Multi-layer glass layer thickness detection system and method based on single-row non-uniform microlens array

Abstract

The invention discloses a multi-layer glass layer thickness detection system and method based on a single-row non-uniform microlens array, and belongs to the technical field of glass quality detection, and the system comprises a collimation laser light source module, a light beam splitting module, a focusing module, a signal acquisition module and a data processing module; wherein the collimation laser light source module comprises a light source with a tail fiber and a collimation lens for carrying out collimation processing on a light beam; the light beam splitting module comprises a light splitting plate or a light splitting cube positioned above the tested multi-layer glass; the focusing module comprises single-row non-uniformly distributed microlens arrays which are respectively positioned on two sides of the light beam splitting module; the signal acquisition module comprises linear array cameras which are respectively matched with the two microlens arrays in the focusing module; and the data processing module is configured to process multi-beam spot data acquired by the two linear array cameras by using a one-dimensional centroid method. The method can be used for rapidly, accurately and nondestructively detecting the thickness of each layer of medium of the multi-layer glass and judging whether the layer thickness of the multi-layer glass meets the standard or not.

Description

Technical Field

[0001] The invention belongs to the technical field of glass quality detection, and in particular relates to a multi-layer glass thickness detection system and method based on a single-row non-uniform microlens array. Background Art

[0002] In the field of optical manufacturing and modern industrial precision manufacturing and engineering, the thickness detection of multi-layer glass structures is a key link, which directly affects the performance of optical components and the quality of modern industrial products. Traditional detection methods, such as the use of broadband optical interference and optical heterodyne detection, can provide accurate measurement results, but are often accompanied by high equipment costs and time costs and low anti-interference capabilities. These methods usually require complex instrument settings and stable and precise environmental control. The detection process is cumbersome and time-consuming, and it is difficult to adapt to the rapid detection needs of large-scale samples in modern industrial production.

[0003] Multilayer glass includes several interfaces with different refractive indices. When faced with complex optical structures and multilayer media, traditional detection technology often has difficulty in achieving both accuracy and efficiency. Therefore, a multilayer glass thickness detection system and method based on a single-row non-uniform microlens array that can quickly and accurately detect the thickness of multilayer glass is needed. Summary of the invention

[0004] The object of the present invention is to provide a multi-layer glass thickness detection system and method based on a single-row non-uniform microlens array, which can quickly, accurately and non-destructively detect the thickness of each layer of the multi-layer glass.

[0005] To achieve the above object, the technical solution adopted by the present invention is:

[0006] A multi-layer glass thickness detection system based on a single-row non-uniform microlens array includes a collimated laser light source module, a light beam splitting module, a focusing module, a signal acquisition module and a data processing module; wherein:

[0007] The collimated laser light source module includes a light source with a pigtail and a collimating lens for collimating the light beam. The collimated laser light source module is configured such that the laser emitted by the light source is emitted and then obliquely incident on the multi-layer glass to be tested after being processed by the collimating lens, and a reflected light beam is generated on each medium interface of the multi-layer glass to be tested, and then refracted by the medium interface and emitted from the top layer of glass to form a multi-beam parallel light.

[0008] The light splitting module includes a beam splitter plate or a beam splitter cube located above the multi-layer glass to be tested, which is configured to split the multi-beam parallel light emitted from the top layer of glass into two multi-beams with equal power and orthogonal propagation directions;

[0009] The focusing module includes single-row non-uniformly distributed micro-lens arrays respectively located on both sides of the light splitting module, and the two micro-lens arrays are configured to respectively focus the two parts of the multi-light beams after being split by the light splitting module;

[0010] The signal acquisition module includes line array cameras respectively matched with two microlens arrays in the focusing module, and the two line array cameras are configured to respectively acquire light spot information of two parts of the multi-beam after beam splitting and focusing;

[0011] The data processing module is configured to use a one-dimensional centroid method to process the multi-beam spot data collected by the two line array cameras respectively.

[0012] A further improvement of the technical solution of the present invention is that the relative position of each microlens in the microlens array of the focusing module is adapted to the thickness and refractive index of each layer of standard glass, and the number of microlenses in the microlens array is the same as the number of interfaces of the multi-layer glass to be measured.

