Matching parameter operation circuit and radio frequency power supply system

Abstract

The invention provides a matching parameter operation circuit and a radio frequency power supply system, the matching parameter operation circuit is used for determining a voltage standing wave ratio when a radio frequency power supply outputs radio frequency electric energy to a load, and the matching parameter operation circuit comprises a first operation unit, a second operation unit and a third operation unit. The first operation unit is used for being connected with the output end of the radio frequency power supply to obtain an output voltage signal and performing first operation according to the output voltage signal and a preset characteristic impedance value to obtain a first operation value. The second operation unit is used for being connected with the input end of the load so as to obtain the input voltage signal and the input current signal, and second operation is carried out according to the input voltage signal and the input current signal so as to obtain a second operation value. And the third operation unit is connected with the first operation unit and the second operation unit and is used for performing third operation according to the first operation value and the second operation value so as to obtain the voltage standing wave ratio. According to the invention, the voltage standing wave ratio can be rapidly and conveniently obtained.

Description

Technical Field

[0001] The present application relates to the field of radio frequency technology, and in particular to a matching parameter operation circuit and a radio frequency power supply system. Background Art

[0002] At present, with the popularization of radio frequency (RF) technology, more and more RF power supplies are used to output RF power to various loads. In the process of RF power supply outputting RF power to the load, the impedance matching between the RF power supply and the load is particularly important. In particular, when the impedance of the load changes, it is also necessary to keep the matching parameters of the output path of the RF power supply stable at all times to ensure that the RF power supply and the load are always in an impedance matching state. Therefore, when the RF power supply outputs power to the load, the matching parameters are important parameters to determine whether the RF power supply and the load are impedance matched. How to quickly and conveniently obtain matching parameters such as voltage standing wave ratio (VSWR) to better output RF power to the load has become a problem that needs to be considered. Summary of the invention

[0003] The present application provides a matching parameter operation circuit and a radio frequency power supply system, which can quickly and conveniently obtain the voltage standing wave ratio to better output radio frequency power to a load.

[0004] In a first aspect, a matching parameter operation circuit is provided, wherein the matching parameter operation circuit is used to determine the matching parameters when the RF power supply outputs RF power to the load, wherein the matching parameters include the voltage standing wave ratio. The matching parameter operation circuit includes a first operation unit, a second operation unit, and a third operation unit. The first operation unit is used to connect to the output end of the RF power supply to obtain an output voltage signal, and perform a first operation according to the output voltage signal and a preset characteristic impedance value to obtain a first operation value. The second operation unit is used to connect to the input end of the load to obtain an input voltage signal and an input current signal, and perform a second operation according to the input voltage signal and the input current signal to obtain a second operation value. The third operation unit is connected to the first operation unit and the second operation unit respectively, and the third operation unit is used to perform a third operation according to the first operation value and the second operation value to obtain the voltage standing wave ratio.

[0005] In a possible implementation manner, the first operation is to square the effective value of the output voltage signal and divide it by the preset characteristic impedance value, and the first operation value is the ratio of the square of the effective value of the output voltage signal to the preset characteristic impedance value. The second operation is to multiply the input voltage signal and the input current signal and take the effective value, and the second operation value is the effective value of the product of the input voltage signal and the input current signal.

[0006] In a possible implementation manner, the third operation is to divide the first operation value by the second operation value, and the voltage standing wave ratio is a ratio of the first operation value to the second operation value.

[0007] In a possible implementation, the first operation unit includes a first sampling module, a first multiplier, and a first divider. The input end of the first sampling module is used to connect with the output end of the RF power supply to obtain the output voltage signal and obtain the effective value of the output voltage signal, and then output the effective value of the output voltage signal through the output end of the first sampling module. Both input ends of the first multiplier are connected to the output end of the first sampling module, and the first multiplier is used to multiply the effective values ​​of the two received output voltage signals, so as to obtain the square of the effective value of the output voltage signal and output it through the output end of the first multiplier. One of the output ends of the first divider is connected to the output end of the first multiplier, and the other input end of the first divider is used to receive the preset characteristic impedance value, so as to divide the square of the effective value of the received output voltage signal by the preset characteristic impedance value, so as to obtain the first operation value, and the output end of the first divider is connected to the third operation unit, so as to transmit the first operation value to the third operation unit through the output end of the first divider.

