Vacuum ion sputtering coating device for X-ray ceramic tube

Abstract

The invention provides a vacuum ion sputter coating device for an X-ray ceramic tube. The vacuum ion sputter coating device comprises a ceramic tube, and a cathode assembly and an anode assembly are installed at the upper end and the lower end of the ceramic tube respectively; the cathode assembly comprises a core column assembly, a cathode seat, a getter, a lamp filament and a focusing head, the cathode seat is hermetically welded at an upper end tube opening of the ceramic tube, the focusing head is hermetically welded in the cathode seat, the lower end of the focusing head extends into the upper end tube opening, and the core column assembly is hermetically inserted in the focusing head; the lamp filament is installed at the lower end of the core column assembly and located in the extending section of the focusing head. The core column assembly comprises a core column kovar sleeve, a core column ceramic chip, a pair of core columns and an exhaust pipe, and the core column kovar sleeve is welded in the focusing head in a sealed mode. The ceramic tube solves the problem that in the prior art, small size and large voltage cannot be achieved, the structural layout and material selection are reasonable, the size of the X-ray tube is shortened under the condition that high voltage is kept, and the ceramic tube is good in insulation and heat dissipation performance and easy to produce.

Description

Technical Field

[0001] The present invention relates to the technical field of X-ray tubes, and particularly to a vacuum ion sputtering coating device for an X-ray ceramic tube. Background Art

[0002] The X-ray tube is an X-ray generating device, and the X-rays generated by it can be used for non-destructive detection of the interior of an object, and are widely used in the fields of medical treatment, scientific research, material analysis, etc. With the progress of the times and the development of society, in modern construction, portable security inspection and small portable X-ray analysis instruments for random use in the wild are the most important. Portable handheld security inspection equipment requires small X-ray tubes. Currently known X-ray tube technologies cannot achieve small-volume and portable applications. Traditional X-ray tubes are relatively large in volume, and the voltage is also limited to below 70 KV. For some important application requirements, X-ray energies higher than those generated by the current generation of compact X-ray sources suitable for handheld use are required.

[0003] These include the accurate identification and quantification of elements deep in certain materials, as well as the identification of certain heavy elements (such as lead and cadmium), imaging of objects inside thin metal shells (such as car doors or metal lockers), and numerous medical and dental imaging applications. For these applications, in order to generate X-rays, a higher voltage source (such as 80 to 200 kV) is usually required, which is large in volume in the structural design of equipment and instruments. In this design, a large space is required. For the miniaturization of the structural design, it is necessary to design and reduce the volume of the X-ray tube. Therefore, it is necessary to innovate the existing technology and obsolete technology, and invent a micro high-voltage transmission X-ray ceramic tube.

[0004] In order to further improve the high-voltage resistance performance, an insulating film is plated on the inner wall of the ceramic tube, but the existing coating devices have a slow coating efficiency for circular tube bodies. Summary of the Invention

[0005] In view of the above problems, the present invention provides a vacuum ion sputtering coating device for an X-ray ceramic tube. This ceramic tube solves the problem in the prior art that a small volume and high voltage cannot be achieved, rationalizes the structural layout and material selection, shortens the volume of the X-ray tube while maintaining a high voltage, has good insulation and heat dissipation properties, and is easy to produce.

