Chip processing and screening equipment

Abstract

The invention belongs to the technical field, and particularly relates to chip processing and screening equipment which comprises a protection component, a transportation device is arranged on the front portion of the protection component, the protection component comprises a protection shell, a guide sliding rail is arranged on the outer surface of the protection shell, and a collection box is arranged at the end, away from the protection shell, of the guide sliding rail. A transfer device is arranged at the axis of the inner wall of the protective shell, a burning device is arranged on the right side of the inner wall of the protective shell, the transfer device comprises a fixed bearing, and rotating twisting machines are evenly arranged in an inner cavity of the fixed bearing through clamping grooves. According to the device, automatic transfer, automatic burning detection and automatic classification work of the chips can be achieved, the chips qualified in burning test and the chips unqualified in burning test are transferred in a distinguished mode, then the test efficiency is remarkably improved, the labor cost is reduced, and due to the fact that the chips are transferred in a mechanical arm clamping mode, the accuracy and reliability of the test result can be ensured.

Description

Technical Field

[0001] The invention belongs to the technical field, and in particular relates to chip processing and screening equipment. Background Art

[0002] With the rapid development of semiconductor technology, functional testing of chips has become an indispensable part of the semiconductor manufacturing process. FT testing is designed to ensure the functional integrity of chips and guarantee product performance and quality.

[0003] Since chips need to be sent to the burning machine for testing when they are mass-produced, and testing the chips takes a certain amount of time, the corresponding robotic arm also needs to be ready to pick up the chips at the pre-clamping position while waiting for testing, which leads to the low working efficiency of the high-precision robotic arm. Therefore, it is necessary to improve the chip testing efficiency, reduce the testing cost, and improve the accuracy of the test results. Summary of the Invention

[0004] In view of the shortcomings of the prior art, the present invention solves the technical problems thereof by adopting the following technical solutions: a chip processing and screening device comprises a protective component, wherein a transport device is provided at the front of the protective component; The protective component includes a protective shell, a guide rail is provided on the outer surface of the protective shell, a collection box is provided at one end of the guide rail away from the protective shell, a transfer device is provided at the axis of the inner wall of the protective shell, and a burning device is provided on the right side of the inner wall of the protective shell; The transfer device includes a fixed bearing, the inner cavity of the fixed bearing is evenly provided with rotating torque machines through a card slot, the outer surface of the rotating torque machine is fixedly connected to a guide sliding shell, the inner wall of the guide sliding shell is slidably connected to a traction sliding arm, the guide sliding shell can control the traction sliding arm to perform telescopic movement through an internal thrust device, and the traction sliding arm is provided with a modified clamping claw at one end away from the guide sliding shell. The fixed bearing always remains in a fixed state, so the rotating torque machine sleeved on the outer surface can be controlled to rotate around the fixed bearing; The transport equipment includes a fixed base, the back of the outer surface of the fixed base is fixedly connected to an axis frame plate, vertical racks are symmetrically arranged on the left and right sides of the outer surface of the axis frame plate, and conveying components are symmetrically arranged at the upper and lower ends of the vertical racks. Under the connection action of the axis frame plate, the conveying components on the upper and lower sides always maintain a parallel state to transport chips.

[0005] Furthermore, the conveying component includes a base plate, the inner cavity of the base plate is evenly provided with through sockets, the outer surface of the base plate is rotatably connected to a transport belt, the front and rear ends of the base plate are symmetrically provided with torque motors, and both sides of the outer surface of the transport belt are evenly provided with clip devices. There are two conveying components, the upper and lower ends of the vertical frame rod are fixedly connected to the inner cavity of the through sockets through fixed plugs, and the outer surface of the fixed base close to the base plate is fixedly connected to the end of the base plate away from the fixed bearing through adapter plugs. The end of the axis frame plate away from the fixed base is fixedly connected to the middle of the outer surface of the fixed bearing, the upper and lower ends of the fixed bearing are fixedly connected to the axis of the inner wall of the protective shell, and the outer surface of the vertical frame rod is fixedly connected to the outer surface of the axis frame plate.