[0008] In a possible implementation, the second operation unit includes a second sampling module, a third sampling module, a second multiplier, and a fourth sampling module. The input end of the second sampling module and the input end of the third sampling module are both used to connect to the input end of the load to obtain the input voltage signal and the input current signal respectively, and output the input voltage signal and the input current signal respectively through the output end of the second sampling module and the output end of the third sampling module. The two input ends of the second multiplier are respectively connected to the output end of the second sampling module and the output end of the third sampling module. The second multiplier is used to multiply the received input voltage signal and the input current signal, so as to obtain the product of the input voltage signal and the input current signal and output it through the output end of the second multiplier. The input end of the fourth sampling module is connected to the output end of the second multiplier. The fourth sampling module is used to obtain the effective value of the product of the received input voltage signal and the input current signal, so as to obtain the second operation value. The output end of the fourth sampling module is also connected to the third operation unit to transmit the second operation value to the third operation unit through the output end of the fourth sampling module.

[0009] In a possible implementation, the third operation unit includes a second divider, two input ends of the second divider are respectively connected to the first operation unit and the second operation unit, and the second divider is used to perform a division operation on the first operation value and the second operation value respectively received, so as to obtain the voltage standing wave ratio and output it through the output end of the second divider.

[0010] In a possible implementation, the matching parameter further includes a reflection coefficient. The matching parameter operation circuit further includes a fourth operation unit, the fourth operation unit is connected to the third operation unit, and the fourth operation unit is used to perform operation according to the voltage standing wave ratio to obtain the reflection coefficient.

[0011] In a possible implementation manner, the voltage standing wave ratio is a ratio of a sum of a first constant and the reflection coefficient and a difference between the first constant and the reflection coefficient.

[0012] In a possible implementation manner, the RF power supply outputs RF power to the load via a cable, and the preset characteristic impedance value is an impedance value of the cable.

[0013] In a second aspect, a radio frequency power supply system is also provided, the radio frequency power supply system comprising a radio frequency power supply and a matching parameter operation circuit. The matching parameter operation circuit is used to determine the matching parameters when the radio frequency power supply outputs radio frequency electric energy to the load, wherein the matching parameters include the voltage standing wave ratio. The matching parameter operation circuit comprises a first operation unit, a second operation unit and a third operation unit. The first operation unit is used to connect to the output end of the radio frequency power supply to obtain an output voltage signal, and perform a first operation according to the output voltage signal and a preset characteristic impedance value to obtain a first operation value. The second operation unit is used to connect to the input end of the load to obtain an input voltage signal and an input current signal, and perform a second operation according to the input voltage signal and the input current signal to obtain a second operation value. The third operation unit is connected to the first operation unit and the second operation unit respectively, and the third operation unit is used to perform a third operation according to the first operation value and the second operation value to obtain the voltage standing wave ratio.

[0014] The matching parameter operation circuit and the RF power supply system of the present application obtain a first operation value by setting a first operation unit to perform a first operation according to an output voltage signal and a preset characteristic impedance value, and obtain a second operation value by setting a second operation unit to perform a second operation according to an input voltage signal and an input current signal, so that the voltage standing wave ratio can be obtained more quickly and conveniently according to the first operation value and the second operation value by setting a third operation unit to perform a third operation, thereby better outputting RF power to the load. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.

[0016] Figure 1 FIG. 4 is a schematic diagram of a matching parameter calculation circuit in an embodiment of the present application.

[0017] Figure 2 FIG. 4 is a schematic diagram of a first computing unit in an embodiment of the present application.