[0006] To solve the above problems, the technical solution adopted by the present invention is: A micro high-voltage transmission X-ray ceramic tube, comprising a ceramic tube, and a cathode assembly and an anode assembly are respectively installed at the upper and lower ends of the ceramic tube; The cathode assembly comprises a stem assembly, a cathode seat, a getter, a filament and a focusing head. The cathode seat is sealed and welded to the upper end of the ceramic tube. The focusing head is sealed and welded in the cathode seat, and the lower end extends into the upper end of the tube. The stem assembly is sealed and inserted in the focusing head. The filament is installed at the lower end of the stem assembly and is located in the extension section of the focusing head. The stem assembly comprises a stem cover, a stem ceramic sheet, a pair of stems and an exhaust pipe, the stem cover is sealed and welded in a focusing head, the stem ceramic sheet sealing gasket is arranged at the bottom of the stem cover, the pair of stems and the exhaust pipe are fixedly inserted on the stem cover, the lower ends of the pair of stems extend into the extension section of the focusing head, the two ends of the filament are electrically connected to the pair of stems, and the getter is arranged at the bottom of the stem cover; The anode assembly includes an anode seat, a target piece, a target piece seat and an anode tube. The anode seat is sealed and welded to the lower end of the ceramic tube. The target piece seat is welded to the middle of the anode seat. The target piece is installed in the target piece seat. The anode tube is fixedly installed on the inner side of the anode seat and located in the lower end of the tube. The centers of the filament, the focusing head, the anode tube, the target piece and the transmission window are all on the same axis. The bottom of the anode seat is provided with a transmission window parallel to the target sheet, and the inner surface of the target sheet is plated with a metal film of tungsten; The inner surface of the ceramic tube is plated with an insulating film, which plays a role of high resistance conduction, with a surface resistivity range of 10^9-10^14OhM. The coating prevents electrical breakdown and improves the withstand voltage value. It guides the accumulation of static charge and avoids multiple electrons and avalanche effects generated by discharge.

[0007] Preferably, the target piece is any one of titanium, beryllium and diamond.

[0008] Preferably, the target sheet is a beryllium sheet.

[0009] Preferably, a mounting opening is provided on the cathode seat, the focusing head consists of a focusing end and a sleeve end, the sleeve end sealing sleeve is arranged in the mounting opening, the core column assembly is sealed and sleeved in the sleeve end, the focusing end extends to the upper end tube mouth, and the filament is located in the focusing end.

[0010] Preferably, the outer diameter of the ceramic tube is ø12mm-ø25mm, the length is 30mm-50mm, and the material of the ceramic tube is 99 porcelain.

[0011] Preferably, a cathode radiator is mounted on the cathode seat, and an anode radiator is mounted on the anode seat. The cathode radiator is a heat dissipation sleeve, which is mounted on the cathode seat and the upper end pipe opening, and the inner wall of the heat dissipation sleeve is attached to the cathode seat. The anode radiator is a heat dissipation base, which wraps the anode seat, and the middle part of the heat dissipation base touches the edge of the target sheet, so as to extract the heat from the target sheet and the anode seat.

[0012] Preferably, the thickness of the tungsten metal film is 2 µm - 18 µm.

[0013] Preferably, the upper ends of the pair of core columns are electrically connected to the cathode lead, and the anode base is electrically connected to the anode lead. A bipolar high-voltage design is adopted, with positive high voltage +V = 35 - 100 KV and negative high voltage -V = -35 - -100 KV, which alleviates the insulation pressure of the unipolar high voltage.

[0014] Preferably, the insulating film is chromium oxide, and the insulating film is coated by a vacuum ion sputtering coating device.

[0015] The present invention also discloses a vacuum ion sputtering coating device, including a base, on which a sealing cover is fixedly installed. A sealing lid is provided at the cover opening of the sealing cover. A vertical installation cylinder is fixedly installed at the center of the base. A target cylinder is sleeved on the installation cylinder. A rotating assembly for driving the target cylinder to rotate is installed on the base. A turntable for placing a ceramic tube is also installed on the base. A cathode plate attached to the inner wall of the target cylinder is embedded on one side of the installation cylinder. An anode plate is installed on the inner wall of the sealing cover corresponding to the cathode plate. A magnetron assembly is also installed in the installation cylinder. A vacuum tube and an argon tube are connected to the top of the sealing cover.

