Probe system comprising probe module

Abstract

A probe system according to an embodiment may comprise: a housing providing an inspection space; an arm module disposed in the inspection space so as to fix a specimen; and a probe module disposed in the inspection space and including a probe assembly for detecting characteristics of the specimen. The probe assembly may include: a probe including a first end in contact with the specimen and a second end opposite to the first end; a probe housing connected to the second end of the probe; and a rotating member connected to the probe housing and rotatable about a rotation axis. If the specimen is stretched, contracted, rotated, or moved, the rotating member of the probe assembly may rotate such that the first end of the probe is moved, thereby constantly maintaining the position of contact between the first end of the probe and the specimen.

Description

Probe system including a probe module

[0001] The following description relates to a probe system including a probe module, and more specifically, to a probe system for a tensile or flexible specimen.

[0002] In various industrial environments such as semiconductors and secondary batteries, it is necessary to inspect the material properties of specimens, such as electromagnetic, dielectric, optical, and chemical properties. Since the material properties of specimens are influenced by internal or external factors, various factors surrounding the specimen need to be controlled during the process of detecting specimen properties.

[0003] For example, when testing a tensile or flexible specimen, the probe system can measure material properties when the specimen is in a tensile or contracted state, or when it is bent.

[0004] A probe system can measure the physical properties of a specimen while the probe of the probe module is in contact with the specimen. However, if the specimen is stretched, contracted, or bent, the position of the probe in contact with the specimen may change, and if the contact position or state between the specimen and the probe changes, it may cause errors in the experimental results.

[0005] To prevent such problems, the probe system needs to precisely move the probe in contact with the specimen according to changes in the specimen. However, it is difficult to move the probe accurately in conjunction with the state of the specimen, and there was a limitation in that it required the provision of separate precision sensors and precision power devices to implement this.

[0006] The aforementioned background technology is one that the inventor possessed or acquired in the process of deriving the contents of the disclosure of the present application, and it cannot be considered as prior art disclosed to the general public prior to the filing of this application.

[0007] The objective according to one embodiment is to provide a probe system that maintains the contact position between the probe and the specimen even when the specimen is stretched, contracted, or bent, or to allow the probe to track and move the specimen.

[0008] The objective according to one embodiment is to provide a probe system that does not require additional sensors and power devices and does not require moving the probe during the experiment.

[0009] The objective according to one embodiment is to provide a probe system that is advantageous for miniaturization and weight reduction, has improved portability, is easy to operate, and / or has improved economic efficiency and manufacturing efficiency.

[0010] A probe system according to one embodiment may include a housing that provides an inspection space; an arm module disposed in the inspection space and for fixing a specimen; and a probe module comprising a probe assembly disposed in the inspection space and for detecting characteristics of the specimen.

[0011] In one embodiment, the probe assembly may include a probe comprising a first end contacting the specimen and a second end opposite to the first end, a probe housing connected to the second end of the probe, and a rotatable member connected to the probe housing and rotatable about a rotation axis. In one embodiment, when the specimen is stretched, contracted, rotated, or moved, the rotatable member may rotate and move the first end of the probe to maintain a constant contact position between the first end of the probe and the specimen.

[0012] In one embodiment, the arm module may include a first arm that fixes one end of the specimen and a second arm that is positioned opposite the first arm with the specimen as the center and fixes the other end of the specimen.

[0013] In one embodiment, the probe system comprises a plurality of probe modules, and the plurality of probe modules may include a first probe module and a second probe module arranged opposite each other with respect to the specimen.

[0014] In one embodiment, the first probe module may be positioned on one side of the first arm and the second arm, and the second probe module may be positioned on the other side of the first arm and the second arm opposite to the first probe module.

[0015] In one embodiment, the first probe module may be positioned adjacent to the first arm and opposite to the second arm with respect to the specimen, and the second probe module may be positioned adjacent to the second arm and opposite to the first arm with respect to the specimen.

[0016] In one embodiment, the first probe module is disposed on the first arm, and

[0017] The second probe module can be placed on the second arm.

[0018] In one embodiment, the plurality of probe modules may each include a plurality of the first probe module and the second probe module.

[0019] In one embodiment, the probe system includes a plurality of probe modules, and

[0020] A plurality of probe modules may include a first probe module and a second probe module disposed adjacent to each other on one side of the specimen.

[0021] In one embodiment, the arm module may include at least three arms arranged to surround the specimen and secure a plurality of ends of the specimen.

[0022] In one embodiment, the probe may have a shape that extends from the second end to the first end and bends toward the specimen.

[0023] In one embodiment, the first end of the probe may be configured to have a higher surface friction coefficient than other regions of the probe assembly in order to maintain contact with the specimen.

[0024] In one embodiment, the probe assembly may further include a guide rail installed in the inspection space and a guide member slidable along the guide rail and connected to the rotating member.

[0025] A probe system according to one embodiment can maintain a contact position between the probe and the specimen, or the probe moves to track the specimen, thereby accurately and precisely measuring the material properties of the specimen under conditions where the specimen is stretched, compressed, or bent.

[0026] A probe system according to one embodiment is advantageous for miniaturization and weight reduction, improves portability and ease of operation, and / or can improve economic efficiency and manufacturing efficiency.

[0027] The effects of the probe system according to one embodiment are not limited to those mentioned above, and other unmentioned effects will be clearly understood by a person skilled in the art from the specimen below.

[0028] The following drawings attached to this specification illustrate a preferred embodiment of the present invention and serve to further enhance understanding of the technical concept of the present invention together with the detailed description of the invention; therefore, the present invention should not be interpreted as being limited only to the matters described in such drawings.

[0029] FIG. 1 is a perspective view of a device including a probe system according to one embodiment.

[0030] FIG. 2a is a perspective view of a probe system according to one embodiment.

[0031] FIG. 2b is an exploded perspective view of a probe system according to one embodiment.

[0032] FIG. 2c is a plan view of a probe system according to one embodiment.

[0033] FIG. 2d is an enlarged perspective view of a probe system according to one embodiment.

[0034] FIG. 3a is a perspective view of a probe module according to one embodiment.

[0035] FIG. 3b is an exploded perspective view of a part of a probe module configuration according to one embodiment.

[0036] FIG. 3c is an exploded perspective view of a part of a probe module configuration according to one embodiment.

[0037] FIG. 4 is a plan view of a probe system according to one embodiment.

[0038] FIG. 5 is a plan view of a probe system according to one embodiment.

[0039] FIG. 6 is a plan view of a probe system according to one embodiment.

[0040] FIG. 7 is a plan view of a probe system according to one embodiment.

[0041] FIG. 8a is a perspective view of a probe assembly according to one embodiment.

[0042] FIG. 8b is a perspective view of a probe assembly according to one embodiment.

[0043] FIG. 8c is a perspective view of a probe assembly according to one embodiment.

[0044] FIG. 8d is a perspective view of a probe assembly according to one embodiment.

[0045] FIG. 8e is a perspective view of a probe assembly according to one embodiment.

[0046] Hereinafter, embodiments are described in detail with reference to the attached drawings. However, various modifications may be made to the embodiments, and the scope of the rights is not limited or restricted by these embodiments. It should be understood that all modifications, equivalents, and substitutions to the embodiments are included within the scope of the rights.

[0047] The terms used in the embodiments are for illustrative purposes only and should not be interpreted as intended to be limiting. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this specification, terms such as "comprising" or "having" are intended to indicate the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof.

[0048] Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as generally understood by those skilled in the art to which the embodiments pertain. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology, and should not be interpreted in an ideal or overly formal sense unless explicitly defined in this application.

