Photomask transfer apparatus and photomask transfer method

Abstract

A photomask transfer apparatus and a photomask transfer method. The photomask transfer apparatus comprises: a base (100); a cover opening mechanism (200) disposed on the base (100) and used for opening a cover body (1200) of a photomask storage box (1000); and a transfer mechanism (300) disposed on the base (100) and provided at its output end with a grabbing assembly (310) for grabbing a photomask (2000) from the photomask storage box (1000). In the grabbing assembly (310), two clamping members (312) are both movably confined to a grabbing base (311) in the width direction and can move close to or away from each other; two rotating members are spaced apart from each other in the width direction and are both arranged to be rotatable about their own axes; a clamping transmission member (314) is in a belt shape and is wound between the two rotating members, two transmission parts (3141) that both extend in the width direction and are parallel to each other being formed between the two rotating members, and the two transmission parts (3141) respectively being in transmission connection to the corresponding clamping members (312); and a clamping driver (315) is provided on the grabbing base (311), an output end of the clamping driver (315) being in driving connection to the clamping members (312) or one of the rotating members.

Description

Mask transfer device and mask transfer method

[0001] This application claims priority to Chinese Patent Application No. 202411451515.3, filed with the Chinese Patent Office on October 17, 2024, the entire contents of which are incorporated herein by reference. Technical Field

[0002] This application relates to the field of electronic product manufacturing technology, for example to a mask transfer device and a mask transfer method. Background Technology

[0003] A photomask, also known as a lithography mask, is a pattern template used in photolithography. Photomasks need to be placed in a photomask storage box for shipping or storage. The photomask storage box consists of a box body and a cover. The box body positions and stores the photomask, while the cover, hinged to the box body, compresses the photomask and provides a degree of sealing. During use, the cover must be manually opened to remove the photomask. With the development of the semiconductor industry, the number of photomask storage boxes used is increasing, and the drawbacks of manual handling are becoming increasingly apparent. Specifically, handling the photomask requires workers to maintain high concentration, resulting in high labor intensity and significant manpower consumption. Furthermore, even slight deviations during handling, such as tilting the photomask, can damage the film underneath, thus damaging the photomask storage box. Additionally, manual handling requires a considerable preparation time, leaving the photomask unprotected after the cover is opened. Prolonged unprotected handling increases the probability of photomask contamination. Summary of the Invention

[0004] This application provides a mask transfer device and a mask transfer method to solve the problems of high labor intensity, easy damage to the mask storage box, and high probability of mask contamination in related technologies.

[0005] On one hand, embodiments of this application provide a mask transfer device capable of opening a mask storage box and removing a mask from the mask storage box. The mask transfer device includes:

[0006] Base;

[0007] A cover opening mechanism is provided on the base, and the cover opening mechanism is configured to open the cover of the mask storage box;

[0008] A transfer mechanism is disposed on the base, and the output end of the transfer mechanism has a gripping component. The gripping component is configured to grip a mask from the housing of the mask storage box. The gripping component includes:

[0009] Grab the seat;

[0010] Both clamping members are movablely constrained to the gripper in the width direction, and the two clamping members can move closer to or further away from each other;

[0011] Two rotating members are spaced apart along the width direction, and both rotating members are arranged to rotate about their own axis.

[0012] The clamping transmission component is strip-shaped and is wound between the two rotating components, forming two transmission parts that extend along the width direction and are parallel to each other between the two rotating components. The two transmission parts are respectively connected to the corresponding clamping component.

[0013] A clamping driver is provided on the gripping seat, and the output end of the clamping driver is drivenly connected to at least one of the clamping members or one of the two rotating members.

[0014] In some embodiments, each of the rotating members includes a rotating wheel and a mounting shaft that rotatably engages with the rotating wheel. The mounting shaft extends along the height direction, and a first end of the mounting shaft is fixed to the gripping seat. The clamping member is provided with a limiting groove extending along the width direction. A second end of the mounting shaft passes through the limiting groove and can slide relative to the limiting groove in the width direction, and can stop against the side wall of the limiting groove.

[0015] In some embodiments, the rotating wheel is a synchronous wheel with teeth on its circumferential side, and the clamping transmission member is a synchronous belt with teeth on its inner side that are adapted to the two synchronous wheels, and the synchronous belt meshes with the synchronous wheel for transmission.

[0016] In some embodiments, the gripping assembly further includes a gripping elastic element configured to apply an elastic force to the two grippers to bring the two grippers closer together.

[0017] In some embodiments, the gripping elastic element includes a tension spring, and a connecting block with a hook is mounted on the clamping member. The connecting block is located below the gripping seat, and the opening of the hook faces upward. The hanging ring at the end of the tension spring can hook onto the hook from top to bottom.

[0018] In some embodiments, the transfer mechanism further includes a trigger and two position detection elements. The trigger is connected to one of the two clamping elements, and the two position detection elements are arranged at intervals along the movement path of the trigger. During the movement of the two clamping elements, the trigger can sequentially be located in an open position, a clamping position, and a clamping-out position. When the trigger is in the open position, it can trigger one of the two position detection elements. When the trigger is in the clamping-out position, it can trigger the other of the two position detection elements. When the trigger is in the clamping position, it can trigger both position detection elements simultaneously.

[0019] In some embodiments, the transfer mechanism further includes a rotary driver and two orientation detection elements. The output end of the rotary driver is driven to the gripper seat to drive the gripper seat to rotate about its own axis. The two orientation detection elements are spaced apart along the length direction, and the distance between the two orientation detection elements is greater than 0 and less than the difference between the length and width of the mask.

