Remote plasma source luminance build-up method, device and equipment and storage medium

Abstract

The invention relates to the technical field of semiconductors, in particular to a luminance build-up method, device and equipment for a remote plasma source and a storage medium, and the method comprises the steps: obtaining a real-time pressure value fed back by a vacuum gauge, controlling the remote plasma source to start working when a preset vacuum condition is met, and controlling a butterfly valve to be opened at a preset initial opening degree; real-time scanning parameters fed back by the mass spectrometer are obtained, and the real-time ionization rate is confirmed based on the real-time scanning parameters; adjusting the opening degree of a butterfly valve according to the real-time ionization rate so as to adjust the flow of gas entering a process system until the luminance build-up is successful; according to the luminance build-up method disclosed by the invention, the opening degree of the butterfly valve can be adjusted in real time according to the real-time ionization rate, so that the air inflow entering the air source is adjusted in real time, an ideal environment is created for plasma generation, and accurate control of the air flow is ensured, so that the success rate and efficiency of luminance build-up are improved, the whole process does not need manual intervention, and the cost is reduced. The operation complexity is greatly reduced, and the stability and reliability of the process are improved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a remote plasma source ignition method, device, equipment and storage medium. Background Art

[0002] Plasma technology plays a vital role in the manufacturing process of semiconductor devices. In plasma etching and deposition systems, RF power supplies provide energy to the plasma chamber, thereby exciting the generation of plasma, which is rich in electrons, ions, excited atoms, molecules, free radicals and other active particles, and can be used for cyclic cleaning of thin film and coating deposition process chambers or for etching.

[0003] The operation of a remote plasma source (RPS) relies on precise power control. When the remote plasma source is working, the magnetic field coil and the iron core must continuously convert the injected gas into a plasma state, which requires a stable and huge energy input. Different types of gases and different injection amounts have different requirements for ionization conditions, which will lead to instability in the plasma conversion process.

[0004] In the semiconductor and chip manufacturing process, the time of plasma processing is actually an invisible production cost; therefore, when developing RPS, how to quickly introduce the source gas to produce ionized gas that can be introduced into the chamber becomes a key consideration; if the source gas is introduced too slowly, the plasma processing speed will be reduced, thereby increasing the overall production cost; however, if the source gas is introduced too quickly, the excessive gas flow may cause the plasma in the RPS to extinguish; therefore, how to find the best balance between efficiency and cost is an urgent problem to be solved.

[0005] It can be seen that the existing technology still needs to be improved and enhanced. Summary of the invention

[0006] In order to overcome the deficiencies of the prior art, the object of the present invention is to provide a remote plasma source ignition method, which can achieve real-time and precise control of gas flow, thereby improving the success rate and efficiency of ignition.

[0007] A first aspect of the present invention provides a method for igniting a remote plasma source, comprising: obtaining a real-time pressure value fed back by a vacuum gauge, and when a preset vacuum condition is met, controlling the remote plasma source to start working, and controlling a butterfly valve to open with a preset initial opening; obtaining real-time scanning parameters fed back by a mass spectrometer, and confirming a real-time ionization rate based on the real-time scanning parameters; adjusting the opening of the butterfly valve according to the real-time ionization rate to adjust the gas flow entering the process system until ignition is successful.

[0008] Optionally, in a first implementation method of the first aspect of the present invention, the real-time pressure value fed back by the vacuum gauge is obtained, and when the preset vacuum condition is met, the remote plasma source is controlled to start working, and the butterfly valve is controlled to open with a preset initial opening, including: obtaining the real-time pressure value fed back by the vacuum gauge, when the real-time pressure value is less than 760 torr, it indicates that the preset vacuum condition is met; obtaining gas information introduced into the process system, the gas information including gas type and gas ratio; based on the obtained gas information, using a regular expression to match the initial opening corresponding to the gas information from a pre-built gas opening corresponding table; controlling the remote plasma source to start working, and controlling the butterfly valve to open with the matching initial opening.

