A device and method for measuring key parameters of a sheet

Abstract

A device and method for measuring key parameters of a thin film, the device comprises: a frame body, a mounting base plate, a two-dimensional hollow mobile platform, a confocal laser displacement sensor, a fixture assembly, a mounting bracket, a tilt adjustment structural assembly, and a control system. A parallel glass is respectively arranged between the upper measuring head and the lower measuring head of the confocal laser sensor, and the thin film to be inspected on the fixture assembly is located between the two parallel glasses. During measurement, the two parallel glasses are adjusted n times to be at different β small angles, and the distance data from the upper measuring head and the lower measuring head to the upper and lower surfaces of the thin film to be inspected are read, the vertical distance is converted, and the key parameters such as the thickness deviation and curvature of the thin film to be inspected are calculated respectively. The present invention provides a device and method for measuring key parameters of a thin film with high precision, convenient and efficient operation, automation, and batch detection.

Description

Technical Field

[0001] This invention belongs to the field of thin-film measurement technology, specifically referring to a device and method for measuring key parameters of thin films. Background Technology

[0002] In the field of length measurement, thin sheets (hereinafter collectively referred to as thin sheets) such as feeler gauges with a thickness of <4mm, high-precision copper sheets, high-precision aluminum sheets, lithium battery cells, and thin rubber sheets are characterized by their thinness, susceptibility to bending and deformation under microgravity, easy wrinkling, and high requirements for the perpendicularity of the measuring axis to the surface of the thin sheet. GB / T 22523-2008 and JJG 62-2017 specify the thickness deviation and curvature of feeler gauges as two important technical parameters and their testing methods; GB / T 26303.3-2010 specifies the method for testing the external dimensions of copper and copper alloy processed materials; GB / T 3194-1998 specifies the permissible dimensional deviations of aluminum and aluminum alloy plates and strips. In addition, thickness and side curvature are also important geometric dimensional parameters for high-precision copper sheets and high-precision aluminum sheets; furthermore, lithium battery cells and thin rubber sheets have corresponding requirements for thickness and curvature.

[0003] In existing technologies, the measurement of key parameters such as thickness deviation and curvature of thin sheets generally adopts contact thickness measurement methods. Although these methods can basically meet the requirements of existing technical specifications in terms of measurement accuracy and reliability, they have the following shortcomings: First, the measurement requires certain operating experience and skills, resulting in slow measurement speed, low automation, and inability to achieve batch measurement. Second, the measuring force of contact measurement can cause indentation deformation, which can easily damage the thin sheet. At the same time, the flatness of the measuring instrument's measuring cap (anvil) and the deviation of the measuring position both affect the measurement results and are important sources of measurement error. Third, the measurement process is cumbersome, with low measurement efficiency and low automation, making it impossible to achieve online and batch measurement.

[0004] Chinese invention patent CN 112033327 B discloses a thickness measuring device, which includes a four-degree-of-freedom workpiece stage and a thickness measuring component. The part to be measured protrudes from the edge of the first mounting base and faces the thickness measuring component. The thickness measuring component has a measuring part and a two-degree-of-freedom moving part, which can realize the measurement along the front-back direction and / or the left-right direction, and can also realize the vertical tilt angle along the left-right direction, making the measurement more flexible. However, it only measures the thickness dimension, and does not design a special fixture to hold the thin sheet, which is prone to wrinkling and deformation. The measurement error of the thin sheet thickness is large, and the method for measuring the curvature of the thickness is not described. At the same time, it cannot measure the thickness in batches, and the measurement efficiency is low.

[0005] Chinese invention patent CN 109000571 B discloses a thickness consistency detection device, which comprises: a spectral confocal displacement sensor, a sensor adjustment unit, a workpiece turntable, a cantilever turntable, a cantilever turntable adjustment unit, a workpiece stage, a cantilever, a counterweight, and a main controller. This invention controls the workpiece turntable to perform uniform, repetitive circular motion, and the cantilever turntable to perform arc motion. The specific measurement modes are either a spiral measurement mode or a circular measurement mode, allowing the probe's measurement trajectory to cover the entire surface of the workpiece. This can be used for the measurement and analysis of the thickness consistency of large-diameter, high-precision materials. However, the device's use of a cantilever structure to mount the spectral confocal displacement sensor and its two motion modes can easily lead to instability in the confocal displacement sensor's movement, resulting in inaccurate measurement data. Furthermore, this device cannot perform batch measurements of the curvature of small-diameter thin sheets.

