Vacuum parallel seam welding equipment

Abstract

The invention relates to the field of parallel seam welding equipment, in particular to vacuum parallel seam welding equipment which comprises a vacuum unit and a welding unit, the vacuum unit comprises a cavity and a vacuum system, the welding unit is arranged in the cavity and comprises a workbench and parallel seam welding equipment, and the workbench is provided with a getter activation assembly. The getter activation assembly comprises an activation tool and a power supply assembly; the activation tool is loaded on the workbench to form a plurality of activation units used for placing devices to be packaged. According to the equipment, getter activation and parallel seam welding processes can be completed at the same time, the transfer efficiency of the MEMS device can be remarkably improved, and compared with equipment for heating the whole MEMS device at a high temperature to activate the getter, the risk of performance reduction or failure of the MEMS device can be greatly reduced, and the long-term reliability and stability of the MEMS device are ensured.

Description

Technical Field

[0001] The invention relates to the field of parallel seam welding equipment, and in particular to vacuum parallel seam welding equipment. Background Art

[0002] Micro-electromechanical systems (MEMS) vacuum packaging technology plays a vital role in many application fields, especially in high-performance devices such as infrared detectors, inertial sensors, pressure sensors, magnetometers and miniature microphones. Since MEMS devices usually have tiny sizes and high performance requirements, they often need to operate in a vacuum environment.

[0003] Parallel seam welding is a commonly used MEMS device packaging method. The parallel seam welding equipment can evacuate the MEMS device. Under the vacuum state, when the thin shell cover plate in the MEMS device is accurately aligned with the tube shell and placed on the tube shell, the welding head of the parallel welding equipment descends, presses the parallel welding wheel onto the weld between the cover plate and the tube shell, and moves horizontally along the weld to achieve welding of the cover plate and the tube shell.

[0004] At present, in order to improve the transfer efficiency of MEMS devices, the vacuum seam welding equipment on the market is transforming from a single machine to equipment capable of performing multiple processes. For example, the Chinese patent application number CN202010855120.5 provides a high-speed fully automatic vacuum annealing seam welding machine that can realize MEMS device annealing and welding processing.

[0005] During the use of MEMS devices, residual gas and released gas may affect the performance and reliability of the device. By setting a getter in the MEMS device cavity, the residual gas that was not completely discharged during the packaging process can be continuously adsorbed, thereby maintaining a long-term vacuum environment. At present, there are no reports on equipment that can achieve getter activation and parallel seam welding of MEMS devices at the same time.

[0006] Since the effect of getters is easily affected by external gas contamination or self-oxidation reactions, how to effectively activate getters and prevent them from oxidation during the packaging process is a difficulty that needs to be overcome in current technology. Traditionally, activation of getters is completed through high-temperature treatment. The usual method is to expose the entire packaged MEMS device to a high-temperature vacuum environment and activate the adsorption capacity of the getter inside the MEMS device through long-term heating. However, the disadvantage of this method is that high temperature may have an adverse effect on the MEMS device and its other components. Some devices need to avoid the direct impact of high temperature on the entire packaging system; In order to overcome this problem, some researchers in the industry have proposed the use of low-temperature getters, but low-temperature getters have strict requirements on the type of getters, so their promotion is subject to certain restrictions; in addition, some studies have proposed the use of special tooling designs. For example, Yang Kaijun et al. mentioned in "Research on Vacuum Packaging Process of MEMS Devices" that the getter can be fixed on the cover plate, and the cover plate and the shell are pre-separated in a vacuum environment. Only the cover plate is heated to activate the getter. When the required activation temperature and time are reached, the cover plate is moved down to make close contact with the shell, and then the package is welded to reduce the impact on other components. This method activates the getter by heating the cover plate to ensure that the getter can fully play its role without affecting other components. However, most of these reported methods or tooling are for eutectic welding packaging processes. Since these tooling will hinder the welding track of parallel welding equipment, they cannot be directly applied to vacuum parallel welding equipment. Summary of the invention

[0007] In order to solve the deficiencies in the prior art, the present invention provides a vacuum parallel seam welding device, which has both getter activation and seam welding functions and can avoid potential damage to the entire MEMS device caused by traditional high temperature treatment.

