Microporous sheet and manufacturing method thereof

Abstract

The invention discloses a microporous sheet and a manufacturing method of the microporous sheet. The manufacturing method of the microporous sheet comprises the following steps: providing a substrate; forming a pattern layer on the substrate; a metal layer is deposited on the pattern layer through an electroforming procedure, the metal layer comprises a dummy metal sheet and a plurality of micropore sheets, the micropore sheets are arranged in the dummy metal sheet at intervals, and each micropore sheet is connected to the dummy metal sheet through at least one connecting structure; and stripping the metal layer from the substrate, and taking out the plurality of microporous sheets from the metal layer. The connection structure between the outer diameter area of the microporous sheet and the dummy metal sheet is provided with a concave joint surface, and the concave joint surface has a relatively thin thickness, so that the fracture surface can be limited at the designed joint surface when the microporous sheet is taken down.

Description

Technical Field

[0001] The invention relates to a component and a manufacturing method thereof, in particular to a microporous sheet and a manufacturing method thereof. Background Art

[0002] The nebulizer uses an internal atomization module to atomize the liquid medicine into aerosol and then spray it out. The atomization module is equipped with a microporous sheet inside, which generates vibration after the piezoelectric component conducts electricity, thereby converting the liquid medicine into aerosol with tiny droplets.

[0003] In the existing microporous sheet process, in order to mass produce microporous sheets, a large number of microporous sheets floating on the metal sheet need to be removed. In the process of removal, various fracture structures with different degrees of convexity and warping deformation are easily formed on the edge of the microporous sheet. Such fracture structures will affect the accuracy of alignment in the subsequent bonding process of the atomization module, and thus seriously affect the process accuracy. In addition, the manufactured atomization module will be warped and deformed due to the fracture structure, resulting in the bonding glue not being tightly fitted at the said location and causing water seepage problems.

[0004] Therefore, how to ensure the regularity of the fracture structure through process improvement while avoiding alignment and water seepage problems has become one of the important issues that the above-mentioned project wants to solve. Summary of the invention

[0005] The technical problem to be solved by the present invention is to provide a microporous sheet and a manufacturing method thereof in view of the deficiencies of the prior art, wherein the procedure is simple and the alignment problem caused by the atomization module being attached can be avoided.

[0006] In order to solve the above-mentioned technical problems, one of the technical solutions adopted by the present invention is to provide a method for manufacturing a microporous sheet, which comprises the following steps: providing a substrate; forming a pattern layer on the substrate; depositing a metal layer on the pattern layer through an electroforming process, wherein the metal layer comprises a dummy metal sheet and a plurality of microporous sheets, the plurality of microporous sheets are arranged at intervals in the dummy metal sheet, and each of the microporous sheets is connected to the dummy metal sheet through at least one connecting structure; and peeling the metal layer from the substrate, and taking out the plurality of microporous sheets from the metal layer.

[0007] Preferably, the pattern layer is defined as a dummy area and a plurality of microporous sheet areas, the plurality of microporous sheet areas are spaced apart in the dummy area, and each of the microporous sheet areas is adjacent to the dummy area through at least one connecting pattern, wherein the dummy metal sheet is formed corresponding to the dummy area, the plurality of microporous sheets are respectively formed corresponding to the plurality of microporous sheet areas, and the at least one connecting structure is formed corresponding to the at least one connecting pattern.

[0008] Preferably, each of the microporous sheets includes a main body area and an outer diameter area surrounding the main body area, and the at least one connecting structure extends from the dummy metal sheet toward the corresponding microporous sheet, and the at least one connecting structure has a connecting tip, and the outer diameter area of ​​each of the microporous sheets is connected to the corresponding connecting tip.

[0009] Preferably, the at least one adjacent connecting structure is arranged symmetrically to each other.

[0010] Preferably, the at least one connecting structure is located between two adjacent ones of the plurality of microporous sheets.