[0006] Chinese invention patent CN 111895924 B discloses an automatic lens thickness measuring device. The device measures various small, round, aspherical lenses, which are transparent glass. The center thickness is measured using a laser coaxial displacement sensor, while the edge thickness is measured using a contact sensor. This technical solution is based on lens characteristics; for example, a circular lens uses an automatic centering fixture to locate the lens's center, and the suction cup transfer is based on the lens's adhesive properties. Therefore, this technical solution is not suitable for measuring thin, soft, easily deformable, or thin sheets with high requirements for wrinkles, thickness deviation, and curvature. Furthermore, the host computer software compares the actual data with the measured data to obtain a scaling formula. Depending on the lens model (different curvatures), the host computer software selects different scaling formulas for data correction, which is also only applicable to lenses and not suitable for measuring thin sheets.

[0007] Therefore, there is an urgent need to study fully automated batch measurement methods for key parameters of thin films, so as to provide technical support for achieving rapid, accurate and efficient measurement of thin films. Summary of the Invention

[0008] The technical problem to be solved by the present invention is to provide a measuring device and method for measuring key parameters of thin films that are highly accurate, easy to operate, efficient, automated, and capable of batch testing.

[0009] This invention is implemented as follows:

[0010] A device for measuring key parameters of a thin sheet includes: a frame body, a mounting base plate, a two-dimensional hollow moving platform, a confocal laser displacement sensor, a clamp assembly, a mounting bracket, a tilt adjustment structure assembly, and a control system;

[0011] The mounting base plate is a planar structure and is mounted on the main frame body; the two-dimensional hollow mobile platform is mounted on the mounting base plate;

[0012] The two-dimensional hollow moving platform is a hollow, electrically controlled two-dimensional platform with x and y axis movement. The clamping assembly is placed in its hollow part. The motion control of the two-dimensional hollow moving platform enables the clamping assembly to be positioned. The sheet to be inspected is mounted on the clamping assembly.

[0013] The mounting bracket has a concave structure, with the upper measuring head adjustment unit and the lower measuring head adjustment unit fixed at its upper and lower parts, respectively, and its middle part fixedly connected to the mounting base plate.

[0014] The upper measuring head adjustment unit and the lower measuring head adjustment unit are multi-dimensional adjustment structures, and the upper measuring head and the lower measuring head of the confocal laser displacement sensor are fixedly installed thereon respectively; by adjusting the displacement and angle of the upper measuring head adjustment unit and the lower measuring head adjustment unit, the upper measuring head and the lower measuring head are made coaxial, thereby meeting the measurement requirements of the confocal laser displacement sensor;

[0015] The tilt adjustment structure assembly includes: a two-dimensional inclinometer, a rotating mounting plate, a first T-shaped mounting base, a second T-shaped mounting base, a first quick handle, a second quick handle, a first connecting plate, a second connecting plate, a first parallel glass, a second parallel glass, and an inclinometer sensor, which are fixed as an integral assembly to one side of the mounting base plate. The two-dimensional inclinometer is an electrically controlled dual-axis inclinometer, which communicates with the lower-level machine of the control system. The control signal from the lower-level machine enables the dual-axis small-angle swing positioning of the two-dimensional inclinometer. The two-dimensional inclinometer is fixed to the mounting base plate, and the rotating mounting plate and the inclinometer sensor are fixedly connected above the two-dimensional inclinometer. The inclinometer sensor monitors the tilt angle of the two-dimensional inclinometer in real time and transmits the data to the lower-level machine. The first T-shaped mounting base and the inclinometer sensor are fixed at the upper and lower positions of the rotating mounting plate, respectively. The second T-shaped mounting base; the first quick handle fixes one end of the first connecting plate to the first T-shaped mounting base, and the other end of the first connecting plate is fixedly connected to the first parallel glass; the second quick handle fixes one end of the second connecting plate to the second T-shaped mounting base, and the other end of the second connecting plate is fixedly connected to the second parallel glass; the lasers of the upper measuring head and the lower measuring head are incident on the first parallel glass and the second parallel glass, realizing an outgoing beam parallel to the incident beam. When the two-dimensional inclinometer adjusts the first parallel glass and the second parallel glass to a horizontal state, the laser axes of the upper measuring head and the lower measuring head are coaxial, and after being perpendicularly incident on the first parallel glass and the second parallel glass, the light path is not changed and the light passes directly through. The measurement spot in this measurement area is the position of the origin O of the center of the measurement area;

