Micromanipulator and motion device

Abstract

The application belongs to the technical field of integrated circuit preparation, and particularly discloses a micro-motion stage and a motion device. The micro-motion stage comprises a mounting base, a vertical driving device installed on the mounting base, a vertical base sleeved on the outside of the vertical driving device, a driving end of the vertical driving device driving the vertical base to move along the Z direction relative to the mounting base, a rotating seat rotatably sleeved on the vertical base along the Z direction and having an unchanged position relative to the vertical base along the Z direction, and a rotating driving motor sleeved on the side surface of the rotating seat and used for driving the rotating seat to rotate along the Z direction, wherein the rotating driving motor comprises a rotating motor rotor and a rotating motor stator which are coaxially and spacedly sleeved, the rotating motor rotor is fixed relative to the rotating seat, and the rotating motor stator is fixed relative to the mounting base. The motion device comprises the above micro-motion stage. The micro-motion stage and the motion device disclosed by the application are beneficial to the lightweight and flat design of the micro-motion stage and the motion device.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of integrated circuit manufacturing, and in particular to a micro-motion stage and a motion device. BACKGROUND

[0002] In the field of semiconductor silicon wafer film thickness detection, the workpiece stage is required to complete the handover of the silicon wafer with the silicon wafer transmission system, and at the same time, it needs to bear the 12-inch or 8-inch silicon wafer to complete the vertical motion and 360° rotation motion. Therefore, the motion device applied in the film thickness detection field generally includes an XY motion stage and a micro-motion stage arranged on the XY motion stage.

[0003] The micro-motion stage is the core component of the motion device, which generally can provide rotational motion around the Z direction and vertical motion along the Z direction. With the continuous improvement of yield requirement and film thickness detection accuracy requirement, the operating speed, acceleration and performance requirement of the motion device are also improved, which requires the motion device to be more lightweight and flat, and to have better motion accuracy.

[0004] The existing micro-motion stage generally includes a base, an upper plate arranged above the base, a vertical driving device connected between the upper plate and the base, and an Rz stage arranged on the upper plate. The Rz stage includes a stage seat for mounting the stage and a rotary driving mechanism for driving the stage seat to rotate around the Z axis.

[0005] The micro-motion stage provided by the prior art has the vertical driving device, the upper plate and the Rz stage arranged in sequence from bottom to top, which makes it difficult to reduce the size of the micro-motion stage in the Z direction, and is not conducive to the lightweight and flat arrangement of the micro-motion stage and the motion device. SUMMARY

[0006] An object of the present application is to provide a micro-motion stage to reduce the size of the micro-motion stage in the Z direction, so as to facilitate the lightweight and flat arrangement of the micro-motion stage.

[0007] Another object of the present application is to provide a motion device to reduce the size of the motion device in the Z direction and improve the operating characteristics of the motion device.

[0008] To achieve the above objects, the present application adopts the following technical solutions:

[0009] A micro-motion stage, comprising:

[0010] a mounting base;

[0011] a vertical driving device mounted on the mounting base;

[0012] a vertical base sleeved on the outside of the vertical driving device, the driving end of the vertical driving device driving the vertical base to move along the Z direction relative to the mounting base;

[0013] a rotating seat, rotatably sleeved on the vertical base in the Z direction and fixed in position relative to the vertical base in the Z direction;

[0014] a rotating drive motor, sleeved on a side of the rotating seat, for driving the rotating seat to rotate in the Z direction, the rotating drive motor comprising a rotating motor rotor and a rotating motor stator sleeved coaxially and spaced apart, the rotating motor rotor being fixed relative to the rotating seat, and the rotating motor stator being fixed relative to the mounting base.

[0015] As a preferred technical solution of the micro-motion stage, the vertical base comprises a transition cylinder portion and a sliding sleeve portion sleeved coaxially and spaced apart and connected, the rotating seat comprises an inner cylinder portion and an outer cylinder portion sleeved coaxially and spaced apart and connected, the transition cylinder portion is sleeved on the outside of the vertical drive device, the inner cylinder portion extends into the space between the transition cylinder portion and the sliding sleeve portion in the Z direction and is rotationally connected with the transition cylinder portion, the outer cylinder portion is located on the outside of the vertical base and has the rotating motor rotor fixed thereto, and the sliding sleeve portion is slidingly connected with the mounting base. With this arrangement, the vertical base and the rotating seat form a nested cooperation structure, which can ensure the convenience and reliability of the connection between the vertical base and the rotating seat, facilitate the sliding connection between the vertical base and the mounting base, and facilitate the lightweight and flat design of the micro-motion stage.

[0016] As a preferred technical solution of the micro-motion stage, the rotating motor rotor is fixedly sleeved on the outer sidewall of the rotating seat, the vertical base is located on the inner side of the rotating motor rotor, and the rotating motor stator is sleeved spaced apart on the outer side of the rotating motor rotor. With this arrangement, the rotating motor can be conveniently disassembled and assembled.

[0017] As a preferred technical solution of the micro-motion stage, the micro-motion stage further comprises a baffle, the baffle is connected with the rotating seat or the mounting base, the baffle is arranged above the rotating motor stator, and a projection of the rotating motor stator on the XY plane is located within the projection range of the baffle on the XY plane. The arrangement of the baffle can shield the rotating motor stator, reduce the falling of impurities such as moisture and dust onto the rotating motor stator, and improve the use safety and reliability of the rotating drive motor.

[0018] As a preferred technical scheme of the micro-motion stage, the mounting base comprises a bottom plate part and a guide sleeve part vertically arranged on the bottom plate part, the vertical driving device is mounted on the bottom plate part, the vertical base is located inside the guide sleeve part and is in sliding connection with the guide sleeve part, and the rotary driving motor is sleeved outside the guide sleeve part. Through the sliding cooperation of the guide sleeve part and the vertical base, the sliding guidance of the vertical base is realized, the reliability and stability of the movement of the vertical base along the Z direction are ensured, meanwhile, the vertical base and the rotary driving motor are located on the two sides of the guide sleeve part, the installation of the micro-motion stage can be sequentially performed from inside to outside, the installation efficiency is improved, and the structural interference can be effectively reduced.

[0019] As a preferred technical scheme of the micro-motion stage, the mounting base further comprises a mounting cylinder vertically arranged on the bottom plate part, the mounting cylinder is sleeved outside the rotary driving motor and connected with the bottom plate part at the lower end, and the rotary motor stator is mounted on the inner side wall of the mounting cylinder. The mounting cylinder can provide a mounting surface for the installation of the rotary motor stator, and can also protect the rotary driving motor, so that the problem of easy damage of the rotary driving motor caused by exposure of the rotary driving motor is avoided.

[0020] As a preferred technical scheme of the micro-motion stage, the mounting cylinder and the bottom plate part are detachably connected. The detachable connection of the mounting cylinder and the bottom plate part can improve the dismounting convenience of the rotary driving motor.