[0006] Furthermore, the burning device includes a clustered electrical board, with transmission hoses symmetrically arranged on the upper and lower sides of the outer surface of the clustered electrical board, the interior of the transmission hose contains a transmission wire, and the bending structure of the transmission hose can enable itself to have a certain degree of deformation ability. The end of the transmission hose away from the clustered electrical board is fixedly connected to the burning machine, and the outer surface of the burning machine is symmetrically provided with bending turning rods, and the end of the bending turning rod away from the burning machine is slidably connected to a traction slide rail, and the interior of the traction slide rail can control the bending turning rod to perform horizontal sliding movement through the pull belts on both sides. The outer surface of the clustered electrical board is fixedly connected to the inner wall of the protective shell, the outer surface of the traction slide rail is fixedly connected to the outer surface of the clustered electrical board, and the end of the transmission hose away from the burning machine is fixedly connected to the inner cavity of the clustered electrical board.

[0007] The cam is fixedly mounted on a track, and the track is connected to the track by a spring, and the track is pressed downwards to push the track forward and downwards to move the track upwards.

[0008] Furthermore, the clip device includes a fixed side tube, the outer surface of which is slidably connected to an extrusion shell, the inner wall of which is fixedly connected to a pushing spring, the inner cavity of which is fixedly connected to a pressure-sensitive pad, and the outer surface of which is evenly provided with squeezing rods. The lower surface of the fixed side tube is fixedly connected to the inner cavity of the conveyor belt via an embedded rod. Since the conveyor belt is relatively thick, the fixed side tube and the conveyor belt can be connected together via the embedded rod. The outer surface of the extrusion shell is slidably connected to the outer surface of the conveyor belt, the end of the pushing spring away from the fixed side tube is fixedly connected to the inner wall of the extrusion shell, and the end of the squeezing rod away from the pressure-sensitive pad extends to the outside of the extrusion shell.

[0009] The beneficial effects of the present invention are as follows: 1. The device can realize automatic chip transportation, automatic burning detection, and automatic classification. It can distinguish and transport chips that pass the burning test and chips that fail, thereby significantly improving test efficiency and reducing labor costs. Since the chips are transported by mechanical arms, the accuracy and reliability of the test results can be ensured.

[0010] 2. Since the device adopts an array combination structure, the robotic arm can rotate independently during the chip burning process, thereby greatly reducing the waiting time of the robotic arm, thereby greatly improving the utilization rate of the machine, greatly improving the efficiency of burning and detecting chips, and improving the flexibility and work efficiency of the device.

[0011] 3. The device can ensure that the clamping force of the sliding inner plate on the chip is within an appropriate range based on the pressure indication of the pressing gasket, thereby avoiding the problem that the clamping force applied by the modified clamping jaws on the chip is too small, causing the chip to become loose during transportation, and also avoiding the problem that the clamping force applied by the modified clamping jaws on the chip is too large, causing damage to the chip.

[0012] 4. When the chip and the clamping device are completely misaligned, the outer surface of the extrusion shell is completely separated from the chip. At this time, the pressed extrusion rod will pop out from the inside of the extrusion shell. The pressure-sensitive pad feels the pressure change of the extrusion rod, which means that the twisting machine can immediately perform deflection work, avoiding the situation where the clamped chip has not been completely separated from the inside of the clamping device when the modified clamp is deflected and twisted, and the chip is broken by the modified clamp. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a front view of the present invention; Figure 2 is a cross-sectional view of the present invention; Figure 3 It is a structural schematic diagram of the transfer equipment of the present invention; Figure 4It is a structural schematic diagram of the transportation equipment of the present invention; Figure 5 It is a structural schematic diagram of the conveying component of the present invention; Figure 6 It is a structural schematic diagram of the burning device of the present invention; Figure 7 is a cross-sectional view of the modified clamping jaw of the present invention; Figure 8 is a cross-sectional view of the clip device of the present invention.

