Air floatation bearing system, detection equipment and air floatation assembly cleaning method

Abstract

The invention relates to an air floatation bearing system. An air-floating bearing system comprises an air-floating assembly, a bearing assembly, an air-floating assembly and a bearing assembly, the air-floating assembly is provided with a positive-pressure air hole, and the positive-pressure air hole is used for blowing air to achieve suspension of a borne part; the positive pressure pipeline is communicated with the positive pressure air hole, and the positive pressure pipeline comprises a positive pressure valve; the negative pressure pipeline is communicated with the positive pressure air hole, and the negative pressure pipeline comprises a negative pressure valve; the switching pipeline is provided with a first end connected with the positive pressure pipeline and a second end connected with the negative pressure pipeline, the connecting point of the first end and the positive pressure pipeline is located on the side, close to the air flotation assembly, of the positive pressure valve, and the connecting point of the second end and the negative pressure pipeline is located on the side, away from the air flotation assembly, of the negative pressure valve; the switching pipeline comprises a switching valve used for controlling connection and disconnection between the positive pressure pipeline and the negative pressure pipeline. The positive pressure and the negative pressure of the positive-pressure air hole can be switched through the branch pipeline. The invention mainly solves the technical problem that the positive pressure air hole of the air floatation bearing system is blocked in the using process.

Description

Technical Field

[0001] The invention relates to an air floating bearing system. Background Art

[0002] When using testing equipment to test wafers and other objects to be tested, the objects to be tested need to be placed on a carrier, which is generally divided into vacuum chuck carriers, electrostatic chuck carriers, and air flotation carriers. Unlike the contact-type carriers of vacuum chuck carriers and electrostatic chuck carriers, air flotation carriers are a non-contact carrier that does not require direct contact with the object to be tested during operation. It is particularly suitable for situations where both the front and back sides of the object to be tested need to be avoided from contact.

[0003] The working principle of an air flotation bearing is to set positive pressure air holes and negative pressure air holes on the bearing surface, and provide positive and negative pressure to the object to be measured at the same time, so that the object to be measured is suspended above the bearing surface and maintains a small air flotation gap with the bearing surface.

[0004] However, after long-term use of the air flotation system, particles often clog the positive pressure pores. Once the positive pressure pores are clogged, the object being measured may lose balance, reduce the air flotation gap, and generate friction, causing damage to the object being measured. Summary of the invention

[0005] The invention mainly solves the technical problem that the positive pressure air holes of the air floating bearing system may be blocked during use.

[0006] In a first aspect, the present invention provides an air floating bearing system.

[0007] An air floating bearing system, comprising:

[0008] An air flotation component, wherein the air flotation component is provided with a positive pressure air hole, and the positive pressure air hole is used for blowing air to achieve suspension of the carried component;

[0009] A positive pressure pipeline, the positive pressure pipeline is connected to the positive pressure air hole, and the positive pressure pipeline includes a positive pressure valve;

[0010] A negative pressure pipeline, the negative pressure pipeline is connected to the positive pressure air hole, and the negative pressure pipeline includes a negative pressure valve;

[0011] And a switching pipeline, the switching pipeline has a first end connected to the positive pressure pipeline and a second end connected to the negative pressure pipeline, the connection point between the first end and the positive pressure pipeline is located on the side of the positive pressure valve close to the air flotation component, and the connection point between the second end and the negative pressure pipeline is located on the side of the negative pressure valve away from the air flotation component; the switching pipeline includes a switching valve, and the switching valve is used to control the connection and disconnection between the positive pressure pipeline and the negative pressure pipeline.

[0012] In a technical solution, the switching pipeline further includes a switch valve, and the switch valve is connected in series with the switching valve.

[0013] In a technical solution, the switch valve is a manual valve.

[0014] In a technical solution, the positive pressure pipeline includes a first air pressure sensor, and the first air pressure sensor is arranged between the positive pressure valve and the air flotation component.

