Online analysis gas sample processing system

Abstract

The invention belongs to the technical field of corrosive gas analysis, and particularly relates to an online analysis gas sample treatment system. According to the invention, the sampling system can realize sampling of a gas sample to be detected, the gas sample to be detected is transmitted to the sample processing system through the sample transmission system, the sample processing system can realize analysis pretreatment of the gas sample to be detected and purging of a residual sample, and the sample processing system comprises a plurality of electronic elements. The electronic integration system can control each electronic element in the sample processing system; the sample processing system is arranged in the protective cabinet, and the protective cabinet can shield, protect, fix and support the sample processing system, so that the maintainability and the regularity of the sample processing system are improved. The functions of sampling, sample treatment, tail gas treatment, carrier gas input and the like of fluorine gas, fluorine gas, chlorine trifluoride and standard gas under different system pressures can be achieved at the same time, and automatic sample introduction analysis of different samples is achieved through an integrated control system.

Description

Technical Field

[0001] The invention belongs to the technical field of corrosive gas analysis, and in particular relates to an online analysis gas sample processing system suitable for online analysis of corrosive gases such as fluorine, chlorine, chlorine trifluoride, and chlorine pentafluoride. Background Art

[0002] The online analysis of fluorine chemical products plays an important role in improving process parameters and product quality. The online analysis room of fluorine chemical industry mainly carries out analysis work on crude fluorine gas, reaction synthesis gas, primary purified fluorine gas, secondary purified fluorine gas, high-purity fluorine gas, crude chlorine trifluoride products, and purified chlorine trifluoride products. During the test, the above samples need to be transported to the chromatographic analysis room through gas pipelines and connected to two chromatographs and a spectrometer configured in the analysis room for online analysis. In addition, according to the sample analysis requirements, it is necessary to configure the carrier gas, sampling, purge, tail gas and other pipelines at the same time. The number of input pipelines is as many as more than ten, which is not easy to install and maintain and has certain safety hazards. It is necessary to carry out a universal design for fluorine chemical production sampling; the control valves are all Φ3 valves, which need to be manually operated. The selection and switching of sample flow paths adopt a series structure, which has poor sealing performance. The operation of switching between different product analyses is cumbersome, which will affect the timeliness of the analysis results; fluorine chemical products are extremely corrosive, and no pre-treatment is performed before sample analysis. The accuracy of the test results of online analytical instruments, in addition to being affected by the precision of the analytical instrument, also depends on the integrity and reliability of the test sample itself, because no matter how precise and advanced the analytical instrument is, its analytical accuracy will be limited by the representativeness, real-time and physical state of the sample. In fact, in the actual analysis process of fluorine chemicals, the sample processing system often encounters more problems than the instrument itself, and its maintenance volume also exceeds that of the analytical instrument, so the sample processing system and the analytical instrument should have the same degree of importance. Therefore, the online analysis of fluorine chemical products also needs to pay attention to the role of the sample processing system, which should be placed on the same level as the online analytical instrument to ensure the perfection of the online analysis system configuration.

[0003] In the prior art, there is no sample processing system designed for the sampling and processing of highly corrosive gases. Patent CN 210571628U proposes an online gas sample processing system. The system has fewer sampling pipelines and cannot meet the needs of multi-product sampling, and the sample processing measures are not suitable for fluorine chemical products. Fluorine chemical products (such as fluorine gas, chlorine trifluoride, chlorine pentafluoride, etc.) are extremely corrosive and will cause great damage to the human body after inhalation. They can react with oxygen and moisture in the air at room temperature and will react with most metals. Based on the analysis of the physicochemical properties of the above products, the design of the corresponding sample processing system has a strong degree of specificity. Therefore, it is necessary to design the sample processing of fluorine chemical products, and it must meet the following requirements: 1. Corrosion resistance requirements to ensure the airtightness of the pipeline system; 2. Multi-product (including standard gas) sampling requirements to meet the processing requirements of the processing system for the company's fluorine chemical production line products, and ensure the comprehensiveness of the sampling system's functions; 3. Positive and negative pressure sampling requirements to meet the sampling requirements under different air pressures inside the fluorine chemical product reactor; 4. Sample processing requirements: the physical state of the gas cannot be changed before entering the analytical instrument, and the tiny particles and moisture in the gas need to be removed; 5. Automated sampling requirements: fluorine chemical products are extremely harmful to the human body. In order to ensure safe production, it is necessary to design an automatic sampling method to avoid manual operation. Summary of the invention