[0008] To solve the above technical problems, the present invention adopts the following technical solutions: a vacuum parallel seam welding device, comprising a vacuum unit and a welding unit, the vacuum unit comprising a closable chamber and a vacuum system for generating negative pressure in the chamber; the welding unit is arranged in the chamber, the welding unit comprises a workbench and the parallel seam welding device, a getter activation component is also arranged in the welding unit, the getter activation component comprises an activation tool and a power supply component electrically connected to the activation tool; the activation tool is arranged on the workbench, an activation unit is formed on the activation tool, the activation unit is used to place the device to be packaged, the device to be packaged placed in the activation unit is in the welding track of the parallel seam welding device, and the activation unit is configured as follows: the prepared weld or welding point of the device to be packaged placed in the activation unit is directly exposed to the parallel seam welding device, and a pair of pins in the device to be packaged are separately led out, and the separately led out pair of pins are electrically connected to the power supply component.

[0009] As a preferred embodiment, the activation unit is configured to: cause a pair of pins in the device to be packaged placed on the activation tooling to be individually led out, and the individually led out pins are electrically connected to the power supply assembly.

[0010] As a preferred embodiment, the activation unit includes a deep cavity formed on the top surface of the activation tooling, the depth of the deep cavity matches the height of the device to be packaged, and the device to be packaged is placed in the deep cavity.

[0011] As a preferred embodiment, a pair of grooves and a pair of through holes are formed at the bottom of the deep cavity, the grooves and through holes are independently arranged, a pair of pins on the device to be packaged are individually led out through the through holes, and the remaining pins are placed in the grooves.

[0012] As a preferred embodiment, the activation tooling includes a power strip and a fixing plate having the deep cavity, the power strip includes a plurality of pairs of connectors and wiring terminals electrically connected to a power supply assembly, and the connectors are inserted into the through holes.

[0013] As a preferred embodiment, the depth of the groove is greater than the height of the pin, a boss is formed between the two grooves, and the height of the boss matches the depth of the groove.

[0014] As a preferred embodiment, a recessed area is formed on the boss, and the height of the recessed area is smaller than the depth of the groove, so that the device to be packaged is suspended in the corresponding area of ​​the boss.

[0015] As a preferred embodiment, the deep cavity is arranged in a square shape, and the outer periphery of the deep cavity matches the outer diameter or outer periphery size of the device to be packaged, and an outer edge area connected to the deep cavity is formed at the corner of the deep cavity, and the radial dimension of the outer edge area is greater than the outer periphery length of the deep cavity.

[0016] As a preferred embodiment, the power supply component is a direct current power supply.

[0017] As a preferred embodiment, the vacuum system includes a front-stage pump and a back-stage pump, wherein the front-stage pump can control the vacuum degree in the chamber to 1*10 -1 Pa, the rear pump can control the vacuum degree in the chamber to 9*10 based on the front pump. -5 Specifically, the front stage pump is a Roots pump combined with a screw pump, and the back stage pump is a molecular pump.

[0018] The present invention also provides a method for device packaging using the above-mentioned vacuum parallel seam welding equipment, comprising the following steps: 1) Providing a device to be packaged, including a tube shell and a cover plate, wherein at least a cavity is formed in the tube shell, a getter is pre-fixed in the cavity, the getter is formed on a substrate that can be electrically heated, and two ends of the substrate are electrically connected to two pins on the tube shell respectively; 2) In the chamber, placing the tube shell on the activation unit, and the pins on the tube shell electrically connected to the substrate are separately led out and electrically connected to the power supply component; closing the chamber, and adjusting the vacuum degree in the chamber through the vacuum system; 3) After the target vacuum degree is reached in the chamber, current is applied to the activation tooling through the power supply assembly, and the getter is energized and activated; after the getter is activated, the vacuum degree in the chamber is maintained, and the parallel seam welding equipment is started to perform seam welding on the packaged device.

