PVD magnetron magnetic field automatic scanning device and method

Abstract

The invention discloses a PVD magnetron magnetic field automatic scanning device and method, the magnetic field automatic scanning device comprises a PVD magnetic circuit module, the PVD magnetic circuit module is connected with a servo motor and can be driven by the servo motor to rotate, a linear motor module is arranged above the PVD magnetic circuit module, and the linear motor module is connected with the servo motor. A Teslameter probe is arranged on the linear motor module, the Teslameter probe can do translational motion along the linear motor module, and a magnetic circuit shielding cover is arranged below the Teslameter probe and surrounds the PVD magnetic circuit module. The PVD magnetron magnetic field automatic scanning device and method provided by the invention have the advantages of high measurement efficiency, high precision, small error, low cost, strong adaptability and the like.

Description

Technical Field

[0001] The present invention relates to a magnetic field automatic scanning device and method, and in particular to a PVD (Physical Vapor Deposition) magnetron magnetic field automatic scanning device and method. Background Art

[0002] In the field of semiconductor manufacturing equipment, magnetron sputtering technology is an important thin film preparation technology. It uses magnetic field and plasma to bombard the target material in a vacuum environment, so that the atoms or molecules on the surface of the target material are knocked out and deposited on the substrate to form a thin film. In the magnetron sputtering process, the magnetic field distribution of the magnetic circuit directly affects the uniformity and quality of the film. Therefore, accurate measurement and analysis of the magnetic field distribution of the magnetic circuit is of great significance for optimizing the magnetron sputtering process and improving the quality of the film.

[0003] In the field of magnetic material detection technology, magnetic field measurement technology is one of the key detection methods. The existing technology mainly uses sensors such as Hall sensors or magnetometers to perform point measurements at different positions of the magnetic circuit, and then obtains the distribution of the magnetic field through manual recording and calculation. Although this method can obtain the distribution information of the magnetic field, there are many problems. First, due to the need for manual point measurement and recording, the measurement efficiency is low and cannot meet the efficient production needs of large-scale production lines. Secondly, due to the limited measurement accuracy, it is difficult to accurately obtain the distribution of the magnetic field, which affects the optimization of the magnetron sputtering process and the improvement of the film quality. In addition, the existing technology is also easily affected by the external environment, and the reproducibility and reliability of the measurement results are insufficient.

[0004] In the field of automatic control technology, automatic scanning detection technology is an important technical means. It uses automated equipment to automatically scan the object to be measured, and collects and processes measurement data in real time, thereby achieving efficient and accurate measurement. This technology has been widely used in many fields, but in the field of magnetic material detection, especially in the detection of magnetic circuits and magnetic fields of semiconductor manufacturing equipment, there are still some technical difficulties. For example, the general detection equipment does not match the detection magnetic circuit, and the cost of customized scanning measurement heads and robotic arms is too high, which makes it difficult to promote and apply them on large-scale production lines. Therefore, it is urgent to develop a new magnetic circuit and magnetic field automatic scanning detection method and equipment to improve measurement efficiency, accuracy and reliability, and reduce costs. Summary of the invention

[0005] The technical problem to be solved by the present invention is to provide a PVD magnetron magnetic field automatic scanning device and method, which has the advantages of high measurement efficiency, high precision, small error, low cost, strong adaptability, etc.

[0006] The technical solution adopted by the present invention to solve the above-mentioned technical problems is to provide a PVD magnetron magnetic field automatic scanning device, including a PVD magnetic circuit module, wherein the PVD magnetic circuit module is connected to a servo motor and can rotate under the drive of the servo motor, a linear motor module is arranged above the PVD magnetic circuit module, a Tesla meter probe is arranged on the linear motor module, and the Tesla meter probe can translate along the linear motor module, and a magnetic circuit shielding cover is arranged around the PVD magnetic circuit module below the Tesla meter probe.

[0007] Furthermore, the magnetic circuit shielding cover is in the shape of a hollow disc and is fixed on a workbench. An operation panel and a display are also provided on the workbench. The servo motor, the linear motor module and the display are electrically connected to a control electrical box.