[0013] A further improvement of the technical solution of the present invention is that: one line array camera in the signal acquisition module is arranged on the focal plane of the microlens array adapted thereto, and another line array camera is located 0.3 mm behind the focal plane of the microlens array adapted thereto.

[0014] Further improvements of the technical solution of the present invention are: the light source in the collimated laser light source module is a single wavelength or narrowband light source; the splitting ratio of the beam splitter plate or beam splitter cube in the light splitting module is 50 / 50; the line array camera in the signal acquisition module can use CCD, CMOS or InGaAs.

[0015] A method for detecting the thickness of multi-layer glass based on a single-row non-uniform microlens array uses a layer thickness detection system to detect the layer thickness of the multi-layer glass, comprising the following steps:

[0016] Step S1: The laser light emitted by the light source in the collimated laser light source module is emitted from the optical fiber output port, and is collimated by the collimating lens and then incident obliquely on the multi-layer glass to be tested, and a reflected light beam is generated on each medium interface of the multi-layer glass to be tested, and then refracted again by the medium interface and emitted from the top layer of glass to form a multi-beam parallel light;

[0017] Step S2: The beam splitter or beam splitter cube in the beam splitting module splits the multi-beam parallel light emitted from the top glass into two multi-beams with equal power and orthogonal propagation directions, and the two multi-beams are respectively vertically incident on the two microlens arrays in the focusing module;

[0018] Step S3: two microlens arrays in the focusing module respectively focus the two parts of the multi-light beams split by the light splitting module in step S2;

[0019] Step S4: two line array cameras in the signal acquisition module respectively acquire the spot information of the two parts of the multi-beams focused in step S3;

[0020] Step S5: the data processing module processes the multi-beam spot data collected by the two line array cameras to obtain two columns of spot center data respectively;

[0021] Step S6: The data processing module makes a difference between the two columns of spot center data obtained in step S5 and takes the absolute value, and then compares each absolute value with 1. If one of the absolute values ​​is greater than or equal to 1, it is determined that the thickness of the inspected multi-layer glass does not meet the standard; if all the absolute values ​​are less than 1, it is determined that the thickness of the inspected multi-layer glass meets the standard.

[0022] A further improvement of the technical solution of the present invention is that: in step S1, the incident angle of the laser emitted by the light source entering the multi-layer glass to be measured is 45°, and the reflected light beams generated on each medium interface of the multi-layer glass to be measured are inclined to be emitted from the top layer of glass at an angle of 45°. The emitted multi-beam parallel light carries the position information of each interface, and the angle between the incident light beam and the emitted light beam is 90°.

[0023] A further improvement of the technical solution of the present invention is that in step S4, a part of the multi-light beams after splitting are focused on a line array camera located on the focal plane through a microlens array, and another part of the multi-light beams are focused by the microlens array and then diffused, and detected and collected by a line array camera located 0.3 mm behind the focal plane.

[0024] A further improvement of the technical solution of the present invention is that in step S5, obtaining two columns of spot center data includes the following steps:

[0025] Step S501: Determine the pixel intensity peak positions L1, L2, L3, ... L that are equal to the number n of the multi-layer glass medium interfaces to be measured through the corresponding relationship between the one-dimensional coordinates and the pixel intensity. n ;

[0026] Step S502: Divide the one-dimensional coordinates and the corresponding pixel intensities into n parts. The first part corresponds to a one-dimensional coordinate range of [1, (L1+L2) / 2], the second part corresponds to a coordinate range of [(L1+L2) / 2, (L2+L3) / 2], ..., and the n-1th part corresponds to a coordinate range of [(L n-2 +L n-1 ) / 2,(L n-1 +L n ) / 2], the coordinate range corresponding to the nth portion is [(L n-1 +L n ) / 2,end], where end represents the total number of pixels of the line array camera;

[0027] Step S503: Use the one-dimensional centroid method to process the n divided data respectively to obtain the pixel values ​​corresponding to the n light spots, wherein the formula of the one-dimensional centroid method is as follows:

[0028]

[0029] Where g(i) represents the intensity value of the i-th pixel, m is the number of pixels in the calculated portion after division, and x is the number of pixels where the center of the light spot is located in the calculated portion.

[0030] Due to the adoption of the above technical solution, the technical progress achieved by the present invention is:

[0031] The multi-layer glass thickness detection system and method based on a single-row non-uniform microlens array of the present invention can quickly, accurately and non-destructively detect the thickness of each layer of the multi-layer glass and determine whether the thickness of the multi-layer glass meets the standard.