[0019] Compared with the prior art, this application has at least the following beneficial effects: First, the equipment of the present application can complete the getter activation and parallel seam welding processes together, thereby improving the transfer efficiency of MEMS devices. Compared with equipment that activates the getter by high-temperature heating of the entire MEMS device, the risk of performance degradation or failure of the MEMS device can be greatly reduced, thereby ensuring the long-term reliability and stability of the MEMS device.

[0020] Secondly, the equipment of the present application integrates the activation of the getter and the parallel seam welding process of the MEMS device in the same chamber, reducing the switching of equipment and the interruption of multiple processes, thereby significantly improving production efficiency; the activation and packaging processes of the MEMS device are carried out simultaneously, reducing the time consumed in the transportation and adjustment of the device between different equipment in the traditional process.

[0021] Third, the equipment of the present application can complete the activation of the getter in the high vacuum environment of the chamber before the seam welding of the MEMS device. Compared with activating the getter after packaging, it can better prevent the getter from being oxidized and contaminated, and maximize the energy efficiency of the getter. This makes the equipment of the present application have significant advantages in the packaging of high-vacuum MEMS devices.

[0022] Fourthly, compared with the traditional conventional vacuum parallel seam welding equipment, the equipment of the present application can complete the activation of the getter before the MEMS device is packaged, and can verify in advance whether the getter is effectively activated. It can directly screen out the MEMS devices that fail to be activated, and avoid the MEMS devices that fail to be activated from entering the packaging process, thereby reducing production costs and reducing waste. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0024] Figure 1 This is a schematic structural diagram of one embodiment of the vacuum parallel seam welding equipment of the present application; Figure 2 for Figure 1 Enlarged view of point A in the middle; Figure 3A schematic diagram of the structure of one embodiment of the activation tooling provided for the vacuum parallel seam welding equipment of the present application; Figure 4 A schematic structural diagram of one embodiment of the activation unit provided for the vacuum parallel seam welding device of the present application; Figure 5 A schematic structural diagram of one embodiment of a fixing plate and a lead plate provided for the vacuum parallel seam welding equipment of the present application; Figure 6 A schematic diagram of the structure of a device to be packaged provided in Example 1 of the present application; Figure 7 A cross-sectional view of the mating portion between the device to be packaged and the fixing plate provided in the first embodiment of the present application; Figure 8 This is a schematic structural diagram of another embodiment of the vacuum parallel seam welding equipment of the present application. DETAILED DESCRIPTION

[0025] The technical solution of the present invention will be clearly and completely described below in conjunction with the embodiments. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0026] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, or are directions or positional relationships in which the inventive product is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present invention.

[0027] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0028] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0029] For example, see Figure 1 to Figure 8 A vacuum parallel seam welding device includes a vacuum unit 100 and a welding unit 200. The vacuum unit 100 includes a chamber 110 and a vacuum system 120. The chamber 110 includes an openable and closable sealed door 111. An observation window 112 is provided on the sealed door 111 or at the side end of the chamber 110. The observation window 112 is used to observe the internal situation of the chamber 110.