[0020] In some embodiments, the clamping driver is a linear driver, the sidewall of which is parallel to its own axis is connected to the gripper, and the output end of the linear driver can reciprocate along the width direction and is drivenly connected to the clamping member.

[0021] In some embodiments, the transfer mechanism further includes a transfer seat, a transverse member, and a transverse driver. The transfer seat is disposed on the base, the transverse member is movably constrained to the transfer seat along the length direction, the gripping seat is disposed on the transverse member, and the output end of the transverse driver is drivenly connected to the transverse member.

[0022] On the other hand, embodiments of this application provide a mask transfer method, applied to the mask transfer apparatus described in any of the above embodiments, the mask transfer method comprising:

[0023] Place the mask storage box on the carrier;

[0024] The lid of the mask storage box is opened using the opening mechanism;

[0025] In response to the detection that a mask is placed inside the mask storage box, the mask is clamped by bringing two clamping members close to each other;

[0026] Remove the mask from the housing of the mask storage box. Attached Figure Description

[0027] Figure 1 is a schematic diagram of the mask transfer device in an embodiment of this application;

[0028] Figure 2 is a schematic diagram of the base structure in an embodiment of this application;

[0029] Figure 3 is a schematic diagram of the opening mechanism in an embodiment of this application;

[0030] Figure 4 is a schematic diagram of the transfer mechanism in an embodiment of this application;

[0031] Figure 5 is a structural schematic diagram of the grabbing component from a first-view perspective in an embodiment of this application;

[0032] Figure 6 is a structural schematic diagram of the grabbing component from a second perspective in an embodiment of this application;

[0033] Figure 7 is a schematic diagram of the structure of the mask storage box in some embodiments of this application;

[0034] Figure 8 is a flowchart of the mask transfer method in an embodiment of this application.

[0035] In the diagram: 1000, Mask plate storage box; 1100, Box body; 1110, Locking slide rail; 1200, Cover; 1210, Lock; 1300, Lock body; 2000, Mask plate; 100, Base; 110, Position detection component; 111, Detection bracket; 120, Handle; 130, Bearing driver; 131, Air inlet; 132, Decoupling component; 133, Support bracket; 134, Linear bearing; 135, Upper limit bracket; 1351, Upper limit sensor; 136, Lower limit bracket; 1361, Lower limit sensor; 140, Second limit block; 200. Lid opening mechanism; 210. Support seat; 211. First limit block; 212. Guide rod; 213. Limit sheet metal; 214. Fixed driver; 215. Fixing component; 216. Lid detection sensor; 217. Left guide block; 218. Right guide block; 219. Rear guide block; 220. Lid opening component; 221. Suction cup; 222. Floating component; 223. Connector; 224. Connecting rod; 225. Swing rod; 226. Clearance part; 2251. Connecting shaft; 230. Lid opening driver; 231. Lid opening bracket; 240. Unlocking assembly; 241. Unlocking driver; 242. Unlocking elastic component; 243. Unlocking component; 2431. Driving part; 244. Steering component; 245. Unlocking transmission component; 246. Centering adjustment component; 300. Transfer mechanism; 310. Gripping assembly; 311. Gripping seat; 3111. Limiting block; 312. Clamping component; 3121. First slider; 3122. Limiting groove; 3123. Connecting block; 3124. Clamping plate; 3125. Hook; 313. Mounting shaft; 314. Clamping transmission component; 3141. Transmission part; 315. Clamping driver; 3151. Floating joint; 3152. Transmission plate; 316. Tensioning plate; 317. Elongated hole; 318. Gripping 319. Elastic component; 320. Rotating wheel; 321. Transfer seat; 322. Buffer component; 323. Rear limit sensor; 324. Second slide rail; 330. Lateral component; 340. Lateral drive; 341. Lead screw; 342. Nut; 343. Connector; 350. Trigger; 351. Position detection component; 360. Orientation detection component; 361. Telescopic drive; 362. Orientation bracket; 370. Mask plate detection component; 380. Rotation drive; 381. Rotation detection component. Detailed Implementation

[0036] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. Specifically, the terms "first position" and "second position" refer to two different positions, and "above," "on top," and "over" the first feature in relation to the second feature include the first feature directly above and diagonally above the second feature, or indicating that the first feature is at a higher horizontal level than the second feature. "Below," "under," and "below" the first feature in relation to the second feature include the first feature directly below and diagonally below the second feature, or indicating that the first feature is at a lower horizontal level than the second feature.

[0037] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the meaning of the above terms in this application as appropriate.

[0038] Embodiments of this application are described below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application.

[0039] As shown in Figures 1 to 6, this embodiment provides a mask transfer device. Figure 7 shows a mask storage box 1000. The mask transfer device can open the mask storage box 1000 and take out the mask 2000 from the mask storage box 1000, or put the mask 2000 into the mask storage box 1000. The mask transfer device includes a base 100, a cover opening mechanism 200, and a transfer mechanism 300. The opening mechanism 200 is located on the base 100 and is configured to open or close the cover 1200 of the mask storage box 1000; the transfer mechanism 300 is located on the base 100 and the output end of the transfer mechanism 300 has a gripping component 310, which is configured to grip the mask 2000 from the box 1100 of the mask storage box 1000. The gripping component 310 includes a gripping seat 311, two clamping members 312, two rotating members, a clamping transmission member 314, and a clamping driver 315. The system comprises two clamping members 312 movably constrained to the gripping seat 311 along the width direction, and capable of moving closer to or further away from each other; two rotating members are spaced apart along the width direction and arranged to rotate about their own axes; a clamping transmission member 314 is strip-shaped and wound between the two rotating members, forming two parallel transmission parts 3141 extending along the width direction between the two rotating members, with each transmission part 3141 being drively connected to a corresponding clamping member 312; a clamping driver 315 is disposed on the gripping seat 311, and the output end of the clamping driver 315 is drively connected to at least one clamping member 312 or one of the rotating members. Each clamping member 312 is connected to a clamping plate 3124, which is configured to clamp the transmission part 3141.

