Adjusting structure applied to HDP top shower head

Abstract

The invention provides an adjusting structure applied to an HDP top shower head, and belongs to the technical field of semiconductor equipment, the adjusting structure comprises a machine table, a plurality of side nozzles, the top shower head and a shower head lifting device, the surface of the machine table is provided with a round hole, the lower surface of the machine table is fixedly connected with a connector, the inner wall of the connector is fixedly communicated with the side nozzles, and the side nozzles are fixedly connected with the shower head lifting device. The top shower head is located in the machine table, the shower head lifting device is located on the machine table, and the shower head lifting device comprises a connecting cavity. According to the invention, the height of the top shower head can be adjusted, so that the top shower head can move up and down according to different processes to change the distribution of reaction gas; according to different gas flow processes, the position of the top shower head can be adjusted to find the most appropriate matching position with the side nozzle, so that the gas reaction on the surface of the wafer is more uniform, the wafer thickness uniformity is finally optimized, and the problem that the uniformity of a large-flow gas process cannot meet the requirements of customers is solved.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor equipment, and in particular relates to an adjustment structure applied to a HDP top shower. Background Art

[0002] As the size of chip devices decreases, when depositing trenches below 0.8um (8000A), PECVD no longer has good step coverage, often forming pinch-offs and voids. This is mainly caused by the different deposition rates at the gap opening and the gap bottom.

[0003] In order to solve the problem of PECVD deposition voids, HDP was applied. After the initial deposition is completed and the holes are partially filled but not yet pinched off, an etching process is performed to reopen the gap entrance, and then deposition is performed again to complete the filling of the entire gap.

[0004] However, the structure of the HDP machine is very different from that of the traditional CVD machine. One of the differences is that the reaction gas is not sprayed downward uniformly from the shower plate, but is sprayed through the side nozzle and the top shower. Because the total amount of reaction gas in different types of processes is inconsistent, and may even vary greatly, and the nozzle and shower are fixed structures. Therefore, the problem with this structure is that the thickness of the area between the center and edge areas of the wafer is difficult to adjust by the gas flow rate, because this area is the intersection of the jets of the side nozzle and the top shower, which leads to the film thickness uniformity of some large-flow processes not meeting customer requirements. Summary of the invention

[0005] Based on the technical problems existing in the prior art, the present invention proposes an adjustment structure applied to a HDP top shower.

[0006] In order to achieve the above-mentioned purpose, the present invention adopts the following technical scheme: an adjustment structure applied to an HDP top shower, comprising a machine platform, a plurality of side nozzles, a top shower and a shower lifting device, wherein a circular hole is opened on the surface of the machine platform, a connector is fixedly connected to the lower surface of the machine platform, an inner wall of the connector is fixedly connected to the plurality of side nozzles, the top shower is located inside the machine platform, the shower lifting device is located on the machine platform, and the shower lifting device comprises a connecting cavity.

[0007] Furthermore, a mounting tube is fixedly connected to the lower surface of the connecting cavity, the lower end of the mounting tube is in contact with the upper surface of the machine, the upper surface of the connecting cavity is fixedly connected to two air inlet parts, the inner wall of the connecting cavity is fixedly connected to an air inlet pipe, the inner wall of the air inlet pipe is connected to the air inlet parts, and an air inlet hole is opened on the lower surface of the air inlet pipe.

[0008] Furthermore, a connecting hole is formed on the inner wall of the air inlet hole, three limiting grooves are formed on the inner wall of the air inlet hole, the limiting grooves are connected to the connecting hole, and three limiting holes are formed on the outer wall of the air inlet pipe, the limiting holes are connected to the limiting grooves.

[0009] Preferably, an insertion rod is slidably inserted into the inner wall of the limiting hole, and an adjustment column is slidably inserted into the inner wall of the air inlet hole, the adjustment column is composed of a cylinder and a frustum, and the lower end of the adjustment column is connected to the top shower. Three positioning pins are fixedly connected to the outer wall of the adjustment column, and the positioning pins are slidably connected to the inner wall of the limiting groove. A plug hole is opened at one end of the positioning pin away from the adjustment column, and the plug hole is adapted to the size of the insertion rod.

[0010] Preferably, one end of the insertion rod close to the insertion hole is fixedly connected with a guide block, and the guide block has a conical structure.

