Multi-energy-field auxiliary multiphase jet flow polishing method and equipment for miniature bearing

Abstract

The invention discloses a multi-energy-field auxiliary multi-phase jet flow polishing method and device for a miniature bearing, and the method comprises the steps that a plurality of bearing inner rings are clamped into a workpiece clamp, the center lines of all the bearing inner rings coincide after clamping, and the inner circle faces of the adjacent bearing inner rings are sequentially connected to form an inner circle face set with the two ends open; the spatial position of the inner circular surface group is determined, the position of the jet device is adjusted based on the spatial position and the divergence angle range of jet flow of the jet device, the center line of a jet flow nozzle of the jet device coincides with the center line of the inner circular surface group, and sprayed jet flow can cover the whole inner circular surface group; through the synergistic effect of multiple energy fields, stress-scratch-free efficient low-damage polishing machining can be conducted on multiple complex inner ring structures at the same time, tool marks and burrs generated after machining are effectively removed, the polishing quality and efficiency of high-end spaceflight parts are greatly improved, and the polishing quality and efficiency of the high-end spaceflight parts are improved. And the development of advanced manufacturing technologies of major equipment such as aviation and spaceflight in China can be effectively supported.

Description

Technical Field

[0001] The invention relates to the technical field of ultra-precision machining of high-precision micro bearings, and in particular to a multi-energy field assisted multi-phase jet polishing method and equipment for micro bearings. Background Art

[0002] The bearing industry is a basic industry in the manufacturing industry. As an important basic strategic industry of the country, it plays an irreplaceable role in the national economy and national security. In the national strategy of "manufacturing power", it is clearly pointed out that we must rely on leading enterprises in the industry, increase the efforts to tackle key products and key core technologies, and accelerate the breakthrough of engineering industrialization. As a key component in the equipment manufacturing industry, bearings are an indispensable "joint" in the construction of the national economy. The performance, quality and reliability of mechanical equipment all depend on the performance of bearings. With the substantial improvement of the performance of aerospace mainframes, the requirements for the service performance of bearings are getting higher and higher. The barriers to improving bearing performance restrict the rapid development of mainframe equipment.

[0003] The bearing-shaft system is widely used in various types of rotating machinery such as transmission systems, gearboxes, and aerospace engine rotor systems. The precision characteristics of the shaft system directly affect the precision characteristics of the entire machine. The working performance of the bearing depends to a large extent on its manufacturing accuracy, shape and position accuracy, and surface roughness. As one of the core components of the rotor system, the shape and position accuracy of the bearing plays a decisive role in the stiffness, rotation accuracy, and processing accuracy of the bearing-rotor system, especially for high-speed and ultra-high-speed rotor systems. Therefore, the shape and position accuracy and surface roughness of the bearing directly affect the service performance of the bearing and restrict the improvement of the service life of the host equipment.

[0004] At present, there are knife marks and burrs on the surface of bearings, especially the inner circle of the inner ring, after machining, which seriously affects its service and use, and the roughness is far from meeting the use requirements. Since some bearings have small structures and the outer ring diameter is even less than 5mm, the inner circle of the inner ring is not easy to contact and may have processed micro-textures, so most of them are achieved by manual grinding and polishing to achieve the specified surface roughness. However, manual grinding and polishing has low efficiency and poor surface shape accuracy, resulting in a high scrap rate of processed bearings, which seriously restricts the mass production of high-end bearings in my country. Summary of the invention

[0005] The purpose of the present invention is to propose a multi-energy field assisted multi-phase jet polishing method and equipment for micro bearings, which uses a diffused multi-energy field multi-phase jet to polish the inner cylindrical surface of the bearing inner ring, without the need for manual polishing, and the polishing accuracy and efficiency can be improved.

[0006] The technical solution adopted by the present invention is: a multi-energy field assisted multi-phase jet polishing method for a micro bearing, comprising the following steps:

[0007] S1. Clamp multiple bearing inner rings into a workpiece fixture, and after clamping, make the center lines of all bearing inner rings coincide, and the inner circular surfaces of adjacent bearing inner rings are connected in sequence to form an inner circular surface group with open ends;

[0008] Determine the spatial position of the inner circular surface group, and adjust the position of the jet device based on the spatial position and the diffusion angle range of the jet of the jet device so that the center line of its jet nozzle coincides with the center line of the inner circular surface group and the ejected jet can cover the entire inner circular surface group;

[0009] S2, providing an ultrasonic generating device covering the inner ring of the bearing to apply an ultrasonic energy field to the inner ring of the bearing;

[0010] The abrasive polishing liquid is stirred evenly, and the xenon lamp light source system is started to apply a photocatalytic auxiliary energy field thereto;

[0011] S3, introducing compressed gas into the jet device and calculating the gas flow rate;

[0012] Passing abrasive polishing liquid to which a photocatalytic auxiliary energy field is applied into the jet device, and adjusting the flow rate of the abrasive polishing liquid according to the gas flow rate of the compressed gas;

[0013] The compressed gas and the polishing liquid with abrasive are coupled in the jet device to form a three-phase polishing liquid;

[0014] S4. Adjust the valve of the jet device to control the jet velocity and pressure of the three-phase polishing liquid so that the jet covers the entire inner circular surface group; the three-phase polishing liquid jet sprayed from the jet nozzle spreads in a fan shape, enters from an open end of the inner circular surface group, and is discharged from an open end of the other end, impacting and polishing the inner circular surface group.

[0015] As a preferred solution, the ultrasonic generator is started after the operating frequency and the optimal power of the ultrasonic generator are determined:

[0016] Solve the following two equations jointly to determine the operating frequency of the ultrasonic generator:

[0017] f = k f ×f n

[0018]

[0019] Where: f is the operating frequency; k f is a positive integer; f n represents the natural frequency of the inner ring of the bearing; c is the propagation speed of the sound wave in the medium; λ med is the wavelength of ultrasound;

[0020]

[0021] Where: k is the stiffness of the bearing inner ring material; m is the mass of the bearing inner ring;

[0022] The optimal power of the ultrasonic generator is:

[0023] P best =EV1

[0024] Where: E is the required sound energy density, V1 is the volume covered by the ultrasound; P best It is the optimal power of the ultrasonic generating device.

