Three-degree-of-freedom macro-micro composite piezoelectric nano probe station

Abstract

The invention discloses a three-degree-of-freedom macro-micro composite piezoelectric nano probe station, and relates to the technical field of semiconductor manufacturing and biotechnology. In order to solve the technical problems that in the prior art, an existing motor-driven probe station is large in cooperative control difficulty, the positioning precision and the stability are difficult to consider, the structure is complex, and the energy consumption is high, the technical scheme provided by the invention is that the three-degree-of-freedom macro-micro composite piezoelectric nano probe station is provided. Comprising a probe bench surface, an XY macro-motion mechanism, an XY micro-motion mechanism and a Z-direction mechanism. The XY macro-motion mechanism comprises an X piezoelectric motor and a Y piezoelectric motor which are used for achieving dozens of millimeter level horizontal movement in the X-axis direction and the Y-axis direction respectively. The XY micro-motion mechanism is used for realizing accurate movement of several nanometers to dozens of nanometers in the X-axis direction and the Y-axis direction; the Z-direction mechanism is used for realizing dozens of microns of lifting in the Z-axis direction; the probe bench surface is used for bearing a bearing object and is also used for driving the bearing object to move along the X-axis and Y-axis directions. The device is suitable for semiconductor manufacturing and biotechnology testing work.

Description

Technical Field

[0001] It relates to the fields of semiconductor manufacturing and biotechnology, and specifically to a three-degree-of-freedom macro-micro composite piezoelectric nanoprobe station. Background Art

[0002] The probe station is one of the most important precision detection equipment in the fields of semiconductor manufacturing and biotechnology. At present, with the development of semiconductor chip manufacturing technology, the size of chips has gradually shrunk from 10 microns to 3 nanometers, and the demand for chip detection has also shifted from two-dimensional detection to three-dimensional detection. In addition, application scenarios such as micro-nano processing and cell manipulation in biotechnology have put forward higher requirements for high-precision positioning and stable operation. Most of the existing probe stations are driven by servo motors or motors. Although these traditional drive methods can provide a certain degree of movement accuracy, they have obvious limitations in achieving nanometer-level precision positioning control, especially in the coordinated control between macro and micro drive systems. It is difficult to take into account both accuracy and stability.

[0003] For example, when the traditional servo motor-driven probe station is used for micro-nano-scale detection, due to the complex structure and large size of the motor, its inertia and response speed cannot meet the high-precision operation requirements at the nanometer level. In addition, the coupling problem between the macro-motion and micro-motion systems is also difficult to solve, resulting in low efficiency of the probe station when performing large-scale movement and fine positioning, and unable to meet the requirements of modern high-precision manufacturing and detection.

[0004] Current research focuses on how to improve the positioning accuracy, response speed and energy consumption of the probe station, such as by improving the control algorithm, optimizing the servo system, and introducing new materials in the structural design to improve the performance of the probe station. However, when facing the high-precision positioning requirements across scales (from millimeters to nanometers), the existing technology still has the following technical difficulties:

[0005] 1. The coordinated control of macro-micro composite drive is difficult: the coupling problem between the macro drive and micro drive system is difficult to solve, which easily leads to loss of accuracy.

[0006] 2. It is difficult to strike a balance between positioning accuracy and stability: Existing probe stations are difficult to maintain high-precision stable control when moving at high speeds, especially when performing three-dimensional detection of tiny objects.

[0007] 3. Complex structure and high energy consumption: The traditional motor drive structure is complex, resulting in large equipment size and high energy consumption, which is not conducive to energy saving and miniaturization of equipment. Summary of the invention

[0008] In order to solve the technical problems existing in the prior art, such as the difficulty in coordinated control of the existing motor-driven probe station, the difficulty in balancing positioning accuracy and stability, the complex structure and high energy consumption, the technical solution provided by the present invention is:

[0009] Three-DOF macro-micro composite piezoelectric nanoprobe station, including:

[0010] Probe table, XY macro-motion mechanism, XY micro-motion mechanism and Z-axis mechanism;

[0011] The XY macro-motion mechanism includes an X piezoelectric motor and a Y piezoelectric motor, which are used to achieve horizontal movement of tens of millimeters in the X-axis and Y-axis directions respectively;

[0012] The XY micro-motion mechanism is used to achieve precise movement of a few nanometers to tens of nanometers in the X-axis and Y-axis directions;

[0013] The Z-direction mechanism is used to achieve lifting and lowering of tens of microns in the Z-axis direction;

[0014] The probe station table is used to carry a supported object and also to drive the supported object to move along the XY axis direction.

[0015] Furthermore, a preferred embodiment is provided, wherein the Z-axis mechanism uses piezoelectric ceramics as a power source.

[0016] Furthermore, a preferred embodiment is provided, wherein the housing of the Z-direction mechanism and the piezoelectric ceramic are of an integrated design.

[0017] Furthermore, a preferred embodiment is provided, wherein the X piezoelectric motor and the Y piezoelectric motor are supported by linear guide rails.

[0018] Furthermore, a preferred embodiment is provided, wherein the XY micro-motion mechanism is driven by piezoelectric ceramics.

[0019] Furthermore, a preferred embodiment is provided, wherein the piezoelectric ceramics in the XY micro-motion mechanism are arranged symmetrically.

[0020] Based on the same inventive concept, the present invention also provides a semiconductor testing method, which is implemented by the probe station, comprising:

[0021] The step of collecting a signal of placement of a carrier;

[0022] The step of obtaining a rapid positioning signal of the carried object according to the signal of the XY macro-motion mechanism;

[0023] The step of obtaining a precise positioning signal of the carried object according to the signal of the XY micro-motion mechanism;

[0024] The step of sending a vertical position adjustment signal according to the precise positioning signal.

[0025] Based on the same inventive concept, the present invention also provides a computer storage medium for storing a computer program. When the computer program is read by a computer, the computer executes the method described.

[0026] Based on the same inventive concept, the present invention also provides a computer, including a processor and a storage medium. When the processor reads a computer program stored in the storage medium, the computer executes the method described.

[0027] Based on the same inventive concept, the present invention also provides a computer program product, which is a computer program. When the computer program is executed, the method described above is implemented.

[0028] Compared with the prior art, the technical solution provided by the present invention is beneficial in that:

[0029] Piezoelectric drive technology achieves nanometer-level high-precision positioning through the expansion and contraction of piezoelectric ceramics. This method significantly improves the lifting and lowering control accuracy in the Z-axis direction, solving the problem of large inertia and slow response speed of traditional servo motors, thereby achieving high-precision operation in three-dimensional detection of tiny objects. Compared with traditional servo motor systems, this shows higher stability and accuracy.