[0008] Furthermore, a bearing support and a motor support are fixedly provided on the magnetic circuit shielding cover, a deep groove ball bearing is fixed in the bearing support, a rotating shaft is installed in the deep groove ball bearing, the PVD magnetic circuit module is pressed and fixed on the rotating shaft through a magnetic circuit fixing threaded ring, and the motor shaft of the servo motor is connected to the rotating shaft to drive the PVD magnetic circuit module to rotate; the axial end face of the deep groove ball bearing is pressed and fixed in the bearing support through a bearing pressure plate, and the servo motor is fixed on the motor support.

[0009] Furthermore, the PVD magnetic circuit module is composed of multiple pairs of cylindrical magnets arranged at equal intervals, and the N and S poles of two adjacent pairs of cylindrical magnets are facing opposite directions. The multiple pairs of cylindrical magnetic columns are installed between the magnetic circuit polar plate and the magnetic circuit lower pole plate. There is a cylindrical boss on the top of the magnetic column. The cylindrical magnetic column is installed in the upper pole plate magnetic column limiting hole through the top boss. The magnetic circuit polar plate and the magnetic circuit lower pole plate are connected by fastening screws, and the PVD magnetic circuit module is installed on the rotating shaft through the lower pole plate mounting hole and is pressed and fixed by a magnetic circuit fixing threaded ring.

[0010] Furthermore, the cylindrical magnetic column is a cylindrical neodymium iron boron magnetic column, and the magnetic circuit shielding cover is made of a non-magnetic metal shielding material 6061 alloy plus a nickel-based surface coating process.

[0011] Furthermore, the linear motor module includes a module guide rail, a slider, a driving transmission wheel and a driven transmission wheel. A module base is fixed on the module guide rail, a module motor is installed on the module base, the main shaft of the module motor is connected to the driving transmission wheel through a coupling, the driving transmission wheel and the driven transmission wheel are connected by a transmission steel belt, the slider is connected to the transmission steel belt, and the Tesla meter probe is installed on the slider.

[0012] Furthermore, the linear motor module is fixedly connected to a module fixing plate via a module mounting block, and the module fixing plate is fixed on the magnetic circuit shielding cover.

[0013] In order to solve the above technical problems, the present invention also provides a PVD magnetron magnetic field automatic scanning method, using the above-mentioned PVD magnetron magnetic field automatic scanning device, the automatic scanning method includes the following steps: S1) using a servo motor to drive the PVD magnetic circuit module to rotate around the rotation center; S2) controlling the Tesla meter probe to make a translational movement on the linear motor module, and performing magnetic field scanning and measurement along the rotation radius of the PVD magnetic circuit module; S3) after the Tesla meter probe scans the magnetic field on the length of the rotation radius, the servo motor drives the PVD magnetic circuit module to rotate an angle, and the Tesla meter probe continues to perform magnetic field scanning and measurement on the rotation radius until the magnetic circuit module data within the range of 360° is completed; S4) converting the collected polar coordinate magnetic field data into rectangular coordinate data to form a magnetic field vector diagram or cloud diagram within the entire magnetic circuit range, and completing the automatic scanning of the magnetic field of the entire magnetic circuit.

[0014] Furthermore, in step S2, the Tesla meter probe takes a measurement point at intervals of 0.05-0.1 mm on the rotation radius, and each measurement starts from the rotation center of the magnetic circuit along the radial direction until it moves to the edge of the magnetic circuit.

[0015] Furthermore, in step S3, the servo motor drives the PVD magnetic circuit module to rotate 0.5°-1° each time.

[0016] Compared with the prior art, the present invention has the following beneficial effects: 1. Improve measurement efficiency and solve the problem of low efficiency of traditional magnetic field measurement methods: The present invention adopts automatic scanning detection technology, automatically scans the magnetic circuit through automated equipment, and collects and processes measurement data in real time, thereby greatly improving measurement efficiency and meeting the high-efficiency production needs of large-scale production lines. 2. Improve measurement accuracy and solve the problem of limited accuracy of traditional magnetic field measurement methods: The present invention adopts a Tesla meter probe to measure the magnetic field, and can take a measurement point every 0.1mm or shorter, so as to obtain a more accurate magnetic field distribution. At the same time, through a series of data calculations and conversions by the computer, the polar coordinate magnetic field data is converted into rectangular coordinate data to form a magnetic field vector diagram or cloud map within the entire range of the magnetic circuit, further improving the measurement accuracy. 3. Reduce manual measurement errors: The present invention adopts automated equipment for measurement, avoids errors caused by manual measurement, and improves the accuracy and reliability of measurement results. 4. Reduce costs: The equipment cost of the present invention is low, and it is easy to promote and apply on large-scale production lines, which is conducive to reducing production costs and improving market competitiveness. 5. Improve the measurement range and data density: The present invention can complete denser data collection by reducing the rotation angle and the distance between the linear measurement points each time, thereby improving the measurement range and data density, and providing richer data support for the optimization of the magnetic circuit and the improvement of the film quality. 6. Strong adaptability: The device of the present invention can adapt to magnetic circuits of different sizes and shapes, and has a wide range of application prospects. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of the PVD magnetron magnetic field automatic scanning device of the present invention; Figure 2 for Figure 1 Schematic diagram of the coordination between the rotary drive and linear motor modules; Figure 3 It is a schematic diagram of the structure of the PVD magnetic circuit module in the PVD magnetron magnetic field automatic scanning device of the present invention; Figure 4 for Figure 1 Schematic diagram of the cross-sectional structure of the linear motor module.

