Pre-piping positioning and mounting device for installation of semiconductor equipment

Abstract

The invention discloses a pre-piping positioning and mounting device for installation of semiconductor equipment, relates to the technical field of installation of the semiconductor equipment, and solves the technical problem that a semiconductor equipment machine table cannot be accurately piping before arriving at an installation site. Comprising a mold for providing a reference surface for the direction of the special gas pipeline, and an adjusting mechanism for adjusting the spatial position and the inclination angle of the special gas pipeline is arranged on one side of the mold; the adjusting mechanism comprises a supporting frame, a mounting plate, a pipeline connector, a translation mechanism and a rotating mechanism, the pipeline connector is arranged on the side wall of the mounting plate and used for being in butt joint with the special gas pipeline, and the rotating mechanism is mounted at the top of the supporting frame. Compared with the prior art, the special gas pipeline interface at the corresponding position can be configured according to the original factory drawing of the semiconductor equipment, so that the pipelines can be quickly and accurately butted with the equipment after the pipelines are configured in advance and a standby station actually arrives, the time cost is greatly saved, and the efficiency and the accuracy of the whole installation process are improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment installation, and in particular to a pre-mounted pipe positioning and installation device for semiconductor equipment installation. Background Art

[0002] The installation of special gas pipelines is a key link in the installation process of semiconductor equipment. It not only involves the purity and stability of the gas, but is also closely related to safe production, cost-effectiveness and process adaptability.

[0003] Currently, most machines need to wait until the equipment arrives on site before the final positioning and installation of the special gas pipelines can be carried out. This phenomenon is mainly due to the complexity of the semiconductor manufacturing process and its high sensitivity to environmental conditions. In order to ensure the high-purity gas supply of the special gas system, the chance of contamination from the gas source to the gas use point must be minimized. This requires that the installation of the special gas pipeline be as close to the actual use scenario as possible, and that it be precisely adjusted according to the location of the specific equipment. In addition, pre-piping is often based on design drawings or estimated equipment layouts. However, the actual equipment on site may cause the preset pipelines to be inconsistent with the actual situation due to factors such as size differences and changes in interface positions, thereby affecting the installation efficiency and piping accuracy. In this case, if a large amount of fixed installation work is carried out in advance, it may cause material waste and additional time costs to replan the pipeline path. Summary of the invention

[0004] The purpose of the present invention is to provide a pre-pipe positioning and installation device for semiconductor equipment installation, which solves the problem that the semiconductor equipment machine cannot be accurately piped before arriving at the installation site.

[0005] The purpose of the present invention can be achieved through the following technical solutions:

[0006] A pre-pipe positioning and installation device for semiconductor equipment installation, comprising a mold providing a reference surface for the direction of a special gas pipeline, and an adjustment mechanism for adjusting the spatial position and inclination angle of the special gas pipeline is arranged on one side of the mold;

[0007] The adjustment mechanism includes a support frame, a mounting plate, a pipe joint, a translation mechanism and a rotation mechanism. The pipe joint is arranged at the side wall of the mounting plate, and the pipe joint is used to dock with the special gas pipeline. The rotation mechanism is installed on the top of the support frame, and the rotation mechanism is used to adjust the mounting plate to rotate in the XYZ three-axis directions. The mounting plate is connected to the rotation mechanism through the translation mechanism, and the translation mechanism is used to adjust the mounting plate to translate in the XYZ three-axis directions.

[0008] As a further solution of the present invention: it also includes a temporary fixing frame arranged at one end of the mold, the temporary fixing frame includes a base plate, a telescopic frame, a cantilever assembly and a fixed pipe clamp, the telescopic frame is fixedly installed on the top of the base plate, the cantilever assembly is connected to the telescopic frame, the fixed pipe clamp is installed on the lower surface of the end of the cantilever assembly, and the fixed pipe clamp is used to fix the special gas pipeline.

[0009] As a further solution of the present invention: the support frame includes a top plate, a frame, a bottom plate and a base, the top plate and the bottom plate are respectively connected to the top end and the bottom end of the frame, and the base is connected to the bottom of the bottom plate.

[0010] As a further solution of the present invention: the rotating mechanism includes a turntable, a tray, a turn pin, a support seat and a support rod, the two support seats are symmetrically installed on the top of the top plate, the turn pin passes through the two support seats and is rotatably connected thereto, the tray is connected to the top of the turn pin near both ends through the support rod, and the turntable is rotatably sleeved with the tray.

