A simple electron beam mold processing machine

Abstract

The present invention relates to a simple electron beam mold processing machine, comprising an electron gun, a focusing coil and a deflection coil; one end of the electron gun is provided with an outlet for emitting electrons; the focusing coil and the deflection coil are sequentially arranged outside the outlet, and the electrons emitted by the electron gun are formed into an electron beam in a vacuum environment; and a vacuum forming mechanism is also included; the vacuum forming mechanism is located at the periphery of the electron gun and forms a preset vacuum degree by driving air flow. The beneficial effects of the present invention are: compared with the existing electron beam processing machine, it does not need to be carried out in a special vacuum chamber, and the vacuum chamber is removed and the vacuum pumping operation is also removed, which improves the processing efficiency and saves costs. At the same time, the processing can be carried out anytime and anywhere, which greatly improves the convenience of processing.

Description

Technical Field

[0001] The invention relates to the field of processing equipment, in particular to a simple electron beam mould processing machine. Background Art

[0002] Scanning electron beam surface modification technology is a new type of technology that directly scans and modifies metal surfaces in a vacuum environment. The core of this technology is the circular scanning method. The electrons irradiated on the surface of the material quickly convert kinetic energy into thermal energy, causing the surface of the material to heat up instantly. Due to the extremely short processing time and large temperature gradient, the temperature change of the substrate below the surface of the material is relatively low, so the surface material quickly cools down and undergoes phase change, resulting in changes in the surface properties of the material.

[0003] Existing electron beam processing machines must be used in a vacuum state. Depending on the size and shape of the workpiece being processed, the vacuum chamber also requires a corresponding cavity of different sizes. Therefore, when processing large workpieces, a larger vacuum chamber is required, and the vacuum chamber requires a longer vacuum pumping time to reach the vacuum condition, which reduces production efficiency and increases production costs. In addition, processing must be carried out in a vacuum chamber, which cannot meet certain processing requirements or brings great inconvenience to the processing. Summary of the invention

[0004] To sum up, in order to overcome the shortcomings of the prior art, the technical problem to be solved by the present invention is to provide a simple electron beam mold processing machine, which combines the vacuum state formed by the Bernoulli principle with the traditional electron beam processing machine, and has a positive effect of being simpler, more convenient and energy-saving in electron beam material processing and molding.

[0005] The technical solution of the present invention to solve the above technical problems is as follows: a simple electron beam mold processing machine, including an electron gun, a focusing coil and a deflection coil; one end of the electron gun is provided with an outlet for emitting electrons; the focusing coil and the deflection coil are sequentially arranged on the outside of the outlet, and the electrons emitted by the electron gun are formed into an electron beam under a vacuum environment; and also includes a vacuum forming mechanism; the vacuum forming mechanism is located at the periphery of the electron gun and forms a preset vacuum degree by driving air flow.

[0006] On the basis of the above technical solution, the present invention can also be improved as follows:

[0007] Furthermore, the vacuum forming mechanism comprises an outer shell, an inner shell and an exhaust mechanism; the outer shell and the inner shell are both hollow structures, and the inner shell is spaced at the periphery of the electron gun, and the outer shell is spaced at the periphery of the inner shell; an airflow cavity is formed between the outer shell and the inner shell, and the inner shell is provided with a plurality of air holes for connecting its interior with the airflow cavity;

[0008] One end of the airflow cavity is open, and the other end thereof is closed; the air exhaust device is connected to the closed end of the airflow cavity and drives the air inside the inner shell to flow through the airflow cavity and the air holes.

[0009] Furthermore, the exhaust mechanism includes a plurality of air ducts and a plurality of fans; the air ducts and the fans are arranged in a one-to-one correspondence; one end of all the air ducts is connected to different positions of the closed end of the airflow cavity and is connected to the airflow cavity, and the other end thereof is connected to the corresponding fan.

[0010] Furthermore, the outer shell and the inner shell are cylindrical structures.

[0011] Furthermore, one end of all the air ducts is evenly connected in an annular manner to the closed end of the airflow cavity.

[0012] Furthermore, the electron gun comprises a gun housing, an anode and a cathode; the vacuum forming mechanism is located at the periphery of the gun housing and forms a preset vacuum degree by driving air to flow;

[0013] The outlet is arranged at one end of the gun housing, and the anode is arranged at a position in the gun housing corresponding to the outlet; the cathode is arranged inside the other end of the gun housing, and a heating mechanism for heating the cathode and releasing electrons is arranged at a position in the gun housing corresponding to the cathode.

[0014] Furthermore, the heating mechanism is a heating wire, and the heating wire is connected to an external power source through a cable.