[0011] Preferably, one end of the three insertion rods is fixedly connected to a connecting plate, one side of the connecting plate is fixedly connected to a partition, a screw rod is threaded through the surface of the partition, and one end of the screw rod is rotatably connected to the outer wall of the air intake pipe.

[0012] Preferably, a guide rod is slidably provided on the surface of the partition, and one end of the guide rod is fixedly connected to the outer wall of the air inlet pipe.

[0013] Preferably, an annular hole is formed on the arc surface of the adjustment column, a sealing ring is sleeved on the inner wall of the annular hole, and the outer wall of the sealing ring fits with the inner wall of the air inlet hole.

[0014] Preferably, a shower rotating device is provided on the upper surface of the machine, and the shower rotating device includes a welding plate, the lower surface of the welding plate is fixedly connected to the upper surface of the machine, a servo motor is fixedly connected to one side of the welding plate, and a driving gear is fixedly connected to the output end of the servo motor, and a driven gear ring is rotatably connected to the upper surface of the machine, and the driven gear ring is meshed with the driving gear, and two positioning holes are provided on the upper surface of the driven gear ring, and two positioning plates are attached to the inner walls of the positioning holes, and the sides of the two positioning plates close to each other are fixedly connected to the outer wall of the mounting tube.

[0015] Compared with the prior art, the advantages and positive effects of the present invention applied to the adjustment structure of the HDP top shower are as follows: 1. The present invention can adjust the height of the top shower head by arranging a shower head lifting device, so that the top shower head can be moved up and down according to different processes to change the distribution of the reaction gas. When it comes to different gas flow processes, the top shower head position can be adjusted to find the most suitable matching position with the side nozzle to achieve a more uniform gas reaction on the wafer surface, and ultimately optimize the uniformity of the wafer thickness, thereby solving the problem that the uniformity of the large-flow gas process cannot meet customer requirements.

[0016] 2. The present invention provides a shower head rotating device, so that the top shower head can be automatically rotated while being able to be raised and lowered, thereby further adjusting the shower head position and thus changing the gas distribution, further improving the application range of the device.

[0017] 3. The present invention provides an air intake sealing device. When the device is not in use and the external pipe is separated from the air intake member, personnel can conveniently adjust the baffle to seal the air inlet of the air intake member, thereby preventing dust from entering the air intake member through the air inlet. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a three-dimensional structural schematic diagram of an adjustment structure applied to a HDP top shower according to the present invention; Figure 2 It is a bottom view structural schematic diagram of an adjustment structure applied to a HDP top shower according to the present invention; Figure 3 It is a structural schematic diagram of a shower lifting device according to the present invention applied to the adjustment structure of the HDP top shower; Figure 4 It is a partial structural schematic diagram of a shower lifting device according to the present invention, which is applied to the adjustment structure of the HDP top shower; Figure 5 A schematic diagram of the structure inside the air inlet pipe of an adjustment structure applied to a HDP top shower according to the present invention; Figure 6 A schematic diagram of the partial structure disassembly of a shower lifting device according to the present invention applied to an adjustment structure of a HDP top shower; Figure 7 A schematic diagram of the structure of an insertion rod of an adjustment structure applied to a HDP top shower according to the present invention; Figure 8 It is a structural schematic diagram of an adjustment column of an adjustment structure applied to a HDP top shower according to the present invention; Fig. 9 It is a structural schematic diagram of a shower rotating device according to the present invention applied to the adjustment structure of the HDP top shower; Fig.10It is a schematic diagram of the partial structure disassembly of a shower rotating device of an adjustment structure applied to a HDP top shower according to the present invention; Fig.11 It is a structural schematic diagram of an air intake sealing device applied to an adjustment structure of a HDP top shower according to the present invention; Fig.12 It is a partial structural schematic diagram of an air intake sealing device according to the present invention applied to the adjustment structure of a HDP top shower.