[0025] As a preferred solution, the xenon lamp light source system is adjusted according to the shape of the surface of the abrasive polishing liquid so that its light spot covers the entire surface of the abrasive polishing liquid, the output power and illumination time of the xenon lamp light source system are calculated, and the xenon lamp light source system is configured and started according to the output power and illumination time to apply a photocatalytic auxiliary energy field to the abrasive polishing liquid;

[0026] The output power of the xenon lamp light source system is:

[0027]

[0028] Where: P range represents the output power of the xenon lamp light source system; P(λ) represents the power density at wavelength λ, where λ1 represents the lower limit of the spectrum wavelength; λ2 represents the upper limit of the spectrum wavelength;

[0029] The illumination time of the xenon lamp light source system is:

[0030]

[0031] P eff =P total ×η range

[0032] Where: t represents the illumination time of the xenon lamp light source system; E target is the energy required for the polishing liquid, which is proportional to the volume of the polishing liquid; P eff is the effective optical power; P total Represents the total output power of ultraviolet light, infrared light and visible light; η range is the spectral efficiency in the selected spectral range.

[0033] As a preferred solution, the gas flow rate of the compressed gas transmitted to the jet device is calculated as follows:

[0034] First, obtain the gas input pressure of the jet device:

[0035] P2V=nRT

[0036] Where: P2 represents the gas input pressure of the jet device; V is the gas volume; n is the amount of gas substance; R is the gas constant; T is the gas temperature;

[0037] Second, get the gas flow rate:

[0038]

[0039] Where: v is the gas flow rate; P1 is the output pressure of the gas phase output device supplying compressed gas; ρ1 is the gas density;

[0040] Finally, the gas flow rate is obtained as follows:

[0041] Q=ρ1Av

[0042] Where: A is the cross-sectional area of ​​gas flow; Q is the gas flow rate.

[0043] As a preferred solution, the jet velocity of the three-phase polishing liquid in the jet device is calculated, the flow state of the jet is determined according to the Reynolds number of the jet velocity, and the valve of the jet device is adjusted to control the jet velocity and pressure, and the Reynolds number is kept greater than 4000, so that the three-phase polishing liquid in the jet device is in a turbulent state;

[0044] The calculation formula of the jet velocity of the three-phase polishing liquid of the jet device is as follows:

[0045]

[0046] Where: v1 is the jet velocity; P jet is the jet pressure; P atm is the atmospheric pressure; ρ2 is the polishing liquid density;

[0047] The Reynolds number is calculated as follows:

[0048]

[0049] Where: Re represents the Reynolds number, when the Reynolds number is greater than 4000, it is turbulent; D is the jet diameter; μ is the dynamic viscosity of the polishing liquid.

[0050] As a preferred solution, the abrasive polishing liquid discharged from the other end of the inner circular surface group is recovered, and after a photocatalytic auxiliary energy field is applied again, it is circulated into the jet device.

[0051] As a preferred solution, the abrasive polishing liquid is a CMP polishing liquid.

[0052] A multi-energy field assisted multi-phase jet polishing device for a micro bearing, comprising:

[0053] Workpiece fixture: used to clamp multiple bearing inner rings, so that the inner circular surfaces of adjacent bearing inner rings are connected in sequence to form an inner circular surface group with open ends after clamping;

[0054] Ultrasonic generating device: connected to the workpiece fixture, used to apply an ultrasonic auxiliary energy field to the inner ring of the bearing in the workpiece fixture;

[0055] Polishing liquid tank: used to supply abrasive polishing liquid;

[0056] Xenon lamp light source system: used to apply photocatalytic auxiliary energy field to the abrasive polishing liquid in the polishing liquid box;

[0057] Gas phase output device: used to supply compressed gas;

[0058] Jet device: connected to the polishing liquid box and the output port of the gas phase output device, coupling the polishing liquid with abrasive after applying the photocatalytic auxiliary energy field and the compressed gas to form a three-phase polishing liquid, and finally forming a fan-shaped diffused three-phase polishing liquid jet;

[0059] Jet bracket: used to adjust the spatial position of the jet device so that the center line of its jet nozzle coincides with the center line of the inner circular surface group, and the inner circular surface group is within the diffusion angle range of the jet nozzle of the jet device.

[0060] As a preferred embodiment, the workpiece fixture has a cylindrical cavity in the middle for accommodating the inner ring of the bearing, the top of the workpiece fixture has a top end cover for limiting the upward movement of the inner ring of the bearing, the top end cover has a docking hole corresponding to one of the openings at one end of the inner circular surface group, and the bottom of the workpiece fixture is detachably connected with an elastic retaining member that does not block the other end opening of the inner circular surface group and applies axial pressure upward to the inner ring of the bearing.

[0061] As a preferred solution, the workpiece fixture is divided into two semi-cylindrical fixtures along its axial section, the two semi-cylindrical fixtures are hinged at one side joint and detachably connected at the other side joint via fasteners.

[0062] Compared with the prior art, the present invention has the following beneficial effects:

[0063] 1. The compressed gas and the abrasive polishing liquid with photocatalytic auxiliary energy field are coupled to form a three-phase polishing liquid, which is used to polish the inner ring of the bearing after the ultrasonic energy field is applied, solving the problems of low efficiency, poor surface accuracy and high scrap rate of existing manual grinding and polishing. The polishing quality and efficiency of high-end aerospace parts are greatly improved.

[0064] 2. Accurately control the working frequency of the ultrasonic energy field, the output power and illumination time of the xenon lamp light source system when applying the photocatalytic auxiliary energy field, and the jet velocity of the jet device to achieve the synergistic effect of multiple energy fields and multiple phases. Through the introduction of multiple energy fields, the field intensity and action area can be precisely controlled to make the polishing medium act more evenly on the bearing surface, effectively reducing the unevenness in the polishing process. When processing tiny parts, the surface accuracy can be significantly improved, avoiding subtle defects that are easily overlooked in the processing of conventional large parts.

[0065] 3. The inner cylindrical surfaces of the inner ring of the bearing are connected in sequence to form an inner cylindrical surface group with open ends, so that the three-phase polishing liquid impacts the inner cylindrical surface of the inner ring of the bearing in a diffused manner, which can fully cover the inner cylindrical surface at all angles. The pressure is uniform when the jet diffuses, and the surface roughness of the inner cylindrical surface is uniform after polishing.

