Device and method for manufacturing composite copper foil of vacuum evaporation base film

Abstract

The invention provides a device and a method for manufacturing a composite copper foil of a vacuum evaporation base film, which are used for solving the problems of unstable adhesive force between an initial conductive layer and the base film, poor uniformity of an electroplated composite copper layer and poor thermal stability of the base film when the composite copper foil of the vacuum evaporation base film is manufactured in the prior art. The composite copper foil manufacturing device of the vacuum evaporation base film comprises a hot-pressing shape correction section, an activation conducting layer section, two sets of conducting sections, a copper groove section and a curing composite layer section, shape correction can be conducted on the deformed base film in vacuum evaporation, the adhesion effect of a subsequent composite conducting layer and film cloth is guaranteed, and the production efficiency is improved. The bonding force between the initial conductive layer and the base film is increased, the performance of subsequent processing or use of electronic equipment is guaranteed, the precision of each processing technology of the electroplating composite layer is accurately controlled, the thickness and uniformity of the copper layer of the electroplating composite layer are guaranteed, the finished product composite copper foil is stable in electrical performance and good in performance in high-frequency or high-current application, and the service life of the copper foil is prolonged. And the safety is high.

Description

Technical Field

[0001] The invention relates to the technical field of composite copper foil manufacturing of vacuum evaporated base film, and in particular to a composite copper foil manufacturing device and method of vacuum evaporated base film. Background Art

[0002] Composite copper foil, as an important material for flexible circuit boards, can be widely used in circuit connections of mobile phones, tablets, smart devices and other products. It is composed of a base film, a conductive layer and a composite layer. Since the base film itself is insulating, a conductive layer needs to be attached to the surface of the base film before making the composite layer. The existing technology mostly achieves this step by heating the copper material to a high temperature, evaporating it and then condensing it on the base film to form an initial conductive metal film layer through a vacuum evaporation base film process. The copper layer is then compounded with the initial conductive layer on the base film through an electroplating process to produce a composite copper foil.

[0003] Although the vacuum evaporation base film composite copper foil production process has shown good performance in many applications, the current technology still has some shortcomings and challenges, mainly including the following points: 1. Unstable adhesion During the vacuum evaporation process, the adhesion between the initial conductive layer and the base film is affected by many factors, such as evaporation conditions (temperature, pressure, etc.), cleanliness of the base film surface, and treatment process. This unstable adhesion may cause separation between the copper layer and the base film during subsequent processing or use, affecting the performance of electronic equipment, especially under high temperature or high frequency working conditions.

[0004] 2. Poor uniformity of copper layer Electroplating a composite layer on a large area of ​​conductive layer requires large-scale production and high precision in process control. The copper layer is prone to being locally too thick or too thin, and the uneven thickness of the copper layer will lead to unstable electrical properties, affecting the performance of the composite copper foil in high-frequency or high-current applications, and may even cause local overheating or degradation of electrical performance.

[0005] 3. Thermal stability of base film The base film material of the composite copper foil (such as polyimide film, polyester film, etc.) has poor stability at high temperatures and will deform, shrink or degrade in performance during the high-temperature evaporation process, resulting in reduced adhesion between the conductive layer and the composite layer and the base film. In severe cases, the copper layer and the base film may even separate, affecting the quality of the final composite copper foil. Summary of the invention

[0006] In view of the shortcomings of the prior art mentioned above, the purpose of the present invention is to provide a device and method for producing a composite copper foil with a vacuum evaporated base film, which is used to solve the problems of unstable adhesion between the initial conductive layer and the base film, poor uniformity of the electroplated composite copper layer and poor thermal stability of the base film in the prior art when producing the composite copper foil with a vacuum evaporated base film.

[0007] In order to achieve the above-mentioned object and other related objects, the present invention provides a composite copper foil manufacturing device for vacuum evaporation base film, comprising: A rack, wherein a conductive chassis assembly is installed on the top of the rack, an upper slot and a lower slot are arranged below the conductive chassis assembly, and the upper slot and the lower slot are both installed on the rack, the conductive chassis assembly is electrically connected to the upper slot, the upper slot and the lower slot are fixed, and a liquid flow circulates between the upper slot and the lower slot through a pipeline; The upper tank is provided with a hot pressing shaping section, an activated conductive layer section, two groups of conductive sections and a copper trough section, and a cured composite layer section from left to right, and the hot pressing shaping section, the activated conductive layer section, the two groups of conductive sections and the copper trough section, and the cured composite layer section are horizontally connected. A driven transmission roller assembly is installed in the front part of the upper tank, and the driven transmission roller assembly provides power for the horizontal transmission of the membrane cloth in each processing section. A segmented isolation assembly is provided in the upper tank, and the segmented isolation assembly is used to separate the processing section into different processing spaces. The hot pressing shaping section is used to utilize the water vapor from the pre-treatment section and adopt hot pressing to correct the curling and slight wrinkles of the vacuum evaporation base film caused by temperature during the production process during the horizontal movement of the composite copper foil. Among them, the activated conductive layer section is used to activate the initial conductive layer oxidized by contact with air during transportation, so as to ensure the composite effect of the subsequent conductive layer; Among them, the conductive segment is used to attach negative charges to the base film; The copper tank section is used to electroplate a composite conductive copper layer on the base film using the electrolysis principle; The cured composite layer section is used to increase the tightness of the connection between the upper and lower composite conductive layers, the upper and lower initial conductive layers and the base film.

[0008] Optionally, the driven transmission roller assembly includes a support, a main transmission shaft, a transmission roller group and a water-blocking roller group. Several supports are fixed in the front wall of the upper groove, and the main transmission shaft is rotatably installed between the rear parts of the supports. The transmission roller group and the water-blocking roller group are transmission-installed on the main transmission shaft.

[0009] Optionally, the segmented isolation assembly includes a mounting frame, a vertical segmented partition, a sliding bracket, a photoelectric sensor, a liquid level switch and a horizontal current limiting plate. Mounting frames are fixed at the front and rear of the upper trough. A vertical segmented partition is fixed between the middle of the mounting frame of the hot pressing and shaping section, between the left of the mounting frame of the activated conductive layer section and between the right of the mounting frame of the copper trough section. Two vertical segmented partitions are fixed between the mounting frames of the conductive section. A sliding bracket is fixed between the right of the mounting frame of the conductive section. A photoelectric sensor is slidably mounted on the sliding bracket. Horizontal current limiting plates are installed between the front and rear of the two groups of water-retaining roller groups in the conductive section. Liquid level switches are fixed on the top of the rear horizontal current limiting plate of the conductive section and on the top of the right-end conveying roller group of the copper trough section.

[0010] Optionally, the conductive chassis assembly includes a rectifier chassis, an exhaust duct, a cathode connecting copper bar and an anode connecting copper bar. The rectifier chassis and the exhaust duct are fixed to the top of the frame, and the cathode connecting copper bar and the anode connecting copper bar are installed on the lower wall of the rectifier chassis.

[0011] Optionally, the conductive section includes a cathode main copper bar, a rotating conductive silver ring, a connecting shaft, a conductive roller, a power shaft, a sprocket, a linkage gear set, a linkage helical gear set and a conductive liquid nozzle set. The cathode main copper bar is fixed to the upper part of the rear wall of the upper tank. The cathode main copper bar and the cathode connecting copper bar are fixed by screws. The cathode main copper bar is electrically connected to the rotating conductive silver ring through a connecting piece. The middle parts of the four rotating conductive silver rings are all rotatably provided with a connecting shaft, and the middle outer wall of the connecting shaft is fixedly sleeved with a conductive roller. A power shaft is rotatably installed between the two supports of the conductive section, and the middle outer wall of the power shaft is fixedly sleeved with a chain. Wheel, and the sprocket is connected to the output end of the power motor through a chain transmission mechanism, a linkage gear set is installed between the power shaft and the main transmission shaft of the conductive section, a linkage bevel gear set is installed between the front end outer wall of the two lower connecting shafts and the left outer wall of the power shaft, and the rear end outer walls of the four connecting shafts are transmission-connected with two sets of linkage gear sets, a conductive liquid nozzle group is installed in the rear wall of the upper groove of the conductive section, and the conductive liquid nozzle group includes an upper vertical single nozzle and a lower inclined double nozzle, the upper vertical single nozzle is vertically arranged above the middle of the four conductive rollers, and the lower inclined double nozzle is arranged toward the ends of the four conductive rollers.