[0011] Preferably, a joint surface is provided at a connection between the at least one connection structure and the corresponding outer diameter region, and the joint surface is recessed from the dummy metal sheet toward the microporous sheet so as to be recessed relative to the outer diameter region.

[0012] Preferably, the at least one connecting structure has a first width in the first direction, and the first width gradually decreases from the dummy metal sheet toward the corresponding microporous sheet.

[0013] Preferably, the at least one connection pattern has a second width in the first direction, the second width gradually decreases from the dummy metal sheet toward the corresponding micro-hole sheet area, and the second width is smaller than the first width.

[0014] Preferably, a portion of the outer diameter region corresponding to the at least one connecting structure is an arc-shaped portion or a conical portion, and a bottom surface of the arc-shaped portion or the conical portion is located at an inner edge of the outer diameter region adjacent to the body region.

[0015] Preferably, the at least one connecting structure has a shape complementary to the arcuate portion or the tapered portion.

[0016] Preferably, the thickness of the engagement surface is smaller than the thickness of the at least one connection structure or the thickness of the outer diameter region.

[0017] Preferably, in the step of peeling the metal layer from the substrate to obtain the plurality of microporous sheets, each of the microporous sheets is separated from the dummy metal sheet at the position of the bonding surface to form a cut-off opening.

[0018] Preferably, each of the microporous sheets is circular, and its radius is in the range of 2 mm to 5 mm.

[0019] Preferably, the width of the outer diameter region is in the range of 20 μm to 50 μm.

[0020] Preferably, the at least one connection pattern extends from the dummy area toward the closest micro-via sheet area but does not contact the closest micro-via sheet area.

[0021] In order to solve the above-mentioned technical problems, another technical solution adopted by the present invention is to provide a microporous sheet, which includes: a metal plate body having a first surface and a second surface, the metal plate body including: a main body area, provided with a plurality of micropores passing through the first surface and the second surface of the metal plate body; and an outer diameter area, surrounding the main body area and having a plurality of cut-off openings arranged around the main body area, wherein each of the cut-off openings is recessed from the outside of the outer diameter area toward the main body area so as to be recessed relative to the outer diameter area.

[0022] Preferably, in the microporous sheet, each of the cutouts has a width, the width gradually decreases from the outside of the outer diameter region toward the main body region, and the thickness of the outer diameter region is smaller than the thickness of the main body region.

[0023] Preferably, in the microporous sheet, a plurality of the cut-off openings are radially or symmetrically arranged around a center point of the main body region.

[0024] Preferably, in the microporous sheet, the metal plate body is circular, and its radius is in the range of 2 mm to 5 mm.

[0025] Preferably, in the microporous sheet, the width of the outer diameter region is in the range of 20 μm to 50 μm.

[0026] One of the beneficial effects of the present invention is that in the microporous sheet and the method for making the same provided by the present invention, in addition to being able to accurately define the shape and size of each microporous sheet and the connection point by electroforming to maintain their consistency, each microporous sheet can also be quickly peeled off from the entire metal layer by a rod-shaped tool corresponding to the outer diameter area of ​​the microporous sheet without the need for additional stamping or cutting procedures.

[0027] On the other hand, in the microporous sheet and the manufacturing method thereof provided by the present invention, a concave joint surface is designed at the connection structure between the outer diameter area of ​​the microporous sheet and the dummy metal sheet, which has a relatively thin thickness, so the fracture surface can be limited to the designed joint surface when the microporous sheet is removed, and the concave and consistent fracture surface can avoid the alignment problem caused by the fracture structure generated in the existing process during the bonding stage, and the manufactured atomization module will not be warped and deformed due to the fracture structure, and the water seepage problem can be avoided.

[0028] To further understand the features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention. However, the drawings provided are only for reference and description and are not intended to limit the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 A flow chart showing a method for making a microporous sheet according to an embodiment of the present invention.

[0030] Figure 2 FIG. 4 is a schematic top view of a substrate and a pattern layer according to an embodiment of the present invention.