[0004] The technical problem solved by the present invention is as follows: to provide an online analytical gas sample processing system, which can meet the corrosion resistance requirements and realize the functions of sample sampling, sample processing, tail gas processing and carrier gas input of fluorine gas, fluorine gas, chlorine trifluoride and standard gas under different system pressures; through an integrated control system, automatic sampling and analysis of different samples can be realized; and a switching scheme for sampling pipelines of the same sample is designed to deal with possible control valve failure situations.

[0005] Compared with the prior art, the present invention has the following beneficial effects:

[0006] (1) The present invention provides an online analytical gas sample processing system, which can be used for sampling and processing corrosive gas samples in fluorine chemical industry; it can realize rapid sampling of positive pressure, micro-positive pressure and negative pressure samples; the sample processing system can realize rapid sampling of crude and refined products of fluorine chemical industry including fluorine gas and chlorine trifluoride, rapid purging of gas pipelines, tail gas processing and carrier gas control; it can switch the gas path of the same sample in the event of an emergency failure of a certain sampling pipeline; it can meet the corrosion resistance requirements of sample analysis and can operate stably for a long time.

[0007] (2) The present invention provides an online analytical gas sample processing system, which can realize the sampling, processing and purging process of fluorine chemical products; it can improve the operation mode, reduce manual operation items, and reduce the probability of analysts directly contacting corrosive samples. It is suitable for sample processing in fluorine chemical and other corrosive gas analysis processes. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] Figure 1 A schematic diagram of the structure of an online analysis gas sample processing system provided by the present invention;

[0009] Figure 2 A structural diagram of a protective cabinet for an online analysis sample processing system provided by the present invention. DETAILED DESCRIPTION

[0010] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0011] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0012] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0013] like Figure 1 As shown, the present invention provides an online analytical gas sample processing system, which can realize the integrated control of basic functions such as sample extraction, sample transmission, sample processing, and sample discharge under different system pressures. It includes: a sampling system, a sample transmission system, a sample processing system, an electronic integration system, and a protective cabinet.

[0014] The sampling system can realize the sampling of the gas sample to be tested, and the gas sample to be tested is transmitted to the sample processing system through the sample transmission system. The sample processing system can realize the pre-analysis processing of the gas sample to be tested and the purging of the residual sample. The sample processing system includes multiple electronic components. The electronic integration system can control each electronic component in the sample processing system to realize the automation of sample collection and processing; the sample processing system is arranged in a protective cabinet, and the protective cabinet can realize the shielding, protection, fixation and support of the sample processing system, thereby improving the maintainability and regularity of the sample processing system.

[0015] The sample transmission system includes pipeline flow paths for four types of samples: fluorine chemical products and standard gas sample flow paths; pipeline purge gas flow paths; analytical instrument carrier gas flow paths; tail gas treatment gas flow paths, each flow path is composed of a transmission pipeline and a pipe joint.

[0016] The transmission pipeline should preferably be made of 316L stainless steel seamless tube, and the stainless steel tube should be annealed to meet the system's corrosion resistance requirements, operability requirements, and reduce the adsorption of samples by the inner wall of the pipeline. The selected pipe diameter depends on the actual application scenario, generally 1 / 4in OD Tube; the pipe joints used in the sample transmission system include multi-pass, straight-through intermediate joints, three-way intermediate joints, plate-through joints, reducers, terminal joints, and pressure gauge joints, etc. The connection methods are ferrule connection and threaded connection, and all pipe joints should preferably be made of 316L stainless steel.

[0017] The sampling probe of the sampling system is preferably a straight-through probe sampling, and the probe is a detachable probe tube sampling probe, which is convenient for maintenance and replacement of the sampling tube. The sampling probe of the sampling system should preferably be made of 316L stainless steel pipe, 1 / 4inOD Tube pipe, and the probe insertion depth depends on the specific situation of the inner diameter of the pipe. The probe insertion orientation is designed as follows: for sampling in a horizontal pipe, the probe is inserted from the top of the pipe; for sampling in a vertical pipe, the probe is inserted from the side wall of the pipe to avoid condensate or droplets that may exist in the pipe.