[0049] In addition, when describing with reference to the attached drawings, identical components are assigned the same reference numeral regardless of drawing symbols, and redundant descriptions thereof are omitted. In describing the embodiments, if it is determined that a detailed description of related prior art could unnecessarily obscure the essence of the embodiments, such detailed description is omitted.

[0050] In addition, terms such as first, second, A, B, (a), (b), etc., may be used when describing the components of the embodiments. These terms are intended merely to distinguish the components from other components, and the nature, order, or sequence of the components is not limited by these terms. Where it is stated that a component is "connected," "combined," or "connected" to another component, it should be understood that while the component may be directly connected or connected to the other component, another component may also be "connected," "combined," or "connected" between each component.

[0051] Components included in any one embodiment and components having common functions shall be described using the same names in other embodiments. Unless otherwise stated, the description in any one embodiment may also apply to other embodiments, and specific descriptions shall be omitted to the extent of overlap.

[0052] FIG. 1 is a perspective view of a device (10) including a probe system (1) according to one embodiment.

[0053] Referring to FIG. 1, a device (10) according to one embodiment may include at least some of a probe system (1), a control unit (3), and a main body (5).

[0054] In one embodiment, the device (10) may be a test device, an experiment device, an analysis device, or a research device. Hereinafter, the case where the device (10) is a test device is described as an example, but the use and purpose of the device (10) are not limited thereto. The device (10) can test the physical, chemical, or optical properties of a specimen or substrate using a probe system (1).

[0055] In one embodiment, the probe system (1) may be coupled to the main body (5) of the device (10). The main body (5) may be electrically connected to the probe system (1). For example, the main body (5) may supply electricity to drive the probe system (1). Or, the main body (5) may control the operation of the probe system (1). Or, the main body (5) may be electrically connected to the probe system (1) to transmit and receive electrical signals. Or, the main body (5) may create a test environment for the probe system (1). The main body (5) may include various components for changing environmental factors such as pressure, temperature, etc. inside the probe system (1).

[0056] In one embodiment, the control unit (3) can control the operation of the probe system (1) and the device (10). For example, the control unit (3) may include an input module operable by a user to receive an input signal for operating the device (10) from the user. Alternatively, for example, the control unit (3) may include at least one output module, and the at least one output module may be an acoustic output device or a visual output device.

[0057] However, the device (10) of FIG. 1 is an exemplary description of one embodiment of a probe system (1) according to one embodiment of the present disclosure, and the probe system (1) is not limited thereto and can be applied to various devices or devices.

[0058] FIG. 2a is a perspective view of a probe system according to one embodiment, FIG. 2b is an exploded perspective view of a probe system according to one embodiment, FIG. 2c is a plan view of a probe system according to one embodiment, and FIG. 2d is an enlarged perspective view of a probe system according to one embodiment.

[0059] Referring to FIGS. 2a, 2b, 2c and 2d, a probe system (1) according to one embodiment may include at least some of a housing (111), a probe module (14), and an arm module (20).

[0060] In the following description, details that overlap with the above-described content are omitted. It is understood that in the probe system (1), some components and structures may be replaced, added, or omitted to the extent that they are easily understood by a person skilled in the art with reference to the drawings and description below. Furthermore, at least one component or feature of the previously described embodiments may be combined in the probe system (1) unless it is not technically obvious.

[0061] In one embodiment, the probe system (1) can detect the material properties of the specimen (W). For example, the specimen (W) may be a semiconductor device formed on a substrate (wafer). Alternatively, the specimen (W) may be various types of semiconductor devices formed on a wafer.

[0062] In one embodiment, the specimen (W) may be a tensile or flexible substrate. The specimen (W) may be stretched or contracted, or bent, flexed, or partially moved, and accordingly, the material properties of the specimen (W), e.g., electromagnetic, dielectric, optical, and chemical properties, may change. The probe system (1) may detect the material properties of the specimen (W) by being coupled with a device (e.g., device (10) of FIG. 1) or other equipment. For example, the specimen (W) may be a flexible printed circuit board (FPCB).

[0063] In one embodiment, the specimen (W) may include an inspection area (W1). The inspection area (W1) may be a portion of the specimen (W) in which material properties are measured by the probe system (1). For example, the inspection area (W1) may be a portion of which a conductive member is coated, deposited, or attached.

[0064] A probe system (1) according to one embodiment may include a housing (111), a vacuum port (12), a probe module (14), a connector (15), a temperature control unit (17), and a height control module (19).

[0065] In one embodiment, the housing (111) may form the exterior of the probe system (1). In one embodiment, the housing (111) may further include a cover (112) and a window (113) provided in the cover (112).

[0066] In one embodiment, the housing (111) is formed with one side open and may provide an inspection space (1111) for inspecting the characteristics of a specimen (W). For example, the upper part of the housing (111) (e.g., in the +Z direction) may be formed open.

[0067] For example, the inspection space (1111) may have a volume of 100 cc or less. According to this structure, the process of forming the inspection space (1111) into a vacuum or purging gas into the inspection space (1111) for the inspection of the specimen (W) can proceed quickly. Therefore, the probe system (1) can accurately measure the characteristics of the specimen (W) even when the characteristics of the specimen (W) are sensitive to the surrounding environment.

[0068] In one embodiment, the cover (112) may be connected to one side of the housing (111) (e.g., in the +Z direction) so that the inspection space (1111) is sealed. For example, the cover (112) may be connected to the open top of the housing (111).

[0069] In one embodiment, the cover (112) can maintain a vacuum or gas purge state of the inspection space (1111) by sealing the inspection space (1111). The cover (112) may be provided with a fixing screw that can be fixedly coupled to the housing (111). The fixing screw may be provided, for example, at an outer corner of the cover (112) and coupled to a fixing groove formed on the upper surface of the housing (111).

[0070] In one embodiment, the window (113) may be formed of a transparent material so that the inspection space (1111) can be viewed from the outside of the housing (111). The window (113) may be formed of a material such as, for example, quartz, sapphire, glass, tempered glass, or acrylic.

[0071] In one embodiment, light may be irradiated into the inspection space (1111) through the window (113). Accordingly, a method for detecting the optical properties of the specimen (W) may be performed. Alternatively, conversely, an electrical signal may be input to the probe system (1) to detect the optical properties generated in the specimen (W). For example, the window (113) may be placed in the center of the cover (112). However, this is exemplary, and the placement of the window (113) is not limited thereto.

[0072] In one embodiment, the vacuum port (12) may be formed by penetrating the housing (111) so as to create a vacuum in the inspection space (1111). In one embodiment, the vacuum port (12) may serve as a path for exhausting gas from the inspection space (1111) by being connected to an external exhaust line. For example, the vacuum port (12) may serve as a path for removing air from the inspection space (1111) by being connected to the device (10).

[0073] In one embodiment, the vacuum port (12) can inject gas and moisture into the inspection space (1111). When gas and moisture are injected into the inspection space (1111) during the process of detecting at least one of the electrical, optical, dielectric, magnetic, and chemical properties of the specimen (W), the vacuum port (12) can serve as a path for injecting gas.

[0074] In one embodiment, the vacuum ports (12) may be provided in multiple numbers. For example, two vacuum ports (12) may be placed on one side (e.g., in the -X direction) of the housing (111). However, this is exemplary and the number and arrangement of the vacuum ports (12) are not limited thereto.

[0075] In one embodiment, the arm module (20) may be placed in the inspection space (1111). The arm module (20) may be configured to fix or hold the specimen (W). The arm module (20) may be positioned so that the specimen (W) is located in a substantial center or facing the window (113) within the inspection space (1111). The arm module (20) fixes at least one end or at least a portion of the specimen (W) and may pull the specimen (W) or move a portion of the specimen (W) relatively.