[0030] Through the macro-micro composite drive design, the present invention successfully realizes the combination of large-scale rapid movement and local fine adjustment. The XY macro-motion mechanism provides a rapid movement capability of tens of millimeters, while the XY integrated micro-motion mechanism realizes fine movement of a few nanometers to tens of nanometers. This design effectively solves the coupling problem between the macro-micro drive system, allowing large-scale movement and high-precision positioning to be achieved simultaneously, significantly improving the working efficiency and operational convenience of the equipment.

[0031] The integrated design of the Z mechanism housing and the piezoelectric ceramics makes the overall structure compact and enhances the seismic resistance and stability of the device. By embedding the piezoelectric ceramics into the overall structure, the vibration and precision loss caused by the separation of components in traditional equipment are reduced, thereby ensuring the reliability of the equipment in high-precision operation. Compared with other studies that increase stability by adding support structures, the design of the present invention is more concise and efficient.

[0032] The low energy consumption of piezoelectric drive significantly reduces the energy consumption of the device compared to the traditional motor drive. This feature enables the present invention to have a better energy-saving effect in long-term use, and because the heat generated by the device is reduced, the operating stability and life of the overall system are improved. This point reflects better environmental friendliness and economy in comparison with the existing motor-driven probe station.

[0033] Suitable for use in semiconductor manufacturing and biotechnology testing. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 It is a three-dimensional schematic diagram of a three-degree-of-freedom macro-micro composite piezoelectric nanoprobe station;

[0035] Figure 2 for Figure 1 Right view of;

[0036] Figure 3 for Figure 1 Exploded diagram of

[0037] Figure 4 It is a structural diagram of the X micro-motion mechanism.

[0038] Among them, 1-probe station table, 2-XY integrated micro-motion mechanism, 3-XY macro-motion mechanism, 4-Z-direction mechanism, 11-Z-direction mechanism upper cover, 12-Z-direction mechanism piezoelectric ceramic, 13-Z-direction mechanism, 14-Z-direction mechanism outer shell, 111-stationary end face, 112-moving end face, 21-Y piezoelectric motor piezoelectric ceramic mechanism, 22-Y piezoelectric motor guide rail, 23-Y piezoelectric motor platform; 24-X piezoelectric motor piezoelectric ceramic mechanism, 25-X piezoelectric motor guide rail, 26-X piezoelectric motor platform, 31-XY-direction micro-motion mechanism, 32-XY micro-motion mechanism lower cover, 33-XY micro-motion mechanism piezoelectric ceramic. DETAILED DESCRIPTION

[0039] In order to make the advantages and benefits of the technical solution provided by the present invention more clearly reflected, the technical solution provided by the present invention is now further described in detail with reference to the accompanying drawings, specifically:

[0040] Embodiment 1: This embodiment provides a three-degree-of-freedom macro-micro composite piezoelectric nanoprobe station, including:

[0041] Probe station table 1, XY macro-motion mechanism 3, XY integrated micro-motion mechanism 2 and Z-direction mechanism 4;

[0042] The XY macro-motion mechanism 3 includes an X-axis piezoelectric motor and a Y-axis piezoelectric motor, which are used to achieve horizontal movement of tens of millimeters in the X-axis and Y-axis directions respectively;

[0043] The XY integrated micro-motion mechanism 2 is used to achieve precise movement of a few nanometers to tens of nanometers in the X-axis and Y-axis directions;

[0044] The Z-direction mechanism 4 is used to achieve lifting and lowering of tens of microns in the Z-axis direction;

[0045] The probe station table 1 is used to carry a load and also to drive the load to move along the XY axis direction.

[0046] Specifically,

[0047] The overall spatial layout relationship is as follows:

[0048] The Z-direction mechanism 4 is located at the bottom of the entire probe station and serves as a base support device.

[0049] The XY macro-motion mechanism 3 is installed at the crossbeam position of the Z-direction mechanism 4 to realize macro-rapid motion in the X and Y directions.

[0050] The XY integrated micro-motion mechanism 2 is installed on the Y macro-motion mechanism and is connected to the probe station table 1 through the moving end surface 112 of the micro-motion mechanism, thereby realizing micro-nano-level fine movement.

[0051] The probe table 1 is at the top and is used to move and position the object in the XY direction.

[0052] The workflow includes the following steps:

[0053] 1. Preparation stage: Place the object to be operated on the probe table 1 and ensure that the object is in the correct initial position. Check whether all mechanisms are firmly connected and ensure that the equipment is in standby mode.

[0054] 2. Initial adjustment of the Z-axis mechanism 4: Start the Z-axis mechanism 4 and control the piezoelectric ceramic drive to make initial vertical adjustment of the probe table 1. This step is used to ensure that the probe table 1 reaches a suitable operating height and prepare for subsequent fine adjustment.

[0055] 3. XY macro-motion mechanism 3 large-scale positioning: Using the X and Y macro-motion mechanisms, the piezoelectric motor drives the stage to achieve millimeter-level rapid movement of the load in the X and Y axis directions. This step is used to quickly move the load into the field of view of the microscope to prepare for subsequent fine positioning.

[0056] 4. Fine positioning of XY integrated micro-motion mechanism 2: Start the XY integrated micro-motion mechanism 2 to control the embedded piezoelectric ceramics to achieve nanometer-level precise positioning in the X-axis and Y-axis directions. This step ensures that the position of the object meets the requirements of high-precision measurement or processing.

[0057] 5. Fine control of the Z-axis mechanism 4: After completing the precise positioning of the XY axis, the piezoelectric ceramics of the Z-axis mechanism 4 are controlled to enable the probe table 1 to achieve nanometer-level fine lifting and lowering adjustment in the vertical direction to ensure that the probe and the surface of the carrier reach a suitable contact or focusing state.

[0058] 6. Real-time operation and monitoring: Operate through the control system, combine with a microscope or other detection equipment to monitor the load in real time, adjust the position of the X, Y, and Z axes as needed to ensure the accuracy and stability of the operation.

[0059] 7. Reset after operation is completed: After the operation is completed, the Z-axis mechanism 4 is controlled to raise the probe table 1 to the initial position, and the XY macro-motion mechanism 3 is controlled to move the probe table 1 out of the working area for subsequent processing or replacement of the carrier.

[0060] 8. Equipment reset and shutdown: Ensure that all components are reset to their initial state, check the operating status of the equipment, shut down the equipment after confirmation, and complete the entire workflow.

[0061] in:

[0062] Probe station table 1: It has the function of carrying objects, can achieve micron-level movement along the XY axis, and is connected to the position detection function to ensure the precise positioning of the probe station during operation.

