Carbon ion excitation source device and vacuum coating system

Abstract

The invention relates to a carbon ion excitation source device and a vacuum coating system. The carbon ion excitation source device comprises an anode (1); the first arc striking assemblies (2) are arranged on one side of the anode (1) in the first direction, and each first arc striking assembly (2) is provided with a first arc starting part, a first ignition part and a first insulation part; the supporting assembly (3) is provided with a supporting part (30) for accommodating the plurality of first arc striking assemblies (2) and supplies power to the first arc striking assemblies (2); the multiple target materials (4) are connected with the side, away from the supporting structure, of the supporting assembly (3) in the first direction, and the multiple target materials (4) correspond to the multiple first arc striking assemblies (2) respectively; wherein the plurality of target materials (4) are configured to respectively form electric arcs with the anode (1).

Description

Technical Field

[0001] The present disclosure relates to the field of vacuum coating technology, and in particular to a carbon ion excitation source device and a vacuum coating system. Background Art

[0002] Carbon ion excitation sources play an important role in materials science, nuclear physics, medical and industrial applications. Especially in the medical field, carbon ion therapy has become a cutting-edge technology in cancer treatment due to its high precision and high efficiency in killing tumor cells. In materials science, carbon ion beams can be used for surface modification, doping and nanostructure formation of materials.

[0003] The carbon ion excitation source system in the related technology usually relies on a single ion source and power supply for operation, and has problems such as small coating area, low target material utilization, poor reliability, low efficiency, and unstable energy. Summary of the invention

[0004] In view of this, the embodiments of the present disclosure provide a carbon ion excitation source device and a vacuum coating system, which can improve reliability.

[0005] In one aspect of the present disclosure, a carbon ion excitation source device is provided, comprising:

[0006] anode;

[0007] A plurality of first arc-starting assemblies are arranged on one side of the anode along a first direction, each of the first arc-starting assemblies having a first arc-starting portion, a first ignition portion and a first insulation portion;

[0008] A support assembly having a support portion for accommodating a plurality of first arc-starting assemblies and supplying power to the first arc-starting assemblies;

[0009] A plurality of target materials are connected to a side of the support assembly away from the support structure along a first direction, and the plurality of target materials correspond to the plurality of first arc-starting assemblies respectively;

[0010] Wherein, a plurality of targets are configured to form arcs with the anodes respectively.

[0011] In some embodiments, the first arc-starting portion comprises:

[0012] A first arc-starting electrode is clamped on the supporting part;

[0013] The first graphite electrode is disposed adjacent to the first arc starting electrode along a first direction and is used to form an arc with the corresponding target material.

[0014] In some embodiments, the first arc-starting portion further comprises:

[0015] A second graphite electrode;

[0016] A second arc-starting electrode is clamped with the second graphite electrode along the first direction, and the second graphite electrode and the second arc-starting electrode are arranged between the first graphite electrode and the first ignition portion along the first direction;

[0017] The second graphite electrode is electrically connected to the first ignition portion through the second arc starting electrode, and the first ignition portion is configured to generate an arc between the second graphite electrode and the first graphite electrode.

[0018] In some embodiments, the first insulating portion includes:

[0019] An insulating ring, disposed between the first graphite electrode and the second graphite electrode;

[0020] A first insulating base is disposed adjacent to the second arc-starting electrode and disposed along the first direction on a side of the second arc-starting electrode away from the second graphite electrode;

[0021] A first insulating support column is arranged on a side of the first insulating base away from the second arc starting electrode;

[0022] A plurality of first insulating gaskets are respectively arranged between the first insulating support column and the first insulating base and between the first ignition portion and the first insulating base.

[0023] In some embodiments, the first ignition portion includes a plurality of first igniters, the plurality of first igniters respectively correspond to a plurality of target materials, and are arranged at equal intervals along the circumference of the first arc starting portion.

[0024] In some embodiments, the number of the second graphite electrodes and the second arc-starting electrodes is plural, and the number of the second graphite electrodes and the second arc-starting electrodes is respectively equal to the number of the first igniters;

[0025] Wherein, each second graphite electrode and each second arc-starting electrode are both crescent-shaped, and the arc angles corresponding to each second graphite electrode and each second arc-starting electrode are equal.