[0009] Optionally, in a second implementation of the first aspect of the present invention, the real-time scanning parameters fed back by the mass spectrometer are obtained, and the real-time ionization rate is confirmed based on the real-time scanning parameters, including: obtaining the real-time scanning parameters fed back by the mass spectrometer, filtering the real-time scanning parameters with a bandpass filter to obtain filtering parameters; smoothing the filtering parameters with an exponential smoothing method to obtain smoothing parameters; performing baseline correction on the smoothing parameters with a pre-constructed fitting baseline model to obtain correction parameters; and inputting the correction parameters into a pre-constructed Hopwood overall model to obtain the real-time ionization rate.

[0010] Optionally, in a third implementation method of the first aspect of the present invention, adjusting the opening of the butterfly valve according to the real-time ionization rate to adjust the gas flow entering the process system includes: obtaining a preset target ionization rate, and calculating the difference between the real-time ionization rate and the preset target ionization rate; inputting the difference and the real-time pressure value into a fuzzy logic controller to obtain a gas flow adjustment amount; obtaining a characteristic curve of the butterfly valve, and confirming an opening and closing angle adjustment value based on the obtained characteristic curve and the gas flow adjustment amount; and adjusting the opening of the butterfly valve according to the opening and closing angle adjustment value to adjust the gas flow entering the process system.

[0011] Optionally, in a fourth implementation method of the first aspect of the present invention, the method of obtaining the characteristic curve of the butterfly valve and confirming the opening and closing angle adjustment value based on the obtained characteristic curve and the gas flow adjustment amount includes: obtaining the characteristic curve of the butterfly valve, and based on the gas flow adjustment amount, using a linear interpolation method to search for a new flow coefficient in the characteristic curve; obtaining an opening and closing angle confirmation model pre-constructed based on the Bernoulli equation and the butterfly valve flow coefficient, and inputting the new flow coefficient into the opening and closing angle confirmation model to obtain the opening and closing angle adjustment value.

[0012] Optionally, in a fifth implementation of the first aspect of the present invention, the remote plasma source also includes a radio frequency power supply and a matcher, the matcher includes an adjustable capacitor, and the ignition method also includes: obtaining the impedance of the load and obtaining the real-time impedance of the radio frequency power supply; comparing the real-time impedance and the impedance of the load, inputting the comparison result into a PID controller to obtain a capacitance adjustment value; and adjusting the capacitance value of the adjustable capacitor in the matcher based on the capacitance adjustment value.

[0013] Optionally, in a sixth implementation of the first aspect of the present invention, the remote plasma source also includes a detector and a display device, and the ignition method also includes: acquiring real-time operating parameters of the RF power supply, the real-time operating parameters including real-time signal power, real-time current and real-time voltage; feeding back the real-time signal power, the real-time current and the real-time voltage to the display device through the detector for parameter display; when the real-time signal power exceeds a preset normal power range, outputting an abnormal working alarm message, and adjusting the gain of the signal amplifier included in the RF power supply according to the preset normal power range to fine-tune the real-time signal power.

[0014] The second aspect of the present invention provides a ignition device for a remote plasma source, comprising: an initialization module, used to obtain the real-time pressure value fed back by a vacuum gauge, and when the preset vacuum conditions are met, control the remote plasma source to start working, and control the butterfly valve to open with a preset initial opening; a calculation module, used to obtain the real-time scanning parameters fed back by a mass spectrometer, and confirm the real-time ionization rate based on the real-time scanning parameters; an adjustment module, used to adjust the opening of the butterfly valve according to the real-time ionization rate to adjust the gas flow entering the process system until the ignition is successful.

[0015] A third aspect of the present invention provides a remote plasma source ignition device, the remote plasma source ignition device comprising: a memory and at least one processor, the memory storing instructions; at least one of the processors calls the instructions in the memory to enable the remote plasma source ignition device to perform each step of any one of the above-mentioned remote plasma source ignition methods.

[0016] A fourth aspect of the present invention provides a computer-readable storage medium having instructions stored thereon, and when the instructions are executed by a processor, the various steps of any of the above-mentioned methods for igniting a remote plasma source are implemented.