[0011] As a further solution of the present invention: an L-shaped plate is fixedly mounted on one side of the mounting plate, a U-shaped opening is provided at the end of the L-shaped plate, and an angle-adjustable laser light source is rotatably mounted in the U-shaped opening.

[0012] As a further solution of the present invention: the translation mechanism includes a fixed seat, a lower movable plate, an upper movable plate, a T-shaped block and a mounting frame with a through slot, the fixed seat is fixedly installed on the top of the turntable, the lower movable plate is slidably connected to the fixed seat, the upper movable plate is slidably connected to the lower movable plate, the mounting frame is connected to the top of the upper movable plate, the through slot is opened on a side of the mounting frame close to the mounting plate, the T-shaped block is slidably installed in the mounting frame, and one end of the T-shaped block passes through the through slot and is connected to the mounting plate.

[0013] As a further solution of the present invention: the rotating mechanism also includes a locking nut and a positioning bolt, the rotating pin is provided with external threads adapted to the locking nut at positions near both ends, and the locking nut is threadedly sleeved with the rotating pin, the positioning bolt is installed on the top of the turntable, and the positioning bolt is used to tighten the top of the tray.

[0014] As a further solution of the present invention: the translation mechanism also includes a first screw, a second screw and a third screw, a first L-shaped frame is installed on one side of the fixed seat, one end of the first screw is rotatably connected to the lower movable plate, and the first screw is threadedly connected to the first L-shaped frame, a second L-shaped frame is installed on one side of the lower movable plate, one end of the second screw is rotatably connected to the upper movable plate, and the second screw is threadedly connected to the second L-shaped frame, one end of the third screw is rotatably connected to the top of the T-shaped block, and the third screw is threadedly connected to the top of the mounting frame.

[0015] As a further solution of the present invention: the cantilever assembly includes a crossbeam, an open jacket, fastening bolts and a reinforcing column, the reinforcing column is installed on the side wall of the telescopic frame near the top, the two open jackets are respectively connected to the reinforcing column and the end of the telescopic frame, and the crossbeam is arranged through the open jacket.

[0016] As a further solution of the present invention: a counterweight block is installed on the lower surface of the end of the beam away from the fixed pipe clamp, and an adjusting screw is installed on the lower surface of the end of the beam away from the counterweight block, and the adjusting screw is connected to the top of the fixed pipe clamp through a bearing seat.

[0017] Beneficial effects of the present invention:

[0018] 1. In the present invention, the mold is used to conveniently simulate the position of the machine, so as to conveniently provide a reference surface for the direction of the special gas pipeline, and to do a good job in subsequent pipe installation avoidance. The translation mechanism is used to conveniently adjust the installation plate for translation in the XYZ three-axis direction, and the rotation mechanism is used to facilitate the installation plate to realize rotation adjustment in the XYZ three-axis direction, so that the position of the pipeline joint can be fine-tuned according to actual needs, and the pipeline joint is used to facilitate its docking with the special gas pipeline, thereby realizing the adjustment of the spatial position and inclination angle of the special gas distribution pipeline.

[0019] 2. In the present invention, by designing a mold of a simulated machine and matching the pipe joints at the corresponding positions according to the original equipment drawings, the special gas pipeline can be pre-piped. When the machine actually arrives, the special gas pipeline can be quickly and accurately connected to the equipment, thereby greatly saving time and cost and improving the efficiency and accuracy of the entire installation process. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The present invention will be further described below in conjunction with the accompanying drawings.

[0021] Figure 1 It is a stereoscopic diagram of a pre-mounted pipe positioning and installation device for semiconductor equipment installation from a first viewing angle according to the present invention;

[0022] Figure 2 It is a stereoscopic diagram of a pre-mounted pipe positioning and installation device for semiconductor equipment installation according to the present invention from a second viewing angle;

[0023] Figure 3 It is a partial stereogram of an adjustment mechanism in a pre-mounted pipe positioning and installation device for semiconductor equipment installation according to the present invention;

[0024] Figure 4 It is a three-dimensional diagram of the connection part between the mounting plate and the turntable in a pre-mounted pipe positioning and mounting device for semiconductor equipment installation of the present invention;

[0025] Figure 5 It is a three-dimensional diagram of a translation mechanism in a pre-mounted pipe positioning and installation device for semiconductor equipment installation according to the present invention;

[0026] Figure 6 The present invention is a stereoscopic diagram of the connection part between the cantilever assembly and the fixed pipe clamp in a pre-pipe positioning and installation device for semiconductor equipment installation.