[0019] Description of the reference numerals in the accompanying drawings: 1. machine; 2. connector; 3. shower lifting device; 301. connecting cavity; 302. air inlet; 303. air inlet pipe; 304. mounting pipe; 305. air inlet hole; 306. adjustment column; 307. positioning pin; 308. connecting hole; 309. limiting groove; 310. limiting hole; 311. plug rod; 312. guide block; 313. connecting plate; 314. partition; 315. screw rod; 316. guide rod; 317. annular hole; 318. sealing ring; 319. plug hole; 4. shower rotating device; 401. welding Connecting plate; 402, servo motor; 403, driving gear; 404, driven gear ring; 405, positioning hole; 406, sliding rod; 407, adjusting ring; 408, rubber pad; 409, positioning plate; 410, sliding hole; 411, scale; 412, pointer; 5, air intake sealing device; 501, fixing seat; 502, rotating shaft; 503, connecting plate; 504, baffle; 505, handle; 506, coil spring; 507, connecting hole; 508, connecting rod; 509, threaded ring; 510, limit rod; 6, round hole; 7, top shower; 8, side nozzle. DETAILED DESCRIPTION

[0020] In order to more clearly understand the above-mentioned purpose, features and advantages of the present invention, the present invention is further described below in conjunction with the accompanying drawings and embodiments. It should be noted that the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

[0021] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways than those described herein. Therefore, the present invention is not limited to the specific embodiments of the following disclosure.

[0022] The present invention provides an adjustment structure for an HDP top shower, which comprises a machine platform, a plurality of side nozzles, a top shower and a shower lifting device, wherein a circular hole is opened on the surface of the machine platform, a connector is fixedly connected to the lower surface of the machine platform, and the inner wall of the connector is fixedly connected to the plurality of side nozzles, the top shower is located inside the machine platform, and the shower lifting device is located on the machine platform, and the shower lifting device comprises a connecting cavity, a mounting pipe is fixedly connected to the lower surface of the connecting cavity, and the lower end of the mounting pipe is in contact with the upper surface of the machine platform, and the upper surface of the connecting cavity is fixedly connected to two air inlet members, and an air inlet pipe is fixedly connected to the inner wall of the connecting cavity, and the inner wall of the air inlet pipe is in contact with the air inlet The air inlet pipe is connected with the parts, an air inlet hole is provided on the lower surface of the air inlet pipe, a connecting hole is provided on the inner wall of the air inlet hole, three limiting grooves are provided on the inner wall of the air inlet hole, and the limiting grooves are connected with the connecting hole, and three limiting holes are provided on the outer wall of the air inlet pipe, and the limiting holes are connected with the limiting grooves, a plug rod is slidably inserted into the inner wall of the limiting hole, and an adjustment column is slidably inserted into the inner wall of the air inlet hole, and the adjustment column is composed of a cylinder and a frustum, and the lower end of the adjustment column is connected with the top shower, and three positioning pins are fixedly connected to the outer wall of the adjustment column, and the positioning pins are slidably connected to the inner wall of the limiting groove, and a socket is provided at the end of the positioning pin away from the adjustment column, and the socket is adapted to the size of the plug rod.

[0023] The effect achieved by the above technical solution is: by setting up a shower lifting device, the height of the top shower can be adjusted, so that the top shower can be moved up and down to change the distribution of the reaction gas according to different processes. When it comes to different gas flow processes, the top shower position can be adjusted to find the most suitable matching position with the side nozzle to achieve a more uniform gas reaction on the wafer surface, and ultimately optimize the uniformity of the wafer thickness, thereby solving the problem that the uniformity of the large-flow gas process cannot meet customer requirements.

[0024] In one embodiment, a guide block is fixedly connected to one end of the plug rod near the jack, and the guide block is a conical structure. The effect achieved by the above technical solution is that the plug rod can be easily inserted into the jack because the guide block fixed to one end of the plug rod is small in size.

[0025] In one embodiment, one end of the three plug rods is fixedly connected to a connecting plate, one side of the connecting plate is fixedly connected to a partition, a screw rod is threaded through the surface of the partition, and one end of the screw rod is rotatably connected to the outer wall of the intake pipe. The effect achieved by the above technical solution is: the rotating screw rod can drive the partition to move, the partition drives the connecting plate, and the connecting plate can drive the three plug rods to move at the same time.

[0026] In one embodiment, a guide rod is slidably provided on the surface of the partition, and one end of the guide rod is fixedly connected to the outer wall of the air intake pipe. The effect achieved by the above technical solution is that when the screw rod drives the partition, the connecting plate and the insertion rod to move, the guide rod can guide and position the partition, thereby achieving the effect of preventing the insertion rod from rotating and deviating during its movement.

