Crystal bar stabilizing device and single crystal furnace using same

Abstract

The invention relates to the technical field of single crystal silicon rod production equipment, in particular to a crystal rod stabilizing device and a single crystal furnace using the same. The invention relates to a crystal bar stabilizing device. The crystal bar stabilizing device comprises an abutting mechanism and a driving mechanism. The abutting mechanism comprises a supporting base and a swing arm hinged to the supporting base. A plurality of swing arms are arranged, and a space for a crystal bar to pass through is reserved among the plurality of swing arms; the driving mechanism is used for driving the multiple swing arms to rotate synchronously and abut against the crystal bar. On the other hand, the invention relates to a single crystal furnace which comprises a furnace body, the device further comprises a crystal bar stabilizing device. The crystal bar stabilizing device is arranged in the furnace body, and the supporting seat is fixedly connected with the furnace body. The crystal bar stabilizing device can be directly mounted in the single crystal furnace, and a crystal bar penetrates through a plurality of swing arms during production. When the crystal bar shakes, the driving cylinder drives the multiple swing arms to rotate synchronously through the driving ring, so that stabilizing force is applied to the crystal bar, and the stability of the crystal bar is guaranteed.

Description

Technical Field

[0001] The present application relates to the technical field of single crystal silicon rod production equipment, and in particular to a crystal rod stabilization device and a single crystal furnace using the device. Background Art

[0002] At present, the production of single crystal silicon rods generally uses a Czochralski single crystal furnace. A Czochralski single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas (mainly nitrogen and helium) environment and grows single crystals without dislocation using the Czochralski method.

[0003] In the process of pulling single crystal silicon rods, the vibrations generated by the operation of the single crystal pulling furnace and the turbulent airflow in the single crystal furnace will cause the pulled crystal rods to shake. In addition, the industry is pursuing the pulling of heavier and longer crystal rods, which have greater inertia and more severe shaking. Crystal rods are prone to breakage when shaking, which may lead to the inability to produce normally.

[0004] In current technology, multiple push cylinders are installed on the auxiliary furnace chamber of the single crystal furnace. The multiple cylinders face the crystal rod from multiple angles and apply push force to the crystal rod to maintain the stability of the crystal rod. However, due to the synchronization error and low thrust consistency of the multiple cylinders, the crystal rod is still prone to deflection, affecting the normal production of the crystal rod. Summary of the invention

[0005] The present application provides a crystal rod stabilizing device and a single crystal furnace using the device, which can fix the crystal rod when the crystal rod shakes to ensure the stability of the crystal rod.

[0006] In a first aspect, the present application provides a crystal rod stabilization device, which adopts the following technical solution: A crystal rod stabilizing device comprises a supporting mechanism and a driving mechanism; The abutting mechanism includes a support seat and a swing arm hinged to the support seat; a plurality of the swing arms are provided, and a space for the crystal rod to pass through is reserved between the plurality of the swing arms; the driving mechanism is used to drive the plurality of swing arms to rotate synchronously and abut against the crystal rod.

[0007] By adopting the above technical solution, the crystal rod stabilization device can be directly installed in the single crystal furnace, and the crystal rod passes through multiple swing arms during production. When the crystal rod shakes, the driving mechanism drives the multiple swing arms to rotate synchronously, thereby applying a stabilizing force to the crystal rod to ensure the stability of the crystal rod. In addition, the multiple swing arms clamp the crystal rod at the same time, which has a centering effect, ensuring that the crystal rod is located in the center of the single crystal furnace, which helps to improve the production quality of the crystal rod.

[0008] Preferably, the support seat is arranged in a ring shape; the swing arm includes a driving end and a support arm; the driving end is hinged to the support seat, and the driving end is used to connect with the driving mechanism; the support arm extends to the inner side of the support seat, and the support arm is used to abut against the crystal rod.

[0009] By adopting the above technical solution, the annular support seat can provide relatively stable support for multiple swing arms, improve the stability of the swing arms when working, and the support arms extend inside the support seat, which can facilitate the swing arms to abut against the surface of the crystal rod, thereby providing stabilizing force for the crystal rod.

[0010] Preferably, the portion of the support arm for abutting the crystal rod is set as an abutting portion, and the portion of the driving end for connecting with the driving mechanism is set as a driving portion; the force arm of the driving portion is smaller than the force arm of the abutting portion.

