Construction method of process design toolkit and related device

Abstract

The invention discloses a process design toolkit construction method and a related device, and relates to the field of integrated circuit design, and the process design toolkit construction method comprises the steps: based on keywords of each device in a preset keyword library, extracting device information corresponding to each keyword from a public data source, obtaining boundary conditions of each electrode imported by a front end, and performing model simulation and parameter adjustment at least based on the device information and the electrode boundary condition, obtaining a device simulation model of each device, and at least packaging each device simulation model to obtain a target process design package. Simulation and parameter adjustment are carried out on the device simulation model based on device information obtained through actual measurement in a public data source and electrode boundary conditions defined in the design stage, the device simulation model reflecting physical characteristics of all devices is obtained, all the device simulation models and all the interconnection parameters are packaged, and the device simulation model is obtained. Therefore, the target process design kit does not need to be obtained through device actual measurement, and the purposes of reducing the development cost of the process design kit and improving the development efficiency are achieved.

Description

Technical Field

[0001] The present application relates to the technical field of integrated circuit design, and in particular to a method for constructing a process design toolkit and related devices. Background Art

[0002] The process design toolkit is a key data package for integrated circuit design companies to design, simulate and verify integrated circuits. The construction of existing process design toolkits requires manual editing based on the production process flow of integrated circuits and actual measurement of device parameters, so as to obtain a process design toolkit including various device models. However, due to the complex process flow and number of devices in integrated circuit design, the construction process of existing process design toolkits has the problems of high development cost and low development efficiency. Therefore, how to reduce the development cost of process design toolkits and improve development efficiency has become an urgent problem to be solved. Summary of the invention

[0003] In view of the above problems, this application provides a method for constructing a process design toolkit and related devices to achieve the purpose of reducing the development cost of the process design toolkit and improving the development efficiency. The specific scheme is as follows:

[0004] The first aspect of the present application provides a method for constructing a process design toolkit, comprising:

[0005] Based on the keywords of each device in the preset keyword library, extract device information corresponding to each keyword from a public data source, where the type of device information at least includes a device structure diagram, device parameters and device materials of the experimental device;

[0006] Obtaining each electrode boundary condition imported by the front end, performing model simulation and parameter adjustment based on at least the device information and the electrode boundary condition, obtaining a device simulation model of each device, wherein the error between the device characteristic curve of the device simulation model and the experimental device characteristic curve is less than a preset error threshold, and the electrode boundary condition is a condition parameter defined by the target process design package in the design stage;

[0007] At least each of the device simulation models is packaged to obtain the target process design package.

[0008] In a possible implementation, performing model simulation and parameter adjustment based at least on the device information and the electrode boundary conditions to obtain a device simulation model of each device includes:

[0009] For each of the devices described:

[0010] Initializing and configuring a general device model based on the device information to obtain an initial device model of the device;

[0011] Calling an initial physical model corresponding to the physical characteristic identifier of the device, and searching for device information and an experimental physical characteristic curve of the experimental device from each of the device information based on the physical characteristic identifier of the device, wherein the experimental device shown is a device having the physical characteristic identifier of the device and having the most types of device information;

[0012] Calling a preset structure editor to perform adaptive grid distribution on the device information of the experimental device, obtaining a structure file of the experimental device, and performing simulation parameter adjustment operations on the initial physical model based on the structure file of the experimental device, the electrode boundary conditions and the experimental physical characteristic curve, to obtain a physical model corresponding to the physical characteristic identifier of the device;

[0013] Calling the preset structure editor to perform the adaptive grid distribution on the device information of the device to obtain a structure file of the device; simulating a physical model corresponding to the physical characteristic identifier of the device based on the structure file of the device to obtain a physical characteristic curve of the device;

[0014] An initial device model of the device is simulated to obtain a simulated physical characteristic curve of the device, and a parameter adjustment operation is performed on the initial device model based on the simulated physical characteristic curve of the device and a fitting error result of the physical characteristic curve of the device; when the fitting error result is less than a preset threshold, the parameter adjustment operation on the initial device model is terminated to obtain the device simulation model of the device.

[0015] In a possible implementation, before at least packaging each of the device simulation models and each of the interconnection parameters, the method further includes:

[0016] Obtain the component name of each custom component imported by the front end; extract the initial parameterization information corresponding to each component name from the public data source based on the component name, the initial parameterization information including the schematic symbol and initial layout corresponding to the component name; render the initial layout based on the device information to obtain the parameterized unit layout corresponding to the component name; call the preset component description format parameter editor to generate the component description format parameters and parameter call relationship function corresponding to the component name according to the device information; encapsulate the schematic symbol, the parameterized unit layout, the component description format parameters and the parameter call relationship function corresponding to the component name to obtain the parameterized unit of each custom component;

[0017] The unit name of each standard unit imported by the front end is obtained, and based on the unit name, the standard unit schematic symbol, the standard unit circuit schematic diagram and the standard unit initial layout corresponding to each unit name are extracted from the public data source; the standard unit initial layout is rendered according to the interconnection parameters in the device information and the parameterized unit to obtain the standard unit layout corresponding to the unit name; the standard unit schematic symbol, the standard unit circuit schematic diagram and the standard unit layout corresponding to each unit name are packaged to obtain a standard unit library.

[0018] In a possible implementation, rendering the initial layout based on the device information to obtain a parameterized unit layout corresponding to the component name includes:

[0019] Extracting device structure information and device design parameter information based on the device structure diagram and the device parameters in the device information;

[0020] The initial layout is rendered by layer display according to the device structure information and the device design parameter information; the graphic size and graphic spacing of the initial layout after the layer display rendering are rendered based on the interconnection parameters to obtain the parameterized unit layout.

[0021] In a possible implementation, rendering the initial layout of the standard cell according to the interconnection parameters in the device information and the parameterized cell to obtain the standard cell layout corresponding to the cell name includes:

[0022] Searching for the parameterized cell layout corresponding to the component name of each custom component in the standard cell initial layout, and performing layout cell replacement on the layout of the custom component in the standard cell initial layout based on the found parameterized cell layout;

[0023] The standard cell layout is obtained by rendering the graphic size and graphic spacing of the standard cell initial layout after the layout cell replacement based on the interconnection parameters.

[0024] In a possible implementation, packaging at least each of the device simulation models to obtain the target process design package includes:

[0025] Each of the device simulation models, the device structure information, the device design parameter information, each of the parameterized units and the standard unit library is packaged to obtain the target process design package.

