Load port wafer protrusion apparatus, load port including the apparatus and method therefor

Abstract

A workpiece transport apparatus includes a frame, a mast rotatably coupled to the frame, and two or more transport arms movably coupled to the mast for reciprocating movement along the mast. A drive section is provided and is coupled to and configured to move each of the two or more transport port arms along the mast independent of movement of each other transport arm along the mast, where an end effector of one of the two or more transport arms is pre-positioned for a semiconductor wafer pick or place operation with another end effector of another of the two or more transport arms in motion along the mast.

Description

Aty. Docket No. 390P017040-WQ (PCT) / Br. 2230LOAD PORT WAFER PROTRUSION APPARATUS, LOAD PORT INCLUDING THE APPARATUS AND METHOD THEREFORCROSS-REFERENCE TO RELATED APPLICATION(S)

[0001] This application is a non-provisional of and claims the benefit of United States provisional patent application number 63 / 679,432 filed on August 5, 2024, the disclosure of which is incorporated herein by reference in its entirety.BACKGROUND1. Field

[0002] The present disclosure generally relates to workpiece processing, and more particularly, to workpiece transports.2. Brief Description of Related Developments

[0003] Workpiece transports generally include one or more substrate holders that are employed to pick and place workpieces from one workpiece holding location to another workpiece holding location. Where more than one substrate holders are provided, the substrate holders are moved in a vertical direction as a unit with a substantially fixed vertical spacing between adjacent substrate holders.

[0004] Accordingly, the present disclosure addresses a number of those issues.BRIEF DESCRIPTION OF THE DRAWINGSAty. Docket No. 390P017040-WQ (PCT) / Br. 2230

[0005] The foregoing aspects and other features of the present disclosure are explained in the following description, taken in connection with the accompanying drawings, wherein:

[0006] Fig. l is a schematic illustration of a workpiece processing apparatus in accordance with the present disclosure;

[0007] Fig. 2 is a schematic perspective view illustration of a portion of the workpiece processing apparatus of Fig. 1 in accordance with the present disclosure;;

[0008] Figs. 3A and 3B are schematic side view illustrations of a portion of a transport apparatus of Fig. 1 in different configurations in accordance with the present disclosure;;

[0009] Fig. 4 is a schematic side view illustration of the transport apparatus of Figs. 3 A and 3B picking and / or placing workpieces from and / or to a workpiece container in accordance with the present disclosure;

[0010] Fig. 5 is a flow diagram of an exemplary method in accordance with the present disclosure;

[0011] Figs. 6A-6F are schematic illustrations of workpiece transport arms of a transport apparatus of the workpiece processing apparatus of Fig. 1 in accordance with the present disclosure; and

[0012] Fig. 7 is a flow diagram of an exemplary method in accordance with the present disclosure.DETAILED DESCRIPTION

[0013] The following detailed description is meant to assist the understanding of one skilled in the art, and is not intended in any way to unduly limit claims connected or related to the present disclosure.Aty. Docket No. 390P017040-WQ (PCT) / Br. 2230

[0014] The following detailed description references various figures, where like reference numbers refer to like components and features across various figures, whether specific figures are referenced, or not.

[0015] The word “each” as used herein refers to a single object (i.e., the object) in the case of a single object or each object in the case of multiple objects. The words “a,” “an,” and “the” as used herein are inclusive of “at least one” and “one or more” so as not to limit the object being referred to as being in its “singular” form.

[0016] Spatial terms such as “left,” “right,” “top,” “bottom,” “upper,” “lower,” “front,” “back,” “vertical,” and “horizontal” as may be used herein are by way of example and illustration only are not meant to limit the description and may be exchanged in position and orientation.

[0017] The terms “substantially” and “about” as may be used herein refer to a feature that may be varied within an acceptable manufacturing tolerance for a given application.

[0018] Fig. 1 illustrates an exemplary perspective view illustration of a workpiece processing apparatus 100 in accordance with the present disclosure. Although the present disclosure will be described with reference to the drawings, it should be understood that the present disclosure can be embodied in many forms. In addition, any suitable size, shape or type of elements or materials could be used.

[0019] The workpiece processing apparatus 100 may be configured to process any suitable workpieces W that may be transported to and from the workpiece processing apparatus 100 in containers or carriers 110 (the containers or carrier 110 being configured for transport of one or more workpieces W). The workpieces W may be semiconductor wafers or substrates, flat panels for flat panel displays, solar panels, reticles or any other suitable object / substrate.

[0020] The workpiece processing apparatus 100 includes a front end 101 and a process section 120. The front end 101 generally includes a load port module 105 and a mini-environment 106Aty. Docket No. 390P017040-WO (PCT) / Br. 2230 such as for example an equipment front-end module (EFEM). The load port module 105 may be box opener / loader to tool standard (BOLTS) interfaces that conform to SEMI standards E15.1, E47.1, E62, E19.5 or El.9 for 300 mm load ports, front opening or bottom opening boxes / pods and cassettes. The load port modules may be configured as 200 mm wafer / substrate interfaces, 450 mm wafer / substrate interfaces or any other suitable substrate interfaces such as for example larger or smaller semiconductor wafers / substrates, flat panels for flat panel displays, solar panels, reticles or interfaces for any other suitable object. Any suitable number of load ports modules 105 may be provided. The load port module 105 may be configured to receive the containers or carriers 110 from an overhead transport system, automatic guided vehicles, person guided vehicles, rail guided vehicles or from any other suitable transport method.