[0026] In some embodiments, the support assembly includes:

[0027] A first support seat, the support structure is arranged on the first support seat;

[0028] A second support seat, spaced apart from the first support seat along the first direction;

[0029] A second ignition part includes a plurality of second igniters, and the plurality of second igniters pass through the second support seat and are respectively plugged into the plurality of first ignition parts;

[0030] A third support seat is spaced apart from the second support seat along the first direction and has an opening for inserting the target material;

[0031] The connecting member is supported between the first supporting seat and the second supporting seat and between the second supporting seat and the third supporting seat respectively;

[0032] The second terminal is inserted into the third support seat and is used to supply power to the second ignition part and the first arc starting part.

[0033] In some embodiments, the carbon ion excitation source device further comprises:

[0034] A second arc striking assembly is disposed between the first arc striking assembly and the target material along the first direction and is located in a supporting space surrounded by the first supporting seat and the third supporting seat;

[0035] Wherein, the second arc striking assembly comprises:

[0036] A plurality of third graphite electrodes, each of which corresponds to the plurality of first arc-starting assemblies and the plurality of targets, and is used to form an arc with the first graphite electrodes;

[0037] A third arc-starting electrode connected to the plurality of third graphite electrodes, the third arc-starting electrode having an opening for the second ignition portion to pass through;

[0038] The third terminal is respectively plugged into the third arc-starting electrode and the supporting assembly, and is used to supply power to the third graphite electrode.

[0039] In some embodiments, the carbon ion excitation source device further comprises:

[0040] A plurality of cooling components are respectively connected to the plurality of targets;

[0041] The cooling assembly includes a cooling pipe, a cooling medium inlet pipe, a cooling pipe inlet and a cooling pipe outlet which are sequentially arranged along a first direction, and the cooling pipe is configured to supply power to the target material.

[0042] In some embodiments, the support assembly further comprises:

[0043] A second insulating seat is sleeved on an end of the second igniter away from the first igniter;

[0044] A cooling water jacket is inserted into the third support seat;

[0045] Sealing gasket, set on the cooling water jacket.

[0046] In another aspect of the present disclosure, a vacuum coating system is provided, comprising:

[0047] A carbon ion excitation source device as in any of the above embodiments.

[0048] Therefore, according to the embodiment of the present disclosure, an anode is set to power multiple target materials, which simplifies the power supply configuration, reduces the hardware cost and complexity of the system, can more effectively control the occurrence and development of the arc, reduce the unstable factors caused by single point failures, significantly expand the effective coating area of ​​the ion source, enhance the overall processing capability of the ion source, and improve the reliability of the carbon ion excitation source device. BRIEF DESCRIPTION OF THE DRAWINGS

[0049] The accompanying drawings, which constitute a part of the specification, illustrate embodiments of the present disclosure and, together with the description, serve to explain the principles of the present disclosure.

[0050] The present disclosure may be more clearly understood from the following detailed description with reference to the accompanying drawings, in which:

[0051] Figure 1 is a schematic structural diagram of some embodiments of the carbon ion excitation source device according to the present disclosure;

[0052] Figure 2 is a schematic structural diagram of some embodiments of the first arc starting assembly of the carbon ion excitation source device according to the present disclosure;

[0053] Figure 3 is a schematic structural diagram of some embodiments of the support assembly of the carbon ion excitation source device according to the present disclosure;

[0054] Figure 4 is a schematic structural diagram of some embodiments of the second arc starting assembly of the carbon ion excitation source device according to the present disclosure;

[0055] Figure 5 It is a schematic diagram of the structure of some embodiments of the target material and cooling assembly of the carbon ion excitation source device according to the present disclosure.

[0056] In the figure:

[0057] 1. Anode; 2. First arc-starting assembly; 21. First arc-starting electrode; 22. First graphite electrode; 23. Second graphite electrode; 24. Second arc-starting electrode; 25. Insulating ring; 26. First insulating base; 27. First insulating support column; 28. First insulating gasket; 29. ​​First igniter; 3. Support assembly; 30. Support part; 31. First support seat; 32. Second support seat; 33. Second igniter; 34. Third support seat; 35. Connector; 36. Second terminal; 37. Second insulating seat; 38. Cooling water jacket; 39. Sealing gasket; 4. Target; 5. Second arc-starting assembly; 51. Third graphite electrode; 52. Third arc-starting electrode; 53. Third terminal; 54. Second insulating column; 6. Cooling assembly; 61. Cooling pipe; 62. Cooling medium inlet pipe; 63. Cooling pipe inlet; 64. Cooling pipe outlet.