[0012] Optionally, the copper trough section includes an anode copper bar mounting seat, an anode connecting plate, a rotating support seat, a jet pipe group, a liquid supply circulation pipe, an anode rod, an anode iridium plate and a sunshade component, an anode copper bar mounting seat is fixed in the rear wall of the upper trough, the rear end of the anode copper bar mounting seat is fixed to the anode connecting copper bar up and down, the front end of the anode copper bar mounting seat is fixed with the anode connecting plate through a connecting piece, the anode connecting plate includes an upper anode connecting plate and a lower anode connecting plate, a rotating support seat is installed on the inner side of the rear wall of the upper trough, a jet pipe group is installed between the lower parts of the two rotating support seats and on the lower anode connecting plate, and the jet pipe group includes two horizontally arranged jet main pipes and eight jet branch pipes vertically arranged between the two jet main pipes, the jet outlets of the upper jet pipe group and the lower jet pipe group are relatively arranged, and the upper jet pipe group and the lower jet pipe group are respectively fixedly connected with a liquid supply circulation pipe. An anode rod is arranged on the outside of the jet tube group, and the anode rod includes an upper anode rod and a lower anode rod. The upper anode rod is transversely arranged at the front end of the upper anode connecting plate, and the lower anode rod is transversely arranged at the front end of the lower anode connecting plate. Four anode iridium plates are equidistantly fixed on the anode rod, and two square grooves are vertically provided on the anode iridium plates, and the square grooves are arranged corresponding to the positions of the jet outlets of the jet branch pipes. Four pairs of sunshade assemblies are equidistantly arranged between the jet main pipes of the upper jet tube group and the lower jet tube group. The sunshade assembly includes a first-level positioning pin, a first-level sliding positioning plate, a second-level sliding support leg and an anode sunshade plate. The first-level positioning pin is fixed to the outer wall of the jet main pipe of the lower jet tube group, and the upper part of the first-level positioning pin is slidably sleeved with a first-level sliding positioning plate, and the upper wall of the first-level sliding positioning plate is slidably installed with a second-level sliding support leg, and the two second-level sliding support legs are fixedly sleeved with anode sunshades.

[0013] Optionally, the hot pressing shaping section includes a whole film lower hot pressing plate, a whole film upper hot pressing plate, a film edge lower hot pressing plate, a film edge upper hot pressing plate, auxiliary film feeding rollers and film middle conveying rollers. The transmission structures of the auxiliary film feeding rollers and the film middle conveying rollers are the same as the water retaining roller group and the conveying roller group. The lower left and upper right parts of the three roller conveying structures on the left are respectively rotatably sleeved with the whole film lower hot pressing plate and the whole film upper hot pressing plate. The lower left and upper right ends of the three roller conveying structures on the right are respectively rotatably sleeved with the film edge lower hot pressing plate and the film edge upper hot pressing plate. The plate and the whole film upper hot pressing plate are in contact with the film edge lower hot pressing plate and the film edge upper hot pressing plate all in rectangular surface contact, the left upper wall of the whole film lower hot pressing plate, the right lower wall of the whole film upper hot pressing plate, the left upper walls of the two film edge lower hot pressing plates and the right lower walls of the two film edge upper hot pressing plates are all in rotatable contact with auxiliary film feeding rollers, the auxiliary film feeding rollers are fixedly sleeved with the conveying structure of the rollers, two film middle conveying rollers are rotatably arranged between the two film edge lower hot pressing plates and the two film edge upper hot pressing plates, and the film middle conveying rollers are fixedly sleeved with the conveying structure of the rollers.

[0014] Optionally, the activated conductive layer segment includes an activation treatment liquid nozzle group, and two activation treatment liquid nozzle groups are fixed between the inner side of the rear wall of the upper trough and the front mounting frame of the activated conductive layer segment, and the activation treatment liquid nozzle group is divided into an upper activation nozzle and a lower activation nozzle, and the upper activation nozzle and the lower activation nozzle are respectively arranged at the upper part and the lower part of the upper trough.

[0015] Optionally, the cured composite layer section includes limit rails, sliding seats, wind knives and air ducts. Ten pairs of limit rails are correspondingly arranged on the upper and lower inner sides of the front mounting frame and the rear mounting frame of the cured composite layer section. Sliding seats are installed in the limit rails. Wind knives are fixedly installed between the sliding seats that are vertically corresponding to the front and rear. The wind knives are fixedly connected to the air ducts.

[0016] The present invention also includes a method for preparing a composite copper foil of a vacuum-evaporated base film, which specifically comprises the following steps: Step 1: Before the membrane cloth is processed with a composite conductive layer, the membrane cloth is first allowed to pass through a hot pressing and shaping section, so that the water-containing membrane cloth that has been pre-cleaned passes between the lower hot pressing plate of the whole membrane and the upper hot pressing plate of the whole membrane. The auxiliary film feeding roller on the upper left wall of the lower hot pressing plate of the whole membrane and the auxiliary film feeding roller on the upper right wall of the upper hot pressing plate of the whole membrane apply friction to the membrane cloth to convey the membrane cloth. Then the membrane cloth passes through the contact surface of the lower hot pressing plate of the whole membrane and the upper hot pressing plate of the whole membrane, and is hot-pressed by the whole membrane. The base film is flattened by hot pressing. Finally, the membrane cloth passes through the lower hot pressing plate of the membrane edge and the upper hot pressing plate of the membrane edge, and the membrane edge is further flattened. The conveying roller in the membrane, the upper left auxiliary film feeding roller of the lower hot pressing plate of the membrane edge and the lower right auxiliary film feeding roller of the upper hot pressing plate of the membrane edge convey the membrane cloth stably during the hot pressing process. Step 2: After the base film is hot-pressed and shaped in the hot-pressing shaping section, the membrane cloth continues to move horizontally to the right and enters the activated conductive layer section. The activated conductive layer section uses the upper activation nozzle and the lower activation nozzle to spray to the upper and lower surfaces of the membrane cloth. The spray time is 30-70s. The membrane cloth is immersed in the space composed of the mounting frame, the vertical segmented partition and the tank body to remove the oxide layer and activate the initial conductive layer. The immersion temperature of the activated conductive layer section is 45 degrees Celsius; Step 3: The rear membrane cloth enters the conductive section, and the power device of the line body supplies energy to the sprocket, driving the power shaft to rotate. The meshing transmission between the gears is used to link the main transmission shaft, driving the transmission roller group and the water retaining roller group to transmit the membrane cloth from left to right, so that the membrane cloth passes through the two pairs of conductive rollers and becomes a cathode with a negatively charged surface. The upper vertical single nozzle and the lower inclined double nozzle of the conductive liquid nozzle group spray the electroplating copper liquid to the conductive rollers during this process. The four conductive rollers are in the shape of an inverted isosceles trapezoid, which reduces the vertical height of the conductive rollers. The two groups of water retaining roller groups retain the accumulated water and increase the liquid level of the electroplating copper liquid, so that the electroplating copper liquid completely immerses the two pairs of conductive rollers; Step 4: The rear membrane cloth enters the copper trough section, and the jet pipe group is used to spray up and down, and the vertical segmented partition is used to limit the flow to ensure the immersion height of the electroplated copper liquid in the copper trough section, and a heating device is used to ensure that the treatment temperature in the copper trough section is 22-25 degrees Celsius. The membrane cloth passes through the sunshade component. During this process, the liquid supply circulation pipe transports the electroplated copper liquid from the middle of the jet pipe group to both ends, so that the jet branch pipe passes through the anode iridium plate and evenly delivers liquid to the upper and lower walls of the membrane cloth. The anode iridium plate is a grid plate as a whole, and two rectangular hollow grooves are opened at the bottom thereof, which are inlaid with the jet outlet of the jet branch pipe. The first-level sliding positioning plate and the second-level sliding support leg of the sunshade component can slide forward and backward to adjust the front and rear position of the anode sunshade, thereby adjusting the sunshade area; Step 5: After passing through the composite conductive layer coating section which is spaced apart from the two conductive sections and the copper trough section, the membrane cloth continues to move to the right, enters the curing composite layer section, and passes between the upper and lower air knives.