[0011] By adopting the above technical solution, since the swing arm only needs a very small clamping force to ensure the stability of the crystal rod during the process of clamping the crystal rod, the force arm of the driving part is smaller than the force arm of the abutting part. Through the lever principle, the clamping force transmitted to the support arm by the driving mechanism will not be too large, thereby preventing excessive clamping force from causing damage to the surface of the crystal rod.

[0012] Preferably, the number of the swing arms is set to three; the driving ends of the three swing arms are distributed in an equilateral triangle, and the length of the support arm is equal to the distance between the center point and the vertex of the equilateral triangle.

[0013] By adopting the above technical solution, the ends of the three swing arms can swing to the center position of the support seat. At this time, the space between the ends of the three swing arms is almost zero, and the crystal rod cannot pass through. As the swing arm continues to rotate, the swing arm can clamp crystal rods of different sizes. In addition, since the crystal rod pulling device in the single crystal furnace usually uses molybdenum wire, the diameter of the molybdenum wire is small, and during the process of pulling the crystal rod with the molybdenum wire, the swing arm can adapt to the size of the molybdenum wire to clamp the molybdenum wire. Therefore, when the crystal rod is short and the swing arm is difficult to clamp the crystal rod, the swing arm can clamp the molybdenum wire, thereby improving the stability of the molybdenum wire during the crystal rod pulling process, thereby improving the stability of the crystal rod.

[0014] Preferably, the driving mechanism includes a driving ring and a driving cylinder; the driving ring is rotatably connected to the support seat; the output end of the driving cylinder is hinged to the driving ring; the driving ring is provided with a first tooth, the driving end is arranged in a disc shape, and the peripheral side of the driving end is provided with a second tooth meshing with the first tooth.

[0015] By adopting the above technical solution, the first teeth and the second teeth form a gear transmission, which can improve the accuracy of the transmission, facilitate accurate control of the operation of the swing arm, and facilitate control of the clamping force of the swing arm on the crystal rod.

[0016] Preferably, the driving mechanism comprises a turntable rotatably connected to the support seat and a driving motor driving the turntable to rotate; a spiral groove is provided on the turntable, and a sliding rod cooperating with the spiral groove is provided on the swing arm.

[0017] By adopting the above technical solution, when the turntable rotates, under the action of the spiral groove, the slide bar moves along the radial direction of the support seat, thereby driving the swing arm to swing. The spiral groove has a certain self-locking performance, which can improve the stability of the swing arm and prevent the swing arm from loosening.

[0018] On the other hand, the present application provides a single crystal furnace, which adopts the following technical solution: A single crystal furnace comprises a furnace body and a crystal rod stabilizing device. The crystal rod stabilizing device is arranged in the furnace body, and the support seat is fixedly connected to the furnace body.

[0019] By adopting the above technical solution, when the crystal rod shakes, the crystal rod stabilizing device can clamp the crystal rod and apply a stabilizing force to stop the crystal rod from shaking, thereby ensuring the normal production of the crystal rod and ensuring the quality of the crystal rod.

[0020] Preferably, the furnace body comprises a main furnace body, a sub-furnace body and an isolation valve; the crystal rod stabilizing device is arranged in the isolation valve, and the support seat is fixedly connected to the isolation valve.

[0021] By adopting the above technical scheme, on the one hand, since the space inside the isolation valve is large, it is convenient to install the crystal rod stabilizing device; on the other hand, the isolation valve is located in the middle position in the height direction of the single crystal furnace, and since the crystal rod is most likely to shake when it is pulled to a certain length and enters the auxiliary furnace body, the crystal rod stabilizing device is installed here, so that the crystal rod can be stabilized in time when it shakes, thereby ensuring the production of the crystal rod.

[0022] Preferably, an upper convex chamber is provided on the top of the main furnace body, and the auxiliary furnace body is arranged above the upper convex chamber and is connected to the upper convex chamber; a crystal rod stabilizing device is also provided in the upper convex chamber.

[0023] By adopting the above technical solution, the crystal rod stabilizing device located in the upper convex chamber can clamp the crystal rod when the crystal rod is short, and at this time the crystal rod stabilizing device located in the isolation valve can clamp the molybdenum wire. Therefore, the two sets of crystal rod stabilizing devices can work together to effectively improve the stability of the crystal rod.