[0018] Figure 3 FIG. 4 is a schematic diagram of a second computing unit in an embodiment of the present application.

[0019] Figure 4 is a schematic diagram of a third computing unit in an embodiment of the present application.

[0020] Figure 5 FIG. 4 is a schematic diagram of a matching parameter calculation circuit in another embodiment of the present application.

[0021] Figure 6is a schematic diagram of a radio frequency power supply system in an embodiment of the present application.

[0022] Explanation of the accompanying drawings: 1000, RF power supply system, RS, RF power supply, RL, load, 10, matching parameter operation circuit, 100, first operation unit, 110, first sampling module, 120, first multiplier, 130, first divider, Uo, output voltage signal, Z0, preset characteristic impedance value, OP1, first operation value, 200, second operation unit, 210, second sampling module, 220, third sampling module, 230, second multiplier, 240, fourth sampling module, Ui, input voltage signal, Ii, input current signal, OP2, second operation value, 300, third operation unit, 310, second divider, 400, fourth operation unit. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0024] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0025] In the following, the terms "first", "second", "third", and "fourth" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first", "second", "third", and "fourth" may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present application, unless otherwise specified, "multiple" means two or more.

[0026] In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such process, method, product, or device.

[0027] Please also read Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 1 is a schematic diagram of a matching parameter calculation circuit in an embodiment of the present application, Figure 2 is a schematic diagram of a first computing unit in an embodiment of the present application, Figure 3 is a schematic diagram of a second computing unit in an embodiment of the present application, Figure 4 FIG. 1 is a schematic diagram of a third computing unit in an embodiment of the present application. Figure 1-Figure 4 As shown, the present application provides a matching parameter operation circuit 10, which is used to determine the matching parameters when the radio frequency power supply RS outputs radio frequency power to the load RL, wherein the matching parameters include the voltage standing wave ratio. The matching parameter operation circuit 10 includes a first operation unit 100, a second operation unit 200, and a third operation unit 300. The first operation unit 100 is used to connect with the output end of the radio frequency power supply RS to obtain the output voltage signal Uo, and perform a first operation according to the output voltage signal Uo and the preset characteristic impedance value Z0 to obtain a first operation value OP1. The second operation unit 200 is used to connect with the input end of the load RL to obtain the input voltage signal Ui and the input current signal Ii, and perform a second operation according to the input voltage signal Ui and the input current signal Ii to obtain a second operation value OP2. The third operation unit 300 is connected to the first operation unit 100 and the second operation unit 200 respectively, and the third operation unit 300 is used to perform a third operation according to the first operation value OP1 and the second operation value OP2 to obtain the voltage standing wave ratio.

[0028] Thus, the matching parameter operation circuit 10 in the present application performs a first operation on the output voltage signal Uo and the preset characteristic impedance value Z0 to obtain a first operation value OP1, and performs a second operation on the input voltage signal Ui and the input current signal Ii to obtain a second operation value OP2 by setting a second operation unit 200, so that the third operation can be performed on the first operation value OP1 and the second operation value OP2 by setting a third operation unit 300 to obtain the voltage standing wave ratio more quickly and conveniently, thereby better outputting RF power to the load RL.

[0029] in, Figure 1 The OS shown in FIG. 1 is the output terminal of the RF power supply RS, and the IL is the input terminal of the load RL.

[0030] The first operation is to square the effective value of the output voltage signal Uo and divide it by the preset characteristic impedance value Z0, and the first operation value OP1 is the ratio of the square of the effective value of the output voltage signal Uo to the preset characteristic impedance value Z0. The second operation is to multiply the input voltage signal Ui and the input current signal Ii and take the effective value, and the second operation value OP2 is the effective value of the product of the input voltage signal Ui and the input current signal Ii.

