Temperature control system and temperature control method

Abstract

The invention provides a temperature control system and a temperature control method. The system comprises a refrigerating device and a circulating device. The refrigerating device comprises a compressor, a heat accumulator, a condenser, an evaporator and a supercooling liquid accumulator; the circulating device comprises circulating liquid driving equipment and a heat exchanger; for the refrigerating device, the temperature can be increased through the heat accumulator in the temperature increasing process, so that the temperature increasing speed is increased; the supercooling liquid storage device carries out supercooling treatment on the refrigerant and stores the refrigerant, and cooling can be carried out through the supercooling liquid storage device in the cooling process, so that the cooling speed is increased; for the circulating device, in the heating and cooling process, factory service water of the heat exchanger can conduct preposed heating and cooling on circulating liquid firstly, and the heating and cooling speed is further increased. Therefore, under the condition that the power of the compressor, the condenser and the evaporator does not need to be increased, the heating and cooling waiting time is shortened, the production efficiency is improved, energy is saved, consumption is reduced, the equipment production cost is reduced, and equipment miniaturization is facilitated.

Description

Technical Field

[0001] The present application relates to the field of control technology, and in particular to a temperature control system and a temperature control method. Background Art

[0002] As an important equipment in the manufacturing process of semiconductor integrated circuits, semiconductor temperature control devices are required to provide the required temperature output in the etching process of integrated circuit manufacturing to control the temperature of the etching equipment process chamber. In actual use, semiconductor temperature control devices accurately control the temperature through cooling and heating links. The etching equipment process chamber requires different temperatures throughout the entire process to meet the production process. Generally, the temperature is switched periodically between -20°C and 90°C. This requires the semiconductor temperature control device to switch different temperatures according to process needs. When the process chamber temperature reaches the target value, the corresponding process production can be carried out. Waiting time will occur during the temperature rise and fall process. The traditional temperature control device has a long waiting time when switching from high temperature to low temperature, or from low temperature to high temperature, which affects the production efficiency. Summary of the invention

[0003] In view of this, the purpose of the present application is to provide a temperature control system and a temperature control method to solve the problem that the existing temperature control equipment has a long waiting time for temperature increase and decrease, which affects production efficiency.

[0004] The embodiment of the present application provides a temperature control system, the system comprising a refrigeration device and a circulation device; the refrigeration device comprises a compressor, a heat accumulator, a condenser, an evaporator and a supercooling liquid storage device; the circulation device comprises a circulating liquid driving device and a heat exchanger;

[0005] The outlet end of the first heat exchange channel in the evaporator is connected to the inlet end of the compressor; the outlet end of the compressor includes two paths, the first path is connected to the inlet end of the first heat exchange channel in the heat accumulator, and the second path and the outlet end of the first heat exchange channel in the heat accumulator are connected together to the inlet end of the second heat exchange channel in the condenser and the inlet end of the first heat exchange channel in the evaporator;

[0006] The outlet end of the second heat exchange channel in the condenser is connected to the inlet end of the supercooling liquid reservoir, and the outlet end of the supercooling liquid reservoir is connected to the inlet end of the first heat exchange channel in the evaporator;

[0007] The outlet end of the second heat exchange channel in the evaporator is connected to the inlet end of the circulating liquid driving device; the outlet end of the circulating liquid driving device includes four paths, the first path is connected to the inlet end of the second heat exchange channel in the evaporator through the second heat exchange channel in the heat accumulator, the second path is connected to the inlet end of the second heat exchange channel in the evaporator through the second heat exchange channel in the heat exchanger and the second heat exchange channel in the heat accumulator in sequence, the third path is connected to the inlet end of the second heat exchange channel in the evaporator through the second heat exchange channel in the heat exchanger, and the fourth path is connected to the inlet end of the second heat exchange channel in the evaporator;

[0008] Among them, the heat accumulator stores heating energy, the supercooling liquid storage device supercools and stores the refrigerant; the service water in the first heat exchange channel of the heat exchanger exchanges heat with the circulating liquid in the second heat exchange channel; the refrigerant in the refrigeration device is controlled to be heated and cooled in various components of the refrigeration device, and the heating and cooling of the circulating liquid is controlled by adjusting the on-off of the four circuits included in the outlet end of the circulating liquid driving device to adjust the temperature of the circulating liquid, so that the circulating liquid can control the temperature of the load equipment.

[0009] Further, the circulating fluid driving device includes a water tank, a water pump and a heater;

[0010] The inlet end of the water tank serves as the inlet end of the circulating liquid driving device, the outlet end of the water tank is connected to the inlet end of the water pump, the outlet end of the water pump is connected to the inlet end of the heater, the outlet end of the heater is connected to the liquid inlet corresponding to the load device, and the liquid outlet corresponding to the load device serves as the outlet end of the circulating liquid driving device.

[0011] Furthermore, the outlet end of the second heat exchange channel in the condenser is also connected to the inlet end of the external cooling pipeline of the supercooling liquid reservoir, and the inlet end of the external cooling pipeline is connected to the inlet end of the compressor;

[0012] Wherein, the external cooling pipeline is arranged outside the liquid storage space in the supercooling liquid storage device, and is used to cool the coolant stored in the liquid storage space.

[0013] Furthermore, the outlet end of the second heat exchange channel in the condenser is also connected to the inlet end of the first heat exchange channel in the evaporator.

[0014] The embodiment of the present application further provides a temperature control method, which is applied to any of the temperature control systems described above; the method comprises:

[0015] According to the temperature adjustment instruction received from the load device, the valves on each pipeline in the temperature control system are controlled so that the refrigerant in the refrigeration device is heated and cooled in each component of the temperature control system, and the four circuits included in the outlet end of the circulating liquid driving device are switched on and off to adjust the heating and cooling links of the circulating liquid, so as to adjust the temperature of the circulating liquid and enable the circulating liquid to control the temperature of the load device.