[0040] In some embodiments, referring to the schematic diagram of the mask transfer device shown in FIG1, it should be noted that the width direction in this application is the left-right direction shown in FIG1, the length direction is the front-back direction shown in FIG1, and the height direction is the up-down direction shown in FIG1; the length direction, width direction and height direction are perpendicular to each other.

[0041] The above-mentioned setup enables automatic opening of the mask storage box 1000 and automatic removal of the mask 2000, reducing manual labor intensity. Simultaneously, the transfer mechanism 300 grips the mask 2000 through the clamping action of two clamping members 312, ensuring precise gripping position and preventing the mask 2000 from tilting, thus avoiding damage to the film beneath the mask 2000. Finally, the clamping members 312 are driven by the clamping driver 315, ensuring gripping efficiency and allowing for rapid gripping after the cover 1200 is opened, reducing preparation time and lowering the probability of contamination of the mask 2000.

[0042] In addition, the clamping transmission member 314 has a strip-shaped structure, which can realize the power transmission between two clamping members 312 that are far apart in the width direction, and the overall height is small, which is beneficial to reduce the height dimension of the transfer mechanism 300.

[0043] Each rotating component includes a rotating wheel 319 and a mounting shaft 313 that rotatably engages with the rotating wheel 319. The mounting shaft 313 extends along the height direction, and the first end of the mounting shaft 313 is fixed to the gripping seat 311. The clamping component 312 is provided with a limiting groove 3122 that extends along the width direction. The second end of the mounting shaft 313 passes through the limiting groove 3122 and can slide relative to the limiting groove 3122 in the width direction, and can stop (abut) against the side wall of the limiting groove 3122. The above-mentioned configuration has several advantages. First, it allows the mounting shaft 313 and the limiting slide groove 3122 to limit the extreme position of the clamping member 312, preventing damage to the mask plate 2000. Second, the limiting slide groove 3122 avoids the mounting shaft 313, thereby reducing the height of the transfer mechanism 300. Third, the rotating wheel 319 rotates relative to the mounting shaft 313, and the mounting shaft 313 is fixedly connected to the gripper 311, avoiding direct connection between the rotating wheel 319 and the gripper 311, reducing the machining accuracy requirements of the gripper 311, and thus reducing the machining difficulty of the gripper 311. Fourth, the limiting slide groove 3122 functions as an installation interface, allowing the mounting shaft 313 to pass through the limiting slide groove 3122 and be screwed to the gripper 311.

[0044] In some embodiments, the gripper 311 is provided with a limiting block 3111. When the two grippers 312 approach each other, at least one of the grippers 312 can abut against the limiting block 3111 to limit the minimum distance between the two grippers 312, prevent collision between the two grippers 312, or prevent over-gripping that could cause the mask 2000 to fall or be damaged. The limiting groove 3122 limits the open position of the gripper 312, and the limiting block 3111 limits the clamping position of the gripper 312.

[0045] To achieve tensioning of the clamping transmission component 314, a tensioning plate 316 is adjustablely positioned on the gripping seat 311. One of the two rotating components is rotatably mounted on the tensioning plate 316. The tensioning plate 316 can move closer to or further away from the other rotating component and can be screwed onto the gripping seat 311. The tensioning plate 316 has an elongated hole 317 extending along its width, through which a screw is screwed onto the gripping seat 311.

[0046] To reduce wear between the rotating wheel 319 and the clamping transmission component 314, in some embodiments, the rotating wheel 319 is a synchronous wheel with circumferentially toothed sections, and the clamping transmission component 314 is a synchronous belt with teeth on its inner side that are adapted to the two synchronous wheels. The synchronous belt meshes with the synchronous wheels for transmission. This arrangement allows the synchronous belt to drive the synchronous wheels to rotate synchronously during movement, avoiding relative sliding friction between the rotating wheel 319 and the clamping transmission component 314, reducing the wear rate between the rotating wheel 319 and the clamping transmission component 314, and improving durability. At the same time, it also reduces the probability of uneven stretching between the two transmission parts 3141 due to friction between the rotating wheel 319 and the clamping transmission component 314, which could lead to asynchronous movement of the two clamping components 312 and clamping failure.

[0047] During the clamping and transfer of the mask 2000, if a power outage occurs causing the clamping driver 315 to lose power, the clamping force between the two clamping members 312 may disappear, leading to the mask 2000 falling off. To solve this problem, the gripping assembly 310 also includes a gripping elastic member 318, which is configured to apply an elastic force to the two clamping members 312 to bring them closer together. Even in the event of a power outage, when the clamping driver 315 is no longer driving the two clamping members 312, the gripping elastic member 318 ensures that the two clamping members 312 remain clamped, preventing the mask 2000 from falling off and providing power outage protection.

[0048] During use, the elastic element may fatigue and lose its elasticity. If the loosened elastic element falls, it will affect the normal gripping of the mask 2000. When the elastic element and the mask 2000 are gripped simultaneously during the gripping process, the mask 2000 may become unstable and fall. In this embodiment, the gripping elastic element 318 includes a tension spring, and the clamping member 312 is equipped with a connecting block 3123 with a hook 3125. The connecting block 3123 is located below the gripping seat 311, and the opening of the hook 3125 faces upward. The hanging ring at the end of the tension spring can hook onto the hook 3125 from top to bottom. The above structure ensures that even when the tension spring loses its elasticity, it can still be hooked onto the hook 3125 and will not fall off, thus avoiding affecting the normal gripping of the mask 2000 and ensuring the safety of the mask 2000 during the gripping process.