[0018] The markings in the figure are: 1. Servo motor; 2. Motor support; 3. Magnetic circuit fixing thread ring; 4. Support fixing screw; 5. PVD magnetic circuit module; 6. Magnetic circuit shielding cover; 7. Linear motor module; 8. Bearing seat screw; 9. Tesla meter probe; 10. Probe fixing plate; 11. Module fixing plate; 12. Bearing support; 13. Deep groove ball bearing; 14. Bearing pressure plate; 15. Rotating shaft; 16. Control box; 17. Operation panel; 18. Display; 19. Fixing plate screw; 20. Module fixing plate screw; 5-1, magnetic circuit upper pole plate; 5-2, cylindrical magnetic column; 5-3, magnetic circuit lower pole plate; 5-4, fastening screw; 5-5, lower pole plate mounting hole; 5-6, upper pole plate magnetic column limit hole; 7-1, module motor; 7-2, coupling; 7-3, active transmission wheel; 7-4, transmission steel belt; 7-5, module guide rail; 7-6, slider; 7-7, slider screw hole; 7-8, driven transmission wheel; 7-9, slider screw; 7-10, module mounting block; 7-11, module base. DETAILED DESCRIPTION

[0019] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0020] See also Figure 1 , Figure 2 and Figure 4The PVD magnetron magnetic field automatic scanning device provided by the present invention comprises a PVD magnetic circuit module 5, wherein the PVD magnetic circuit module 5 is composed of cylindrical magnets with different N and S polarities and arranged according to certain rules, so as to form a spatial magnetic field required by the PVD equipment process; at the same time, the PVD magnetic circuit module 5 is connected to the servo motor 1 through a rotating shaft 15, and can rotate under the drive of the servo motor 1, a linear motor module 7 is arranged above the PVD magnetic circuit module 5, and a Tesla meter probe 9 is arranged on the slider 7-6 of the linear motor module 7, so that the Tesla meter probe 9 can translate along the module guide rail 7-5 of the linear motor module 7, and a magnetic circuit shielding cover 6 is arranged around the PVD magnetic circuit module 5 below the Tesla meter probe 9. The magnetic circuit shielding cover 6 of the present invention is a hollow disc, and the magnetic circuit shielding cover 6 is fixed on a workbench, and an operation panel 17 and a display 18 are also arranged on the workbench, and the servo motor 1, the module motor 7-1, the Tesla meter probe 9 and the display 18 are all electrically connected to the control electric box 16.

[0021] The PVD magnetron magnetic field automatic scanning device provided by the present invention comprises a bearing support 12 and a motor support 2 fixedly arranged on the magnetic circuit shielding cover 6, the bearing support 12 is fixed to the magnetic circuit shielding cover 6 by a bearing support screw 8, a deep groove ball bearing 13 is installed in the bearing support 12, a rotating shaft 15 is installed in the deep groove ball bearing 13, the PVD magnetic circuit module 5 is pressed and fixed on the rotating shaft 15 by a magnetic circuit fixing threaded ring 3 to ensure a firm fixation so as to generate a stable rotating magnetic field subsequently; the motor shaft of the servo motor 1 is connected to the rotating shaft 15 and drives the PVD magnetic circuit module 5 to rotate; the axial end face of the deep groove ball bearing 13 is pressed and fixed in the bearing support 12 by a bearing pressure plate 14, the servo motor 1 is fixed on the motor support 2, and the motor support 2 is fixedly connected to the magnetic circuit shielding cover 6 by a support fixing screw 4.