[0017] In the technical solution of the present invention, the opening of the butterfly valve can be adjusted in real time according to the real-time ionization rate to adjust the gas intake into the gas source in real time, create an ideal environment for the generation of plasma, and ensure precise control of the gas flow rate, thereby improving the success rate and efficiency of ignition. The entire process does not require human intervention, greatly reducing the complexity of operation and improving the stability and reliability of the process. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A logic flow chart of a ignition method provided by an embodiment of the present invention; Figure 2 A schematic diagram of the structure of a ignition device provided in an embodiment of the present invention; Figure 3 A schematic structural diagram of a ignition device provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0019] The present invention provides a method, device, equipment and storage medium for igniting a remote plasma source. In the present invention, the terms "first", "second", "third", "fourth", etc. (if any) in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments described herein can be implemented in an order other than that illustrated or described herein. In addition, the terms "including" or "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0020] For ease of understanding, the specific process of an embodiment of the present invention is described below. The remote plasma source includes a mass spectrometer, and the process system includes a vacuum gauge and a butterfly valve; See also Figure 1 , an embodiment of the ignition method of the remote plasma source in the embodiment of the present invention includes: 101. Obtain the real-time pressure value fed back by the vacuum gauge. When the preset vacuum condition is met, control the remote plasma source to start working, and control the butterfly valve to open with a preset initial opening; 102. Obtain real-time scanning parameters fed back by the mass spectrometer, and confirm the real-time ionization rate based on the real-time scanning parameters; 103. Adjust the opening of the butterfly valve according to the real-time ionization rate to adjust the gas flow entering the process system until ignition is successful.

[0021] The present application discloses a remote plasma source ignition method, which can adjust the opening of a butterfly valve in real time according to the real-time ionization rate to adjust the gas intake into the gas source in real time, create an ideal environment for plasma generation, and ensure precise control of the gas flow rate, thereby improving the success rate and efficiency of ignition. The entire process does not require human intervention, greatly reducing the complexity of operation and improving the stability and reliability of the process.

[0022] A second embodiment of the ignition method of a remote plasma source in the embodiment of the present invention includes: 201. Obtain the real-time pressure value fed back by the vacuum gauge. When the real-time pressure value is less than 760 torr, it indicates that the preset vacuum condition is met. In this embodiment, in order to ensure that the remote plasma source can work efficiently and stably, a near-vacuum environment must first be created. Specifically, when the value displayed by the vacuum gauge drops below 760 torr, it means that the vacuum conditions required for the experiment have been reached; only under this condition can the remote plasma source be started, because only in a low-pressure environment can plasma form and maintain its unique physical state.

[0023] 202. Obtaining gas information introduced into the process system, wherein the gas information includes gas type and gas ratio; 203. Based on the acquired gas information, a regular expression is used to match the initial opening corresponding to the gas information from a pre-built gas opening corresponding table; 204. Control the remote plasma source to start working, and control the butterfly valve to open with a matching initial opening.

[0024] In this embodiment, the initial opening of a butterfly valve is matched according to the type of gas output by the gas source and the gas ratio, and the butterfly valve is controlled to open with the matching initial opening. This not only improves the efficiency of the gas source output and ensures that the gas is delivered to the desired location in the best state, but also ensures the stability and repeatability of the process, thereby improving the performance and reliability of the entire process system.

[0025] A third embodiment of the ignition method of a remote plasma source in the embodiment of the present invention includes: 301. Acquire real-time scanning parameters fed back by a mass spectrometer, and use a bandpass filter to filter the real-time scanning parameters to obtain filtering parameters; 302. Smoothing the filter parameters using an exponential smoothing method to obtain smoothing parameters; 303. Perform baseline correction processing on the smoothing parameters using a pre-built fitting baseline model to obtain correction parameters; 304. Input the correction parameters into the pre-built Hopwood overall model to obtain the real-time ionization rate.