[0026] A second aspect of the present application provides a system for constructing a process design toolkit, comprising:

[0027] A parameter extraction module, for extracting device information corresponding to each keyword from a public data source based on the keywords of each device in a preset keyword library, wherein the types of the device information at least include a device structure diagram, device parameters and device materials of the experimental device;

[0028] A model building module, used to obtain the boundary conditions of each electrode imported by the front end, perform model simulation and parameter adjustment based on at least the device information and the electrode boundary conditions, obtain a device simulation model of each device, the error between the device characteristic curve of the device simulation model and the experimental device characteristic curve is less than a preset error threshold, and the electrode boundary conditions are conditional parameters defined by the target process design package in the design stage;

[0029] The design package packaging module is used to package at least each of the device simulation models to obtain the target process design package.

[0030] In a possible implementation, the model building module is configured to:

[0031] For each of the devices described:

[0032] Initializing and configuring a general device model based on the device information to obtain an initial device model of the device;

[0033] Calling an initial physical model corresponding to the physical characteristic identifier of the device, and searching for device information and an experimental physical characteristic curve of the experimental device from each of the device information based on the physical characteristic identifier of the device, wherein the experimental device shown is a device having the physical characteristic identifier of the device and having the most types of device information;

[0034] Calling a preset structure editor to perform adaptive grid distribution on the device information of the experimental device, obtaining a structure file of the experimental device, and performing simulation parameter adjustment operations on the initial physical model based on the structure file of the experimental device, the electrode boundary conditions and the experimental physical characteristic curve, to obtain a physical model corresponding to the physical characteristic identifier of the device;

[0035] Calling the preset structure editor to perform the adaptive grid distribution on the device information of the device to obtain a structure file of the device; simulating a physical model corresponding to the physical characteristic identifier of the device based on the structure file of the device to obtain a physical characteristic curve of the device;

[0036] An initial device model of the device is simulated to obtain a simulated physical characteristic curve of the device, and a parameter adjustment operation is performed on the initial device model based on the simulated physical characteristic curve of the device and a fitting error result of the physical characteristic curve of the device; when the fitting error result is less than a preset threshold, the parameter adjustment operation on the initial device model is terminated to obtain the device simulation model of the device.

[0037] In a possible implementation, the construction system of the process design toolkit further includes:

[0038] A first rendering module is used to obtain the component name of each custom component imported by the front end before at least packaging each of the device simulation models and each of the interconnection parameters; extract the initial parameterization information corresponding to each of the component names from the public data source based on the component name, and the initial parameterization information includes the schematic symbol and initial layout corresponding to the component name; render the initial layout based on the device information to obtain the parameterized unit layout corresponding to the component name; call a preset component description format parameter editor to generate the component description format parameters and parameter call relationship function corresponding to the component name according to the device information; package the schematic symbol, the parameterized unit layout, the component description format parameters and the parameter call relationship function corresponding to the component name to obtain the parameterized unit of each of the custom components;

[0039] The second rendering module is used to obtain the unit name of each standard unit imported by the front end before at least packaging each of the device simulation models and each of the interconnection parameters, and extract the standard unit schematic symbol, standard unit circuit schematic and standard unit initial layout corresponding to each of the unit names from the public data source based on the unit name; render the standard unit initial layout according to the interconnection parameters in the device information and the parameterized unit to obtain the standard unit layout corresponding to the unit name; and package the standard unit schematic symbol, the standard unit circuit schematic and the standard unit layout corresponding to each of the unit names to obtain a standard unit library.

[0040] In a possible implementation, when the first rendering module renders the initial layout based on the device information to obtain the parameterized unit layout corresponding to the component name, the first rendering module is set to:

[0041] Extracting device structure information and device design parameter information based on the device structure diagram and the device parameters in the device information;

[0042] The initial layout is rendered by layer display according to the device structure information and the device design parameter information; the graphic size and graphic spacing of the initial layout after the layer display rendering are rendered based on the interconnection parameters to obtain the parameterized unit layout.

[0043] In a possible implementation, when the second rendering module renders the initial layout of the standard cell according to the interconnection parameters in the device information and the parameterized cell to obtain the standard cell layout corresponding to the cell name, the second rendering module is set to:

[0044] Searching for the parameterized cell layout corresponding to the component name of each custom component in the standard cell initial layout, and performing layout cell replacement on the layout of the custom component in the standard cell initial layout based on the found parameterized cell layout;

[0045] The standard cell layout is obtained by rendering the graphic size and graphic spacing of the standard cell initial layout after the layout cell replacement based on the interconnection parameters.

[0046] In a possible implementation, the design package encapsulation module is configured to:

[0047] Each of the device simulation models, the device structure information, the device design parameter information, each of the parameterized units and the standard unit library is packaged to obtain the target process design package.

[0048] The third aspect of the present application provides a computer program product, including computer-readable instructions. When the computer-readable instructions are executed on an electronic device, the electronic device implements the method for constructing a process design toolkit according to the first aspect or any implementation method of the first aspect.

[0049] A fourth aspect of the present application provides an electronic device, comprising at least one processor and a memory connected to the processor, wherein:

[0050] The memory is used to store computer programs;

[0051] The processor is used to execute the computer program so that the electronic device can implement the method for constructing the process design toolkit of the above-mentioned first aspect or any implementation manner of the first aspect.

[0052] A fifth aspect of the present application provides a computer storage medium, which carries one or more computer programs. When the one or more computer programs are executed by an electronic device, the electronic device can implement a method for constructing a process design toolkit according to the first aspect or any implementation method of the first aspect.

[0053] By means of the above technical scheme, the present application provides a method for constructing a process design toolkit and related devices, by configuring keywords of each device based on a preset keyword library, extracting device information corresponding to each keyword from a public data source, and configuring at least model simulation and parameter adjustment based on the device information and the electrode boundary conditions, to obtain a device simulation model of each device. Since the device information in the public data source is obtained through actual measurement, the device simulation is performed at least based on the device information and the electrode boundary conditions, so that the device simulation model of each device can reflect the physical characteristics of the real device involved in the target process design package without the need for actual device measurement. It can be seen that the present application reduces the development cost of the process design toolkit and improves the development efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0054] The above and other features, advantages and aspects of the embodiments of the present disclosure will become more apparent with reference to the following detailed description in conjunction with the accompanying drawings. Throughout the accompanying drawings, the same or similar reference numerals represent the same or similar elements. It should be understood that the drawings are schematic and the originals and elements are not necessarily drawn to scale.