[0021] As a preferred technical scheme of the micro-motion stage, the absolute value of the height difference between the rotary motor rotor in the Z direction and the height of the rotary motor stator in the Z direction is greater than or equal to the maximum required stroke of the rotary base along the Z direction. This arrangement can ensure that the rotary motor rotor is always located within the magnetic field range of the rotary motor stator during movement along the Z direction, thereby ensuring the operation reliability of the rotary driving motor.

[0022] As a preferred technical scheme of the micro-motion stage, the vertical driving device comprises a voice coil motor assembly and a gravity compensation assembly, the voice coil motor assembly is used to drive the rotary base to move along the Z direction, and the gravity compensation assembly is used to compensate the gravity of the rotary base. The integrated arrangement of the voice coil motor assembly and the gravity compensation assembly can realize the vertical driving of the rotary base and the gravity compensation of the rotary base at the same time, effectively improve the compactness of the structure, and be beneficial to the lightweight and flat design of the micro-motion stage.

[0023] As a preferred technical scheme of the micro stage, the voice coil motor assembly comprises a voice coil motor stator and a voice coil motor mover, the gravity compensation assembly comprises a magnetic suspension stator and a magnetic suspension mover, the voice coil motor stator and the magnetic suspension stator are fixed relative to the mounting base, and the magnetic suspension mover and the voice coil motor mover are fixed relative to the vertical base. Thus, when the coil in the voice coil motor assembly generates Lorentz force through cutting, the magnetic suspension stator and the magnetic suspension mover generate suspension force due to magnetic force, thereby compensating the gravity of the rotating seat.

[0024] As a preferred technical scheme of the micro stage, the vertical driving device further comprises a stator seat, a lower end of the stator seat is connected with the mounting base, the voice coil motor stator is mounted on an outer wall of the stator seat, the magnetic suspension stator is mounted on an inner wall of the stator seat, and the voice coil motor mover is arranged at an outer side of the voice coil motor stator in a spaced manner. The stator seat is arranged to facilitate the connection of the magnetic suspension stator and the voice coil motor stator with the mounting base, improve the stability and convenience of the arrangement of the magnetic suspension stator and the voice coil motor stator, and improve the compactness of the structure.

[0025] As a preferred technical scheme of the micro stage, the vertical driving device further comprises a mover seat, the mover seat is located inside the vertical base and connected with the vertical base, the mover seat comprises a magnetic mounting portion and a motor mounting portion which are connected and arranged in a spaced manner, the motor mounting portion is sleeved at an outer side of the stator seat, the voice coil motor mover is mounted on the motor mounting portion, the magnetic mounting portion is located at an inner side of the stator seat, and the magnetic suspension mover is mounted on the magnetic mounting portion. The mover seat is arranged to indirectly connect the voice coil motor mover and the magnetic suspension mover together, ensure the synchronous operation of the voice coil motor mover and the magnetic suspension mover, facilitate the connection of the voice coil motor mover and the magnetic suspension mover with the vertical base, improve the compactness of the structure, reduce the occupied space, and be more conducive to the flatness and lightness of the micro stage.

[0026] As a preferred technical scheme of the micro stage, the voice coil motor mover comprises a voice coil motor magnetic steel, and the voice coil motor mover and the magnetic suspension mover are integrally arranged. This can effectively reduce the structural complexity of the vertical driving device, reduce the weight of the vertical driving device, simplify the structure, and be more conducive to the flatness and lightness of the micro stage.

[0027] As a preferred technical scheme of the micro stage, the gravity compensation assembly comprises a guide seat and a sliding seat, a lower end of the guide seat is connected with the mounting base, the guide seat has a gas cavity with an upper end opening, the sliding seat is arranged in the gas cavity in a sliding and sealing manner, and a gas passage is formed in a lower part of the guide seat and communicates with the gas cavity.

[0028] The voice coil motor assembly comprises a voice coil motor stator and a voice coil motor mover, the voice coil motor stator is installed on the air guide base, and the voice coil motor mover is connected to the sliding base.

[0029] A motion device comprises an XY motion table and the fine motion table as described above, the mounting base is connected to the XY motion table, and the XY motion table is used to drive the fine motion table to move in the X direction and / or the Y direction.

[0030] The present application has the following advantages:

[0031] The fine motion table provided by the present application can effectively reduce the size of the fine motion table in the Z direction, and is beneficial to the lightweight and flat design of the fine motion table, thereby improving the operation speed and operation accuracy of the fine motion table.

[0032] The motion device provided by the present application can effectively reduce the size of the motion device in the Z direction, thereby being beneficial to the flat and lightweight design of the motion device, and improving the operation speed and operation accuracy of the motion device. BRIEF DESCRIPTION OF DRAWINGS

[0033] Figure 1 is a longitudinal sectional view of the fine motion table provided by the first embodiment of the present application;

[0034] Figure 2 is a transverse sectional view of the fine motion table provided by the first embodiment of the present application;

[0035] Figure 3 is a structural schematic view of the vertical base provided by the first embodiment of the present application;

[0036] Figure 4 is a structural schematic view of the upper limit piece provided by the first embodiment of the present application in one view;

[0037] Figure 5 is a structural schematic view of the lower limit piece provided by the first embodiment of the present application in one view;

[0038] Figure 6 is a structural schematic view of the lower limit piece provided by the first embodiment of the present application in another view;

[0039] Figure 7 is a structural schematic view of the rotating seat provided by the first embodiment of the present application in one view;

[0040] Figure 8 is the structure schematic view of the rotating seat provided by the embodiment one of the present application in another perspective view;

[0041] Figure 9 is the structure schematic view of the rotating drive motor provided by the embodiment one of the present application;

[0042] Figure 10 is the longitudinal section view of the vertical driving device provided by the embodiment one of the present application;

[0043] Figure 11 is the longitudinal section view of the vertical driving device provided by the embodiment two of the present application;

[0044] Figure 12 is the longitudinal section view of the vertical driving device provided by the embodiment three of the present application.

[0045] The signs in the figure are as follows:

[0046] 1, rotating drive motor; 11, rotating motor rotor; 111, rotating motor magnetic steel; 12, rotating motor stator; 121, rotating motor coil;

[0047] 2, rotating seat; 21, inner cylinder part; 211, limiting flange; 22, outer cylinder part; 221, positioning boss; 23, top plate part; 231, lightening hole; 24, containing cavity;

[0048] 3, vertical base; 31, adapter cylinder part; 311, positioning step; 32, sliding sleeve part; 33, connecting part; 34, containing groove; 35, mounting cavity; 36, connecting plate part;

[0049] 4, vertical driving device; 41, voice coil motor assembly; 411, voice coil motor rotor; 412, voice coil motor stator; 42, gravity compensation assembly; 421, magnetic levitation stator; 422, magnetic levitation rotor; 423, air guide seat; 4231, air cavity; 4232, air passage; 424, sliding seat; 425, sealing plate; 43, stator seat; 44, rotor seat; 441, magnetic mounting part; 4411, mounting base part; 4412, adapter frame part; 442, motor mounting part; 443, connecting seat part; 45, connecting base;

[0050] 5, mounting base; 51, bottom plate part; 52, guide sleeve part; 53, mounting cylinder; 531, main body cylinder part; 532, mounting convex part;

[0051] 6, baffle;

[0052] 7, rotary bearing; 8, table; 9, vertical guide assembly; 10, vertical displacement detection device; 101, vertical grating ruler; 102, vertical displacement encoder; 20, upper limit piece; 201, limit cylinder part; 202, stopper part; 30, lower limit piece; 301, pressing ring part; 3011, inner ring part; 3012, outer ring part; 3013, connecting ring part; 30131, grating mounting surface; 302, mounting ring part. DETAILED DESCRIPTION

[0053] The application will be further described below in conjunction with the drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the application and are not to be used to limit the application. In addition, it should be noted that only the parts related to the application are shown in the drawings for the convenience of description, rather than all the structures.