[0021] Referring also to Fig. 2, the load port module 105 includes a frame 106F with one load port door 222 or more than one load port doors 222. The more than one load port doors 222 are juxtaposed alongside and substantially level with each other. The load port doors 222 may selectively seal a respective load port or opening 107 of the load port module 105. A workpiece transport apparatus 108 is connected to the frame 106F. The workpiece transport apparatus 108 has a traverse section 266 disposed so as to traverse the more than one, substantially level, load port doors 222 in a traverse direction 299 through a range of traverse motion. The load port module 105 includes an elevator upright or mast 310 (see Figs. 3A-4) that may form a part of the workpiece transport apparatus 108. The elevator upright 310 is connected to the traverse section 266 and supports, from a common side of the elevator upright 310, more than one articulated robot arms 321, 322 so that each of the more than one articulated robot arms 321, 322 are located on and dependent from the common side of the elevator upright 310 throughout the range of traverse motion. A first elevator ELV1 (see Figs. 3A-4) is connected to the elevator upright 310 and configured so that the first elevator ELV 1 is raised and lowered by a drive section 250 with at least a first motor Z1 along a lift axis LA along the elevator upright 310, the first elevator ELV1 being connected to a first arm 321 of the more than one articulated robot arms, 321, 322 so as to raise and lower the first arm 321 along the lift axis LA on the common side. A second elevator ELV2Aty. Docket No. 390P017040-WO (PCT) / Br. 2230 is connected to the elevator upright 310 and configured so that the second elevator ELV2 is raised and lowered along the lift axis LA on the common side by a second motor Z2 of the drive section 250, the second motor Z2 being different than the first motor Z1 so that the first elevator ELV1 and second elevator ELV2 are raised and lowered along the lift axis LA on the common side independent of each other. The second elevator ELV2 is connected to the second arm 322 of the more than one articulated robot arms 321, 322 via a connection separate and distinct from that of the first elevator ELV1 and the first robot arm 321.

[0022] As described herein, the first arm 321 has a first end effector 351 A, and the second arm 322 has a second end effector 35 IB independent of the first end effector 351 A. The first arm 321 and the second arm 322 are independently articulated by the drive section 250 and arranged so that the first end effector 351 A and the second end effector 35 IB are extended and retracted respectively, by a respective one of the first arm 321 and the second arm 322, along a common direction R (see Figs. 3 A-4), relative to the common side, throughout the range of traverse motion.

[0023] As described herein, the elevator upright or mast 310 is configured so that the common direction R is orientated towards a common one of the load port doors 222, when at least one of the first arm 321 and the second arm 322 is articulated to access an opening 107 closed by the common one of the load port doors 222 (see Figs. 2 and 4).

[0024] The load port module 105 may interface with the mini-environment 106 through one or more load ports or openings 107 (see also Fig. 2) of the load port module(s) 105. The load ports 107 may allow the passage of workpieces W between the containers 110 held at or otherwise seated on the load port module 105 and the mini-environment 106.

[0025] The mini-environment 106, also referred to as a front-end, may have a shell or casing (also referred to as the EFEM frame) defining a protected environment or mini-environment where workpieces W may be accessed and handled with minimized potential for contamination between the transport containers 110. The protected environment is employed to transport the workpiecesAty. Docket No. 390P017040-WQ (PCT) / Br. 2230W to and from the substrate processing system 100, and the substrate process section 120. The mini-environment 106 may be connected to the frame 106F of the load port apparatus 105 in any suitable manner, such as through a connection formed by and between the mini-environment 106 and frame 106F, which the frame 106F may be a part of the mini-environment 106. The minienvironment 106 generally includes any suitable transport apparatus, such as the transport apparatus 108. For example, the mini-environment may be connected to the frame 106F so as to house otherwise enclose the transport apparatus 108, where the transport apparatus is any suitable automated transport robot for transporting workpieces W to and from the containers 110 through respective load ports 107. The transport apparatus 108 may be a track mounted robot such as that described in, for example, United States Patents 6,002,840 issued on December 14, 1999; 8,419,341 issued April 16, 2013; and 7,648,327 issued on January 19, 2010, the disclosures of which are incorporated by reference herein in their entireties, although the transport apparatus 108 may not be track mounted. The mini-environment 106 may provide a controlled, clean zone for substrate transfer between multiple load port modules.

[0026] The process section 120 may be configured to perform any suitable process on the workpieces W. For example, the process section 120 may be configured as a substrate sorter, Stocker, metrology module, or be configured to perform a manufacturing process (e.g., substrate processing apparatus) on the workpieces W. The process section 120 may have any suitable controlled environment therein (e.g., an atmospheric pressure environment, an inert gas environment, a clean dry air environment, a vacuum environment, etc.), and generally comprises a processing system for processing workpieces. Where the process section 120 includes a vacuum environment the vacuum therein may be a high vacuum such as, for example, about IxlO'5Torr (e.g., about .001 Pa) or below. The process section 120 may operate on the workpieces W through various deposition, etching, or other types of high vacuum processes to form electrical circuitry or other desired structure on the workpieces W. Typical processes include but are not limited to thin film processes that use a vacuum such as plasma etch or other etching processes, chemical vapor deposition (CVD), plasma vapor deposition (PVD), implantation such as ion implantation,Aty. Docket No. 390P017040-WQ (PCT) / Br. 2230 metrology, rapid thermal processing (RTP), dry strip atomic layer deposition (ALD), oxidation / diffusion, forming of nitrides, vacuum lithography, epitaxy (EPI), wire bonder and evaporation or other thin film processes that use vacuum pressures. The process section 120 may include suitable transport apparatus and / or other automation for transporting and processing the workpieces W.