[0015] The beneficial effects of the present invention are as follows: compared with existing electron beam processing machines, it does not need to be carried out in a special vacuum chamber. Removing the vacuum chamber also removes the vacuum pumping operation, thereby improving processing efficiency and saving costs. At the same time, processing can be carried out anytime and anywhere, greatly improving the convenience of processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural diagram of the present invention.

[0017] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0018] 1. Focusing coil, 2. Deflection coil, 3. Exit, 4. Electron beam, 5. Outer shell, 6. Inner shell, 7. Air duct, 8. Air flow cavity, 9. Air hole, 10. Gun shell, 11. Anode, 12. Cathode, 13. Heating wire, 14. Cable. DETAILED DESCRIPTION

[0019] The principles and features of the present invention are described below in conjunction with the accompanying drawings. The examples given are only used to explain the present invention and are not used to limit the scope of the present invention.

[0020] like Figure 1As shown, a simple electron beam mold processing machine includes an electron gun, a focusing coil 1 and a deflection coil 2. An outlet 3 for emitting electrons is provided at one end of the electron gun. The focusing coil 1 and the deflection coil 2 are sequentially arranged outside the outlet 3, that is, the focusing coil 1 is close to the outlet 3, and the electrons emitted by the electron gun are formed into an electron beam 4 under a vacuum environment. A vacuum forming mechanism is also included. The vacuum forming mechanism is located at the periphery of the electron gun and forms a preset vacuum degree by driving air flow.

[0021] The vacuum forming mechanism includes an outer shell 5, an inner shell 6 and an exhaust mechanism. A plurality of fans. The outer shell 5 and the inner shell 6 are both hollow structures, and the inner shell 6 is spaced at the periphery of the electron gun, and the outer shell 5 is spaced at the periphery of the inner shell 6. An airflow cavity 8 is formed between the outer shell 5 and the inner shell 6, and a plurality of air holes 9 are provided on the inner shell 6 to connect its interior with the airflow cavity 8. One end of the airflow cavity 8 is open, and the other end is closed. The exhaust device is connected to the closed end of the airflow cavity 8 and drives the air inside the inner shell 6 to flow through the airflow cavity 8 and the air holes 9. The exhaust mechanism includes a plurality of air ducts 7 and a plurality of fans, and the air ducts 7 are arranged one by one with the fans. One end of all the air ducts 7 is connected to different positions of the closed end of the airflow cavity 8 and is connected to the airflow cavity 8, and the other end is connected to the corresponding fan. Preferably: the outer shell 5 and the inner shell 6 are cylindrical structures, and one end of all the air ducts 7 is evenly connected to the closed end of the airflow cavity 8 in an annular manner.

[0022] According to Bernoulli's principle, a certain degree of vacuum can be formed between two air convections in opposite directions or in an area where air flows at a certain speed, that is, as the air flow speed increases, its pressure will decrease; conversely, as the air flow speed decreases, its pressure will increase. The specific calculation formula is as follows:

[0023]

[0024] In the above formula, P is the pressure at a certain point in the fluid, v is the flow velocity at that point in the fluid, ρ is the fluid density, g is the acceleration of gravity, h is the height of the point, and C is a constant. Therefore, if the air in the inner shell 6 is compressed to generate a negative pressure inside, the air in the inner cavity of the inner shell 6, i.e., around the electron gun, can be sucked out to achieve a vacuum effect. Specifically, under the action of the fan, the air inside the inner shell 6 will flow toward the fan at a certain speed through the air holes 9, the air flow cavity 8, and the air duct 7 in sequence, thereby forming a certain vacuum degree inside the inner shell 6, so that the electron gun is in a vacuum environment. Compared with the existing electron beam processing machines, it does not need to be carried out in a special vacuum chamber. Removing the vacuum chamber also removes the vacuum pumping operation, which improves the processing efficiency and saves costs. At the same time, the processing can be carried out anytime and anywhere, which greatly improves the convenience of processing.

[0025] The electron gun includes a gun housing 10, an anode 11 and a cathode 12. The vacuum forming mechanism is located at the periphery of the gun housing 10 and forms a preset vacuum degree by driving air to flow. The outlet 3 is arranged at one end of the gun housing 10, and the anode 11 is arranged at a position corresponding to the outlet 3 in the gun housing 10. The cathode 12 is arranged inside the other end of the gun housing 10, and a heating mechanism for heating the cathode 12 and releasing electrons is arranged at a position corresponding to the cathode 12 in the gun housing 10. Preferably, the heating mechanism is a heating wire 13, and the heating wire 13 is connected to an external power source through a cable 14.