[0017] As described above, the composite copper foil manufacturing device of the vacuum evaporation base film of the present invention has at least the following beneficial effects: 1. By setting a hot pressing shaping section at the left end of the upper tank, on the one hand, the deformed base film in vacuum evaporation is shaped to ensure the adhesion effect of the subsequent composite conductive layer and the membrane cloth, and on the other hand, the bonding force between the initial conductive layer and the base film is increased to ensure the performance of subsequent processing or use of electronic equipment; 2. By setting an activated conductive layer section, the oxide layer is removed before the composite conductive layer is plated, thereby increasing the friction of the initial conductive layer; 3. In the conductive section, four conductive rollers in the shape of an inverted isosceles trapezoid are used to lower the height of the conductive rollers, and the two conductive rollers facing each other steadily rotate in opposite directions through the linkage of the linkage gear set and the connecting shaft, so as to transport the membrane cloth from left to right. The liquid level control of the liquid level switch and the auxiliary water-blocking and liquid-accumulating effect of the two groups of water-blocking rollers are combined, and the electroplating copper liquid can completely immerse the two pairs of conductive rollers to prevent the conductive rollers from being plated and scratching the membrane cloth, so that the surface of the membrane cloth has a good electrification effect and a good copper plating effect; 4. In the copper trough section, the jet tube group is used to even out the jet flow, the support seat is rotated to adjust the jet angle, the anode iridium plate reduces the current density, so that the anode current is evenly output, and the stability of the anode performance is improved. The sunshade component flexibly adjusts the sunshade area to meet the sunshade requirements of membranes of different widths and sizes. The vertical segmented partitions limit the flow to ensure the immersion height of the electroplated copper liquid in the copper trough section, and the heating device is used to accurately control the accuracy of each processing technology of the electroplated composite layer to ensure the thickness and uniformity of the copper layer of the electroplated composite layer, so that the finished composite copper foil has stable electrical properties, good performance in high-frequency or high-current applications, and high safety; 5. By setting a curing composite layer section at the right end of the upper tank, the adhesion of the conductive layer and the composite layer to the base film is improved by using the principle of heating first and then cooling, thermal expansion and contraction, and the copper layer of the composite copper foil is cured to ensure the quality of the composite copper foil; 6. The composite copper foil production method using vacuum evaporation base film further refines the accuracy of production process control, has very practical significance for improving the current composite copper foil production technology, and facilitates the promotion of composite copper foil processing technology. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It shows a three-dimensional schematic diagram of the overall structure of the present invention from a southwest perspective.

[0019] Figure 2 Shown is a left schematic view of the overall structure of the present invention.

[0020] Figure 3 Shown is a schematic diagram of the upper tank segmentation of the present invention.

[0021] Figure 4 It is a three-dimensional schematic diagram of the rear structure of the upper tank of the present invention when viewed from a bottom perspective.

[0022] Figure 5 Shown is a three-dimensional schematic diagram of the upper slot structure of the present invention from a top view.

[0023] Figure 6 Shown is a southwest perspective stereoscopic schematic diagram of the conductive chassis assembly structure of the present invention.

[0024] Figure 7 Shown is a three-dimensional schematic diagram of the left side structure of the conductive chassis assembly of the present invention from a bottom perspective.

[0025] Figure 8 Shown is a front view schematic diagram of the conductive chassis assembly structure of the present invention.

[0026] Fig. 9 Shown is a southwest perspective stereoscopic schematic diagram of the arrangement of the processing sections in the upper tank of the present invention.

[0027] Fig.10 Shown is a stereoscopic schematic diagram of the hot pressing shaping section structure of the present invention from a southwest perspective.

[0028] Fig.11 Shown is a schematic three-dimensional view from the southwest perspective of the activated conductive layer segment structure of the present invention.

[0029] Fig.12 It is a three-dimensional schematic diagram of the coordination structure of the conductive segment and the copper slot segment of the present invention from a southwest perspective.

[0030] Fig.13 It is a schematic diagram of the transmission structure of the conductive segment and the copper slot segment of the present invention from a southwest perspective.

[0031] Fig.14 Shown as the present invention Fig.13 A magnified view of the structure of region A.

[0032] Fig.15 It is a front view schematic diagram of the transmission structure of the conductive segment and the copper slot segment of the present invention.

[0033] Fig.16 Shown is a left schematic view of the transmission structure of the conductive segment and the copper slot segment of the present invention.

[0034] Fig.17 Shown is a stereoscopic schematic diagram of the upper anode jet system structure of the present invention from a southwest perspective.

[0035] Fig.18 Shown is a three-dimensional schematic diagram of the upper anode jet system structure of the present invention from a bottom-up perspective.

[0036] Fig.19 It is a three-dimensional schematic diagram of the cooperation structure of the lower anode jet system and the sunshade assembly of the present invention from a southwest perspective.

[0037] Fig. 20 It is a three-dimensional schematic diagram of the cooperation structure of the lower anode jet system and the sunshade assembly of the present invention when viewed from a bottom perspective.

[0038] Fig.21 Shown is a left schematic view of the sunshade assembly structure of the present invention.

[0039] Fig. 22 It is a stereoscopic schematic diagram of the cured composite layer segment structure of the present invention from a southwest perspective.

[0040] Component number description 1. Frame; 2. Upper groove; 201, hot pressing and shaping section; 2011, hot pressing plate under the whole film; 2012, hot pressing plate on the whole film; 2013, auxiliary film feeding roller; 2014, hot pressing plate under the edge of the film; 2015, hot pressing plate on the edge of the film; 2016, film conveying roller; 202, activated conductive layer section; 2021, activated treatment liquid nozzle group; 2021a, upper activation nozzle; 2021b, lower activation nozzle; 203, conductive section; 2031, cathode main copper bar; 2032, rotating conductive silver ring; 2033, connecting shaft; 2034, conductive roller; 2035, power shaft; 2036, sprocket; 2037, linkage gear set; 2038, linkage helical gear set; 2039, conductive liquid nozzle set; 2039a, upper vertical single nozzle; 2039b, lower inclined double nozzle; 204, copper trough section; 2041, anode copper bar mounting seat; 2042, anode connecting plate; 2042a, upper anode connecting plate; 2042b, lower anode connecting plate; 2043, rotating support seat; 2044, jet pipe group; 2045, liquid circulation pipe; 2046, anode rod; 2046a, upper anode rod; 2046b, lower anode rod; 2047, anode iridium plate; 2048, sunshade assembly; 2048a, primary positioning slide pin; 2048b, primary sliding positioning plate; 2048c, secondary sliding support leg; 2048d, anode sunshade; 205, curing composite layer section; 2051, limit rail; 2052, sliding seat; 2053, air knife; 2054, air duct; 206, driven transmission roller assembly; 2061, support; 2062, main transmission shaft; 2063, transmission roller group; 2064, water retaining roller group; 207, segmented isolation assembly; 2071, mounting frame; 2072, vertical segmented partition; 2073, sliding bracket; 2074, photoelectric sensor; 2075, liquid level switch; 2076, horizontal current limiting plate; 3. Lower trough; 4. Conductive chassis assembly; 401. Rectifier chassis; 402. Exhaust duct; 403. Cathode connecting copper busbar; 404. Anode connecting copper busbar. DETAILED DESCRIPTION

[0041] The present invention is further described below in conjunction with the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it, but the embodiments are not intended to limit the present invention.

[0042] As mentioned in the background technology, during the vacuum evaporation process, the adhesion between the initial conductive layer and the base film is affected by multiple factors, such as evaporation conditions (temperature, pressure, etc.), cleanliness of the base film surface and treatment process, etc. This unstable adhesion may lead to separation between the copper layer and the base film during subsequent processing or use, thus affecting the performance of the electronic device. Moreover, electroplating a composite layer on a large area of ​​conductive layer requires large-scale production and high precision in process control. The copper layer is prone to being too thick or too thin in some areas. The uneven thickness of the copper layer will lead to unstable electrical properties, affecting the performance of the composite copper foil in high-frequency or high-current applications, and may even cause local overheating or degradation of electrical properties. Finally, the base film material of the composite copper foil has poor stability at high temperatures, and will deform, shrink or degrade in performance during the high-temperature evaporation process, resulting in reduced adhesion between the conductive layer and the composite layer and the base film. In severe cases, the copper layer and the base film may even separate, affecting the quality of the final composite copper foil.

[0043] like Figure 1 and Fig. 22 As shown, in order to solve the above problems, the inventors set a hot pressing correction section 201 in the pre-treatment section of the electroplating composite conductive copper layer, and can use water vapor and hot pressing to correct the curling and slight wrinkles of the vacuum-evaporated base film caused by temperature during the production process during the horizontal movement of the composite copper foil; by setting an activated conductive layer section 202, a conductive section 203 and a copper groove section 204, before the electroplating of the composite conductive layer, the initial conductive layer oxidized due to the contact with the air during the transmission is activated, thereby improving the electroplating copper quality of the subsequent conductive section 203 and the copper groove section 204; by setting a cured composite layer section 205, the principle of thermal expansion and contraction can be used to increase the connection tightness between the upper and lower composite conductive layers, the upper and lower initial conductive layers and the base film, thereby inventing a composite copper foil manufacturing device for vacuum-evaporated base film, comprising: A frame 1, a conductive chassis component 4 is installed on the top of the frame 1, an upper tank 2 and a lower tank 3 are arranged below the conductive chassis component 4, and the upper tank 2 and the lower tank 3 are both installed on the frame 1, the conductive chassis component 4 is electrically connected to the upper tank 2, the upper tank 2 and the lower tank 3 are fixed, and a liquid flow circulates between the upper tank 2 and the lower tank 3 through a pipeline; The upper tank 2 is provided with a hot pressing shaping section 201, an activated conductive layer section 202, two groups of conductive sections 203 and a copper tank section 204, and a cured composite layer section 205 from left to right, and the hot pressing shaping section 201, the activated conductive layer section 202, the two groups of conductive sections 203 and the copper tank section 204, and the cured composite layer section 205 are horizontally connected, a driven transmission roller assembly 206 is installed in the front part of the upper tank 2, and the driven transmission roller assembly 206 provides power for the horizontal transmission of the membrane cloth in each processing section, and a segmented isolation assembly 207 is provided in the upper tank 2, and the segmented isolation assembly 207 is used to separate the processing section into different processing spaces; The hot pressing and shaping section 201 is used to utilize the water vapor from the pre-treatment section and adopt hot pressing to correct the curling and slight wrinkles of the vacuum-evaporated base film caused by the temperature during the manufacturing process during the horizontal movement of the composite copper foil; The activated conductive layer segment 202 is used to activate the initial conductive layer oxidized by contact with air during transportation, so as to ensure the composite effect of the subsequent conductive layer; Wherein, the conductive segment 203 is used to attach negative charges to the base film; The copper slot section 204 is used to electroplate a composite conductive copper layer on the base film by using the electrolysis principle; The cured composite layer section 205 is used to increase the tightness of the connection between the upper and lower composite conductive layers, the upper and lower initial conductive layers and the base film. Example 1