[0049] The clamping member 312 is connected to a first slider 3121, and the gripping seat 311 is provided with a first slide rail. The first slider 3121 is slidably disposed on the first slide rail. Each clamping member 312 corresponds to two first slide rails that are spaced apart along the length direction.

[0050] The transfer mechanism 300 also includes a trigger 350 and two position detection elements 351. The trigger 350 is connected to one of the clamping elements 312, and the two position detection elements 351 are spaced apart on the moving path of the trigger 350. During the movement of the two clamping elements 312, the trigger 350 can sequentially be in an open position, a clamping position, and a clamping-free position. When the trigger 350 is in the open position, it can trigger one of the position detection elements 351; when the trigger 350 is in the clamping-free position, it can trigger the other position detection element 351; and when the trigger 350 is in the clamping position, it can trigger both position detection elements 351 simultaneously. This configuration allows the two position detection elements 351 to work together to detect the trigger 350 in three positions, saving costs. For example, when the trigger 350 is in the clamping-free position, the controller can stop the clamping driver 315 and send a fault message to the operator. For example, as shown in FIG5, two position detection elements 351 are arranged at intervals along the width direction. A trigger element 350 is connected to a clamping element 312 on the right. When the two clamping elements 312 are separated, the trigger element 350 is in the open position and can trigger the position detection element 351 on the right. When the two clamping elements 312 approach and clamp the mask 2000, the trigger element 350 is in the clamping position and can trigger both position detection elements 351 simultaneously. When the two clamping elements 312 approach the clamping gap and the distance between the two clamping elements 312 is less than the width of the mask 2000, the trigger element 350 is in the clamping gap position and can trigger the position detection element 351 on the left. The position detection element 351 can be a photosensitive sensor, and the trigger element 350 is sheet-shaped and can block the detection end of the photosensitive sensor.

[0051] To reduce the height of the transfer mechanism 300, and thus the height of the mask transfer device, in some embodiments, the clamping driver 315 is a linear driver. The sidewall of the linear driver, parallel to its own axis, is connected to the gripper 311. The output end of the linear driver can reciprocate along the width direction and is drivenly connected to the clamping member 312. The clamping driver 315 can be a linear motor, a telescopic cylinder, or an electric push rod. The movement direction of the output end of the clamping driver 315 is perpendicular to the height direction, and the output end of the clamping driver 315 is connected to the transmission plate 3152 via a floating joint 3151. The transmission plate 3152 is drivenly connected to one of the clamping members 312.

[0052] The opening mechanism 200 includes a support base 210 and an opening member 220. The support base 210 is movably disposed on the base 100 along the height direction, and the opening member 220 is rotatably disposed on the support base 210. The opening member 220 is provided with a suction cup 221 to adsorb the cover 1200 of the mask storage box 1000. The transfer mechanism 300 also includes a transfer base 320, a transverse member 330, and a transverse driver 340. The transfer base 320 is disposed on the base 100, the transverse member 330 is movably constrained to the transfer base 320 along the length direction, a gripping seat 311 is disposed on the transverse member 330, and the output end of the transverse driver 340 is drivenly connected to the transverse member 330. In this embodiment, the telescopic driver 361 is disposed on the transfer base 320.

[0053] In some embodiments, the carrier driver 130 is disposed on the base 100, and the output end of the carrier driver 130 is drivenly connected to the carrier seat 210. The carrier driver 130 is a cylinder, and both the air inlet 131 and the air outlet of the cylinder are connected to an external air source. The carrier driver 130 is connected to the support frame 133 through a decoupling member 132, and the carrier seat 210 is disposed on the support frame 133.

[0054] The above configuration enables the separation of the mask 2000 from the housing 1100 of the mask storage box 1000 during the descent of the carrier 210 while the gripping component 310 grips the mask 2000. This prevents the gripping component 310 from performing an upward movement on the mask 2000 after gripping it, thus avoiding slippage between the clamping member 312 of the gripping component 310 and the mask 2000 due to inertia during the upward movement, or even the mask 2000 slipping off between the two clamping members 312. Furthermore, the carrier driver 130 is located on the base 100, and the transverse driver 340 is located on the transfer seat 320. Both drivers are fixedly mounted, improving the connection stability of the carrier driver 130 and the transverse driver 340, and also improving the convenience of wiring.

[0055] The transfer seat 320 is equipped with a second slide rail 323, and a second slider connected to the transverse member 330 is slidably mounted on the second slide rail 323. The transverse driver 340 is a servo motor, and a lead screw 341 is rotatably mounted on the transfer seat 320 and is connected to the output end of the transverse driver 340. A nut 342 is threadedly engaged with the lead screw 341 and is connected to the transverse member 330 through a connecting member 343. To limit the transverse member 330 from exceeding its rear limit position, the transfer seat 320 is equipped with a buffer 321 and a rear limit sensor 322. When the transverse member 330 moves backward to its limit position, the buffer 321 is triggered first, followed by the rear limit sensor 322. The buffer 321 is a hydraulic damper used to reduce noise and prevent violent collisions between the transverse member 330 and the transfer seat 320.

