetic layer is configured to be able to precess due to the spins injected from the first wiring layer, the second wiring layer is configured to be able to inject spins into the second ferromagnetic layer, and the magnetization of the second ferromagnetic layer is configured to be able to precess due to the spins injected from the second wiring layer.

9. The spin inductor according to claim 1, further comprising a second structure, wherein the second structure comprises a second magnetic core and a second inductor wiring wound around the second magnetic core with the first direction as its axial direction, the second inductor wiring comprising a third spin inductor wiring, a fourth spin inductor wiring, and a third connecting wiring, the third spin inductor wiring and the fourth spin inductor wiring being positioned to sandwich the second magnetic core in the second direction, the third connecting wiring connecting the third spin inductor wiring and the fourth spin inductor wiring, the third spin inductor wiring comprising a third wiring layer and a third ferromagnetic layer in contact with the third wiring layer, and the fourth spin inductor wiring comprising a fourth wiring layer and a fourth ferromagnetic layer in contact with the fourth wiring layer.

10. The spin inductor according to claim 9, wherein a current output terminal of the first structure is connected to a current input terminal of the second structure.

11. A spin inductor as described in claim 9, wherein in the second direction, the first spin inductor wiring and the third spin inductor wiring are at the same height position; in the second direction, the second spin inductor wiring and the fourth spin inductor wiring are at the same height position; and in the second direction, the first magnetic core and the second magnetic core are at the same height position.

12. The spin inductor according to claim 9, wherein, in the second direction, the second spin inductor wiring and the third spin inductor wiring are at the same height position, and, in the second direction, the first magnetic core and the second magnetic core are at different height positions.

13. The spin inductor according to claim 9, further comprising a connecting magnetic core connecting the first magnetic core and the second magnetic core, wherein magnetic flux circulates along the first magnetic core, the second magnetic core, and the connecting magnetic core.

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