[0066] 4. It can simultaneously perform high-efficiency and low-damage polishing processing on multiple complex inner ring structures without stress scratches, effectively remove knife marks and burrs after machining, and achieve high-precision inner surface polishing, solving the problem of low efficiency of existing manual grinding and polishing, and can effectively support the development of advanced manufacturing technology for major equipment such as aviation and aerospace in my country. BRIEF DESCRIPTION OF THE DRAWINGS

[0067] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0068] Figure 1 It is a three-dimensional schematic diagram of the polishing equipment in the present invention;

[0069] Figure 2 It is a three-dimensional schematic diagram of the workbench in the present invention;

[0070] Figure 3 It is a schematic diagram of the jet device of the present invention;

[0071] Figure 4 It is a schematic diagram of the xenon lamp light source system of the present invention;

[0072] Figure 5 It is a cross-sectional schematic diagram of the polishing liquid tank of the present invention;

[0073] Figure 6 Schematic diagram of the gas phase output device of the present invention

[0074] Figure 7 is a schematic diagram of the fluidic stent of the present invention;

[0075] Figure 8It is a schematic diagram of the state of the jet nozzle in the present invention in a non-working state;

[0076] Fig. 9 It is a schematic diagram of the state of the jet nozzle in the present invention when it is in working state.

[0077] Reference numerals: 1, polishing pool; 21, workbench; 211, cylindrical channel; 212, slot; 22, workpiece fixture; 221, first semi-cylindrical fixture; 222, second semi-cylindrical fixture; 23, ultrasonic generator;

[0078] 231. knob of ultrasonic generator; 24. retractable bracket; 241. piston gasket; 25. top end cover;

[0079] 26. Bolt hole; 3. Bearing inner ring; 31. Inner cylindrical surface group; 4. Jet device; 41. Polishing liquid inlet; 42. Gas phase inlet; 43. Jet device body; 44. First control knob; 45. Second control knob; 46. Jet nozzle; 5. Gas phase output device; 51. Second hose; 6. Polishing liquid tank; 61. Polishing liquid container; 62. Magnetic stirrer; 63. Polishing liquid peristaltic pump; 64. First hose; 7. Xenon lamp light source system; 71. Illumination lamp; 72. Adjustment knob; 73. Light source energizer; 8. Box body; 81. First partition; 82. Second partition; 83. Jet bracket; 831. First support part; 832. Second support part; 833. Moving slider; 834. Moving card slot guide. DETAILED DESCRIPTION

[0080] The present invention is described in detail below by way of exemplary embodiments. However, it should be understood that, without further description, elements, structures and features in one embodiment may also be beneficially combined in other embodiments.

[0081] It should be noted that: unless otherwise defined, the technical terms or scientific terms used in this document shall have the usual meanings understood by people with ordinary skills in the field to which the invention belongs. The words "one", "an" or "the" and the like used in the patent application specification and claims of the present invention do not express quantity restrictions, but indicate the existence of at least one; the words "first", "second" and "third" used in this document shall not be regarded as restrictions on the order of components, but are only used to distinguish different components; words such as "include" or "comprise" and the like indicate that the elements or objects appearing before "include" or "comprise" include the elements or objects listed after "include" or "comprise" and their equivalents, but do not exclude other elements or objects with the same function.

[0082] In order to more clearly describe the multi-energy field assisted multiphase jet polishing method and equipment for a micro bearing, combined with the attached Figure 1-9 Describe this embodiment:

[0083] A multi-energy field assisted multi-phase jet polishing device for a micro bearing, comprising the following components:

[0084] ① Polishing pool 1: a workbench 21 is provided inside the polishing pool, on which the polishing operation is performed, and the polishing liquid after jet polishing is stored in the polishing pool;

[0085] ② Workpiece fixture 22: used for clamping a plurality of bearing inner rings 3, so that the inner circular surfaces of adjacent bearing inner rings 3 are connected in sequence to form an inner circular surface group 31 with open ends after clamping;

[0086] The specific components of the workpiece fixture 22 are described below:

[0087] like Figure 1 and Figure 2 As shown, a cylindrical cavity for accommodating the bearing inner ring 3 is provided in the middle of the workpiece fixture 22, a top end cover 25 for limiting the upward movement of the bearing inner ring 3 is provided on the top of the workpiece fixture 22, the top end cover 25 has a docking hole corresponding to one end opening of the inner circular surface group 31, and an elastic retaining member that does not block the other end opening of the inner circular surface group 31 and applies axial pressure upward to the bearing inner ring 3 is detachably connected to the bottom of the workpiece fixture 22;

[0088] The workpiece fixture 22 is divided into two semi-cylindrical fixtures (a first semi-cylindrical fixture 221 and a second semi-cylindrical fixture 222) along its axial section. The two semi-cylindrical fixtures are hinged at one side joint and detachably connected at the other side joint by a fastener. During installation, the bottom of the first semi-cylindrical fixture 221 is fixed in the slot 212 of the workbench 21 to provide stable support for the workpiece. The second semi-cylindrical fixture 222 is opened and closed like a book along the hinge, so as to facilitate the taking and placing of the bearing inner ring 3. The fastener can be a bolt and nut structure. Flanges are provided on the non-hinged sides of the two semi-cylindrical fixtures, and bolt holes 26 are provided on the two flanges. When the two semi-cylindrical fixtures are closed, the bolts are passed through the bolt holes 26 and then tightened by nuts matching the bolts.

[0089] Exemplarily, the elastic retaining member may include a retractable bracket 24 and a piston gasket 241. After a plurality of bearing inner rings 3 to be polished are loaded into the cylindrical cavity of the workpiece fixture 2, the piston gasket 241 is driven to move upward under the pressure of the retractable bracket 24, squeezing the bearing inner ring 3 at the bottom, while the bearing inner ring 3 at the top is blocked by the top end cover 25, forming a Figure 8 or Fig. 9 When installing, a cylindrical hole 211 is opened on the workbench 21, and the hole may be a vertical blind hole for placing the retractable bracket 24 and providing support for the lower end of the retractable bracket 24;

[0090] Specifically, the retractable bracket 24 can be a spring, which is located below the piston gasket 241. The piston gasket 241 can slide relatively through elastic deformation, thereby realizing the overall telescopic function. The spring provides continuous elastic force, and the retractable bracket 24 remains in an extended state when there is no workpiece. When the workpiece is placed, the piston gasket 241 can be retracted along the direction of the spring, and cooperate with the top end cover 25 of the fixture to achieve rapid loading and unloading of the workpiece. It is only necessary to open the top end cover 25, put in the workpiece (bearing inner ring), and then close the end cover, and the spring retractable bracket 24 will firmly fix the workpiece through the elastic force of the spring. The workpiece fixture of this embodiment can not only accommodate different numbers of workpieces, but also can evenly clamp the bearing inner ring 3 with appropriate force to avoid deformation caused by applying excessive pressure; at the same time, it ensures that the workpiece is always kept in the best position during the entire polishing process to prevent the polishing uniformity from being affected by slight movements, and ensure the position stability of each workpiece in the workpiece fixture 22;

[0091] Specifically, the piston gasket 241 is an annular gasket, and the hole in the middle of the gasket corresponds to the hole where the inner cylindrical surface of the bearing inner ring 3 is located. The outer cylindrical surface of the gasket is preferably tightly fitted to the inner wall of the workpiece fixture 22, thereby enhancing the air tightness inside the workpiece fixture, which is beneficial to improving the jet pressure during jet polishing.