[0027] Suitable examples of processing apparatus to which the aspects of the present disclosure may be employed may be found in, for example, United States patent application number 15 / 215,143 filed on July 20, 2016 and titled “Substrate Processing Apparatus”; United States patent numbers 10,777,438 titled “Processing Apparatus,” and issued on September 15, 2020, 8,960,099 titled “Substrate Processing Apparatus,” and issued on February 24, 2015, 8,371,792 titled “Substrate Processing Apparatus,” and issued on February 12, 2013, 7,988,398 titled “Linear Substrate Transport Apparatus,” and issued on August 2, 2011, 9,105,673 titled “Side Opening Unified Pod,” and issued on August 11, 2015, 9,401,294 titled “Compact Substrate Transport System,” and issued on July 26, 2016, 6,520,727 titled “Modular Sorter,” and issued on February 18, 2003, 8,292,563 titled “Nonproductive Wafer Buffer Module For Substrate Processing Apparatus,” and issued on October 23, 2012, 11,295,975 titled “Method and Apparatus for Substrate Alignment,” and issued on April 5, 2022, 7,100,340 titled “Unified Frame for Semiconductor Material Handling System,” and issued on September 5, 2006, 7,217,076 titled “Semiconductor Material Handling System,” and issued on May 15, 2007, 7,648,327 titled “Wafer Engine,” and issued on January 19, 2010, 7,066,707 titled “Wafer Engine,” and issued on June 27, 2006, 9,943,969 titled “Clean Transfer Robot,” and issued on April 17, 2018; and International patent application number PCT / US13 / 25513 entitled “Substrate Processing Apparatus” and filed on February 11, 2013, the disclosures of which are incorporated herein by reference in their entireties.

[0028] Referring to Figs. 1 and 2, unlike prior track mounted robots, such as those described in, for example, United States Patents 6,002,840 issued on December 14, 1999; 8,419,341 issued April 16, 2013; and 7,648,327 issued on January 19, 2010, the present disclosure provides, as describedAty. Docket No. 390P017040-WQ (PCT) / Br. 2230 herein, a transport apparatus 108 having two or more transport arms 321, 322 (see, e.g., Figs. 3A- 4) that move independently of each other in direction 298 (e.g., the Z or vertical direction), and that have a common orientation for accessing a common (i.e., the same) workpiece container 110 (or more generally, the same substrate holding station) so that at least one of the two or more arms 321, 322 may be prepositioned for workpiece transport operations with respect to the common workpiece container 110. As may be realized, the prepositioning and varying pitch (e.g., varying spacing between the transport arms 321, 322, such as between end effectors of the transport arms, in direction 298) may be beneficial for the picking, placing, and transport of bowed or warped workpieces because the pitch may be adjusted and the arms prepositioned based on the bow or warp of the workpieces in the common workpiece container 110.

[0029] As described in greater detail herein, the transport apparatus 108 is configured to adjust a vertical distance or pitch VD between stacked (e.g., vertically spaced) end effectors 351 A, 35 IB of the transport apparatus 108 (see Figs. 3A-4) to simultaneously pick and place workpieces W from and to two nonadjacent vertically offset holding locations (e.g., such as slots SL1 and SL7 of a container 110 as illustrated in Fig. 4, although any two vertically spaced slots / holding locations may be employed). The vertical distance VD between the end effectors 351 A, 35 IB of the transport apparatus 108 is adjustable to different vertically offset holding locations (such as of the container 110 or any other apparatus having vertically offset workpiece holding locations) to effect optimization of workpiece processing throughput and improve transport apparatus capabilities compared to the prior track mounted robots. While the transport apparatus 108 of the present disclosure is described as being track mounted, the present disclosure may be equally applied to non-track mounted transport apparatus. While the present disclosure is described such that the transport apparatus 108 has two stacked end effectors 351 A, 35 IB, it should be understood that the present disclosure is applicable to transport apparatus having any suitable number of stacked end effectors mounted to and movable along a common mast (such as mast 310 described herein).

[0030] Still referring to Fig. 1, the workpiece processing apparatus 100 in general, and the load port apparatus 105 and / or mini-environment 106 in particular may include any suitable visionAty. Docket No. 390P017040-WQ (PCT) / Br. 2230 system 188 connected to the controller 199. The vision system 188 may be positioned on or relative to one or more of the frame 106F and the load port door 222 so as to view an interior of a container 110, disposed on the load port module 105, through the load port 107. The vision system 188 is includes one or more vision sensors (e.g., two-dimensional or three-dimensional cameras or other sensors) configured to detect edges of the workpieces W disposed in the container 110 and determine from the detected edges a warp or bow of each respective workpiece W. Any suitable non-transitory vision processing algorithm may be disposed in the vision system 188 (such as in a memory of the vision system and executed by any suitable processor of the vision system 188) and / or controller 199, where the non-transitory vision processing algorithm is configured to detect the workpiece edges and determine from the detected edges the bow or warp of the respective workpieces W.

[0031] Fig. 2 illustrates a portion of the load port module 105, which may form a part of the minienvironment 106, where the transport apparatus 108 is movably coupled to the frame 106F (which may form a part of a frame / enclosure of the mini-environment 106) by a track or rail 210. The transport apparatus 108 is driven along the track 210 in direction 299 in any suitable manner, such as by the traverse section 266 of the transport apparatus 108. The traverse section 266 may include a linear drive 220, which in this example is illustrated as a belt drive transmission system, but may be a lead / ball screw transmission system or any other suitable transmission system capable of moving the transport apparatus 108 along the track 210.

[0032] Referring to Figs. 2, 3A, and 3B, the transport apparatus 108 includes a base 370 that is rotatably coupled to a carriage 260 (the carriage may be formed by or a part of the frame 106F). The carriage 260 is movably coupled to and configured to move or otherwise reciprocate linearly along the track 210 under impetus of the linear drive 220. The base 370 is rotatably coupled to the carriage 260 so as to rotate about axis of rotation AX so as to change a direction of extension and retraction Rl, R2 of the transport apparatus 108. A mast (or Z-axis tower / stanchion) 310 is coupled to the base 370 where two or more transport arms 321, 322 are movably coupled to the mast 310 so as to reciprocate along the mast 310 independent of one another in direction 298. Rotation ofAty. Docket No. 390P017040-WO (PCT) / Br. 2230 the base 370 rotates the two or more transport arms 321, 322 with the mast 310 about the axis of rotation AX as a unit.