[0014] In the figure: 1. Protective components; 11. Protective housing; 12. Guide rails; 13. Collection box; 2. Transfer equipment; 21. Fixed bearing; 22. Rotating twister; 23. Guide housing; 24. Traction slide arm; 25. Modified clamp; 3. Transport equipment; 31. Fixed base; 32. Transfer rod; 33. Axis frame plate; 34. Vertical frame; 5. Transport components; 51. Base plate; 52. Through socket; 53. Torque motor; 54. Transport Transfer tape; 55. Clip device; 4. Burning device; 41. Clustering board; 42. Transmission hose; 43. Burner; 44. Bending rod; 45. Traction rail; 251. Sliding side plate; 252. Tension spring; 253. Pressing washer; 254. Sliding inner plate; 255. Connecting spring; 551. Fixed side tube; 552. Pushing spring; 553. Embedded rod; 554. Extrusion shell; 555. Pressure-sensitive pad; 556. Extrusion rod. DETAILED DESCRIPTION

[0015] The present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments. The embodiments of the present invention are provided for purposes of illustration and description and are not intended to be exhaustive or to limit the invention to the disclosed forms. Many modifications and variations will be apparent to those skilled in the art. The embodiments are chosen and described to better illustrate the principles of the invention and its practical application, and to enable those skilled in the art to understand the invention and design various embodiments with various modifications suitable for specific applications.

[0016] Example 1, please refer to Figures 1-6 , the present invention provides a technical solution: a chip processing and screening device, comprising a protection component 1, a transportation device 3 is provided in front of the protection component 1; The protective component 1 includes a protective shell 11, the outer surface of which is provided with a guide rail 12, and a collection box 13 is provided at the end of the guide rail 12 away from the protective shell 11. A transfer device 2 is provided at the axis center of the inner wall of the protective shell 11, and a burning device 4 is provided on the right side of the inner wall of the protective shell 11; The transfer device 2 includes a fixed bearing 21, the inner cavity of the fixed bearing 21 is evenly provided with rotating torque machines 22 through a card slot, the outer surface of the rotating torque machine 22 is fixedly connected to a guide sliding shell 23, and the inner wall of the guide sliding shell 23 is slidably connected to a traction slide arm 24. The guide sliding shell 23 can control the traction slide arm 24 to perform telescopic movement through an internal thrust device. The end of the traction slide arm 24 away from the guide sliding shell 23 is provided with a modified clamping claw 25. The fixed bearing 21 always remains in a fixed state, so the rotating torque machine 22 sleeved on the outer surface can be controlled to rotate around the fixed bearing 21; The transport equipment 3 includes a fixed base 31, and the back of the outer surface of the fixed base 31 is fixedly connected to an axial frame plate 33. Vertical frame rods 34 are symmetrically arranged on the left and right sides of the outer surface of the axial frame plate 33. Conveying components 5 are symmetrically arranged at the upper and lower ends of the vertical frame rods 34. Under the connection action of the axial frame plate 33, the conveying components 5 on the upper and lower sides always maintain a parallel state to transport chips.

[0017] The conveying component 5 includes a base plate 51, the inner cavity of which is uniformly provided with through-holes 52. A conveying belt 54 is rotatably connected to the outer surface of the base plate 51. Torque motors 53 are symmetrically provided at the front and rear ends of the base plate 51, and clip devices 55 are uniformly provided on both sides of the outer surface of the conveying belt 54. There are two conveying components 5. The upper and lower ends of the vertical frame rods 34 are fixedly connected to the inner cavity of the through-holes 52 via fixed plug rods. The outer surface of the fixed base 31, on both sides near the base plate 51, is fixedly connected to the end of the base plate 51 away from the fixed bearing 21 via adapter plug rods 32. The end of the axis frame plate 33 away from the fixed base 31 is fixedly connected to the middle of the outer surface of the fixed bearing 21. The upper and lower ends of the fixed bearing 21 are fixedly connected to the inner wall of the protective shell 11 at the axis center. The outer surface of the vertical frame rods 34 is fixedly connected to the outer surface of the axis frame plate 33.