[0044] See also Figure 1-Figure 5 and Figure 9-10To achieve the above-mentioned purpose and other related purposes, the present invention provides a composite copper foil manufacturing device for vacuum evaporation base film, comprising: a driven transmission roller assembly 206 and a hot pressing and shaping section 201, the driven transmission roller assembly 206 comprising a support 2061, a main transmission shaft 2062, a transmission roller group 2063 and a water retaining roller group 2064, a plurality of supports 2061 are fixed in the front wall of the upper groove 2, a main transmission shaft 2062 is rotatably installed between the rear parts of the plurality of supports 2061, a transmission roller group 2063 and a water retaining roller group 2064 are drivingly installed on the main transmission shaft 2062, the transmission roller group 2063 is used to transport the film cloth from left to right, and the water retaining roller group 2064 is used to increase the liquid level of the treatment liquid between the two water retaining roller groups 2064 while transporting the film cloth, so that the film cloth can be immersed and the coating processing effect is guaranteed; Among them, Figure 5 and Fig. 9 As shown, the segmented isolation assembly 207 includes a mounting frame 2071 and a vertical segmented partition 2072. The front and rear parts of the upper groove 2 are both fixed with mounting frames 2071. The conveying roller group 2063 and the water retaining roller group 2064 are both installed between the front and rear mounting frames 2071. A vertical segmented partition 2072 is fixed in the middle of the mounting frame 2071 of the hot pressing shaping section 201, which can separate the left full film shaping section and the right film edge shaping section of the hot pressing shaping section 201 to prevent water vapor and hot air from flowing into each other. Among them, Fig.10As shown, the hot pressing and shaping section 201 includes a whole film lower hot pressing plate 2011, a whole film upper hot pressing plate 2012, a film edge lower hot pressing plate 2014, a film edge upper hot pressing plate 2015, an auxiliary film feeding roller 2013 and a film middle conveying roller 2016. The transmission structures of the auxiliary film feeding roller 2013 and the film middle conveying roller 2016 are the same as the water retaining roller group 2064 and the conveying roller group 2063. The lower left and upper right parts of the three roller conveying structures on the left are respectively rotatably sleeved with the whole film lower hot pressing plate 2011 and the whole film upper hot pressing plate 2012. The lower left and upper right ends of the three roller conveying structures on the right are respectively rotatably sleeved with the film edge lower hot pressing plate 2014. 14 and the film edge upper hot pressing plate 2015, the whole film lower hot pressing plate 2011 and the whole film upper hot pressing plate 2012 are in rectangular contact with the film edge lower hot pressing plate 2014 and the film edge upper hot pressing plate 2015, the left upper wall of the whole film lower hot pressing plate 2011, the right lower wall of the whole film upper hot pressing plate 2012, the left upper wall between the two film edge lower hot pressing plates 2014 and the right lower wall between the two film edge upper hot pressing plates 2015 are all in rotational contact with auxiliary film feeding rollers 2013, the auxiliary film feeding rollers 2013 are fixedly sleeved with the conveying structure of the rollers, and two film edge lower hot pressing plates 2014 and the two film edge upper hot pressing plates 2015 are all rotatably provided with two The film conveying roller 2016 is fixedly connected with the conveying structure of the roller. When the film cloth enters the hot pressing and shaping section 201, the water-carrying film cloth that has been pre-cleaned passes between the lower hot pressing plate 2011 for the whole film and the upper hot pressing plate 2012 for the whole film. The auxiliary film conveying roller 2013 on the upper left wall of the lower hot pressing plate 2011 for the whole film and the auxiliary film conveying roller 2013 on the upper right wall of the upper hot pressing plate 2012 for the whole film can apply friction to the film cloth to convey the film cloth and prevent the film cloth from passing through the contact surface of the lower hot pressing plate 2011 for the whole film and the upper hot pressing plate 2012 for the whole film, and from getting stuck and over-stretching after thermal deformation when the whole film is hot pressed. The whole base film has the effect of being flattened by hot pressing, and then the membrane cloth passes through the hot pressing plate 2014 below the membrane edge and the hot pressing plate 2015 above the membrane edge to further flatten the membrane edge. The conveying roller 2016 in the film, the upper left auxiliary film conveying roller 2013 of the hot pressing plate 2014 below the membrane edge and the lower right auxiliary film conveying roller 2013 of the hot pressing plate 2015 above the membrane edge can ensure the stable conveyance of the membrane cloth during the hot pressing process. In this way, on the one hand, the deformed base film in vacuum evaporation is calibrated to ensure the adhesion effect of the subsequent composite conductive layer and the membrane cloth. On the other hand, the bonding force between the initial conductive layer and the base film is increased to ensure the performance of subsequent processing or use of electronic equipment. Example 2

[0045] See also Figure 1-Figure 9 and Figure 11-Figure 21The present invention provides a composite copper foil manufacturing device for a vacuum-evaporated base film, which also includes: a conductive chassis component 4, an activated conductive layer segment 202, a conductive segment 203 and a copper trough segment 204, wherein the conductive chassis component 4 includes a rectifier chassis 401, an exhaust pipe 402, a cathode connection copper bar 403 and an anode connection copper bar 404, the rectifier chassis 401 and the exhaust pipe 402 are fixed on the top of the frame 1, and the cathode connection copper bar 403 and the anode connection copper bar 404 are installed on the lower wall of the rectifier chassis 401, which can supply power to the conductive segment 203 and the copper trough segment 204, and the exhaust pipe 402 can discharge the waste gas of the conductive segment 203 and the copper trough segment 204 during the electroplating processing of the composite conductive layer.

[0046] Among them, Fig.11 As shown, the activated conductive layer segment 202 includes an activation liquid nozzle group 2021, and two activation liquid nozzle groups 2021 are fixed between the inner side of the rear wall of the upper tank 2 and the front mounting frame 2071 of the activated conductive layer segment 202. The activation liquid nozzle group 2021 is divided into an upper activation nozzle 2021a and a lower activation nozzle 2021b. The upper activation nozzle 2021a and the lower activation nozzle 2021b are respectively arranged at the upper and lower parts of the upper tank 2. The upper activation nozzle 2021a and the lower activation nozzle 2021b spray toward the upper and lower surfaces of the membrane cloth. The space composed of the mounting frame 2071, the vertical segmented partition 2072 and the tank body can be used for liquid blocking, flow accumulation, and soaking of the membrane cloth. The two methods of combining spraying and soaking are used to make the activation liquid fully react with the oxide layer and the initial conductive layer on the surface of the membrane cloth, remove the oxide layer, increase the friction of the initial conductive layer, and ensure the bonding effect of the subsequent composite conductive layer and the initial conductive layer.

[0047] Among them, Figure 5 and Fig. 9As shown, the segmented isolation assembly 207 also includes a sliding bracket 2073, a photoelectric sensor 2074, a liquid level switch 2075 and a horizontal current limiting plate 2076. A vertical segmented partition 2072 is fixed between the left part of the mounting frame 2071 of the activated conductive layer segment 202 and the right part of the mounting frame 2071 of the copper trough segment 204. Two vertical segmented partitions 2072 are fixed between the mounting frame 2071 of the conductive segment 203. A sliding bracket 2073 is fixed between the right part of the mounting frame 2071 of the conductive segment 203. A photoelectric sensor 2074 is slidably mounted on the sliding bracket 2073. Horizontal current limiting plates 2076 are installed between the front and rear parts of the two groups of water retaining roller groups 2064 of the conductive segment 203. Liquid level switches 2075 are fixed on the top of the rear horizontal current limiting plate 2076 of the conductive section 203 and the top of the right end conveying roller group 2063 of the copper trough section 204. The liquid level switch 2075 of the conductive section 203 can monitor the liquid level of the conductive section 203 in real time and control the spray flow of the conductive section 203, so that the electroplating copper liquid can always completely immerse the two pairs of conductive rollers 2034 and the membrane cloth, thereby preventing the conductive rollers 2034 from being plated and ensuring the conductive coating effect of the conductive rollers 2034. The photoelectric sensor 2074 slides back and forth on the sliding bracket 2073, and can detect the coating thickness and uniformity of each part of the membrane cloth after passing through the conductive section 203, so as to timely adjust the subsequent coating processing degree and ensure the coating processing quality.