[0015] In a technical solution, the negative pressure pipeline includes a second air pressure sensor, and the second air pressure sensor is arranged between the negative pressure valve and the air flotation component.

[0016] In a second aspect, the present invention provides another air-floating bearing system.

[0017] An air floating bearing system, comprising:

[0018] An air flotation component, wherein the air flotation component is provided with a positive pressure air hole, and the positive pressure air hole is used for blowing air to achieve suspension of the carried component;

[0019] A positive pressure pipeline, the positive pressure pipeline is connected to the positive pressure air hole;

[0020] And a branch pipeline, the branch pipeline includes a branch joint and a branch valve, the branch joint has a first branch interface connected to the positive pressure pipeline, and a second branch interface and a third branch interface connected to the positive pressure air source and the negative pressure air source respectively; the branch valve includes a positive pressure switching valve connected to the second branch interface and a negative pressure switching valve connected to the third branch interface, the positive pressure switching valve is used to control the connection and disconnection between the branch joint and the positive pressure air source, and the negative pressure switching valve is used to control the connection and disconnection between the branch joint and the negative pressure air source.

[0021] In a third aspect, the present invention provides a detection device.

[0022] A detection device, comprising:

[0023] An air-floating bearing system, the air-floating bearing system is used to bear the object to be measured, and the air-floating bearing system is the air-floating bearing system described in any of the above technical solutions;

[0024] A detection device is used to detect the object to be detected on the carrying device.

[0025] In a fourth aspect, the present invention provides a method for cleaning an air flotation component.

[0026] A method for cleaning an air flotation component is used in a technical solution, and the method comprises the following steps:

[0027] Isolate the positive pressure air hole of the air flotation component from the positive pressure air source and connect it to the negative pressure air source to maintain the first set time;

[0028] The positive pressure air hole is isolated from the negative pressure air source by a valve, and connected to the positive pressure air source to maintain a second set time;

[0029] The above two steps are repeated at least once.

[0030] In a technical solution, the first setting time is 0.5 min to 1.5 min, and the second setting time is 0.5 min to 1.5 min.

[0031] In a technical solution, after at least one cycle is performed and before the air-floating bearing system carries the carried component, the positive-pressure pipeline is kept isolated from the positive-pressure air source and connected to the negative-pressure air source.

[0032] Beneficial effects of the present invention:

[0033] According to the above-mentioned air flotation bearing system, by setting a switching pipeline or a branch pipeline, the switching valve on the switching pipeline or the branch valve on the branch pipeline can make the positive-pressure air holes of the air flotation component alternately connected to the positive-pressure air source and the negative-pressure air source, and cooperate with the negative-pressure valve on the negative-pressure pipeline, not only can the particles that may block the positive-pressure air holes be loosened and eventually drawn out in reverse, thereby avoiding or improving the problem of easy blockage of the positive-pressure air holes, but also the direct connection between the positive-pressure air source and the negative-pressure air source can be avoided, thereby ensuring the normal operation of the air source generating equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 It is a structural schematic diagram of an embodiment of the air floating bearing system of the present invention;

[0035] Figure 2 A schematic diagram of the use state of an embodiment of the air floating bearing system of the present invention;

[0036] Figure 3 It is a schematic diagram of the use state of another embodiment of the air floating bearing system of the present invention;

[0037] Figure 4 This is a schematic diagram of the use status of another embodiment of the air floating bearing system in the present invention.