[0026] In this embodiment, the real-time scanning parameters are firstly finely filtered using a bandpass filter to effectively eliminate unnecessary high-frequency noise and low-frequency interference, thereby ensuring the purity and accuracy of the data; then the filtered parameters are smoothed using an exponential smoothing method to reduce random fluctuations in the data, making the results more stable and reliable; further, a pre-constructed fitting baseline model can be used to accurately correct the baseline of the smoothing parameters to eliminate the interference of background signals, thereby improving the accuracy of the data; finally, the corrected parameters are input into a pre-constructed Hopwood overall model, which can comprehensively consider various factors and calculate an accurate real-time ionization rate, providing solid data support for experimental analysis.

[0027] A fourth embodiment of the ignition method of a remote plasma source in the embodiment of the present invention includes: 401. Obtain a preset target ionization rate, and calculate a difference between the real-time ionization rate and the preset target ionization rate; In this embodiment, by calculating the difference between the real-time ionization rate and the preset target ionization rate, reliable data support is provided for subsequent adjustments.

[0028] In this embodiment, the target ionization rate is any value between 90% and 98%, which can be pre-set by the staff according to production requirements.

[0029] 402. Input the difference and the real-time pressure value into a fuzzy logic controller to obtain a gas flow adjustment amount; The fuzzy logic controller can handle fuzzy and uncertain information that traditional binary logic cannot cope with. The core of the controller is to simulate the human decision-making process and handle complex control problems through fuzzy sets and fuzzy rules. The fuzzy logic controller can better adapt to environmental changes and fluctuations in system parameters, showing stronger robustness. Because it can process fuzzy information, it can still make reasonable decisions when faced with imprecise or incomplete data, and has the advantages of high flexibility and high adaptability. In this embodiment, the fuzzy logic controller processes the input difference and pressure value according to preset fuzzy rules and fuzzy sets, so as to calculate a gas flow adjustment amount. This adjustment amount is obtained by the controller through fuzzy reasoning based on the difference between the current system state and the preset target. The fuzzy logic controller ensures that the process system can maintain the best operating state under various complex and uncertain conditions, thereby improving the efficiency and stability of the entire system.

[0030] 403. Obtain a characteristic curve of the butterfly valve, and confirm an opening and closing angle adjustment value based on the obtained characteristic curve and the gas flow adjustment amount; In this embodiment, the characteristic curve of the butterfly valve is a curve describing the relationship between the opening of the butterfly valve and the gas flow passing therethrough. Based on this characteristic curve and the calculated gas flow adjustment amount, the controller can determine an adjustment value of the opening and closing angle of the butterfly valve.

[0031] 404. Adjust the opening of the butterfly valve according to the opening and closing angle adjustment value to adjust the gas flow entering the process system.

[0032] In this embodiment, by accurately adjusting the gas flow rate in steps 401 to 404, the process system can be maintained in an optimal working state, thereby improving production efficiency and product quality; the entire process not only ensures the stability of the process, but also reduces the need for manual intervention, reduces operating costs, and improves overall economic benefits.

[0033] A fifth embodiment of the ignition method of a remote plasma source in the embodiment of the present invention includes: 501. Obtain a characteristic curve of the butterfly valve, and based on the gas flow adjustment amount, use a linear interpolation method to find a new flow coefficient in the characteristic curve; In this embodiment, since specific gas flow adjustment amounts are often encountered in actual operations and do not completely correspond to the data points on the characteristic curve, it is necessary to introduce a linear interpolation method, which allows a smooth transition between two known data points, thereby estimating an intermediate value; in the process of searching for the flow coefficient of the butterfly valve, this method can effectively fill the gaps between data points and provide a continuous flow coefficient estimate; it not only improves the efficiency of the search process, but also ensures the accuracy of the results.