[0058] It should be understood that the size of each part shown in the accompanying drawings is not drawn according to the actual proportional relationship. In addition, the same or similar reference numerals represent the same or similar components. DETAILED DESCRIPTION

[0059] Various exemplary embodiments of the present disclosure will now be described in detail with reference to the accompanying drawings. The description of the exemplary embodiments is merely illustrative and is in no way intended to limit the present disclosure and its application or use. The present disclosure can be implemented in many different forms and is not limited to the embodiments described herein. These embodiments are provided to make the present disclosure thorough and complete and to fully express the scope of the present disclosure to those skilled in the art. It should be noted that unless otherwise specifically stated, the relative arrangement of the components and steps, the composition of the materials, the numerical expressions and the numerical values ​​set forth in these embodiments should be interpreted as being merely exemplary and not as limiting.

[0060] The words "first", "second" and similar words used in this disclosure do not indicate any order, quantity or importance, but are only used to distinguish different parts. The words "include" or "comprise" and similar words mean that the elements before the word include the elements listed after the word, and do not exclude the possibility of including other elements. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0061] In the present disclosure, when a specific device is described as being located between a first device and a second device, there may or may not be an intermediate device between the specific device and the first device or the second device. When a specific device is described as being connected to other devices, the specific device may be directly connected to the other device without an intermediate device, or may not be directly connected to the other device but have an intermediate device.

[0062] All terms (including technical terms or scientific terms) used in the present disclosure have the same meanings as those understood by ordinary technicians in the field to which the present disclosure belongs, unless otherwise specifically defined. It should also be understood that terms defined in general dictionaries, such as general dictionaries, should be interpreted as having meanings consistent with their meanings in the context of the relevant technology, and should not be interpreted in an idealized or extremely formal sense, unless explicitly defined herein.

[0063] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered as part of the specification.

[0064] Some related technologies mainly rely on a single pulsed DC igniter for arc initiation to achieve stable discharge of the carbon ion excitation source. However, a single igniter has shortcomings such as poor arc initiation reliability, unstable discharge, and susceptibility to interference, which leads to arc initiation failure, unstable carbon ion beam, increased energy consumption, accelerated equipment wear, and low overall system efficiency and reliability.

[0065] Some other related technologies use a single ion source for coating, but there are problems such as limited coverage and poor coating uniformity, which makes it difficult to meet the processing requirements of large-area substrates. In addition, the ion beam intensity of a single ion source is limited, resulting in uneven film thickness, affecting quality, increasing equipment wear and maintenance frequency, and reducing overall production efficiency and reliability.

[0066] The carbon ion excitation source system in the related technology usually relies on a single ion source and power supply for operation, resulting in high overall energy consumption of the equipment. In actual operation, the arc ignition process is not stable enough, which easily causes fluctuations in the coating quality, thus affecting the performance stability of the final product. There are problems such as small coating area, low target material utilization, poor reliability, low efficiency, and unstable energy.

[0067] In view of this, in one aspect of the embodiments of the present disclosure, a carbon ion excitation source device and a vacuum coating system are provided, which can improve the processing accuracy and material properties by using a carbon ion beam, thereby improving reliability.

[0068] Figure 1 is a schematic diagram of the structure of some embodiments of the carbon ion excitation source device disclosed in the present invention, Figure 1 The A direction in is the first direction. Figure 1 The carbon ion excitation source device comprises an anode 1, a plurality of first arc-starting assemblies 2, a support assembly 3 and a plurality of targets 4. The plurality of first arc-starting assemblies 2 are located in the same plane perpendicular to the first direction.

[0069] A plurality of first arc-starting assemblies 2 are arranged on one side of the anode 1 along a first direction, and each first arc-starting assembly 2 has a first arc-starting portion, a first ignition portion, and a first insulating portion. The first arc-starting portion can generate a discharge with the target material, thereby starting the plasma formation process. The first insulating portion is used to achieve electrical isolation, and the first ignition portion is used to start the plasma discharge process.