[0038] List of feature names corresponding to the reference numerals in the figure:

[0039] 10. Air flotation components;

[0040] 20. Positive pressure pipeline; 21. Positive pressure valve; 22. First air pressure sensor;

[0041] 30. Negative pressure pipeline; 31. Negative pressure valve; 32. Second air pressure sensor;

[0042] 40. Switching pipeline; 41. First end; 42. Second end; 43. Switching valve; 44. Switching valve;

[0043] 50. Branch pipeline; 51. Branch joint; 52. Switch valve; 53. Positive pressure switching valve; 54. Negative pressure switching valve;

[0044] 60. Positive pressure gas source;

[0045] 70. Negative pressure gas source;

[0046] 80. Marble platform; 81. First slide; 82. Second slide; 83. Wafer clamping assembly. DETAILED DESCRIPTION

[0047] The present invention is further described in detail below by specific embodiments in conjunction with the accompanying drawings. Wherein similar elements in different embodiments adopt associated similar element numbers. In the following embodiments, many detailed descriptions are for making the present application better understood. However, those skilled in the art can easily recognize that some features can be omitted in different situations, or can be replaced by other elements, materials, methods. In some cases, some operations related to the present application are not shown or described in the specification, this is to avoid the core part of the present application being overwhelmed by too much description, and for those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations according to the description in the specification and the general technical knowledge in the art.

[0048] In addition, the features, operations or characteristics described in the specification can be combined in any appropriate manner to form various implementations. At the same time, the steps or actions in the method description can also be interchanged or adjusted in a manner that is obvious to those skilled in the art. Therefore, the various sequences in the specification and the drawings are only for the purpose of clearly describing a certain embodiment and are not meant to be a required sequence, unless otherwise specified that a certain sequence must be followed.

[0049] The serial numbers of the components in this document, such as "first", "second", etc., are only used to distinguish the objects described and do not have any order or technical meaning. The "connection" and "coupling" mentioned in this application, unless otherwise specified, include direct and indirect connections (couplings).

[0050] Those skilled in the art know that the air flotation bearing system can stably carry the object being carried and achieve high-precision movement of the object being carried. The principle is to rely on air pressure to form an air film with a certain rigidity between the guide rail and the slider of the air flotation component, and rely on the air film to achieve bearing and maintain a certain air flotation gap. Positive pressure air holes are generally set on the slider of the air flotation component. The positive pressure air holes are connected to the positive pressure pipeline, and the air film is formed by CDA (Clean Dry Air / Compressed Dry Air) gas. Therefore, whether the positive pressure air holes can stably discharge air will directly affect the state of the air film and the stability of the air flotation bearing system. However, after the air flotation bearing system is used for a long time, the positive pressure air holes are often blocked by particles. Once the positive pressure air holes are blocked, it often causes unbalanced movement, which reduces the air flotation gap until friction occurs. Since the positive pressure air holes are often small in size and large in number, it is not easy to clean them, resulting in a long maintenance time, which will affect production efficiency.

[0051] The air flotation bearing system in the present invention provides a method for cleaning particles in positive pressure pores, using negative pressure to extract particles from the positive pressure pores, thereby achieving high efficiency cleaning. Furthermore, the air flotation bearing system can alternately apply positive pressure and negative pressure to the positive pressure pores, so that particles that may block the positive pressure pores can be vibrated and loosened, and finally extracted in the reverse direction.

[0052] Please refer to Figure 1 In one embodiment, an air-floating bearing system is used for wafer detection equipment, and the air-floating bearing system includes a marble platform 80, on which a first air-floating component 11 and a second air-floating component 12 are arranged. The first air-floating component 11 is provided with two places for carrying a first slide 81, and the two ends of the length direction of the first slide 81 are respectively assembled on one of the first air-floating components 11, so that the first slide 81 can move along a first direction; the second air-floating component 12 is used to carry a second slide 82, so that the second slide 82 can move along a second direction perpendicular to the first direction, and a wafer clamping component 83 is provided on the second slide 82, and the wafer clamping component 83 can carry a wafer. Of course, in other embodiments, the air-floating bearing system can also be used in scenarios other than wafer detection equipment.