[0016] The beneficial effects of the present invention are as follows: 1. The shell of the X-ray tube uses a 99 porcelain ceramic shell. Compared with a glass tube, the ceramic tube has better insulation performance and can more effectively prevent current from passing through, reducing problems such as leakage and electron breakdown. An insulating film is plated on the inner wall of the ceramic tube. The function of the coating is to play a role in high-resistance conduction, with a surface resistivity range of 10^9 - 10^14 OhM. The coating prevents electric breakdown and increases the breakdown voltage, conducts away the accumulation of static charges, avoids the generation of multiple electrons and avalanche effects caused by discharge, can conduct away the accumulated secondary electrons, avoids oxidation caused by the generation of arcs by secondary electrons, and improves the high-voltage resistance performance.

[0017] 2. Rational structural layout and material selection, designing the tube diameter and tube length, shortening the volume of the X-ray tube and the external dimensions of the X-ray tube: outer diameter ø12 mm - ø25 mm, length 30 mm - 50 mm. Currently, it is the smallest X-ray tube with a relatively high voltage in China, with a voltage ≤ 180 KV, meeting the market needs for portability and handheld instruments.

[0018] 3. The window is a transmissive window, with a smaller volume, stronger electron energy, better imaging effect, a wider electron beam emission angle (the wide range can reach 60 degrees - 105 degrees). The target plate and the transmissive window are designed in parallel, which is beneficial for designing the X-ray tube to be shorter and smaller, and is beneficial for the integration of portable X-ray instruments.

[0019] 4. Adopt a bipolar high-voltage design, with positive high voltage +V = 35 - 100 KV and negative high voltage -V = -35 - -100 KV, alleviating the insulation pressure of single-pole high voltage.

[0020] 5. The target of the anode uses the technology of beryllium single-sided ion sputtering tungsten film plating. The controllable thickness of the tungsten coating of the metal film is 2 µm - 18 µm, reasonably generating X-rays with strong energy, which can penetrate the target to achieve transmissive end-face emission. The cathode filament emission end and the anode transmissive window are circularly designed, and the X-rays are emitted linearly.

[0021] 6. Both the cathode and the anode are provided with radiator heat dissipation units, which can effectively conduct the heat generated when the electron beam hits the target in a timely manner, effectively protecting the beryllium and tungsten layers from damage risk, and being beneficial to extending the life of the X-ray tube.

[0022] 7. The cathode assembly and the anode assembly of the X-ray ceramic tube are designed as a set, which is convenient for laser welding with the tube body for sealing, with higher reliability and faster production efficiency.

[0023] 8. The insulating film is coated by a vacuum ion sputtering coating device. The ceramic tube can be directly placed on the turntable, the inside of the sealing cover is evacuated, argon is introduced, and high-voltage direct current is applied between the anode and the cathode. Due to the glow discharge, electrons excite inert gas to generate argon positive ions. The positive ions move at high speed towards the target material, bombarding the target material atoms out. The direction is controlled by the magnetron assembly to deposit it on the ceramic tube to form a thin film. The target material cylinder rotates and the consumables are uniform. The rotation of the ceramic tube can achieve uniform coating on the inner surface within one circle, with convenient use and fast coating speed. Description of the Drawings

[0024] Figure 1 is a perspective view of the present invention; Figure 2 is a cross-sectional view of the present invention; Figure 3 is a schematic structural diagram of the core column assembly proposed by the present invention; Figure 4 is a schematic cross-sectional view of the vacuum ion sputtering coating device proposed by the present invention; Figure 5 is a perspective view of the vacuum ion sputtering coating device proposed by the present invention; Figure 6 is Figure 4 a schematic enlarged view of the structure at A in