[0070] The support assembly 3 has a support portion 30 that accommodates multiple first arc-striking assemblies 2 and supplies power to the first arc-striking assemblies 2. The support assembly 3 is provided to support multiple first arc-striking assemblies 2, which can enhance the stability of the device to ensure the efficiency, stability and safety of the coating process.

[0071] A plurality of targets 4 are connected to a side of the support assembly 3 away from the support structure along a first direction, and the plurality of targets 4 correspond to the plurality of first arc-striking assemblies 2, respectively, and each target 4 corresponds one-to-one to each first arc-striking assembly 2. The plurality of targets 4 share one anode 1 and are configured to form arcs with the anode 1, respectively.

[0072] In this embodiment, an anode 1 is provided to power multiple targets 4, which simplifies the power supply configuration, reduces the hardware cost and complexity of the system, can more effectively control the occurrence and development of the arc, reduce the unstable factors caused by single point failures, significantly expand the effective coating area of ​​the ion source, enhance the overall processing capacity of the ion source, and improve the reliability of the carbon ion excitation source device.

[0073] Figure 2 is a schematic diagram of the structure of some embodiments of the first arc starting assembly of the carbon ion excitation source device according to the present disclosure, with reference to Figure 1 and Figure 2 In some embodiments, the first arc starting portion includes a first arc starting electrode 21 and a first graphite electrode 22 .

[0074] The first arc-starting electrode 21 is clamped to the support portion 30 and supported by the support assembly 3. The first graphite electrode 22 is disposed adjacent to the first arc-starting electrode 21 along the first direction and is used to form an arc with the corresponding target material 4. A raised ring may be disposed on the first graphite electrode 22 and clamped to the first arc-starting electrode 21. The first arc-starting electrode 21 is powered through the second terminal 36 of the support assembly 3.

[0075] In this embodiment, the first graphite electrode 22 can provide stable electron emission during arc discharge and can withstand long-term use in a high temperature environment. Arcs are formed between the first graphite electrode 22 and the target material 4 and between the anode 1 and the target material 4, respectively, so that the arc can be more evenly distributed on the surface of the target material, and the amplitude and position of the arcing of the target material can be accurately controlled, reducing the number of ion sources and power supplies required. A single power supply can accurately control the amplitude and position of the arcing with a thyristor, reducing the number of ion sources and power supplies required for the development of the coating system, thereby extending the service life of the device and reducing the equipment manufacturing cost.

[0076] refer to Figure 1 and Figure 2 In some embodiments, the first arc starting portion further includes: a second graphite electrode 23 and a second arc starting electrode 24. The second graphite electrode 23 and the second arc starting electrode 24 may be in the shape of a circular ring.

[0077] The second arc-starting electrode 24 is clamped with the second graphite electrode 23 along the first direction. The second graphite electrode 23 and the second arc-starting electrode 24 are arranged between the first graphite electrode 22 and the first ignition portion along the first direction.

[0078] The second graphite electrode 23 is electrically connected to the first ignition part through the second arc-starting electrode 24. The first ignition part is configured to generate an arc between the second graphite electrode 23 and the first graphite electrode 22. The second graphite electrode 23 is also electrically connected to the second ignition part. The second arc-starting electrode 24 assists the arc-starting process and optimizes the arc triggering point through a specific shape design to ensure the consistency and reliability of arc-starting.

[0079] In this embodiment, the second graphite electrode 23 and the second arc-starting electrode 24 are provided to generate an arc between the second graphite electrode 23 and the first graphite electrode 22, which helps to achieve more stable plasma generation and optimize the overall discharge conditions, thereby avoiding local overheating and uneven wear caused by a single discharge point.

[0080] refer to Figure 1 and Figure 2 In some embodiments, the first insulating portion includes: an insulating ring 25, a first insulating base 26, a first insulating support column 27 and a plurality of first insulating gaskets 28. The insulating ring 25 is disposed between the first graphite electrode 22 and the second graphite electrode 23. The insulating ring 25 includes but is not limited to being made of ceramic material, and is used to isolate the electrical connection between the high-voltage power supply and the metal component, prevent current short circuit, and protect the internal structure from arc heat.

[0081] The first insulating base 26 is disposed adjacent to the second arc-starting electrode 24 and disposed along the first direction on a side of the second arc-starting electrode 24 away from the second graphite electrode 23. The first insulating base 26 provides a stable foundation for the first arc-starting assembly 2, keeps it electrically isolated from surrounding metal structures, and avoids unnecessary current leakage.

