Heavy-load piezoelectric deflection table

Abstract

The invention relates to the technical field of precision positioning tables, and discloses a heavy-load piezoelectric deflection table which comprises a shell, an amplification piezoelectric driver and a moving carrier plate. The shell comprises a hollow rectangular-ambulatory-plane rectangular ring cavity. And the amplification piezoelectric actuator is arranged in the rectangular ring cavity. And the amplification piezoelectric drivers comprise two X-axis amplification piezoelectric drivers, two Y-axis amplification piezoelectric drivers and four Z-axis amplification piezoelectric drivers. And the moving support plate is arranged above the amplification piezoelectric actuator and comprises a rectangular annular X-axis moving support plate, a rectangular annular Y-axis moving support plate and a rectangular annular Z-axis moving support plate. The XY-axis movement carrier plate comprises an X-axis movement carrier plate and a Y-axis movement carrier plate. The X-axis amplification piezoelectric actuator, the Y-axis amplification piezoelectric actuator and the Z-axis amplification piezoelectric actuator are connected in series in the X-axis plane, the Y-axis plane and the Y-axis direction, so that thetaX-axis deflection and thetaY-axis deflection and Z-axis linear motion are achieved. The system has the advantages of small series structure coupling, high bearing capacity, high closed-loop repeated positioning precision and high adaptability.

Description

Technical Field

[0001] The invention belongs to the technical field of precision positioning tables, and in particular relates to a large-load piezoelectric deflection table. Background Art

[0002] As the current level of science and technology continues to improve, the fields of ultra-precision machining and precision operations continue to be deeply studied, and there is a further research demand for precision motion. In the field of micro-nano precision machining, piezoelectric ceramic drivers are used more and more. The device can be used in semiconductor probe stations, high-performance nanopositioning systems in microscope systems, and nano-level positioning stages driven by piezoelectric ceramic motors. Piezoelectric positioning stages have been widely used in important fields such as micro-assembly, scanning probe microscopy, piezoelectric fast tool servo, and biological cell micro-manipulation due to their large output force, high resolution, and fast response speed. Existing piezoelectric positioning stages have problems such as small load capacity, low repeatability, large coupling, and poor adaptability.

[0003] Based on the above, the problem to be solved at present is: to provide a large-load piezoelectric deflection table that can realize deflection of the θX and θY axes and linear motion of the Z axis, with large load capacity, high repeatability, small coupling and strong adaptability. Summary of the invention

[0004] The purpose of the present invention is to provide a large-load piezoelectric deflection table, aiming to solve the problems in the prior art of small load capacity of the positioning platform, low repeatability, large coupling and poor adaptability.

[0005] The present invention is implemented in this way: a large-load piezoelectric deflection table comprises:

[0006] The housing comprises a bottom wall, an inner wall and an outer wall, wherein the bottom wall, the inner wall and the outer wall form a hollow rectangular ring cavity in the shape of a Chinese character “U”;

[0007] an amplifying piezoelectric driver, which is arranged in the rectangular annular cavity; the amplifying piezoelectric driver comprises two X-axis amplifying piezoelectric drivers and two Y-axis amplifying piezoelectric drivers arranged near the inner wall, and four Z-axis amplifying piezoelectric drivers arranged near the outer wall;

[0008] A moving carrier, which is arranged above the amplifying piezoelectric driver, wherein the moving carrier includes a rectangular ring-shaped XY axis moving carrier and a Z axis moving carrier in sequence from the middle to the periphery; the XY axis moving carrier includes two opposite X axis moving carriers and two opposite Y axis moving carriers;

[0009] One end of the Z-axis amplifying piezoelectric driver is fixedly connected to the bottom wall of the shell, and the other end of the Z-axis amplifying piezoelectric driver is connected to an edge of the Z-axis motion carrier through a first flexible hinge, and the four Z-axis amplifying piezoelectric drivers drive the four edges of the Z-axis motion carrier to realize Z-axis linear motion; one end of the X-axis amplifying piezoelectric driver is fixedly connected to an edge of the Z-axis motion carrier, and the other end of the X-axis amplifying piezoelectric driver is connected to an X-axis motion carrier through a second flexible hinge, and the two X-axis amplifying piezoelectric drivers drive the two X-axis motion carriers to realize X-axis deflection; one end of the Y-axis amplifying piezoelectric driver is fixedly connected to an edge of the Z-axis motion carrier, and the other end of the Y-axis amplifying piezoelectric driver is connected to a Y-axis motion carrier through a second flexible hinge, and the two Y-axis amplifying piezoelectric drivers drive the two Y-axis motion carriers to realize Y-axis deflection.