[0092] ③ Ultrasonic generator 23: connected to the workpiece fixture 22, used to apply ultrasonic auxiliary energy field to the inner ring 3 of the bearing in the workpiece fixture 22; the ultrasonic generator 23 can be installed on the workbench 21 by means of magnetic attraction, clamping, bolts and nuts, and is tightly connected to the outer wall of the workpiece fixture 22. The structure of the ultrasonic generator 23 itself adopts the existing technology, which mainly includes an ultrasonic power supply and an ultrasonic transducer. When selecting, it is necessary to ensure that the generated ultrasonic energy field can completely cover the workpiece fixture 22.

[0093] ④ Polishing liquid tank 6: used to supply polishing liquid with abrasive;

[0094] like Figure 5As shown, the polishing liquid tank 6 is provided with a polishing liquid container 61, a magnetic stirrer 62, and a polishing liquid peristaltic pump 63, wherein the magnetic stirrer 62 can prevent the polishing liquid from settling, and the peristaltic pump can deliver the polishing liquid to the jet device 4 through the first hose 64; wherein the polishing liquid is connected to the polishing liquid inlet 41 on the jet device 4 through the first hose 64, and the gas phase output device 5 is connected to the gas phase inlet 42 of the jet device through the second hose 51, and coupled into a new gas-liquid-solid polishing liquid in the jet device body 43, and the jet nozzle is adjusted to align with the inner wall of the part by setting the first control knob 44 on the jet body, and the second control knob 45 is adjusted to adjust the valve size to control the jet speed, and the new gas-liquid-solid polishing liquid is ejected from the jet nozzle 46 to perform jet polishing on the part. Connecting columns are provided on both sides of the bottom of the polishing liquid tank 6, and the polishing liquid tank is connected to the bottom of the box body through hexagon socket screws.

[0095] ⑤ Xenon lamp light source system 7: used to apply a photocatalytic auxiliary energy field to the abrasive polishing liquid in the polishing liquid box 6;

[0096] like Figure 4 As shown, the xenon lamp light source system 7 mainly includes an illumination lamp 71, an adjustment knob 72 and a light source energy supplier 73. The photocatalytic auxiliary energy field irradiates the polishing liquid in the polishing liquid box 6 through the xenon lamp light source system 7 to apply a photocatalytic auxiliary energy field, thereby improving the chemical and physical properties of the polishing liquid and improving the processing quality and efficiency. The xenon lamp light source system is divided into two parts, the illumination lamp 71 in the upper part adjusts the light intensity of the polishing liquid by adjusting the knob 72, and is connected to the light source energy supplier 73 in the lower part through a connecting line to provide energy. The upper and lower parts can be split so that the illumination lamp 71 can be moved to the desired position at will.

[0097] ⑥ Gas phase output device 5: used for supplying compressed gas;

[0098] The gas phase output device 5 is a conventional air pump in the field. The gas phase output device 5 is driven by electricity to generate a pressure difference, and the gas is accurately delivered to the required place to form a gas phase flow. It is delivered to the jet device 4 through a hose, and in the jet device body 43, it is coupled with the polishing liquid to form a new gas-liquid-solid polishing liquid. This gas phase flow plays a vital role in the polishing process, and it can change the physical and chemical properties of the polishing liquid, making it more suitable for polishing workpieces. The air pump of the present embodiment is also fixed to the bottom of the box by bolts.

[0099] ⑦ Jet device 4: connected to the polishing liquid tank 6 and the output port 5 of the gas phase output device, the polishing liquid with abrasive after the photocatalytic auxiliary energy field is applied and the compressed gas are coupled to form a three-phase polishing liquid, and finally form a fan-shaped diffused three-phase polishing liquid jet;

[0100] The jet device is a conventional ejector, and its internal structure is not described in detail. It mainly includes a jet device body 43, a jet nozzle 46, and a polishing liquid inlet 41, a gas phase inlet 42, a first control knob 44, and a second control knob 45 outside the jet device body 43. The jet device body 43 is connected to the air pump and the polishing liquid tank through a first hose and a second hose, respectively, so that the gas and the polishing liquid can be coupled in the jet device body 43 to form a new gas-liquid-solid polishing liquid. Then the new polishing liquid is adjusted by adjusting the knob outside the jet device to control the valve size, adjust the pressure and flow rate ejected by the jet nozzle 46, and provide the best new polishing liquid for polishing the inner surface of the part, that is, a new gas-liquid-solid coupled polishing liquid. The intelligent telescopic mobile jet device bracket installed on the side wall is used to adjust the position of the jet device to complete the jet processing, and the part surface polishing device is used to polish the inner ring surface of the high-precision miniature bearing.

[0101] ⑧ Box 8: It is used to carry the components of the above equipment. The specific components of the box are described below:

[0102] The inner cavity of the box body 8 is divided into chambers by a first partition 81 and a second partition 82; the first partition 81 is arranged inside the box body 8, and the side wall surface of the first partition 81 is fixedly connected to the side wall surface of the box body 8, and the polishing pool 1 is fixedly arranged on the top of the first partition 81; one end of the second partition 82 is fixedly connected to the bottom of the first partition 81, and the other end is fixedly connected to the bottom surface of the box body 8; so that the space at the bottom of the first partition 81 forms a polishing liquid tank accommodating area and a gas phase output device accommodating area; the polishing liquid tank 6 is fixedly arranged in the polishing liquid tank accommodating area; the gas phase output device 5 is fixedly arranged in the gas phase output device accommodating area;

[0103] The polishing liquid tank 6 is connected to the jet device 4 via the first hose 64; the gas phase output device 5 is connected to the jet device 4 via the second hose 51; the first partition 81 is used inside the box body 8 to divide the equipment into two parts, the upper and lower parts, with the polishing pool 1 arranged at the top, and the lower part is divided into two parts, the left and right parts, by the second partition 82. The gas phase output device 5 is placed on the left side and fixed by the preset threaded holes at the bottom to prevent loosening, and the polishing liquid tank 6 and the xenon lamp light source system are placed on the right side. The polishing liquid tank 6 is fixed to the bottom by bolts, and the xenon lamp light source system does not need to be fixed and placed next to it. Among them, there are two through holes on the first partition 81; the first hose and the second hose can pass through them respectively, so as to realize the connection between the polishing liquid tank 6 and the gas phase output device 5 and the jet device 4; the top of the first partition 81 is connected to the polishing pool 1 by opening a threaded hole;

[0104] When the external interfaces of the components are connected through pipelines, it is necessary to perform sealing treatment on the external interfaces, and apply anti-corrosion paint on the surfaces of the polishing liquid tank and the polishing pool 1.