[0054] In the description of the application, unless otherwise explicitly specified and limited, the terms "connected", "connected", "fixed" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the application can be understood according to the specific circumstances.

[0055] In the present application, unless otherwise explicitly specified and limited, the "upper" or "lower" of the first feature to the second feature can include that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, the "upper", "above" and "on" of the first feature to the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The "below", "below" and "below" of the first feature to the second feature includes that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0056] In the description of the present embodiment, the terms "upper", "lower", "right", and other orientation or position relationships are based on the orientation or position relationship shown in the drawings, and are only for the convenience of description and simplification of operation, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the application. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0057] Embodiment one

[0058] As Figure 1 and 2As shown, the embodiment provides a micro-motion stage which can be applied in the field of integrated circuit manufacturing, such as an exposure stage of a photolithography system or a worktable for semiconductor film thickness detection, for driving a substrate such as a silicon wafer to move vertically and rotate around the vertical direction. The micro-motion stage provided by the embodiment can also be applied to other scenarios and fields where a workpiece carried on the micro-motion stage needs to be rotated around the vertical direction (Rz) and translated in the vertical direction (Z), which is not limited by the embodiment.

[0059] Specifically, the micro-motion stage includes a mounting base 5, a rotating seat 2, a vertical base 3, a vertical driving device 4, a rotating driving motor 1 and a stage 8. The vertical driving device 4 is mounted on the mounting base 5, the vertical base 3 is sleeved outside the vertical driving device 4, and the driving end of the vertical driving device 4 can drive the vertical base 3 to move along the Z direction relative to the mounting base 5; the rotating seat 2 is rotatably sleeved on the vertical base 3 around the Z direction, and the position in the Z direction is unchanged relative to the vertical base; the rotating driving motor 1 is sleeved on the side wall of the rotating seat 2 for driving the rotating seat 2 to rotate around the Z direction, and the rotating driving motor 1 includes a rotating motor stator 12 and a rotating motor rotor 11 which are sleeved at intervals, wherein the rotating motor rotor 11 is fixed relative to the rotating seat 2, and the rotating motor stator 12 is fixed relative to the mounting base 5; the stage 8 is arranged on the top of the rotating seat 2.

[0060] The micro-motion stage provided by the embodiment realizes the inner and outer sleeving of the vertical driving device 4, the rotating seat 2 and the rotating driving motor 1 along the radial direction of the rotating seat 2 by sleeving the vertical base 3 outside the vertical driving device 4, rotating the rotating seat 2 to be sleeved on the vertical base 3, and sleeving the rotating driving motor 1 on the side of the rotating seat 2, so as to effectively reduce the size of the micro-motion stage in the Z direction, which is conducive to the lightweight and flat design of the micro-motion stage, and further improves the running speed and accuracy of the micro-motion stage.

[0061] To improve the stability of the vertical movement of the vertical base 3, the mounting base 5 comprises a bottom plate part 51 and a guide sleeve part 52 vertically arranged on the bottom plate part 51, the bottom plate part 51 is perpendicular to the Z direction (i.e. the bottom plate part 51 is horizontally arranged), and the guide part 52 is in a cylindrical structure and is connected with the bottom plate part 51 to form a containing space with an upward opening, the vertical driving device 4 is installed on the bottom plate part 51 and located in the containing space, the vertical base 3 is located in the containing space and is in sliding connection with the guide sleeve part 52, and the rotary driving motor 1 is sleeved outside the guide sleeve part 52. Through the sliding cooperation between the guide sleeve part 52 and the vertical base 3, the sliding guide of the vertical base 3 is realized, the reliability and stability of the movement of the vertical base 3 along the Z direction are ensured, meanwhile, the vertical base 3 and the rotary driving motor 1 are located on the two sides of the guide sleeve part 52 respectively, the installation of the micro-motion stage can be sequentially performed from inside to outside, the installation efficiency is improved, and the structural interference can be effectively reduced.

[0062] To further improve the stability of the vertical movement of the vertical base 3, a vertical guide assembly 9 is further arranged between the guide sleeve part 52 and the vertical base 3, and the vertical guide assembly 9 is used for guiding the vertical movement of the vertical base 3. The vertical guide assembly 9 can adopt the structure form of the existing linear slide rail or other linear guide structure, and the present application does not make specific limitation thereon. Preferably, the vertical guide assembly 9 is arranged in at least two groups around the circumference of the vertical base 3, so as to further improve the vertical guide stability and reliability.

[0063] It is worth noting that the cross-sectional shape of the inner wall of the guide sleeve part 52 and the cross-sectional shape of the outer wall of the sliding sleeve part 32 can be circular, rectangular or special-shaped, as long as the sliding sleeve part 32 and the guide sleeve part 52 can be in sliding connection through the vertical guide assembly 9.

[0064] As shown in Figure 1 , Figure 3 , Figure 7 and Figure 8 , to facilitate the rotating cooperation of the rotating seat 2 and the vertical base 3 and the sliding cooperation of the mounting base 5 and the vertical base 3, the vertical base 3 comprises a rotating sleeve part 31 and a sliding sleeve part 32 which are coaxially and spacedly sleeved, the rotating seat 2 comprises an inner sleeve part 21 and an outer sleeve part 22 which are coaxially and spacedly sleeved, the inner sleeve part 21 extends into the space between the sliding sleeve part 32 and the rotating sleeve part 31 in the Z direction and is in rotating connection with the rotating sleeve part 31, the outer sleeve part 22 is located outside the vertical base 3 and is fixedly connected with the rotary motor rotor 11, and the sliding sleeve part 32 is in sliding connection with the mounting base 5. Through the above arrangement, the vertical base 3 and the rotating seat 2 form a nested cooperation structure, which can ensure the convenience and reliability of the connection between the vertical base 3 and the rotating seat 2, is conducive to the sliding connection between the vertical base 3 and the mounting base 5, and is conducive to the lightweight and flat design of the micro-motion stage.

[0065] That is, in the present embodiment, the sliding sleeve part 32 is located outside the adapter sleeve 31, and the sliding sleeve part 32 is rotationally connected with the guide sleeve part 52, the outer cylinder part 22 is located outside the guide sleeve part 52, and the vertical guide assembly 9 is arranged between the sliding sleeve part 32 and the guide sleeve part 52.