[0010] Furthermore, a guide hinge is provided between the X-axis amplifying piezoelectric driver and the Z-axis amplifying piezoelectric driver, and between the Y-axis amplifying piezoelectric driver and the Z-axis amplifying piezoelectric driver. The guide hinge is fixedly connected to the bottom wall of the shell and the Z-axis motion carrier plate, and is used to limit the left and right movement of the X-axis amplifying piezoelectric driver, the Y-axis amplifying piezoelectric driver and the Z-axis amplifying piezoelectric driver.

[0011] Furthermore, the guide hinge is a convex block, which includes a small rectangular block on the top and a large rectangular block on the bottom; the small rectangular block is provided with a threaded hole for connecting the Z-axis motion carrier with a screw; the upper part of the large rectangle is provided with a through hole, and the left and right upper parts of the through hole are respectively provided with a left flexible arm and a right flexible arm, and the lower part of the large rectangular block is provided with a threaded hole for connecting the shell with a screw.

[0012] Furthermore, four Z-axis amplifying piezoelectric drivers are arranged corresponding to the four sides of the Z-axis motion carrier respectively; the movable ends of the two X-axis amplifying piezoelectric drivers are arranged corresponding to the two X-axis motion carriers respectively, and the fixed ends of the X-axis amplifying piezoelectric drivers correspond to the Z-axis motion carrier; the movable ends of the two Y-axis amplifying piezoelectric drivers are arranged corresponding to the two Y-axis motion carriers respectively, and the fixed ends of the Y-axis amplifying piezoelectric drivers are opposite to the Z-axis motion carrier.

[0013] Furthermore, the second flexible hinge is connected to the middle of the X-axis motion carrier or the Y-axis motion carrier respectively.

[0014] Further, the X-axis amplified piezoelectric driver, the Y-axis amplified piezoelectric driver and the Z-axis amplified piezoelectric driver respectively include: an amplified piezoelectric driver body, a piezoelectric ceramic and a strain sensor;

[0015] The amplified piezoelectric driver body includes a first ceramic fixed end, four third flexible hinges, a first arc boss, a second ceramic fixed end and a second arc boss. The first ceramic fixed end, the first arc boss, the second ceramic fixed end and the second arc boss are connected in sequence to form a closed-loop hollow cavity, and the first ceramic fixed end and one end of the first arc boss, the other end of the first arc boss and the second ceramic fixed end, the second ceramic fixed end and one end of the second arc boss, and the other end of the second arc boss and the first ceramic fixed end are respectively connected by the third flexible hinge; the first arc boss and the second arc boss are symmetrically arranged up and down, and the four third flexible hinges are symmetrically arranged on the left and right sides of the first arc boss and the second arc boss; the two ends of the piezoelectric ceramic are respectively in contact with the first ceramic fixed end and the second ceramic fixed end, and the center line of the first ceramic fixed end and the second ceramic fixed end is arranged at an angle α with the horizontal line, and the outer side surfaces of the four third flexible hinges and the two arc bosses are all planes, and a number of strain sensors are attached to the upper surface and the lower surface of the amplified piezoelectric driver body, and the strain sensors are electrically connected to the control system.

[0016] Further, four strain sensors are respectively arranged on the upper surface and the lower surface of each amplified piezoelectric actuator, and the four strain sensors are arranged corresponding to the third flexible hinges, and are arranged in groups of two and symmetrically distributed. Further, the piezoelectric ceramic is a low-voltage stacked co-fired piezoelectric ceramic.

[0017] Furthermore, fixing holes are provided around the shell for fixed connection with other mechanisms.

[0018] The large-load piezoelectric deflection table of the present invention is connected in series in the X-axis, Y-axis plane, and Y-axis direction through multiple X-axis amplifying piezoelectric drivers, Y-axis amplifying piezoelectric drivers, and Z-axis amplifying piezoelectric drivers: 1. Deflection of the θX and θY axes and linear motion of the Z axis are realized to achieve three-dimensional precision positioning; 2. The coupling of the series structure is small; 3. The load-bearing capacity is greatly improved, and the load-bearing capacity can reach 5KG.