[0033] The transport apparatus 108 includes a drive section 250 (which drive section 250 may form a part of the traverse section 266) including at least Z-axis drive Z1 (for raising and lowering the first elevator ELV1) and Z-axis drive Z2 (for raising and lowering the second elevator ELV2) for driving a respective one of the transport arms 321, 322 in direction 298. The drive section 250 may include a rotational drive 250R that rotates the mast 310 and the two or more transport arms 321, 322, mounted to the mast 310, about the axis of rotation AX as a unit. The rotational drive 250R is any suitable rotational drive mounted to the frame 106F or the carriage 260, where the carriage 260 is configured to linearly move the transport apparatus 108 along a length of the frame 106F, e.g., in direction 299 as described herein. While drive section 250 is described as having Z- axis drives(s) Zl, Z2 and rotary drive 250R, separate drive sections may be provided for rotating the base 370 about axis of rotation AX and driving the transport arms 321, 322 in direction 298.

[0034] The drive section 250 is coupled to the transport arms 321, 322 and is configured to, such as under control of any suitable controller 199 of the workpiece processing apparatus 100, move each of the two or more transport port arms 321, 322 along the mast 310 independent of movement of each other transport arm 321, 322 along the mast 310, where an end effector 351 A, 35 IB of one of the two or more transport arms 321, 322 is pre-positioned (e.g., pre-staged so as to be moved to a predetermined slot SL1-SL7 of a workpiece container 110 (see Fig. 4)) for a semiconductor pick or place operation (such as of a next workpiece to be picked or such as of a processed workpiece to be placed)) with another end effector 351A, 351B of another of the two or more transport arms 321, 322 in motion along the mast 310 (e.g., picking or placing with one transport arm 321, 322 end effector 351 A, 35 IB may be effected with the another transport arm 321, 322 in motion along the mast). As noted herein, the pre-positioning of the one of the two or more transport arms 321, 322 may be based on a determination of the warp or bow of a workpiece W to be picked or placed by the one of the two or more transport arms 321, 322.Aty. Docket No. 390P017040-WO (PCT) / Br. 2230

[0035] While the transport arms 321, 322 are illustrated as telescoping arms, although the transport arms may be any suitable articulated link arms ALTA including but not limited to those illustrated in Figs. 6A-6F. The transport arms 321, 322 may be any suitable transport arms, such as for example, the linear slide or telescoping transport arm 614 as shown in Fig. 6B or any other suitable transport arm having any suitable arm linkage mechanisms where articulation of the arm is one or more of a linear sliding movement and a rotational movement of one or more arm links. Suitable examples of arm linkage mechanisms can be found in, for example, U.S. Pat. No. 7,578,649 issued Aug. 25, 2009; U.S. Pat. No. 5,794,487 issued Aug. 18, 1998; U.S. Pat. No. 7,946,800 issued May 24, 2011; U.S. Pat. No. 6,485,250 issued Nov. 26, 2002; U.S. Pat. No. 7,891,935 issued Feb. 22, 2011; U.S. Pat. No. 8,419,341 issued Apr. 16, 2013; and U.S. patent application Ser. No. 13 / 293,717 entitled “Dual Arm Robot” and filed on Nov. 10, 2011; U.S. patent application Ser. No. 13 / 861,693 entitled “Linear Vacuum Robot with Z Motion and Articulated Arm” and filed on Sep. 5, 2013; U.S. Pat. No. 7,648,327 issued on January 19, 2010 (entitled “Wafer Engine”); U.S. patent application No. 16 / 257,595 filed on January 25, 2019 (entitled “Automatic Wafer Centering Method and Apparatus”); and U.S. patent application No. 14 / 928,352 filed on October 30, 2015 (entitled “Wafer Aligner”), the disclosures of which are all incorporated by reference herein in their entireties.

[0036] In accordance with the present disclosure, the transport arms 321, 322 may be or be derived from a conventional SC ARA (selective compliant articulated robot arm) type design (see SCARA arm 619 in Fig. 6E), which includes an upper arm, a forearm, and an end-effector, or from a telescoping arm (see telescoping arm 614 in Fig. 6B) or any other suitable arm design, such as a Cartesian linearly sliding arm, wherein any such design configuration also includes a slide body 350A, 350B and at least one substrate holder(s) 351 A, 35 IB (see at least Figs. 6D, 6E, 64F). For example, in one aspect the slide body 35OA, 35OB is mounted to an arm link of any suitable substrate transport apparatus 616-619, (such as of Figs. 6A and 6C-6F). Suitable examples of transport arms can be found in, for example, U.S. patent application Ser. No. 12 / 117,415 entitled “Substrate Transport Apparatus with Multiple Movable Arms Utilizing a Mechanical SwitchAty. Docket No. 390P017040-WQ (PCT) / Br. 2230Mechanism” filed on May 8, 2008 and U.S. Pat. No. 7,648,327 issued on Jan. 19, 2010, the disclosures of which are incorporated by reference herein in their entireties. Where more than one articulated robot arm are provided on a common substrate transport apparatus (see, for example, Figs. 6C, 6D, 6F), the operation of the more than one articulated robot arm may be independent from each other (e.g. the extension / retraction of each arm is independent from other arms), may be operated through a lost motion switch, or may be operably linked in any suitable way such that the arms share at least one common drive axis, where the at least one common drive axis is embodied in (or otherwise defined by) a drive shaft or drive member. The articulated robot arms may have any other desired arrangement such as a frog-leg arm 616 (Fig. 6A) configuration, a leap frog arm 617 (Fig. 6D) configuration, a bi-symmetric arm 618 (Fig. 6C) configuration, multiple SCARA arm configuration (Fig. 6F), etc. Suitable examples of transport arms can be found in U.S. Pat. No. 6,231,297 issued May 15, 2001; U.S. Pat. No. 5,180,276 issued Jan. 19, 1993; U.S. Pat. No. 6,464,448 issued Oct. 15, 2002; U.S. Pat. No. 6,224,319 issued May 1, 2001; U.S. Pat. No. 5,447,409 issued Sep. 5, 1995; U.S. Pat. No. 7,578,649 issued Aug. 25, 2009; U.S. Pat. No. 5,794,487 issued Aug. 18, 1998; U.S. Pat. No. 7,946,800 issued May 24, 2011; U.S. Pat. No. 6,485,250 issued Nov. 26, 2002; U.S. Pat. No. 7,891,935 issued Feb. 22, 2011; U.S. patent application No. 16 / 257,595 filed on January 25, 2019 (entitled “Automatic Wafer Centering Method and Apparatus”); U.S. patent application No. 13 / 293,717 filed on Nov. 10, 2011 (entitled “Dual Arm Robot”); and U.S. patent application No. 13 / 270,844 filed on Oct. 11, 2011 (entitled “Coaxial Drive Vacuum Robot”), the disclosures of which are all incorporated by reference herein in their entireties.