[0063] XY integrated micro-motion mechanism 2: used to realize auxiliary micro-motion in the X-axis and Y-axis directions, achieving precise horizontal movement of a few nanometers to tens of nanometers.

[0064] XY macro-motion mechanism 3: includes X and Y piezoelectric motors, which are used to realize horizontal rapid movement of tens of millimeters on the X and Y axes respectively.

[0065] Z-axis mechanism 4: provides precise movement of tens of microns in the Z-axis direction, and realizes high-precision displacement control through the expansion and contraction deformation of piezoelectric ceramics.

[0066] Carrier: Placed on the probe table to support and manipulate experimental objects, such as biological cells.

[0067] The Z-direction mechanism upper cover 11 is tightly connected to the Z-direction mechanism housing to provide support and fixation.

[0068] Z-direction mechanism piezoelectric ceramic 12: as the displacement power source of the Z-direction mechanism, precise displacement in the vertical direction is achieved by precisely controlling the expansion and contraction of the piezoelectric ceramic.

[0069] The Z-direction mechanism housing 14 is not only the housing of the Z-direction mechanism, but also the base of the entire device, playing a supporting and protective role.

[0070] X-piezoelectric motor platform 26, X-piezoelectric motor guide rail 25, and X-piezoelectric motor piezoelectric ceramic mechanism 24 constitute a macro-motion mechanism in the X-axis direction, which is used to achieve rapid reciprocating motion in the X-axis direction and drive the probe platform table to perform rough position adjustment.

[0071] The Y piezoelectric motor platform 23, the Y piezoelectric motor guide rail 22, and the Y piezoelectric motor piezoelectric ceramic mechanism 21 constitute a macro-motion mechanism in the Y-axis direction, which is used to realize rapid reciprocating motion in the Y-axis direction and drive the probe platform table to perform rough position adjustment.

[0072] XY micro-motion mechanism piezoelectric ceramic 33: As the power source of the XY micro-motion mechanism, it provides precise displacement support from micrometer to nanometer level.

[0073] 3. Connection and interaction between components

[0074] The probe table 1 is fixedly connected to the lower cover 32 of the XY micro-motion mechanism by bolts, and is used to drive the table to move precisely at the nanometer level.

[0075] The Z-direction mechanism upper cover 11 is connected to the Z-direction mechanism housing 14 by symmetrically distributed bolts to ensure the stability of the entire structure.

[0076] The X piezoelectric motor stage 26 is fixed to the Z-axis mechanism crossbeam by bolts to form a moving pair in the X-axis direction, and is connected to the Y piezoelectric motor stage 23 by a guide rail to achieve simultaneous movement of the X and Y axes.

[0077] The Y piezoelectric motor stage 23 is installed in the middle of the X piezoelectric motor guide rail 25 to form a moving pair in the Y-axis direction, and the stability and accuracy of the micro-motion process are ensured through the XY sliding support.

[0078] The piezoelectric ceramic 33 of the XY micro-motion mechanism is embedded in the moving end surface 112 of the XY micro-motion mechanism, and the nanometer-level displacement of the horizontal X-axis and Y-axis is achieved through a symmetrical driving and amplifying mechanism.

[0079] 4. The coordination of each component completes the overall function

[0080] Macro-micro composite drive system: The whole device combines the advantages of macro and micro positioning. The XY macro mechanism 3 provides a wide range of rapid movement, while the XY integrated micro mechanism 2 achieves more precise micro position adjustment, and the Z mechanism 4 provides nano-level positioning function in the vertical direction.

[0081] Overall linkage: Through the linkage of the X-axis and Y-axis macro-motion mechanisms, the probe station can achieve large-scale coarse adjustment and small-scale fine adjustment in the XY direction. The combination of the Z-axis mechanism ensures the vertical lifting accuracy of the device, which can achieve high-precision positioning and focusing of tiny objects such as cells under the microscope.

[0082] Precise control and stability: The Z-axis piezoelectric ceramic 12 and the XY micro-motion mechanism piezoelectric ceramic 33 provide stable and efficient power support for the entire system through precise telescopic control, ensuring high precision and stability during operation.

[0083] Embodiment 2: This embodiment further limits the three-degree-of-freedom macro-micro composite piezoelectric nanoprobe station provided in Embodiment 1. The Z-direction mechanism 4 uses piezoelectric ceramics as a power source.

[0084] Embodiment 3: This embodiment further limits the three-DOF macro-micro composite piezoelectric nanoprobe station provided in Embodiment 2. The housing of the Z-direction mechanism 4 and the piezoelectric ceramic are designed as an integrated whole.

[0085] Embodiment 4: This embodiment further limits the three-degree-of-freedom macro-micro composite piezoelectric nanoprobe station provided in Embodiment 1, and the X-axis piezoelectric motor and the Y-axis piezoelectric motor are supported by linear guide rails.

[0086] Embodiment 5: This embodiment further limits the three-degree-of-freedom macro-micro composite piezoelectric nanoprobe station provided in Embodiment 1. The XY integrated micro-motion mechanism 2 is driven by piezoelectric ceramics.

[0087] Embodiment 6: This embodiment further limits the three-degree-of-freedom macro-micro composite piezoelectric nanoprobe station provided in Embodiment 5, and the piezoelectric ceramics in the XY micro-motion mechanism are arranged symmetrically.

[0088] Embodiment 7: This embodiment provides a semiconductor testing method, which is implemented by the probe station provided in embodiment 1, including:

[0089] The step of collecting a signal of placement of a carrier;

[0090] A step of obtaining a rapid positioning signal of the carried object according to the signal of the XY macro motion mechanism 3;

[0091] The step of obtaining a precise positioning signal of the carried object according to the signal of the XY integrated micro-motion mechanism 2;

[0092] The step of sending a vertical position adjustment signal according to the precise positioning signal.

[0093] Embodiment 8: This embodiment provides a computer storage medium for storing a computer program. When the computer program is read by a computer, the computer executes the method provided in embodiment 7.

[0094] Embodiment 9: This embodiment provides a computer, including a processor and a storage medium. When the processor reads a computer program stored in the storage medium, the computer executes the method provided in embodiment 7.

[0095] Embodiment 10: This embodiment provides a computer program product, which is a computer program. When the computer program is executed, the method provided in embodiment 7 is implemented.

[0096] Implementation Method XI: Combination Figure 1-4 This embodiment is described in detail by using specific examples to further describe the technical solution provided above. Specifically:

[0097] The purpose of this embodiment is to propose a 3-DOF macro-micro composite piezoelectric actuated high-precision probe station, which can realize high-speed movement and positioning in the horizontal straight line direction of the X-axis and Y-axis, and lifting and positioning with nanometer-level precision in the Z-axis, based on the needs of nanometer-to-micrometer-scale positioning and posture adjustment, micro-deformation contact detection, etc., to achieve high-precision control and stable operation at the micro-nano level, and meet the operational needs of semiconductor manufacturing and biological cells in the probe station.