[0018] The burning device 4 includes a clustered electrical board 41. Transmission hoses 42 are symmetrically arranged on the upper and lower sides of the outer surface of the clustered electrical board 41. The interior of the transmission hose 42 contains a transmission wire. The bending structure of the transmission hose 42 enables it to have a certain degree of deformation. The end of the transmission hose 42 away from the clustered electrical board 41 is fixedly connected to a burning machine 43. Bend rods 44 are symmetrically arranged on both sides of the outer surface of the burning machine 43. The end of the bent rod 44 away from the burning machine 43 is slidably connected to a traction slide 45. The interior of the traction slide 45 can control the bent rod 44 to slide horizontally through the pull belts on both sides. The outer surface of the clustered electrical board 41 is fixedly connected to the inner wall of the protective shell 11. The outer surface of the traction slide 45 is fixedly connected to the outer surface of the clustered electrical board 41. The end of the transmission hose 42 away from the burning machine 43 is fixedly connected to the inner cavity of the clustered electrical board 41.

[0019] Use the transport equipment 3 to continuously transport the detection chip to the interior of the protective shell 11, use the robotic arm to vertically insert the chip into the position between the clamping devices 55 on both sides of the transport component 5, and after the chip is clamped, the torque motors 53 on both sides rotate the bearings, and the rolling friction force drives the transport conveyor belt 54 to rotate around the base plate 51, thereby transporting the chip to the interior of the protective shell 11.

[0020] When the chip is transported to the rear end of the base plate 51, the rotating twist machine 22 at the corresponding height position rotates around the fixed bearing 21, and the modified clamping claw 25 faces the chip, and then guides the sliding shell 23 to push out the traction slide arm 24, so that the modified clamping claw 25 moves toward the chip of the conveying component 5, and then the modified clamping claw 25 clamps the chip, and then the conveyor belt 54 continues to rotate to separate the chip from the clamping device 55. Then, when the chip and the clamping device 55 are completely offset, the rotating twist machine 22 rotates 90° counterclockwise around the fixed bearing 21, and the chip faces the burning device 4 on the right side of the inner wall of the protective shell 11, ready for the chip burning test.

[0021] The guide sliding shell 23 pushes the traction sliding arm 24, and the chip in the vertical direction is inserted into the socket of the burner 43 through the modified clamping claw 25. The chip performs power-on burning detection work inside the burner 43. During the detection time, the twist machine 22 is turned to rotate the guide sliding shell 23 to the initial position, and the chip transportation work is continued, and the chip is inserted into the remaining sockets of the burner 43.

[0022] When inserting the remaining chips, since the slot port of the burner 43 and the clip device 55 have a certain angle, directly inserting the chip will cause the chip to bend or not be firmly plugged in. Therefore, the traction slide rail 45 on the outer surface of the cluster circuit board 41 will be used to control the bending rotation rod 44 to slide, so that the burner 43 can slide horizontally, and the remaining plug-in ports of the burner 43 are facing the chip inside the clip device 55. At this time, the clip device 55 can directly insert the chip into the burner 43 to perform chip burning detection.

[0023] After the chip inspection is completed, if the chip is qualified, the transfer equipment 2 at the corresponding height will take the chip out from the inside of the burner 43 through the modified clamp 25, and transfer it to the guide slide 12 at the rear, and then transport it to the collection box 13 at the rear through the guide slide 12. If the chip burning fails, it means that the chip is a defective product. At this time, the chip will be transferred to the guide slide 12 on the left and collected in the collection box 13 on the left. Then, the twist machine 22 will continue to deflect and twist the guide slide shell 23 to a position facing the transportation equipment 3 to continue the chip transfer work.

[0024] Example 2, please refer to Figures 1-8The present invention provides a technical solution: based on the first embodiment, the modified clamping claw 25 includes a sliding side plate 251, the back of the sliding side plate 251 is slidably connected to the traction slide arm 24 away from the end of the guide slide shell 23 through a traction slide rod, and a slide groove is opened in the inner cavity of the traction slide arm 24 to guide the sliding side plate 251 to slide. Under the action of the traction component inside the slide groove, the sliding side plates 251 on both sides can move close to each other, thereby clamping the chip, and the back of the sliding side plate 251 is fixedly connected to the sliding slide rod with a connecting spring 255, and the inner wall of the sliding side plate 251 is slidably connected to the sliding inner plate 254, and the upper and lower sides of the outer surface of the sliding inner plate 254 are slidably connected to the inner wall of the sliding side plate 251 by tension springs 252. The middle part of the inner cavity of the sliding side plate 251 is fixedly connected to a pressing washer 253, which is fixed in the inner cavity of the sliding side plate 251 and contacts the outer surface of the sliding inner plate 254 through its pressure rod portion.