[0053] Please refer to Figure 2In one embodiment, a wafer inspection device includes: an air flotation component 10, on which a positive pressure air hole is provided, and the positive pressure air hole is used for blowing air to achieve suspension of the supported component; a positive pressure pipeline 20, which is connected to the positive pressure air hole and includes a positive pressure valve 21; a negative pressure pipeline 30, which is connected to the positive pressure air hole and includes a negative pressure valve 31; and a switching pipeline 40, which has a first end 41 connected to the positive pressure pipeline 20 and a second end 42 connected to the negative pressure pipeline 30, the connection point between the first end 41 and the positive pressure pipeline 20 is located on a side of the positive pressure valve 21 close to the air flotation component 10, and the connection point between the second end 42 and the negative pressure pipeline 30 is located on a side of the negative pressure valve 31 away from the air flotation component 10; the switching pipeline 40 includes a switching valve 43, and the switching valve 43 is used to control the connection and disconnection between the positive pressure pipeline 20 and the negative pressure pipeline 30.

[0054] It should be noted that the air flotation component 10 of the air flotation bearing system generally includes a guide rail and a slider that can move along the guide rail, and the positive pressure air hole is generally provided on the slider as a movable part. The size of the slider in the guide direction of the guide rail is small, which can avoid gas waste. Therefore, the air flotation component 10 is provided with a positive pressure air hole generally means that the slider of the air flotation component 10 is provided with a positive pressure air hole, for example, Figure 2 The positive pressure air hole is arranged on the slider in the air flotation assembly 10. Of course, the above description does not exclude other situations, such as arranging the positive pressure air hole on the guide rail.

[0055] For air flotation components, especially for plane-shaped air flotation components, in order to ensure the stability of the relative position between the slider and the guide rail in the air flotation component, it is generally necessary to set both positive pressure air holes and negative pressure air holes. In this regard, in some embodiments of the present invention, the air flotation component 10 may include negative pressure air holes, which are used to absorb air, thereby achieving the suspension of the supported component together with the positive pressure air holes. Corresponding to the negative pressure air holes, please refer to Figure 3 The air flotation assembly 10 may include a negative pressure pipeline 30, the negative pressure pipeline 30 is connected to the negative pressure air hole, and the negative pressure pipeline 30 includes a negative pressure valve 31. The negative pressure pipeline 30 connected to the negative pressure air hole may be the same pipeline as the negative pressure pipeline 30 connected to the positive pressure air hole, or they may be different pipelines.

[0056] The above-mentioned positive pressure air holes are connected to the positive pressure pipeline 20 through the airway in the air flotation component 10. For example, an air pipe joint can be provided on the airway, and the positive pressure pipeline 20 is connected to the positive pressure air holes through the air pipe joint. It should be noted that the positive pressure air holes can be divided into several groups, and one group of positive pressure air holes can correspond to one air pipe joint or multiple air pipe joints, and one air pipe joint can also correspond to multiple groups of positive pressure air holes. At the same time, those skilled in the art should know that the substrate of the positive pressure air holes of the air flotation component 10 can take a variety of forms, such as a plate-like structure, and another such as a disc-like structure, and multiple substrates can be provided at the same time, and the air outlet directions of the positive pressure air holes on different substrates can also be different.

[0057] In some embodiments, the negative pressure pipeline 30 can be connected to the positive pressure air hole through an air pipe joint, or it can be connected to the positive pressure pipeline 20 and connected to the positive pressure air hole through the positive pressure pipeline 20. Figure 2 The positive pressure pipeline 20 and the negative pressure pipeline 30 are both connected to the positive pressure air hole through an air pipe joint.

[0058] In order to facilitate automatic control, in a specific embodiment, the positive pressure valve 21, the negative pressure valve 31 and the switching valve 43 can all adopt solenoid valves. Of course, in some other embodiments, valves with other control methods, such as manual valves, can also be adopted.

[0059] In one embodiment, the positive pressure valve 21 is a normally open valve, the negative pressure valve 31 is a normally open valve, and / or the switching valve 43 is a normally closed valve. The positive pressure valve 21 adopts a normally open valve to ensure the connection between the positive pressure air hole and the positive pressure air source 60, and the negative pressure valve 31 adopts a normally open valve to ensure the connection between the negative pressure air hole and the negative pressure air source 70, which is conducive to the stable and reliable operation of the air flotation component 10; and the switching valve 43 is a normally closed valve to avoid direct connection between the positive pressure air source 60 and the negative pressure air source 70, ensuring the normal operation of the air source equipment and the stability of the air flotation component 10.