[0066] In another embodiment, the sliding sleeve part 32 can also be located inside the adapter sleeve 31, that is, the guide sleeve part 52 can be located inside the sliding sleeve part 32 and is slidingly connected with the sliding sleeve part 32. At this time, the inner cylinder part 21 of the rotary seat 2 is rotationally connected with the inner wall of the adapter sleeve 31.

[0067] In still another embodiment, the rotary seat 2 can also not include the inner cylinder part 21, and the upper end of the outer cylinder part 22 is connected with a top plate, and the top plate is rotationally connected with the vertical base 3 through a disc bearing.

[0068] Preferably, a connecting part 33 is connected between the sliding sleeve part 32 and the lower end of the adapter sleeve part 31, and the connecting part 33, the adapter sleeve part 31 and the sliding sleeve part 32 jointly form a containing groove 34 with an open upper end. The lower end of the inner cylinder part 21 extends into the containing groove 34 and is rotationally connected with the adapter sleeve part 31.

[0069] Further, the adapter sleeve part 31 is in a cylindrical structure to facilitate the rotational connection between the adapter sleeve part 31 and the inner cylinder part 21. The inner side of the adapter sleeve part 31 forms a mounting cavity 35, and the vertical driving device 4 is at least partially located in the mounting cavity 35. Preferably, the upper end of the adapter sleeve part 31 extends inwardly with an annular connecting plate part 36, which can be used to connect with the driving end of the vertical driving device 4 to improve the convenience of connection and disassembly.

[0070] Further, to improve the rotation smoothness of the rotary seat 2, a rotation bearing set is arranged between the inner wall of the inner cylinder part 21 and the outer side wall of the adapter sleeve part 31, the inner ring of the rotation bearing set is fixedly connected with the outer side wall of the adapter sleeve part 31, and the outer ring of the rotation bearing set is connected with the inner wall of the inner cylinder part 21, so as to reduce the frictional resistance when the rotary seat 2 rotates, and improve the rotation speed and rotation accuracy of the rotary seat 2. The rotation bearing set can include only one rotation bearing 7, or two or more rotation bearings 7 arranged side by side along the Z direction, and the rotation bearing 7 can be but is not limited to a deep groove ball bearing.

[0071] In the present embodiment, to facilitate the installation and positioning of the rotation bearing set on the vertical base 3, an annular positioning step 311 is arranged on the outer wall of the adapter sleeve part 31, and the lower end face of the rotation bearing set abuts against the positioning step 311.

[0072] In order to improve the installation stability of the rotating bearing group and prevent the rotating bearing 7 from moving along the Z direction, a bearing limiting structure is arranged on the micro-motion platform to limit the movement of the rotating bearing 7 along the Z direction. In the embodiment, the bearing limiting structure includes an upper limiting piece 20 and a lower limiting piece 30. The upper limiting piece 20 is arranged above the rotating bearing group and abuts against the upper end surface of the rotating bearing group. The lower limiting piece 30 is arranged below the rotating bearing group and abuts against the lower end surface of the rotating bearing group. The upper limiting piece 20 is connected with one of the adapter cylinder portion 31 or the rotating seat 2. The lower limiting piece 30 is connected with one of the adapter cylinder portion 31 or the rotating seat 2.

[0073] Specifically, as shown in Figure 1 and Figure 4 , the upper limiting piece 20 has a ring structure. The upper limiting piece 20 includes a limiting cylinder portion 201 in a cylindrical shape. The inner diameter of the limiting cylinder portion 201 is smaller than the outer diameter of the adapter cylinder portion 31. The outer diameter of the limiting cylinder portion 201 is greater than the inner diameter of the rotating bearing 7 and smaller than the outer diameter of the rotating bearing 7. The lower end surface of the limiting cylinder portion 201 abuts against the upper end surface of the vertical base 3 and is detachably connected with the vertical base 3. The connection mode is preferably but not limited to threaded connection.

[0074] More preferably, the upper limiting piece 20 further includes a blocking rim portion 202 extending outwardly along the upper end edge of the limiting cylinder portion 201. The blocking rim portion 202 is arranged above the rotating bearing group and abuts against the inner wall of the rotating seat 2. The arrangement of the blocking rim portion 202 can prevent external dust and other impurities from falling into the rotating bearing group from above, thereby providing shielding and protection for the rotating bearing group and ensuring the smooth rotation of the rotating bearing group.

[0075] As shown in Figure 1 , 5 and 6, the lower limiting piece 30 includes an abutting ring portion 301 and a mounting ring portion 302 extending outwardly along the outer wall of the abutting ring portion 301. The upper surface of the abutting ring portion 301 abuts against the lower surface of the rotating bearing group. The upper surface of the mounting ring portion 302 abuts against the lower end surface of the inner cylinder portion 21 and is detachably connected with the lower end surface of the inner cylinder portion 21. The mounting ring portion 302 and the inner cylinder portion 21 are preferably connected by threaded connection to improve the connection reliability.

[0076] Further, the lower surface of the abutting ring portion 301 is formed with a grating mounting surface 30131. The micro-motion platform further includes a rotary displacement detection assembly for detecting the angle of rotation of the rotating seat 2. In the embodiment, the rotary displacement detection assembly includes a grating ruler arranged on the grating mounting surface 30131 and a rotary displacement encoder fixedly arranged on the vertical base 3 and cooperating with the grating ruler. The mounting mode of the grating ruler on the grating mounting surface 30131 is preferably but not limited to adhesive bonding.

[0077] But it can be understood that in other embodiments, the rotation displacement detection assembly can also adopt other existing detection devices that can detect rotation displacement or rotation angle, and the rotation displacement detection assembly can also be installed at other positions, such as the grating ruler being installed on the outer side wall of the inner cylinder part 21, the rotation displacement encoder being installed on the inner side wall of the sliding sleeve part 32, and the like.

[0078] Preferably, the longitudinal section of the pressing ring part 301 is in a U-shaped structure with an opening facing the rotating bearing column, that is, it includes an inner ring part 3011 and an outer ring part 3012 which are arranged at intervals between the inner and outer sides, and a connecting ring part 3013 which is connected between the inner ring part 3011 and the outer ring part 3012, the upper end surface of the inner ring part 3011 is arranged at intervals with the lower end surface of the inner ring of the rotating bearing 7, the upper end surface of the outer ring part 3012 abuts against the end surface of the outer ring of the rotating bearing 7, the outer side wall of the outer ring part 3012 extends outwardly to have the above-mentioned mounting ring part 302, and the lower surface of the connecting ring part 3013 forms the above-mentioned grating mounting surface 30131. The arrangement of the pressing ring part 301 can increase the radial dimension of the pressing ring part 301, thereby increasing the radial width of the grating mounting surface 30131, ensuring the installation convenience and reliability of the grating ruler, and at the same time, enhancing the overall structural strength of the lower limit part 30. In other embodiments, the pressing ring part 301 can only include the outer ring part 3012 and the connecting ring part 3013.