[0018] The gas samples to be tested include one carrier gas, two carrier gases, crude hydrogen trifluoride, purified hydrogen trifluoride, crude fluorine gas, primary purified fluorine gas, secondary purified fluorine gas, purge gas and standard gas. The outer wall of the protective cabinet is provided with a plurality of through-plate joints. After the above-mentioned gases pass through the through-plate joints through the transmission pipeline, they are connected to the sample processing system. The first carrier gas and the second carrier gas are connected to the online analyzer after passing through the two-way ball valve, solenoid valve, flow meter and pressure gauge in turn. The carrier gas of the online analyzer is automatically controlled by their respective solenoid valves, and the control valve on the transmission pipeline is in an open state. When the carrier gas is input, the solenoid valve is opened by the control software, and the pressure and flow of the carrier gas are monitored and adjusted in real time through the two-way ball valve and the flow meter. The carrier gas input pipeline is not connected to other pipelines and is controlled separately;

[0019] The purge gas passes through the transmission pipeline through the plate connector and is connected to the sample processing system. The purge gas passes through the needle valve and the solenoid valve in sequence and is connected to the multi-way connector.

[0020] The crude hydrogen trifluoride and the purified hydrogen trifluoride are connected to the sample processing system after passing through the plate-piercing joint through the transmission pipeline. The crude hydrogen trifluoride and the purified hydrogen trifluoride are connected to the multi-way joint after passing through a two-way ball valve, a three-way valve, and a solenoid valve in sequence. The third ways of the two three-way valves are connected;

[0021] The crude fluorine gas, the primary purified fluorine gas, and the secondary purified fluorine gas are connected to the sample processing system after passing through the penetration joint through the transmission pipeline. The crude fluorine gas, the primary purified fluorine gas, and the secondary purified fluorine gas are connected to the multi-way joint after passing through a two-way ball valve, a three-way valve, and a solenoid valve in sequence. The three-way valve of the crude fluorine gas is connected to the third way of the three-way valve of the primary purified fluorine gas, and the third way of the three-way valve of the secondary purified fluorine gas is connected to the transmission pipeline of the crude fluorine gas;

[0022] The standard gas is connected to the sample processing system after passing through the through-plate joint through the transmission pipeline, and the standard gas is connected to the multi-way joint after passing through the two-way ball valve and the solenoid valve in sequence, and the outlet of the multi-way joint passes through the solenoid valve and the two-way ball valve in sequence, and then passes through the through-plate joint through the transmission pipeline, and is connected to the air pump, the other end of the air pump is connected to the adsorption tank through the solenoid valve, and the other end of the adsorption tank is connected to the sample pump after passing through the solenoid valve;

[0023] The sample processing system includes a temperature control module, an F-type filter is arranged inside the temperature control module, the other outlet of the multi-way connector is connected to the F-type filter through a transmission pipeline, the outlet end of the F-type filter is respectively connected to an online analyzer and an exhaust gas end through a three-way valve, the exhaust gas end is located outside the protective cabinet, and an electromagnetic valve and a two-way ball valve are arranged on the transmission pipeline of the exhaust gas end.

[0024] The sample processing system includes a three-way valve, a solenoid valve, etc. used in the pipeline for switching the gas flow; when a gas sample flow fails in a certain gas flow, the sample processing system can switch the gas pipeline to a similar sample flow pipeline through a control valve, thereby improving the operability of a certain sampling pipeline in an emergency failure state;

[0025] The sample processing system includes a diaphragm pressure gauge including a pressure sensor and a temperature control module for maintaining the gas state of water in the sample. Fluorine gas and the like will react with water to generate hydrogen fluoride, which will seriously corrode the inner wall of the pipeline when dissolved in liquid water;

[0026] The F-type filter has a corrosion-resistant nickel metal wire mesh inside, which is used to remove tiny particles in gaseous samples; the sample pump is preferably a diaphragm pump, which is used to sample slightly positive or negative pressure gas samples with a pressure not greater than 0.01Mpa, and can also accelerate the purging process of residual samples; the sample pump pre-adsorption tank adsorbs hydrogen fluoride in the sample to protect the pump body.