[0032] The collimated laser light source adopted in the present invention realizes the stability and consistency of the light beam, ensures that the light beam is incident obliquely on the measured multiple layers of glass and then is emitted from the top layer of glass after being reflected and refracted on each medium interface, forming multiple beams of parallel light, which is conducive to accurately measuring the thickness of each layer of glass.

[0033] The optical splitter module used in the present invention splits the multi-beam parallel light into two parts, which is conducive to measuring the two parts of the multi-beam separately. At the same time, the focusing module used in the present invention uses a single-row non-uniformly distributed microlens array located on both sides of the optical splitter module, which can accurately focus the two parts of the multi-beam after being split by the optical splitter module. This design can improve the resolution and measurement accuracy of the system.

[0034] The signal acquisition module used in the present invention quickly acquires reflected light beams with position information of each medium interface through a line array camera adapted to two microlens arrays, thereby facilitating the data processing module to determine whether the thickness of the multi-layer glass meets the standard.

[0035] The data processing module used in the present invention processes the multi-beam spot data collected by the line array camera through a one-dimensional centroid method, and can quickly and accurately calculate the center position of the spot, and effectively determine whether the glass layer thickness meets the standard. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 It is a structural schematic diagram of a multi-layer glass thickness detection system based on a single-row non-uniform microlens array of the present invention;

[0037] Figure 2 It is a schematic flow chart of a multi-layer glass thickness detection method based on a single-row non-uniform microlens array of the present invention;

[0038] Figure 3 It is a schematic diagram of a multi-layer glass thickness detection system based on a single-row non-uniform microlens array of the present invention;

[0039] Figure 4 It is a schematic diagram of the optical path of two parallel light beams formed by the reflection and refraction of light at the upper and lower interfaces of the first layer of multi-layer glass;

[0040] Figure 5 It is a schematic diagram of the optical path when the center of the parallel light beam and the center of the microlens are offset;

[0041] Figure 6 It is a schematic diagram of the optical path calculation of a three-layer glass sample. DETAILED DESCRIPTION

[0042] The present invention is further described in detail below in conjunction with embodiments:

[0043] Example 1

[0044] like Figure 1 and Figure 3 As shown, this embodiment provides a multi-layer glass thickness detection system based on a single-row non-uniform microlens array, including a collimated laser light source module, a light beam splitting module, a focusing module, a signal acquisition module and a data processing module, wherein:

[0045] A collimated laser light source module, comprising a light source with a pigtail and a collimating lens for collimating the light beam; the module is configured such that the laser emitted by the light source is emitted from the optical fiber output port, then processed by the collimating lens, and then obliquely incident on the multi-layer glass to be tested, and a reflected light beam is generated on each medium interface of the multi-layer glass to be tested, and then refracted again through the medium interface and emitted from the top layer of glass to form a multi-beam parallel light; wherein the light source is a single wavelength or narrow-band light source, which can be continuous light or modulated millisecond or nanosecond pulse light, and the wavelength of the laser can be within the visible light wavelength range or the near-infrared light wavelength range;

[0046] A light beam splitting module, comprising a beam splitting plate or a beam splitting cube with a 50 / 50 splitting ratio located above the multi-layer glass to be tested, which is configured to split the multi-beam parallel light emitted from the top layer of glass into two multi-beams with equal power and orthogonal propagation directions;

[0047] A focusing module, comprising microlens arrays respectively located on both sides of the light splitting module, the two microlens arrays are both single-row non-uniformly distributed, and the two microlens arrays are configured to respectively focus the two parts of the multi-light beams after being split by the light splitting module;

[0048] The number of microlenses in the microlens array is the same as the number of interfaces of the multi-layer glass to be measured, and the relative position of each microlens in the microlens array is adapted to the thickness and refractive index of each layer of the standard glass, such as Figure 4 As shown in the figure, when the parallel laser is incident at an angle of θ1 from a medium with a refractive index of n1 into the first layer of the multilayer glass with a thickness of h1 and a refractive index of n2, reflection and refraction occur on the front surface of the medium layer with a refractive index of n2, and its reflection angle is still θ1. The reflected light forms the first parallel beam in the medium with a refractive index of n1, and its refraction angle θ2 can be expressed as:

[0049]

[0050] When the refracted light is transmitted to the back surface of the medium layer with a refractive index of n2, it is reflected at a reflection angle of θ2. The reflected light forms a parallel beam in the medium with a refractive index of n2. When it is transmitted to the front surface of the medium layer with a refractive index of n2, it is refracted again and transmitted to the medium with a refractive index of n1 to form a second beam of parallel light. The distance d1 between the centers of the first beam of parallel light and the second beam of parallel light can be expressed as:

[0051]

[0052] At the same time, refraction also occurs on the rear surface of the medium layer with a refractive index of n2, and refracts into the second layer of the multi-layer glass with a thickness of h2 and a refractive index of n3. After being refracted again on the rear surface, it returns to the medium with a refractive index of n1 to form the third beam of parallel light. By analogy, n beams of parallel light will be formed in the multi-layer glass. Therefore, the distance between the centers of the parallel light is related to the refractive index and thickness of each layer. The center of each microlens in the one-dimensional non-uniformly distributed microlens array coincides with the center of the parallel light beam.

[0053] The signal acquisition module includes line array cameras respectively matched with two microlens arrays in the focusing module, and the two line array cameras are configured to respectively collect the spot information of two parts of the multi-light beams after beam splitting and focusing; specifically, one of the line array cameras is located on the focal plane of the microlens array matched with it, and one part of the multi-light beams after beam splitting is focused on the line array camera through the microlens array, and the other line array camera is located 0.3mm behind the focal plane of the microlens array matched with it, and the other part of the multi-light beams after beam splitting is focused by the microlens array and then diffused, and then detected and collected by the line array camera; wherein the line array camera can adopt a multi-band photosensitive camera such as CCD, CMOS or InGaAs;

[0054] The data processing module is configured to use a one-dimensional centroid method to process the multi-beam spot data collected by the two line array cameras respectively, obtain two columns of spot center data respectively, then make a difference between the two columns of spot center data and take the absolute value, and then compare each absolute value with 1. If one of the absolute values ​​is greater than or equal to 1, it is determined that the thickness of the inspected multi-layer glass does not meet the standard; if all the absolute values ​​are less than 1, it is determined that the thickness of the inspected multi-layer glass meets the standard.

[0055] Example 2

[0056] like Figure 2 As shown, this embodiment provides a method for detecting the thickness of multi-layer glass based on a single-row non-uniform microlens array. The thickness detection system in Embodiment 1 is used to detect the thickness of the multi-layer glass, and the method includes the following steps:

[0057] Step S1: The laser light emitted by the light source in the collimated laser light source module is emitted from the optical fiber output port, and after being collimated by the collimating lens, it is obliquely incident on the multi-layer glass to be tested, and a reflected light beam is generated on each medium interface of the multi-layer glass to be tested, and then refracted again by the medium interface and emitted from the top layer of glass to form a multi-beam parallel light;

[0058] Preferably, the incident angle of the laser emitted by the light source into the multi-layer glass to be tested is 45°, and the reflected light beams generated on each medium interface of the multi-layer glass to be tested are inclined to be emitted from the top layer of glass at an angle of 45°, and the emitted multi-beam parallel light carries the position information of each interface, and the angle between the incident light beam and the emitted light beam is 90°;

[0059] Step S2: the beam splitter or beam splitter cube in the beam splitting module splits the multi-beam parallel light emitted from the top glass into two multi-beams with equal power and orthogonal propagation directions, and the two multi-beams are respectively vertically incident on two single-row non-uniformly distributed microlens arrays in the focusing module;

[0060] Step S3: two microlens arrays in the focusing module respectively focus the two parts of the multi-light beams split by the light splitting module in step S2;

[0061] Step S4: two line array cameras in the signal acquisition module respectively acquire the spot information of the two parts of the multi-beams focused in step S3;