[0048] Among them, Figure 12-16As shown, the conductive section 203 includes a cathode main copper bar 2031, a rotating conductive silver ring 2032, a connecting shaft 2033, a conductive roller 2034, a power shaft 2035, a sprocket 2036, a linkage gear set 2037, a linkage bevel gear set 2038 and a conductive liquid nozzle set 2039. The cathode main copper bar 2031 is fixed to the upper part of the rear wall of the upper tank 2. The cathode main copper bar 2031 is fixed to the cathode connecting copper bar 403 by screws. The cathode main copper bar 2031 is electrically connected to the rotating conductive silver ring 2032 through a connecting piece. The middle parts of the four rotating conductive silver rings 2032 are all rotatably provided with a connecting shaft 2033. The middle outer wall of the connecting shaft 2033 is fixedly sleeved with a conductive roller 2034. The rectifier chassis 40 The conductive roller 2034 can be powered by the cathode connecting copper bar 403, the cathode main copper bar 2031 and the rotating conductive silver ring 2032, so that when the membrane cloth passes through the two pairs of conductive rollers 2034, it can become a cathode with a negative charge on the surface. A power shaft 2035 is rotatably installed between the two supports 2061 of the conductive section 203. A sprocket 2036 is fixedly sleeved on the middle outer wall of the power shaft 2035, and the sprocket 2036 is connected to the output end of the power motor through a chain transmission mechanism. A linkage gear set 2037 is installed between the power shaft 2035 and the main transmission shaft 2062 of the conductive section 203. A linkage helical gear set 2037 is installed between the front end outer walls of the two lower connecting shafts 2033 and the left outer wall of the power shaft 2035. 038, and the rear end outer wall of the four connecting shafts 2033 is connected to two sets of linkage gear sets 2037, the power device of the line body supplies energy to the sprocket 2036, which can drive the power shaft 2035 to rotate, and utilize the meshing transmission between the gears to make the main transmission shaft 2062 linked to drive the transmission roller set 2063 and the water retaining roller set 2064 to transmit the membrane cloth from left to right, and a conductive liquid nozzle set 2039 is installed in the rear wall of the upper groove 2 of the conductive section 203, and the conductive liquid nozzle set 2039 includes an upper vertical single nozzle 2039a and a lower inclined double nozzle 2039b, the upper vertical single nozzle 2039a is vertically arranged above the middle of the four conductive rollers 2034, and the lower inclined double nozzle 2039b faces the four conductive rollers. The conductive liquid nozzle group 2039 is arranged above both ends of 2034. The upper vertical single nozzle 2039a and the lower inclined double nozzle 2039b of the conductive liquid nozzle group 2039 spray the electroplating copper liquid to the conductive roller 2034 when the membrane cloth passes. The four conductive rollers 2034 are in the shape of an inverted isosceles trapezoid, which reduces the height of the conductive roller 2034. The upper vertical single nozzle 2039a is arranged in the middle just above the conductive roller 2034, and the lower inclined double nozzle 2039b is inclined to the left and right below the conductive roller 2034. Under the liquid level control of the liquid level switch 2075 and the auxiliary water-retaining liquid accumulation of the two groups of water-retaining roller groups 2064, the electroplating copper liquid can completely immerse the two pairs of conductive rollers 2034, so that the surface of the membrane cloth is charged well.

[0049] Among them, Figure 12-Figure 21As shown, the copper tank section 204 includes an anode copper bar mounting seat 2041, an anode connecting plate 2042, a rotating support seat 2043, a jet pipe group 2044, a liquid feeding circulation pipe 2045, an anode rod 2046, an anode iridium plate 2047 and a sunshade assembly 2048. The anode copper bar mounting seat 2041 is fixed in the rear wall of the upper tank 2. The rear end of the anode copper bar mounting seat 2041 is fixed to the anode connecting copper bar 404 up and down. The front end of the anode copper bar mounting seat 2041 is fixed with the anode connecting plate 2042 through a connecting piece. The rectifier chassis 401 supplies power to the anode iridium plate 2047 through the anode connecting copper bar 404, the anode copper bar mounting seat 2041, the anode connecting plate 2042 and the anode rod 2046. The anode iridium plate 2047 is a grid plate as a whole, and its lower part is opened Two rectangular hollow grooves are provided and inlaid correspondingly with the jet outlets of the jet branch pipes, which can reduce the current density, make the anode current output uniform, and thus improve the stability of the anode performance. The anode connecting plate 2042 includes an upper anode connecting plate 2042a and a lower anode connecting plate 2042b. A rotating support seat 2043 is installed on the inner side of the rear wall of the upper groove 2. A jet pipe group 2044 is installed between the lower parts of the two rotating support seats 2043 and on the lower anode connecting plate 2042b. The rotating support seat 2043 can adjust the jet angle of the upper jet pipe group 2044 according to the coating thickness on the surface of the membrane cloth, and the jet pipe group 2044 includes two horizontally arranged jet main pipes and eight jet branch pipes vertically arranged between the two jet main pipes. The upper jet pipe group 2044 The jet outlet of the jet branch pipe of the lower jet pipe group 2044 is arranged opposite to each other, and the upper jet pipe group 2044 and the lower jet pipe group 2044 are respectively fixedly connected with a liquid circulation pipe 2045, and an anode rod 2046 is arranged outside the jet pipe group 2044, and the anode rod 2046 includes an upper anode rod 2046a and a lower anode rod 2046b, and the front end of the upper anode connecting plate 2042a is laterally arranged with an upper anode rod 2046a, and the front end of the lower anode connecting plate 2042b is laterally arranged with a lower anode rod 2046b, and four anode iridium plates 2047 are equidistantly fixed on the anode rod 2046, and two square grooves are vertically provided on the anode iridium plates 2047, and the square grooves are arranged corresponding to the positions of the jet outlets of the jet branch pipes, and the liquid circulation pipe 2045 is arranged on the jet pipe. The middle part of group 2044 makes it possible for the liquid circulation pipe 2045 to deliver liquid to the jet branch pipe of the jet pipe group 2044, and the electroplating copper liquid flow received by each jet branch pipe is uniform, so that the jet branch pipe can pass through the anode iridium plate 2047 and deliver liquid to the upper and lower walls of the membrane cloth uniformly. Four pairs of sunshade components 2048 are equidistantly arranged between the jet main pipes of the upper jet pipe group 2044 and the lower jet pipe group 2044. The sunshade component 2048 includes a primary positioning pin 2048a, a primary sliding positioning plate 2048b, a secondary sliding support leg 2048c and an anode sunshade plate 2048d. The primary positioning pin 2048a is fixed to the outer wall of the jet main pipe of the lower jet pipe group 2044, and the upper part of the primary positioning pin 2048a is slidably sleeved with a primary sliding positioning plate 2048b.The upper wall of the primary sliding positioning plate 2048b is slidably mounted with a secondary sliding support leg 2048c, and the two secondary sliding support legs 2048c are fixedly sleeved with an anode sunshade plate 2048d. The primary sliding positioning plate 2048b and the secondary sliding support leg 2048c of the sunshade assembly 2048 can slide forward and backward to adjust the front and rear position of the anode sunshade plate 2048d, thereby adjusting the sunshade area, which can meet the sunshade requirements of membranes of different widths and sizes, and ensure the copper plating effect of the composite conductive layer of the membrane.