[0105] Jet bracket 83: arranged at the top of the box 8, used to adjust the spatial position of the jet device 4, so that the center line of the jet nozzle 4 can coincide with the center line of the inner circular surface group 31, and the inner circular surface group 31 is within the diffusion angle range of the jet nozzle of the jet device;

[0106] The jet bracket 83 includes a first support portion 831, a second support portion 832, and a movable slider 833; one end of the first support portion 831 is fixedly arranged on the side wall surface inside the box body 8; the other end of the first support portion 831 is connected to the second support portion 832, and the second support portion 832 can move in the horizontal direction along the first support portion 831; the second support portion 832 is provided with a movable card slot guide rail 834, and the movable slider 833 can move in the vertical direction along the movable card slot guide rail 834;

[0107] The jet device 4 is fixedly connected to the movable slider 833 through a side groove, and the movable slider 833 can be moved and fixed in the vertical direction along the movable slot guide 834; the jet bracket 83 can move in the horizontal direction along the center line of the first support part 831 by means of the second support part 832; thereby, the jet nozzle 46 of the jet device 4 can be located above the part 3 to be polished for processing.

[0108] A multi-energy field assisted multiphase jet polishing method for a micro bearing comprises the following steps:

[0109] S1. Clamp multiple bearing inner rings 3 into the workpiece fixture 22. After clamping, make the center lines of all bearing inner rings 3 coincide with each other, and the inner circular surfaces of adjacent bearing inner rings 3 are connected in sequence to form an inner circular surface group 31 with open ends (such as Figure 8 shown);

[0110] Determine the spatial position of the inner circular surface group 31, and based on the spatial position and the diffusion angle range α of the jet of the jet device, adjust the horizontal position and vertical position of the jet device 4 through the jet bracket 83 so that the center line of the jet nozzle 46 coincides with the center line of the inner circular surface group 31, and the ejected jet can cover the entire inner circular surface group 31;

[0111] After the inner ring of the bearing to be polished is placed in the workpiece fixture, ensure that the inner ring of the bearing is tight and not loose.

[0112] S2:

[0113] S2.1. Set an ultrasonic generator 23 covering the inner ring 3 of the bearing, and apply an ultrasonic energy field to the inner ring 3 of the bearing. In this step, the ultrasonic generator is started after determining the working frequency and optimal power of the ultrasonic generator:

[0114] Among them, the working frequency of the ultrasonic generating device is determined as:

[0115] f = kf ×f n

[0116] Where: f is the operating frequency; k f is a positive integer, indicating that the working frequency of the ultrasonic generator is a multiple of the natural frequency of the part to be polished; n Indicates the natural frequency of the bearing inner ring;

[0117]

[0118] Where: k is the stiffness of the bearing inner ring material; m is the mass of the bearing inner ring;

[0119] Different operating frequencies will produce different vibration wavelengths, and the wavelength must take into account the resolution requirements, penetration depth and equipment matching to ensure optimal energy transmission and system efficiency. For example, in cutting, welding or polishing, longer wavelengths (lower frequencies) may be more conducive to deep penetration. The wavelength of ultrasound λ med Calculation formula: c is the propagation speed of sound waves in the medium. According to the selected wavelength, the operating frequency f suitable for the requirements is determined;

[0120] Solve the following two equations jointly to determine the operating frequency of the ultrasonic generator:

[0121] f = k f ×f n

[0122]

[0123] That is, select a wavelength c and a natural frequency f n The value in multiple relationship is used as the working frequency of the ultrasonic generating device.

[0124] The optimal power of the ultrasonic generator is:

[0125] P best =EV1

[0126] Where: E is the required sound energy density, V1 is the volume covered by the ultrasound; P best It is the optimal power of the ultrasonic generating device.

[0127] In a feasible embodiment, the acoustic energy density required in ultrasonic polishing is in the range of: 0.01 W / cm 3 To 0.1W / cm 3 , and then determine the sound energy density E according to the required machining accuracy of the part surface, and then calculate the optimal power P best .

[0128] In the above calculation method, the natural frequency is calculated according to the material characteristics of the micro bearing to be processed, and the required ultrasonic frequency is calculated to be 30kHz in combination with the vibration wavelength under the propagation medium. The required equipment power is calculated to be 150w according to the vibration area of ​​the parts to be polished and the workpiece fixture. After adjusting the ultrasonic frequency and vibration power, an ultrasonic auxiliary energy field is applied to the parts to be polished to improve the processing quality and efficiency.

[0129] The ultrasonic generator is placed on the workbench and next to the fixture housing to generate an ultrasonic energy field to assist the polishing process. The ultrasonic generator generates ultrasonic waves by converting electrical energy into mechanical vibrations. These ultrasonic waves form an ultrasonic energy field on the outer wall of the fixture, exerting force on the workpiece fixed in the fixture. The presence of the ultrasonic energy field can change the physical properties of the workpiece surface, making it more suitable for jet polishing. The specific position and configuration of the ultrasonic generator are adjusted according to the number of workpieces to ensure that the ultrasonic energy field can evenly cover the surface of the workpiece. In addition, the selection of the ultrasonic working frequency f of the ultrasonic generator must not only match the natural frequency of the material or be an integer multiple to enhance the vibration effect, but also ensure that the ultrasonic vibration wavelength λ generated in the medium at this working frequency med Within the controllable range:

[0130] S2.2 Stir the polishing liquid with abrasive evenly, and start the xenon lamp light source system 7 to apply a photocatalytic auxiliary energy field to it;