[0025] In the figure: 1 ceramic tube, 101 insulating film, 2 cathode assembly, 201 core column assembly, 2011 kovar sleeve of the core column, 2012 exhaust pipe, 2013 core column, 2014 ceramic piece of the core column, 202 cathode base, 203 focusing head, 204 cathode radiator, 205 getter, 206 filament, 3 anode assembly, 301 anode tube, 302 anode radiator, 303 target, 304 anode base, 305 transmissive window, 4 cathode lead, 5 anode lead, 6 base, 7 sealing cover, 8 sealing cap, 9 vacuum tube, 10 argon tube, 11 anode plate, 12 motor, 13 mounting cylinder, 14 turntable, 15 anti-slip pad, 16 upper pressing cover, 17 cathode plate, 18 magnetron assembly, 19 target cylinder, 20 lower rotating ring, 21 second magnetic ring, 22 first magnetic ring, 23 external gear ring, 24 gear, 25 internal gear ring, 26 transmission cavity. Detailed implementation manners

[0026] In order to make the above objects, features and advantages of the present invention more obvious and understandable, the following will describe the detailed implementation manners of the present invention in conjunction with the accompanying drawings. Many specific details are set forth in the following description in order to fully understand the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present invention. Therefore, the present invention is not limited by the specific implementations disclosed below.

[0027] It should be noted that when an element is referred to as being "fixed to" another element, it can be directly on the other element or there can also be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are only for the purpose of illustration and do not represent the only implementation manners.

[0028] Referring to Figures 1-3 , a micro high-voltage transmissive X-ray ceramic tube, comprising a ceramic tube 1, a cathode assembly 2 and an anode assembly 3 are respectively installed at the upper and lower ends of the ceramic tube 1. The outer diameter of the ceramic tube 1 is in the range of ø12mm - ø25mm, and the length is in the range of 30mm - 50mm. The material of the ceramic tube 1 is 99 porcelain. Compared with a glass tube, the ceramic tube 1 has better insulation performance to effectively prevent current from passing through, reduce problems such as leakage and electron breakdown, and has wear resistance, corrosion resistance, heat resistance, high voltage resistance and insulation performance, and is an ideal vacuum tube shell.

[0029] The cathode assembly 2 includes a stem assembly 201, a cathode base 202, a getter 205, a filament 206, and a focusing head 203. The cathode base 202 is hermetically welded to the upper end opening of the ceramic tube 1. The focusing head 203 is hermetically welded inside the cathode base 202 and extends downward into the upper end opening. The stem assembly 201 is hermetically inserted into the focusing head 203. The filament 206 is installed at the lower end of the stem assembly 201 and is located within the extended section of the focusing head 203. The filament 206 is made of tungsten wire. When the filament 206 is heated, it emits electrons, which are focused into an electron beam under high voltage through the focusing head 203.

[0030] The stem assembly 201 includes a stem kovar sleeve 2011, a stem ceramic sheet 2014, a pair of stems 2013, and an exhaust pipe 2012. The stem kovar sleeve 2011 is hermetically welded inside the focusing head 203. The stem ceramic sheet 2014 is hermetically gasketed at the bottom of the stem kovar sleeve 2011. The pair of stems 2013 and the exhaust pipe 2012 are both fixedly inserted into the stem kovar sleeve 2011. The lower ends of the pair of stems 2013 extend into the extended section of the focusing head 203. The two ends of the filament 206 are electrically connected to the pair of stems 2013. The getter 205 is placed at the bottom of the stem kovar sleeve 2011. The exhaust pipe 2012 is used to connect to an external vacuum pump to evacuate the inside of the ceramic tube 1. The design of the getter 205 can absorb a small amount of gas generated by each component inside the ceramic tube 1 during use, ensuring the internal vacuum state and improving insulation.

[0031] Furthermore, the upper ends of the pair of stems 2013 are both electrically connected to the cathode lead 4, and the anode base 304 is electrically connected to the anode lead 5. A bipolar high-voltage design is adopted, with the positive high voltage +V = 35 - 100 KV and the negative high voltage -V = -35 - -100 KV, alleviating the insulation pressure of the unipolar high voltage.