[0098] To achieve the above purpose, this embodiment adopts the following technical solutions:

[0099] A 3-DOF macro-micro composite piezoelectric micro-nano probe station comprises a probe station table 1, an XY-direction macro-motion mechanism, an XY-direction integrated micro-motion mechanism, and a Z-direction mechanism 4. The XY-direction macro-motion mechanism is used to realize tens of millimeters of horizontal rapid and precise movement in the X-direction and Y-direction respectively, the XY-direction integrated micro-motion mechanism is used as an auxiliary micro-motion mechanism in the X-direction and Y-direction to realize the horizontal precise movement of a few nanometers to tens of nanometers, and the Z-direction mechanism 4 provides the precise movement of tens of microns in the vertical direction. The output end of the XY-direction integrated micro-motion mechanism has a loading function through the probe station table 1, and the Z-direction micro-motion mechanism piezoelectric ceramic actuator is the core power source. By accurately controlling the expansion and contraction deformation of the piezoelectric ceramic, it provides stable and efficient power support for the micro-motion mechanism, thereby realizing high-precision driving.

[0100] The Z-direction mechanism 4 includes: a Z-direction micro-motion mechanism upper cover, a Z-direction micro-motion mechanism, a Z-direction micro-motion mechanism housing, and piezoelectric ceramics;

[0101] The Z-axis micro-motion mechanism housing is not only the housing of the Z-axis mechanism 4, but also the base of the entire 3-DOF macro-micro composite piezoelectric micro-nano probe station, carrying the entire 3-DOF macro-micro composite probe station; the Z-axis micro-motion mechanism housing is preset with raised positioning pins facing the vertical movement direction and symmetrically distributed, and upward threaded holes are preset inside to fix the upper cover of the Z-axis micro-motion mechanism; the Z-axis micro-motion mechanism has built-in threaded holes, which are connected to the Z-axis micro-motion mechanism housing through threads and corresponding through holes preset on the left and right sides of the Z-axis micro-motion mechanism housing as fixing surfaces; a Z-axis direction is formed between the Z-axis micro-motion mechanism housing and the Z-axis micro-motion mechanism. The Z-direction micro-motion mechanism comprises a moving pair extending in the direction of the Z-direction micro-motion mechanism; the piezoelectric ceramic of the Z-direction micro-motion mechanism is a displacement power source, and a plurality of piezoelectric ceramics are symmetrically embedded in the Z-direction micro-motion mechanism to form a whole with the Z-direction micro-motion mechanism, and the expansion and contraction deformation of the piezoelectric ceramics is controlled to achieve precise movement of tens of microns in the vertical direction; a crossbeam is arranged in the middle of the Z-direction micro-motion mechanism; the upper cover of the Z-direction micro-motion mechanism is in a concave shape as a whole, and its concave surface is closely connected with the crossbeam of the Z-direction micro-motion mechanism; symmetrically distributed through holes are opened on both sides of the upper cover of the Z-direction micro-motion mechanism, and are effectively connected with the symmetrically distributed raised positioning pins of the housing of the Z-direction micro-motion mechanism through bolts;

[0102] The Z-axis micro-motion mechanism housing provides stable support and protection.

[0103] The Z-direction micro-motion mechanism is designed as a built-in integrated displacement drive amplification mechanism. The piezoelectric ceramics of the Z-direction micro-motion mechanism are placed in the integrated displacement drive amplification mechanism and form a whole with the Z-direction micro-motion mechanism to form a moving pair extending along the Z-direction direction;

[0104] The Z-direction mechanism 4 is a symmetrical differential amplifier to improve the motion control accuracy;

[0105] There is no gap between the piezoelectric ceramics and the Z-direction micro-motion mechanism;

[0106] The piezoelectric ceramics of the Z-direction micro-motion mechanism and the Z-direction micro-motion mechanism can be reinforced by glue to reduce the lateral force on the piezoelectric ceramics and improve the overall seismic resistance of the Z-direction mechanism 4;

[0107] The vertical direction of the peripheral frame of the Z-direction mechanism 4 is preset with symmetrically distributed positioning through holes, and the entire 3-DOF macro-micro composite piezoelectric micro-nano probe station is fixedly connected with the external mounting surface through the through holes with bolts;

[0108] The Z-direction mechanism 4 has a wire outlet on its side for leading out the wire harness; the wire outlet has a metal sheath tube for both wire harness protection and shielding end leading out; one end of the metal sheath tube is fixed to the Z-direction mechanism 4 by an external thread.

[0109] The XY-direction macro-motion mechanism comprises: an X-direction piezoelectric motor platform, an X-direction piezoelectric motor guide rail, an X-direction piezoelectric motor piezoelectric ceramic mechanism, a Y-direction piezoelectric motor platform, a Y-direction piezoelectric motor guide rail, and a Y-direction piezoelectric motor piezoelectric ceramic mechanism;

[0110] The X-axis piezoelectric motor stage, the X-axis piezoelectric motor guide rail, and the X-axis piezoelectric motor piezoelectric ceramic mechanism constitute an X-axis macro-motion mechanism to achieve rapid reciprocating motion of the X-axis in the horizontal direction, with a stroke of up to tens of millimeters (mm) per second (s);

[0111] The X-direction piezoelectric motor stage is connected by bolts and fixed on the crossbeam in the middle of the Z-direction micro-motion mechanism; the X-direction piezoelectric motor stage and the X-direction piezoelectric motor guide rail are movably connected to the Y-direction piezoelectric motor stage, and a moving pair extending along the X-axis direction is formed between the X-direction piezoelectric motor stage and the X-direction piezoelectric motor; the X-direction piezoelectric motor piezoelectric ceramic mechanism is a motion power source, which is used to drive the X-direction macro-motion mechanism to move along the X-axis direction; the X-direction piezoelectric motor piezoelectric ceramic mechanism is fixed to the upper surface of the upper cover of the Z-direction micro-motion mechanism;

[0112] The Y-axis piezoelectric motor platform, the Y-axis piezoelectric motor guide rail, and the Y-axis piezoelectric motor piezoelectric ceramic mechanism constitute a Y-axis macro-motion mechanism to achieve rapid reciprocating motion of the Y-axis in the horizontal direction, with a stroke of up to tens of millimeters (mm) seconds (s);