[0131] In this step, CMP polishing liquid is filled into the polishing liquid tank 6. CMP polishing liquid is a polishing material widely used in the semiconductor industry. It is mainly composed of abrasives, surfactants, oxidants and other additives. The polishing liquid is a polishing liquid with abrasives. A xenon lamp light source system 7 is placed next to the polishing liquid tank 6 to generate a photocatalytic energy field. Photocatalysis is to irradiate the polishing liquid before processing. Under the action of the light energy field, the chemical molecules of the chemical reagents in the polishing liquid will become more active, and the chemical reaction efficiency in the subsequent polishing will be faster. At the same time, the abrasive particles in the polishing liquid are improved in physical and chemical properties after applying the photocatalytic energy field. The xenon lamp light source system irradiates the polishing liquid and applies the light energy field, thereby catalyzing the polishing process. The light energy field generated by the xenon lamp light source system 7 can change the chemical properties of the polishing liquid, making it more suitable for polishing the processed parts. The presence of the photocatalytic energy field can increase the reactivity of the polishing liquid, thereby improving the efficiency and accuracy of polishing. For CMP polishing liquid prepared with silica sol, malic acid, etc., a 300W xenon lamp light source is configured, and a filter or grating is used to adjust the light of a specific wavelength, and a spectrometer is used for testing to ensure that the output spectrum range covers the target range (300nm to 2500nm). The spot diameter is determined by the distance between the light source and the target surface and the divergence angle of the light beam, that is, the spot needs to cover the entire surface of the polishing liquid. The polishing liquid with abrasive is contained in the polishing liquid container 61 of the polishing liquid box 6. The shape of the polishing liquid container 61 is preferably cylindrical to facilitate the coverage of the circular spot, and it is also conducive to calculating the volume of the polishing liquid in the container;

[0132] According to the shape of the surface of the abrasive polishing liquid, the xenon lamp light source system 7 is adjusted so that the light spot generated by the light lamp 71 covers the entire surface of the abrasive polishing liquid, and the output power and illumination time of the xenon lamp light source system are calculated. According to the output power and illumination time, the xenon lamp light source system 7 is configured and started to apply the photocatalytic auxiliary energy field to the abrasive polishing liquid. The specific calculation method is as follows:

[0133] The output power of the xenon lamp light source system is:

[0134]

[0135] Where: P range represents the output power of the xenon lamp light source system; P(λ) represents the power density at wavelength λ, where λ1 represents the lower limit of the spectrum wavelength; λ2 represents the upper limit of the spectrum wavelength;

[0136] The illumination time of the xenon lamp light source system is:

[0137]

[0138] P eff =P total ×η range

[0139] Where: t represents the illumination time of the xenon lamp light source system; E target The energy required for the polishing liquid is proportional to the capacity or volume of the polishing liquid; P eff is the effective optical power; P total Represents the total output power of ultraviolet light, infrared light and visible light; η range is the spectral efficiency in the selected spectral range.

[0140] After the xenon lamp light source system 7 is started, the output power of ultraviolet light, infrared light and visible light is determined by the integral formula of the spectral power distribution in the entire spectral range, and then the irradiation time is obtained, so as to control the photocatalytic auxiliary energy field applied by the xenon lamp light source system to the polishing liquid. Finally, a multi-point temperature monitoring system is used to ensure the stable output of the light source.

[0141] Specifically, in this step, turn on the light source energy supply 74 and the adjustment knob 72 in the xenon lamp light source system 7, adjust the spot diameter according to the distance between the light lamp and the polishing liquid so that it covers the entire polishing liquid, and calculate the required output power according to the spectral range and the power density of ultraviolet light, infrared light, and visible light at their respective wavelengths, so that the output power of ultraviolet light, infrared light, and visible light meets the required requirements, and then adjust the knob to the required power and irradiate the polishing liquid, calculate the irradiation time according to the polishing liquid capacity and light power, and finally irradiate the polishing liquid after correct adjustment. For the polishing liquid for processing micro bearings configured by silica sol in this embodiment, the irradiation time is set to 30 minutes;

[0142] In a specific embodiment, the total power of the xenon lamp light source system is 300w. For the three light sources of different wavelengths of ultraviolet light, infrared light and visible light required, the spectral range is determined to be 300nm to 2500nm. According to the surface size of the polishing liquid, the spot diameter is adjusted to 60mm. According to the power density of the three wavelengths, the ultraviolet light output power is calculated to be 2.6W, the infrared light output power is 28.8W, and the visible light output power is 5000 lumens. According to the energy required for the added polishing liquid volume, it is calculated that the irradiation time is 30min.

[0143] S3, introducing compressed gas into the jet device 4 and calculating the gas flow rate; first, obtaining the output pressure of the selected air pump, determining the volume and temperature of the input gas, and then calculating the gas input pressure transmitted to the jet device; then, obtaining the gas flow rate based on the Bernoulli equation, and finally obtaining the gas flow rate introduced into the jet device;

[0144] The gas flow rate is calculated according to the selected gas type and characteristics, and the gas flow rate is calculated and determined according to the cross-sectional area of ​​the hose to meet the coupling standard of the new multiphase polishing liquid. The peristaltic pump parameters are set to supply the photocatalytic polishing liquid to the jet device, and the new gas-liquid-solid polishing liquid is coupled in the device body. The gas flow rate of the compressed gas transmitted to the jet device 4 is calculated as follows:

[0145] First, obtain the gas input pressure of the jet device:

[0146] P2V=nRT

[0147] Where: P2 represents the gas input pressure of the jet device; V is the gas volume; n is the amount of gas substance; R is the gas constant; T is the gas temperature;

[0148] Second, get the gas flow rate:

[0149]

[0150] Where: v is the gas flow rate; P1 is the output pressure of the gas phase output device supplying compressed gas; ρ1 is the gas density;

[0151] Finally, the gas flow rate is obtained as follows:

[0152] Q=ρ1Av

[0153] Where: A is the cross-sectional area of ​​gas flow; Q is the gas flow rate.

[0154] Abrasive polishing liquid with photocatalytic auxiliary energy field applied thereto is introduced into the jet device 4, and the flow rate of the abrasive polishing liquid introduced thereto is adjusted according to the gas flow rate Q of the compressed gas;

[0155] In the polishing liquid containing solid abrasive particles, chemical reagents, and deionized water, gas is introduced through an air pump to combine the polishing liquid with the gas, wherein the gas exists in the polishing liquid in the form of bubbles, and the collapse of the bubbles increases the kinetic energy of the abrasive particles and enhances the chemical reaction of the polishing liquid. The compressed gas and the polishing liquid with abrasive particles are coupled in the jet device 4 to form a three-phase polishing liquid, i.e., a new type of gas-liquid-solid coupled polishing liquid;

[0156] In a specific embodiment, the gas phase output device is started, and the gas input pressure is calculated to be 150 kPa based on the input gas being air. Then, the gas flow rate is determined so that the total gas flow rate reaches 1 L / min. At the same time, the polishing liquid peristaltic pump 63 is controlled to make the polishing liquid flow rate reach 450 mL / min. The gas and the polishing liquid after photocatalysis are supplied to the jet device, and the gas and the polishing liquid with a photocatalytic auxiliary energy field are coupled in the jet device body 43 to form a gas-liquid-solid polishing liquid.