[0060] It should be noted that normally open valves and normally closed valves are commonly used structures in the corresponding fields. For example, for a solenoid valve, a normally open valve is normally open when the solenoid valve loses power and is closed when powered on, while a normally closed valve is normally closed when the solenoid valve loses power and is opened when powered on.

[0061] In one embodiment, please refer to Figure 1 The switching pipeline 40 may further include a switch valve 44, which is connected in series with the switching valve 43. The switch valve 44 can improve the stability of the gas circuit and prevent the switch valve 43 from accidentally opening or leaking and affecting the normal operation of the air flotation assembly 10.

[0062] Furthermore, in one embodiment, the switch valve 44 is a manual valve. The switch valve 44 is a manual valve, which can further improve the stability and reliability of the system, and is only opened when the positive pressure air hole needs to be cleaned.

[0063] In order to ensure the cleaning effect of the positive pressure air hole, in one embodiment, please refer to Figure 2 The positive pressure pipeline 20 includes a first air pressure sensor 22, which is arranged between the positive pressure valve 21 and the air flotation component 10. In addition, in one embodiment, the negative pressure pipeline 30 may also include a second air pressure sensor 32, which is arranged between the negative pressure valve 31 and the air flotation component 10. Through the corresponding air pressure sensors, the air flotation bearing system can detect positive and negative air pressure values, so that the positive pressure and negative pressure meet the set requirements, ensure the normal operation of the air flotation component 10 and ensure the cleaning effect when the positive pressure air hole passes through the negative pressure.

[0064] A method for cleaning an air flotation component applied to the above-mentioned air flotation bearing system is as follows, which is also an embodiment of a method for cleaning an air flotation component in the present invention:

[0065] The air flotation component cleaning method includes the following steps:

[0066] Step 1. Isolate the positive pressure air hole of the air flotation assembly 10 from the positive pressure air source 60 and connect it to the negative pressure air source 70. Maintain the first set time;

[0067] Step 2. Isolate the positive pressure air hole from the negative pressure air source 70 through the valve, and connect it to the positive pressure air source 60, and maintain the second set time;

[0068] The above two steps are repeated at least once.

[0069] In a specific embodiment, the isolation of the positive pressure air hole and the positive pressure air source 60 is achieved by relying on the positive pressure valve 21 on the positive pressure pipeline 20, the isolation of the positive pressure air hole and the negative pressure air source 70 is achieved by relying on the switching valve 43 on the switching pipeline 40, and the connection between the positive pressure air hole and the negative pressure air source 70 is achieved by relying on the switching valve 43 on the switching pipeline 40.

[0070] It should be noted that the present invention does not limit the order of the above steps 1 and 2, and step 1 can be performed first, then step 2, or step 2 can be performed first and then step 1. Of course, when the order of step 1 and step 2 is adjusted, the starting process of the corresponding cycle will also change accordingly.

[0071] In one embodiment, the first set time is 0.5min to 1.5min, and the second set time is 0.5min to 1.5min. The above time range can take into account both the time consumption and the cleaning effect of cleaning. According to factors such as the degree of blockage, the type of particulate matter, the size of the positive pressure opening, etc., the length of the first set time and the length of the second set time can also be adjusted to meet the particulate matter cleaning needs. In addition, the length of the first set time and the second set time can also be considered in combination with the number of cycles of positive and negative alternating ventilation. For example, when the first set time and the second set time are shorter, the number of cycles of positive and negative alternating ventilation can also be increased.