[0056] The support seat 210 has a sliding groove on each of its left and right sides, and the base 100 has two sliding blocks that slide in the corresponding sliding grooves. The support seat 210 has a first limiting block 211, and the base 100 has a second limiting block 140. When the support seat 210 descends, it stops at the first limiting block 211 and abuts against the second limiting block 140. To improve the stability of the lifting and lowering of the support seat 210, the support seat 210 and the base 100 are connected by a linear bearing 134. The support seat 210 has a guide rod 212 on its lower side, and the guide rod 212 is connected to the linear bearing 134 fixed to the base 100.

[0057] To limit the extreme positions of the support 210, the base 100 is provided with an upper limit frame 135 and a lower limit frame 136. The upper limit sensor 1351 and the lower limit sensor 1361 are respectively fixed to the upper limit frame 135 and the lower limit frame 136. The support 210 is provided with a limit sheet metal 213. When the support 210 rises to the upper limit position, the limit sheet metal 213 triggers the upper limit sensor 1351. When the support 210 falls to the lower limit position, the limit sheet metal 213 triggers the lower limit sensor 1361.

[0058] The transverse component 330 is equipped with a mask detection component 370, which is configured to detect whether a mask 2000 is placed inside the box 1100 of the mask storage box 1000. A handle 120 for gripping is provided on each of the left and right sides of the base 100 to facilitate the transfer of the entire device.

[0059] The mask 2000 has a cuboid structure with varying lengths and widths. During transfer, the orientation of the length and width sides of the mask 2000 needs to be determined by the receiving mechanism. For example, during gripping, the length and width directions of the mask 2000 are parallel; during transfer, the mask 2000 needs to be rotated 90 degrees to make its length side parallel to its length direction. The transfer mechanism 300 also includes a rotary driver 380 and two orientation detection elements 360. The rotary driver 380 is located on the transverse member 330, and its output end is drivenly connected to the gripper 311. The rotary driver 380 is configured to provide rotational power to drive the gripper 311 to rotate around its own axis. The two orientation detection elements 360 are spaced apart along the length direction, and the distance between the two orientation detection elements 360 is greater than 0 and less than the difference between the length and width of the mask 2000. If both orientation detection elements 360 are simultaneously blocked by the sidewalls on the length side of the mask 2000, it indicates that the length side of the mask 2000 is parallel to the length direction of the mask transfer device. If one orientation detection element 360 is blocked by the sidewall on the width side of the mask 2000, and the other orientation detection element 360 is not blocked, it indicates that the length side of the mask 2000 is perpendicular to the length direction of the mask transfer device. If neither orientation detection element 360 is blocked, it indicates that the mask 2000 is not clamped. The mask 2000 can be rotated 90 degrees as needed to accommodate different mating positions. The rotation detection element 381 is located on the transverse component 330 and is configured to detect whether the mask 2000 has rotated to the correct position.

[0060] During detection, the orientation detection element 360 needs to be close to the mask 2000 to ensure reliable detection. However, when the mask 2000 needs to rotate, the orientation detection element 360 will interfere with the mask 2000, affecting its rotation. Therefore, in some embodiments, the transfer mechanism 300 further includes a telescopic actuator 361. The output end of the telescopic actuator 361 is provided with an orientation bracket 362, and both orientation detection elements 360 are mounted on the orientation bracket 362. This arrangement allows the position of the orientation detection element 360 to be adjustable. The orientation detection element 360 can detect the mask 2000 when the output end of the telescopic actuator 361 is extended, and can also avoid the rotating mask 2000 when the output end of the telescopic actuator 361 is retracted.

[0061] To improve automation and automatically open the cover 1200 of the mask storage box 1000, the cover opening mechanism 200 also includes a cover opening driver 230, which is located on the support 210 and whose output is driven to the cover opening component 220.

[0062] The rotation axis of the opening component 220 coincides with the rotation axis of the cover 1200 placed in the mask storage box 1000 on the support 210. This ensures that the relative position of the opening component 220 and the cover 1200 does not change during rotation, thus preventing the suction cup 221 adsorbed by the cover 1200 from falling off, improving the success rate of opening the cover, and keeping the cover 1200 in the open state, facilitating the subsequent mask retrieval 2000. To ensure that the cover 1200 is in the open state, the support 210 is equipped with a cover detection sensor 216, which is triggered when the cover 1200 is in the open state.

[0063] In use, the mask storage box 1000 is first placed on the support 210, and then the cover 220 is activated to open the cover 1200. To ensure that the mask storage box 1000 is successfully placed on the support 210, the support 210 is provided with a detection bracket 111, which is equipped with an insertion detection component 110. The insertion detection component 110 can detect whether the mask storage box 1000 is placed on the support 210. The support 210 is provided with a left guide block 217 and a right guide block 218 spaced apart, as well as a rear guide block 219 located at the rear of the support 210. The mask storage box 1000 is guided by the left guide block 217, the right guide block 218, and the rear guide block 219 during the placement process to ensure accurate placement.

[0064] The carrier 210 is provided with a fixed driver 214, and the fixing member 215 moves relative to the carrier 210 along the length direction and is driven connected to the output end of the fixed driver 214. When the fixing member 215 moves forward, it can bring the mask storage box 1000 to the front fixing block on the front side of the carrier 210.

[0065] Due to factors such as assembly precision, there may be a risk of relative misalignment between the opening component 220 and the cover 1200 during rotation, potentially leading to misalignment or even separation between the suction cup 221 and the cover 1200. To prevent misalignment or separation between the suction cup 221 and the cover 1200, the opening mechanism 200 also includes a floating component 222. The first end of the floating component 222 is connected to the opening component 220, and the second end of the floating component 222 can float relative to the opening component 220 and elastically return to its original position. The suction cup 221 is located at the second end of the floating component 222. The ability of the second end of the floating component 222 to float relative to the opening component 220 and elastically return to its original position ensures that even if relative misalignment occurs between the opening component 220 and the cover 1200 during opening, the presence of the floating component 222 allows the suction cup 221 to remain fixed relative to the cover 1200 and to move relative to the opening component 220, thus enabling the cover 1200 to open smoothly. After the suction cup 221 separates from the cover 1200, under the elastic force of the floating part 222, the suction cup 221 returns to its initial position relative to the cover opening part 220.