[0031] Figure 3 for Figure 2 An enlarged schematic diagram of part III.

[0032] Figure 4 for Figure 3 Schematic diagram of enlarged portion IV.

[0033] Figure 5 It is a partial top view schematic diagram of disposing a metal layer on a pattern layer using the electroforming process of an embodiment of the present invention.

[0034] Figure 6 Schematic top view of a microporous sheet according to an embodiment of the present invention. DETAILED DESCRIPTION

[0035] The following is an explanation of the implementation methods of the "microporous sheet and method for making a microporous sheet" disclosed in the present invention through specific embodiments. Those skilled in the art can understand the advantages and effects of the present invention from the contents disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and the details in this specification can also be modified and changed in various ways based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are only simple schematic illustrations and are not depicted according to actual dimensions. It is stated in advance. The following embodiments will further explain the relevant technical contents of the present invention in detail, but the disclosed contents are not intended to limit the scope of protection of the present invention. In addition, the term "or" used in this article may include any one or more combinations of the associated listed items depending on the actual situation.

[0036] Figure 1 FIG. 1 is a flow chart of a method for making a microporous sheet according to an embodiment of the present invention. Figure 1 As shown, an embodiment of the present invention provides a method for manufacturing a microporous sheet, comprising the following steps:

[0037] Step S10: providing a substrate. The substrate may be made of, for example, a conductive material, such as a conductive metal such as copper, or a semiconductor material such as silicon.

[0038] Step S11: forming a pattern layer on a substrate.

[0039] Please refer to Figure 2 , Figure 3 and Figure 4 , Figure 2 is a schematic top view of a substrate and a pattern layer according to an embodiment of the present invention, Figure 3 for Figure 2 An enlarged schematic diagram of part III, Figure 4 for Figure 3 An enlarged schematic diagram of part IV of the Figure 2 As shown, the pattern layer 2 can be formed on the substrate 1 by a photolithography process. Specifically, in the photolithography process, the pattern on the mask can be transferred to the substrate 1 in the form of a photoresist layer by steps such as exposure and development, thereby forming the pattern layer 2. However, the above-mentioned method of forming the pattern layer 2 is only an example, and the pattern layer 2 can also be formed by other processes, and the present invention is not limited thereto.

[0040] In addition, in the embodiment of the present invention, the pattern layer 2 is defined as a dummy area 20 and a plurality of microporous sheet areas 22. As the name implies, the microporous sheet area 22 is an area where a plurality of microporous sheets are to be formed, and the dummy area 20 is a redundant area that is not used to form a microporous sheet. Figure 2 As shown, the microporous sheet regions 22 are arranged in intervals in the dummy region 20, and each microporous sheet region 22 is adjacent to the dummy region 20 through a connection pattern 24. In more detail, a hollow region 26 is provided between the microporous sheet region 22 and the dummy region 20, the connection pattern 24 is located in the hollow region 26, and the connection pattern 24 extends from the dummy region 20 toward the closest microporous sheet region 22, but does not contact the closest microporous sheet region 22. In other words, the connection pattern 24 and the microporous sheet region 22 are at least separated by a predetermined spacing L1. The difference between the hollow region 26 and the dummy region 20 is that the dummy region 20 will still form a metal layer in the subsequent process, while the hollow region 26 is used to retain the space for forming the outer diameter region of the microporous sheet.

[0041] It should be noted that for each microporous sheet area 22, the number of corresponding connection patterns 24 is at least one, and the purpose of providing the connection patterns 24 is to form at least one corresponding connection structure after the microporous sheet is formed so that the microporous sheet is floated on the metal layer of the corresponding dummy area 20. Therefore, it is necessary to appropriately design the number and position of the connection patterns 24 corresponding to each microporous sheet area 22 to ensure that the microporous sheet can be completely removed.