[0027] In one embodiment, the arc surface of the adjustment column is provided with an annular hole, the inner wall of the annular hole is sleeved with a sealing ring, and the outer wall of the sealing ring is in contact with the inner wall of the air inlet. The effect achieved by the above technical solution is that the sealing ring can mainly prevent gas leakage between the air inlet and the adjustment column.

[0028] In one embodiment, a shower rotating device is provided on the upper surface of the machine, and the shower rotating device includes a welding plate, the lower surface of the welding plate is fixedly connected to the upper surface of the machine, a servo motor is fixedly connected to one side of the welding plate, and a driving gear is fixedly connected to the output end of the servo motor, and a driven gear ring is rotatably connected to the upper surface of the machine, and the driven gear ring is meshed with the driving gear, and two positioning holes are provided on the upper surface of the driven gear ring, and two positioning plates are attached to the inner wall of the positioning hole, and the sides of the two positioning plates close to each other are fixedly connected to the outer wall of the mounting tube. The effect achieved by the above technical solution is: by setting up the shower rotating device, the top shower can be automatically rotated while being able to rise and fall, so that the shower position can be further adjusted to change the gas distribution, and the application range of the device is further improved.

[0029] In one embodiment, a sliding hole is opened on the surface of the positioning plate, a sliding rod is slidably inserted into the inner wall of the sliding hole, the lower end of the sliding rod is fixedly connected to the inner wall of the positioning hole, an adjustment ring is threadedly connected to the arc surface of the sliding rod, and a rubber pad is fixedly connected to the side of the adjustment ring close to the positioning plate. The effect achieved by the above technical scheme is: when personnel need to disassemble the shower lifting device, first rotate the adjusting ring to drive the rubber pad to separate from the sliding rod, and then move the installation tube to drive the positioning plate to separate the positioning plate from the positioning hole, and continue to move the positioning plate to separate it from the sliding rod, and the shower lifting device can be disassembled. When the shower lifting device needs to be installed, first move the connecting cavity to drive the installation tube, and the installation tube drives the positioning plate, and insert the sliding rod into the sliding hole on the positioning plate. When the positioning plate fits with the inner wall of the positioning hole, put the adjusting ring on the arc surface of the sliding rod, and then rotate the adjusting ring to drive the rubber pad to abut against the positioning plate, so as to complete the installation limit of the shower lifting device. The rubber pad can increase the friction force of the adjusting ring close to the side of the positioning plate, thereby achieving the effect of enabling the adjusting ring to abut against the positioning plate with the help of the rubber pad to be firmly attached.

[0030] In one embodiment, a scale is provided on the upper surface of the driven gear ring, and a pointer is fixedly connected to the upper surface of the machine. The above technical solution achieves the effect that a person can use the scale and the pointer to accurately adjust the rotation angle of the top shower.

[0031] In one embodiment, the outer wall of the air inlet member is provided with an air inlet sealing device, the air inlet sealing device comprises a fixed seat, the lower surface of the fixed seat is fixedly connected to the outer wall of the air inlet member, the inner wall of the fixed seat is rotatably penetrated with a rotating shaft, the arc surface of the rotating shaft is fixedly connected with a connecting plate, one side of the connecting plate is fixedly connected with a baffle, the arc surface of the baffle is fixedly connected with a handle, the cross section of the handle is "U" shaped, one side of the fixed seat is provided with a connecting hole, the inner wall of the connecting hole is slidably connected with a connecting rod, one end of the connecting rod is fixedly connected to one side of the connecting plate, the arc surface of the connecting rod is threadedly connected with a threaded ring, the arc surface of the connecting rod is slidably penetrated with a limiting rod, and the limiting rod is fixedly connected to the inner wall of the connecting hole. The effect achieved by the above technical scheme is: by setting the air inlet sealing device, when the device is placed out of use and the external pipe and the air inlet member are in a separated state, the personnel can conveniently adjust the baffle to seal the air inlet of the air inlet member, thereby preventing dust from entering the air inlet member along the air inlet.

[0032] In one embodiment, the arc surface of the rotating shaft is sleeved with a coil spring, and the two ends of the coil spring are respectively fixedly connected to the fixing seat and the connecting plate. The effect achieved by the above technical solution is that after the rotating thread ring is separated from the fixing seat, the coil spring can drive the baffle to open quickly.