[0034] 502. Obtain an opening and closing angle confirmation model pre-constructed based on the Bernoulli equation and the butterfly valve flow coefficient, input the new flow coefficient into the opening and closing angle confirmation model, and obtain an opening and closing angle adjustment value; In this embodiment, a model for confirming the opening and closing angles is pre-constructed by utilizing the Bernoulli equation, a classic principle in fluid mechanics, in combination with the flow coefficient of the butterfly valve. The model is established based on a deep understanding of the working principle of the butterfly valve, and is obtained through scientific calculations and experimental verification. When a new flow coefficient is input into the model, an accurate opening and closing angle adjustment value can be quickly obtained. This process not only simplifies the operating process, but also improves the accuracy of the adjustment, thereby ensuring the optimal performance of the butterfly valve under various working conditions, and can respond to flow changes in real time, and automatically adjust the opening and closing angles of the butterfly valve, thereby achieving the purpose of optimizing control and improving efficiency.

[0035] A sixth embodiment of the ignition method of a remote plasma source in the embodiment of the present invention includes: The remote plasma source further comprises a radio frequency power supply and a matcher, wherein the matcher comprises an adjustable capacitor; 601. Obtain the impedance of the load and obtain the real-time impedance of the radio frequency power supply; 602. Compare the real-time impedance and the load impedance, input the comparison result into the PID controller, and obtain the capacitance adjustment value; 603. Adjust the capacitance value of the adjustable capacitor in the matcher based on the capacitance adjustment value.

[0036] In this embodiment, the PID controller can calculate the precise capacitance adjustment value according to the comparison result between the real-time impedance and the load impedance, which not only ensures the high precision of impedance matching, but also effectively avoids the energy waste and equipment loss caused by impedance mismatch, so that the performance of the plasma source is significantly improved; further, due to the optimization of impedance matching, the operating efficiency of the plasma source is significantly improved; in the process of energy transmission, the accuracy of impedance matching reduces the reflection and loss of energy, so that more energy can be effectively utilized. This efficient energy utilization not only reduces the operating cost, but also extends the service life of the equipment.

[0037] A seventh embodiment of the ignition method of a remote plasma source in the embodiment of the present invention includes: The remote plasma source further comprises a detector, a display device and a controller, wherein the controller is electrically connected to the display device via the detector; 701. Acquire real-time operating parameters of the radio frequency power supply, where the real-time operating parameters include real-time signal power, real-time current, and real-time voltage; 702. Feedback the real-time signal power, the real-time current, and the real-time voltage to a display device through the detector for parameter display; In this embodiment, the detector accurately captures key data such as real-time signal power, real-time current and real-time voltage and quickly feeds back to the display device, providing an intuitive parameter display for the operator, thereby making the monitoring of the real-time working status of the RF power supply simple and intuitive.

[0038] 703. When the real-time signal power exceeds a preset normal power range, output abnormal operation alarm information, and adjust the gain of the signal amplifier included in the RF power supply according to the preset normal power range to fine-tune the real-time signal power.

[0039] In this embodiment, when it is detected that the real-time signal power exceeds the preset normal power range, the controller included in the remote plasma source will immediately output an alarm message of abnormal operation, which provides a strong guarantee for timely discovery and handling of potential problems; further, the controller also has an automatic adjustment function, which can automatically adjust the gain of the signal amplifier in the RF power supply according to the preset normal power range, ensuring that the real-time signal power is always in the best working state, thereby improving the overall performance and efficiency of the RF power supply. The controller automatically fine-tunes the real-time power signal, which not only reduces the need for manual intervention, but also significantly improves the stability and reliability of the RF power supply during operation, and ensures that the RF power supply can work stably and continuously before manual maintenance, thereby ensuring the continuity of the remote plasma source.

[0040] The above describes the ignition method of the remote plasma source in the embodiment of the present invention. The following describes the ignition device of the remote plasma source in the embodiment of the present invention. Figure 2 In one embodiment of the present invention, a ignition device for a remote plasma source includes: Initialization module 801 is used to obtain the real-time pressure value fed back by the vacuum gauge, and when the preset vacuum condition is met, control the remote plasma source to start working, and control the butterfly valve to open with a preset initial opening; A calculation module 802 is used to obtain the real-time scanning parameters fed back by the mass spectrometer, and to confirm the real-time ionization rate based on the real-time scanning parameters; The adjustment module 803 is used to adjust the opening of the butterfly valve according to the real-time ionization rate to adjust the gas flow entering the process system until the ignition is successful.