[0030] See also Figure 2 The welding unit 200 is arranged in the chamber 110, and the welding unit 200 includes a workbench 210 and a parallel seam welding device 220. The parallel seam welding device 220 includes two parallel welding wheels 221 and a driving member 222. The two welding wheels 221 can be pressed onto the weld between the tube shell and the cover plate of the device to be packaged on the workbench 310 under the drive of the driving member 221, and move horizontally along the weld to achieve welding of the cover plate and the tube shell; See also Figure 2-Figure 3 , the workbench 210 is provided with a getter activation assembly, the getter activation assembly includes an activation tool 300 and a power supply assembly (not shown in the figure); the power supply assembly is electrically connected to the activation tool 300 by a wire, and a plurality of activation units 400 are formed on the activation tool 300; one of the functions of the activation unit 400 is to activate the getter in the device to be packaged, and the other function of the activation unit 400 is to appropriately limit the device to be packaged, so as to facilitate the final packaging by using the parallel seam welding device 220 after the getter is activated; Therefore, in order to avoid excessive interference of the getter activation component on the welding track of the parallel seam welding equipment 220, the device to be packaged placed in the activation unit 400 is directly in the welding track of the parallel seam welding equipment, and there is no shielding object outside the prepared weld or welding point of the device to be packaged placed on the activation tooling 300, and it is directly exposed to the bottom of the parallel seam welding equipment; in this way, the parallel seam welding equipment 220 in the present application can be any type of parallel seam welding equipment within the scope of knowledge of technical personnel in this field, and the present application does not specifically limit the structure of the parallel seam welding equipment.

[0031] See also Figure 2-Figure 3 In a specific embodiment of the present application, the activation tool 300 includes a support plate 310, a lead plate 320 and a fixing plate 330 from bottom to top, and the support plate 310 is loaded on the workbench 210 to provide overall support; see Figure 4A plurality of deep cavities 311 for fixing the tube shell are formed on the fixing plate 330. The deep cavity 311 is a part of the activation unit 400. The outer periphery of the deep cavity 311 is equal to the outer diameter or outer periphery of the device to be packaged. The tube shell can be correspondingly embedded in the deep cavity 311 to prevent the tube shell 311 from moving during vacuuming or seam welding. See also Figure 4 A pair of grooves 312 are formed on the fixing plate 330 at the bottom end of the deep cavity 311, and independent through holes 313 are respectively formed at the ends of the grooves 312. When the tube shell is placed in the deep cavity 311, a pair of pins on the tube shell can be inserted into the through holes 313. The pins inserted into the through holes 313 are electrically connected to the power supply component, and the remaining pins are placed in the grooves 312 to prevent the pins from interfering with each other during the activation process of the getter; the depth of the groove 312 is greater than the height of the pins on the tube shell, so that the pins in the groove can be suspended. The pins suspended in the groove help to avoid the pins from directly contacting the bottom of the groove when subjected to external force, thereby reducing the risk of pin bending or damage; See also Figure 5 In a specific embodiment of the present application, the lead plate 320 is provided with a terminal 321 and a connector 322. The connector 322 can be inserted into the through hole 313 from below the through hole 313. Each connector 322 is electrically connected to the terminal 321. When the tube shell is placed on the activation unit, the pin is electrically connected to the power supply component through the connector 322. In order to better cooperate with the through hole 313, the connector 322 is roughly cylindrical, and the top of the connector 322 abuts against the pin in the through hole 313. In order to better connect the connector 322 with the pin, the top of the connector 322 may also be set as a groove for the pin to be inserted, so that the pin and the connector 322 are in closer contact, thereby enhancing the stability of the electrical connection. In some embodiments of the present embodiment, since the size of the through hole 313 easily limits the shape of the connector 322, a notch may be formed from bottom to top at the corresponding position of the through hole 313 below the fixing plate 330 to shorten the height of the through hole 313, so that the pin can pass through the through hole 313 and then connect to the connector 322 below. The following is a further description of the beneficial effects of the present application in conjunction with the method of using the device of the present application: 1) Please refer to Figure 6-Figure 7 , providing a device to be packaged, including a tube shell 500 and a cover plate 600, wherein at least a cavity for placing the MEMS device is formed in the tube shell 500, and a getter 700 is pre-fixed at one end of the cavity, wherein the getter 700 is formed on a substrate that can be electrically heated, and the two ends of the substrate are electrically connected to two pins 510 on the tube shell 500 respectively; 2) Please refer to Figure 7, in the chamber, the tube shell 500 is placed on the fixing plate 330, and the pins 510 on the tube shell 500 that are electrically connected to the substrate are inserted into the through holes 313, and after ensuring that the pins 510 are in good contact with the connector 322, the sealing door 111 is closed, and the vacuum degree in the chamber 110 is adjusted by the vacuum system, and the vacuum degree can be specifically set according to the device packaging requirements; 3) After the target vacuum degree is reached in the chamber 110, current is applied to the activation tooling 300 through the power supply assembly, and a pair of pins 510 connected to the activation tooling 300 are electrically connected to the power supply assembly to form a circuit for electrically heating the getter 700. After the getter 700 is activated, the parallel seam welding equipment is started to complete the packaging.