[0079] The axial displacement of the rotating bearing 7 is limited by the cooperation of the upper limit part 20 and the lower limit part 30, which can simplify the structure and processing of the vertical base 3 and the rotating seat 2, and has high universality. But it can be understood that the above-mentioned bearing limiting structure is only an exemplary structure, and the structures capable of achieving the axial limiting of the bearing in the prior art can be applied in the present application, such as in another embodiment, a limiting boss abutting against the lower end surface of the rotating bearing 7 can be protruded on the outer side wall of the adapter cylinder part 31 or the inner wall of the accommodating cavity 24, and the upper end of the rotating bearing 7 is limited by the upper limit part 20.

[0080] As shown in Figure 1 Preferably, the rotating motor rotor 11 is sleeved on the outer side of the rotating seat 2, that is, the rotating motor stator 12 is sleeved on the outer side of the rotating motor rotor 11, to facilitate the installation and disassembly of the rotating motor rotor 11. In other embodiments, the rotating drive motor 1 can be arranged between the outer cylinder part 22 and the guide sleeve part 52, at this time, the rotating motor rotor 11 is sleeved on the outer side of the rotating motor stator 12, the rotating motor stator 12 is fixedly arranged on the outer side wall of the guide sleeve part 52, and the rotating motor rotor 11 is fixedly arranged on the inner side wall of the outer cylinder part 22.

[0081] In order to facilitate the installation of the stator 12 of the rotary motor, the mounting base 5 further comprises a mounting cylinder 53 sleeved outside the rotary drive motor 1, the lower end of the mounting cylinder 53 is connected with the bottom plate 51, and the stator 12 of the rotary motor is installed on the inner wall of the mounting cylinder 53. The mounting cylinder 53 can provide a mounting surface for the installation of the stator 12 of the rotary motor, and can also protect the rotary drive motor 1, so as to avoid the problem that the rotary drive motor 1 is easily damaged due to exposure. At the same time, the mounting cylinder 53 forms a nested structure in the X and Y directions with the mounting base 5, the rotary seat 2 and the vertical base 3, which is more conducive to the flatness and lightness of the micro-motion stage.

[0082] In order to realize the installation and positioning of the rotor 11 of the rotary motor on the outer cylinder 22, a positioning boss 221 is outwardly protruded on the outer wall of the outer cylinder 22, and the rotor 11 of the rotary motor is installed on the upper surface of the positioning boss 221. In other embodiments, a ring-shaped groove can be formed on the outer wall of the outer cylinder 22, and the rotor 11 of the rotary motor is embedded in the ring-shaped groove. The fixing of the rotor 11 of the rotary motor and the outer cylinder 22, and the fixing of the stator 12 of the rotary motor and the mounting cylinder 53 can adopt the existing installation and fixing methods of motor stators or rotors such as bonding or threaded connection.

[0083] In order to facilitate the installation of the mounting cylinder 53, the mounting cylinder 53 comprises a main body cylinder 531 arranged vertically, the lower end of the main body cylinder 531 extends outwardly in the radial direction and has an installation protrusion 532, the lower surface of the installation protrusion 532 abuts against the upper surface of the bottom plate 52, and the installation protrusion 532 and the bottom plate 52 are connected through a threaded connection. Preferably, one of the installation protrusion 532 and the mounting base 5 is provided with a positioning column, and the other is provided with a positioning hole, so as to improve the installation reliability of the mounting cylinder 53 on the mounting base 5. In other embodiments, the mounting cylinder 53 can be integrally formed with the bottom plate 51.

[0084] The micro-motion stage further comprises a baffle 6 connected with the rotary seat 2 or the mounting base 5, the baffle 6 is arranged above the stator 12 of the rotary motor, and the projection of the stator 12 of the rotary motor on the XY plane is located within the projection range of the baffle 6 on the XY plane. The baffle 6 can shield the stator 12 of the rotary motor, reduce the falling of impurities such as water and dust on the stator 12 of the rotary motor, and improve the use safety and reliability of the rotary drive motor 1.

[0085] In the embodiment, the baffle 6 is detachably connected to the upper end of the mounting cylinder 53, and in other embodiments, the baffle 6 can be detachably connected to the upper end or the outer wall of the rotary seat 2, and the size, shape and height of the baffle 6 from the stator 12 of the rotary motor are not limited, as long as the arrangement of the baffle 6 does not interfere with the operation of the rotary seat 2 and the rotor 11 of the rotary motor.

[0086] More preferably, the absolute value of the height difference between the top end of the mounting cylinder 53 and the top end of the rotating seat 2 is less than 10 cm when the rotating seat 2 is at the lowest position relative to the mounting base 5, so that the structure inside the mounting cylinder 53 can be substantially hidden inside the mounting cylinder 53 in the initial installation state, improving the appearance and compactness of the structure, and more conducive to protecting the internal structure of the mounting cylinder 53.

[0087] As shown in Figure 1 , in order to facilitate the installation of the substrate (such as a silicon wafer), the micro-motion stage provided in the embodiment further comprises a stage 8 for adsorbing the substrate, and the stage 8 can be vacuum adsorption or electrostatic adsorption. The structure of the stage 8 and the adsorption method of the substrate can adopt the existing technology, which is not the focus of the present application, and will not be described here.

[0088] Preferably, in the embodiment, the stage 8 comprises an integrally formed center disc part and an outer disc part, the center disc part is coaxially arranged with the rotating seat 2 and the bottom surface is perpendicular to the Z direction, and the outer disc part is arranged around the outer periphery of the center disc part and the bottom surface of the outer disc part extends upwardly and upwardly in the direction away from the center disc part. The inner diameter of the outer disc part is smaller than the outer diameter of the rotating seat 2, so that the stage 8 can be prevented from interfering with the mounting cylinder 53 when the rotating seat 2 is at the lowest position.

[0089] It can be understood that when the rotating seat 2 is at the lowest position relative to the mounting base 5, the height difference between the top end of the mounting cylinder 53 and the top end of the rotating seat 2 can be set based on the specific structure of the stage 8 connected thereto, as long as the structure does not interfere.

[0090] As shown in Figure 1 , 7 and 8, in order to facilitate the installation of the stage 8, the rotating seat 2 further comprises a top plate part 23 connected between the top end of the inner cylinder part 21 and the outer cylinder part 22. In the embodiment, the top plate part 23 is in the form of a ring structure to reduce the overall weight of the rotating seat 2 and facilitate the installation of the stage 8. In other embodiments, the inner cylinder part 21 and the outer cylinder part 22 can be connected by a plurality of connecting ribs spaced along the circumferential direction of the inner cylinder part 21, or the top plate part 23 can be in the form of a circular plate.

[0091] Further, the top plate part 23 is provided with a weight-reducing hole 231 to reduce the overall weight of the rotating seat 2. The weight-reducing hole 231 is spaced along the circumferential direction of the rotating seat 2 to improve the weight-reducing effect while ensuring the overall structural strength of the rotating seat 2. More preferably, the weight-reducing hole 231 is in the form of a fan ring structure coaxially arranged with the rotating seat 2.

[0092] Preferably, the inner side of the inner cylinder part 21 forms a receiving cavity 24 for receiving the adapter cylinder part 31, and the upper end inner wall of the inner cylinder part 21 is provided with a limiting flange 211 abutting against the upper end surface of the rotating bearing set. The limiting flange 211 can further enhance the limiting effect on the rotating bearing 7, and can increase the upper end thickness while keeping the main thickness of the inner cylinder part 21 unchanged, thereby increasing the size of the mounting boss 24 in the radial direction and ensuring the connection reliability of the mounting boss 24 and the carrier 8.