[0024] In summary, the present invention includes at least one of the following beneficial technical effects: 1. When the crystal ingot shakes, the driving mechanism drives multiple swing arms to rotate synchronously, thereby applying a stabilizing force to the crystal ingot to ensure the stability of the crystal ingot. In addition, multiple swing arms clamp the crystal ingot at the same time, which has a centering effect and ensures that the crystal ingot is located in the center of the single crystal furnace, which helps to improve the production quality of the crystal ingot. 2. When the crystal ingot is long, the swing arm can directly clamp the crystal ingot and apply a stabilizing force to improve the stability of the crystal ingot during the production process; when the crystal ingot is short and the swing arm is difficult to clamp the crystal ingot, the swing arm can clamp the molybdenum wire to improve the stability of the molybdenum wire during the crystal ingot pulling process, thereby improving the stability of the crystal ingot; 3. The crystal rod stabilizing device is arranged in the isolation valve. On the one hand, since the space in the isolation valve is large, it is convenient to install the crystal rod stabilizing device. On the other hand, the isolation valve is located in the middle position in the height direction of the single crystal furnace. When the crystal rod is pulled to a certain length and enters the auxiliary furnace body, the crystal rod is most likely to shake. Therefore, the crystal rod stabilizing device is installed here, so that the crystal rod can be stabilized in time when it shakes, thereby ensuring the production of the crystal rod. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 is a schematic diagram of the overall structure of the crystal rod stabilization device in the embodiment of the present application; Figure 2 Schematic diagram of the working state of the crystal rod stabilization device in the embodiment of the present application; Figure 3 It is a schematic diagram of the transport trajectory of the swing arm in the embodiment of the present application; Figure 4 It is a structural schematic diagram of another implementation mode of the driving mechanism in the embodiment of the present application; Figure 5 It is a structural schematic diagram used to show the connection relationship between the turntable and the swing arm in the embodiment of the present application; Figure 6 It is a structural schematic diagram used to show the connection relationship between the turntable and the swing arm in the embodiment of the present application; Figure 7 It is a schematic diagram of the structure of the single crystal furnace and the installation structure of the crystal rod stabilization device in the embodiment of the present application.

[0026] Markings in the accompanying drawings: 1. supporting mechanism; 11. supporting seat; 12. swing arm; 121. driving end; 122. supporting arm; 123. second tooth; 124. sliding rod; 2. driving mechanism; 21. driving ring; 211. first tooth; 22. driving cylinder; 23. turntable; 231. spiral groove; 232. gear ring; 24. motor; 241. driving gear; 3. main furnace body; 31. upper convex chamber; 4. auxiliary furnace body; 5. isolation valve. DETAILED DESCRIPTION

[0027] The following is combined with Figure 1-7 The present invention is described in further detail.

[0028] The present application embodiment discloses a crystal rod stabilization device. Figure 1The crystal rod stabilizing device includes a supporting mechanism 1 and a driving mechanism 2. The supporting mechanism 1 includes an annular support seat 11 and a swing arm 12. The swing arm 12 is provided with a plurality of swing arms 12 and is distributed around the axis of the support seat 11. The swing arm 12 includes a driving end 121 hinged to the support seat 11 and a support arm 122 extending to the inner side of the annular support seat 11. The support arm 122 is fixedly connected to the driving end 121.

[0029] The driving mechanism 2 includes a driving ring 21, which is coaxially arranged with the support seat 11 and rotatably connected with the support seat 11, and the rotation axis of the driving ring 21 coincides with the central axis of the support seat 11. A first tooth 211 is arranged on the inner side of the driving ring 21. The driving end 121 is arranged in a disc shape, and a second tooth 123 is arranged on the circumference of the driving end 121, and the first tooth 211 and the second tooth 123 are meshed. The driving mechanism 2 also includes a driving cylinder 22, and the driving cylinder 22 can be a pneumatic cylinder, a hydraulic cylinder or an electric cylinder. The driving ring 21 is hinged to the output end of the driving cylinder 22, so that the driving cylinder 22 can drive the driving ring 21 to rotate, and drive the swing arm 12 to swing through the meshing of the first tooth 211 and the second tooth 123.

[0030] Reference Figure 2 The crystal rod stabilizing device in the present application can be directly installed in a single crystal furnace, and the crystal rod passes through the inner side of the support seat 11 and between the multiple swing arms 12 during production. When the crystal rod shakes, the driving cylinder 22 drives the multiple swing arms 12 to rotate synchronously through the driving ring 21, thereby applying a stabilizing force to the crystal rod, thereby ensuring the stability of the crystal rod and ensuring the normal production of the crystal rod.