[0076] In one embodiment, the arm module (20) may include a plurality of arms (20a, 20b). The plurality of arms (20a, 20b) may be spaced apart from each other with respect to the specimen (W). The plurality of arms (20a, 20b) may include a first arm (20a) and a second arm (20b). The first arm (20a) and the second arm (20b) may be arranged facing each other with respect to the specimen (W).

[0077] For example, the first arm (20a) may be positioned on one side of the specimen (W) to secure one end of the specimen (W) (e.g., the end in the -Y direction). For example, the second arm (20b) may be positioned on the other side of the specimen (W) to secure the other end of the specimen (W) (e.g., the end in the +Y direction).

[0078] However, this is merely an example, and the arm module (20) may include only one arm or three or more arms. Additionally, multiple arms (20a, 20b) may be arranged adjacent to each other to surround the specimen (W).

[0079] In one embodiment, the arm module (20) may be controlled by an arm control member (21). The arm control member (21) may be connected to and controlled by the main body (5) or an external structure. The arm control member (21) may move, pull, push, or rotate the arm module (20), and accordingly, the specimen (W) fixed to the arm module (20) may be stretched, contracted, rotated, or moved.

[0080] In one embodiment, the arm module (20) may include a load cell. The load cell may be a sensor for measuring a force (e.g., stress) applied to a specimen (W).

[0081] A load cell according to one embodiment may be disposed inside the arm module (20). For example, the load cell may be embedded in at least one of the first arm (20a) and the second arm (20b) to measure the force applied to the specimen (W).

[0082] A load cell according to one embodiment may be connected to an arm module (20). For example, the load cell may be connected to at least one of a first arm (20a) and a second arm (20b) to measure the force applied to a specimen (W).

[0083] In one embodiment, the probe module (14) may be placed in an inspection space (1111). The probe module (14) may include probe modules (14a, 14b) for contacting the specimen (W) to detect various physical properties of the specimen (W).

[0084] In one embodiment, the probe system (1) may be equipped with a plurality of probe modules (14). The probe system (1) can simultaneously detect electrical characteristics at multiple points of a specimen (W) through a plurality of probe modules (14a, 14b).

[0085] For example, a plurality of probe modules (14a, 14b) may include a first probe module (14a) and a second probe module (14b). For example, a plurality of probe modules (14a, 14b) are arranged to surround a specimen (W) and may come into contact with two or more different points on the specimen (W).

[0086] In one embodiment, a plurality of probe modules (14a, 14b) may be arranged facing each other with respect to the specimen (W). For example, the first probe module (14a) may be placed on one side (e.g., +X direction) of the first arm (20a) and the second arm (20b), and the first probe module (14b) may be placed on the other side (e.g., -X direction) of the first arm (20a) and the second arm (20b) opposite to the first probe module (14a).

[0087] For example, as shown in the drawing, a plurality of arms (20a, 20b) and a plurality of probe modules (14a, 14b) may be arranged in a direction that surrounds the specimen (W). For example, the plurality of arms (20a, 20b) and the plurality of probe modules (14a, 14b) may surround the specimen (W) in the order of the first arm (20a), the first probe module (14a), the second arm (20b), and the second probe module (14b). In this case, the space efficiency of the probe system (1) can be improved, and the contact between the plurality of probe modules (14a, 14b) and the specimen (W) can be stably maintained even when the specimen (W) moves in various directions. In addition, since the plurality of probe modules (14a, 14b) are spaced apart from the plurality of arms (20a, 20b), the probe system (1) can reduce experimental error caused by the fixing force of the plurality of arms (20a, 20b) clamping the specimen (W).

[0088] In one embodiment, a plurality of probe modules (14a, 14b) may each include a plurality of first probe modules (14a) and second probe modules (14b). For example, a plurality of probe modules (14a, 14b) may include two first probe modules (14a) and two second probe modules (14b). By forming at least four contact points with the specimen (W), the plurality of probe modules (14a, 14b) can increase the contact ductility with the specimen (W) and allow experiments on changes in the material properties of the specimen (W) to be performed at various locations.

[0089] In one embodiment, the connector (15) can transmit and receive electrical signals from the probe module (14). Alternatively, the connector (15) can supply electricity for driving the probe module (14). For example, the connector (15) may be positioned on one side of the housing (111).

[0090] In one embodiment, the temperature control unit (17) can control the temperature of the specimen (W). For example, the temperature control unit can control the temperature of the specimen (W) in a range of -40 degrees Celsius or higher and 150 degrees Celsius or lower. However, this is exemplary, and the range in which the temperature control unit (17) controls the temperature of the specimen (W) is not limited thereto. For example, the temperature control unit (17) can control the temperature of the specimen (W) in a range of 80 K Fahrenheit or higher and 373 K Fahrenheit or lower.

[0091] In one embodiment, the height adjustment module (19) can adjust the height of the probe module (14). The probe module (14) can move freely in the height direction (e.g., Z-axis direction) by means of the height adjustment module (19). The height of the probe module (14) can change freely based on the movement of the specimen (W). Alternatively, the height adjustment module (19) can adjust and fix the height of the probe module (14).

[0092] For example, the height adjustment module (19) may be secured or unlocked by tightening or loosening it with a tool such as a wrench, including a bolt. When unlocked, the height adjustment module (19) may move along a linear guide in the height direction.

[0093] In one embodiment, the height adjustment module (19) includes a spring, and when the height adjustment module (19) is released, the spring can press the probe module (14) upward to move it.

[0094] FIG. 3a is a perspective view of a probe module according to one embodiment, FIG. 3b is an exploded perspective view of a part of the probe module according to one embodiment, and FIG. 3c is an exploded perspective view of a part of the probe module according to one embodiment.

[0095] Referring to FIGS. 3a, 3b, and 3c, a probe module (14) according to one embodiment may include at least some of a base (141), a guide rail (142), a guide member (143), a rotating member (144), a probe assembly (145), a connecting part (146), and an elastic member (147).

[0096] In the following description, details that overlap with the above-described content are omitted. It is understood that in the probe module (14), some configurations and structures may be replaced, added, or omitted to the extent that they are easily understood by a person skilled in the art with reference to the drawings and descriptions below. Furthermore, at least one configuration or feature of the previously described embodiments may be combined in the probe system (1) including the probe module (14), unless it is not technically obvious.

[0097] In one embodiment, the probe module (14) includes a sliding, rotatable, or movable structure so as to maintain a constant contact position between the probe assembly (145) and the specimen (W).

[0098] For example, when the specimen (W) is stretched, contracted, rotated, or moved by the arm module (20), the probe module (14) can move the probe assembly (145) to maintain a constant contact position between the probe assembly (145) and the specimen (W).

[0099] In the following, exemplary components of a probe module (14) and a probe assembly (145) are described, and a structure for maintaining a constant contact position between the probe assembly (145) and the specimen (W) is described. However, this is merely one example of implementation, and in actual implementation, the components of the probe module (14) and the probe assembly (145) may be changed or replaced in various ways.

[0100] In one embodiment, the probe assembly (145) may include at least some of the probe (1451), the probe housing (1452), and the rotating member (144).

[0101] In one embodiment, the probe (1451) has a longitudinal direction and a pointed end formed to be able to contact the specimen (W). The probe (1451) may include a first end (1451a) and a second end (1451b). The first end (1451a) may be one end of the probe (1451) that contacts the specimen (W). Alternatively, the first end (1451a) may be the probe tip of the probe (1451). The second end (1451b) may be the other end opposite to the first end (1451a).