[0027] In the figure: 1, special gas pipeline; 2, mold; 3, adjustment mechanism; 31, support frame; 311, top plate; 312, frame; 313, bottom plate; 314, base; 32, mounting plate; 33, pipeline joint; 34, translation mechanism; 341, fixed seat; 342, lower moving plate; 343, upper moving plate; 344, T-shaped block; 345, through groove; 346, mounting frame; 347, first screw; 348, second screw; 349, third screw; 3 5. Rotating mechanism; 351. Turntable; 352. Tray; 353. Turn pin; 354. Support seat; 355. Support rod; 356. Locking nut; 357. Positioning bolt; 4. Temporary fixing frame; 41. Base plate; 42. Telescopic frame; 43. Cantilever assembly; 431. Crossbeam; 432. Open jacket; 433. Fastening bolt; 434. Reinforcement column; 44. Fixed pipe clamp; 5. L-shaped plate; 6. Laser light source; 7. Counterweight; 8. Adjusting screw. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0029] like Figure 1-Figure 6 The present invention is a pre-pipe positioning and installation device for semiconductor equipment installation, including a mold 2 that provides a reference surface for the direction of a special gas pipeline 1, and an adjustment mechanism 3 for adjusting the spatial position and inclination angle of the special gas pipeline 1 is arranged on one side of the mold 2; the adjustment mechanism 3 includes a support frame 31, a mounting plate 32, a pipe joint 33, a translation mechanism 34 and a rotation mechanism 35, the pipe joint 33 is arranged at the side wall of the mounting plate 32, and the pipe joint 33 is used to dock with the special gas pipeline 1, the rotation mechanism 35 is installed on the top of the support frame 31, and the rotation mechanism 35 is used to adjust the mounting plate 32 to rotate in the XYZ three-axis direction, the mounting plate 32 is connected to the rotation mechanism 35 through the translation mechanism 34, and the translation mechanism 34 is used to adjust the mounting plate 32 to translate in the XYZ three-axis direction.

[0030] It should be noted that when in use, the mold 2 is used to simulate the position of the machine, and the adjustment mechanism 3 is used to accurately adjust the pipe joint 33 on the mounting plate 32 to the desired position according to the original equipment diagram, and then the special gas pipeline 1 is connected to the pipe joint 33 to achieve pre-piping of the special gas pipeline 1. When the machine actually arrives, the special gas pipeline 1 can be quickly and accurately connected to the equipment, thereby greatly saving time and cost and improving the efficiency and accuracy of the entire installation process.

[0031] like Figure 1-Figure 2 As shown, the pre-pipe positioning and installation device also includes a temporary fixing frame 4 arranged at one end of the mold 2, the temporary fixing frame 4 includes a base plate 41, a telescopic frame 42, a cantilever assembly 43 and a fixed pipe clamp 44, the telescopic frame 42 is fixedly installed on the top of the base plate 41, the cantilever assembly 43 is connected to the telescopic frame 42, the fixed pipe clamp 44 is installed on the lower surface of the end of the cantilever assembly 43, and the fixed pipe clamp 44 is used to fix the special gas pipeline 1.

[0032] It should be noted that before the equipment is placed in place, the pipe joint 33 on the adjustment mechanism 3 (such as Figure 3 As shown in the figure, in order to prevent the special gas pipeline 1 from sagging when the adjustment mechanism 3 is removed, a temporary fixing frame 4 is used to temporarily fix the special gas pipeline 1. After the subsequent machine arrives, it is directly connected and locked with the machine interface. The cantilever assembly 43 can adjust the horizontal translation of the fixed pipe clamp 44 as needed. The telescopic frame 42 is equipped with a knob for adjusting its telescopic movement, which is convenient for adjusting the height of the fixed pipe clamp 44. After the height and position of the special gas pipeline 1 are positioned, the fixed pipe clamp 44 is used to clamp and fix it. The fixed pipe clamp 44 in this embodiment is an open and close pipe clamp.