[0032] Unlike conventional vacuum parallel seam welding equipment in which getter activation and device seam welding are completed by two independent devices respectively, the equipment of this embodiment can complete the getter activation and seam welding processes at one time by integrating the functions of the two devices, and both operations are completed in the same chamber, which can significantly improve the transportation efficiency of the packaged devices; and compared with the traditional equipment that activates the getter by high-temperature heating of the entire packaged device, the equipment of the present application can greatly reduce the risk of performance degradation or failure of the packaged device, and ensure the long-term reliability and stability of the packaged device; in addition, since the equipment of the present application can complete the getter activation before the device is packaged, the equipment of the present application can verify in advance whether the getter is effectively activated, directly screen out devices that fail to be activated, and prevent them from entering the packaging process, thereby reducing production costs and waste, and helping to optimize the packaging process.

[0033] For example 2, please see Figure 8 Based on the first embodiment, the vacuum system 120 includes a front pump 121 and a back pump 122. The front pump 121 is a roots pump with a screw pump, which can control the vacuum degree in the chamber to 1*10 - 1 Pa; the post-stage pump 122 is a molecular pump, which can control the vacuum degree in the chamber to 9*10 -5 Pa; on this basis, the method for using the device of the present application will be further described below in combination with a specific getter activation process (in this embodiment, the getter activation temperature used is 300° C., which is a conventional getter activation temperature in the art): 1) Place the tube shell with pre-soldered getter in the activation unit to ensure good contact with the device to be packaged; 2) Gradually extract the gas in the vacuum chamber to make the chamber reach 5*10 -3 Pa, to avoid contamination of the getter by oxygen or other gases; during the vacuuming process, a vacuum gauge is used to monitor the vacuum degree in the chamber; 3) After reaching the target vacuum degree, maintain this state and start to energize the getter at 1.5A, gradually increase the current, so that the getter heats up slowly to avoid local overheating or unevenness caused by rapid heating; and monitor the temperature of the getter in real time through an infrared temperature sensor to ensure that the temperature rise is in line with the process curve until the getter reaches the required activation temperature of 300°C; 4) When the getter reaches the activation temperature, maintain the temperature for 30 minutes. During this period, the surface and internal structure of the getter will change, thereby enhancing its ability to adsorb gas; during the activation process, continuously monitor the vacuum degree and temperature to ensure that there is no air leakage or temperature fluctuation, and avoid oxidation of the getter at high temperature or contamination by other gases.

[0034] 5) In order to ensure that the environment in the chamber remains non-oxidized during the activation process, the vacuum degree of the chamber is continuously monitored by the vacuum sensor. If the vacuum degree fluctuates, it needs to be adjusted in time. If necessary, the supplementary vacuum pump is started to maintain a stable high vacuum environment; 6) After the getter activation is completed, gradually reduce the power supply voltage and control the cooling rate of the getter to avoid excessive cooling that may cause material stress concentration or damage. Under the premise of maintaining vacuum in the chamber, start the flat seal seam welding equipment to complete the packaging operation.