[0082] The first insulating support column 27 is arranged on the side of the first insulating base 26 away from the second arc-starting electrode 24, and is used to fix and support other components in the first arc-starting assembly 2, and ensure the appropriate spacing between these components to maintain correct electrical isolation. A plurality of first insulating gaskets 28 are respectively arranged between the first insulating support column 27 and the first insulating base 26 and between the first ignition part and the first insulating base 26 to ensure good insulation between these components and prevent short circuit.

[0083] In this embodiment, by providing insulating components such as an insulating ring 25, a first insulating base 26, a first insulating support column 27 and a plurality of first insulating gaskets 28, electrical isolation can be provided to ensure the safety and reliability of operation.

[0084] refer to Figure 1 and Figure 2 In some embodiments, the first ignition portion includes a plurality of first igniters 29, which respectively correspond to a plurality of target materials 4 and are equidistantly spaced along the circumference of the first arc starting portion. The lower end of each first igniter 29 includes but is not limited to a cylindrical ring structure.

[0085] The plurality of first igniters 29 correspond to the plurality of targets 4 one by one, respectively. The number of the targets 4 and the first igniters 29 may be three, and the first igniters 29 may be arranged at equal angles of 120° between each other.

[0086] In this embodiment, the first ignition part is configured for uniform ignition, which can generate arcs at multiple positions simultaneously or sequentially, so that the arcs are evenly distributed on the entire target surface, thereby improving the uniformity of the coating and the utilization rate of the target.

[0087] refer to Figure 1 and Figure 2 In some embodiments, the number of the second graphite electrodes 23 and the second arc-starting electrodes 24 is plural, and the number of the second graphite electrodes 23 and the second arc-starting electrodes 24 is respectively equal to the number of the first igniters 29. Each second graphite electrode 23 and each second arc-starting electrode 24 are crescent-shaped, and the arc angles corresponding to each second graphite electrode 23 and each second arc-starting electrode 24 are equal.

[0088] The number of the second graphite electrodes 23 and the second arc-starting electrodes 24 corresponds to the number of the first igniters 29 , and each of the second graphite electrodes 23 and the second arc-starting electrodes 24 is divided into a crescent-shaped structure with equal arc angles according to the number.

[0089] For example, if the number of the first igniters 29 is three, the number of the second graphite electrodes 23 and the number of the second arc-starting electrodes 24 are also three, and the arc angle corresponding to each second graphite electrode 23 and the second arc-starting electrode 24 is 120°.

[0090] In this embodiment, the circular second graphite electrode 23 and the second arc starting electrode 24 are divided into a plurality of crescent-shaped structures with equal arc angles according to the number of the first igniters 29, which can help control the position and shape of the arc, thereby improving the sputtering efficiency and film quality, and helping to form a more uniform and concentrated arc.

[0091] Figure 3 is a schematic diagram of the structure of some embodiments of the support assembly of the carbon ion excitation source device according to the present disclosure, with reference to Figure 1 and Figure 3 In some embodiments, the support assembly 3 includes: a first support seat 31, a second support seat 32, a second ignition portion, a third support seat 34, a connecting piece 35 and a second terminal 36.

[0092] The first support seat 31, the second support seat 32 and the third support seat 34 include but are not limited to metal materials, and the first support seat 31, the second support seat 32 and the third support seat 34 are arranged in sequence along the first direction, and a support space is formed between the first support seat 31 and the third support seat 34 to accommodate the first arc-striking assembly 2 and the second arc-striking assembly 5.

[0093] The support structure is arranged on the first support seat 31, and the second support seat 32 is arranged along the first direction and spaced apart from the first support seat 31. The third support seat 34 is arranged along the first direction and spaced apart from the second support seat 32, and has an opening for the target material 4 to be inserted.

[0094] The connecting members 35 are respectively supported between the first support seat 31 and the second support seat 32 and between the second support seat 32 and the third support seat 34. The number of connecting members 35 can be multiple, and they can be arranged between the first support seat 31 and the second support seat 32 and between the second support seat 32 and the third support seat 34 according to actual needs. The connecting members 35 can limit the distance between the first support seat 31 and the second support seat 32 and between the second support seat 32 and the third support seat 34, and play a supporting role.