[0032] The anode assembly 3 includes an anode base 304, a target 303, a target holder, and an anode tube 301. The anode base 304 is hermetically welded to the lower end opening of the ceramic tube 1. The target holder is welded to the middle of the anode base 304. The target 303 is installed inside the target holder. The anode tube 301 is fixedly installed inside the anode base 304 and is located within the lower end opening. The centers of the filament 206, the focusing head 203, the anode tube 301, the target 303, and the transmission window 305 are all on the same axis. The high-speed electron beam is focused by the anode tube 301 and hits the anode target 303. The electron kinetic energy is converted into X-rays, which penetrate the target 303 and are emitted through the transmission window 305. The transmission window 305 is smaller in volume, the electron energy is stronger, the imaging effect is better, the electron beam output angle is wider (the width can reach 60 degrees - 105 degrees), and the target 303 and the transmission window 305 are designed in parallel, which is beneficial for the X-ray tube to be designed shorter and smaller in volume, and is beneficial for the integration of a portable X-ray instrument.

[0033] A transmission window 305 parallel to the target piece 303 is provided at the bottom of the anode seat 304. The inner surface of the target piece 303 is coated with a metal film tungsten with a thickness of 2µm-18µm. The film can also be coated by a vacuum ion sputtering coating device to reasonably generate strong energy X-rays that can penetrate the target piece 303 to achieve transmission end face emission. The cathode filament emission end and the anode transmission window are circularly designed, and the X-rays are emitted in a straight line.

[0034] The inner surface of the ceramic tube 1 is plated with an insulating film 101, which is chromium oxide. The insulating film 101 is plated by a vacuum ion sputtering coating device. The coating has the effect of high resistance conduction. The surface resistivity ranges from 10^9 to 10^14OhM. The coating prevents electrical breakdown and improves the withstand voltage. The accumulation of static charge is derived to avoid multiple electrons and avalanche effects generated by discharge. The insulating film 101 can guide away the accumulated secondary electrons to avoid oxidation caused by arcing generated by secondary electrons, thereby improving the high voltage resistance performance.

[0035] The target piece 303 is any one of titanium, beryllium and diamond. Beryllium has low density, is easier for rays to penetrate, and has strong electron energy; diamond has high cost. As the preferred transmission end-face emission, the distance from the object to the focus is shortened, which is conducive to clearer imaging and further improves applicability.

[0036] Furthermore, a mounting opening is provided on the cathode seat 202, and the focusing head 203 is composed of a focusing end and a sleeve end, the sleeve end sealing sleeve is arranged in the mounting opening, the core column assembly 201 is sealed and sleeved in the sleeve end, the focusing end extends to the upper end tube mouth, and the filament 206 is located in the focusing end. They are sleeved and installed in sequence, which is easy to assemble and weld, has higher reliability, and faster production efficiency.

[0037] The welding in the assembly room adopts laser pulse spot welding machine. The advantages of pulse welding machine are: low heat generation, not easy to cause oxidation damage to parts during processing, less slag spattering during welding, high cleanliness of parts after processing, ensuring the quality of the entire product.

[0038] In addition, a cathode radiator 204 is mounted on the cathode seat 202, and an anode radiator 302 is mounted on the anode seat 304. The cathode radiator 204 is a heat dissipation sleeve, which is mounted on the cathode seat 202 and the upper end pipe mouth. The inner wall of the heat dissipation sleeve is attached to the cathode seat 202. The anode radiator 302 is a heat dissipation base, which wraps the anode seat 304, and the middle part contacts the edge of the target piece 303, and is used to conduct heat from the target piece 303 and the anode seat 304. It can timely and effectively conduct the heat concentrated on the target by the electron beam, effectively protect the beryllium and tungsten layers from damage risks, and is beneficial to extending the life of the X-ray tube.

[0039] To improve the heat dissipation effect, high thermal conductivity glue is filled in the gaps between the cathode radiator 204 and the cathode base 202 and between the anode radiator 302 and the anode base 304, further improving the heat dissipation effect.

[0040] This X-ray tube has a high ray generation efficiency and irradiation flux density. It abandons the reflective thick target and selects a transmission target with a thickness that can be accurately controlled to a few micrometers. The X-rays can directly pass through the thin target and emit from the window, with less energy loss.