[0113] The Y-axis piezoelectric motor stage is respectively installed at the middle position of the X-axis piezoelectric motor guide rail, and the entire Y-axis macro-motion mechanism realizes simultaneous XY-axis movement through the X-axis movement of the X-axis piezoelectric motor guide rail; the Y-axis piezoelectric motor stage and the Y-axis piezoelectric motor guide rail are movably connected to the XY-axis micro-motion mechanism lower cover; a moving pair extending along the Y-axis direction is formed between the Y-axis piezoelectric motor stage and the Y-axis piezoelectric motor; the Y-axis piezoelectric motor piezoelectric ceramic mechanism is a displacement power source, which is used to drive the Y-axis macro-motion mechanism to move along the Y-axis direction; the Y-axis piezoelectric motor piezoelectric ceramic mechanism and the X-axis piezoelectric motor piezoelectric ceramic mechanism are fixed together on the upper surface of the Z-axis micro-motion mechanism upper cover; the Y-axis piezoelectric motor guide rail and the X-axis piezoelectric motor guide rail provide sliding support in the Y-axis and X-axis directions respectively, ensuring the stability and accuracy of the micro-motion process.

[0114] The X-axis piezoelectric motor stage and the Y-axis piezoelectric motor stage are respectively provided with a symmetrical first fine-motion limit rod and a second fine-motion limit rod, respectively ensuring the linear motion of the X-axis piezoelectric motor guide rail and the Y-axis piezoelectric motor guide rail in the horizontal direction, thereby improving the motion accuracy;

[0115] The X-axis piezoelectric motor guide and the Y-axis piezoelectric motor guide can adopt the motion mode of linear bearing rolling friction; the X-axis piezoelectric motor guide and the Y-axis piezoelectric motor guide can also adopt the motion mode of oil-free bushing sliding friction respectively;

[0116] The rolling bearings of the X-axis piezoelectric motor guide and the Y-axis piezoelectric motor guide are respectively lubricated with vacuum grease;

[0117] The X-axis piezoelectric motor guide and the Y-axis piezoelectric motor piezoelectric ceramic mechanism are respectively provided with wire outlets on their sides for leading out the wiring harness; the wire outlets are provided with metal sheath tubes to take into account both wiring harness protection and shielding end lead-out; one end of the metal sheath tube is fixed to the X-axis piezoelectric motor guide and the Y-axis piezoelectric motor piezoelectric ceramic mechanism by external threads.

[0118] The XY-axis integrated micro-motion mechanism comprises: an XY-axis micro-motion mechanism, an XY-axis micro-motion mechanism lower cover, and an XY-axis micro-motion mechanism piezoelectric ceramic;

[0119] The XY-axis micro-motion mechanism is divided into the stationary end surface 111 and the moving end surface 112. The stationary end surface 111 is fixedly connected to the displacement output end of the Y-axis piezoelectric motor stage through bolts, so that the micron-level motion in the X-axis and Y-axis directions is transmitted to the XY-axis integrated micro-motion mechanism, realizing the linkage of X-axis and Y-axis macro-micro combination;

[0120] A micro-displacement moving pair that can extend simultaneously or separately along the X-axis and Y-axis directions is formed between the driving amplification mechanism of the moving end surface 112 and the piezoelectric ceramic of the XY-direction micro-motion mechanism; the moving end surface 112 is connected to the probe table top 1 through symmetrically distributed bolts, and is used to drive the probe table top 1 to move at the nanometer level in the X-axis and Y-axis directions. The probe table top 1 and the lower cover of the XY-direction micro-motion mechanism are fixed by bolts, and a moving pair that extends simultaneously along the X-axis and Y-axis directions is formed between the three;

[0121] The piezoelectric ceramics of the XY micro-motion mechanism are the displacement power source, and a plurality of piezoelectric ceramics are symmetrically embedded in the motion end surface 112 of the XY micro-motion mechanism, wherein a group of piezoelectric ceramics symmetrical in pairs and the corresponding driving amplification mechanism realize a horizontal X-axis nanometer displacement, and another group of piezoelectric ceramics symmetrical in pairs and the corresponding driving amplification mechanism realize a horizontal Y-axis nanometer displacement;

[0122] The probe station table 1 has a loading function, and is used to drive the loading object and move it in the X-axis and Y-axis directions at the micrometer level; the probe station table 1 is connected with a position detection function;

[0123] The probe station table 1 has reserved positioning and mounting holes to fix the load or the load tray;

[0124] The X-axis piezoelectric motor stage and the X-axis piezoelectric motor guide rail are movably connected to the XY-axis micro-motion mechanism lower cover so as to form a whole with the XY integrated micro-motion mechanism;

[0125] The materials of kinematic pairs, mobile pairs and other mechanisms are pre-hardened alloy steel with high yield point and low thermal expansion coefficient; the materials of kinematic pairs, mobile pairs and other mechanisms can also be lightweight, high-strength super-hard aluminum;

[0126] Also includes lead-out harness;

[0127] It also includes connecting components for achieving electrical connection and signal transmission between the components.

[0128] The technical solution provided by this embodiment is characterized in that:

[0129] Macro-micro composite design: Combining the advantages of macro positioning and micro positioning, it achieves a perfect combination of large-scale rapid movement and local precise control

[0130] Piezoelectric drive technology: piezoelectric materials are used as driving elements, which have the characteristics of fast response, high precision and low energy consumption.

[0131] The advantages are:

[0132] High-precision positioning and measurement: Through the macro-micro composite design, the rapidity of macro positioning and the accuracy of micro positioning are combined to achieve nanometer-level positioning and measurement accuracy. This feature makes the probe station have extremely high application value in the fields of micro-nano processing and material testing.

[0133] High-efficiency operation: With piezoelectric drive technology, the probe station has the ability of fast response and high-speed movement, which greatly improves work efficiency. At the same time, by optimizing the control system, a perfect combination of high precision and high speed is achieved.

[0134] Low energy consumption: Compared with traditional mechanical drive methods, piezoelectric drive technology has lower energy consumption. This not only helps save energy, but also reduces the heat generated by the equipment during operation, and improves the stability and reliability of the equipment.

[0135] Easy operation: This implementation method creates an intelligent control interface to simplify the operation. Users can complete complex positioning, measurement and other tasks with simple operations, which reduces the difficulty of operation and improves the user experience.

[0136] Good compatibility: The design of the probe station fully considers the compatibility with different equipment. It can be seamlessly connected with a variety of microscopes, test instruments and other equipment to meet the needs of different users.