[0095] The second ignition part includes a plurality of second igniters 33, which are respectively plugged into the plurality of first ignition parts through the second support seat 32. The second terminal 36 is plugged into the third support seat 34 to supply power to the second ignition part and the first arc starting part.

[0096] The lower part of the first igniter 29 is provided with a circular hollow structure, and the top of the second igniter 33 has a cylindrical head, and the cylindrical head of the top of the second igniter 33 is inserted into the lower part of the first igniter 29. The second igniter 33 corresponds to the first igniter 29 one by one.

[0097] The lower end of the second igniter 33 passes through the third support seat 34 , and a second insulating seat 37 is provided at the connection with the third support seat 34 for insulation treatment, and the lower end of the second igniter 33 is used for power supply.

[0098] In this embodiment, by providing a second igniter 33 plugged into the first igniter 29, an arc can be generated at a position close to the target material 4, which helps to achieve multi-point arc starting, accurately control the amplitude and position of the target arc starting, reduce the number of ion sources and power supplies required for the development of the coating system, significantly expand the effective area of ​​ion source coating, improve the stability and overall processing capability of carbon ion excitation, improve the uniformity of arc distribution, and can start plasma discharge at different positions of the target material 4, thereby optimizing the deposition process.

[0099] Figure 4 is a schematic diagram of the structure of some embodiments of the second arc starting assembly of the carbon ion excitation source device according to the present disclosure, with reference to Figure 1 and Figure 4 In some embodiments, the carbon ion excitation source device further includes a second arc striking assembly 5 , which is disposed between the first arc striking assembly 2 and the target material 4 along the first direction and is located in a supporting space enclosed by the first supporting seat 31 and the third supporting seat 34 .

[0100] The second arc-starting assembly 5 includes: a plurality of third graphite electrodes 51, a third arc-starting electrode 52, a third terminal 53, and a second insulating column 54. Each third graphite electrode 51 corresponds to a plurality of first arc-starting assemblies 2 and a plurality of targets 4, and is used to form an arc with the first graphite electrode 22.

[0101] The third arc-starting electrode 52 is connected to a plurality of third graphite electrodes 51, and has an opening for the second ignition portion to pass through. The plurality of third graphite electrodes 51 share the third arc-starting electrode 52, and the third arc-starting electrode 52 is a multi-connection type, and is connected to the third support seat 34 through a third terminal 53.

[0102] The third terminal 53 is respectively connected to the third arc-starting electrode 52 and the support assembly 3 to supply power to the third graphite electrode 51. The second insulating column 54 is arranged on the side of the third arc-starting electrode 52 away from the third graphite electrode 51 to achieve electrical isolation. The second insulating column 54 includes but is not limited to being made of ceramic material. The second arc-starting assembly 5 is insulated from the third support seat 34, and the lower end of the third terminal 53 is used to supply power.

[0103] In this embodiment, by arranging the second arc starting assembly 5 in the middle, arcs can be generated at different positions, thereby achieving a more uniform plasma distribution, thereby improving the uniformity of the deposited film and improving the utilization rate of the target material. Multiple arc starting points can provide more control points, accurately control the amplitude and position of the target arc starting, help maintain stable arc discharge, reduce arc interruption or instability, and expand the effective area of ​​ion source coating.

[0104] Figure 5 is a schematic diagram of the structure of some embodiments of the target material and cooling assembly of the carbon ion excitation source device according to the present disclosure, with reference to Figure 1 and Figure 5 In some embodiments, the carbon ion excitation source device further includes a plurality of cooling components 6 , which are respectively connected to the plurality of targets 4 .

[0105] The cooling assembly 6 includes a cooling pipe 61 , a cooling medium inlet pipe 62 , a cooling pipe inlet 63 and a cooling pipe outlet 64 which are sequentially arranged along a first direction. The cooling pipe 61 is configured to supply power to the target 4 .

[0106] In this embodiment, the target material 4 is connected to the top end of the cooling pipe 61, installed in the central reserved hole of the third support seat 34 through an insulating guide, and powered by the cooling pipe 61 made of metal.

[0107] refer to Figure 1 and Figure 3 In some embodiments, the support assembly 3 further includes a second insulating seat 37, a cooling water jacket 38 and a sealing gasket 39. The second insulating seat 37 is sleeved on the end of the second igniter 33 away from the first igniter 29 to provide electrical isolation, and the second insulating seat 37 includes but is not limited to being made of rubber material.