[0033] like Figure 1-Figure 2 As shown, the support frame 31 includes a top plate 311 , a frame 312 , a bottom plate 313 and a base 314 . The top plate 311 and the bottom plate 313 are respectively connected to the top and bottom ends of the frame 312 , and the base 314 is connected to the bottom of the bottom plate 313 .

[0034] It should be noted that the support frame 31 plays a role of load-bearing support, and the top plate 311 and the bottom plate 313 are connected by the frame 312, which can effectively ensure the overall support strength and support stability.

[0035] like Figure 2 and Figure 4 As shown, the rotating mechanism 35 includes a turntable 351, a tray 352, a turn pin 353, a support seat 354 and a support rod 355. The two support seats 354 are symmetrically installed on the top of the top plate 311. The turn pin 353 passes through the two support seats 354 and is rotatably connected thereto. The tray 352 is connected to the top of the turn pin 353 near both ends through the support rod 355, and the turntable 351 is rotatably sleeved with the tray 352.

[0036] It should be noted that the rotating pin 353 and the supporting seat 354 are used to facilitate the horizontal rotation, and the supporting rod 355 is used to limit the position of the tray 352, so that the turntable 351 can be rotated in the Z-axis direction.

[0037] like Figure 3-Figure 4 As shown, the rotating mechanism 35 also includes a locking nut 356 and a positioning bolt 357. The rotating pin 353 is provided with external threads adapted to the locking nut 356 near the two ends, and the locking nut 356 is threadedly sleeved with the rotating pin 353. The positioning bolt 357 is installed on the top of the turntable 351, and the positioning bolt 357 is used to tighten the top of the tray 352.

[0038] It should be noted that rotating the locking nut 356 to make it close to the side wall of the support seat 354 is convenient for locking the rotation of the rotation pin 353, and rotating the positioning bolt 357 to make its bottom end close to the top of the tray 352 is convenient for locking the rotation of the turntable 351.

[0039] like Figure 3 and Figure 5 As shown, the translation mechanism 34 includes a fixed seat 341, a lower movable plate 342, an upper movable plate 343, a T-shaped block 344 and a mounting frame 346 with a through slot 345. The fixed seat 341 is fixedly installed on the top of the turntable 351, the lower movable plate 342 is slidably connected to the fixed seat 341, the upper movable plate 343 is slidably connected to the lower movable plate 342, the mounting frame 346 is connected to the top of the upper movable plate 343, the through slot 345 is opened on one side of the mounting frame 346 close to the mounting plate 32, the T-shaped block 344 is slidably installed in the mounting frame 346, and one end of the T-shaped block 344 passes through the through slot 345 and is connected to the mounting plate 32.

[0040] It should be noted that a first slider is installed at the bottom of the lower movable plate 342, and a first slide groove for sliding the first slider is set on the top of the fixed seat 341, so as to facilitate the X-axis translation adjustment of the mounting plate 32; a second slider is installed at the bottom of the upper movable plate 343, and a second slide groove for sliding the second slider is set on the top of the lower movable plate 342, so as to facilitate the Y-axis translation adjustment of the mounting plate 32, and control the T-shaped block 344 to rise and fall along the length direction of the through slot 345, so as to facilitate the Z-axis lifting and lowering adjustment of the mounting plate 32.

[0041] like Figure 3 and Figure 5As shown, the translation mechanism 34 also includes a first screw 347, a second screw 348 and a third screw 349, a first L-shaped frame is installed on one side of the fixed seat 341, one end of the first screw 347 is rotatably connected to the lower movable plate 342, and the first screw 347 is threadedly connected to the first L-shaped frame, a second L-shaped frame is installed on one side of the lower movable plate 342, one end of the second screw 348 is rotatably connected to the upper movable plate 343, and the second screw 348 is threadedly connected to the second L-shaped frame, one end of the third screw 349 is rotatably connected to the top of the T-block 344, and the third screw 349 is threadedly connected to the top of the mounting frame 346.

[0042] It should be noted that rotating the first screw 347 facilitates the control of the lower movable plate 342, the upper movable plate 343, the mounting frame 346 and the mounting plate 32 to translate along the X-axis, rotating the second screw 348 facilitates the control of the upper movable plate 343, the mounting frame 346 and the mounting plate 32 to translate along the Y-axis, and rotating the third screw 349 facilitates the control of the mounting plate 32 to rise and fall along the Z-axis.