[0016] The control system includes a lower-level machine and a motor controller, which are installed inside the main frame body;

[0017] The measuring head controller, the first optical unit, and the second optical unit of the confocal laser displacement transmitter are all installed inside the frame body; the measuring head controller is connected to the upper measuring head and the lower measuring head through the first optical unit and the second optical unit, respectively;

[0018] The lower-level machine is communicatively connected to the upper-level machine, the motor controller, and the measuring head controller. The upper-level machine is equipped with automatic measurement software. The control requirements of the automatic measurement software are transmitted to the motor controller and the measuring head controller through the lower-level machine. The motor controller and the measuring head controller transmit the feedback signals to the upper-level machine through the lower-level machine. The data collected by the upper and lower measuring heads are uploaded to the upper-level machine through the lower-level machine.

[0019] Furthermore, two high-precision dual-axis levels are fixedly installed on the two-dimensional hollow mobile platform to monitor and measure the levelness of the two-dimensional hollow mobile platform in real time and feed the results back to the lower computer for correction.

[0020] Furthermore, the fixture assembly includes: a fixture base plate and a magnetic ring, wherein the fixture base plate is made of metal and has multiple grooves arranged side by side to accommodate the sheet to be inspected and the magnetic ring, and a through hole is provided in the measurement area so that the lasers of the upper measuring head and the lower measuring head can be directed onto the sheet to be inspected; the magnetic ring is a magnetic ring structure that presses the sheet to be inspected tightly into the grooves of the fixture base plate, and the inner ring area of ​​the magnetic ring is the circular measurement area of ​​the sheet.

[0021] Furthermore, the clamp base plate is provided with four mushroom-shaped handles around its perimeter for easy lifting.

[0022] Furthermore, the confocal laser displacement sensor is one of the following: Keyence's CL-L030 laser coaxial displacement meter, MiiI's IFS2406-10 spectral confocal sensor, or Haibosen's HPS-CFL030 spectral confocal displacement sensor.

[0023] A method for measuring key parameters of a thin film, using a measuring device for key parameters of a thin film as described above, includes the following steps:

[0024] Step 1: Place a standard gauge block of grade 4 or above with a nominal value of 1mm between the upper measuring head and the lower measuring head, input the correction value of the standard gauge block, and read the distance D between the upper measuring head and the lower measuring head. The correction value of the 1mm standard gauge block can be obtained through measurement traceability.

[0025] Step 2: The two-dimensional inclinometer adjusts the first and second parallel glass panes to a horizontal position, and reads the distance data from the upper and lower measuring heads to the upper and lower surfaces of the sheet under test, respectively. and ;

[0026] Step 3: The two-dimensional inclinometer adjusts the first and second parallel glass to different small β angles n times according to the measurement software, so that the measurement spot is evenly distributed in the measurement area. Figure 9 (As shown in the figure), the distance data from the upper measuring head and the lower measuring head to the upper and lower surfaces of the sheet under test are read. and ;

[0027] Given the thickness t and refractive index n of the first and second parallel glass panes, calculate the perpendicular distance. , They are respectively:

[0028] ;

[0029] ;

[0030] Step 4: The upper and lower laser spot sizes are respectively represented by coordinates. , This indicates that x and y are fixed values ​​within the same measurement area;

[0031] coordinates , multiple , The corresponding average values ​​are taken as the average vertical distances after conversion by the upper and lower measuring heads, respectively. , ;

[0032] Step 5: Calculate the thickness deviation and curvature of the sheet as follows:

[0033] Thickness deviation ,or Different measurement points on the same thin slice Take the largest measurement point. As the thickness deviation of the thin film, among which The nominal value of the tested section;

[0034] curvature For different measurement points on the same thin slice, take the largest value. As the curvature of the sheet.

[0035] The advantages of this invention are:

[0036] 1. A confocal laser displacement sensor is used to achieve non-contact measurement of thin sheets, which has the advantages of high accuracy, no indentation deformation, and no damage to the thin sheets;

[0037] 2. By using parallel glass to change the optical path of the emitted light, micro-displacement changes are achieved, which changes the traditional robot positioning based on micro-displacement, further reduces the impact of jitter caused by machine movement, and improves measurement accuracy.