[0025] The clip device 55 includes a fixed side tube 551, the outer surface of which is slidably connected to an extrusion shell 554. A pushing spring 552 is fixedly connected to the inner wall of the fixed side tube 551. A pressure-sensitive pad 555 is fixedly connected to the inner cavity of the extrusion shell 554. Extrusion rods 556 are evenly arranged on the outer surface of the pressure-sensitive pad 555. The lower surface of the fixed side tube 551 is fixedly connected to the inner cavity of the conveyor belt 54 via embedded rods 553. Because the conveyor belt 54 is relatively thick, the embedded rods 553 can connect the fixed side tube 551 and the conveyor belt 54 together. The outer surface of the extrusion shell 554 is slidably connected to the outer surface of the conveyor belt 54. The end of the pushing spring 552 away from the fixed side tube 551 is fixedly connected to the inner wall of the extrusion shell 554. The end of the extrusion rod 556 away from the pressure-sensitive pad 555 extends to the outside of the extrusion shell 554.

[0026] When clamping the chip, the traction device at the end of the traction slide arm 24 pulls the sliding side plates 251 on both sides in the direction of fitting the chip through the pull rod, and then the connecting spring 255 is squeezed, and then the sliding inner plates 254 on both sides are preferentially squeezed against the sides of the chip. As the sliding side plates 251 continue to move, the sliding inner plates 254 will slide relative to the sliding side plates 251 due to the squeezing force, thereby pushing the pressure rod of the pressing washer 253. According to the pressure indication of the pressing washer 253, the clamping force of the sliding inner plate 254 on the chip is ensured to be within an appropriate range.

[0027] When the chip is transported through the conveying component 5, the extrusion shells 554 on both sides of the conveyor belt 54 can slide toward the axis through the pushing springs 552 inside the fixed side cylinder 551, thereby vertically clamping the chip for transportation. When the chip and the clamping device 55 are completely misaligned, it means that the chip has completely slipped out from between the clamping devices 55 on both sides, that is, the outer surface of the extrusion shell 554 is completely separated from the chip. At this time, the pressed extrusion rod 556 will pop out from the inside of the extrusion shell 554, and the pressure-sensitive pad 555 will feel the pressure change of the extrusion rod 556, which means that the rotating twister 22 can immediately perform the deflection work.

[0028] Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field and related fields without making creative efforts should fall within the scope of protection of the present invention. Structures, devices, and operating methods not specifically described and explained in the present invention shall be implemented in accordance with conventional means in the field unless otherwise specified or limited.

Claims

1. A chip processing and screening device, comprising a protective component (1), wherein a transport device (3) is arranged in front of the protective component (1), characterized in that: The protective component (1) comprises a protective shell (11), a guide rail (12) is provided on the outer surface of the protective shell (11), a collection box (13) is provided at one end of the guide rail (12) away from the protective shell (11), a transfer device (2) is provided at the axis of the inner wall of the protective shell (11), and a burning device (4) is provided on the right side of the inner wall of the protective shell (11); The transfer device (2) comprises a fixed bearing (21), the inner cavity of the fixed bearing (21) is evenly provided with a rotating twister (22) through a slot, the outer surface of the rotating twister (22) is fixedly connected to a guide sliding shell (23), the inner wall of the guide sliding shell (23) is slidably connected to a traction sliding arm (24), and the end of the traction sliding arm (24) away from the guide sliding shell (23) is provided with a modified clamping claw (25); The transport device (3) comprises a fixed base (31), the back of the outer surface of the fixed base (31) being fixedly connected to an axis frame plate (33), vertical frame rods (34) being symmetrically arranged on the left and right sides of the outer surface of the axis frame plate (33), and conveying components (5) being symmetrically arranged at the upper and lower ends of the vertical frame rods (34).