[0019] The large-load piezoelectric deflection table of the present invention has high closed-loop repeat positioning accuracy, which can reach 0.006% FS, and is suitable for various high-precision application scenarios. The center of the large-load piezoelectric deflection table is set to be hollow, which can transmit light, so it can also be used in scenes such as prism position adjustment and beam deflection, and has strong functionality. The overall structure of the present invention is reasonable, compact, and small in size, and is easy to install in other application systems.

[0020] The amplified piezoelectric driver of the present invention utilizes the inverse piezoelectric effect principle of piezoelectric technology and cooperates with the structural design of the amplified piezoelectric driver body to achieve the characteristics of high precision, small size, no coupling, fast transmission speed, etc. The present invention uses a strain sensor to perform real-time detection and feedback of the position, which can eliminate the hysteresis and creep characteristics of piezoelectric ceramics and achieve nanometer-level precision positioning control. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the three-dimensional structure of the large-load piezoelectric deflection table provided by the present invention;

[0022] Figure 2 It is a top view of the large-load piezoelectric deflection table provided by the present invention;

[0023] Figure 3 The present invention provides Figure 2 Schematic diagram of the cross-sectional structure in the AA direction;

[0024] Figure 4 The present invention provides Figure 2 Schematic diagram of the cross-sectional structure in the BB direction;

[0025] Figure 5 The present invention provides Figure 2 Schematic diagram of the cross-sectional structure in CC direction;

[0026] Figure 6 It is a schematic diagram of the three-dimensional structure of the housing provided by the present invention;

[0027] Figure 7 is a top view of a combination of a housing and an amplified piezoelectric driver provided by the present invention;

[0028] Figure 8 It is a front view of the Z-axis magnified piezoelectric actuator provided by the present invention;

[0029] Fig. 9 is a front view of the guide hinge provided by the present invention;

[0030] In the figure: 1-shell; 11-bottom wall; 12-inner wall; 13-outer wall; 14-fixing hole; 2-enlarged piezoelectric driver; 21-X-axis enlarged piezoelectric driver; 22-Y-axis enlarged piezoelectric driver; 23-Z-axis enlarged piezoelectric driver; 200-enlarged piezoelectric driver body; 201-first ceramic fixed end; 202-first arc boss; 203-second ceramic fixed end; 204-second arc boss; 205-third flexible hinge; 210-piezoelectric ceramic; 220-strain sensor; 3-moving carrier; 31-XY axis moving carrier; 311-X axis moving carrier; 312-Y axis moving carrier; 32-Z axis moving carrier; 4-first flexible hinge; 5-second flexible hinge; 6-guide hinge; 61-first through hole; 62-left flexible arm; 63-right flexible arm; 7-screw. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0032] The implementation of the present invention is described in detail below in conjunction with specific embodiments.

[0033] The same or similar numbers in the drawings of this embodiment correspond to the same or similar parts; in the description of the present invention, it should be understood that if the terms "upper", "lower", "left", "right" and the like indicate directions or positional relationships based on the directions or positional relationships shown in the drawings, it is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, the terms describing the positional relationship in the drawings are only used for illustrative purposes and cannot be understood as limitations on this patent. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0034] Reference Figure 1-9 The figure shows a preferred embodiment of the present invention.

[0035] The large load piezoelectric deflection table includes: a housing 1, an amplified piezoelectric driver 2 and a moving carrier 3, Figure 1-2 The housing 1 includes a bottom wall 11, an inner wall 12 and an outer wall 13. Figure 6 The bottom wall 11, the inner wall 12 and the outer wall 13 form a hollow U-shaped rectangular ring cavity that opens upward, that is, a through hole for transmitting light is provided in the center of the housing 1, and the through hole is surrounded by the inner wall 12. The housing 1 is provided with fixing holes 14 around it for fixed connection with other mechanisms.

[0036] The amplified piezoelectric driver 2 is arranged in the rectangular ring cavity, referring to Figure 3 , 4 , 5, 7. The amplifying piezoelectric driver 2 includes 2 X-axis amplifying piezoelectric drivers 21, 2 Y-axis amplifying piezoelectric drivers 22 and 4 Z-axis amplifying piezoelectric drivers 23. The 2 X-axis amplifying piezoelectric drivers 21 and the 2 Y-axis amplifying piezoelectric drivers 22 are arranged on the inner side of the rectangular annular cavity, close to the inner wall 12. The 4 Z-axis amplifying piezoelectric drivers 23 are arranged on the outer side of the X-axis amplifying piezoelectric driver 21 and the Y-axis amplifying piezoelectric driver 22, close to the outer wall 13. The rectangular annular cavity is formed by connecting two groups of parallel strip grooves end to end. The two X-axis amplifying piezoelectric drivers 21 are respectively arranged in one group of mutually parallel strip grooves, and the two Y-axis amplifying piezoelectric drivers 22 are respectively arranged in another group of mutually parallel strip grooves. The 4 Z-axis amplifying piezoelectric drivers 23 are arranged in the four strip grooves in a one-to-one correspondence.