[0102] For example, the first end (1451a) of the probe (1451) may be formed to bend toward the specimen (W) by a specified angle with respect to the longitudinal direction (e.g., Y-axis direction) of the probe (1451). By forming the first end (1451a) of the probe (1451) to bend, the probe (1451) can stably contact the specimen (W).

[0103] In one embodiment, the first end (1451a) of the probe (1451) may be configured to have a higher surface friction coefficient than other areas of the probe assembly (145) in order to maintain contact with the specimen (W). Static friction force may be applied between the first end (1451a) of the probe (1451) and the specimen (W), and contact between the first end (1451a) of the probe (1451) and the specimen (W) may be maintained if no external force exceeding the static friction force is applied. By forming the surface friction coefficient of the first end (1451a) to be high, the static friction force can be increased, and contact between the first end (1451a) of the probe (1451) and the specimen (W) can be stably maintained.

[0104] In one embodiment, the probe (1451) may include an exposed portion (14511) exposed to the outside of the probe housing (1452) and an incoming portion (14512) brought into the probe housing (1452) based on the probe housing (1452).

[0105] In one embodiment, the probe housing (1452) may accommodate at least a portion of the probe (1451). The probe housing (1452) may be connected to a second end (1451b) of the probe (1451) and a portion of the probe (1451) adjacent to the second end (1451b).

[0106] In one embodiment, the probe housing (1452) may include a first probe housing portion (1452a) and a second probe housing portion (1452b). For example, the first probe housing portion (1452a) and the second probe housing portion (1452b) may be connected to each other with a probe (1451) in between.

[0107] In one embodiment, the inlet portion (14512) of the probe (1451) may include at least one bending region (14513). For example, the inlet portion (14512) may be bent by a specified angle in the bending region (14513).

[0108] In one embodiment, the probe housing (1452) may include a receiving groove (14522) formed by being recessed in a shape corresponding to the receiving portion (14512). For example, the receiving groove (14522) may be formed curved on one side of the cover (112) in correspondence with the curved area (14513) of the probe (1451).

[0109] In one embodiment, the receiving groove (14522) may receive at least a portion of the receiving portion (14512) of the probe (1451). For example, the receiving groove (14522) may receive the receiving portion (14512) of the probe (1451). In such a structure, rotation of the probe (1451) around the longitudinal axis while it is received in the probe housing (1452) can be prevented.

[0110] In one embodiment of the present document, the length of the probe (1451) in the longitudinal direction may be shortened according to the shape of the probe housing (1452). The probe (1451) may be more expensive than the probe housing (1452) and may be difficult to manufacture. In order to reduce the manufacturing cost of the probe assembly (145), the length of the probe (1451) in the longitudinal direction may be formed to be short by making the length of the probe housing (1452) in the longitudinal direction longer.

[0111] A probe housing (1452) according to one embodiment may further include at least one of a fixing part (1453) and an anti-detachment pin (14521).

[0112] In one embodiment, the fixed portion (1453) may be formed to extend from one side of the probe housing (1452) toward the end of the probe (1451) along the longitudinal direction of the probe (1451). For example, the fixed portion (1453) may be formed to extend from one side of the second probe housing portion (1452b). For example, when viewed in a direction parallel to the second axis (X2) shown in FIG. 3a, at least a portion of the fixed portion (1453) and the probe (1451) may overlap each other.

[0113] In one embodiment, a fixing part (1453A) may be formed on at least a portion of the fixing part (1453) so that the probe module (14) can be easily fixed when rotated in the second horizontal rotation direction (HD2).

[0114] For example, to place the specimen (W) on the observation stage (13), an external support (e.g., tweezers) can be brought into contact with the fixed part (1453A) to rotate the probe assembly (145) in the second horizontal rotation direction (HD2).

[0115] In one embodiment, a structure may be formed in the fixed portion (1453A) to prevent an external support from sliding. For example, an uneven structure may be formed in the fixed portion (1453A). However, this is exemplary, and the structure of the fixed portion (1453A) is not limited thereto. For example, the fixed portion (1453A) may be formed of a flat but high-friction material.

[0116] In one embodiment, the anti-detachment pin (14521) can prevent the elastic member (147) from detaching. In one embodiment, the anti-detachment pin (14521) may be formed to extend in a longitudinal direction from one side of the probe housing (1452) toward the rotating member (144).

[0117] For example, the anti-detachment pin (14521) is formed extending from one side of the second probe housing portion (1452b) and may be positioned further away from the second axis (X2) based on the distance from the end of the probe (1451). In one embodiment, the elastic member (147) may wind the anti-detachment pin (14521) while connecting the rotating member (144) and the probe assembly (145). In such a structure, the elastic member (147) may be prevented from detaching from the probe assembly (145) while being received in a groove formed in the rotating member (144).

[0118] In one embodiment, the base (141) may be installed in the inspection space (1111) of the housing (111). For example, the base (141) may be connected to and fixed to the bottom surface, side, or other structure of the inspection space (1111) of the housing (111).

[0119] In one embodiment, the guide rail (142) is installed on the upper surface of the base (141) (e.g., the surface in the +Z direction), and the guide member (143) can slide along the guide rail (142) in a first sliding direction (SD1) or a second sliding direction (SD2).

[0120] In one embodiment, the guide member (143) may include a slide member (1421). The slide member (1421) may be slidably coupled to a rail groove of the guide rail (142). The slide member (1421) may limit the sliding direction of the guide member (143).

[0121] For example, when the guide member (143) slides along the guide rail (142), the probe assembly (145) can move in a direction closer to or further away from the specimen (W) (e.g., in the Y-axis direction).

[0122] In one embodiment of the present document, through the movement of the guide member (143), the probe module (14) can track the specimen (W) of the probe assembly (145) in one direction (e.g., the Y-axis direction). For example, when the specimen (W) is stretched, contracted, rotated, or moved by the arm module (20) and moves relatively in one direction (e.g., the +Y direction) or the opposite direction (e.g., the -Y direction), the probe assembly (145) can track and move the specimen (W) and maintain the contact position of the specimen (W).

[0123] In one embodiment, the rotating member (144) may be rotatable about a rotation axis. The rotating member (144) may be connected to a probe housing (1452). As the rotating member (144) rotates, the probe housing (1452) and the probe (1451) may move in a certain direction (e.g., a first movement direction (D1) or a second movement direction (D2) in FIG. 3A).

[0124] In one embodiment, the rotating member (144) may be connected to the guide member (143) so as to be rotatable about the guide member (143) around a first axis (X1) parallel to the height direction (e.g., +Z direction).

[0125] For example, as shown in FIG. 3c, a shaft (1441) may be formed protrudingly on one side of the rotating member (144), and a shaft groove (1431) may be formed recessed on one side of the guide member (143) in a shape corresponding to the shaft (1441).

[0126] In one embodiment, the shaft (1441) of the rotating member (144) is mounted in the shaft groove (1431) of the guide member (143), and the rotating member (144) can rotate about the shaft (1441) with respect to the guide member (143) in a first vertical rotation direction (VD1) and / or a second vertical rotation direction (VD2). By means of the rotating member (144), the probe assembly (145) can rotate about the first axis (X1) with respect to the base (141).

[0127] In one embodiment, when the probe assembly (145) is rotated by the rotating member (144), the first end (1451a) of the probe (1451) can move in a first movement direction (D1) or a second movement direction (D2).

[0128] For example, when the specimen (W) is stretched, contracted, rotated, or moved relative to one direction (e.g., +X direction) or the opposite direction (e.g., -X direction) by means of the arm module (20), the probe assembly (145) moves in a first direction of movement (D1) or a second direction of movement (D2) by means of the rotating member (144) and tracks the specimen (W) to maintain the contact position between the first end (1451a) of the probe (1451) and the specimen (W).