[0050] In this way, the oxide layer is removed by activating the conductive layer segment 202 before the composite conductive layer is plated, thereby increasing the friction of the initial conductive layer; in the conductive segment 203, four conductive rollers 2034 in the shape of an inverted isosceles trapezoid are used to lower the height of the conductive rollers 2034, and the linkage gear set 2037 and the connecting shaft 2033 are linked to make the two conductive rollers 2034 facing each other steadily rotate in opposite directions to transport the membrane cloth from left to right; the liquid level control of the liquid level switch 2075 and the auxiliary water-blocking and liquid-accumulating effect of the two groups of water-blocking roller groups 2064 are combined, and the electroplating copper liquid can completely immerse the two pairs of conductive rollers 2034 to prevent the conductive rollers 2034 from being plated and scratching the membrane cloth, so that the surface of the membrane cloth is charged with a good effect. , the copper plating effect is good; the jet tube group 2044 is used in the copper trough section 204 to even out the jet flow, the rotating support seat 2043 adjusts the jet angle, the anode iridium plate 2047 reduces the current density, makes the anode current output evenly, and improves the stability of the anode performance. The sunshade component 2048 flexibly adjusts the sunshade area to meet the sunshade needs of membrane cloths of different widths and sizes. The vertical segmented partition 2072 limits the flow and ensures the immersion height of the electroplated copper liquid in the copper trough section 204, and is supplemented by a heating device to accurately control the accuracy of each processing technology of the electroplated composite layer, ensure the thickness and uniformity of the copper layer of the electroplated composite layer, so that the electrical properties of the finished composite copper foil are stable, the performance is good in high-frequency or high-current applications, and the safety is high. Example 3

[0051] See also Figure 1-Figure 5 , Fig. 9 and Fig. 22The present invention provides a composite copper foil manufacturing device for vacuum evaporation base film, which also includes: a curing composite layer section 205, the curing composite layer section 205 includes a limit rail 2051, a sliding seat 2052, an air knife 2053 and an air supply pipe 2054, and the front mounting frame 2071 and the rear mounting frame 2071 of the curing composite layer section 205 are respectively provided with ten pairs of limit rails 2051 on the upper and lower inner sides, and the sliding seat 2052 is installed in the limit rail 2051, and the front and rear sliding seats 2052 are fixedly installed with air knives 2053, and the air supply pipe 2054 is fixedly connected to the air knife 2053. After the membrane cloth enters the curing composite layer section 205 , passing through between the upper and lower wind knives 2053. During this process, the upper and lower composite conductive layers, the upper and lower initial conductive layers and the base film are expanded by heat under the action of the hot air of the first five pairs of wind knives 2053, and then the upper and lower composite conductive layers, the upper and lower initial conductive layers and the base film are contracted by cold air under the action of the cold air of the last five pairs of wind knives 2053, so that the two conductive layers are tightly connected to the base film. The sliding seat 2052 slides in the limiting rail 2051 to control the distance between the wind knife 2053 and the membrane cloth, thereby controlling the bonding effect between the copper layer and the base film, thereby improving the adhesion between the conductive layer and the composite layer and the base film, solidifying the copper layer of the composite copper foil, and ensuring the quality of the composite copper foil. Example 4

[0052] See also Figure 1-Figure 22 The present invention also includes a method for preparing a composite copper foil of a vacuum-evaporated base film, which comprises the following steps: Step 1: Before the composite conductive layer is processed on the membrane cloth, it needs to be vacuum-deposited to attach an initial conductive layer to the originally insulating base film. However, the temperature during the vacuum-deposited process will cause wrinkles, curling and deformation of the base film, affecting the bonding force between the subsequent composite conductive layer and the initial conductive layer. Therefore, before the composite conductive layer is processed, the membrane cloth is first passed through the hot pressing and shaping section 201, so that the water-containing membrane cloth that has been pre-cleaned passes between the lower hot pressing plate 2011 for whole membrane and the upper hot pressing plate 2012 for whole membrane, and the auxiliary film feeding roller 2013 on the upper left wall of the lower hot pressing plate 2011 for whole membrane and the auxiliary film feeding roller 2013 on the upper right wall of the upper hot pressing plate 2012 for whole membrane are moved to the hot pressing section 2013 for whole membrane. The film roller 2013 can apply friction to the film cloth to convey the film cloth and prevent the film cloth from passing through the contact surface of the lower hot pressing plate 2011 of the whole film and the upper hot pressing plate 2012 of the whole film. When the whole film is hot pressed, the film cloth is stuck and over-stretched after thermal deformation, so that the base film of the whole film has the effect of being flattened by hot pressing. After that, the film cloth passes between the lower hot pressing plate 2014 of the film edge and the upper hot pressing plate 2015 of the film edge, and the film edge is further flattened. The film conveying roller 2016, the upper left auxiliary film conveying roller 2013 of the lower hot pressing plate 2014 of the film edge and the lower right auxiliary film conveying roller 2013 of the upper hot pressing plate 2015 of the film edge can ensure the stable conveying of the film cloth during the hot pressing process. Step 2: During the pre-treatment of the initial conductive layer of the membrane cloth and the composite conductive layer, oxidation will occur on the side in contact with the air, and it is difficult for the composite conductive layer to adhere to the oxide layer. Therefore, before processing the composite conductive layer, it is necessary to remove the oxide layer and activate the initial conductive layer to ensure the bonding strength between the subsequent initial conductive layer and the composite conductive layer. After the membrane cloth completes the hot pressing shaping of the base film in the hot pressing shaping section 201, it continues to move horizontally to the right and enters the activated conductive layer section 202. The activated conductive layer section 202 uses the upper activation nozzle 2021a and the lower activation nozzle 2021a to activate the conductive layer. The activating nozzle 2021b sprays the upper and lower surfaces of the membrane cloth and immerses them in the space formed by the mounting frame 2071, the vertical segmented partition 2072 and the tank body to remove the oxide layer and activate the initial conductive layer. The activation liquid sprayed by the left pair of activation liquid nozzle groups 2021 is a mixture of deionized water, hydrochloric acid solution and palladium salt, and the activation liquid sprayed by the right pair of activation liquid nozzle groups 2021 is a mixture of deionized water, dilute hydrochloric acid and palladium dichloride. The spraying time is 30-70s, and the immersion temperature of the activated conductive layer segment 202 is 45 degrees Celsius; Step 3: The rear film cloth enters the conductive section 203, and the power device of the line body supplies energy to the sprocket 2036, driving the power shaft 2035 to rotate. The meshing transmission between the gears is used to link the main transmission shaft 2062, driving the transmission roller group 2063 and the water retaining roller group 2064 to transmit the film cloth from left to right, so that the film cloth passes through the two pairs of conductive rollers 2034 and becomes the cathode, with a negative charge on the surface. The upper vertical single nozzle 2039a and the lower inclined double nozzle 2039 of the conductive liquid nozzle group 2039 are 39b sprays the electroplating copper liquid to the conductive roller 2034 during this process. The four conductive rollers 2034 are in the shape of an inverted isosceles trapezoid, which reduces the height of the conductive roller 2034. The upper vertical single nozzle 2039a is set in the middle of the conductive roller 2034, and the lower inclined double nozzle 2039b is inclined to the left and right below the conductive roller 2034. Under the water-retaining and accumulated liquid effect of the two groups of water-retaining roller groups 2064, the electroplating copper liquid can completely immerse the two pairs of conductive rollers 2034. The electroplating copper solution includes copper sulfate, sulfuric acid, chloride ions, inhibitors, carriers, gloss agents and fine crystal agents. The inhibitor combines with chloride ions to form a complex with copper ions, thereby increasing the overvoltage of copper ions reduced on the cathode surface and inhibiting the copper deposition rate. The carrier is a long-chain polymer of polyether, such as polyethylene glycol, polypropylene glycol, polyethylene glycol-polypropylene glycol block copolymer, polytetrahydrofuran or polyoxyethylene-polyoxypropylene copolymer, which forms a complex with copper ions and, under the action of an electric field, carries copper ions to migrate to the cathode surface and adsorbs them on the high potential area on the surface of the initial conductive layer of the membrane cloth to form a resistance layer, thereby improving the uniformity of the composite conductive layer on the surface of the membrane cloth. Chloride and nickel salt are used as fine crystal agents to become crystal seeds for copper ions to be deposited on the cathode surface, thereby reducing the activation energy during copper ion reduction and increasing the copper deposition rate. Quinoline, ethylenediamine and boric acid are used as gloss agents to assist in the formation of new crystal nuclei, thereby making the grains of copper deposits fine and increasing the glossiness of the composite conductive layer. Step 4: The rear membrane cloth enters the copper trough section 204, and the jet tube group 2044 is used to spray up and down, and the vertical segmented partition 2072 is used to limit the flow to ensure the immersion height of the electroplated copper liquid in the copper trough section 204, and a heating device is used to ensure that the processing temperature in the copper trough section 204 is 22-25 degrees Celsius. The membrane cloth passes through the sunshade component 2048. During this process, the liquid circulation pipe 2045 transports the electroplated copper liquid from the middle of the jet tube group 2044 to both ends, so that the jet branch pipe passes through the anode iridium plate 2047 and evenly delivers liquid to the upper and lower walls of the membrane cloth. The anode iridium The plate 2047 is a grid plate as a whole, and two rectangular hollow grooves are provided at the bottom thereof, which are inlaid corresponding to the jet outlets of the jet branch pipes, so as to reduce the current density, make the anode current output uniform, and thus improve the stability of the anode performance. The rotating support seat 2043 can adjust the jet angle of the upper jet pipe group 2044, and the first-level sliding positioning plate 2048b and the second-level sliding support leg 2048c of the sunshade assembly 2048 can slide forward and backward to adjust the front and rear position of the anode sunshade plate 2048d, thereby adjusting the sunshade area and ensuring the copper plating effect of the membrane cloth composite conductive layer; Step 5: After passing through the composite conductive layer coating section where two conductive sections 203 and the copper groove section 204 are spaced apart, the membrane cloth continues to move to the right and enters the curing composite layer section 205, passing between the upper and lower wind knives 2053. During this process, the membrane cloth is first subjected to the action of the hot air from the first five pairs of wind knives 2053, causing the upper and lower composite conductive layers, the upper and lower initial conductive layers and the base film to expand due to the heat, and then subjected to the action of the cold air from the last five pairs of wind knives 2053, causing the upper and lower composite conductive layers, the upper and lower initial conductive layers and the base film to shrink due to the cold, thereby making the two conductive layers and the base film tightly connected.