[0137] like Figure 1-4 As shown,

[0138] It includes a probe table 1, an XY integrated micro-motion mechanism 2, an XY direction macro-motion mechanism 3, a Z direction mechanism 4, and a carrier;

[0139] The Z-direction mechanism 4 includes: a Z-direction micro-motion mechanism upper cover 11, a Z-direction micro-motion mechanism 13, a Z-direction micro-motion mechanism housing 14, and a Z-direction micro-motion mechanism piezoelectric ceramic 12;

[0140] The XY direction macro-motion mechanism 3 comprises: an X direction piezoelectric motor platform 26, an X direction piezoelectric motor guide rail 25, an X direction piezoelectric motor piezoelectric ceramic mechanism 24, a Y direction piezoelectric motor platform 23, a Y direction piezoelectric motor guide rail 22, and a Y direction piezoelectric motor piezoelectric ceramic mechanism 21;

[0141] The XY-axis integrated micro-motion mechanism 3 comprises: an XY-axis micro-motion mechanism 31, an XY-axis micro-motion mechanism lower cover 32, and an XY-axis micro-motion mechanism piezoelectric ceramic 33;

[0142] The XY direction macro-motion mechanism 3 is used to realize the horizontal rapid and precise movement of tens of millimeters in the X direction and Y direction respectively, the XY direction integrated micro-motion mechanism 2 is used as the auxiliary micro-motion mechanism in the X direction and Y direction to realize the horizontal precise movement of several nanometers to tens of nanometers, and the Z direction mechanism 4 provides the precise movement of tens of micrometers in the vertical direction;

[0143] The probe station table 1 has a loading function, which is used to drive the loading object and move it in the X-axis and Y-axis directions at the micron level; the probe station table 1 is connected with a position detection function;

[0144] The piezoelectric ceramic 33 of the XY micro-motion mechanism is the core power source. By precisely controlling the expansion and contraction deformation of the piezoelectric ceramic, stable and efficient power support is provided for the micro-motion mechanism, thereby achieving high-precision driving.

[0145] The Z-direction micro-motion mechanism housing 14 is not only the housing of the Z-direction mechanism 4, but also the base of the entire 3-DOF macro-micro composite piezoelectric micro-nano probe station, carrying the entire 3-DOF macro-micro composite probe station; the Z-direction micro-motion mechanism housing 14 is pre-set with raised positioning pins facing the vertical movement direction and symmetrically distributed, and an upward threaded hole is pre-set inside for fixing the Z-direction micro-motion mechanism upper cover 11;

[0146] The Z-direction micro-motion mechanism 13 has a built-in threaded hole, which is connected to the Z-direction micro-motion mechanism housing 14 through the threaded hole and the corresponding through holes preset on the left and right sides of the Z-direction micro-motion mechanism housing 14 as a fixing surface; a moving pair extending along the Z-axis direction is formed between the Z-direction micro-motion mechanism housing 14 and the Z-direction micro-motion mechanism 13;

[0147] The piezoelectric ceramic 12 of the Z-direction micro-motion mechanism is a displacement power source. Several piezoelectric ceramics are symmetrically embedded in the Z-direction micro-motion mechanism 13 to form a whole with the Z-direction micro-motion mechanism 13. By controlling the expansion and contraction deformation of the piezoelectric ceramics, precise movement of tens of microns can be achieved in the vertical direction. A crossbeam is provided in the middle of the Z-direction micro-motion mechanism 13. The upper cover 11 of the Z-direction micro-motion mechanism is in a concave shape as a whole, and its concave surface is closely connected with the crossbeam of the Z-direction micro-motion mechanism 13. The upper cover 11 of the Z-direction micro-motion mechanism is provided with symmetrically distributed through holes on both sides, and is effectively connected with the symmetrically distributed raised positioning pins of the Z-direction micro-motion mechanism housing 14 through bolts.

[0148] Z provides stable support and protection for the micro-motion mechanism housing 14 .

[0149] The Z-direction micro-motion mechanism 13 is designed as a displacement drive amplification mechanism with a built-in integrated drive amplification mechanism. The Z-direction micro-motion mechanism piezoelectric ceramic 12 is placed in the integrated drive amplification mechanism displacement drive amplification mechanism and forms a whole with the Z-direction micro-motion mechanism 13 to form a moving pair extending in the Z-direction direction.

[0150] The Z-direction micro-motion mechanism 13 is a symmetrical differential amplification to improve the motion control accuracy;

[0151] There is a seamless connection between the Z-direction micro-motion mechanism piezoelectric ceramic 12 and the Z-direction micro-motion mechanism 13;

[0152] The Z-direction micro-motion mechanism piezoelectric ceramic 12 and the Z-direction micro-motion mechanism 13 can be reinforced by glue to reduce the lateral force on the piezoelectric ceramic and improve the overall vibration resistance of the Z-direction mechanism 4;

[0153] The peripheral frame of the Z-axis micro-motion mechanism 13 is pre-set with symmetrically distributed positioning through holes in the vertical direction, and the entire 3-DOF macro-micro composite piezoelectric micro-nano probe station is fixedly connected with the external mounting surface through the through holes with bolts;

[0154] The Z-direction micro-motion mechanism 13 has a wire outlet on its side for leading out the wire harness; the wire outlet has a metal sheath tube for both wire harness protection and shielding end leading out; one end of the metal sheath tube is fixed to the Z-direction micro-motion mechanism 13 by an external thread.

[0155] The X-axis piezoelectric motor stage 26, the X-axis piezoelectric motor guide rail 25, and the X-axis piezoelectric motor piezoelectric ceramic mechanism 24 constitute an X-axis macro-motion mechanism to achieve rapid reciprocating motion of the X-axis in the horizontal direction, with a stroke of up to tens of millimeters (mm) per second (s);

[0156] The X-direction piezoelectric motor platform 26 is connected by bolts and fixed on the crossbeam in the middle of the Z-direction mechanism 4; the Y-direction piezoelectric motor platform 23 is movably connected between the X-direction piezoelectric motor platform 26 and the X-direction piezoelectric motor guide rail 25, and a moving pair extending along the X-axis direction is formed between the X-direction piezoelectric motor platform 26 and the X-direction piezoelectric motor guide rail 25; the X-direction piezoelectric motor piezoelectric ceramic mechanism 24 is a displacement power source, which is used to drive the X-direction macro-motion mechanism to move along the X-axis direction; the X-direction piezoelectric motor piezoelectric ceramic mechanism 24 is fixed to the upper surface of the Z-direction micro-motion mechanism upper cover 11;

[0157] The Y-axis piezoelectric motor platform 23, the Y-axis piezoelectric motor guide rail 22, and the Y-axis piezoelectric motor piezoelectric ceramic mechanism 21 constitute a Y-axis macro-motion mechanism to achieve rapid reciprocating motion of the Y-axis in the horizontal direction, with a stroke of up to tens of millimeters (mm) per second (s);