[0108] The cooling water jacket 38 is inserted into the third support seat 34, and is used to guide the cooling water to flow through the cooling channel in the bottom metal support seat to control the temperature of the target and its surrounding area. The cooling water jacket 38 includes but is not limited to plastic material. The sealing gasket 39 is set on the cooling water jacket 38, including but not limited to silicone material, which can ensure the airtightness of the cooling water jacket 38 to prevent leakage.

[0109] In this embodiment, the support assembly 3 can provide stable and reliable physical support and good electrical isolation, enhance the mechanical and electrical stability of the device, and the arc can be generated from multiple positions, thereby improving the uniformity of the arc distribution and further improving the quality and uniformity of the film.

[0110] refer to Figure 1~Figure 5 The working process of the carbon ion excitation source device in some embodiments is given below:

[0111] The third terminal 53, the second terminal 36, the cooling pipe 61 and other parts are energized to form a certain potential difference between the anode 1 and the pulsed ion target 4, the first graphite electrode 22 and the third graphite electrode 51, and the first graphite electrode 22 and the pulsed ion target 4;

[0112] A first ignition unit is used to apply a DC pulse voltage between the first graphite electrode 22 and the second graphite electrode 23, so that a certain arc is generated between the two. Under the random movement of the generated ions, the potential difference between the first graphite electrode 22 and the third graphite electrode 51 is continuously reduced, and a certain arc is also generated;

[0113] The moving plasma flows toward the pulse ion target 4 under the action of the magnetic field, so that the potential difference between the first graphite electrode 22 and the pulse ion target 4 is continuously reduced, thereby forming an arc discharge. Similarly, under the movement of the plasma, the potential difference between the anode 1 and the pulse ion target 4 is also continuously reduced, forming a vacuum arc discharge between the two.

[0114] According to the above process, each target material 4 can be excited in sequence to form a vacuum arc discharge.

[0115] In another aspect of the embodiments of the present disclosure, a vacuum coating system is provided, comprising: a carbon ion excitation source device as described in any of the above embodiments.

[0116] In this embodiment, the vacuum coating system can accurately control the amplitude and position of the target arc, reduce the number of ion sources and power supplies required for the development of the coating system, significantly expand the effective area of ​​ion source coating, and improve the stability and overall processing capabilities of carbon ion excitation. It provides an efficient, stable, easy-to-operate and maintain carbon ion excitation source for industrial applications and medical fields, ensuring high-quality carbon ion excitation effects in various application scenarios and meeting the growing technical needs.

[0117] So far, various embodiments of the present disclosure have been described in detail. In order to avoid obscuring the concept of the present disclosure, some details known in the art are not described. Based on the above description, those skilled in the art can fully understand how to implement the technical solution disclosed here.

[0118] Although some specific embodiments of the present disclosure have been described in detail by way of examples, it should be understood by those skilled in the art that the above examples are for illustration only and are not intended to limit the scope of the present disclosure. It should be understood by those skilled in the art that the above embodiments may be modified or some technical features may be replaced by equivalents without departing from the scope and spirit of the present disclosure. The scope of the present disclosure is defined by the appended claims.

Claims

1. A carbon ion excitation source device, characterized in that: include: Anode (1); A plurality of first arc striking assemblies (2) are arranged on one side of the anode (1) along a first direction, each of the first arc striking assemblies (2) comprising a first arc starting portion, a first ignition portion and a first insulation portion; A support assembly (3) comprising a support portion (30) for accommodating the plurality of first arc striking assemblies (2) and supplying power to the first arc striking assemblies (2); a plurality of target materials (4) connected to a side of the support assembly (3) away from the support structure along the first direction, the plurality of target materials (4) corresponding to the plurality of first arc striking assemblies (2) respectively; The plurality of targets (4) are configured to form electric arcs with the anode (1) respectively.

2. The carbon ion excitation source device according to claim 1, characterized in that: The first arc starting portion comprises: A first arcing electrode (21) is clamped to the support portion (30); A first graphite electrode (22) is arranged adjacent to the first arc starting electrode (21) along the first direction, and is used to form an arc with the corresponding target material (4).