[0033] The following is a further description of an adjustment structure of the present invention applied to a HDP top shower head in conjunction with the accompanying drawings. Figure 1-Figure 2 As shown, the present invention provides an adjustment structure for an HDP top shower, comprising a machine platform 1, a plurality of side nozzles 8, a top shower 7 and a shower lifting device 3. A circular hole 6 is opened on the surface of the machine platform 1, a connector 2 is fixedly connected to the lower surface of the machine platform 1, an inner wall of the connector 2 is fixedly connected to the plurality of side nozzles 8, the top shower 7 is located inside the machine platform 1, a shower rotating device 4 is provided on the upper surface of the machine platform 1, and an air intake sealing device 5 is provided on the outer wall of the air intake member 302.

[0034] The specific arrangement and functions of the shower head lifting device 3, the shower head rotating device 4 and the air inlet sealing device 5 are described in detail below.

[0035] like Figure 3-Figure 8As shown, the shower lifting device 3 includes a connecting cavity 301, a mounting tube 304 is fixedly connected to the lower surface of the connecting cavity 301, the lower end of the mounting tube 304 is in contact with the upper surface of the machine 1, the upper surface of the connecting cavity 301 is fixedly connected with two air inlet parts 302, the inner wall of the connecting cavity 301 is fixedly connected with an air inlet pipe 303, the inner wall of the air inlet pipe 303 is connected with the air inlet part 302, an air inlet hole 305 is provided on the lower surface of the air inlet pipe 303, a connecting hole 308 is provided on the inner wall of the air inlet hole 305, three limiting grooves 309 are provided on the inner wall of the air inlet hole 305, the limiting grooves 309 are connected with the connecting hole 308, the outer wall of the air inlet pipe 303 is provided with three limiting holes 310, the limiting holes 310 are connected with the limiting grooves 309, and the limiting holes 310 are connected with the limiting grooves 309. An insertion rod 311 is slidably inserted into the inner wall of the positioning hole 310, and an adjustment column 306 is slidably inserted into the inner wall of the air inlet hole 305. The adjustment column 306 is composed of a cylinder and a frustum. The lower end of the adjustment column 306 is connected to the top shower 7. Three positioning pins 307 are fixedly connected to the outer wall of the adjustment column 306. The positioning pins 307 are slidably connected to the inner wall of the limiting groove 309. A plug hole 319 is provided at one end of the positioning pin 307 away from the adjustment column 306. The plug hole 319 is adapted to the size of the insertion rod 311. By setting the shower lifting device 3, the height of the top shower 7 can be adjusted, so that the top shower 7 can be moved up and down according to different processes to change the distribution of the reaction gas. When different gas flow processes are required, the position of the top shower 7 can be adjusted. The guide block 312 is a conical structure. Since the guide block 312 fixed at one end of the rod 311 is small in size, the rod 311 can be easily inserted into the inside of the socket 319. One end of the three rods 311 is fixedly connected to a connecting plate 313, and one side of the connecting plate 313 is fixedly connected to a partition 314. A screw rod 315 is threaded on the surface of the partition 314, and one end of the screw rod 315 is rotated with the outer wall of the air inlet pipe 303. The screw rod 315 is dynamically connected, and the baffle 314 can be driven to move by rotating the screw rod 315, and the baffle 314 drives the connecting plate 313, and the connecting plate 313 can drive the three plug rods 311 to move at the same time. A guide rod 316 is slidably penetrated on the surface of the baffle 314, and one end of the guide rod 316 is fixedly connected to the outer wall of the air inlet pipe 303. When the screw rod 315 drives the baffle 314, the connecting plate 313 and the plug rod 311 to move, the guide rod 316 can guide and position the baffle 314, so as to achieve the effect of avoiding rotational deviation during the movement of the plug rod 311. An annular hole 317 is opened on the arc surface of the adjustment column 306, and a sealing ring 318 is sleeved on the inner wall of the annular hole 317. The outer wall of the sealing ring 318 fits with the inner wall of the air inlet hole 305.The sealing ring 318 can be mainly used to prevent gas leakage between the air inlet 305 and the adjustment column 306.