[0066] The floating component 222 is sheet-shaped and elastic. The first end of the floating component 222 is screwed to the connector 223 fixed to the connecting rod 224, and the second end of the floating component 222 is screwed to the suction cup 221. The floating component 222 is a bent component, including a first connecting portion, a second connecting portion, and an intermediate connecting portion. The intermediate connecting portion is located between the first and second connecting portions, which are parallel and form an angle with each other. The first connecting portion is connected to the connector 223, and the second connecting portion is connected to the suction cup 221.

[0067] The cover opening component 220 has a rotating part on each side along its width direction. Both rotating parts are rotatably connected to the support base 210, and the output end of the cover opening driver 230 is drivenly connected to at least one rotating part. The cover opening component 220 has a clearance part 226 to avoid the cover 1200 of the mask storage box 1000. The two rotating parts make the rotation of the cover opening component 220 more stable. The method of driving the cover opening driver 230 to one of the rotating parts makes the installation of the cover opening driver 230 convenient.

[0068] Exemplarily, the cover opening component 220 has a frame structure and includes two swing rods 225 hinged to the support base 210 and a connecting rod 224 connecting the two swing rods 225. The two swing rods 225 and the connecting rod 224 together form a clearance portion 226, and a suction cup 221 is disposed on the connecting rod 224. In this embodiment, the first end of the floating component 222 is connected to the connecting rod 224, and the second end of the floating component 222 can float relative to the connecting rod 224 and can elastically return to its original position. In use, the two swing rods 225 are respectively disposed on both sides of the cover 1200 so that the rotation axis of the swing rods 225 coincides with the rotation axis of the cover 1200; the frame structure is beneficial for saving materials and costs; in addition, the frame structure helps to reduce weight and save driving costs.

[0069] Each of the two swing arms 225 is provided with a connecting shaft 2251 whose axis is perpendicular to the axis of the swing arm 225. The connecting shaft 2251 forms a rotating part, and the output end of the cover opening driver 230 can rotate around its own axis and is driven connected to one of the two connecting shafts 2251. In use, the space between the two swing arms 225 can accommodate covers 1200 of various shapes or structures. Even if the rear side of the connecting shaft 2251 of the cover 1200 has a partial structure, the rotation of the cover 1200 will not be interfered with because the swing arms 225 are spaced apart in the width direction. The two connecting shafts 2251 are located on both sides of the two swing arms 225. The cover opening driver 230 is fixed to the support base 210 by the cover opening bracket 231.

[0070] Due to the high cost of the mask 2000, a sliding lock is provided between the box 1100 and the cover 1200 to ensure the stability of the latching mechanism and prevent the cover 1200 from separating from the box 1100 and falling out and being damaged during handling or accidental contact. The sliding lock includes a latch 1210 extending along the width direction on the cover 1200, a locking rail 1110 on the box 1100, and a lock body 1300 slidably mounted on the locking rail 1110 along the width direction. The lock body 1300 has a locking groove extending along the width direction. Under its own sliding action, the locking groove of the lock body 1300 engages with the latch 1210 to lock the cover 1200 and the box 1100 securely. Two sets of sliding locks are provided between the box body 1100 and the cover body 1200. The relative sliding of the two lock bodies 1300 in the two sets of sliding locks close to each other can lock the box body 1100 and the cover body 1200, and the sliding of them opposite each other can unlock the box body 1100 and the cover body 1200.

[0071] To facilitate opening the sliding lock, the mask transfer device also includes an unlocking assembly 240. The unlocking assembly 240 includes an unlocking driver 241, an unlocking elastic element 242, two unlocking elements 243, two steering elements 244, and two unlocking transmission elements 245. The two unlocking elements 243 are slidably constrained to the support seat 210 along the width direction and can move closer or further away from each other. The two steering elements 244 are spaced apart along the width direction and are respectively located on one side of the corresponding unlocking element 243. The two unlocking transmission elements 245 are respectively wound around the corresponding steering elements 244, and the first ends of the two unlocking transmission elements 245 are respectively connected to the corresponding unlocking elements 243. The unlocking driver 241 is located between the two unlocking elements 243, and the output end of the unlocking driver 241 is connected to the second ends of the two unlocking transmission elements 245 and drags the two unlocking transmission elements 245 to drive the two unlocking elements 243 away from each other. The unlocking elastic element 242 is configured to apply an elastic force to the two unlocking elements 243 to make the two unlocking elements 243 move closer to each other. The unlocking component 243 has an unlocking groove extending along its height. When the mask storage box 1000 is placed on the support 210, the two lock bodies 1300 can be respectively inserted into the two unlocking grooves. When the unlocking driver 241 drives the two unlocking transmission components 245 to move, the two unlocking components 243 move away from each other, separating the two lock bodies 1300 in opposite directions, thereby unlocking the two sliding locks. When locking is required, the unlocking driver 241 can rotate in the opposite direction or be de-energized. Under the action of the unlocking elastic component 242, the two unlocking components 243 move closer to each other, thereby driving the two lock bodies 1300 to move closer to each other, thus locking the two sliding locks.