[0129] In one embodiment, the probe assembly (145) may be connected to the rotating member (144) so ​​as to be rotatable with respect to the rotating member (144) in a first horizontal rotation direction (HD1) moving closer to the specimen (W) and a second horizontal rotation direction (HD2) moving away from the specimen (W) around a second axis (X2) perpendicular to the first axis (X1).

[0130] For example, a connecting groove may be formed through the probe housing (1452) and the rotating member (144) in a direction parallel to the second axis (X2), and the connecting part (146) may connect the rotating member (144) and the probe assembly (145) by passing through the connecting groove.

[0131] In one embodiment, the elastic member (147) can provide torque to the probe assembly (145) in a first horizontal rotational direction (HD1). For example, the elastic member (147) may be positioned between the rotating member (144) and the probe assembly (145) and may connect the rotating member (144) and the probe assembly (145). For example, a groove for receiving the elastic member (147) may be formed on one side of the rotating member (144).

[0132] In one embodiment, the elastic member (147) may include a compression spring. For example, the elastic member (147) including the compression spring may be positioned further away from the second axis (X2) based on the distance from the end of the probe (1451) described later. In such a structure, with the specimen (W) positioned on the observation stage (13), the probe assembly (145) can maintain contact with the specimen (W) by applying a continuous external force to the specimen (W).

[0133] In one embodiment, as the probe assembly (145) rotates by means of the elastic member (147), the probe housing (1452) and the probe (1451) can move in a certain direction (e.g., the third movement direction (D3) or the fourth movement direction (D4) of FIG. 3a).

[0134] For example, when the specimen (W) is stretched, contracted, rotated, or moved relative to one direction (e.g., +Z direction) or the opposite direction (e.g., -Z direction) by means of the arm module (20), the probe assembly (145) can move in a third direction of movement (D3) or a fourth direction of movement (D4) by means of the elastic member (147) and track the specimen (W) to maintain the contact position between the first end (1451a) of the probe (1451) and the specimen (W).

[0135] In one embodiment of the present document, the probe system (1) can move the first end (1451a) of the probe (1451) to at least one of a plurality of directions (e.g., first movement direction (D1), second movement direction (D2), third movement direction (D3), fourth movement direction (D4), first sliding direction (SD1) or second sliding direction (SD2)). The probe system (1) moves the probe assembly (145) to track the specimen (W) even when the specimen (W) is stretched, contracted, rotated, or moved, so that the first end (1451a) of the probe (1451) can maintain a contact position with the specimen (W) even in experiments on specimens (W) of a tensile or flexible material, thereby reducing errors in experimental results and improving experimental accuracy and reliability.

[0136] FIG. 4 is a plan view of a probe system according to one embodiment.

[0137] Referring to FIG. 4, a probe system (1-1) according to one embodiment (e.g., probe system (1) of FIG. 1, FIG. 2a, FIG. 2b, FIG. 2c and FIG. 2d) may include at least some of a probe module (14-1) (e.g., probe module (14) of FIG. 2b, FIG. 2c and FIG. 2d) and an arm module (20-1) (e.g., arm module (20) of FIG. 2b, FIG. 2c and FIG. 2d).

[0138] In the following description, details that overlap with the above-described content are omitted. It is understood that in the probe system (1-1), some components and structures may be replaced, added, or omitted to the extent that they are easily understood by those skilled in the art with reference to the drawings and description below. Furthermore, at least one component or feature of the previously described embodiments may be combined in the probe system (1-1) unless it is not technically obvious.

[0139] In one embodiment, the arm module (20-1) may include a plurality of arms (20a-1, 20b-1). The plurality of arms (20a-1, 20b-1) may be spaced apart from each other with respect to the specimen (W). The plurality of arms (20a-1, 20b-1) may include a first arm (20a-1) and a second arm (20b-1). The first arm (20a-1) and the second arm (20b-1) may be arranged facing each other with respect to the specimen (W). For example, the first arm (20a-1) may be placed on one side of the specimen (W) (e.g., the side in the -Y direction), and the second arm (20b-1) may be placed on the other side of the specimen (W) (e.g., the side in the +Y direction).

[0140] In one embodiment, the probe module (14-1) can contact the specimen (W) to inspect the characteristics of the specimen (W). The probe module (14-1) can be positioned adjacent to the arm module (20-1) in a direction facing the specimen (W).

[0141] In one embodiment, the probe module (14-1) can track the movement of the specimen (W). The probe module (14-1) can move freely in the up, down, left, and right directions (e.g., in the XY plane direction).

[0142] In one embodiment, the probe module (14-1) can be moved in the height direction (e.g., Z-axis direction) by means of a height adjustment module (19). The height of the probe module (14-1) can be freely changed based on the movement of the specimen (W). Alternatively, the height adjustment module (19) can adjust and fix the height of the probe module (14-1).

[0143] In one embodiment, the probe system (1-1) may be equipped with a plurality of probe modules (14-1). The probe system (1-1) can simultaneously detect electrical characteristics at multiple points of the specimen (W) through the plurality of probe modules (14a-1, 14b-1).

[0144] For example, a plurality of probe modules (14a-1, 14b-1) may include a first probe module (14a-1) and a second probe module (14b-1). For example, a plurality of probe modules (14a-1, 14b-1) are arranged to surround a specimen (W) and may contact two or more different points on the specimen (W).

[0145] In one embodiment, a plurality of probe modules (14a-1, 14b-1) may be placed adjacent to each other on one side (e.g., -X direction) of the specimen (W). For example, the first probe module (14a-1) and the second probe module (14b-1) may be placed together on one side (e.g., -X direction) of the first arm (20a-1) and the second arm (20b-1).

[0146] For example, as shown in the drawing, a plurality of arms (20a-1, 20b-1) and a plurality of probe modules (14a-1, 14b-1) may be arranged in a direction that surrounds the specimen (W). For example, the plurality of arms (20a-1, 20b-1) and the plurality of probe modules (14a-1, 14b-1) may surround the specimen (W) in the order of the first arm (20a-1), the first probe module (14a-1), the second probe module (14b-1), and the second arm (20b-1). In this case, the space efficiency of the probe system (1-1) can be improved, and the contact between the plurality of probe modules (14a-1, 14b-1) and the specimen (W) can be stably maintained even when the specimen (W) moves in various directions. In addition, since the plurality of probe modules (14a-1, 14b-1) are spaced apart from the plurality of arms (20a-1, 20b-1), the probe system (1-1) can reduce experimental error caused by the fixing force of the plurality of arms (20a-1, 20b-1) clamping the specimen (W).

[0147] FIG. 5 is a plan view of a probe system according to one embodiment.

[0148] Referring to FIG. 5, a probe system (1-2) according to one embodiment (e.g., probe system (1) of FIG. 1, FIG. 2a, FIG. 2b, FIG. 2c and FIG. 2d) may include at least some of a probe module (14-2) (e.g., probe module (14) of FIG. 2b, FIG. 2c and FIG. 2d) and an arm module (20-2) (e.g., arm module (20) of FIG. 2b, FIG. 2c and FIG. 2d).

[0149] In the following description, details that overlap with the above-described content are omitted. It is understood that in the probe system (1-2), some components and structures may be replaced, added, or omitted to the extent that they are easily understood by those skilled in the art with reference to the drawings and descriptions below. Additionally, at least one component or feature of the previously described embodiments may be combined in the probe system (1-2) unless it is not technically obvious.