[0016] Further, the first path of the outlet end of the compressor is connected to the inlet end of the first heat exchange channel in the heat accumulator through the first valve; the second path of the outlet end of the compressor is connected to the outlet end of the first heat exchange channel in the heat accumulator through the second valve, and is connected to the inlet end of the first heat exchange channel in the evaporator through the third valve; the outlet end of the supercooling liquid storage device is connected to the inlet end of the first heat exchange channel in the evaporator through the fourth valve; the outlet end of the second heat exchange channel in the condenser is connected to the inlet end of the external cooling pipeline of the supercooling liquid storage device through the fifth valve; the outlet end of the second heat exchange channel in the condenser is also connected to the inlet end of the first heat exchange channel in the evaporator through the sixth valve; the outlet end of the circulating liquid driving device includes four pipelines on which the first circulation valve, the second circulation valve, the third circulation valve and the fourth circulation valve are respectively arranged;

[0017] The step of controlling the valves on each pipeline in the temperature control system according to the received temperature adjustment instruction of the load device comprises:

[0018] When the temperature adjustment instruction is a temperature increase instruction, the first valve, the fourth valve and the sixth valve are closed, and the second valve and the third valve are opened;

[0019] The first circulation valve, the second circulation valve, the third circulation valve and the fourth circulation valve are controlled according to the first circulation temperature at the outlet end of the circulating liquid driving device, the second circulation temperature at the inlet end of the second heat exchange channel in the heat exchanger and the third circulation temperature at the outlet end of the second heat exchange channel in the heat accumulator.

[0020] Further, according to the first circulation temperature at the outlet end of the circulating liquid driving device, the second circulation temperature at the inlet end of the second heat exchange channel in the heat exchanger, and the third circulation temperature at the outlet end of the second heat exchange channel in the heat accumulator, the first circulation valve, the second circulation valve, the third circulation valve, and the fourth circulation valve are controlled, including:

[0021] When a first temperature difference between the second circulation temperature and the first circulation temperature is greater than or equal to a first preset threshold, the first circulation valve, the third circulation valve and the fourth circulation valve are closed, and the second circulation valve is opened;

[0022] When the first temperature difference is less than the first preset threshold, closing the second circulation valve, the third circulation valve and the fourth circulation valve, and opening the second circulation valve;

[0023] When the temperature difference between the third circulation temperature and the first circulation temperature is less than a second preset threshold, the first circulation valve, the second circulation valve and the third circulation valve are closed, and the fourth circulation valve is opened.

[0024] Furthermore, the step of controlling the valves on each pipeline in the temperature control system according to the received temperature adjustment instruction of the load device includes:

[0025] When the temperature adjustment instruction is a temperature reduction instruction, the second valve, the third valve and the sixth valve are closed, and the first valve and the fourth valve are opened;

[0026] The first circulation valve, the second circulation valve, the third circulation valve and the fourth circulation valve are controlled according to the first circulation temperature at the outlet end of the circulation liquid driving device and the second circulation temperature at the inlet end of the second heat exchange channel in the heat exchanger.

[0027] Further, according to the first circulation temperature at the outlet of the circulating liquid driving device and the second circulation temperature at the inlet of the second heat exchange channel in the heat exchanger, the first circulation valve, the second circulation valve, the third circulation valve and the fourth circulation valve are controlled, including:

[0028] When a third temperature difference between the first circulation temperature and the second circulation temperature is greater than or equal to a third preset threshold, closing the first circulation valve, the second circulation valve and the fourth circulation valve, and opening the third circulation valve;

[0029] When the third temperature difference is less than the third preset threshold, the first circulation valve, the second circulation valve and the third circulation valve are closed, and the fourth circulation valve is opened.

[0030] Furthermore, before controlling the valves on each pipeline in the temperature control system according to the received temperature adjustment instruction of the load device, the method further includes:

[0031] After the temperature control system is started, it enters a temperature control preparation phase and lasts for a predetermined period of time, so that the heat accumulator stores heating energy and the supercooling liquid storage device performs supercooling treatment on the refrigerant and stores it;

[0032] Among them, in the temperature control preparation stage, the second valve, the third valve, the fourth valve, the first circulation valve, the second circulation valve and the third circulation valve are closed, and the first valve and the fourth circulation valve are opened; the opening of the sixth valve is adjusted according to the fourth circulation temperature at the inlet end of the circulating liquid driving device.

[0033] An embodiment of the present application also provides an electronic device, comprising: a processor, a memory and a bus, wherein the memory stores machine-readable instructions executable by the processor, and when the electronic device is running, the processor and the memory communicate through the bus, and when the machine-readable instructions are executed by the processor, the steps of the temperature control method as described above are performed.

[0034] An embodiment of the present application further provides a computer-readable storage medium, on which a computer program is stored. When the computer program is executed by a processor, the steps of the temperature control method as described above are executed.

[0035] The embodiment of the present application provides a temperature control system and a temperature control method. For a refrigeration device, the temperature can be increased through a heat accumulator during the heating process to increase the heating speed; the supercooling liquid storage device supercools and stores the refrigerant, and can be cooled through the supercooling liquid storage device during the cooling process to increase the cooling speed; for a circulation device, during the heating and cooling process, the service water of the heat exchanger can first pre-heat the circulating liquid to further increase the heating and cooling speed. In this way, the waiting time for heating and cooling can be reduced without increasing the power of the compressor, condenser and evaporator, thereby improving production efficiency, saving energy and reducing consumption, reducing equipment production costs, and facilitating equipment miniaturization.

[0036] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, preferred embodiments are specifically cited below and described in detail with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0038] Figure 1 A schematic diagram of the structure of a temperature control system provided in an embodiment of the present application is shown;

[0039] Figure 2 One of the flow charts of a temperature control method provided in an embodiment of the present application is shown;

[0040] Figure 3 A second flow chart of a temperature control method provided in an embodiment of the present application is shown;

[0041] Figure 4 A schematic structural diagram of an electronic device provided in an embodiment of the present application is shown. DETAILED DESCRIPTION

[0042] To make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all of the embodiments. The components of the embodiments of the present application usually described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the application claimed for protection, but merely represents the selected embodiments of the present application. Based on the embodiments of the present application, each other embodiment obtained by those skilled in the art without making creative work belongs to the scope of protection of the present application.