[0036] The effect achieved by the entire shower lifting device 3 is that by setting the shower lifting device 3, the height of the top shower 7 can be adjusted, so that the top shower 7 can be moved up and down for different processes to change the distribution of the reaction gas. When the top shower 7 is adjusted for different gas flow processes, the most suitable matching position with the side nozzle 8 can be found to achieve a more uniform gas reaction on the wafer surface, and finally optimize the uniformity of the wafer thickness, thereby solving the problem that the uniformity of the large-flow gas process cannot meet the customer's requirements. like Figure 9-10As shown, the shower rotating device 4 includes a welding plate 401, the lower surface of the welding plate 401 is fixedly connected to the upper surface of the machine 1, a servo motor 402 is fixedly connected to one side of the welding plate 401, and the output end of the servo motor 402 is fixedly connected to a driving gear 403, and the upper surface of the machine 1 is rotatably connected to a driven gear ring 404, the driven gear ring 404 is meshed with the driving gear 403, and the upper surface of the driven gear ring 404 is provided with two positioning holes 405, and the inner wall of the positioning hole 405 is attached to two positioning plates 409, and the two positioning plates 409 are fixed to the outer wall of the mounting tube 304 on one side close to each other. The shower head 7 can be automatically rotated while being lifted and lowered by setting a shower head rotating device 4, so that the shower head 7 can be further adjusted to change the gas distribution, further improving the application range of the device. A sliding hole 410 is provided on the surface of the positioning plate 409, and a sliding rod 406 is slidably inserted into the inner wall of the sliding hole 410. The lower end of the sliding rod 406 is fixedly connected to the inner wall of the positioning hole 405. The arc surface of the sliding rod 406 is threadedly connected with an adjusting ring 407. The side of the adjusting ring 407 close to the positioning plate 409 is fixedly connected with a rubber pad 408. When personnel need to disassemble the shower head lifting device 3, first The adjusting ring 407 is rotated to drive the rubber pad 408 to separate from the slide bar 406, and then the mounting tube 304 is moved to drive the positioning plate 409 to separate the positioning plate 409 from the positioning hole 405. The positioning plate 409 is continuously moved to separate it from the slide bar 406 to complete the disassembly of the shower lifting device 3. When the shower lifting device 3 needs to be installed, the connecting cavity 301 is first moved to drive the mounting tube 304, and the mounting tube 304 drives the positioning plate 409, and the slide bar 406 is inserted into the sliding hole 410 on the positioning plate 409. When the positioning plate 409 fits with the inner wall of the positioning hole 405, the adjusting ring 407 is then put on. The arc surface of the slide rod 406 is then rotated to drive the rubber pad 408 to abut against the positioning plate 409, so as to complete the installation limit of the shower lifting device 3. The rubber pad 408 can increase the friction force of the adjusting ring 407 close to the side of the positioning plate 409, so that the adjusting ring 407 can be firmly abutted against the positioning plate 409 with the help of the rubber pad 408. A scale 411 is provided on the upper surface of the driven gear ring 404, and a pointer 412 is fixedly connected to the upper surface of the machine 1. Personnel can use the scale 411 and the pointer 412 to accurately adjust the rotation angle of the top shower 7.

[0037] The effect achieved by the entire shower head rotating device 4 is that, by providing the shower head rotating device 4, the top shower head 7 can be automatically rotated while being able to be raised and lowered, thereby further adjusting the shower position and thus changing the gas distribution, further improving the application range of the device.

[0038] like Figure 11-Figure 12As shown, the air intake sealing device 5 includes a fixed seat 501, the lower surface of the fixed seat 501 is fixedly connected to the outer wall of the air intake member 302, the inner wall of the fixed seat 501 is rotatably penetrated with a rotating shaft 502, the arc surface of the rotating shaft 502 is fixedly connected with a connecting plate 503, one side of the connecting plate 503 is fixedly connected with a baffle 504, the arc surface of the baffle 504 is fixedly connected with a handle 505, the cross section of the handle 505 is "U" shaped, a connecting hole 507 is opened on one side of the fixed seat 501, the inner wall of the connecting hole 507 is slidably connected with a connecting rod 508, one end of the connecting rod 508 is fixedly connected to one side of the connecting plate 503, and the arc surface of the connecting rod 508 is threadedly connected with a threaded ring 509, a limit rod 510 is slidably penetrated through the arc surface of the connecting rod 508, and the limit rod 510 is fixedly connected to the inner wall of the connecting hole 507. By setting the air intake sealing device 5, when the device is not in use and the external pipeline is in a separated state from the air intake member 302, the personnel can conveniently adjust the baffle 504 to seal the air inlet of the air intake member 302, thereby preventing dust from entering the air intake member 302 through the air inlet. The arc surface of the rotating shaft 502 is sleeved with a coil spring 506, and the two ends of the coil spring 506 are respectively fixedly connected to the fixed seat 501 and the connecting plate 503. After the rotating threaded ring 509 is separated from the fixed seat 501, the coil spring 506 can drive the baffle 504 to open quickly.