[0041] Referring to Figures 4-6 Accordingly, the present invention also discloses a vacuum ion sputtering coating device, including a base 6, on which a sealing cover 7 is fixedly installed. A sealing lid 8 is provided on the cover opening of the sealing cover 7. A vertical installation cylinder 13 is fixedly installed at the center of the base 6. A target cylinder 19 is sleeved on the installation cylinder 13. A rotating assembly for driving the target cylinder 19 to rotate is installed on the base 6. A turntable 14 for placing the ceramic tube 1 is also installed on the base 6. A cathode plate 17 attached to the inner wall of the target cylinder 19 is embedded on one side of the installation cylinder 13. An anode plate 11 is installed on the inner wall of the sealing cover 7 corresponding to the cathode plate 17. A magnetron assembly 18 is also installed in the installation cylinder 13. A vacuum tube 9 and an argon tube 10 are connected to the top of the sealing cover 7.

[0042] Furthermore, a lower rotating ring 20 is sleeved at the bottom of the installation cylinder 13. The lower rotating ring 20 is rotatably connected to the base 6. An upper pressing cover 16 is provided on the top of the installation cylinder 13. Annular clamping grooves for clamping the target cylinder 19 are provided on the opposite surfaces of the upper pressing cover 16 and the lower rotating ring 20, which is easy to disassemble and replace different target cylinders 19 to meet the coating of the insulating film 101 or the target piece 303.

[0043] Specifically, the rotating assembly includes a transmission cavity 26 provided in the base 6. An internal gear ring 25 extending into the transmission cavity 26 is fixed to the bottom of the lower rotating ring 20. An external gear ring 23 is rotatably connected to the outside of the internal gear ring 25 in the transmission cavity 26. A motor 12 is installed at the bottom of the base 6. The output end of the motor 12 extends into the transmission cavity 26 and is fixed with a gear 24. The gear 24 meshes with the external gear ring 23 and the internal gear ring 25. A first magnetic ring 22 is embedded at the top of the external gear ring 23. A second magnetic ring 21 magnetically attracted to the first magnetic ring 22 is embedded at the bottom of the turntable 14. Driving the motor 12 to drive the gear 24 to rotate, driving the lower rotating ring 20 to rotate through the internal gear ring 25, and then driving the clamped target cylinder 13 to rotate. The rotation of the target cylinder 13 makes the consumables uniform. At the same time, the external gear ring 23 synchronously drives the turntable 14 to rotate through the magnetic attraction of the first magnetic ring 22 and the second magnetic ring 21, and then drives the ceramic tube 1 to rotate, enabling uniform coating of the inner surface within one circle.

[0044] Furthermore, a non-slip mat 15 is laid on the upper surface of the turntable 14. The size of the turntable 14 can meet the placement of ceramic tubes 1 with different diameters, increasing the friction force, and thus enabling the ceramic tube 1 to rotate synchronously with the turntable 14.

[0045] Furthermore, the magnetron assembly 18 is composed of three vertically arranged magnetic strips, and the magnetic induction lines between the three magnetic strips can guide the target atoms to move towards the inner wall of the ceramic tube 1.

[0046] Open the sealing cover 8, place the ceramic tube 1 on the turntable 14, cover the sealing cover 8, evacuate the inside of the sealing cover 7 through the vacuum tube 9 connected to a vacuum pump, then introduce the inert gas argon into the inside through the argon tube 10, apply a high-voltage direct current between the anode plate 17 and the cathode plate 11. The electrons generated by the glow discharge excite the inert gas to generate argon positive ions. The positive ions move at high speed towards the target cylinder 19, eject the target atoms, and use the magnetron assembly 18 to control the direction and deposit them on the ceramic tube 1 to form a film. Start the motor 12 to drive the gear 24 to rotate, drive the lower rotating ring 20 to rotate through the internal gear ring 25, and then drive the mounted target cylinder 13 to rotate. The rotation of the target cylinder 13 consumes materials evenly. At the same time, the external gear ring 23 drives the turntable 14 to rotate synchronously through the magnetic suction force of the first magnetic ring 22 and the second magnetic ring 21, and then drives the ceramic tube 1 to rotate, which can achieve uniform coating on the inner surface within one circle, is convenient to use, and has a fast coating speed.