[0037] Again referring to Figs. 3A-4, each of the transport arms 321, 323 is illustrated, for exemplary purposes, as having a slide body 350A, 350B that is movably coupled to the mast 310, such as by any suitable prismatic joint / slide. Each slide body 35OA, 35OB is coupled to a respective Z-axis drive Zl, Z2 in any suitable manner (such as by a lead / ball screw drive, belt / band drive, directly, etc.) so as to be driven in direction 298. At least one end effector 351 A, 35 IB is movably coupled to the respective slide body 350A, 350B for reciprocation along the respectiveAty. Docket No. 390P017040-WQ (PCT) / Br. 2230 slide body that defines a respective axis of extension and retraction Rl, R2 (the axes of extension and retraction Rl, R2, being along the common direction R) of the at least one end effector 351 A, 35 IB. Any suitable end effector drive(s) EDI, ED2 may be disposed within the respective slide body 350A, 35OB for driving the end effector 351 A, 35 IB along the slide body to extend and retract the end effector 351 A, 35 IB. While each transport arm 321, 322 is illustrated with one end effector 351 A, 35 IB and one end effector drive EDI, ED2 for illustrative purposes only, it should be understood that each transport arm 321, 322 may have more than one end effector with a corresponding number of respective end effector drives for driving each of the end effectors along a respective axis of extension and retraction Rl, R2. It is noted one of the transport arms 321, 322 may have a different number of end effectors than another of the transport arms 321, 322. The one or more end effectors 351 A, 35 IB may depend from and move / slide along a respective slide body 35OA, 350B in any suitable manner such as for example, in a manner similar to that described in United States patent numbers 7,100,340, 7,066,707, 7,648,327, and 7,217,076 the disclosures of which are incorporated herein by reference in their entireties).

[0038] The independent Z-axis movement of each transport arm 321, 322 along the mast 310 may provide for the transport apparatus 108 picking and placing workpieces W, notably warped or bowed workpieces W (an example of which is illustrated in Fig. 4 as being disposed in slot or holding location SL7) and / or substantially unwarped or unbowed workpieces, from and to nonadj acent and / or adjacent substrate holding locations, such as any two nonadj acent and / or adjacent slots SL1-SL7 in a workpiece container 110 (see Fig. 4) or any two nonadjacent or adjacent vertically spaced workpiece holding locations of any suitable workpiece holding apparatus (e.g., load lock, stocker, process module, etc.). The vertical distance VD between the end effectors 351 A, 35 IB is variable so that the end effectors 351 A, 35 IB move towards and away from each other, where movement of one transfer arm 321, 322 (and the end effector(s) 351 A, 35 IB carried thereon) in direction 298, 298A, 298B is independent of movement of each other transfer arm 321, 322 (and the end effector(s) 351 A, 35 IB carried thereon) in direction 298, 298A, 298B. The independent or variable positioning between the end effectors 351 A, 35 IB providesAty. Docket No. 390P017040-WQ (PCT) / Br. 2230 for positioning of the end effectors 351 A, 35 IB, such as under command of the controller 199 (see Fig. 1) based on feedback from the vision system 188 with respect to the bow or warp of each workpiece W in the container 110. The end effectors 351 A, 35 IB may be positioned relative to each other and predetermined slots SL1-SL7 to or from which workpieces W are to be place or picked based on the warp or bow of the workpieces W that are to be placed or picked.

[0039] Referring to Figs. 1-6F, an exemplary method for transporting workpieces, such as semiconductor wafers or any other suitable workpieces (such as described herein) will be described. The method includes providing the semiconductor wafer transport apparatus 108 (Fig. 5, Block 500), such of the mini-environment 106 or any other suitable portion of the workpiece processing apparatus 100. The transport apparatus 108 includes or is otherwise coupled to a frame 106F. The transport apparatus 108 includes a mast 310 rotatably coupled to the frame 106, two or more transport arms 321, 322 movably coupled to the mast 310 for reciprocating movement along the mast 310, and a drive section 250 coupled to and configured to move each of the two or more transport arms 321, 322 along the mast 310. The method also includes moving one or more of the two or more transport arms 321, 322, with the drive section 250, along the mast 310 independent of movement of each other transport arm 321 , 322 along the mast 310 (Fig. 5, Block 510), where an end effector 351 A, 35 IB of one of the two or more transport arms 321, 322 is pre-positioned for a semiconductor wafer pick or place operation with another end effector 351 A, 35 IB of another of the two or more transport arms 321, 322 in motion along the mast 310.

[0040] The method may include one or more of, in any suitable combination thereof and / or in suitable combination with any of the features described herein: the frame 106F forms a carriage 260 that is linearly coupled to a track 210 for reciprocation along the track 210; at least one of the two or more transport arms 321, 322 are telescoping arms; at least one of the two or more transport arms 321, 322 are articulated link arms ALTA; the end effector 351A, 351B of the one of the two or more transport arms 321, 322 is pre-positioned for the semiconductor W pick or place operation at a semiconductor wafer holding slot SL 1 -SL7 of a semiconductor wafer transport container 110; the end effector 351A, 351B of the one of the two or more transport arms 321, 322 and the otherAty. Docket No. 390P017040-WQ (PCT) / Br. 2230 end effector 351 A, 35 IB of the other of the two or more transport arms 321, 322 are independently articulated by the drive section 250 and arranged so that the end effector 351 A, 35 IB and the other end effector 351 A, 35 IB are extended and retracted respectively, by the respective transfer arms 321, 322, along a common direction R, relative to a common side of the mast 310, throughout a range of motion of the two or more transfer arms 321, 322; the frame 106F is connected to a substrate processing apparatus or a Stocker; and the pre-positioning of the one of the two or more transport arms 321, 322 may be based on a determination of a warp or bow of a workpiece W to be picked or placed by the one of the two or more transport arms 321, 322.