[0039] The effect achieved by the entire air intake sealing device 5 is that, by setting the air intake sealing device 5, when the device is not in use and the external pipeline and the air intake member 302 are in a separated state, personnel can conveniently adjust the baffle 504 to seal the air inlet of the air intake member 302, thereby preventing dust from entering the air intake member 302 along the air inlet.

[0040] The overall working principle is as follows: 1. In the present invention, when the height of the top shower 7 needs to be adjusted, the screw rod 315 is first rotated to drive the partition 314 to move, and the partition 314 drives the connecting plate 313. The connecting plate 313 can simultaneously drive the three plug rods 311 to move. When the plug rod 311 is separated from the socket 319 on the positioning pin 307, the adjustment column 306 is rotated to drive the three positioning pins 307 to make the positioning pin 307 enter the connecting hole 308, and then the adjustment column is pulled to drive the positioning pin 307 to move downward and correspond to the limiting groove 309 one by one. When the positioning pin 307 corresponds to the limiting groove 309, the adjustment column 306 is rotated in the opposite direction to drive the positioning pin 307 to enter the limiting groove 309. When the positioning pin 307 enters the limiting groove 309 and the socket 319 on the positioning pin 307 is aligned with the plug rod 311, the screw rod 31 is rotated in the opposite direction. 5 drives the partition plate 314 to move, the partition plate 314 drives the connecting plate 313, and the connecting plate 313 drives the plug rod 311 to be inserted into the insertion hole 319, so as to complete the adjustment of the height of the top shower 7. There are three limit grooves 309 with different heights respectively. The height of the top shower 7 can be adjusted by rotating the positioning pin 307 into different limit grooves 309. Among them, since the guide block 312 fixed at one end of the plug rod 311 is small in size, the plug rod 311 can be easily inserted into the inside of the insertion hole 319. In addition, when the screw rod 315 drives the partition plate 314, the connecting plate 313 and the plug rod 311 to move, the guide rod 316 can guide and position the partition plate 314, so as to avoid the rotation deviation of the plug rod 311 during the movement process. Finally, the sealing ring 318 can mainly prevent gas leakage between the air inlet 305 and the adjustment column 306.

[0041] 2. In the present invention, when it is necessary to drive the top shower 7 to rotate, the servo motor 402 is first started to drive the driving gear 403 to rotate, the driving gear 403 drives the driven gear ring 404 to rotate, the driven gear ring 404 drives the positioning plate 409, the positioning plate 409 drives the mounting tube 304 to rotate, the mounting tube 304 drives the air inlet pipe 303 and the top shower 7 to rotate, when the top shower 7 rotates to a suitable angle, the servo motor 402 can be stopped, wherein the personnel can use the scale 411 and the pointer 412 to accurately adjust the rotation angle of the top shower 7.

[0042] 3. In the present invention, when it is necessary to seal the air inlet of the air inlet member 302, first pull the handle 505 to drive the baffle 504, the baffle 504 drives the connecting plate 503, the connecting plate 503 drives the rotating shaft 502 to rotate along the inner wall of the fixing seat 501, and at the same time the connecting plate 503 drives the connecting rod 508 to rotate along the inner wall of the connecting hole 507. When the baffle 504 blocks the air inlet, the threaded ring 509 is rotated to abut against the fixing seat 501, so that the baffle 504 can be limited. When the baffle 504 needs to be opened, the threaded ring 509 is first rotated to separate from the fixing seat 501. When the threaded ring 509 is separated from the fixing seat 501, the coil spring 506 can drive the baffle 504 to open quickly.

[0043] The above description is only a preferred embodiment of the present invention and does not limit the present invention in other forms. Any technician familiar with the profession may use the technical content disclosed above to change or modify it into an equivalent embodiment with equivalent changes and apply it to other fields. However, any simple modification, equivalent change and modification made to the above embodiment based on the technical essence of the present invention without departing from the content of the technical solution of the present invention still falls within the protection scope of the technical solution of the present invention.