[0150] In one embodiment, the arm module (20-2) may include a plurality of arms (20a-2, 20b-2). The plurality of arms (20a-2, 20b-2) may be spaced apart from each other with respect to the specimen (W). The plurality of arms (20a-2, 20b-2) may include a first arm (20a-2) and a second arm (20b-2). The first arm (20a-2) and the second arm (20b-2) may be arranged facing each other with respect to the specimen (W). For example, the first arm (20a-2) may be placed on one side of the specimen (W) (e.g., the side in the -Y direction), and the second arm (20b-2) may be placed on the other side of the specimen (W) (e.g., the side in the +Y direction).

[0151] In one embodiment, the probe module (14-2) can contact the specimen (W) to inspect the characteristics of the specimen (W). The probe module (14-2) can be positioned adjacent to the arm module (20-1) in a direction facing the specimen (W).

[0152] In one embodiment, the probe module (14-2) can track the movement of the specimen (W). The probe module (14-2) can move freely in the up, down, left, and right directions (e.g., in the XY plane direction).

[0153] In one embodiment, the probe module (14-2) can be moved in the height direction (e.g., Z-axis direction) by means of a height adjustment module (19). The height of the probe module (14-2) can be freely changed based on the movement of the specimen (W). Alternatively, the height adjustment module (19) can adjust and fix the height of the probe module (14-2).

[0154] In one embodiment, the probe system (1-2) may be equipped with a plurality of probe modules (14-2). The probe system (1-2) can simultaneously detect electrical characteristics at multiple points of the specimen (W) through the plurality of probe modules (14a-2, 14b-2).

[0155] For example, a plurality of probe modules (14a-2, 14b-2) may include a first probe module (14a-2) and a second probe module (14b-2). For example, a plurality of probe modules (14a-2, 14b-2) are arranged to surround a specimen (W) and may contact two or more different points on the specimen (W).

[0156] In one embodiment, a plurality of probe modules (14a-2, 14b-2) may be arranged facing each other with respect to the specimen (W). For example, the first probe module (14a-2) may be positioned adjacent to the first arm (20a-2) and opposite to the second arm (20b-2) with respect to the specimen (W) (e.g., in the -Y direction), and the second probe module (14a-2) may be positioned adjacent to the second arm (20b-2) and opposite to the first arm (20a-2) with respect to the specimen (W).

[0157] For example, as shown in the drawing, a plurality of arms (20a-2, 20b-2) and a plurality of probe modules (14a-2, 14b-2) may be arranged in a direction that surrounds the specimen (W). For example, the plurality of arms (20a-2, 20b-2) and a plurality of probe modules (14a-2, 14b-2) may surround the specimen (W) in the order of the first arm (20a-2), the first probe module (14a-2), the second arm (20b-2), and the second probe module (14b-2). In this case, the space efficiency of the probe system (1-2) can be improved, and the contact between the plurality of probe modules (14a-2, 14b-2) and the specimen (W) can be stably maintained even when the specimen (W) moves in various directions.

[0158] FIG. 6 is a plan view of a probe system according to one embodiment.

[0159] Referring to FIG. 6, a probe system (1-3) according to one embodiment (e.g., probe system (1) of FIG. 1, FIG. 2a, FIG. 2b, FIG. 2c and FIG. 2d) may include at least some of a probe module (14-3) (e.g., probe module (14) of FIG. 2b, FIG. 2c and FIG. 2d) and an arm module (20-3) (e.g., arm module (20) of FIG. 2b, FIG. 2c and FIG. 2d).

[0160] In the following description, details that overlap with the above-described content are omitted. It is understood that in the probe system (1-3), some components and structures may be replaced, added, or omitted to the extent that they are easily understood by those skilled in the art with reference to the drawings and descriptions below. Additionally, at least one component or feature of the previously described embodiments may be combined in the probe system (1-3) unless it is not technically obvious.

[0161] In one embodiment, the arm module (20-3) may include a plurality of arms (20a-3, 20b-3). The plurality of arms (20a-3, 20b-3) may be spaced apart from each other with respect to the specimen (W). The plurality of arms (20a-3, 20b-3) may include a first arm (20a-3) and a second arm (20b-3). The first arm (20a-3) and the second arm (20b-3) may be positioned facing each other with respect to the specimen (W). For example, the first arm (20a-3) may be positioned on one side of the specimen (W) (e.g., the side in the -Y direction), and the second arm (20b-3) may be positioned on the other side of the specimen (W) (e.g., the side in the +Y direction).

[0162] In one embodiment, the probe module (14-3) can contact the specimen (W) to inspect the characteristics of the specimen (W). The probe module (14-3) can be positioned adjacent to the arm module (20-1) in a direction facing the specimen (W).

[0163] In one embodiment, the probe module (14-3) can track the movement of the specimen (W). The probe module (14-3) can move freely in the up, down, left, and right directions (e.g., in the XY plane direction).

[0164] In one embodiment, the probe module (14-3) can be moved in the height direction (e.g., Z-axis direction) by means of a height adjustment module (19). The height of the probe module (14-3) can be freely changed based on the movement of the specimen (W). Alternatively, the height adjustment module (19) can adjust and fix the height of the probe module (14-3).

[0165] In one embodiment, the probe system (1-3) may be equipped with a plurality of probe modules (14-3). The probe system (1-3) can simultaneously detect electrical characteristics at multiple points of the specimen (W) through the plurality of probe modules (14a-3, 14b-3).

[0166] For example, a plurality of probe modules (14a-3, 14b-3) may include a first probe module (14a-3) and a second probe module (14b-3). For example, a plurality of probe modules (14a-3, 14b-3) are arranged to surround a specimen (W) and may contact two or more different points on the specimen (W).

[0167] In one embodiment, a plurality of probe modules (14a-3, 14b-3) may be arranged facing each other with respect to the specimen (W). For example, the first probe module (14a-3) may be placed on the first arm (20a-3), and the second probe module (14a-3) may be placed on the second arm (20b-3). In this case, the space efficiency of the probe system (1-3) can be improved, and by each of the plurality of probe modules (14a-3, 14b-3) being connected to each of the plurality of arms (20a-3, 20b-3) and moving as one body, the contact between the plurality of probe modules (14a-3, 14b-3) and the specimen (W) can be stably maintained.

[0168] FIG. 7 is a plan view of a probe system according to one embodiment.

[0169] Referring to FIG. 7, a probe system (1-4) according to one embodiment (e.g., probe system (1) of FIG. 1, FIG. 2a, FIG. 2b, FIG. 2c and FIG. 2d) may include at least some of a probe module (14-4) (e.g., probe module (14) of FIG. 2b, FIG. 2c and FIG. 2d) and an arm module (20-4) (e.g., arm module (20) of FIG. 2b, FIG. 2c and FIG. 2d).

[0170] In the following description, details that overlap with the above-described content are omitted. It is understood that in the probe system (1-4), some components and structures may be replaced, added, or omitted to the extent that they are easily understood by those skilled in the art with reference to the drawings and descriptions below. Furthermore, at least one component or feature of the previously described embodiments may be combined in the probe system (1-4) unless it is not technically obvious.

[0171] In one embodiment, the arm module (20-4) may include at least three arms (20a-4, 20b-4, 20c-4, 20d-4) arranged to surround the specimen (W) and secure a plurality of ends of the specimen. The plurality of arms (20-4) may surround the specimen (W) and be spaced apart from each other. Hereinafter, a probe system (1-4) having four arms (20a-4, 20b-4, 20c-4, 20d-4) is described as an example, but the number of arms (20a-4, 20b-4, 20c-4, 20d-4) may be one, two, or three or more.