[0042] On the other hand, Figure 4As shown, a plurality of hole areas PA are formed in the microporous sheet area 22, and the plurality of hole areas PA are used to form micropores in the microporous sheet. In addition, in order to ensure the stress balance of the metal layer, a plurality of hole areas PA are also provided in the dummy area 20 to avoid warping when the metal layer is formed. In general, in step S11, the pattern layer 2 is formed with a photoresist in the hole area PA and the hollow area 26, and the dummy area 20, the microporous sheet area 22 and the connection pattern 24 are defined by the hole area PA and the hollow area 26. In other words, the substrate 1 is exposed corresponding to the dummy area 20, the microporous sheet area 22 and the connection pattern 24.

[0043] Step S12: depositing a metal layer on the pattern layer through an electroforming process.

[0044] Please refer to Figure 5 , Figure 5 FIG. 1 is a partial top view schematic diagram of disposing a metal layer on a pattern layer using the electroforming process of an embodiment of the present invention. Figure 5 As shown, the electroforming process utilizes the principle of electroplating to deposit a specific type of metal on a specially designed pattern layer 2. When the metal layer 3 is deposited to a certain thickness, the metal layer 3 is separated from the substrate 1 and the pattern layer 2, and the metal layer 3 is completed. In addition, the shape and size of each microporous sheet and the connection structure in the metal layer 3 can be accurately defined by electroforming to maintain its consistency.

[0045] In step S12, the metal layer 3 may be made of, for example, a palladium-nickel alloy, and includes a dummy metal sheet 30 and a plurality of microporous sheets 32. The microporous sheets 32 are arranged in intervals in the dummy metal sheet 30, and each microporous sheet 32 ​​is connected to the dummy metal sheet 30 via a connecting structure 34. Since the metal layer 3 is deposited from an area on the substrate 1 that is not covered by the pattern layer 2, the dummy metal sheet 30 is formed corresponding to the dummy area 20, the plurality of microporous sheets 32 are formed corresponding to the plurality of microporous sheet areas 22, and the connecting structure 34 is formed corresponding to the connecting pattern 24.

[0046] Each microporous sheet 32 ​​includes a main body region 320 and an outer diameter region 322 surrounding the main body region 320, and the main body region 320 is provided with dispersed and spaced micropores P. The connecting structure 34 extends from the dummy metal sheet 30 toward the corresponding microporous sheet 32, and the connecting structure 34 has a connecting tip 340 connected to the outer diameter region 322 of the microporous sheet 32.

[0047] As described above, after the microporous sheet 32 ​​is formed, at least one corresponding connection structure 34 is required to make the microporous sheet 32 ​​float on the dummy metal sheet 30. Therefore, the number and position of the connection structures 34 corresponding to each microporous sheet 32 ​​can be appropriately designed to ensure that the dummy metal sheet 30 and the microporous sheet 32 ​​can be completely removed when the metal layer 3 is peeled off from the substrate 1 and the pattern layer 2, and the microporous sheet 32 ​​is still combined with the dummy metal sheet 30 by the connection structure 34.

[0048] In addition, if Figure 5 As shown, the connection structure 34 can be symmetrically arranged. More precisely, it can be symmetrically arranged relative to a portion of the dummy metal sheet 30 between two adjacent connection structures 34. In addition, the connection structure 34 can be located between two adjacent microporous sheets 32. The microporous sheet 32 ​​can be, for example, circular, with a radius in the range of 2 mm to 5 mm. The width of the outer diameter region 322 is much smaller than the radius of the body region 320, and can be in the range of 20 μm to 50 μm.

[0049] In order to make the fracture surface of the microporous sheet 32 ​​regular after being removed, a joint surface CP is provided at the connection between the connection structure 34 and the corresponding outer diameter area 322. The joint surface CP extends from the dummy metal sheet 30 toward the microporous sheet 32 ​​(in the direction of Figure 5 For the microporous sheet 32 ​​on the left side, that is, the direction D2) is concave, so as to be concave relative to the outer diameter area 322. The purpose of setting the joint surface CP is to provide a position whose structural strength is obviously weaker than the surrounding area, so that when the microporous sheet 32 ​​or the virtual metal sheet 30 is subjected to external force and transmitted to the joint surface CP, the stress will be concentrated on the joint surface CP, and eventually tend to form a fracture surface similar to the joint surface CP in morphology and position. For this reason, the thickness of the joint surface CP needs to be less than the thickness of the connecting structure 34 or the thickness of the outer diameter area 322.