[0031] Reference Figure 3 In the embodiment of the present application, three swing arms 12 are provided, and the three driving ends 121 corresponding to the three swing arms 12 are distributed in an equilateral triangle, and the center point of the equilateral triangle coincides with the central axis of the support seat 11. The length of the support arm 122 is the same as the distance between the center point and the vertex of the equilateral triangle. Therefore, the ends of the three swing arms 12 can swing to the center position of the support seat 11. At this time, the space between the ends of the three swing arms 12 is almost zero, and the crystal rod cannot pass through. As the swing arm 12 continues to rotate, the space between the three swing arms 12 can gradually change, so the swing arm 12 can clamp crystal rods of different sizes. In addition, since the crystal rod pulling device in the single crystal furnace usually uses molybdenum wire, the diameter of the molybdenum wire is small, and the swing arm 12 can clamp the molybdenum wire during the pulling process of the crystal rod by the molybdenum wire, so when the length of the crystal rod is short and the swing arm 12 is difficult to clamp the crystal rod, the swing arm 12 can clamp the molybdenum wire, thereby improving the stability of the molybdenum wire during the pulling process of the crystal rod, thereby improving the stability of the crystal rod.

[0032] Since the swing arm 12 only needs a small clamping force to ensure the stability of the crystal rod during the process of clamping the crystal rod, in order to avoid excessive clamping force causing damage to the surface of the crystal rod, the force arm of the support arm 122 needs to be smaller than the force arm of the driving end 121. In order to achieve the above purpose, the part of the support arm 122 used for abutting the crystal rod is set as the abutting part, and the part of the driving end 121 used for connecting with the driving mechanism 2 is set as the driving part, and it is only necessary to ensure that the force arm of the driving part is smaller than the force arm of the abutting part.

[0033] Reference Figure 4 As another preferred embodiment of the present application, the driving mechanism 2 includes a turntable 23 and a driving motor 24. The turntable 23 is coaxially arranged with the support base 11 and is rotatably connected. A center hole is opened in the center of the turntable 23 for the crystal rod to pass through. The motor 24 is located on one side of the turntable 23 and is fixedly connected to the support base 11.

[0034] A gear ring 232 is disposed on the circumference of the turntable 23 , and a driving gear 241 is fixed to the motor 24 . The gear ring 232 cooperates with the driving gear 241 , so that the motor 24 can drive the turntable 23 to rotate.

[0035] Reference Figure 5 and Figure 6 A spiral groove 231 is provided on the end surface of the turntable 23 facing the support seat 11, and a slide bar 124 cooperating with the spiral groove 231 is provided on the swing arm 12. Therefore, when the turntable 23 rotates, under the action of the spiral groove 231, the slide bar 124 moves radially along the support seat 11, thereby driving the swing arm 12 to swing.

[0036] The implementation principle of the crystal rod stabilization device in the embodiment of the present application is as follows: when the crystal rod is pulled, it passes between the support seat 11 and the multiple swing arms 12. When the crystal rod shakes, the drive mechanism 2 can be started, and the drive mechanism 2 drives the swing arm 12 to swing, thereby clamping the crystal rod and applying a stabilizing force. In addition, the multiple swing arms 12 clamp the crystal rod at the same time, which has a centering effect, thereby ensuring the production of the crystal rod.

[0037] When the length of the crystal rod is short, the swing arm 12 can clamp the molybdenum wire for pulling the crystal rod, thereby ensuring the stability of the molybdenum wire and indirectly ensuring the stability of the crystal rod.

[0038] The present application also discloses a single crystal furnace, referring to Figure 7 The single crystal furnace includes a furnace body and a crystal rod stabilizing device. The furnace body includes a main furnace body 3, an auxiliary furnace body 4, and an isolation valve 5 arranged between the main furnace body 3 and the auxiliary furnace body 4. The crystal rod stabilizing device is arranged in the isolation valve 5, and the support seat 11 is fixedly connected to the isolation valve 5 in the form of a bolt flange connection.