[0038] 3. Use dedicated clamping components to prevent deformation and wrinkling of the sheet material caused by the clamping, ensuring that its shape is not changed during the measurement process;

[0039] 4. The use of a two-dimensional hollow moving platform ensures the stability of the force during the movement process, while reducing the space of the device and making the structure more compact;

[0040] 5. The fixture assembly can be quickly changed for different types of thin sheets, enabling the detection of thin sheets of different materials, types, and shapes, thereby realizing the versatility of the device of the present invention;

[0041] 6. It enables batch and fully automated inspection of thin sections, improving inspection efficiency;

[0042] 7. The measurement software automatically processes data and generates original test records, realizing paperless and intelligent thin-film testing. Attached Figure Description

[0043] The present invention will now be further described with reference to the accompanying drawings and embodiments.

[0044] Figure 1 This is a three-dimensional structural schematic diagram of a device for measuring key parameters of a thin sheet according to the present invention.

[0045] Figure 2 yes Figure 1 Rear-view 3D view (with the main frame and control system removed).

[0046] Figure 3 This is a system control principle block diagram of a device for measuring key parameters of thin films according to the present invention.

[0047] Figure 4 This is a schematic diagram showing the positional relationship between the tilt adjustment structure component and the upper and lower measuring heads in this invention.

[0048] Figure 5 This is a three-dimensional structural diagram of the clamping assembly in this invention.

[0049] Figure 6 This is a schematic diagram of the parallel glass in the present invention being in a horizontal position without changing the light path.

[0050] Figure 7 and Figure 8 These are schematic diagrams illustrating the changes in the optical path after altering two tilt angles of the parallel glass in this invention.

[0051] Figure 9 yes Figure 1 A schematic diagram of the measurement area and the measurement spot.

[0052] Figure 10 This is a schematic diagram illustrating the calculation of the optical path distance after the tilt angle of the parallel glass is changed in this invention.

[0053] Figure 11 This is a flowchart of the software execution process installed in the host computer of this invention.

[0054] Figure label:

[0055] 1-Mounting base plate, 2-Two-dimensional hollow moving platform, 31-First high-precision dual-axis level, 32-Second high-precision dual-axis level, 4-Clamp assembly, 41-Clamp base plate, 42-Inspected sheet, 43-Magnetic ring, 44-Groove, 45-Mushroom-shaped handle, 51-Upper measuring head, 52-Lower measuring head, 6-Mounting bracket, 7-Tilt adjustment structure assembly, 71-Two-dimensional tilt meter, 72-Rotating mounting plate, 731-First T-type mounting base, 732-Second T-type mounting base, 741 742-Second quick handle, 751-First connecting plate, 752-Second connecting plate, 761-First parallel glass, 762-Second parallel glass, 10-Tilt sensor, 81-Upper measuring head adjustment unit, 82-Lower measuring head adjustment unit, 91-Frame body, 92-Lower unit, 93-Miniature display panel, 941-First optical unit, 942-Second optical unit, 95-Transformer, 96-Motor controller, 97-Measuring head controller. Detailed Implementation

[0056] Please see Figures 1 to 11 As shown, a device for measuring key parameters of a thin sheet mainly includes: a frame body 91, a mounting base plate 1, a two-dimensional hollow moving platform 2, a confocal laser displacement sensor, a clamp assembly 4, a mounting bracket 6, a tilt adjustment structure assembly 7, and a control system.

[0057] The mounting base plate 1 is a planar structure, which is mounted on the frame body 91; a two-dimensional hollow mobile platform 2 is mounted on the mounting base plate 1;

[0058] The two-dimensional hollow mobile platform 2 is a hollow, electrically controlled two-dimensional platform with x and y axis motion. It can achieve arbitrary positioning within the x and y axis plane travel range via control signals. An embedded displacement sensor can directly measure the x and y axis displacement values, and its travel range is ≥100mm × 100mm. A clamping assembly 4 is placed in its hollow section. The motion control of the two-dimensional hollow mobile platform 2 drives the clamping assembly 4 to position itself. Two high-precision dual-axis levels, namely a first high-precision dual-axis level 31 and a second high-precision dual-axis level 32, are also fixedly installed on the two-dimensional hollow mobile platform 2. These levels can monitor and measure the levelness of the two-dimensional hollow mobile platform 2 in real time and feed back the measurement results to the lower-level computer for data correction.