[0027] The sample processing system uses PLC as a lower computer for on-site control, and the main control computer of the online analyzer is used as a host computer for process monitoring. The two communicate through the standard communication port of the PLC and the computer's custom port.

[0028] The protective cabinet is provided with a mounting structure for a gas concentration alarm, and the alarm is set to timely monitor the leakage of samples.

[0029] The exterior of the protective cabinet is made of steel to enhance explosion-proof performance; a ventilation structure is designed to accelerate the diffusion of gas in the cabinet; the placement and fixing structure of standard gas cylinders and adsorption tanks are designed to increase the safety factor of the processing system; and an outward opening door is designed to improve the operability of maintenance personnel.

[0030] The two-way ball valve is in an open state when the sample processing system is running, and has been debugged before operation. The following is a further introduction to the work of the present invention in conjunction with the accompanying drawings and embodiments:

[0031] Carrier gas input for online analytical instruments.

[0032] The carrier gas of the online analyzer is automatically controlled by solenoid valves 1 and 2, respectively, and the control valve on the bus is in the open state. When the carrier gas is input, the solenoid valve (1) and the solenoid valve (2) are opened by the control software. The pressure and flow of the carrier gas are monitored and adjusted in real time by a two-way ball valve and a flow meter. The carrier gas input pipeline is not connected to other pipelines and is controlled separately.

[0033] Fluorine chemical sample positive pressure sampling, sample processing, pipeline purging (taking crude fluorine product as an example).

[0034] 1. Purge and preheat. Before injection, the carrier gas pipeline remains open, the needle valve (1) is in the open state, and all other pipelines and valves remain closed. Open the control software to perform temperature increase operation, open the solenoid valve (3), solenoid valve (11), and solenoid valve (12) of the purge pipeline, and keep other control valves closed. At this time, high-purity helium is introduced into the processing pipeline for purge, and the pipeline pressure is adjusted and monitored by the needle valve and pressure sensor.

[0035] 2. Sampling and processing. After the purging is completed, the solenoid valve (3), solenoid valve (11), and solenoid valve (12) of the purging pipeline are closed, the three-way valve (1) is in the open state, the three-way valve (5) is controlled to flow to the solenoid valve (6), the solenoid valve (6) is opened, and the sample to be tested enters the sampling pipeline. The gas pressure is adjusted and monitored by the two-way ball valve (5) and the pressure sensor; the crude fluorine product flows through the sampling pipeline, the temperature control module and the F filter in turn, and finally enters the online analysis instrument through the three-way valve (1) for online analysis and data processing.

[0036] 3. Handling of abnormal pressure. When the pressure sensor indicates that the internal pressure of the pipeline increases rapidly, the solenoid valve (11) and the solenoid valve (12) are opened to release the sample pressure and protect the sample processing system and the injection system of the analytical instrument; after the abnormal situation is handled, the solenoid valve (11) and the solenoid valve (12) are closed to continue the injection operation.

[0037] 4. Purge. After the analysis process is completed, close the solenoid valve (6) and the three-way valve (1); open the solenoid valve (3) of the purge pipeline and the solenoid valves (11) and (12) of the tail gas pipeline, and introduce high-purity helium into the pipeline for purge.

[0038] 5. Evacuate. After the purge is completed, close the solenoid valve (3), solenoid valve (11), and solenoid valve (12); open the solenoid valve (10), solenoid valve (13), and solenoid valve (14), and start the sample pump to evacuate the pipeline.

[0039] Perform steps 4 and 5 several times to remove the corrosive samples remaining in the pipeline as much as possible to prevent them from corroding the treatment system.

[0040] Fluorine chemical sample micro-positive pressure (or negative pressure) sampling, sample processing, pipeline purging (taking crude fluorine products as an example).

[0041] 1. Purge and preheat. Before injection, the carrier gas pipeline remains open, the needle valve (1) is in the open state, and all other pipelines and valves remain closed. Open the control software to perform temperature increase operation, open the solenoid valve (3), solenoid valve (11), and solenoid valve (12) of the purge pipeline, and keep other control valves closed. At this time, high-purity helium is introduced into the processing pipeline for purge, and the pipeline pressure is adjusted and monitored by the needle valve and pressure sensor.