[0031] Thus, the matching parameter operation circuit 10 in the present application configures the first operation to square the effective value of the output voltage signal Uo and divide it by the preset characteristic impedance value Z0, and configures the second operation to multiply the input voltage signal Ui and the input current signal Ii and take the effective value, so that the first operation value OP1 and the second operation value OP2 respectively obtained can be used to quickly and conveniently calculate the voltage standing wave ratio.

[0032] The third operation is to divide the first operation value OP1 by the second operation value OP2, and the voltage standing wave ratio is the ratio of the first operation value OP1 to the second operation value OP2.

[0033] Therefore, the matching parameter operation circuit 10 in the present application, when the first operation value OP1 is the ratio of the square of the effective value of the output voltage signal Uo to the preset characteristic impedance value Z0, and the second operation value OP2 is the effective value of the product of the input voltage signal Ui and the input current signal Ii, divides the first operation value OP1 by the second operation value OP2, and the voltage standing wave ratio can be obtained.

[0034] Specifically, the second operation value OP2 may be a transmission power value when the RF power source RS outputs RF power to the load RL, and the transmission power value is related to the forward power value, the reflected power value, and the preset characteristic impedance value Z0, and the forward power value and the reflected power value are both related to the effective value of the output voltage signal Uo and the reflection coefficient. Therefore, the transmission power value is related to the effective value of the output voltage signal Uo, the preset characteristic impedance value Z0, and the reflection coefficient. In some embodiments, the transmission power value may be Uo1 2 / [(1+X) 2 ×Z0]-Uo1 2 ×X 2 / [(1+X) 2 ×Z0], where Uo1 is the effective value of the output voltage signal Uo, X is the reflected power, that is, the second operation value OP2 can be specifically Uo1 2 / [(1+X) 2 ×Z0]-Uo1 2 ×X 2 / [(1+X) 2 ×Z0], and the first operation value OP1 is Uo1 2 / Z0, then according to the relationship between the reflection coefficient and the standing wave ratio, the voltage standing wave ratio is the ratio of the first operation value OP1 to the second operation value OP2, that is, the voltage standing wave ratio is (1+X) / (1-X).

[0035] like Figure 1 , Figure 2 As shown, the first operation unit 100 includes a first sampling module 110, a first multiplier 120 and a first divider 130. The input end of the first sampling module 110 is used to connect with the output end of the RF power supply RS to obtain the output voltage signal Uo and obtain the effective value of the output voltage signal Uo, and then output the effective value of the output voltage signal Uo through the output end of the first sampling module 110. Both input ends of the first multiplier 120 are connected to the output end of the first sampling module 110, and the first multiplier 120 is used to multiply the effective values ​​of the two received output voltage signals Uo, so as to obtain the square of the effective value of the output voltage signal Uo and output it through the output end of the first multiplier 120. One of the output ends of the first divider 130 is connected to the output end of the first multiplier 120, and the other input end of the first divider 130 is used to receive a preset characteristic impedance value Z0, so as to perform a division operation on the square of the effective value of the received output voltage signal Uo and the preset characteristic impedance value Z0, so as to obtain a first operation value OP1, and the output end of the first divider 130 is connected to the third operation unit 300, so as to transmit the first operation value OP1 to the third operation unit 300 through the output end of the first divider 130.

[0036] Therefore, the matching parameter operation circuit 10 in the present application, by setting the first operation unit 100 to include a first sampling module 110, a first multiplier 120 and a first divider 130, can obtain the output voltage signal Uo and perform the first operation to obtain the first operation value OP1.

[0037] In one or more embodiments, the first sampling module 110 may include a voltage sensor to obtain the effective value of the output voltage signal Uo.

[0038] in, Figure 2 Uo1 shown in the figure is the effective value of the output voltage signal Uo, and Uo2 is the square of the effective value of the output voltage signal Uo.