[0037] The moving carrier 3 is arranged on the amplified piezoelectric driver 2 at the opening of the rectangular annular cavity. The moving carrier 3 includes a rectangular annular XY-axis moving carrier 31 and a Z-axis moving carrier 32 in sequence from the middle to the periphery, that is, a through hole is provided in the middle of the XY-axis moving carrier 31 and the Z-axis moving carrier 32. The size of the through hole of the XY-axis moving carrier 31 is equivalent to the size of the through hole in the middle of the housing 1. The size of the through hole of the Z-axis moving carrier 32 is slightly larger than the outer contour size of the XY-axis moving carrier 31.

[0038] The XY axis motion carrier 31 includes two opposite X axis motion carriers 311 and two opposite Y axis motion carriers 312. The four Z axis amplifying piezoelectric drivers 23 are arranged corresponding to the four sides of the Z axis motion carrier 32. The movable ends of the two X axis amplifying piezoelectric drivers 21 are arranged corresponding to the two X axis motion carriers 311, and the fixed end of the X axis amplifying piezoelectric driver 21 corresponds to the Z axis motion carrier 32. The movable ends of the two Y axis amplifying piezoelectric drivers 22 are arranged corresponding to the two Y axis motion carriers 312, and the fixed end of the Y axis amplifying piezoelectric driver 22 is opposite to the Z axis motion carrier 32.

[0039] One end (fixed end) of the Z-axis amplifying piezoelectric driver 23 is fixedly connected to the bottom wall 11 of the housing 1, and the other end (movable end) of the Z-axis amplifying piezoelectric driver 23 is connected to the corresponding edge of the Z-axis motion carrier 32 through the first flexible hinge 4. The four Z-axis amplifying piezoelectric drivers 23 are controlled so that the four Z-axis amplifying piezoelectric drivers 23 drive the four edges of the Z-axis motion carrier 32 to perform linear motion in the Z-axis direction. One end (fixed end) of the X-axis amplifying piezoelectric driver 21 is fixedly connected to one edge of the Z-axis motion carrier 32, and the other end (movable end) of the X-axis amplifying piezoelectric driver 21 is connected to an X-axis motion carrier 311 through the second flexible hinge 5. The two X-axis amplifying piezoelectric drivers 21 are controlled so that the two X-axis motion carriers 311 achieve X-axis deflection. One end (fixed end) of the Y-axis amplifying piezoelectric driver 22 is fixedly connected to one side of the Z-axis motion carrier 32, and the other end of the Y-axis amplifying piezoelectric driver 22 is connected to a Y-axis motion carrier 312 through a second flexible hinge 5. The two Y-axis amplifying piezoelectric drivers 22 are controlled to enable the two Y-axis motion carriers 312 to achieve Y-axis deflection. Preferably, the second flexible hinge 5 is respectively connected to the middle of the X-axis motion carrier 311 or the Y-axis motion carrier 312.

[0040] The function of the first flexible hinge 4 is to transmit the Z-direction motion between the Z-axis motion carrier 32 and the Z-axis amplifying piezoelectric driver 23, and eliminate the coupling effect between the Z-axis motion carrier 32 and the Z-axis amplifying piezoelectric driver 23 in the X-axis and Y-axis directions. The function of the second flexible hinge 5 is to convert the Z-direction displacement of the two X-axis amplifying piezoelectric drivers 21 into the rotation of the XY-axis motion carrier 31 around the X-axis, and convert the Z-direction displacement of the two Y-axis amplifying piezoelectric drivers 22 into the rotation of the XY-axis motion carrier 31 around the Y-axis. The rotation of the XY-axis motion carrier 31 does not affect the movement of the X-axis amplifying piezoelectric driver 21 and the Y-axis amplifying piezoelectric driver 22 themselves.