[0043] Research has found that semiconductor temperature control devices, as important equipment in the manufacturing process of semiconductor integrated circuits, are required to provide the required temperature output in the etching process of integrated circuit manufacturing to control the temperature of the etching equipment process chamber. In actual use, semiconductor temperature control devices accurately control the temperature through cooling and heating links. The etching equipment process chamber requires different temperatures throughout the entire process to meet the production process. Generally, the temperature is switched periodically between -20°C and 90°C. This requires the semiconductor temperature control device to switch different temperatures according to process needs. Only when the process chamber temperature reaches the target value can the corresponding process production be carried out. Waiting time will occur during the temperature rise and fall process. The traditional temperature control device has a long waiting time when switching from high temperature to low temperature, or from low temperature to high temperature, which affects production efficiency.

[0044] Based on this, an embodiment of the present application provides a temperature control system to solve the problem that the waiting time for heating and cooling is long in the existing temperature control equipment, which affects the production efficiency.

[0045] See also Figure 1 , Figure 1 This is a schematic diagram of a temperature control system provided in an embodiment of the present application. Figure 1 As shown in , the temperature control system provided in the embodiment of the present application includes a refrigeration device 100 and a circulation device 200; the refrigeration device 100 includes a compressor 112, a heat accumulator 111, a condenser 113, an evaporator 115 and a supercooling liquid storage device 114; the circulation device 200 includes a circulating liquid driving device 220 and a heat exchanger 213.

[0046] The refrigeration device 100 contains a refrigerant (coolant), and the temperature of the refrigerant can be controlled by controlling the refrigerant to flow through various components in the refrigeration device 100 to increase or decrease the temperature; the circulation device 200 contains a circulating liquid, and the circulating liquid is driven by the circulating liquid driving device 220, and the circulating liquid continuously circulates in the circulation device 200, and the load device 300 can be heated or cooled; by controlling the refrigerant in the refrigeration device 100 to exchange heat with the circulating liquid in the circulation device 200 and the circulating liquid to exchange heat with the heat exchanger 213, the temperature of the circulating liquid can be adjusted, and the temperature of the load device 300 can be controlled.

[0047] The outlet end of the first heat exchange channel in the evaporator 115 is connected to the inlet end of the compressor 112; the outlet end of the compressor 112 includes two paths, the first path is connected to the inlet end of the first heat exchange channel in the heat accumulator 111, and the second path and the outlet end of the first heat exchange channel in the heat accumulator 111 are connected together to the inlet end of the second heat exchange channel in the condenser 113 and the inlet end of the first heat exchange channel in the evaporator 115;

[0048] The outlet end of the second heat exchange channel in the condenser 113 is connected to the inlet end of the supercooling liquid reservoir 114, and the outlet end of the supercooling liquid reservoir 114 is connected to the inlet end of the first heat exchange channel in the evaporator 115;

[0049] The outlet end of the second heat exchange channel in the evaporator 115 is connected to the inlet end of the circulating liquid driving device 220; the outlet end of the circulating liquid driving device 220 includes four routes, the first route is connected to the inlet end of the second heat exchange channel in the evaporator 115 through the second heat exchange channel in the heat accumulator 111, the second route is connected to the inlet end of the second heat exchange channel in the evaporator 115 through the second heat exchange channel in the heat exchanger 213 and the second heat exchange channel in the heat accumulator 111 in sequence, the third route is connected to the inlet end of the second heat exchange channel in the evaporator 115 through the second heat exchange channel in the heat exchanger 213, and the fourth route is connected to the inlet end of the second heat exchange channel in the evaporator 115.

[0050] The compressor 112 uses mechanical energy to suck the low-temperature and low-pressure gaseous refrigerant in the evaporator 115, and then compresses it into a high-temperature and high-pressure gaseous refrigerant. This process increases the pressure and temperature of the refrigerant, allowing it to release heat effectively. The first heat exchange channel in the condenser 113 is connected to the plant water to cool and condense the refrigerant in the second heat exchange channel; the first heat exchange channel in the heat exchanger 213 is also connected to the plant water to perform heat exchange on the circulating fluid in the second heat exchange channel.

[0051] The temperature of the circulating fluid is adjusted by controlling the refrigerant in the refrigeration device 100 to increase or decrease the temperature in each component of the refrigeration device 100, and by adjusting the on / off state of the four circuits included in the outlet end of the circulating fluid driving device 220 to control the temperature increase or decrease of the circulating fluid, so as to adjust the temperature of the circulating fluid, so that the circulating fluid can control the temperature of the load device 300.

[0052] On the one hand, the heat accumulator 111 stores heating energy. Specifically, the high-temperature and high-pressure gaseous refrigerant obtained after compression by the compressor 112 can heat the heat storage medium in the heat accumulator 111 through the first heat exchange channel; thus, when the circulating fluid flows through the second heat exchange channel, the heat storage medium can heat the circulating fluid. Optionally, in order to improve the heat exchange efficiency, the heat release end (the end through which the refrigerant flows, i.e., the end of the first heat exchange channel) adopts a coil method to increase the heat exchange surface, because the heat absorption end (the end through which the circulating fluid flows, i.e., the end of the second heat exchange channel) has a large flow rate and a low pressure, and a shell-and-tube design is adopted to reduce the pressure drop and increase the heat exchange area.

[0053] In addition, the service water flowing in the first heat exchange channel of the heat exchanger 213 can also exchange heat with the circulating liquid in the second heat exchange channel, that is, when the circulating temperature at the inlet of the second heat exchange channel is lower than the service water temperature at the inlet of the first heat exchange channel, the heat exchanger 213 realizes the pre-heating of the circulating liquid; that is, when the circulating temperature at the inlet of the second heat exchange channel is higher than the service water temperature at the inlet of the first heat exchange channel, the heat exchanger 213 realizes the pre-cooling of the circulating liquid. In this way, the heating and cooling speed is further improved.

[0054] Existing temperature control equipment can only heat up through the hot air discharged from the compressor and the heater device, and the heating speed is slow. If the heating speed is increased, the installed power of each component can only be increased, which brings about problems such as high energy consumption, high cost and is not conducive to the miniaturization of the equipment. In the embodiment of the present application, by adding a heat accumulator 111 and a heat exchanger 213, the heat storage medium therein can first heat up the circulating liquid once, and the circulating liquid heated once by the heat accumulator 111 enters the evaporator 115 for a second heating, so that the circulating liquid increases its temperature by continuously circulating and absorbing heat, thereby increasing the heating speed of the circulating liquid. The heat exchange effect of the heat exchanger 213 further increases the heating speed of the circulating liquid (load equipment).