[0041] Based on the same idea as the method in the above embodiment, the device provided by the present application can implement the method in the above embodiment.

[0042] above Figure 2 The ignition device of the remote plasma source in the embodiment of the present invention is described in detail from the perspective of modular functional entities. The ignition device of the remote plasma source in the embodiment of the present invention is described in detail from the perspective of hardware processing.

[0043] Figure 31 is a schematic diagram of the structure of a remote plasma source ignition device provided by an embodiment of the present invention. The remote plasma source ignition device 900 may have relatively large differences due to different configurations or performances, and may include one or more processors (central processing units, CPU) 910 (for example, one or more processors) and a memory 920, and one or more storage media 930 (for example, one or more mass storage devices) storing application programs 933 or data 932. Among them, the memory 920 and the storage medium 930 can be short-term storage or permanent storage. The program stored in the storage medium 930 may include one or more modules (not shown in the figure), and each module may include a series of instruction operations in the remote plasma source ignition device 900. Furthermore, the processor 910 may be configured to communicate with the storage medium 930, and execute a series of instruction operations in the storage medium 930 on the remote plasma source ignition device 900 to implement the steps of the remote plasma source ignition method provided by the above-mentioned method embodiments.

[0044] The remote plasma source ignition device 900 may further include one or more power supplies 940, one or more wired or wireless network interfaces 950, one or more input and output interfaces 960, and / or one or more operating systems 931, such as Windows Serve, Mac OS X, Unix, Linux, FreeBSD, etc. It will be appreciated by those skilled in the art that Figure 3 The illustrated structure of the ignition device for the remote plasma source does not constitute a limitation on the ignition device for the remote plasma source, and may include more or less components than those illustrated, or may combine certain components, or may have different arrangements of components.

[0045] The present invention also provides a computer-readable storage medium, which may be a non-volatile computer-readable storage medium or a volatile computer-readable storage medium. Instructions are stored in the computer-readable storage medium. When the instructions are executed on a computer, the computer executes the steps of the remote plasma source ignition method.

[0046] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working process of the above-described system, device, or unit can refer to the corresponding process in the aforementioned method embodiment and will not be repeated here.

[0047] If the integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention is essentially or the part that contributes to the prior art or the whole or part of the technical solution can be embodied in the form of a software product. The computer software product is stored in a storage medium, including several instructions to enable a computer device (which can be a personal computer, server, or network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present invention. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (ROM), random access memory (RAM), disk or optical disk and other media that can store program code.

[0048] Finally, it should be noted that the above description is only a preferred example of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A method for igniting a remote plasma source, characterized in that: The remote plasma source includes a mass spectrometer, and the process system includes a vacuum gauge and a butterfly valve; the ignition method includes: Obtain the real-time pressure value fed back by the vacuum gauge. When the preset vacuum condition is met, control the remote plasma source to start working and control the butterfly valve to open with a preset initial opening; obtaining real-time scanning parameters fed back by the mass spectrometer, and confirming the real-time ionization rate based on the real-time scanning parameters; Adjust the opening of the butterfly valve according to the real-time ionization rate to adjust the gas flow entering the process system until ignition is successful.

2. The remote plasma source ignition method according to claim 1, characterized in that: The real-time pressure value fed back by the vacuum gauge is obtained, and when a preset vacuum condition is met, the remote plasma source is controlled to start working, and the butterfly valve is controlled to open with a preset initial opening, including: Get the real-time pressure value fed back by the vacuum gauge. When the real-time pressure value is less than 760 torr, it indicates that the preset vacuum condition is met. Acquiring gas information introduced into the process system, wherein the gas information includes gas type and gas ratio; Based on the acquired gas information, a regular expression is used to match the initial opening corresponding to the gas information from a pre-built gas opening corresponding table; The remote plasma source is controlled to start working, and the butterfly valve is controlled to open with a matching initial opening.