[0055] Figure 1 A flowchart of a method for constructing a process design toolkit provided in this application;

[0056] Figure 2 A schematic diagram of a process for extracting device information provided in this application;

[0057] Figure 3 A flow chart of obtaining a device simulation model of a target device provided in the present application;

[0058] Figure 4 A schematic diagram of a process for obtaining a parameterized unit provided in this application;

[0059] Figure 5 A schematic diagram of a process for obtaining a standard cell library provided in this application;

[0060] Figure 6 A flowchart for generating a verification rule file provided for this application;

[0061] Figure 7 A block diagram of a construction system of a process design toolkit provided in this application;

[0062] Figure 8 A schematic diagram of the structure of an electronic device provided in this application. DETAILED DESCRIPTION

[0063] The following describes the embodiments of the present application in conjunction with the drawings in the embodiments of the present application. The terms used in the implementation method section of the present application are only used to explain the specific embodiments of the present application, and are not intended to limit the present application.

[0064] The embodiments of the present application are described below in conjunction with the accompanying drawings. Those skilled in the art will appreciate that, with the development of technology and the emergence of new scenarios, the technical solutions provided in the embodiments of the present application are also applicable to similar technical problems.

[0065] The terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and need not be used to describe a specific order or sequential order. It should be understood that the terms used in this way can be interchangeable under appropriate circumstances, which is only to describe the distinction mode adopted by the objects of the same attributes when describing in the embodiments of the present application. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, so that the process, method, system, product or equipment comprising a series of units need not be limited to those units, but may include other units that are not clearly listed or inherent to these processes, methods, products or equipment.

[0066] The first aspect of the present application provides a method for constructing a process design toolkit, such as Figure 1 As shown, including:

[0067] S101. Based on the keywords of each device in a preset keyword library, extract device information corresponding to each keyword from a public data source, where the type of device information includes at least a device structure diagram, device parameters, and device materials of the experimental device.

[0068] It should be noted that, in actual application scenarios, the keywords in the above preset keyword library can be selected by designers based on the full set of devices designed by the target process design toolkit, and are used to characterize device-related characteristic parameters. For example: "structure", "contact gate spacing", "gate length", "nanosheet thickness", "nanosheet vertical spacing", "source and drain region length", "gate oxide layer thickness", "source and drain contact resistivity", "metal layer", "via layer", "connection", "metal line spacing", "via spacing", "material", etc.

[0069] It should be noted that, in actual application scenarios, the above-mentioned public data sources can be websites or servers used to publish device parameters related to process design toolkits, such as paper retrieval websites, publisher service platforms, official websites of academic conferences, official websites of semiconductor manufacturers, etc. Since the above-mentioned public data sources include measured data of various types of devices, this application improves the diversity and accuracy of the device information obtained by configuring the extraction of device information corresponding to each keyword from the public data source, thereby improving the data accuracy of the target process data package finally obtained.

[0070] It should be noted that, in actual application scenarios, the above-mentioned extraction of device information corresponding to each keyword from the public data source can be implemented using a preset data extraction tool and a preset data analysis tool. The implementation method of extracting device information corresponding to each keyword from the public data source using the preset data extraction tool and the preset data analysis tool can be:

[0071] like Figure 2 As shown, it is a schematic diagram of the process of extracting device information. The preset data extraction tool accesses the public data source, extracts the initial device information corresponding to each keyword from the public data source, and sends the initial device information corresponding to each keyword to the preset data analysis tool. In this example, the above initial device information includes: device structure related information, device parameters and values, interconnection structure related information, interconnection layer spacing related information and interconnection material related information.

[0072] The preset data analysis tool removes redundant data and extracts non-redundant data from the initial device information corresponding to each keyword, and outputs the device information corresponding to each keyword. In this example, the device information includes: device structure diagram, device parameters, names and connection relationships of each metal layer and via layer, spacing between each metal layer and via layer, names of interconnection materials of each layer, and characteristic parameters of interconnection materials of each layer. The preset data analysis tool can be a data analysis tool based on the Natural Language Processing (NLP) algorithm framework.

[0073] It should be noted that since the above-mentioned initial device information may be the information of a unit device composed of multiple devices, in order to avoid missing devices, the preset data analysis tool, when identifying that there are device parameter names for which specific values ​​have not been extracted, will feed back the device parameter names to the preset data extraction tool, so that the preset data extraction tool can access the public data source again to extract the device parameters and values ​​corresponding to the device parameter names.

[0074] S102. Obtain the boundary conditions of each electrode imported by the front end, perform model simulation and parameter adjustment based on at least the device information and the electrode boundary conditions, obtain a device simulation model of each device, the error between the device characteristic curve of the device simulation model and the experimental device characteristic curve is less than a preset error threshold, and the electrode boundary conditions are conditional parameters defined by the target process design package in the design stage.

[0075] It should be noted that in actual application scenarios, due to the differences in the scales and application conditions of integrated circuits corresponding to different process design packages, the present application configures a model simulation based on the above-mentioned device information and electrode boundary conditions, and obtains a device simulation model in which the error between the device characteristic curve and the experimental device characteristic curve is less than a preset error threshold. Since the above-mentioned experimental device characteristic curve is determined based on the actual measurement of the device in the device information and can truly characterize the physical properties of the device, the device simulation model of each device obtained can reflect the physical properties of the real device involved in the target process design package, thereby improving the accuracy of the target process design package finally obtained.

[0076] It should be noted that in actual application scenarios, the above-mentioned electrode boundary conditions include but are not limited to electrode name, electrode voltage value, electrode potential barrier, etc.

[0077] S103 , at least encapsulate each device simulation model to obtain a target process design package.

[0078] This application configures keywords of each device based on a preset keyword library, extracts device information corresponding to each keyword from a public data source, and configures model simulation and parameter adjustment based on at least the device information and the electrode boundary conditions to obtain a device simulation model of each device. Since the device information in the public data source is obtained through actual measurement, the device simulation is performed based on at least the device information and the electrode boundary conditions, so that the device simulation model of each device can reflect the physical characteristics of the real device involved in the target process design package without the need for actual device measurement. It can be seen that this application reduces the development cost of the process design toolkit and improves development efficiency.