[0055] On the other hand, the supercooling liquid reservoir 114 performs supercooling treatment on the refrigerant, and the liquid refrigerant obtained after the supercooling treatment is stored in the supercooling liquid reservoir 114. If the existing temperature control equipment wants to increase the cooling speed, it is necessary to increase the compressor power. At this time, the condenser and the evaporator also need to be increased accordingly. At this time, the energy consumption of the equipment increases, the size increases, and the equipment cost increases. In the embodiment of the present application, by adding a supercooling liquid reservoir 114, the refrigerant after the condenser 113 is cooled can be supercooled. Cooling again can increase the supercooling degree of the refrigerant, improve the refrigeration capacity and cooling speed, and avoid energy waste.

[0056] Furthermore, the outlet end of the second heat exchange channel in the condenser 113 is also connected to the inlet end of the external cooling pipeline of the supercooling liquid reservoir 114 , and the inlet end of the external cooling pipeline is connected to the inlet end of the compressor 112 .

[0057] The external cooling pipeline is arranged outside the liquid storage space in the supercooling liquid reservoir 114, and is used to cool the coolant stored in the liquid storage space.

[0058] In this way, by cooling the liquid storage space in the supercooling liquid storage device 114 through an external cooling pipeline, the temperature of the refrigerant in the liquid storage space can be further reduced and the refrigeration speed can be increased, thereby indirectly achieving the purpose of increasing the cooling speed of the circulating liquid.

[0059] Furthermore, the outlet end of the second heat exchange channel in the condenser 113 is also connected to the inlet end of the first heat exchange channel in the evaporator 115 .

[0060] Further, such as Figure 1 As shown in , valves are installed on each pipeline in the temperature control system to control the on and off of the circuit. Optionally, each valve is a solenoid valve, which can be switched on and off and adjusted in opening by electromagnetic signals. The refrigeration device 100 is equipped with a first valve 101, a second valve 102, a third valve 103, a fourth valve 104, a fifth valve 105 and a sixth valve 106; the circulation device 200 is equipped with a first circulation valve 212, a second circulation valve 211, a third circulation valve 201 and a fourth circulation valve 202.

[0061] More specifically, the first path of the outlet end of the compressor 112 is connected to the inlet end of the first heat exchange channel in the heat accumulator 111 through the first valve 101; the second path of the outlet end of the compressor 112 is connected to the outlet end of the first heat exchange channel in the heat accumulator 111 through the second valve 102, and is connected to the inlet end of the first heat exchange channel in the evaporator 115 through the third valve 103; the outlet end of the supercooling liquid reservoir 114 is connected to the inlet end of the first heat exchange channel in the evaporator 115 through the fourth valve 104; the outlet end of the second heat exchange channel in the condenser 113 is connected to the inlet end of the external cooling pipeline of the supercooling liquid reservoir 114 through the fifth valve 105; the outlet end of the second heat exchange channel in the condenser 113 is also connected to the inlet end of the first heat exchange channel in the evaporator 115 through the sixth valve 106.

[0062] By controlling the opening and closing of each valve, the flow direction of the refrigerant in the refrigeration device 100 and the components through which the refrigerant flows can be adjusted, thereby controlling the refrigerant to increase or decrease the temperature in each component of the refrigeration device 100 .

[0063] The four-way pipelines at the outlet of the circulating liquid driving device 220 are respectively provided with a first circulation valve 212, a second circulation valve 211, a third circulation valve 201 and a fourth circulation valve 202. The first way at the outlet of the circulating liquid driving device 220 is connected to the inlet end of the second heat exchange channel in the evaporator 115 through the first circulation valve 212; the second way is connected to the inlet end of the second heat exchange channel in the heat exchanger 213, the outlet end of the second heat exchange channel is connected to the inlet end of the second heat exchange channel in the heat accumulator 111 through the second circulation valve 211, and the outlet end of the second heat exchange channel in the heat accumulator 111 is connected to the inlet end of the second heat exchange channel in the evaporator 115; the third way is connected to the inlet end of the second heat exchange channel in the heat exchanger 213, the outlet end of the second heat exchange channel is connected to the inlet end of the second heat exchange channel in the evaporator 115 through the third circulation valve 201; the fourth way is connected to the inlet end of the second heat exchange channel in the evaporator 115 through the fourth circulation valve 202.

[0064] By controlling the opening and closing of each valve, the flow direction and components of the circulating fluid in the circulation device 200 can be adjusted, thereby controlling whether the circulating fluid flows through the heat accumulator 111 and the heat exchanger 213, thereby controlling the temperature rise and fall of the circulating fluid.

[0065] On the other hand, Figure 1 As shown in , the circulating liquid driving device 220 includes a water tank 206 , a water pump 207 , a heater 208 , and a portion of pipelines connected to a liquid inlet and a liquid outlet of the load device 300 .

[0066] The inlet end of the water tank 206 serves as the inlet end of the circulating liquid driving device 220, the outlet end of the water tank 206 is connected to the inlet end of the water pump 207, the outlet end of the water pump 207 is connected to the inlet end of the heater 208, the outlet end of the heater 208 is connected to the liquid inlet corresponding to the load device, and the liquid outlet corresponding to the load device serves as the outlet end of the circulating liquid driving device 220.

[0067] Under the power of the water pump 207, the circulating fluid is drawn out from the water tank 206 and sucked into the water pump 207 and discharged from the water pump 207 to the heater 208. The circulating fluid at the outlet of the heater 208 enters the corresponding position of the load device and exchanges heat with the load device. Afterwards, the circulating fluid returns to the water tank 206 or returns to the water tank 206 through the second heat exchange channel of the heat accumulator 111.

[0068] Here, the temperature of the circulating fluid at the inlet of the water tank 206 can be collected by the temperature sensor 205, and the temperature T209 of the circulating fluid at the liquid inlet corresponding to the load device can be collected by the temperature sensor 209. By comparing T205 and T209, the heater 208 is controlled to heat the circulating fluid.