[0062] Specifically, a part of the multi-beams after beam splitting is focused on the line array camera located on the focal plane through the microlens array, and the other part of the multi-beams after beam splitting is focused by the microlens array and then diffused, and is detected and collected by the line array camera located 0.3 mm behind the focal plane; that is, when the glass thickness meets the standard, the center of the multi-beam coincides with the center of the corresponding microlens, and the centers of the multi-beams detected by the two line array cameras are the same. When the glass thickness does not meet the standard, the center of the multi-parallel beam and the corresponding center of the microlens will deviate. In this case, the center of the multi-beam detected by the line array camera located on the focal plane is still the same as before, but based on the basic principle of rectilinear propagation of light, the parallel light deviating from the center of the microlens converges at the focus and continues to propagate forward along the inclined direction. Therefore, Figure 5 As shown, the center of the multi-beam detected by the line array camera located 0.3 mm behind the focal plane will deviate from that before;

[0063] Step S5: The data processing module processes the multi-beam spot data collected by the two line array cameras to obtain two columns of spot center data respectively, including the following steps:

[0064] Step S501: Determine the pixel intensity peak positions L1, L2, L3, ... L that are equal to the number n of the multi-layer glass medium interfaces to be measured through the corresponding relationship between the one-dimensional coordinates and the pixel intensity. n ;

[0065] Step S502: Divide the one-dimensional coordinates and the corresponding pixel intensities into n parts. The first part corresponds to a one-dimensional coordinate range of [1, (L1+L2) / 2], the second part corresponds to a coordinate range of [(L1+L2) / 2, (L2+L3) / 2], ..., and the n-1th part corresponds to a coordinate range of [(L n-2 +L n-1 ) / 2,(L n-1 +L n ) / 2], the coordinate range corresponding to the nth portion is [(L n-1 +L n ) / 2,end], where end represents the total number of pixels of the line array camera;

[0066] Step S503: Use the one-dimensional centroid method to process the n divided data respectively to obtain the pixel values ​​corresponding to the n light spots, wherein the formula of the one-dimensional centroid method is as follows:

[0067]

[0068] Where g(i) represents the intensity value of the i-th pixel, m is the number of pixels in the calculated portion after the division, and x is the number of pixels where the center of the light spot in the calculated portion is located;

[0069] Step S6: The data processing module makes a difference between the two columns of spot center data obtained in step S5 and takes the absolute value, and then compares each absolute value with 1. If one of the absolute values ​​is greater than or equal to 1, it is determined that the thickness of the inspected multi-layer glass does not meet the standard; if all the absolute values ​​are less than 1, it is determined that the thickness of the inspected multi-layer glass meets the standard.

[0070] The present invention will be described below in conjunction with specific examples:

[0071] like Figure 6 As shown, three layers of glass, which are glass G1 (refractive index n2=1.45, thickness h1=6 mm), glue layer P1 (refractive index n3=1.0, thickness h2=9 mm), and glass G2 (refractive index n4=1.45, thickness h3=6 mm) from top to bottom, are selected for detection. Accordingly, the number of microlenses included in the two single-row non-uniformly distributed microlens arrays L2 and L3 in the focusing module are both four, and the light splitting module adopts a beam splitter. The detection system in Example 1 and the detection method in Example 2 are used to detect the thickness of the multi-layer glass, including the following steps:

[0072] Step S1: The laser emitted by the light source in the collimated laser light source module is emitted through the optical fiber output port, and after being collimated by the collimating lens L1, it is incident on the multi-layer glass to be tested at an angle of θ1=45°. The incident light beam generates reflected light beams on the four medium interfaces between glass G1 and air, glass G1 and P1, P1 and glass G2, and glass G2 and air, respectively. Then, after being refracted again by the medium interface, the four reflected light beams are obliquely emitted from the glass G1. The distance between the centers of the four parallel light beams is related to the thickness and refractive index of each layer of the multi-layer glass. In this example, the distances between the four parallel light beams are: d1=4.74mm, d2=12.73mm, d3=4.74mm. If the thickness of the third layer of glass is less than 6mm, but is 5.9mm, the distances between the four parallel light beams are: d1=4.74mm, d2=12.73mm, d3=4.66mm.