[0053] Although the present invention has been described in detail above by general description and specific embodiments, it is obvious to those skilled in the art that some modifications or improvements can be made to the present invention. Therefore, these modifications or improvements made without departing from the spirit of the present invention all belong to the scope of protection claimed by the present invention.

Claims

1. A composite copper foil manufacturing device for vacuum evaporation base film, characterized in that: include: A frame (1), wherein a conductive chassis component (4) is installed on the top of the frame (1), an upper trough (2) and a lower trough (3) are arranged below the conductive chassis component (4), and the upper trough (2) and the lower trough (3) are both installed on the frame (1), the conductive chassis component (4) is electrically connected to the upper trough (2), the upper trough (2) and the lower trough (3) are fixed, and liquid circulation is carried out between the upper trough (2) and the lower trough (3) through a pipeline; The upper trough (2) is provided with a hot pressing shaping section (201), an activated conductive layer section (202), two groups of conductive sections (203) and a copper trough section (204), and a cured composite layer section (205) in sequence from left to right, and the hot pressing shaping section (201), the activated conductive layer section (202), the two groups of conductive sections (203) and the copper trough section (204), and the cured composite layer section (205) are horizontally connected, a driven transmission roller assembly (206) is installed in the front part of the upper trough (2), and the driven transmission roller assembly (206) provides power for the horizontal transmission of the membrane cloth in each processing section, and a segmented isolation assembly (207) is arranged in the upper trough (2), and the segmented isolation assembly (207) is used to separate the processing section into different processing spaces; The hot pressing shaping section (201) is used to utilize the water vapor in the pre-treatment section and adopt hot pressing to correct the curling and slight wrinkles of the vacuum-evaporated base film caused by the temperature during the manufacturing process during the horizontal movement of the composite copper foil; The activated conductive layer segment (202) is used to activate the initial conductive layer oxidized due to contact with air during transportation, so as to ensure the composite effect of the subsequent conductive layer; Wherein, the conductive segment (203) is used to attach negative charges to the base film; The copper tank section (204) is used to electroplate a composite conductive copper layer on the base film by utilizing the electrolysis principle; The solidified composite layer section (205) is used to increase the tightness of the connection between the upper and lower composite conductive layers, the upper and lower initial conductive layers and the base film.

2. The composite copper foil manufacturing device of the vacuum evaporation base film according to claim 1 is characterized in that: The driven transmission roller assembly (206) comprises a support (2061), a main transmission shaft (2062), a transmission roller group (2063) and a water retaining roller group (2064); a plurality of supports (2061) are fixed in the front wall of the upper groove (2); a main transmission shaft (2062) is rotatably mounted between the rear parts of the plurality of supports (2061); and a transmission roller group (2063) and a water retaining roller group (2064) are transmission-mounted on the main transmission shaft (2062).

3. The composite copper foil manufacturing device of the vacuum evaporation base film according to claim 2, characterized in that: The segmented isolation assembly (207) comprises a mounting frame (2071), a vertical segmented partition (2072), a sliding bracket (2073), a photoelectric sensor (2074), a liquid level switch (2075) and a horizontal current limiting plate (2076). The front and rear parts of the upper tank (2) are both fixed with mounting frames (2071). A vertical segmented partition (2072) is fixed between the middle part of the mounting frame (2071) of the hot pressing and shaping section (201), between the left part of the mounting frame (2071) of the activated conductive layer section (202) and between the right part of the mounting frame (2071) of the copper tank section (204). The conductive section (20 3), two vertical segmented partitions (2072) are fixed between the mounting frames (2071) of the conductive segment (203), a sliding bracket (2073) is fixed between the right parts of the mounting frames (2071) of the conductive segment (203), a photoelectric sensor (2074) is slidably mounted on the sliding bracket (2073), horizontal current limiting plates (2076) are installed between the front and rear parts of the two groups of water retaining roller groups (2064) of the conductive segment (203), and a liquid level switch (2075) is fixed to the top of the rear horizontal current limiting plate (2076) of the conductive segment (203) and the top of the right end transmission roller group (2063) of the copper trough segment (204).

4. The composite copper foil manufacturing device of vacuum evaporation base film according to claim 1, characterized in that: The conductive chassis assembly (4) comprises a rectifier chassis (401), an exhaust pipe (402), a cathode connection copper bar (403) and an anode connection copper bar (404); the rectifier chassis (401) and the exhaust pipe (402) are fixed to the top of the frame (1); and the cathode connection copper bar (403) and the anode connection copper bar (404) are installed on the lower wall of the rectifier chassis (401).

5. The composite copper foil manufacturing device of vacuum evaporation base film according to claim 3, characterized in that: The conductive section (203) comprises a cathode main copper bar (2031), a rotating conductive silver ring (2032), a connecting shaft (2033), a conductive roller (2034), a power shaft (2035), a sprocket (2036), a linkage gear set (2037), a linkage helical gear set (2038) and a conductive liquid nozzle set (2039). The cathode main copper bar (2031) is fixed to the upper part of the rear wall of the upper tank (2). The cathode main copper bar (2031) is connected to the cathode connecting copper bar (4031). 3) The cathode main copper bar (2031) is fixed by screws, and is electrically connected to the rotating conductive silver ring (2032) through a connecting piece. A connecting shaft (2033) is rotatably arranged in the middle of the four rotating conductive silver rings (2032). A conductive roller (2034) is fixedly sleeved on the middle outer wall of the connecting shaft (2033). A power shaft (2035) is rotatably installed between the two supports (2061) of the conductive section (203). The middle outer wall of the power shaft (2035) is fixedly sleeved. A sprocket (2036) is sleeved, and the sprocket (2036) is connected to the output end of the power motor via a chain transmission mechanism, a linkage gear set (2037) is installed between the power shaft (2035) and the main transmission shaft (2062) of the conductive section (203), a linkage bevel gear set (2038) is installed between the front end outer walls of the two lower connecting shafts (2033) and the left outer wall of the power shaft (2035), and two sets of linkage bevel gear sets (2038) are transmission-connected between the rear end outer walls of the four connecting shafts (2033). A linkage gear set (2037); a conductive liquid nozzle set (2039) is installed in the rear wall of the upper groove (2) of the conductive section (203); the conductive liquid nozzle set (2039) comprises an upper vertical single nozzle (2039a) and a lower inclined double nozzle (2039b); the upper vertical single nozzle (2039a) is vertically arranged above the middle of the four conductive rollers (2034); and the lower inclined double nozzle (2039b) is arranged above the two ends of the four conductive rollers (2034).

6. The composite copper foil manufacturing device of vacuum evaporation base film according to claim 3, characterized in that: The copper trough section (204) comprises an anode copper bar mounting seat (2041), an anode connecting plate (2042), a rotating support seat (2043), a jet pipe group (2044), a liquid supply circulation pipe (2045), an anode rod (2046), an anode iridium plate (2047) and a sunshade assembly (2048); an anode copper bar mounting seat (2041) is fixed inside the rear wall of the upper trough (2); the rear end of the anode copper bar mounting seat (2041) is fixed to the anode connecting copper bar (404) at the top and bottom; the front end of the anode copper bar mounting seat (2041) is fixed to the anode connecting plate (2042) via a connecting piece; the anode connecting plate (2042) comprises an upper anode connecting plate (2042a) and a lower anode connection plate (2042b), a rotating support seat (2043) is installed on the inner side of the rear wall of the upper tank (2), a jet pipe group (2044) is installed between the lower parts of the two rotating support seats (2043) and on the lower anode connection plate (2042b), and the jet pipe group (2044) includes two horizontally arranged jet main pipes and eight jet branch pipes vertically arranged between the two jet main pipes, the jet ports of the upper jet pipe group (2044) and the jet branch pipes of the lower jet pipe group (2044) are arranged opposite to each other, the upper jet pipe group (2044) and the lower jet pipe group (2044) are respectively fixedly connected with a liquid feeding circulation pipe (2045), and the jet pipe group (2044) ) is provided with an anode rod (2046) on the outside, the anode rod (2046) comprising an upper anode rod (2046a) and a lower anode rod (2046b), the upper anode rod (2046a) is transversely provided at the front end of the upper anode connecting plate (2042a), the lower anode rod (2046b) is transversely provided at the front end of the lower anode connecting plate (2042b), four anode iridium plates (2047) are fixed equidistantly on the anode rod (2046), and two square grooves are vertically provided on the anode iridium plates (2047), the square grooves are arranged corresponding to the positions of the jet outlets of the jet branch pipes, and four pairs of shielding plates are equidistantly provided between the jet main pipes of the upper jet pipe group (2044) and the lower jet pipe group (2044). A positive component (2048), the sunshade component (2048) includes a primary positioning pin (2048a), a primary sliding positioning plate (2048b), a secondary sliding support leg (2048c) and an anode sunshade plate (2048d), the primary positioning pin (2048a) is fixed to the outer wall of the jet main pipe of the lower jet pipe group (2044), the upper part of the primary positioning pin (2048a) is slidably sleeved with a primary sliding positioning plate (2048b), the upper wall of the primary sliding positioning plate (2048b) is slidably mounted with a secondary sliding support leg (2048c) left and right, and the two secondary sliding support legs (2048c) are fixedly sleeved with the anode sunshade plate (2048d).