[0072] In one embodiment, when the second air flotation component 12 is cleaned, since both the first air flotation component 11 and the second air flotation component 12 blow air toward the platform 80 to achieve bearing, the blowing pressure of the first air flotation component 11 can be controlled to balance the load of the first air flotation component 11, so that the blowing pressure of the first air flotation component 11 can balance the weight of the load and the suction pressure of the second air flotation component 12, thereby avoiding vibration of the load caused by imbalance of air flotation pressure.

[0073] Furthermore, in one embodiment, after at least one cycle and before the air flotation carrying system carries the carried object, the positive pressure pipeline 20 is kept isolated from the positive pressure air source 60 and connected to the negative pressure air source 70. The above scheme can extend the time for extracting particulate matter using negative pressure, thereby more effectively avoiding blockage of the positive pressure air hole during blowing.

[0074] By cyclically connecting the positive pressure air hole with the positive pressure air source 60 and the negative pressure air source 70 alternately, not only can the particles be sucked when the negative pressure is connected, but also the particles that may block the positive pressure air hole can be loosened by the alternating positive and negative pressures, and finally reversely sucked out, which helps to improve the cleaning effect and meet the use requirements. At the same time, the normal operation of the air flotation component 10 can be guaranteed in the non-cleaning process by the corresponding switching valve 43.

[0075] In another embodiment of the air bearing system, please refer to Figure 3The air-floating bearing system includes: an air-floating component 10, on which a positive-pressure air hole is provided, and the positive-pressure air hole is used for blowing air to achieve the suspension of the carried object; a positive-pressure pipeline 20, which is connected to the positive-pressure air hole; and a branch pipeline 50, which includes a branch joint 51 and a branch valve, wherein the branch joint 51 has a first branch interface connected to the positive-pressure pipeline 20, and a second branch interface and a third branch interface respectively used to connect to a positive-pressure gas source 60 and a negative-pressure gas source 70; the branch valve includes a positive-pressure switching valve 53 connected to the second branch interface and a negative-pressure switching valve 54 connected to the third branch interface, wherein the positive-pressure switching valve 53 is used to control the connection and disconnection between the branch joint 51 and the positive-pressure gas source 60, and the negative-pressure switching valve 54 is used to control the connection and disconnection between the branch joint 51 and the negative-pressure gas source 70. Similar to the previous embodiment, the branch pipeline 50 also includes a switch valve 52.

[0076] In order to ensure the normal operation of the air flotation assembly 10 , in one embodiment, the positive pressure switching valve 53 is a normally open valve, and the negative pressure switching valve 54 is a normally closed valve.

[0077] The above embodiments and Figure 2 One difference of the embodiment shown is that in this embodiment, by providing a branch joint 51 and cooperating with a positive pressure switching valve 53 and a negative pressure switching valve 54, suction cleaning of the positive pressure air hole can be achieved without affecting the negative pressure pipeline 30. In some other embodiments, for the air flotation assembly 10 without a negative pressure air hole, the above-mentioned steps can be directly omitted. Figure 3 The negative pressure pipeline 30 in the embodiment shown can be referred to Figure 4 .

[0078] Correspondingly, for Figure 3 In the illustrated embodiment, when the air flotation assembly 10 is cleaned, the positive pressure pipeline 20 can be controlled to communicate with the positive pressure air source 60 or the negative pressure air source 70 by switching the states of the positive pressure switching valve 53 and the negative pressure switching valve 54 .

[0079] Similarly, for Figure 3 In the embodiment shown, the positive-pressure air holes are connected to the positive-pressure air source 60 and the negative-pressure air source 70 in a cyclical manner, so that particulate matter can be sucked out. The particles that may clog the positive-pressure air holes are loosened by alternating positive and negative pressures, and are eventually sucked out in reverse, which helps to improve the cleaning effect and meet usage requirements.

[0080] An embodiment of a detection device in the present invention:

[0081] A detection device, comprising:

[0082] The air-floating bearing system is used to bear the object to be measured. The structure of the air-floating bearing system is the same as any of the above-mentioned embodiments of the air-floating bearing system, and will not be described in detail here.