[0050] Considering the deposition method of the metal layer 3 in the electroforming process, the portion of the outer diameter region 322 corresponding to the connection structure 34 can be designed as an arc portion or a cone portion, for example. The bottom surface of the arc portion or the cone portion (i.e., the joint surface CP) is located at the inner edge of the outer diameter region 322 adjacent to the body region 320. In other words, the joint surface CP is spaced apart from the body region 320 by another distance.

[0051] In order to make the fracture surface of the microporous sheet 32 ​​regular after it is removed, the morphology of the connecting structure 34 needs to be further designed. First, the connecting structure 34 has a shape complementary to the joint surface CP (i.e., the arc portion or the conical portion). Furthermore, in order to ensure that the connecting structure 34 has a higher structural strength on the side close to the dummy metal sheet 30 and a lower structural strength on the side close to the microporous sheet 32, the connecting structure 34 has a first width W1 in the direction D1, and the first width W1 gradually changes from the dummy metal sheet 30 toward the direction D2 of the corresponding microporous sheet 32, more specifically, it gradually becomes smaller. In this way, the connecting structure 34 can be easily broken from the side close to the microporous sheet 32 ​​when subjected to external force, so as to first ensure the regularity of the position of the fracture surface.

[0052] Therefore, the connection pattern 24 used in step S11 needs to take into account the morphology of the connection structure 34 formed subsequently. Therefore, the connection pattern 24 can be designed to have a second width W2 in the direction D1, and similar to the change trend of the first width W1, the second width W2 also gradually changes from the dummy area 20 toward the corresponding microporous sheet area 22. More specifically, it gradually becomes smaller, and the second width W2 is smaller than the first width W1.

[0053] Therefore, when the metal layer 3 is formed in step S12, only a thinner metal layer 3 will be formed in the area where the photoresist is provided (the hole area PA and the hollow area 26). Therefore, an outer diameter area 322 thinner than the main area 320 will be formed between the dummy area 20 and the microporous sheet area 22, and a bonding surface CP thinner than the connecting structure 34 and the outer diameter area 322 will be formed between the connecting pattern 24 and the microporous sheet area 22, and its structural strength is obviously weaker than the surrounding area.

[0054] Step S13: peeling the metal layer from the substrate, and taking out the microporous sheet from the metal layer.

[0055] In this step, the metal layer 3 can be separated from the substrate 1 by using a specially designed peeling tool, which is provided with a rod-shaped structure corresponding to the outer diameter area 322 of the microporous sheet 32, so as to quickly peel each microporous sheet 32 ​​from the metal layer 3. Therefore, no additional stamping or cutting procedures are required, which can save manufacturing costs.

[0056] As described previously, since the metal layer 3 is provided with a bonding surface CP whose structural strength is significantly weaker than the surrounding area, when the microporous sheet 32 ​​is subjected to external force and transmitted to the bonding surface CP, the stress will be concentrated on the bonding surface CP, forming a fracture surface similar to the bonding surface CP in morphology and position.

[0057] In addition, compared with the existing manufacturing methods that easily form various fracture structures with different degrees of convexity on the edge of the microporous sheet, the manufacturing method of the microporous sheet provided by the present invention can provide a fracture surface with regularity in position and morphology, and can be used to assist in alignment to improve alignment accuracy. The manufactured atomization module will not have water seepage problems due to the fracture structure.