[0039] like Figure 1 , Figure 3As shown, the second operation unit 200 includes a second sampling module 210, a third sampling module 220, a second multiplier 230 and a fourth sampling module 240. The input end of the second sampling module 210 and the input end of the third sampling module 220 are both used to connect with the input end of the load RL to obtain the input voltage signal Ui and the input current signal Ii respectively, and output the input voltage signal Ui and the input current signal Ii respectively through the output end of the second sampling module 210 and the output end of the third sampling module 220. The two input ends of the second multiplier 230 are respectively connected to the output end of the second sampling module 210 and the output end of the third sampling module 220, and the second multiplier 230 is used to multiply the received input voltage signal Ui and the input current signal Ii, so as to obtain the product of the input voltage signal Ui and the input current signal Ii and output it through the output end of the second multiplier 230. The input end of the fourth sampling module 240 is connected to the output end of the second multiplier 230. The fourth sampling module 240 is used to obtain the effective value of the product of the received input voltage signal Ui and the input current signal Ii, so as to obtain the second operation value OP2. The output end of the fourth sampling module 240 is also connected to the third operation unit 300 to transmit the second operation value OP2 to the third operation unit 300 through the output end of the fourth sampling module 240.

[0040] Therefore, the above-mentioned matching parameter operation circuit 10 in the present application, by setting the second operation unit 200 to include a second sampling module 210, a third sampling module 220, a second multiplier 230 and a fourth sampling module 240, can realize the acquisition of the input voltage signal Ui and the input current signal Ii, and perform the second operation to obtain the second operation value OP2.

[0041] In one or more embodiments, the second sampling module 210 may include a voltage divider circuit or the like for obtaining a sampling circuit for the input voltage signal Ui, the third sampling module 220 may include a current transformer or the like for obtaining a sampling circuit for the input current signal Ii, and the fourth sampling module 240 may include a voltage sensor to obtain the effective value of the product of the input voltage signal Ui and the input current signal Ii.

[0042] in, Figure 3 The UIi shown in FIG. 1 is the product of the input voltage signal Ui and the input current signal Ii.

[0043] like Figure 1 , Figure 4 As shown, the third operation unit 300 includes a second divider 310, and the two input ends of the second divider 310 are respectively connected to the first operation unit 100 and the second operation unit 200, and the second divider 310 is used to divide the first operation value OP1 and the second operation value OP2 received respectively, so as to obtain the voltage standing wave ratio and output it through the output end of the second divider 310.

[0044] Therefore, the matching parameter operation circuit 10 in the present application performs the third operation by setting the third operation unit 300 to include a second divider 310 to obtain the voltage standing wave ratio.

[0045] See also Figure 5 , Figure 5 FIG. 1 is a schematic diagram of a matching parameter calculation circuit in another embodiment of the present application. Figure 5 As shown, the matching parameter also includes a reflection coefficient. The matching parameter operation circuit 10 also includes a fourth operation unit 400, which is connected to the third operation unit 300 and is used to perform operation according to the voltage standing wave ratio to obtain the reflection coefficient.

[0046] Therefore, the matching parameter calculation circuit 10 in the present application can obtain the reflection coefficient by setting the fourth calculation unit 400 to be connected with the third calculation unit 300 and performing calculation according to the voltage standing wave ratio.

[0047] in, Figure 4 , Figure 5 The VSWR shown in is the voltage standing wave ratio.

[0048] The voltage standing wave ratio is the ratio of the sum of the first constant and the reflection coefficient to the difference between the first constant and the reflection coefficient.

[0049] In one or more embodiments, the first constant may be 1, that is, the voltage standing wave ratio is a ratio of the sum of 1 and the reflection coefficient and the difference between 1 and the reflection coefficient.

[0050] In one or more embodiments, the RF power source RS outputs RF power to the load RL through a cable, and the preset characteristic impedance value Z0 is the impedance value of the cable.