[0059] The fixture assembly 4 includes a fixture base plate 41 and a magnetic ring 43. The fixture base plate 41 is made of metal and has multiple specific grooves 44 arranged side by side to accommodate the sheet 42 to be inspected and the magnetic ring 43. A through hole is also provided in the measurement area to allow the laser from the upper measuring head 51 and lower measuring head 52 of the confocal laser displacement sensor to be directed onto the sheet 42. The magnetic ring 43 is a magnetic ring structure that tightly presses the sheet 42 to be inspected into the grooves 44 of the fixture base plate 41. The inner ring area of ​​the magnetic ring 43 is the circular measurement area. The fixture base plate 41 also has four mushroom-shaped handles 45 for easy lifting. One fixture assembly 4 can accommodate multiple sheets for batch measurement. The use of a magnetic ring to press the sheet 42 firmly ensures that it does not deform or wrinkle, further guaranteeing measurement accuracy. There can be multiple clamping assemblies 4, so that while one clamping assembly 4 is measuring on this device, the other clamping assemblies 4 can be used to arrange the sheet to be inspected 42 to improve measurement efficiency.

[0060] The mounting bracket 6 has a concave structure, with the upper measuring head adjustment unit 81 and the lower measuring head adjustment unit 82 fixed at its upper and lower parts, respectively, and its middle part fixedly connected to the mounting base plate 1.

[0061] The upper measuring head adjustment unit 81 and the lower measuring head adjustment unit 82 are multi-dimensional adjustment structures, and the upper measuring head 51 and the lower measuring head 52 are fixedly installed respectively. By adjusting the displacement and angle of the upper measuring head adjustment unit 81 and the lower measuring head adjustment unit 82, the upper measuring head 51 and the lower measuring head 52 of the confocal laser displacement sensor are made coaxial, thus meeting the measurement requirements of the confocal laser displacement sensor.

[0062] The tilt adjustment structure assembly 7 includes: a two-dimensional inclinometer 71, a rotating mounting plate 72, a first T-shaped mounting base 731, a second T-shaped mounting base 732, a first quick handle 741, a second quick handle 742, a first connecting plate 751, a second connecting plate 752, a first parallel glass 761, a second parallel glass 762, and a tilt sensor 10. This assembly is fixed to one side of the mounting base 1. The two-dimensional inclinometer 71 is an electrically controlled dual-axis inclinometer, which communicates with the lower-level computer of the control system. The control signal from the lower-level computer enables the dual-axis small-angle swing positioning of the two-dimensional inclinometer 71. The two-dimensional inclinometer 71 is fixed on the mounting base 1. The rotating mounting plate 72 and the tilt sensor 10 are fixedly connected above the two-dimensional inclinometer 71. The tilt sensor 10 monitors the tilt angle of the two-dimensional inclinometer 71 in real time and transmits the data to the lower-level computer of the control system for conversion of the measurement results into vertical distance. The rotating mounting plate 72 has the first and second connecting plates 751 and 752 fixed at its upper and lower positions, respectively. A T-shaped mounting base 731 and a second T-shaped mounting base 732 are provided. A first quick handle 741 fixes one end of a first connecting plate 751 to the first T-shaped mounting base 731, and the other end of the first connecting plate 751 is fixedly connected to a first parallel glass 761. A second quick handle 742 fixes one end of a second connecting plate 752 to the second T-shaped mounting base 732, and the other end of the second connecting plate 752 is fixedly connected to a second parallel glass 762. The lasers of the upper measuring head 51 and the lower measuring head 52 are incident on the first parallel glass 761 and the second parallel glass 762, resulting in an outgoing beam parallel to the incident beam. When the two-dimensional inclinometer 71 adjusts the first parallel glass 761 and the second parallel glass 762 to a horizontal state, the laser axes of the upper measuring head 51 and the lower measuring head 52 are coaxial. After being perpendicularly incident on the first parallel glass 761 and the second parallel glass 762, the light passes directly through without changing the light path. The measurement spot in this measurement area is the position of the origin O of the center of the circular measurement area.