[0042] 2. Evacuate. After the purge is completed, close the solenoid valve (3), solenoid valve (11), and solenoid valve (12); open the solenoid valve (10), solenoid valve (13), and solenoid valve (14), and start the sample pump to evacuate the pipeline.

[0043] 3. Sampling and processing. After the purge is completed, the solenoid valve (3), solenoid valve (11), and solenoid valve (12) of the purge pipeline are closed, the three-way valve (1) is in the open state, and the three-way valve (5) is controlled to flow to the solenoid valve (6), and the solenoid valve (6) is opened. After evacuation, the pipeline pressure is low, and the sample to be tested enters the sampling pipeline under the action of pressure. The gas pressure is adjusted and monitored by the two-way ball valve (5) and the pressure sensor; the crude fluorine product flows through the sampling pipeline, the temperature control module and the F filter in turn, and finally enters the online analyzer through the three-way valve (1) for online analysis and data processing.

[0044] 4. Handling of abnormal pressure. When the pressure sensor indicates that the internal pressure of the pipeline increases rapidly, the solenoid valve (11) and the solenoid valve (12) are opened to release the sample pressure and protect the sample processing system and the injection system of the analytical instrument; after the abnormal situation is handled, the solenoid valve (11) and the solenoid valve (12) are closed to continue the injection operation.

[0045] 5. Purge. After the analysis process is completed, close the solenoid valve (6) and the three-way valve (1); open the solenoid valve (3) of the purge pipeline and the solenoid valves (11) and (12) of the tail gas pipeline, and introduce high-purity helium into the pipeline for purge.

[0046] 6. Evacuate. After the purge is completed, close the solenoid valve (3), solenoid valve (11), and solenoid valve (12); open the solenoid valve (10), solenoid valve (13), and solenoid valve (14), and start the sample pump to evacuate the pipeline.

[0047] Perform steps 5 and 6 several times to remove the corrosive samples remaining in the pipeline as much as possible to prevent them from corroding the treatment system.

[0048] When a sampling pipeline fails in an emergency (failure of the solenoid valve (6)), the gas path of the same type of sample is switched (taking crude fluorine product as an example).

[0049] 1. Purge and preheat. Before injection, the carrier gas pipeline remains open, the needle valve (1) is in the open state, and all other pipelines and valves remain closed. Open the control software to perform temperature increase operation, open the solenoid valve (3), solenoid valve (11), and solenoid valve (12) of the purge pipeline, and keep other control valves closed. At this time, high-purity helium is introduced into the processing pipeline for purge, and the pipeline pressure is adjusted and monitored by the needle valve and pressure sensor.

[0050] 2. Sampling and processing. After the purge is completed, the solenoid valve (3), solenoid valve (11), and solenoid valve (12) of the purge pipeline are closed, and the three-way valve (1) is in the open state. The flow direction of the three-way valve (5) and the three-way valve (6) is adjusted to control the gas flow direction to the solenoid valve (7), and the solenoid valve (7) is opened. The sample to be tested enters the sampling pipeline, and the gas pressure is adjusted and monitored by the two-way ball valve (5) and the pressure sensor; the crude fluorine product flows through the sampling pipeline, the temperature control module and the F filter in turn, and finally enters the online analyzer through the three-way valve (1) for online analysis and data processing.

[0051] 3. Handling of abnormal pressure. When the pressure sensor indicates that the internal pressure of the pipeline increases rapidly, the solenoid valve (11) and the solenoid valve (12) are opened to release the sample pressure and protect the sample processing system and the injection system of the analytical instrument; after the abnormal situation is handled, the solenoid valve (11) and the solenoid valve (12) are closed to continue the injection operation.

[0052] 4. Purge. After the analysis process is completed, close the solenoid valve 6 and the three-way valve 1; open the solenoid valves 3, 12, and 13 of the purge pipeline, keep the other control valves closed, and pass high-purity helium into the pipeline for purge.

[0053] 5. Evacuate. After the purge is completed, close the solenoid valve (3), solenoid valve (11), and solenoid valve (12); open the solenoid valve (10), solenoid valve (13), and solenoid valve (14), and start the sample pump to evacuate the pipeline.