[0041] The Z-axis amplifying piezoelectric driver 23 drives the Z-axis motion carrier 32 to move linearly along the Z-axis. Through the series mechanism, the Z-axis motion carrier 32 drives the X-axis amplifying piezoelectric driver 21, the Y-axis amplifying piezoelectric driver 22, and indirectly drives the XY-axis motion carrier 31, so that the XY-axis motion carrier 31 synchronously moves linearly along the Z-axis. By controlling the actions of the two X-axis amplifying piezoelectric drivers 21 and the two Y-axis amplifying piezoelectric drivers 22, the XY-axis motion carrier 31 realizes X-axis deflection and Y-axis deflection respectively. At the same time, the series structure of the present invention has small coupling, which greatly improves the load-bearing capacity, and the load-bearing capacity can reach 5KG.

[0042] The Z-axis amplifying piezoelectric driver 23 and the bottom wall 11 of the housing 1, the fixed end of the X-axis amplifying piezoelectric driver 21 and the Z-axis motion carrier 32, and the fixed end of the Y-axis amplifying piezoelectric driver 22 and the Z-axis motion carrier 32 can be fixedly connected by screws 7 in a threaded manner. Preferably, two screws are symmetrically arranged at each fixed end.

[0043] A guide hinge 6 is provided between the X-axis amplifying piezoelectric driver 21 and the Z-axis amplifying piezoelectric driver 23, and between the Y-axis amplifying piezoelectric driver 22 and the Z-axis amplifying piezoelectric driver 23. The guide hinge 6 is fixedly connected to the bottom wall 11 of the housing 1 and the Z-axis motion carrier 32. When the X-axis amplifying piezoelectric driver 21, the Y-axis amplifying piezoelectric driver 22 and the Z-axis amplifying piezoelectric driver 23 move up and down along the Z-axis, a certain left and right movement (lateral movement) may be generated. By setting the guide hinge 6, the XY-axis motion carrier 31 and the Z-axis motion carrier 32 can be guided, and the lateral movement of the X-axis amplifying piezoelectric driver 21, the Y-axis amplifying piezoelectric driver 22, the Z-axis amplifying piezoelectric driver 23, the XY-axis motion carrier 31 and the Z-axis motion carrier 32 can be limited, thereby ensuring the closed-loop linearity and high positioning precision.

[0044] The guide hinge 6 is preferably a convex block, referring to Fig. 9The convex block includes a small rectangular block at the top and a large rectangular block at the bottom. The small rectangular block is provided with a threaded hole for connecting the Z-axis motion carrier 32 with the screw 7, and preferably two pairs of matching screws 7 and threaded holes are symmetrically arranged. A first through hole 61 is provided at the top of the large rectangle. A left flexible arm 62 and a right flexible arm 63 are respectively provided at the upper left and upper right of the first through hole 61. A threaded hole for connecting the housing 1 with the screw 7 is provided at the bottom of the large rectangular block, and preferably three pairs of matching screws 7 and threaded holes are arranged.

[0045] The X-axis amplified piezoelectric driver 21, the Y-axis amplified piezoelectric driver 22, and the Z-axis amplified piezoelectric driver 23 respectively include: an amplified piezoelectric driver body 200, a piezoelectric ceramic 210, and a strain sensor 220. Figure 8 .

[0046] The amplified piezoelectric driver body 200 includes a first ceramic fixed end 201, four third flexible hinges 205, a first arc boss 202, a second ceramic fixed end 203 and a second arc boss 204. The first ceramic fixed end 201, the first arc boss 202, the second ceramic fixed end 203 and the second arc boss 204 are sequentially connected to form a closed-loop hollow cavity, and the first ceramic fixed end 201 and one end of the first arc boss 202, the other end of the first arc boss 202 and the second ceramic fixed end 203, the second ceramic fixed end 203 and one end of the second arc boss 204, and the other end of the second arc boss 204 and the first ceramic fixed end 201 are respectively connected by the third flexible hinge 205. The first arc boss 202 and the second arc boss 204 are arranged symmetrically up and down. The four third flexible hinges 205 are symmetrically arranged on the left and right sides of the first arc boss 202 and the second arc boss 204. The two ends of the piezoelectric ceramic 210 are in contact with the first ceramic fixed end 201 and the second ceramic fixed end 203 respectively, and the center line of the first ceramic fixed end 201 and the second ceramic fixed end 203 is arranged at an angle α to the horizontal line. The outer sides of the four third flexible hinges 205 and the two arc bosses are all planes, and a number of strain sensors 220 are attached to the upper surface and the lower surface of the amplified piezoelectric driver body 200, and the strain sensors 220 are electrically connected to the control system. According to the inverse piezoelectric effect of ceramics: when a voltage is applied to the polarization direction of the piezoelectric ceramic 210, the piezoelectric ceramic 210 will deform and displace accordingly, and the number of piezoelectric ceramics 210 is set according to the required piezoelectric displacement. For example, the number of piezoelectric ceramics 210 of the X-axis amplified piezoelectric driver 21 and the Y-axis amplified piezoelectric driver 22 can be set to be less than the number of piezoelectric ceramics 210 of the Z-axis amplified piezoelectric driver 23.