[0063] Confocal laser displacement sensors are a mature technology readily available on the market, such as Keyence's CL-L030 laser coaxial displacement gauge, the German company Miiyi's IFS2406-10 spectral confocal sensor, or the Chinese company Haibosen's HPS-CFL030 spectral confocal displacement sensor. The upper measuring head 51 and lower measuring head 52, together with two first optical units 941, a second optical unit 942, and a measuring head controller 97, form a measuring unit. Measurement data is fed back to the lower-level computer. By adjusting the displacement and angle of the upper and lower measuring head adjustment units 81 and 82, coaxiality of the upper and lower measuring heads 51 and 52 can be achieved, meeting the measurement requirements of the confocal laser displacement sensor. The upper and lower measuring head adjustment units 81 and 82 can use optional accessories provided by the confocal laser displacement sensor manufacturer, such as Keyence's adjustment fixture (model OP-88285), or they can be custom-made or use other relevant fixtures.

[0064] Two-dimensional hollow mobile platforms are a mature technology that can be readily available on the market, such as the XY120120 two-dimensional hollow mobile platform from Zhuoli Hanguang.

[0065] The control system includes a lower-level machine 92 and a motor controller 96, which are installed inside the frame body 91;

[0066] The measuring head controller 97, the first optical unit 941, and the second optical unit 942 of the confocal laser displacement transmitter are installed inside the frame body 91; the measuring head controller 97 is connected to the upper measuring head 51 and the lower measuring head 52 through the first optical unit 941 and the second optical unit 942 respectively.

[0067] The frame body 91 serves as the main support structure, with the base plate 1 installed on top. The other five sides are enclosed by sheet metal. The control circuit board and micro display panel 93 of the lower computer 92 are fixedly installed on two sides. The first optical unit 941, the second optical unit 942, a transformer 95, two motor controllers 96, and a measuring head controller 97 are fixedly installed on the inner side of the bottom.

[0068] Transformer 95 provides various voltage power supplies for this device, and the two motor controllers 96 are respectively connected to the two motors of the two-dimensional hollow mobile platform 2 for communication.

[0069] The lower-level machine 92 communicates with the upper-level machine (not shown), the motor controller 96, and the measuring head controller 97. Automatic measurement software is installed on the upper-level machine. Figure 11 (See the software execution flowchart). The control requirements of the automatic measurement software are transmitted to the motor controller 96 and the measuring head controller 97 through the lower-level computer 92. The motor controller 96 and the measuring head controller 97 transmit the feedback signals to the upper-level computer through the lower-level computer 92. The data collected by the upper measuring head 51, lower measuring head 52, first high-precision dual-axis level 31, second high-precision dual-axis level 32, and tilt sensor 10 are uploaded to the upper-level computer through the lower-level computer 92. After data processing, the automatic measurement software generates the original verification record and saves it in document form.

[0070] The present invention also provides a measurement method using the above-described device for measuring key parameters of a thin sheet, comprising the following steps:

[0071] Step 1: Place a standard gauge block of grade 4 or above with a nominal value of 1mm between the upper measuring head 51 and the lower measuring head 52, input the correction value of the standard gauge block, and read the distance D between the upper measuring head 51 and the lower measuring head 52. The correction value of the 1mm standard gauge block can be obtained through measurement traceability.

[0072] Step 2: The two-dimensional inclinometer 71 adjusts the first parallel glass 761 and the second parallel glass 762 to a horizontal state, and reads the distance data from the upper measuring head 51 and the lower measuring head 52 to the upper and lower surfaces of the sheet 42 under test, respectively. and ;

[0073] Step 3: The two-dimensional inclinometer 71 adjusts the first parallel glass 761 and the second parallel glass 762 to different small β angles n times according to the measurement software, so that the measurement spot is evenly distributed in the measurement area (e.g., Figure 9 As shown), the distance data from the upper measuring head 51 and the lower measuring head 52 to the upper and lower surfaces of the sheet under test 42 are read. and ;

[0074] Given the thickness t and refractive index n of the first parallel glass 761 and the second parallel glass 762, calculate the perpendicular distance. , They are respectively:

[0075] ;

[0076] ;

[0077] Step 4: The upper and lower laser spots of the inspected thin section 42 are respectively mapped using coordinates. , This indicates that x and y are fixed values ​​within the same measurement area;

[0078] coordinates , multiple , The corresponding average values ​​are taken as the average vertical distances calculated by the upper measuring head 51 and the lower measuring head 52, respectively. , ;

[0079] Step 5: Calculate the thickness deviation and curvature of the sheet as follows:

[0080] Thickness deviation ,or Different measurement points on the same thin slice Take the largest measurement point. As the thickness deviation of the thin film, t 标 The nominal value of the tested thin section 42;

[0081] curvature For different measurement points on the same thin slice, take the largest value. As the curvature of the sheet.