[0041] Referring to Figs. 1-4 and 6A-7, an exemplary method for transporting workpieces, such as semiconductor wafers or any other suitable workpieces (such as described herein) will be described. The method includes providing a load port module 105 (Fig. 7, Block 700) as described herein. The load port module 105 may include a frame with 106F one load port door 222 or more than one load port doors 222. The more than one load port doors 222 are juxtaposed alongside and substantially level with each other. The load port doors 222 may selectively seal a respective load port or opening 107 of the load port module 105. A workpiece transport apparatus 108 is connected to the frame 106F. The workpiece transport apparatus 108 has a traverse section 266 disposed so as to traverse the more than one, substantially level, load port doors 222 in a traverse direction 299 through a range of traverse motion. The load port module 105 includes an elevator upright or mast 310 (see Figs. 3A-4) that may form a part of the workpiece transport apparatus 108. The elevator upright 310 is connected to the traverse section 266 and supports, from a common side of the elevator upright 310, more than one articulated robot arms 321, 322 so that each of the more than one articulated robot arms 321, 322 are located on and dependent from the common side of the elevator upright 310 throughout the range of traverse motion. A first elevator ELV1 (see Figs. 3A-4) is connected to the elevator upright 310 and a second elevator ELV2 (see Figs. 3A-4) is connected to the elevator upright 310.

[0042] The method includes raising and lowering the first elevator ELV1 (Fig. 7, Block 710) by a drive section 250 with at least a first motor Z1 along a lift axis LA along the elevator upright 310,Aty. Docket No. 390P017040-WO (PCT) / Br. 2230 the first elevator ELV1 being connected to a first arm 321 of the more than one articulated robot arms 321, 322, so as to raise and lower the first arm 321 along the lift axis LA on the common side. The method includes raising and lowering the second elevator ELV2 (Fig. 7, Block 720) along the lift axis LA on the common side by a second motor Z2 of the drive section 250, the second motor Z2 being different than the first motor Z 1 so that the first elevator ELV 1 and second elevator ELV2 are raised and lowered along the lift axis LA on the common side independent of each other. The second elevator ELV2 is connected to a second robot arm 322 of the more than one articulated robot arms 321, 322 via a connection separate and distinct from that of the first elevator ELV1 and the first robot arm 321.

[0043] The method may include one or more of, in any suitable combination thereof and / or in suitable combination with any of the features described herein: the first robot arm 321 has a first end effector 351A, and the second robot arm 322 has a second end effector 351B independent of the first end effector 351 A, where the first robot arm 321 and the second robot arm 322 are independently articulated by the drive section 250 and arranged so that the first end effector 351 A and the second end effector 35 IB are extended and retracted respectively, by a respective one of the first robot arm 321 and the second robot arm 322, along a common direction R, relative to the common side, throughout the range of traverse motion; the elevator upright 310 is configured so that the common direction R is orientated towards a common one of the load port doors 222, when at least one of the first robot arm 321 and the second robot arm 322 is articulated to access an opening 107 closed by the common one of the load port doors 222; the frame 106F is connected to a substrate processing apparatus or a Stocker; at least one of the more than one articulated robot arms 321, 322 is a telescoping arm; at least one of the more than one articulated robot arms 321, 222 is an articulated link arm ALTA; and raising and lowering the first elevator ELV1 and the second elevator ELV2 may be based on a determination of a warp or bow of a workpiece W to be picked or placed by the one of the two or more transport arms 321, 322.Aty. Docket No. 390P017040-WO (PCT) / Br. 2230

[0044] The following are provided in accordance with the present disclosure and may be employed individually, in any combination with each other, and / or in any combination with the features described above.

[0045] In accordance with the present disclosure, a workpiece transport apparatus is provided. The workpiece transport apparatus includes a frame, a mast rotatably coupled to the frame, and two or more transport arms movably coupled to the mast for reciprocating movement along the mast. A drive section is provided and is coupled to and configured to move each of the two or more transport port arms along the mast independent of movement of each other transport arm along the mast, where an end effector of one of the two or more transport arms is pre-positioned for a semiconductor wafer pick or place operation with another end effector of another of the two or more transport arms in motion along the mast.

[0046] The workpiece transport may include one or more of the following, individually or in any suitable combination with each other or in any suitable combination with the features described herein: the frame forms a carriage that is linearly coupled to a track for reciprocation along the track; the transport arms are telescoping arms; the transport arms are articulated link arms; the end effector of the one of the two or more transport arms is pre-positioned for the semiconductor pick or place operation at a semiconductor wafer holding slot of a semiconductor wafer transport container; the end effector of the one of the two or more transport arms and the other end effector of the other of the two or more transport arms are independently articulated by the drive section and arranged so that the end effector and the other end effector are extended and retracted respectively, by the respective transfer arms, along a common direction, relative to a common side of the mast, throughout a range of motion of the two or more transfer arms; the frame is connected to a substrate processing apparatus or a Stocker; the pre-positioning of the one of the two or more transport arms is based on a determination of the warp or bow of a workpiece to be picked or placed by the one of the two or more transport arms.Aty. Docket No. 390P017040-WQ (PCT) / Br. 2230