[0047] Preferably, four strain sensors 220 are respectively arranged on the upper surface and the lower surface of each amplified piezoelectric driver 2, and the four strain sensors 220 on the upper surface and the lower surface are arranged corresponding to the third flexible hinge 205, and are arranged symmetrically in groups of two. The piezoelectric ceramic 210 is preferably a low-voltage stacked co-fired piezoelectric ceramic. The piezoelectric ceramic 210 is a low-voltage stacked co-fired piezoelectric ceramic. The low-voltage stacked co-fired piezoelectric ceramic has excellent performance and ultra-long service life, and the special insulating material ensures the maximum output of dynamic performance under harsh conditions.

[0048] The large-load piezoelectric deflection table of the present invention has high closed-loop repeat positioning accuracy, which can reach 0.006% FS, and is suitable for various high-precision application scenarios. The overall structure of the present invention is reasonable, compact, and small in size, and it is easy to be installed in other application systems.

[0049] The present invention is not limited thereto; any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the protection scope of the present invention.

Claims

1. A large-load piezoelectric deflection table, characterized in that: include: A shell (1) comprising a bottom wall (11), an inner wall (12) and an outer wall (13), wherein the bottom wall (11), the inner wall (12) and the outer wall (13) form a hollow rectangular ring cavity in the shape of a Chinese character “U”; an amplifying piezoelectric driver (2) disposed in the rectangular annular cavity; the amplifying piezoelectric driver (2) comprises two X-axis amplifying piezoelectric drivers (21) and two Y-axis amplifying piezoelectric drivers (22) disposed near the inner wall (12), and four Z-axis amplifying piezoelectric drivers (23) disposed near the outer wall (13); A moving carrier (3) is arranged above the amplifying piezoelectric driver (2), wherein the moving carrier (3) includes, from the middle to the periphery, a rectangular ring-shaped XY-axis moving carrier (31) and a Z-axis moving carrier (32); the XY-axis moving carrier (31) includes two opposite X-axis moving carriers (311) and two opposite Y-axis moving carriers (312); One end of the Z-axis amplifying piezoelectric driver (23) is fixedly connected to the bottom wall (11) of the housing (1), and the other end of the Z-axis amplifying piezoelectric driver (23) is connected to an edge of the Z-axis motion carrier (32) via a first flexible hinge (4). The four Z-axis amplifying piezoelectric drivers (23) drive the four edges of the Z-axis motion carrier (32) to achieve Z-axis linear motion. One end of the X-axis amplifying piezoelectric driver (21) is fixedly connected to an edge of the Z-axis motion carrier (32), and the other end of the X-axis amplifying piezoelectric driver (21) is connected to an edge of the Z-axis motion carrier (32) via a first flexible hinge (4). The second flexible hinge (5) is connected to an X-axis motion carrier plate (311), and the two X-axis amplifying piezoelectric drivers (21) drive the two X-axis motion carrier plates (311) to achieve X-axis deflection; one end of the Y-axis amplifying piezoelectric driver (22) is fixedly connected to an edge of the Z-axis motion carrier plate (32), and the other end of the Y-axis amplifying piezoelectric driver (22) is connected to a Y-axis motion carrier plate (312) through the second flexible hinge (5), and the two Y-axis amplifying piezoelectric drivers (22) drive the two Y-axis motion carrier plates (312) to achieve Y-axis deflection.