[0082] The operation process is as follows:

[0083] 1. Connect the power supply to this standard device, turn on the automatic measurement software to warm up the device, clean the test sheet 42 and place it in the same room as this device for isothermal testing. The isothermal time depends on the requirements of different sheets.

[0084] 2. Place the thin films 42 to be inspected one by one into the corresponding grooves 44 of the fixture base plate 41, and use magnetic rings 43 to press the measurement area where necessary.

[0085] 3. Input the relevant inspection information, set the positioning coordinates of the measurement area, the number of measurement pieces, the number of areas, and the number of measurement points in the same measurement area on the automatic measurement software, and save the measurement settings.

[0086] 4. Place the sheet fixture assembly 4 with the sheet installed on the two-dimensional hollow moving platform 2, start the automatic measurement software, and measure the thickness deviation and curvature of each sheet according to the set requirements. After the measurement of this group is completed, replace another sheet fixture assembly with the sheet installed and repeat the above measurement.

[0087] 5. After the automatic measurement software completes the measurement, click the "Save" button in the software to automatically save the measurement results as a document.

[0088] 6. Remove the thin film fixture assembly 4, remove the magnetic ring 43 and the thin film under test 42 respectively, turn off the power, and the test is complete.

[0089] This invention provides a high-precision, convenient, efficient, automated, and batch-testable measuring device and method for key parameters of thin films.

[0090] The above description is merely a preferred embodiment of the present invention and is not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A device for measuring key parameters of a sheet, characterized in that: include: Frame body, mounting base plate, two-dimensional hollow mobile platform, confocal laser displacement sensor, fixture assembly, mounting bracket, tilt adjustment structure assembly, control system; The mounting base plate is a planar structure, which is mounted on the frame body; the two-dimensional hollow moving platform is mounted on the mounting base plate; The two-dimensional hollow mobile platform is a hollow electric-controlled x- and y-axis motion two-dimensional platform, wherein the fixture assembly is placed in the hollow part, and the motion control of the two-dimensional hollow mobile platform drives the fixture assembly to be positioned; The mounting bracket is a concave structure, the upper and lower parts of which are respectively fixed with an upper measuring head adjustment unit and a lower measuring head adjustment unit, and the middle part thereof is fixedly connected to the mounting base plate; The upper measuring head adjustment unit and the lower measuring head adjustment unit are multi-dimensional adjustment structures, and the upper measuring head and the lower measuring head of the confocal laser displacement sensor are respectively fixedly mounted thereon; by adjusting the displacement and angle of the upper measuring head adjustment unit and the lower measuring head adjustment unit, the upper measuring head and the lower measuring head are made coaxial, thereby meeting the measurement requirements of the confocal laser displacement sensor; The tilt adjustment structural component includes: a two-dimensional inclinometer, a rotating mounting plate, a first T-shaped mounting seat, a second T-shaped mounting seat, a first quick handle, a second quick handle, a first connecting plate, a second connecting plate, a first parallel glass, a second parallel glass, and a tilt sensor, which is fixed on one side of the mounting base as an integral component; the two-dimensional inclinometer is an electrically controlled dual-axis inclinometer, which is communicated with the lower computer of the control system, and the control signal of the lower computer realizes the dual-axis small-angle swing positioning of the two-dimensional inclinometer; the two-dimensional inclinometer is fixed on the mounting base, and the rotating mounting plate and the tilt sensor are fixedly connected above the two-dimensional inclinometer, and the tilt sensor monitors the inclination of the two-dimensional inclinometer in real time and transmits the data to the lower computer; the upper and lower positions of the rotating mounting plate are respectively The first T-shaped mounting seat and the second T-shaped mounting seat are fixed; the first quick handle fixes one end of the first connecting plate on the first T-shaped mounting seat, and the other end of the first connecting plate is fixedly connected to the first parallel glass; the second quick handle fixes one end of the second connecting plate on the second T-shaped mounting seat, and the other end of the second connecting plate is fixedly connected to the second parallel glass; the lasers of the upper measuring head and the lower measuring head are incident on the first parallel glass and the second parallel glass to realize an outgoing ray parallel to the incident ray, and when the two-dimensional inclinometer adjusts the first parallel glass and the second parallel glass to be in a horizontal state, the laser axes of the upper measuring head and the lower measuring head are coaxial, and directly pass through the first parallel glass and the second parallel glass without changing the optical path after being vertically incident on the first parallel glass and the second parallel glass; The control system includes: a lower computer and a motor controller, which are installed in the frame body; The measuring head controller, the first optical unit and the second optical unit of the confocal laser displacement sensor are all installed in the frame body; the measuring head controller is connected to the upper measuring head and the lower measuring head through the first optical unit and the second optical unit respectively; The lower computer is respectively connected to the upper computer, the motor controller and the measuring head controller for communication. The upper computer is installed with automatic measurement software. The control requirements of the automatic measurement software are transmitted to the motor controller and the measuring head controller through the lower computer. The motor controller and the measuring head controller transmit feedback signals to the upper computer through the lower computer. The data collected by the upper measuring head and the lower measuring head are uploaded to the upper computer via the lower computer.