[0072] To simplify the structure, the unlocking elastic element 242 is a tension spring, located between the two unlocking elements 243, with both ends of the spring detachably connected to their respective unlocking elements 243. One tension spring can drive both unlocking elements 243, helping to reduce costs. In other embodiments, the unlocking elastic element 242 can also be a compression spring, with two compression springs, each elastically connected to its corresponding unlocking element 243 to drive the two unlocking elements 243 closer together.

[0073] Each unlocking member 243 has a dragging part 2431 on each side along its width. Of the four dragging parts 2431 of the two unlocking members 243, the two inner dragging parts 2431 are at the same height H1 from the support seat 210, and the two outer dragging parts 2431 are at the same height H2 from the support seat 210, with H1 ≥ H2. The two ends of the tension spring are respectively connected to the two inner dragging parts 2431, and one end of each of the two unlocking transmission members 245 is respectively connected to the two outer dragging parts 2431. The above arrangement ensures that the force point on the outside of the two unlocking members 243 is located below the force point on the inside. When the unlocking member 243 is pulled outward, it moves outward while being subjected to an elastic force on the upper inside, causing the unlocking member 243 to have an outward and upward tilting tendency, making the unlocking member 243 move forward with its head raised. This helps to avoid jamming between the unlocking member 243 and the support seat 210 during the unlocking process.

[0074] To improve the smoothness of the unlocking transmission component 245, the steering component 244 is a rotating wheel. The rotating wheel is located on the support seat 210 and is arranged to rotate about its own axis. The two unlocking transmission components 245 respectively roll into contact with their corresponding rotating wheels. The rolling contact reduces friction between the unlocking transmission component 245 and the rotating wheel, thus improving its service life.

[0075] In some embodiments, the unlocking transmission element 245 may be a transmission belt or a steel wire rope, respectively wound around the corresponding steering element 244. Transmission belts and steel wire ropes have good flexibility, can be adapted to steering transmission, are lightweight and easy to arrange, and have low cost.

[0076] The support base 210 is fixedly provided with a centering adjustment member 246. The centering adjustment member 246 is provided with an adjustment hole. The centering adjustment member 246 is slidably disposed on the support base 210 along the width direction and has an adjustment screw hole. The steering member 244 is disposed on the centering adjustment member 246 to move synchronously with the centering adjustment member 246. The adjustment screw passes through the adjustment hole and is screwed into the adjustment screw hole. Tightening the adjustment screw causes the centering adjustment member 246 to move, thereby adjusting the position of the steering member 244 to adapt to the lock body 1300 in different positions.

[0077] In some embodiments, this application provides a mask transfer device, which includes a cover opening mechanism 200 and a transfer mechanism 300. The cover opening mechanism 200 is used to open the cover 1200 of the mask storage box 1000 to expose the mask 2000. The gripping component 310 of the transfer mechanism 300 can remove the mask 2000 from the box 1100 and move it out of the box 1100 to facilitate docking with other receiving mechanisms. This realizes the automatic opening of the mask storage box 1000 and the automatic opening of the mask 2000. The automatic removal of the mask 2000 reduces the labor intensity of manual labor. At the same time, the transfer mechanism 300 completes the gripping action of the two clamping members 312 to ensure the gripping position is accurate and avoids the tilting of the mask 2000, so as to ensure the integrity of the film under the mask 2000. Finally, the clamping members 312 are driven by the clamping driver 315 to ensure the gripping efficiency, so that the gripping action can be completed quickly after the cover 1200 is opened, reducing preparation time and reducing the probability of the mask 2000 being contaminated.

[0078] This embodiment also provides a mask transfer method, applied to the mask transfer device in any of the above embodiments. Referring to FIG8, the mask transfer method includes the following steps:

[0079] S100, Place the mask storage box 1000 on the carrier 210.

[0080] S200, the cover 1200 is opened by the opening mechanism 200.

[0081] S300, in response to detecting that a mask 2000 is placed inside the housing 1100 of the mask storage box 1000, the clamping driver 315 drives the clamping member 312 or one of the rotating members to bring the two clamping members 312 closer together to clamp the mask 2000.

[0082] S400, Remove the mask 2000 from the housing 1100.

[0083] In S100, after the mask storage box 1000 is placed on the carrier 210, the positioning detection component 110 detects whether the mask storage box 1000 is in place. In response to the detection that the mask storage box 1000 is in place, the fixing component 215 moves forward and fixes the mask storage box 1000, and unlocks the sliding lock. Then, the cover 1200 is attracted by the suction cup 221 of the cover opening component 220, and the cover opening component 220 rotates to open the cover 1200.

[0084] In S200, the suction cup 221 first adsorbs the cover 1200, and then the cover opening component 220 rotates to open the cover 1200 and keep it in the open position.

[0085] In S300, the lateral movement 330 moves the gripping component 310 above the mask storage box 1000, and then the support 210 rises to its upper limit position. The mask detection component 370 detects whether there is a mask 2000 inside the box 1100 of the mask storage box 1000. In response to detecting that a mask 2000 is placed inside the box 1100 of the mask storage box 1000, the mask 2000 is clamped. In response to detecting that no mask 2000 is placed inside the box 1100 of the mask storage box 1000, an alarm is triggered.

[0086] In S300, the gripping assembly 310 also includes a gripping elastic element 318, which applies an elastic force to the two clamping members 312 to bring them closer together. Even in the event of a power outage, when the clamping driver 315 is no longer in operation between the two clamping members 312, the gripping elastic element 318 ensures that the two clamping members 312 remain clamped, preventing the mask 2000 from falling off and providing power outage protection.

[0087] In S400, the carrier 210 descends to its lower limit position, allowing the mask 2000 to be removed from the mask storage box 1000.