[0022] Please continue to see Figure 3 As a preferred embodiment, the PVD magnetic circuit module of the present invention is composed of a plurality of pairs of cylindrical magnetic columns 5-2 arranged at equal intervals, and the N and S poles of two adjacent pairs of cylindrical magnetic columns 5-2 are oppositely oriented. The plurality of pairs of cylindrical magnetic columns 5-2 are installed between the magnetic circuit pole plate 5-1 and the magnetic circuit lower pole plate 5-3. The magnetic column 5-2 has a cylindrical boss on the top, and the magnetic column 5-2 is installed in the upper pole plate magnetic column limiting hole 5-6 through the top boss. The magnetic circuit pole plate 5-1 and the magnetic circuit lower pole plate 5-3 are connected by fastening screws 5-4, and the PVD magnetic circuit module 5 is installed on the rotating shaft 15 through the lower pole plate mounting hole 5-5 and is pressed and fixed by the magnetic circuit fixing threaded ring 3.

[0023] Please continue to see Figure 4As a preferred embodiment, the linear motor module 7 of the present invention includes a module guide rail 7-5, a slider 7-6, an active transmission wheel 7-3 and a driven transmission wheel 7-8, the module guide rail 7-5 is fixed with a module base 7-11, the module base 7-11 is installed with a module motor 7-1, the main shaft of the module motor 7-1 is connected to the active transmission wheel 7-3 through a coupling 7-2, the active transmission wheel 7-3 and the driven transmission wheel 7-8 are connected by a transmission steel belt 7-4, and the slider 7-6 is connected to the transmission steel belt 7-4 through a slider screw 7-9.

[0024] As a preferred embodiment, the Tesla meter probe 9 of the present invention is fixed on the slider 7-6 of the linear motor module 7 through the probe fixing plate 10 and the fixing plate screws 19, the slider 7-6 is provided with a slider screw hole 7-7, the probe fixing plate 10 is fixedly connected to the slider 7-6 through the slider screw hole 7-7, the linear motor module 7 is fixedly connected to the module fixing plate 11 through the module mounting block 7-10, and the module fixing plate 11 is fixed to the magnetic circuit shielding cover 6 through the module fixing plate screws 20.

[0025] The PVD magnetron magnetic field automatic scanning device provided by the present invention has the following characteristics: 1. A Teslameter probe 9 and a linear motor module 7 are used in combination. The module motor 7-1 drives the Teslameter probe 9 to make a linear motion along the radial direction of the PVD magnetic circuit module 5. In addition, the servo motor 1 drives the PVD magnetic circuit module 5 to rotate. After the probe scans the magnetic field on the rotating radius, the servo motor 1 drives the magnetic circuit module to rotate an angle, and the Teslameter probe 9 continues to scan on the radius, and so on, thereby realizing the full-automatic scanning and detection of the magnetic circuit in the magnetic circuit module in the 360-degree direction, improving the measurement efficiency, and meeting the high-efficiency production requirements of large-scale production lines. The Teslameter probe 9 can take a measurement point every 0.1mm or shorter in the radial direction, accurately obtain the distribution of the magnetic field, thereby optimizing the magnetron sputtering process and improving the quality of the film.

[0026] 2. A magnetic circuit shielding cover 6 is arranged around the magnetic circuit under the Tesla meter probe 9, which effectively shields the interference of the external environment and improves the reproducibility and reliability of the measurement results. The magnetic circuit shielding cover 6 is made of non-magnetic metal shielding material 6061 alloy plus nickel-based surface coating process, which can effectively isolate external electromagnetic interference and ensure the accuracy of the measurement data.

[0027] 3. Servo motor 1 is used to drive the magnetic circuit module to rotate around the rotation center to realize data collection within the 360° range of the magnetic circuit. The rotation angle and the distance between the straight-line measurement points can be reduced each time to improve the accuracy and data density and complete more dense data collection.

[0028] 4. Use a series of computer data calculations and conversions to convert polar coordinate data into rectangular coordinate data, form a magnetic field vector diagram or cloud diagram within the entire range of the magnetic circuit, and complete the automatic scanning of the magnetic field of the entire magnetic circuit. Computer processing can quickly and accurately complete data calculation and conversion, improving measurement efficiency and accuracy.