[0158] The Y-direction piezoelectric motor platforms 23 are respectively installed at the middle position of the X-direction piezoelectric motor guide rails 25, and the entire Y-direction macro-motion mechanism realizes simultaneous XY-axial motion through the X-axis motion of the X-direction piezoelectric motor guide rails 25;

[0159] The Y-direction piezoelectric motor platform 23 and the Y-direction piezoelectric motor guide rail 22 are movably connected to the XY-direction micro-motion mechanism lower cover 32;

[0160] The Y-direction piezoelectric motor platform 23 and the Y-direction piezoelectric motor form a movement extending along the Y-axis direction;

[0161] The Y-direction piezoelectric motor piezoelectric ceramic mechanism 21 is a displacement power source, used to drive the Y-direction macro-motion mechanism to move along the Y-axis direction;

[0162] The Y-direction piezoelectric motor piezoelectric ceramic mechanism 21 and the X-direction piezoelectric motor piezoelectric ceramic mechanism 24 are fixed together on the upper surface of the Z-direction micro-motion mechanism upper cover 11;

[0163] The Y-direction piezoelectric motor guide rail 22 and the X-direction piezoelectric motor guide rail 25 provide sliding support in the Y-direction and X-direction respectively, ensuring the stability and accuracy of the micro-motion process.

[0164] The X-direction piezoelectric motor stage 26 and the Y-direction piezoelectric motor stage 23 respectively have a symmetrical first fine motion limit rod and a second fine motion limit rod, respectively ensuring the linear motion of the X-direction piezoelectric motor guide rail 25 and the Y-direction piezoelectric motor guide rail 22 in the horizontal direction, thereby improving the motion accuracy;

[0165] The X-direction piezoelectric motor guide rail 25 and the Y-direction piezoelectric motor guide rail 22 can adopt the motion mode of linear bearing rolling friction; the X-direction piezoelectric motor guide rail 25 and the Y-direction piezoelectric motor guide rail 22 can also adopt the motion mode of oil-free bushing sliding friction respectively;

[0166] The rolling bearings of the X-direction piezoelectric motor guide rail 25 and the Y-direction piezoelectric motor guide rail 22 are respectively lubricated with vacuum grease;

[0167] The X-direction piezoelectric motor guide 25 and the Y-direction piezoelectric motor piezoelectric ceramic mechanism 21 are respectively provided with wire outlets on their sides for leading out the wiring harness; the wire outlets are provided with metal sheath tubes to take into account both wiring harness protection and shielding end leading out; one end of the metal sheath tube is fixed to the X-direction piezoelectric motor guide 25 and the Y-direction piezoelectric motor piezoelectric ceramic mechanism 21 by external threads.

[0168] The XY-axis micro-motion mechanism 31 is divided into the stationary end face 111 and the moving end face 112. The stationary end face 111 is fixedly connected to the displacement output end of the Y-axis piezoelectric motor stage 23 by bolts, so that the micron-level motion in the X-axis and Y-axis directions is transmitted on the XY-axis integrated micro-motion mechanism, realizing the linkage of X-axis and Y-axis macro-micro combination;

[0169] A micro-displacement moving pair that can extend simultaneously or separately along the X-axis and Y-axis directions is formed between the driving amplification mechanism of the moving end surface 112 and the piezoelectric ceramic 33 of the XY-axis micro-motion mechanism; the moving end surface 112 is connected to the probe table top 1 through symmetrically distributed bolts, which is used to drive the probe table top 1 to move at the nanometer level in the X-axis and Y-axis directions, and the probe table top 1 and the XY-axis micro-motion mechanism lower cover 32 are fixed by bolts, and a moving pair that extends simultaneously along the X-axis and Y-axis directions is formed between the three;

[0170] The piezoelectric ceramics 33 of the XY micro-motion mechanism are the displacement power source, and a plurality of piezoelectric ceramics are symmetrically embedded in the moving end surface 112 of the XY micro-motion mechanism, wherein a group of two-by-two symmetrical piezoelectric ceramics and the corresponding driving amplification mechanism realize a horizontal X-axis nanometer displacement, and another group of two-by-two symmetrical piezoelectric ceramics and the corresponding driving amplification mechanism realize a horizontal Y-axis nanometer displacement;

[0171] The probe station table 1 has a loading function, and is used to drive the loading object and move it in the X-axis and Y-axis directions at the micrometer level; the probe station table 1 is connected with a position detection function;

[0172] The drive amplification mechanism may be a precision drive mechanism of a single-axis or double-axis hinge.

[0173] The probe station has a reserved positioning and mounting hole on one side, which can fix the load or the load tray;

[0174] The X-direction piezoelectric motor stage 23 and the X-direction piezoelectric motor guide rail 25 are movably connected to the XY-direction micro-motion mechanism lower cover 32 to form a whole with the XY integrated micro-motion mechanism 2;

[0175] The materials of kinematic pairs, mobile pairs and other mechanisms are pre-hardened alloy steel with high yield point and low thermal expansion coefficient; the materials of kinematic pairs, mobile pairs and other mechanisms can also be lightweight, high-strength super-hard aluminum;

[0176] Also includes lead-out harness;

[0177] It also includes connecting components for achieving electrical connection and signal transmission between the components.

[0178] In view of the need for nano-scale positioning and posture adjustment, and micro-deformation contact detection from micrometer to nanometer in semiconductor manufacturing and biotechnology cell manipulation operations, taking the mouse oocyte manipulation under an optical microscope as an example, the mouse oocyte (diameter of about 20-30um, hereinafter referred to as "cell") is first placed on the probe station table 1 through a tray, and the XY macro-motion mechanism 3 is controlled to adjust the position of the cell in the X-axis direction or Y-axis direction by millimeters (mm) within the effective field of view of the optical microscope. When it is necessary to operate the cell locally, the cell is scanned and moved at the nanometer (nm) level in the X-axis direction or Y-axis direction, and the cell is lifted and lowered at the nanometer (nm) level in the Z-axis direction to complete the focusing of the local position of the cell in the optical microscope.