[0079] In a possible implementation, model simulation and parameter adjustment are performed at least based on device information and electrode boundary conditions to obtain a device simulation model of each device, including:

[0080] For each of the devices described:

[0081] Initializing and configuring a general device model based on the device information to obtain an initial device model of the device;

[0082] Calling an initial physical model corresponding to the physical characteristic identifier of the device, and searching for device information and an experimental physical characteristic curve of the experimental device from each of the device information based on the physical characteristic identifier of the device, wherein the experimental device shown is a device having the physical characteristic identifier of the device and having the most types of device information;

[0083] Calling a preset structure editor to perform adaptive grid distribution on the device information of the experimental device, obtaining a structure file of the experimental device, and performing simulation parameter adjustment operations on the initial physical model based on the structure file of the experimental device, electrode boundary conditions and the experimental physical characteristic curve, to obtain a physical model corresponding to the physical characteristic identifier of the device;

[0084] Calling the preset structure editor to perform the adaptive grid distribution on the device information of the device to obtain a structure file of the device; simulating a physical model corresponding to the physical characteristic identifier of the device based on the structure file of the device to obtain a physical characteristic curve of the device;

[0085] An initial device model of the device is simulated to obtain a simulated physical characteristic curve of the device, and a parameter adjustment operation is performed on the initial device model based on the simulated physical characteristic curve of the device and a fitting error result of the physical characteristic curve of the device; when the fitting error result is less than a preset threshold, the parameter adjustment operation on the initial device model is terminated to obtain the device simulation model of the device.

[0086] It should be noted that, in actual application scenarios, the above-mentioned general device model can be a model that simulates a certain type of device by modifying parameters and input voltage, such as Fin Field-Effect Transistor (FinFET), Gate-All-Around FET (GAAFET), Complementary FET (CFET), Vertical Channel Field Effect Transistors (VFET), etc.

[0087] It should be noted that in actual application scenarios, the above initial physical model is a model for simulating the physical properties of the device. Since physical properties can accurately reflect the structural characteristics of electronic devices. Therefore, this application performs simulation parameter adjustment operations on the initial physical model by configuring the structure file, electrode boundary conditions and experimental physical property curves based on the experimental device to obtain a physical model corresponding to the physical property identification of the device, so that the physical model can accurately reflect the real physical properties of the corresponding device, improve the accuracy of the physical property curve of the obtained device, and then improve the accuracy of the device simulation model finally obtained.

[0088] It should be noted that in actual application scenarios, there may be multiple types of the above initial physical models, including but not limited to: energy band model, mobility model, composite model, density gradient transport model, defect model, etc.

[0089] It should be noted that in actual application scenarios, this application selects a device with the physical characteristic identification of the device and the most types of device information as the experimental device, and utilizes the high richness of device information of the experimental device to improve the accuracy of the determined physical model.

[0090] It should be noted that, in actual application scenarios, there are many ways to implement the simulation and parameter adjustment operation of the initial physical model based on the structural file of the experimental device and the experimental physical characteristic curve to obtain a physical model corresponding to the physical characteristic identifier of the device. One exemplary method is provided here, including the following steps A1 to A5.

[0091] Step A1, calling the preset device simulator to perform adaptive solution configuration according to the structure file of the experimental device, electrode boundary conditions and experimental physical characteristic curve, and simulating the initial physical model based on the configuration result to obtain the physical characteristic curve of the experimental device, and triggering step A2.

[0092] Step A2, calling a preset model calibration calculator to fit the physical characteristic curve of the experimental device and the experimental physical characteristic curve, and calculating the fitting error value based on the fitting result, and triggering step A3.

[0093] In step A3, the preset model calibration calculator determines whether the fitting error value is less than a preset verification threshold value, and if so, step A4 is triggered. If not, step A5 is triggered.

[0094] Step A4: determine the initial physical model as the physical model corresponding to the physical characteristic identifier of the device.

[0095] Step A5: Adjust the parameters of the initial physical model based on the fitting results, and trigger step A1.

[0096] It should be noted that, in actual application scenarios, there are multiple ways to implement the above-mentioned model simulation based at least on device information and electrode boundary conditions to obtain the device simulation model of each device, and an exemplary method is provided here:

[0097] like Figure 3 As shown in FIG. 1 , it is a flowchart for obtaining a device simulation model of a target device, wherein the target device refers to an experimental device. The specific operation steps are as follows:

[0098] Step S301, initialize and configure the general device model based on the device information, obtain the initial device model of the target device, search for the initial physical model, the device information of the experimental device and the experimental physical characteristic curve of the experimental device based on the physical characteristic identifier of the target device, and trigger step S302.

[0099] Step S302, adaptively grid distribution is performed on the device information of the experimental device to obtain the structure file of the experimental device, and step S303 is triggered.

[0100] Step S303: simulate the initial physical model based on the structure file of the experimental device and the electrode boundary conditions to obtain the physical characteristic curve of the experimental device, and trigger step S304.

[0101] Step S304, judging whether the fitting error value between the experimental physical characteristic curve of the experimental device and the physical characteristic curve is less than a preset verification threshold, if yes, triggering step S305, if no, triggering step S306.

[0102] Step S305, obtaining a physical model corresponding to the physical characteristic identifier of the target device, and triggering step S307.

[0103] Step S306: Adjust the parameters of the initial physical model based on the fitting result, and trigger step S303.

[0104] Step S307, adaptively grid distribution is performed on the device information of the target device to obtain the structure file of the target device, and step S308 is triggered.

[0105] Step S308: Input the structure file of the target device into the physical model corresponding to the physical characteristic identifier of the target device to obtain the physical characteristic curve of the target device, and trigger step S309.

[0106] Step S309: simulate the initial device model of the target device to obtain a simulated physical characteristic curve of the target device, and trigger step S310.

[0107] Step S310, determining whether the fitting error result between the simulated physical characteristic curve of the target device and the physical characteristic curve is less than a preset threshold. If yes, step S311 is triggered, and if no, step S312 is triggered.

[0108] Step S311: determine the initial device model as the device simulation model of the target device.

[0109] Step S312: Adjust the parameters of the initial device model based on the fitting error result, and trigger step S309.

[0110] In a possible implementation, before at least packaging each device simulation model and each interconnection parameter, the above Figure 1 The method for constructing the process design toolkit shown also includes:

[0111] Obtain the component name of each custom component imported by the front end; extract the initial parameterization information corresponding to each component name from the public data source based on the component name, the initial parameterization information includes the schematic symbol and initial layout corresponding to the component name; render the initial layout based on the device information to obtain the parameterized unit layout corresponding to the component name; call the preset component description format parameter editor to generate the component description format parameters and parameter call relationship function corresponding to the component name according to the device information; encapsulate the schematic symbol, parameterized unit layout, component description format parameters and parameter call relationship function corresponding to the component name to obtain the parameterized unit of each custom component;

[0112] Obtain the cell name of each standard cell imported by the front end, and extract the standard cell schematic symbol, standard cell circuit schematic and standard cell initial layout corresponding to each cell name from the public data source based on the cell name; render the standard cell initial layout according to the interconnection parameters and parameterized cells in the device information to obtain the standard cell layout corresponding to the cell name; encapsulate the standard cell schematic symbol, standard cell circuit schematic and standard cell layout corresponding to each cell name to obtain the standard cell library.