[0073] Step S2: The beam splitter divides the four parallel light beams emitted from the glass G1 into two parts, which are respectively vertically incident on the four microlenses of the two microlens arrays L2 and L3 of the focusing module, and the centers of the four microlenses coincide with the centers of the four parallel light beams when the multilayer glass is of standard thickness;

[0074] Step S3: two microlens arrays in the focusing module respectively focus the two parts of the multi-light beams after being split by the beam splitter in step S2, assuming that the focal length of the microlens is 3 mm;

[0075] Step S4: two line array cameras with a pixel number of 1*8192 in the signal acquisition module respectively acquire the spot information of the two parts of the multi-beams focused in step S3; specifically, one of the line array cameras is located on the focal plane of the microlens array adapted thereto, and one part of the multi-beams after beam splitting is focused on the line array camera through the microlens array, and the other line array camera is located 0.3 mm behind the focal plane of the microlens array adapted thereto, and the other part of the multi-beams after beam splitting is focused by the microlens array and then diffused, and then detected and acquired by the line array camera;

[0076] Step S5: The data processing module processes the multi-beam spot data collected by the two line array cameras to obtain two columns of spot center data respectively, including the following steps:

[0077] Step S501: Determine the pixel intensity peak positions L1=400, L2=1976, L3=6216, L4=7792 with the same number of interfaces as the multi-layer glass medium to be measured through the corresponding relationship between the one-dimensional coordinates and the pixel intensity;

[0078] Step S502: Divide the one-dimensional coordinates and the corresponding pixel intensities into 4 parts. The one-dimensional coordinate range corresponding to the first part is [1,1188], the coordinate range corresponding to the second part is [1188,4096], the coordinate range corresponding to the third part is [4096,7008], and the coordinate range corresponding to the fourth part is [7008,8192];

[0079] Step S503: Use the one-dimensional centroid method to process the four divided data respectively to obtain the pixel values ​​corresponding to the four light spots, x1=400, x2=1976, x3=6216, x4=7792; if all layers of the multi-layer glass meet the standards, the centers of the light spots collected by the two line array cameras are consistent. If the thickness of the third layer of glass is less than 6 mm and is 5.9 mm, the centers of the four light spots collected by the line array camera located in the focal plane are still located at x1=400, x2=1976, x3=6216, x4=7792, and the centers of the four light spots collected by the line array camera located 0.3 mm behind the focal plane are x1=400, x2=1976, x3=6216, x4=7795, and the center of the fourth light spot deviates.

[0080] It is to be understood that the present invention is described by some embodiments, and it is known to those skilled in the art that various changes or equivalent substitutions may be made to these features and embodiments without departing from the spirit and scope of the present invention. In addition, under the teachings of the present invention, these features and embodiments may be modified to adapt to specific circumstances and materials without departing from the spirit and scope of the present invention. Therefore, the present invention is not limited by the specific embodiments disclosed herein, and all embodiments falling within the scope of the claims of this application are within the scope of protection of the present invention.

Claims

1. A multi-layer glass thickness detection system based on a single-row non-uniform microlens array, characterized in that: It includes a collimated laser light source module, a light beam splitting module, a focusing module, a signal acquisition module and a data processing module; wherein, The collimated laser light source module includes a light source with a pigtail and a collimating lens for collimating the light beam. The collimated laser light source module is configured such that the laser emitted by the light source is emitted and then obliquely incident on the multi-layer glass to be tested after being processed by the collimating lens, and a reflected light beam is generated on each medium interface of the multi-layer glass to be tested, and then refracted by the medium interface and emitted from the top layer of glass to form a multi-beam parallel light. The light splitting module includes a beam splitter plate or a beam splitter cube located above the multi-layer glass to be tested, which is configured to split the multi-beam parallel light emitted from the top layer of glass into two multi-beams with equal power and orthogonal propagation directions; The focusing module includes single-row non-uniformly distributed micro-lens arrays respectively located on both sides of the light splitting module, and the two micro-lens arrays are configured to respectively focus the two parts of the multi-light beams after being split by the light splitting module; The signal acquisition module includes line array cameras respectively matched with two microlens arrays in the focusing module, and the two line array cameras are configured to respectively acquire light spot information of two parts of the multi-beam after beam splitting and focusing; The data processing module is configured to use a one-dimensional centroid method to process the multi-beam spot data collected by the two line array cameras respectively.

2. The multi-layer glass thickness detection system based on a single-row non-uniform microlens array according to claim 1, characterized in that: The relative position of each microlens in the microlens array of the focusing module is adapted to the thickness and refractive index of each layer of standard glass, and the number of microlenses in the microlens array is the same as the number of interfaces of the multi-layer glass to be measured.