[0051] Specifically, the impedance value of the cable can be 50Ω, 75Ω, etc., but the present application is not limited thereto. Generally speaking, the preset characteristic impedance value Z0 can be 50Ω. Taking the preset characteristic impedance value Z0 as 50Ω as an example, it means that the RF power supply RS outputs electrical energy to the load RL through the cable under the impedance environment of 50Ω. Under the condition of impedance matching, the resistance values ​​of the RF power supply RS, the cable and the load RL are all 50Ω, and the reactance values ​​of the RF power supply RS, the cable and the load RL are conjugated and the overall embodiment is zero.

[0052] The matching parameter calculation circuit 10 of the present application, through the above structure, can obtain matching parameters such as voltage standing wave ratio at a faster speed and in a more convenient manner when the RF power supply RS outputs electric energy to the load RL, so as to determine whether the RF power supply RS and the load RL are impedance matched, thereby better outputting RF electric energy to the load RL.

[0053] See also Figure 6 , Figure 6 FIG. 1 is a schematic diagram of a radio frequency power supply system in an embodiment of the present application. Figure 6 As shown, the present application further provides a radio frequency power supply system 1000, and the radio frequency power supply system 1000 includes a radio frequency power supply RS and a matching parameter operation circuit 10 in any of the aforementioned embodiments.

[0054] Please refer again Figure 1 .like Figure 1 As shown, the matching parameter operation circuit 10 is used to determine the matching parameters when the RF power supply RS outputs RF power to the load RL, wherein the matching parameters include the voltage standing wave ratio. The matching parameter operation circuit 10 includes a first operation unit 100, a second operation unit 200, and a third operation unit 300. The first operation unit 100 is used to be connected to the output end of the RF power supply RS to obtain the output voltage signal Uo, and perform a first operation according to the output voltage signal Uo and the preset characteristic impedance value Z0 to obtain a first operation value OP1. The second operation unit 200 is used to be connected to the input end of the load RL to obtain the input voltage signal Ui and the input current signal Ii, and perform a second operation according to the input voltage signal Ui and the input current signal Ii to obtain a second operation value OP2. The third operation unit 300 is connected to the first operation unit 100 and the second operation unit 200 respectively, and the third operation unit 300 is used to perform a third operation according to the first operation value OP1 and the second operation value OP2 to obtain the voltage standing wave ratio.

[0055] The more specific structure of the matching parameter operation circuit 10 may refer to the relevant contents of the matching parameter operation circuit 10 in any of the aforementioned embodiments, which will not be described in detail here.

[0056] like Figure 6 As shown, the RF power source RS of the RF power system 1000 can output RF power to the load RL.

[0057] The matching parameter calculation circuit 10 and the RF power supply system 1000 of the present application, through the above-mentioned structure, can obtain matching parameters such as the voltage standing wave ratio at a faster speed and in a more convenient manner when the RF power supply RS outputs electric energy to the load RL, so as to determine whether the RF power supply RS and the load RL are impedance matched, thereby better outputting RF electric energy to the load RL.

[0058] In the multiple embodiments provided in the present application, it should be understood that the disclosed devices and equipment can be implemented in other ways. For example, the device embodiments described above are only schematic; for example, the division of units is only a logical function division, and there may be other division methods in actual implementation; for example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.

[0059] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0060] In addition, each functional unit in each embodiment of the present invention may be integrated into one processing unit, or each unit may be physically included separately, or two or more units may be integrated into one unit. The above-mentioned integrated unit may be implemented in the form of hardware or in the form of hardware plus software functional units.

[0061] The above description is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application; in the absence of conflict, the embodiments of the present application and the features in the embodiments can be combined with each other. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A matching parameter operation circuit, characterized in that: Used to determine the matching parameters when the RF power supply outputs RF power to the load, wherein the matching parameters include the voltage standing wave ratio; Wherein, the matching parameter operation circuit comprises: A first operation unit, connected to the output end of the RF power supply to obtain an output voltage signal, and performing a first operation according to the output voltage signal and a preset characteristic impedance value to obtain a first operation value; A second operation unit, used to be connected to the input end of the load to obtain an input voltage signal and an input current signal, and perform a second operation according to the input voltage signal and the input current signal to obtain a second operation value; A third operation unit is connected to the first operation unit and the second operation unit respectively, and the third operation unit is used to perform a third operation according to the first operation value and the second operation value to obtain the voltage standing wave ratio.