2. The chip processing and screening equipment according to claim 1, characterized in that: The conveying component (5) comprises a base plate (51), the inner cavity of the base plate (51) is evenly provided with through sockets (52), the outer surface of the base plate (51) is rotatably connected to a transport belt (54), torque motors (53) are symmetrically arranged at the front and rear ends of the base plate (51), and clamping devices (55) are evenly arranged on both sides of the outer surface of the transport belt (54).

3. The chip processing and screening equipment according to claim 2, characterized in that: The number of the conveying components (5) is two, and the upper and lower ends of the vertical frame rod (34) are fixedly connected to the inner cavity of the insertion opening (52) through a fixed plug rod, and the two sides of the outer surface of the fixed base (31) close to the base plate (51) are fixedly connected to one end of the base plate (51) away from the fixed bearing (21) through the adapter plug rod (32).

4. The chip processing and screening equipment according to claim 3, characterized in that: One end of the axis frame plate (33) away from the fixed base (31) is fixedly connected to the middle of the outer surface of the fixed bearing (21), the upper and lower ends of the fixed bearing (21) are fixedly connected to the axis of the inner wall of the protective shell (11), and the outer surface of the vertical frame rod (34) is fixedly connected to the outer surface of the axis frame plate (33).

5. The chip processing and screening equipment according to claim 1, characterized in that: The burning device (4) comprises a clustering plate (41), transmission hoses (42) are symmetrically arranged on the upper and lower sides of the outer surface of the clustering plate (41), one end of the transmission hose (42) away from the clustering plate (41) is fixedly connected to a burning machine (43), and bending rotating rods (44) are symmetrically arranged on the two sides of the outer surface of the burning machine (43), and one end of the bending rotating rod (44) away from the burning machine (43) is slidably connected to a traction slide rail (45).

6. The chip processing and screening equipment according to claim 5, characterized in that: The outer surface of the clustering plate (41) is fixedly connected to the inner wall of the protective shell (11), the outer surface of the traction slide rail (45) is fixedly connected to the outer surface of the clustering plate (41), and one end of the transmission hose (42) away from the burner (43) is fixedly connected to the inner cavity of the clustering plate (41).

7. The chip processing and screening equipment according to claim 2, characterized in that: The modified clamp (25) comprises a sliding side plate (251), the back of the sliding side plate (251) is slidably connected to one end of the traction slide arm (24) away from the guide slide shell (23) via a traction slide rod, and the back of the sliding side plate (251) is fixedly connected to a connecting spring (255) via the traction slide rod, the inner wall of the sliding side plate (251) is slidably connected to a sliding inner plate (254), the upper and lower sides of the outer surface of the sliding inner plate (254) are slidably connected to the inner wall of the sliding side plate (251) via tension springs (252), and a pressing washer (253) is fixedly connected to the middle of the inner cavity of the sliding side plate (251).

8. The chip processing and screening equipment according to claim 7, characterized in that: The clip device (55) comprises a fixed side tube (551), the outer surface of the fixed side tube (551) is slidably connected to an extrusion shell (554), the inner wall of the fixed side tube (551) is fixedly connected to a pushing spring (552), the inner cavity of the extrusion shell (554) is fixedly connected to a pressure-sensitive pad (555), and the outer surface of the pressure-sensitive pad (555) is evenly provided with extrusion rods (556).

9. The chip processing and screening equipment according to claim 8, characterized in that: The lower surface of the fixed side cylinder (551) is fixedly connected to the inner cavity of the conveying belt (54) via an embedded rod (553); the outer surface of the extrusion shell (554) is slidably connected to the outer surface of the conveying belt (54); one end of the pushing spring (552) away from the fixed side cylinder (551) is fixedly connected to the inner wall of the extrusion shell (554); and one end of the extrusion rod (556) away from the pressure-sensitive pad (555) extends to the outside of the extrusion shell (554).

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