Process and system for comprehensively treating ammonia-containing silane waste gas

Through a comprehensive treatment process, including condensation separation, combustion treatment and ammonia evaporation tower treatment, combined with a uniform gas distribution device, the problems of cumbersome and low efficiency of silane and ammonia exhaust gas treatment in the prior art are solved, and efficient and economical waste gas treatment and by-product recycling are achieved.

CN119656780APending Publication Date: 2025-03-21苏州仕净科技股份有限公司
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Patent Information

Application Number
CN202411963252.4
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-12-30
Publication Date
2025-03-21

AI Technical Summary

Technical Problem

In the prior art, the waste gas treatment of silane and ammonia needs to be carried out separately, which is complicated and inefficient, making it difficult to effectively treat high concentrations of ammonia.

Method used

A comprehensive treatment process is adopted to separate silane from ammonia through the first condenser. The silane exhaust gas is completely burned in the silane combustion tower. The ammonia and water vapor are fully contacted and treated in the ammonia vapor tower. The uniform gas distribution device is used to promote uniform contact between water vapor and ammonia-containing wastewater.

Benefits of technology

The waste gas that simultaneously treats silane and ammonia is achieved, which improves treatment efficiency, reduces resource waste and operating costs, and ensures efficient waste gas treatment and by-product recycling.

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Abstract

The invention discloses a process and a system for comprehensively treating ammonia-containing silane waste gas. The system comprises a first condenser, a silane combustion tower, a dust remover, an ammonia still, a second condenser and an ammonia water storage tank. According to the invention, silane and ammonia gas can be treated at the same time, the tedious process of respectively treating two kinds of waste gas in the traditional technology is avoided, and the treatment efficiency is improved; the first condenser is arranged for efficient condensation, it is ensured that volatile substances such as ammonia gas are effectively recycled, and resource waste is reduced; by arranging the silane combustion tower, combustible components in silane waste gas can be fully combusted and converted into harmless silicon dioxide dust, and efficient treatment of the silane waste gas is ensured; the ammonia still can enable liquid and gas to be in full contact, so that the heat transfer and mass transfer effects are improved, and the evaporation efficiency is improved; by means of treatment of the ammonia still, byproducts such as high-concentration ammonia water can be recycled.
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