2. The matching parameter operation circuit according to claim 1, characterized in that: The first operation is to square the effective value of the output voltage signal and divide the result by the preset characteristic impedance value, and the first operation value is the ratio of the square of the effective value of the output voltage signal to the preset characteristic impedance value; The second operation is to perform a multiplication operation on the input voltage signal and the input current signal and obtain an effective value, and the second operation value is the effective value of the product of the input voltage signal and the input current signal.

3. The matching parameter operation circuit according to claim 2, characterized in that: The third operation is to divide the first operation value by the second operation value, and the voltage standing wave ratio is a ratio of the first operation value to the second operation value.

4. The matching parameter operation circuit according to claim 3, characterized in that: The first operation unit includes a first sampling module, a first multiplier and a first divider; The input end of the first sampling module is used to connect to the output end of the RF power supply to obtain the output voltage signal and obtain the effective value of the output voltage signal, and then output the effective value of the output voltage signal through the output end of the first sampling module; Both input ends of the first multiplier are connected to the output end of the first sampling module, and the first multiplier is used to perform multiplication operation on the effective values ​​of the two received output voltage signals, so as to obtain the square of the effective value of the output voltage signal and output it through the output end of the first multiplier; One of the output ends of the first divider is connected to the output end of the first multiplier, and the other input end of the first divider is used to receive the preset characteristic impedance value to divide the square of the effective value of the received output voltage signal by the preset characteristic impedance value to obtain the first operation value, and the output end of the first divider is connected to the third operation unit to transmit the first operation value to the third operation unit through the output end of the first divider.

5. The matching parameter operation circuit according to claim 2, characterized in that: The second operation unit includes a second sampling module, a third sampling module, a second multiplier and a fourth sampling module; The input end of the second sampling module and the input end of the third sampling module are both used to connect to the input end of the load to respectively obtain the input voltage signal and the input current signal, and output the input voltage signal and the input current signal through the output end of the second sampling module and the output end of the third sampling module respectively; The two input ends of the second multiplier are connected to the output end of the second sampling module and the output end of the third sampling module respectively, and the second multiplier is used to perform multiplication operation on the received input voltage signal and the input current signal, so as to obtain the product of the input voltage signal and the input current signal and output it through the output end of the second multiplier; The input end of the fourth sampling module is connected to the output end of the second multiplier. The fourth sampling module is used to obtain the effective value of the product of the received input voltage signal and the input current signal, so as to obtain the second operation value. The output end of the fourth sampling module is connected to the third operation unit to transmit the second operation value to the third operation unit through the output end of the fourth sampling module.

6. The matching parameter operation circuit according to claim 2, characterized in that: The third operation unit includes a second divider, two input ends of the second divider are respectively connected to the first operation unit and the second operation unit, and the second divider is used to divide the first operation value and the second operation value respectively received, so as to obtain the voltage standing wave ratio and output it through the output end of the second divider.

7. The matching parameter operation circuit according to claim 1, characterized in that: The matching parameters also include reflection coefficient; The matching parameter operation circuit further includes a fourth operation unit, which is connected to the third operation unit and is used to perform operation according to the voltage standing wave ratio to obtain the reflection coefficient.

8. The matching parameter operation circuit according to claim 7, characterized in that: The voltage standing wave ratio is a ratio of a sum of a first constant and the reflection coefficient to a difference between the first constant and the reflection coefficient.

9. The matching parameter operation circuit according to claim 1, characterized in that: The radio frequency power supply outputs radio frequency power to the load through a cable, and the preset characteristic impedance value is the impedance value of the cable.

10. A radio frequency power supply system, characterized in that: It comprises a radio frequency power supply and a matching parameter operation circuit as described in any one of claims 1 to 9.

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