[0083] And a detection device, the detection device is used to detect the object to be detected on the carrying device. The detection device can adopt an existing structure and has no necessary relationship with the main improvement of the present invention, and will not be described in detail here.

[0084] The above specific examples are used to illustrate the present invention, which is only used to help understand the present invention and is not intended to limit the present invention. For those skilled in the art, according to the concept of the present invention, some simple deductions, modifications or substitutions can be made.

Claims

1. An air floating bearing system, characterized in that: include: An air flotation component, wherein the air flotation component is provided with a positive pressure air hole, and the positive pressure air hole is used for blowing air to achieve suspension of the carried component; A positive pressure pipeline, the positive pressure pipeline is connected to the positive pressure air hole, and the positive pressure pipeline includes a positive pressure valve; A negative pressure pipeline, the negative pressure pipeline is connected to the positive pressure air hole, and the negative pressure pipeline includes a negative pressure valve; And a switching pipeline, the switching pipeline has a first end connected to the positive pressure pipeline and a second end connected to the negative pressure pipeline, the connection point between the first end and the positive pressure pipeline is located on the side of the positive pressure valve close to the air flotation component, and the connection point between the second end and the negative pressure pipeline is located on the side of the negative pressure valve away from the air flotation component; the switching pipeline includes a switching valve, and the switching valve is used to control the connection and disconnection between the positive pressure pipeline and the negative pressure pipeline.

2. The air-floating bearing system according to claim 1, characterized in that: The switching pipeline further comprises a switch valve, and the switch valve is connected in series with the switching valve.

3. The air-floating bearing system according to claim 2, characterized in that: The switch valve is a manual valve.

4. The air-floating bearing system according to any one of claims 1 to 3, characterized in that: The positive pressure pipeline includes a first air pressure sensor, and the first air pressure sensor is arranged between the positive pressure valve and the air flotation component.

5. The air-floating bearing system according to any one of claims 1 to 3, characterized in that: The negative pressure pipeline includes a second air pressure sensor, and the second air pressure sensor is arranged between the negative pressure valve and the air flotation component.

6. An air-floating bearing system, characterized in that: include: An air flotation component, wherein the air flotation component is provided with a positive pressure air hole, and the positive pressure air hole is used for blowing air to achieve suspension of the carried component; A positive pressure pipeline, the positive pressure pipeline is connected to the positive pressure air hole; And a branch pipeline, the branch pipeline includes a branch joint and a branch valve, the branch joint has a first branch interface connected to the positive pressure pipeline, and a second branch interface and a third branch interface connected to the positive pressure air source and the negative pressure air source respectively; the branch valve includes a positive pressure switching valve connected to the second branch interface and a negative pressure switching valve connected to the third branch interface, the positive pressure switching valve is used to control the connection and disconnection between the branch joint and the positive pressure air source, and the negative pressure switching valve is used to control the connection and disconnection between the branch joint and the negative pressure air source.

7. A detection device, characterized in that: include: An air-floating bearing system, the air-floating bearing system is used to bear the object to be measured, and the air-floating bearing system is the air-floating bearing system according to any one of claims 1 to 6; A detection device is used to detect the object to be detected on the carrying device.

8. A method for cleaning an air flotation component, characterized in that: Applied to the air-floating bearing system according to any one of claims 1 to 6, the method comprises the following steps: Isolate the positive pressure air hole of the air flotation component from the positive pressure air source and connect it to the negative pressure air source to maintain the first set time; The positive pressure air hole is isolated from the negative pressure air source by a valve, and connected to the positive pressure air source to maintain a second set time; The above two steps are repeated at least once.

9. The air flotation component cleaning method according to claim 8, characterized in that: The first setting time is 0.5 min to 1.5 min, and the second setting time is 0.5 min to 1.5 min.

10. The air flotation component cleaning method according to claim 8, characterized in that: After at least one cycle is performed and before the air-floating bearing system carries the carried component, the positive pressure pipeline is kept isolated from the positive pressure air source and connected to the negative pressure air source.

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