[0029] 5. The use of Tesla meter 9, linear motor module 7, servo motor and other equipment has low cost and is easy to promote and apply on large-scale production lines, thereby reducing the cost of magnetic circuit and magnetic field measurement. Tesla meter 9, linear motor module 7, servo motor 1 and other equipment have a high performance-price ratio and can meet the high efficiency and low cost requirements of the production line.

[0030] 6. Measurements are made using automated equipment to avoid errors caused by manual measurement, improve measurement accuracy, and ensure the accuracy and consistency of measurement results.

[0031] This embodiment provides a method for automatically scanning and detecting a magnetic field of a semiconductor PVD magnetron sputtering magnetic circuit, and the specific steps are as follows: Step 1: Prepare the Tesla meter and Tesla meter probe 9, linear motor module 7 and servo motor 1. The Tesla meter model is TM-901EXP, with a measurement range of 0-30000 Gauss and a resolution of 0.1 Gauss. The customized model of linear motor module 7 is MDL40-MR1-200-20BL-EGW, with a maximum load of 3.84kg, a maximum linear speed of 0.25m / s and a maximum stroke of 0.5m.

[0032] Step 2: Set a magnetic circuit shielding cover 6 around the magnetic circuit below the Tesla meter probe 9. The magnetic circuit shielding cover 6 is made of non-magnetic metal shielding material 6061 alloy plus nickel-based surface coating process. As a protective cover, it can effectively isolate external electromagnetic interference and ensure the accuracy of measurement data.

[0033] Step 3: Use the servo motor 1 to drive the PVD magnetic circuit module 5 to rotate around the rotation center. The servo motor 1 model is MCS1H4-40B30CB-60F255-A331R, with a maximum torque of 26.8Nm, a maximum speed of 240RPM, and a rated power of 400W.

[0034] Step 4: The Tesla meter probe 9 is measured at a specified height from the magnetic circuit, starting from the center of rotation of the magnetic circuit along the radial direction and moving to the edge of the magnetic circuit. The measurement height is the specified target surface height, such as 10mm, and the measurement point interval is 0.1mm or shorter.

[0035] Step 5: The magnetic circuit is driven by the bottom servo motor 1 to rotate the magnetic circuit module around the rotation center. After the magnetic circuit is rotated 1° or less, the second Tesla meter starts the second data collection, and the measurement point interval is 0.1mm.

[0036] Step 6: Repeat step 5 to complete the data collection of the magnetic circuit module within 360°.

[0037] Step 7: Use a series of computer data calculations and conversions to convert polar coordinate data into rectangular coordinate data, form a magnetic field vector diagram or cloud diagram within the entire range of the magnetic circuit, and complete automatic scanning of the magnetic field of the entire magnetic circuit.

[0038] The above are the specific steps of this embodiment. Through these steps, the automatic scanning and detection of the magnetic field of the semiconductor PVD magnetron sputtering magnetic circuit can be realized, thereby improving the measurement efficiency and accuracy, reducing manual errors, and reducing the measurement cost.

[0039] Although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art may make some modifications and improvements without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be based on the definition of the claims.

Claims

1. A PVD magnetron magnetic field automatic scanning device, comprising a PVD magnetic circuit module (5), characterized in that: The PVD magnetic circuit module (5) is connected to the servo motor (1) and can rotate under the drive of the servo motor (1). A linear motor module (7) is arranged above the PVD magnetic circuit module (5). A Tesla meter probe (9) is arranged on the linear motor module (7), and the Tesla meter probe (9) can translate along the linear motor module (7). A magnetic circuit shielding cover (6) is arranged below the Tesla meter probe (9) and around the PVD magnetic circuit module (5).

2. The PVD magnetron magnetic field automatic scanning device according to claim 1, characterized in that: The magnetic circuit shielding cover (6) is in the shape of a hollow disk. The magnetic circuit shielding cover (6) is fixed on a workbench. An operation panel (17) and a display (18) are also provided on the workbench. The servo motor (1), the linear motor module (7) and the display (18) are electrically connected to a control electric box (16).