3. The remote plasma source ignition method according to claim 1, characterized in that: The step of obtaining the real-time scanning parameters fed back by the mass spectrometer and confirming the real-time ionization rate based on the real-time scanning parameters comprises: Acquire the real-time scanning parameters fed back by the mass spectrometer, and use a bandpass filter to filter the real-time scanning parameters to obtain filtering parameters; Exponential smoothing method is used to smooth the filter parameters to obtain smoothing parameters; The pre-built fitted baseline model is used to perform baseline correction on the smoothing parameters to obtain correction parameters; The correction parameters were input into the pre-built Hopwood overall model to obtain the real-time ionization rate.

4. The remote plasma source ignition method according to claim 1, characterized in that: The step of adjusting the opening of the butterfly valve according to the real-time ionization rate to adjust the gas flow rate entering the process system includes: Obtaining a preset target ionization rate, and calculating a difference between the real-time ionization rate and the preset target ionization rate; Inputting the difference and the real-time pressure value into a fuzzy logic controller to obtain a gas flow adjustment amount; Acquire a characteristic curve of the butterfly valve, and confirm an opening and closing angle adjustment value based on the acquired characteristic curve and the gas flow adjustment amount; The opening of the butterfly valve is adjusted according to the opening and closing angle adjustment value to adjust the gas flow entering the process system.

5. The remote plasma source ignition method according to claim 4, characterized in that: The step of obtaining a characteristic curve of the butterfly valve and determining an opening and closing angle adjustment value based on the obtained characteristic curve and the gas flow adjustment amount includes: Obtaining a characteristic curve of the butterfly valve, and finding a new flow coefficient in the characteristic curve using a linear interpolation method based on the gas flow adjustment amount; A pre-constructed opening and closing angle confirmation model based on the Bernoulli equation and the butterfly valve flow coefficient is obtained, and a new flow coefficient is input into the opening and closing angle confirmation model to obtain an opening and closing angle adjustment value.

6. The remote plasma source ignition method according to claim 1, characterized in that: The remote plasma source further comprises a radio frequency power supply and a matcher, wherein the matcher comprises an adjustable capacitor, and the ignition method further comprises: Obtain the impedance of the load and the real-time impedance of the RF power supply; Compare the real-time impedance with the load impedance, input the comparison result into the PID controller, and obtain the capacitance adjustment value; The capacitance value of the adjustable capacitor in the matcher is adjusted based on the capacitance adjustment value.

7. The remote plasma source ignition method according to claim 6, characterized in that: The remote plasma source further comprises a detector and a display device, and the ignition method further comprises: Acquire real-time operating parameters of the radio frequency power supply, wherein the real-time operating parameters include real-time signal power, real-time current and real-time voltage; Feeding back the real-time signal power, the real-time current and the real-time voltage to a display device through the detector for parameter display; When the real-time signal power exceeds a preset normal power range, an abnormal operation alarm message is output, and the gain of the signal amplifier included in the radio frequency power supply is adjusted according to the preset normal power range to fine-tune the real-time signal power.

8. A remote plasma source ignition device, characterized in that: include: An initialization module is used to obtain the real-time pressure value fed back by the vacuum gauge. When the preset vacuum condition is met, the remote plasma source is controlled to start working, and the butterfly valve is controlled to open with a preset initial opening; A calculation module, used for obtaining the real-time scanning parameters fed back by the mass spectrometer, and confirming the real-time ionization rate based on the real-time scanning parameters; The adjustment module is used to adjust the opening of the butterfly valve according to the real-time ionization rate to adjust the gas flow entering the process system until the ignition is successful.

9. A remote plasma source ignition device, characterized in that: The ignition device of the remote plasma source comprises: a memory and at least one processor, wherein instructions are stored in the memory; At least one of the processors calls the instructions in the memory to enable the remote plasma source ignition device to perform each step of the remote plasma source ignition method according to any one of claims 1 to 7.

10. A computer-readable storage medium having instructions stored thereon, characterized in that: When the instructions are executed by a processor, the steps of the remote plasma source ignition method according to any one of claims 1 to 7 are implemented.

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