[0047] In accordance with the present disclosure, a load port module is provided. The load port module includes: a frame with more than one load port doors juxtaposed alongside and substantially level with each other; a workpiece transport apparatus connected to the frame, the workpiece transport apparatus having a traverse section disposed so as to traverse the more than one, substantially level, load port doors in a traverse direction through a range of traverse motion; an elevator upright, connected to the traverse section, the elevator upright supports, from a common side of the elevator upright, more than one articulated robot arms so that each of the more than one articulated robot arms are located on and dependent from the common side of the elevator upright throughout the range of traverse motion; a first elevator connected to the elevator upright and configured so that the first elevator is raised and lowered by a drive section with at least a first motor along a lift axis along the elevator upright, the first elevator being connected to a first robot arm of the more than one articulated robot arms, so as to raise and lower the first arm along the lift axis on the common side; and a second elevator connected to the elevator upright and configured so that the second elevator is raised and lowered along the lift axis on the common side by a second motor of the drive section, the second motor being different than the first motor so that the first elevator and second elevator are raised and lowered along the lift axis on the common side independent of each other, wherein the second elevator is connected to a second robot arm of the more than one articulated robot arms via a connection separate and distinct from that of the first elevator and the first robot arm.

[0048] The load port module may include one or more of the following, individually or in any suitable combination with each other or in any suitable combination with the features described herein: the first arm has a first end effector, and the second robot arm has a second end effector independent of the first end effector, and wherein the first robot arm and the second robot arm are independently articulated by the drive section and arranged so that the first end effector and the second end effector are extended and retracted respectively, by a respective one of the first robot arm and the second robot arm, along a common direction, relative to the common side, throughout the range of traverse motion; the elevator upright is configured so that the common direction isAty. Docket No. 390P017040-WO (PCT) / Br. 2230 orientated towards a common one of the load port doors, when at least one of the first robot arm and the second robot arm is articulated to access an opening closed by the common one of the load port doors; the frame is connected to a substrate processing apparatus or a Stocker; at least one of the more than one articulated robot arms is a telescoping arm; at least one of the more than one articulated robot arms is an articulated link arm; and raising and lowering the first elevator and the second elevator is based on a determination of a warp or bow of a workpiece to be picked or placed by the one of the two or more transport arms.

[0049] In accordance with the present disclosure, a method is provided. The method includes providing a semiconductor wafer transport apparatus. The semiconductor wafer transport apparatus includes: a frame, a mast rotatably coupled to the frame, two or more transport arms movably coupled to the mast for reciprocating movement along the mast, and a drive section coupled to and configured to move each of the two or more transport port arms along the mast. The method also includes moving one or more of the two or more transport arms, with the drive section, along the mast independent of movement of each other transport arm along the mast, where an end effector of one of the two or more transport arms is pre-positioned for a semiconductor wafer pick or place operation with another end effector of another of the two or more transport arms in motion along the mast.

[0050] The method may include one or more of the following, individually or in any suitable combination with each other or in any suitable combination with the features described herein: the frame forms a carriage that is linearly coupled to a track for reciprocation along the track; at least one of the two or more transport arms are telescoping arms; at least one of the two or more transport arms are articulated link arms; the end effector of the one of the two or more transport arms is prepositioned for the semiconductor wafer pick or place operation at a semiconductor wafer holding slot of a semiconductor wafer transport container; the end effector of the one of the two or more transport arms and the other end effector of the other of the two or more transport arms are independently articulated by the drive section and arranged so that the end effector and the other end effector are extended and retracted respectively, by the respective transfer arms, along aAty. Docket No. 390P017040-WO (PCT) / Br. 2230 common direction, relative to a common side of the mast, throughout a range of motion of the two or more transfer arms; the frame is connected to a substrate processing apparatus or a Stocker; and the pre-positioning of the one of the two or more transport arms is based on a determination of a warp or bow of a workpiece to be picked or placed by the one of the two or more transport arms.

[0051] In accordance with the present disclosure, a method is provided. The method includes providing a load port module. The load port module includes: a frame with more than one load port doors juxtaposed alongside and substantially level with each other; a workpiece transport apparatus connected to the frame, the workpiece transport apparatus having a traverse section disposed so as to traverse the more than one, substantially level, load port doors in a traverse direction through a range of traverse motion; an elevator upright, connected to the traverse section, the elevator upright supports, from a common side of the elevator upright, more than one articulated robot arms so that each of the more than one articulated robot arms are located on and dependent from the common side of the elevator upright throughout the range of traverse motion; a first elevator connected to the elevator upright; and a second elevator connected to the elevator upright. The method also includes: raising and lowering the first elevator by a drive section with at least a first motor along a lift axis along the elevator upright, the first elevator being connected to a first robot arm of the more than one articulated robot arms, so as to raise and lower the first robot arm along the lift axis on the common side; and raising and lowering the second elevator along the lift axis on the common side by a second motor of the drive section, the second motor being different than the first motor so that the first elevator and second elevator are raised and lowered along the lift axis on the common side independent of each other, wherein the second elevator is connected to a second robot arm of the more than one articulated robot arms via a connection separate and distinct from that of the first elevator and the first robot arm.

[0052] The method may include one or more of the following, individually or in any suitable combination with each other or in any suitable combination with the features described herein: the first robot arm has a first end effector, and the second robot arm has a second end effector independent of the first end effector, and wherein the first robot arm and the second robot arm areAty. Docket No. 390P017040-WO (PCT) / Br. 2230 independently articulated by the drive section and arranged so that the first end effector and the second end effector are extended and retracted respectively, by a respective one of the first robot arm and the second robot arm, along a common direction, relative to the common side, throughout the range of traverse motion; the elevator upright is configured so that the common direction is orientated towards a common one of the load port doors, when at least one of the first robot arm and the second robot arm is articulated to access an opening closed by the common one of the load port doors; the frame is connected to a substrate processing apparatus or a Stocker; at least one of the more than one articulated robot arms is a telescoping arm; at least one of the more than one articulated robot arms is an articulated link arm; and raising and lowering the first elevator and the second elevator is based on a determination of a warp or bow of a workpiece to be picked or placed by the one of the two or more transport arms.