[0058] Please refer to Figure 6 , Figure 6 Schematic diagram of a top view of a microporous sheet according to an embodiment of the present invention. As previously described, the known microporous sheet 32 ​​is a metal plate formed by a metal layer 3, having a first surface (upper surface) and a second surface (lower surface), and the metal plate further comprises a body region 320 and an outer diameter region 322. The body region 320 is provided with a plurality of micropores P penetrating the metal plate. The outer diameter region 322 surrounds the body region 320 and has a plurality of cut-off openings CP1 arranged around the body region 320.

[0059] In detail, in step S13, when each microporous sheet 32 ​​is separated from the dummy metal sheet 30 at the position of the joint surface CP, a plurality of cut-off openings CP1 are formed from the outside of the outer diameter area 322 toward the main body area 320, and each cut-off opening CP1 is recessed relative to the outer diameter area 322.

[0060] Corresponding to the joint surface CP, the cut-off opening CP1 also has a gradual structure. Figure 6 For the rightmost cut-off opening CP1, it may have a width W3 in the tangential direction (ie, direction D4), and the width W3 gradually decreases in the direction D3 (ie, radial direction) from the outside of the outer diameter region 322 toward the body region 320.

[0061] In addition, corresponding to the number and position of the connection pattern 24, the connection structure 34 and the joint surface CP, the cut-off openings CP1 may be arranged radially or symmetrically around the center point CT of the body region 320. For example, when the number of the cut-off openings CP1 is 6, the positions of the cut-off openings CP1 may be evenly distributed over 360 degrees (that is, at an interval of 60 degrees), and symmetrically arranged on the outer diameter region 322 relative to the virtual axis IL passing through the center point CT. The multiple cut-off openings CP1 arranged in a specific pattern will assist in achieving the positioning and alignment of the microporous sheet 32 ​​in the subsequent lamination process of the atomization module.

[0062] Advantageous Effects of Embodiments

[0063] One of the beneficial effects of the present invention is that in the microporous sheet and its manufacturing method provided by the present invention, in addition to being able to accurately define the shape and size of each microporous sheet and the connection point by electroforming to maintain their consistency, each microporous sheet can also be quickly peeled off from the entire metal layer by a rod-like structure corresponding to the outer diameter area of ​​the microporous sheet without the need for additional stamping or cutting procedures.

[0064] On the other hand, in the microporous sheet and the manufacturing method thereof provided by the present invention, a concave joint surface is designed at the connection structure between the outer diameter area of ​​the microporous sheet and the dummy metal sheet, which has a relatively thin thickness, so the fracture surface can be limited to the designed joint surface when the microporous sheet is removed, and the concave and consistent fracture surface can avoid the alignment problem caused by the fracture structure generated in the existing process during the bonding stage, and the manufactured atomization module will not be warped and deformed due to the fracture structure, and the water seepage problem can be avoided.

[0065] The contents disclosed above are only preferred feasible embodiments of the present invention, and are not intended to limit the protection scope of the present invention. Therefore, all equivalent technical changes made using the contents of the present invention description and drawings are included in the protection scope of the present invention.

Claims

1. A method for making a microporous sheet, characterized in that: The method for making the microporous sheet comprises the following steps: providing a substrate; forming a pattern layer on the substrate; Depositing a metal layer on the pattern layer by an electroforming process, wherein the metal layer includes a dummy metal sheet and a plurality of microporous sheets, the plurality of microporous sheets are arranged in the dummy metal sheet at intervals, and each of the microporous sheets is connected to the dummy metal sheet by at least one connecting structure; and The metal layer is peeled off from the substrate, and a plurality of the microporous sheets are taken out from the metal layer.

2. The method for making a microporous sheet according to claim 1, characterized in that: The pattern layer is defined with a dummy area and a plurality of microporous sheet areas, the plurality of microporous sheet areas are arranged in the dummy area at intervals, and each of the microporous sheet areas is adjacent to the dummy area through at least one connecting pattern; The dummy metal sheet is formed corresponding to the dummy area, the plurality of microporous sheets are formed corresponding to the plurality of microporous sheet areas, and the at least one connection structure is formed corresponding to the at least one connection pattern.