[0054] Perform steps 4 and 5 several times to remove the corrosive samples remaining in the pipeline as much as possible to prevent them from corroding the treatment system.

[0055] Standard sample positive pressure sampling, sample processing, and pipeline purging.

[0056] 1. Purge and preheat. Before injection, the carrier gas pipeline remains open, the needle valve (1) is in the open state, and all other pipelines and valves remain closed. Open the control software to perform temperature increase operation, open the solenoid valve (3), solenoid valve (11), and solenoid valve (12) of the purge pipeline, and keep other control valves closed. At this time, high-purity helium is introduced into the processing pipeline for purge, and the pipeline pressure is adjusted and monitored by the needle valve and pressure sensor.

[0057] 2. Sampling and processing. After the purge is completed, the solenoid valve (3), solenoid valve (11), and solenoid valve (12) of the purge pipeline are closed, and the solenoid valve (8) in the sampling pipeline is opened, and the standard sample enters the sampling pipeline. The gas pressure is adjusted and monitored by the two-way ball valve (7) and the pressure sensor; the standard sample flows through the sampling pipeline, the temperature adjustment component and the dust collector in turn, and finally enters the online analysis instrument through the three-way valve (1) for online analysis and data processing.

[0058] 3. Handling of abnormal pressure. When the pressure sensor indicates that the internal pressure of the pipeline increases rapidly, the solenoid valve (11) and the solenoid valve (12) are opened to release the sample pressure and protect the sample processing system and the injection system of the analytical instrument; after the abnormal situation is handled, the solenoid valve (11) and the solenoid valve (12) are closed to continue the injection operation.

[0059] 4. Purge. After the analysis process is completed, close the solenoid valve 6 and the three-way valve 1; open the solenoid valves 3, 12, and 13 of the purge pipeline, keep the other control valves closed, and pass high-purity helium into the pipeline for purge.

[0060] 5. Evacuate. After the purge is completed, close the solenoid valve (3), solenoid valve (11), and solenoid valve (12); open the solenoid valve (10), solenoid valve (13), and solenoid valve (14), and start the sample pump to evacuate the pipeline.

[0061] Perform steps 4 and 5 several times to remove the corrosive samples remaining in the pipeline as much as possible to prevent them from corroding the treatment system.

[0062] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

[0063] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. An online analysis gas sample processing system, characterized in that: The invention comprises a sampling system, a sample transmission system, a sample processing system, an electronic integration system and a protective cabinet. The sampling system realizes sampling of the gas sample to be tested. The gas sample to be tested is transmitted to the sample processing system through the sample transmission system. The sample processing system realizes pre-analysis processing of the gas sample to be tested and purging of the residual sample. The sample processing system comprises a plurality of electronic components. The electronic integration system controls each electronic component in the sample processing system to realize automation of sample collection and processing. The sample processing system is arranged in the protective cabinet. The protective cabinet realizes shielding, protection, fixation and support of the sample processing system, thereby improving the maintainability and regularity of the sample processing system.

2. The online analysis gas sample processing system according to claim 1, characterized in that: The sample transmission system includes pipeline flow paths for four types of samples: fluorine chemical product and standard gas sample gas flow paths; pipeline purge gas flow paths; analytical instrument carrier gas flow paths; and tail gas treatment gas flow paths, each of which is composed of a transmission pipeline and a pipe joint.

3. The online analysis gas sample processing system according to claim 2, characterized in that: The transmission pipeline is a stainless steel seamless tube, and the pipe joints include multi-way, straight-through intermediate joints, three-way intermediate joints, plate-through joints, reducers, terminal joints and pressure gauge joints, and the connection methods are ferrule-type connection and threaded connection.

4. The online analysis gas sample processing system according to claim 1, characterized in that: The sampling probe of the sampling system is a straight-through probe sampling, and the probe is a detachable probe tube type sampling probe.

5. The online analysis gas sample processing system according to claim 1, characterized in that: The gas samples to be tested include a first carrier gas, a second carrier gas, crude hydrogen trifluoride, purified hydrogen trifluoride, crude fluorine gas, primary purified fluorine gas, secondary purified fluorine gas, purge gas and standard gas. A plurality of through-plate joints are provided on the outer wall of the protective cabinet. The above gases are connected to the sample processing system after passing through the through-plate joints via transmission pipelines.