2. A device for measuring key parameters of a sheet as claimed in claim 1, characterized in that: The two-dimensional hollow mobile platform is also fixedly installed with two high-precision dual-axis levels for real-time monitoring and measuring the levelness of the two-dimensional hollow mobile platform and feeding back the measurement result data to the lower computer for correction.

3. A device for measuring key parameters of a sheet as claimed in claim 1, characterized in that: The fixture assembly includes: a fixture base plate and a magnetic ring, wherein the fixture base plate is made of metal material, and a plurality of grooves are arranged in parallel on the fixture base plate so as to place the thin sheet to be inspected and the magnetic ring, and a through hole is arranged at the measuring position so that the lasers of the upper measuring head and the lower measuring head can be irradiated onto the thin sheet to be inspected; the magnetic ring is a magnetic circular ring structure, which tightly presses the thin sheet to be inspected into the groove of the fixture base plate, and the inner ring area of ​​the magnetic ring is the circular measuring area of ​​the thin sheet.

4. A device for measuring key parameters of a sheet as claimed in claim 3, characterized in that: Four mushroom-shaped handles are also arranged around the clamp bottom plate for easy lifting.

5. A device for measuring key parameters of a sheet as claimed in claim 1, characterized in that: The confocal laser displacement sensor is one of the following: CL-L030 coaxial laser displacement meter from Keyence, IFS2406-10 spectral confocal sensor from Mi-Iridium of Germany, or HPS-CFL030 spectral confocal displacement sensor from Heberson of China.

6. A method for measuring key parameters of a sheet, characterized in that: Using a device for measuring key parameters of a sheet as claimed in any one of claims 1 to 5, the measuring method comprises the following steps: Step 1: Place a standard gauge block of grade 4 or above with a nominal value of 1 mm between the upper measuring head and the lower measuring head, input the correction value of the gauge block, and read the distance D between the upper measuring head and the lower measuring head. The correction value of the standard gauge block can be obtained through value traceability; Step 2: The two-dimensional inclinometer adjusts the first parallel glass and the second parallel glass to a horizontal state, and reads the distance data from the upper measuring head and the lower measuring head to the upper and lower surfaces of the thin film to be inspected respectively. and ; Step 3: The two-dimensional inclinometer is controlled by the measurement software to adjust the first parallel glass and the second parallel glass at different β small angles n times, the measurement spot is evenly distributed in the measurement area, and the distance data from the upper measurement head and the lower measurement head to the upper and lower surfaces of the thin film to be tested are read respectively. and ; Knowing the thickness t and refractive index n of the first parallel glass and the second parallel glass, the vertical distance after conversion is , They are: ; ; Step 4: The upper and lower laser spots are respectively measured with coordinates , Indicates that x and y are fixed values ​​in the same measurement area; The coordinates , Multiple , Take the corresponding average values ​​as the average vertical distances measured by the upper measuring head and the lower measuring head respectively. , ; Step 5: Calculate the thickness deviation and curvature of the sheet: Thickness deviation ,or , different measurement points on the same slice , take the largest measurement point As the thickness deviation of the sheet, t 标 is the nominal value of the thin film under test; Curvature , different measurement points on the same thin film, take the largest As the curvature of the sheet.

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