[0026] The cathode 12 of the electron gun releases a large number of electrons after being heated by high voltage. The electrons are gathered into a beam through the bunching electrode and then accelerated to the anode 11 by the accelerating voltage. After the beam electrons pass through the anode 11, they are dispersed again in the vacuum environment due to the interaction between charges and are shot into the focusing coil 1. There is an axial uniform magnetic field in the focusing coil 1, and the magnetic flux lines are parallel to the cavity of the electron gun shell 10, so that the electron group is subjected to the Lorentz force in the magnetic field. When the magnetic field is a uniform magnetic field, the movement is physically divided into three basic forms of movement:

[0027] (1) When the direction of motion of a charged particle is parallel to the direction of the magnetic flux lines, the magnitude of the Lorentz force it experiences is zero, and the particle will maintain its initial direction and speed and move in a uniform straight line.

[0028] (2) When the direction of motion of a charged particle is perpendicular to the direction of the magnetic field lines, the Lorentz force it experiences only acts as a centripetal force, causing the particle to perform uniform circular motion.

[0029] (3) When the direction of motion is at a general angle to the direction of the magnetic flux lines (neither parallel nor perpendicular), the velocity can be orthogonally decomposed into perpendicular and parallel directions. The motion of the particle is the combined motion of (1) and (2), that is, uniform linear motion in the direction parallel to the magnetic flux lines and uniform circular motion in the direction perpendicular to the magnetic flux lines. This is called "equidistant spiral motion" in space.

[0030] The divergent electron groups are injected into the magnetic field of the focusing coil 1 at different angles, making the radial component velocities of the electrons different. Therefore, from the plane perpendicular to the magnetic flux lines, the electrons all move in circles with different radii. The time it takes for these electrons to rotate once is independent of the speed, so their rotation periods are the same. There is a magnetic field in the deflection coil 2 that is constant in size, perpendicular to the axis of the electron gun housing 10, and rotates at a constant speed. The electron beam formed in the focusing coil 1 is deflected when passing through the magnetic field, so a circular halo is formed at the point where it lands on the workpiece.

[0031] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A simple electron beam mold processing machine, comprising an electron gun, a focusing coil (1) and a deflection coil (2); an outlet (3) for emitting electrons is provided at one end of the electron gun; the focusing coil (1) and the deflection coil (2) are sequentially arranged outside the outlet (3), and the electrons emitted by the electron gun are formed into an electron beam (4) under a vacuum environment; the characteristics are as follows: It also includes a vacuum forming mechanism for forming a vacuum state by using the Bernoulli principle; the vacuum forming mechanism is located at the periphery of the electron gun and forms a preset vacuum degree by driving air to flow; The vacuum forming mechanism comprises an outer shell (5), an inner shell (6) and an exhaust mechanism; the outer shell (5) and the inner shell (6) are both hollow structures, and the inner shell (6) is spaced at the outer periphery of the electron gun, and the outer shell (5) is spaced at the outer periphery of the inner shell (6); an airflow cavity (8) is formed between the outer shell (5) and the inner shell (6), and the inner shell (6) is provided with a plurality of air holes (9) for connecting the interior of the inner shell with the airflow cavity (8); One end of the airflow cavity (8) is open and the other end is closed; the exhaust mechanism is connected to the closed end of the airflow cavity (8) and drives the air inside the inner shell (6) to flow through the airflow cavity (8) and the air hole (9).

2. The simplified electron beam mold processing machine according to claim 1, characterized in that: The exhaust mechanism comprises a plurality of air ducts (7) and a plurality of fans; the air ducts (7) and the fans are arranged in a one-to-one correspondence; one end of all the air ducts (7) is connected to different positions of the closed end of the airflow cavity (8) and communicates with the airflow cavity (8), and the other end thereof is connected to the corresponding fan.

3. The simplified electron beam mold processing machine according to claim 2, characterized in that: The outer shell (5) and the inner shell (6) are cylindrical structures.

4. The simplified electron beam mold processing machine according to claim 3, characterized in that: One end of all the air ducts (7) is evenly connected in an annular shape to the closed end of the airflow cavity (8).

5. The simplified electron beam mold processing machine according to any one of claims 1 to 4, characterized in that: The electron gun comprises a gun housing (10), an anode (11) and a cathode (12); the vacuum forming mechanism is located at the periphery of the gun housing (10) and forms a preset vacuum degree by driving air to flow; The outlet (3) is arranged at one end of the gun housing (10), and the anode (11) is arranged at a position in the gun housing (10) corresponding to the outlet (3); the cathode (12) is arranged inside the other end of the gun housing (10), and a heating mechanism for heating the cathode (12) and releasing electrons is provided at a position in the gun housing (10) corresponding to the cathode (12).

6. The simplified electron beam mold processing machine according to claim 5, characterized in that: The heating mechanism is a heating wire (13), and the heating wire (13) is connected to an external power source via a cable (14).

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