[0172] In one embodiment, a plurality of arms (20a-4, 20b-4, 20c-4, 20d-4) may be spaced apart from each other with respect to the specimen (W). The plurality of arms (20a-4, 20b-4, 20c-4, 20d-4) may include a first arm (20a-4), a second arm (20b-4), a third arm (20c-4), and a fourth arm (20d-4). The first arm (20a-4) and the second arm (20b-4) may be arranged facing each other in one direction (e.g., Y-axis direction) with respect to the specimen (W). The third arm (20c-4) and the fourth arm (20d-4) may be arranged facing each other in another direction (e.g., X-axis direction) with respect to the specimen (W).

[0173] For example, the first arm (20a-4) may be placed on one side of the specimen (W) (e.g., the side in the -Y direction), the second arm (20b-4) may be placed on the other side of the specimen (W) (e.g., the side in the +Y direction), the third arm (20c-4) may be placed on another side of the specimen (W) (e.g., the side in the +X direction), and the fourth arm (20d-4) may be placed on yet another side of the specimen (W) (e.g., the side in the -X direction).

[0174] In one embodiment, the probe module (14-4) can contact the specimen (W) to inspect the characteristics of the specimen (W). The probe module (14-4) can be positioned adjacent to the arm module (20-1) in a direction facing the specimen (W).

[0175] In one embodiment, the probe module (14-4) can track the movement of the specimen (W). The probe module (14-4) can move freely in the up, down, left, and right directions (e.g., in the XY plane direction).

[0176] In one embodiment, the probe module (14-4) can be moved in the height direction (e.g., Z-axis direction) by means of a height adjustment module (19). The height of the probe module (14-4) can be freely changed based on the movement of the specimen (W). Alternatively, the height adjustment module (19) can adjust and fix the height of the probe module (14-4).

[0177] In one embodiment, the probe system (1-4) may be equipped with a plurality of probe modules (14-4). The probe system (1-4) can simultaneously detect electrical characteristics at multiple points of the specimen (W) through the plurality of probe modules (14a-4, 14b-4).

[0178] For example, a plurality of probe modules (14a-4, 14b-4) may include a first probe module (14a-4) and a second probe module (14b-4). For example, a plurality of probe modules (14a-4, 14b-4) are arranged to surround a specimen (W) and may contact two or more different points on the specimen (W).

[0179] In one embodiment of the present document, a plurality of arms (20a-4, 20b-4, 20c-4, 20d-4) can stretch, contract, rotate, or move the specimen (W) in a variety of directions (e.g., XY plane direction). The probe system (1-4) can further vary the specimen (W) through the plurality of arms (20a-4, 20b-4, 20c-4, 20d-4) and measure the resulting changes in the material properties of the specimen (W) in a variety of ways.

[0180] FIGS. 8A, FIGS. 8B, FIGS. 8C, FIGS. 8D, and FIGS. 8E are perspective views of a probe assembly according to one embodiment.

[0181] Referring to FIGS. 8A, 8B, 8C, 8D, and 8E, a probe assembly (145-1, 145-2, 145-3, 145-4, 145-5) according to one embodiment (e.g., probe assembly (145) of FIGS. 3A and 3B) may include a first end (1451a-1, 1451a-2, 1451a-3, 1451a-4, 1451a-5) (e.g., first end (1451a) of FIGS. 3A and 3B) having a probe tip of various shapes.

[0182] In the following description, details that overlap with the above-described content are omitted. It is understood that in the prop assembly (145-1, 145-2, 145-3, 145-4, 145-5), some components and structures may be replaced, added, or omitted to the extent that they are easily understood by a person skilled in the art with reference to the drawings and description below. Additionally, at least one component or feature of the previously described embodiments may be combined in the prop assembly (145-1, 145-2, 145-3, 145-4, 145-5) unless it is not technically obvious.

[0183] Referring to FIG. 8a, a probe assembly (145-1) according to one embodiment may include a probe (1451-1) (e.g., probe (1451) of FIG. 3a and FIG. 3b) and a probe housing (1452-1) (e.g., probe housing (1452) of FIG. 3a and FIG. 3b).

[0184] In one embodiment, the first end (1451a-1) of the probe (1451-1) may be formed of a probe tip having a three-dimensional shape at its end. For example, the first end (1451a-1) may be formed of a probe tip having a spherical, hemispherical, or partially spherical shape (hereinafter referred to as "spherical shape").

[0185] In one embodiment of the present document, the spherical probe tip of the first end (1451a-1) can reduce or prevent the specimen (W) from being damaged, torn, or cracked by the probe tip.

[0186] In one embodiment of the present document, the spherical probe tip of the first end (1451a-1) can increase the contact area with the specimen (W). By increasing the contact area with the specimen (W), the spherical probe tip increases the frictional force, and accordingly, when the specimen (W) is stretched, contracted, rotated, or moved, the probe tip moves along the specimen (W) and can maintain a constant contact position between the first end (1451a-1) and the specimen (W).

[0187] In one embodiment of the present document, the shape of the first end (1451a-1) is not limited to that shown in FIG. 8a and may have the shape of various three-dimensional structures such as a cylinder, a cone, a column, or a pyramid.

[0188] Referring to FIG. 8b, a probe assembly (145-2) according to one embodiment may include a probe (1451-2) (e.g., probe (1451) of FIG. 3a and FIG. 3b) and a probe housing (1452-2) (e.g., probe housing (1452) of FIG. 3a and FIG. 3b).

[0189] In one embodiment, the first end (1451a-2) of the probe (1451-2) may be formed of a probe tip having a three-dimensional shape at its end. For example, the first end (1451a-2) may be formed of a cylindrical probe tip, and the cylindrical shape may extend substantially horizontally in the extension direction (e.g., X-axis direction) of the probe (1451-2).

[0190] However, 'substantially' in this document may mean the same level reflecting tolerances or errors in a normal manufacturing process. Alternatively, 'substantially' may refer to a range including any one of + / -0.1%, + / -0.5%, + / -1%, + / -3%, + / -5%, + / -7%, + / -10%, + / -15%, and + / -20% based on 0%, which is literally the same.

[0191] In one embodiment of the present document, the cylindrical probe tip of the first end (1451a-2) can reduce or prevent the specimen (W) from being damaged, torn, or cracked by the probe tip.

[0192] In one embodiment of the present document, the cylindrical probe tip of the first end (1451a-2) can increase the contact area with the specimen (W). By increasing the contact area with the specimen (W), the cylindrical probe tip increases the frictional force, and accordingly, when the specimen (W) is stretched, contracted, rotated, or moved, the probe tip can move along the specimen (W) to maintain a constant contact position between the first end (1451a-2) and the specimen (W).

[0193] In one embodiment of the present document, the cylindrical probe tip, which is horizontal to the extension direction of the probe (1451-2), contacts the specimen (W) in a direction perpendicular to the direction in which the specimen (W) primarily moves (e.g., the Y-axis direction), so that a constant frictional force can be applied to the specimen (W) and the entire cylindrical shape even when the specimen (W) is stretched, contracted, rotated, or moved, and it may be advantageous for the probe tip of the first end (1451a-2) to track and move the specimen (W).

[0194] Referring to FIG. 8c, a probe assembly (145-3) according to one embodiment may include a probe (1451-3) (e.g., probe (1451) of FIG. 3a and FIG. 3b) and a probe housing (1452-3) (e.g., probe housing (1452) of FIG. 3a and FIG. 3b).

[0195] In one embodiment, the first end (1451a-3) of the probe (1451-3) may be formed of a probe tip having a three-dimensional shape at its end. For example, the first end (1451a-3) may be formed of a cylindrical probe tip, and the cylindrical shape may extend substantially perpendicularly to the extension direction (e.g., X-axis direction) of the probe (1451-3).