3. The multi-layer glass thickness detection system based on a single-row non-uniform microlens array according to claim 2, characterized in that: One of the line array cameras in the signal acquisition module is arranged on the focal plane of the micro lens array adapted thereto, and the other line array camera is located 0.3 mm behind the focal plane of the micro lens array adapted thereto.

4. The multi-layer glass thickness detection system based on a single-row non-uniform microlens array according to claim 3, characterized in that: The light source in the collimated laser light source module is a single wavelength or narrow band light source; the light splitting ratio of the light splitting plate or light splitting cube in the light splitting module is 50 / 50; the line array camera in the signal acquisition module can be CCD, CMOS or InGaAs.

5. A method for detecting the thickness of multi-layer glass based on a single-row non-uniform microlens array, characterized in that: The layer thickness detection system according to any one of claims 1 to 4 is used to detect the layer thickness of multi-layer glass, comprising the following steps: Step S1: The laser light emitted by the light source in the collimated laser light source module is emitted from the optical fiber output port, and is collimated by the collimating lens and then incident obliquely on the multi-layer glass to be tested, and a reflected light beam is generated on each medium interface of the multi-layer glass to be tested, and then refracted again by the medium interface and emitted from the top layer of glass to form a multi-beam parallel light; Step S2: The beam splitter or beam splitter cube in the beam splitting module splits the multi-beam parallel light emitted from the top glass into two multi-beams with equal power and orthogonal propagation directions, and the two multi-beams are respectively vertically incident on the two microlens arrays in the focusing module; Step S3: two microlens arrays in the focusing module respectively focus the two parts of the multi-light beams split by the light splitting module in step S2; Step S4: two line array cameras in the signal acquisition module respectively acquire the spot information of the two parts of the multi-beams focused in step S3; Step S5: the data processing module processes the multi-beam spot data collected by the two line array cameras to obtain two columns of spot center data respectively; Step S6: The data processing module makes a difference between the two columns of spot center data obtained in step S5 and takes the absolute value, and then compares each absolute value with 1. If one of the absolute values ​​is greater than or equal to 1, it is determined that the thickness of the inspected multi-layer glass does not meet the standard; if all the absolute values ​​are less than 1, it is determined that the thickness of the inspected multi-layer glass meets the standard.

6. The method for detecting the thickness of multi-layer glass based on a single-row non-uniform microlens array according to claim 5, characterized in that: In step S1, the incident angle of the laser emitted by the light source entering the multi-layer glass to be tested is 45°, and the reflected light beams generated on each medium interface of the multi-layer glass to be tested are inclined to be emitted from the top layer of glass at an angle of 45°. The emitted multi-beam parallel light carries the position information of each interface, and the angle between the incident light beam and the emitted light beam is 90°.

7. The method for detecting the thickness of multi-layer glass based on a single-row non-uniform microlens array according to claim 6, characterized in that: In step S4, a portion of the multi-light beams after beam splitting is focused on a line array camera located on a focal plane through a microlens array, and another portion of the multi-light beams is focused by the microlens array and then diffused, and is detected and collected by a line array camera located 0.3 mm behind the focal plane.

8. The method for detecting the thickness of multi-layer glass based on a single-row non-uniform microlens array according to claim 7, characterized in that: In step S5, obtaining two columns of spot center data includes the following steps: Step S501: Determine the pixel intensity peak positions L1, L2, L3, ... L that are equal to the number n of the multi-layer glass medium interfaces to be measured through the corresponding relationship between the one-dimensional coordinates and the pixel intensity. n ; Step S502: Divide the one-dimensional coordinates and the corresponding pixel intensities into n parts. The first part corresponds to a one-dimensional coordinate range of [1, (L1+L2) / 2], the second part corresponds to a coordinate range of [(L1+L2) / 2, (L2+L3) / 2], ..., and the n-1th part corresponds to a coordinate range of [(L n-2 +L n-1 ) / 2,(L n-1 +L n ) / 2], the coordinate range corresponding to the nth portion is [(L n-1 +L n ) / 2,end], where end represents the total number of pixels of the line array camera; Step S503: Use the one-dimensional centroid method to process the n divided data respectively to obtain the pixel values ​​corresponding to the n light spots, wherein the formula of the one-dimensional centroid method is as follows: Where g(i) represents the intensity value of the i-th pixel, m is the number of pixels in the calculated portion after division, and x is the number of pixels where the center of the light spot is located in the calculated portion.

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