[0093] As shown in Figure 1 , Figure 2 and Figure 9 , in the present embodiment, the rotating motor rotor 11 includes a plurality of rotating motor magnetic steels 111 uniformly and spacedly arranged along the circumferential direction of the rotating seat 2, and the rotating motor stator 12 includes a plurality of rotating motor coils 121 uniformly and spacedly arranged along the circumferential direction of the rotating seat 2. The rotating motor magnetic steels 111 are connected to the outer cylinder part 22 by means of adhesion or threaded connection, and the rotating motor coils 121 are fixed to the inner wall of the mounting cylinder 53.

[0094] Since the vertical driving device 4 can drive the vertical base 3 to move the rotating seat 2 along the Z direction, and the rotating motor magnetic steels 111 are fixed to the rotating seat 2, the rotating motor magnetic steels 111 can move along the Z direction relative to the rotating motor coils 121. To ensure the action range of the rotating motor coils 121 on the rotating motor magnetic steels 111, preferably, the absolute value of the height difference between the rotating motor coils 121 in the Z direction and the rotating motor magnetic steels 111 in the Z direction is greater than the maximum required stroke of the rotating seat 2. Most preferably, |height of the rotating motor coils 121-height of the rotating motor magnetic steels 111-maximum required stroke of the rotating seat 2|=5-10mm.

[0095] As shown in Figure 10 , the vertical driving device 4 includes a voice coil motor assembly 41, which includes a voice coil motor stator 412 and a voice coil motor rotor 411 spacedly arranged. The voice coil motor stator 412 is fixed relative to the mounting base 5, and the voice coil motor rotor 411 is fixed relative to the vertical base 3. To reduce the vertical load bearing of the voice coil motor assembly 41, the vertical driving device 4 further includes a gravity compensation assembly 42 for compensating the vertical load bearing of the voice coil motor assembly 41 and improving the vertical movement performance of the entire micro stage.

[0096] The vertical driving device 4 provided in the present embodiment integrates the voice coil motor assembly 41 and the gravity compensation assembly 42, which can realize the vertical driving and gravity compensation of the rotating seat 2 at the same time, effectively improve the compactness of the structure, and be beneficial to the lightweight and flat design of the micro stage.

[0097] In the embodiment, the gravity compensation assembly 42 adopts the structure of magnetic levitation gravity compensation. Specifically, the gravity compensation assembly 42 comprises a magnetic levitation stator 421 and a magnetic levitation mover 422 which are arranged in a sleeving manner. The magnetic levitation stator 421 and the voice coil motor stator 412 are both fixed relative to the mounting base 5, and the voice coil motor mover 411 and the magnetic levitation mover 422 are both fixed relative to the vertical base 3. Thus, when the coil in the voice coil motor assembly 41 generates Lorentz force by cutting to provide driving force for the Z-direction movement of the rotating base 2, the magnetic levitation stator 421 and the magnetic levitation mover 422 generate levitation force due to magnetic force to compensate the gravity of the rotating base 2.

[0098] To facilitate the connection of the vertical driving device 4 with the vertical base 3 and the mounting base 5, the vertical driving device 4 further comprises a stator base 43 and a mover base 44. The stator base 43 is fixed with the mounting base 5, and the magnetic levitation stator 421 and the voice coil motor stator 412 are both arranged on the stator base 43. Thus, the magnetic levitation stator 421 and the voice coil motor stator 412 are both fixedly connected to the mounting base 5 through the stator base 43. The mover base 44 is fixed relative to the vertical base 3, and the magnetic levitation mover 422 and the voice coil motor mover 411 are both fixed on the mover base 44. Thus, the magnetic levitation mover 422 and the voice coil motor mover 411 are both connected to the vertical base 3 through the mover base 44.

[0099] When the voice coil motor stator 412 is powered, the magnetic force generated between the voice coil motor stator 412 and the voice coil motor mover 411 drives the voice coil motor mover 411 to move in the Z-direction, thereby driving the mover base 44 fixed with the voice coil motor mover 411 to move vertically in the Z-direction, i.e. driving the vertical base 3 to move in the Z-direction through the mover base 44. At the same time, there is a magnetic force between the magnetic levitation stator 421 and the magnetic levitation mover 422, which makes the magnetic levitation mover 422 have a tendency to move upward in the Z-direction, thereby exerting upward levitation support force on the mover base 44 through the magnetic levitation mover 422, i.e. exerting upward support force on the vertical base 3.

[0100] By fixing the voice coil motor stator 412 and the magnetic levitation stator 421 on the stator base 43 and fixing the voice coil motor mover 411 and the magnetic levitation mover 422 on the mover base 44, the gravity compensation device can be integrated into the vertical driving device 4, which helps to improve the integration degree of the micro stage, improve the compactness of the overall structure, and reduce the space occupancy of the vertical driving device 4 and the gravity compensation device, thereby being more conducive to the lightweight and flat design of the micro stage.

[0101] Preferably, in the embodiment, the stator base 43 has a cylindrical structure, the lower end of the stator base 43 is connected with the mounting base 5, the voice coil motor stator 412 is mounted on the outer wall of the stator base 43, and the magnetic levitation stator 421 is mounted on the inner wall of the stator base 43. Preferably, the magnetic levitation stator 421 is mounted on the lower end of the stator base 43, and the voice coil motor stator 412 is mounted on the upper end of the stator base 43.

[0102] The mover seat 44 includes a magnetic mounting portion 441 inside the stator seat 43, a motor mounting portion 442 outside the stator seat 43, and a connecting seat portion 443 connected between the magnetic mounting portion 441 and the motor mounting portion 442, the connecting seat portion 443 is located above the stator seat 43 and connected with the vertical base 3, the magnetic levitation mover 422 is mounted on the magnetic mounting portion 441 and located inside the magnetic levitation stator 421, and the voice coil motor mover 411 is mounted on the motor mounting portion 442 and located outside the voice coil motor stator 412.

[0103] In order to realize the installation and positioning of each stator and mover, preferably, the inner wall of the stator seat 43 is provided with an inner mounting groove, the outer wall of the stator seat 43 is provided with an outer mounting groove, the magnetic levitation stator 421 is embedded in the inner mounting groove, and the voice coil motor stator 412 is embedded in the outer mounting groove. An annular mounting ring groove is formed on the outer wall of the magnetic mounting portion 441, and the magnetic levitation mover 422 is embedded in the mounting ring groove to improve the installation accuracy of the magnetic levitation mover 422. The outer wall of the motor mounting portion 442 is provided with a mounting convex ring, the inner side of the voice coil motor mover 411 is fixed to the outer wall of the motor mounting portion 442, and the lower end of the voice coil motor mover 411 abuts against the upper end surface of the mounting convex ring. It can be understood that the installation and positioning structure of each stator and mover described above is an exemplary structure, and the present embodiment does not limit this.