6. The on-line analysis gas sample processing system according to claim 5, characterized in that: The first carrier gas and the second carrier gas are connected to the online analyzer after passing through the two-way ball valve, the solenoid valve, the flow meter and the pressure gauge respectively. The carrier gas of the online analyzer is automatically controlled by the respective solenoid valves, and the control valve on the transmission pipeline is in an open state.

7. The on-line analysis gas sample processing system according to claim 5, characterized in that: The purge gas passes through the transmission pipeline through the plate-penetrating joint and is connected to the sample processing system. The purge gas passes through the needle valve and the solenoid valve in sequence and is connected to the multi-way joint.

8. The on-line analysis gas sample processing system according to claim 5, characterized in that: The crude hydrogen trifluoride and the purified hydrogen trifluoride are connected to the sample processing system after passing through the penetration joint through the transmission pipeline. The crude hydrogen trifluoride and the purified hydrogen trifluoride are connected to the multi-way joint after passing through a two-way ball valve, a three-way valve, and a solenoid valve in sequence. The third ways of the two three-way valves are connected.

9. The on-line analysis gas sample processing system according to claim 5, characterized in that: The crude fluorine gas, the first-level purified fluorine gas and the second-level purified fluorine gas are connected to the sample processing system after passing through the through-plate joint through the transmission pipeline. The crude fluorine gas, the first-level purified fluorine gas and the second-level purified fluorine gas are connected to the multi-way joint after passing through the two-way ball valve, the three-way valve and the solenoid valve in sequence. The three-way valve of the crude fluorine gas is connected to the third way of the three-way valve of the first-level purified fluorine gas, and the third way of the three-way valve of the second-level purified fluorine gas is connected to the transmission pipeline of the crude fluorine gas.

10. The on-line analysis gas sample processing system according to claim 5, characterized in that: The standard gas passes through the through-plate joint through the transmission pipeline and is connected to the sample processing system. The standard gas passes through a two-way ball valve and a solenoid valve in sequence and is connected to a multi-way joint. The outlet of the multi-way joint passes through the solenoid valve and a two-way ball valve in sequence and then passes through the through-plate joint through the transmission pipeline and is connected to an air pump. The other end of the air pump is connected to an adsorption tank through a solenoid valve, and the other end of the adsorption tank is connected to a sample pump through a solenoid valve.

11. The online analysis gas sample processing system according to any one of claims 7, 8, 9 and 10, characterized in that: The sample processing system includes a temperature control module, an F-type filter is arranged inside the temperature control module, the other outlet of the multi-way connector is connected to the F-type filter through a transmission pipeline, the outlet end of the F-type filter is respectively connected to an online analyzer and an exhaust gas end through a three-way valve, the exhaust gas end is located outside the protective cabinet, and an electromagnetic valve and a two-way ball valve are arranged on the transmission pipeline of the exhaust gas end.

12. The online analysis gas sample processing system according to claim 11, characterized in that: The F-type filter has a corrosion-resistant nickel metal wire mesh inside, which is used to remove tiny particles in gaseous samples; the sample pump is a diaphragm pump, which is used to sample slightly positive pressure or negative pressure gas samples with a pressure not greater than 0.01Mpa, and accelerate the purging process of residual samples; the sample pump pre-adsorption tank adsorbs hydrogen fluoride in the sample to protect the pump body.

13. The on-line analysis gas sample processing system according to claim 6, characterized in that: The sample processing system uses PLC as a lower computer for on-site control, and the main control computer of the online analyzer is used as a host computer for process monitoring. The two communicate through the standard communication port of the PLC and the computer's custom port.

14. The on-line analysis gas sample processing system according to claim 1, characterized in that: The protective cabinet is provided with a mounting structure for a gas concentration alarm, and the alarm is set to timely monitor the leakage of samples.

15. The on-line analysis gas sample processing system according to claim 1, characterized in that: The exterior of the protective cabinet is made of steel to enhance explosion-proof performance; a ventilation structure is designed to accelerate the diffusion of gas in the cabinet; the placement and fixing structure of standard gas cylinders and adsorption tanks are designed to increase the safety factor of the processing system; and an outward opening door is designed to improve the operability of maintenance personnel.

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