[0069] The embodiment of the present application provides a temperature control system. For a refrigeration device, the temperature can be increased through a heat accumulator during the heating process to increase the heating speed; the supercooling liquid storage device supercools and stores the refrigerant, and can be cooled through the supercooling liquid storage device during the cooling process to increase the cooling speed; for a circulation device, during the heating and cooling process, the service water of the heat exchanger can first pre-heat the circulating liquid to further increase the heating and cooling speed. In this way, the waiting time for heating and cooling can be reduced without increasing the power of the compressor, condenser and evaporator, thereby improving production efficiency, saving energy and reducing consumption, reducing equipment production costs, and facilitating equipment miniaturization.

[0070] The present application also provides a temperature control method, which can be applied to the temperature control system described in any of the above embodiments, and can be a controller in the temperature control system. The controller can obtain the current operating parameters of each component by communicating with each component in the temperature control system, and send control instructions to each component to adjust the operating parameters of each component. Specifically, the temperature control method includes:

[0071] According to the temperature adjustment instructions received from the load equipment, the valves on the various pipelines in the temperature control system are controlled so that the refrigerant in the refrigeration device 100 is heated and cooled in the various components of the temperature control system, and the four circuits included in the outlet end of the circulating liquid driving device 220 are switched on and off to adjust the heating and cooling links of the circulating liquid, so as to adjust the temperature of the circulating liquid and enable the circulating liquid to control the temperature of the load equipment.

[0072] The heat accumulator 111 stores heating energy, and during the heating process, the temperature can be increased through the heat accumulator 111 to increase the heating rate; the supercooling liquid storage device 114 supercools and stores the refrigerant, and during the cooling process, the temperature can be cooled through the supercooling liquid storage device 114 to increase the cooling rate; the circulating fluid in the second channel of the heat exchanger 213 can exchange heat with the medium in the first channel, such as plant water, to further increase the heating and cooling rates.

[0073] In this way, without increasing the power of the compressor 112, the condenser 113 and the evaporator 115, the waiting time for heating and cooling can be reduced, production efficiency can be improved, energy can be saved and consumption can be reduced, and equipment production costs can be reduced, which is conducive to miniaturization of equipment.

[0074] Here, the types of temperature adjustment instructions may include temperature increase instructions and temperature decrease instructions; the execution process of the temperature control method for each temperature adjustment instruction will be described in detail below.

[0075] In one possible implementation, see Figure 2 , Figure 2 This is one of the flow charts of a temperature control method provided by another embodiment of the present application. Figure 2 As shown in, the temperature control method provided in the embodiment of the present application includes:

[0076] Step a1: when the temperature adjustment instruction is a temperature increase instruction, the first valve 101, the fourth valve 104 and the sixth valve 106 are closed, and the second valve 102 and the third valve 103 are opened.

[0077] When the load device requires high temperature, the temperature control system needs to increase the temperature. At this time, a temperature increase instruction will be generated. The temperature increase target value can be set in the temperature increase instruction (it can be the temperature target value of the circulating fluid at the liquid inlet corresponding to the load device, that is, Figure 1 The temperature T209 collected by the temperature sensor 209 is obtained. At this time, valves 101, 104, and 106 are closed, and valves 102 and 103 are opened.

[0078] Step a2, controlling the first circulation valve 212, the second circulation valve 211, the third circulation valve 201 and the fourth circulation valve 202 according to the first circulation temperature at the outlet end of the circulating liquid driving device 220, the second circulation temperature at the inlet end of the second heat exchange channel in the heat exchanger 213 and the third circulation temperature at the outlet end of the second heat exchange channel in the heat accumulator 111.

[0079] In this step, the first circulation temperature T204 can be collected through the temperature sensor 204 provided at the outlet of the circulating liquid driving device 220; the second circulation temperature T214 can be collected through the temperature sensor 214 provided at the inlet of the second heat exchange channel in the heat exchanger 213; the third circulation temperature T203 can be collected through the temperature sensor 203 provided at the outlet of the second heat exchange channel in the heat accumulator 111. Afterwards, by comparing the circulation temperatures, the four pipelines included in the outlet of the circulating liquid driving device 220 are selected to be connected or disconnected, thereby controlling the opening and closing of the corresponding valves.

[0080] In a possible implementation, step a2 may include:

[0081] Step a21, when a first temperature difference between the second circulation temperature and the first circulation temperature is greater than or equal to a first preset threshold, closing the first circulation valve 212, the third circulation valve 201 and the fourth circulation valve 202, and opening the second circulation valve 211;

[0082] Step a22: when the first temperature difference is less than the first preset threshold, close the second circulation valve 211, the third circulation valve 201 and the fourth circulation valve 202, and open the first circulation valve 212;

[0083] Step a23: when the temperature difference between the third circulation temperature and the first circulation temperature is less than a second preset threshold, close the first circulation valve 212, the second circulation valve 211 and the third circulation valve 201, and open the fourth circulation valve 202.

[0084] For the above steps, when T214-T204≥TE, valve 211 is opened, 212, 201, 202 are closed, and the circulating fluid is heated once through heat exchanger 213 (TE represents the first preset threshold value, which is generally 3-5°C according to experience).

[0085] When T214-T204 is less than TE, valves 211, 201, and 202 are closed, and valve 212 is opened. At this time, the circulating liquid that has been heated once enters the heat exchange tube at the heat absorption end of the heat accumulator 111, and the circulating liquid exchanges heat with the heat storage medium in the heat accumulator 111, and the heat storage medium heats the circulating liquid a second time. After that, the circulating liquid that has been heated twice in the heat accumulator 111 enters the evaporator 115. The hot air discharged from the compressor 112 enters the evaporator 115 through the valve 103, and the circulating liquid and the hot air exchange heat in the evaporator 115. The hot air flowing through one side of the evaporator 115 heats the circulating liquid for the third time. The circulating liquid increases its temperature by continuously circulating and absorbing heat.

[0086] During the heating process, T204 and T203 are compared in real time, TA=T203-T204, and TA will gradually decrease as the heat of the heat storage medium is released. When TA≤TB, it is considered that the heat release of the heat storage medium in the heat accumulator 111 is basically completed. TB represents the second preset threshold value, which is an empirical value, such as 2°C-5°C. It can be set according to different temperature control systems, and this application does not impose any restrictions here. At this time, valve 202 is opened, and valves 201, 211, and 212 are closed. The circulating fluid directly enters the evaporator 115 and exchanges heat with the high-temperature hot air discharged by the compressor 112 to heat up.