[0157] S4, adjust the valve of the jet device 4 (control the size of the valve by the knob) to control the jet velocity and pressure of the three-phase polishing liquid, so that the jet covers the entire inner circular surface group 31; the three-phase polishing liquid jet sprayed from the jet nozzle spreads in a fan shape, enters from the opening at one end of the inner circular surface group 31, and is discharged from the opening at the other end (such as Fig. 9 As shown), the diffused jet impacts and polishes the inner circular surface group 31, and the discharged polishing liquid accumulates in the polishing pool;

[0158] During jet polishing, since the inner ring of the bearing to be polished is small and the jet velocity is high, the jet pressure impacting the inner cylindrical surface group 31 at different axial depths can be ignored;

[0159] In order to enhance the polishing effect, the jet velocity of the three-phase polishing liquid in the jet device is calculated, the flow state of the jet is judged according to the Reynolds number of the jet velocity, and the valve of the jet device is adjusted to control the jet velocity and pressure, and the Reynolds number is kept greater than 4000, so that the three-phase polishing liquid in the jet device is in a turbulent state;

[0160] Specifically, the jet velocity is determined by the Reynolds number to determine the flow state of the jet (laminar or turbulent). When the jet velocity is high, the flow becomes turbulent, which helps to enhance the polishing effect. After determining the jet velocity, determine the jet pressure. The jet pressure should be high enough to ensure effective material removal, but at the same time avoid damage to the miniature bearing. Adjust the jet nozzle knob to achieve the required jet velocity and pressure, and perform jet polishing on the inner wall of the polished part until the processing is completed;

[0161] The calculation formula of the jet velocity of the three-phase polishing liquid of the jet device is as follows:

[0162]

[0163] Where: v1 is the jet velocity; P jet is the jet pressure; P atm is the atmospheric pressure; ρ2 is the polishing liquid density;

[0164] The Reynolds number is calculated as follows:

[0165]

[0166] Where: Re represents the Reynolds number, when the Reynolds number is greater than 4000, it is turbulent; D is the jet diameter; μ is the dynamic viscosity of the polishing liquid.

[0167] In a specific embodiment, the angle of the air jet nozzle is adjusted by the first control knob 44 on the jet device 4 so that the jet outlet is aligned with the inner wall of the micro bearing, wherein the required jet state needs to reach a turbulent state to enhance the polishing effect. According to the characteristics of the new multiphase coupled polishing liquid, it is concluded that the required jet speed needs to reach 50m / s, and then after determining that the jet pressure needs to reach 1.35MPa, the second control knob 45 is adjusted to set the jet speed and jet pressure, and the inner wall of the part to be polished is jet polished until the processing is completed.

[0168] The multi-energy field assisted multi-phase jet polishing method for micro bearings clamps the part to be polished (bearing inner ring) by fixing the intelligent clamping ultrasonic processing platform, and combines the polishing liquid tank 6, the gas phase output device 5 and the jet device 4, uses the multi-energy field (including photocatalytic energy field, ultrasonic vibration energy field, etc.) with the multi-phase jet technology to achieve the synergistic effect of the multi-energy field, and enhances the stability and effectiveness of the jet by controlling the multi-energy field effect, thereby improving the polishing quality of the complex curved surface of the inner ring of the micro bearing. It can simultaneously perform high-efficiency and low-damage polishing processing without stress scratches on multiple complex inner ring structures, effectively remove the knife marks and burrs after machining, and achieve high-precision inner surface polishing. It solves the problems of low efficiency, poor surface shape accuracy and high scrap rate of existing manual grinding and polishing. It greatly improves the polishing quality and efficiency of high-end aerospace parts.

[0169] This embodiment is aimed at the micro bearings in the aerospace field, which need to maintain excellent performance in extreme environments, and have the characteristics of small size and complex curved surface, and high-precision polishing is performed on the micro bearings. Since the surface of micro-sized bearings is more susceptible to tiny non-uniformities, a single polishing method is not enough to meet the requirements. The introduction of multi-energy field in this embodiment can make the polishing medium act more evenly on the bearing surface by accurately controlling the field strength and action area, effectively reducing the non-uniformity during the polishing process. When processing micro-sized parts, the surface accuracy can be significantly improved, avoiding subtle defects that are easily overlooked in the processing of conventional large-sized parts.

[0170] It solves the problem of difficult processing and high surface quality requirements for micro-aerospace micro-bearings in the existing technology, and can effectively support the development of advanced manufacturing technology for major equipment such as aviation and aerospace in my country.

[0171] In order to ensure the recycling of the polishing liquid, since the polishing liquid after polishing is accumulated in the polishing pool 1, the polishing pool 1 is located at the top of the polishing liquid tank 6. A pipeline with a valve is connected between the discharge port of the polishing pool 1 and the inlet of the polishing liquid tank 6 to recover the abrasive polishing liquid discharged from the other end of the inner circular surface group, and after applying the photocatalytic auxiliary energy field again, it is circulated into the jet device 4.

[0172] The parts not described in detail in the above embodiments are prior art.

[0173] It should be noted that although the present invention is described by the above embodiments, the present invention may also have other various embodiments. Without departing from the spirit and scope of the present invention, it is obvious that those skilled in the art may make various corresponding changes and deformations to the present invention, but these changes and deformations should all fall within the scope of protection of the appended claims of the present invention and their equivalents.

Claims

1. A multi-energy field assisted multiphase jet polishing method for micro bearings, characterized in that: The following steps are involved: S1. Clamp multiple bearing inner rings into a workpiece fixture, and after clamping, make the center lines of all bearing inner rings coincide, and the inner circular surfaces of adjacent bearing inner rings are connected in sequence to form an inner circular surface group with open ends; Determine the spatial position of the inner circular surface group, and adjust the position of the jet device based on the spatial position and the diffusion angle range of the jet of the jet device so that the center line of its jet nozzle coincides with the center line of the inner circular surface group and the ejected jet can cover the entire inner circular surface group; S2, providing an ultrasonic generating device covering the inner ring of the bearing to apply an ultrasonic energy field to the inner ring of the bearing; The abrasive polishing liquid is stirred evenly, and the xenon lamp light source system is started to apply a photocatalytic auxiliary energy field thereto; S3, introducing compressed gas into the jet device and calculating the gas flow rate; Passing abrasive polishing liquid to which a photocatalytic auxiliary energy field is applied into the jet device, and adjusting the flow rate of the abrasive polishing liquid according to the gas flow rate of the compressed gas; The compressed gas and the polishing liquid with abrasive are coupled in the jet device to form a three-phase polishing liquid; S4. Adjust the valve of the jet device to control the jet velocity and pressure of the three-phase polishing liquid so that the jet covers the entire inner circular surface group; the three-phase polishing liquid jet sprayed from the jet nozzle spreads in a fan shape, enters from an open end of the inner circular surface group, and is discharged from an open end of the other end, impacting and polishing the inner circular surface group.