[0179] The specific process is:

[0180] 1. The Z-axis mechanism 4 can achieve a Z-axis lifting stroke of tens of microns (μm), and the resolution can reach nanometer level;

[0181] Second, the XY macro-motion mechanism 3 can achieve rapid and precise horizontal movement of tens of millimeters in the X-axis and Y-axis directions;

[0182] 3. XY integrated micro-motion 4 can achieve micron-level travel in X-axis and Y-axis, individually or simultaneously, with a resolution of nanometer level;

[0183] Fourth, the realization of X-axis and Y-axis macro-micro combination is achieved by connecting the X-axis macro-motion mechanism, the Y-axis macro-motion mechanism and the XY-axis micro-motion mechanism in series. The displacement output end of the previous stage is fixedly connected to the next stage, so that the millimeter-level motion (macro-motion) in the X-axis and Y-axis directions is transmitted on the XY-axis integrated micro-motion mechanism, realizing the linkage of X-axis and Y-axis macro-micro combination;

[0184] In step 1, after placing the cells on the probe station table 1 through the tray, an X-axis macro-motion mechanism is formed by an X-axis piezoelectric motor table 26, an X-axis piezoelectric motor guide 25, and an X-axis piezoelectric motor piezoelectric ceramic mechanism 24. The X-axis piezoelectric motor piezoelectric ceramic mechanism 24 is used as a displacement power source to drive the X-axis macro-motion mechanism to achieve millimeter-level (mm) movement along the X-axis direction, thereby achieving position adjustment of the cells in the X-axis direction under an optical microscope;

[0185] In step 2, a Y-axis macro-motion mechanism is formed by a Y-axis piezoelectric motor stage 23, a Y-axis piezoelectric motor guide rail 22, and a Y-axis piezoelectric motor piezoelectric ceramic mechanism 21. The Y-axis piezoelectric motor piezoelectric ceramic mechanism 21 is used as a displacement power source to drive the Y-axis macro-motion mechanism to achieve millimeter-level (mm) movement along the Y-axis direction, thereby achieving position adjustment of cells in the Y-axis direction under an optical microscope;

[0186] In step 3, the displacement output ends of the X-axis piezoelectric motor guide rail 25 and the X-axis piezoelectric motor stage 26 are fixedly connected to the Y-axis piezoelectric motor stage 23 by bolts to form a whole, so that the millimeter-level motion in the X-axis direction is transmitted to the Y-axis macro-motion mechanism, and the position adjustment of the cell in the X-axis direction or the Y-axis direction is realized in a millimeter-level (mm) time-sharing or simultaneous manner;

[0187] In step 4, the XY macro-motion mechanism 3 is fixedly connected to the displacement output end of the Y-axis piezoelectric motor stage 23 through the XY-axis micro-motion mechanism 31 and the stationary end face 111 of the XY-axis micro-motion mechanism 31 by bolts, so as to transmit the millimeter-level (mm) time-sharing or simultaneous displacement movement in the X-axis direction or the Y-axis direction to the XY-axis micro-motion mechanism 31; at the same time, the moving end face 112 of the XY-axis micro-motion mechanism 31 and the XY-axis micro-motion mechanism piezoelectric ceramic 33 are symmetrically embedded in the moving end face 112 of the XY-axis micro-motion mechanism 31 to realize the X-axis and Y-axis single or simultaneous micrometer-level travel, and the XY macro-motion mechanism 3 is combined to realize the X-axis and Y-axis macro-micro complex linkage, so that the cell is scanned and moved in the X-axis direction or the Y-axis direction at the nanometer level (nm);

[0188] In step five, the Z-direction mechanism 4 composed of the Z-direction micro-motion mechanism housing 14, the Z-direction micro-motion mechanism 13, the Z-direction micro-motion mechanism piezoelectric ceramic 12 and the Z-direction micro-motion mechanism upper cover 11 is used to control the expansion and contraction deformation of the piezoelectric ceramic by using the Z-direction micro-motion mechanism piezoelectric ceramic 12, so that precise movement of tens of microns can be achieved in the vertical direction; through the bolt connection between the Z-direction micro-motion mechanism 13 and the X-direction piezoelectric motor stage 26, the micron-level vertical lifting and lowering motion is transmitted through the output end of the X-direction piezoelectric motor stage 26, realizing the effective combination of three-degree-of-freedom Z-direction lifting and lowering and XY-axis macro-micro combination, so as to complete the focusing of the local position of the cell under the optical microscope.

[0189] The technical solution provided by the present invention is further described in detail above through several specific implementation modes in order to highlight the advantages and benefits of the technical solution provided by the present invention. However, the several specific implementation modes described above are not intended to be used as limitations on the present invention. Any reasonable modification and improvement of the present invention, combination of implementation modes and equivalent substitution within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A three-degree-of-freedom macro-micro composite piezoelectric nanoprobe station, characterized in that: include: Probe table, XY macro-motion mechanism, XY integrated micro-motion mechanism and Z-axis mechanism; The XY macro-motion mechanism includes an X-axis piezoelectric motor and a Y-axis piezoelectric motor, which are used to achieve horizontal movement of tens of millimeters in the X-axis and Y-axis directions respectively; The XY integrated micro-motion mechanism is used to achieve precise movement of a few nanometers to tens of nanometers in the X-axis and Y-axis directions; The Z-direction mechanism is used to achieve lifting and lowering of tens of microns in the Z-axis direction; The probe station table is used to carry a supported object and also to drive the supported object to move along the XY axis direction.

2. The three-degree-of-freedom macro-micro composite piezoelectric nanoprobe station according to claim 1, characterized in that: The Z-direction mechanism uses piezoelectric ceramics as a power source.

3. The three-degree-of-freedom macro-micro composite piezoelectric nanoprobe station according to claim 2, characterized in that: The housing of the Z-direction mechanism and the piezoelectric ceramic are integrated into one design.

4. The three-degree-of-freedom macro-micro composite piezoelectric nanoprobe station according to claim 1, characterized in that: The X-axis piezoelectric motor and the Y-axis piezoelectric motor are supported by linear guide rails.

5. The three-degree-of-freedom macro-micro composite piezoelectric nanoprobe station according to claim 1, characterized in that: The XY integrated micro-motion mechanism is driven by piezoelectric ceramics.

6. The three-degree-of-freedom macro-micro composite piezoelectric nanoprobe station according to claim 5, characterized in that: The piezoelectric ceramics in the XY micro-motion mechanism are arranged symmetrically.

7. A semiconductor testing method, implemented by the probe station according to claim 1, characterized in that: include: The step of collecting a signal of placement of a carrier; The step of obtaining a rapid positioning signal of the carried object according to the signal of the XY macro-motion mechanism; The step of obtaining a precise positioning signal of the carried object according to the signal of the XY integrated micro-motion mechanism; The step of sending a vertical position adjustment signal according to the precise positioning signal.

8. A computer storage medium for storing a computer program, characterized in that: When the computer program is read by a computer, the computer executes the method of claim 7.

9. A computer, comprising a processor and a storage medium, characterized in that: When the processor reads the computer program stored in the storage medium, the computer executes the method of claim 7 .

10. A computer program product, being a computer program, characterized in that When the computer program is executed, the method of claim 7 is implemented.

Images