7. The composite copper foil manufacturing device of vacuum evaporation base film according to claim 1, characterized in that: The hot pressing and shaping section (201) comprises a whole film lower hot pressing plate (2011), a whole film upper hot pressing plate (2012), a film edge lower hot pressing plate (2014), a film edge upper hot pressing plate (2015), an auxiliary film feeding roller (2013) and a film middle conveying roller (2016); the transmission structure of the auxiliary film feeding roller (2013) and the film middle conveying roller (2016) is the same as the water retaining roller group (2064) and the conveying roller group (2063); the lower left part and the upper right part of the three roller conveying structures on the left are respectively rotatably sleeved with the whole film lower hot pressing plate (2011) and the whole film upper hot pressing plate (2012); the lower left part and the upper right ends of the three roller conveying structures on the right are respectively rotatably sleeved with the film edge lower hot pressing plate (2014) and the film edge upper hot pressing plate (2015); the whole film lower hot pressing plate (2011) and the film edge upper hot pressing plate (2012) are respectively rotatably sleeved with the whole film lower hot pressing plate (2014) and the film edge upper hot pressing plate (2015); The pressing plate (211) and the whole film upper hot pressing plate (2012) are in contact with the film edge lower hot pressing plate (2014) and the film edge upper hot pressing plate (2015) in a rectangular surface. The left upper wall of the whole film lower hot pressing plate (2011), the right lower wall of the whole film upper hot pressing plate (2012), the left upper walls of the two film edge lower hot pressing plates (2014) and the right lower walls of the two film edge upper hot pressing plates (2015) are all in rotational contact with an auxiliary film feeding roller (2013). The auxiliary film feeding roller (2013) is fixedly sleeved with the conveying structure of the roller. Two film middle conveying rollers (2016) are rotatably arranged between the two film edge lower hot pressing plates (2014) and the two film edge upper hot pressing plates (2015). The film middle conveying rollers (2016) are fixedly sleeved with the conveying structure of the roller.

8. The composite copper foil manufacturing device of vacuum evaporation base film according to claim 1, characterized in that: The activated conductive layer segment (202) comprises an activation treatment liquid nozzle group (2021), two activation treatment liquid nozzle groups (2021) are fixed between the inner side of the rear wall of the upper trough (2) and the front mounting frame (2071) of the activated conductive layer segment (202), the activation treatment liquid nozzle group (2021) is divided into an upper activation nozzle (2021a) and a lower activation nozzle (2021b), and the upper activation nozzle (2021a) and the lower activation nozzle (2021b) are respectively arranged at the upper part and the lower part of the upper trough (2).

9. The composite copper foil manufacturing device of vacuum evaporation base film according to claim 1, characterized in that: The solidified composite layer section (205) comprises a limit rail (2051), a sliding seat (2052), an air knife (2053) and an air supply pipe (2054); ten pairs of limit rails (2051) are respectively arranged on the upper and lower inner sides of the front mounting frame (2071) and the rear mounting frame (2071) of the solidified composite layer section (205); a sliding seat (2052) is installed in the limit rail (2051); air knives (2053) are fixedly installed between the front and rear vertically corresponding sliding seats (2052); and an air supply pipe (2054) is fixedly connected to the air knife (2053).

10. A method for producing a composite copper foil of a vacuum-evaporated base film, using the composite copper foil production device of a vacuum-evaporated base film as described in any one of claims 1 to 9, characterized in that: The following steps are involved: Step 1: Before the membrane cloth is processed with a composite conductive layer, the membrane cloth is first passed through a hot pressing and shaping section (201), so that the water-containing membrane cloth that has been pre-cleaned passes between the lower hot pressing plate (2011) of the whole membrane and the upper hot pressing plate (2012) of the whole membrane. The auxiliary film feeding roller (2013) on the upper left wall of the lower hot pressing plate (2011) of the whole membrane and the auxiliary film feeding roller (2013) on the upper right wall of the upper hot pressing plate (2012) of the whole membrane apply friction to the membrane cloth to transport the membrane cloth, and then the membrane cloth passes through the lower hot pressing plate (2011) of the whole membrane. The contact surface between the pressing plate (2011) and the hot pressing plate (2012) on the whole film is hot pressed by the whole film, the base film is flattened by the hot pressing, and finally the film cloth passes through the hot pressing plate (2014) below the film edge and the hot pressing plate (2015) on the film edge, and the film edge is further flattened. The conveying roller (2016) in the film, the upper left auxiliary film conveying roller (2013) of the hot pressing plate (2014) below the film edge and the lower right auxiliary film conveying roller (2013) of the hot pressing plate (2015) on the film edge stably convey the film cloth during the hot pressing process; Step 2: After the base film is hot-pressed and shaped in the hot-pressing shaping section (201), the membrane cloth continues to move horizontally to the right and enters the activated conductive layer section (202). The activated conductive layer section (202) uses an upper activation nozzle (2021a) and a lower activation nozzle (2021b) to spray the upper and lower surfaces of the membrane cloth. The spraying time is 30-70 seconds. The membrane cloth is immersed in the space composed of the mounting frame (2071), the vertical segmented partition (2072) and the trough body to remove the oxide layer and activate the initial conductive layer. The immersion temperature of the activated conductive layer section (202) is 45 degrees Celsius; Step 3: The rear membrane cloth enters the conductive section (203), and the power device of the line body supplies energy to the sprocket (2036), driving the power shaft (2035) to rotate. The meshing transmission between the gears is used to link the main transmission shaft (2062), driving the transmission roller group (2063) and the water retaining roller group (2064) to transmit the membrane cloth from left to right, so that the membrane cloth passes through the two pairs of conductive rollers (2034) and becomes the cathode, with a negatively charged surface. The conductive liquid nozzle group ( During this process, the upper vertical single nozzle (2039a) and the lower inclined double nozzles (2039b) of the conductive roller (2039) spray the electroplating copper liquid toward the conductive roller (2034), and the four conductive rollers (2034) are in the shape of an inverted isosceles trapezoid, which reduces the vertical height of the conductive roller (2034), and the two groups of water-blocking roller groups (2064) block the accumulated water and increase the liquid level of the electroplating copper liquid, so that the electroplating copper liquid completely immerses the two pairs of conductive rollers (2034); Step 4: The rear membrane cloth enters the copper trough section (204), and the jet pipe group (2044) is used to spray up and down, and the vertical segmented partition (2072) is used to limit the flow to ensure the immersion height of the electroplated copper liquid in the copper trough section (204), and a heating device is used to ensure that the treatment temperature in the copper trough section (204) is 22-25 degrees Celsius. The membrane cloth passes through the sunshade component (2048). During this process, the liquid circulation pipe (2045) is connected from the middle of the jet pipe group (2044) to both ends. The electroplating copper liquid is transported so that the jet branch pipe passes through the anode iridium plate (2047) to uniformly transport the liquid to the upper wall and the lower wall of the membrane cloth. The anode iridium plate (2047) is a grid plate as a whole, and two rectangular hollow grooves are provided at the lower part thereof and are inlaid corresponding to the jet outlets of the jet branch pipe. The primary sliding positioning plate (2048b) and the secondary sliding support leg (2048c) of the sunshade component (2048) can slide forward and backward to adjust the front and rear position of the anode sunshade plate (2048d), thereby adjusting the sunshade area; Step 5: After passing through the composite conductive layer coating section spaced apart by two conductive sections (203) and the copper trough section (204), the membrane cloth continues to move to the right, enters the curing composite layer section (205), and passes between the upper and lower air knives (2053).

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