[0113] It should be noted that, in actual application scenarios, the above-mentioned custom components are basic electrical components whose parameters can be defined by users according to actual needs, including but not limited to: transistors, capacitors, resistors, inductors, etc.

[0114] It should be noted that in actual application scenarios, the above schematic symbol is a custom component, or a unique identification graphic of multiple custom components with a connection relationship in the circuit schematic. The above initial layout represents the combined image of the custom component in the layer and the relative position relationship of the device.

[0115] It should be noted that, in actual application scenarios, the above-mentioned component design format parameters (component design format, CDF) are parameters used to adjust the characteristics of custom components in the layout, such as size, shape and doping concentration. The above-mentioned parameter call relationship function (Callback) is used to describe the dependency relationship between the component description format parameters. When any parameter in the component description format parameters is changed, the parameter call relationship function is automatically called to change other parameters that have a dependency relationship with the changed parameters accordingly.

[0116] It should be noted that, in actual application scenarios, the above-mentioned public data source may also be a database storing semiconductor industry standard data.

[0117] It should be noted that, in actual application scenarios, the above-mentioned parameterized unit for obtaining a custom component can be realized by configuring a parameterized unit development device. The flow diagram of obtaining a parameterized unit using a parameterized unit development device is shown in FIG. Figure 4 As shown: The parameterized unit development device consists of a schematic symbol generator, a layout generator and a preset component description format parameter editor.

[0118] The schematic symbol generator sends a schematic symbol acquisition request including the component name of the custom component to the semiconductor industry specification database, and obtains the schematic symbol corresponding to the component name of the custom component fed back by the semiconductor industry specification database.

[0119] The layout generator sends a layout acquisition request including the component name of the custom component to the semiconductor industry specification database, obtains the initial layout fed back by the semiconductor industry specification database, and renders the initial layout based on the device information to obtain a parameterized unit layout corresponding to the component name.

[0120] The parameterized unit development device calls a preset component description format parameter editor, generates component description format parameters and parameter call relationship functions corresponding to the component name according to the device information, and encapsulates the schematic symbol, parameterized unit layout, component description format parameters and parameter call relationship functions corresponding to the component name to obtain the parameterized unit of the custom component.

[0121] It should be noted that, in actual application scenarios, the above standard unit can be a functional unit diagram composed of multiple devices. For example, an inverter, a 2-input NAND gate, a 2-input NOR gate, an AND-NOR gate, a trigger, an adder, etc. The above standard unit initial layout represents the combined image of the standard unit in the layer and the relative position relationship of the devices. The above standard unit circuit schematic diagram includes the schematic symbols of the various devices that constitute the standard unit and their interconnection relationship.

[0122] It should be noted that, in actual application scenarios, the above-mentioned standard cell library can be obtained by a standard cell development device. The flow chart of obtaining a standard cell library by using a standard cell development device is as follows: Figure 5 As shown: The standard cell development device consists of a standard cell schematic symbol generator, a standard cell schematic generator and a layout generator.

[0123] The standard cell schematic symbol generator sends a schematic symbol acquisition request including a cell name to a semiconductor industry specification database, and obtains the standard cell schematic symbol fed back by the semiconductor industry specification database.

[0124] The standard cell schematic generator sends a schematic acquisition request including a cell name to a semiconductor industry specification database to obtain a standard cell schematic fed back by the semiconductor industry specification database.

[0125] The layout generator sends a layout acquisition request including the cell name to the semiconductor industry specification database to obtain the initial layout of the standard cell fed back by the semiconductor industry specification database. The initial layout of the standard cell is rendered according to the interconnection information and parameterized cells to obtain the standard cell layout corresponding to the cell name.

[0126] The standard cell development device encapsulates the standard cell schematic diagram symbols, standard cell circuit schematic diagrams and standard cell layouts corresponding to the names of the respective cells to obtain a standard cell library.

[0127] It should be noted that in actual application scenarios, the above interconnection parameters may include various types of parameters, including but not limited to: interconnection layer spacing, interconnection material characteristic parameters, physical property parameters and electrical property parameters of each conductor layer and dielectric layer, etc.

[0128] It should be noted that, in actual application scenarios, in order to improve the reuse rate of data, after obtaining the above interconnection parameters, a verification rule file can be generated based on the above device parameters and interconnection parameters, and the verification rule file has been packaged into multiple process design packages with high similarity. The above generation of the verification rule file can be implemented as follows: Figure 6 As shown, it is a flowchart of generating a verification rule file, and the specific operation steps include the following steps B1 to B3.

[0129] Step B1, obtaining multiple types of verification rule sub-file templates, the types of the above-mentioned verification rule sub-file templates include: format conversion file template, design rule check file template, layout and principle Figure 1 consistency check file template and layout parasitic parameter extraction check file template.

[0130] Step B2, for each verification rule sub-file template: traverse the names of each field to be filled in the verification rule sub-file template; extract the parameters corresponding to each name from the interconnection parameters, and fill the extracted parameters into the filling position of the corresponding field.

[0131] Among them, the above-mentioned format conversion file template stores parameters related to the conversion mapping relationship between the format design data layer and the process layer. The format conversion file template filled with parameters is used for data conversion verification between the layout design database and the graphic design system (Graphic Design System, GDS) database. The above-mentioned design rule check file template stores device combination graphic rules (device graphic length and width limits, spacing limits, graphic coverage limit conditions), electrostatic protection rules, antenna effect rules, etc. The design rule (Design Rule Checking, DRC) check file template filled with parameters is used to verify short circuits, open circuits or adverse effects in integrated circuit diagrams. The above-mentioned layout and principle Figure 1 The consistency check file template stores parameters for identifying device names and device connection relationships. Figure 1 The consistency (Layout Versus Schematic, LVS) check file template is used to compare with the schematic netlist generated during the design process to determine whether there are device type errors or device connection errors, thereby realizing consistency verification of the schematic and layout. The layout parasitic extraction (Layout Parasitic Extraction, LPE) check file template stores the physical characteristic parameters (such as thickness, via size and spacing) and electrical characteristic parameters (such as resistivity and dielectric constant) of each conductor layer and dielectric layer. The parameter-filled layout parasitic extraction check file template is used by the parasitic extraction tool to generate a netlist file including all parasitic components generated by the layout, so as to evaluate the circuit performance during the simulation process.