3. The carbon ion excitation source device according to claim 2, characterized in that: The first arc starting portion further comprises: A second graphite electrode (23); a second arc-starting electrode (24) clamped with the second graphite electrode (23) along the first direction, the second graphite electrode (23) and the second arc-starting electrode (24) being arranged between the first graphite electrode (22) and the first ignition portion along the first direction; The second graphite electrode (23) is electrically connected to the first ignition portion via the second arc starting electrode (24), and the first ignition portion is configured to generate an arc between the second graphite electrode (23) and the first graphite electrode (22).

4. The carbon ion excitation source device according to claim 3, characterized in that: The first insulating portion comprises: An insulating ring (25) is arranged between the first graphite electrode (22) and the second graphite electrode (23); A first insulating base (26) is arranged adjacent to the second arc-starting electrode (24) and is arranged along the first direction on a side of the second arc-starting electrode (24) away from the second graphite electrode (23); A first insulating support column (27) is arranged on a side of the first insulating base (26) away from the second arc starting electrode (24); A plurality of first insulating gaskets (28) are respectively arranged between the first insulating support column (27) and the first insulating base (26) and between the first ignition portion and the first insulating base (26).

5. The carbon ion excitation source device according to any one of claims 3 to 5, characterized in that: The first ignition portion comprises a plurality of first igniters (29), the plurality of first igniters (29) respectively corresponding to the plurality of target materials (4), and arranged at equal intervals along the circumference of the first arc starting portion.

6. The carbon ion excitation source device according to claim 5, characterized in that: The number of the second graphite electrodes (23) and the second arc-starting electrodes (24) is plural, and the number of the second graphite electrodes (23) and the second arc-starting electrodes (24) is respectively equal to the number of the first igniters (29); Each of the second graphite electrodes (23) and each of the second arc-starting electrodes (24) are crescent-shaped, and the arc angles corresponding to each of the second graphite electrodes (23) and each of the second arc-starting electrodes (24) are equal.

7. The carbon ion excitation source device according to claim 5, characterized in that: The support assembly (3) comprises: A first support seat (31), the support structure being arranged on the first support seat (31); A second support seat (32) arranged at a distance from the first support seat (31) along the first direction; A second ignition portion, comprising a plurality of second igniters (33), wherein the plurality of second igniters (33) pass through the second support seat (32) and are respectively plugged into the plurality of first ignition portions; A third support seat (34) is arranged at a distance from the second support seat (32) along the first direction and has an opening for inserting the target material (4); A connecting member (35) supported between the first supporting seat (31) and the second supporting seat (32) and between the second supporting seat (32) and the third supporting seat (34); A second terminal (36) is inserted into the third support seat (34) and is used to supply power to the second ignition portion and the first arc starting portion.

8. The carbon ion excitation source device according to claim 7, characterized in that: Also includes: A second arc striking assembly (5) is arranged between the first arc striking assembly (2) and the target material (4) along the first direction, and is located in a supporting space enclosed by the first supporting seat (31) and the third supporting seat (34); Wherein, the second arc striking assembly (5) comprises: a plurality of third graphite electrodes (51), each third graphite electrode (51) corresponding to a plurality of the first arc-starting assemblies (2) and a plurality of the target materials (4), and used to form an arc with the first graphite electrode (22); a third arc-starting electrode (52) connected to the plurality of third graphite electrodes (51), the third arc-starting electrode (52) having an opening for the second ignition portion to pass through; The third terminal (53) is respectively plugged into the third arc-starting electrode (52) and the support assembly (3), and is used to supply power to the third graphite electrode (51).

9. The carbon ion excitation source device according to claim 7, characterized in that: Also includes: A plurality of cooling components (6) respectively connected to the plurality of target materials (4); The cooling assembly (6) comprises a cooling pipe (61), a cooling medium inlet pipe (62), a cooling pipe inlet (63) and a cooling pipe outlet (64) arranged in sequence along the first direction, and the cooling pipe (61) is configured to supply power to the target material (4).

10. The carbon ion excitation source device according to claim 7, characterized in that: The support assembly (3) further comprises: A second insulating seat (37) is sleeved on an end of the second igniter (33) away from the first igniter (29); A cooling water jacket (38) inserted into the third support seat (34); A sealing gasket (39) is arranged on the cooling water jacket (38).

11. A vacuum coating system, characterized in that: include: A carbon ion excitation source device as described in any one of claims 1 to 10.

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