[0104] The magnetic mounting portion 441 includes a mounting base 4411 and a transfer frame portion 4412, the upper end of the mounting base 4411 is detachably connected with the lower end of the transfer frame portion 4412, the upper end of the transfer frame portion 4412 is detachably connected with the connecting seat portion 443, and the magnetic levitation mover 422 is mounted on the mounting base 4411. This kind of setting, on the one hand, can simplify the processing of the mover seat 44, on the other hand, can facilitate the installation of the magnetic levitation mover 422, so that the magnetic levitation mover 422 can be installed to the mounting base 4411, and then the mounting base 4411 is connected with the transfer frame portion 4412.

[0105] Since the magnetic levitation mover 422 can move along the Z direction relative to the magnetic levitation stator 421, preferably, the height of the magnetic levitation mover 422 along the Z direction is greater than the height of the magnetic levitation mover 422 along the Z direction, and the height difference between the magnetic levitation mover 422 and the magnetic levitation stator 421 along the Z direction is at least greater than the movement stroke of the rotating seat 2 along the Z direction.

[0106] Preferably, the vertical driving device 4 further includes a connecting base 45, the upper end of the connecting base 45 is detachably connected with the lower end of the stator seat 43, the connecting base 45 abuts against the upper surface of the mounting base 5 and is detachably connected with the mounting base 5, the connecting base 45 is through-opened along the Z direction and is provided with a base through hole coaxially arranged with the stator seat 43, and the lower end of the mover seat 43 can extend into the base through hole, so as to reduce the size of the vertical driving device 4 in the Z direction.

[0107] As Figure 2 shown, preferably, for detecting the displacement stroke of the rotary seat 2 along the Z direction, the micro-motion stage further comprises a vertical displacement detection device 10. In the present embodiment, the vertical displacement detection device comprises a vertical displacement encoder 102 and a vertical grating ruler 101 used in cooperation, the vertical grating ruler 101 is vertically arranged, and one of the vertical displacement encoder 102 and the vertical grating ruler 101 is arranged on the vertical base 3, and the other is arranged on the mounting base 5, and the vertical displacement encoder 102 is arranged opposite to the vertical grating ruler 101.

[0108] In the present embodiment, preferably, the vertical grating ruler 101 is arranged on the outer side wall of the sliding sleeve part 32, and the vertical displacement encoder 102 is arranged on the inner side wall of the guide sleeve part 52. In order to facilitate the installation of the vertical grating ruler 101, the outer side wall of the sliding sleeve part 32 is formed with a mounting surface parallel to the Z direction, and the vertical grating ruler 101 is bonded or installed on the mounting surface in other detachable connection manner.

[0109] By arranging the vertical grating ruler 101 and the vertical displacement encoder 102 on the sliding sleeve part 32 and the guide sleeve part 52 respectively, the installation space is easy to guarantee, and the disassembly and assembly of the vertical displacement detection device 10 is facilitated. In other embodiments, the vertical grating ruler 101 and the vertical displacement encoder 102 can also be arranged on the outer cylinder part 22 and the guide sleeve part 52 respectively, or can be arranged at other positions, and the present application does not make specific limitation thereto.

[0110] The principle and specific structure of the vertical grating ruler 101 cooperating with the vertical displacement encoder 102 to realize the vertical displacement measurement are relatively conventional, and will not be repeated here. It can be understood that other displacement detection devices can also be used to detect the vertical movement stroke of the rotary seat 2, and the present embodiment does not make limitation thereto.

[0111] Embodiment two

[0112] The present embodiment provides a micro-motion stage, and compared with the micro-motion stage provided in embodiment one, the micro-motion stage provided in the present embodiment has basically the same structure as the micro-motion stage provided in embodiment one, and only the arrangement of the vertical driving device 4 is different. The present embodiment will not repeat the same structure as embodiment one.

[0113] As Figure 11As shown, the vertical drive device 4 includes a voice coil motor assembly 41 and a gravity compensation assembly 42. The voice coil motor assembly 41 includes a voice coil motor stator 412 and a voice coil motor mover 411, which are spaced apart internally and externally. The gravity compensation assembly 42 includes a magnetic float 422 and a magnetic levitation stator 421, which are spaced apart internally and externally. In this embodiment, the magnetic levitation stator 421 is fixedly disposed inside the voice coil motor stator 412, and the magnetic float 422 and the voice coil motor mover 411 are integrated into one unit, which is a voice coil motor magnet that cooperates with the voice coil motor stator 412. This arrangement can effectively reduce the structural complexity of the vertical drive device 4 and reduce its weight.

[0114] Preferably, the vertical drive mechanism includes a stator base 43, a voice coil motor stator 412 mounted on the outer wall of the stator base 43, and a magnetic levitation stator 421 mounted on the inner wall of the stator base 43. The magnetic levitation stator 421 is a columnar or cylindrical magnet structure. Preferably, the voice coil motor stator 412 is embedded in the outer wall of the stator base 43.

[0115] The voice coil motor magnet can be directly mounted on the inner wall of the mounting cavity 35 of the vertical base 3, or it can be connected to the vertical base 3 through a moving part. This embodiment does not impose specific restrictions on this, as long as the voice coil motor magnet is fixed relative to the vertical base 3.

[0116] Example 3

[0117] This embodiment provides a micro-motion stage, and compared with the micro-motion stage provided in Embodiment 1, the structure of the micro-motion stage provided in this embodiment is basically the same as that of the micro-motion stage provided in Embodiment 1, except that the vertical drive device 4 is different. This embodiment will not describe the same structure as that in Embodiment 1 again.

[0118] like Figure 12 As shown, the vertical drive device 4 includes a voice coil motor assembly 41 and a gravity compensation assembly 42. The voice coil motor assembly 41 includes a voice coil motor stator 412 and a voice coil motor mover 411 that are spaced apart inside and outside. The gravity compensation assembly 42 uses air flotation to compensate for the gravity of the rotating seat 2.

[0119] Specifically, the gravity compensation component 42 includes an air guide seat 423 and a sliding seat 424. The air guide seat 423 has an air cavity 4231 with an upper opening. An air passage 4232 communicating with the air cavity 4231 is provided inside the air guide seat 423. One end of the air passage 4232 is connected to the air cavity 4231, and the other end passes through the outer wall of the air guide seat 423 and is connected to the air source device. The sliding seat 424 is slidably sealed in the air cavity 4231, and the voice coil motor mover 411 is fixed relative to the sliding seat 424. The voice coil motor stator 412 is mounted on the outer wall of the air guide seat 423.

[0120] When the voice coil motor mover 411 moves relative to the voice coil motor stator 412 in the Z direction, the sliding seat 424 slides up and down in the air cavity 4231 under the driving of the voice coil motor mover 411, changes the volume of the air cavity 4231, and fills or discharges air into the air cavity 4231 through the air passage 4232 by the air source device, changes the air pressure in the air cavity 4231, and can make the gas in the air cavity 4231 exert an upward gas pressure on the sliding seat 424, thereby compensating for the gravity of the rotating seat 2.