[0132] Step B3, encapsulating each verification rule sub-file template filled with parameters to generate a verification rule file.

[0133] In a possible implementation, different designers have different design habits, resulting in differences in the composition elements of the designed layout, which is not conducive to the subsequent approval of the layout. Therefore, based on the available colors, color dots, linearity, fill color, outline color, fill format, layer name and layer purpose of the layer display, a hierarchical display definition file (display.drf) and a layer definition file (techfile.tf) can be generated, and the hierarchical display definition file and the layer definition file are added to the verification rule file generated in the above step B3, so that the designer can generate a layout in a unified format with the restrictions in the hierarchical display definition file and the layer definition file, thereby improving the efficiency of the subsequent approval of the layout.

[0134] In a possible implementation, the initial layout is rendered based on the device information to obtain a parameterized unit layout corresponding to the component name, including:

[0135] Extracting device structure information and device design parameter information based on the device structure diagram and device parameters in the device information;

[0136] The initial layout is rendered by layer display according to the device structure information and the device design parameter information; the graphic size and graphic spacing of the initial layout after layer display rendering are rendered based on the interconnection parameters to obtain a parameterized unit layout.

[0137] In a possible implementation, the initial layout of the standard cell is rendered according to the interconnection parameters and parameterized cells in the device information to obtain the standard cell layout corresponding to the cell name, including:

[0138] Searching for parameterized cell layouts corresponding to component names of each custom component in the initial layout of the standard cell, and performing layout cell replacement on the layout of the custom component in the initial layout of the standard cell based on the found parameterized cell layouts;

[0139] The graphic size and graphic spacing of the initial layout of the standard cell after the layout cell replacement are rendered based on the interconnection parameters to obtain the standard cell layout.

[0140] In a possible implementation, at least each device simulation model is packaged to obtain a target process design package, including:

[0141] Each device simulation model, device structure information, device design parameter information, each parameterized unit and standard unit library are packaged to obtain a target process design package.

[0142] It should be noted that, in actual application scenarios, after obtaining the target process design package, the implementation method of the designer to design the integrated circuit based on the target process design package may include the following steps:

[0143] Step C1: The design platform responds to the initialization request fed back by the front end and loads the target process design package, and triggers step C2.

[0144] In step C2, the design platform calls the electronic design automation tool to parse the circuit logic function text fed back by the front end to obtain the circuit logic function expression, and triggers step C3.

[0145] In step C3, the design platform extracts schematic symbols and interconnection parameters from the target process design package according to the names of each parameterized unit and each standard unit in the circuit logic function expression, and generates a circuit schematic based on the schematic symbols and interconnection parameters, and triggers step C4.

[0146] Step C4, the design platform calls the electronic design automation tool to generate a test waveform based on the number of input ports defined in the circuit logic function text, loads the test waveform into the circuit schematic, calls the device simulation model of each device in the circuit schematic to simulate, and displays the output waveform output by the circuit schematic, and triggers step C5.

[0147] Step C5: In response to the waveform confirmation result fed back by the front end, the design platform calls the electronic design automation tool to render and splice each parameterized unit and standard unit layout according to the verification rule file and the circuit schematic to generate the circuit layout. The electronic design automation tool is called to perform rule verification on the circuit layout based on the verification rule file and display the verification result. Step C6 is triggered.

[0148] Step C6, the design platform responds to the verification and confirmation results fed back by the front end, calls the electronic design automation tool to perform post-simulation based on the verification rule file and the device simulation model of each device, and outputs the simulation results taking into account the circuit parasitic elements.

[0149] The second aspect of the present application provides a system for constructing a process design toolkit, such as Figure 7 As shown, the construction system of the process design toolkit includes:

[0150] The parameter extraction module 701 is used to extract device information corresponding to each keyword from a public data source based on the keyword of each device in the preset keyword library, and the type of device information at least includes a device structure diagram, device parameters and device materials of the experimental device;

[0151] The model building module 702 is used to obtain the boundary conditions of each electrode imported by the front end, perform model simulation and parameter adjustment based on at least the device information and the electrode boundary conditions, obtain the device simulation model of each device, the error between the device characteristic curve of the device simulation model and the experimental device characteristic curve is less than a preset error threshold, and the electrode boundary conditions are condition parameters defined by the target process design package in the design stage;

[0152] The design package packaging module 703 is used to package at least each device simulation model to obtain a target process design package.

[0153] In a possible implementation, the model building module 702 is configured to perform model simulation and parameter adjustment based on at least device information and electrode boundary conditions to obtain a device simulation model of each device as follows:

[0154] For each device:

[0155] Initializing and configuring the general device model based on the device information to obtain an initial device model of the device;

[0156] Calling an initial physical model corresponding to the physical characteristic identifier of the device, and searching for device information and an experimental physical characteristic curve of the experimental device from each device information based on the physical characteristic identifier of the device, wherein the experimental device shown is a device having the physical characteristic identifier of the device and having the most types of device information;

[0157] Calling a preset structure editor to perform adaptive grid distribution on the device information of the experimental device, obtaining a structure file of the experimental device, and performing simulation parameter adjustment operations on the initial physical model based on the structure file of the experimental device, electrode boundary conditions and experimental physical characteristic curves, to obtain a physical model corresponding to the physical characteristic identifier of the device;

[0158] Calling a preset structure editor to perform adaptive grid distribution on the device information of the device to obtain a structure file of the device; simulating a physical model corresponding to the physical characteristic identifier of the device based on the structure file of the device to obtain a physical characteristic curve of the device;

[0159] The initial device model of the device is simulated to obtain a simulated physical characteristic curve of the device, and the initial device model is adjusted based on the simulated physical characteristic curve of the device and a fitting error result of the physical characteristic curve of the device; when the fitting error result is less than a preset threshold, the parameter adjustment operation of the initial device model is terminated to obtain a device simulation model of the device.