[0087] It should be noted that when the temperature rises to the target value set by the temperature increase instruction, the temperature increase process ends. Accordingly, the temperature control system enters the working mode, at which time the system only needs a small amount of energy to maintain the current temperature. For example, the system can adjust the valve opening and the power of each component through existing control algorithms such as PID according to the target value and the actual detected temperature value, so that the system operates in a stable state.

[0088] In another possible implementation, see Figure 3 , Figure 3 This is a second flow chart of a temperature control method provided by another embodiment of the present application. Figure 3 As shown in, the temperature control method provided in the embodiment of the present application includes:

[0089] Step b1: when the temperature adjustment instruction is a cooling instruction, the second valve 102, the third valve 103 and the sixth valve 106 are closed, and the first valve 101 and the fourth valve 104 are opened.

[0090] When the load device requires a low temperature, the temperature control system needs to cool down. At this time, a cooling instruction will be generated. The cooling instruction can set the target value of the cooling (which can be the target temperature value of the circulating fluid at the liquid inlet corresponding to the load device, i.e. Figure 1 At this time, valves 102, 103, and 106 are closed, and valves 101 and 104 are opened.

[0091] Step b2, controlling the first circulation valve 212, the second circulation valve 211, the third circulation valve 201 and the fourth circulation valve 202 according to the first circulation temperature at the outlet end of the circulating liquid driving device 220 and the second circulation temperature at the inlet end of the second heat exchange channel in the heat exchanger 213.

[0092] In this step, the first circulation temperature T204 can be collected through the temperature sensor 204 provided at the outlet of the circulating liquid driving device 220; the second circulation temperature T214 can be collected through the temperature sensor 214 provided at the inlet of the second heat exchange channel in the heat exchanger 213. Afterwards, by comparing the circulation temperatures, the four-way pipeline included in the outlet of the circulating liquid driving device is selected to be connected or disconnected, thereby controlling the opening and closing of the corresponding valves.

[0093] In a possible implementation, step b2 may include:

[0094] Step b21, when a third temperature difference between the first circulation temperature and the second circulation temperature is greater than or equal to a third preset threshold, closing the first circulation valve 212, the second circulation valve 211 and the fourth circulation valve 202, and opening the third circulation valve 201;

[0095] Step b22: when the third temperature difference is less than the third preset threshold, close the first circulation valve 212, the second circulation valve 211 and the third circulation valve 201, and open the fourth circulation valve 202.

[0096] With respect to the above steps, when T204-T214≥TE, valves 202, 211, 212 are closed, 201 is opened, and the circulating fluid is cooled once through the heat exchanger 213 (TE is a constant, generally 3-5°C).

[0097] When T204-T214<TE, the service water can no longer cool the circulating fluid, and valve 202 is opened and valve 201 is closed. The supercooled refrigerant stored in the supercooler enters the heat exchange channel 1 of the evaporator 115 through valve 104. At this time, the circulating fluid of the circulation system that has been cooled once by the heat exchanger 213 flows through the heat exchange channel 2 of the evaporator 115 through valve 201. The supercooled refrigerant vaporizes in the evaporator 115 and absorbs heat to quickly cool the circulating fluid.

[0098] It should be noted that when the temperature rises to the target value set by the temperature increase instruction, the temperature increase process ends. Accordingly, the temperature control system enters the working mode, valve 104 is closed, and 106 is opened. At this time, the system only needs a small amount of energy to maintain the current temperature. For example, the system can adjust the valve opening and the power of each component through existing control algorithms such as PID according to the target value and the actual detected temperature value, so that the system operates in a stable state.

[0099] Furthermore, before controlling the valves on each pipeline in the temperature control system according to the received temperature adjustment instruction of the load device, the method further includes:

[0100] Step c: after the temperature control system is started, it enters a temperature control preparation phase and lasts for a predetermined period of time, so that the heat accumulator 111 stores heating energy, and the supercooling liquid storage device 114 performs supercooling treatment on the refrigerant and stores it.

[0101] In this way, after the predetermined operation time, the heat accumulator 111 and the supercooling liquid storage 114 store sufficient heating energy and cooling energy, and can enter the heating and cooling mode of the load equipment. Among them, the predetermined time can be set based on the energy storage capacity of the heat accumulator 111 and the supercooling liquid storage 114, and this application does not impose any restrictions on this.

[0102] Among them, in the temperature control preparation stage, the second valve 102, the third valve 103, the fourth valve 104, the first circulation valve 212, the second circulation valve 211 and the third circulation valve 201 are closed, and the first valve 101 and the fourth circulation valve 202 are opened; the opening of the sixth valve 106 is adjusted according to the fourth circulation temperature at the inlet end of the circulating liquid driving device 220.

[0103] In the temperature control preparation stage, the temperature control system has been started, and the compressor 112 and the water pump 207 are running. At this time, the system is generally in a no-load state. The default temperature T209 can be set to an initial value of 20°C. At this time, valves 102, 103, 104, 201, 211, and 212 are in a closed state, and valves 101 and 202 are open.

[0104] At this time, the hot air discharged from the compressor 112 enters the heat accumulator 111 through the valve 101 to heat the heat storage medium. The temperature of the heat storage medium in the initial state is equivalent to the ambient temperature, and the temperature of the hot air discharged from the compressor 112 is generally 80-90°C. The high-temperature hot air exchanges heat through the heat accumulator 111, and while the temperature of the heat storage medium rises, the hot air is cooled once. After the first cooling, the hot air passes through the condenser 113 for a second cooling; the refrigerant after the second cooling through the condenser 113 is liquefied after the supercooling treatment in the supercooling liquid storage 114, and is stored in the supercooling liquid storage 114 in large quantities.

[0105] Here, the fourth circulation temperature T205 of the circulating liquid, that is, the actual temperature value at the inlet of the water tank 206, can be collected through the temperature sensor 205 installed at the inlet end of the circulating liquid driving equipment 220 (that is, the circulation device 200); and then, according to T205 and the set initial value of T209, the opening of the sixth valve 106 is adjusted to maintain the stability of the system.