[0039] Firstly, since the space inside the isolation valve 5 is relatively large, it is convenient to install the crystal rod stabilizing device. In addition, the isolation valve 5 is usually located in the middle position in the height direction of the single crystal furnace, and since the crystal rod is most likely to shake when it is pulled to a certain length and enters the auxiliary furnace body 4, the crystal rod stabilizing device is installed here. When the crystal rod shakes, the crystal rod can be stabilized in time, thereby ensuring the production of the crystal rod.

[0040] As a preferred implementation of the embodiment of the present application. An upper convex chamber 31 is provided on the top of the main furnace body 3, and the isolation valve 5 is provided above the upper convex chamber 31. The isolation valve 5 and the auxiliary furnace body 4 are both provided above the upper convex chamber 31. And a group of crystal rod stabilization devices are also provided in the upper convex chamber 31, that is, two groups of crystal rod stabilization devices are provided in the single crystal furnace. The crystal rod stabilization device located in the upper convex chamber 31 can clamp the crystal rod when the crystal rod is short, and at this time, the crystal rod stabilization device located in the isolation valve 5 can clamp the molybdenum wire. Therefore, the two groups of crystal rod stabilization devices can work together to effectively improve the stability of the crystal rod.

[0041] The embodiments of this specific implementation method are all preferred embodiments of the present invention, and are not intended to limit the protection scope of the present invention. Therefore, any equivalent changes made based on the structure, shape, and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A crystal rod stabilizing device, characterized in that: It comprises a supporting mechanism (1) and a driving mechanism (2); The abutting mechanism (1) comprises a support seat (11) and a swing arm (12) hinged to the support seat (11); a plurality of the swing arms (12) are provided, and a space for a crystal rod to pass through is left between the plurality of the swing arms (12); and the driving mechanism (2) is used to drive the plurality of swing arms (12) to rotate synchronously and abut against the crystal rod.

2. The crystal rod stabilizing device according to claim 1, characterized in that: The support seat (11) is arranged in a ring shape; the swing arm (12) comprises a driving end (121) and a support arm (122); the driving end (121) is hinged to the support seat (11), and the driving end (121) is used to be connected to the driving mechanism (2); the support arm (122) extends to the inner side of the support seat (11), and the support arm (122) is used to abut against the crystal rod.

3. The crystal rod stabilizing device according to claim 2, characterized in that: The portion of the support arm (122) used for abutting the crystal rod is set as an abutment portion, and the portion of the drive end (121) used for connecting with the drive mechanism (2) is set as a drive portion; the force arm of the drive portion is smaller than the force arm of the abutment portion.

4. The crystal rod stabilizing device according to claim 2, characterized in that: The number of the swing arms (12) is set to three; the driving ends (121) of the three swing arms (12) are distributed in the form of an equilateral triangle, and the length of the support arm (122) is equal to the distance between the center point and the vertex of the equilateral triangle.

5. The crystal rod stabilizing device according to claim 2, characterized in that: The driving mechanism (2) comprises a driving ring (21) and a driving cylinder (22); the driving ring (21) is rotatably connected to the support seat (11); the output end of the driving cylinder (22) is hinged to the driving ring (21); the driving ring (21) is provided with a first tooth (211), the driving end (121) is provided in a disc shape, and a second tooth (123) meshing with the first tooth (211) is provided on the circumferential side of the driving end (121).

6. The crystal rod stabilizing device according to claim 2, characterized in that: The driving mechanism (2) comprises a turntable (23) rotatably connected to the support seat (11) and a driving motor (24) for driving the turntable (23) to rotate; the turntable (23) is provided with a spiral groove (231), and the swing arm (12) is provided with a sliding rod (124) that cooperates with the spiral groove (231).

7. A single crystal furnace, comprising a furnace body; characterized in that: It also comprises the crystal rod stabilizing device according to any one of claims 1 to 6; the crystal rod stabilizing device is arranged in the furnace body, and the support seat (11) is fixedly connected to the furnace body.

8. The single crystal furnace according to claim 7, characterized in that: The furnace body comprises a main furnace body (3), a secondary furnace body (4) and an isolation valve (5); the crystal rod stabilizing device is arranged in the isolation valve (5), and the support seat (11) is fixedly connected to the isolation valve (5).

9. The single crystal furnace according to claim 8, characterized in that: An upper convex chamber (31) is arranged at the top of the main furnace body (3), and the auxiliary furnace body (4) is arranged above the upper convex chamber (31) and is connected to the upper convex chamber (31); a crystal rod stabilizing device is also arranged in the upper convex chamber (31).

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