[0043] like Figure 3-Figure 4 As shown, an L-shaped plate 5 is fixedly mounted on one side of the mounting plate 32, a U-shaped opening is provided at the end of the L-shaped plate 5, and a laser light source 6 with an adjustable angle is rotatably mounted in the U-shaped opening.

[0044] It should be noted that the special gas pipeline 1 (such as Figure 1 As shown in the figure, use the laser beam generated by the laser light source 6 to mark the ground. To avoid accidental movement of the pipe joint 33, before installing the special gas pipeline 1, the laser beam can be stimulated again to check whether the light spots overlap and quickly check the positioning points to ensure that the docking is correct.

[0045] like Figure 2 and Figure 6 As shown, the cantilever assembly 43 includes a crossbeam 431, an open jacket 432, fastening bolts 433 and a reinforcing column 434. The reinforcing column 434 is installed on the side wall of the telescopic frame 42 near the top. The two open jackets 432 are respectively connected to the reinforcing column 434 and the end of the telescopic frame 42, and the crossbeam 431 is set through the open jacket 432.

[0046] It should be noted that by loosening the fastening bolts 433 on the open jacket 432 so that the open jacket 432 no longer exerts a clamping force on the beam 431, the beam 431 can be pushed to slide along the open jacket 432, thereby facilitating the adjustment of the position of the fixed pipe clamp 44. After adjusting to a suitable position, the fastening bolts 433 can be tightened to lock the position of the beam 431.

[0047] like Figure 6As shown, a counterweight block 7 is installed on the lower surface of the end of the beam 431 away from the fixed pipe clamp 44, and an adjusting screw 8 is installed on the lower surface of the end of the beam 431 away from the counterweight block 7. The adjusting screw 8 is connected to the top of the fixed pipe clamp 44 through a bearing seat.

[0048] It should be noted that, in the present embodiment, the weight and position of the counterweight 7 can be adjusted, and the counterweight 7 is used to facilitate balance and improve the stability of the crossbeam 431. A threaded groove corresponding to the adjusting screw 8 is provided at the bottom of the crossbeam 431. By rotating the adjusting screw 8 to control the depth of the screw 8 screwed into the threaded groove, the height position of the fixed pipe clamp 44 can be fine-tuned.

[0049] The above is a detailed description of an embodiment of the present invention, but the content is only a preferred embodiment of the present invention and cannot be considered to limit the scope of implementation of the present invention. All equivalent changes and improvements made within the scope of the present invention should still fall within the scope of the patent coverage of the present invention.

Claims

1. A pre-pipe positioning and installation device for semiconductor equipment installation, comprising a mold (2) providing a reference surface for the direction of a special gas pipeline (1), characterized in that: An adjustment mechanism (3) for adjusting the spatial position and inclination angle of the special gas pipeline (1) is provided on one side of the mold (2); The adjustment mechanism (3) comprises a support frame (31), a mounting plate (32), a pipe joint (33), a translation mechanism (34) and a rotation mechanism (35); the pipe joint (33) is arranged at the side wall of the mounting plate (32), and the pipe joint (33) is used to dock with the special gas pipeline (1); the rotation mechanism (35) is installed on the top of the support frame (31), and the rotation mechanism (35) is used to adjust the mounting plate (32) to rotate in the XYZ three-axis directions; the mounting plate (32) is connected to the rotation mechanism (35) via the translation mechanism (34), and the translation mechanism (34) is used to adjust the mounting plate (32) to translate in the XYZ three-axis directions.

2. A pre-mounted pipe positioning and installation device for semiconductor equipment installation according to claim 1, characterized in that: The invention also comprises a temporary fixing frame (4) arranged at one end of the mold (2), the temporary fixing frame (4) comprising a base plate (41), a telescopic frame (42), a cantilever assembly (43) and a fixed pipe clamp (44), the telescopic frame (42) being fixedly mounted on the top of the base plate (41), the cantilever assembly (43) being connected to the telescopic frame (42), the fixed pipe clamp (44) being mounted on the lower surface of the end of the cantilever assembly (43), and the fixed pipe clamp (44) being used to fix the special gas pipeline (1).