[0106] Furthermore, in each operating stage of the system (including heating, cooling and temperature control preparation, etc.), the temperature control method also includes:

[0107] The second refrigeration temperature T109 at the inlet end of the compressor 112 is collected through the temperature sensor 109 , and the first refrigeration pressure P110 at the outlet end of the first heat exchange channel in the evaporator 115 is collected through the pressure sensor 110 .

[0108] According to the first refrigeration pressure P110 at the outlet of the evaporator 115, the saturation temperature of the refrigerant (i.e., the temperature at which the refrigerant completely evaporates under this pressure) is found, and then the actual value of superheat is obtained from the saturation temperature of the refrigerant and the second refrigeration temperature. In the embodiment of the present application, the actual value of superheat = the second refrigeration temperature (T109) at the inlet of the compressor 112 - the saturation temperature of the refrigerant. Finally, the deviation between the actual value of superheat and the preset superheat value is determined for input to the control algorithm.

[0109] The control algorithm determines the opening of the fifth valve 105 according to the superheat difference. For example, when the superheat difference is too large (the actual value of the supercooling is too high), the opening of the fifth valve 105 can be increased to take away the heat of the refrigerant in the supercooling liquid storage tank 114 to reduce the superheat and ensure the stability of the system operation.

[0110] A temperature control method provided in the embodiment of the present application can increase the temperature of the refrigeration device through the heat storage device during the heating process to increase the heating speed; the supercooling liquid storage device supercools and stores the refrigerant, and can be cooled through the supercooling liquid storage device during the cooling process to increase the cooling speed; for the circulation device, during the heating and cooling process, the service water of the heat exchanger can first perform pre-heating and cooling on the circulating liquid to further increase the heating and cooling speed. In this way, the waiting time for heating and cooling can be reduced without increasing the power of the compressor, condenser and evaporator, thereby improving production efficiency, saving energy and reducing consumption, reducing equipment production costs, and facilitating equipment miniaturization.

[0111] See also Figure 4 , Figure 4 This is a schematic diagram of the structure of an electronic device provided in an embodiment of the present application. Figure 4 As shown in , the electronic device 400 includes a processor 410 , a memory 420 and a bus 430 .

[0112] The memory 420 stores machine-readable instructions executable by the processor 410. When the electronic device 400 is running, the processor 410 communicates with the memory 420 via the bus 430. When the machine-readable instructions are executed by the processor 410, the above-mentioned Figure 2 as well as Figure 3 The steps of the temperature control method in the method embodiment shown and the specific implementation methods can be found in the method embodiment, which will not be repeated here.

[0113] The present application also provides a computer-readable storage medium on which a computer program is stored. When the computer program is executed by a processor, the computer program can execute the above-mentioned Figure 2 as well as Figure 3 The steps of the temperature control method in the method embodiment shown and the specific implementation methods can be found in the method embodiment, which will not be repeated here.

[0114] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working processes of the systems, devices and units described above can refer to the corresponding processes in the aforementioned method embodiments and will not be repeated here.

[0115] In the several embodiments provided in the present application, it should be understood that the disclosed systems, devices and methods can be implemented in other ways. The device embodiments described above are merely schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some communication interfaces, and the indirect coupling or communication connection of devices or units can be electrical, mechanical or other forms.

[0116] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0117] In addition, each functional unit in each embodiment of the present application may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit.

[0118] If the functions are implemented in the form of software functional units and sold or used as independent products, they can be stored in a non-volatile computer-readable storage medium that is executable by a processor. Based on this understanding, the technical solution of the present application can essentially or in other words, the part that contributes to the prior art or the part of the technical solution can be embodied in the form of a software product, which is stored in a storage medium and includes several instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present application. The aforementioned storage medium includes: various media that can store program codes, such as a USB flash drive, a mobile hard disk, a read-only memory (ROM), a random access memory (RAM), a magnetic disk or an optical disk.

[0119] Finally, it should be noted that the above-described embodiments are only specific implementation methods of the present application, which are used to illustrate the technical solutions of the present application, rather than to limit them. The protection scope of the present application is not limited thereto. Although the present application is described in detail with reference to the above-mentioned embodiments, ordinary technicians in the field should understand that any technician familiar with the technical field can still modify the technical solutions recorded in the above-mentioned embodiments within the technical scope disclosed in the present application, or can easily think of changes, or make equivalent replacements for some of the technical features therein; and these modifications, changes or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application, and should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A temperature control system, characterized in that: The system comprises a refrigeration device and a circulation device; the refrigeration device comprises a compressor, a heat accumulator, a condenser, an evaporator and a supercooling liquid storage device; the circulation device comprises a circulating liquid driving device and a heat exchanger; The outlet end of the first heat exchange channel in the evaporator is connected to the inlet end of the compressor; the outlet end of the compressor includes two paths, the first path is connected to the inlet end of the first heat exchange channel in the heat accumulator, and the second path and the outlet end of the first heat exchange channel in the heat accumulator are connected together to the inlet end of the second heat exchange channel in the condenser and the inlet end of the first heat exchange channel in the evaporator; The outlet end of the second heat exchange channel in the condenser is connected to the inlet end of the supercooling liquid reservoir, and the outlet end of the supercooling liquid reservoir is connected to the inlet end of the first heat exchange channel in the evaporator; The outlet end of the second heat exchange channel in the evaporator is connected to the inlet end of the circulating liquid driving device; the outlet end of the circulating liquid driving device includes four paths, the first path is connected to the inlet end of the second heat exchange channel in the evaporator through the second heat exchange channel in the heat accumulator, the second path is connected to the inlet end of the second heat exchange channel in the evaporator through the second heat exchange channel in the heat exchanger and the second heat exchange channel in the heat accumulator in sequence, the third path is connected to the inlet end of the second heat exchange channel in the evaporator through the second heat exchange channel in the heat exchanger, and the fourth path is connected to the inlet end of the second heat exchange channel in the evaporator; Among them, the heat accumulator stores heating energy, the supercooling liquid storage device supercools and stores the refrigerant; the service water in the first heat exchange channel of the heat exchanger exchanges heat with the circulating liquid in the second heat exchange channel; the refrigerant in the refrigeration device is controlled to be heated and cooled in various components of the refrigeration device, and the heating and cooling of the circulating liquid is controlled by adjusting the on-off of the four circuits included in the outlet end of the circulating liquid driving device to adjust the temperature of the circulating liquid, so that the circulating liquid can control the temperature of the load equipment.