[0047] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A vacuum ion sputtering coating device for X-ray ceramic tubes, characterized in that: The invention comprises a base (6), characterized in that a sealing cover (7) is fixedly mounted on the base (6), a cover of the sealing cover (7) is provided with a sealing cover (8), a vertical mounting tube (13) is fixedly mounted at the center of the base (6), a target tube (19) is sleeved on the mounting tube (13), a rotating assembly capable of driving the target tube (19) to rotate is mounted on the base (6), a turntable (14) for placing a ceramic tube (1) is also mounted on the base (6), a cathode plate (17) attached to the inner wall of the target tube (19) is embedded on one side of the mounting tube (13), an anode plate (11) is mounted on the inner wall of one side of the sealing cover (7) corresponding to the cathode plate (17), a magnetron assembly (18) is also mounted in the mounting tube (13), and a vacuum tube (9) and an argon gas tube (10) are also connected to the top of the sealing cover (7).

2. A vacuum ion sputtering coating device for X-ray ceramic tube according to claim 1, characterized in that: The bottom of the installation tube (13) is sleeved with a lower rotating ring (20), and the lower rotating ring (20) is rotatably connected to the base (6). The top cover of the installation tube (13) is provided with an upper pressure cover (16), and the opposing surfaces of the upper pressure cover (16) and the lower rotating ring (20) are provided with an annular groove for clamping the target tube (19), so that different target tubes (19) can be easily disassembled and replaced to meet the requirements of coating of the insulating film (101) or the target sheet (303).

3. A vacuum ion sputtering coating device for X-ray ceramic tube according to claim 2, characterized in that: The rotating assembly comprises a transmission cavity (26) arranged in the base (6); an inner gear ring (25) extending into the transmission cavity (26) is fixed at the bottom of the lower rotating ring (20); an outer gear ring (23) is rotatably connected to the outer periphery of the inner gear ring (25) in the transmission cavity (26); a motor (12) is installed at the bottom of the base (6); an output end of the motor (12) extends into the transmission cavity (26) and is fixed with a gear (24); the gear (24) meshes with the outer gear ring (23) and the inner gear ring (25); a first gear is embedded at the top of the outer gear ring (23). A magnetic ring (22), a second magnetic ring (21) magnetically attracted to the first magnetic ring (22) is embedded at the bottom of the turntable (14), the motor (12) drives the gear (24) to rotate, and drives the lower turntable (20) to rotate through the inner gear ring (25), thereby driving the clamped target tube (13) to rotate, and the target tube (13) rotates evenly. At the same time, the outer gear ring (23) drives the turntable (14) to rotate synchronously through the magnetic attraction of the first magnetic ring (22) and the second magnetic ring (21), thereby driving the ceramic tube (1) to rotate, so that a uniform coating can be achieved on the inner surface of a circle.

4. The vacuum ion sputtering coating device for X-ray ceramic tube according to claim 1, characterized in that: The upper surface of the turntable (14) is paved with an anti-skid pad (15); the size of the turntable (14) can accommodate the placement of ceramic tubes (1) of different diameters, thereby increasing friction and enabling the ceramic tubes (1) to rotate synchronously with the turntable (14).

5. The vacuum ion sputtering coating device for X-ray ceramic tube according to claim 1, characterized in that: The magnetron assembly (18) is three vertically arranged magnetic strips, and the magnetic flux lines between the three magnetic strips can guide the target material atoms to move toward the inner wall of the ceramic tube (1).

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