3. The PVD magnetron magnetic field automatic scanning device according to claim 1, characterized in that: A bearing support (12) and a motor support (2) are fixedly arranged on the magnetic circuit shielding cover (6); a deep groove ball bearing (13) is fixed in the bearing support (12); a rotating shaft (15) is installed in the deep groove ball bearing (13); the PVD magnetic circuit module (5) is pressed and fixed on the rotating shaft (15) by a magnetic circuit fixing threaded ring (3); the motor shaft of the servo motor (1) is connected to the rotating shaft (15) to drive the PVD magnetic circuit module (5) to rotate; the axial end face of the deep groove ball bearing (13) is pressed and fixed in the bearing support (12) by a bearing pressure plate (14); and the servo motor (1) is fixed on the motor support (2).

4. The PVD magnetron magnetic field automatic scanning device according to claim 1, characterized in that: The PVD magnetic circuit module (5) is composed of a plurality of pairs of cylindrical magnetic columns (5-2) arranged at equal intervals, the N and S poles of two adjacent pairs of cylindrical magnetic columns (5-2) facing opposite directions, the plurality of pairs of cylindrical magnetic columns (5-2) being mounted between an upper magnetic circuit pole plate (5-1) and a lower magnetic circuit pole plate (5-3), the tops of the magnetic columns (5-2) being provided with cylindrical bosses, the cylindrical magnetic columns (5-2) being mounted in upper pole plate magnetic column limiting holes (5-6) via the top bosses, the upper magnetic circuit pole plate (5-1) and the lower magnetic circuit pole plate (5-3) being connected via fastening screws (5-4), the PVD magnetic circuit module (5) being mounted on a rotating shaft (15) via the lower pole plate mounting holes (5-5) and being pressed and fixed via a magnetic circuit fixing threaded ring (3).

5. The PVD magnetron magnetic field automatic scanning device according to claim 4, characterized in that: The cylindrical magnetic column (5-2) is a cylindrical neodymium iron boron magnetic column, and the magnetic circuit shielding cover (6) is made of a non-magnetic metal shielding material 6061 alloy plus a nickel-based surface coating process.

6. The PVD magnetron magnetic field automatic scanning device according to claim 1, characterized in that: The linear motor module (7) comprises a module guide rail (7-5), a slider (7-6), a driving transmission wheel (7-3) and a driven transmission wheel (7-8); a module machine base (7-11) is fixed on the module guide rail (7-5); a module motor (7-1) is mounted on the module machine base (7-11); a main shaft of the module motor (7-1) is connected to the driving transmission wheel (7-3) via a coupling (7-2); the driving transmission wheel (7-3) and the driven transmission wheel (7-8) are connected via a transmission steel belt (7-4); the slider (7-6) is connected to the transmission steel belt (7-4); and the Tesla meter probe (9) is mounted on the slider (7-6).

7. The PVD magnetron magnetic field automatic scanning device according to claim 6, characterized in that: The linear motor module (7) is fixedly connected to the module fixing plate (11) via a module mounting block (7-10), and the module fixing plate (11) is fixed to the magnetic circuit shielding cover (6) via module fixing plate screws (20).

8. A PVD magnetron magnetic field automatic scanning method, characterized in that: Using the PVD magnetron magnetic field automatic scanning device as claimed in claim 1, the automatic scanning method comprises the following steps: S1) using a servo motor (1) to drive the PVD magnetic circuit module (5) to perform rotational motion around a rotation center; S2) controlling the Tesla meter probe (9) to perform translational motion on the linear motor module (7) to perform magnetic field scanning measurement along the rotation radius of the PVD magnetic circuit module (5); S3) After the Tesla meter probe (9) has finished scanning the magnetic field on the length of the rotation radius, the servo motor (1) drives the PVD magnetic circuit module (5) to rotate an angle, and the Tesla meter probe (9) continues to scan and measure the magnetic field on the rotation radius until the magnetic circuit module data collection within the range of 360° is completed; S4) converts the collected magnetic field data on polar coordinates into rectangular coordinate data to form a magnetic field vector diagram or cloud diagram within the entire magnetic circuit, completing automatic scanning of the magnetic field of the entire magnetic circuit.

9. The PVD magnetron magnetic field automatic scanning method according to claim 8, characterized in that: In step S2, the Tesla meter probe (9) takes a measurement point at intervals of 0.05-0.1 mm on the rotation radius, and each measurement starts from the rotation center of the magnetic circuit along the radial direction until it moves to the edge of the magnetic circuit.

10. The PVD magnetron magnetic field automatic scanning method according to claim 8, characterized in that: In step S3, the servo motor (1) drives the PVD magnetic circuit module (5) to rotate 0.5°-1° each time.

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