3. A pre-mounted pipe positioning and installation device for semiconductor equipment installation according to claim 1, characterized in that: The support frame (31) comprises a top plate (311), a frame (312), a bottom plate (313) and a base (314); the top plate (311) and the bottom plate (313) are respectively connected to the top and bottom ends of the frame (312); and the base (314) is connected to the bottom of the bottom plate (313).

4. A pre-mounted pipe positioning and installation device for semiconductor equipment installation according to claim 3, characterized in that: The rotating mechanism (35) comprises a rotating disk (351), a tray (352), a rotating pin (353), a supporting seat (354) and a supporting rod (355); the two supporting seats (354) are symmetrically mounted on the top of the top plate (311); the rotating pin (353) passes through the two supporting seats (354) and is rotatably connected thereto; the tray (352) is connected to the top of the rotating pin (353) near both ends via the supporting rod (355); the rotating disk (351) and the tray (352) are rotatably sleeved.

5. A pre-mounted pipe positioning and installation device for semiconductor equipment installation according to claim 1, characterized in that: An L-shaped plate (5) is fixedly mounted on one side of the mounting plate (32), a U-shaped opening is provided at the end of the L-shaped plate (5), and a laser light source (6) with an adjustable angle is rotatably mounted in the U-shaped opening.

6. A pre-mounted pipe positioning and installation device for semiconductor equipment installation according to claim 4, characterized in that: The translation mechanism (34) comprises a fixed seat (341), a lower movable plate (342), an upper movable plate (343), a T-shaped block (344) and a mounting frame (346) with a through slot (345); the fixed seat (341) is fixedly mounted on the top of the turntable (351); the lower movable plate (342) is slidably connected to the fixed seat (341); the upper movable plate (343) is slidably connected to the lower movable plate (342); the mounting frame (346) is connected to the top of the upper movable plate (343); the through slot (345) is provided on a side of the mounting frame (346) close to the mounting plate (32); the T-shaped block (344) is slidably mounted in the mounting frame (346); and one end of the T-shaped block (344) passes through the through slot (345) and is connected to the mounting plate (32).

7. A pre-mounted pipe positioning and installation device for semiconductor equipment installation according to claim 4, characterized in that: The rotating mechanism (35) further comprises a locking nut (356) and a positioning bolt (357); external threads adapted to the locking nut (356) are provided at positions near both ends of the rotating pin (353); the locking nut (356) is threadedly sleeved with the rotating pin (353); the positioning bolt (357) is installed on the top of the rotating disk (351), and the positioning bolt (357) is used to press against the top of the tray (352).

8. A pre-mounted pipe positioning and installation device for semiconductor equipment installation according to claim 6, characterized in that: The translation mechanism (34) further comprises a first screw rod (347), a second screw rod (348) and a third screw rod (349); a first L-shaped frame is installed on one side of the fixed seat (341); one end of the first screw rod (347) is rotatably connected to the lower movable plate (342), and the first screw rod (347) is threadedly connected to the first L-shaped frame; a second L-shaped frame is installed on one side of the lower movable plate (342); one end of the second screw rod (348) is rotatably connected to the upper movable plate (343), and the second screw rod (348) is threadedly connected to the second L-shaped frame; one end of the third screw rod (349) is rotatably connected to the top of the T-shaped block (344), and the third screw rod (349) is threadedly connected to the top of the mounting frame (346).

9. A pre-mounted pipe positioning and installation device for semiconductor equipment installation according to claim 2, characterized in that: The cantilever assembly (43) comprises a crossbeam (431), an open jacket (432), a fastening bolt (433) and a reinforcing column (434); the reinforcing column (434) is installed on the side wall of the telescopic frame (42) near the top end; the two open jackets (432) are respectively connected to the reinforcing column (434) and the end of the telescopic frame (42); the crossbeam (431) is arranged to pass through the open jacket (432).

10. A pre-mounted pipe positioning and installation device for semiconductor equipment installation according to claim 9, characterized in that: A counterweight block (7) is installed on the lower surface of the end of the cross beam (431) away from the fixed pipe clamp (44), and an adjusting screw (8) is installed on the lower surface of the end of the cross beam (431) away from the counterweight block (7), and the adjusting screw (8) is connected to the top of the fixed pipe clamp (44) through a bearing seat.

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