[0196] In one embodiment of the present document, the cylindrical probe tip of the first end (1451a-3) can reduce or prevent the specimen (W) from being damaged, torn, or cracked by the probe tip.

[0197] In one embodiment of the present document, the cylindrical probe tip of the first end (1451a-3) can increase the contact area with the specimen (W). By increasing the contact area with the specimen (W), the cylindrical probe tip increases the frictional force, and accordingly, when the specimen (W) is stretched, contracted, rotated, or moved, the probe tip can move along the specimen (W) to maintain a constant contact position between the first end (1451a-2) and the specimen (W).

[0198] In one embodiment of the present document, a cylindrical probe tip perpendicular to the extension direction of the probe (1451-3) can contact the specimen (W) along the direction in which the inspection area (W1) of the specimen (W) extends (e.g., the Y-axis direction), and by increasing the contact area with the inspection area (W1), it may be advantageous for measuring the material properties of the specimen (W).

[0199] Referring to FIG. 8d, a probe assembly (145-4) according to one embodiment may include a probe (1451-4) (e.g., probe (1451) of FIG. 3a and FIG. 3b) and a probe housing (1452-4) (e.g., probe housing (1452) of FIG. 3a and FIG. 3b).

[0200] In one embodiment, the first end (1451a-4) of the probe (1451-4) may be formed of a probe tip having a three-dimensional shape at its end. For example, the first end (1451a-4) may be formed of a columnar probe tip having a polygonal cross-section (e.g., triangle, square, pentagon, hexagon, etc.), and the columnar shape may extend substantially horizontally in the extension direction (e.g., X-axis direction) of the probe (1451-4).

[0201] In one embodiment of the present document, the polygonal columnar shape of the probe tip of the first end (1451a-4) can reduce or prevent the specimen (W) from being damaged, torn, or cracked by the probe tip.

[0202] In one embodiment of the present document, the polygonal columnar prop tip of the first end (1451a-4) can increase the contact area with the specimen (W). By increasing the contact area with the specimen (W), the polygonal columnar prop tip increases the frictional force, and accordingly, when the specimen (W) is stretched, contracted, rotated, or moved, the probe tip can move along the specimen (W) to maintain a constant contact position between the first end (1451a-4) and the specimen (W).

[0203] In one embodiment of the present document, the probe tip, which is a polygonal column shape horizontal to the extension direction of the probe (1451-4), contacts the specimen (W) in a direction perpendicular to the direction in which the specimen (W) primarily moves (e.g., the Y-axis direction), so that a constant frictional force can be applied to the specimen (W) and the entire polygonal column even when the specimen (W) is stretched, contracted, rotated, or moved, and it may be advantageous for the probe tip of the first end (1451a-4) to track and move the specimen (W).

[0204] Referring to FIG. 8e, a probe assembly (145-5) according to one embodiment may include a probe (1451-5) (e.g., probe (1451) of FIG. 3a and FIG. 3b) and a probe housing (1452-5) (e.g., probe housing (1452) of FIG. 3a and FIG. 3b).

[0205] In one embodiment, the first end (1451a-5) of the probe (1451-5) may be formed of a probe tip having a three-dimensional shape at its end. For example, the first end (1451a-5) may be formed of a columnar probe tip having a polygonal cross-section (e.g., triangle, square, pentagon, hexagon, etc.), and the polygonal columnar shape may extend substantially perpendicularly to the extension direction (e.g., X-axis direction) of the probe (1451-5).

[0206] In one embodiment of the present document, the polygonal columnar shape of the probe tip of the first end (1451a-5) can reduce or prevent the specimen (W) from being damaged, torn, or cracked by the probe tip.

[0207] In one embodiment of the present document, the polygonal columnar prop tip of the first end (1451a-5) can increase the contact area with the specimen (W). By increasing the contact area with the specimen (W), the polygonal columnar prop tip increases the frictional force, and accordingly, when the specimen (W) is stretched, contracted, rotated, or moved, the probe tip can maintain a constant contact position between the first end (1451a-1) and the specimen (W) along the specimen (W).

[0208] In one embodiment of the present document, a probe tip having a polygonal column shape perpendicular to the extension direction of the probe (1451-5) can come into contact with the specimen (W) along the direction in which the inspection area (W1) of the specimen (W) extends (e.g., the Y-axis direction), and by increasing the contact area with the inspection area (W1), it may be advantageous for measuring the material properties of the specimen (W).

[0209] Although the embodiments have been described above with reference to the limited drawings, those skilled in the art can apply various technical modifications and variations based on the above. For example, suitable results may be achieved even if the described techniques are performed in a different order than described, and / or if the components of the described system, structure, device, circuit, etc. are combined or assembled in a form different from described, or replaced or substituted by other components or equivalents.

[0210] Therefore, other implementations, other embodiments, and equivalents to the claims also fall within the scope of the claims set forth below.

Claims

1. In a probe system, Housing providing an inspection space; An arm module for fixing a specimen and positioned in the above inspection space; and It includes a probe module comprising a probe assembly for detecting the characteristics of the specimen, which is disposed in the above inspection space, and The above probe assembly is, A probe comprising a first end in contact with the specimen and a second end opposite to the first end, A probe housing connected to the second end of the above probe and It includes a rotatable member connected to the probe housing and rotatable about a rotation axis, The probe assembly is a probe system in which, when the specimen is stretched, contracted, rotated, or moved, the rotating member rotates and moves the first end of the probe to maintain a constant contact position between the first end of the probe and the specimen.

2. In Paragraph 1, The above arm module is, A first arm that fixes one end of the above specimen A probe system comprising a second arm positioned opposite to the first arm centered on the specimen and securing the other end of the specimen.

3. In Paragraph 2, The above probe system includes a plurality of the above probe modules, and Multiple probe modules, A probe system comprising a first probe module and a second probe module arranged opposite each other with respect to the above specimen.

4. In Paragraph 3, The first probe module is disposed on one side of the first arm and the second arm, and The second probe module is a probe system positioned on the other side of the first arm and the second arm opposite to the first probe module.

5. In Paragraph 3, The first probe module is positioned adjacent to the first arm and opposite to the second arm with respect to the specimen, and A probe system in which the second probe module is positioned adjacent to the second arm and opposite to the first arm with respect to the specimen.

6. In Paragraph 3, The first probe module is disposed on the first arm, and The second probe module is a probe system disposed on the second arm.

7. In Paragraph 3, The above plurality of probe modules are, A probe system comprising a plurality of each of the first probe module and the second probe module.

8. In Paragraph 1, The above probe system includes a plurality of the above probe modules, and Multiple probe modules, A probe system comprising a first probe module and a second probe module disposed adjacent to each other on one side of the above specimen.

9. In Paragraph 1, The above arm module is, A probe system comprising at least three arms arranged to surround the specimen and secure a plurality of ends of the specimen.

10. In Paragraph 1, The above probe is, A probe system having a shape that extends from the second end to the first end and bends toward the specimen.

11. In Paragraph 1, The first end of the above probe is, A probe system configured to have a higher surface friction coefficient than other areas of the probe assembly in order to maintain contact with the specimen.

12. In Paragraph 1, The above probe assembly is, Guide rails installed in the above inspection space and A probe system comprising a guide member that is slidable along the guide rail and connected to the rotating member.

13. In Paragraph 1, The above-mentioned first end is, A probe system comprising a probe tip having a spherical, hemispherical, or partially spherical shape.

14. In Paragraph 1, The above-mentioned first end is, A probe system consisting of a cylindrical probe tip.

15. In Paragraph 1, The above-mentioned first end is, A probe system comprising a columnar probe tip having a polygonal cross-section.

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