2. The multi-energy field assisted multiphase jet polishing method for a micro bearing according to claim 1, characterized in that: After determining the working frequency and optimal power of the ultrasonic generator, start the ultrasonic generator: Among them, the following two equations are jointly solved to determine the operating frequency of the ultrasonic generating device: f=k f ×f n Where: f is the operating frequency; k f is a positive integer; f n represents the natural frequency of the inner ring of the bearing; c is the propagation speed of the sound wave in the medium; λ med is the wavelength of ultrasound; Where: k is the stiffness of the bearing inner ring material; m is the mass of the bearing inner ring; The optimal power of the ultrasonic generator is: P best =EV1 Where: E is the required sound energy density, V1 is the volume covered by the ultrasound; P best It is the optimal power of the ultrasonic generating device.

3. The multi-energy field assisted multiphase jet polishing method for a micro bearing according to claim 1, characterized in that: According to the shape of the surface of the abrasive polishing liquid, the xenon lamp light source system is adjusted so that the light spot covers the entire surface of the abrasive polishing liquid, the output power and illumination time of the xenon lamp light source system are calculated, and according to the output power and illumination time, the xenon lamp light source system is configured and started to apply a photocatalytic auxiliary energy field to the abrasive polishing liquid; The output power of the xenon lamp light source system is: Where: P range represents the output power of the xenon lamp light source system; P(λ) represents the power density at wavelength λ, where λ1 represents the lower limit of the spectrum wavelength; λ2 represents the upper limit of the spectrum wavelength; The illumination time of the xenon lamp light source system is: P eff =P total ×η range Where: t represents the illumination time of the xenon lamp light source system; E target is the energy required for the polishing liquid, which is proportional to the volume of the polishing liquid; P eff is the effective optical power; P total Represents the total output power of ultraviolet light, infrared light and visible light; η range is the spectral efficiency in the selected spectral range.

4. The multi-energy field assisted multiphase jet polishing method for a micro bearing according to claim 1, characterized in that: The gas flow rate of compressed gas delivered to the fluidic device is calculated as follows: First, obtain the gas input pressure of the jet device: P2V=nRT Where: P2 represents the gas input pressure of the jet device; V is the gas volume; n is the amount of gas substance; R is the gas constant; T is the gas temperature; Second, get the gas flow rate: Where: v is the gas flow rate; P1 is the output pressure of the gas phase output device supplying compressed gas; ρ1 is the gas density; Finally, the gas flow rate is obtained as follows: Q=ρ1Av Where: A is the cross-sectional area of ​​gas flow; Q is the gas flow rate.

5. The multi-energy field assisted multiphase jet polishing method for a micro bearing according to claim 1, characterized in that: Calculate the jet velocity of the three-phase polishing liquid in the jet device, determine the flow state of the jet according to the Reynolds number of the jet velocity, adjust the valve of the jet device to control the jet velocity and pressure, keep the Reynolds number greater than 4000, and make the three-phase polishing liquid in the jet device in a turbulent state; The calculation formula of the jet velocity of the three-phase polishing liquid of the jet device is as follows: Where: v1 is the jet velocity; P jet is the jet pressure; P atm is the atmospheric pressure; ρ2 is the polishing liquid density; The Reynolds number is calculated as follows: Where: Re represents the Reynolds number, when the Reynolds number is greater than 4000, it is turbulent; D is the jet diameter; μ is the dynamic viscosity of the polishing liquid.

6. The multi-energy field assisted multiphase jet polishing method for a micro bearing according to claim 1, characterized in that: The abrasive polishing liquid discharged from the other end of the inner circular surface group is recovered, and after the photocatalytic auxiliary energy field is applied again, it is circulated into the jet device.

7. The multi-energy field assisted multiphase jet polishing method for a micro bearing according to claim 1, characterized in that: The abrasive polishing liquid is a CMP polishing liquid.

8. A multi-energy field assisted multiphase jet polishing device for micro bearings, characterized in that: include: Workpiece fixture: used to clamp multiple bearing inner rings, so that the inner circular surfaces of adjacent bearing inner rings are connected in sequence to form an inner circular surface group with open ends after clamping; Ultrasonic generating device: connected to the workpiece fixture, used to apply an ultrasonic auxiliary energy field to the inner ring of the bearing in the workpiece fixture; Polishing liquid tank: used to supply abrasive polishing liquid; Xenon lamp light source system: used to apply photocatalytic auxiliary energy field to the abrasive polishing liquid in the polishing liquid box; Gas phase output device: used to supply compressed gas; Jet device: connected to the polishing liquid box and the output port of the gas phase output device, coupling the polishing liquid with abrasive after applying the photocatalytic auxiliary energy field and the compressed gas to form a three-phase polishing liquid, and finally forming a fan-shaped diffused three-phase polishing liquid jet; Jet bracket: used to adjust the spatial position of the jet device so that the center line of its jet nozzle coincides with the center line of the inner circular surface group, and the inner circular surface group is within the diffusion angle range of the jet nozzle of the jet device.

9. The multi-energy field assisted multi-phase jet polishing device for micro bearings according to claim 8, characterized in that: The middle part of the workpiece fixture is provided with a cylindrical cavity for accommodating the inner ring of the bearing, the top of the workpiece fixture is provided with a top end cover for limiting the upward movement of the inner ring of the bearing, the top end cover has a docking hole corresponding to one end opening of the inner circular surface group, and the bottom of the workpiece fixture is detachably connected with an elastic retaining member which does not block the other end opening of the inner circular surface group and applies axial pressure upward to the inner ring of the bearing.

10. The multi-energy field assisted multi-phase jet polishing device for micro bearings according to claim 9, characterized in that: The workpiece fixture is divided into two semi-cylindrical fixtures along its axial section. The two semi-cylindrical fixtures are hinged at one side joint and detachably connected at the other side joint through fasteners.

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