[0088] After S400, the orientation of the mask 2000 is detected by the orientation detection component 360, the mask 2000 is driven to the required angle by the rotary driver 380, and handed over to other receiving mechanisms.

[0089] After the mask plate 2000 is handed over, the cover opening part 220 rotates in the opposite direction, causing the cover 1200 to close and reset, and then the sliding lock is locked.

[0090] In some embodiments, this application provides a mask transfer method that enables automatic opening of the mask storage box 1000 and automatic removal of the mask 2000, saving manpower, ensuring gripping efficiency, reducing preparation time, and lowering the probability of the mask 2000 being contaminated.

[0091] The above embodiments of this application are merely illustrative examples to clearly illustrate the purpose of this application, and are not intended to limit the implementation of this application. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively describe all possible implementations here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the scope of protection of the claims of this application.

Claims

1. A mask transfer device, capable of opening a mask storage box (1000) and removing a mask (2000) from the mask storage box (1000), the mask transfer device comprising: Base (100); A cover opening mechanism (200) is provided on the base (100), and the cover opening mechanism (200) is configured to open the cover (1200) of the mask storage box (1000); A transfer mechanism (300) is disposed on the base (100), and the output end of the transfer mechanism (300) has a gripping component (310), the gripping component (310) being configured to grip a mask (2000) from the housing (1100) of the mask storage box (1000), the gripping component (310) comprising: Grab seat (311); Both clamping members (312) are movably constrained to the gripping seat (311) along the width direction, and the two clamping members (312) can move closer to or further away from each other; Two rotating members are spaced apart along the width direction, and both rotating members are arranged to rotate about their own axis. The clamping transmission member (314) is strip-shaped and is wound around the two rotating members, forming two transmission parts (3141) that extend along the width direction and are parallel to each other between the two rotating members. The two transmission parts (3141) are respectively connected to the corresponding clamping member (312). A clamping driver (315) is disposed on the gripper (311), and the output end of the clamping driver (315) is drivenly connected to at least one of the clamping members (312) or one of the two rotating members.

2. The reticle transfer device of claim 1, wherein, Each of the rotating components includes a rotating wheel (319) and a mounting shaft (313) that rotatably engages with the rotating wheel (319). The mounting shaft (313) extends along the height direction, and a first end of the mounting shaft (313) is fixed to the gripping seat (311). The clamping component (312) is provided with a limiting groove (3122) extending along the width direction. The second end of the mounting shaft (313) passes through the limiting groove (3122) and can slide relative to the limiting groove (3122) in the width direction, and can stop against the side wall of the limiting groove (3122).

3. The reticle transfer device of claim 2, wherein, The rotating wheel (319) is a synchronous wheel with teeth in the circumferential direction, and the clamping transmission member (314) is a synchronous belt with teeth on the inner side that are adapted to the two synchronous wheels. The synchronous belt meshes with the synchronous wheel for transmission.

4. The reticle transfer device of claim 1, wherein, The gripping assembly (310) further includes a gripping elastic element (318) configured to apply an elastic force to the two clamping members (312) to bring the two clamping members (312) closer together.

5. The reticle transfer device of claim 4, wherein, The gripping elastic element (318) includes a tension spring, and a connecting block (3123) with a hook (3125) is mounted on the clamping member (312). The connecting block (3123) is located below the gripping seat (311), and the opening of the hook (3125) faces upward. The hanging ring at the end of the tension spring can hook onto the hook (3125) from top to bottom.

6. The reticle transfer device of claim 1, wherein, The transfer mechanism (300) further includes a trigger (350) and two position detection elements (351). The trigger (350) is connected to one of the two clamping elements (312). The two position detection elements (351) are arranged at intervals along the moving path of the trigger (350). During the movement of the two clamping elements (312), the trigger (350) can be in the open position, the clamping position, and the empty position in sequence. When the trigger (350) is in the open position, it can trigger one of the two position detection elements (351). When the trigger (350) is in the empty position, it can trigger the other of the two position detection elements (351). When the trigger (350) is in the clamping position, it can trigger both position detection elements (351) simultaneously.

7. The reticle transfer device of any of claims 1-6, wherein, The transfer mechanism (300) further includes a rotary driver (380) and two orientation detection elements (360). The output end of the rotary driver (380) is driven to the gripper (311) to drive the gripper (311) to rotate around its own axis. The two orientation detection elements (360) are spaced apart along the length direction. The distance between the two orientation detection elements (360) is greater than 0 and less than the difference between the length and width of the mask (2000).

8. The reticle transfer device of any of claims 1-6, wherein, The clamping driver (315) is a linear driver. The side wall of the linear driver parallel to its own axis is connected to the gripper (311). The output end of the linear driver can reciprocate along the width direction and is driven to connect with the clamping member (312).

9. The reticle transfer device of any of claims 1-6, wherein, The transfer mechanism (300) further includes a transfer seat (320), a transverse member (330), and a transverse driver (340). The transfer seat (320) is disposed on the base (100). The transverse member (330) is movably constrained to the transfer seat (320) along the length direction. The gripping seat (311) is disposed on the transverse member (330). The output end of the transverse driver (340) is drivenly connected to the transverse member (330).

10. A mask transfer method, applied to the mask transfer apparatus according to any one of claims 1-9, the mask transfer method comprising: Place the mask storage box (1000) on the carrier (210); The cover (1200) of the mask storage box (1000) is opened by the opening mechanism (200); In response to detecting that the mask plate (2000) is placed in the box body (1100) of the mask plate storage box (1000), the two clamping pieces (312) are moved close to each other to clamp the mask plate (2000); The mask plate (2000) is removed from the box body (1100) of the mask plate storage box (1000).

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