Claims

1. An adjustment structure for a HDP top shower, comprising a machine platform (1), a plurality of side nozzles (8), a top shower (7) and a shower lifting device (3), characterized in that: A circular hole (6) is provided on the surface of the machine platform (1); a connector (2) is fixedly connected to the lower surface of the machine platform (1); an inner wall of the connector (2) is fixedly connected to a plurality of side nozzles (8); the top shower (7) is located inside the machine platform (1); the shower lifting device (3) is located on the machine platform (1); and the shower lifting device (3) comprises a connecting cavity (301).

2. The adjustment structure for a HDP top shower according to claim 1, characterized in that: The lower surface of the connecting cavity (301) is fixedly connected to a mounting tube (304), the lower end of the mounting tube (304) is in contact with the upper surface of the machine platform (1), the upper surface of the connecting cavity (301) is fixedly connected to two air inlet components (302), the inner wall of the connecting cavity (301) is fixedly connected to an air inlet pipe (303), the inner wall of the air inlet pipe (303) is in communication with the air inlet components (302), and the lower surface of the air inlet pipe (303) is provided with an air inlet hole (305).

3. The adjustment structure for a HDP top shower according to claim 2, characterized in that: The inner wall of the air inlet hole (305) is provided with a connecting hole (308), the inner wall of the air inlet hole (305) is provided with three limiting grooves (309), the limiting grooves (309) are connected to the connecting hole (308), and the outer wall of the air inlet pipe (303) is provided with three limiting holes (310), the limiting holes (310) are connected to the limiting grooves (309).

4. The adjustment structure for a HDP top shower according to claim 3, characterized in that: An insert rod (311) is slidably inserted into the inner wall of the limiting hole (310), and an adjustment column (306) is slidably inserted into the inner wall of the air inlet hole (305). The adjustment column (306) is composed of a cylinder and a frustum, and the lower end of the adjustment column (306) is connected to the top shower head (7).

5. The adjustment structure for HDP top shower according to claim 4, characterized in that: Three positioning pins (307) are fixedly connected to the outer wall of the adjustment column (306), and the positioning pins (307) are slidably connected to the inner wall of the limiting groove (309). An insertion hole (319) is provided at one end of the positioning pin (307) away from the adjustment column (306), and the insertion hole (319) is adapted to the size of the insertion rod (311).

6. The adjustment structure for a HDP top shower according to claim 5, characterized in that: One end of the insertion rod (311) close to the insertion hole (319) is fixedly connected to a guide block (312), and the guide block (312) has a conical structure.

7. The adjustment structure for a HDP top shower according to claim 5, characterized in that: One end of the three plug rods (311) is fixedly connected to a connecting plate (313), one side of the connecting plate (313) is fixedly connected to a partition (314), a threaded rod (315) is threadedly penetrated through the surface of the partition (314), and one end of the threaded rod (315) is rotatably connected to the outer wall of the air intake pipe (303).

8. The adjustment structure for a HDP top shower according to claim 7, characterized in that: A guide rod (316) is slidably penetrated through the surface of the partition plate (314), and one end of the guide rod (316) is fixedly connected to the outer wall of the air inlet pipe (303).

9. The adjustment structure for a HDP top shower according to claim 5, characterized in that: The arc surface of the adjustment column (306) is provided with an annular hole (317), the inner wall of the annular hole (317) is sleeved with a sealing ring (318), and the outer wall of the sealing ring (318) is in contact with the inner wall of the air inlet hole (305).

10. The adjustment structure for HDP top shower according to claim 5, characterized in that: The upper surface of the machine (1) is provided with a shower rotating device (4), the shower rotating device (4) comprising a welding plate (401), the lower surface of the welding plate (401) being fixedly connected to the upper surface of the machine (1), a servo motor (402) being fixedly connected to one side of the welding plate (401), the output end of the servo motor (402) being fixedly connected to a driving gear (403), a driven gear ring (404) being rotatably connected to the upper surface of the machine (1), the driven gear ring (404) being meshed with the driving gear (403), the upper surface of the driven gear ring (404) being provided with two positioning holes (405), the inner walls of the positioning holes (405) being fitted with two positioning plates (409), and the sides of the two positioning plates (409) close to each other being fixedly connected to the outer wall of the mounting tube (304).

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