[0160] In one possible implementation, the above Figure 7 The build system of the process design kit shown also includes:

[0161] The first rendering module is used to obtain the component name of each custom component imported by the front end before at least packaging each device simulation model and each interconnection parameter; extract the initial parameterization information corresponding to each component name from the public data source based on the component name, and the initial parameterization information includes the schematic symbol and initial layout corresponding to the component name; render the initial layout based on the device information to obtain the parameterized unit layout corresponding to the component name; call the preset component description format parameter editor to generate the component description format parameters and parameter call relationship function corresponding to the component name according to the device information; package the schematic symbol, parameterized unit layout, component description format parameter and parameter call relationship function corresponding to the component name to obtain the parameterized unit of each custom component;

[0162] The second rendering module is used to obtain the unit name of each standard unit imported by the front end before at least packaging each device simulation model and each interconnection parameter, and extract the standard unit schematic symbol, standard unit circuit schematic and standard unit initial layout corresponding to each unit name from the public data source based on the unit name; render the standard unit initial layout according to the interconnection parameters and parameterized units in the device information to obtain the standard unit layout corresponding to the unit name; and package the standard unit schematic symbol, standard unit circuit schematic and standard unit layout corresponding to each unit name to obtain a standard unit library.

[0163] In a possible implementation, the first rendering module is set to:

[0164] Extracting device structure information and device design parameter information based on the device structure diagram and device parameters in the device information;

[0165] The initial layout is rendered by layer display according to the device structure information and the device design parameter information; the graphic size and graphic spacing of the initial layout after layer display rendering are rendered based on the interconnection parameters to obtain a parameterized unit layout.

[0166] In a possible implementation, the second rendering module renders the initial layout of the standard cell according to the interconnection parameters and parameterized cells in the device information to obtain the standard cell layout corresponding to the cell name, and is set to:

[0167] Searching for parameterized cell layouts corresponding to component names of each custom component in the initial layout of the standard cell, and performing layout cell replacement on the layout of the custom component in the initial layout of the standard cell based on the found parameterized cell layouts;

[0168] The graphic size and graphic spacing of the initial layout of the standard cell after the layout cell replacement are rendered based on the interconnection parameters to obtain the standard cell layout.

[0169] In a possible implementation, the design package encapsulation module 703 is configured as follows:

[0170] Each device simulation model, device structure information, device design parameter information, each parameterized unit and standard unit library are packaged to obtain a target process design package.

[0171] A third aspect of the present application provides a computer program product, including computer-readable instructions. When the computer-readable instructions are executed on an electronic device, the electronic device implements the method for constructing a process design toolkit according to the first aspect or any implementation method of the first aspect.

[0172] A fourth aspect of the present application provides an electronic device, comprising at least one processor and a memory connected to the processor, wherein:

[0173] The memory is used to store computer programs;

[0174] The processor is used to execute a computer program so that the electronic device can implement the method for constructing a process design toolkit according to the first aspect or any implementation manner of the first aspect.

[0175] The fifth aspect of the present application provides a computer storage medium, which carries one or more computer programs. When the one or more computer programs are executed by an electronic device, the electronic device can implement a method for constructing a process design toolkit according to the first aspect or any implementation method of the first aspect.

[0176] The present application also provides an electronic device in an embodiment. Figure 8 As shown, it shows a schematic diagram of the structure of an electronic device suitable for implementing the embodiments of the present application. The electronic device in the embodiments of the present application may include but is not limited to fixed terminals such as mobile phones, notebook computers, PDAs (personal digital assistants), PADs (tablet computers), desktop computers, etc. Figure 8 The electronic device shown is merely an example and should not bring any limitation to the functions and scope of use of the embodiments of the present application.

[0177] like Figure 8As shown, the electronic device may include a processing device (e.g., a central processing unit, a graphics processing unit, etc.) 801, which can perform various appropriate actions and processes according to a program stored in a read-only memory (ROM) 802 or a program loaded from a storage device 808 to a random access memory (RAM) 803. When the electronic device is powered on, various programs and data required for the operation of the electronic device are also stored in the RAM 803. The processing device 801, the ROM 802, and the RAM 803 are connected to each other via a bus 804. An input / output (I / O) interface 805 is also connected to the bus 804.

[0178] Typically, the following devices may be connected to the I / O interface 805: input devices 806 including, for example, a touch screen, a touch pad, a keyboard, a mouse, a camera, a microphone, an accelerometer, a gyroscope, etc.; output devices 807 including, for example, a liquid crystal display (LCD), a speaker, a vibrator, etc.; storage devices 808 including, for example, a memory card, a hard disk, etc.; and communication devices 809. The communication device 809 may allow the electronic device to communicate with other devices wirelessly or by wire to exchange data. Although Figure 8 An electronic device having various devices is shown, but it should be understood that it is not required to implement or possess all the devices shown. More or fewer devices may be implemented or possessed instead.

[0179] It should also be noted that the device embodiments described above are merely schematic, wherein the units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they may be located in one place, or they may be distributed over multiple network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the scheme of this embodiment. In addition, in the drawings of the device embodiments provided by the present application, the connection relationship between the modules indicates that there is a communication connection between them, which may be specifically implemented as one or more communication buses or signal lines.

[0180] Through the description of the above implementation mode, the technicians in the field can clearly understand that the present application can be implemented by means of software plus necessary general hardware, and of course, it can also be implemented by special hardware including special integrated circuits, special CPUs, special memories, special components, etc. In general, all functions completed by computer programs can be easily implemented by corresponding hardware, and the specific hardware structure used to implement the same function can also be various, such as analog circuits, digital circuits or special circuits. However, for the present application, software program implementation is a better implementation mode in more cases. Based on such an understanding, the technical solution of the present application is essentially or the part that contributes to the prior art can be embodied in the form of a software product, which is stored in a readable storage medium, such as a computer floppy disk, a U disk, a mobile hard disk, a ROM, a RAM, a disk or an optical disk, etc., including a number of instructions to enable a computer device (which can be a personal computer, a training device, or a network device, etc.) to execute the methods described in each embodiment of the present application.

[0181] In the above embodiments, all or part of the embodiments may be implemented by software, hardware, firmware or any combination thereof. When implemented by software, all or part of the embodiments may be implemented in the form of a computer program product.

[0182] The computer program product includes one or more computer instructions. When the computer program instructions are loaded and executed on a computer, the process or function described in the embodiment of the present application is generated in whole or in part. The computer may be a general-purpose computer, a special-purpose computer, a computer network, or other programmable devices. The computer instructions may be stored in a computer-readable storage medium, or transmitted from one computer-readable storage medium to another computer-readable storage medium. For example, the computer instructions may be transmitted from a website site, a computer, a training device, or a data center by wired (e.g., coaxial cable, optical fiber, digital subscriber line (DSL)) or wireless (e.g., infrared, wireless, microwave, etc.) mode to another website site, computer, training device, or data center. The computer-readable storage medium may be any available medium that a computer can store or a data storage device such as a training device, a data center, etc. that includes one or more available media integrations. The available medium may be a magnetic medium, (e.g., a floppy disk, a hard disk, a tape), an optical medium (e.g., a DVD), or a semiconductor medium (e.g., a solid-state drive (SSD)), etc.