[0035] Some traditional devices usually activate the getter after packaging. Due to the differences in the residual gas and the released gas in each tube shell, it is difficult to maintain inconsistent activation states of the getters in each device, and the maximum activation effect cannot be achieved. From the above discussion, it can be seen that the device of this embodiment activates each getter uniformly in a high vacuum environment in the chamber before seam welding, and completes the activation directly in the vacuum chamber. Compared with activating the getter after packaging, it can better prevent the getter from being oxidized and contaminated, and maximize the energy efficiency of the getter, thereby improving the quality and consistency of the packaged devices. This makes the device of this application have significant advantages in the packaging of MEMS devices with high vacuum requirements.

[0036] In a specific embodiment of the present application, the power supply component is a DC power supply, and the magnitude of the current can be used to adjust the temperature of the getter. Compared with the overall heating of traditional equipment or the use of AC power, the getter activation process can be more accurately controlled.

[0037] See also Figure 4In a specific embodiment of the present application, in the activation unit 400, the corner of the deep cavity 311 may also be formed with an outer edge area 314 connected to the deep cavity 311, and the radial dimension of the outer edge area 314 is slightly larger than the outer circumferential dimension of the deep cavity 311, so as to facilitate better placement of the tube shell 500 embedded in the deep cavity 311 through the outer edge area 314; in addition, by setting the outer edge area 314, during the vacuum stage in the chamber, it is easier to discharge the residual gas in the deep cavity upward through the outer edge area to ensure the activation quality of the getter.

[0038] See also Figure 4 In a specific embodiment of the present application, in the activation unit 400, a boss 315 is formed between the two grooves 312. The boss 315 is a part of the deep cavity 311. The top of the boss 315 is flush with the bottom of the deep cavity 311. When the tube shell 500 is placed in the deep cavity 311, the contact portion between the boss 315 and the tube shell 500 provides more support. Furthermore, a recessed area 316 is formed on the top surface of the boss 315. The setting of the recessed area 316 allows the bottom part of the tube shell 500 to be suspended, which helps the tube shell 500 to dissipate heat better when the getter is powered on and activated, and improves the packaging efficiency. In order to reduce the interference of the getter temperature rise on other devices in the tube shell 500, the setting of the recessed area 316 at least allows most of the central area of ​​the tube shell 500 to be suspended.

[0039] See also Figure 3 and Figure 5 In a specific embodiment of the present application, a screw hole 340 is provided on the fixing plate 330, and a plurality of first fixing holes and second fixing holes are respectively provided on the support plate 310 and the lead plate 320, and the first fixing holes and the second fixing holes correspond to the screw holes 340 on the fixing plate 330 one by one, that is, from the top to the bottom of the activation tooling 300, the screw hole 340, the first fixing hole and the second fixing hole are connected, and a screw or a bolt is inserted into the screw hole 340 from the top of the fixing plate 330, so that the support plate 310, the lead plate 320 and the fixing plate 330 are fixed; in addition, a third fixing hole is provided on the surface of the workbench corresponding to the screw hole 340 on the inner side, and the screw hole 340, the first fixing hole, the second fixing hole and the third fixing hole are connected, and a screw or a bolt is inserted into the third fixing hole from the top of the fixing plate to fix the activation tooling 300 to the workbench 210.

[0040] Please attend Figure 8In a specific embodiment of the present application, the vacuum parallel seam welding equipment also includes a control system component 800 and a display system component 900, and the control system component 800 is used for automatic control of equipment parameters such as the vacuum system and the getter activation component; it can be understood that through the control system component, process parameters such as the target vacuum degree and the temperature curve can be set, and the relevant parameters can be automatically adjusted according to the real-time monitoring results to ensure the activation of the getter and the smooth progress of the seam welding process; the display system component 900 is used to display various operating parameters of the equipment in real time, including vacuum degree, temperature, power-on current, etc., and provide an operation interface for the operator to monitor and adjust the equipment operation status.