3. The method for making a microporous sheet according to claim 2, characterized in that: Each of the microporous sheets includes a main body area and an outer diameter area surrounding the main body area, and the at least one connecting structure extends from the dummy metal sheet toward the corresponding microporous sheet, and the at least one connecting structure has a connecting tip, and the outer diameter area of ​​each of the microporous sheets is connected to the corresponding connecting tip.

4. The method for making a microporous sheet according to claim 3, characterized in that: The at least one adjacent connecting structure is arranged symmetrically to each other.

5. The method for making a microporous sheet according to claim 3, characterized in that: The at least one connecting structure is located between two adjacent ones of the plurality of microporous sheets.

6. The method for making a microporous sheet according to claim 3, characterized in that: A joint surface is provided at the connection between the at least one connection structure and the corresponding outer diameter region, and the joint surface is recessed from the dummy metal sheet toward the microporous sheet so as to be recessed relative to the outer diameter region.

7. The method for making a microporous sheet according to claim 6, characterized in that: The at least one connection structure has a first width in a first direction, and the first width gradually decreases from the dummy metal sheet toward the corresponding microporous sheet.

8. The method for making a microporous sheet according to claim 7, characterized in that: The at least one connection pattern has a second width in the first direction, the second width gradually decreases from the dummy metal sheet toward the corresponding micro-hole sheet area, and the second width is smaller than the first width.

9. The method for making a microporous sheet according to claim 6, characterized in that: A portion of the outer diameter region corresponding to the at least one connecting structure is an arc-shaped portion or a tapered portion, and a bottom surface of the arc-shaped portion or the tapered portion is located at an inner edge of the outer diameter region adjacent to the body region.

10. The method for making a microporous sheet according to claim 9, characterized in that: The at least one connecting structure has a shape complementary to the arcuate portion or the tapered portion.

11. The method for making a microporous sheet according to claim 7 or 9, characterized in that: The engagement surface has a thickness that is less than a thickness of the at least one connection structure or a thickness of the outer diameter region.

12. The method for making a microporous sheet according to claim 11, characterized in that: In the step of peeling the metal layer from the substrate to obtain a plurality of the microporous sheets, each of the microporous sheets is separated from the dummy metal sheet at the position of the bonding surface to form a cut-off opening.

13. The method for making a microporous sheet according to claim 3, characterized in that: Each of the microporous sheets is circular, and its radius is in the range of 2 mm to 5 mm.

14. The method for making a microporous sheet according to claim 3, characterized in that: The width of the outer diameter region is in the range of 20 μm to 50 μm.

15. The method for making a microporous sheet according to claim 2, characterized in that: The at least one connection pattern extends from the dummy region toward the closest microvia sheet region but does not contact the closest microvia sheet region.

16. A microporous sheet, characterized in that: The microporous sheet comprises: A metal plate body having a first surface and a second surface, the metal plate body comprising: A main body region is provided with a plurality of micro holes penetrating the first surface and the second surface of the metal plate body; and an outer diameter region surrounding the body region and having a plurality of cut-off openings disposed around the body region; Wherein, each of the cut-off openings is recessed from the outside of the outer diameter region toward the main body region so as to be recessed relative to the outer diameter region.

17. The microporous sheet according to claim 16, characterized in that: Each of the cut-off openings has a width, and the width gradually decreases from the outside of the outer diameter area toward the main body area, and the thickness of the outer diameter area is smaller than the thickness of the main body area.

18. The microporous sheet according to claim 16, characterized in that: The plurality of cut-off openings are radially or symmetrically arranged around the center point of the main body area.

19. The microporous sheet according to claim 16, characterized in that: The metal plate body is circular, and its radius is in the range of 2 mm to 5 mm.

20. The microporous sheet according to claim 16, characterized in that: The width of the outer diameter region is in the range of 20 μm to 50 μm.

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