2. The system according to claim 1, characterized in that The circulating fluid driving device includes a water tank, a water pump and a heater; The inlet end of the water tank serves as the inlet end of the circulating liquid driving device, the outlet end of the water tank is connected to the inlet end of the water pump, the outlet end of the water pump is connected to the inlet end of the heater, the outlet end of the heater is connected to the liquid inlet corresponding to the load device, and the liquid outlet corresponding to the load device serves as the outlet end of the circulating liquid driving device.

3. The system according to claim 1, characterized in that The outlet end of the second heat exchange channel in the condenser is also connected to the inlet end of the external cooling pipeline of the supercooling liquid reservoir, and the inlet end of the external cooling pipeline is connected to the inlet end of the compressor; Wherein, the external cooling pipeline is arranged outside the liquid storage space in the supercooling liquid storage device, and is used to cool the coolant stored in the liquid storage space.

4. The system according to claim 1, characterized in that The outlet end of the second heat exchange channel in the condenser is also connected to the inlet end of the first heat exchange channel in the evaporator.

5. A temperature control method, characterized in that: The method is applied to the temperature control system according to any one of claims 1 to 4; the method comprises: According to the temperature adjustment instruction received from the load device, the valves on each pipeline in the temperature control system are controlled so that the refrigerant in the refrigeration device is heated and cooled in each component of the temperature control system, and the four circuits included in the outlet end of the circulating liquid driving device are switched on and off to adjust the heating and cooling links of the circulating liquid, so as to adjust the temperature of the circulating liquid and enable the circulating liquid to control the temperature of the load device.

6. The method according to claim 5, characterized in that The first path of the outlet end of the compressor is connected to the inlet end of the first heat exchange channel in the heat accumulator through the first valve; the second path of the outlet end of the compressor is connected to the outlet end of the first heat exchange channel in the heat accumulator through the second valve, and is connected to the inlet end of the first heat exchange channel in the evaporator through the third valve; the outlet end of the supercooling liquid storage device is connected to the inlet end of the first heat exchange channel in the evaporator through the fourth valve; the outlet end of the second heat exchange channel in the condenser is connected to the inlet end of the external cooling pipeline of the supercooling liquid storage device through the fifth valve; the outlet end of the second heat exchange channel in the condenser is also connected to the inlet end of the first heat exchange channel in the evaporator through the sixth valve; the four-way pipelines included in the outlet end of the circulating liquid driving device are respectively provided with a first circulation valve, a second circulation valve, a third circulation valve and a fourth circulation valve; The step of controlling the valves on each pipeline in the temperature control system according to the received temperature adjustment instruction of the load device comprises: When the temperature adjustment instruction is a temperature increase instruction, the first valve, the fourth valve and the sixth valve are closed, and the second valve and the third valve are opened; The first circulation valve, the second circulation valve, the third circulation valve and the fourth circulation valve are controlled according to the first circulation temperature at the outlet end of the circulating liquid driving device, the second circulation temperature at the inlet end of the second heat exchange channel in the heat exchanger and the third circulation temperature at the outlet end of the second heat exchange channel in the heat accumulator.

7. The method according to claim 6, characterized in that According to the first circulation temperature at the outlet end of the circulating fluid driving device, the second circulation temperature at the inlet end of the second heat exchange channel in the heat exchanger, and the third circulation temperature at the outlet end of the second heat exchange channel in the heat accumulator, the first circulation valve, the second circulation valve, the third circulation valve, and the fourth circulation valve are controlled, including: When a first temperature difference between the second circulation temperature and the first circulation temperature is greater than or equal to a first preset threshold, the first circulation valve, the third circulation valve and the fourth circulation valve are closed, and the second circulation valve is opened; When the first temperature difference is less than the first preset threshold, closing the second circulation valve, the third circulation valve and the fourth circulation valve, and opening the first circulation valve; When the temperature difference between the third circulation temperature and the first circulation temperature is less than a second preset threshold, the first circulation valve, the second circulation valve and the third circulation valve are closed, and the fourth circulation valve is opened.

8. The method according to claim 6, characterized in that The step of controlling the valves on each pipeline in the temperature control system according to the received temperature adjustment instruction of the load device comprises: When the temperature adjustment instruction is a temperature reduction instruction, the second valve, the third valve and the sixth valve are closed, and the first valve and the fourth valve are opened; The first circulation valve, the second circulation valve, the third circulation valve and the fourth circulation valve are controlled according to the first circulation temperature at the outlet end of the circulation liquid driving device and the second circulation temperature at the inlet end of the second heat exchange channel in the heat exchanger.

9. The method according to claim 8, characterized in that According to the first circulation temperature at the outlet end of the circulating liquid driving device and the second circulation temperature at the inlet end of the second heat exchange channel in the heat exchanger, the first circulation valve, the second circulation valve, the third circulation valve and the fourth circulation valve are controlled, including: When a third temperature difference between the first circulation temperature and the second circulation temperature is greater than or equal to a third preset threshold, closing the first circulation valve, the second circulation valve and the fourth circulation valve, and opening the third circulation valve; When the third temperature difference is less than the third preset threshold, the first circulation valve, the second circulation valve and the third circulation valve are closed, and the fourth circulation valve is opened.

10. The method according to claim 6, characterized in that Before controlling the valves on each pipeline in the temperature control system according to the received temperature adjustment instruction of the load device, the method further includes: After the temperature control system is started, it enters a temperature control preparation phase and lasts for a predetermined period of time, so that the heat accumulator stores heating energy and the supercooling liquid storage device performs supercooling treatment on the refrigerant and stores it; Among them, in the temperature control preparation stage, the second valve, the third valve, the fourth valve, the first circulation valve, the second circulation valve and the third circulation valve are closed, and the first valve and the fourth circulation valve are opened; the opening of the sixth valve is adjusted according to the fourth circulation temperature at the inlet end of the circulating liquid driving device.

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