Claims

1. A method for constructing a process design toolkit, characterized in that: include: Based on the keywords of each device in the preset keyword library, extract device information corresponding to each keyword from a public data source, where the type of device information at least includes a device structure diagram, device parameters and device materials of the experimental device; Obtaining each electrode boundary condition imported by the front end, performing model simulation and parameter adjustment based on at least the device information and the electrode boundary condition, obtaining a device simulation model of each device, wherein the error between the device characteristic curve of the device simulation model and the experimental device characteristic curve is less than a preset error threshold, and the electrode boundary condition is a condition parameter defined by the target process design package in the design stage; At least each of the device simulation models is packaged to obtain the target process design package.

2. The method for constructing a process design toolkit according to claim 1, characterized in that: The performing model simulation and parameter adjustment at least based on the device information and the electrode boundary conditions to obtain a device simulation model of each device includes: For each of the devices described: Initializing and configuring a general device model based on the device information to obtain an initial device model of the device; Calling an initial physical model corresponding to the physical characteristic identifier of the device, and searching for device information and an experimental physical characteristic curve of the experimental device from each of the device information based on the physical characteristic identifier of the device, wherein the experimental device shown is a device having the physical characteristic identifier of the device and having the most types of device information; Calling a preset structure editor to perform adaptive grid distribution on the device information of the experimental device, obtaining a structure file of the experimental device, and performing simulation parameter adjustment operations on the initial physical model based on the structure file of the experimental device, the electrode boundary conditions and the experimental physical characteristic curve, to obtain a physical model corresponding to the physical characteristic identifier of the device; Calling the preset structure editor to perform the adaptive grid distribution on the device information of the device to obtain a structure file of the device; simulating a physical model corresponding to the physical characteristic identifier of the device based on the structure file of the device to obtain a physical characteristic curve of the device; An initial device model of the device is simulated to obtain a simulated physical characteristic curve of the device, and a parameter adjustment operation is performed on the initial device model based on the simulated physical characteristic curve of the device and a fitting error result of the physical characteristic curve of the device; when the fitting error result is less than a preset threshold, the parameter adjustment operation on the initial device model is terminated to obtain the device simulation model of the device.

3. The method for constructing a process design toolkit according to claim 1, characterized in that: Before at least packaging each of the device simulation models and each of the interconnection parameters, the method further comprises: Obtain the component name of each custom component imported by the front end; extract the initial parameterization information corresponding to each component name from the public data source based on the component name, the initial parameterization information including the schematic symbol and initial layout corresponding to the component name; render the initial layout based on the device information to obtain the parameterized unit layout corresponding to the component name; call the preset component description format parameter editor to generate the component description format parameters and parameter call relationship function corresponding to the component name according to the device information; encapsulate the schematic symbol, the parameterized unit layout, the component description format parameters and the parameter call relationship function corresponding to the component name to obtain the parameterized unit of each custom component; The unit name of each standard unit imported by the front end is obtained, and based on the unit name, the standard unit schematic symbol, the standard unit circuit schematic diagram and the standard unit initial layout corresponding to each unit name are extracted from the public data source; the standard unit initial layout is rendered according to the interconnection parameters in the device information and the parameterized unit to obtain the standard unit layout corresponding to the unit name; the standard unit schematic symbol, the standard unit circuit schematic diagram and the standard unit layout corresponding to each unit name are packaged to obtain a standard unit library.

4. The method for constructing a process design toolkit according to claim 3, characterized in that: The device information renders the initial layout to obtain a parameterized unit layout corresponding to the component name, including: Extracting device structure information and device design parameter information based on the device structure diagram and the device parameters in the device information; The initial layout is rendered by layer display according to the device structure information and the device design parameter information; the graphic size and graphic spacing of the initial layout after the layer display rendering are rendered based on the interconnection parameters to obtain the parameterized unit layout.

5. The method for constructing a process design toolkit according to claim 3, characterized in that: The rendering of the initial layout of the standard cell according to the interconnection parameters in the device information and the parameterized cell to obtain the standard cell layout corresponding to the cell name includes: Searching for the parameterized cell layout corresponding to the component name of each custom component in the standard cell initial layout, and performing layout cell replacement on the layout of the custom component in the standard cell initial layout based on the found parameterized cell layout; The standard cell layout is obtained by rendering the graphic size and graphic spacing of the standard cell initial layout after the layout cell replacement based on the interconnection parameters.

6. The method for constructing a process design toolkit according to claim 4, characterized in that: The step of packaging at least each of the device simulation models to obtain the target process design package includes: Each of the device simulation models, the device structure information, the device design parameter information, each of the parameterized units and the standard unit library is packaged to obtain the target process design package.

7. A system for constructing a process design toolkit, characterized in that: include: A parameter extraction module, for extracting device information corresponding to each keyword from a public data source based on the keywords of each device in a preset keyword library, wherein the types of the device information at least include a device structure diagram, device parameters and device materials of the experimental device; A model building module, used to obtain the boundary conditions of each electrode imported by the front end, perform model simulation and parameter adjustment based on at least the device information and the electrode boundary conditions, obtain a device simulation model of each device, the error between the device characteristic curve of the device simulation model and the experimental device characteristic curve is less than a preset error threshold, and the electrode boundary conditions are conditional parameters defined by the target process design package in the design stage; The design package packaging module is used to package at least each of the device simulation models to obtain the target process design package.

8. A computer program product, characterized in that It comprises computer-readable instructions, and when the computer-readable instructions are executed on an electronic device, the electronic device implements the method for constructing a process design toolkit as claimed in any one of claims 1 to 6.

9. An electronic device, characterized in that: The method comprises at least one processor and a memory connected to the processor, wherein: The memory is used to store computer programs; The processor is used to execute the computer program so that the electronic device can implement the method for constructing the process design toolkit as described in any one of claims 1 to 6.

10. A computer storage medium, characterized in that: The storage medium carries one or more computer programs, which, when executed by an electronic device, enable the electronic device to implement the method for constructing a process design toolkit as described in any one of claims 1 to 6.

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