2. The large-load piezoelectric deflection stage according to claim 1, characterized in that: A guide hinge (6) is provided between the X-axis amplifying piezoelectric driver (21) and the Z-axis amplifying piezoelectric driver (23), and between the Y-axis amplifying piezoelectric driver (22) and the Z-axis amplifying piezoelectric driver (23). The guide hinge (6) is fixedly connected to the bottom wall (11) of the housing (1) and the Z-axis motion carrier (32), and is used to limit the left-right movement of the X-axis amplifying piezoelectric driver (21), the Y-axis amplifying piezoelectric driver (22), and the Z-axis amplifying piezoelectric driver (23).

3. The large-load piezoelectric deflection stage according to claim 2, characterized in that: The guide hinge (6) is a convex block, comprising a small rectangular block at the top and a large rectangular block at the bottom; the small rectangular block is provided with a threaded hole for cooperating with a screw (7) to connect the Z-axis motion carrier plate (32); the upper part of the large rectangular block is provided with a first through hole (61), the upper left and upper right of the first through hole (61) are provided with a left flexible arm (62) and a right flexible arm (63), respectively; the lower part of the large rectangular block is provided with a threaded hole for cooperating with a screw (7) to connect the housing (1).

4. The large-load piezoelectric deflection stage according to claim 1, characterized in that: Four Z-axis amplifying piezoelectric drivers (23) are arranged respectively corresponding to the four sides of the Z-axis motion carrier (32); the movable ends of the two X-axis amplifying piezoelectric drivers (21) are arranged respectively corresponding to the two X-axis motion carriers (311), and the fixed ends of the X-axis amplifying piezoelectric drivers (21) correspond to the Z-axis motion carrier (32); and the movable ends of the two Y-axis amplifying piezoelectric drivers (22) are arranged respectively corresponding to the two Y-axis motion carriers (312), and the fixed ends of the Y-axis amplifying piezoelectric drivers (22) correspond to the Z-axis motion carrier (32).

5. The large-load piezoelectric deflection stage according to claim 1, characterized in that: The second flexible hinge (5) is respectively connected to the middle of the X-axis motion carrier plate (311) or the Y-axis motion carrier plate (312).

6. The large-load piezoelectric deflection stage according to claim 1, characterized in that: The X-axis amplifying piezoelectric driver (21), the Y-axis amplifying piezoelectric driver (22), and the Z-axis amplifying piezoelectric driver (23) respectively comprise: an amplifying piezoelectric driver body (200), a piezoelectric ceramic (210), and a strain sensor (220); The amplified piezoelectric driver body (200) comprises a first ceramic fixed end (201), four third flexible hinges (205), a first arc boss (202), a second ceramic fixed end (203) and a second arc boss (204); the first ceramic fixed end (201), the first arc boss (202), the second ceramic fixed end (203) and the second arc boss (204) are sequentially connected to form a closed-loop hollow cavity; and there are respective openings between the first ceramic fixed end (201) and one end of the first arc boss (202), between the other end of the first arc boss (202) and the second ceramic fixed end (203), between the second ceramic fixed end (203) and one end of the second arc boss (204), and between the other end of the second arc boss (204) and the first ceramic fixed end (201). The piezoelectric ceramic (210) is connected via a third flexible hinge (205); the first arc boss (202) and the second arc boss (204) are symmetrically arranged up and down, and four third flexible hinges (205) are symmetrically arranged on the left and right sides of the first arc boss (202) and the second arc boss (204); the two ends of the piezoelectric ceramic (210) are in contact with the first ceramic fixed end (201) and the second ceramic fixed end (203), respectively, and the center line of the first ceramic fixed end (201) and the second ceramic fixed end (203) is arranged at an angle α to the horizontal line; the outer side surfaces of the four third flexible hinges (205) and the two arc bosses are all planes; a plurality of strain sensors (220) are attached to the upper surface and the lower surface of the amplified piezoelectric driver body (200), and the strain sensors (220) are electrically connected to the control system.

7. The large-load piezoelectric deflection stage according to claim 6, characterized in that: Four strain sensors (220) are respectively arranged on the upper surface and the lower surface of each amplified piezoelectric driver (2), and the four strain sensors (220) are arranged corresponding to the third flexible hinge (205) and are arranged in groups of two and symmetrically distributed.

8. The large-load piezoelectric deflection stage according to claim 6, characterized in that: The piezoelectric ceramic (210) is a low-voltage stacked co-fired piezoelectric ceramic.

9. The large-load piezoelectric deflection stage according to claim 1, characterized in that: The shell (1) is provided with fixing holes (14) around its periphery for fixed connection with other mechanisms.

Images