[0121] Further, the vertical driving device 4 further comprises a mover seat 44, the voice coil motor mover 411 is arranged on the mover seat 44, the mover seat 44 is fixedly connected to the top of the sliding seat 424, and the mover seat 44 is fixed relative to the vertical base 3. Preferably, the mover seat 44 is in a cylindrical structure with a closed upper end and an open lower end, the upper end of the air guide seat 423 is provided with the voice coil motor stator 412 described above, and the upper end of the air guide seat 423 extends into the inside of the mover seat 44.

[0122] Preferably, the lower end of the mover seat 44 extends outwardly with a mounting protrusion, the outer wall of the voice coil motor mover 411 is fixed to the inner side wall of the mover seat 44, and the lower end of the voice coil motor mover 411 abuts against the upper surface of the mounting protrusion.

[0123] Embodiment Four

[0124] The embodiment provides a motion device, which comprises an XY motion table and the fine motion table in any one of the embodiments one to three, the fine motion table is arranged on the XY motion table, and the XY motion table is used to drive the fine motion table to move in the X direction and / or the Y direction.

[0125] The XY motion table can refer to the structure in patent application 202011523638.5, or other structures of the XY motion table in the prior art, and the embodiment does not make specific limitations.

[0126] Note that the above is only the preferred embodiment of the present application and the technical principle applied. Those skilled in the art will understand that the present application is not limited to the specific embodiments described herein, and those skilled in the art can make various obvious changes, readjustments and substitutions without departing from the scope of the present application. Therefore, although the present application has been described in more detail through the above embodiments, the present application is not limited to the above embodiments, and can include more other equivalent embodiments without departing from the concept of the present application, and the scope of the present application is determined by the scope of the appended claims.

Claims

1. A micromanipulation stage, characterized by, The micro-motion stage comprises: a mounting base (5); a vertical driving device (4) mounted on the mounting base (5); a vertical base (3) sleeved on the outside of the vertical driving device (4), and a driving end of the vertical driving device (4) drives the vertical base (3) to move along the Z direction relative to the mounting base (5); the vertical driving device (4) comprises a voice coil motor assembly (41) and a gravity compensation assembly (42), and the voice coil motor assembly (41) and the gravity compensation assembly (42) are integrally arranged; the voice coil motor assembly (41) comprises a voice coil motor stator (412) and a voice coil motor rotor (411), the voice coil motor stator (412) is fixed relative to the mounting base (5), and the voice coil motor rotor (411) is fixed relative to the vertical base (3); a rotating seat (2) is rotatably sleeved on the vertical base (3) along the Z direction, and the position of the rotating seat (2) in the Z direction is unchanged relative to the vertical base (3); a rotating driving motor (1) is sleeved on the side of the rotating seat (2) and is used for driving the rotating seat (2) to rotate along the Z direction, the rotating driving motor (1) comprises a rotating motor rotor (11) and a rotating motor stator (12) which are coaxially and sleeved, the rotating motor rotor (11) is fixed relative to the rotating seat (2), and the rotating motor stator (12) is fixed relative to the mounting base (5).

2. The micromanipulation stage according to claim 1, wherein the vertical base (3) comprises a transfer cylinder portion (31) and a sliding sleeve portion (32) which are coaxially and sleeved and connected, the rotating seat (2) comprises an inner cylinder portion (21) and an outer cylinder portion (22) which are coaxially and sleeved and connected, the transfer cylinder portion (31) is sleeved on the outside of the vertical driving device (4), the inner cylinder portion (21) extends into the transfer cylinder portion (31) and the sliding sleeve portion (32) along the Z direction and is rotationally connected with the transfer cylinder portion (31), the outer cylinder portion (22) is located on the outside of the vertical base (3) and is fixedly connected with the rotating motor rotor (11), and the sliding sleeve portion (32) is slidingly connected with the mounting base (5).

3. The micromanipulation stage according to claim 1, wherein the rotating motor rotor (11) is fixedly sleeved on the outer wall of the rotating seat (2), the vertical base (3) is located on the inner side of the rotating motor rotor (11), and the rotating motor stator (12) is sleeved on the outer side of the rotating motor rotor (11).

4. The micromanipulation stage according to claim 3, wherein The micro-motion stage further comprises a baffle (6) connected with the rotating seat (2) or the mounting base (5), the baffle (6) is arranged above the rotating motor stator (12), and the projection of the rotating motor stator (12) on the XY plane is located in the projection range of the baffle (6) on the XY plane.

5. The micromanipulation stage according to claim 1, wherein The mounting base (5) comprises a bottom plate part (51) and a guide sleeve part (52) vertically arranged on the bottom plate part (51), the vertical driving device (4) is mounted on the bottom plate part (51), the vertical base (3) is located at the inner side of the guide sleeve part (52) and is in sliding connection with the guide sleeve part (52), and the rotary driving motor (1) is sleeved outside the guide sleeve part (52).

6. The micromanipulation stage according to claim 5, wherein The mounting base (5) further comprises a mounting cylinder (53) vertically arranged on the bottom plate part (51), the mounting cylinder (53) is sleeved outside the rotary driving motor (1) and the lower end is connected with the bottom plate part (51), and the rotary motor stator (12) is mounted on the inner side wall of the mounting cylinder (53).

7. The micromanipulation stage according to claim 6, wherein The mounting cylinder (53) and the bottom plate part (51) are detachably connected.

8. The micromanipulation stage according to any one of claims 1 to 7, wherein The absolute value of the height difference between the rotary motor rotor (11) in the Z direction and the height of the rotary motor stator (12) in the Z direction is greater than or equal to the maximum required stroke of the rotary base (2) along the Z direction.

9. The micromanipulation stage according to any one of claims 1 to 7, wherein The voice coil motor assembly (41) is used to drive the rotary base (2) to move along the Z direction, and the gravity compensation assembly (42) is used to compensate the gravity of the rotary base (2).

10. The micromanipulation stage according to claim 9, wherein The gravity compensation assembly (42) comprises a magnetic levitation stator (421) and a magnetic levitation rotor (422), the magnetic levitation stator (421) is fixed relative to the mounting base (5), and the magnetic levitation rotor (422) is fixed relative to the vertical base (3).

11. The micromanipulation stage according to claim 9, wherein The gravity compensation assembly (42) comprises a gas guide base (423) and a sliding base (424), the lower end of the gas guide base (423) is connected with the mounting base (5), the gas guide base (423) has a gas cavity (4231) with an upper end opening, and the sliding base (424) is slidingly and sealingly arranged at the gas cavity (4231), and the lower part of the gas guide base (423) is provided with an air passage (4232) in communication with the gas cavity (4231). The voice coil motor assembly (41) comprises a sleeved voice coil motor stator (412) and a voice coil motor rotor (411), the voice coil motor stator (412) is mounted on the gas guide base (423), and the voice coil motor rotor (411) is connected to the sliding base (424).

12. A motion device characterized by, The XY motion table and the micro-motion table as claimed in any one of claims 1-11 are comprised, the mounting base (5) is connected with the XY motion table, and the XY motion table is used to drive the micro-motion table to move along the X direction and / or the Y direction.

Images