[0041] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A vacuum parallel seam welding device, characterized in that: The invention comprises a vacuum unit and a welding unit, wherein the vacuum unit comprises a sealable chamber and a vacuum system for generating negative pressure in the chamber; The welding unit is arranged in the chamber, the welding unit comprises a workbench and a parallel seam welding device, and a getter activation component is also arranged in the welding unit, the getter activation component comprises an activation tool and a power supply component electrically connected to the activation tool; The activation tool is arranged on the workbench, and an activation unit is formed on the activation tool. The activation unit is used to place the device to be packaged. The device to be packaged placed in the activation unit is in the welding track of the parallel seam welding device. The activation unit is configured as follows: the prepared weld or welding point of the device to be packaged placed in the activation unit is directly exposed to the parallel seam welding equipment, and a pair of pins in the device to be packaged are separately led out, and the separately led out pair of pins are electrically connected to the power supply component.

2. The vacuum parallel seam welding equipment according to claim 1, characterized in that: The activation unit comprises a deep cavity formed on the top surface of the activation tooling, the depth of the deep cavity matches the height of the device to be packaged, and the device to be packaged is placed in the deep cavity.

3. The vacuum parallel seam welding equipment according to claim 2, characterized in that: A pair of grooves and a pair of through holes are formed at the bottom end of the deep cavity. The grooves and through holes are independently arranged. A pair of pins on the device to be packaged are led out separately through the through holes, and the remaining pins are placed in the grooves.

4. The vacuum parallel seam welding equipment according to claim 3, characterized in that: The activation tooling includes a power strip and a fixing plate having the deep cavity, the power strip includes a connector and a terminal electrically connected to a power supply assembly, the connector is inserted into the through hole or is arranged below the through hole.

5. The vacuum parallel seam welding equipment according to claim 4, characterized in that: The depth of the groove is greater than the height of the pin, so that the pin in the groove is suspended. A boss is formed between the two grooves. The height of the boss matches the depth of the groove, and the boss is a part of the deep cavity.

6. The vacuum parallel seam welding equipment according to claim 5, characterized in that: A recessed area is formed on the top surface of the boss, so that the bottom surface of the device to be packaged corresponding to the recessed area is suspended.

7. The vacuum parallel seam welding equipment according to claim 2, characterized in that: The deep cavity is arranged in a square shape, and an outer edge area communicating with the deep cavity is formed at a corner of the deep cavity, and the radial dimension of the outer edge area is larger than the radial dimension of the deep cavity.

8. The vacuum parallel seam welding equipment according to claim 1, characterized in that: The power supply component is a direct current power supply.

9. The vacuum parallel seam welding equipment according to claim 1, characterized in that: The vacuum system includes a front pump and a back pump. The front pump can control the vacuum degree in the chamber to 1*10 -1 Pa; the latter stage can control the vacuum degree in the chamber to 9*10 based on the former stage pump -5 Pa.

10. A method for device packaging using the vacuum parallel seam welding equipment according to any one of claims 1 to 9, characterized in that: include: 1) Providing a device to be packaged, including a tube shell and a cover plate, wherein at least a cavity is formed in the tube shell, a getter is pre-fixed in the cavity, the getter is formed on a substrate that can be electrically heated, and two ends of the substrate are electrically connected to two pins on the tube shell respectively; 2) In the chamber, placing the tube shell on the activation unit, and the pins on the tube shell electrically connected to the substrate are separately led out and electrically connected to the power supply component; closing the chamber, and adjusting the vacuum degree in the chamber through the vacuum system; 3) After the target vacuum degree is reached in the chamber, current is applied to the activation tooling through the power supply assembly, and the getter is energized and activated; after the getter is activated, the vacuum degree in the chamber is maintained, and the parallel seam welding equipment is started to perform seam welding on the packaged device.

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