[0053] It should be understood that the foregoing description is only illustrative of the present disclosure. Various alternatives and modifications can be devised by those skilled in the art without departing from the present disclosure. Accordingly, the present disclosure is intended to embrace all such alternatives, modifications and variances that fall within the scope of any claims appended hereto. Further, the mere fact that different features are recited in mutually different dependent or independent claims does not indicate that a combination of these features cannot be advantageously used, such a combination remaining within the scope of the present disclosure.

[0054] What is claimed is:

Claims

Aty. Docket No. 390P017040-WQ (PCT) / Br. 2230CLAIMS1. A semiconductor wafer transport apparatus comprising: a frame; a mast rotatably coupled to the frame; two or more transport arms movably coupled to the mast for reciprocating movement along the mast; a drive section coupled to and configured to move each of the two or more transport port arms along the mast independent of movement of each other transport arm along the mast, where an end effector of one of the two or more transport arms is pre-positioned for a semiconductor wafer pick or place operation with another end effector of another of the two or more transport arms in motion along the mast.

2. The semiconductor wafer transport apparatus of claim 1, wherein the frame forms a carriage that is linearly coupled to a track for reciprocation along the track.

3. The semiconductor wafer transport apparatus of claim 1, wherein one or more of the transport arms are telescoping arms.

4. The semiconductor wafer transport apparatus of claim 1, wherein one or more of the transport arms are articulated link arms.

5. The semiconductor wafer transport apparatus of claim 1, wherein the end effector of the one of the two or more transport arms is pre-positioned for the semiconductor wafer pick or place operation at a semiconductor wafer holding slot of a semiconductor wafer transport container.

6. The semiconductor wafer transport apparatus of claim 1, wherein the end effector of the one of the two or more transport arms and the other end effector of the other of the two or moreAty. Docket No. 390P017040-WQ (PCT) / Br. 2230 transport arms are independently articulated by the drive section and arranged so that the end effector and the other end effector are extended and retracted respectively, by the respective transfer arms, along a common direction, relative to a common side of the mast, throughout a range of motion of the two or more transfer arms.

7. The semiconductor wafer transport apparatus of claim 1, wherein the frame is connected to a substrate processing apparatus or a Stocker.

8. A load port module comprising: a frame with more than one load port doors juxtaposed alongside and substantially level with each other; a workpiece transport apparatus connected to the frame, the workpiece transport apparatus having a traverse section disposed so as to traverse the more than one, substantially level, load port doors in a traverse direction through a range of traverse motion; an elevator upright, connected to the traverse section, the elevator upright supports, from a common side of the elevator upright, more than one articulated robot arms so that each of the more than one articulated robot arms are located on and dependent from the common side of the elevator upright throughout the range of traverse motion; a first elevator connected to the elevator upright and configured so that the first elevator is raised and lowered by a drive section with at least a first motor along a lift axis along the elevator upright, the first elevator being connected to a first robot arm of the more than one articulated robot arms, so as to raise and lower the first arm along the lift axis on the common side; and a second elevator connected to the elevator upright and configured so that the second elevator is raised and lowered along the lift axis on the common side by a second motor of the drive section, the second motor being different than the first motor so that the first elevator and second elevator are raised and lowered along the lift axis on the common side independent of each other, whereinAty. Docket No. 390P017040-WQ (PCT) / Br. 2230 the second elevator is connected to a second robot arm of the more than one articulated robot arms via a connection separate and distinct from that of the first elevator and the first robot arm.

9. The load port module of claim 8, wherein the first arm has a first end effector, and the second robot arm has a second end effector independent of the first end effector, and wherein the first robot arm and the second robot arm are independently articulated by the drive section and arranged so that the first end effector and the second end effector are extended and retracted respectively, by a respective one of the first robot arm and the second robot arm, along a common direction, relative to the common side, throughout the range of traverse motion.

10. The load port apparatus of claim 9, wherein the elevator upright is configured so that the common direction is orientated towards a common one of the load port doors, when at least one of the first robot arm and the second robot arm is articulated to access an opening closed by the common one of the load port doors.

11. The load port apparatus of claim 8, wherein the frame is connected to a substrate processing apparatus or a Stocker.

12. The load port apparatus of claim 8, wherein at least one of the more than one articulated robot arms is a telescoping arm.

13. The load port apparatus of claim 8, wherein at least one of the more than one articulated robot arms is an articulated link arm.

14. A method comprising: providing a semiconductor wafer transport apparatus comprising: a frame, a mast rotatably coupled to the frame,Aty. Docket No. 390P017040-WQ (PCT) / Br. 2230 two or more transport arms movably coupled to the mast for reciprocating movement along the mast, and a drive section coupled to and configured to move each of the two or more transport port arms along the mast; and moving one or more of the two or more transport arms, with the drive section, along the mast independent of movement of each other transport arm along the mast, where an end effector of one of the two or more transport arms is pre-positioned for a semiconductor wafer pick or place operation with another end effector of another of the two or more transport arms in motion along the mast.

15. The method of claim 14, wherein the frame forms a carriage that is linearly coupled to a track for reciprocation along the track.

16. The method of claim 14, wherein at least one of the two or more transport arms are telescoping arms.

17. The method of claim 14, wherein at least one of the two or more transport arms are articulated link arms.

18. The method of claim 14, wherein the end effector of the one of the two or more transport arms is pre-positioned for the semiconductor wafer pick or place operation at a semiconductor wafer holding slot of a semiconductor wafer transport container.

19. The method of claim 14, wherein the end effector of the one of the two or more transport arms and the other end effector of the other of the two or more transport arms are independently articulated by the drive section and arranged so that the end effector and the other end effector are extended and retracted respectively, by the respective transfer arms, along a common direction, relative to a common side of the mast, throughout a range of motion of the two or more transfer arms.Aty. Docket No. 390P017040-WQ (PCT) / Br. 223020. The method of claim 14, wherein the frame is connected to a substrate processing apparatus or a Stocker.

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